JP2006016229A5 - - Google Patents

Description

An exposure apparatus according to still another aspect of the present invention, ultraviolet light, far ultraviolet light and vacuum ultraviolet light is used as exposure light, the exposure light via the optical system including the optical element described above those該被processed Is exposed.

The support member 120 penetrates the bottom of the housing 170, and the top reaches the growth reactor CGF. The support member 120 supports the crucible 110 and the weight of the melt in the crucible 110 and is driven by the crucible lifting / lowering unit 130 to move the crucible 110 up and down. Further, the support member 120 is configured to be able to rotate the crucible 110 by being driven by a rotation mechanism (not shown). The rotation of the crucible 110 by the support member 120 is performed in order to make the temperature of the crucible 110 uniform.

Calcium fluoride was manufactured using the crystal manufacturing apparatus 100 shown in FIG. Hereinafter, the crystal manufacturing method 1000 according to one aspect of the present invention will be described together with the operation of the crystal manufacturing apparatus 100. FIG. 3 is a flowchart for explaining the crystal manufacturing method 1000 of the present invention.

In the exposure, the light beam emitted from the light source unit 512 illuminates the reticle 520 with, for example, Koehler illumination by the illumination optical system 514. Light that passes through the reticle 520 and reflects the reticle pattern is imaged on the plate 540 by the projection optical system 530. The illumination optical system 514 and the projection optical system 530 used by the exposure apparatus 500 include an optical element manufactured from calcium fluoride according to the present invention, and transmit ultraviolet light, far ultraviolet light, and vacuum ultraviolet light with high transmittance. Therefore, it is possible to provide a device (semiconductor element, LCD element, imaging element (CCD, etc.), thin film magnetic head, etc.) with high throughput and high economic efficiency.

Claims (13)

A crystal production method for producing a single crystal from a raw material of a crystalline substance stored in a crucible,
Growing a crystal of the raw material melted by moving the crucible;
Cutting a single crystal from the crystal grown in the growth step,
The crystal cutting method is characterized in that, in the step of cutting, when a mother crystal having a predetermined crystal orientation is grown from the raw material, it is cut out from a grain boundary having a crystal orientation different from the predetermined crystal orientation.   2. The crystal manufacturing method according to claim 1, wherein, in the growth step, the moving speed of the crucible after the grain boundary is generated is slower than the moving speed of the crucible before the grain boundary is generated.   3. The crystal manufacturing method according to claim 2, wherein in the growth step, the moving speed of the crucible after the grain boundary is generated is set to 0.5 mm / h or less. A crystal production method for producing a single crystal from a raw material of a crystalline substance stored in a crucible,
Growing a crystal of the raw material melted by pulling down the crucible;
Cutting a single crystal from the crystal grown in the growth step,
The growing step includes generating a grain boundary having a crystal orientation different from the predetermined crystal orientation when growing a mother crystal having a predetermined crystal orientation from the raw material;
Growing a crystal having the different crystal orientation from the grain boundary;
The crystal cutting method is characterized in that the cutting step cuts out crystals having the different crystal orientations.   The crystal production method according to claim 1, wherein the raw material is calcium fluoride. A crystal manufacturing apparatus for growing a single crystal from a raw material of a crystalline substance,
A crucible having a conical conical portion at a lower portion of the crucible where the raw material is stored and crystal growth is started, and the conical portion has a conical angle of 70 to 110 degrees. A crystal manufacturing apparatus. Crystal manufacturing apparatus according to claim 6, further comprising a change means to change the moving speed of the crucible.   The crystal production apparatus according to claim 6, wherein the raw material is calcium fluoride.   An optical element manufactured from a single crystal manufactured using the crystal manufacturing method according to claim 1.   An optical element manufactured from a single crystal manufactured using the crystal manufacturing apparatus according to any one of claims 6 to 7.   11. The optical element according to claim 9, wherein the optical element is one of a lens, a diffraction grating, an optical film body, and a composite thereof. Ultraviolet light, far ultraviolet light and vacuum ultraviolet light is used as exposure light, characterized by exposing the person該被processed through the optical system including the optical element according to claim 9 or 10, wherein the exposure light Exposure device. Exposing the object to be processed using the exposure apparatus according to claim 12;
And developing the exposed object to be processed.