JP2006039066A5 - - Google Patents

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Publication number
JP2006039066A5
JP2006039066A5 JP2004216679A JP2004216679A JP2006039066A5 JP 2006039066 A5 JP2006039066 A5 JP 2006039066A5 JP 2004216679 A JP2004216679 A JP 2004216679A JP 2004216679 A JP2004216679 A JP 2004216679A JP 2006039066 A5 JP2006039066 A5 JP 2006039066A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004216679A
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JP2006039066A (ja
JP4531470B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2004216679A priority Critical patent/JP4531470B2/ja
Priority claimed from JP2004216679A external-priority patent/JP4531470B2/ja
Priority to US11/187,984 priority patent/US7356880B2/en
Priority to DE102005034927A priority patent/DE102005034927B4/de
Publication of JP2006039066A publication Critical patent/JP2006039066A/ja
Publication of JP2006039066A5 publication Critical patent/JP2006039066A5/ja
Application granted granted Critical
Publication of JP4531470B2 publication Critical patent/JP4531470B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004216679A 2004-07-26 2004-07-26 ヒンジ構造 Expired - Fee Related JP4531470B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004216679A JP4531470B2 (ja) 2004-07-26 2004-07-26 ヒンジ構造
US11/187,984 US7356880B2 (en) 2004-07-26 2005-07-25 Hinge structure of micromirror device
DE102005034927A DE102005034927B4 (de) 2004-07-26 2005-07-26 Gelenkkonstruktion für eine Mikrospiegelvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004216679A JP4531470B2 (ja) 2004-07-26 2004-07-26 ヒンジ構造

Publications (3)

Publication Number Publication Date
JP2006039066A JP2006039066A (ja) 2006-02-09
JP2006039066A5 true JP2006039066A5 (ja) 2007-05-24
JP4531470B2 JP4531470B2 (ja) 2010-08-25

Family

ID=35904145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004216679A Expired - Fee Related JP4531470B2 (ja) 2004-07-26 2004-07-26 ヒンジ構造

Country Status (1)

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JP (1) JP4531470B2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007074821A1 (ja) * 2005-12-26 2007-07-05 Nippon Telegraph And Telephone Corporation ばね、ミラー素子、ミラーアレイおよび光スイッチ
JP5347963B2 (ja) * 2007-08-27 2013-11-20 パナソニック株式会社 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置
WO2013111265A1 (ja) * 2012-01-24 2013-08-01 パイオニア株式会社 アクチュエータ
JP6225169B2 (ja) * 2013-03-26 2017-11-01 住友精密工業株式会社 ミラーアレイ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6935759B1 (en) * 2002-02-19 2005-08-30 Glimmerglass Networks, Inc. Folded longitudinal torsional hinge for gimbaled MEMS mirror

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