JP2005345822A - Manufacturing device of electrooptical apparatus, its manufacturing method, electrooptical apparatus and projector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing device of an electrooptical apparatus wherein an adjusting mechanism is not needed, cost reduction and light weight of a projector can be attained and an optical image having satisfactory image quality can be formed and to provide its manufacturing method, the electrooptical apparatus and the projector. <P>SOLUTION: The manufacturing device 2 of the electrooptical apparatus is provided with a laser light source device 20, a Glan-thompson prism 30 converting laser light into linearly polarized light and emitting the linearly polarized light to an optical conversion element, an extinction ratio calculating device 50 detecting luminous flux emitted via the optical conversion element and calculating an extinction ratio of the optical conversion element, a panel holding part 414 supporting an optical modulator and a second attitude adjusting part 423 supporting the optical conversion element so that the attitude of the optical conversion element can be adjusted and performing attitude adjustment of the optical conversion element based on the calculated extinction ratio. The second attitude adjusting part 423 is so constituted that the optical conversion element can be moved to a position near to a luminous flux incident side end surface of the optical modulator while the attitude of the optical conversion element to an optical axis A is maintained. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electro-optical device manufacturing apparatus, a manufacturing method thereof, an electro-optical device, and a projector.

2. Description of the Related Art Conventionally, it is known to use a projector for presentations at conferences, academic conferences, exhibitions, etc., or for home theater use at home. Such a projector accommodates a plurality of optical components therein, and by using these optical components, the light beam emitted from the light source is modulated and then projected to form a projected image.
As such an optical component, a liquid crystal panel as a light modulation element that modulates a light beam emitted from a light source, and an incident side polarizing plate and an outgoing side polarizing plate arranged so as to sandwich the liquid crystal panel are used. .
Here, the incident side polarizing plate and the exit side polarizing plate control the polarization direction incident on the liquid crystal panel and also control the polarization direction of the light beam emitted from the liquid crystal panel, and the respective polarization axes are orthogonal to each other. Are arranged as follows. With such a configuration, a projection image having a high contrast ratio is realized.

For this reason, conventionally, there has been known a projector provided with an adjustment mechanism for adjusting the angle formed by the polarization axes of the incident-side polarizing plate and the exit-side polarizing plate (see, for example, Patent Document 1).
The adjustment mechanism is provided independently of the optical component housing that houses the optical component, and is installed at a predetermined position of the optical component housing. Then, by operating the adjustment mechanism through the hole formed in the upper surface of the optical component casing, the attitude adjustment of the incident-side polarizing plate with respect to the emission-side polarizing plate is performed in a plane orthogonal to the illumination optical axis. .

JP 2000-259093 A

In recent years, miniaturization of projectors has been promoted, and each optical component has also been miniaturized. In order to employ the adjustment mechanism described in Patent Document 1 in such a projector, it is necessary to form the adjustment mechanism in correspondence with the miniaturized optical component and to have a shape corresponding to the adjustment mechanism. Thus, it is necessary to form an optical component casing. For this reason, there is a possibility that the structure becomes complicated and the cost reduction of the projector is hindered. In addition, the need for an adjustment mechanism may hinder the weight reduction of the projector.
In the projector described in Patent Document 1, it is possible to adjust the attitude of the incident-side polarizing plate with respect to the emission-side polarizing plate, but it is not possible to adjust the attitude of the emission-side polarizing plate itself. For this reason, when the attitude | position of the exit side polarizing plate itself has shifted | deviated, even if it adjusts the attitude | position of an incident side polarizing plate, it is difficult to form the image which has a high contrast ratio.

  An object of the present invention is to provide an electro-optical device manufacturing apparatus, a manufacturing method thereof, an electro-optical device, and a projector that can reduce the cost and weight of the projector by eliminating an adjustment mechanism and can form an optical image with good image quality. It is to provide.

  The electro-optical device manufacturing apparatus of the present invention includes a light modulation device that modulates a light beam emitted from a light source according to image information, and a light beam that is disposed on and incident on a light beam incident side and / or a light beam emission side of the light modulation device. An electro-optical device manufacturing apparatus that manufactures an electro-optical device including an optical conversion element that converts an optical characteristic of the light modulation device, the light modulation device modulating an incident light beam according to image information, A holding frame for storing and holding the light modulation element. The holding frame is formed with a holding portion capable of holding the optical conversion element on the end surface on the light incident side and / or on the end surface on the light emission side, and has a predetermined optical axis. A light beam emitting means for emitting a light beam along the line, a polarization converting means for converting the light beam emitted from the light beam emitting means into linearly polarized light and emitting it to the optical conversion element, and a light beam emitted via the optical conversion element The An extinction ratio calculation means for calculating an extinction ratio of the optical conversion element, an optical modulation device support means for supporting the optical modulation device at a position off the optical axis, and the optical conversion element at a predetermined position on the optical axis. A posture adjustment unit that supports the posture adjustment at a position and performs posture adjustment of the optical conversion element with respect to the optical axis based on the extinction ratio calculated by the extinction ratio calculation unit, and the posture adjustment unit includes: While maintaining the posture of the optical conversion element with respect to the optical axis, the optical conversion element is positioned close to the light beam incident side end surface and / or the light beam emission side end surface of the light modulation device supported by the light modulation device support means. It is configured to be movable.

Here, as the optical conversion element, a polarizing plate, a phase difference plate, a viewing angle correction plate, or the like can be adopted.
In the present invention, the light beam emitting means emits a light beam along a predetermined optical axis. The polarization conversion means converts the emitted light beam into linearly polarized light and emits it to the optical conversion element. Further, the extinction ratio calculating means detects the light beam emitted through the optical conversion element, and calculates the extinction ratio of the optical conversion element. Then, the attitude adjusting means adjusts the attitude of the optical conversion element with respect to the optical axis based on the calculated extinction ratio. Here, the extinction ratio depends on the characteristics of the object passing through the light beam. By calculating the extinction ratio of the optical conversion element, the posture state of the optical conversion element with respect to the optical axis can be observed. Therefore, for example, a configuration for visually confirming the light flux through the optical conversion element and observing the posture state of the optical conversion element, or measuring the illuminance of the light flux through the optical conversion element and calculating the illuminance from the illuminance to the optical conversion element The posture state of the optical conversion element can be adjusted more appropriately than the configuration in which the posture state is observed. Therefore, it is possible to improve the image quality of the optical image formed by the electro-optical device by improving the posture state of the optical conversion element.
Further, with the configuration as described above, not only the optical conversion element disposed on the light beam incident side of the light modulation device, but also the optical conversion element disposed on the light beam emission side of the light modulation device, for example, an emission side polarizing plate It is possible to adjust the posture. Therefore, in the manufactured electro-optical device, an optical image having a high contrast ratio can be formed as compared with the conventional configuration in which the posture adjustment of the exit-side polarizing plate is not performed.

Further, the light modulation device support means supports the light modulation device at a position off the optical axis. Then, the attitude adjustment means adjusts the attitude of the optical conversion element, and then maintains the attitude of the optical conversion element with respect to the optical axis, while the optical conversion element is placed on the light beam incident side end face and / or the light beam emission side end face of the light modulator. Move to a position close to. Here, the holding frame constituting the light modulation device is formed with a holding portion capable of holding the optical conversion element on the end face where the optical conversion element is arranged. Therefore, for example, by filling an adhesive or the like between the holding portion of the holding frame constituting the light modulation device and the optical conversion element, the optical conversion element can be fixed to the light modulation device in an appropriate posture state. For this reason, a conventional adjustment mechanism for adjusting the attitude of the optical conversion element is not necessary, and the weight of the projector on which the electro-optical device is mounted can be reduced. Further, the structure of the constituent members inside the projector can be simplified, and the cost of the projector can be reduced. Furthermore, since the optical conversion element and the light modulation device can be integrated, the size of the projector can be reduced.
Furthermore, since the light modulation device is supported by the light modulation device support means at a position off the optical axis, the extinction ratio calculated by the extinction ratio detection means does not include the light modulation element, and the optical conversion element alone The extinction ratio is For this reason, it becomes the structure which can determine the attitude | position state of an optical conversion element easily based on the calculated extinction ratio. In addition, since the adjustment position for adjusting the attitude of the optical conversion element and the fixing position for fixing the optical conversion element with respect to the light modulation device are set to different positions, other configurations constituting the manufacturing apparatus The optical conversion element can be favorably fixed to the light modulation device without interfering with the member.

  The electro-optical device manufacturing apparatus of the present invention includes a light modulation device that modulates a light beam emitted from a light source according to image information, and a light beam that is disposed on and / or incident on the light beam incident side and / or the light beam emission side of the light modulation device. An electro-optical device manufacturing apparatus that manufactures an electro-optical device including an optical conversion element that converts the optical characteristics of the optical modulation device, wherein the light modulation device modulates an incident light beam according to image information, and A holding frame for storing and holding the light modulation element. The holding frame is formed with a holding portion capable of holding the optical conversion element on the end surface on the light incident side and / or on the end surface on the light emission side, and has a predetermined optical axis. A light beam emitting means for emitting a light beam along the light beam, a polarization converting means for converting the light beam emitted from the light beam emitting means into linearly polarized light and emitting it to the light modulation element and the optical conversion element, the light modulation element, and An extinction ratio calculating means for detecting a light beam emitted through the optical conversion element and calculating an extinction ratio of the light modulation element and the optical conversion element; a light modulation apparatus support means for supporting the light modulation apparatus; A position adjusting unit that supports the optical conversion element so that the position of the optical conversion element can be adjusted, and that adjusts the position of the optical conversion element with respect to the optical axis based on the extinction ratio calculated by the extinction ratio calculating unit; The support means and the attitude adjustment means are integrally configured to support the light modulation device and the optical conversion element in a state of being close to each other, and maintain the attitude of the light modulation device and the optical conversion element with respect to the optical axis. While, the adjustment position that enables the posture adjustment of the optical conversion element at a predetermined position on the optical axis, and the optical conversion element with respect to the light modulation device at a position off the optical axis In a fixed position to allow the constant, characterized in that it is configured to be movable the optical modulator and the optical converting element.

Here, as the optical conversion element, a polarizing plate, a phase difference plate, a viewing angle correction plate, or the like can be employed as described above.
In the present invention, the light beam emitting means emits a light beam along a predetermined optical axis. The polarization conversion means converts the emitted light beam into linearly polarized light and emits it to the light modulation element and the optical conversion element. Further, the extinction ratio calculating means detects a light beam emitted through the light modulation element and the optical conversion element, and calculates the extinction ratio of the light modulation element and the optical conversion element. Here, the extinction ratio depends on the characteristics of the object passing through the light beam, and the attitude state of the optical conversion element with respect to the optical axis is observed by calculating the extinction ratio of the light modulation element and the optical conversion element. Can do. Therefore, for example, the configuration in which the light beam through the light modulation element and the optical conversion element is visually confirmed to observe the posture state of the optical conversion element, or the illuminance of the light beam through the light modulation element and the optical conversion element is measured. Thus, the posture state of the optical conversion element can be adjusted more appropriately as compared with the configuration in which the posture state of the optical conversion element is observed from the illuminance. Therefore, it is possible to improve the image quality of the optical image formed by the electro-optical device by improving the posture state of the optical conversion element.
Further, with the configuration as described above, not only the optical conversion element disposed on the light beam incident side of the light modulation device, but also the optical conversion element disposed on the light beam emission side of the light modulation device, for example, an emission side polarizing plate It is possible to adjust the posture. Therefore, in the manufactured electro-optical device, an optical image having a high contrast ratio can be formed as compared with the conventional configuration in which the posture adjustment of the exit-side polarizing plate is not performed.

Further, the light modulation device support means and the attitude adjustment means are integrally configured to support the light modulation device and the optical conversion element in a state of being close to each other. In addition, the optical modulation device support means and the attitude adjustment means adjust the attitude of the optical conversion element, and then perform optical modulation to a position off the optical axis while maintaining the attitude of the optical modulation apparatus and the optical conversion element with respect to the optical axis. The apparatus and the optical conversion element are moved. Here, the holding frame constituting the light modulation device is formed with a holding portion capable of holding the optical conversion element on the end face where the optical conversion element is arranged. Therefore, for example, by filling an adhesive or the like between the holding portion of the holding frame constituting the light modulation device and the optical conversion element, the optical conversion element can be fixed to the light modulation device in an appropriate posture state. For this reason, a conventional adjustment mechanism for adjusting the attitude of the optical conversion element is not necessary, and the weight of the projector on which the electro-optical device is mounted can be reduced. Further, the structure of the constituent members inside the projector on which the electro-optical device is mounted can be simplified, and the cost of the projector can be reduced. Furthermore, since the optical conversion element and the light modulation device can be integrated, the size of the projector can be reduced.
Furthermore, since the light modulation device support means and the posture adjustment means are integrally formed, the structure of the manufacturing apparatus is simplified as compared with a configuration in which the light modulation device support means and the posture adjustment means are separated. And the size of the manufacturing apparatus can be reduced. In addition, the adjustment position for adjusting the attitude of the optical conversion element and the fixing position for fixing the optical conversion element with respect to the light modulation device are set at different positions. It is possible to satisfactorily fix the optical conversion element to the light modulation device without interfering with the light modulation device.

  An electro-optical device manufacturing method according to the present invention includes a light modulation device that modulates a light beam emitted from a light source according to image information, and a light beam that is arranged and incident on a light beam incident side and / or a light beam emission side of the light modulation device. An electro-optical device manufacturing apparatus that manufactures an electro-optical device including an optical conversion element that converts an optical characteristic of the light modulation device, the light modulation device modulating an incident light beam according to image information, A holding frame for storing and holding the light modulation element. The holding frame is formed with a holding portion capable of holding the optical conversion element on the end surface on the light incident side and / or on the end surface on the light emission side, and has a predetermined optical axis. A light beam emitting means for emitting a light beam along the light beam, a polarization converting means for converting the light beam emitted from the light beam emitting means into linearly polarized light and emitting it to the light modulation element and the optical conversion element, the light modulation element, and An extinction ratio calculating means for detecting a light beam emitted through the optical conversion element and calculating an extinction ratio of the light modulation element and the optical conversion element; a light modulation apparatus support means for supporting the light modulation apparatus; A position adjusting unit that supports the optical conversion element so that the position of the optical conversion element can be adjusted, and adjusts the position of the optical conversion element with respect to the optical axis based on the extinction ratio calculated by the extinction ratio calculating unit; The support means and the attitude adjustment means are integrally configured to support the light modulation device and the optical conversion element in a state of being close to each other at a predetermined position on the optical axis.

Here, as the optical conversion element, a polarizing plate, a phase difference plate, a viewing angle correction plate, or the like can be employed as described above.
In the present invention, the light beam emitting means emits a light beam along a predetermined optical axis. The polarization conversion means converts the emitted light beam into linearly polarized light and emits it to the light modulation element and the optical conversion element. Further, the extinction ratio calculating means detects a light beam emitted through the light modulation element and the optical conversion element, and calculates the extinction ratio of the light modulation element and the optical conversion element. Here, the extinction ratio depends on the characteristics of the object passing through the light beam, and the attitude state of the optical conversion element with respect to the optical axis is observed by calculating the extinction ratio of the light modulation element and the optical conversion element. Can do. Therefore, for example, the configuration in which the light beam through the light modulation element and the optical conversion element is visually confirmed to observe the posture state of the optical conversion element, or the illuminance of the light beam through the light modulation element and the optical conversion element is measured. Thus, the posture state of the optical conversion element can be adjusted more appropriately as compared with the configuration in which the posture state of the optical conversion element is observed from the illuminance. Therefore, it is possible to improve the image quality of the optical image formed by the electro-optical device by improving the posture state of the optical conversion element.
Further, with the configuration as described above, not only the optical conversion element disposed on the light beam incident side of the light modulation device, but also the optical conversion element disposed on the light beam emission side of the light modulation device, for example, an emission side polarizing plate It is possible to adjust the posture. Therefore, the manufactured electro-optical device can form an optical image having a high contrast ratio as compared with the conventional configuration in which the posture adjustment of the exit-side polarizing plate is not performed.

Furthermore, the light modulation device support means and the attitude adjustment means are integrally configured to support the light modulation device and the optical conversion element in a state of being close to each other at a predetermined position on the optical axis. Here, the holding frame constituting the light modulation device is formed with a holding portion capable of holding the optical conversion element on the end face where the optical conversion element is arranged. Therefore, for example, by filling an adhesive or the like between the holding portion of the holding frame constituting the light modulation device and the optical conversion element, the optical conversion element can be fixed to the light modulation device in an appropriate posture state. For this reason, a conventional adjustment mechanism for adjusting the attitude of the optical conversion element is not necessary, and the weight of the projector on which the electro-optical device is mounted can be reduced. Further, the structure of the constituent members inside the projector on which the electro-optical device is mounted can be simplified, and the cost of the projector can be reduced. Furthermore, since the optical conversion element and the light modulation device can be integrated, the size of the projector can be reduced.
Furthermore, the light modulation device support means and the attitude adjustment means are integrally configured to support the light modulation device and the optical conversion element in a state of being close to each other at a predetermined position on the optical axis. Compared to a configuration in which the posture adjusting means is separate, the manufacturing apparatus can be reduced in size. In addition, the moving mechanism can be omitted, the structure of the manufacturing apparatus can be simplified, and the manufacturing apparatus can be further reduced in size, compared to a configuration in which the light modulation device support means and the attitude adjustment means can be moved to the adjustment position and the fixed position. Can be planned. Further, when the electro-optical device is manufactured, the step of moving the light modulation device supporting unit and the posture adjusting unit to the adjustment position and the fixed position can be omitted, and the electro-optical device can be manufactured quickly.

In the electro-optical device manufacturing apparatus of the present invention, the electro-optical device includes a plurality of the optical conversion elements arranged on the light beam incident side and / or the light beam emission side of the light modulation device, and constitutes the holding frame. The holding portion includes at least three projecting portions that support side end portions of the plurality of optical conversion elements, and the posture adjusting unit includes a plurality corresponding to the plurality of optical conversion elements. It is preferable.
In the present invention, the electro-optical device includes a plurality of optical conversion elements arranged on the light beam entrance side and / or the light beam exit side of the light modulation device. In addition, the posture adjusting means is constituted by a plurality corresponding to the plurality of optical conversion elements. Here, the holding part which comprises a holding frame is comprised including the at least 3 protrusion part which supports the side edge part of a some optical conversion element. As a result, even when a plurality of optical conversion elements are arranged on the light incident side and / or the light emission side of the light modulation device, the posture adjustment of the plurality of optical conversion elements is performed by the plurality of posture adjusting means. In addition, the plurality of optical conversion elements can be fixed to the holding portion of the holding frame in an appropriate posture. Therefore, by integrating a large number of members, the projector on which the electro-optical device is mounted can be further reduced in size.

In the electro-optical device manufacturing apparatus according to the aspect of the invention, it is preferable that the posture adjusting unit is configured to be rotatable about the optical axis, and to adjust the rotation of the optical conversion element about the optical axis.
By the way, an optical conversion element such as a polarizing plate, a phase difference plate, or a viewing angle correction plate does not convert an incident light beam into desired optical characteristics unless the rotation angle about the optical axis is appropriate.
According to the present invention, since the attitude adjustment unit performs the rotation adjustment of the optical conversion element around the optical axis, the rotation angle around the optical axis of the optical conversion element can be appropriately adjusted. The incident light beam can be converted into desired optical characteristics. Therefore, the image quality of the optical image formed by the electro-optical device can be improved.

In the electro-optical device manufacturing apparatus according to the aspect of the invention, it is preferable that the posture adjusting unit is configured to be able to change a tilt position with respect to a plane orthogonal to the optical axis, and to perform tilt adjustment of the optical conversion element.
According to the present invention, for example, if the posture adjustment means is configured so that both the rotation adjustment of the optical conversion element and the inclination adjustment of the optical conversion element with respect to the plane orthogonal to the optical axis can be performed, the manufacturing error of the optical conversion element The shape change caused by the above can be compensated by adjusting the posture adjusting means. Therefore, it is possible to satisfactorily convert the incident light beam into predetermined optical characteristics by the optical conversion element, and it is possible to further improve the image quality of the optical image formed by the electro-optical device.

  An electro-optical device manufacturing method according to the present invention includes a light modulation device that modulates a light beam emitted from a light source according to image information, and a light beam that is arranged and incident on a light beam incident side and / or a light beam emission side of the light modulation device. An electro-optical device manufacturing method for manufacturing an electro-optical device including an optical conversion element that converts an optical characteristic of the light modulation device, wherein the light modulation device modulates an incident light beam according to image information; and A holding frame for storing and holding the light modulation element. The holding frame is formed with a holding portion capable of holding the optical conversion element on the end surface on the light incident side and / or on the end surface on the light emission side, and has a predetermined optical axis. A light modulation device installation step of installing the light modulation device at a position off the optical axis, an optical conversion element installation step of installing the optical conversion device at a predetermined position on the optical axis, and emitting a light beam along the optical axis Luminous flux A polarization conversion step of converting the light beam emitted in the light beam emission step into linearly polarized light, and injecting the light into the optical conversion device installed at a predetermined position on the optical axis in the optical conversion device installation step; A light beam detecting step for detecting a light beam emitted through the optical conversion element; an extinction ratio calculating step for calculating an extinction ratio of the optical conversion element based on the light beam detected in the light beam detection step; Based on the extinction ratio calculated in the ratio calculation step, a posture adjustment step for adjusting the posture of the optical conversion element with respect to the optical axis, and after the posture adjustment step, the posture of the optical conversion element with respect to the optical axis is changed. While maintaining the optical conversion element, the optical conversion element is moved to a position close to a light beam incident side end surface and / or a light beam emission side end surface of the light modulation device installed at a position off the optical axis in the light modulation device installation step. Characterized in that it comprises an optical element moving step, an optical conversion element fixing step of fixing the optical conversion element with respect to the holding portion of the holding frame constituting the optical modulator device.

  In the present invention, in the method of manufacturing the electro-optical device, the light modulation device is installed at a position off a predetermined optical axis in the light modulation device installation step. Further, the optical conversion element is installed at a predetermined position on the optical axis in the optical conversion element installation step. Then, a light beam is emitted along the optical axis in the light beam emission step. At this time, the light beam emitted in the polarization conversion step is converted into linearly polarized light, and the converted light beam is emitted to the optical conversion element. Further, the light beam emitted through the optical conversion element is detected in the light beam detection step, and the extinction ratio of the optical conversion element is calculated in the extinction ratio calculation step. Then, the posture adjustment of the optical conversion element is performed based on the extinction ratio of the optical conversion element in the posture adjustment step. After the attitude adjustment step, the optical conversion element is moved to a position close to the light beam incident side end surface and / or the light beam emission side end surface of the light modulation device in the optical element moving step. Finally, the optical conversion element is fixed to the light modulation device in the optical conversion element fixing step. This makes it possible to enjoy the same operations and effects as those of the electro-optical device manufacturing apparatus described above.

  An electro-optical device manufacturing method according to the present invention includes a light modulation device that modulates a light beam emitted from a light source according to image information, and a light beam that is arranged and incident on a light beam incident side and / or a light beam emission side of the light modulation device. An electro-optical device manufacturing apparatus that manufactures an electro-optical device including an optical conversion element that converts an optical characteristic of the light modulation device, the light modulation device modulating an incident light beam according to image information, A holding frame for storing and holding the light modulation element. The holding frame is formed with a holding portion capable of holding the optical conversion element on the end surface on the light incident side and / or on the end surface on the light emission side, and has a predetermined optical axis. A light modulation device installation step for installing the light modulation device thereon, an optical conversion device installation step for installing the optical conversion device in a state of being close to the light modulation device at a predetermined position on the optical axis, Along the optical axis A light beam emitting step for emitting a light beam, and the light beam emitted in the light beam emitting step is converted into linearly polarized light, and is installed at a predetermined position on the optical axis in the light modulation device installing step and the optical conversion element installing step. Detected in the polarization conversion step of emitting to the light modulation device and the optical conversion element, the light beam detection step of detecting the light beam emitted through the light modulation device and the optical conversion element, and the light beam detection step An extinction ratio calculating step of calculating an extinction ratio of the light modulation device and the optical conversion element based on a light beam, and an extinction ratio of the optical conversion element with respect to the optical axis based on the extinction ratio calculated in the extinction ratio calculation step. A posture adjusting step for performing posture adjustment; and after the posture adjusting step, maintaining the posture of the light modulation device and the optical conversion element with respect to the optical axis, An optical element moving step of moving the optical conversion element to a position off the optical axis, and an optical conversion element fixing step of fixing the optical conversion element to the holding portion of the holding frame constituting the light modulation device It is characterized by having.

  In the present invention, the electro-optical device manufacturing method sets the light modulation device on a predetermined optical axis in the light modulation device setting step. Further, in the optical conversion element installation step, the optical conversion element is installed at a predetermined position on the optical axis in a state of being close to the light modulation device. Then, a light beam is emitted along the optical axis in the light beam emission step. At this time, the light beam emitted in the polarization conversion step is converted into linearly polarized light, and the converted light beam is emitted to the light modulation element and the optical conversion element. Further, the light beam emitted through the light modulation element and the optical conversion element is detected in the light beam detection step, and the extinction ratio of the light modulation element and the optical conversion element is calculated in the extinction ratio calculation step. Then, the posture adjustment of the optical conversion element is performed based on the extinction ratio of the light modulation element and the optical conversion element in the posture adjustment step. After the attitude adjustment process, the optical modulator and the optical conversion element are moved to a position off the optical axis in the optical element moving process. Finally, the optical conversion element is fixed to the light modulation device in the optical conversion element fixing step. This makes it possible to enjoy the same operations and effects as those of the electro-optical device manufacturing apparatus described above.

  An electro-optical device manufacturing method according to the present invention includes a light modulation device that modulates a light beam emitted from a light source according to image information, and a light beam that is arranged and incident on a light beam incident side and / or a light beam emission side of the light modulation device. An electro-optical device manufacturing method for manufacturing an electro-optical device including an optical conversion element that converts an optical characteristic of the light modulation device, wherein the light modulation device modulates an incident light beam according to image information; and A holding frame for storing and holding the light modulation element. The holding frame is formed with a holding portion capable of holding the optical conversion element on the end surface on the light incident side and / or on the end surface on the light emission side, and has a predetermined optical axis. A light modulation device installation step for installing the light modulation device thereon, an optical conversion device installation step for installing the optical conversion device in a state of being close to the light modulation device at a predetermined position on the optical axis, Along the optical axis A light beam emitting step for emitting a light beam, and the light beam emitted in the light beam emitting step is converted into linearly polarized light, and is installed at a predetermined position on the optical axis in the light modulation device installing step and the optical conversion element installing step. Detected in the polarization conversion step of emitting to the light modulation device and the optical conversion element, the light beam detection step of detecting the light beam emitted through the light modulation device and the optical conversion element, and the light beam detection step An extinction ratio calculating step of calculating an extinction ratio of the light modulation device and the optical conversion element based on a light beam, and an extinction ratio of the optical conversion element with respect to the optical axis based on the extinction ratio calculated in the extinction ratio calculation step. Posture adjustment step for performing posture adjustment, and after the posture adjustment step, the optical conversion element with respect to the holding portion of the holding frame constituting the light modulation device at a predetermined position on the optical axis Characterized in that it includes an optical conversion element fixing step of fixing.

  In the present invention, the electro-optical device manufacturing method sets the light modulation device on a predetermined optical axis in the light modulation device setting step. Further, in the optical conversion element installation step, the optical conversion element is installed at a predetermined position on the optical axis in a state of being close to the light modulation device. Then, a light beam is emitted along the optical axis in the light beam emission step. At this time, the light beam emitted in the polarization conversion step is converted into linearly polarized light, and the converted light beam is emitted to the light modulation element and the optical conversion element. In addition, the light beam emitted through the light modulation element and the optical conversion element is detected in the light beam detection step, and the extinction ratio of the light modulation element and the optical conversion element is calculated in the extinction ratio calculation step. Then, the posture adjustment of the optical conversion element is performed based on the extinction ratio of the light modulation element and the optical conversion element in the posture adjustment step. After the attitude adjustment process, the optical conversion element is fixed to the light modulation device in the optical conversion element fixing process. This makes it possible to enjoy the same operations and effects as those of the electro-optical device manufacturing apparatus described above.

The electro-optical device according to the present invention includes a light modulation device that modulates a light beam emitted from a light source according to image information, and an optical characteristic of the incident light beam that is disposed on the light beam incidence side and / or the light beam emission side of the light modulation device. The optical modulation device comprises an optical modulation device that modulates incident light according to image information, and a holding frame that houses and holds the light modulation device. The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side and / or a light beam emission side end face, and is manufactured by the above-described electro-optical device manufacturing method. .
According to the present invention, since the electro-optical device is manufactured by the above-described manufacturing method, the same operations and effects as those of the above-described electro-optical device manufacturing method can be enjoyed.

In the electro-optical device according to the aspect of the invention, the optical conversion element is disposed on each of the light beam incident side and the light beam emission side of the light modulation device, and includes a polarizing plate that converts the incident light beam into linearly polarized light. Is preferred.
Incidentally, in the conventional configuration, the incident-side polarizing plate disposed on the light beam incident side of the light modulation device and the light modulation device are installed in the projector in an independent state. For this reason, when manufacturing the projector, after adjusting the light modulator to a predetermined position on the optical axis of the light beam emitted from the light source, the attitude of the incident-side polarizing plate with respect to the optical axis is adjusted. In such a configuration, since the light modulation device and the incident-side polarizing plate are adjusted independently, the manufacturing efficiency of the projector cannot be improved.
According to the present invention, since the optical conversion element is configured to include the polarizing plates disposed on the light beam incident side and the light beam emission side of the light modulation device, the incident side polarizing plate and the emission side polarizing plate are optically modulated. Can be integrated into the device. Therefore, when manufacturing a projector equipped with an electro-optical device, if the electro-optical device is adjusted to a predetermined position on the optical axis of the light beam emitted from the light source, both the light modulation element and the optical conversion element are adjusted. Therefore, the manufacturing efficiency of the projector can be improved.

A projector according to an aspect of the invention includes a light source device, the above-described electro-optical device, and a projection optical device that magnifies and projects an optical image formed by the electro-optical device.
According to the present invention, since the projector includes the light source, the above-described electro-optical device, and the projection optical device, the projector can enjoy the same operations and effects as the above-described electro-optical device.

In the projector according to the aspect of the invention, the electro-optical device includes a plurality of optical optical devices, each of which has a plurality of light beam incident side end surfaces for mounting the plurality of electro-optical devices, and is formed by the plurality of electro-optical devices. It is preferable to include a color synthesis optical device that synthesizes and emits the image.
According to the present invention, the projector includes the color combining optical device, and the electro optical device is attached to each light beam incident side end surface of the color combining optical device. However, a plurality of electro-optical devices can be integrated with the color combining optical device, and the projector can be miniaturized.
In addition, since the electro-optical device is an integration of the light modulation device and the optical conversion element, when adjusting the mutual position of the plurality of electro-optical devices, the predetermined light modulation element, the optical conversion element, and others The mutual positions of the light modulation element and the optical conversion element can be collectively adjusted. Therefore, compared with the case where the light modulation device and the optical conversion element are configured separately, the manufacturing efficiency of the projector is dramatically improved.

[1. First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
[1-1. Projector structure]
FIG. 1 is a diagram illustrating a structure of a projector 100 including an electro-optical device to be manufactured.
The projector 100 includes an integrator illumination optical system 110, a color separation optical system 120, a relay optical system 130, an electro-optical device 140 and an optical device 160 including a cross dichroic prism 150 as a color combining optical device, and a projection optical device. As a projection lens 170.

  The integrator illumination optical system 110 includes a light source device 111 including a light source lamp 111A and a reflector 111B, a first lens array 113, a second lens array 115, a reflection mirror 117, a polarization conversion element 118, and a superimposing lens 119. Prepare. The light beam emitted from the light source lamp 111A is aligned in the emission direction by the reflector 111B, divided into a plurality of partial light beams by the first lens array 113, the emission direction is bent by 90 ° by the reflection mirror 117, and then the second lens. An image is formed in the vicinity of the array 115. Each partial light beam emitted from the second lens array 115 is incident so that its central axis (principal ray) is perpendicular to the incident surface of the polarization conversion element 118 at the subsequent stage. It is emitted as linearly polarized light. A plurality of partial light beams emitted from the polarization conversion element 118 as linearly polarized light and passed through the superimposing lens 119 are superimposed on three liquid crystal panels, which will be described later, constituting the electro-optical device 140.

The color separation optical system 120 includes two dichroic mirrors 121 and 122 and a reflection mirror 123. The dichroic mirrors 121 and 122 and the reflection mirror 123 receive a plurality of partial light beams emitted from the integrator illumination optical system 110. It has a function of separating into three color lights of red, green and blue.
The relay optical system 130 includes an incident side lens 131, a relay lens 133, and reflection mirrors 135 and 137, and the color light separated by the color separation optical system 120, for example, blue light, is described later as electro-optics for blue light. Has the function of leading to the device.

The optical device 160 modulates each color light separated by the color separation optical system 120 according to image information, and combines the modulated light beams to form a color image. The optical device 160 includes three electro-optical devices 140 (the red light side electro-optical device is 140R, the green light side electro-optical device is 140G, and the blue light side electro-optical device is 140B), and a cross dichroic prism. 150. The optical device 160 is integrated by attaching three electro-optical devices 140 to the respective light beam incident side end surfaces of the cross dichroic prism 150.
The electro-optical device 140 includes a liquid crystal panel 142 as a light modulation element, an incident side polarizing plate 141 as an optical conversion element, a viewing angle correction plate 143, and an emission side polarizing plate 144. The electro-optical device 140 is arranged in parallel in the order of the optical components 141 to 144 from the light beam incident side, and is integrated by a manufacturing apparatus described later. Although the specific structure of the electro-optical device 140 will be described later, in addition to the incident side polarizing plate 141, the liquid crystal panel 142, the viewing angle correction plate 143, and the emission side polarizing plate 144, the liquid crystal panel 142 is accommodated and held. In addition, a holding frame for integrating these optical components 141 to 144 is provided.

The incident-side polarizing plate 141 receives light of each color whose polarization direction is aligned in approximately one direction by the polarization conversion element 118, and of the incident light beams, is substantially the same as the polarization axis of the light beams aligned by the polarization conversion element 118. Only polarized light in the direction is transmitted, and other light beams are absorbed. The incident-side polarizing plate 141 has a configuration in which a polarizing film 141B (see FIG. 2) is stuck on a translucent substrate 141A (see FIG. 2).
Among these, the translucent substrate 141A is a rectangular plate having translucency. Note that various members such as optical glass, quartz, quartz, sapphire, and fluorite can be used as the light-transmitting substrate 141A.
The liquid crystal panel 142 has a configuration in which a liquid crystal as an electro-optical material is hermetically sealed between a pair of transparent glass substrates, and the alignment state of the liquid crystal is controlled according to a drive signal output from a control board (not shown). The polarization direction of the polarized light beam emitted from the incident side polarizing plate 141 is modulated.

The viewing angle correction plate 143 compensates for birefringence generated in the liquid crystal panel 142. The viewing angle correction plate 143 increases the viewing angle of the projected image and improves the contrast of the projected image. The viewing angle correction plate 143 has a viewing angle correction film 143B (see FIG. 2) attached on a transparent substrate 143A (see FIG. 2) similar to the transparent substrate 141A constituting the incident-side polarizing plate 141 described above. It has the structure which was made.
The exit-side polarizing plate 144 transmits only polarized light in a predetermined direction out of the light flux emitted from the liquid crystal panel 142 and passing through the viewing angle correction plate 143, and absorbs the other light flux. Similar to the incident-side polarizing plate 141, the emission-side polarizing plate 144 has a configuration in which a polarizing film 144B (see FIG. 2) is pasted on a translucent substrate 144A (see FIG. 2), and its polarization axis is It is arranged so as to be substantially orthogonal to the polarization axis that transmits the light flux of the incident side polarizing plate 141.

  The cross dichroic prism 150 is an optical element that forms a color image by synthesizing an optical image modulated for each color light emitted from the emission-side polarizing plate 144. The cross dichroic prism 150 has a square shape in plan view in which four right angle prisms are bonded together, and two dielectric multilayer films are formed on the interface where the right angle prisms are bonded together. These dielectric multilayer films reflect each color light emitted from the electro-optical devices 140R and 140B and transmit the color light emitted from the electro-optical device 140G. In this manner, the color lights modulated by the electro-optical devices 140R, 140G, and 140B are combined to form a color image.

  The projection lens 170 enlarges and projects the color image formed by the optical device 160 on the screen. Although not shown, the projection lens 170 is configured as a combined lens in which a plurality of lenses are housed in a cylindrical lens barrel.

[1-2. Structure of electro-optical device]
2 and 3 are exploded perspective views showing the structure of the electro-optical device 140. FIG. Specifically, FIG. 2 is an exploded perspective view of the electro-optical device 140 viewed from the light beam incident side. FIG. 3 is an exploded perspective view of the electro-optical device 140 viewed from the light beam emission side.
Since the three electro-optical devices 140R, 140G, and 140B have the same structure, only one electro-optical device 140 will be described below.
2 and 3, the electro-optical device 140 includes a holding frame 145 in addition to the incident-side polarizing plate 141, the liquid crystal panel 142, the viewing angle correction plate 143, and the emission-side polarizing plate 144.

The holding frame 145 accommodates and holds the liquid crystal panel 142 and supports the incident side polarizing plate 141, the viewing angle correction plate 143, and the emission side polarizing plate 144. The holding frame 145 and the liquid crystal panel 142 constitute an optical modulation device 146. As shown in FIG. 2 or 3, the holding frame 145 includes a holding frame main body 1451 disposed on the light beam incident side and a support plate 1452 disposed on the light beam emission side.
The holding frame main body 1451 has an opening 1451A (FIG. 2) corresponding to the image forming area of the liquid crystal panel 142 at a substantially central portion in plan view, and has a rectangular recess in plan view in which a storage portion (not shown) is formed on the light emission side. The liquid crystal panel 142 is stored and held in the storage portion.
In the holding frame main body 1451, an incident side holding portion 145A for supporting the incident side polarizing plate 141 is formed on the end surface of the light incident side as shown in FIG.
As shown in FIG. 2, the incident-side holding portion 145A has a rectangular frame shape in plan view in which the outer peripheral edge portion of the opening 1451A and the vicinity of the four corners of the outer peripheral edge portion protrude toward the light beam incident side. Then, convex portions 145A1 projecting toward the light beam incident side are respectively formed at the front end portions in the projecting direction near the four corners of the outer peripheral edge portion, and the incident-side polarizing plate 141 is bonded and fixed to the front end portions of these four convex portions 145A1. The

Further, in the holding frame main body 1451, on the lower side of the end surface on the light beam exit side, as shown in FIG. 3, two exit side first holdings as projections for supporting the viewing angle correction plate 143 and the exit side polarizing plate 144 are provided. A portion 145C is formed.
As shown in FIG. 3, these exit-side first holding portions 145 </ b> C are formed so as to protrude from the lower side of the end surface on the light beam exit side to the light beam exit side, and are symmetrical with respect to the center position in the left-right direction of the holding frame main body 1451. It is arranged to become. And these exit side 1st holding | maintenance parts 145C form the upper side end surface in substantially planar shape, and support the lower side end part of the viewing angle correction plate 143 and the exit side polarizing plate 144 on these upper side end surfaces. Further, as shown in FIG. 3, the center portion of the upper side end surface of the injection side first holding portion 145 </ b> C has a lower portion from the protruding end portion to the vicinity of the base end portion, as shown in FIG. 3. Recesses 145C1 that are recessed to the side are formed. Then, with the viewing angle correction plate 143 and the exit side polarizing plate 144 supported by the exit side first holding portion 145C, the lower end of the viewing angle correction plate 143 and the exit side polarizing plate 144 and the concave portion 145C1. By injecting the adhesive into the enclosed space from the light beam exit side, the viewing angle correction plate 143 and the exit side polarizing plate 144 are bonded and fixed to the exit side first holding portion 145C.
Further, in the holding frame main body 1451, as shown in FIG. 2 or FIG. 3, spacer insertion portions that pass through the light beam incident side end surface and the light beam emission side end surface and allow insertion of rod-shaped spacers (not shown) in the four corner portions. 1451B are formed.

The support plate 1452 is formed of a rectangular plate having an opening 1452A (FIG. 3) corresponding to the image forming area of the liquid crystal panel 142 at a substantially central portion in plan view, and is fixed and held on the light beam emission side of the holding frame main body 1451. The liquid crystal panel 142 housed in the housing part of the frame main body 1451 is supported from the light emission side.
As shown in FIG. 3, the support plate 1452 is formed with an exit side second holding portion 145 </ b> D as a protruding portion that supports the viewing angle correction plate 143 and the exit side polarizing plate 144, as shown in FIG. 3. .
As shown in FIG. 3, the exit-side second holding portion 145 </ b> D has a substantially central portion in the left-right direction of the upper end portion of the support plate 1452 that is cut and raised to the light beam exit side, and has a viewing angle at the lower end surface. The upper side ends of the correction plate 143 and the exit side polarizing plate 144 are supported.
That is, in the holding frame 145, the two exit side first holding portions 145C and the exit side second holding portion 145D constitute the exit side holding portion 145B, and the viewing angle correction plate 143 and the exit side polarizing plate 144 are supported at three points. To do.

  Various materials can be used for the holding frame 145 described above, but it is preferable to use a material having thermal conductivity. Examples of materials having thermal conductivity include invar and nickel-iron alloys such as 42Ni-Fe, magnesium alloys, aluminum alloys, carbon steel, stainless steel, and carbon fillers such as carbon fibers and carbon nanotubes. Examples thereof include polycarbonate resins (polycarbonate, polyphenylene sulfide, liquid crystal resins, etc.). As the holding frame 145, the holding frame main body 1451 and the support plate 1452 may be made of the same material as described above, or may be made of different materials. By configuring the holding frame 145 with a material having thermal conductivity in this way, heat generated in the incident side polarizing plate 141, the liquid crystal panel 142, the viewing angle correction plate 143, and the emission side polarizing plate 144 is efficiently held. Heat can be radiated to the frame 145, and the cooling efficiency of these optical components 141 to 144 can be improved.

  In the electro-optical device 140 employing the above-described structure, it is necessary to fix the incident-side polarizing plate 141, the viewing angle correction plate 143, and the emission-side polarizing plate 144 to the holding frame 145 in a state in which the posture is adjusted. . Therefore, a manufacturing apparatus for manufacturing the electro-optical device 140 is required.

[1-3. Electro-optical device manufacturing equipment]
Next, a manufacturing apparatus for manufacturing the electro-optical device 140 will be described with reference to the drawings.
FIG. 4 is a perspective view showing the manufacturing apparatus 2 of the electro-optical device 140. In FIG. 4, the optical axis A direction of the manufacturing apparatus 2 is a Z axis, and two axes orthogonal to the Z axis are an X axis and a Y axis, respectively.
The manufacturing apparatus 2 manufactures the electro-optical device 140 by adjusting the postures of the incident-side polarizing plate 141, the viewing angle correction plate 143, and the exit-side polarizing plate 144 and fixing them to the light modulation device 146. It is. As shown in FIG. 4, the manufacturing apparatus 2 includes a laser light source device 20 serving as a light beam emitting unit, a Glan-Thompson prism 30 serving as a polarization converting unit, an optical component attitude adjusting device 40, and an extinction serving as an extinction ratio calculating unit. And a ratio calculation device 50. The laser light source device 20, the Glan-Thompson prism 30, the optical component attitude adjusting device 40, and the extinction ratio calculating device 50 are supported at predetermined positions on a support base (not shown).

[1-3-1. Configuration of laser light source device]
The laser light source device 20 emits laser light along a predetermined optical axis A (FIG. 4) formed in the manufacturing apparatus 2. In addition, as this laser light source device 20, according to the three electro-optical devices 140R, 140G, and 140B to be manufactured, the three laser light source devices are facilitated, and the electro-optical devices 140R, 140G, and 140B are manufactured. In this case, a configuration is adopted in which three laser light source devices are replaced as appropriate, and laser light in a predetermined wavelength region corresponding to each electro-optical device 140R, 140G, 140B is emitted.

[1-3-2. Configuration of Glan Thompson Prism]
The Glan-Thompson prism 30 is disposed downstream of the optical path of the laser light source device 20 and converts the unpolarized laser light emitted from the laser light source device 20 into linearly polarized light. The polarization direction of linearly polarized light converted by the Glan-Thompson prism 30 is configured to be appropriately changeable. In the present embodiment, the polarization direction of the converted linearly polarized light is set to be inclined by 45 ° with respect to the Y-axis direction in a plane orthogonal to the optical axis A.

[1-3-3. Configuration of optical component attitude adjustment device]
The optical component attitude adjusting device 40 supports the light modulator 146 and supports the incident-side polarizing plate 141, the viewing angle correction plate 143, and the exit-side polarizing plate 144 so that their postures can be adjusted. As shown in FIG. 4, the optical component posture adjusting device 40 includes a first posture adjusting device 41, a second posture adjusting device 42, and a third posture adjusting device 43.
The first posture adjustment device 41 supports the light modulation device 146 and supports the viewing angle correction plate 143 so that the posture can be adjusted. As shown in FIG. 4, the first posture adjusting device 41 includes a base 411, an adjustment / fixed position changing unit 412, and a first posture adjusting device main body 413.

The base 411 is supported on the support base and supports the adjustment / fixed position changing unit 412 and the first attitude adjusting device main body 413. In addition, although illustration is abbreviate | omitted, the rail extended in the X-axis direction (horizontal direction) in FIG.
The adjustment / fixed position changing unit 412 supports the first attitude adjustment device main body 413. Further, the adjustment / fixed position changing unit 412 is configured to be movable in the X-axis direction in FIG. 4 along the rail of the base 411, and the position of the first posture adjusting device main body 413 is adjusted to the fixed position. Switch to position.
Here, the adjustment position is a position where the liquid crystal panel 142 and the viewing angle correction plate 143 are positioned on the optical axis A and the posture adjustment of the viewing angle correction plate 143 is performed.
Further, the fixed position is a position where the liquid crystal panel 142 and the viewing angle correction plate 143 are positioned at a position off the optical axis A, and the viewing angle correction plate 143 is bonded and fixed to the holding frame 145.

FIG. 5 is an exploded perspective view showing the structure of the first posture adjusting device main body 413. Specifically, FIG. 5 is an exploded perspective view of the first attitude adjustment device main body 413 as seen from the laser light emission side. 5, similarly to FIG. 4, the optical axis A direction of the manufacturing apparatus 2 is defined as a Z axis, and two axes orthogonal to the Z axis are defined as an X axis and a Y axis, respectively.
The first posture adjustment device main body 413 supports the light modulation device 146 and the viewing angle correction plate 143, and performs posture adjustment of the viewing angle correction plate 143. As shown in FIG. 5, the first posture adjusting device main body 413 includes a panel holding portion 414 as a light modulation device supporting means and a first posture adjusting portion 415 as a posture adjusting means. The first posture adjustment unit 415 is integrally configured, and the first posture adjustment unit 415 is movably connected to the panel holding unit 414.

As shown in FIG. 5, the panel holding portion 414 is configured by a substantially plate-like member that extends along a plane orthogonal to the optical axis A, and supports the light modulation device 146.
In the panel holding portion 414, a connection portion 4141 for connecting the panel holding portion 414 and the adjustment / fixed position changing portion 412 is formed at the end in the −X axis direction in FIG.
The connection portion 4141 is configured by a plate body that extends in the −X-axis direction from the −X-axis direction end portion of the panel holding portion 414 in FIG. Fixed to the top surface. In other words, the first posture adjusting device main body 413 is supported by the adjustment / fixed position changing unit 412 by the connecting portion 4141.

Further, in the panel holding portion 414, standing portions 4142 standing from the end portions toward the laser beam emission side (+ Z axis direction) are respectively formed below the X-axis direction end portions in FIG. ing. The upright portion 4142 causes the lower side of the panel holding portion 414 to have a substantially U-shaped cross section, and the first posture adjusting portion 415 is disposed inside the U-shape.
As shown in FIG. 5, screw holes 4142 </ b> A are formed in these upright portions 4142 so as to penetrate the respective end surfaces in the X-axis direction, and rotation adjusting screws 416 are respectively screwed into these screw holes 4142 </ b> A. Then, by rotating the rotation adjustment screw 416 to change the screwed state with the screw hole 4142A, the tip portion of the rotation adjustment screw 416 advances and retreats in the X-axis direction in FIG.

  Further, in the panel holding portion 414, three holes 4143 are formed on the lower side so as to penetrate the laser light emission side end face and the incident side end face, as shown in FIG. These holes 4143 are arranged so as to be substantially arcuate around the optical axis A in a plane perpendicular to the optical axis A in a state where the first posture adjusting device main body 413 is arranged at the adjustment position. Of these holes 4143, the hole 4143A located at the center is inserted with the fixing screw 417 in a loosely fitted state, as shown in FIG. Further, each hole 4143B located on both sides of the hole 4143A is for fitting and fixing the guide pin 418 as shown in FIG.

Furthermore, as shown in FIG. 5, in the panel holding portion 414, a protruding portion 4144 that protrudes upward is formed at each end position in the X-axis direction, as shown in FIG.
Among these protrusions 4144, the protrusion 4144A in the −X-axis direction has a protrusion direction dimension that is set to be substantially the same as the vertical height dimension of the holding frame 145. Further, the protruding portion 4144B in the + X-axis direction has a protruding direction dimension set smaller than the protruding direction size of the protruding portion 4144A. These projecting portions 4144 are set to have a spacing distance substantially the same as the left-right width dimension of the holding frame 145, and the holding frame 145 can be fitted between the upper end of the panel holding portion 414 and the projecting portion 4144. It becomes. The upper end portion of the panel holding portion 414 and the protruding portion 4144 serve as the outer shape position reference surface of the holding frame 145, and the light modulation device 146 is supported in a state where the panel holding portion 414 is positioned by fitting.

The first posture adjustment unit 415 supports the viewing angle correction plate 143 so that the posture of the light modulation device 146 supported by the panel holding unit 414 can be adjusted in the state of being close to the light modulation device 146 on the laser beam emission side. It is. As shown in FIG. 5, the first attitude adjustment unit 415 includes an adjustment base 4151 and a correction plate support 4152, and the adjustment base 4151 and the correction plate support 4152 are integrally formed. .
As shown in FIG. 5, the correction plate support portion 4152 is located on the upper side of the first posture adjustment portion 415 and is configured by a plate body having a rectangular shape in plan view that extends along a plane orthogonal to the optical axis A. This is the portion that supports the viewing angle correction plate 143.
In the correction plate support 4152, as shown in FIG. 5, the upper end protrudes upward at the position of the end in the −X-axis direction, and has a U-shaped protrusion when viewed from the Z-axis direction. 4152A is formed.
The protrusion 4152A is arranged such that the U-shaped inner portion faces the + X-axis direction in FIG. The U-shaped inner portion of the projecting portion 4152A on the laser light emission side end surface corresponds to the shape of the side end portion of the translucent substrate 143A constituting the viewing angle correction plate 143 (− A recess 4152B that is recessed in the (Z-axis direction) is formed. The concave portion 4152B functions as an external position reference plane of the viewing angle correction plate 143. By fitting the viewing angle correction plate 143 into the concave portion 4152B, the viewing angle correction plate 143 is positioned in the first posture adjustment unit 415. Supported by the state.

As shown in FIG. 5, the adjustment base 4151 is located on the lower side of the first attitude adjustment unit 415, and is composed of a plate body having a rectangular shape in plan view extending along a plane orthogonal to the optical axis A. This is a portion connected to the panel holding portion 414 on the inside of the U-shape in the holding portion 414.
In the adjustment base 4151, a screw hole 4151 </ b> A that engages with the fixing screw 417 is formed in a position corresponding to the hole 4143 </ b> A among the three holes 4143 of the panel holding part 414, as shown in FIG. 5.
Further, on both sides of the screw hole 4151A, as shown in FIG. 5, in a state where the first posture adjusting device main body 413 is disposed at the adjustment position, a substantially circular shape centering on the optical axis A in a plane orthogonal to the optical axis A is provided. A guide hole 4151B extending in an arc shape is formed. And the guide pin 418 is penetrated by this guide hole 4151B in a loose fitting state.

And the 1st attitude | position adjustment apparatus main body 413 mentioned above is assembled as shown below.
First, the first posture adjusting unit 415 is inserted into the guide hole 4151B of the first posture adjusting unit 415 so that the guide pin 418 fitted and fixed in each hole 4143B of the panel holding unit 414 is inserted into the above-mentioned co Install inside the shape. Then, the fixing screw 417 is attached to the screw hole 4151A of the first posture adjusting unit 415 through the hole 4143A of the panel holding unit 414.
With the first posture adjustment device body 413 assembled in this way, the rotation adjustment screw 416 is rotated to move the rotation adjustment screw 416 forward and backward in the X-axis direction in FIG. The tip abuts against the side end of the adjustment base 4151 of the first posture adjustment unit 415, and the first posture adjustment unit 415 moves in the X-axis direction. At this time, the movement direction of the first posture adjusting unit 415 is aligned with the shape of the guide hole 4151B by the guide pin 418 and the guide hole 4151B. That is, the first posture adjustment unit 415 moves in a direction rotating around the optical axis A on a plane orthogonal to the optical axis A in a state where the first posture adjustment apparatus main body 413 is disposed at the adjustment position.

The second attitude adjustment device 42 is disposed on the laser beam incident side with respect to the first attitude adjustment device 41 and supports the incident-side polarizing plate 141 so that the attitude can be adjusted. As shown in FIG. 4, the second posture adjusting device 42 includes a base 421, an adjustment / fixed position changing unit 422, and a second posture adjusting unit 423 as posture adjusting means.
Note that the base 421 and the adjustment / fixed position changing unit 422 have the same structure as the base 411 and the adjustment / fixed position changing unit 412 constituting the first posture adjusting device 41 described above, and thus the description thereof is omitted.

FIG. 6 is an exploded perspective view showing the structure of the second posture adjustment unit 423. Specifically, FIG. 6 is an exploded perspective view of the second posture adjustment unit 423 viewed from the laser light incident side. In FIG. 6, similarly to FIGS. 4 and 5, the direction of the optical axis A of the manufacturing apparatus 2 is a Z axis, and two axes orthogonal to the Z axis are an X axis and a Y axis, respectively.
The second attitude adjustment unit 423 moves the incident-side polarizing plate 141 in the state where the light modulation device 146 supported by the panel holding unit 414 at the adjustment position or the fixed position is close to the light modulation device 146 on the incident side of the laser light. While supporting, the attitude | position adjustment of the incident side polarizing plate 141 is implemented. As shown in FIG. 6, the second attitude adjustment unit 423 includes a connection part 4231, a base 4232, an adjustment base part 4233, and a polarizing plate support part 4234.
The connection unit 4231 fixes the second posture adjustment unit 423 with respect to the adjustment / fixed position changing unit 422, and extends in the Z-axis direction as shown in FIG. It is fixed to the upper surface of 422.
The base 4232 is formed of a plate body having a substantially U-shape in plan view when viewed from the Y-axis direction, and the connection portion 4231 of FIG. 6 shows the U-shaped inner portion facing the laser light emission side (+ Z-axis direction). Middle, fixed to the + X-axis direction end. An adjustment base 4233 is disposed inside the U-shaped inside of the base 4232.
In this base 4232, screw holes 4232A are formed at respective end portions protruding to the laser beam emission side (+ Z-axis direction) so as to penetrate the end surfaces in the X-axis direction in FIG. 6, and these screw holes 4232A. Rotation adjusting screws 4235 are screwed together. Then, by rotating the rotation adjustment screw 4235 to change the screwed state with the screw hole 4232A, the tip end portion of the rotation adjustment screw 4235 advances and retreats in the X-axis direction in FIG.

  In the base 4232, as shown in FIG. 6, three holes 4232B are formed in the U-shaped base end portion so as to penetrate the laser light incident side end surface and the emission side end surface. These holes 4232B are arranged so as to be substantially arcuate around the optical axis A on a plane orthogonal to the optical axis A in a state where the second posture adjustment unit 423 is arranged at the adjustment position. Of these holes 4232B, the hole 4232B1 located at the center is inserted with the fixing screw 4236 in a loosely fitted state, as shown in FIG. Further, each hole 4232B2 located on both sides of the hole 4232B1 is for fitting and fixing the guide pin 4237 as shown in FIG.

As shown in FIG. 6, the adjustment base portion 4233 is configured by a plate body having a rectangular shape in plan view, and is a portion that is connected to the base body 4232 on the U-shaped inner side of the base body 4232.
In the adjustment base 4233, among the three holes 4232B of the base 4232, the position corresponding to the hole 4232B1 penetrates the incident side end surface and the emission side end surface of the laser beam as shown in FIG. A screw hole 4233A to be mated is formed.
Further, on both sides of the screw hole 4233A, as shown in FIG. 6, the optical axis A with the second posture adjusting portion 423 disposed at the adjustment position through the incident side end surface and the emission side end surface of the laser beam. A guide hole 4233B extending in a substantially arc shape with the optical axis A as the center is formed in a plane orthogonal to the optical axis A. And the guide pin 4237 is inserted in this guide hole 4233B in a loose fitting state.

Further, as shown in FIG. 6, a hole 4233C is formed on the upper side of the screw hole 4233A. .
Further, as shown in FIG. 6, screw holes 4233D that penetrate the laser light incident side end surface and the light emission side end surface and are engaged with the inclination adjusting screw 4239 are formed at the apex positions of the triangles centered on the hole 4233C, respectively. Has been. Then, by rotating the tilt adjusting screw 4239 to change the screwed state with the screw hole 4233D, the tip end portion of the tilt adjusting screw 4239 moves forward and backward in the Z-axis direction in FIG.

As shown in FIG. 6, the polarizing plate support portion 4234 is substantially the same as the shape of the correction plate support portion 4152 of the first attitude adjustment portion 415 described above, and is configured by a plate body having a rectangular shape in plan view. This is a portion that supports the plate 141 and is connected to the adjustment base 4233.
In the polarizing plate support 4234, a screw hole 4234A that is screwed with the fixing screw 4238 is formed at a position corresponding to the hole 4233C of the adjustment base 4233, as shown in FIG.
Further, in the polarizing plate support portion 4234, a protruding portion 4234B similar to the protruding portion 4152A of the correction plate support portion 4152 is formed at the upper end portion as shown in FIG. A concave portion 4234C that is recessed toward the laser light emission side is formed in the U-shaped inner portion of the laser light incident side end face of the protrusion 4234B, in the same manner as the protrusion 4152A. The concave portion 4234C functions as an outer shape position reference plane of the incident side polarizing plate 141, and the incident side polarizing plate 141 is positioned in the second posture adjusting unit 423 by fitting the incident side polarizing plate 141 into the concave portion 4234C. It is supported in the state.

And the 2nd attitude | position adjustment part 423 mentioned above is assembled as shown below.
First, the fixing screw 4238 is attached to the screw hole 4234A of the polarizing plate support 4234 through the hole 4233C of the adjustment base 4233, and the adjustment base 4233 and the polarizing plate support 4234 are connected.
Thereafter, the adjustment base 4233 is installed inside the U-shape of the base 4232 so that the guide pins 4237 fitted and fixed in the holes 4232B2 of the base 4232 are inserted into the guide holes 4233B of the adjustment base 4233. Then, the fixing screw 4236 is attached to the screw hole 4233A of the adjustment base 4233 through the hole 4232B1 of the base 4232.

In this manner, with the second posture adjustment unit 423 assembled, the rotation adjustment screw 4235 is rotated to move the tip of the rotation adjustment screw 4235 forward and backward in the X-axis direction in FIG. The front end abuts on the side end of the adjustment base 4233, and the adjustment base 4233 and the polarizing plate support 4234 move in the X-axis direction. At this time, the adjustment base 4233 moves in the direction along the shape of the guide hole 4233B by the guide pin 4237 and the guide hole 4233B. That is, the adjustment base 4233 and the polarizing plate support 4234 move in the direction of rotation about the optical axis A in a plane orthogonal to the optical axis A in a state where the second attitude adjustment unit 423 is disposed at the adjustment position.
Furthermore, each inclination adjusting screw 4239 screwed into the screw hole 4233D of the adjusting base 4233 is rotated to move the tip of the inclination adjusting screw 4239 forward and backward in the Z-axis direction in FIG. The leading end abuts on the end face of the polarizing plate support 4234, and the inclination position of the polarizing plate support 4234 is changed around the screw hole 4234A.

The third attitude adjustment device 43 is disposed on the laser beam emission side with respect to the first attitude adjustment device 41, and supports the emission-side polarizing plate 144 so that the attitude can be adjusted. As shown in FIG. 4, the third posture adjusting device 43 includes a base 431, an adjustment / fixed position changing unit 432, and a third posture adjusting unit 433 as posture adjusting means.
The base 431 and the adjustment / fixed position changing unit 432 are the same as the bases 411 and 421 and the adjustment / fixed position changing units 412 and 422 constituting the first posture adjusting device 41 and the second posture adjusting device 42, respectively. Since it is a structure, description thereof is omitted.
The third posture adjustment unit 433 is substantially the same as the structure of the second posture adjustment unit 423 constituting the second posture adjustment device 42, and the same members as those of the second posture adjustment unit 423 are denoted by the same reference numerals. Detailed description is omitted (see FIG. 4). The third posture adjustment unit 433 differs from the second posture adjustment unit 423 in that the light modulation device 146 is arranged on the laser light emission side of the light modulation device 146 supported by the panel holding unit 414 at the adjustment position or the fixed position. The polarizing plate support 4234 supports the exit-side polarizing plate 144 in the close state, the base 4232 is connected to the + X-axis direction end of the connecting portion 4231, and the U-shaped inner portion of the base 4232 faces the −Z-axis direction. It is only a point.

[1-3-4. Configuration of extinction ratio calculation device]
FIG. 7 is a diagram illustrating an internal configuration of the extinction ratio calculation apparatus 50.
The extinction ratio calculating device 50 is converted into linearly polarized light by the Glan-Thompson prism 30, and the target optical at least one of the incident side polarizing plate 141, the liquid crystal panel 142, the viewing angle correction plate 143, and the emission side polarizing plate 144. It detects the laser beam through the component and calculates the extinction ratio of the target optical component. As shown in FIG. 7, the extinction ratio calculating device 50 includes a reference polarizing plate 51, a light detection unit 52, a control unit 53, and a display unit 54.

The reference polarizing plate 51 converts a light beam incident through the target optical component into linearly polarized light having a predetermined polarization axis, and is configured to be rotatable around the optical axis A under the control of the control unit 53. The polarization axis is changed at high speed in the rotation direction about the optical axis A.
The light detection unit 52 detects a light beam incident through the reference polarizing plate 51, and outputs a signal corresponding to the detected light intensity to the control unit 53.
The control unit 53 includes an arithmetic processing device such as a CPU (Central Processing Unit) and controls the entire extinction ratio calculating device 50. Specifically, the control unit 53 drives the drive unit 53A configured by a motor or the like to rotate the reference polarizing plate 51 at a high speed at a predetermined cycle. Further, the control unit 53 calculates the extinction ratio of the target optical component based on the signal output from the light detection unit 52. A method for calculating the extinction ratio will be described later.
The display unit 54 displays the extinction ratio E calculated by the control unit 53 under the control of the control unit 53. For example, liquid crystal, organic EL (Electro Luminescence), PDP (Plasma Display Panel), CRT (Cathode-Ray Tube), or the like is used for the display unit 54.

[1-4. Manufacturing method of electro-optical device]
Next, a manufacturing method of the electro-optical device 140 by the manufacturing apparatus 2 described above will be described with reference to the drawings. Note that the manufacturing method of the three electro-optical devices 140R, 140G, and 140B is substantially the same, and the manufacturing method of one electro-optical device 140 will be described below.
FIG. 8 is a flowchart illustrating a method for manufacturing the electro-optical device 140.
9 to 12 are diagrams illustrating a process for manufacturing the electro-optical device 140.
First, the worker sets the optical component posture adjusting device 40 of the manufacturing apparatus 2 to an initial position (processing S1). Specifically, as shown in FIG. 9, the adjustment / fixed position changing units 412, 422, and 432 constituting the first posture adjustment device 41, the second posture adjustment device 42, and the third posture adjustment device 43 are set to the adjustment positions. Move. That is, in such a state, each of the first posture adjustment device 41, the second posture adjustment device 42, and the third posture adjustment device 43 includes a light modulation device 146, an incident-side polarizing plate 141, a viewing angle correction plate 143, and When the exit-side polarizing plate 144 is installed, the optical components 141 to 144 are installed on the optical axis A of the manufacturing apparatus 2.
And after process S1, as shown below, the manufacture operation | work of the electro-optical apparatus 140 is implemented.

After the process S1, first, the attitude adjustment of the viewing angle correction plate 143 is performed as shown below, and the viewing angle correction plate 143 is fixed to the light modulator 146 (processing S2).
Specifically, FIG. 13 is a flowchart for explaining a method for adjusting and fixing the liquid crystal panel 142 and the viewing angle correction plate 143.
First, the operator installs the light modulation device 146 on the panel holding unit 414 of the first attitude adjustment device 41 (processing S2A: light modulation device installation step). At the same time, the operator connects the liquid crystal panel driving clip connector 60 to the liquid crystal panel 142 as shown in FIG. 9 so that the liquid crystal panel 142 can be driven.
After step S2A, the operator installs the viewing angle correction plate 143 on the correction plate support 4152 of the first attitude adjustment device 41 (step S2B: optical conversion element installation step). At this time, the viewing angle correction plate 143 is disposed inside the emission side holding portion 145B of the holding frame 145 constituting the light modulation device 146 supported by the panel holding portion 414.

After the process S2B, the operator operates the liquid crystal panel driving clip connector 60 to drive the liquid crystal panel 142 so that the entire surface is black (process S2C).
After the process S2C, the operator turns on the laser light source device 20 and emits laser light from the laser light source device 20 (process S2D: luminous flux emission process). At this time, the light beam emitted from the laser light source device 20 is converted into linearly polarized light through the Glan-Thompson prism 30 (processing S2E: polarization conversion process), and the liquid crystal panel 142 and the viewing angle installed in the processing S2A and S2B. The light is incident on the extinction ratio calculation device 50 via the correction plate 143.

Here, when the operator turns on the power of the extinction ratio calculation device 50, the control unit 53 controls the drive unit 53A to rotate the reference polarizing plate 51 at a high speed at a predetermined cycle. Then, the light detection unit 52 detects the laser light that has passed through the liquid crystal panel 142, the viewing angle correction plate 143, and the reference polarizing plate 51 (processing S2F: luminous flux detection step). Then, the light detection unit 52 sequentially outputs a signal corresponding to the detected light intensity of the laser light to the control unit 53.
The control unit 53 receives signals sequentially output from the light detection unit 52, and calculates the extinction ratio of the liquid crystal panel 142 and the viewing angle correction plate 143 as described below (processing S2G: extinction ratio calculation step). Then, the control unit 53 drives and controls the display unit 54 to display the calculated extinction ratio on the display unit 54.

FIG. 14 is a diagram for explaining a calculation method of the extinction ratio by the control unit 53.
When the reference polarizing plate 51 is rotated at a high speed with a predetermined period, the light intensity I of the laser light that passes through the liquid crystal panel 142, the viewing angle correction plate 143, and the reference polarizing plate 51 is as shown in FIG. It changes according to the rotation period.
The controller 53 reads the maximum value Imax and the minimum value Imin of the light intensity I based on the signals sequentially output from the light detector 52, as shown in FIG. Then, the control unit 53 calculates the extinction ratio E by the following formula 1 based on the read maximum value Imax and minimum value Imin.

  The calculated extinction ratio E depends on the characteristics of the object passing through the laser beam. In the present embodiment, this extinction ratio E is the target optical component (described above) of the Glan-Thompson prism 30, the liquid crystal panel 142, the viewing angle correction plate 143, the incident-side polarizing plate 141, and the exit-side polarizing plate 144 through which the laser light passes. In this state, it depends on the characteristics of the liquid crystal panel 142, the viewing angle correction plate 143), and the reference polarizing plate 51. In the present embodiment, the extinction ratio E of the Glan-Thompson prism 30 and the reference polarizing plate 51 is calculated in advance, and by calculating the extinction ratio E according to the above equation 1, the target optical component (in the above state, The characteristics of the liquid crystal panel 142 and the viewing angle correction plate 143), that is, the posture state can be observed.

After the processing S2G, the operator confirms the extinction ratio E displayed on the display unit 54, and whether or not the confirmed extinction ratio E is a specified value, that is, the posture of the viewing angle correction plate 143 is appropriate. It is determined whether or not there is (process S2H).
Here, if the operator determines that the confirmed extinction ratio E is not a specified value, that is, if the operator determines that the attitude of the viewing angle correction plate 143 is not appropriate, the rotation adjustment of the first attitude adjustment device 41 is performed. The screw 416 is rotated to move the first posture adjustment unit 415, and the rotation adjustment of the viewing angle correction plate 143 is performed (processing S2I: posture adjustment step). Note that the control unit 53 calculates the extinction ratio E in real time, and displays the calculated extinction ratio E on the display unit 54.
Then, the operator confirms the extinction ratio E displayed on the display unit 54, and repeats the process S2I until the confirmed extinction ratio E reaches a specified value.

When the extinction ratio E becomes a specified value in the process S2H, that is, when the posture of the viewing angle correction plate 143 becomes appropriate, the operator operates the liquid crystal panel driving clip connector 60, The driving of the liquid crystal panel 142 is stopped (processing S2J). Then, the liquid crystal panel driving clip connector 60 is detached from the liquid crystal panel 142.
After the process S2J, the operator moves the adjustment / fixed position changing unit 412 of the first posture adjusting device 41 to the fixed position as shown in FIG. 10 (process S2K: optical element moving step).
After the process S2K, the operator enters a space surrounded by the recesses 145C1 of the two exit-side first holding portions 145C constituting the exit-side holding portion 145B of the holding frame 145 and the lower end of the viewing angle correction plate 143. While injecting the adhesive, the adhesive is injected between the second holding part 145D on the emission side and the upper end of the viewing angle correction plate 143, and the viewing angle correction plate 143 is bonded and fixed to the holding frame 145. (Processing S2L: Optical conversion element fixing step).

After the process S2, as shown below, the attitude adjustment of the incident side polarizing plate 141 is performed, and the incident side polarizing plate 141 is fixed to the holding frame 145 (processing S3). In addition, since the adjustment and fixing method of the incident side polarizing plate 141 are substantially the same as the adjustment and fixing method of the liquid crystal panel 142 and the viewing angle correction plate 143 described above, description thereof will be appropriately omitted below.
Specifically, FIG. 15 is a flowchart for explaining a method for adjusting and fixing the incident-side polarizing plate 141.
First, as shown in FIG. 10, the operator installs the incident-side polarizing plate 141 on the polarizing plate support 4234 of the second attitude adjustment device 42 (processing S3A: optical conversion element installation step).
Next, similarly to the processes S2D, S2E, and S2F described above, the operator irradiates laser light (process S3B: luminous flux emission process), laser beam polarization conversion (process S3C: polarization conversion process), and luminous flux detection. (Process S3D: luminous flux detection step) is performed.
At this time, in the processes S3B, S3C, and S3D, the light beam emitted from the laser light source device 20 passes through the Glan-Thompson prism 30 and the incident-side polarizing plate 141 as shown in FIG. Detected.

After the process S3D, the control unit 53 calculates the extinction ratio E of the incident-side polarizing plate 141 as in the above-described process S2G (process S3E: extinction ratio calculation step).
After the process S3E, the operator confirms the extinction ratio E displayed on the display unit 54 as in the above-described process S2H, and whether or not the confirmed extinction ratio E is a specified value, that is, the target optical It is determined whether or not the orientation of the incident-side polarizing plate 141 serving as a component is appropriate (processing S3F).
After the processing S3F, when the operator determines that the attitude of the incident-side polarizing plate 141 is not appropriate based on the confirmed extinction ratio E, the operator rotates the rotation adjustment screw 4235 of the second attitude adjustment device 42 to adjust the adjustment base. 4233 and the polarizing plate support part 4234 are moved, and rotation adjustment of the incident side polarizing plate 141 is implemented. At this time, the operator rotates the screws 4238 of the second attitude adjustment device 42 to change the inclination position of the polarizing plate support 4234, and performs the inclination adjustment of the incident side polarizing plate 141 (processing S3G). : Posture adjustment process).
Then, the operator confirms the extinction ratio E displayed on the display unit 54, and repeats the process S3G until the confirmed extinction ratio E reaches a specified value.

When the extinction ratio E becomes a specified value in the process S3F, that is, when the incident-side polarizing plate 141 has an appropriate posture, the operator adjusts the second posture as shown in FIG. The adjustment / fixed position changing unit 422 of the apparatus 42 is moved to the fixed position (process S3H: optical element moving step). At this time, the incident-side polarizing plate 141 is disposed in a state close to the incident-side holding portion 145A of the holding frame 145 constituting the light modulation device 146 supported by the panel holding portion 414.
After the process S3H, the operator injects an adhesive between the four convex portions 145A1 of the incident side holding portion 145A of the holding frame 145 and the incident side polarizing plate 141, and enters the incident side polarizing plate with respect to the holding frame 145. 141 is bonded and fixed (processing S3I: optical element fixing step).

After the process S3, as shown below, the posture adjustment of the exit side polarizing plate 144 is performed, and the exit side polarizing plate 144 is fixed to the holding frame 145 (process S4). In addition, since the adjustment method and fixing method of the exit side polarizing plate 144 are substantially the same as the adjustment method and fixing method of the incident side polarizing plate 141 described above, description thereof will be appropriately omitted below.
Specifically, FIG. 16 is a flowchart illustrating a method for adjusting and fixing the exit-side polarizing plate 144.
First, as shown in FIG. 11, the operator installs the exit-side polarizing plate 144 on the polarizing plate support 4234 of the third posture adjusting device 43 (processing S4A: optical conversion element installation step).
Next, similarly to the processes S3B, S3C, and S3D described above, the operator performs laser beam irradiation (process S4B: light beam emission process), laser beam polarization conversion (process S4C: polarization conversion process), and light beam detection. (Process S4D: Luminous flux detection step) is performed.
At this time, in the processes S4B, S4C, and S4D, the light beam emitted from the laser light source device 20 passes through the Glan-Thompson prism 30 and the emission-side polarizing plate 144 as shown in FIG. Detected.

After the process S4D, the control unit 53 calculates the extinction ratio E of the exit-side polarizing plate 144 similarly to the above-described process S3E (process S4E: extinction ratio calculation step).
After the process S4E, the operator operates the third attitude adjustment device 43 while confirming the extinction ratio E displayed on the display unit 54 in substantially the same manner as the above-described processes S3F and S3G, and the extinction ratio E is designated. The orientation adjustment of the exit-side polarizing plate 144 is performed until the value becomes (processing S4F, S4G: orientation adjustment step).
When the extinction ratio E becomes a specified value in the process S4F, that is, when the posture of the exit-side polarizing plate 144 becomes appropriate, the operator adjusts the third posture as shown in FIG. The adjustment / fixed position changing unit 432 of the apparatus 43 is moved to the fixed position (process S4H: optical element moving step). At this time, the emission-side polarizing plate 144 is disposed inside the emission-side holding portion 145B of the holding frame 145 constituting the light modulation device 146 supported by the panel holding portion 414. In addition, the state where the attitude | position of the output side polarizing plate 144 became suitable is the state where the polarization axis of the incident side polarizing plate 141 adjusted and fixed in process S3 and the polarization axis of the output side polarizing plate 144 are orthogonal. is there.
After the process S4H, the operator injects an adhesive between the exit side holding part 145B of the holding frame 145 and the upper and lower end parts of the exit side polarizing plate 144 in substantially the same manner as the process S2L described above, and holds the holding frame. The exit-side polarizing plate 144 is bonded and fixed to 145 (processing S4I).
The electro-optical device 140 is manufactured by the procedure as described above.

In the manufacturing method described above, the manufacturing method of one electro-optical device 140 has been described. When manufacturing the three electro-optical devices 140R, 140G, and 140G, the wavelength of the laser light emitted from the laser light source device 20 is described. The region is changed to a wavelength region corresponding to the three electro-optical devices 140R, 140G, and 140B.
Then, after the three electro-optical devices 140R, 140G, and 140B are manufactured, as shown below, the electro-optical devices 140R, 140G, and 140B are attached to the end surfaces of the cross dichroic prism 150 on the light beam incident side. The device 160 is manufactured.

First, a rod-shaped spacer (not shown) having a photocurable adhesive or a thermosetting adhesive applied to the outer peripheral portion is inserted into the four spacer insertion portions 1451B of the holding frames 145 constituting the three electro-optical devices 140, respectively. At the same time, one end of the spacer is attached to the end surface of the cross dichroic prism 150 on the light beam incident side.
Thereafter, the mutual position adjustment of the liquid crystal panels 142 of the three electro-optical devices 140R, 140G, and 140B is performed in a state where the adhesive is uncured. Specifically, alignment adjustment is performed by using the joint surface of the spacer and the cross dichroic prism 150 as a sliding surface, and focus adjustment is performed by sliding each holding frame 145 through the spacer. Here, the alignment adjustment refers to the X-axis direction, the Y-axis direction, and the XY direction when the optical axis direction of the light beam incident on each liquid crystal panel 142 is the Z-axis and the two axes perpendicular to the Z-axis are the X and Y axes. It means adjustment of the rotational direction (θ direction) in the plane. Focus adjustment means adjustment of the Z-axis direction, the rotation direction about the X axis (Xθ direction), and the rotation direction about the Y axis (Yθ direction).
Then, after positioning each electro-optical device 140 at a predetermined position with respect to the cross dichroic prism 150, the adhesive is cured with hot air, ultraviolet rays, or the like, and the electro-optical device 140 is fixed to the cross dichroic prism 150. .

In the first embodiment described above, the first posture adjustment unit 415, the second posture adjustment unit 423, and the third posture adjustment unit 433 are the liquid crystal panel 142 and the viewing angle correction plate calculated by the extinction ratio calculation device 50. Based on the extinction ratio of 143, the extinction ratio of the incident-side polarizing plate 141, and the extinction ratio of the exit-side polarizing plate 144, the postures of these optical components 141, 143, and 144 are adjusted. For this reason, for example, a configuration in which the light flux through these optical components 141 to 144 is visually confirmed and the posture state of these optical components 141, 143, and 144 is observed, or the light flux through these optical components 141 to 144 is observed. It is possible to adjust the posture states of these optical components 141, 143, and 144 more appropriately as compared with the configuration in which the posture states of these optical components 141, 143, and 144 are observed from the illuminance. For this reason, the posture state of these optical components 141, 143, and 144 can be improved, and the image quality of the optical image formed by the electro-optical device 140 can be improved.
Further, not only the incident-side polarizing plate 141 disposed on the light beam incident side of the light modulation device 146 but also the posture adjustment of the viewing angle correction plate 143 and the emission-side polarizing plate 144 disposed on the light beam emission side of the light modulation device 146. Can be implemented. For this reason, in the manufactured electro-optical device 140, an optical image having a high contrast ratio can be formed as compared with a configuration in which the posture adjustment of the conventional exit-side polarizing plate 144 is not performed.

Further, the first posture adjustment device 41 includes an adjustment / fixed position changing unit 412 and a first posture adjustment device main body 413, and is configured to be able to move the first posture adjustment device main body 413 to the adjustment position and the fixed position. After adjusting the posture of the viewing angle correction plate 143, the optical modulation device 146 and the field of view are fixed at a fixed position off the optical axis A while maintaining the posture of the light modulation device 146 and the viewing angle correction plate 143 with respect to the optical axis A. The angle correction plate 143 can be moved.
Here, since the first attitude adjustment device main body 413 supports the light modulation device 146 and the viewing angle correction plate 143 in a state of being close to each other, the attitude adjustment of the viewing angle correction plate 143 is performed to adjust the light modulation device 146 and the viewing angle. After the correction plate 143 is moved to the fixed position, an adhesive is injected between the emission side holding portion 145B of the holding frame 145 and the upper and lower end portions of the viewing angle correction plate 143 constituting the light modulation device 146, respectively. The viewing angle correction plate 143 can be fixed to the light modulation device 146 in an appropriate posture state.

Similarly, the second posture adjustment device 42 and the third posture adjustment device 43 include adjustment / fixed position changing units 422 and 432, a second posture adjustment unit 423 and a third posture adjustment unit 433, and a second posture adjustment unit 423. Since the third posture adjustment unit 433 is configured to be movable to the adjustment position and the fixed position, after the posture adjustment of the incident side polarizing plate 141 and the emission side polarizing plate 144 is performed, the incident side polarizing plate with respect to the optical axis A is performed. 141 and the exit-side polarizing plate 144 can be moved to positions close to the light modulation device 146 on the light beam incident side and light beam emission side of the light modulation device 146 positioned at the fixed position while maintaining the postures of the light emission device 141 and the emission side polarizing plate 144. For this reason, between the incident side holding part 145A of the holding frame 145 constituting the light modulation device 146 and the upper and lower end parts of the incident side polarizing plate 141, and the upper and lower side ends of the emission side holding part 145B and the emission side polarizing plate 144. By injecting an adhesive between each part, the incident-side polarizing plate 141 and the exit-side polarizing plate 144 can be fixed to the light modulation device 146 in an appropriate posture state.
Therefore, a conventional adjustment mechanism for adjusting the attitude of the incident-side polarizing plate 141 and the like is unnecessary, and the projector 100 on which the electro-optical device 140 is mounted can be reduced in weight. Further, the structure of the constituent members inside the projector 100 can be simplified, and the cost of the projector 100 can be reduced. Furthermore, since the incident-side polarizing plate 141, the light modulation device 146, the viewing angle correction plate 143, and the emission-side polarizing plate 144 can be integrated, the projector 100 can be downsized.

  Furthermore, the adjustment positions for adjusting the postures of the viewing angle correction plate 143, the incident-side polarizing plate 141, and the exit-side polarizing plate 144, and the fixing for fixing these optical components 141, 143, and 144 to the light modulation device 146. Since the positions are set at different positions, the optical components 141, 143, and 144 can be favorably fixed to the light modulator 146 without mechanically interfering with other members constituting the manufacturing apparatus 2. .

  Further, when adjusting the postures of the incident-side polarizing plate 141 and the exit-side polarizing plate 144, the light modulation device 146 and the viewing angle correction plate 143 are disposed at fixed positions off the optical axis A. The extinction ratio calculated by the calculation device 50 is the extinction ratio of the incident side polarizing plate 141 or the exit side polarizing plate 144 without including the liquid crystal panel 142 and the viewing angle correction plate 143. Therefore, the posture state of the incident side polarizing plate 141 and the emission side polarizing plate 144 can be easily determined based on the calculated extinction ratio.

  Here, the electro-optical device 140 includes a viewing angle correction plate 143 and an exit-side polarizing plate 144 that are disposed on the light beam exit side of the light modulation device 146. In addition, the optical component attitude adjustment device 40 includes a first attitude adjustment unit 415 and a third attitude adjustment unit 433 corresponding to the viewing angle correction plate 143 and the exit-side polarizing plate 144. Here, the injection-side holding portion 145B constituting the holding frame 145 includes two injection-side first holding portions 145C and an injection-side second holding portion 145D. As a result, even if the viewing angle correction plate 143 and the exit-side polarizing plate 144 are arranged on the light beam exit side of the light modulation device 146, the first orientation adjustment unit 415 and the third orientation adjustment unit 433 allow the field of view. The angle adjustment plate 143 and the exit-side polarizing plate 144 can be adjusted in posture, and the viewing angle correction plate 143 and the exit-side polarizing plate 144 can be fixed to the light modulation device 146 in an appropriate posture. Therefore, a large number of members can be integrated, and the projector 100 can be further reduced in size.

Further, the first posture adjustment unit 415, the second posture adjustment unit 423, and the third posture adjustment unit 433 are configured to adjust the viewing angle correction plate 143, the incident side polarizing plate 141, and the emission side polarizing plate 144 around the optical axis A. Since the rotation adjustment is performed, the rotation angle of the optical components 141, 143, and 144 around the optical axis A can be appropriately adjusted, and the light beams incident on the optical components 141, 143, and 144 have desired optical characteristics. Can be converted. Accordingly, the image quality of the optical image formed by the electro-optical device 140 can be improved.
Here, in the first posture adjustment unit 415, the second posture adjustment unit 423, and the third posture adjustment unit 433, a substantially arc-shaped guide hole 4151B centering on the optical axis A in a plane orthogonal to the optical axis A is provided. , 4233B are formed, and can be rotated and adjusted along the shapes of the guide holes 4151B, 4233B. Therefore, the rotation angle around the optical axis A of the optical components 141, 143, 144 can be adjusted with a simple structure. Adjustment is possible, and the manufacturing cost of the manufacturing apparatus 2 can be reduced.

Furthermore, the second attitude adjustment unit 423 and the third attitude adjustment unit 433 adjust the rotation of the incident-side polarizing plate 141 and the emission-side polarizing plate 144, respectively, and enter the incident-side polarizing plate with respect to a plane orthogonal to the optical axis A. 141 and the inclination adjustment of the exit side polarizing plate 144 are also performed. For example, the shape change caused by the manufacturing error of the incident side polarizing plate 141 and the exit side polarizing plate 144 can be compensated by the tilt adjustment. Therefore, the incident-side polarizing plate 141 and the exit-side polarizing plate 144 can favorably convert the incident light beam into predetermined optical characteristics, and the image quality of the optical image formed by the electro-optical device 140 can be further improved.
Here, the second posture adjusting unit 423 and the third posture adjusting unit 433 have three tilt adjusting screws 4239 and three screw holes 4233D, and the second posture adjusting unit 423 is operated by operating each tilt adjusting screw 4239. Since the tilt position of the third posture adjusting unit 423 can be changed, the tilt adjustment of the incident side polarizing plate 141 and the exit side polarizing plate 144 can be performed with a simple structure, and the manufacturing cost of the manufacturing apparatus 2 can be reduced. Can be planned.

In the electro-optical device 140, since the incident side polarizing plate 141, the light modulation device 146, the viewing angle correction plate 143, and the emission side polarizing plate 144 are integrated, when the projector 100 is manufactured, If the electro-optical device 140 is adjusted to a predetermined position on the illumination optical axis of the light beam emitted from the light source device 111, all of the optical components 141 to 144 are adjusted. The adjustment of the projector 143 and the exit-side polarizing plate 144 is not necessary, and the manufacturing efficiency of the projector 100 can be improved.
In addition, the projector 100 includes a cross dichroic prism 150, and the electro-optical devices 140R, 140G, and 140B are attached to the respective light-incident side end surfaces of the cross dichroic prism 150. Therefore, the electro-optical device 140 includes three electro-optical devices 140. Even if it is, the three electro-optical devices 140 can be integrated with the cross dichroic prism 150, and the projector 100 can be downsized.
Further, since the electro-optical device 140 is formed by integrating the incident-side polarizing plate 141, the light modulation device 146, the viewing angle correction plate 143, and the exit-side polarizing plate 144, When adjusting the mutual positions of the electro-optical devices 140R, 140G, and 140B, the mutual positions of the optical components 141 to 144 on the predetermined color light side and the optical components 141 to 144 on the other color light side can be collectively adjusted. Therefore, each optical component 141-144 is comprised separately, and the manufacturing efficiency of the projector 100 improves dramatically compared with the structure which adjusts each optical component 141-144 independently.

[2. Second Embodiment]
Next, a second embodiment according to the present invention will be described with reference to the drawings.
FIG. 17 is a perspective view showing the manufacturing apparatus 3 of the electro-optical device 140 according to the second embodiment. In FIG. 17, similarly to FIG. 4 described in the first embodiment, the optical axis A direction of the manufacturing apparatus 3 is a Z axis, and two axes orthogonal to the Z axis are an X axis and a Y axis, respectively. .
In the following description, the same structure and the same members as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted or simplified.
In the first embodiment, the optical component posture adjustment device 40 is configured such that the first posture adjustment device body 413, the second posture adjustment unit 423, and the third posture adjustment unit 433 are movable to the adjustment position and the fixed position. . When the electro-optical device 140 is manufactured, the orientation adjustment of the liquid crystal panel 142, the viewing angle correction plate 143, the incident side polarizing plate 141, and the emission side polarizing plate 144, and the viewing angle correction plate 143 with respect to the holding frame 145, The incident side polarizing plate 141 and the emission side polarizing plate 144 are fixed at different positions.
On the other hand, in the second embodiment, when the electro-optical device 140 is manufactured, the orientation adjustment of the liquid crystal panel 142, the viewing angle correction plate 143, the incident side polarizing plate 141, and the emission side polarizing plate 144, and the holding frame 145 are performed. The viewing angle correction plate 143, the incident side polarizing plate 141, and the exit side polarizing plate 144 are fixed at the same position. That is, the manufacturing apparatus 3 in the second embodiment is different from the structure of the optical component posture adjusting device 40 described in the first embodiment only in the structure of the optical component posture adjusting device 70, as shown in FIG. Other structures are the same as those in the first embodiment.

[2-1. Configuration of optical component attitude adjustment device]
18 to 20 are diagrams showing the optical component attitude adjusting device 70. FIG. Specifically, FIG. 18 is a perspective view of the optical component attitude adjusting device 70 viewed from the laser light incident side. FIG. 19 is an exploded perspective view of the optical component attitude adjusting device 70 as viewed from the laser beam incident side. FIG. 20 is an exploded perspective view of the optical component attitude adjusting device 70 as viewed from the laser beam emission side. 18 to 20, similarly to FIG. 17, the direction of the optical axis A of the manufacturing apparatus 3 is a Z axis, and two axes orthogonal to the Z axis are an X axis and a Y axis, respectively.
As shown in FIGS. 18 to 20, the optical component posture adjusting device 70 includes a base 71, a panel holding portion 72 as a light modulation device supporting means, and a posture adjusting portion 73 as a posture adjusting means. 71, the panel holding | maintenance part 72, and the attitude | position adjustment part 73 are comprised integrally.

The base 71 supports the panel holding unit 72 and the posture adjusting unit 73 and causes the posture adjusting unit 73 to perform posture adjustment. As shown in FIG. 19 or 20, the base 71 includes a first base 711, a second base 712, and a third base 713.
The first base 711 supports the panel holding unit 72 and the posture adjusting unit 73, and is erected on the plate member 7111 and the upper surface of the plate member 7111 as shown in FIG. 19 or 20. Three partition parts 7112, 7113, 7114 are provided.
The plate-like member 7111 is configured by a plate body having a rectangular shape in plan view, and is installed at a predetermined position of a support base (not shown) of the manufacturing apparatus 3.
In the plate-like member 7111, two screw holes 7111A for fixing the panel holding portion 72 are formed on the laser light incident side end surface as shown in FIG. In FIG. 19, two screw holes 7111 </ b> B for fixing the second base 712 and the third base 713 are formed on each end face in the X-axis direction, as shown in FIG. 19 or 20.

As shown in FIG. 19 or FIG. 20, the three partition parts 7112, 7113, and 7114 are plate bodies that are respectively erected along the XY plane from the upper surface of the plate-like member 7111. The first posture adjustment unit, the second posture adjustment unit, and the third posture adjustment unit are arranged in a state of being separated by a predetermined distance. That is, the second posture adjustment unit is disposed on the laser beam incident side of the partition unit 7112, the first posture adjustment unit is disposed between the partition units 7112 and 7113, and the first posture adjustment unit is disposed between the partition units 7113 and 7114. A three posture adjustment unit is arranged.
As shown in FIG. 19 or FIG. 20, three holes 7112A, 7112B, 7114A, and 7114B are formed in the partition portions 7112 and 7114 so as to penetrate the incident side end surface and the emission side end surface of the laser beam. Although illustration is omitted, it is assumed that three similar holes are also formed in the partitioning portion 7113. These holes 7112A, 7112B, 7114A, and 7114B are arranged in a substantially arc shape with the optical axis A as the center in a plane orthogonal to the optical axis A. And as shown in FIG. 19 or FIG. 20, the holes 7112A and 7114A are inserted through the fixing screw 74 in a loosely fitted state. The holes 7112B and 7114B are for fitting and fixing the guide pins 75 as shown in FIG. 19 or FIG.

  Further, in the partition portion 7114, at the apex position of the triangle centering on the hole 7112A, as shown in FIG. 20, the laser beam incident side end surface and the emission side end surface are penetrated, and the inclination described in the first embodiment is used. Screw holes 7114 </ b> C that are engaged with the inclination adjusting screws 76 corresponding to the adjusting screws 4239 are formed. Then, by rotating the inclination adjusting screw 76 and changing the screwed state with the screw hole 7114 </ b> C, the tip end portion of the inclination adjusting screw 76 moves forward and backward so as to be close to and separated from the partition part 7113.

As shown in FIGS. 18 to 20, the second base 712 and the third base 713 are each composed of a plate body having a rectangular shape in plan view, and are attached to the respective end faces of the first base 711 in the X-axis direction. 73 causes the posture adjustment to be performed.
In the second base 712, two holes 7121 are formed on the lower side so as to pass through the end faces in the X-axis direction and to be attached to the first base 711. Then, the second base 712 is fixed to the first base 711 by screwing the fixing screw 714 into the screw hole 7111B of the first base 711 through the hole 7121.
Further, as shown in FIG. 19, the second base 712 is formed with three screw holes 7122 that penetrate each end face in the X-axis direction and are arranged in parallel in the Z-axis direction. These screw holes 7122 are a first posture adjusting unit, a second posture adjusting unit, and a third posture adjusting unit described later of the posture adjusting unit 73 supported by the base 71 in a state where the second base 712 is attached to the first base 711. It is formed at a position where it interferes with the attitude adjustment unit in a plane. Three rotation adjusting screws 77 and 78 corresponding to the rotation adjusting screws 416 and 4235 described in the first embodiment are screwed into these screw holes 7122. Then, by rotating the three rotation adjustment screws 77 and 78 to change the screwed state with the screw holes 7122, the tip portions of the rotation adjustment screws 77 and 78 are respectively in the X-axis direction in FIG. Advance and retreat.
The third base 713 has the same structure as the above-described second base 712, and has a hole 7131 and a screw hole 7132 similar to the hole 7121 and the screw hole 7122, as shown in FIG.

FIG. 21 is a perspective view of the panel holding portion 72 as seen from the laser light incident side. In FIG. 21, as in FIG. 17, the direction of the optical axis A of the manufacturing apparatus 3 is the Z axis, and the two axes orthogonal to the Z axis are the X axis and the Y axis, respectively.
The panel holding unit 72 supports the light modulation device 146 and arranges the light modulation device 146 at a predetermined position on the optical axis A of the manufacturing apparatus 3. As shown in FIG. 21, the panel holding unit 72 includes a connection unit 721 and a panel holding unit main body 722.
As shown in FIG. 21, the connecting portion 721 is a portion that has an L shape in plan view and fixes the panel holding portion 72 to the base 71.
In this connection portion 721, two fixing holes 7211 are formed on one end side of the L shape as shown in FIG. 21 so as to penetrate the incident side end surface and the emission side end surface of the laser beam. Further, the panel holding part main body 722 is fixed to the other end side of the L shape. The panel holding portion 72 is fixed to the first base 711 by screwing the fixing screw 723 (FIG. 19 or FIG. 20) with the screw hole 7111A of the first base 711 through the fixing holes 7211.

As shown in FIG. 21, the panel holding portion main body 722 extends from the other end of the connecting portion 721 to the laser light emission side, and the front end side in the extending direction is bent in the −X-axis direction. It has an L-shaped view.
In this panel holding portion main body 722, among the L-shaped end portions, the end portions extending in the X-axis direction are flat when viewed from the Z-axis direction in which both end portions in the X-axis direction extend upward as shown in FIG. It has a generally U-shape. The U-shaped inner side surface is set to the outer shape position reference surface of the holding frame 145, and the light modulation device 146 is positioned on the panel holding unit main body 722 by fitting the holding frame 145 inside the U-shaped inner side. Supported by

The posture adjustment unit 73 supports the viewing angle correction plate 143, the incident-side polarizing plate 141, and the emission-side polarizing plate 144 so that the posture can be adjusted. The posture adjustment unit 73 includes a first posture adjustment unit 731, a second posture adjustment unit 732, and a third posture adjustment unit 733, as shown in FIG.
FIG. 22 is a perspective view of the first posture adjusting unit 731 as seen from the laser beam emission side. In FIG. 22, similarly to FIG. 17, the optical axis A direction of the manufacturing apparatus 3 is defined as the Z axis, and the secondary axes orthogonal to the Z axis are defined as the X axis and the Y axis, respectively.
The first attitude adjustment unit 731 supports the viewing angle correction plate 143 so that the attitude of the light modulation apparatus 146 supported by the panel holding part 72 can be adjusted while being close to the light modulation apparatus 146 on the laser beam emission side. It is.
As shown in FIG. 22, the first attitude adjustment unit 731 includes an adjustment base 7311 and an optical component support 7312, and the adjustment base 7311 and the optical component support 7312 are integrally formed. .

As shown in FIG. 22, the adjustment base 7311 is located on the lower side of the first attitude adjustment unit 731 and is configured by a plate body having a substantially rectangular shape in plan view extending along a plane orthogonal to the optical axis A. This is a portion disposed between the partition portions 7112 and 7113 of the first base 711.
In the adjustment base 7311, among the above-described three holes (not shown) of the partition part 7112 constituting the first base 711, a fixing screw 74 (as shown in FIG. A screw hole 7311A to be screwed with FIG. 19 or 20) is formed.
Further, on both sides of the screw hole 7311A, as shown in FIG. 22, guide holes 7311B extending in a substantially arc shape with the optical axis A as the center are formed in a plane orthogonal to the optical axis A. And the guide pin 75 (FIG. 19 or FIG. 20) is inserted in this guide hole 7311B in a loosely fitted state.
Further, as shown in FIG. 19, two holes 7311C for fixing the optical component support portion 7312 are formed in the upper end portion of the adjustment base portion 7311. These holes 7311C are long holes extending in the X-axis direction, as shown in FIG.

As shown in FIG. 22, the optical component support portion 7312 is located on the upper side of the first posture adjustment portion 731 and includes two support portions 7312A and 7312B having a substantially L shape in plan view when viewed from the Z-axis direction. Has been.
As shown in FIG. 22, screw holes 7312A1 and 7312B1 that penetrate through the laser light incident side end surface and the light emission side end surface and are screwed with the fixing screw 7313 are formed at one end of the support portions 7312A and 7312B. Has been. Then, by screwing the fixing screw 7313 into the screw holes 7312A1 and 7312B1 through the hole 7311C of the adjustment base 7311, as shown in FIG. 22, the L-shaped inner sides face each other and the L-shaped other end is upward. The two support portions 7312A and 7312B are fixed to the laser light emission side end surface of the adjustment base portion 7311 so as to extend in the direction.
Further, as shown in FIG. 22, a concave portion corresponding to the outer shape of the translucent substrate 143A of the viewing angle correction plate 143 is formed on the laser light emission side end face, as shown in FIG. 7312A2 and 7312B2 are formed, and the viewing angle correction plate 143 can be fitted into the recesses 7312A2 and 7312B2. Since the hole 7311C of the adjustment base 7311 is formed as a long hole, the two support portions 7312A and 7312B are configured such that their positions can be changed in the X-axis direction shown in FIG. That is, the first posture adjustment unit 731 is configured to be able to hold the viewing angle correction plate 143 having different outer dimensions.

The second attitude adjustment unit 732 is disposed on the laser beam incident side of the partitioning portion 7112 in the first base 711, and the light modulation device 146 on the laser beam incident side of the light modulation device 146 supported by the panel holding unit 72. The incident-side polarizing plate 141 is supported in such a manner that the incident side polarizing plate 141 can be adjusted in posture, and its specific structure is substantially the same as that of the first posture adjusting unit 731 and is the same as the first posture adjusting unit 731. The same reference numerals are given to the members, and detailed description is omitted (see FIG. 19 or FIG. 20). That is, the second attitude adjustment unit 732 supports the incident-side polarizing plate 141 by the optical component support unit 7312 as illustrated in FIG. 19 or FIG.
Further, in the second attitude adjustment unit 732, the adjustment base 7311 includes a laser light incident side end surface and an emission side end surface at the apex position of a triangle centering on the screw hole 7311A as shown in FIG. 19 or FIG. , And screw holes 7321 are formed to be engaged with the inclination adjusting screw 79 corresponding to the inclination adjusting screw 4239 described in the first embodiment. Then, by rotating the tilt adjusting screw 79 to change the screwed state with the screw hole 7321, the tip end portion of the tilt adjusting screw 79 advances and retreats so as to approach and separate from the partition portion 7112.

  The third posture adjustment unit 733 is disposed between the partitioning portions 7113 and 7114 of the first base 711 and is close to the light modulation device 146 on the laser light emission side of the light modulation device 146 supported by the panel holding unit 72. In this state, the output side polarizing plate 144 is supported so that the posture can be adjusted, and the specific structure is the same as the structure of the first posture adjusting unit 731, and the same member as the first posture adjusting unit 731 is used. The same reference numerals are given and detailed description is omitted (see FIG. 19 or FIG. 20). That is, as shown in FIG. 19 or 20, the third attitude adjustment unit 733 supports the emission-side polarizing plate 144 by the optical component support unit 7312. Further, as shown in FIG. 19 or FIG. 20, the third posture adjusting unit 733 is arranged on the first base 711 so that the orientation in the Z-axis direction is opposite to that of the first posture adjusting unit 731.

And the optical component attitude | position adjustment apparatus 70 mentioned above is assembled as shown below.
First, the second base 712 and the third base 713 are attached to the first base 711 with the fixing screw 714. Further, the panel holding portion 72 is attached to the first base 711 with the fixing screw 723.
Thereafter, the second posture adjusting unit 732 is the laser beam incident side of the partitioning portion 7112 of the first base 711, the first posture adjusting unit 731 is between the partitioning portions 7112 and 7113, and the third posture adjusting unit 733 is the partitioning portion 7113. , 7114, respectively. Then, the guide pin 75 is inserted through the guide holes 7311B of the posture adjusting units 731 to 733 and the holes 7112B and 7114B of the partitioning units 7112 to 7114. Further, the fixing screw 74 is attached to each screw hole 7311A of the posture adjusting units 731 to 733 via the holes 7112A and 7114A of the partitioning units 7112 to 7114.

Thus, in the state where the optical component attitude adjusting device 70 is assembled, the three rotation adjusting screws 77 and 78 are respectively rotated so that the tip portions of the rotation adjusting screws 77 and 78 are in the X-axis direction in FIGS. , The tips of the three rotation adjustment screws 77 and 78 come into contact with the side ends of the adjustment bases 7311 of the three posture adjustment units 731 to 733, and the posture adjustment units 731 to 733 are moved in the X-axis direction. Moving. At this time, the posture adjusting units 731 to 733 are moved in the direction along the shape of the guide hole 7311B by the guide pins 75 and the guide holes 7311B. That is, it moves in a direction rotating around the optical axis A on a plane orthogonal to the optical axis A. Therefore, by operating each of the rotation adjusting screws 77 and 78, similarly to the first embodiment, the viewing angle correction plate 143, the incident-side polarizing plate 141, and the exit-side polarized light supported by the posture adjusting units 731 to 733. The rotation adjustment of the plate 144 is performed.
Further, each inclination adjusting screw 79 that is screwed into the screw hole 7321 of the adjusting base 7311 of the second posture adjusting part 732 is rotated to move the tip of the inclination adjusting screw 79 forward and backward in the Z-axis direction in FIGS. By doing so, the tip end of each inclination adjusting screw 79 comes into contact with the end surface of the partition part 7112, and the inclination position of the second posture adjusting part 732 is changed around the screw hole 7311A. Therefore, by operating each inclination adjusting screw 79, the inclination adjustment of the incident-side polarizing plate 141 is performed as in the first embodiment.
Further, by rotating each inclination adjusting screw 76 screwed into the screw hole 7114C of the partition portion 7114, the tip end portion of the inclination adjusting screw 76 is advanced and retracted in the Z-axis direction in FIG. The tip is in contact with the end surface of the adjustment base 7311 of the third posture adjustment unit 733, and the tilt position of the third posture adjustment unit 733 is changed around the screw hole 7311A. Therefore, by operating each inclination adjusting screw 76, the inclination adjustment of the exit-side polarizing plate 144 is performed as in the first embodiment.

[2-2. Manufacturing method of electro-optical device]
Next, a manufacturing method of the electro-optical device 140 by the manufacturing apparatus 3 described above will be described with reference to the drawings. Note that the manufacturing method of the three electro-optical devices 140R, 140G, and 140B is substantially the same, and the manufacturing method of one electro-optical device 140 will be described below.
23 to 26 are flowcharts for explaining a method of manufacturing the electro-optical device 140 according to the second embodiment.
The manufacturing method of the electro-optical device 140 in the second embodiment is substantially the same as the manufacturing method described in the first embodiment as shown in FIGS. 23 to 26, and the manufacturing method described in the first embodiment. In FIG. 5, the steps (processes S1, S2K, S3H, S4H) of moving the optical components 141 to 144 to the adjustment position and the fixed position are omitted.

In the process S2I shown in FIG. 24, as described above, the posture adjustment of the viewing angle correction plate 143 is performed by operating the rotation adjustment screw 77.
In the process S3E shown in FIG. 25, the extinction ratio of the liquid crystal panel 142, the viewing angle correction plate 143, and the incident side polarizing plate 141 is calculated. In the processing S3F shown in FIG. 25, whether the extinction ratio of the incident side polarizing plate 141 is a specified value in consideration of the extinction ratio of the liquid crystal panel 142 and the viewing angle correction plate 143 calculated in the processing S2G shown in FIG. It shall be judged whether or not.
Similarly, in the process S4E shown in FIG. 26, the extinction ratio of the liquid crystal panel 142, the viewing angle correction plate 143, the incident side polarizing plate 141, and the emission side polarizing plate 144 is calculated. In the process S4F shown in FIG. 26, the extinction ratio of the exit side polarizing plate 144 is taken into consideration in consideration of the extinction ratio of the liquid crystal panel 142, the viewing angle correction plate 143, and the incident side polarizing plate 141 calculated in the processing S3E shown in FIG. It is determined whether or not is a specified value.
Further, in the processes S3G and S4G shown in FIG. 25 and FIG. 26, as described above, the rotation adjustment of the incident-side polarizing plate 141 and the emission-side polarizing plate 144 is performed by operating each rotation adjusting screw 48, and each inclination is adjusted. It is assumed that the inclination adjustment of the incident side polarizing plate 141 and the exit side polarizing plate 144 is performed by operating the adjusting screws 79 and 76.

  The manufacturing method of the optical device 160 is the same as the manufacturing method described in the first embodiment, and a description thereof will be omitted.

  In the second embodiment described above, as compared with the first embodiment, the optical component attitude adjustment device 70 is configured integrally, and includes a light modulation device 146, an incident-side polarizing plate 141, a viewing angle correction plate 143, Further, since the exit-side polarizing plate 144 is supported in a state of being close to each other at a predetermined position on the optical axis A, the manufacturing apparatus 3 can be reduced in size. Further, the adjustment / fixed position changing units 412, 422, and 432 for moving the light modulation device 146, the incident side polarizing plate 141, the viewing angle correction plate 143, and the emission side polarizing plate 144 to the adjustment position and the fixed position can be omitted. The structure of the apparatus 3 can be simplified, and the manufacturing apparatus 3 can be further downsized. Further, when the electro-optical device 140 is manufactured, the step of moving the light modulator 146, the incident side polarizing plate 141, the viewing angle correction plate 143, and the exit side polarizing plate 144 to the adjustment position and the fixed position can be omitted. The optical device 140 can be manufactured quickly.

[3. Variation of Embodiment]
Although the present invention has been described with reference to preferred embodiments, the present invention is not limited to these embodiments, and various improvements and design changes can be made without departing from the scope of the present invention. It is.
In each of the embodiments described above, the incident-side polarizing plate 141, the viewing angle correction plate 143, and the exit-side polarizing plate 144 are employed as the optical conversion elements, but the present invention is not limited thereto. In addition, a configuration including an optical conversion element such as a phase difference plate may be employed, or a configuration in which at least one of the incident side polarizing plate 141, the viewing angle correction plate 143, and the emission side polarizing plate 144 is omitted. May be. Further, the viewing angle correction plate 143 is disposed on the light emission side of the light modulator 146. However, if the viewing angle correction plate 143 is disposed between the incident side polarizing plate 141 and the emission side polarizing plate 144, Alternatively, a configuration in which the light modulator 146 is disposed on the light beam incident side may be employed.
In each of the above embodiments, the incident side holding portion 145A and the emission side holding portion 145B are adopted as the holding portion of the holding frame 145 constituting the light modulation device 146. However, any other configuration can be used as long as the optical conversion element can be held. You may employ | adopt the holding | maintenance part which has the shape of.

In each of the above embodiments, the laser light source device 20 that emits laser light is employed as the light beam emitting means. However, the present invention is not limited to this. For example, the same configuration as that of the light source device 111 described in the above embodiments is employed. Also good.
In each of the above embodiments, the shape of the constituent members constituting the optical component attitude adjusting devices 40 and 70 is not limited to the shape described in each of the above embodiments, and other shapes may be employed. For example, if the rotation adjustment structure of the posture adjustment unit 73, the first posture adjustment unit 415, the second posture adjustment unit 423, and the third posture adjustment unit 433 is a structure that can rotate around the optical axis A, The rotation adjustment structure described in the embodiment is not limited. Similarly, the tilt adjustment structure is not limited to the tilt adjustment structure described in each of the embodiments as long as the tilt position can be changed with respect to a plane orthogonal to the optical axis A.

In each of the above embodiments, the method of manufacturing the electro-optical device 140 is not limited to the flow of FIGS. I do not care. For example, in each of the above embodiments, the posture adjustment is performed in the order of the viewing angle correction plate 143, the incident-side polarizing plate 141, and the emission-side polarizing plate 144, but the posture adjustment may be performed in other orders. Good.
In each of the above embodiments, the electro-optical device 140 is manufactured by manual operation, but may be configured by automatic operation.

In each of the above embodiments, only an example of a projector using three electro-optical devices has been described. The present invention can also be applied to a projector using four or more electro-optical devices.
In each of the above embodiments, a transmissive liquid crystal panel having a different light incident surface and light emitting surface is used. However, a reflective liquid crystal panel having the same light incident surface and light emitting surface may be used.
In each of the above embodiments, only an example of a front type projector that performs projection from the direction of observing the screen has been described. However, the present invention also applies to a rear type projector that performs projection from the side opposite to the direction of observing the screen. Applicable.

Although the best configuration for carrying out the present invention has been disclosed in the above description, the present invention is not limited to this. That is, the invention has been illustrated and described primarily with respect to particular embodiments, but may be configured for the above-described embodiments without departing from the scope and spirit of the invention. Various modifications can be made by those skilled in the art in terms of materials, quantity, and other detailed configurations.
Therefore, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  The electro-optical device manufacturing apparatus and the electro-optical device manufacturing method according to the present invention eliminate the need for an adjustment mechanism, reduce the cost and weight of the projector, and form an optical image with good image quality. It is useful as a manufacturing apparatus and a manufacturing method for manufacturing an electro-optical device used in a projector used in the above field.

FIG. 3 is a diagram illustrating a structure of a projector including an electro-optical device that is a manufacturing target according to the first embodiment. FIG. 3 is an exploded perspective view showing the structure of the electro-optical device in the embodiment. FIG. 3 is an exploded perspective view showing the structure of the electro-optical device in the embodiment. FIG. 3 is a perspective view showing an electro-optical device manufacturing apparatus according to the embodiment. The disassembled perspective view which shows the structure of the 1st attitude | position adjustment apparatus main body in the said embodiment. The disassembled perspective view which shows the structure of the 2nd attitude | position adjustment part in the said embodiment. The figure which shows the internal structure of the extinction ratio calculation apparatus in the said embodiment. 6 is a flowchart illustrating a method for manufacturing the electro-optical device according to the embodiment. The figure which shows the process of manufacturing the electro-optical apparatus in the said embodiment. The figure which shows the process of manufacturing the electro-optical apparatus in the said embodiment. The figure which shows the process of manufacturing the electro-optical apparatus in the said embodiment. The figure which shows the process of manufacturing the electro-optical apparatus in the said embodiment. The flowchart explaining the adjustment and fixing method of the liquid crystal panel and viewing angle correction plate in the embodiment. The figure for demonstrating the calculation method of the extinction ratio by the control part in the said embodiment. The flowchart explaining the adjustment and fixing method of the incident side polarizing plate in the said embodiment. The flowchart explaining the adjustment and fixing method of the exit side polarizing plate in the said embodiment. FIG. 10 is a perspective view showing an electro-optical device manufacturing apparatus according to a second embodiment. The figure which shows the optical component attitude | position adjustment apparatus in the said embodiment. The figure which shows the optical component attitude | position adjustment apparatus in the said embodiment. The figure which shows the optical component attitude | position adjustment apparatus in the said embodiment. The perspective view which looked at the panel holding | maintenance part in the said embodiment from the incident side of the laser beam. The perspective view which looked at the 1st attitude | position adjustment part in the said embodiment from the emission side of the laser beam. 6 is a flowchart illustrating a method for manufacturing the electro-optical device according to the embodiment. 6 is a flowchart illustrating a method for manufacturing the electro-optical device according to the embodiment. 6 is a flowchart illustrating a method for manufacturing the electro-optical device according to the embodiment. 6 is a flowchart illustrating a method for manufacturing the electro-optical device according to the embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 2,3 ... Manufacturing apparatus, 20 ... Laser light source apparatus (light beam emission means), 30 ... Glan-Thompson prism (polarization conversion means), 50 ... Extinction ratio calculation apparatus (extinction ratio calculation means), 72, 414 ... Panel holding part (light modulation device support means), 73 ... Attitude adjustment part (attitude adjustment means), 100 ... Projector, 111 ... Light source device, 140 ... Electro-optical device , 141... Incidence side polarizing plate (optical conversion element), 142... Liquid crystal panel (light modulation element), 143... Viewing angle correction plate (optical conversion element), 144. Optical conversion element), 145... Holding frame, 145A... Entrance side holding part, 145B .. exit side holding part, 145C... Exit side first holding part (protrusion part), 145D. Second holding part (protruding part), 146... Light modulation device , 150: Cross dichroic prism (color synthesis optical device), 170: Projection lens (projection optical device), 415: First posture adjustment unit (posture adjustment means), 423: Second posture adjustment Parts (attitude adjustment means), 433... Third attitude adjustment part (attitude adjustment means), S2A... Optical modulator installation step, S2B, S3A, S4A... Optical conversion element installation step, S2D, S3B, S4B: luminous flux emission step, S2E, S3C, S4C: polarization conversion step, S2F, S3D, S4D: luminous flux detection step, S2G, S3E, S4E: extinction ratio calculation step, S2I, S3G, S4G ... attitude adjustment process, S2K, S3H, S4H ... optical element moving process, S2L, S3I, S4I ... optical conversion element fixing process.

Claims (13)

A light modulation device that modulates a light beam emitted from a light source according to image information, and an optical conversion element that is disposed on a light beam incident side and / or a light beam emission side of the light modulation device and converts an optical characteristic of the incident light beam. An electro-optical device manufacturing apparatus for manufacturing an electro-optical device comprising:
The light modulation device includes a light modulation element that modulates an incident light beam according to image information, and a holding frame that houses and holds the light modulation element.
The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side end surface and / or a light beam emission side end surface,
A light beam emitting means for emitting a light beam along a predetermined optical axis, a polarization converting means for converting the light beam emitted from the light beam emitting means into linearly polarized light and emitting it to the optical conversion element, and the optical conversion element. An extinction ratio calculating means for detecting an emitted light beam and calculating an extinction ratio of the optical conversion element; an optical modulation apparatus support means for supporting the optical modulation apparatus at a position off the optical axis; and the optical conversion element. A posture adjusting means for supporting posture adjustment at a predetermined position on the optical axis and performing posture adjustment of the optical conversion element with respect to the optical axis based on the extinction ratio calculated by the extinction ratio calculating means;
The posture adjusting means maintains the posture of the optical conversion element with respect to the optical axis, and the light incident side end surface of the light modulation device and / or the light emission of the light modulation device supported by the light modulation device support means. An electro-optical device manufacturing apparatus configured to be movable to a position close to a side end surface. A light modulation device that modulates a light beam emitted from a light source according to image information, and an optical conversion element that is disposed on a light beam incident side and / or a light beam emission side of the light modulation device and converts an optical characteristic of the incident light beam. An electro-optical device manufacturing apparatus for manufacturing an electro-optical device comprising:
The light modulation device includes a light modulation element that modulates an incident light beam according to image information, and a holding frame that houses and holds the light modulation element.
The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side end surface and / or a light beam emission side end surface,
A light beam emitting means for emitting a light beam along a predetermined optical axis, a polarization converting means for converting the light beam emitted from the light beam emitting means into linearly polarized light and emitting it to the light modulation element and the optical conversion element, and the light Extinction ratio calculation means for detecting a light beam emitted through the modulation element and the optical conversion element and calculating an extinction ratio of the light modulation element and the optical conversion element; and an optical modulation device support means for supporting the light modulation apparatus And attitude adjusting means for supporting the optical conversion element so that the attitude can be adjusted, and performing attitude adjustment of the optical conversion element with respect to the optical axis based on the extinction ratio calculated by the extinction ratio calculating means,
The light modulation device support unit and the attitude adjustment unit are integrally configured to support the light modulation device and the optical conversion element in a state of being close to each other, and for the light modulation device and the optical conversion element with respect to the optical axis. While maintaining the posture, an adjustment position that enables the posture adjustment of the optical conversion element at a predetermined position on the optical axis, and fixing the optical conversion element to the light modulation device at a position off the optical axis An electro-optical device manufacturing apparatus, wherein the optical modulation device and the optical conversion element are configured to be movable to a fixed position. A light modulation device that modulates a light beam emitted from a light source according to image information, and an optical conversion element that is disposed on a light beam incident side and / or a light beam emission side of the light modulation device and converts an optical characteristic of the incident light beam. An electro-optical device manufacturing apparatus for manufacturing an electro-optical device comprising:
The light modulation device includes a light modulation element that modulates an incident light beam according to image information, and a holding frame that houses and holds the light modulation element.
The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side end surface and / or a light beam emission side end surface,
A light beam emitting means for emitting a light beam along a predetermined optical axis, a polarization converting means for converting the light beam emitted from the light beam emitting means into linearly polarized light and emitting it to the light modulation element and the optical conversion element, and the light Extinction ratio calculation means for detecting a light beam emitted through the modulation element and the optical conversion element and calculating an extinction ratio of the light modulation element and the optical conversion element; and an optical modulation device support means for supporting the light modulation apparatus And attitude adjusting means for supporting the optical conversion element so that the attitude can be adjusted, and performing attitude adjustment of the optical conversion element with respect to the optical axis based on the extinction ratio calculated by the extinction ratio calculating means,
The light modulation device support means and the posture adjustment means are integrally configured to support the light modulation device and the optical conversion element in a state of being close to each other at a predetermined position on the optical axis. Optical device manufacturing equipment. The electro-optical device manufacturing apparatus according to any one of claims 1 to 3,
The electro-optical device includes a plurality of the optical conversion elements arranged on a light beam incident side and / or a light beam emission side of the light modulation device,
The holding portion constituting the holding frame is configured to include at least three projecting portions that support side end portions of the plurality of optical conversion elements,
2. The electro-optical device manufacturing apparatus according to claim 1, wherein a plurality of the posture adjusting means are configured corresponding to the plurality of optical conversion elements. The electro-optical device manufacturing apparatus according to any one of claims 1 to 4,
The apparatus for manufacturing an electro-optical device, wherein the posture adjusting unit is configured to be rotatable about the optical axis, and adjusts the rotation of the optical conversion element about the optical axis. The electro-optical device manufacturing apparatus according to any one of claims 1 to 5,
The apparatus for manufacturing an electro-optical device, wherein the posture adjusting unit is configured to be able to change a tilt position with respect to a plane orthogonal to the optical axis, and performs tilt adjustment of the optical conversion element. A light modulation device that modulates a light beam emitted from a light source according to image information, and an optical conversion element that is disposed on a light beam incident side and / or a light beam emission side of the light modulation device and converts an optical characteristic of the incident light beam. An electro-optical device manufacturing method for manufacturing an electro-optical device comprising:
The light modulation device includes a light modulation element that modulates an incident light beam according to image information, and a holding frame that houses and holds the light modulation element.
The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side end surface and / or a light beam emission side end surface,
A light modulation device installation step of installing the light modulation device at a position off a predetermined optical axis;
An optical conversion element installation step of installing the optical conversion element at a predetermined position on the optical axis;
A light beam emitting step of emitting a light beam along the optical axis;
A polarization conversion step of converting the light beam emitted in the light beam emission step into linearly polarized light, and injecting the light into the optical conversion device installed at a predetermined position on the optical axis in the optical conversion device installation step;
A light beam detecting step of detecting a light beam emitted through the optical conversion element;
An extinction ratio calculating step of calculating an extinction ratio of the optical conversion element based on the light flux detected in the light flux detecting step;
An attitude adjustment step for adjusting the attitude of the optical conversion element with respect to the optical axis based on the extinction ratio calculated in the extinction ratio calculation step;
After the attitude adjustment step, the optical conversion device is installed at a position off the optical axis in the optical modulation device installation step while maintaining the posture of the optical conversion element with respect to the optical axis. An optical element moving step of moving to a position close to the light beam incident side end surface and / or the light beam emission side end surface;
An electro-optical device manufacturing method comprising: an optical conversion element fixing step of fixing the optical conversion element to the holding portion of the holding frame constituting the light modulation device. A light modulation device that modulates a light beam emitted from a light source according to image information, and an optical conversion element that is disposed on a light beam incident side and / or a light beam emission side of the light modulation device and converts an optical characteristic of the incident light beam. An electro-optical device manufacturing method for manufacturing an electro-optical device comprising:
The light modulation device includes a light modulation element that modulates an incident light beam according to image information, and a holding frame that houses and holds the light modulation element.
The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side end surface and / or a light beam emission side end surface,
A light modulation device installation step of installing the light modulation device on a predetermined optical axis;
An optical conversion element installation step of installing the optical conversion element in a state close to the light modulation device at a predetermined position on the optical axis;
A light beam emitting step of emitting a light beam along the optical axis;
The light beam emitted in the light beam emission step is converted into linearly polarized light, and the light modulation device and the optical conversion device installed at predetermined positions on the optical axis in the light modulation device installation step and the optical conversion element installation step. A polarization conversion step to be emitted to the element;
A light beam detecting step for detecting a light beam emitted through the light modulation device and the optical conversion element;
An extinction ratio calculating step of calculating an extinction ratio of the light modulation device and the optical conversion element based on the light flux detected in the light flux detection step;
An attitude adjustment step for adjusting the attitude of the optical conversion element with respect to the optical axis based on the extinction ratio calculated in the extinction ratio calculation step;
After the posture adjustment step, the optical element movement that moves the light modulation device and the optical conversion element to a position off the optical axis while maintaining the posture of the light modulation device and the optical conversion element with respect to the optical axis. Process,
An electro-optical device manufacturing method comprising: an optical conversion element fixing step of fixing the optical conversion element to the holding portion of the holding frame constituting the light modulation device. A light modulation device that modulates a light beam emitted from a light source according to image information, and an optical conversion element that is disposed on a light beam incident side and / or a light beam emission side of the light modulation device and converts an optical characteristic of the incident light beam. An electro-optical device manufacturing method for manufacturing an electro-optical device comprising:
The light modulation device includes a light modulation element that modulates an incident light beam according to image information, and a holding frame that houses and holds the light modulation element.
The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side end surface and / or a light beam emission side end surface,
A light modulation device installation step of installing the light modulation device on a predetermined optical axis;
An optical conversion element installation step of installing the optical conversion element in a state close to the light modulation device at a predetermined position on the optical axis;
A light beam emitting step of emitting a light beam along the optical axis;
The light beam emitted in the light beam emission step is converted into linearly polarized light, and the light modulation device and the optical conversion device installed at predetermined positions on the optical axis in the light modulation device installation step and the optical conversion element installation step. A polarization conversion step to be emitted to the element;
A light beam detecting step for detecting a light beam emitted through the light modulation device and the optical conversion element;
An extinction ratio calculating step of calculating an extinction ratio of the light modulation device and the optical conversion element based on the light flux detected in the light flux detection step;
An attitude adjustment step for adjusting the attitude of the optical conversion element with respect to the optical axis based on the extinction ratio calculated in the extinction ratio calculation step;
An optical conversion element fixing step of fixing the optical conversion element to the holding portion of the holding frame constituting the light modulation device at a predetermined position on the optical axis after the attitude adjustment step; A method for manufacturing an electro-optical device. A light modulation device that modulates a light beam emitted from a light source according to image information, and an optical conversion element that is disposed on a light beam incident side and / or a light beam emission side of the light modulation device and converts an optical characteristic of the incident light beam. An electro-optical device comprising:
The light modulation device includes a light modulation element that modulates an incident light beam according to image information, and a holding frame that houses and holds the light modulation element.
The holding frame is formed with a holding portion capable of holding the optical conversion element on a light beam incident side and / or a light beam emission side end surface,
An electro-optical device manufactured by the method for manufacturing an electro-optical device according to claim 7. The electro-optical device according to claim 10.
2. The electro-optical device according to claim 1, wherein the optical conversion element includes a polarizing plate that is disposed on each of a light beam incident side and a light beam emission side of the light modulation device and converts the incident light beam into linearly polarized light.   A projector comprising: a light source device; an electro-optical device according to claim 10; and a projection optical device that magnifies and projects an optical image formed by the electro-optical device. The projector according to claim 12, wherein
The electro-optical device includes a plurality of
A color combining optical device having a plurality of light beam incident side end faces for mounting the plurality of electro-optical devices, and combining and emitting each optical image formed by the plurality of electro-optical devices; Characteristic projector.

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