JP2006000771A - Reactor, operating method for reactor, fuel cell and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reactor that can carry out a chemical reaction according to a required amount of a product without changing reaction conditions of reactant fluids and give the product without lowering reaction efficiency relating to heating energy, and a method for efficiently operating the reactor. <P>SOLUTION: The reactor is equipped with two or more small channels and chemical reaction is controlled in each channel, and thus the required amount of a product and an energy input for heating can be controlled by the number of the channels to be used. Consequently, reaction can be carried out without lowering the reaction efficiency relating to the heating energy even when a small amount of the product is required. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a reaction apparatus, and also relates to a method for operating the reaction apparatus, a fuel cell including the reaction apparatus, and an electronic apparatus.

  A fuel cell is a power generation element that generates power by electrochemically reacting a fuel gas such as hydrogen or methanol with an oxidant gas such as oxygen. The fuel cell is attracting attention as a power generation element that does not pollute the environment because the product generated by power generation is water. In addition, it has a feature that it has a long life and a high energy density compared to a secondary battery or the like. For example, it is attempted to be used as a driving power source to drive a portable electronic device.

  By the way, it is possible to form a chemical reaction device called a microreactor on a silicon wafer by applying a semiconductor process, etc., and to generate hydrogen with high fluctuation efficiency by a chemical reaction using a catalyst. Suitable for downsizing.

  Therefore, as a small reformer, for example, a chemical reactor having a reaction channel that is continuously formed and converts a first fluid substance into a second fluid substance, and means for supplying heat to the channel is provided. Reactor (see, for example, Patent Document 1), means for injecting reformed material into a chamber for reforming reformed material, means for heating and evaporating reformed material, and catalyst for reforming reformed material And a reformer (see, for example, Patent Document 2).

JP 2003-299946 A JP 2003-048701 A

  The chemical reaction device of Patent Document 1 and the reforming device of Patent Document 2 are devices in which one reaction channel is meandered on one substrate. By meandering the reaction channel, a long channel can be formed on the substrate, thereby improving the reaction efficiency. However, in such a flow path, the temperature distribution in the flow path becomes large, causing a problem that side reactions are likely to occur. In addition, a wide area of the substrate must be heated, and energy consumption increases.

  Furthermore, if it is attempted to control the amount of product in one reaction channel, the temperature in the reaction channel must be kept high and constant, and if the product amount may be small, the product However, there is a problem that the amount of heat required for the amount of the production becomes large.

  Therefore, in view of the conventional situation as described above, the chemical reaction is performed without changing the reaction conditions of the fluid according to the required amount of the product, and the product is reduced without reducing the reaction efficiency with respect to the energy of heating. It aims at providing the reactor which can be supplied. It is another object of the present invention to provide a method for operating a reactor that can perform an efficient reaction using the reactor. Furthermore, it aims at providing the fuel cell and electronic device provided with the said reaction apparatus.

  The reaction apparatus of the present invention is characterized in that a plurality of fine reaction channels for chemically reacting fluids are connected in parallel, and a chemical reaction is independently performed for each of the reaction channels.

  According to the reaction apparatus of the present invention, a plurality of fine reaction channels for chemically reacting a fluid are provided, and a chemical reaction can be performed independently for each channel. As a result, the required amount of reaction product can be adjusted not by the amount of fluid supplied to the flow path but by the number of reaction flow paths. Therefore, the amount of fluid supplied to each flow path is always constant, and it is not necessary to reexamine the reaction conditions each time even if the required amount of reaction product varies. In addition, the chemical reaction can always be performed under optimum reaction conditions.

  The reaction apparatus of the present invention has a plurality of fine reaction channels for chemically reacting a fluid, and a heating means provided for each of the reaction channels and independently heating the plurality of reaction channels. A plurality of the reaction flow paths are connected in parallel, and the chemical reaction is performed independently for each reaction flow path.

  According to the reaction apparatus of the present invention, since the plurality of reaction flow paths for chemically reacting the fluid are fine, the amount of fluid flowing into the reaction flow path is small, so the temperature rise time and temperature drop time of the fluid are shortened. can do. Thereby, the time required for starting and stopping can also be performed in a short time. Furthermore, the temperature in the flow path becomes uniform, and a reduction in reaction efficiency due to side reactions or the like can be prevented.

  Moreover, the energy required for heating can also be adjusted by controlling the chemical reaction in a plurality of fine reaction channels for each channel. In other words, even if the amount of product required is small, by adjusting the number of reaction flow channels used and the energy required for heating, the amount of product generated relative to the energy consumed for heating is reduced. The chemical reaction can be carried out without causing it. Furthermore, the heating means for heating can be reduced by making the reaction channel fine.

  The reaction apparatus of the present invention has a plurality of fine reaction channels for performing chemical reactions of fluids, and a heating channel for heating the reaction channels formed in proximity to each of the plurality of reaction channels. A plurality of the reaction flow paths are connected in parallel, and the chemical reaction is performed independently for each reaction flow path.

  According to the reaction apparatus of the present invention, by providing the heating channel, the reaction channel for performing the chemical reaction can be heated. In addition, since the heating channel can be formed by a fine channel, the apparatus can be reduced in size and thickness. Furthermore, since the heating channel and the reaction channel can be manufactured at the same time, the number of manufacturing steps of the reaction apparatus of the present invention can be reduced.

  The operating method of the reaction apparatus of the present invention is an operating method of the reaction apparatus in which a plurality of fine reaction channels for chemically reacting a fluid are connected in parallel, and the step of causing the fluid to flow into the reaction channel And a step of causing a chemical reaction independently for each of the reaction flow paths.

  According to the operation method of the reaction apparatus of the present invention, the required amount of reaction product can be adjusted by the number of flow paths by controlling a plurality of reaction flow paths for each flow path. Thereby, the production amount of the reaction product can be adjusted without changing the reaction conditions of each reaction channel, and the reaction efficiency can be improved and the by-product can be easily controlled. At this time, by changing the volume of each reaction channel, the channel to be used can be selected according to the amount of product required, and the number of channels to be used can be reduced. .

  Furthermore, by controlling the control unit and the heating means, the fluid can be retained in the flow path, and the reaction can be sufficiently performed even in a relatively long-time reaction, thereby improving the reaction efficiency. Even in a long-time reaction, the apparent reaction time can be shortened by controlling the products from the plurality of flow paths to be discharged at different times. Further, the reaction product can be controlled to remain in the flow path. Thereby, even if the quantity of the required product increases suddenly, it can respond immediately. In addition, by keeping fluid and reaction products in the flow path, the flow path can be used as a storage container for other equipment connected to the reaction apparatus, and the equipment can be controlled.

  A fuel cell according to the present invention includes a reaction apparatus in which a plurality of fine reaction flow paths for chemically reacting a fluid are connected in parallel and each of the reaction flow paths is independently subjected to a chemical reaction, and fluid chemistry in the reaction apparatus. And a power generation unit that generates power using a product generated by the reaction.

  According to the fuel cell of the present invention, the amount of product produced by the reaction apparatus can be adjusted by the number of reaction channels. Therefore, it is easy to change the amount of the product generated from the reactor according to the required power generation amount, and the reaction is controlled for each flow path. Can be supplied.

  Further, the energy required for the reaction can be adjusted for each flow path, and it is possible to prevent the power generation efficiency of the power generation unit with respect to the consumed energy from being reduced regardless of the power generation amount of the power generation unit. Moreover, since the reaction apparatus can also store a product in a flow path, even if the required electric power generation amount increases rapidly, it can respond by supplying the stored product.

  An electronic apparatus according to the present invention includes a reaction device in which a plurality of fine reaction flow paths for chemically reacting a fluid are connected in parallel and each of the reaction flow paths is independently subjected to a chemical reaction, and fluid chemistry in the reaction device. And a power generation unit that generates power using a product generated by the reaction, and operates by receiving power generated by the power generation unit.

  According to the electronic device of the present invention, by providing the reaction apparatus, the amount of product produced can be efficiently adjusted by the number of flow paths. That is, the amount of power required by the electronic device can be adjusted by the number of flow paths. Therefore, it is possible to provide an electronic device that can be moved stably even if an operation is performed in which the amount of electric power required by the electronic device is different. Further, since hydrogen can be stored in a flow path that is not used, it is possible to quickly cope with a case where power is rapidly required.

  The reaction apparatus of the present invention includes a plurality of fine reaction flow paths for chemically reacting a fluid, and can perform a chemical reaction independently for each flow path. As a result, the required amount of reaction product can be adjusted not by the amount of fluid supplied to the flow path but by the number of reaction flow paths. Therefore, the amount of fluid supplied to each flow path is always constant, and it is not necessary to reexamine the reaction conditions each time even if the required amount of reaction product varies. In addition, the chemical reaction can always be performed under optimum reaction conditions. In addition, since the amount of fluid flowing into the reaction channel is small, the temperature rise time and temperature fall time of the fluid can be shortened. Thereby, the time required for starting and stopping can also be performed in a short time.

  Furthermore, the temperature in the flow path becomes uniform, and a reduction in reaction efficiency due to side reactions or the like can be prevented. Moreover, the energy required for heating can also be adjusted by controlling the chemical reaction in a plurality of fine reaction channels for each channel. That is, even if the amount of product required is small, by adjusting the number of reaction channels to be used and the energy required for heating, the amount of product generated relative to the energy consumed for heating is reduced. The chemical reaction can be carried out without causing it. Furthermore, the heating means for heating can be reduced by making the reaction channel fine. Further, by providing the heating channel, the reaction channel for performing a chemical reaction can be heated.

  In addition, since the heating channel can be formed by a fine channel, the apparatus can be reduced in size and thickness. Furthermore, since the heating channel and the reaction channel can be manufactured at the same time, the number of manufacturing steps of the reaction apparatus of the present invention can be reduced. In addition, the fuel cell and the electronic device formed by using the reaction apparatus of the present invention can provide a product flexibly and efficiently according to the required amount of power, and perform stable operation. be able to.

  In the operation method of the reaction apparatus of the present invention, the required amount of reaction product can be adjusted by the number of flow paths by controlling a plurality of reaction flow paths for each flow path. Thereby, the production amount of the reaction product can be adjusted without changing the reaction conditions of each reaction channel, and the reaction efficiency can be improved and the by-product can be easily controlled. At this time, by changing the volume of each reaction channel, the channel to be used can be selected according to the amount of product required, and the number of channels to be used can be reduced. .

  Furthermore, by controlling the control unit and the heating means, the fluid can be retained in the flow path, and the reaction can be sufficiently performed even in a relatively long-time reaction, thereby improving the reaction efficiency. Even in a long-time reaction, the apparent reaction time can be shortened by controlling the products from the plurality of flow paths to be discharged at different times. Further, the reaction product can be controlled to remain in the flow path. Thereby, even if the quantity of the required product increases suddenly, it can respond immediately. In addition, by keeping fluid and reaction products in the flow path, the flow path can be used as a storage container for other equipment connected to the reaction apparatus, and the equipment can be controlled.

  Hereinafter, the reaction apparatus of the present invention and the operation method of the reaction apparatus will be described in detail with reference to the drawings. It should be noted that the present invention is not limited to the following description, and can be appropriately changed without departing from the gist of the present invention.

  FIG. 1 is a perspective view showing a cross-sectional shape of a reaction apparatus as an example of the reaction apparatus 1 of the present invention. The reaction apparatus 1 of the present invention includes a plurality of fine reforming channels 300 that perform a reforming reaction for reforming a fuel such as methanol or ethanol as a chemical reaction on the substrate 2, and are arranged close to each reforming channel 300 to generate heat. It has a fine combustion channel 310 for performing a combustion reaction for burning fuel as a reaction, and a heat conduction plate 210 for transmitting heat generated by the combustion reaction in the combustion channel 310 to the reforming channel 300. Yes.

  Further, the reforming passage 300 has a reforming catalyst 220 for the reforming reaction and a heater 240 for heating the fuel in the passage, and the combustion passage 310 has a combustion catalyst for the combustion reaction. 230 and a heater 240 for heating the fuel in the flow path. And the reaction apparatus 1 of this invention has the control part which is not shown in figure which can control the inflow and outflow of a fuel for every flow path. Moreover, you may have the fuel supply apparatus which supplies the fuel.

  In FIG. 1, three reforming channels are described, but the number of reforming channels is not limited, and may be changed as appropriate depending on the amount of product of the required reforming reaction. Can do.

  The reforming channel 300 has a fine, substantially rectangular shape, and a plurality of reforming channels 300 are formed on the substrate 2. The reforming channel 300 is arranged between the reforming channel 300 and the combustion channel 310 in order to dispose the combustion channel 310 that performs a combustion reaction in close proximity and to transfer heat generated in the combustion channel 310 to the reforming channel 300. A heat conducting plate 210 is arranged so as to connect the upper surfaces. In addition, the reforming channel 300 has a reforming channel supply port 400 through which fuel flows into the reforming channel 300 in order to perform a fuel reforming reaction, hydrogen generated by reforming the fuel, reaction products, and the like. And a reforming channel discharge port 410 for discharging the gas.

  Further, inside the reforming channel 300, there are a reforming catalyst 220 for reforming the fuel and a heater 240 for heating the reforming channel 300 in order to perform a reforming reaction. Further, a temperature measuring device for measuring the temperature in the flow path may be provided in the flow path so that the combustion reaction of the heater 240 and the combustion flow path described below can be controlled. Examples of the temperature measuring device include a temperature sensor that performs temperature detection using the temperature characteristics of a resistor.

  In the reforming channel 300, the fuel is introduced into the channel from the reforming channel supply port 400, the fuel and the reforming catalyst 220 are brought into contact with each other in the channel, and the combustion reaction in the heater 240 and the combustion channel 310 is performed. The reforming reaction can be performed by heating. In the present invention, “fine” means very fine and can be formed using a semiconductor manufacturing process (microelectromechanical system technology, so-called MEMS technology). For example, a fine flow path indicates a very fine flow path, and indicates a flow path formed by MEMS technology.

  The reforming channel 300 is not particularly limited as long as a fine channel can be formed. For example, when a fine modified flow path 300 is formed by processing a silicon plate material, the modified flow path 300 may be formed of a film made of silicon oxide. Further, the plate material forming the reforming channel 300 is not limited to silicon, and the material when the channel is formed is resistant to fuel and hydrogen generated by the reforming reaction. It is not particularly limited as long as it is made of a material having resistance to heat in the reaction. For example, the plate material forming the reforming channel 300 may be a material such as ceramics.

  In addition, the shape of the reforming flow path 300 is appropriately changed depending on the amount of product generated, and not all of the reforming flow paths 300 provided on the substrate 2 may have the same shape. For example, you may form the flow path which changed the cross-sectional area of the flow path, or the length of the flow path.

  The combustion channel 310 is disposed in proximity to each reforming channel 300. In addition, the upper surface of the combustion channel 310 has a heat conduction plate 210 disposed so as to be connected to the upper surface of the reforming channel 300. The combustion channel 310 has a combustion channel supply port 420 through which fuel flows into the combustion channel 310 and a combustion channel exhaust port 430 through which products generated by the combustion of the fuel are discharged in order to perform combustion. ing. Further, the combustion flow path 310 includes a combustion catalyst 230 for burning fuel and a heater 240 for heating the combustion flow path 310 to perform a combustion reaction.

  Inside the combustion channel 310, the fuel is caused to flow into the channel from the combustion channel supply port 420, the fuel and the combustion catalyst 230 are brought into contact with each other in the channel, and the combustion reaction is performed by heating with the heater 240. Can do. That is, the combustion flow path 310 heats the reforming flow path 300 that performs the reforming reaction together with the heat conduction plate 210 described below, and more specifically, heating means for heating the fuel in the reforming flow path 300. Can be used as

  Further, a temperature measuring device or the like for measuring the temperature in the flow path may be provided in the flow path so that the heater 240 can be controlled. Examples of the temperature measuring device include a temperature sensor that performs temperature detection using the temperature characteristics of a resistor. Similarly to the reforming flow path 300, the combustion flow path 310 can also be formed using MEMS technology.

  The material of the combustion channel 310 is not particularly limited as in the case of the combustion channel 300, and can be changed as appropriate. Further, the shape of the combustion channel 310 is not particularly limited, and can be appropriately changed depending on the shape of the reforming channel 300, the heat generation amount, and the like. Further, not all of the combustion flow paths 310 provided in the substrate 2 may have the same shape. Furthermore, when the reforming reaction in the reforming channel 300 proceeds by heating only the heater 240, the combustion channel 310 may not be provided. If the combustion reaction in the combustion channel 310 does not require heating by the heater 240, the heater 240 may not be provided.

  The heat conducting plate 210 has a plate shape and is disposed so as to connect the upper surface of the fine reforming flow path 300 and the fine combustion flow path 310. The heat conduction plate 210 can transmit heat generated by the combustion reaction in the combustion channel 310 to the reforming channel 300. The heat conduction plate 210 is surrounded by a substantially vacuum to form a heat insulating space, and the heat generated in the combustion channel 310 can be efficiently transmitted to the reforming channel 300.

  The heat conduction plate 210 can be used as a heating means for heating the fuel in the reforming channel 300 that performs the reforming reaction together with the combustion channel 310. The heat conductive plate 210 can also be formed using the MEMS technology, and the material is appropriately changed by this processing method. For example, in the case where the heat conductive plate 210 is formed by processing a silicon plate material, the heat conductive plate 210 may be processed by diffusing boron (boron) into a portion that becomes the heat conductive plate 210. In addition, a metal film formed of a highly heat conductive material such as copper, aluminum, nickel, gold, silver, or platinum may be used as the heat conductive plate 210. The shape and number of the heat conductive plates 210 are not particularly limited, and can be appropriately changed depending on the shape of the reforming flow channel 300 and the combustion flow channel 310. In addition, for example, when the reforming reaction in the reforming channel 300 proceeds only by the heating of the heater 240, the heat conducting plate 210 may not be provided as in the combustion channel 310.

  The heater 240 is a heat generating resistor installed on the inside of the fine reforming channel 300 and the upper surface of the inside of the fine combustion channel 310, and can generate heat when energized. In the present invention, the heating resistor generates heat when energized. Further, since it is necessary to energize the heater 240 for heating, the heater 240 is connected to the electrode 250 so that power can be supplied from the outside of the substrate 2.

  The heater 240 generates heat when energized during the reforming reaction in the reforming channel 300 and the combustion reaction in the combustion channel 310, and can heat the fuel in the channel. That is, the heater 240 can be used as a heating unit that heats the fuel in the reforming channel 300 that performs the reforming reaction. The material of the heater 240 is not particularly limited as long as it is formed of a high resistance material that generates heat when energized.

  The heater 240 can also be formed by processing the substrate 2 by MEMS technology. For example, the high resistance material can be formed on the upper surface portion inside the flow path by using a method such as vapor deposition. The heater 240 may not be provided in the reforming flow path 300 when the reforming reaction proceeds only with heat generated by the combustion reaction. Further, the heater 240 may not be provided in the combustion flow path 310 when the combustion reaction proceeds only with the combustion catalyst 230. The installation position of the heater 240 is not limited to the upper surface of the flow path, and may be installed at any position as long as the fuel flowing through the flow path can be heated.

  The reforming catalyst 220 is formed near the heater 240 on the upper surface inside the reforming channel 300, and can heat the reforming channel 300 and reform the internal fuel to generate hydrogen. As a result, the fuel flowing into the reforming channel 300 can be converted to hydrogen by the reforming reaction. Examples of the reforming catalyst 220 include, in addition to oxides such as copper and aluminum, Group 8 metals such as cobalt to Group 10 metals or alloys based on them, and the like, depending on the fuel and reaction conditions. Can be changed.

  Similarly to the reforming catalyst 220, the combustion catalyst 230 is formed near the heater 240 on the upper surface of the combustion flow path 310. The combustion catalyst 230 can generate heat that is transferred to the reforming channel 300 by burning fuel in the combustion channel 310. The generated heat is transmitted to the reforming channel 300 by the heat conducting plate 210, and the fuel can be reformed in the reforming channel 300. Examples of the combustion catalyst 230 include metals such as platinum and alloys or oxides based on the metals. The combustion catalyst 230 can be appropriately changed according to the fuel, and may support porous alumina or the like.

  The control unit 7 can control the flow of fuel into and out of the reforming flow channel 300 and the combustion flow channel 310, and can independently control each flow channel. Therefore, the control unit 7 is installed in the vicinity of the fuel supply port and / or the discharge port in each flow path, and may be installed on the substrate 2 or not. Moreover, although the board | substrate 2 may be formed at the time of formation, you may mount after formation of the board | substrate 2. FIG.

  Examples of the control unit 7 include devices such as a check valve that can control the flow direction of fuel in one direction and a valve that can control the flow of fuel into and out of the flow path. For example, when the check valve is the control unit 7, the fuel can be flowed into the flow path by applying pressure, and the flow direction of the fuel can be limited. And the backflow of a fuel and a reaction product can also be prevented by the pressure rise by the reaction of fuel, etc. Further, when the valve is the control unit 7, the flow of fuel into and out of each flow path can be controlled. For example, when two of the three channels are used, fuel can flow into the two channels by opening two valves and closing one.

  The control device can control the control unit 7 and the heater 240 independently. For example, when a reaction is desired to be performed in a predetermined flow path, the control unit 7 on the supply port side and the discharge port side of the predetermined flow path is controlled so that fuel is supplied to the flow path, and the reaction is performed. By operating the heater 240, the fuel can be heated and reacted. This control method can be changed as appropriate. Moreover, you may control with the heater 240, referring values, such as a temperature measuring apparatus.

  Moreover, the reaction apparatus 1 of the present invention may have a fuel supply device that supplies fuel to the reforming flow path 300 and the combustion flow path 310. In the present invention, the fuel supply device indicates a device that can supply fuel to the flow path, and is a device that can control the flow rate of the fuel. Examples of the fuel supply device include a droplet discharge device that can discharge fuel droplets toward a flow path, a so-called inkjet nozzle, and a spray device that sprays fuel toward the flow path, a so-called spray nozzle. And the like. For example, when fuel is caused to flow into the flow path by the droplet discharge device, not only can the supply of fuel into the flow path be controlled, but also the flow rate of the fuel can be controlled, and the time for passage through the flow path can be controlled. It can be carried out. Thereby, control of reaction time can also be performed. In the case of a spraying device, fuel can be sprayed directly on the catalyst surface, and the conversion rate and reaction rate can be improved. For example, when the fuel supply device is installed near the supply port of each flow path, the control unit 7 may not be installed near the supply port. In addition, this fuel supply device may be controlled by a control device or the like together with the control unit 7 and the heater 240 while referring to a temperature measurement device in the flow path.

  As described above, the reactor 1 of the present invention includes a plurality of fine reforming channels 300, the combustion channel 310, the heat conduction plate 210, the heater 240, the reforming catalyst 220, and the combustion catalyst 230 in the substrate 2. And have. These can be formed by utilizing MEMS technology. For example, as shown in FIGS. 2 and 3, the substrate 2 may be formed by bonding a plate-like member formed with a flow path or the like, another plate-like member formed with a heater 240, or the like. Below, each plate-shaped member which forms the board | substrate 2 is demonstrated.

  FIG. 2 is an exploded perspective view showing an example of the substrate of the reaction apparatus of the present invention. The substrate 2 includes an upper plate member 10, a heat transfer plate member 20 including a concave portion 200 that becomes a heat insulating space by bonding the upper plate member 10, and a heat conductive plate 210 that functions as a heat exchanger in the concave portion 200, and a reforming reaction A reforming channel for supplying the reforming channel 300 with a fuel for use in the reforming reaction, and a channel forming plate member 30 including a fine reforming channel 300 for performing the combustion reaction and a fine combustion channel 310 for performing the combustion reaction. A reforming channel discharge port 410 that discharges reaction products and the like from the supply port 400 and the reforming channel 300, a combustion channel supply port 420 that supplies fuel used for the combustion reaction to the combustion channel 310, and a combustion flow It is formed by joining a lower plate member 40 having a combustion flow path discharge port 430 for discharging reaction products and the like from the path 310.

  Moreover, FIG. 3 is the perspective view which showed the back side of each board | plate material which shows an example of the board | substrate of the reaction apparatus of this invention. On the back side of the heat transfer plate member 20, a reforming catalyst 220 serving as a reforming reaction catalyst in the reforming passage 300 of the passage forming plate member 30, a combustion catalyst 230 serving as a combustion reaction catalyst in the combustion passage 310, A heater 240 for heating the fuel in the flow path and an electrode 250 for supplying power to the heater 240 are provided. Further, on the back side of the flow path forming plate member 30, there are a recess 320 and a connection hole 330 so as to connect each supply port and each discharge port of the lower plate member 40 to each flow channel.

  The upper plate member 10 is a plate-like member having a predetermined thickness, and is joined to the surface having the recess 200 of the heat transfer plate member 20 described below. By joining with the heat transfer plate member 20, the recess 200 can be made into a heat insulating space. The material and shape of the upper plate 10 are not particularly limited, and are appropriately selected depending on the material and shape of the heat transfer plate 20 such as a linear expansion coefficient and thermal conductivity. For example, when silicon is used for the heat transfer plate material 20, synthetic resins such as silicon, ceramics, glass, polyimide, polytetrafluoroethylene, and polydimethylsiloxane can be used.

  The heat transfer plate 20 is a plate-like member having a recess 200 and has a heat conduction plate 210 on the bottom surface of the recess 200. The heat conduction plate 210 serves as a heat exchanger for exchanging heat between the reforming flow path 300 and the combustion flow path 310 described below, and heat generated by the combustion reaction occurring in the combustion flow path 310 is transferred to the heat conduction plate. It can be transmitted to the reforming channel 300 via 210. Further, on the back side of the surface having the recess 200, a heater 240 for heating fuel flowing into the reforming channel 300 and the combustion channel 310 of the channel forming plate member 30, and the reforming reaction in the reforming channel 300 are performed. The reforming catalyst 220 and the combustion catalyst 230 in the combustion reaction in the combustion flow path 310 are included.

  The heater 240 and the reforming catalyst 220 are formed at a position such that the heater 240 and the reforming catalyst 220 are accommodated in the reforming flow path 300 by joining the heat transfer plate 20 and the flow path forming plate 30. In addition, the heater 240 and the combustion catalyst 230 are formed at a position that fits inside the combustion flow path 310 by joining the heat transfer plate material 20 and the flow path forming plate material 30. The electrode 250 of the heater 240 is installed so as to be exposed on the surface of the substrate 2 and can be supplied with electric power from the outside. The material of the heat transfer plate 20 is not particularly limited, and for example, a plate formed of a material such as silicon may be used.

  The recess 200 has a substantially rectangular shape and is provided on a predetermined surface of the heat transfer plate member 20, and has a heat conduction plate 210 on the bottom surface of the recess 200. The number of recesses 200 varies depending on the number of reforming channels 300 formed in the reaction apparatus 1, and the shape thereof is appropriately changed according to the shape of the reforming channel 300. This recessed part 200 can be made into the heat insulation space by joining with the upper side board | plate material 10 in a substantially vacuum state, for example. Thereby, the heat generated by the combustion reaction in the combustion channel 310 can be efficiently transmitted to the reforming channel 300 via the heat conduction plate. Further, heat related to the reaction, for example, heat of the fuel reaction or heat from the heater 240 or the like can be prevented from radiating to the outside of the substrate 2.

  The flow path forming plate 30 has a plurality of reforming channels 300 that perform a reforming reaction on the contact surface with the heat transfer plate 20, and a combustion channel that performs a combustion reaction adjacent to the reforming channel 300. 310. Further, a recess 320 is provided at a position corresponding to the reforming flow path 300 and the combustion flow path 310 on the back side of the surface having the reforming flow path 300 and the combustion flow path 310 of the flow path forming plate member 30.

  The concave portion 320 forms a heat insulating space by joining with the lower plate member 40 described below, and can prevent release of heat generated in the flow path. Further, the bottom surfaces of both ends of each flow path have connection holes 330 connected to the supply ports and the discharge ports provided in the lower plate member 40, and the connection holes 330 flow from the bottom surfaces of the flow paths. It is formed so as to penetrate the back side of the path forming plate member 30. The fuel can be supplied into the flow path or discharged from the flow path to the outside of the substrate 2 through the connection hole 330. The material of the heat transfer plate 20 is not particularly limited, and for example, a plate formed of a material such as silicon may be used.

  The recess 320 has a substantially rectangular opening on the back surface of the flow path forming plate member 30, and is provided at a position corresponding to the reforming flow path 300 and the combustion flow path 310. Further, the recess 320 is processed using the MEMS technology so that the wall surfaces of the reforming channel 300 and the combustion channel 310 are left as thin films from the back surface of the channel forming plate member 30. For example, the wall surfaces of the reforming channel 300 and the combustion channel 310 are formed by forming an oxide film, a nitride film, or a diffusion layer of impurity ions, and then scraping these films and layers from the back side.

  For example, the recess 320 can be formed as a heat insulating space by joining the flow path forming plate 30 and the lower plate 40 described below in a substantially vacuum, so that heat is not released to the outside. be able to. Further, a radiation preventing film that reflects heat may be provided on the wall surface of the recess 320 of the flow path forming plate 30. Thereby, when forming the heat insulation space with the lower side board | plate material 40, while preventing the heat | fever which generate | occur | produces by the heater 240 and reaction to escape outside, the generated heat | fever can be utilized effectively.

  The lower plate member 40 is formed of a plate-like member having a predetermined thickness like the upper plate member 10 and is joined to the surface of the flow path forming plate member 30 having the recess 320. Further, the lower plate member 40 includes a reforming channel supply port 400 that supplies fuel to the reforming channel 300, a combustion channel supply port 420 that supplies fuel to the combustion channel 310, and the reforming channel 300. It has a reforming channel outlet 410 for discharging the reaction product and a combustion channel outlet 430 for discharging the reaction product from the combustion channel 310, and a position corresponding to the connection port 330 of the channel forming plate member 30. Is provided. The supply port and the discharge port are formed so as to penetrate the surface of the lower plate 40 that is joined to the flow path forming plate 30 and the surface opposite to the surface. Thereby, fuel can be supplied from the outside of the substrate 2 to each flow path, and the products of the reforming reaction and the combustion reaction performed in the reforming flow path 300 and the combustion flow path 310 can be discharged.

  Further, the lower plate member 40 may be formed with a radiation preventing film that reflects heat at a position where the recessed portion 320 and the heat insulation space are formed by joining with the flow path forming plate member 30. Thereby, it is possible to reflect the heat generated in the flow path and prevent the heat from being released to the outside of the reformer. The material and shape of the lower plate member 40 are not particularly limited, as with the upper plate member 10, and are appropriately selected depending on the material and shape of the flow path forming plate member 30 such as the linear expansion coefficient and thermal conductivity. For example, when silicon is used for the flow path forming plate member 30, synthetic resins such as silicon, ceramics, glass, polyimide, polytetrafluoroethylene, and polydimethylsiloxane can be used.

  The board | substrate 2 can be formed by joining the said board | plate material. Next, an example of the processing method of the said board | plate material which forms the board | substrate 2 is demonstrated, referring drawings. In FIGS. 4 to 6, a single reforming channel is described in the figure, but a plurality of channels can be formed simultaneously using the method described below. Also, the shape of the flow path can be changed as appropriate by changing the patterning or the like. The patterning and etching steps are not limited to the methods shown below, and can be changed as appropriate. Etching methods include, for example, dry etching (RIE), wet etching, ultraviolet (UV) light etching, laser etching, proton light etching, electron beam drawing etching, micromolding, plasma etching, and anisotropic etching using a solution. And the like can be appropriately changed depending on the shape of the substrate to be manufactured.

  FIG. 4 is a diagram illustrating an example of a manufacturing process of the heat transfer plate member 20, and shows a cross section in the width direction and a cross section in the longitudinal direction of the heat transfer plate member 20.

  The rectangular parallelepiped plate-shaped heat transfer plate 20 made of silicon forms an oxide film 21 on the surface of the heat transfer plate 20 by a method such as using water vapor at a high temperature as shown in FIG. In order to form the boron diffusion layer, a part of the oxide film 21 on the surface is removed, and the oxide film 21 is patterned as shown in FIG.

  As shown in FIG. 4C, the heat transfer plate 20 that has been subjected to the patterning of the oxide film 21 can form boron diffusion layers 22 and 23 by diffusing boron. The boron diffusion layer 22 has locally high thermal conductivity in this portion by diffusing impurity ions in silicon. Therefore, the boron diffusion layer 22 can be used as a heat conductive plate. The boron diffusion layer 22 can be used as a heat conductive plate, but a metal plate or the like can be used as the heat conductive plate as described above. In this case, a heat conductive plate may be formed by bonding a metal plate or metal foil to the boron diffusion layer 22 portion. Further, the boron diffusion layer 23 also serves as a mask for a later process.

  In the heat transfer plate 20, the boron diffusion layers 22 and 23 are formed, and then the oxide film 21 formed in the above process can be removed by etching as shown in FIG. Then, as shown in FIG. 4E, the heat transfer plate 20 has the boron diffusion layer 22 of the heat transfer plate 20 on one surface having the boron diffusion layer 22 by chemical vapor deposition (hereinafter referred to as CVD) method or the like. An oxide film 24 can be formed on the surface. The oxide film 24 also serves as an insulating layer between the wiring to be formed later and the boron diffusion layer 22.

  After the oxide film 24 is formed on the heat transfer plate 20, the wiring 25 including a heater is formed on the outer surface of the oxide film 24 as shown in FIG. As this method, for example, it can be formed by patterning by a plasma CVD method using polysilicon. At this time, wiring including a sensor capable of detecting temperature together with the formation of the wiring 25 may be performed.

  In the heat transfer plate material 20, after the wiring 25 is formed, an oxide film 26 can be formed so as to cover the oxide film 24 and the wiring 25 as shown in FIG. The oxide film 26 functions as an electrical insulator.

  The heat transfer plate 20 on which the oxide film 26 is formed etches part of the oxide film 26 and exposes part of the wiring 25 as shown in FIG. This exposed portion is an electrical connection portion with an external circuit, and can be used as the heater electrode 250.

  FIG. 5 is a diagram showing an example of a manufacturing process of the flow path forming plate member 30, and shows a width direction cross section and a longitudinal direction cross section of the flow path forming plate material 30.

  As shown in FIG. 5A, the plate-like flow path forming plate material 30 formed of silicon forms an oxide film 31 on the surface of the flow path forming plate material 30 by a method such as using water vapor at a high temperature. In order to form a boron diffusion layer in the next step, a part of the surface of the oxide film is removed, and the oxide film 31 is patterned as shown in FIG.

  As shown in FIG. 5C, the flow path forming plate material 30 on which the oxide film 31 has been patterned can form a boron diffusion layer 32 by diffusing boron. The boron diffusion layer 32 is used as a mask for a later process.

  After forming the boron diffusion layer 32, the flow path forming plate material 30 performs patterning of the oxide film 31, peels off the oxide film 31 in the flow path, and performs a method such as dry etching or anisotropic wet etching. The groove 33 is dug. Then, the flow path forming plate member 30 can peel the oxide film 31 on the surface opposite to the surface on which the groove 33 is formed, thereby forming a plate member having the groove 33 as shown in FIG. The groove 33 can be used as a reforming channel and a combustion channel when the plates are joined to produce a substrate. Thus, by using the MEMS technology, the groove 33 having a substantially rectangular cross section can be easily formed, and a plurality of grooves 33 can be formed at the same time. Therefore, a plurality of fine flow paths can be formed on the substrate, and the reaction apparatus can be reduced in size and thickness.

  As shown in FIG. 5E, the flow path forming plate member 30 in which the grooves 33 are formed is formed with an oxide film 34 on the surface on which the grooves 33 are formed as shown in FIG. The surface of the groove 33 that becomes the path can be covered with the oxide film 34 that becomes the wall surface of the flow path.

  FIG. 6 is a diagram illustrating an example of joining of the heat transfer plate 20 and the flow path forming plate 30 and assembly of the substrate, and the width direction of the plate obtained by bonding the heat transfer plate 20 and the flow path forming plate 30 A cross section and a longitudinal cross section are shown.

  After the surfaces of both substrates are cleaned, the heat transfer plate 20 and the flow path forming plate 30 are heated or pressurized to form a surface on the wiring 25 side and a surface on the groove 33 side as shown in FIG. The electrodes 250 and the flow path forming plate member 30 are joined so as not to contact each other.

  Since the boron diffusion layers 23 and 32 on the surface of the heat transfer plate member 20 and the flow path forming plate member 30 function as a mask, the boron diffusion layer 23 is formed by anisotropic wet etching or the like as shown in FIG. , 32 can be selectively scraped off. As a result, the recesses 200 and 320 can be formed, and a channel formed of a silicon oxide thin film can be formed. At this time, the boron diffusion layer 22 serving as a heat conductive plate is exposed. In this way, by forming the recesses 200 and 320 after joining both plate materials, the adhesion between the thin films can be ensured and the handling of the plate materials becomes easy, and damage or destruction of the structure during the production. This eliminates the need to worry about and increases manufacturing reliability.

  As shown in FIG. 6C, the heat transfer plate member 20 and the flow path forming plate member 30 in which the recesses 200 and 320 are formed are joined by anodic bonding or the like in the upper vacuum plate 10 and the lower plate member 40 in a substantially vacuum. The upper plate member 10, the heat transfer plate member 20, the flow path forming plate member 30, and the lower plate member 40 can be joined. By joining in a substantially vacuum, the recesses 200 and 320 become a substantially vacuum space, and a high heat insulating effect can be obtained. The method of forming the space having a heat insulating effect is not limited to bonding in a substantially vacuum, but for example, the heat insulating effect is obtained by bonding in an atmosphere of a gas having a low thermal conductivity such as air, nitrogen, and argon. You can also

  The heat transfer plate member 20 and the flow path forming plate member 30 obtained by joining the upper plate member 10 and the lower plate member 20 are provided with a supply port for supplying fuel to the flow passage as shown in FIG. A discharge port for discharging the reaction product from the flow path can be formed. Thus, the inside of the flow path and the outside of the flow path are connected, and the fuel can flow into and out of the flow path by piping or the like. Further, for example, the electrode 250 can be used as a heater by wiring so as to supply power from outside the substrate.

  The heat transfer plate 20 and the flow path forming plate 30 that have formed the supply port and the discharge port and wired form a catalyst layer in the flow channel as shown in FIG. As a method for forming this catalyst layer, a part for forming the catalyst is made porous in advance, and a liquid in which the catalyst is dissolved is introduced from the connection port so that the catalyst is selectively attached to the porous part. There is a method in which the dissolved solution has a property of being precipitated when it becomes high temperature, and the catalyst solution is allowed to flow into the flow path and the heater is moved to selectively deposit the catalyst on the portion where the temperature has been increased by the heater. .

  As described above, the substrate 2 having the fine modified flow path 300 can be formed by the MEMS technique. Further, since a plurality of the reforming channels 300 can be manufactured at the same time, the manufacturing cost of the substrate 2 can be reduced.

  The reaction apparatus 1 of the present invention can perform a reforming reaction by supplying fuel to a plurality of fine reforming channels 300 and heating by a heating means. Since the fuel supply and the heating by the heating means can independently control the reforming reaction in each reforming channel 300, the number of channels to be used is determined according to the required amount of the product such as hydrogen. It is possible to adjust the energy required for heating according to the number of flow paths to be used. Thereby, even if the required amount of the product is small, the reforming reaction can be performed without lowering the production efficiency of the product with respect to the amount of heating energy. Thereby, the efficiency of the whole reaction apparatus 1 can be improved. Hereinafter, the reforming reaction using the reaction apparatus 1 of the present invention will be described.

  The flow path of the substrate 2 includes a reforming flow path 300 that performs a reforming reaction and a combustion flow path 310 that performs a combustion reaction. In the combustion channel 310, the control unit 7 installed in the vicinity of the combustion channel supply port 420 of the substrate 2 is controlled so that the fuel used for the combustion reaction flows into the channel, so that the fuel is stored. A fuel can be supplied to the combustion channel 310 from a simple tank or the like. At this time, the interior of the combustion channel 310 can be heated by operating the heater 240. A combustion catalyst 230 for performing a combustion reaction is provided in the combustion flow path 310, so that a fuel combustion reaction can be caused by injecting fuel into the flow path and heating the flow path. it can. At this time, the generated heat is transmitted to the adjacent reforming channel 300 via the heat conduction plate 210 on the upper surface of the channel. The product generated by the combustion reaction is discharged from the combustion flow path outlet 430.

  On the other hand, in the reforming channel 300, by controlling the control unit 7 installed in the vicinity of the reforming channel supply port 400 of the substrate 2 so that the fuel used for the reforming reaction flows into the channel, The fuel can be supplied to the reforming channel 300 from a tank or the like that stores the fuel. At this time, the interior of the reforming flow path 300 can be heated by heat generated by the operation of the heater 240 and heat generated by the combustion reaction in the combustion flow path 310. Since the reforming catalyst 220 for performing the reforming reaction is provided in the reforming channel 300, the fuel is caused to flow into the channel and the heat from the heater 240 and the combustion channel 310 is passed through the channel. The reforming reaction can be performed by heating. Hydrogen and other reaction products generated by the reforming reaction are discharged to the outside from the reforming channel discharge port 410. For example, when the reactor 1 is connected to a fuel cell, hydrogen generated by the reforming reaction is supplied as fuel for the fuel cell and can be used for power generation in the fuel cell.

  The reforming reaction in one reforming channel 300 is performed as described above using the reactor 1. Since the substrate 2 of the reaction apparatus 1 of the present invention is provided with a plurality of reforming channels 300, the above reaction can be controlled for each channel. Moreover, since the reforming flow path 300 and the combustion flow path 310 are fine flow paths, the heating means such as the heater 240 can be reduced. In addition, the time required for the temperature to rise and fall is shortened, and starting and stopping can be performed in a short time.

  The fuel used at this time is not particularly limited as long as it can generate hydrogen by a reforming reaction. For example, alcohol-based materials such as methanol and ethanol, natural gas, propane, naphtha, kerosene, Examples thereof include a material containing hydrocarbon such as butane. The fuel used for the reforming reaction and the combustion reaction may be different, but the same fuel may be used, for example, methanol is used for both the reforming reaction and the combustion reaction. Examples of the fuel for the reforming reaction include materials from which hydrogen can be obtained by decomposition, such as chemical hydrides such as ammonia, sodium aluminum hydride and sodium borohydride. The fuel for the combustion reaction is generated by the reforming reaction. Examples of the hydrogen include exhaust gas containing unused hydrogen discharged from the fuel cell when the reactor 1 and the fuel cell are connected.

  As described above, since the reaction apparatus 1 of the present invention can be formed by simultaneously forming a plurality of fine reforming channels 300, the apparatus can be easily downsized and the number of manufacturing steps of the substrate 2 can be reduced. Manufacturing cost can be reduced. Further, the combustion flow path 310 for heating the reforming flow path 300 is also fine, and can be produced simultaneously with the reforming flow path 300. By performing a chemical reaction in the fine reforming flow path 300, the heat source such as a heater installed in each flow path can be reduced, and the amount of fuel to be heated is small, so the temperature rise time and the temperature fall time are shortened. be able to. Thereby, the time required for starting and stopping can also be performed in a short time. In addition, the temperature distribution in the flow path can be made uniform, and a reduction in reaction efficiency due to side reactions can be prevented.

  And the reaction apparatus 1 of this invention has two or more reforming flow paths 300, is connected in parallel, and can control a chemical reaction independently for each flow path. Thereby, the required amount of product can be adjusted by the number of flow paths. By adjusting the production amount of the product according to the number of flow paths, the energy necessary for heating can be adjusted. For example, in a reaction that requires heating, such as a reforming reaction, it is necessary to keep the reaction temperature at the same temperature whether a small amount of fuel or a large amount of fuel is used. Therefore, when a small amount of fuel is reacted, the amount of reaction product generated with respect to the energy required for heating, that is, the reaction efficiency is lowered. In the reaction apparatus 1 of the present invention, the amount of product produced is adjusted by the number of flow paths, so that only the heating means provided in the required flow paths need be used, and the consumption of energy required for heating is also suppressed. can do. That is, even if the required amount of the product is small, the reforming reaction can be performed without reducing the amount of product generated relative to the amount of energy consumed for heating.

  Further, since the amount of fuel supplied to each flow path is always constant, the reaction conditions can also be made constant. This eliminates the need for reexamination of the reaction conditions depending on the amount of fuel supplied, and the reaction can always be performed under optimum conditions. That is, reaction efficiency can be improved.

  In the reaction apparatus 1 of the present invention, the reforming channels 300 are connected in parallel as described above, but the reforming channels 300 are connected in series after the reforming channels 300 connected in parallel. You may connect. By connecting in series, when a reaction cannot be sufficiently performed in one flow path, the reaction can be performed again in another flow path arranged in series after the flow path. In addition, even when the catalytic activity has decreased due to the frequency of use of the flow path, the reaction can be performed in another flow path arranged in series behind the flow path where the catalytic activity has decreased. The lifetime of 1 can be extended.

  Moreover, the reaction apparatus 1 of the present invention can use a plurality of substrates 2 each having a plurality of fine reforming channels 300. In this case, even if the number of substrates 2 is increased, the reaction conditions and control method in one flow path can be performed in the same manner as in the case where one substrate 2 is used. That is, by increasing the number of substrates 2, the amount of product generated can be easily increased.

  The reaction apparatus 1 of the present invention can control a reaction independently in each flow path by operating a plurality of flow paths in parallel. This reaction can be controlled mainly by the flow of fuel into and out of the flow path and the heating of the flow path. Hereinafter, a method for operating the reaction apparatus effectively by the control of the heating means and the control unit of the reaction apparatus 1 of the present invention will be described with reference to the drawings.

  FIG. 7 is a diagram for explaining an operation method of the reaction apparatus 1 of the present invention. In the reactor 1 of the present invention, the fuel supplied from the fuel tank 6 flows into the plurality of reforming channels 300, the reforming reaction occurs in the channels, and the products resulting from the reaction can be discharged. As shown in FIG. The supply port and the discharge port of each reforming channel 300 are provided with a valve 71a at the supply port of the channel and a valve 71b at the discharge port, and the controller 70 controls the opening and closing of the valves 71a and 71b. Thereby, control of fuel inflow / outflow can be performed by opening and closing the valves 71a and 71b. That is, the flow of fuel in and out can be controlled for each flow path.

  For example, when a large amount of product that uses all the flow paths is required, all the valves 71a are opened and the fuel is caused to flow into the reforming flow path 300 to react with the fuel. After the reaction, all valves 71b are opened and the product is discharged. On the other hand, if the required amount of product can be covered by using one flow path, only one valve 71a for the predetermined flow path to be used is opened, and fuel is allowed to flow into the predetermined flow path. To react. After the reaction is completed, only the valve 71b of the predetermined flow path used is opened to discharge the product. Thus, the reaction apparatus 1 of this invention can be adjusted with the number of the flow paths used by the quantity of the product requested | required. In other words, the amount of product generated from the reaction apparatus 1 can be adjusted by increasing or decreasing the number of reforming channels 300 to be used.

  Each of the plurality of reforming channels 300 has a control unit and a heating unit independently, and can control a chemical reaction for each channel. That is, the heating means of the reforming channel 300 that is not used may not be operated. Thereby, a product can be supplied efficiently, without reducing the production amount of the product with respect to the energy consumption concerning a heating means. As shown in FIG. 8, by controlling the heater 240 and the valves 71a and 71b with the control device 70, only the heater 240 of the reforming channel 300 to be used can be heated. For example, when a large amount of product that uses all the flow paths is required, the control device 70 first opens all the supply port side valves 71a of the flow paths and supplies fuel to all the flow paths. Next, all the heaters 240 are operated to reform the fuel in the reforming channel 300. After completion of the reaction, all the outlet side valves 71b can be opened after the reaction is completed, and the product can be discharged from all the flow paths. The amount of product produced at this time is maximized.

  On the other hand, when the required product can be covered by using one flow path, the control device 70 opens only one valve 71a so as to use the predetermined flow path, and only the predetermined flow path. Supply fuel. Next, the heater 240 in the predetermined flow path is operated to reform the fuel in the predetermined flow path. After completion of the reaction, the valve 71b on the outlet side of the predetermined channel is opened, and the product is discharged from the predetermined channel. Thus, the reaction apparatus 1 can control a control part and a heating apparatus independently for every flow path. Therefore, the required amount of product can be adjusted not by adjusting the amount of fuel supplied, but by adjusting the number of channels used. Thereby, the amount of the product can be adjusted without changing the reaction conditions of the individual reforming channels 300, and the reaction efficiency can be improved and the by-product can be easily controlled. In addition, the heating means of the reforming channel 300 that is not used is not operated, and the production efficiency of the reaction product with respect to the energy used for the heating means can be improved.

  FIG. 9 is a diagram for explaining an operation method in the case where a heater and a combustion channel are used as heating means of the reaction apparatus of the present invention, and the fuel flowing directions are the same in the reforming channel and the combustion channel. . The reactor 1 can also control the supply of fuel to the combustion flow path 310 together with the heater 240. For example, when a large amount of product that uses all the flow paths is required, all the supply port side valves 71a are opened so that the fuel flows in the same direction in the reforming flow path 300 and the combustion flow path 310. Let it flow. Next, by operating all the heaters 240, a combustion reaction occurs in all the combustion channels 310 due to the heating of the heaters 240, and the generated heat is transmitted to the reforming channel 300 corresponding to the fuel channel 310. The inside of the reforming channel 300 is heated by the heat from the combustion channel 310 and the heat from the heater 240, and a reforming reaction of the fuel occurs. After completion of the reforming reaction, all the outlet side valves 71b can be opened to discharge the product of the reforming reaction and the product of the combustion reaction.

  On the other hand, when a required product can be provided by using one flow path, first, two supply of the predetermined reforming flow path 300 and the combustion flow path 310 corresponding to the predetermined reforming flow path 300 are performed. The mouth side valve 71a is opened, and the fuel is allowed to flow in the same direction only in the predetermined reforming channel 300 and the combustion channel 310 corresponding to the predetermined reforming channel 300. Next, the heater 240 of the combustion channel 310 corresponding to the predetermined reforming channel 300 and the predetermined reforming channel 300 is operated. Thereby, in the combustion channel 310 corresponding to the predetermined reforming channel 300, a combustion reaction occurs due to the heating of the heater 240, and the generated heat can be transmitted to the predetermined reforming channel 300. At this time, since the periphery of the flow path is an adiabatic space, heat is not transmitted to the flow path where the reaction is not performed. The inside of the predetermined reforming channel 300 is heated by the heat from the combustion channel 310 and the heat from the heater 240, and a fuel reforming reaction occurs. After completion of the reforming reaction, the predetermined reforming channel 300 and the outlet side valve 71b of the combustion channel 310 corresponding to the predetermined reforming channel 300 are opened, and the product of the reforming reaction and the product of the combustion reaction are displayed. Can be discharged.

  Thus, even if the combustion flow path 310 is provided, the amount of the product required similarly can be controlled by the number of the flow paths to be used. Therefore, the amount of the product can be adjusted without changing the reaction condition of each reforming channel 300, and the reaction efficiency can be improved and the by-product can be easily controlled. In addition, the heating means of the reforming channel 300 that is not used is not operated, and the product can be efficiently generated without reducing the amount of product generated with respect to the energy consumed by the heating means.

  Further, as described above, the fuel flow direction in the combustion flow path 310 may be the same direction as the fuel flow direction in the reforming flow path 300 or may be in the opposite direction. By changing the flow direction of the fuel supplied to the reforming flow path 300 and the fuel supplied to the combustion flow path 310 in the opposite direction, for example, discharge including unused hydrogen discharged from the fuel cell as a fuel of combustion reaction When using gas, piping becomes easy by providing the supply port of the combustion flow path 310 in the fuel cell side.

  On the other hand, when the flow direction of the fuel supplied to the reforming flow path 300 and the fuel supplied to the combustion flow path 310 are the same, for example, the fuels of the reforming reaction and the combustion reaction are the same, When supplying from a tank, piping is easy because the supply port is close. FIG. 10 is a diagram for explaining an operation method in the case where a heater and a combustion channel are used as heating means of the reaction apparatus of the present invention, and the fuel flow direction is reverse in the reforming channel and the combustion channel. is there. Even if the fuel flow direction is reversed, by controlling the heater 240 and the valves 71a and 71b in the same manner as described above, the required amount of product can be adjusted by the number of flow paths to be used.

  In one reforming channel, the valve and the heater can be controlled as follows by the control device. FIG. 11 is a control flow diagram of the valve and heater of the reaction apparatus 1 of the present invention. First, in step S1, the valve on the supply port side of the flow path is opened. Thereby, fuel can be made to flow into the flow path.

  Next, in step S2, the supply port side valve of the flow path is closed. In step S3, the heater is activated. Thereby, the fuel of a flow path can be made to react.

  After the reaction, in step S4, the valve on the outlet side of the flow path is opened. Thereby, the product can be discharged.

  In step S5, the valve on the outlet side of the flow path is closed. Finally, in step S6, the heater is stopped. Moreover, it can also control by a method different from this control method.

  FIG. 12 is a control flow diagram showing another example of the valve and heater control method of the reaction apparatus 1 of the present invention. First, in step S11, the heater is activated. Thereby, the fuel which flows in at a later step can be reacted.

  Next, in step S12, the valve on the supply port side of the flow path is opened. Thereby, fuel can be made to flow into the flow path.

  In step S13, the supply port side valve of the flow path is closed. In step S14, the valve on the outlet side of the flow path is opened. Thereby, the product can be discharged.

  In step S15, the valve on the outlet side of the flow path is closed. Finally, in step S16, the heater is stopped.

  Although the control method of the valve | bulb and heater in one reforming flow path is shown, the other flow paths on the substrate can be similarly controlled, and can be moved continuously in the same flow path. Thus, by moving the heater and the valve, for example, even when the reforming reaction takes a long time, the fuel can be retained in the flow path for a predetermined time, and the reaction can be sufficiently performed, and the reaction efficiency Can be improved. Control of the valve and the heater is not limited to those described above, and can be appropriately changed depending on the amount of product required, the time of the reforming reaction, and the like.

  By controlling the heater and valve as described above, fuel can be retained in the flow path for a predetermined time. By using this control to connect multiple flow paths in parallel and allowing each flow to react independently, for example, it is easier to control the increase or decrease in the amount of product produced, or the reaction is apparent Time can be shortened.

  FIG. 13 is a diagram showing the operation of the flow path with respect to the time axis when the production amount of the product from the reaction apparatus of the present invention changes. In in the figure, In indicates the inflow of fuel into the flow path, Out indicates the discharge of the product from the flow path, and the length of the arrow indicates the reaction time. The reaction apparatus of the present invention has a plurality of reforming channels, and the required amount of product can be adjusted by the number of channels used. That is, when the amount of the required product is increased, the number of flow paths to be used is increased, and when the amount is decreased, the adjustment can be performed by decreasing the number of flow paths to be used.

  For example, as shown in FIG. 13, when the amount of product required at a certain time suddenly increases, it is possible to cope with the problem by using three reforming channels. Further, when the amount of the required product is reduced, it is possible to cope with the problem by reducing the number of flow paths to be used. Thereby, the heating means of the flow path which is not used can be stopped, and consumption of energy concerning heating can be suppressed. That is, the reaction efficiency with respect to the energy used for the heating means can be improved. Further, this flow path can keep fuel and reaction products in the flow path.

  Therefore, when the amount of products required is small, it is possible to react by supplying fuel into the flow path, to keep the products to be generated in the flow path, and to supply the products when necessary It is. As a result, even when the amount of the required product suddenly increases, the time required for the reaction can be saved, and the product can be directly supplied to the equipment connected to the reaction apparatus.

  FIG. 14 is a diagram for explaining the operation of each flow path when products in a plurality of flow paths of the reaction apparatus of the present invention are displaced and discharged. In in the figure, In indicates the inflow of fuel into the flow path, Out indicates the discharge of the product from the flow path, and the length of the arrow indicates the reaction time.

  For example, as shown in FIG. 14, the reaction apparatus 1 can be operated so as to discharge a product alternately using two flow paths, and the apparent reaction time can be halved. it can. That is, the apparent reaction time can be shortened. On the contrary, even if the reaction time in one channel is long, the apparent reaction time can be shortened by shifting and discharging the product. Thereby, for example, when the yield of the reaction product is improved by increasing the reaction time, the yield of the product can be improved as a whole.

  FIG. 15 is a diagram for explaining a method of operating the reaction apparatus of the present invention in which reforming channels having different volumes are provided. The plurality of flow paths of the reactor 1 may not all have the same volume, and may have flow paths with different volumes by changing the cross-sectional area and length of the flow paths.

  For example, as shown in FIG. 15, a reforming channel 300a having a volume of 1, a reforming channel 300b having a volume twice that of the reforming channel 300a, and a reforming channel 300b. A reforming channel 300c having a volume that is twice the volume and a reforming channel 300d having a volume that is twice the volume of the reforming channel 300c and a reforming channel 300d having a volume that is eight are different. You may prepare. Since the amount of product generated in the flow path can be considered to depend on the amount of fuel flowing into the flow path, the amount of hydrogen generated increases as the volume of the flow path increases.

  As shown in FIG. 15, by providing channels with different volumes, it is possible to appropriately change the channel to be used according to the required amount of product. For example, when the required amount of product is 5, the fuel can be discharged to match the required amount of product by supplying fuel to the reforming channel 300a and the reforming channel 300c. Therefore, the number of channels used can be reduced, and controllability is improved.

  As described above, the operation method of the reaction apparatus 1 of the present invention can adjust the number of channels to be used with the required amount of product by controlling a plurality of channels for each channel. Become. At this time, by changing the volume of each reforming channel 300, the channel to be used can be selected according to the amount of product required, and the number of channels to be used can be reduced. . Further, by controlling the control unit 7 and the heating means, the fuel can be retained in the flow path, and the reaction can be sufficiently performed even in a relatively long reaction, and the reaction efficiency can be improved. Even in a long-time reaction, the apparent reaction time can be shortened by controlling the product discharge from the plurality of flow paths to be shifted. Further, the reaction product can be controlled to remain in the flow path. Thereby, even if the quantity of the required product increases suddenly, it can respond immediately.

  As described above, the reactor 1 of the present invention can perform a reforming reaction for reforming fuel, but the chemical reaction that can be performed by the reactor 1 of the present invention is limited to the reforming reaction. For example, it can be used for chemical reactions that require heating.

  Next, an example of the fuel cell of the present invention will be described with reference to FIGS. FIG. 16 is a diagram showing the configuration of the fuel cell of the present invention. As shown in FIG. 16, the fuel cell 8 of the present invention includes a power generation unit 80 capable of generating power with hydrogen and oxygen in a reaction device 1 that can reform hydrogen to generate hydrogen, and react. It connects so that the hydrogen produced | generated with the apparatus 1 can be supplied to the electric power generation part 80. FIG. The reactor 1 converts the fuel into hydrogen by a reforming reaction and supplies it to the power generation unit 80. When the hydrogen is supplied, the power generation unit 80 can perform a power generation reaction together with surrounding oxygen to generate power.

  FIG. 17 is an exploded perspective view of the power generation unit. As shown in FIG. 17, in the power generation unit 80, a hydrogen side electrode 801 and an oxygen side electrode 802 are formed with an electrolyte 800 through which protons dissociated in the membrane permeate sandwiched. Current collectors 803 and 804 are in close contact with the outer sides of the hydrogen side electrode 801 and the oxygen side electrode 802, that is, on the opposite surfaces of the proton conductor film 800, respectively. A current collector 803 that is in contact with the hydrogen-side electrode 801 has a hydrogen supply path through which hydrogen flows. The current collector 804 that is in contact with the oxygen-side electrode 802 has an oxygen supply path through which oxygen flows.

Hydrogen generated by the reactor 1 is supplied to the hydrogen side electrode 801, and oxygen is supplied to the oxygen side electrode 802, whereby electric power can be generated. By the supplied hydrogen (H ₂ ) and oxygen (O ₂ ), at the interface between the electrolyte 800 and the hydrogen side electrode 801, the reaction of H ₂ → 2H ⁺ + 2e ⁻ and at the interface between the electrolyte 800 and the oxygen side electrode 802, The reaction of 1 / 2O ₂ + 2H ⁺ + 2e ⁻ → H ₂ O occurs. In the reaction that occurs at the interface between the electrolyte 800 and the electrode 801, electrons and protons (H ⁺ ) are generated, the electrons move from the hydrogen side electrode 801 through the external circuit to the oxygen side electrode 802, and the protons pass through the electrolyte 800. To the oxygen side electrode 802. Water is generated at the interface between the electrolyte 800 and the oxygen-side electrode 802 by the electrons and protons that have moved and oxygen in the air that is supplied. Therefore, the fuel cell 8 of the present invention can generate electric power by supplying oxygen and hydrogen produced by the reactor 1.

  As described above, the reactor 1 can adjust the amount of hydrogen to be generated by the number of the reforming channels 300. That is, the number of reforming channels 300 to be used can be adjusted according to the required power generation amount of the power generation unit 80. For example, the amount of power generation can be increased by using all the reforming channel 300 of the reactor 1 to generate hydrogen and supplying it to the power generation unit 80. Further, by using some of the reforming channels 300 in the reforming channel 300 of the reactor 1, the amount of power generation can be reduced. At this time, since the reaction apparatus 1 can be controlled so that only the reforming flow path 300 to be used is heated, even when a small amount of hydrogen is generated, it is possible to supply energy corresponding to the heating. That is, the energy for heating can be adjusted according to the amount of power generation required. Moreover, since the reforming flow path 300 of the reaction apparatus 1 is a fine flow path, the reaction apparatus 1 can be made thin and small.

  Therefore, the fuel cell 8 of the present invention can adjust the power generation amount according to the number of flow paths of the reactor 1. Since the energy required for the reforming reaction in each channel can also be adjusted by the number of channels, a power generation reaction can be performed efficiently. Moreover, since the reactor 1 can also store hydrogen in a flow path, even if the required electric power generation amount increases rapidly, it can respond by supplying the stored hydrogen. Furthermore, since the reactor 1 can be reduced in thickness and size, the fuel cell 8 can also be reduced in size and thickness. For example, it may be a fuel cell in the form of a flat card.

  The fuel cell of the present invention may also control the power generation unit 80 by a control device mounted on the reactor 1. As a result, the amount of power generation required can be calculated and the number of flow paths used can be adjusted to match that. Moreover, you may equip the apparatus etc. which remove an impurity from the product produced | generated between the reaction apparatus 1 and the electric power generation part 80. FIG.

  Next, a notebook personal computer will be described as an example of the electronic apparatus of the present invention with reference to FIGS. As described above, the fuel cell can be reduced in size and thickness. For example, a fuel cell card 90 in the form of a flat card can be used. As shown in FIG. 18, the fuel cell card can be inserted and inserted from a card slot 91 of a notebook computer 9 which is an electronic device.

  The slot 91 can be a hole provided in the housing of the mounting body dedicated to the fuel cell card 90, but can also be a slot having a size standardized by JEIDA / PCMCIA. Specifically, the size standardized by JEIDA / PCMCIA is determined to be 85.6 mm ± 0.2 mm for the vertical (long side) and 54.0 mm ± 0.1 mm for the horizontal (short side). ing. The card thickness is standardized for each of type I and type II, that is, for type I, the thickness of the connector is 3.3 ± 0.1 mm, and the thickness of the base is 3.3. ± 0.2 mm. For type II, the thickness of the connector portion is 3.3 ± 0.1 mm, the thickness of the base portion is 5.0 mm or less, and the standard dimension of the thickness is ± 0.2 mm.

  In FIG. 18, the slot 91 is provided on the side of the keyboard-side main body of the notebook computer 9, but the portion where the slot 91 is provided is a part of the selectable bay 93 indicated by a broken line in FIG. You can also. The selectable bay 93 is a plurality of functional members that can be attached to and detached from the notebook personal computer 9, and replaces the members incorporated in the selectable bay 93 when changing the expansion function of the personal computer. When the fuel cell card 90 is used, a dedicated adapter can be used externally, and a plurality of fuel cell cards 90 can be incorporated into an information processing apparatus such as a notebook computer 9 at the same time. May be.

  FIG. 19 is a perspective view showing the external appearance of the fuel cell card 90. The fuel cell card 90 includes a main body 900 that generates power and a hydrogen supply unit 920 that is connected so that hydrogen can be supplied to the main body 900. The main body 900 has a structure in which a flat upper casing 901 is fitted to the lower casing 902, and the upper casing 901 is fixed to the lower casing 902 with screws or the like not shown in FIG. The upper casing 901 has a plurality of openings 903 as gas inlets for introducing oxygen into the casing.

  The shape of the opening 903 is rectangular as shown in FIG. 19, but other shapes are possible, and various shapes such as a circle, an ellipse, a stripe shape, and a polygon shape can be used. Is possible. In addition, the opening 903 is formed by cutting out the plate-like upper housing 901 in this example, but prevents intrusion and adhesion of dust and dirt as long as the supply of oxygen to the oxygen-side electrode is not impaired. In order to do this, it is also possible to provide a net or a nonwoven fabric in the opening 903.

  In the main body 900 of the fuel cell card 90, an electrolyte through which protons dissociated in the membrane permeate, and a hydrogen electrode and an oxygen electrode sandwiching the electrolyte are housed in a casing. Hydrogen generated in the reactor 1 of the hydrogen supply unit 920 described below is supplied to the hydrogen side electrode, and oxygen is supplied to the oxygen side electrode from an opening provided in the housing, so that hydrogen and oxygen Are not mixed with each other. A current collector is also housed in the housing, and the generated electricity can be collected and supplied to a notebook personal computer which is an electronic device. As the electrolyte sandwiched between the electrodes, a plurality of electrolytes may be installed according to the required power generation amount.

  As described above, the hydrogen supply unit 920 of the fuel cell card 90 includes the reactor 1 that can reform the fuel and the tank 921 that stores the fuel supplied to the reactor 1. The reactor 1 and the tank 921 are connected so that the fuel in the tank 921 can be supplied to the reactor 1. Hydrogen generated by the reforming of the fuel can be supplied to a hydrogen side electrode installed in the housing of the main body 900. The hydrogen supply unit 920 is detachable from the main body 900. Furthermore, the tank 921 may have a structure capable of injecting fuel. For example, the tank 921 may be removed from the hydrogen supply unit 920 and replaced with a new one having sufficient fuel. .

  The fuel cell card 90 configured as described above operates as follows. The fuel in the tank 921 in the hydrogen supply unit 920 is supplied to the reactor 1, and hydrogen is generated by the reforming reaction of the fuel. Hydrogen generated by the reaction apparatus 1 is supplied into the housing of the main body 900 connected to the hydrogen supply unit 920. At this time, oxygen is supplied from an opening 903 provided in the housing. Therefore, hydrogen is supplied to the hydrogen side electrode, and oxygen is supplied to the oxygen side electrode. As described above, a power generation reaction occurs in the electrode and the electrolyte, and power can be generated. The generated power can be collected by a current collector in the housing, and the fuel cell card can be supplied to a notebook personal computer with 90 inserted.

  An electronic device such as a notebook personal computer may require a different amount of electric power, such as a state in which arithmetic processing is being performed and a standby state. By providing the reaction apparatus 1 described above, the amount of hydrogen produced can be efficiently adjusted by the number of flow paths. That is, the amount of power required by the electronic device can be adjusted by the number of flow paths. Therefore, it is possible to provide an electronic device that can be stably moved even when an operation that requires different amounts of power is performed. Further, since hydrogen can be stored in a flow path that is not used, it is possible to quickly cope with a case where power is rapidly required.

  The notebook computer 9 is an electronic device that uses the fuel cell card 90 as a power source. However, the present invention is not limited to such a configuration, and is configured to be directly provided inside the notebook computer. It may be done.

  As described above, a notebook personal computer has been described as an example of the electronic apparatus of the present invention, but the present invention is not limited to this. For example, portable facsimiles, peripheral devices for personal computers, telephones, television receivers, communication devices, mobile terminals, watches, cameras, audio video equipment, electric fans, refrigerators, irons, pots, vacuum cleaners, rice cookers, electromagnetic cookers, Lighting equipment, toys such as game machines and radio controlled cars, electric tools, medical equipment, measuring equipment, equipment for mounting on vehicles, office equipment, health and beauty equipment, electronically controlled robots, clothing electronic equipment, transport machinery, other equipment, etc. Can be mentioned.

It is a perspective view which shows the cross-sectional shape of a reaction apparatus as an example of the reaction apparatus 1 of this invention. It is a disassembled perspective view which shows an example of the board | substrate of the reaction apparatus of this invention. It is the perspective view which showed the back side of each board | plate material which shows an example of the board | substrate of the reaction apparatus of this invention. It is a figure which shows an example of the manufacturing process of the heat-transfer board | plate material 20 of the reaction apparatus of this invention. 4A shows the process of forming the oxide film, FIG. 4B shows the process of removing a part of the oxide film, and FIG. 4C shows the process of forming the boron diffusion layer. 4 (d) shows the process of removing the oxide film, FIG. 4 (e) shows the process of forming the oxide film, and FIG. 4 (f) shows the process of forming the wiring. 4 (g) shows a step of forming an oxide film, and FIG. 4 (h) shows a step of removing a part of the oxide film. It is a figure which shows an example of the manufacturing process of the flow-path formation board | plate material of this invention. FIG. 5A shows a process of forming an oxide film, FIG. 5B shows a process of removing a part of the oxide film, and FIG. 5C shows a process of forming a boron diffusion layer. 5D shows an etching process, and FIG. 5E shows a process of forming an oxide film. It is a figure which shows an example of the assembly of the board | substrate of the reaction apparatus of this invention. 6A shows the process of joining the heat transfer plate and the flow path forming plate, FIG. 6B shows the etched step, and FIG. 6C shows the upper plate and the lower plate. 6 (d) shows a step of forming a fuel supply port and a discharge port, and FIG. 6 (e) shows a step of forming a catalyst layer. It is a figure explaining the operating method of the reaction apparatus of this invention. It is a figure explaining the method of operating the reaction apparatus of this invention by controlling a heater. It is a figure explaining the method of operating the reaction apparatus of this invention by controlling the combustion flow path which flows a fuel in the same direction as the flow direction of the fuel of a heater and a reforming flow path. It is a figure explaining the method of operating the reaction apparatus of this invention by controlling the combustion flow path which flows a fuel in the reverse direction to the flow direction of the fuel of a heater and a reforming flow path. It is a control flow figure of the valve and heater of the reaction device of the present invention. It is another control flowchart of the valve | bulb and heater of the reaction apparatus of this invention. It is a figure which shows the operation | movement of the flow path with respect to the time-axis when the production amount of the product from the reaction apparatus of this invention changes. It is a figure which shows the operation | movement of the flow path with respect to the time axis when shifting the product from the reaction apparatus of this invention and discharging. It is a figure explaining the operating method of the reaction apparatus of this invention which provided the reforming flow path from which volumes differ. It is a figure which shows the structure of the fuel cell of this invention. It is a figure which shows the structure of the electric power generation part of the fuel cell of this invention. It is a figure which shows an example of the electronic device of this invention. It is a perspective view which shows the external appearance of the fuel cell card mounted in the electronic device of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Reaction apparatus 10 Upper board | plate material 2 Substrate 20 Heat-transfer board | plate materials 21, 24, 26, 31, 34 Oxide films 22, 23, 32 Boron diffusion layer 25 Wiring 200, 320 Recess 210 Heat conduction plate 220 Reforming catalyst 230 Combustion catalyst 240 Heater 250 Electrode 30 Flow path forming plate material 33 Groove 300, 300a, 300b, 300c, 300d Reformed flow channel 310 Combustion flow channel 330 Connection port 40 Lower plate material 400 Reformed flow channel supply port 410 Reformed flow channel discharge port 420 Combustion flow Road supply port 430 Combustion flow path discharge port 6 Fuel tank 7 Control unit 70 Controllers 71a and 71b Valve 8 Fuel cell 80 Power generation unit 800 Electrolyte 801 Hydrogen side electrode 802 Oxygen side electrode 803 and 804 Current collector 9 Notebook PC 90 Fuel Battery card 900 Main body 901 Upper housing 902 Lower housing 903 Opening 91 Slot 920 Hydrogen supply unit 21 tank 93 selectable bay

Claims (16)

A plurality of fine reaction flow paths for chemically reacting fluids are connected in parallel,
A reaction apparatus characterized by causing a chemical reaction independently for each of the reaction flow paths.   2. The reaction apparatus according to claim 1, wherein the reaction channel is a fine groove formed in a substrate.   The reaction apparatus according to claim 1, wherein the fluid is controlled by a control unit that controls inflow and outflow into the reaction channel.   4. The reaction apparatus according to claim 3, wherein the control unit is provided at an inlet or an outlet or both of the reaction channel.   The reaction device according to claim 3, wherein the control unit is a check valve or a valve.   2. The reaction apparatus according to claim 1, wherein the fluid is supplied to the reaction channel by a fluid supply device that supplies the fluid to the reaction channel.   The reaction apparatus according to claim 2, wherein a plurality of the substrates are used. A plurality of fine reaction channels for chemically reacting the fluid;
Heating means provided for each of the reaction flow paths and independently heating the plurality of reaction flow paths,
A reaction apparatus characterized in that a plurality of the reaction channels are connected in parallel to cause a chemical reaction independently for each reaction channel.   9. The reaction apparatus according to claim 8, wherein the heating means heats the reaction channel with heat from a resistance heating element that generates heat when energized. A plurality of fine reaction channels for conducting chemical reactions of fluids;
A heating channel that is formed adjacent to each of the plurality of reaction channels and heats the reaction channel;
A reaction apparatus characterized in that a plurality of the reaction channels are connected in parallel to cause a chemical reaction independently for each reaction channel. A method of operating a reaction apparatus in which a plurality of fine reaction channels for chemically reacting fluids are connected in parallel,
Flowing the fluid into the reaction channel;
And a step of chemically reacting each of the reaction flow paths independently.   The fluid is allowed to stay in the reaction channel for a predetermined time by installing a control unit for controlling the flow into and out of the reaction channel at the inlet and the outlet of the reaction channel. The method of operating a reactor according to claim 11.   The fluid is characterized in that control units for controlling the flow into and out of the reaction channel are installed at the inlet and the outlet of the reaction channel to control the amount of product of the chemical reaction. A method for operating the reactor according to claim 11.   12. The method of operating a reaction apparatus according to claim 11, wherein the plurality of reaction flow paths have different amounts of the product of the chemical reaction for each flow path. A plurality of fine reaction flow paths for chemically reacting a fluid in parallel, and a reaction apparatus for performing a chemical reaction independently for each of the reaction flow paths;
A fuel cell comprising: a power generation unit that generates power using a product generated by a chemical reaction of a fluid in the reaction device. A plurality of fine reaction flow paths for chemically reacting a fluid in parallel, and a reaction apparatus for performing a chemical reaction independently for each of the reaction flow paths;
A power generation unit that generates power using a product generated by a chemical reaction of a fluid in the reactor,
An electronic device that operates by receiving electric power generated by the power generation unit.