JP2006046979A - Sample manufacturing substrate, liquid sample building-up method, sample manufacturing method and manufacturing method of sample manufacturing substrate - Google Patents

Sample manufacturing substrate, liquid sample building-up method, sample manufacturing method and manufacturing method of sample manufacturing substrate Download PDF

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Publication number
JP2006046979A
JP2006046979A JP2004225042A JP2004225042A JP2006046979A JP 2006046979 A JP2006046979 A JP 2006046979A JP 2004225042 A JP2004225042 A JP 2004225042A JP 2004225042 A JP2004225042 A JP 2004225042A JP 2006046979 A JP2006046979 A JP 2006046979A
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Japan
Prior art keywords
sample
substrate
liquid
concave
sample preparation
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Japanese (ja)
Inventor
Shigeru Suehara
茂 末原
Satoru Inoue
井上  悟
Jun Watanabe
遵 渡辺
Morimasa Fukuda
盛正 福田
Takeru Koike
長 小池
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National Institute for Materials Science
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National Institute for Materials Science
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample manufacturing substrate suitable for mixing multiple kinds of liquid raw materials by a combinatorial technique to independently build up many kinds of liquid samples different in mixing ratio on one substrate or obtaining dried or sintered samples by drying or sintering the built-up liquid samples, and its manufacturing method. <P>SOLUTION: The sample manufacturing substrate is constituted by providing a plurality of mutually parallel first recesses and a plurality of the mutually parallel second recesses crossing them to the surface of a substrate. The liquid sample building-up method is constituted by building up the liquid samples on a plurality of the crossing points of the first and second recesses of the sample manufacturing substrate. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、例えば、コンビナトリアル手法を用いて複数種の液状原料を混合して混合比
の異なる多種類の液状試料を一枚の基板に各々を独立させて盛り付けたり、盛り付けた液
状試料を乾燥した乾燥試料やそれらを焼結した焼結試料を得たりするのに適した試料作製
用基板と液状試料盛付方法及び試料の製造方法並びに試料作製用基板の製造方法に関する
In the present invention, for example, by using a combinatorial method, a plurality of types of liquid raw materials are mixed, and various types of liquid samples having different mixing ratios are separately placed on a single substrate, or the mounted liquid samples are dried. The present invention relates to a sample preparation substrate, a liquid sample assembling method, a sample manufacturing method, and a sample preparation substrate manufacturing method suitable for obtaining dry samples and sintered samples obtained by sintering them.

従来、多数の液状試料を一枚の基板に各々を独立させて盛り付けるための試料作製用基
板としては、試料を収納する凹部であるウエルが多数配列形成されたマイクロプレートが
知られている。例えば、ウエルの平面形状を円形にしたものや、四角形にしたものが知ら
れている(特許文献1)。上記マイクロプレートは、合成樹脂を、成形型を使用して製造
されるものが知られており、安価に大量生産することができるものである。
特開平9−68532号公報
2. Description of the Related Art Conventionally, as a sample preparation substrate for independently mounting a large number of liquid samples on a single substrate, a microplate in which a large number of wells, which are concave portions for storing samples, are formed is known. For example, a well having a circular planar shape or a rectangular shape is known (Patent Document 1). As the microplate, a synthetic resin manufactured using a mold is known, and can be mass-produced at a low cost.
JP-A-9-68532

しかしながら、少数の試料作製用基板を製造するだけであっても高価な金型を製作する
必要があることから、小ロットの製造には不向きな製造方法である。また、小ロットの製
造の場合、平面形状が円形や四角形のウエルを多数形成するために基板表面を加工する製
造方法では多くの工数が必要であった。
However, even if only a small number of sample preparation substrates are manufactured, it is necessary to manufacture an expensive mold, which is not suitable for manufacturing a small lot. In the case of manufacturing a small lot, the manufacturing method for processing the substrate surface in order to form a large number of wells having a circular shape or a square shape in plan view requires a large number of steps.

また、液状試料を高温で熱処理する場合には、試料作製用基板に耐熱性が必要となる。
例えば、複数種の液状無機物質試料を出発原料として化合物を試料作製用基板上に試料と
して生成する場合、複数種の液状無機物質試料を混合し、試料作製用基板に盛り付け、乾
燥・焼結することが必要となる。そのため、試料作製用基板に耐熱性が必要となる。特に
、金属酸化物を対象とする場合には、1000℃を超える高熱で試料を反応させる場合も
あり、その温度に耐える試料作製用基板が必要となる。
In addition, when a liquid sample is heat-treated at a high temperature, the sample preparation substrate needs to have heat resistance.
For example, when a compound is produced as a sample on a sample preparation substrate using a plurality of types of liquid inorganic material samples as starting materials, a plurality of types of liquid inorganic material samples are mixed, placed on the sample preparation substrate, dried and sintered. It will be necessary. Therefore, heat resistance is required for the sample preparation substrate. In particular, when a metal oxide is a target, a sample may be reacted at a high heat exceeding 1000 ° C., and a sample preparation substrate that can withstand that temperature is required.

このような耐熱性を有し、かつ、高温でも化学的に安定な素材としては、アルミナやジ
ルコニア等のセラミックや白金が知られている。これらの材料を、成形型を用いて精度よ
く成形するのは一般に困難である。例えば、セラミック素材を焼成前に成形型を用いる等
の方法で成形した後に焼成するのでは、セラミックの収縮のため精度よく試料作製用基板
を形成するのは難しい。そのため、一般にセラミックの焼成後に加工が行われる。しかし
、セラミックの焼成後の加工によって、平面形状が円形や四角形のウエルを多数配列形成
するのは、大きな工数を必要とし、非常に高価なものとなっていた。
As materials having such heat resistance and chemically stable even at high temperatures, ceramics such as alumina and zirconia, and platinum are known. It is generally difficult to accurately mold these materials using a mold. For example, if the ceramic material is fired after being molded by a method such as using a mold before firing, it is difficult to accurately form a sample preparation substrate due to ceramic shrinkage. Therefore, processing is generally performed after firing the ceramic. However, forming a large number of wells having a circular or square planar shape by processing after firing the ceramic requires a large number of man-hours and is very expensive.

試料作製用基板に精度が必要とされるのは以下の理由による。つまり、試料作製用基盤
に複数の試料を形成し、それぞれの試料を例えばX線で自動的に解析する場合、試料作製
用基板の正確な位置に試料が形成されていなければ、X線を試料の所定の位置に照射する
ことができず、正確なX線解析が不可能となるのである。また、例えば、電気伝導率の測
定のように、試料と端子の接触を利用する測定においても、端子と試料とが正確に接触し
なければ正しい物性評価が困難となるため、試料作製用基板に精度が必要とされることに
変わりはない。
The reason why accuracy is required for the sample preparation substrate is as follows. That is, when a plurality of samples are formed on the sample preparation substrate and each sample is automatically analyzed by, for example, X-rays, the X-rays are sampled if the sample is not formed at an accurate position on the sample preparation substrate. Therefore, it is impossible to irradiate a predetermined position, and accurate X-ray analysis becomes impossible. Also, for example, in measurement using contact between a sample and a terminal, such as measurement of electrical conductivity, it is difficult to evaluate the correct physical properties unless the terminal and the sample are in accurate contact. There is no change in the need for accuracy.

本発明は、上述の問題点を解決するためになされたものであって、小ロットの生産に適
しており、かつ、多数の液状試料を一枚の試料作製用基板に各々を独立させて盛り付けた
のち、溶媒を揮発させて乾燥した乾燥試料やそれらを高温で焼結した焼結試料を得るのに
適した試料作製用基板と、その試料作製用基板を利用した液状試料盛付方法及び試料の製
造方法、並びに試料作製用基板の製造方法を提供する。
The present invention has been made to solve the above-described problems, and is suitable for the production of small lots. In addition, a large number of liquid samples are individually arranged on a single sample preparation substrate. After that, a sample preparation substrate suitable for obtaining a dried sample obtained by volatilizing the solvent and drying and a sintered sample obtained by sintering them at a high temperature, and a liquid sample assembling method and sample using the sample preparation substrate And a method for manufacturing a sample preparation substrate are provided.

本発明は、基板表面に互いに交差する複数の凹条部を設けるだけで、多数の液状試料を
一枚の基板に各々を独立させて盛り付けることのできる試料作製用基板と、その試料作製
用基板を利用した液状試料盛付方法及び試料の製造方法、並びに試料作製用基板の製造方
法に関するものである。
The present invention provides a sample preparation substrate capable of independently placing a large number of liquid samples on a single substrate by simply providing a plurality of concave strips intersecting each other on the substrate surface, and the sample preparation substrate The present invention relates to a liquid sample assembling method, a sample manufacturing method, and a sample manufacturing substrate manufacturing method.

また、本発明の液状試料としては、盛り付けた後に加熱処理するものが好適に採用でき
、特に高温で加熱処理される液状無機物質試料が好適に採用できる。1枚の基板上に盛り
付けられる液状試料の数は、1度に分析できる対象試料の範囲を広げ、研究効率を高める
ために9個以上が好ましいが、36個以上であれば効果が大きい。また、液状試料を乾燥
又は焼結した結果得られる試料の必要量によって、液状試料の濃度と盛付量との関係が決
まる。液状試料の濃度は溶解度等の関係で一般的には決まらないが、盛付量としては、1
枚の基板上に一定数以上の盛付数を確保するために、5マイクロリットルから30マイク
ロリットル程度とすることが好ましい。
In addition, as the liquid sample of the present invention, one that is heat-treated after being placed can be suitably employed, and particularly a liquid inorganic material sample that is heat-treated at a high temperature can be suitably employed. The number of liquid samples placed on one substrate is preferably 9 or more in order to widen the range of target samples that can be analyzed at one time and increase research efficiency, but if it is 36 or more, the effect is great. Further, the relationship between the concentration of the liquid sample and the amount to be arranged is determined by the required amount of the sample obtained as a result of drying or sintering the liquid sample. The concentration of the liquid sample is not generally determined due to solubility, etc.
In order to secure a certain number or more of the number of plates on a single substrate, it is preferable that the number is about 5 to 30 microliters.

すなわち、本発明は、(1)基板の表面に複数の互いに平行な第一の凹条部とそれらに
交差する複数の互いに平行な第二の凹条部とが設けられていることを特徴とする試料作製
用基板、である。
That is, the present invention is characterized in that (1) a plurality of mutually parallel first recesses and a plurality of mutually parallel second recesses intersecting with each other are provided on the surface of the substrate. A sample preparation substrate.

第一及び第二の凹条部は型を利用して成型することもできるが、研磨や切削等の機械加
工やブラストやレーザー加工等によって成形することにより、小ロットの生産にも対応で
きる。また、セラミックのように焼成前に成形したのでは、焼成後の収縮により高精度を
得ることが困難な素材も容易に精度よく加工できる。
The first and second concave portions can be molded using a mold, but can be produced by small-lot production by molding by mechanical processing such as polishing or cutting, blasting or laser processing. In addition, if it is molded before firing like ceramic, a material that is difficult to obtain with high accuracy due to shrinkage after firing can be processed easily and accurately.

試料作製用基板の外形は、特に限定はされないが、平面視四角形の平板状とすると製造
が容易であり、取り扱いも容易なので好ましい。試料作製用基板の材料は、特に限定はさ
れないが、合成樹脂や金属、セラミック等とすることができる。特に、耐熱性が必要な場
合には、アルミナやジルコニアやシリコンといったセラミックや白金を使用することが好
ましい。第一の凹条部又は第二の凹条部は、試料作製用基板の側端まで設けられていても
よいし、側端部を残し中央部分だけに設けられていてもよい。
The outer shape of the sample preparation substrate is not particularly limited, but it is preferably a flat plate having a square shape in plan view because it is easy to manufacture and easy to handle. The material for the sample preparation substrate is not particularly limited, and may be synthetic resin, metal, ceramic, or the like. In particular, when heat resistance is required, it is preferable to use ceramic such as alumina, zirconia, or silicon, or platinum. The first groove portion or the second groove portion may be provided up to the side end of the sample preparation substrate, or may be provided only in the central portion while leaving the side end portion.

また、本発明は、(2)基材の表面に複数の互いに平行な第一の凹条部とそれらに交差
する複数の互いに平行な第二の凹条部とが設けられた試料作製用基板の、前記第一の凹条
部と第二の凹条部との複数の交点に液状試料を盛り付けることを特徴とする液状試料盛付
方法、である。
The present invention also provides (2) a substrate for preparing a sample in which a plurality of first parallel concave portions and a plurality of parallel second concave portions intersecting each other are provided on the surface of a base material. A liquid sample assembling method, characterized in that a liquid sample is arranged at a plurality of intersections of the first concave stripe portion and the second concave stripe portion.

複数の交点に液状試料を盛り付けると、液状試料は表面張力により液滴状に交点に保持
される。特に、試料作製用基板が液体と親和性のないものとなされていると効果的である
。具体的には、液体との接触角が60°以上であることが好ましく、105°以上であれ
ばさらに好ましい。このように、試料作製用基板を液体と親和性のないものとする手段と
しては、撥液性のある化学物質を表面に塗布する方法が簡便で、好適である。
When a liquid sample is arranged at a plurality of intersections, the liquid sample is held at the intersections in the form of droplets by surface tension. In particular, it is effective if the sample preparation substrate has no affinity for the liquid. Specifically, the contact angle with the liquid is preferably 60 ° or more, and more preferably 105 ° or more. As described above, as a means for making the sample preparation substrate incompatible with the liquid, a method of applying a liquid-repellent chemical substance to the surface is simple and preferable.

また、本発明は、(3)基材の表面に複数の互いに平行な第一の凹条部とそれらに交差
する複数の互いに平行な第二の凹条部とが設けられた試料作製用基板の、前記第一の凹条
部と第二の凹条部とで形成された複数の凸部に液状試料を盛り付けることを特徴とする液
状試料盛付方法、である。
The present invention also provides (3) a substrate for sample preparation in which a plurality of first parallel strips and a plurality of second parallel strips intersecting each other are provided on the surface of the substrate. A liquid sample assembling method, wherein a liquid sample is placed on a plurality of convex portions formed by the first concave stripe portion and the second concave stripe portion.

複数の凸部に液状試料を盛り付けると、液状試料は表面張力により液滴状に凸部に保持
される。特に、試料作製用基板が液体と親和性のないものとなされていると効果的である
。具体的には、液体との接触角が60°以上であることが好ましく、105°以上であれ
ばさらに好ましい。盛り付けられた液状試料を乾燥・焼結して得られる試料は試料作製用
基板の凸部に堆積されることにより、X線等の電磁波による測定の場合、試料に対する入
射角の範囲を大きくすることができる。
When a liquid sample is placed on a plurality of protrusions, the liquid sample is held in the protrusions in the form of droplets by surface tension. In particular, it is effective if the sample preparation substrate has no affinity for the liquid. Specifically, the contact angle with the liquid is preferably 60 ° or more, and more preferably 105 ° or more. The sample obtained by drying and sintering the placed liquid sample is deposited on the convex part of the sample preparation substrate, so that the range of the incident angle with respect to the sample is increased in the case of measurement by electromagnetic waves such as X-rays. Can do.

また、本発明は、(4)上記(2)又は(3)いずれかの液状試料盛付方法により盛り
付けられた液状試料の溶媒を揮発させることを特徴とする試料の製造方法、である。
In addition, the present invention is (4) a method for producing a sample, characterized by volatilizing a solvent of a liquid sample placed by any of the liquid sample placement methods (2) or (3) above.

また、本発明は、(5)上記(2)又は(3)いずれかの液状試料盛付方法により盛り
付けられた液状試料の溶媒を揮発させ、さらに、焼結することを特徴とする試料の製造方
法、である。
In addition, the present invention provides (5) Sample production characterized by volatilizing the solvent of the liquid sample placed by the liquid sample placement method of either (2) or (3) above and further sintering it. Method.

また、本発明は、(6)平板状の基板の表面を加工することにより複数の互いに平行な
第一の凹条部、及び、それらに交差する複数の互いに平行な第二の凹条部を形成すること
を特徴とする試料作製用基板の製造方法、である。
In addition, the present invention provides (6) a plurality of first concave ridges parallel to each other by processing the surface of a flat substrate, and a plurality of second parallel ridges intersecting each other. A method for manufacturing a sample preparation substrate, comprising: forming a sample preparation substrate.

平板状の基板の表面の加工方法としては、特に限定されないが、研磨や切削等の機械加
工の外に、ブラストやレーザー加工等の公知方法を採用することができる。
The processing method of the surface of the flat substrate is not particularly limited, but a known method such as blasting or laser processing can be employed in addition to mechanical processing such as polishing and cutting.

本発明の試料作製用基板は、基板の表面に複数の互いに平行な第一の凹条部とそれらに
交差する複数の互いに平行な第二の凹条部を設けるだけで試料作製用基板とすることがで
きるので、成形型を用いることなく製造することが容易である。つまり、小ロットの製造
に適している。また、成形型では精密な製造が困難なセラミック等であっても、加工によ
り高精度な試料作製用基板を製造することができる。また、そのため、試料作製用基板の
正確な位置に液状試料を盛り付けることができ、そのため、液状試料を乾燥・焼結した試
料を試料作製用基板の正確な位置に堆積させることができる。
The sample preparation substrate of the present invention is a sample preparation substrate simply by providing a plurality of mutually parallel first recesses and a plurality of mutually parallel second recesses intersecting them on the surface of the substrate. Therefore, it is easy to manufacture without using a mold. That is, it is suitable for manufacturing a small lot. Moreover, even if it is a ceramic etc. which are difficult to manufacture accurately with a forming die, a highly accurate sample preparation substrate can be manufactured by processing. Therefore, the liquid sample can be placed at an accurate position of the sample preparation substrate, and therefore, a sample obtained by drying and sintering the liquid sample can be deposited at an accurate position of the sample preparation substrate.

このように、試料作製用基板が精度よく製造されていることにより、分析装置や測定装
置に対して試料作製用基板を正確に位置決めすることができる。また、試料作製用基板の
正確な位置に試料が堆積していれば、分析や測定が行われる正確な位置に試料を移動させ
ることができる。また、逆に、試料に対して分析点や測定点を移動させることができる。
その結果、正確な分析や物性の測定が可能となる。
Thus, since the sample preparation substrate is manufactured with high accuracy, the sample preparation substrate can be accurately positioned with respect to the analysis apparatus and the measurement apparatus. Further, if the sample is deposited at an accurate position of the sample preparation substrate, the sample can be moved to an accurate position where analysis or measurement is performed. Conversely, analysis points and measurement points can be moved with respect to the sample.
As a result, accurate analysis and measurement of physical properties are possible.

(実施の形態1)
以下、本発明の実施の形態1を、図面を参照して説明する。図1は、本発明の試料作製
用基板の実施形態1を示す平面図であり、図2は、図1のA−A線断面図である。
(Embodiment 1)
Embodiment 1 of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing Embodiment 1 of the sample preparation substrate of the present invention, and FIG. 2 is a cross-sectional view taken along line AA of FIG.

図1、図2に示すように、基板の表面2に6本の互いに平行な第一の凹条部5,5,・
・・とそれらに直交する6本の互いに平行な第二の凹条部6,6・・・とが設けられて試
料作製用基板1が形成されている。第一の凹条部5,5,・・・と第二の凹条部6,6・
・・はそれぞれ試料作製用基板1の側端まで断面が長方形に形成されている。
As shown in FIG. 1 and FIG. 2, six parallel first recesses 5, 5,.
.. And six parallel second concave strips 6, 6... Orthogonal to them are provided to form the sample preparation substrate 1. The first groove 5, 5, ... and the second groove 6, 6,
.. Each has a rectangular cross section up to the side edge of the sample preparation substrate 1.

第一の凹条部5と第二の凹条部6の断面形状は長方形に限らず、正方形や、上に開く半
円形であってもよいし、底面部だけが上に開く半円形となされていてもよい。また、第一
の凹条部5と第二の凹条部6の深さや断面形状は同一であってもよいし、異なっていても
よい。
The cross-sectional shapes of the first groove 5 and the second groove 6 are not limited to a rectangle, but may be a square or a semicircle that opens upward, or only a bottom surface that is a semicircle that opens upward. It may be. Moreover, the depth and cross-sectional shape of the 1st groove part 5 and the 2nd groove part 6 may be the same, and may differ.

また、第一の凹条部5と第二の凹条部6とは直交していてもよいし、所定の角度で交差
していてもよい。また、第一の凹条部5と第二の凹条部6の本数は、試料作製用基板1の
平面寸法によっても異なるが、数多くの液状試料を盛り付け、試料を同時に製造し、測定
や評価を同時に効率的に行うために、各4本以上であることが好ましく、各6本以上であ
ればさらに好ましい。また、第一の凹条部5と第二の凹条部6の本数は同数である必要は
なく、試料製造装置や測定・評価装置に合わせて任意に設定することができる。
Moreover, the 1st groove part 5 and the 2nd groove part 6 may be orthogonal, and may cross | intersect by the predetermined | prescribed angle. In addition, the number of the first groove portions 5 and the second groove portions 6 varies depending on the planar dimensions of the sample preparation substrate 1, but a large number of liquid samples are arranged, samples are simultaneously manufactured, and measurement and evaluation are performed. Are preferably 4 or more each, more preferably 6 or more each. Moreover, the number of the 1st groove part 5 and the 2nd groove part 6 does not need to be the same number, and can be arbitrarily set according to a sample manufacturing apparatus or a measurement / evaluation apparatus.

このようにして形成された試料作製用基板1の第一の凹条部5,5,・・・と第二の凹
条部6,6,・・・との36の交点3,3,・・・を液状試料盛り付け場所である試料形
成部とすることができる。
36 of the first concave strips 5, 5,... Of the sample preparation substrate 1 formed in this way and the second concave strips 6, 6,. .. Can be used as a sample forming portion which is a place where a liquid sample is placed.

互いに隣接する凹条部5と凹条部5の中心線間の距離は凹条部5の幅の1.5倍以上1
0倍以下、同様に、互いに隣接する凹条部6と凹条部6の中心間の距離は凹条部6の幅の
1.5倍以上10倍以下となされていると、液状試料を試料形成部である交点3,3,・
・に盛り付けた際、表面張力によって液滴状になっている液状試料を互いに接触すること
なく盛り付けることができるので好適である。つまり、試料形成部(交点3)の面積より
水平投影面積の大きい液滴として液状試料を盛り付けることができるので、液状試料の溶
媒を揮発させた乾燥試料の堆積量を大きくすることができる。
The distance between the adjacent groove 5 and the center line of the groove 5 is 1.5 times the width of the groove 5 or more.
If the distance between the center of the recess 6 and the recess 6 adjacent to each other is not less than 0 times, and the width of the recess 6 is not less than 1.5 times and not more than 10 times the liquid sample, Intersections 3, 3,.
It is preferable because liquid samples that are in the form of droplets due to surface tension can be placed without contact with each other. That is, since the liquid sample can be arranged as droplets having a horizontal projection area larger than the area of the sample forming portion (intersection 3), the amount of the dried sample deposited by volatilizing the solvent of the liquid sample can be increased.

(実施の形態2)
次に、本発明の他の実施の形態を、図面を参照して説明する。図3は、本発明の試料作
製用基板の実施形態2を示す平面図である。
(Embodiment 2)
Next, another embodiment of the present invention will be described with reference to the drawings. FIG. 3 is a plan view showing Embodiment 2 of the sample preparation substrate of the present invention.

図3に示すように、基板の表面2に6本の互いに平行な第一の凹条部51,51,・・
・とそれらに直交する6本の互いに平行な第二の凹条部61,61・・・とが設けられて
試料作製用基板11が形成されている。第一の凹条部51,51,・・・と第二の凹条部
61,61,・・・はそれぞれ試料作製用基板11の側端まで断面が長方形に形成されて
いる。
As shown in FIG. 3, six parallel first recesses 51, 51,.
.. And six parallel second recesses 61, 61... Perpendicular to them are provided to form the sample preparation substrate 11. The first groove portions 51, 51,... And the second groove portions 61, 61,... Have a rectangular cross section up to the side edge of the sample preparation substrate 11, respectively.

ここで、第一の凹条部51と第二の凹条部61とは直交していてもよいし、所定の角度
で交差していてもよい。また、第一の凹条部51と第二の凹条部61の本数は、試料作製
用基板11の平面寸法によっても異なるが、数多くの液状試料を盛り付け、試料を同時に
製造し、測定や評価を同時に効率的に行うために、特に限定はされないが、各4本以上で
あることが好ましく、各6本以上であればさらに好ましい。また、第一の凹条部51と第
二の凹条部61の本数は同数である必要はなく、試料製造装置や測定・評価装置に合わせ
て任意に設定することができる。
Here, the 1st groove part 51 and the 2nd groove part 61 may be orthogonally crossed, and may cross | intersect by the predetermined | prescribed angle. In addition, the number of the first groove portions 51 and the second groove portions 61 varies depending on the planar dimensions of the sample preparation substrate 11, but a large number of liquid samples are arranged and the samples are simultaneously manufactured for measurement and evaluation. In order to efficiently carry out the above, there is no particular limitation, but it is preferably 4 or more, more preferably 6 or more. Moreover, the number of the 1st groove part 51 and the 2nd groove part 61 does not need to be the same number, and can be arbitrarily set according to a sample manufacturing apparatus or a measurement / evaluation apparatus.

このようにして形成された試料作製用基板1の第一の凹条部51,51,・・・と第二
の凹条部61,61,・・・・とで形成された25個の凸部4,4,・・・を、液状試料
を盛り付ける試料形成部とすることができる。
The first concave strips 51, 51,... And the second concave strips 61, 61,. The parts 4, 4,... Can be sample forming parts for placing a liquid sample.

互いに隣接する凸部4の中心間の距離は凸部4に外接する円の直径の1.5倍以上10
倍以下となされていると、液状試料を試料形成部である凸部4,4,・・に盛り付けた際
、表面張力によって液滴状になっている液状試料を互いに接触することなく盛り付けるこ
とができるので好適である。つまり、試料と形成部である凸部4の面積より水平投影面積
の大きい液滴として液状試料を盛り付けることができるので、液状試料の溶媒を揮発させ
た乾燥試料の堆積量を大きくすることができる。
The distance between the centers of the convex portions 4 adjacent to each other is not less than 1.5 times the diameter of the circle circumscribing the convex portion 4.
If it is less than double, when the liquid sample is placed on the projections 4, 4,... That are the sample forming part, the liquid samples that are in the form of droplets due to surface tension can be placed without contacting each other. This is preferable because it is possible. That is, since the liquid sample can be arranged as a droplet having a horizontal projection area larger than the area of the convex portion 4 as the sample and the forming portion, the amount of the dry sample deposited by volatilizing the solvent of the liquid sample can be increased. .

図1、図2を参照して本発明の実施例1を説明する。本実施例は、3成分系の無機物質
を異なる比率で混合し、高温で焼結させることにより、どのような結晶相が組成図上のど
の範囲で得られるかを明らかにするために試料作製を行い、結晶相の分析を行ったもので
ある。試料作製用基板1の材質として、純度99.9%のアルミナを採用した。平面寸法
が35mm×35mm、厚さが5mmのアルミナ板の表面に幅2mm、深さ0.5mmの
第一の凹条部5,5,・・を研磨することにより形成した。また、第一の凹条部5,5,
・・と直交するように幅2mm、深さ0.5mmの第二の凹条部6,6,・・を研磨する
ことにより形成した。
A first embodiment of the present invention will be described with reference to FIGS. In this example, sample preparation was performed in order to clarify what crystalline phase can be obtained in which range on the composition diagram by mixing ternary inorganic substances at different ratios and sintering at high temperature. The crystal phase was analyzed. As the material for the sample preparation substrate 1, alumina having a purity of 99.9% was employed. The first concave strips 5, 5,... Having a width of 2 mm and a depth of 0.5 mm were polished on the surface of an alumina plate having a plane dimension of 35 mm × 35 mm and a thickness of 5 mm. Also, the first concave strips 5, 5,
The second concave strips 6, 6,... Having a width of 2 mm and a depth of 0.5 mm are formed by polishing so as to be orthogonal to.

互いに隣接する第一の凹条部5、凹条部5の中心線間の距離は凹条部5の幅の2.5倍
の5mmに、同様に、互いに隣接する第二の凹条部6、凹条部6の中心間の距離は凹条部
6の幅の2.5倍の5mmとした。また、第一の凹条部5,5,・・と第二の凹条部6,
6,・・との36の交点3,3,・・・を液状試料盛り付け場所である試料形成部とした
The distance between the first concave stripes 5 adjacent to each other and the center line of the concave stripes 5 is 5 mm, which is 2.5 times the width of the concave stripes 5, and similarly, the second concave stripes 6 adjacent to each other. The distance between the centers of the groove portions 6 was 5 mm, which is 2.5 times the width of the groove portions 6. In addition, the first concave strips 5, 5,... And the second concave strip 6,
36 intersections 3, 6,... Are set as sample forming portions as liquid sample placement locations.

液状試料としては、(1)酢酸クロム(Cr(OCOCH)の0.5mol/l
水溶液、(2)水酸化リチウム水和物(LiOH・HO)の1.0mol/l水溶液及
び(3)水を分散媒とした酸化チタン(TiO)スラリー濃度1.0mol/lの混合
比を変えたものを異なる混合容器に配合し、撹拌混合したものを用いた。
As a liquid sample, (1) 0.5 mol / l of chromium acetate (Cr (OCOCH 3 ) 3 )
Mixing of aqueous solution, (2) 1.0 mol / l aqueous solution of lithium hydroxide hydrate (LiOH.H 2 O) and (3) titanium oxide (TiO 2 ) slurry concentration 1.0 mol / l with water as dispersion medium What changed ratio was mix | blended with the different mixing container, and what was stirred and mixed was used.

分注ピペットにより20μlの上記液状試料を混合容器から秤量し、試料形成部である
交点3,3,・・・に盛り付けた。盛り付けられた液状試料は、交点3に保持され、多少
扁平した液滴を形成した。隣接する液滴同士が接触することはなかった。
20 μl of the above liquid sample was weighed from the mixing container with a dispensing pipette and placed at intersections 3, 3,. The placed liquid sample was held at the intersection 3 to form a slightly flat droplet. Adjacent droplets were not in contact with each other.

次に、液状試料が盛り付けられた試料作製用基板1を90℃に加熱したホットプレート
上に置き、溶媒である水を揮発させ乾燥試料を得た。乾燥試料は全て、試料形成部(交点
3)に堆積させることができた。
Next, the sample preparation substrate 1 on which the liquid sample was placed was placed on a hot plate heated to 90 ° C., and water as a solvent was volatilized to obtain a dry sample. All the dried samples could be deposited on the sample forming part (intersection 3).

さらに、乾燥試料を、絶対温度で、1173度、1273度、1373度で3時間焼成
し、焼成試料を得た。焼結試料は全て、試料形成部(交点3)に堆積させることができた
。これらの試料をX線で解析したところ、ラムスデライト型結晶相が観測された。
Furthermore, the dried sample was calcined at 1173 degrees, 1273 degrees, and 1373 degrees at an absolute temperature for 3 hours to obtain a calcined sample. All sintered samples could be deposited on the sample forming part (intersection 3). When these samples were analyzed by X-ray, a ramsdellite type crystal phase was observed.

図3を参照して本発明の他の実施例を説明する。試料作製用基板11の材質は、純度9
9.5%のアルミナ(マシナブルセラミック)とした。平面寸法が35mm×35mm、
厚さが5mmのアルミナ板の表面に幅3.5mm、深さ0.5mmの互いに平行な第一の
凹条部51,51,・・を6本、切削加工により形成した。また、第一の凹条部51,5
1,・・と直交するように幅3.5mm、深さ0.5mmの互いに平行な第二の凹条部6
1,61,・・を切削加工により形成した。
Another embodiment of the present invention will be described with reference to FIG. The material of the substrate 11 for sample preparation is purity 9
9.5% alumina (machinable ceramic) was used. Plane dimension is 35mm x 35mm,
On the surface of an alumina plate having a thickness of 5 mm, six first concave strips 51, 51,... Having a width of 3.5 mm and a depth of 0.5 mm were formed by cutting. Also, the first concave strips 51, 5
1 and .. 2nd concave-line part 6 parallel to each other of width 3.5mm and depth 0.5mm so as to be orthogonal to
1, 61,... Were formed by cutting.

また、第一の凹条部51,51,・・と第二の凹条部61,61,・・とで形成された
25の凸部4を液状試料を盛り付ける場所である試料形成部とした。試料形成部(凸部4
)の平面寸法は2mm×2mmとした。
Further, the 25 convex portions 4 formed by the first concave stripe portions 51, 51,... And the second concave stripe portions 61, 61,. . Sample forming part (convex part 4
) Was set to 2 mm × 2 mm.

液状試料としては、(1)酢酸クロム(Cr(OCOCH)の0.5mol/l
水溶液、(2)水酸化リチウム水和物(LiOH・HO)の1.0mol/l水溶液及
び(3)水を分散媒とした酸化チタン(TiO)スラリー濃度1.0mol/lの混合
比を変えたものを異なる混合容器に配合し、撹拌混合したものを用いた。
As a liquid sample, (1) 0.5 mol / l of chromium acetate (Cr (OCOCH 3 ) 3 )
Mixing of aqueous solution, (2) 1.0 mol / l aqueous solution of lithium hydroxide hydrate (LiOH.H 2 O) and (3) titanium oxide (TiO 2 ) slurry concentration 1.0 mol / l with water as dispersion medium What changed ratio was mix | blended with the different mixing container, and what was stirred and mixed was used.

分注ピペットにより10μlの上記液状試料を混合容器から秤量し、試料形成部(凸部
4,4,・・・)に盛り付けた。盛り付けられた液状試料は、試料形成部(凸部4)に表
面張力により保持され、多少扁平した液滴を形成した。隣接する液滴同士は、接触するこ
とはなかった。
10 μl of the above liquid sample was weighed from the mixing container with a dispensing pipette and placed on the sample forming part (convex parts 4, 4,...). The placed liquid sample was held in the sample forming part (convex part 4) by surface tension, and a slightly flat liquid droplet was formed. Adjacent droplets did not contact each other.

次に、液状試料が盛り付けられた試料作製用基板11を90℃に加熱したホットプレー
ト上に置き、溶媒である水を揮発させ乾燥試料を得た。乾燥試料は全て、試料形成部(凸
部4)に堆積させることができた。
Next, the sample preparation substrate 11 on which the liquid sample was placed was placed on a hot plate heated to 90 ° C., and water as a solvent was volatilized to obtain a dry sample. All the dried samples could be deposited on the sample forming part (convex part 4).

さらに、乾燥試料を、絶対温度で、1173度、1273度、1373度で3時間焼成
し、焼成試料を得た。焼結試料は全て、試料形成部(凸部4)に堆積させることができた
。これらの試料をX線で解析したところ、実施例1と同様なラムスデライト型結晶相が観
測された。
Furthermore, the dried sample was calcined at 1173 degrees, 1273 degrees, and 1373 degrees at an absolute temperature for 3 hours to obtain a calcined sample. All of the sintered samples could be deposited on the sample forming part (convex part 4). When these samples were analyzed by X-ray, the same ramsdellite type crystal phase as in Example 1 was observed.

以上、本発明の実施例を図面により説明したが、本発明の具体的構成はこの実施例に限
られるものではなく、本発明の要旨を逸脱しない範囲の設計の変更等があっても本発明に
含まれる。
Although the embodiments of the present invention have been described with reference to the drawings, the specific configuration of the present invention is not limited to these embodiments, and the present invention can be changed even if there is a design change or the like without departing from the gist of the present invention. include.

例えば、試料作製用基板は正方形である必要はなく、長方形であってもよいし、円形で
あってもよい。また、試料作製用基板の素材は単一である必要はなく、例えば、アルミナ
やジルコニア等セラミック製の試料作製用基板の表面に白金を蒸着させ、液状試料との反
応性を小さくしたり、試料作製用基板の表面に導電性を付与したりすることもできる。
For example, the sample preparation substrate does not need to be square, and may be rectangular or circular. The material for the sample preparation substrate does not need to be a single material. For example, platinum is deposited on the surface of a sample preparation substrate made of ceramic such as alumina or zirconia to reduce the reactivity with the liquid sample, Conductivity can be imparted to the surface of the manufacturing substrate.

各種試料作製用基板を小ロットで製造できるので、実験内容に最適な試料作製用基板を
設計、製造できる。その結果、研究開発の効率を向上させることができる。また、試料作
製用基板の材料が限定されることがないので、広範囲な種類の液状試料を、その後の熱処
理等の各種処理を前提に盛り付けることができる。つまり、各種試料の分析や新規物質の
合成のためのコンビナトリアル手法を効率的に行うことができる。
Since various sample preparation substrates can be manufactured in a small lot, it is possible to design and manufacture a sample preparation substrate optimal for the experiment contents. As a result, the efficiency of research and development can be improved. In addition, since the material for the sample preparation substrate is not limited, a wide variety of liquid samples can be arranged on the premise of various processes such as a subsequent heat treatment. That is, combinatorial techniques for analyzing various samples and synthesizing new substances can be efficiently performed.

本発明の試料作製用基板の実施形態1を示す平面図である。It is a top view which shows Embodiment 1 of the board | substrate for sample preparation of this invention. 図1のA−A線断面図である。It is the sectional view on the AA line of FIG. 本発明の試料作製用基板の実施形態2を示す平面図である。It is a top view which shows Embodiment 2 of the board | substrate for sample preparation of this invention.

符号の説明Explanation of symbols

1,11 試料作製用基板
2 基板表面
3 交点(試料形成部)
4 凸部(試料形成部)
5,51 第一の凹条部
6,61 第二の凹条部
1,11 Sample preparation substrate
2 Substrate surface
3 Intersection (sample formation part)
4 Convex part (sample forming part)
5,51 First groove 6,61 Second groove

Claims (6)

基板の表面に複数の互いに平行な第一の凹条部とそれらに交差する複数の互いに平行な
第二の凹条部とが設けられていることを特徴とする試料作製用基板。
A substrate for preparing a sample, wherein a plurality of mutually parallel first recesses and a plurality of mutually parallel second recesses intersecting with each other are provided on the surface of the substrate.
基材の表面に複数の互いに平行な第一の凹条部とそれらに交差する複数の互いに平行な
第二の凹条部とが設けられた試料作製用基板の、前記第一の凹条部と第二の凹条部との複
数の交点に液状試料を盛り付けることを特徴とする液状試料盛付方法。
The first concave portion of the sample preparation substrate, wherein a plurality of first parallel concave portions and a plurality of parallel second concave portions intersecting each other are provided on the surface of the substrate. A liquid sample assembling method, wherein a liquid sample is arranged at a plurality of intersections between the first concave groove portion and the second concave stripe portion.
基材の表面に複数の互いに平行な第一の凹条部とそれらに交差する複数の互いに平行な
第二の凹条部とが設けられた試料作製用基板の、前記第一の凹条部と第二の凹条部とで形
成された複数の凸部に液状試料を盛り付けることを特徴とする液状試料盛付方法。
The first concave portion of the sample preparation substrate, wherein a plurality of first parallel concave portions and a plurality of parallel second concave portions intersecting each other are provided on the surface of the substrate. A liquid sample assembling method, comprising: placing a liquid sample on a plurality of convex portions formed by the second concave portion and the second concave portion.
請求項2又は3記載の液状試料盛付方法により盛り付けられた前記液状試料の溶媒を揮発
させることを特徴とする試料の製造方法。
A method for producing a sample, comprising volatilizing a solvent of the liquid sample placed by the liquid sample placing method according to claim 2.
請求項2又は3記載の液状試料盛付方法により盛り付けられた前記液状試料の溶媒を揮発
させ、さらに、焼結することを特徴とする試料の製造方法。
A method for producing a sample, comprising: volatilizing a solvent of the liquid sample placed by the liquid sample placing method according to claim 2 or 3 and further sintering the solvent.
平板状の基板の表面を加工することにより複数の互いに平行な第一の凹条部、及び、そ
れらに交差する複数の互いに平行な第二の凹条部を形成することを特徴とする試料作製用
基板の製造方法。

Sample preparation characterized by forming a plurality of mutually parallel first concave ridges and a plurality of mutually parallel second concave ridges intersecting with each other by processing the surface of a flat substrate Manufacturing method for industrial use.

JP2004225042A 2004-08-02 2004-08-02 Sample manufacturing substrate, liquid sample building-up method, sample manufacturing method and manufacturing method of sample manufacturing substrate Pending JP2006046979A (en)

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Publication Number Publication Date
JP2006046979A true JP2006046979A (en) 2006-02-16

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ID=36025708

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010281655A (en) * 2009-06-04 2010-12-16 Aoi Electronics Co Ltd Device and method for immobilization of fine specimen
JP2012230112A (en) * 2012-06-22 2012-11-22 Aoi Electronics Co Ltd Device and method for immobilization of fine specimen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010281655A (en) * 2009-06-04 2010-12-16 Aoi Electronics Co Ltd Device and method for immobilization of fine specimen
JP2012230112A (en) * 2012-06-22 2012-11-22 Aoi Electronics Co Ltd Device and method for immobilization of fine specimen

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