JP2006041126A - Operation/display device, method for display, and display program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an operation/display device to which a plurality of different kinds of jobs to execute like a chain. <P>SOLUTION: The different kinds of jobs such as exposure treatment and instrumentation treatment (alignment) by an exposure apparatus and calibrate treatments (calibration), calibration treatment (calibration) and adjusting treatment of the optical system of the exposure apparatus are simultaneously reserved and registered through a key board etc. and the state of the reservation registration is displayed on a job list display screen 50. The reserved and registered jobs are transferred to be executed like a chain, and disappears from the screen 50 when the execution is completed (the job is completed). On the screen 50, a job list display unit 51, a selected job detail display unit 52, a job selection button 53, a job state transition chart display unit 54, and a command panel operation part 55 are displayed simultaneously. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention displays, for example, the operation contents of a semiconductor-related manufacturing apparatus such as an exposure apparatus used in a lithography process for manufacturing a semiconductor element, a liquid crystal display element, an imaging element such as a CCD, or a thin film magnetic head. -It is related with a display apparatus, a display method, and a display program.

  An exposure / exposure device used in a lithography process, which manufactures semiconductor elements by exposing and transferring a pattern on a mask to a photosensitive substrate (wafer coated with a photosensitive resin), which is an object to be exposed, is an operation / display device. An operation panel (control console: console) is arranged, and various operations are instructed to the exposure apparatus via this operation panel. In the exposure apparatus, a program for performing an operation instructed via the operation panel is called, and on the basis of this program, a reticle stage on which a reticle as a mask is placed, a wafer stage on which a wafer is placed, a reticle An exposure process is performed by controlling a projection optical system that projects and exposes the pattern on the wafer.

  Conventionally, on this type of operation panel, for example, a job list in which a plurality of commands to be given to the exposure apparatus and job names that are a collection of parameters are listed is displayed, and a job to be executed is displayed from the displayed job list. There has been proposed one that is configured to be selected and executed by an exposure apparatus (see Patent Document 1).

  A console unit for displaying a list of various jobs that can be selected, selecting a job to be executed from the list, and displaying an exposure layout based on parameters necessary for executing the job; A configuration is also proposed in which a list of jobs and an exposure layout of a selected job are displayed on the same screen (see Patent Document 2).

  In the conventional operation panels proposed so far including the operation panel described above, a plurality of exposure processing jobs are instructed in advance, and a desired job is selected from the job list and executed. However, the processing is different from the exposure processing, for example, the measurement of the dimensions of the wafer as the substrate, the measurement processing of the mounting position of the wafer placed on the wafer stage, or the optical equipped in the exposure apparatus. Jobs such as system calibration processing cannot be specified on the same screen.

  Also, while a job is being executed, even if it is the same type of job, another job cannot be added and instructed, and after the job being executed is completed, another job to be executed next must be instructed. Absent. For example, after confirming that the job being executed on the host computer is completed, a job instruction acceptance permission signal is sent to the operation panel. You must indicate a job. That is, the job must be executed by switching the execution operation screen for each job.

  Furthermore, the screen must be switched one by one, separately from the job execution operation screen and the screen displaying the job status transition.

  As described above, the operation panel described above is disadvantageous in that the contents of the job to be instructed are limited and the operation for adding the job is restricted, and the operating rate of the exposure apparatus is improved.

JP-A-4-64215 JP-A-8-153671

  The present invention has been made in view of such circumstances, and the operating rate of an apparatus that performs processing of registering a plurality of different types of jobs and performing chained execution to expose and transfer a pattern on a mask onto an exposure object. An object is to provide an operation / display device, a display method, and a display program.

  In the present invention, the exposure apparatus is equipped with a transfer system (for example, a wafer loader) that loads an unexposed wafer, which is an exposure object, onto the wafer stage, and unloads the exposed wafer from the wafer stage. However, the position and state of the wafer in the transfer system (for example, whether the wafer is placed on the load slider or loaded from the load slider onto the wafer stage) Operation / display device capable of displaying the processing status of the wafer and confirming the position and position of the wafer before unloading and rejecting the wafer. It is an object to provide a display method and a display program.

  In the present invention, when a wafer is taken out by a load robot from a storage device (for example, front opening unified pod: hereinafter abbreviated as “FOUP”) that stores a plurality of unexposed wafers as exposure objects. An object is to provide an operation / display device, a display method, and a display program capable of confirming the state of the FOUP and performing operations such as forcibly removing, releasing, or recreating the FOUP carrier. To do.

  In the present invention, the imaging object is monitored while monitoring the imaging image of the imaging object (for example, a mask or a wafer that is the exposure object) in an apparatus that performs a process of exposing and transferring the pattern on the mask to the exposure object. An object is to provide an operation / display device, a display method, and a display program capable of operating a moving operation, a moving speed setting, position coordinate display, switching of an imaging device (ITV monitor), and the like.

  The operation / display device according to claim 1 of the present invention that achieves the above object is an operation / display device equipped in an apparatus that performs a process of exposing and transferring a pattern on a mask to an exposure object, and the like. A feature is that a plurality of jobs of different command types performed by the apparatus are input, a list of these input jobs is displayed on the screen at the same time, and the job is executed.

  2. The operation / display apparatus according to claim 1, wherein, for example, the job list includes an input type, identification name, file name, recipe name, status, input time, start time, reticle name, or comment of the job. Including a job input execution button, job deletion execution button, and other operation unit images, as well as a job state transition diagram that displays which job is currently being executed, which job is waiting, and which job has been completed Any or all of them may be displayed simultaneously with the list of jobs.

  The operation / display device according to claim 3 of the present invention that achieves the above object is an operation / display device provided in an apparatus that performs a process of exposing and transferring a pattern on a mask to an exposure object, and the like. The position information of the transport target object including the exposure target object transported to the processing apparatus and the information of the transport target object including the exposure target object at the position are simultaneously displayed on the screen. To do.

  4. The operation / display device according to claim 3, wherein, for example, the information of the conveyance object including the exposure object includes inline signal information, an exposure object identification name, a location identification name, and a processing state of the exposure object. And a job identification name, information on the connection state between the apparatus that performs the processing and the transport system that transports the exposure target to the apparatus, and the exposure target that is carried into the apparatus that performs the processing Any or all of the images of various operation buttons such as an unload execution button, a reject execution button, and a job deletion execution button, the position information of the transfer object including the exposure object, and the transfer object itself including the exposure object The information may be displayed at the same time (claim 4).

  The operation / display apparatus according to claim 5 of the present invention that achieves the above object is an operation / display apparatus equipped in an apparatus that performs a process of exposing and transferring a pattern on a mask to an exposure object, Information about each state of the storage device that is stored in a plurality of exposure objects and is changed to a plurality of states is displayed on a screen.

  6. The operation / display device according to claim 5, for example, a slot number in the storage device that stores the exposure object, a state of the slot, presence / absence information of the exposure object in the storage device, The identification name of the exposure object stored in the storage device, the location identification name, the identification name of the storage device carrier, the processing state of the exposure object, and the availability state of the load port of the storage device, Storage device carrier access status, storage device carrier installation information, job identification name, storage device carrier cancel execution button, release execution button, recreate execution button, service mode change button, access mode change button, etc. Any or all of the images of the various operation units may be displayed simultaneously with the status information of the storage device. 6).

  The operation / display device according to claim 7 of the present invention that achieves the above object is an operation / display device provided in an apparatus that performs a process of exposing and transferring a pattern on a mask to an exposure object, and the like. An imaging image obtained by imaging an imaging object including the exposure object in an apparatus that performs processing or the like by an imaging device, an image of an operation unit that moves the imaged imaging object in a predetermined direction, or the imaging object The image of the operation unit to be moved to a preset position is displayed on the screen at the same time.

  8. The operation / display device according to claim 7, for example, an image of a position coordinate display unit of the imaged imaging object, an image of a moving speed setting unit of the imaging object, and a switching setting unit of the imaging device Any one or all of the image and the image of the switching setting unit of the optical shutter equipped in the imaging apparatus may be displayed simultaneously with the captured image and the image of any one of the operation units. Item 8).

  The operation / display apparatus according to any one of claims 1 to 8, wherein the operation / display apparatus includes a touch panel (claim 9).

  The operation / display device according to any one of claims 1 to 9, wherein the device that performs processing or the like may be a semiconductor manufacturing related device such as a semiconductor product inspection machine, a measurement machine, or a processing machine. Item 10).

  A display method according to an eleventh aspect of the present invention that achieves the above object is a display method for displaying an operation content of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure target, and the like. A plurality of jobs of different command types to be performed are input, and a list of these input jobs is displayed on the screen at the same time.

  A display method according to a thirteenth aspect of the present invention that achieves the above object is a display method for displaying an operation content of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object, and performing the process. The position information of the exposure object conveyed to the apparatus to be performed and the information of the exposure object itself at the position are simultaneously displayed on the same screen.

  The display method according to claim 15 of the present invention that achieves the above object is a display method for displaying an operation content of an apparatus that performs a process of exposing and transferring a pattern on a mask to an exposure object, and the exposure object. Information about each state of the storage device, which stores a plurality of objects and is changed to a plurality of states, is displayed on the same screen.

  The display method according to claim 17 of the present invention that achieves the above object is a display method for displaying an operation content of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object, and the like. An imaging image obtained by imaging an imaging object in the apparatus that performs the imaging by the imaging apparatus, an image of an operation unit that moves the captured imaging object in a predetermined direction, or the imaging object is moved to a preset position. The image of the operation unit is simultaneously displayed on the same screen.

  The display program according to claim 19 of the present invention that achieves the above object provides an operation / display device equipped with the operation content of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object. A display program to be displayed, the first step of displaying a list of display contents on the screen to select the display contents described in any of claims 11 to 18, and the selected claims 11 to 18 The operation / display device is caused to execute a second step of displaying the display content described in any of the above items on the screen.

  According to the operation / display device described in claims 1 and 2 of the present invention and the display method described in claims 11 and 12 of the present invention, a plurality of jobs of the same command type and different command types are input. At the same time, a list of these input jobs is displayed on the screen, so that different types of jobs can be registered on the same screen, and the registration operation can be performed efficiently. It is possible to improve the operating rate of the apparatus.

  Further, according to the operation / display device according to claims 3 and 4 of the present invention and the display method according to claims 13 and 14 of the present invention, the positional information of the transfer object including the exposure object (wafer). And the information on the conveyance object itself including the exposure object at the position are simultaneously displayed on the screen, so that the conveyance object can be conveyed while checking the position and state of the conveyance object. As a result, it is possible to improve the operating rate of an apparatus such as an exposure apparatus.

  In addition, according to the operation / display device described in claims 5 and 6 of the present invention and the display method described in claims 15 and 16 of the present invention, a plurality of exposure objects are accommodated and transitioned to a plurality of states. Since information about each state of the storage device is displayed on the screen, it is possible to operate the storage device carrier while checking the state of the storage device, and as a result, the operation of the exposure device or the like The rate can be improved.

  Further, according to the operation / display device according to claims 7 and 8 of the present invention and the display method according to claims 17 and 18 of the present invention, an imaging object in an apparatus for performing exposure processing or the like is imaged. An image captured by the apparatus and an image of an operation unit that moves the imaged imaging object in a predetermined direction or an image of an operation unit that moves the imaging object to a preset position are displayed on the screen at the same time. Therefore, it is possible to easily change the state of the imaging target while monitoring the imaging target including the exposure target, and as a result, it is possible to improve the operating rate of the exposure apparatus or the like. Become.

  Hereinafter, an operation / display device, a display method, and a display program according to an embodiment of the present invention will be described with reference to FIGS.

  FIG. 1 shows an exposure apparatus 20 equipped with an operation / display apparatus 10 according to this embodiment, a wafer loader system 30 for loading (unloading) and unloading a wafer as an exposure object into the exposure apparatus 20. The outline of the appearance is shown.

  As shown in FIG. 1, the operation / display device 10 inputs (instructs) various jobs to the exposure device 20 and a display 11 such as a liquid crystal display or CRT installed at a predetermined position on the outer surface of the chamber 21 of the exposure device 20. A keyboard 12 is provided. A touch panel 13 is attached to the front surface of the display 11, and various instructions can be given to the exposure apparatus 20 via the touch panel 13. For the touch panel 13, for example, a touch panel of an ultrasonic method, a resistive film method, an infrared method, an analog capacitive coupling method, or the like is employed.

  Although not shown, the exposure apparatus 20 has a wafer stage on which a wafer as an exposure target is mounted in a chamber 21, a reticle stage on which a reticle as a mask on which a circuit pattern is formed, and a reticle stage. A projection optical system for exposing and transferring a reticle pattern mounted on the wafer onto a wafer mounted on a wafer stage is equipped.

  Although not shown, the wafer loader system 30 holds a wafer in the chamber 31 and reciprocates between the chamber 31 of the wafer loader system 30 and the chamber 21 of the exposure apparatus 20, and the load slider is placed in the chamber 31. An unexposed wafer is taken out from a linear motion mechanism having a linear motor that reciprocates between the chamber and the chamber 21 and a front opening unified pod (Front Opening Unified Pod: hereinafter referred to as “FOUP”) 35. A load robot, a pre-alignment stage that performs pre-alignment with respect to the wafer W while relaying transfer of the wafer W from the load robot to the load slider, and a turntable mounted on the pre-alignment stage And unload the exposed wafer from the wafer stage. And unloading slider for, such as unloading robot to receive the wafer from the unload slider is equipped.

  FIG. 2 is a block diagram of a control / drive system that controls and drives the operation / display device 10, the exposure device 20, the wafer loader system 30, and the like.

  As shown in FIG. 2, the operation / display control system 14 for controlling the operation / display device 10 is connected to the display 11 and the keyboard 12 through the interface 24 and outputs control signals to the display 11 and the keyboard 12. On the other hand, an operation instruction signal or the like sent from the keyboard 12 is input. The main control system 22 for controlling the exposure apparatus 20 and the wafer loader system 30 is also provided with a wafer stage drive system 25, a reticle stage drive system 26, an alignment detection system 27, a wafer loader drive system 32, and a FOUP 35 via the interface 24. It is connected to the FOUP carrier 36, ITV monitor 40, IVT monitor drive system 41, etc., and outputs control signals to them, while the reticle stage and wafer stage position measurement information sent from the alignment detection system 27, and the wafer loader system 30 Information on the position of the wafer in the wafer loader system 30 sent, status information on the FOUP 35 sent from the FOUP 35, information on the wafer stored in the FOUP 35, and imaging objects such as wafers and reticles sent from the ITV monitor 40 Such as imaging signals of objects Forces.

  The operation / display control system 14 sends an operation instruction signal (instruction information) for the exposure apparatus 20 input via the keyboard 12 to the main control system 22, while measuring the position of the reticle stage and wafer stage from the main control system 22. Information, wafer position information in the wafer loader system 30, status information of the FOUP 35, information on the wafer stored in the FOUP 35, imaging signals (imaging information) sent from the ITV monitor 40, etc. The display 11 is driven and controlled so that the information (see FIGS. 3 to 8) is displayed on the display 11 together with an operation instruction signal to the exposure apparatus 20 input via the keyboard 12.

  The control contents of the operation / display device 10, the exposure device 20, the wafer loader system 30 and the like are stored in a memory 23 having a ROM and a RAM, and the operation / display control system 14 and the main control system 22 are respectively stored in the memory 23. The control content is read, and the operation / display device 10, exposure device 20, wafer loader system 30, FOUP 35, FOUP carrier 36, ITV monitor 40, ITV monitor drive system 41, etc. are driven and controlled via the interface 24 based on the control content. To do.

  In the case of the operation / display control system 14, for example, a display program represented by the flowchart of FIG. 9 is stored in the memory 23. By reading this display program from the memory 23 and driving and controlling the display 11, the display program is displayed. For example, the screens shown in FIGS.

  Next, the contents of each screen shown in FIG. 3 to FIG. 8, which is a characteristic part of the present invention, will be described.

  FIG. 3 shows a job list display screen 50 when the screen of the display 11 is switched to [Job List].

  Different types of jobs such as exposure processing and measurement processing (alignment) by the exposure device 20 and calibration processing (calibration) and adjustment processing of the optical system of the exposure device 20 are simultaneously reserved and registered via the keyboard 12, etc. The reservation registration status is displayed as a list on the job list display screen 50 of the display 11. Jobs registered for reservation are transferred to execution in a chain, and disappear from the job list display screen 50 when execution is completed (job completion).

In the upper part of the job list display screen 50 on the upper side of FIG. 3, a job list list display unit 51 is provided. The job list list display unit 51 includes, for example, a job for a submitted job. Identification name (Job Id), job type (Job Type), recipe (Recipe), job status (Job Status), job submission time (Job
Lists such as Entry Time and Reticle are displayed. In FIG. 3, the job input time and the reticle are omitted.

The job type displays the job format. Specifically, for example, Exposure JOB, Calibration JOB, Measure JOB, Wflat JOB, Maintenance
JOB, Illumination JOB, etc. are displayed.

  In the recipe, for example, exposure conditions and the like are displayed.

  In the job status, the job status is displayed.

For example, in the case of PJ (Process JOB), QUEUED / POOLED, SETTING UP, WAITING FOR START,
Displays job status such as PROCESSING, PROCESS COMPLETE, PAUSING, ABORTING.

In case of CJ (Control JOB), QUEUED, SELECTED, PAUSED, STOPPING, WAITING FOR
Displays job status such as START, EXECUTING, PROCESSING, COMPLETE, PAUSED, STOPPING, ABORTING, COMPLETED. These are semiconductor manufacturing related standards SEMI
Conforms to E40-1000.

  In the job submission time, the PJ / CJ submission time is displayed.

  In the reticle, the name of the reticle to be used is displayed.

  On the left side of the job list display screen 50 and below the job list list display section 51, a selected job details display for displaying a job selected from the jobs in the job list list display section 51. A part 52 is provided. The selected job details display section 52 displays a job identification name (Job Id), job file (Job File), recipe (Recipe), process start (Process Start), comment (Comment), reticle for the selected job. (Reticle) etc. are displayed.

  At process start, it displays whether it is automatic or manual (Auto or Manual).

  In comments, the PJ / CJ input time is displayed.

  Four job selection buttons 53 are provided at the approximate center of the job list display screen 50 and below the list display section 51 of the job list. The arrow button ▼ that points to the bottom of the screen (the button with the triangle apex facing the bottom of the screen and the inside painted black) is the selected queuing job (QUEUEING JOB) This is a button for moving the next one. In addition, the arrow button ▲ (the button expressed with the triangle apex facing the upper side of the screen and the inside painted in black) is the button to move the selected queuing job to the previous one It is. In addition, the button with two overlapping arrow buttons ▼ (buttons with triangle vertices pointing to the bottom of the screen and filled with black inside) queue the selected queuing job. This is a button for moving to the end of (standby queue). In addition, the button with two overlapping arrow buttons ▲ (buttons with triangle vertices facing the top of the screen and filled with black inside) queue the selected queuing job (wait) This is a button for moving to the top of the column.

  A job state transition diagram display section 54 is provided in the approximate center of the job list display screen 50 and below the job selection button 53. For example, when the operation mode is Pool or Queue-PJ, the job state transition diagram display unit 54 displays a PJ state transition diagram. When the operation mode is Queue-CJ, PJ state transition diagram and CJ state transition diagram are displayed. The status is color-coded and serves as a job status indicator.

On the right side of the job list display screen 50, the Abort button, Stop button, Pause button, Suspend button, Start button, Lock / Unlock button, Create button, Edit button, Job
A command panel operation unit 55 is provided as an operation unit for giving instructions to individual jobs, such as a Cancel button.

  The Abort button is effective when there is a valid job (a job that has not been completed), and is a button for displaying a pop-up interruption confirmation button and interrupting the job.

  The Stop button is effective when there is a valid job, and is a button for displaying a popup stop confirmation button and stopping the job.

  The Pause button is valid when there is a valid job, and is a button for pausing the job.

  The Suspend button is effective when there is a valid job, and is a button for immediately stopping the job.

  The Start button is a button for shifting the WATING FOR START state to PROCESSING.

  Of the Lock / Unlock buttons, the Lock button is valid when there is a job in the queue (in the queue), locks the top queue, and locks the job after that when selecting a job. The Unlock button is a button for releasing the lock of the queuing job (standby job) locked by the Lock button.

  The Create button is a button for submitting a job by popping up a job submission screen after displaying an insertion position / submission confirmation dialog.

  The Edit button is effective when one queued job is selected, or when a job in the WATING FOR START state or PAUSED state is selected, and is a button for popping up a parameter editing screen.

  The Job Cancel button is effective only when a queuing job is selected, and is a button for displaying a deletion confirmation message box and deleting the job.

  The command panel operation unit 55 can instruct the exposure apparatus 20 to perform a desired operation by touching any button.

  FIG. 4 shows a wafer transfer display screen 60 when the screen of the display 11 is switched to [Wafer Transfer].

  In this wafer transfer display screen 60, the screen has a two-stage structure on the left and right so that the location in the wafer apparatus (inside the exposure apparatus 20 and the wafer loader system 30) can be visually grasped on the left (left side in FIG. 4). The wafer location is graphically displayed, and the information about the wafers loaded into the apparatus is displayed in a list on the right side (right side in FIG. 4).

  A LINE / LOCAL connection state display unit 61 is provided at the upper left of the wafer transfer display screen 60. The LINE / LOCAL connection state display unit 61 displays the connection state with the inline. The state of the connection with Track, the state of LINE / LOCAL connection, etc. are displayed by switching the color of the object on the screen. The correspondence of colors is as follows.

  For the LINE character, for example, the background rectangle color is changed to yellow in the LINE state. In the LOCAL state, for example, the background rectangular color is made transparent.

  For LOCAL characters, the background rectangular color is made transparent in the LINE state. In the LOCAL state, for example, the color of the background rectangle is changed to yellow.

  For the Track, in the LINE state, for example, the fill color is white (the same color as the object showing the Processing Apparatus). In the LINE state, the fill color is made transparent in the background.

A wafer location information display unit 62 is provided on the left side of the wafer transfer display screen 60 and below the LINE / LOCAL connection status display unit 61. This wafer location information display unit 62 is a location in the wafer apparatus (for example, Wafer Stage, Load Robot, Pre Aligner, Load Slider, Unload Slider,
Unload Robot) is displayed in a diagram for visual understanding.

Wafer is in the equipment, for example, Wafer Stage, Load Robot, Pre Aligner, Load Slider, Unload Slider,
If it exists on the Unload Robot, the circular figure representing the wafer is painted in green, and if it does not exist, the circular figure representing the wafer is painted in white.

  The wafer location information display unit 62 also displays the wafer attributes such as the wafer serial number, the wafer exposed / unexposed, the wafer processing state, and the wafer transfer state.

  For the FOUP in the wafer location information display section 62, 25 slots are displayed as lines. For slots where the wafer is placed on the wafer loader system 30 etc., the line is filled with green, displayed for the slot where the wafer is present, and painted with black for the slot where the wafer is not present. To display.

  A wafer information list display unit 63 is provided from the center of the wafer transfer display screen 60 to the right stage. The wafer information list display unit 63 displays information on each wafer loaded into an apparatus such as the exposure apparatus 20 and the wafer loader system 30 in the order of loading (when the wafer is loaded, it enters the bottom of the list). By displaying the list in this way, it is possible to visually grasp the progress of the job. When the wafer is unloaded from the exposure apparatus 20, the wafer loader system 30, or the like, the wafer information is deleted.

  Information displayed on the wafer information list display unit 63 includes the following.

  [Inline] Inline signal information list display, carrier end signal (synchronous / asynchronous) “CE” is displayed, lot end signal (synchronous / asynchronous) “LE” is displayed, and carrier end signal and lot end signal are displayed simultaneously In this case, “CE & LE” (or CE + LE etc.) is displayed. Asynchronous lot end signals are rows with lot signals only.

  In addition, there is a [Subst ID] substrate identification name list display, which is displayed as “carrier identification name” + “.” + “Wafer identification name”, for example, FOUP01.03.

In addition, there is a list of location identification names on the [Location ID] substrate, Wafer Stage, Load Robot, Pre
Aligner, Load Slider, Unload Slider, Unload Robot are displayed.

In addition, there is a list of processing states for the [Proc State] substrate.
[NEED PROCESSING]
[IN PROCESSED]
[PROCESSED]
[ABORTED]
[STOPPED]
[REJECTED]
[LOST]
Displayed with [SKIPPED] characters.

  In addition, there is a [Proc Job ID] process job identification name list display, and the corresponding process job identification name is displayed.

  On the rightmost stage of the wafer transfer display screen 60, there is a command panel operation unit 64, which displays an unload execution button, a reject execution button, a job deletion execution button, and the like for each wafer carried into the apparatus. A desired operation can be instructed to the exposure apparatus 20 or the wafer loader system 30 by touching any button.

  FIG. 5 shows a wafer Port & FOUP display screen 70 when the screen of the display 11 is switched to [Port & FOUP].

  The wafer port & FOUP display screen 70 is a screen for displaying the status of the load port and the FOUP carrier and executing the operation of the load port and the FOUP carrier.

  A service mode / access mode display 71 is provided at the upper left of the wafer port & FOUP display screen 70.

  The service mode / access mode display unit 71 displays the load port transfer state model of [IN SERVICE] in which the load port can be used and [OUT OF SERVICE] in which the load port cannot be used as the service mode. To do. In addition, as an access mode, an access mode state model is displayed, in which only manual carrier transport is permitted [MANUAL] and only automatic carrier transport is permitted [AUTO].

  On the left side of the wafer port & FOUP display screen 70 and below the service mode / access mode display section 71, a load port state simplified signal display section 72 is provided.

  The load port state simplified signal display unit 72 displays the following load port status by changing the color in the circle representing the signal.

[READY TO LOAD]
[PRESENCE] indicating the FOUP transport status
[RESERVED] for FOUP reservation status
[PLACEMENT] indicating FOUP installation status
[READY TO UNLOAD]
A FOUP status display unit 73 is provided on the left side of the wafer port & FOUP display screen 70 and below the load port state simplified signal display unit 72.

  The FOUP status display unit 73 displays the FOUP carrier installation information in a graphic representing the physical image of the FOUP carrier. The presence or absence of the carrier, the hook displayed at the bottom of the FOUP carrier graphic, the docking state Information such as display (docking start / undock start status is text display) and door open / close status display are displayed.

  FIG. 6 shows the FOUP status display section 73 in detail. In FIG. 6, the FOUP carrier docking state is indicated by a solid line, and the FOUP carrier undocking state is indicated by a two-dot chain line. The L-shaped hook is painted black to display the clamped state, and is painted gray to unclamp. As for the door open / closed state, the closed state is displayed by being painted in black, and the open state is displayed by being painted in gray.

  A carrier identification name display unit 74 is provided on the left side of the wafer port & FOUP display screen 70 and below the FOUP status display unit 73.

  A wafer list display section 75 in the FOUP is provided from the center to the right side of the wafer port & FOUP display screen 70.

  The wafer list display section 75 in the FOUP includes a slot number list display, a substrate identification name (wafer identification name) list display, a substrate location identification name list display, a wafer presence / absence list display of a FOUP carrier, and a current slot status list. The status of each slot wafer of the FOUP carrier, such as a display, a processing status list display of a substrate, and a job identification name list display, is displayed as a list.

  In the slot number list display, numbers 01 to n are displayed.

In the location identification list display of the substrate, Wafer Stage, Load Robot, Pre Aligner, Load Slider, Unload Slider,
Display location such as Unload Robot.

In the wafer presence / absence list display of the FOUP carrier, the slot map state when mapped to the FOUP carrier
[UNDEFINED] (unknown),
[EMPTY] (empty),
[NOT EMPTY] (something),
[COLLECTLY OCCUPIED] (placed correctly),
[DOUBLE SLOTED] (2 cards in 1 slot),
Display with characters such as [CROSS SLOTED] (inclined).

In the current slot status list display, for the current slot status,
[EMPTY],
Displayed as [COLLECTLY OCCUPIED].

  In the substrate processing state list display, the same contents as the substrate processing state display in the wafer information list display unit 63 are displayed.

  A command panel operation unit 76 is provided on the right side of the wafer port & FOUP display screen 70.

The command panel operation unit 76 displays the following execution buttons.
[Cancel Carrier] button,
[Release Carrier] button,
[Recreate Carrier] button
[Change Service Mode] button,
[Change Access Mode] button.

  The [Cancel Carrier] button is for forcibly carrying out the FOUP carrier by pressing the button, and forcibly ends the FOUP carrier being processed. When unloading the FOUP carrier, the wafer loader 30 (exposure apparatus 20) collects all the wafers transferred from the FOUP and then closes the FOUP door.

  The [Release Carrier] button is used to release the FOUP carrier by pressing the button, and makes the FOUP carrier with the door closed so that it can be collected. The release of the FOUP carrier can be performed in parallel with the wafer processing.

  The [Recreate Carrier] button is used to recreate a FOUP carrier by pressing the button, and to reprocess the FOUP carrier that can be carried out. In order to perform the reprocessing, it is possible to carry out and carry in the FOUP, but this is possible only by an instruction from the GUI.

  The [Change Service Mode] button is used to change the service mode by pressing the button.

  The [Change Access Mode] button is used to change the access mode by pressing the button.

  FIG. 7 shows an ITV display / operation screen 80 when the screen of the display 11 is switched to [ITV].

  An ITV (Industrial Tele Vision) is installed in the exposure apparatus 20, and a captured image of the ITV is displayed on the ITV display / operation screen 80.

  The ITV display / operation screen 80 is configured to simultaneously display the ITV monitor unit, the coordinate display unit of the wafer stage and reticle stage, and the stage operation unit of the wafer stage and reticle stage within one screen. Switching display between the wafer stage and the reticle stage is possible.

  An ITV monitor display unit 81 is provided at the upper left of the ITV display / operation screen 80. The ITV monitor display unit 81 displays a captured image captured by the designated ITV.

  An ITV monitor display switching unit 82 is provided at the lower left of the ITV display / operation screen 80. FIG. 8 shows the ITV monitor display switching unit 82 in detail.

  ITV switching can be performed for the following (see FIG. 8).

RA Search ([Mix], [Right], [Left])
RA Fine ([YR + YL], [XR + XL])
FIA ([FIA X], [FIA Y], [Index], [Search], [Observe])
Wafer Pre Alg ([Neutal], [Right], [Left], [TA], [WPre3])
Reticle Pre Alg ([Left], [Right])
The ITV monitor display adjustment items include [Contrast] and [Brightness]. [Contrast] adjusts the contrast in, for example, 0 to 255 levels, and [Brightness] adjusts the brightness in, for example, 0 to 255 levels.

  As shown in FIG. 7, a wafer stage coordinate display unit 83 and a reticle stage coordinate display unit 84 are provided on the left side of the ITV display / operation screen 80 and below the ITV monitor display unit 81, respectively. .

  The wafer stage coordinate display unit 83 displays the coordinates of the current wafer stage, and display items include XY, Z, Pitch, and Roll. Switching between absolute coordinate display and relative coordinate display is performed by a toggle button, and can be reset to 0 by a RESET button at the time of relative coordinate display.

  The reticle stage coordinate display unit 84 displays the coordinates of the current reticle stage, and there are X, Y, and θ as display items. Switching between absolute coordinate display and relative coordinate display is performed by a toggle button, and can be reset to 0 by a RESET button at the time of relative coordinate display.

  As shown in FIG. 7, a command panel operation unit 85 is provided on the right side of the ITV display / operation screen 80. The command panel operation unit 85 includes buttons for switching the operation target and manual operation start / end buttons.

  Manual operation is started by the manual operation start button [Start]. This button cannot be pressed when manual operation is not possible.

  Manual operation is terminated with the manual operation end button [End].

  The operation target switching buttons include [Wafer Manual], [Reticle Manual], [Stage], and [Shutter].

  The wafer stage operation item display section 86 is displayed at the center of the ITV display / operation screen 80 by the [Wafer Manual] button. The display unit 86 displays buttons for displaying each setting dialog and manual operation buttons.

  By the [Reticle Manual] button, a reticle stage operation item display section 86 is displayed at the center of the ITV display / operation screen 80. On this display section, buttons for displaying each setting dialog and manual operation buttons are displayed.

  The stage operation item display section 86 is displayed at the center of the ITV display / operation screen 80 by the [Stage] button. The display unit 86 is provided with buttons for displaying each setting dialog so that, for example, the following stage target operations can be performed.

For <Limit Position>
There are [Back Left], [Back Right], [Front Right], and [Front Left] button processing.

About <VRA>
There are [VRA_X1] and [VRA_X2] button processes.

For <Sensor>
There are [Illum. Sensor] and [Power Mon] button processing.

For <Loading Position>
There are [Front] and [Side] button processing.

For <FIA>
There are [FIA_X] and [FIA_Y] button processing.

About <Wafer Table &AF>
There are [WT Position], [AF Halving], [AF Sensor], and [AF] button processing.

About <Reticle Position>
There is [Reticle Pos] button processing.

For <Blind Position>
There is a [Blind Pos] button process.

  [Shutter] displays a shutter operation item display section 86 at the center of the ITV display / operation screen 80. The display unit 86 is provided with buttons for displaying each setting dialog so that, for example, the following shutter operation can be performed.

In the [Laser Emission] button processing,
Displays the laser operation setting dialog. Designation of optical path switching (Main side and RA side) and laser emission On / Off setting can be performed. When the laser is On on the Main side, a dummy shot is performed, and when the Laser is On on the RA side, VRA emission is performed. When the laser is On, the laser value is set. When the laser value is Off, only the optical path is switched.

In [MAIN / RA] button processing,
Displays the optical path switching dialog. Optical path switching (Main / RA) can be set.

In the [RA Mirror] button processing,
Displays the epi-mirror switching dialog. Mirror switching (Exposure_Position / RA_Position) can be set.

In the [FIA Shutter] button processing,
Displays the FIA shutter drive dialog. Shutter opening / closing (Open / Close) can be set.

In the [FIA Search] button process,
Displays the FIA optical path switching dialog. Fine & Search / Observation can be set.

In the [FIA ND Filter] button processing,
Displays the FIA ND filter switching dialog. You can set filters.

In the [FIA NA Filter] button processing,
Displays the FIA NA filter switching dialog. You can set filters.

In the [FIA Wavelength] button process,
Displays the FIA wavelength switching dialog. Wavelength switching (Broad / Green / Orange / Red) can be set.

In the [ALG AF Filter] button processing,
The alignment AF sharp cut filter switching dialog is displayed. Filter switching (Open / Close) can be set.

In the [ND Pos] button processing,
An ND filter position setting dialog is displayed. The position to specify can be selected.

  FIG. 9 shows an embodiment of a display program for driving and controlling the display 11 so that the display 11 displays the screen of any of FIG. 3, FIG. 4, FIG. 5 or FIG.

  In step S901, a list for selecting which screen of FIG. 3, FIG. 4, FIG. 5 or FIG. 7 is to be displayed on the screen of the display 11 is displayed.

For example, [Job List], [Wafer Transfer], [Port & FOUP], [Reticle Transfer], [Port
& POD] is displayed at the top of the screen (see FIGS. 3, 4, and 5). The operator selects one of the screens based on this list.

In step S902, it is determined whether a list is selected from the screen, and the process waits until it is selected. If any screen is selected, the process proceeds to step S903, and the selected screen is displayed on the display 11. For example, when [Job List] is selected, the screen of FIG. 3 is displayed on the display 11, and when [Wafer Transfer] is selected, the screen of FIG. 4 is displayed on the display 11, and [Port
When & FOUP] is selected, the screen of FIG. 5 is displayed on the display 11, and when [ITV] is selected, the screen of FIG. 7 is displayed on the display 11.

  In step S904, it is determined whether or not to switch to another content screen. When switching to another content screen, the process returns to step S902, and the same operation is repeated, and a screen having another content is not selected. The last selected screen is maintained.

  In the above-described embodiment of the present invention, the case where the operation / display device 10 of the present invention is mounted on the exposure apparatus 20 has been described. However, the present invention is not limited to this. It can also be installed in semiconductor manufacturing related devices such as machines, measuring machines, and processing machines. In that case, the contents of the display screens shown in FIGS.

  Further, the screen contents shown in FIGS. 3 to 8 are merely shown as one embodiment, and the present invention is not limited to this. It is possible to change the screen configuration in various ways for ease of use.

  Further, although the flowchart of FIG. 9 is shown as a display program for driving and controlling the operation / display device 10 (display 11) so as to display the screens of FIGS. 3 to 8, the present invention is not limited to this.

1 is a schematic perspective view showing an embodiment when an exposure apparatus is equipped with an operation / display apparatus of the present invention. FIG. 3 is a block diagram of a control / drive system for controlling and driving the operation / display device 10, the exposure device 20, the wafer loader system 30 and the like shown in FIG. It is a figure of the screen displayed on the display of the operation / display apparatus shown in FIG. It is a figure of the screen displayed on the display of the operation / display apparatus shown in FIG. It is a figure of the screen displayed on the display of the operation / display apparatus shown in FIG. FIG. 6 is a detailed view of a FOUP status display unit 73 in the screen shown in FIG. 5. It is a figure of the screen displayed on the display of the operation / display apparatus shown in FIG. FIG. 8 is a detailed view of an ITV monitor display switching unit 82 in the screen shown in FIG. 7. It is a flowchart which shows one embodiment of the display program of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Operation / display apparatus 11 Display 12 Keyboard 13 Touch panel 14 Operation / display control system 20 Exposure apparatus 22 Main control system 23 Memory 30 Wafer loader system 35 FOUP
50 Job List Display Screen 51 Job List List Display Unit 52 Selected Job Details Display Unit 53 Job Selection Button 54 State Transition Diagram Display Unit 55 Command Panel Operation Unit 60 Wafer Transfer Display Screen
61 LINE / LOCAL connection status display section 62 Wafer location information display section 63 Wafer information list display section 64 Command panel operation section 70 Wafer PORT & FOUP status display screen 71 Service mode / access mode display section 72 Load port status simplified signal display section 73 FOUP status Display unit 74 Carrier identification name display unit 75 Wafer list display unit in FOUP 76 Command panel display unit 80 ITV display / operation screen 81 ITV monitor display unit 82 ITV monitor display switching unit 83 Wafer stage coordinate display unit 84 Reticle stage coordinate display unit 85 Command panel display

Claims (19)

An operation / display device equipped in an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
An operation / display apparatus that inputs a plurality of jobs of different command types performed by the apparatus, simultaneously displays a list of these input jobs on a screen, and executes the job. The operation / display device according to claim 1,
The list of jobs includes the type, identification name, file name, recipe name, status, input time, start time, reticle name or comment of the input job,
Any of the job state transition diagrams that display the image of various operation units such as the job submission execution button and job deletion execution button, and which job is currently being executed, which job is waiting, and which job has been completed Alternatively, an operation / display device that displays all of them simultaneously with the list of jobs. An operation / display device equipped in an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
The position information of the conveyance object including the exposure object conveyed to the apparatus that performs the processing and the information of the conveyance object itself including the exposure object at the position are simultaneously displayed on the screen. Operation / display device. The operation / display device according to claim 3,
The information on the conveyance object including the exposure object includes inline signal information, an exposure object identification name, a location identification name, a processing state of the exposure object, and a job identification name,
Information on the connection state between the apparatus that performs the processing and the like and a transport system that transports the exposure object to the apparatus, and the unload execution button and reject of the exposure object that is carried into the apparatus that performs the processing and the like Any or all images of various operation buttons such as an execution button and a job deletion execution button are displayed at the same time as the position information of the conveyance object including the exposure object and the information of the conveyance object itself including the exposure object. An operation / display device characterized by that. An operation / display device equipped in an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
An operation / display device that displays on a screen information about each state of a storage device that stores a plurality of exposure objects and transitions to a plurality of states. The operation / display device according to claim 5,
The number of the slot in the storage device that stores the exposure object, the state of the slot, the presence / absence information of the exposure object in the storage device, and the identification of the exposure object stored in the storage device Name, location identification name, storage device carrier identification name, processing state of the exposure object, load status of the storage device load port, storage device carrier access status, and storage device carrier installation information Any one or all of the images of various operation units such as a job identification name, a storage device carrier cancel execution button, a release execution button, a recreate execution button, a service mode change button, and an access mode change button. An operation / display device that displays the status information of the device at the same time. An operation / display device equipped in an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
An imaging image obtained by imaging an imaging object including the exposure object in the apparatus that performs the processing or the like by an imaging device, an image of an operation unit that moves the imaged imaging object in a predetermined direction, or the imaging object An operation / display device that simultaneously displays on the screen an image of the operation unit that moves the image to a preset position. The operation / display device according to claim 7,
The image of the position coordinate display unit of the imaged object, the image of the moving speed setting unit of the imaged object, the image of the switching setting unit of the imaging device, and the optical shutter equipped in the imaging device An operation / display device that displays any or all of the image of the switching setting unit simultaneously with the captured image and the image of any of the operation units. The operation / display device according to any one of claims 1 to 8,
The operation / display device includes a touch panel. The operation / display device according to any one of claims 1 to 9,
An operation / display device characterized in that the processing device is a semiconductor manufacturing related device such as a semiconductor product inspection machine, a measuring machine, or a processing machine. A display method for displaying operation details of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
A display method comprising: inputting a plurality of jobs of different command types performed by the apparatus and simultaneously displaying a list of these input jobs on a screen. The display method according to claim 11,
The list of jobs includes the type, identification name, file name, recipe name, status, input time, start time, reticle name or comment of the input job,
Any of the job state transition diagrams that display the image of various operation units such as the job submission execution button and job deletion execution button, and which job is currently being executed, which job is waiting, and which job has been completed Or a display method, wherein all are displayed simultaneously on the same screen as the list of jobs. A display method for displaying operation details of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
Displaying simultaneously the position information of the conveyance object including the exposure object conveyed to the apparatus that performs the processing and the information of the conveyance object itself including the exposure object at the position on the same screen. Characteristic display method. The display method according to claim 13,
The information on the conveyance object including the exposure object includes inline signal information, an exposure object identification name, a location identification name, a processing state of the exposure object, and a job identification name,
Information on the connection state between the apparatus that performs the processing and the like and a transport system that transports the exposure object to the apparatus, the unload execution button and the reject execution of the exposure object that is carried into the apparatus that performs the processing and the like Any or all of the images of various operation buttons such as a button and a job deletion execution button are displayed on the same screen as the position information of the transport object including the exposure object and the information of the transport object itself including the exposure object. A display method characterized by displaying simultaneously. A display method for displaying operation details of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
A display method comprising: displaying information about each state of the storage device on which the plurality of exposure objects are stored and transitioned to a plurality of states on the same screen. The display method according to claim 15,
The number of the slot in the storage device that stores the exposure object, the state of the slot, the presence / absence information of the exposure object in the storage device, and the identification of the exposure object stored in the storage device Name, location identification name, storage device carrier identification name, processing state of the exposure object, load status of the storage device load port, storage device carrier access status, and storage device carrier installation information Any one or all of the images of various operation units such as a job identification name, a storage device carrier cancel execution button, a release execution button, a recreate execution button, a service mode change button, and an access mode change button. A display method characterized by displaying simultaneously with apparatus status information. A display method for displaying operation details of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object,
An imaging image obtained by imaging an imaging object including the exposure object in the apparatus that performs the processing or the like by an imaging device, an image of an operation unit that moves the imaged imaging object in a predetermined direction, or the imaging object A display method characterized by simultaneously displaying on the same screen an image of an operation unit that moves the image to a preset position. The display method according to claim 17,
The image of the position coordinate display unit of the imaged object, the image of the moving speed setting unit of the imaged object, the image of the switching setting unit of the imaging device, and the optical shutter equipped in the imaging device Any one or all of the images of the switching setting unit are simultaneously displayed on the same screen as the captured image and the image of any one of the operation units. A display program for displaying an operation content of an apparatus for performing a process of exposing and transferring a pattern on a mask to an exposure object on an operation / display apparatus equipped in the apparatus,
A first step of displaying a list of these display contents on the screen in order to select the display contents described in any one of claims 11 to 18;
19. A display program for causing the operation / display device to execute a second step of displaying the selected display content according to claim 11 on a screen.

Images