JP2005354099A - Laser device - Google Patents

Laser device Download PDF

Info

Publication number
JP2005354099A
JP2005354099A JP2005212678A JP2005212678A JP2005354099A JP 2005354099 A JP2005354099 A JP 2005354099A JP 2005212678 A JP2005212678 A JP 2005212678A JP 2005212678 A JP2005212678 A JP 2005212678A JP 2005354099 A JP2005354099 A JP 2005354099A
Authority
JP
Japan
Prior art keywords
lead
laser element
resin frame
laser
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005212678A
Other languages
Japanese (ja)
Other versions
JP3970292B2 (en
Inventor
Yasuhiro Watabe
泰弘 渡部
Yasuyuki Bessho
靖之 別所
Masaharu Honda
正治 本多
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Original Assignee
Tokyo Sanyo Electric Co Ltd
Tottori Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Tottori Sanyo Electric Co Ltd, Sanyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP2005212678A priority Critical patent/JP3970292B2/en
Publication of JP2005354099A publication Critical patent/JP2005354099A/en
Application granted granted Critical
Publication of JP3970292B2 publication Critical patent/JP3970292B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a resin leakage and maintain accuracy of mounting reference in a reference part. <P>SOLUTION: The laser device comprises a laser element 20, a lead 2 in which the laser element is arranged, and a resin frame 24 for protecting the element 20. The lead comprises: references parts 10 and 11, which serve as mounting reference, to the right and left front parts thereof; and projection parts 5 and 6, which project farther front than the references parts, between right and left references parts, wherein the right and left front ends of the resin frame are located on the projection parts. The projection parts prevent the resin leakage to references parts 10 and 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明はレーザ装置に関する。   The present invention relates to a laser apparatus.

従来、この種の装置は、例えば特許文献1に示されている。この公報によると、リードと、リードに設けられたレーザ素子と、レーザ素子を保護する樹脂枠が示されている。そして、リードの上辺の1部と、両側面とが、リードの取付け基準部として設定されている。
特開平6−45703号公報
Conventionally, this kind of apparatus is shown by patent document 1, for example. According to this publication, a lead, a laser element provided on the lead, and a resin frame for protecting the laser element are shown. One part of the upper side of the lead and both side surfaces are set as the lead attachment reference part.
JP-A-6-45703

しかし上記装置では、取付け基準部とされるリードの上辺の1部に、樹脂漏れを生じ、取付け基準部が不正確となる第1の欠点が有る。本発明者がその原因を究明したところ、樹脂枠の外形がリードの上辺よりも外側に位置しているので、プレス時に生じたリードの抜きだれに樹脂が溜るためである事が分った。   However, in the above apparatus, there is a first drawback that a resin leak occurs in one part of the upper side of the lead, which is the attachment reference portion, and the attachment reference portion becomes inaccurate. As a result of investigation of the cause by the present inventor, it has been found that since the outer shape of the resin frame is located outside the upper side of the lead, the resin accumulates in the lead extraction generated during pressing.

また上記装置では、レーザ光がリードの表面で反射しない様に、リードの先端にレーザ素子を配置している。そのために、このレーザ装置を取扱う時に、レーザ素子に指やピンセット等が接触し易い第2の欠点が有る。
そこで、本発明はこの様な従来の欠点を考慮し、樹脂漏れを生じにくい、かつレーザ素子に指などが接触しにくいレーザ装置を提供する。
In the above apparatus, a laser element is disposed at the tip of the lead so that the laser beam is not reflected on the surface of the lead. Therefore, when handling this laser apparatus, there is a second drawback that a finger, tweezers, etc. are likely to come into contact with the laser element.
Accordingly, the present invention provides a laser device that takes into account such conventional drawbacks and is unlikely to cause resin leakage and to prevent a finger or the like from coming into contact with the laser element.

本発明は、レーザ素子と、前記レーザ素子を配置するリードと、前記レーザ素子を保護する樹脂枠とを備え、前記リードは、その左右の前方部分に取り付け基準となる基準部と、この左右の基準部の間に前記基準部よりも前方に突出した突起部を備え、前記突出部の上に前記樹脂枠の左右の前端が位置する。前記左右の基準部に隣接する側の前記突起部の縁、並びに前記突起部に繋がる前記左右の基準部が見える構成とすることができる。   The present invention includes a laser element, a lead on which the laser element is disposed, and a resin frame that protects the laser element, and the lead includes a reference portion that serves as a mounting reference at the left and right front portions thereof, Protruding portions that protrude forward from the reference portion are provided between the reference portions, and the left and right front ends of the resin frame are positioned on the protruding portion. An edge of the protrusion on the side adjacent to the left and right reference portions and the left and right reference portions connected to the protrusion can be seen.

樹脂漏れに起因して基準部に不所望の樹脂が付かないので、基準部の取付け基準は正確さが維持される。   Since undesired resin is not attached to the reference portion due to resin leakage, the mounting reference of the reference portion is kept accurate.

以下に、図1ないし図3に従い、本発明の実施の形態に係るレーザ装置1を説明する。図1はレーザ装置1の正面図、図2はレーザ装置1の平面図、図3は図1のA1A2断面図である。これらの図に於て、リード2は例えば、メッキ処理された銅等の金属材料から成り、厚みが例えば0.2〜1.0mmである。   A laser apparatus 1 according to an embodiment of the present invention will be described below with reference to FIGS. 1 is a front view of the laser device 1, FIG. 2 is a plan view of the laser device 1, and FIG. 3 is a cross-sectional view taken along line A1A2 of FIG. In these figures, the lead 2 is made of, for example, a plated metal material such as copper and has a thickness of 0.2 to 1.0 mm, for example.

リード2は正面から見れば(図1参照)、略T字状に形成されている。リード2は、端子部3と、基部4と、突出部5、6と、切欠部7等により、構成されている。   The lead 2 is formed in a substantially T shape when viewed from the front (see FIG. 1). The lead 2 includes a terminal portion 3, a base portion 4, projecting portions 5 and 6, a cutout portion 7 and the like.

端子部3は平面から見れば、略長方形状のものである。基部4は端子部3につながって形成され、外形が略長方形(部分的に切欠きが有る)状のものである。   The terminal portion 3 has a substantially rectangular shape when viewed from the plane. The base portion 4 is formed to be connected to the terminal portion 3 and has a substantially rectangular shape (partially cutout).

基部4の外形に於て、縦方向(Y方向)に沿って、基準部8、9が形成され、横方向(X方向)に沿って、基準部10、11が形成されている。レーザ装置1が取付けられる相手側部品(図示せず)の内面に、上記基準部8、9、10、11が当接する事により、レーザ装置1は相手側部品に、正確な位置にて位置決めされる。上記理由により、基準部8、9、10、11は、リード2の取付け基準となる。
基準部10、11に各々隣接して突出部5、6が形成され、突出部5、6の間に、切欠部7が形成されている。突出部5、6は基準部10、11に対し、縦方向(Y方向)の上側に突出したものである。即ち、突出部5、6は基準部10、11より外側(後述のレーザ素子から遠い側)に設けられている。
この様に、リード2のレーザ素子(後述)の取付け部前方には、切欠部7が形成され、切欠部7の両隣に、突出部5、6が形成されている。また、リード2の基部4の適所には、貫通孔12、13が形成されている。
受光素子16は例えばP−I−N構造から成るシリコン系結晶に、表面電極17、18と、裏面電極(図示せず)が設けられたものである。表面電極18は、P型拡散領域から成る受光部19とオーミック接触して形成されている。受光素子16の裏面電極は、銀ペースト等の導電性接着剤を介して、リード2の基部4上に固着されている。
レーザ素子20は例えば、活性層とそれを挟むクラッド層から成るGaAlAs層からできている。レーザ素子20は、前方(A1方向)に、主出射面が位置する様に、レーザ素子20の裏面電極(図示せず)が、受光素子16の表面電極17上に、銀ペースト等を介して固着されている。この様に、レーザ素子20はリード2上に設けられている。
レーザ素子20は、後方にモニター用の副出射が行われる様に、後面の反射膜の反射率が、前面のそれよりも高い様に形成されている。
他のリード14、15は共に、例えば、メッキが施こされた銅等の金属材料から成る。他のリード14、15は、リード2の端子部3に隣接した位置に配置されている。
金属細線21は金等から成り、レーザ素子20の表面電極と、リード2の基部4との間を結ぶ様に配線されている。金属細線22は金等から成り、受光素子16の表面電極17と、他のリード14との間を結ぶ様に配線されている。金属細線23は金等から成り、受光素子16の表面電極18と、他のリード15との間を結ぶ様に配線されている。
樹脂枠24は例えば、ポリカーボネート樹脂又はエポキシ樹脂等から成る。樹脂枠24は、レーザ素子20の出射面を露出する様に、例えば平面から見て、略コ字状に、かつ、リード2と、他のリード14、15の各表面と各裏面を挟む様に、トランスファーモールドによって形成されている。
この様に、樹脂枠24は、レーザ素子20を保護するものである。また、樹脂枠24は、リード2の基部4に形成された貫通孔12、13を介して、リード2の表面上の部分25と、リード2の裏面上の部分26がつながる様に、形成されている。
樹脂枠24の外形27はリード2の先端より内側(レーザ素子20に近い側)に位置する様に、即ち、リード2の突出部5、6より内側に位置する様に、設けられている。また、樹脂枠24の外形28、29は、リード2の両側より内側(レーザ素子20に近い側)に位置する様に、設けられている。
即ち、樹脂枠24の外形27、28、29は、リード2の取付け基準となる基準部8、9、10、11より内側(レーザ素子20に近い側)に位置する様に、設けられている。この様に構成する事により、樹脂枠24を成型した時に、基準部8、9、10、11に於ける、プレス時に生じたリード2の抜きだれ(打抜き加工時に、打抜きバリの反対側に生じる断面が少し曲面になる事)による、樹脂漏れを、防止する事ができる。
レーザ素子20の主出射面を露出する様に(即ち、主出射光の邪魔にならない様に)、樹脂枠の前方には、窓部31が設けられている。以上の部品により、レーザ装置1が構成されている。
上述の様に、レーザ素子20は受光素子16上に載置されているが、レーザ素子20は受光素子16の前方のリード2上に直接、又はサブマウントを介して載置されても良い。
上記実施形態は、リードと、前記リードに設けられたレーザ素子と、前記レーザ素子を保護する樹脂枠とを備え、前記樹脂枠の外形が、前記リードの先端より内側に位置し、かつ前記リードの両側より内側に位置する様に構成する。この様に、樹脂枠の外形を、リードの先端およびリードの両側より内側に位置させる事により、上記先端および両側に於ける、プレス時に生じたリードの抜きだれによる、樹脂枠に於ける樹脂漏れを防止する事ができる。
In the outer shape of the base portion 4, reference portions 8 and 9 are formed along the vertical direction (Y direction), and reference portions 10 and 11 are formed along the horizontal direction (X direction). When the reference portions 8, 9, 10, 11 are brought into contact with the inner surface of a counterpart component (not shown) to which the laser device 1 is attached, the laser device 1 is positioned at an accurate position on the counterpart component. The For the above reasons, the reference portions 8, 9, 10, and 11 serve as attachment standards for the leads 2.
Protruding portions 5 and 6 are formed adjacent to the reference portions 10 and 11, and a notch 7 is formed between the protruding portions 5 and 6. The protrusions 5 and 6 protrude from the reference parts 10 and 11 in the vertical direction (Y direction). That is, the protrusions 5 and 6 are provided outside the reference portions 10 and 11 (on the side far from a laser element described later).
In this way, the notch 7 is formed in front of the attachment portion of the laser element (described later) of the lead 2, and the protrusions 5 and 6 are formed on both sides of the notch 7. Further, through holes 12 and 13 are formed at appropriate positions of the base 4 of the lead 2.
The light receiving element 16 is formed by providing front surface electrodes 17 and 18 and a back surface electrode (not shown) on a silicon-based crystal having a PIN structure, for example. The surface electrode 18 is formed in ohmic contact with the light receiving portion 19 formed of a P-type diffusion region. The back electrode of the light receiving element 16 is fixed on the base 4 of the lead 2 via a conductive adhesive such as silver paste.
The laser element 20 is made of, for example, a GaAlAs layer including an active layer and a clad layer sandwiching the active layer. The laser element 20 has a back electrode (not shown) of the laser element 20 on the surface electrode 17 of the light receiving element 16 via silver paste or the like so that the main emission surface is located in the front (A1 direction). It is fixed. Thus, the laser element 20 is provided on the lead 2.
The laser element 20 is formed so that the reflectance of the reflective film on the rear surface is higher than that on the front surface so that the secondary emission for monitoring is performed rearward.
The other leads 14 and 15 are both made of, for example, a metal material such as plated copper. The other leads 14 and 15 are arranged at positions adjacent to the terminal portion 3 of the lead 2.
The fine metal wire 21 is made of gold or the like and wired so as to connect the surface electrode of the laser element 20 and the base 4 of the lead 2. The fine metal wire 22 is made of gold or the like, and is wired so as to connect the surface electrode 17 of the light receiving element 16 and the other lead 14. The fine metal wires 23 are made of gold or the like, and are wired so as to connect the surface electrode 18 of the light receiving element 16 and the other leads 15.
The resin frame 24 is made of, for example, polycarbonate resin or epoxy resin. The resin frame 24 has, for example, a substantially U-shape when viewed from the top so as to expose the emission surface of the laser element 20 and sandwiches the front and back surfaces of the lead 2 and the other leads 14 and 15. In addition, it is formed by transfer molding.
Thus, the resin frame 24 protects the laser element 20. The resin frame 24 is formed so that the portion 25 on the surface of the lead 2 and the portion 26 on the back surface of the lead 2 are connected via the through holes 12 and 13 formed in the base portion 4 of the lead 2. ing.
The outer shape 27 of the resin frame 24 is provided so as to be located on the inner side (side closer to the laser element 20) than the tip of the lead 2, that is, located on the inner side of the protruding portions 5 and 6 of the lead 2. Further, the outer shapes 28 and 29 of the resin frame 24 are provided so as to be located on the inner side (side closer to the laser element 20) than both sides of the lead 2.
That is, the outer shapes 27, 28, and 29 of the resin frame 24 are provided so as to be located on the inner side (side closer to the laser element 20) than the reference portions 8, 9, 10, and 11 that are the attachment reference of the lead 2. . By configuring in this way, when the resin frame 24 is molded, the lead 2 is removed in the reference portions 8, 9, 10, 11 (which occurs on the opposite side of the punching burr during the punching process). It is possible to prevent resin leakage due to a slightly curved cross section.
A window 31 is provided in front of the resin frame so as to expose the main emission surface of the laser element 20 (that is, not to obstruct the main emission light). The laser device 1 is configured by the above components.
As described above, the laser element 20 is mounted on the light receiving element 16, but the laser element 20 may be mounted directly on the lead 2 in front of the light receiving element 16 or via a submount.
The embodiment includes a lead, a laser element provided on the lead, and a resin frame that protects the laser element, and an outer shape of the resin frame is located inside a tip of the lead, and the lead It is configured so as to be located on the inner side from both sides. In this way, by placing the outer shape of the resin frame inside the tip of the lead and both sides of the lead, the resin leakage in the resin frame due to the lead being pulled out during pressing at the tip and both sides. Can be prevented.

上記実施形態は、リードと、前記リードに設けられたレーザ素子と、前記レーザ素子を保護する樹脂枠とを備え、前記樹脂枠の外形が、前記リードの取付け基準となる基準部より内側に位置する様に、構成する。この様に、樹脂枠の外形を、リードの基準部より内側に位置させる事により、上記基準部に於ける、プレス時に生じたリードの抜きだれによる、樹脂枠に於ける樹脂漏れを防止できる。その結果、基準部に不所望の樹脂が付かないので、基準部の取付け基準は正確さが維持される。   The embodiment includes a lead, a laser element provided on the lead, and a resin frame that protects the laser element, and an outer shape of the resin frame is located on an inner side of a reference portion that is a reference for mounting the lead Configure as you do. As described above, by positioning the outer shape of the resin frame on the inner side of the reference portion of the lead, it is possible to prevent the resin leakage in the resin frame due to the lead being pulled out at the reference portion at the time of pressing. As a result, since an undesired resin is not attached to the reference portion, the accuracy of the reference for mounting the reference portion is maintained.

上記実施形態は、前記リードのレーザ素子取付け部前方は切欠部が形成され、前記切欠部の隣に突出部が設けられる構成とする。この様に、レーザ素子の前方に於て、リードを切欠くので、レーザ光がリードの表面で反射される事を防止できる。また、切欠部の隣に突出部を設けるので、レーザ装置を取扱う時に指やピンセット等がレーザ素子に接触しにくくなる。   In the above embodiment, a notch is formed in front of the laser element mounting portion of the lead, and a protrusion is provided next to the notch. Thus, since the lead is cut out in front of the laser element, it is possible to prevent the laser light from being reflected from the surface of the lead. Further, since the protrusion is provided next to the notch, it is difficult for fingers, tweezers, etc. to contact the laser element when handling the laser device.

上記実施形態は、前記突出部は前記基準部より外側に設けられ、前記樹脂枠の外形は、前記突出部の先端より内側に設けられる構成とする。この様に、樹脂枠の外形を、突出部の先端より内側に位置させる事により、上記先端に於ける、プレス時に生じたリードの抜きだれによる、樹脂枠に於ける樹脂漏れを防止できる。   In the above embodiment, the protrusion is provided outside the reference part, and the outer shape of the resin frame is provided inside the tip of the protrusion. As described above, by positioning the outer shape of the resin frame inside the tip of the protruding portion, it is possible to prevent the resin leak in the resin frame due to the lead being pulled out at the tip.

上記実施形態は、前記リードに貫通孔が形成され、前記樹脂枠は、前記貫通孔を介して、前記リードの表面上の部分と、前記リードの裏面上の部分がつながっている構成とする。上記構成により、フレームを挟んで上下の樹脂がつながるので、リードが樹脂枠から容易に分離する事を防止できる。   In the above embodiment, a through hole is formed in the lead, and the resin frame is configured such that a portion on the surface of the lead and a portion on the back surface of the lead are connected via the through hole. With the above configuration, since the upper and lower resins are connected with the frame interposed therebetween, it is possible to prevent the lead from being easily separated from the resin frame.

フレームパッケージを用いた半導体レーザ装置に適用することができる。   The present invention can be applied to a semiconductor laser device using a frame package.

本発明の実施の形態に係るレーザ装置の正面図である。It is a front view of the laser apparatus which concerns on embodiment of this invention. 上記レーザ装置の平面図である。It is a top view of the said laser apparatus. 図1のA1A2断面図である。It is A1A2 sectional drawing of FIG.

符号の説明Explanation of symbols

2 リード
20 レーザ素子
24 樹脂枠
27、28、29 樹脂枠24の外形
2 Lead 20 Laser element 24 Resin frame 27, 28, 29 Outline of resin frame 24

Claims (2)

レーザ素子と、前記レーザ素子を配置するリードと、前記レーザ素子を保護する樹脂枠とを備え、前記リードは、その左右の前方部分に取り付け基準となる基準部と、この左右の基準部の間に前記基準部よりも前方に突出した突起部を備え、前記突出部の上に前記樹脂枠の左右の前端が位置する事を特徴とするレーザ装置。 A laser element; a lead on which the laser element is disposed; and a resin frame that protects the laser element. A laser device comprising: a protrusion portion protruding forward from the reference portion; and the left and right front ends of the resin frame are positioned on the protrusion portion. 前記左右の基準部に隣接する側の前記突起部の縁、並びに前記突起部に繋がる前記左右の基準部が見える事を特徴とする請求項1記載のレーザ装置。 2. The laser device according to claim 1, wherein an edge of the protruding portion adjacent to the left and right reference portions and the left and right reference portions connected to the protruding portion can be seen.
JP2005212678A 2005-07-22 2005-07-22 Laser equipment Expired - Fee Related JP3970292B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005212678A JP3970292B2 (en) 2005-07-22 2005-07-22 Laser equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005212678A JP3970292B2 (en) 2005-07-22 2005-07-22 Laser equipment

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000216162A Division JP3723424B2 (en) 2000-07-17 2000-07-17 Laser equipment

Publications (2)

Publication Number Publication Date
JP2005354099A true JP2005354099A (en) 2005-12-22
JP3970292B2 JP3970292B2 (en) 2007-09-05

Family

ID=35588224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005212678A Expired - Fee Related JP3970292B2 (en) 2005-07-22 2005-07-22 Laser equipment

Country Status (1)

Country Link
JP (1) JP3970292B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008066511A (en) * 2006-09-07 2008-03-21 Fuji Xerox Co Ltd Optical transmission module, method of manufacturing optical transmission module, and optical transmission apparatus
US8422522B2 (en) 2008-06-17 2013-04-16 Sharp Kabushiki Kaisha Semiconductor laser device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008066511A (en) * 2006-09-07 2008-03-21 Fuji Xerox Co Ltd Optical transmission module, method of manufacturing optical transmission module, and optical transmission apparatus
US8422522B2 (en) 2008-06-17 2013-04-16 Sharp Kabushiki Kaisha Semiconductor laser device

Also Published As

Publication number Publication date
JP3970292B2 (en) 2007-09-05

Similar Documents

Publication Publication Date Title
KR100542336B1 (en) Semiconductor laser device
US7859004B2 (en) Semiconductor device
JP2007207986A5 (en)
JP2007012895A (en) Circuit device and manufacturing method thereof
JP2005093975A (en) Semiconductor laser diode apparatus with pcb type lead frame
JP3970292B2 (en) Laser equipment
JP3723424B2 (en) Laser equipment
JP2009016794A (en) Capless package and its production method
JP5244515B2 (en) Semiconductor laser device
JP3973348B2 (en) Laser apparatus and manufacturing method thereof
JP2005093494A (en) Semiconductor device and its manufacturing method
JPS63136684A (en) Photoelectron device, manufacture thereof and lead frame used for the method
JP4785642B2 (en) Laser equipment
JP5121421B2 (en) Optical semiconductor device package and optical semiconductor device
JP2005311401A (en) Semiconductor laser device
KR100568274B1 (en) A single unit lead frame of semiconductor laser diode
JPH0555436A (en) Lead frame for semiconductor device
JP2005311147A (en) Semiconductor laser device and optical pickup device provided therewith
JP3238970B2 (en) Semiconductor laser device
JP3889742B2 (en) Manufacturing method of semiconductor laser device
JP4446938B2 (en) Semiconductor laser device
JP4148963B2 (en) Semiconductor laser device
JPH0653597A (en) Semiconductor laser device
JP2009054634A (en) Semiconductor device
JPH0653603A (en) Semiconductor laser device

Legal Events

Date Code Title Description
RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20051227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060425

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060623

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070508

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070605

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100615

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100615

Year of fee payment: 3

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100615

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110615

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110615

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120615

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130615

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130615

Year of fee payment: 6

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130615

Year of fee payment: 6

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees