JP2005311080A5 - - Google Patents
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- Publication number
- JP2005311080A5 JP2005311080A5 JP2004126049A JP2004126049A JP2005311080A5 JP 2005311080 A5 JP2005311080 A5 JP 2005311080A5 JP 2004126049 A JP2004126049 A JP 2004126049A JP 2004126049 A JP2004126049 A JP 2004126049A JP 2005311080 A5 JP2005311080 A5 JP 2005311080A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004126049A JP2005311080A (ja) | 2004-04-21 | 2004-04-21 | 測定装置、当該測定装置を有する露光装置 |
| US11/112,826 US7295327B2 (en) | 2004-04-21 | 2005-04-21 | Measuring apparatus and exposure apparatus having the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004126049A JP2005311080A (ja) | 2004-04-21 | 2004-04-21 | 測定装置、当該測定装置を有する露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005311080A JP2005311080A (ja) | 2005-11-04 |
| JP2005311080A5 true JP2005311080A5 (ja) | 2007-06-07 |
Family
ID=35136067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004126049A Withdrawn JP2005311080A (ja) | 2004-04-21 | 2004-04-21 | 測定装置、当該測定装置を有する露光装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7295327B2 (ja) |
| JP (1) | JP2005311080A (ja) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1704445A2 (de) * | 2004-01-16 | 2006-09-27 | Carl Zeiss SMT AG | Vorrichtung und verfahren zur optischen vermessung eines optischen systems, messstrukturträger und mikrolithographie-projekti onsbelichtungsanlage |
| JP4666982B2 (ja) * | 2004-09-02 | 2011-04-06 | キヤノン株式会社 | 光学特性測定装置、露光装置及びデバイス製造方法 |
| JP2006324311A (ja) * | 2005-05-17 | 2006-11-30 | Canon Inc | 波面収差測定装置及びそれを有する露光装置 |
| JP2007180152A (ja) * | 2005-12-27 | 2007-07-12 | Canon Inc | 測定方法及び装置、露光装置、並びに、デバイス製造方法 |
| JP2008192855A (ja) * | 2007-02-05 | 2008-08-21 | Canon Inc | 測定装置、露光装置及びデバイス製造方法 |
| JP2008294019A (ja) | 2007-05-22 | 2008-12-04 | Canon Inc | 空中像計測方法および装置 |
| JP2009216454A (ja) * | 2008-03-07 | 2009-09-24 | Canon Inc | 波面収差測定装置、波面収差測定方法、露光装置およびデバイス製造方法 |
| JP2014220263A (ja) * | 2013-04-30 | 2014-11-20 | キヤノン株式会社 | リソグラフィ装置、及び物品の製造方法 |
| US10209202B1 (en) * | 2017-06-14 | 2019-02-19 | Facebook Technologies, Llc | Optical characterization system for wide field of view diffractive optical elements |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5835217A (en) * | 1997-02-28 | 1998-11-10 | The Regents Of The University Of California | Phase-shifting point diffraction interferometer |
| US7106456B1 (en) * | 2002-01-09 | 2006-09-12 | Interphase Technologies, Inc. | Common-path point-diffraction phase-shifting interferometer |
| JP2004055264A (ja) | 2002-07-18 | 2004-02-19 | Nippon Steel Corp | 金属板の定電圧通電加熱方法 |
| JP2007035709A (ja) * | 2005-07-22 | 2007-02-08 | Canon Inc | 露光装置及びそれを用いたデバイス製造方法 |
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2004
- 2004-04-21 JP JP2004126049A patent/JP2005311080A/ja not_active Withdrawn
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2005
- 2005-04-21 US US11/112,826 patent/US7295327B2/en not_active Expired - Fee Related