JP2005331003A - Guide device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact guide device capable of securing rigidity of a structure. <P>SOLUTION: When necessity of separating fixed blocks 103 for maintenance, for example, a headed bolt 104 is loosened for removal, and a spacer 105 is removed, and the fixed block 102 is fastened again by the headed bolt 104. Continuously, other headed bolt 104 is loosened for removal. Furthermore, after the spacer 105 is removed, the fixed block 102 is fastened by the loosened headed bolt 104. When all the spacers 105 are thereby removed, a head 104a of the headed bolt 104 can pass through a stepped hole 103a, and in the condition wherein the fixed blocks 101 and 102 are fixed by the headed bolt 104, the fixed block 103 is drawn upward for independent separation. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a guide device suitable for use in, for example, a semiconductor manufacturing apparatus.

In a semiconductor manufacturing apparatus or the like, processing is performed in a predetermined atmosphere while moving a work held on a stage. However, since it is necessary to move the workpiece at the time of processing with high accuracy, a guide device has been developed that uses a gas such as air to hold the stage movably in a non-contact state (Patent Document 1). reference).
JP 2003-17546 A

  By the way, in the guide device described in Patent Document 1, for example, three blocks are provided to support the lower surface, the side surface, and the upper surface of the movable portion. The blocks are connected to each other with bolts or the like. However, it is necessary to disassemble each block during maintenance of the semiconductor manufacturing apparatus. Here, there is a problem at the time of each block decomposition. This problem will be described.

  7 and 8 are schematic cross-sectional views of a guide device in the prior art. In FIG. 7, a fixed block B1 is fixedly placed on a surface plate G, and a movable member M is movably disposed thereon. Both side surfaces of the movable member M are supported by a pair of fixed blocks B2, and the upper surface of the movable member M is covered by a fixed block 3 bridged by the pair of fixed blocks B2. From above, the bolt S is inserted through the through hole of the fixed block B3 and the through holes of the fixed blocks B2 and B2, and is screwed into the screw holes of the fixed block B1, whereby the fixed blocks B1 to B3 are mutually connected. It is supposed to be combined. Incidentally, static pressure bearings are provided on the surfaces of the fixed blocks B1 to B3 facing each surface of the movable member M, and therefore the distance between both surfaces is strictly adjusted within a prescribed range (for example, several μm). Need to be done.

  Here, it is assumed that it is necessary to remove the fixing block B3 for maintenance. In such a case, since the fastening between the fixed blocks B1 and B2 is lost by removing the bolt S, the positional relationship is lost, so the alignment adjustment must be performed again at the time of reassembly. The same work as the first assembly is required.

  In order to avoid such a problem, a fixing method shown in FIG. 8 is also conceivable. In this fixing method, the bolt S1 for fastening the fixing blocks B1 and B2 and the bolt S2 for fastening the fixing blocks B2 and B3 are separated. However, according to such a fixing method, it is necessary to provide a large number of through holes and screw holes through which the bolts S1 and S2 are inserted, and it takes time to manufacture and increases the thickness in order to prevent the rigidity of the fixing block from being lowered. Countermeasures are necessary. In particular, the rigidity of the fixed block B3 that covers the upper surface of the movable member M is important, and for example, it is required to suppress deformation to 2 μm or less. Therefore, it is necessary to increase the number of bolts S2 as much as possible. However, since the bolts S2 cannot be provided above the bolts S1, the fixing blocks B2 and B3 are increased in size to secure a sufficient number of screw holes. Need arises. Such an increase in the size of the fixed block leads to an increase in the size of the guide device.

  The present invention has been made in view of the problems of the prior art, and an object of the present invention is to provide a guide device that can be made compact while ensuring the rigidity of the structure.

The guide device of the present invention comprises:
A movable member;
First to third fixed portions having bearing surfaces for supporting the movable member;
A plurality of headed bolts inserted into through holes or notches formed in the first fixing portion and the second fixing portion and screwed to the third fixing portion;
An opening into which the headed bolt is inserted; and a spacer interposed between a through hole or a notch seating surface formed in the first fixing portion and a head of the headed bolt. And
The head of at least one of the headed bolts can pass through the through hole or notch formed in the first fixing part, but the through hole or notch formed in the second fixing part, And the opening of the spacer has a dimension that cannot pass through,
The spacer has a dimension that cannot pass through a through hole or a notch formed in the first fixing portion or the second fixing portion.

  Since the guide device of the present invention has the above-described configuration, the following operational effects can be exhibited. First, the head of at least one of the headed bolts is dimensioned so as not to pass through the opening of the spacer, and the spacer is a through hole formed in the first fixing part or the second fixing part. Since it has a dimension that cannot pass through the hole or notch, the headed bolt through the opening of the spacer is inserted into the through hole or notch formed in the first fixing part and the second fixing part. By inserting, the 1st fixed part and the 2nd fixed part can be fixed to the 3rd fixed part.

  On the other hand, when it becomes necessary to separate the first fixing portion and the second fixing portion, for example, during maintenance, the at least one head bolt is first loosened from the third fixing portion. Then, after removing the spacer, it is screwed into the third fixing portion again. At this time, since the head of the headed bolt can pass through the through hole or notch of the first fixing part, the headed bolt fastens the second fixing part and the third fixing part. The first fixed portion is separated. When all the other head bolts are removed in this state, the first fixing portion can be removed while maintaining the fastening state between the second fixing portion and the third fixing portion. “To be screwed and attached to the third fixing portion” means that a screw hole is provided in the third fixing portion and screwed there, and is engaged with a hole formed in the third fixing portion. And screwing into a member having a female thread portion.

  The bearing surface of the third fixed portion supports the lower surface of the movable member, the bearing surface of the second fixed portion supports the side surface of the movable member, and the bearing surface of the first fixed portion is The upper surface of the movable member is preferably supported.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a front cross-sectional view of the guide device 100 according to the first embodiment, and FIG. 2 is an exploded view of the guide device 100 of FIG.

  In FIG. 1, a fixed block 101 as a third fixed portion is fixedly placed on a surface plate G, and a movable member 110 is movably disposed thereon. Both side surfaces of the movable member 110 are supported by a pair of fixed blocks 102 that are second fixed portions, and the upper surface of the movable member 110 is a fixed block 103 that is a first fixed portion bridged by the pair of fixed blocks 102. Covered by.

  A screw hole 101a and a static pressure pad 101b facing the lower surface of the movable member 110 are formed on the upper surface of the fixed block 101, and the through hole 102a and the side surface of the movable member 110 are opposed to the fixed block 102. The stationary block 103 is formed with a stepped hole 103a that is a through hole and a static pressure pad 103b that faces the upper surface of the movable member 110. Air is supplied to each of the static pressure pads 101b to 103b by a gas supply means (not shown). The movable member 110 is supported in a non-contact manner with respect to the fixed blocks 101 to 103 by air ejected from the static pressure pads 101b to 103b whose surfaces are the bearing surfaces.

  From above, the shaft portion 104b of the headed bolt 104 (for example, a hexagon socket head bolt) is inserted through the stepped hole 103a of the fixed block 103 and the through hole 102a of the fixed block 102, and the screw hole 101a of the fixed block 101 is inserted. Are screwed together. The headed bolt 104 has a shaft portion 104b and a head portion 104a having a diameter larger than that of the shaft portion 104b. The depth of the screw hole 101 a is set such that the sum of the length of the screw portion and the height of the fixing block 102 is at least longer than the length of the shaft portion 104 b of the headed bolt 104.

  The disc-shaped spacer 105 is inserted between the seating surface of the stepped hole 103a of the fixed block 103 and the head 104a of the headed bolt 104 with the opening 105a inserted through the shaft 104b of the headed bolt 104. Is located. The size of the outer diameter and the axial thickness of the spacer 105 are preferably increased to ensure rigidity.

As shown in FIG. 2, the outer diameter (maximum dimension in the case of a polygon) of the head 104a of the headed bolt 104 is A, the minimum diameter of the stepped hole 103a is B, and the outer diameter of the spacer 105 is C. When the opening diameter of the spacer 105 is D,
C>B>A> D (1)
The relationship is established. Furthermore, the diameter of the through hole 102a of the fixed block 102 is set to be larger than the outer diameter of the shaft portion 104b of the headed bolt 104 and smaller than the outer diameter A of the head portion 104a.

  In the present embodiment, the headed bolt 104 having the shaft portion 104 b passed through the opening of the spacer 105 is inserted into the stepped hole 103 a of the fixed block 103, and the fixed block 101 is inserted through the through hole 102 a of the fixed block 102. The screw hole 101a is screwed. At this time, since the formula (1) is established, the spacer 105 is caught by the seating surface of the stepped hole 103a, and the fixing force of the headed bolt 104 can be transmitted to the fixing block 101 via the fixing block 102. As a result, the fixing blocks 101 to 103 can be fastened and fixed at a time, so that the number of bolts can be reduced. In addition, although illustration is abbreviate | omitted, the fixed blocks 101-103 are fastened by the spacer 105 and the headed bolt 104 similarly to having shown in FIG.

  On the other hand, when it becomes necessary to separate the fixing block 103, for example, during maintenance, the headed bolt 104 is first loosened and removed, the spacer 105 is removed, and the fixing block 102 passes through the stepped hole 103a again. It is screwed into the screw hole 101a of the fixed block 101 through the hole 102a (the screwing amount increases). At this time, since Formula (1) is established and B> A, the bolt head portion 104a passes through the small diameter portion of the stepped hole 103a, the bottom surface is in close contact with the upper surface of the fixed block 102, and is fixed with a predetermined fastening force. The block 102 and the fixed block 101 are fastened by the bolt 104. Subsequently, the other headed bolt 104 is loosened and removed. Further, after removing the spacer 105, the removed head bolt 104 is screwed into the screw hole 101 a of the fixed block 101 through the through hole 102 a of the fixed block 102. In this way, when all the spacers 105 are removed, as shown in FIG. 2, the fixing blocks 103 and 102 are fixed with the headed bolts 104, and the fixing blocks 103 are pulled upward to be independent. Separation is possible. The upper surface of the fixed block 102 is preferably provided with a shallow countersink in order to avoid a problem that impairs flatness such as burrs when the head bolt 104 is fastened.

  Next, an example of the reassembly procedure is shown. First, a number of head bolts 104 corresponding to each of the two fixing blocks 102 are removed. Next, the fixing block 103 is bridged on the fixing block 102, and the headed bolt 104 in which the spacer 105 is inserted into the shaft portion is removed from the stepped hole 103 a of the fixing block 103. The screw holes 101 a of the fixed block 101 are screwed together through the through holes 102 a of 102. As a result, the fixing blocks 103, 102, and 101 are fastened and fixed by the headed bolts 104 through the spacers 105 at these locations as they were originally. Finally, the headed bolt 104 at the remaining portion is removed, the spacer 105 is inserted into the shaft portion, and is screwed again into the screw hole 101a from the stepped hole 103a through the through hole 102a. As described above, according to the present embodiment, since it is not necessary to remove the fixing block 102, it is possible to save time and labor for exact positioning of the 102 at the time of reassembly.

  In the above embodiment, by providing the screw holes 101a deeply, the same headed bolt is used in the assembled state and in the case where only the fixed block 103 is separated and the fixed blocks 101 and 102 are brought into the fastening state. Although 104 is used, the depth of the screw hole 101a may be limited to the minimum necessary by changing the headed bolt used in the latter case to one having a short shaft portion. Moreover, in the said embodiment, it was made to satisfy | fill Formula (1) about the fastening location of all the head bolts 104, and it was made to fasten the fixing blocks 101-103 via the spacer 105, However, All locations are not necessarily required. This need not be done. Rather, from the standpoint of increasing the rigidity of the fixed block 103, it is preferable to minimize the position by such a fastening method if the position of the fixed block 102 can be prevented from being disassembled during disassembly and reassembly. .

  The following modification of the present embodiment shows such a more preferable example, and among the fastening points in each of the five rows on one side, three at the both ends and at the center (6 points in total) are the same as the conventional one. The remaining two places are the same as in the above embodiment.

  3 is a cross-sectional view similar to FIG. 1 showing a modification of the first embodiment, and FIG. 4 is a view of the configuration of FIG. 3 cut along the VI-VI line and viewed in the direction of the arrow. . In the guide device 100 ′ according to this modification, the configurations of the fixed blocks 101 and 102, the movable member 110, the headed bolt 104, and the spacer 105 are substantially the same as those in the above-described embodiment. However, the shape of the fixed block 103 ′ is different from the above-described embodiment.

  More specifically, the fixed block 103 ′ has a first stepped hole 103 a and a second stepped hole 103 c. The first stepped hole 103a, which is a through hole, has the same dimensions as the stepped hole 103a shown in FIGS. On the other hand, the second stepped hole 103c has a minimum diameter through which the head 104a of the headed bolt 104 cannot pass, and is the same as the conventional case of FIG. Accordingly, the spacer 105 is not interposed between the seating surface of the second stepped hole 103c and the head 104a of the corresponding headed bolt 104.

  When it is necessary to remove the fixing block 103 ′, first, the headed bolt 104 inserted through the first stepped hole 103a is loosened and removed, the spacer 105 is removed, and the length of the shaft portion is the bolt. The headed bolt 104 ′ is shorter than the shaft portion 104 b of 104, longer than the height of the fixed block 102, and shorter than the height of the fixed block 102 plus the length of the screw hole 101 a (except for the length of the shaft portion). All of the same 104) are screwed into the screw holes 101a of the fixed block 101 from the stepped holes 103a through the through holes 102a of the fixed block 102. At this time, since Equation (1) is established at these locations and B> A, the head 104a passes through the stepped hole 103a, and the fixed block 101 and the fixed block 102 are fastened. Only the stepped bolt 104 'is separated. Thereafter, all the headed bolts 104 inserted through the second stepped holes 103c are loosened and removed. At this time, it is possible to keep the fixed blocks 101 and 102 in a fixed state by the remaining headed bolt 104 ′, and it is possible to separate only the fixed block 103 ′. When reassembling, the fixing block 103 'may be returned to the original order in the reverse order. In addition, although the head bolt 104 'whose shaft portion is longer than the shaft portion of the head bolt 104 is used as the head bolt 104' when separating the fixed block 103 'at the position of the stepped hole 103a, If the length is sufficient, the bolt 104 ′ is unnecessary, and all the headed bolts 104 may be used. This modification is preferable for increasing the rigidity of the guide device, and the fixing block 103 'can be separated and reassembled more quickly.

  FIG. 5 is a front sectional view of a positioning device 210 including a guide device 200 according to the second embodiment, and an upper portion of a sealed housing is omitted. FIG. 6 is an exploded sectional view showing the upper part of the positioning device.

  As shown in FIG. 5, the positioning device 210 according to the present embodiment is disposed to face the first housing 220 including the process chamber P and having the opening 220a, and the opening 220a of the first housing 220. The movable member 230, the upper block 203 which is a first fixed portion sandwiched between the first casing 220 and the movable member 230, and the first casing 220 (or the upper portion) sandwiching the movable member 230. A second fixing portion disposed on both sides in the left-right direction in the drawing of the second casing 201 and the movable member 230, which is a third fixing portion disposed on the opposite side of the block 203) and fixed to the surface plate G. A certain intermediate block 202, 202 is provided. The process chamber P is sucked by a pump (not shown) and has a negative pressure. Note that the first housing 220 is supported by the surface plate G via the leg portions 221.

  In FIG. 5, the upper surfaces on both sides of the movable member 230 are supported by the hydrostatic bearings 281 through a predetermined gap with respect to the upper block 203, and the lower surfaces on both sides of the movable member 230 are attached to the second casing 201. On the other hand, it is supported by a hydrostatic bearing 282 through a predetermined gap, and both side surfaces of the movable member 230 are supported by a hydrostatic bearing 285 provided in the intermediate block 202 through a predetermined gap. Therefore, the movable member 230 is movable in the direction perpendicular to the paper surface in FIG. In the present embodiment, the hydrostatic bearings 281, 282, and 285 are each made of substantially cylindrical porous graphite, each of which is arranged in an appropriate number, and the bearing surface facing the movable member 230 is It is fixed so as to be flush with the upper block 203, the casing 201, or the intermediate block 202, and air is supplied through an air supply path (not shown). A space between an upper surface of the movable member 230 adjacent to and inside the hydrostatic bearing 281 and the upper block 203 is sealed with a first differential exhaust seal 250, and is movable adjacent to and inside the hydrostatic bearing 282. A space between the lower surface of the member 230 and the second housing 201 is sealed with a second differential exhaust seal 260. The static pressure bearings 281, 282, and 285 can support the opposing surfaces in a non-contact manner by air pumped from a positive pressure pump (not shown). On the other hand, the differential exhaust seals 250 and 260 have a negative pressure by being sucked by a negative pressure pump (not shown).

  The casing 220 supported on the surface plate G via the leg portion 221 has a long hole-like opening 220a formed in the lower wall 220c. Between the plate member 222 having a long hole-like opening 222a attached to the upper portion of the opening 220a and the plate member 203d having a long hole-like opening 203x attached to the upper surface of the upper block 203 by a bolt, The bellows 223 whose opening is a substantially elongated hole shape is connected. The plate members 222 and 203d are airtightly fixed to the housing 220 and the upper block 203 via O-rings, respectively, and are also airtightly connected to the bellows 223 by welding, for example.

  An oblong opening 203f is formed in the center of the upper block 203. The shaft 231a of the table 231 extends vertically so as to penetrate the opening 203f and the opening 220a of the first housing 220. The shaft 231a is fitted to the upper surface of the movable member 230 so as to move integrally.

  The movable member 230 is connected to a drive unit (not shown). As the drive unit, for example, a combination of a motor and a feed screw such as a ball screw, a combination of a motor and a belt and a pulley, or a linear motor can be used. In addition, by providing an ultrasonic motor (not shown) that can drive the movable member 230 with respect to the second casing 201, a drive unit can be configured.

  The differential exhaust seal 260 has two grooves, a communication hole, and an exhaust hole. The groove extends in a track shape along the periphery of the oval decompression chamber R formed on the upper surface of the second casing 201. Among them, the shallow outer groove extends to both sides in the tangential direction and is open to the atmosphere on both end faces of the second casing 201. The remaining groove is connected to a negative pressure pump (not shown) through the communication hole and the exhaust hole.

  The differential exhaust seal 250 has four grooves, a communication hole, and an exhaust hole. The groove extends in a track shape along the periphery of the long hole 203 f of the upper block 203. Of these, the outermost shallow groove extends to both sides of the tangential direction and is open to the atmosphere at both end faces of the second casing 201. The remaining groove is connected to a negative pressure pump (not shown) through the communication hole and the exhaust hole.

  The second casing 201 is formed with a stepped hole 201a, the intermediate block 202 is formed with a through hole 202a, and the upper block 203 is formed with a first stepped hole that is a through hole. 203a and the second stepped hole 203c are formed in the same arrangement (see FIG. 4) as in the modification of the first embodiment. The first stepped hole 203a is also shown in FIGS. On the other hand, the second stepped hole 203c is the same as the conventional one, and the inner diameter of the small diameter portion is smaller than the outer diameter of the head of the headed bolt 204 as shown in FIG.

  At a location including the first stepped hole 203a, the headed bolt 204 inserted through the spacer 205 is inserted from above through the stepped hole 203a of the upper block 203 and the through hole 202a of the intermediate block 202, The second housing 201 is screwed into the screw hole 201a. The headed bolt 204 has a shaft portion 204b and a head portion 204a having a larger diameter than the shaft portion 204b.

  The disc-shaped spacer 205 is inserted between the seat surface of the stepped hole 103a of the upper block 203 and the head portion 204a of the headed bolt 204 with the opening thereof being inserted into the shaft portion 204b of the headed bolt 204. positioned. On the other hand, in a place including the second stepped hole 203c, the headed bolt 204 is inserted through the stepped hole 203c and the through hole 202a of the intermediate block 202 without the spacer 205, and then screwed into the screw hole 201a. ing.

  Also in the present embodiment, the outer diameter of the head 204a of the headed bolt 204, the minimum diameter of the first stepped hole 203a, the outer diameter of the spacer 205, and the opening diameter of the spacer 205 are the above (1). Formula is satisfied. Furthermore, the diameter of the through hole 202a is set to be larger than the outer diameter of the shaft portion 204b of the headed bolt 204 and smaller than the outer diameter of the head portion 204a.

  Next, the operation of the positioning device 210 according to the present embodiment will be described. The driving force of a driving source (not shown) is transmitted to the movable member 230, whereby the shaft 231a also moves together, so that a work (not shown) placed on the table 231 attached to the upper end of the shaft 231a is Within the first housing 220, it can be positioned at any position within a movable range determined by the opening of the plate material 222, the opening of the bellows 223, the opening of the plate material 203 d, and the opening 203 f of the upper block 203.

  Here, when the inside of the first housing 220 is in a vacuum, the pressure difference between the inside and outside of the first housing 220 is increased, and the first housing 220 is slightly deformed accordingly. More specifically, since the vicinity of the opening 220a has the lowest rigidity, the opening 220a is deformed so as to be pushed upward in FIG. In the present embodiment, even if the central portion of the lower wall 220c of the first casing 220 moves upward due to deformation, the upper block 203, the intermediate block 202, and the second casing are expanded by the expansion and contraction of the bellows 223. The guide part of the movable member 230 composed of 201 is hardly affected by the deformation. Further, due to the expansion and contraction of the bellows 223, the hermeticity between the first housing 220 and the upper block 203 is maintained.

  Further, in the present embodiment, the inside of the decompression chamber R of the second casing 201 is decompressed to a pressure sufficiently lower than the atmospheric pressure by being exhausted by a pump (not shown). The difference in atmospheric pressure between the upper and lower surfaces is sufficiently small, and deformation at the center of the movable member 230 can be suppressed.

  In the present embodiment, the headed bolt 204 through which the shaft portion 204b is passed through the opening of the spacer 205 is inserted into the first stepped hole 203a of the upper block 203, and through the through hole 202a of the intermediate block 202, The second casing 201 is screwed into the screw hole 201a. At this time, since the formula (1) is established, the spacer 205 is caught by the seating surface of the stepped hole 203a, and the fixing force of the headed bolt 204 is transferred to the second casing 201 via the intermediate block 202. Thus, the second casing 201, the intermediate block 202, and the upper block 203 can be fastened and fixed at a time. At a location corresponding to the second stepped hole 203c, the headed bolt 204 is inserted through the second stepped hole 203c of the upper block 203 without the spacer 205, and through the through hole 202a of the intermediate block 202, By screwing into the screw hole 201a of the second housing 201, the second housing 201, the intermediate block 202, and the upper block 203 are fastened and fixed at a time.

  On the other hand, when it becomes necessary to separate the upper block 203, for example, during maintenance, the table 231 is first removed as shown in FIG. 6, and then the bellows 223 is removed by removing the plates 222 and 203d. After the housing 220 and the upper block 203 are separated from each other, the headed bolt 204 at the position of the stepped hole 203a is loosened and removed, and the spacer 205 is removed. A headed bolt 204 ′ shorter than the length of 204 b and longer than the height of the intermediate block 202 and shorter than the height of the intermediate block 202 plus the length of the screw hole 201 a is transferred from the stepped hole 203 a to the intermediate block 202. The screw hole 201a of the second housing 201 is screwed through the through hole 202a. At this time, since the expression (1) is established at these locations, the head 204a passes through the stepped hole 203a, and the second casing 201 and the intermediate block 202 are fastened, and only the upper block 203 is stepped. It will be in the state separated from the attached bolt 204 ′. Thereafter, all the headed bolts 204 inserted through the second stepped holes 203c are loosened and removed. At this time, as shown in FIG. 6B, the upper block 203 can be independently separated while the second casing 201 and the intermediate block 202 are fixed with the remaining headed bolts 204 ′. It becomes possible. In particular, in the present embodiment, since no contact-type seal is used, minute foreign matters are easily dropped from the slit hole opened to the process chamber P, which is significant in that such foreign matters can be quickly removed. There are benefits.

  The present invention has been described above with reference to the embodiments. However, the present invention should not be construed as being limited to the above-described embodiments, and can be modified or improved as appropriate. In the first fixing portion, the stepped hole may be a through hole having the same inner diameter, and the through holes of the first and second fixing portions may be notched. Moreover, although the example which provides a screw hole directly in a 3rd fixing | fixed part was shown, it does not restrict to this, For example, a through-hole is provided in a 3rd fixing | fixed part, a screw hole is provided in the member engaged with this, You may make it screw a bolt with a head to a member.

It is front sectional drawing of the guide apparatus 100 concerning 1st Embodiment. It is a figure shown in the state which decomposed | disassembled the guide apparatus 100 of FIG. It is sectional drawing similar to FIG. 1 which shows the modification of 1st Embodiment. It is the figure which cut | disconnected the structure of FIG. 3 by the VI-VI line and looked at the arrow direction. It is front sectional drawing of the positioning device 210 containing the guide apparatus 200 concerning 2nd Embodiment. It is sectional drawing which decomposes | disassembles and shows the upper part of the positioning apparatus 210. FIG. It is a schematic sectional drawing of the guide apparatus in a prior art. It is a schematic sectional drawing of the guide apparatus in a prior art.

Explanation of symbols

100, 100 ', 200 Guide device 101-103 Fixed block 110, 230 Movable member 104, 204 Head bolt 105, 205 Spacer

Claims (2)

A movable member;
First to third fixed portions having bearing surfaces for supporting the movable member;
A plurality of headed bolts inserted into through holes or notches formed in the first fixing portion and the second fixing portion and screwed to the third fixing portion;
An opening into which the headed bolt is inserted, and a spacer interposed between a through hole or a notch seating surface formed in the first fixing portion and the head of the headed bolt. And
The head of at least one of the headed bolts can pass through the through hole or notch formed in the first fixing part, but the through hole or notch formed in the second fixing part, and The opening of the spacer has a dimension that cannot pass,
The guide device according to claim 1, wherein the spacer has a dimension incapable of passing through a through hole or a notch formed in the first fixing portion or the second fixing portion. The bearing surface of the third fixed portion supports the lower surface of the movable member, the bearing surface of the second fixed portion supports the side surface of the movable member, and the bearing surface of the first fixed portion is The guide device according to claim 1, wherein an upper surface of the movable member is supported.

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