JP2005304272A - Resonance boosting circuit device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a resonance boosting circuit device of a comparatively simple structure that can obtain a boosted voltage (high voltage) of a desired rectangular wave without causing stray capacitance to be generated. <P>SOLUTION: When the boosted voltage is obtained from a resonance circuit 5 composed of a resonance reactor 2 and a capacitor 3 connected to the resonance reactor, a conductive pipe (a copper pipe P, for example), formed into a coil shape by winding a plurality of times is constituted as the resonance reactor 2, and a coaxial cable 8 structured by arranging an inner conductor 6 and an outer conductor 7 coaxially is passed through at the center of the hollow portion of the conductive pipe. The boosted voltage (high voltage) is obtained by impressing a voltage V<SB>1</SB>to an input port 13 provided at one end of the conductive pipe and by impressing a voltage V<SB>2</SB>to an input port 14 of the inner conductor 6 of the coaxial cable 8. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to, for example, a resonance type booster circuit device used for obtaining a high voltage necessary for generating a high voltage electron beam or the like. More specifically, the output waveform is rectangular (stepped). The present invention relates to a resonance type booster circuit device suitable for boosting to such a high voltage.

In order to boost and output the voltage Va having a pulse waveform as shown in FIG. 6A to a high voltage _Vb having a pulse waveform as shown in FIG. 6B, a booster circuit device has been conventionally used. Yes. As a conventional booster circuit, for example, there is a boost chopper circuit as described in Japanese Utility Model Laid-Open No. 5-9186 (Patent Document 1). According to this circuit, a high voltage can be output. Yes, it is possible to reduce the current loss mainly by preventing the occurrence of surge voltage in the circuit.

On the other hand, as a booster circuit device that outputs a high voltage, a resonant booster circuit device 20 as shown in FIG. The resonance type booster circuit device 20 includes a resonance reactor (resonance coil) 21 formed by winding a conductive wire in a coil shape a plurality of times (n times) and a variable capacitor 22 connected (parallel connected) to the resonance reactor 21. What is housed in the cavity box 23 and configured to boost the input voltage of Vc to, for example, (n-1) Vc (where n is the number of coil turns of the resonant reactor 21) at the output unit 24. It is. However, the output voltage obtained by the resonance type booster circuit device 20 is a sine wave voltage 25 as shown in FIG. 7B, which is a high voltage of a rectangular wave as required for a specific application. It is the actual situation that cannot be obtained.
Japanese Utility Model Publication No. 5-9186

In the resonance type booster circuit device 20 as described above, an output (boost voltage) of a voltage of nVc can be obtained, but the output waveform is a sine wave as described above (see FIG. 7B). Various means are adopted as means for converting this into a rectangular waveform, and an example of a means incorporating such means is a resonant booster circuit device 30 shown in FIG. The resonance type booster circuit device 30 has a cavity box 23 having the same structure as that shown in FIG. 7A, but has an odd multiple of the input frequency f ₀ (for example, 3f ₀ , 5f ₀ ...) On the output side. ..)) Is added to the transformers 31 and 32 and the like. By connecting the transformers 31 and 32, the final output voltage can be set to a desired high voltage, and a boosted voltage 33 having a rectangular output waveform can be formed as shown in FIG. 8B. it can.

  However, in the resonant step-up circuit device 30 shown in FIG. 8, stray capacitance is generated in each of the transformers 31 and 32, resulting in a significant output loss. In order to reduce this, it is conceivable to provide a separate resonance circuit. However, when such a resonance circuit is provided, the output waveform becomes a sine wave, and when a step-up voltage of a rectangular wave is required, the sine There is a problem that the wave boost voltage cannot be used.

  The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to generate a desired rectangular wave (stepped) boosted voltage (high voltage) without generating stray capacitance. An object of the present invention is to provide a resonant booster circuit device having a relatively simple structure.

In order to achieve the above-described object, in the present invention, in a resonance type booster circuit device that obtains a boost voltage from a resonance circuit composed of a resonance reactor and a capacitor connected to the resonance reactor, a plurality of turns are wound in a coil shape. A conductive pipe formed by rotating is configured as the resonance reactor, and a coaxial cable having an inner conductor and an outer conductor arranged coaxially is inserted and disposed at the center position of the hollow portion of the conductive pipe. A boosted voltage is obtained by applying a voltage to the input port portion provided at one end of the pipe and applying a voltage to the input port portion of the inner conductor of the coaxial cable.
In the present invention, said voltages V ₁ is applied to the input port unit provided in the first round of winding end portion of the conductive pipe, and applying a voltage V ₂ to the input port of the inner conductor of the coaxial cable Thus, a boosted voltage of (n−1) V ₁ + V ₂ (where n is the number of turns of the conductive pipe) is obtained from the output port portion of the coaxial cable. The conductive pipe is a copper pipe.
In the present invention, a plurality of coaxial cables are inserted and disposed in the conductive pipe.
In a preferred embodiment of the present invention, a voltage V ₁ is applied to an input port side of the resonance reactor of a cavity box containing a resonance reactor formed by winding a copper pipe n times and a variable capacitor connected thereto. Is applied to the inside of the resonance reactor through a coaxial cable, a voltage V ₂ is applied to the input side thereof, and (n−1) is applied to the output port side of the cavity box. ) It is configured to output a high voltage of V ₁ + V ₂ .

  In the first aspect of the present invention, a conductive pipe formed by winding a plurality of times in a coil shape is configured as the resonance reactor, and an inner conductor and an outer conductor are coaxially arranged at the center position of the hollow portion of the conductive pipe. A coaxial cable that is arranged in the shape of a cable, and a voltage is applied to the input port portion provided at one end of the conductive pipe, and a voltage is applied to the input port portion of the inner conductor of the coaxial cable. Since the boosted voltage is obtained, according to the resonant booster circuit device of the present invention, a desired rectangular wave boosted voltage (high voltage) can be obtained without generating stray capacitance. In addition, the coaxial cable is separate from the resonance reactor, and an arbitrary one can be selected, and a resonance type booster circuit device having a relatively simple structure as a whole can be provided.

Further, the invention according to claim 2, wherein the input port unit provided in the first round of winding end portion of the conductive pipe voltages V ₁ is applied to, and the input port of the inner conductor of the coaxial cable By applying the voltage V ₂ to the output port portion of the coaxial cable, a boosted voltage (high voltage) of (n−1) V ₁ + V ₂ (where n is the number of turns of the conductive pipe) is obtained. Therefore, a desired rectangular wave high voltage can be easily obtained at a very high step-up rate.

  Further, in the present invention according to claim 3, since the conductive pipe is a copper pipe, that is, the resonance reactor is constituted by a copper pipe, the copper pipe is In addition to good electrical characteristics (especially electrical conductivity) and economy, it also has excellent electrical characteristics as a resonant reactor because it has good coil winding formability when producing a coiled conductive pipe (resonant reactor). It is possible to provide a resonant booster circuit device that is easy to manufacture and inexpensive.

  Further, in the present invention according to claim 4, since a plurality of coaxial cables are inserted and disposed in the conductive pipe, a larger amount of power can be input through the plurality of coaxial cables. Thus, a higher voltage output can be generated on the output port side.

  A resonant booster circuit device according to an embodiment of the present invention will be described below with reference to FIGS.

  First, FIG. 1 shows the overall configuration of a resonant booster circuit device 1 according to an embodiment of the present invention. As shown in FIG. 1, the resonance type booster circuit device 1 includes a cavity box 4 that houses a resonance reactor (resonance coil) 2 and a variable capacitor 3 coupled (connected in parallel) to the resonance reactor 2. A parallel resonant circuit 5 is constituted by the resonant reactor 2 and the variable capacitor 3. The cavity box 4 is grounded.

  As shown in FIGS. 1 and 2, the above-described resonant reactor 2 is formed by winding a copper pipe P in a coil shape a plurality of times (n times), and the coil-shaped copper made up of the resonant reactor 2. A coaxial cable 8 formed by coaxially arranging the inner conductor 6 and the outer conductor 7 is inserted in the center position of the hollow portion of the pipe P. The inner conductor 6 and the outer conductor 7 of the coaxial cable 8 are insulated from each other by a dielectric layer 9 (see FIG. 2), and the resonant reactor 2 made of the copper pipe P and the coaxial cable 8 are coaxial with each other by a support material outside the figure. It is fixed with the shape arrangement relationship. Further, both end portions 8a and 8b of the coaxial cable 8 are disposed so as to penetrate both end openings of the copper pipe P, and are led out from the cavity box 4 to the outside thereof.

  Further, as shown in FIG. 2, the outer conductor 7 of the coaxial cable 8 is grounded on the one end 8a side, and the resonance reactor 2 composed of the copper pipe P and the outer conductor 7 of the coaxial cable 8 are connected to the other end 8b. Are connected to each other via a conducting wire 12. Further, a termination resistor R is connected between the inner conductor 6 and the outer conductor 7 on the other end portion 8b side of the coaxial cable 8, and a boosted voltage obtained from between the inner conductor 6 and the outer conductor 7 is output. A boosted voltage output unit 10 is provided.

As shown in FIGS. 1 and 2, the input port provided at the intermediate tap of the coiled copper pipe P constituting the resonant reactor 2 (specifically, the first winding end portion of the resonant reactor 2). The voltage V ₁ is applied to the unit 13 from the high frequency power source A, and the voltage V ₂ from the high frequency power source B is applied to the input port unit 14 provided at the end of the inner conductor 6 of the coaxial cable 7 on the input port unit 13 side. It is comprised so that it may be applied. On the other hand, the outer conductor 7 of the coaxial cable 8 and the one end 2a of the resonance reactor 2 are grounded.

The operation of the resonant booster circuit device 1 having such a configuration will be described as follows. First, in FIG. 2, an equivalent circuit viewed from the high frequency power source A (voltage V ₁ ) is as shown in FIG. 3, and an equivalent circuit viewed from the high frequency power source B (voltage V ₂ ) is as shown in FIG. The circuits shown in FIGS. 3 and 4 operate independently of each other. In this case, the input voltage V ₁ is applied to the input port unit 13 also winding end point 1st resonant reactor 2, a plurality of times (n times) wound in the resonant reactor 2 has an output port 15 the side of the (n-1) voltage _{V 1} is generated (see FIGS. 1, 2, 3 and 5). On the other hand, since the voltage V ₂ is applied to the inner conductor 6 of the coaxial cable 8, a high voltage of V ₃ = (n−1) V ₁ + V ₂ is output from the boosted voltage output unit 10 of the resonant booster circuit device 1. (See FIGS. 1 and 5). That is, a boosted high voltage having a voltage value of V ₃ = (n−1) V ₁ + V ₂ is generated at the output port unit 10 of the resonance type booster circuit device 1.

Therefore, according to the resonance type booster circuit device 1 according to the present embodiment, the value of the number n of turns of the resonance reactor 2 and the value of the input voltage V ₂ applied to the coaxial cable 8 are appropriately adjusted (controlled). Thus, a desired rectangular wave boost voltage (high voltage) V ₃ can be obtained arbitrarily. In the case of the resonance type booster circuit device 1, since the transformers 31, 32 and the like as shown in FIG. 8 are not employed, no stray capacitance is generated, and no current loss or voltage loss occurs. Further, the resonance type booster circuit device 1 has a simple structure in which a separate coaxial cable 8 is inserted and disposed in the resonance reactor 2, and therefore can be manufactured relatively easily and inexpensively. . Furthermore, it is possible to make it compact.

As mentioned above, although embodiment of this invention was described, this invention is not limited to these embodiment, Various deformation | transformation and change are possible based on the technical idea of this invention. For example, although so as to enter the voltages V ₁ to the first winding end portion of the conductive pipe P in the embodiment described above, it may be input to voltages V ₁ at a location other than the location . Incidentally, in this case, a step-up ratio is changed according to the input portion of the voltage V _1. Further, the pipe used to configure the resonant reactor 2 is not limited to the copper pipe P, and a pipe made of a conductive material other than copper may be used. Further, a plurality of coaxial cables 8 may be inserted and disposed in the hollow portion of the resonance reactor 2. In this case, since it is possible to input a larger amount of power with a plurality of coaxial cables 8, a higher boosted voltage can be obtained. Further, the present invention is not limited to the case of the parallel resonance circuit 5 but can be applied to the case of a series resonance circuit.

  The resonance type booster circuit device of the present invention can be used for all power supplies that require a high voltage and require a rectangular output waveform voltage and current waveform. In particular, it is useful as a power source for an electron beam that requires high power.

1 is a circuit diagram showing an overall configuration of a resonance type booster circuit device according to an embodiment of the present invention. It is a figure which shows the arrangement | positioning relationship of the resonance reactor and coaxial cable of the resonance type booster circuit apparatus of FIG. It is a diagram showing a high-frequency power supply A (voltage V ₁₎ seen from the equivalent circuit in FIG. It is a diagram showing a viewed from the equivalent circuit high-frequency power source B (voltage V ₂₎ in FIG. It is a figure for demonstrating the boost voltage obtained from the resonance type booster circuit apparatus of FIG. FIGS. 6A and 6B are diagrams for explaining boosting of an input voltage having a rectangular waveform, and FIG. 6A is a waveform diagram of an input voltage, and FIG. 6B is a waveform diagram of an output voltage (boosted voltage). . It is a circuit diagram which shows the structure of the conventional resonance type booster circuit apparatus. It is a figure which shows one means for making an output waveform into a rectangular wave shape in the resonance type booster circuit apparatus of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Resonant type booster circuit device 2 Resonant reactor 3 Variable capacitor 4 Cavity box 5 Parallel resonant circuit 6 Inner conductor 7 Outer conductor 8 Coaxial cable 10 Boosted voltage output unit 13 Input port unit 15 Output port unit 14 Output port unit A, B High frequency power supply P Copper pipe (resonance reactor)
R termination resistance

Claims (4)

  In a resonance type booster circuit device that obtains a boosted voltage from a resonance circuit comprising a resonance reactor and a capacitor connected to the resonance reactor, a conductive pipe that is wound in a coil shape is configured as the resonance reactor. In addition, a coaxial cable formed by coaxially arranging an inner conductor and an outer conductor is inserted in the center of the hollow portion of the conductive pipe, and a voltage is applied to an input port portion provided at one end of the conductive pipe. And a boosted voltage is obtained by applying a voltage to the input port portion of the inner conductor of the coaxial cable. The voltage V ₁ is applied to the input port portion provided at the end of the first winding of the conductive pipe, and the voltage V ₂ is applied to the input port portion of the inner conductor of the coaxial cable. from the output port of the cable (n-1) V 1 + V 2 ( where, n is the number of turns of the conductive pipe) resonant boosting of claim 1, characterized in that to obtain the boosted voltage Circuit device.   The resonance type booster circuit device according to claim 1 or 2, wherein the conductive pipe is a copper pipe. 4. The resonance type booster circuit device according to claim 1, wherein a plurality of coaxial cables are inserted and disposed in the conductive pipe. 5.

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