JP2005315649A - Detection device and stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a detection device and a stage device capable of detecting the state of the five degrees of freedom of the stage by using a standard lattice having an easily manufacturable shape, and improving detection accuracy, concerning the detection device and the stage device for detecting the state of the stage moved highly accurately. <P>SOLUTION: The state to the standard lattice 40 is detected based on a change of a plurality of reflected lights 337 by a detection means 14 equipped with a light source part 330 for irradiating light 331 toward the standard lattice 40, a spectroscopic means 332 for spectrally diffracting the light 331 into a plurality of reflected lights 333 by a plurality of apertures, and a detector 339 for receiving the plurality of reflected lights 337 in whole. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a detection apparatus and a stage apparatus, and more particularly to a detection apparatus and a stage apparatus that detect the state of a stage that is movable with high accuracy.

  In response to the high integration and low price of semiconductor devices that are the foundation of IT technology, there is an increasing demand for high productivity, high accuracy, high speed, and the like for semiconductor exposure apparatuses that manufacture semiconductor devices. An XY stage, which is a key component of a semiconductor exposure apparatus, requires a high-speed multi-degree-of-freedom stage apparatus having an accuracy of around 10 nm and a moving range of several hundred mm. Therefore, it is necessary to precisely measure the multi-degree-of-freedom position and orientation of the stage and feed back the result to control the positioning of the stage.

  As a position measuring method of a conventional positioning device, an optical linear encoder, a laser length measuring device, an autocollimator, or the like has been generally used. These are basically based on a one-dimensional length or posture measurement, and the position or posture is measured by a combination of a plurality of axes.

  Laser interferometers used for high-accuracy measurement measure the position of the stage (positioning object) using laser light, so measurement is based on air fluctuations in the device where the stage is placed. There was a problem that the accuracy of the value of was lowered. In addition, since the optical component can be placed only outside the stage, there is a problem that the entire stage apparatus becomes large and complicated.

  Further, when the stage rotates about the Z axis, there is a problem that the reflected light from the stage is detached from the light receiving portion of the interferometer, and the position in the XY directions cannot be detected. As a detection apparatus that solves such a problem, there is an apparatus that irradiates a reference grating with laser light and detects reflected light reflected by the reference grating with a two-dimensional angle sensor in an XY direction (for example, a patent) Reference 1).

  FIG. 1 is a schematic diagram of a detection apparatus having a reference grating and a two-dimensional angle sensor. As shown in FIG. 1, the conventional detection apparatus 300 detects the position in the XY directions based on the output change of one two-dimensional angle sensor 290.

  Here, the two-dimensional angle sensor 290 detects the inclination of the surface of the reference grating, whereby the change in the normal direction of the surface of the reference grating can be seen, and the two-dimensional angle sensor 290 can detect the XY direction. A tilt or normal change in (two directions) can be detected. The reference grating 320 is a collection of peaks and valleys that change with a known function in two orthogonal directions (X direction and Y direction) on a plane. The shape of the reference grating 320 includes a sine wave. Is used.

  Next, the two-dimensional angle sensor 290 shown in FIG. 1 will be described with reference to FIG. FIG. 2 is a diagram showing a two-dimensional angle sensor. The two-dimensional angle sensor 290 is a geometric optical sensor based on an autocollimation method.

As shown in FIG. 2, one laser beam 310 emitted from the laser light source 301 passes through the polarization beam splitter 302 and the quarter wavelength plate 303 and enters the surface of the reference grating 320. The laser beam 312 reflected by the surface of the reference grating 320 is reflected by the polarization beam splitter 302, and the laser beam 312 enters the autocollimator 305. The autocollimator 305 includes an objective lens 306 and a detector 307 that detects a spot position.
JP-A-8-199115

  However, in the autocollimation method described above, a standard plate at the focal point of the objective lens 306 (generally a cross line) is imaged at infinity, and parallel rays reflected by a plane mirror at the tip of the objective lens 306 are reflected on the standard plate surface. In order to read the displacement at a minute angle of the plane mirror from the displacement in the plane of the imaged cross line, an expensive and complicated part such as the autocollimator 305 is required. There was a problem that the cost would be high.

  In addition, since high-resolution position detection is performed, the geometrical optical principle may not be established due to light interference and diffraction as the period between the reference grating 320 and the multi-spot becomes shorter. There was a problem that was difficult. It also detects five degrees of freedom: two-dimensional displacement (displacement in the X and Y directions) and three posture changes (rotational direction with respect to the X axis, rotational direction with respect to the Y axis, and rotational direction with respect to the Z axis). In order to do so, three two-dimensional angle sensors 300 are required, and there is a problem that adjustment between the sensors is difficult.

  The present invention has been made in view of the above points, and it is possible to easily detect the state of the five degrees of freedom of the stage by using a reference grid having a shape that is easy to manufacture, and to improve the detection accuracy. It is an object of the present invention to provide a detection device and a stage device that can be used.

  In order to solve the above-mentioned problems, the present invention is characterized by the following measures.

  The invention according to claim 1 includes a reference grating having a periodic shape change in a two-dimensional direction, a light source that emits light toward the reference grating, and a plurality of openings. A spectroscopic means for splitting the light emitted from the light source into a plurality of lights by the opening, and a detection means having a detector for collectively receiving the plurality of reflected lights reflected by the reference grating, The detection means can solve the problem by detecting a state with respect to the reference grating based on changes in the plurality of reflected lights received by the detector.

  According to the above invention, the reference grating is irradiated with a plurality of lights dispersed by the spectroscopic means, the plurality of reflected lights reflected from the reference grating are collectively received by the detector, and the detecting means receives the plurality of reflected lights. In order to detect the state based on the change, even if there is a defect in any of the reference gratings irradiated with a plurality of lights, the reflected light of the plurality of lights irradiated on other normal reference gratings Since the state can be detected based on the change, it is possible to detect the state with higher accuracy than in the case where the conventional one light is irradiated and the state is detected based on the reflected light. .

  According to a second aspect of the present invention, the detector is composed of a plurality of photodiodes, and is rotationally moved about the X axis as a rotation axis at the center of the surface of the detection means that receives the plurality of reflected lights. The detection apparatus according to claim 1, comprising at least four photodiodes for detecting a state and detecting a state by a rotational movement with the Y axis as a rotation axis.

  According to the above invention, by providing four photodiodes in the center of the surface of the detecting means for receiving a plurality of reflected lights, detection of the rotational movement state with the X axis as the rotation axis, and the Y axis as the rotation axis The state of rotational movement can be detected.

  According to a third aspect of the present invention, at least four photodiodes for detecting a state by rotational movement with the Z axis as a rotation axis are provided at four corners of the surface of the detection means. This can be solved by the detection device according to claim 1 or 2.

  According to the above invention, by providing two photodiodes at the four corners of the surface of the detection means, it is possible to detect the state of rotational movement with the Z axis as the rotation axis.

  According to a fourth aspect of the present invention, a charge coupled device (CCD) is used as the detector. The detection apparatus according to the first aspect can solve the problem.

  According to the above invention, by using a charge coupled device (CCD) as a detector, a plurality of reflected lights reflected by the reference grating are received in a lump, and based on a change in the plurality of reflected lights by the detecting means. Thus, the state with respect to the reference grid can be detected.

  5. The detection according to claim 1, wherein the reference grating is configured in a shape that is symmetric with respect to a central axis of the reference grating. It can be solved by the device.

  According to the above invention, the reference grating is configured in a shape that is symmetric with respect to the central axis of the reference grating, so that it is easier than the reference grating having a sinusoidal shape with respect to the conventional two-dimensional direction. Can be manufactured.

  According to a sixth aspect of the present invention, there is provided a base, a stage that moves on the base, a motor that drives the stage, a levitating device that levitates the stage relative to the base, and a state of the stage that is detected. It can solve by the stage apparatus provided with the detection apparatus as described in any one of claim | item 1 thru | or 5.

  According to the above invention, the state of the stage relative to the base can be detected with high accuracy by the detection apparatus according to any one of claims 1 to 4.

  The invention according to claim 7 can be solved by the stage device according to claim 6, wherein a planar motor is used as the motor and an air bearing is used as the levitation device.

  According to the above invention, even in a device in which a flat motor is applied to the motor and an air bearing is used as the levitation device, the state of the stage with respect to the base is accurately determined by the detection device according to any one of claims 1 to 5. It can be detected well.

  The present invention provides a detection device and a stage device that can easily detect the state of the five degrees of freedom of the stage and improve the detection accuracy by using a reference grid that is easy to manufacture. can do.

  Next, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
First, a case where the detection apparatus according to the first embodiment of the present invention is applied to a stage apparatus will be described as an example with reference to FIGS. The stage device 230 is a device having a SAWYER motor that is a planar motor as a driving device. FIG. 3 is a cross-sectional view of the stage apparatus including the detection apparatus according to the first embodiment of the present invention, and FIG. 4 is a plan view of a component corresponding to the region B shown in FIG.

  The stage device 230 generally includes a base 231, a stage 236, and a detection device 249. A plurality of convex portions 232 are formed on the surface of the base 231 at a predetermined pitch. This predetermined pitch is the minimum unit when the movable stage 237 is moved. The base 231 is manufactured from a metal such as iron. The stage 236 is generally composed of a movable stage part 237, a fixed stage part 239, a chuck 241, X-direction actuators 242A and 242B, Y-direction actuators 243A and 243B, and a tilt drive part 245.

  The movable stage portion 237 is a base portion that is driven by the X-direction actuators 242A and 242B and the Y-direction actuators 243A and 243B. As shown in FIG. 4, X-direction actuators 242A and 242B and Y-direction actuators 243A and 243B are disposed below the movable stage portion 237, and a space is formed at the center. Each of the X direction actuators 242A and 242B and the Y direction actuators 243A and 243B includes a plurality of coil portions 244 and an air bearing 238. By applying a current to the coil unit 244, a magnetic force is generated in the coil unit 244, and a propulsive force is generated to drive the movable stage unit 237.

  The air bearing 238 is for floating the X direction actuators 242A and 242B and the Y direction actuators 243A and 243B with respect to the base 231 by the force of air. By providing this air bearing 238, when the movable stage 237 is driven in the X, X direction, the Y, Y direction, or the rotation direction with the Z axis as the rotation axis, it can be freely operated in any direction. Can move.

  The tilt drive unit 245 is provided between the X direction actuators 242A and 242B and the Y direction actuators 243A and 243B and the movable stage unit 237, respectively. The tilt driving unit 245 is for performing horizontal positioning of the movable stage 237. The fixed stage unit 239 is integrally disposed on the movable stage unit 237. The fixed stage unit 239 is moved to a desired position by driving the movable stage unit 237 using the X direction actuators 242A and 242B and the Y direction actuators 243A and 243B. On the fixed stage portion 239, a chuck 241 for mounting the work 248 is disposed.

  Here, with reference to FIG. 5, the driving method of the movable stage part 237 is demonstrated. FIG. 5 is a plan view schematically showing the relationship between the driving direction of the movable stage and the driving force of the X-direction and Y-direction actuators. When the movable stage unit 237 is moved in the X and X directions, as shown in FIG. 5A, the propulsive force of the X direction actuators 242A and 242B with respect to the X and X directions to which the movable stage unit 237 is to be moved. Current is applied to the coil portion 244 provided in the X-direction actuators 242A and 242B.

  When the movable stage unit 237 is moved in the Y and Y directions, as shown in FIG. 5B, the propulsive force of the Y direction actuators 243A and 243B with respect to the Y and Y directions to which the movable stage unit 237 is to be moved. Current is applied to the coil portion 244 provided in the Y-direction actuators 243A and 243B. Further, when the movable stage portion 237 is rotated in the E direction or the D direction with the Z axis as the rotation axis, the X direction actuators 242A, 242B and the Y direction as shown in FIG. A current is applied to the coil portions 244 provided in the X-direction actuators 242A and 242B and the Y-direction actuators 243A and 243B so that the driving force of the actuators 243A and 243B is generated.

  When the fixed stage unit 239 moves to a desired position on the base 231, application of current to the coil unit 244 is stopped to fix the position of the fixed stage unit 239. Note that the movable stage 237 is moved with the pitch of the convex portions 232 provided on the surface of the base 231 as the minimum unit, as described above.

  The detection device 249 includes a detection means 14 provided at the bottom of the movable stage 237 and a scale unit 233 described later. This detection device 249 has a function of measuring the state of the movable stage 237. Here, the “state” means a state of rotational movement with the Z axis as the rotational axis, a state of movement in the X and X directions, a state of rotational movement with the X axis as the rotational axis, and the Y and Y directions. And at least these five degrees of freedom. The detection device 249 is generally composed of a scale unit 233 and detection means 14.

  First, the scale unit 233 of the detection device 249 will be described with reference to FIGS. 6 and 7. FIG. 6 is an enlarged view of a component corresponding to the region C shown in FIG. 3, and FIG. 7 is a diagram showing a scale portion and detection means. The scale unit 233 is disposed on the convex portion 232 provided on the base 231. The scale unit 233 includes a scale portion 13, an upper resin 252, and a lower resin 253. The scale portion 13 includes a base 41 and a reference lattice 40.

  The base 41 is provided with a plurality of reference gratings 40 having a predetermined pitch F in which the property related to the angle changes in a known function (in this embodiment, a set of peaks and valleys of a sine wave) in the two-dimensional direction in the XY direction. It has been. An upper resin 252 is provided on the upper surface of the scale portion 13, and a lower resin 253 is provided on the lower surface of the scale portion 13. The upper resin 252 and the lower resin 253 are for preventing the scale portion 13 from being damaged due to an external force. As the upper resin 252, a material having good light transmittance is used.

  Next, the detection means 14 which comprises the detection apparatus 249 is demonstrated with reference to FIG. 3 thru | or FIG. The detection means 14 is configured to be disposed in the space of the bottom surface portion of the movable stage portion 237 surrounded by the X direction actuators 242A and 242B and the Y direction actuators 243A and 243B.

  As described above, by providing the detection means 14 on the bottom surface of the movable stage 237 at a position close to the reference grating 40, it is less susceptible to disturbances such as air fluctuations as compared with the conventional laser interferometer. And an accurate position of the fixed stage 239 can be obtained.

  FIG. 8 is a diagram showing a schematic configuration of the detection means and a scale portion. In general, the detection unit 14 includes a light source unit 330, a spectroscopic plate 332, a deflection beam splitter 334, a quarter wavelength plate 336, a focusing lens 338, and a detector 339. The light source unit 330 is for irradiating light 331 having a width. The spectroscopic plate 332 is provided on the traveling direction side (downward in FIG. 8) of the light 331 emitted from the light source unit 330.

  FIG. 9 is a plan view of the spectroscopic plate. As shown in FIG. 9, in this embodiment, nine openings 341 </ b> A to 341 </ b> I are formed in a lattice shape in the spectroscopic plate 332. The spectroscopic plate 332 is for splitting the light 331 emitted from the light source unit 330 into nine lights 333 through the openings 341A to 341I.

  The openings 341 </ b> A to 341 </ b> I are formed so as to have the same pitch F as that of the reference grating 40 disposed at a predetermined pitch F on the surface of the base 41 or in the plane. Further, the nine lights 333 diffracted by the openings 341A to 341I of the spectroscopic plate 332 interfere with each other, and are arranged on the reference grating 40 at an equal interval to the arrangement pitch of the reference grating 40 or an interval that is an integral multiple of the arrangement pitch. A multi-spot is generated.

  The deflecting beam splitter 334 is provided between the spectroscopic plate 332 and the scale unit 13. The deflecting beam splitter 334 is for causing the reflected light 337 reflected by the surface of the reference grating 40 to go to the focusing lens 338. The focusing lens 338 is provided between the deflecting beam splitter 334 and the detector 339, and focuses the reflected light 337 with respect to the detector 339.

  Next, the detector 339 will be described with reference to FIG. FIG. 10 is a G view of the detection unit shown in FIG. Note that the circles indicated by alternate long and short dash lines in the figure indicate the reflected lights 337A to 337I that have reached the respective photodiodes. The detector 339 is configured to include photodiodes 350A to 350H and photodiodes 351 to 354 on the light receiving surface 339A.

  The photodiodes 350A to 350H and the photodiodes 351 to 354 are for collectively receiving the reflected light 337A to 337I. The detector 339 includes changes in the reflected light 337A to 337I received in a batch, specifically, the intensity of the reflected light 337A to 337I and the photodiodes 350A to 350H irradiated with the reflected light 337A to 337I, and the photodiodes 351 to 351. This is for detecting the state of the fixed stage 239 with respect to the reference grating 40 based on the position on the 354.

  The light receiving surface 339A is a surface on the side receiving the reflected lights 337A to 337I. The light receiving surface 339A has a substantially square shape, and four photodiodes 350E to 350H are disposed at the center thereof.

  Photodiodes 351 to 354 are formed in the vicinity of the four corners of the light receiving surface 339A. Specifically, a photodiode 351 is provided at the upper left corner of the light receiving surface 339A in FIG. 10, a photodiode 352 is provided at the lower left corner of the light receiving surface 339A, and a photodiode 353 is provided at the lower right corner of the light receiving surface 339A. Photodiodes 354 are disposed in the upper right corner of 339A.

  The photodiode 351 is configured by combining triangular photodiodes 351I and 351J, and the photodiode 352 is configured by combining triangular photodiodes 352L and 352K. The photodiode 353 is configured by combining triangular photodiodes 353M and 353N, and the photodiode 354 is configured by combining triangular photodiodes 354O and 354P.

  The photodiode 350A is provided at an intermediate position on the line connecting the photodiode 351 and the photodiode 352, and the photodiode 350B is provided at an intermediate position on the line connecting the photodiode 352 and the photodiode 353. The photodiode 350C is provided at an intermediate position on the line connecting the photodiode 353 and the photodiode 354, and the photodiode 350D is provided at an intermediate position on the line connecting the photodiode 351 and the photodiode 354. Yes.

  As shown in the drawing, each of the photodiodes 351 to 354 and the photodiodes 350A to 350D is also irradiated with either the reflected light 337A to 337D or the reflected light 337F to 337I. In the present embodiment, the state of the fixed stage portion 239 is detected by the change in the position of the reflected light 337A to 337I received by the detector 339. A specific state detection method will be described later.

  Subsequently, a simulation result performed for confirming whether or not the detector 339 can detect a state of five degrees of freedom using the reference grid 40 will be described.

  FIG. 11 is a diagram showing a model of the detection means used in the simulation. In the figure, the internal configuration of the detecting means 14 is schematically shown in a linear direction. In FIG. 11, the same components as those of the detecting means shown in FIG.

  First, the spot intensity distribution of the reflected light 337 seen by the detector 339 is obtained from a calculation formula. At that time, the detection means 14 is divided for each component, and the calculation is performed by connecting the functions for each component. Specifically, as shown in FIG. 11, it can be divided into a spectral plate 332, a reference grating 40, a focusing lens 338, a detector 339, and a space between them.

  The wavefront function g (x, y) of the spectroscopic plate 332 is 1 in the openings 341A to 341I and 0 in the region other than the openings 341A to 341I, and is expressed by the following equation (1).

Next, the phase function G (x, y) of the reference grating 40 will be described. Light 333 incident on the reference grating 40 becomes reflected light 337 and returns to the original optical path. Thus, as shown in FIG. 12, the phase function G (x, y) of the reference grating 40 can be considered with the optical paths of the nine lights 333 and the reflected light 337 as one direction.

  FIG. 12 is a diagram for explaining the phase function of the reference grating. Assuming that the shape of the reference grating 40 is h (x, y), the light 333 incident on the point (x, y) is only 2h (x, y) compared to the light incident on the point t ′ at the bottom of the reference grating 40. The optical path length is shortened. Therefore, the phase function G (x, y) of the reference grating 40 is expressed by the following equation (2). In the following equation (2), k represents the wave number of light, A represents the amplitude of the reference grating 40, and P represents the wavelength of the reference grating 40.

Next, the phase function L (x, y) of the focusing lens 338 is expressed by the following equation (3), where f is the focal length of the focusing lens 338. The focusing lens 338 has a function of condensing light by changing the phase depending on the incident location.

The propagation of light space will be described. The propagation of light in space is modeled by Fresnel diffraction. If the wave on the observation surface is u (x, y), the wave on the propagation start surface is u ₀ (x, y), and the distance from the start surface to the observation surface is z, u (x , Y) can be expressed by the following equation (4).

Here, F [v (x, y)] is a two-dimensional Fourier transform of v (x, y). λ is the wavelength of light.

As shown in FIG. 11, the components of the optical system are arranged in a straight line, and the complex amplitude of light incident on the spectroscopic plate 332 is set to U _A (x, y), on the detector 339 (on the photodiodes 350A to 350H, and The complex amplitude of the photodiodes 351 to 354) is U _D (x, y), the distance between the spectroscopic plate 332 and the reference grating 40 is Z ₁ , and the distance between the reference grating 40 and the focusing lens 338 is Z ₂ (= f ), The spot intensity distribution I (x, y) can be obtained as shown below and is expressed by the following equation (5).

Next, a change in the spot intensity distribution I (x, y) when the movement of five degrees of freedom occurs with respect to the reference lattice 40 will be described. The amounts of displacement with respect to the X-axis direction and the Y-axis direction are Δx and Δy, the rotation angle when rotating about the Z axis as the rotation axis is θz (yaw angle), and when rotating about the X axis as the rotation axis When the rotation angle is θx (rolling angle) and the rotation angle when rotating about the Y axis as the rotation axis is θy (pitching angle), the following equation (6) is obtained.

By substituting equation (6) into equation (5) and calculating, it is possible to obtain a change in I (x, y) when a motion of five degrees of freedom occurs in the reference lattice 40. Further, the distribution of the complex amplitude U _A (x, y) of the light 333 used in the simulation described later is expressed by the following equation (7), and the distribution of the complex amplitude U _A (x, y) is illustrated in FIG. It is. FIG. 13 is a diagram showing the distribution of the complex amplitude U _A (x, y) of the light incident on the spectroscopic plate.

FIG. 14 is a diagram showing the simulation conditions of the first embodiment, and FIG. 15 is a diagram showing the result of simulating the change of the spot intensity distribution I (x, y). The X1 direction indicates a direction orthogonal to the X axis, the Y1 direction indicates a direction orthogonal to the Y axis, and the Z1 direction indicates a direction orthogonal to the X1 and Y1 directions.

  Next, with reference to the simulation results shown in FIGS. 16 to 17, the change in the spot intensity distribution when the moving body is displaced in the X-axis direction with respect to the reference grating 40 will be described. FIG. 16 is a view showing the spot intensity distribution when the movable body (movable stage 237) is displaced in the X-axis direction with respect to the reference grating as viewed in X1 (see FIG. 15). FIG. It is the figure which looked at Y1 (refer FIG. 15) spot intensity distribution when a moving body displaces to a X-axis direction.

  As shown in FIG. 16, when the moving body is displaced in the X-axis direction, spot intensity distributions 370A on both sides of the spot intensity distribution 370C located at the center of the spot intensity distributions 370A to 370E viewed from the X1 direction. , 370B, 370D, and 370E change. On the other hand, as shown in FIG. 17, when the spot intensity distributions 371A to 371E are viewed from the Y1 direction, the magnitudes of the five spot intensity distributions 371A to 371E are large even if the value of Δx (displacement in the X-axis direction) changes. There is no change.

  From the above simulation results, when the moving body is displaced in the X-axis direction, by monitoring the spot intensity distributions 370A, 370B, 370D, and 370E from the X1 direction, the moving distance and position (coordinates) of the moving body in the X-axis direction are monitored. ) Can be detected. Specifically, when the moving body is displaced in the X-axis direction, the spot intensity distributions of the reflected lights 337D and 337F received by the two photodiodes 350A and 350C (see FIG. 10) provided on the light receiving surface 339A are obtained. It was found that the moving distance and position (coordinates) of the moving body with respect to the X-axis direction can be detected by monitoring.

  Although not shown, when the moving body is displaced in the Y-axis direction from the simulation results, the two on the both sides of the spot intensity distribution located at the center of the five spot intensity distributions from the Y1 direction. It was found that the size of (total 4) spot intensity distributions changed. Therefore, when the moving body is displaced in the Y-axis direction, the spot intensity of the reflected light 337B, 337D is monitored by the two photodiodes 350B, 350D (see FIG. 10) provided on the light receiving surface 339A. It was found that the moving distance and position (coordinates) of the moving body with respect to the Y-axis direction can be detected.

  Next, changes in the spot intensity distribution when the moving body is displaced (rotated) in the rotation direction with the Z axis as the rotation axis will be described with reference to the simulation results shown in FIG. FIG. 18 is a diagram (see FIG. 15) of the spot intensity distribution when the moving body is displaced in the rotation direction with the Z axis as the rotation axis, as viewed from Z1. In FIG. 18, θz represents a yawing angle (an angle with the Z axis as the rotation axis).

  As shown in FIG. 18C, when θz = 0 arcsec, the positions of the reflected lights 337A, 337C, 337G, and 337I reflected at the four corners are clockwise around the position of the center reflected light 337E, It turns out that it is not rotating counterclockwise. As shown in FIGS. 18A and 18B, when the moving body rotates in the minus direction (counterclockwise) about the Z axis as a rotation axis, the reflected light 337A reflected at the four corners, It can be seen that the positions of 337C, 337G, and 337I rotate counterclockwise around the central peak 337E.

  As shown in FIGS. 18D and 18E, when the moving body rotates in the plus direction (clockwise) with the Z axis as the rotation axis, the reflected lights 337A and 337C reflected at the four corners. , 337G and 337I rotate clockwise around the position of the central reflected light 337E. Furthermore, since the positions of the reflected lights 337A, 337C, 337G, and 337I shown in FIGS. 18A, 18B, 18C, and 18E are different, the light receiving surface 339A By monitoring the positions of the reflected light 337A, 337C, 337G, and 337I from the Z1 direction by the photodiodes 351 to 354 (see FIG. 10) provided at the four corners, the moving body is rotated in the rotation direction with the Z axis as the rotation axis. It was found that it is possible to detect the position, amount of movement, and rotation angle of the moving body when displaced.

  Next, with reference to the simulation results shown in FIGS. 19 to 22, changes in the spot intensity distribution when the moving body is displaced (rotated) in the rotation direction with the Y axis as the rotation axis will be described. FIG. 19 is a view showing the spot intensity distribution when the moving body is displaced in the rotation direction with the Y axis as the rotation axis (see FIG. 15), and FIG. 20 is a spot intensity located at the center of FIG. It is the figure which expanded distribution. FIG. 21 is a diagram showing the spot intensity distribution when the moving body is displaced in the rotation direction about the Y axis as a rotation axis (see FIG. 15), and FIG. 22 is located at the center of FIG. It is the figure which expanded spot intensity distribution. 19 to 22, θy represents a pitching angle (an angle with the Y axis as the rotation axis).

  As shown in FIG. 20, when the moving body is displaced (rotated) in the plus direction (clockwise) with the Y axis as the rotation axis, the position in the X axis direction of the spot intensity distribution 375C viewed from the X1 direction is the same as that shown in FIG. When moving to the left and the moving body is displaced (rotated) in the negative direction (counterclockwise) about the Y axis as the rotation axis, the position of the spot intensity distribution 375C in the X axis direction viewed from the X1 direction is on the right side of the figure. Moving.

  On the other hand, as shown in FIG. 22, when the moving body is displaced (rotation in the plus direction and minus direction) with the Y axis as the rotation axis, the position in the Y axis direction of the spot intensity distribution 380C viewed from the Y1 direction is completely changed. Not. Note that when the spot distribution intensity distribution 375C moves in the X-axis direction, the spot distribution intensity distributions 375A and 375B also move together.

  Therefore, when the moving body is displaced in the rotation direction with the Y axis as the rotation axis, the four photodiodes 350E to 350H (see FIG. 10) provided at the center of the light receiving surface 339A can be viewed from the X1 direction. It was found that the rotation angle of the movable body around the Y axis can be detected by monitoring the position of the spot intensity distribution 375C in the X axis direction (the position of the reflected light 337E). Note that, from the simulation results not shown, the reflected light received by the four photodiodes 350E to 350H provided at the center of the light receiving surface 339A even when the moving body is displaced in the rotation direction with the X axis as the rotation axis. It was found that the rotation angle θx (rolling angle) around the X axis of the moving body can be detected by monitoring the position in the Y axis direction of 337E (spot intensity distribution 375C).

  Next, with reference to FIGS. 23 to 25, a method for detecting the state of the moving object will be described based on the simulation result. FIG. 23 is a diagram for explaining a detection method when the moving body is displaced in the X-axis direction with respect to the reference lattice. In FIG. 23, a spot intensity distribution 385D indicates a spot intensity distribution corresponding to the reflected light 337D, and a spot intensity distribution 385F indicates a spot intensity distribution corresponding to the reflected light 337F.

As shown in FIG. 23, when the moving body moves in the X-axis direction with respect to the reference grating 40, the magnitudes of the spot intensity distributions 385D and 385F of the reflected lights 337D and 337F received by the photodiodes 350A and 350C change. Here, assuming that the output of the photodiode 350A is I _350A and the output of the photodiode 350C is I _350C , the displacement ΔX in the X-axis direction of the moving body with respect to the reference grating 40 is S _X = (I _350C −I _350A ) / It can be obtained from (I _350C + I _350A ). Further, when the moving body with respect to the reference grating 40 is moved in the Y-axis direction, a photodiode 350B for outputting a _{I 350B,} the output of the photodiode 350D When _{I 350D,} the Y axis of the moving body with respect to the reference grating 40 The displacement amount ΔY in the direction can be obtained from S _Y = (I _350D −I _350B ) / (I _350D + I _350B ).

  FIG. 24 is a diagram for explaining a detection method when the moving body rotates with the Y axis as the rotation axis with respect to the reference lattice. In FIG. 24, a spot intensity distribution 385E indicates a spot intensity distribution corresponding to the reflected light 337E. As shown in FIG. 24, when the moving body rotates with respect to the reference grating 40 using the Y axis as the rotation axis, the positions of the spot intensity distributions 385D to 385E corresponding to the three reflected lights 337D to 337F are entirely in the X axis direction. Move to. The amount of movement at this time follows the autocollimation method. This amount of movement can be detected by the four photodiodes 350E to 350H provided at the center of the light receiving surface 339A.

Here, photodiode 350E outputs the _{I 350E,} photodiodes 350F of the output _{I 350F,} a photodiode output of 350G _{I 350G,} the output of the photodiode 350H When _{I 350H, S qY = (I} 350G + I 350H - The amount of movement in the X-axis direction can be obtained from I _350E -I _350F ) / (I _350E + I _350F + I _350G + I _350H ), and θy (pitching angle) can be obtained from the obtained amount of movement in the X-axis direction. _{Similarly, S qX = (I 350F +} I 350G -I 350E -I 350H) / (I 350E + I 350F + I 350G + I 350H) than can the amount of movement in the Y-axis direction is determined, the moving amount of the obtained Y-axis direction From this, θx (rolling angle) can be obtained.

  FIG. 25 is a diagram for explaining a detection method when the moving body rotates with respect to the reference lattice about the Z axis as a rotation axis. When the moving body rotates with respect to the reference grating 40 using the Z axis as a rotation axis, the positions of the four reflected lights 337A, 337C, 337G, and 337I are centered on the position of the central reflected light 337E as described above with reference to FIG. Rotate to.

Here, photodiode 351I outputs an _{I 351I,} photodiode outputs _{I 351J} of 351J photodiode outputs _{I 351K} of 351K, a photodiode output _{I 351L} of 351L, photodiode outputs of 351M _{I 351M,} photodiode output _{I 351N} of 351N, photodiode 351O the output _{I 351O,} the output of the photodiode 351P When _{I 351P, S qZ = {(} I 351J + I 351L + I 351N + I 351P) - (I 351I + I 351k + I 351M + I _{351O)} / (I 351I +} I 351J + I 351k + I 351L + I 351M + I 351N + I 351O + I 351P) rotation amount can be obtained from, [theta] z from the value of the rotation amount ( Yawing angle).

  Next, a simulation was performed as to whether or not detection is possible with respect to a state of five degrees of freedom when a detector 339 having a size as shown in FIG. 26 is used. FIG. 26 is a diagram showing the dimensions of the detector used in the simulation.

  FIG. 27 is a diagram illustrating a simulation result when a drive signal is input so as to drive in a 5 μm increment from 0 μm to 100 μm in the X-axis direction. As shown in FIG. 27, the output in the X-axis direction changes so as to draw a sine wave with respect to the X-axis direction drive signal, but the output in the Y-axis direction, the output in the pitch direction, the output in the roll direction, and Regarding the output in the yaw direction, there is no change with respect to the X-axis drive signal. From this, it can be seen that the state of the moving body in the X-axis direction can be detected.

  FIG. 28 is a diagram showing a simulation result when a drive signal is input so as to drive from 0 μm to 100 μm by 5 μm in the Y-axis direction. As shown in FIG. 28, the output in the Y-axis direction changes to draw a sine wave with respect to the drive signal for the Y-axis direction, but the output in the X-axis direction, the output in the pitch direction, the output in the roll direction, and Regarding the output in the yaw direction, there is no change with respect to the Y-axis drive signal. From this, it can be seen that the state of the moving body in the Y-axis direction can be detected.

  FIG. 29 is a diagram showing a simulation result when a drive signal is input so as to drive every 2 arcsec from −20 arcsec to +20 arcsec in the pitch direction. As shown in FIG. 29, with respect to the pitch direction drive signal, the output related to the pitch direction changes to the right, but the output in the X-axis direction, the output in the Y-axis direction, the output in the roll direction, and the output in the yaw direction Regarding the output, there is no change with respect to the pitch drive signal. From this, it can be seen that the state of the moving body in the pitch direction can be detected.

  FIG. 30 is a diagram illustrating a simulation result when a drive signal is input so as to drive in the roll direction by 2 arcsec from −20 arcsec to +20 arcsec. As shown in FIG. 30, the output related to the roll direction changes to the right with respect to the roll direction drive signal, but the output in the X-axis direction, the output in the Y-axis direction, the output in the pitch direction, and the output in the yaw direction Regarding the output, there is no change with respect to the roll drive signal. From this, it can be seen that the state of the moving body in the roll direction can be detected.

  FIG. 31 is a diagram showing a simulation result when a drive signal is inputted to drive in the yaw direction from -36000 arcsec to +36000 arcsec every 3600 arcsec. As shown in FIG. 31, the output related to the yaw direction with respect to the drive signal for the yaw direction varies greatly from the output in the X axis direction, the output in the Y axis direction, the output in the pitch direction, and the output in the roll direction. I understand that. From this, it can be seen that the yaw direction of the moving body can be detected.

  Based on the simulation results, the light emitted from the light source unit 330 is split into a plurality of light 333 by the spectral plate 332 and applied to the reference grating, and the plurality of reflected lights 337 are configured as shown in FIG. By receiving light collectively with the element-type photodiode 350, it is possible to detect the state of the moving body with five degrees of freedom. Further, since the state of the moving body is detected based on the change of the plurality of reflected lights 337, even if any of the reference gratings 40 irradiated with the plurality of lights 337 has a defect, the reference grating without any defect. Since the state can be detected based on changes in the plurality of reflected lights 337 reflected from the light 40, the conventional single light is irradiated onto the reference grating 40, and the state is detected based on the reflected light. Compared to the above, the state can be detected with high accuracy.

  In addition, since the detection means 14 of the present embodiment does not perform detection using the autocollimation method as in the prior art, the configuration of the detector 339 can be simplified, and the cost of the detection means 14 is reduced. be able to.

  In this embodiment, the detector 339 provided with the photodiodes 351 to 354 and the photodiodes 350A to 350D is used. However, a CCD may be used instead of the photodiodes 351 to 354 and the photodiodes 350A to 350D. Even when a CCD is used, the same effect as in this embodiment can be obtained.

(Second embodiment)
Next, a simulation result when the reference grid 400 configured in a rectangle according to the second embodiment of the present invention is applied will be described.

  First, the reference grating of the second embodiment will be described with reference to FIG. FIG. 32 is a perspective view of a reference grid according to the second embodiment of the present invention. The reference lattice 400 is formed by alternately arranging substantially square-shaped columnar portions 401 and square-shaped concave portions 402 that are the same as the columnar portions 401 in two in-plane directions. The PV value of the reference grating 400 is 0.08 μm.

  Next, the spot intensity distribution obtained by performing simulation under the simulation conditions shown in FIG. 33 using the reference lattice 400 having the above-described configuration will be described. FIG. 33 is a diagram showing the simulation conditions of the second embodiment, and FIG. 34 is a diagram showing the spot intensity distribution obtained by the simulation. As shown in FIG. 34, it can be seen that a plurality of peaks having different intensities appear in this embodiment as well as in FIG. 15 described in the first embodiment.

  Next, with reference to the simulation results shown in FIGS. 35 to 36, the change in the spot intensity distribution when the moving body is displaced in the X-axis direction with respect to the reference grating 400 will be described. FIG. 35 is a view of the spot intensity distribution when the moving body is displaced in the X-axis direction with respect to the reference lattice (see FIG. 34), and FIG. 36 is moved in the X-axis direction with respect to the reference lattice. It is the figure which looked at Y1 (refer FIG. 34) for the spot intensity | strength when a body is displaced. The X1 direction indicates a direction orthogonal to the X axis, the Y1 direction indicates a direction orthogonal to the Y axis, and the Z1 direction indicates a direction orthogonal to the X1 and Y1 directions.

  As shown in FIGS. 35 to 36, in this embodiment as well, in the spot intensity distributions 410A to 410C viewed from the X1 direction when the moving body is displaced in the X axis direction, as in the first embodiment. When the spot intensity distributions 410A and 410C on both sides of the spot intensity distribution 410B located at the center of the spot change, and the spot intensity distribution is viewed from the Y1 direction, the value of Δx (displacement in the X-axis direction) changes. It can be seen that there is no change in the size of the spot intensity distributions 411A to 411C.

  Next, with reference to the simulation result shown in FIG. 37, the change in the spot intensity distribution when the moving body is displaced in the rotation direction with the Z axis as the rotation axis will be described. FIG. 37 is a diagram showing the spot intensity distribution when the moving body is displaced in the rotation direction with the Z axis as the rotation axis, as viewed in Z1 (see FIG. 34). In FIG. 37, θz represents a yawing angle (an angle with the Z axis as the rotation axis).

  As shown in FIG. 37, also in the second embodiment, as in the first embodiment, the positions of the reflected lights 337A, 337C, 337G, and 337I reflected at the four corners are centered on the position of the center reflected light 337E. It turns out to rotate clockwise.

  Next, with reference to the simulation results shown in FIGS. 38 to 41, changes in the spot intensity distribution when the moving body is displaced in the rotation direction with the Y axis as the rotation axis will be described. FIG. 38 is a diagram showing the spot intensity distribution when the moving body is displaced in the rotation direction about the Y axis as a rotation axis (see FIG. 34), and FIG. 39 is a spot intensity located at the center of FIG. It is the figure which expanded distribution. FIG. 40 is a view showing the spot intensity distribution when the moving body is displaced in the rotation direction with the Y axis as the rotation axis (see FIG. 34), and FIG. 41 is located at the center of FIG. It is the figure which expanded spot intensity distribution. 38 to 41, θy represents a pitching angle (an angle with the Y axis as the rotation axis).

  As shown in FIGS. 39 to 41, also in the case of the present embodiment, as in the first embodiment, when the moving body is displaced (rotated) in the plus direction (clockwise) with the Y axis as the rotation axis, X1 The position in the X-axis direction of the spot intensity distribution 413B viewed from the direction moves to the left side of the figure, and when the moving body is displaced (rotated) in the minus direction (counterclockwise) about the Y-axis as the rotation axis, It can be seen that the X-axis direction position of the spot intensity distribution 413B seen moves to the right side of the figure.

  Based on the simulation results described above, the reference grating configured to be symmetrical with respect to the central axis of the reference grating 400 instead of the reference grating 40 having a sinusoidal shape with respect to a complicated two-dimensional direction. It was found that the state of five degrees of freedom of the moving body can be detected using 400. This simplifies the shape of the reference grating 400 necessary for detecting the state, and allows the reference grating 400 to be easily manufactured.

(Third embodiment)
Next, a stage apparatus 10 according to a third embodiment of the present invention will be described with reference to FIGS. FIG. 42 is an exploded perspective view of the stage apparatus according to the third embodiment of the present invention, and FIG. 43 is a perspective view of the stage apparatus in a state where it is partially cut away and assembled. This stage apparatus 10 is an apparatus used to move a wafer to be moved to a predetermined position in, for example, a semiconductor manufacturing stepper.

  The stage device 10 generally includes a base 11, a stage 12, a detection device 24, a driving device, and the like. The base 11 serves as a base of the stage apparatus 10 and is provided with linear motor structures 20A and 25A, a Z-direction electromagnet 30, and a detection means 14 which will be described later. The detection means 14 has the same configuration as the detection means 14 used in the first embodiment.

  On the stage 12, a wafer 60 and a chuck 61 as a moving body are mounted on the upper portion, and a Z-direction magnet 19 is disposed on the lower portion via magnets 15 and 16, a yoke 17, and a spacer 18. The stage 12 is configured to be movable with respect to the base 11 in the direction of the arrow X-axis, the direction of the Y-axis in the drawing, and the rotation about the Z-axis.

  As shown in FIG. 42, the scale portion 13 is fixed at a substantially central position on the back surface (surface facing the base 11) of the stage 12. On the other hand, the detection means 14 is arranged on the base 11. Specifically, the detection means 14 is provided on a mounting substrate 33 provided on the base 11.

  Next, the drive device will be described. The drive device is configured to move the stage 12 with respect to the base 11 in the X-axis direction, the Y-axis direction, and the rotational movement about the Z-axis. This drive device includes X-axis direction linear motor structures 20A and 20B disposed on a base 11, Y-axis direction linear motor structures 25A and 25B, a Z-direction electromagnet 30, and an X-axis direction disposed on a stage 12. For example, a magnet 16 for the Y-axis direction, a magnet 19 for the Z-direction, and the like.

  The X-axis direction linear motor structure portion 20A is disposed on the base 11, and includes a pair of X-axis direction coils 21A-1 and 21A-2 (referred to as X-axis direction coil 21A when both are collectively referred to), It is comprised by the core 22A for axial directions. The pair of X-axis direction coils 21A-1 and 21A-2 are juxtaposed in the direction of the arrow X-axis in the figure, and are configured to be able to supply current independently.

  The X-axis direction linear motor structure portion 20B has the same configuration as the X-axis direction linear motor structure portion 20A. The X-axis direction coil motor 21B is configured by a pair of X-axis direction coils. And an X-axis direction core 22B. The X-axis direction linear motor structure portion 20A and the X-axis direction linear motor structure portion 20B are configured to be spaced apart from each other in the direction of the arrow Y-axis in the figure with the arrangement position of the detection device 14 therebetween. Yes.

  On the other hand, the Y-axis direction linear motor structure unit 25A and the Y-axis direction linear motor structure unit 25B have the same configuration as the X-axis direction linear motor structure unit 20A. That is, the Y-axis direction linear motor structure portion 25A is composed of a Y-axis direction coil 26A (not provided with a reference numeral, but is composed of a pair of Y-axis direction coils) and a Y-axis direction core 27A. The Y-axis direction linear motor structure portion 25B is composed of a Y-axis direction coil 26B (which is not provided with a reference numeral but is composed of a pair of Y-axis direction coils) and a Y-axis direction core 27B. The Y-axis direction linear motor structure portion 25A and the Y-axis direction linear motor structure portion 25B are configured so as to be separated from each other in the direction of the arrow X-axis in FIG. Yes.

  The Z-direction electromagnet 30 functions to form a gap between the X-axis direction magnet 15 </ b> A and the magnets 15 and 16 provided on the stage 12, which will be described later, by floating the stage 12 with respect to the base 11. It plays. The Z-direction electromagnet 30 includes a Z-direction coil 31 and a Z-direction core 32. Further, in order to stabilize the flying, they are disposed at the four corner positions of the base 11 having a rectangular shape.

  In addition to the magnetic means employed in the present embodiment, the means for floating the stage 12 with respect to the base 11 includes a method using compressed air, a means for supporting the base 11 with a plurality of balls, and the like. Can be considered.

  On the other hand, as described above, the X-axis direction magnet 15 and the Y-axis direction magnet 16 are disposed on the stage 12. Although not shown in the figure, a total of four magnets 15 and 16 are arranged in pairs. Therefore, in a state where the stage 12 is viewed from the bottom, the magnets 15 and 16 are arranged so as to form a substantially rectangular shape in cooperation.

  The X-axis direction magnet 15 is composed of a plurality of magnet arrays (an assembly of small magnets) in which a plurality of equivalent permanent magnets are linearly arranged so that polarities appear alternately. Similarly, the Y-axis direction magnet 16 is also composed of a plurality of magnet arrays in which a plurality of equivalent permanent magnets are linearly arranged so that the polarities appear alternately. A yoke 17 is disposed above each magnet 15, 16, and this yoke 17 has a function of magnetically coupling a plurality of magnets constituting each magnet 15, 16.

  In the above configuration, when the stage 12 is mounted on the base 11, one of the pair of X-axis direction magnets 15 is positioned on the X-axis direction linear motor structure 20A, and the other X-axis direction magnet 15 is It is configured to be positioned on the X-axis direction linear motor structure 20B. When the stage 12 is mounted on the base 11, one of the pair of Y-axis direction magnets 16 is positioned on the Y-axis direction linear motor structure 25A, and the other Y-axis direction magnet 16 is the Y-axis. It is configured to be positioned on the directional linear motor structure 25B.

  Further, in a state where the base 11 is mounted on the stage 12 and the stage 12 is levitated with respect to the base 11 by the Z-direction electromagnet 30, the linear motor structures 20A, 20A, It is configured to engage with 20B, 25A, and 25B. Further, in the mounted state, the magnets 15 and 16 are arranged so as to be orthogonal to the winding direction of the coils 21A, 21B, 26A, and 26B provided in the linear motor structural portions 20A, 20B, 25A, and 25B. Has been.

  By configuring the drive device as described above, the X-axis direction linear motor structures 20A and 20B and the X-axis direction magnet 15 cooperate to function as a linear motor that drives the stage 12 in the arrow X-axis direction in the figure. . Similarly, the Y-axis direction linear motor structures 25A and 25B and the Y-axis direction magnet 16 cooperate to function as a linear motor that drives the stage 12 in the arrow Y-axis direction in the figure.

  That is, in this embodiment, two sets of linear motors are arranged in both the X and Y directions. By adopting this configuration, a relatively large space can be secured in the central portion of the apparatus, so that the detection device 24 can be installed at this position. In the present embodiment, the scale portion 13 is disposed on the stage 12 and the detection means 14 is disposed on the base 11. This is because it is not necessary to connect wiring to the scale portion 13. However, it is also possible to arrange the scale portion 13 on the base 11 and the detection means 14 on the stage 12.

  Further, in the driving apparatus configured as described above, when only the X-axis direction linear motor structure portion 20A and the X-axis direction linear motor structure portion 20B are simultaneously driven in the same direction, the stage 12 translates in the arrow X-axis direction in the figure. . Similarly, when only the Y-axis direction linear motor structure portion 25A and the Y-axis direction linear motor structure portion 25B are simultaneously driven in the same direction, the stage 12 translates in the arrow Y-axis direction in the figure. In addition, by driving the paired linear motor structures 20A and 20B and 25A and 25B in the opposite directions, the stage 12 performs a rotational movement around the arrow Z axis in the figure by θZ.

  In this way, by providing the stage device 10 with the detection device 24 including the detection means 14 and the scale unit 13, the detection device 14 can detect the five degrees of freedom of the stage 12.

  In the present embodiment, the case where the scale portion 13 including the reference grating 40 having a sinusoidal shape with respect to the two-dimensional direction is described as an example. Alternatively, the reference grating 400 configured to be symmetric with respect to the central axis of the reference grating 400 may be used. Further, the present invention described above can be widely applied not only to semiconductor manufacturing apparatuses but also to fields requiring microfabrication in the future such as micromachines and IT optical communication parts. In other words, many of the current micromachine manufacturing technologies use semiconductor manufacturing technology, and by using the present invention, it becomes possible to manufacture a variety of micromachines that are finer. Furthermore, in the field of laser processing, a stage that moves at an ultra-high speed with submicron accuracy is required.

  The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to such specific embodiments, and various modifications can be made within the scope of the gist of the present invention described in the claims. Deformation / change is possible.

  INDUSTRIAL APPLICABILITY The present invention is applied to a detection apparatus and a stage apparatus that can easily detect the state of five degrees of freedom of the stage and can improve the detection accuracy by using a reference grid that is easy to manufacture. it can.

It is the schematic of the detection apparatus which has a reference | standard grating | lattice and a two-dimensional angle sensor. It is the figure which showed the two-dimensional angle sensor. It is sectional drawing of the stage apparatus provided with the detection apparatus by 1st Example of this invention. It is a top view of the component corresponding to the area | region B shown in FIG. It is the top view which showed typically the relationship between the drive direction of a movable stage, and the driving force of an X direction and a Y direction actuator. It is an enlarged view of the component corresponding to the area | region C shown in FIG. It is the figure which showed the scale part and the detection means. It is the figure which showed schematic structure and the scale part of the detection means. It is a top view of a spectroscopic plate. It is the figure which looked at the detection means shown in FIG. It is the figure which showed the model of the detection means used for simulation. It is a figure for demonstrating the phase function of a reference | standard grating | lattice. Complex amplitude U _{A (x,} y) of light incident on the spectral plate is a diagram showing the distribution of. It is the figure which showed the simulation conditions of 1st Example. It is the figure which showed the result of having simulated the change of spot intensity distribution I (x, y). It is the figure which looked at X1 the intensity distribution of the spot when a mobile body (movable stage 237) is displaced to the X direction to a standard lattice. It is the figure which looked at the spot intensity | strength part at the time of a moving body moving to a X direction with respect to a reference | standard grating | lattice at Y1. It is the figure which looked at Z1 the spot intensity distribution when a mobile body displaces to the rotation direction which makes a Z axis a rotating shaft. It is the figure which looked at X1 the spot intensity distribution when a mobile body displaces to the rotation direction which makes a Y-axis a rotating shaft. It is the figure which expanded the spot intensity distribution located in the center of FIG. It is the figure which looked at Y1 the spot intensity distribution when a mobile body displaces to the rotation direction which makes a Y axis a rotating shaft. It is the figure which expanded the spot intensity distribution located in the center of FIG. It is a figure for demonstrating the detection method when a moving body displaces to the X-axis direction with respect to the reference | standard grating | lattice. It is a figure for demonstrating the detection method when a mobile body rotates with the Y-axis as a rotating shaft with respect to the reference | standard grating | lattice. It is a figure for demonstrating the detection method when a mobile body rotates centering on a Z axis with respect to a reference | standard grating | lattice. It is the figure which showed the dimension of the detector used by simulation. It is the figure which showed the simulation result at the time of inputting a drive signal so that it may drive to a X-axis direction. It is the figure which showed the simulation result at the time of inputting a drive signal so that it may drive to a Y-axis direction. It is the figure which showed the simulation result at the time of inputting a drive signal so that it may drive to a pitch direction. It is the figure which showed the simulation result at the time of inputting a drive signal so that it may drive to a roll direction. It is the figure which showed the simulation result at the time of inputting a drive signal so that it may drive in a yaw direction. It is a perspective view of the reference | standard grating | lattice of 2nd Example of this invention. It is the figure which showed the simulation conditions of 2nd Example. It is the figure which showed the spot intensity distribution obtained by simulation. It is the figure which looked at X1 the spot intensity distribution when a mobile body displaces to the X-axis direction with respect to a reference | standard grating | lattice. It is the figure which looked at the spot intensity | strength part at the time of a moving body moving to the X-axis direction with respect to the reference | standard grating | lattice at Y1. It is the figure which looked at Z1 the spot intensity distribution when a mobile body displaces to the rotation direction which makes a Z axis a rotating shaft. It is the figure which looked at X1 the spot intensity distribution when a mobile body displaces to the rotation direction which makes a Y-axis a rotating shaft. It is the figure which expanded the spot intensity distribution located in the center of FIG. It is the figure which looked at the spot intensity distribution when a mobile body displaces to the rotation direction which makes a Y-axis a rotating shaft at Y1. It is the figure which expanded the spot intensity distribution located in the center of FIG. It is a disassembled perspective view of the stage apparatus which is 3rd Example of this invention. It is a perspective view of the stage apparatus of the state assembled by cutting away partially.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,230 Stage apparatus 11,231 Base 12,236 Stage 13 Scale part 14,290 Detection means 15 X direction magnet 16 Y direction magnet 17 Yoke 18 Spacer 19 Z direction magnet 20A, 20B X direction linear motor structure part 21A , 21A-1, 21A-2, 21B X direction coil 22A, 22B X direction core 24, 249, 300 Detection device 25A, 25B Y direction linear motor structure 26A, 26B Y direction coil 27A, 27B For Y direction Core 30 Z-direction electromagnet 31 Z-direction coil 32 Z-direction core 33 Mounting substrate 40, 320, 400 Reference lattice 41 Base 233 Scale unit 232 Convex part 237 Movable stage 238 Air bearing 239 Fixed stage part 241 Chuck 244 Coil unit 245 Tilt drive unit 242A, 242B X direction actuator 243A, 243B Y direction actuator 248 Work 252 Upper resin 253 Lower resin 300 Two-dimensional angle sensor 301 Laser light source 302, 334 Polarizing beam splitter 303, 336 1/4 wavelength plate 305 Auto Collimator 306 Objective lens 307 Detector 310, 312 Laser light 330 Light source unit 331 Light 332 Spectroscopic plate 337, 337A-337I Reflected light 338 Focusing lens 339 Detector 339A Light receiving surface 341A-341I Openings 350A-350H, 351-354, 351I to 351P Photodiodes 370A to 370E, 371A to 371E, 375A to 375E, 380A to 380E, 385D to 385F, 410A to 410C 411A~411C, 413A~413C, 415A~415C spot intensity distribution 401 columnar portion 402 recess B, C region E, D direction F pitch

Claims (7)

A reference grating having a periodic shape change in a two-dimensional direction;
A light source that emits light toward the reference grating;
A spectroscopic unit that has a plurality of openings and separates light emitted from the light source through the plurality of openings into a plurality of lights;
A detector having a detector that collectively receives a plurality of reflected light reflected by the reference grating;
The detection device detects a state with respect to the reference grating based on changes in the plurality of reflected lights received by the detector. The detector is composed of a plurality of photodiodes,
4 for detecting the state by the rotational movement with the X axis as the rotational axis and the state by the rotational movement with the Y axis as the rotational axis at the center of the surface of the detecting means that receives the plurality of reflected lights. The detection device according to claim 1, comprising at least one photodiode.   3. At least four photodiodes for detecting a state by rotational movement with the Z axis as a rotation axis are provided at four corners of the surface of the detection means. The detection device according to 1.   The detection device according to claim 1, wherein a charge coupled device (CCD) is used as the detector.   5. The detection apparatus according to claim 1, wherein the reference grating is configured in a shape that is symmetrical with respect to two in-plane axes of the reference grating. 6. Base and
A stage moving on the base;
A motor for driving the stage;
A levitating device for levitating the stage relative to the base;
A stage apparatus comprising: the detection apparatus according to claim 1 that detects a state of the stage. A planar motor is used as the motor,
The stage apparatus according to claim 6, wherein an air bearing is used for the levitation apparatus.