JP2005516205A5 - - Google Patents

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Publication number
JP2005516205A5
JP2005516205A5 JP2003564518A JP2003564518A JP2005516205A5 JP 2005516205 A5 JP2005516205 A5 JP 2005516205A5 JP 2003564518 A JP2003564518 A JP 2003564518A JP 2003564518 A JP2003564518 A JP 2003564518A JP 2005516205 A5 JP2005516205 A5 JP 2005516205A5
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JP
Japan
Prior art keywords
wavelength
drift
image
creating
illumination source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003564518A
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English (en)
Japanese (ja)
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JP2005516205A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2003/002100 external-priority patent/WO2003064967A1/en
Publication of JP2005516205A publication Critical patent/JP2005516205A/ja
Publication of JP2005516205A5 publication Critical patent/JP2005516205A5/ja
Pending legal-status Critical Current

Links

JP2003564518A 2002-01-25 2003-01-23 周波数変調に基づく干渉分光方法 Pending JP2005516205A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35173002P 2002-01-25 2002-01-25
PCT/US2003/002100 WO2003064967A1 (en) 2002-01-25 2003-01-23 Interferometry method based on changing frequency

Publications (2)

Publication Number Publication Date
JP2005516205A JP2005516205A (ja) 2005-06-02
JP2005516205A5 true JP2005516205A5 (enExample) 2006-08-24

Family

ID=27663019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003564518A Pending JP2005516205A (ja) 2002-01-25 2003-01-23 周波数変調に基づく干渉分光方法

Country Status (6)

Country Link
US (2) US7317541B2 (enExample)
EP (1) EP1470387A1 (enExample)
JP (1) JP2005516205A (enExample)
KR (1) KR20040103913A (enExample)
CN (1) CN100565094C (enExample)
WO (1) WO2003064967A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080137098A1 (en) * 2002-01-25 2008-06-12 Mater Michael J Method of multiple wavelength interferometry
US7359065B2 (en) * 2005-07-14 2008-04-15 Coherix, Inc. Method of combining holograms
US7456976B2 (en) * 2005-07-29 2008-11-25 Coherix, Inc. Statistical method of generating a synthetic hologram from measured data
US7440114B2 (en) * 2005-12-12 2008-10-21 Coherix, Inc. Off-axis paraboloid interferometric mirror with off focus illumination
US20070133008A1 (en) * 2005-12-12 2007-06-14 Coherix, Inc. Optical fiber delivered reference beam for interferometric imaging
CN100460857C (zh) * 2006-04-13 2009-02-11 中山大学 一种基于动态稳定扫描技术的傅里叶光谱仪
US20130250383A1 (en) * 2012-03-21 2013-09-26 Coherix, Inc. Apparatus for multi-wavelength holographic imaging
KR102386350B1 (ko) 2022-01-28 2022-04-14 동양특수콘크리트 (주) 세로형 수로관

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639877A (ja) * 1986-06-30 1988-01-16 Nec Corp ３次元計測方法
US5926277A (en) * 1987-09-08 1999-07-20 Erim International, Inc. Method and apparatus for three-dimensional imaging using laser illumination interferometry
CN1024593C (zh) * 1991-06-05 1994-05-18 清华大学 外差干涉仪信号处理——相位和相位整数测量方法及其装置
US5777742A (en) * 1993-03-11 1998-07-07 Environmental Research Institute Of Michigan System and method for holographic imaging with discernible image of an object
JP3441508B2 (ja) * 1994-05-12 2003-09-02 ペンタックス株式会社 半導体レーザ位相シフト干渉計における位相検出方法
US5598265A (en) * 1995-04-06 1997-01-28 Zygo Corporation Method for profiling an object surface using a large equivalent wavelength and system therefor
DE19528513A1 (de) * 1995-08-03 1997-02-06 Haeusler Gerd Verfahren zur berührungslosen, schnellen und genauen Erfassung der Oberflächengestalt von Objekten
US5880841A (en) * 1997-09-08 1999-03-09 Erim International, Inc. Method and apparatus for three-dimensional imaging using laser illumination interferometry
US5907404A (en) * 1997-09-08 1999-05-25 Erim International, Inc. Multiple wavelength image plane interferometry
US6359692B1 (en) * 1999-07-09 2002-03-19 Zygo Corporation Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry
JP4607311B2 (ja) * 2000-11-22 2011-01-05 富士フイルム株式会社 開口合成による大型被観察体の波面形状測定方法および測定波面形状補正方法

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