JP2005342602A - Corrugated plate laminated body filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a corrugated plate laminated body filter outstandingly enhancing contact efficiency of a gas to be treated with a function material carried on a wall surface of the corrugated plate laminated body and capable of being downsized or largely adopting an effective surface area. <P>SOLUTION: The corrugated plate carried with the function material is the corrugated plate laminated body filter which is laminated while retaining a gap, becoming a flow passage of the gas to be treated. A gap in a direction connecting apexes of crest parts is smaller than a dimension obtained by subtracting thickness (d) of the corrugated plate from crest height (h) of a crest part forming the corrugated plate. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a corrugated sheet laminate filter having improved contact efficiency between a gas to be treated and a functional material supported on a wall surface of the corrugated sheet laminate.

  In advanced industries such as semiconductor manufacturing and liquid crystal manufacturing, it is important to control air and product surface contamination in a clean room in order to ensure product yield, quality, and reliability. In particular, in the semiconductor industry, as the integration of products progresses, control of ionic gaseous pollutants is indispensable in addition to control of particulate pollutants using HEPA, ULPA and the like.

In order to remove these particulate contaminants and ionic gaseous contaminants, functional materials such as ion exchange groups are introduced into chemical filters. For example, Japanese Patent Laid-Open No. 2001-317243 discloses a chemical filter in which a filter paper containing at least ion exchange fibers and activated carbon is incorporated in a frame material as a filter medium, and simultaneously adsorbs and removes ionic gas and organic gas. It is disclosed. Japanese Patent Laid-Open No. 10-165730 has a property of adsorbing gaseous impurities in the shape of corrugated plates or chevron plates in the outer frame formed at a pair of air inlets and outlets facing each other. There is disclosed a gaseous impurity adsorption filter in which a plurality of adsorbing sheets are arranged in a state of being spaced apart from each other in parallel with the air flow direction.
JP 2001-317243 A (Claim 1) JP-A-10-165730 (Claim 1)

  These conventional chemical filters actually use a structure laminated in a corrugated shape in order to achieve both high removal efficiency and low pressure loss. Corrugated laminates are often straight flow types in which the flow path formed by laminating corrugated core material and flat liner material is straight and the direction in which the gas to be processed passes is the same as the flow path. Has been. In the straight flow type, the flow of the gas to be processed is turbulent or close to the turbulent flow in the vicinity of the inlet of the filter, and the gas to be processed is stirred and supported on the wall of the corrugated laminate. Although the contact efficiency with the functional material is high, the flow of the gas to be processed approaches the laminar flow from the turbulent flow as the gas to be processed passes through the inside of the corrugated laminated body. Efficiency is reduced. For this reason, the filter as a whole cannot be said to have high contact efficiency, and there is a problem that the adsorption efficiency of the adsorbed substance from the gas to be treated is not sufficient.

  Accordingly, the object of the present invention is to significantly increase the contact efficiency between the gas to be treated and the functional material supported on the wall surface of the laminate, and to make the entire filter compact or to provide a large effective surface area. Is to provide.

  In such a situation, the present inventors have intensively studied, and as a result, in the conventional straight flow corrugated laminate filter, the flat liner material is omitted and the corrugated plates are close to each other so as to form a narrow gap. However, the contact efficiency between the gas to be treated and the functional material supported on the wall surface of the corrugated sheet laminate is remarkably increased, but the laminate can be made compact or has an effective area. As a result, the present invention has been completed.

  That is, the present invention (1) is a corrugated sheet laminate in which corrugated sheets carrying a functional material are laminated while maintaining a gap serving as a flow path for the gas to be processed, and connects the apexes of the peaks. A corrugated laminate filter is provided in which the gap in the direction is smaller than the dimension obtained by subtracting the corrugated thickness (d) from the height (h) of the crest forming the corrugated sheet.

  Moreover, this invention (2) provides the corrugated sheet laminated body filter whose said clearance gap is 0.3-1.5 mm.

  Moreover, this invention (3) provides the said corrugated sheet laminated body filter which interposed the spacer which forms the said clearance gap between the said corrugated sheets.

  Moreover, this invention (4) provides the said corrugated sheet laminated body filter by which the said corrugated sheet laminated body was fixed by skewering with the skewered fixing jig.

  Further, the present invention (5) provides the corrugated sheet laminate filter, wherein the corrugated sheet laminate is a laminate of 60 to 250 corrugated plates per 100 mm.

  Moreover, this invention (6) provides the said corrugated sheet laminated body filter characterized by being a deodorizing filter, a dehumidification filter, a chemical filter, or an organic solvent removal filter.

  According to the present invention, the contact efficiency between the gas to be processed and the functional material supported on the wall surface of the corrugated sheet laminate is remarkably increased, and the laminate can be made compact or can have a large effective surface area.

  A corrugated sheet laminate filter (hereinafter also simply referred to as “filter”) according to an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a bird's eye view showing a part of the filter of this example, FIG. 2 is a diagram for explaining a gap between corrugated plates according to the filter of this example, and FIG. 3 shows a method of forming a gap between corrugated plates according to the filter of this example. FIG. 4 is a diagram for explaining another method for forming a gap between corrugated plates according to the filter of this example, and FIG. 5 is a perspective view of the filter of this example. Although FIG. 1 shows a structure that is continuous in the left-right direction and stacked in the up-down direction, a part of the description is omitted to clarify the structure. In addition, the lamination | stacking form of the corrugated sheets 11g-11i in FIG. 2 is a schematic diagram for demonstrating a clearance gap, and does not show the lamination | stacking form of an actual corrugated sheet.

  In this invention, it does not restrict | limit especially as a filter, A deodorizing filter, a dehumidification filter, a chemical filter, or an organic solvent removal filter is mentioned. Further, the functional material supported on the corrugated plate is not particularly limited, and can be appropriately selected according to a substance to be removed from the gas to be processed. Specifically, in the case of a deodorizing filter, activated carbon and zeolite are listed. In the case of a dehumidifying filter, silica gel and molecular sieve are listed. In the case of a chemical filter, activated carbon, zeolite, ion exchange resin and ion exchange fiber are listed. Can be mentioned. In the case of a chemical filter, it is also effective to use calcium hydroxide, calcium carbonate, potassium hydroxide, potassium carbonate, sodium hydroxide, sodium carbonate, etc., particularly when the purpose is acidic gas. In the case of an organic solvent removal filter, activated carbon and zeolite are exemplified. These functional materials can be used alone or in combination of two or more. The method of supporting these functional materials on the corrugated plate is not particularly limited, and is a method of adhering powder, granules, lumps, fibers, etc. with an adhesive, and a method of applying and adhering a suspension containing the functional material. Etc. Further, the carrying order is not particularly limited, and there are a method of carrying at the stage of paper before corrugating, and a method of dipping and carrying the corrugated board in a suspension containing a functional material after corrugating. Can be mentioned. Note that the corrugated sheet carrying the functional material includes a corrugated sheet in which the adsorbent is hardened by a binder or the like. These functional materials remove contaminants in the gas to be treated by an ion exchange function, a charge adsorption function or a micropore adsorption function.

  The filter 10 is a corrugated sheet laminate in which corrugated sheets carrying functional materials are stacked while maintaining a gap serving as a flow path for the gas to be processed. That is, a large number of corrugated plates 11a to 11d having the same corrugated pitch and peak height are stacked so as to be close to each other in a direction perpendicular to the direction of gas flow. The wave shape is not particularly limited, and includes a mountain shape and a triangular shape.

As shown in FIG. 2, the maximum gap C _{max of the} gap formed in the direction connecting the apexes 121 of the crest 12 between the corrugated sheet 11h and the corrugated sheet 11i is determined from the peak height h of the crest 12 forming the corrugated sheet. It is the dimension obtained by subtracting the plate thickness d. That is, the laminated body formed with the maximum gap _Cmax is in a state where there is no gap in a side view (a state where the scenery on the opposite side cannot be seen). When the maximum gap C _max exceeds (h−d), the functional material carried on the gas to be processed and the wall surface of the laminated body, similarly to the corrugated laminated body laminated with the corrugated sheet and the flat plate as the conventional core material Is not fully contacted. The minimum value of the gap formed between the corrugated plates is not particularly limited, but is preferably the same size as the corrugated plate thickness d. When the minimum value of the gap is less than the corrugated sheet thickness d, the pressure loss becomes too large to be practically used. In addition, since the peak part of a corrugated sheet is the same shape as a trough part, the clearance gap may take the clearance gap formed in the direction between the lowest points of the trough part 13. FIG.

A preferable range of the gap formed in the direction between the peaks of the crests between the corrugated plates is 0.3 mm to (h−d) mm, and 0.5 mm to h / 2 mm is particularly preferable. Specifically, 0.3 to 1.5 mm is preferable. Incidentally, the wave plates gap as described above, which refers to the gap C ₁ formed in the vertex direction of the crest, for example, in FIG. 2, the corrugated plate 11g, as indicated by C _2, crests of 11h It does not mean the size of the gap formed between the hem sides. However, in the present invention, at any location between the corrugated sheets, the gap size is (corrugated sheet thickness d) to (h−d), suppressing the pressure loss from becoming too large and being processed. This is preferable in that the contact efficiency between the gas and the functional material supported on the wall surface of the laminate increases. In the present invention, the gap formed between the corrugated sheets is determined by setting the gap formed in the direction connecting the apexes of the crests of the corrugated sheet as the specific range. Therefore, the gap size may or may not be the same in all locations in the direction in which the corrugation between the corrugated plates extends (perpendicular to the ridgeline), but it may be substantially the same in all locations. It is preferable in that a single flow of the gas to be treated can be prevented.

  The peak height h of the corrugated sheet filter is usually 0.7 to 2.0 mm, preferably 1.0 to 1.8 mm. The pitch p is usually 1.5 to 3.5 mm, preferably 1.9 to 3.3 mm. Moreover, the thickness d of the corrugated sheet is 0.1 to 0.4 mm. Further, the number of corrugated plates constituting the filter of the present invention is not particularly limited because it is appropriately determined depending on the flow rate of the gas to be treated, the place of use, the purpose of use, etc., but usually 60 to 250 per 100 mm. It is preferable that the filter is housed in the frame body from the viewpoint of ease of manufacture and strength.

  Further, as shown in FIG. 3, the filter 10a has a gap formed by interposing a spacer 14 that forms the gap between the corrugated plates 11a and 11b, between the corrugated plates 11b and 11c, and between the corrugated plates 11c and 11d. In addition, it is preferable in that the laminate can be fixed. That is, the spacer 14 of this example is a round bar member extending in the depth direction, and is disposed between the crests of the corrugated sheet. Moreover, the spacer 14 is not limited to the thing of this example, A square bar member, an irregular-shaped cross-section member, a member discontinuous in the depth direction, etc. are mentioned. The spacer is not limited to a rigid member, and may be a solidified adhesive, for example. Moreover, as an arrangement | positioning location, it does not restrict | limit in particular, For example, it may be between valley parts and between skirt parts other than between the above-mentioned adjacent mountain parts. Installation of the spacer 14 between the corrugated plates may or may not use an adhesive. As shown in FIG. 5, the filter 10 c of the present invention is housed in a frame body 21 formed of a side plate except for the opening surface where the ventilation cavity 16 opens, among the six side surfaces of the corrugated plate laminate. The spacers 14 disposed between them are stably fixed without using an adhesive.

  Further, as shown in FIG. 4, in the filter 10 b, the crests of the corrugated sheet laminate may be fixed by skewering with the gap held by the skewer-shaped fixing jig 15. It is preferable that the skewer-shaped fixing jig 15 is used at several positions at an appropriate pitch with respect to the depth direction in terms of stable fixing. The skewer-shaped fixing jig 15 is not particularly limited, and examples thereof include a needle-like member. Further, the use place of the skewer-shaped fixing jig 15 is not particularly limited, and may be a valley portion in addition to the mountain portion. Moreover, you may use for a part of peak part or a part of trough part in several pitches of a waveform.

  As shown in FIGS. 1 to 4, the filter 10 c is laminated close to the corrugated sheet carrying the functional material so as to form a narrow gap serving as a flow path for the gas to be processed. A wave-like gap extending in the direction in which the portions are continuous is formed as the ventilation cavity 16. For this reason, when the gas to be processed is introduced from the opening surface 18, the gas to be processed can pass through the narrow ventilation cavity 16.

  According to the filter 10c of this example, although the pressure loss occurs, the contact efficiency between the gas to be processed and the functional material supported on the wall surface of the corrugated sheet laminate is remarkably increased. Therefore, the filter 10c is included in the gas to be processed. The removal efficiency of pollutants is improved. Further, when the removal efficiency is made equal as compared with the straight flow type, the height dimension can be reduced by 5 to 40%, and the size reduction can be achieved. Further, the filter 10c of the present example minimizes the pressure loss in the treatment of the gas to be treated with a low air volume such as 0.3 to 1.5 m / s, preferably 0.3 to 0.8 m / s. It is preferable at the point which can achieve high removal efficiency, suppressing.

  EXAMPLES Next, the present invention will be described more specifically with reference to examples. However, this is merely an example and does not limit the present invention.

(Creation of corrugated sheet chemical filter)
A strongly acidic cation exchange resin powder (Diaion made by Mitsubishi Chemical Corporation) having an average particle size of 20 μm and an ion exchange capacity of 5.0 m equivalent / g and silica sol (adhesive) have a solid weight ratio of 8: 2 was mixed to prepare a mixed slurry having a solid concentration (slurry concentration) of 30% by weight.

  Silica-alumina fibers (average fiber diameter 5 μm, average fiber length 20 mm) and rayon fibers are wet-papered at a ratio of 70:30 to form a flat fibrous paper having a fiber-to-fiber porosity of 90% and a thickness t of 0.2 mm. The mixed slurry was impregnated and dried to obtain a flat liner material carrying a functional material.

  Next, a part of the flat liner material carrying the functional material was passed between a pair of upper and lower corrugated corrugators to produce a corrugated sheet. The corrugated plate is cut to have a length of 100 mm × width of 40 mm, and then a stainless steel round bar member having a diameter of 0.7 mm and a length of 100 mm is disposed between the crests of the corrugated plate and laminated to form aluminum. A corrugated sheet laminate chemical filter A was prepared by fitting into a manufactured frame material. The size of each part on the opening surface of the chemical filter is such that the gap in the direction connecting the apexes of the crests of the corrugated sheet is 0.7 mm, the pitch p is 3.0 mm, the crest height h is 1.6 mm, and 120 corrugated sheets are used. Met.

The corrugated plate laminate chemical filter had an ion exchange capacity per unit volume of 900 equivalents / m ³ , and the content of the ion exchange resin powder per unit volume of the chemical filter was 180 kg / m ³ . The ion exchange capacity per unit volume is calculated by multiplying the weight of the ion exchange resin powder contained in the filter by the ion exchange capacity of the ion exchange resin powder.

(Performance measurement)
Using the chemical filter, the ammonia removal rate was measured under the following conditions. Although ammonia concentration in question the actual cleanroom is several tens [mu] g / m ^3, and the ammonia concentration in 240 [mu] g / m ³ in order to accelerate the test. When the pressure loss of the chemical filter was measured under these conditions, it was 25 Pa. The results are shown in Table 1. In Table 1, the honeycomb thickness is a dimensional ratio when performance equivalent to that of Comparative Example 1 is exhibited.

<Test conditions>
・ Aeration gas composition: Air containing ammonia 240 μg / m ³・ Aeration gas temperature and humidity: 23 ° C., 50% RH
-Gas to be removed: Ammonia-Ventilation air speed: 0.5 m / s
・ Thickness of chemical filter: 40mm
・ Test time: 740 hours

Comparative Example 1
(Preparation of corrugated laminated chemical filter)
A corrugated laminate B was obtained by laminating and laminating the flat liner material carrying the functional material obtained in Example 1 and the corrugated sheet carrying the functional material in the same manner. Was performed in the same manner as in Example 1. The superposition of the two was repeated with the corrugated plate flowing in the same direction to obtain a straight flow type laminate. Similarly, when the pressure loss of the chemical filter was measured, it was 11 Pa. The results are shown in Table 1.

  From the results of Table 1, the chemical filter of Example 1 has an effective surface area of 1.8 times (compared to Comparative Example 1) and the same effective surface area if the filter height is the same as that of Comparative Example 1. If so, the height of the filter can be 0.6 times (vs. comparative example 1). In addition, if the effective surface area is the same, the gas to be treated and the functional material effectively contact each other in the corrugated sheet laminate, so the odor gas removal performance ratio (99.8% removal efficiency) is 1.5 times (compared to comparison). Example 1).

  The filter of the present invention is suitable for removing a trace amount of chemical contaminants floating in, for example, a clean room, a clean booth, a clean bench, etc. in a semiconductor manufacturing / liquid crystal manufacturing process. In particular, when the gas to be processed is flowed, it is effective when a significant removal efficiency is desired or a reduction in size is desired, even if the pressure loss is somewhat sacrificed.

It is a bird's-eye view of the corrugated sheet laminated body of this example. It is a figure explaining the clearance gap between the corrugated sheets which concerns on the filter of this example. It is a figure explaining the clearance gap formation method between the corrugated sheets which concerns on the filter of this example. It is a figure explaining the other clearance gap formation method between the corrugated sheets which concerns on the filter of this example. It is a perspective view of the filter of this example.

Explanation of symbols

10, 10a, 10b Corrugated sheet laminate 10c Filter 11a to 11i Corrugated sheet 12 Peak 13 Valley 12 Spacer 15 Skewer-shaped fixture 16 Opening surface C _max maximum gap d Thickness h Mountain height p Pitch

Claims (6)

  The corrugated sheet carrying the functional material is a corrugated sheet laminate in which a gap serving as a flow path for the gas to be processed is laminated, and the gap in the direction connecting the apexes of the peaks forms the corrugated sheet The corrugated sheet laminate filter is smaller than the height obtained by subtracting the corrugated sheet thickness (d) from the peak height (h) of the ridge.   2. The corrugated sheet laminate filter according to claim 1, wherein the gap is 0.3 to 1.5 mm.   The corrugated sheet laminate filter according to claim 1 or 2, wherein a spacer for forming the gap is interposed between the corrugated sheets.   The corrugated sheet laminate filter according to claim 1 or 2, wherein the corrugated sheet laminate is fixed by skewering with a skewer-shaped fixing jig.   The corrugated sheet laminate filter according to any one of claims 1 to 4, wherein the corrugated sheet laminate is a laminate of 60 to 250 corrugated plates per 100 mm. The corrugated sheet laminate filter according to any one of claims 1 to 5, wherein the corrugated sheet laminate filter is a deodorizing filter, a dehumidifying filter, a chemical filter, or an organic solvent removing filter.

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