JP2006012941A - Frozen chuck apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a frozen chuck apparatus which makes deformation of a thin plate by the expansion of a liquid generated at a solidifying time small enough to be overridden, by solidifying only the liquid which exists among many projections and the rear faces of the sample of the liquid supplied between the front surface of the chuck and the rear surface of the sample. <P>SOLUTION: The frozen chuck apparatus includes: many supply and exhaust liquid holes 2 provided in the front surface 5 of a chuck plate; liquid supply and exhaust grooves 3 provided under the front surface of the chuck plate connected with the supply and exhaust liquid holes 2; a chuck plate 8 made of an outer peripheral wall 4 which holds the liquid on the front surface of the chuck plate; and a freezing plate 9 circulating an antifreeze solution provided in the lower part of this chuck plate 8. Many projections 1 are formed which bear the test pieces on the upper surface of the front surface 5 of the chuck plate. Only the liquid 6 (solidly coated with a black color) is solidified between the upper surfaces of the many projections 1 and the rear surface of the sample 12, and the sample is fixed. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a sample or mask in a processing apparatus that performs planar processing or the like by fixing a silicon wafer or a thin plate, a drawing apparatus that performs drawing by fixing a silicon wafer or a thin plate, and a pattern transfer apparatus that transfers a mask pattern. The present invention relates to a chuck device for a device for fixing the device.

  Conventionally, as shown in FIGS. 9A and 9B, a general refrigeration chuck device used for processing is connected to a large number of supply / drainage holes 2 provided on the chuck plate surface 5, and to this. A freezing chuck plate 8 comprising a liquid supply / drainage groove 3 extending radially and annularly from the center provided below the chuck plate surface, and an outer peripheral wall 4 for holding the liquid supplied on the chuck plate surface, and the chuck plate A liquid supply device (not shown) for supplying liquid from the liquid supply / drainage hole 7 provided on the side surface of the refrigeration plate 8, a refrigeration plate 9 for circulating antifreeze liquid provided at the bottom of the chuck plate 8, and the refrigeration plate 9 It is composed of a freezing liquid constant temperature device (not shown) for supplying the freezing liquid to the freezing plate 9 through the antifreezing liquid supply / return holes 10 and 11 provided on the side surface.

  After supplying liquid in the direction indicated by the arrow from the liquid supply device to the upper surface of the chuck plate surface 5 of this refrigeration chuck device through the liquid supply / discharge liquid hole 7, the liquid supply / discharge liquid groove 3, and the numerous supply / discharge liquid holes 2. The sample 12 such as a silicon wafer is placed so as not to generate bubbles between the back surface of the sample and the liquid surface. Next, the antifreeze liquid cooled through the antifreeze supply / return holes 10 and 11 is supplied from the freezer supply apparatus to the freezer plate 9 provided at the lower part of the chuck plate 8. As a result, the liquid on the chuck plate surface 5 is solidified and the sample 12 is fixed. However, since the antifreeze usually expands during solidification, deformation occurs when the sample 12 is a thin plate.

  On the other hand, the refrigeration chuck device described in Patent Document 1 that fixes a thin plate includes a cooling unit and a heating unit that can fix the sample while minimizing the deformation of the thin plate.

  In this apparatus, as shown in FIG. 9, the freezing chuck device 30 includes a table 32, a cooling means 34, a heating means 36, a detection means 38 and a controller 40, and the cooling means 34, the heating means 36 and the controller 40 are control means 43. Is configured. A sample 41 is placed on the surface 32 </ b> B of the table 32, and water 52 for freezing chuck is supplied to the gap between the sample 41 and the table 32.

  A flow path 32A is formed in the table 32, and the refrigerant is sent from the cooler section 42 through flow paths 34A and 34B communicating with both ends. Thereby, the table 32 is always kept in a cooled state, and the surface 32B of the table is cooled to a constant temperature.

  The heating means 36 includes a plurality of heater members 44 embedded at predetermined intervals in the entire area of the table 32, and is electrically connected to the driver 46 independently. The driver 46 applies a voltage to each heater member 44 based on a signal from the controller 40, and sets the surface 32B of the table 32, which is maintained in a constantly cooled state, to a predetermined temperature.

  The detection means 38 comprises a plurality of temperature sensors 48 embedded at a predetermined interval, and detects the temperature of the table 32 at the embedded position. The detected temperature of the table 32 is converted into a voltage by the temperature / voltage converter 50 and input to the controller 40 described later. The temperature / voltage converter 50 outputs a voltage proportional to the input detected temperature.

  The controller 40 described above outputs a signal to the driver 46 based on the solidification pattern of the water 52 for the freezing chuck inputted in advance. In addition, the controller 40 outputs a signal to the driver 46 based on the coagulation pattern of the water 52 and a voltage proportional to the detected temperature input from the temperature / voltage converter 50. As a result, the surface 32B of the table 32 that is always kept in a cooled state is heated to a set temperature, and the water 52 for the freezing chuck is solidified in a solidification pattern that is input in advance.

FIGS. 10A and 10B show preferred examples of solidification patterns. The solidification pattern of FIG. 10A is set so that the water 52 starts to solidify from the right end of the sample 41 and the solidification sequentially moves to the left. Accordingly, the amount of expansion of the water 52 during solidification can be released to the outside on the right side of the sample 41. The solidification pattern of FIG. 10B is set so that the water 52 starts to solidify from the center of the sample 41 and the solidification sequentially moves toward the outer periphery of the sample 41. Therefore, the amount of expansion of the water 52 at the time of solidification can escape from the outer periphery of the sample 41 to the outside. Therefore, the shape change of the sample 41 can be minimized.
JP-A-6-246567

  The above-described refrigeration chuck apparatus shown in FIG. 9 requires both a cooling means and a heating means in order to accurately control the refrigeration temperature, and the cooling direction must also be controlled. And control means, and there was a drawback that the price would rise. In addition, a large number of sensors and heating means must be embedded at a predetermined interval. When using a Peltier element, it is impossible to reduce this interval so much that a large liquid can coagulate at the same time. Therefore, there was a drawback that the deformation could not be made small enough to be ignored.

  The present invention has been made in view of the above-described conventional problems. The object of the present invention is to remove only the liquid existing between a large number of protrusions and the sample back surface among the liquid supplied between the chuck surface and the sample back surface. An object of the present invention is to provide a refrigeration chuck apparatus that can be made so small that the deformation of the thin plate due to the expansion of the liquid generated during the solidification can be ignored.

  In order to achieve the above-mentioned object, the present invention includes a plurality of supply / drainage holes 2 provided on the chuck plate surface 5, as shown in the first embodiment of FIGS. 1 (a) and 1 (b). A chuck plate 8 comprising a liquid supply / drainage groove 3 extending radially and annularly from the center provided below the surface of the chuck plate to be connected, and an outer peripheral wall 4 for holding liquid on the chuck plate surface, and the chuck plate 8 A liquid supply device (not shown) for supplying liquid from a liquid supply / drainage hole 7 provided on the side surface, a refrigeration plate 9 for circulating antifreeze liquid provided at the lower portion of the chuck plate 8, and a side surface of the refrigeration plate 9 In a freezing chuck device comprising a freezing liquid constant temperature device (not shown) for supplying antifreezing liquid to the freezing plate 9 through the provided antifreezing liquid supply / return holes 10, 11, A large number of protrusions 1 for supporting the sample are formed on the upper surface of the cup plate surface 5, and only the liquid 6 (filled in black) existing between the upper surface of the numerous protrusions 1 and the back surface of the sample 12 is solidified to fix the sample. It is characterized by having a structure.

  As shown in the second embodiment of FIGS. 2A and 2B, in addition to the first example, an annular protrusion 13 is formed to surround a large number of protrusions 1, and the large number of protrusions 1 and the annular protrusions are formed. 13 has a structure in which only the liquid 6 (filled in black) existing between the upper surface of 13 and the back surface of the sample 12 is solidified to fix the sample.

  As shown in the third embodiment of FIG. 3, in addition to the second example, after solidifying the liquid existing between the upper surface of the numerous protrusions 1 and the annular protrusions 13 surrounding the protrusions and the back surface of the sample 12. Further, it has a feature 15 that solidifies the liquid 14 (filled in black) surrounded by the annular protrusion 13 and the outer peripheral wall 4 to fix the outer periphery of the sample.

  The plurality of protrusions 1 are formed of a ceramic material that is the same quality as the refrigerated chuck plate having a height of about several tens of μm to 1 mm and a diameter of about several tens of μm to 1 mm, or a material such as a metal and an inorganic or organic material. Has been. The annular protrusion 13 is formed of a ceramic material that is the same quality as the refrigerated chuck plate having a height of about several tens of μm to 1 mm and a width of about several tens of μm to 1 mm, or a material such as a metal and an inorganic or organic material. Has been. Further, the plurality of protrusions 1 are formed at an interval at which the thin plate is not deformed at the time of processing or evacuation, and in the freezing chuck used at the time of polishing, the interval is about 1 mm for a silicon wafer having a thickness of about 1 mm. Things are used.

  In addition, in order to achieve the above-described object, the present invention provides a plurality of protrusions 1 or upper surfaces of the annular protrusions 13 and the sample 12 as shown in the fourth embodiment of FIGS. 4 (a) and 4 (b). Liquid other than the solidified liquid existing between the back surfaces is retained through the supply / discharge liquid hole 2 connected to the chuck plate 8, the liquid supply / drain liquid groove 3 extending radially and annularly from the center, and the liquid supply / drain liquid hole 7. The liquid tank (not shown) has means for discharging with a vacuum pump or the like. In addition to this, it is characterized in that it also has means for evacuating air existing around the plurality of protrusions 1 through the supply / drainage holes 2.

  Further, as shown in the fifth embodiment of FIG. 5, the present invention fixes the sample 12 and discharges unnecessary liquid to the storage liquid tank (not shown) by a vacuum pump or the like, or A liquid unnecessary for fixing the sample 12 is discharged into a holding liquid tank (not shown) by a vacuum pump or the like, the sample 12 is placed, and exists between the upper surface of many protrusions 1 or the annular protrusions 13 and the back surface of the sample 12. After the liquid to be solidified is fixed and the sample is fixed, it has means 16 for supplying the liquid 14 (filled in black) to the area surrounded by the annular protrusion 13 and the outer peripheral wall 4 and solidifies the outer periphery of the sample 12 It is characterized by adhering.

The refrigeration chuck apparatus is characterized in that the surface 5 of the chuck plate 8 made of a material that easily conducts heat is covered with a material that is difficult to conduct heat except for the upper surfaces of the numerous protrusions 1 or the upper surfaces of the annular protrusions 13. Yes.
Further, according to the present invention, the upper surfaces of the many protrusions 1 and the annular protrusions 13 are on the same plane, or the upper surface of the annular protrusion 13 is formed to be only several tens μm to several hundreds μm lower than the many protrusions 1. It is characterized by that.
Further, the present invention is characterized in that instead of a large number of protrusions 1, the protrusions 1 are composed of several or a limited number. As for the arrangement position of the protrusion 1, the protrusion is disposed at a part of the surface of the chuck device facing the back surface of the sample to be fixed, or at least at three positions apart from each other. It is characterized by.

  In the present invention, by providing a large number of protrusions 1 and annular protrusions 13 on the chuck plate surface 5, the amount of the liquid 6 existing between the back surface of the sample 12 is changed to a clearance other than the large number of protrusions and annular protrusions. It can be very small compared to the amount of liquid present. Accordingly, the heat capacity of the liquid 6 existing between the large number of protrusions 1 and the annular protrusions 13 and the back surface of the sample 12 is reduced, and the liquid 6 that has reached the freezing point is solidified to fix the sample 12. At this time, since the liquid around the large number of protrusions 1 and the annular protrusions 13 is not solidified, the expansion due to solidification that occurs during solidification can be released, and the thin plate does not deform. When a large force is not generated in the lateral direction of a drawing device, a pattern transfer device, or the like, the sample 12 can be fixed by solidifying the liquid only on the many protrusions 1.

  When a large force is generated in the tangential direction of the sample 12 during processing, the sample 12 can be fixed more firmly by solidifying the liquid between the annular protrusion 13 and the outer peripheral wall 4. Further, the liquid existing around the plurality of protrusions 1 is drained, and the temperature of the freezing plate 9 is lowered, whereby the fixation of the sample 12 can be completed. In addition, the vertical force of the sample 12 can be increased by performing evacuation. At this time, by appropriately determining the interval between the protrusions 1 according to the thickness of the sample 12, the deformation of the thin plate sample can be minimized.

  Further, the surface of the chuck plate 5 made of a material that easily conducts heat is covered with a material that is difficult to conduct heat except for the upper surfaces of the numerous protrusions 1 or the annular protrusions 13, so that solidification of the liquid existing in this portion is delayed. Thus, it is possible to release the expansion due to the liquid coagulation on the upper surfaces of the numerous protrusions 1 or the annular protrusions 13. Therefore, the deformation of the thin plate sample can be reduced to the limit. Similarly, by forming a large number of protrusions 1 on the same plane and forming the upper surface of the annular protrusion 13 slightly lower, the amount of liquid existing on the upper surface of the large number of protrusions 1 is compared with the amount of liquid on the upper surface of the annular protrusion 13. Since the amount of liquid can be increased, the solidification of the liquid in this portion can be delayed, and deformation around the sample can be suppressed.

  That is, in the refrigeration chuck apparatus according to the present invention, the thin plate sample can be held without deformation by adhering only the liquid sandwiched between the upper surface of the protrusion and the back surface of the sample. In the case of using the annular protrusion, it is possible to prevent the machining liquid or the like from entering the chuck surface, so that contamination of the chuck surface can be avoided. Furthermore, the holding capacity of the chuck is enhanced by evacuating the air around the protrusion, and the holding capacity in the sample tangential direction can be dramatically increased by the solidified liquid formed on the outer periphery of the sample. Therefore, it is possible to produce a sample without warping by processing both surfaces of the sample with warpage. In addition, there is an advantage that it is not necessary to process the projecting surface with which the sample contacts into a highly flat surface.

FIGS. 1A and 1B are a plan view and a BB ′ sectional view showing a first embodiment of a refrigeration chuck apparatus according to the present invention.
As shown in the figure, pin-shaped microprojections 1 having a large number of circular cross-sections are provided on the upper surface of a ceramic chuck plate 8 so that the microprojections 1 do not bend in the sample 12 during processing or evacuation. Are discretely arranged at intervals according to the thickness of the sample 12. A liquid supply / discharge hole 2 for supplying a liquid for fixing the sample 12 is provided on the surface of the chuck plate 8, and a liquid supply / discharge liquid extending radially and annularly from the center connected to the supply / discharge liquid hole 2 below the surface of the chuck plate 8. A liquid groove 3 is provided, and a sample fixing liquid is supplied from a liquid supply / drain liquid hole 7 via a liquid supply device (not shown). After the liquid is supplied to the surface 5 of the chuck plate 8, the antifreeze liquid cooled to below the freezing point of the sample fixing liquid is supplied to the freezing plate 9 through the antifreeze supply / return holes 10 and 11, and a freezing liquid thermostat (not shown). The liquid 6 existing between the numerous protrusions 1 and the back surface of the sample 12 is cooled and solidified to fix the sample 12.
In this embodiment, since only the liquid existing between the many protrusions 1 and the back surface of the sample 12 is solidified, the expansion of the liquid can be easily released, and no deformation is caused by this, and the thin plate sample is not deformed. It becomes possible to fix.

FIGS. 2A and 2B are a plan view and a BB ′ sectional view showing a second embodiment of the refrigeration chuck apparatus according to the present invention.
As shown in the drawing, in addition to the first embodiment, an annular protrusion 13 surrounding a large number of protrusions 1 and a supply / drainage hole 2 for supplying a liquid between the annular protrusion 13 and the outer peripheral wall 4 are added.
In this embodiment, the adhesion area between the sample 12 and the annular protrusion 13 surrounding the large number of protrusions 1 and the back surface of the sample 12 increases, and the fixing force of the sample 12 in the tangential direction greatly increases.

FIGS. 3A and 3B are a plan view and a BB ′ sectional view showing a third embodiment of the refrigeration chuck apparatus according to the present invention.
As shown in the figure, in addition to the first embodiment, an annular protrusion 13 surrounding a large number of protrusions 1 and a cooling means such as a Peltier element for solidifying liquid existing in an annular region between the annular protrusion 13 and the outer peripheral wall 4. 15 is provided below the annular region. The solidification of the liquid 14 existing in the annular region is performed by cooling the cooling means 15 after the liquid 6 between the numerous projections 1 and the annular projections 13 and the back surface of the sample 12 is solidified. And the sample periphery can be securely fixed with a strong force. As shown in the figure, since the sample 12 can be embedded by increasing the amount of liquid as shown in the figure, the fixing force is extremely strong against the tangential force.

FIGS. 4A and 4B are a plan view and a BB ′ cross-sectional view showing a fourth embodiment of the refrigeration chuck apparatus according to the present invention.
As shown in the figure, an unnecessary liquid in Examples 1 and 2 is passed through the supply / discharge liquid hole 2, the liquid supply / discharge liquid groove 3, and the liquid supply / discharge liquid hole 7, and a vacuum pump or the like is added to the reserved liquid tank (not shown) By using and draining, it is possible to eliminate deformation of the sample 12 caused by unnecessary solidification of the liquid, and to further increase the fixing force with the sample 12 by lowering the temperature of the freezing plate. At the same time, in the case of the embodiment of FIG. 4B, when the fixing force in the vertical direction with respect to the sample 12 is weak, the fixing force can be increased by evacuation. In addition, since the intrusion of the processing liquid generated during processing is prevented by the annular protrusion 13, contamination of the chuck surface can be eliminated.

FIG. 5 is a front sectional view showing a fifth embodiment of the refrigeration chuck apparatus according to the present invention.
As shown in the figure, in addition to Example 4 (b), an annular protrusion 13 and means 16 for supplying liquid to be solidified in an annular region between the annular protrusion 13 and the outer peripheral wall 4 are provided. The same effect as in the third embodiment can be obtained by the adhesion of the liquid 14.

  FIG. 6 is an enlarged view of a protrusion showing a refrigeration chuck apparatus according to a sixth embodiment of the present invention. As shown in the figure, the chuck plate 8 including a large number of protrusions 1 and annular protrusions 13 is made of a material having high heat conduction, and forms a solidified liquid surface, that is, the upper surface of the large number of protrusions 1 and annular protrusions 13. And an annular region surrounded by the annular protrusion 13 and the outer peripheral wall 4 is covered with a material having poor heat conduction. As a result, the liquid solidifies early on the upper surfaces of the numerous protrusions 1 and the annular protrusions 13, and there is a large amount of liquid around them, so that the sample 12 is fixed without causing deformation of the sample 12 even if expanded. be able to.

  In the above-described embodiment, the pin-shaped minute protrusion 1 is provided as the protrusion, but a minute protrusion having a rectangular cross section may be provided as the protrusion. In the above-described embodiment, the circular chuck plate 8 is provided. However, a rectangular or elliptical chuck plate may be provided.

Further, when fixing a mask or the like used in the transfer apparatus, as shown in FIG. 7, the mask central portion needs to allow exposure light to pass therethrough, and a large number of protrusions 1 are provided only around the rectangular area. The sample 12 can be fixed by solidifying the liquid. Further, in this case, the force acting in the vertical direction is only the weight of the mask as compared with the processing, and the force acting in the horizontal direction is limited to the force caused by the acceleration when moving the mask in the left-right direction. Therefore, the number of protrusions can be reduced to a number in which the mask is not deformed and is not displaced. In an extreme case, the mask can be supported by only three.

  In the above embodiment, after the liquid on the upper part of the protrusion is solidified, the liquid in the other part is discharged. However, after supplying the liquid to the chuck suction surface, the liquid other than the upper part of the many protrusions and the annular protrusion is discharged. It is possible to take a procedure in which the liquid is then solidified and then the liquid on the top of the many protrusions and the annular protrusion is solidified. Further, in the above embodiment, the case where the liquid supply groove, the liquid discharge groove, and the air vacuum exhaust groove share the liquid supply / drain liquid groove, but these may be provided separately.

(A), (b) is the top view and front sectional view which show one Example of the freezing chuck | zipper apparatus which concerns on the 1st Embodiment of this invention. (A), (b) is the top view and front sectional view which show one Example of the freezing chuck | zipper apparatus which concerns on the 2nd Embodiment of this invention. (A), (b) is the top view and front sectional view which show one Example of the freezing chuck | zipper apparatus which concerns on the 3rd Embodiment of this invention. (A), (b) is front sectional drawing which shows one Example of the freezing chuck | zipper apparatus which concerns on the 4th Embodiment of this invention. These are front sectional drawings which show one Example of the freezing chuck | zipper apparatus which concerns on the 5th Embodiment of this invention. These are the enlarged views of the protrusion which show one Example of the freezing chuck | zipper apparatus which concerns on the 6th Embodiment of this invention. (A), (b) is the top view and front sectional view which show another Example of the freezing chuck | zipper apparatus which concerns on the 1st Embodiment of this invention. (A), (b) is the top view and front sectional view which show one Example of the conventional freezing chuck | zipper apparatus. FIG. 6 is a front sectional view showing an embodiment of a conventional freezing chuck device. (A), (b) is a solidification pattern which solidifies a liquid without deform | transforming a sample by cooling in the conventional freezing chuck | zipper apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Protrusion, 2 ... Supply / discharge liquid hole, 3 ... Liquid supply / discharge liquid groove, 4 ... Outer peripheral wall, 5 ... Chuck plate surface, 6 ... Solidified liquid, 7 ... Liquid supply / discharge liquid hole, 8 ... Chuck plate, 9 DESCRIPTION OF SYMBOLS ... Refrigeration plate, 10 ... Supply hole, 11 ... Return hole, 12 ... Sample, 13 ... Annular protrusion, 14 ... Adhesive liquid of annular region, 15 ... Cooling means, 16 ... Liquid supply means 30 ... Refrigeration chuck device, 32 ... Table, 32B ... Table surface, 32A, 34A, 34B ... Flow path, 34 ... Cooling means, 36 ... Heating means, 38 ... Detection means, 40 ... Controller, 41 ... Workpiece, 41 ... Cooler section, 43 ... Control means, 44 ... heater member, 46 ... driver, 48 ... temperature sensor, 50 ... temperature / voltage converter, 52 ... frozen chuck water

Claims (14)

A chuck plate for fixing the sample via the solidified liquid, a liquid supply means for supplying a liquid for forming a solidified liquid on the upper surface, and a liquid supply means for supplying the liquid to the chuck plate by the liquid supply means In the chuck apparatus comprising a freezing means for freezing liquid to form a solidified liquid, the chuck plate has a plurality of protrusions on the upper surface, and only the liquid existing between the upper surface of the protrusion and the back surface of the sample is solidified. A freezing chuck device having a structure for fixing a sample. The refrigeration chuck apparatus according to claim 1, further comprising an annular protrusion surrounding the protrusion in addition to the plurality of protrusions, and solidifying only the liquid existing between the multiple protrusions and the upper surface of the annular protrusion and the back surface of the sample. A refrigeration chuck device having a structure to be fixed. 3. The refrigeration chuck apparatus according to claim 2, wherein after solidifying only a large number of protrusions and a liquid existing between the upper surface of the annular protrusion surrounding the protrusion and the back surface of the sample, the liquid surrounded by the annular protrusion and the outer peripheral wall is solidified. And a means for fixing the outer periphery of the sample. 2. The refrigeration chuck apparatus according to claim 1, wherein means for discharging liquid other than the solidified liquid existing between the upper surface of the plurality of protrusions and the back surface of the sample to the reserved liquid tank through the supply / discharge liquid hole connected to the chuck plate. A refrigeration chuck device comprising: 3. The refrigeration chuck apparatus according to claim 2, wherein a liquid other than the solidified liquid existing between the upper surface of the large number of protrusions and the annular protrusions and the back surface of the sample is discharged to the retaining liquid tank through the supply / discharge liquid hole connected to the chuck plate. A refrigeration chuck apparatus comprising means for performing 6. The refrigeration chuck apparatus according to claim 5, wherein after the liquid other than the solidified liquid is discharged to the reserved liquid tank through the supply / discharge liquid hole connected to the chuck plate, the liquid is applied to the region surrounded by the annular protrusion and the outer peripheral wall. A refrigeration chuck apparatus comprising means for supplying and solidifying the liquid to fix the outer periphery of the sample. 7. The refrigeration chuck apparatus according to claim 5 , wherein after the liquid unnecessary for fixing the sample is discharged to the storage liquid tank, the air existing around the plurality of protrusions is evacuated through the supply / discharge liquid holes. A refrigeration chuck apparatus characterized by having means. 7. The refrigeration chuck apparatus according to claim 4, 5 or 6, wherein after the liquid unnecessary for fixing the sample is discharged by means for discharging it to the reserved liquid tank through the supply / drain liquid hole connected to the chuck plate, Is mounted on a plurality of protrusions, and a sample is fixed by solidifying the liquid existing between the upper surface of the plurality of protrusions or annular protrusions and the back surface of the sample. 9. The refrigeration chuck apparatus according to claim 8, further comprising means for evacuating air existing around a number of protrusions through the supply / drain holes after the sample is fixed. 9. The refrigeration chuck apparatus according to claim 8, further comprising means for supplying air having a temperature below the freezing point around the plurality of protrusions through the supply / drain holes after the sample is fixed. 6. The refrigeration chuck apparatus according to claim 1, wherein a surface of the chuck plate made of a material that easily conducts heat is covered with a material that is difficult to conduct heat except for the upper surfaces of the plurality of protrusions or annular protrusions. 11. The refrigeration chuck apparatus according to claim 2, wherein upper surfaces of the plurality of protrusions and the annular protrusions are on the same plane. 11. The refrigeration chuck apparatus according to claim 2, wherein an upper surface of the annular protrusion is formed to be slightly lower than that of the plurality of protrusions. The projection is part of the surface of the chuck device which faces the rear surface of the sample being the fixed, or any of claims 1 to 13, characterized in that disposed on at least part of the location-apart three points or refrigeration chuck device according to item 1.

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