JP2005300961A - Multi-directional observation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multi-directional observation device capable of observing the same object to be observed from a plurality of directions with a simple constitution and performing the quick observation. <P>SOLUTION: In the multi-directional observation device, the same object S to be observed is simultaneously observed from a plurality of directions where optical path lengths are different from one another. The multi-directional observation device is provided with an image-forming optical system in which an image on the focal position on one optical path L<SB>1</SB>and images on the focal positions on the other optical paths L<SB>2</SB>, L<SB>4</SB>are formed on the same image-forming means and a focal position correction member 7 which allows air-equivalent lengths of the one optical path L<SB>1</SB>and the other optical paths L<SB>2</SB>, L<SB>4</SB>to accord with one another. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a multidirectional observation apparatus capable of observing the same observation object from a plurality of different directions.

Conventionally, as an observation apparatus for observing an observation object from the lateral direction, for example, there is a structure shown in Non-Patent Document 1. In this observation apparatus, an optical path from an imaging unit to an observation object is bent by a mirror, and the observation object is imaged from an oblique direction. By rotating the mirror around the optical axis toward the image pickup means, the observation object can be observed from all directions of 360 ° without tilting the workpiece.
"Microscope / Digital microscope: OMRON control equipment", [online], [Search April 6, 2004], Internet <URL: http://www.fa.omron.co.jp/sensing/selection/eizou /vc-hr/tokucho.html>

  However, in the observation apparatus having such a structure, after focusing on the observation object, an image over the entire circumference can be easily captured only by the rotation of the mirror, but the optical axis toward the imaging means is blocked by the mirror. Therefore, the imaging unit cannot directly image the observation object. For this reason, focusing is performed using only an image from an oblique direction. In this case, when the mirror is rotated, the focus is often limited to one position, and the mirror is rotated. Therefore, there is an annoyance that it is necessary to perform focusing each time observation is performed from different directions. In order to avoid this, it is necessary to perform the focusing operation on the observation object using another means, and there is a disadvantage that the apparatus becomes complicated.

  The present invention has been made in view of the above-described circumstances, and an object thereof is to provide a multidirectional observation apparatus that can observe the same observation object from a plurality of directions with a simple configuration.

In order to achieve the above object, the present invention provides the following means.
The present invention is an apparatus for simultaneously observing the same object to be observed from a plurality of directions having different optical path lengths, in which an image at a focal position on one optical path and an image at a focal position on another optical path are the same imaging means. A multidirectional observation apparatus is provided that includes an imaging optical system that forms an image on the optical path and a focal position correction member that matches the air-converted lengths of the one optical path and the other optical path.

  According to the present invention, the air conversion lengths of the one optical path and the other optical path are made to coincide with each other by the operation of the focal position correction member, so that the image of the focal position on the one optical path and the focal position on the other optical path The image is simultaneously formed on the same imaging means by the imaging optical system. Therefore, the same observation object can be simultaneously observed from a plurality of directions with a simple configuration.

  In the above invention, the focal position correcting member is preferably a deflecting member that deflects another optical path in a direction different from the one optical path with respect to the one optical path. Since the deflecting member that changes the observation direction also serves as the focal position correcting member, the above-described operation can be achieved with a simple configuration by reducing the number of components.

  Moreover, in the said invention, it is preferable that the said focus position correction member consists of prisms. By transmitting the prism, the air conversion length can be easily matched by the difference in refractive index from air.

  Moreover, in the said invention, it is preferable that the said focus position correction member is divided | segmented into plurality, and at least 1 is provided so that insertion or removal is possible. The air conversion length can be changed by inserting / removing at least one of the focal position correcting members. Therefore, even when observing observation objects with different dimensions, the same observation object is simultaneously formed on the same imaging means from a plurality of directions having different optical path lengths by simply inserting and removing the focal position correction member. It becomes possible.

  In the above invention, the first focus position adjusting means for displacing the observation object, the imaging optical system, or the imaging means in a direction along the one optical path, orthogonal to the one optical path, and It is preferable to include a second focal position adjusting unit that displaces the focal position correcting member or the observation object in a direction along a plane including the other optical path.

  According to this invention, first, by activating the first focal position adjusting means, the observation object, the imaging optical system or the imaging means is displaced in a direction along one optical path, and the focal position on the one optical path is obtained. These images are formed on the imaging means. Next, the second focal position adjusting means is operated to displace the focal position correcting member or the observation object in a direction orthogonal to the one optical path, thereby forming an image of the focal position on the one optical path on the imaging means. The image of the focal position on the other optical path can be formed on the same imaging means while being left.

  Further, the present invention is an apparatus for observing the same object to be observed from a plurality of directions having different optical path lengths, and the same image of a focal position image on one optical path and an image of a focal position on another optical path. Determined based on the optical path length difference between the one optical path and the other optical path from the imaging optical system to be imaged on the means and the image of the focal position on the one optical path being imaged on the imaging means A multi-directional observation apparatus comprising: a focus position adjusting unit that shifts an imaging state of an image on the one optical path by a predetermined distance and forms an image of a focal position on another optical path on an imaging unit To do.

  According to this invention, a plurality of optical paths having different optical path lengths are imaged on the same imaging means by the operation of the imaging optical system. In this case, since the optical path length is different between one optical path and another optical path, when an image of the focal position on one optical path is formed on the imaging means, the image of the focal position on the other optical path is transferred to the imaging means. An image is taken without being imaged. Therefore, by operating the focal position adjusting means, the imaging state of the image on one optical path is shifted by a predetermined distance determined based on the difference in optical path length, and the image of the focal position on the other optical path is captured. The means can be imaged. Thereby, the same observation object can be observed from a plurality of directions having different optical path lengths by the same imaging means.

  ADVANTAGE OF THE INVENTION According to this invention, the image at the time of observing the same observation target object from several different directions can be easily acquired with the same imaging means. As a result, when the same observation object is observed from a plurality of directions, the focus position can be easily adjusted. There is an effect that images of the focal positions on all the optical paths can be clearly captured.

A multidirectional observation apparatus according to an embodiment of the present invention will be described below with reference to FIGS.
Multidirectional observation apparatus 1 according to this embodiment, as shown in FIG. 1, a device for measuring the length of the terminal S ₁ provided on the back surface of the IC chip S is an observation object, the light source 2, a half mirror 3 that deflects light from the light source 2, a first imaging optical system 4 that focuses the light deflected by the half mirror 3 on the back surface of the IC chip S, and the back surface of the IC chip S An image pickup device (image pickup means) 5 such as a CCD (Charge Coupled Device) that picks up the light reflected at the first imaging optical system 4 and the half mirror 3, and the image pickup device 5. The second imaging optical system 6 that is disposed between the half mirror 3 and forms an image of the light transmitted through the half mirror 3 on the imaging surface of the imaging device 5 and the back surface of the IC chip S are spaced apart from each other. The focal position correction member 7 is provided. In the figure, reference numeral 8 denotes a monitor for displaying a captured image, and reference numeral 9 denotes a stage on which the IC chip S is mounted.

  As shown in FIG. 2A, the focal position correction member 7 includes four pieces arranged along each side of the IC chip S with a space slightly larger than the outer dimension of the square IC chip S. It is constituted by a prism (hereinafter referred to as a prism 7). As shown in FIG. 2B, each prism 7 includes an inclined surface 7a that is inclined downward in a direction gradually away from the center at the lower part of the side surfaces facing each other. The inclined surface 7a has an inclination angle of 60 ° with respect to the back surface of the IC chip S arranged horizontally, and an angle of 60 ° with respect to the optical path L1 orthogonal to the back surface of the IC chip S. The terminal S1 of the IC chip S can be observed from the direction made.

In other words, when the horizontally disposed IC chip S is viewed from above, the entire IC chip S can be seen in the space surrounded by the four prisms 7 as shown in FIG. On the upper end surfaces of the four prisms 7, the IC chip S viewed from obliquely above by 30 ° can be seen.
That is, as shown in FIG. 2 (b), a first optical path L ₁ viewed from directly vertically above the IC chip S, second to view IC chip S from obliquely above four directions through the prism 7 5 Optical paths L _{2 to} L ₅ are formed. In FIG. 2B, optical paths L ₁ , L ₂ , and L ₄ are shown for simplicity of explanation, and optical paths L ₃ and L ₅ are omitted. The first optical path _{L 1} and second to fifth optical path _L 2 ~L _5, have different optical path lengths.

In the present embodiment, the second to fifth optical paths L _{2 to} L ₅ include an air optical path and an optical path in the prism 7. For example, as shown in FIG. 3, the air optical path length B and the prism 7 are provided. And the optical path length C ₁ + C ₂ + C ₃ is added. When the refractive index of the prism 7 is n, the air equivalent optical path length A ₂ of the _{second to fifth} optical paths L _{2 to} L ₅ is A ₂ = B + (C ₁ + C ₂ + C ₃ ) / n. In the present embodiment, the refractive index n of the prism 7 is selected so that A ₁ = A ₂ where A ₁ is the optical path length of the _first optical path L ₁ . As a result, the first optical path L ₁ and the other optical paths L _{2 to} L ₅ coincide with each other in terms of the air-converted optical path length, so that the focal position on each of the optical paths L _{1 to} L ₅ is set to each of the IC chips S. By matching with the observation position, the image of the IC chip S that is the same observation object on all the optical paths L _{1 to} L ₅ can be simultaneously formed on the imaging surface of the imaging device 5. .

The operation of the multidirectional observation apparatus 1 according to the present embodiment configured as described above will be described below.
In order to observe the back surface of the IC chip S and the length of the terminal S1 erected on the back surface using the multi-directional observation apparatus 1 according to the present embodiment, first, the IC chip S with the back surface facing up. Is placed on a horizontal stage 9, and the multidirectional observation apparatus 1 of the present embodiment is brought close to the stage 9 from above.

The light source 2 is operated by arranging the prism 7 close to the IC chip S and adjusting the position so that the entire IC chip S can be seen from above through the space between the four prisms 7. The light emitted from the light source 2 is reflected by the half mirror 3 to be condensed on the back surface of the IC chip S via the first imaging lens 4 and passes through the space between the prisms 7. The IC chip S is irradiated through the optical path L ₁ and the second to fifth optical paths L _{2 to} L ₅ passing through the prism 7.

The light reflected by the IC chip S passes through the first imaging lens 4 and returns, passes through the half mirror 3, and is condensed on the imaging surface of the imaging device 5 by the second imaging lens 6. become.
The first optical path L _{1 for} observing the back surface of the IC chip S from directly above and the second to fifth optical paths L _{2 to} L ₅ for observing the legs of the IC chip S from obliquely above are the air-converted optical path lengths. Therefore, the multidirectional observation device 1 can be arranged at a position where all the focus on the _first to fifth optical paths L _{1 to} L ₅ are simultaneously matched.

In this case, according to the multidirectional observation apparatus 1 according to the present embodiment, it is possible to capture images of the focal positions on all the optical paths L _{1 to} L ₅ having different optical path lengths with the same imaging element 5. Therefore, firstly, to match the focal position in the first optical path L ₁ on the rear surface of the IC chip S, then leave the first focal position in the optical path L ₁ of maintaining the state of being matched to the rear surface of the IC chip S, other The focal positions in the optical paths L _{2 to} L ₅ can be made to coincide with the legs of the IC chip S. Thus, it is possible to easily imaged all the images of the focal position of the optical path L ₁ ~L ₅ simultaneously to the imaging device 5.

Further, in this case, it can be carried without using any special device focusing position operation in the first optical path L _1. Therefore, a clear image obtained by viewing the same IC chip S from a plurality of directions can be acquired easily and quickly without replacing the apparatus. Moreover, since the image of the focus position on all the optical paths L _{1 to} L ₅ is picked up by the same image pickup device 5, the configuration of the apparatus can be simplified and the apparatus can be made compact.

In the above embodiment, the four prisms 7 are provided as the focus position adjusting member. However, the number is not limited to the number, and the number may be arbitrarily set according to the observation location.
In addition, although the case where the four prisms 7 having the same shape is used has been described, instead of observing the observation target portions f ₁ and f ₂ at different positions of the same observation target S, the four prisms 7 are used. As shown in FIG. 4, prisms 7 ′ and 7 ″ having different shapes may be employed.
As shown in FIG. 5, when the observation object S has a non-square shape, for example, a rectangular shape, the lengths of the four prisms 7 may be made different accordingly.

  Further, when it is desired to observe a plurality of observation objects S and S ′ having different shapes, as shown in FIG. 6, in order to compensate for the increase and decrease in the optical path length caused by changing the observation objects S and S ′. The optical path length compensation member 10 may be provided so as to be removable. In the example shown in FIG. 6, another prism 10 is inserted into and removed from the prism 7 of the first embodiment. By adjusting the thickness and refractive index of the prism 10, the air-converted optical path length when the prism 10 is inserted can be arbitrarily adjusted.

Next, a multidirectional observation apparatus 11 according to a second embodiment of the present invention will be described below with reference to FIGS.
In the description of the present embodiment, the same reference numerals are given to portions having the same configuration as the multidirectional observation apparatus 1 according to the first embodiment described above, and the description will be simplified.

  As shown in FIG. 7, the multidirectional observation apparatus 11 according to the present embodiment has an optical system moving mechanism (a first moving mechanism) that displaces the first imaging optical system 4 in the optical axis direction (that is, the vertical direction). (Focus position adjusting mechanism) 12 and an object moving mechanism (second focus position adjusting mechanism) 13 for displacing the stage 9 on which the IC chip S, which is an observation object, is mounted in two horizontal directions (X and Y directions). I have. Further, a control device 14 is provided that receives and processes the image of the IC chip S picked up by the image pickup device 5 and controls the optical system moving mechanism 12 and the object moving mechanism 13. Other configurations are the same as those of the multidirectional observation apparatus 1 according to the first embodiment.

The control device 14 is configured to first operate the optical system moving mechanism 12 and then operate the object moving mechanism 13 based on the image captured by the image sensor 5.
Hereinafter, an example of the operation procedure of the control device 14 will be described with reference to FIG.
FIG. 8 shows an image captured on the imaging surface of the image sensor 5. It is assumed that the imaging surface is divided into a central region P and surrounding regions Q _{1 to} Q ₄ as indicated by chain lines in FIG. 8 for convenience of image processing.

As shown in FIG. 8 (a), and the center position O ₂ of the center position O ₁ and the imaging device 5 of the IC chip S are shifted, and the imaging position of the first imaging optical system 4 also IC A case where the focal positions on all the optical paths L _{1 to} L ₅ are made to coincide with the back surface of the IC chip S from a state away from the back surface of the chip S will be described.
When an image is captured by the image capturing device 5, the control unit 14 first, and the contrast ratio by processing image G ₁ region P near the center of the imaging surface of the imaging device 5 shown in FIG. 8 (a) calculate. Then, the calculation of the contrast ratio of the region P is repeated while sequentially operating the optical system moving mechanism 12, and the optical system moving mechanism 12 is stopped at a position where the contrast ratio becomes the maximum.

Thus, when the contrast ratio of the image becomes the largest, as shown in FIG. 8 (b), the image G ₁ region P becomes clear image in focus. An image G _{1 in the} region P shows an image of the _first optical path L ₁ that passes through the space between the prisms 7 and observes the entire IC chip S from directly above. Therefore, the result, the first focus position of the optical path L ₁ is caused to coincide with the rear surface of the IC chip S.
On the other hand, since the still displaced from the center position O ₂ of the center position O ₁ and the imaging device 5 of the IC chip S, an image of the surrounding area Q ₁ to Q ₄ are not in focus.

Next, the control unit processes the image G ₁ of the in focus regions P, and detecting the outer edge of the IC chip S. Thus, with respect to the center position O ₁ position O ₂ is the IC chip center of the imaging element 5, since both upon how deviation is the is known, the control unit 14, the object moves in a direction in which the deviation is reduced The mechanism 13 is operated to displace the stage 9 in the horizontal direction.

In the example shown in FIG. 8B, since the center position O ₂ of the image sensor 5 is shifted in the lower left direction with respect to the center position O ₁ of the IC chip, first the stage 9 is indicated by an arrow in the X direction. The X coordinate of the center position O ₂ of the image sensor 5 and the X coordinate of the center position O ₁ of the IC chip S are made to coincide with each other. The control device 14 may displace the stage 9 by the amount of movement determined from the outer edge of the IC chip S detected in the above, but the contrast ratio of _one of the regions Q ₁ and Q ₃ is similar to the above. The displacement of the stage 9 may be stopped at the point where it becomes the largest, or the point where the contrast ratios of these regions Q ₁ and Q ₃ match. Thereby, in addition to the image G ₁ in the region P, the images G ₂ and G ₄ in the regions Q ₁ and Q ₃ , that is, the focal positions on the _second and _fourth optical paths L ₂ and L ₄ coincide with the IC chip S. Thus, a clear image can be obtained in which the foot S1 provided on the back surface of the IC chip S is viewed obliquely from above.

Similarly, as shown in FIG. 8C, the stage 9 is moved in the Y direction as indicated by an arrow, and the Y coordinate of the center position O ₂ of the image sensor 5 and the center position O _{1 of the} IC chip S are displayed. Are matched with the Y coordinate. Similarly, the control device 14 may displace the stage 9 by the amount of movement determined from the outer edge of the IC chip S, but the contrast ratio of any one of the regions Q ₂ and Q ₄ is the largest as described above. Alternatively, the displacement of the stage 9 may be stopped at a point where the contrast ratios of the regions Q ₂ and Q ₄ coincide. Accordingly, as shown in FIG. 8D, the images G _{1 to} G _{5 of} all the regions P and Q _{1 to} Q ₄ , that is, the focal points on all the _{first to fifth} optical paths L _{1 to} L _5. The position is matched with the IC chip S, and a clear image obtained by viewing the back surface of the IC chip S from a plurality of directions having different optical path lengths can be obtained.

According to the multi-directional observation apparatus 11 according to the present embodiment, the same imaging element 5 is used to display the same observation object S from a plurality of directions having different optical path lengths, similarly to the multi-directional observation apparatus 1 according to the first embodiment. Can simultaneously capture images.
Further, first, the image the first image of the focal position on the optical path L ₁ to the image pickup element 5, from the second based on the obtained image of the focal position of the fifth optical path L ₂ ~L ₅ image Is imaged on the image sensor 5, it is possible to automatically acquire clear images of the same observation object S viewed from a plurality of directions having different optical path lengths.

In the present embodiment, the case where the focus positions in the X and Y directions are separately adjusted has been described. However, instead of this, the focus position can be adjusted simultaneously in the X and Y directions.
Further, by detecting the outer edge of the IC chip S, it has been detected the deviation direction between the center position O ₁ of the center position O ₂ and the IC chip S of the image pickup device 5, instead of this, with the rear surface of the IC chip S The detected symbol or pattern may be detected, and the amount of deviation may be corrected based on the detected symbol or pattern.
Moreover, although the case where the first imaging optical system 4 is moved in the optical axis direction has been described, instead of this, the stage 9 or the imaging device 5 on which the observation object S is placed is displaced in the vertical direction. Also good.

Next, a multidirectional observation apparatus 20 according to a third embodiment of the present invention will be described below with reference to FIGS. 9 and 10.
In the description of the present embodiment, the same reference numerals are given to portions having the same configuration as the multidirectional observation apparatus 11 according to the second embodiment described above, and the description will be simplified.

  The multidirectional observation apparatus 20 according to the present embodiment is different from the multidirectional observation apparatus 11 according to the second embodiment in that a mirror 21 is employed instead of the focal position adjusting member 7. The multidirectional observation apparatus 20 according to the present embodiment images the same observation object S on the same imaging element 5 from a plurality of observation directions without matching the air-converted optical path lengths of a plurality of optical paths having different optical path lengths. Device.

As shown in FIG. 9, the multidirectional observation apparatus 20 according to the present embodiment includes four mirrors 21 instead of the prism 7 in the first and second embodiments. Through the space formed between the mirrors 21, the first optical path L ₁ that allows direct observation of the IC chip S from directly above is provided, and the second to second refracted by the mirror 21 to observe the IC chip S obliquely from above. Fifth optical paths L _{2 to} L ₅ are provided.

In the present embodiment, the difference between the optical path length of the first optical path L _{1 and} the optical path lengths of the second to fifth optical paths L _{2 to} L ₅ is stored as a known value in the control device 14. . Since the air-converted optical path lengths of the _first to fifth optical paths L _{1 to} L ₅ are not matched, the images G _{1 to} G ₅ on the plurality of optical paths L _{1 to} L ₅ captured by the image sensor ₅ are simultaneously focused positions. However, when the image of the focal position on the _first optical path L1 is formed on the imaging surface of the image sensor 5, the optical path length difference is stored in the control device 14 in advance. It is known that how much the focal position is shifted in the vertical direction can form the image of the focal position on the _{second to} fifth optical paths L _{2 to} L ₅ on the imaging surface of the image sensor 5. Become.

Therefore, in the present embodiment, the control device 14 performs control as shown in FIG.
First, as shown in FIG. 10 (a), and the center position O ₂ of the center position O ₁ and the imaging device 5 of the IC chip S are shifted, and the imaging position of the first imaging optical system 4 A case where the focal positions on all of the optical paths L _{1 to} L ₅ are made to coincide with the back surface of the IC chip S from a state where it is away from the back surface of the IC chip S will be described.
When an image is captured by the image capturing device 5, the control unit 14 first, and the contrast ratio by processing image G ₁ region P near the center of the imaging surface of the imaging device 5 shown in FIG. 10 (a) calculate. Then, while repeating successively actuating the optical system moving mechanism 12 the contrast ratio calculation of the image G ₁ region P, and stops the optical system moving mechanism 12 to a position where the contrast ratio is maximized.

Thus, when the contrast ratio of the image becomes the largest, as shown in FIG. 10 (b), the image G ₁ region P becomes clear image in focus. An image G _{1 in the} region P shows an image of the _first optical path L ₁ that passes through the space between the mirrors 21 and observes the entire IC chip S from directly above. Therefore, the result, the first focus position of the optical path L ₁ is caused to coincide with the rear surface of the IC chip S.

Next, the control unit 14 processes the image G ₁ of the in focus regions P, and detecting the outer edge of the IC chip S. Thereby, the control device 14 calculates how much the center position O ₂ of the image sensor 5 is shifted from the center position O ₁ of the IC chip S. Further, as described above, the control device 14 stores the difference between the optical path length of the first optical path L _{1 and} the optical path lengths of the second to fifth optical paths L _{2 to} L _5. The moving mechanism 12 is operated to displace the first imaging optical system 4 so that the focal positions on the _{second to} fifth optical paths L _{2 to} L ₅ can be imaged on the image sensor 5. As a result, as shown in FIG. 10C, the images G _{1 to} G ₅ on the image sensor 5 are in a state in which all the images are out of focus.

In this state, the stage 9 is displaced in the horizontal direction by operating the object moving mechanism 13 by the amount of deviation between the center position O ₂ of the image sensor 5 calculated as described above and the center position O ₁ of the IC chip S.
In the example shown in FIG. 10 (c), moved so that the center position O ₂ of the imaging element 5 so is shifted in the lower left direction with respect to the center position of the IC chip S, is first shown by the arrows the stage 9 in the X direction Thus, the X coordinate of the center position O ₂ of the image sensor 5 and the X coordinate of the center position O ₁ of the IC chip S are matched. As a result, the images of the regions Q ₁ and Q ₃ , that is, the focal positions on the _second and _fourth optical paths L ₂ and L ₄ are matched with the IC chip S, and the foot S provided on the back surface of the IC chip S. A clear image can be obtained when ₁ is viewed obliquely from above.

Similarly, as shown in FIG. 10D, the stage 9 is moved in the Y direction as indicated by the arrow, and the Y coordinate of the center position O ₂ of the image sensor 5 and the center position O _{1 of the} IC chip S are displayed. Are matched with the Y coordinate. As a result, as shown in FIG. 10E, the images of the surrounding areas Q _{1 to} Q ₄ , that is, the focal positions on the _{second to fifth} optical paths L _{2 to} L ₅ are matched with the IC chip S. A clear image obtained by viewing the back surface of the IC chip S from a plurality of directions with different optical path lengths can be obtained.

That is, according to the multi-directional observation device 20 according to the present embodiment, it is not possible to focus at the same time the image _G 2 ~G ₅ images _{G 1} and the region _Q 1 to Q ₄ of the region P, the region P of a clear image G ₂ ~G ₅ which focused clear images in focus G ₁ and region Q ₁ to Q _4, can each be imaged by the same imaging device 5.

In each of the above embodiments, the IC chip S has been described as an example of the observation object. However, the present invention is not limited to this, and any observation object that is desired to be observed from different directions is observed. It may be applied to
In addition, although an example in which focusing is performed using a contrast ratio has been described, instead of this, other optical focusing points such as a method of projecting aiming light and detecting focusing from a positional deviation of the reflected light, etc. A method may be used.

It is a figure which shows typically the whole structure of the multi-directional observation apparatus which concerns on one Embodiment of this invention. It is (a) top view and (b) side view which show the focus position adjustment member of the multi-directional observation apparatus of FIG. It is a figure explaining the air conversion long optical path length by the focus position adjustment member of the multi-directional observation apparatus of FIG. It is a side view which shows the modification of the focus position adjustment member of the multi-directional observation apparatus of FIG. It is a side view which shows the other modification of the focus position adjustment member of the multi-directional observation apparatus of FIG. It is a side view which shows the other modification of the focus position adjustment member of the multi-directional observation apparatus of FIG. It is a figure which shows typically the whole structure of the multi-directional observation apparatus which concerns on the 2nd Embodiment of this invention. It is explanatory drawing which shows the operation | movement procedure of the multi-directional observation apparatus of FIG. It is a figure which shows typically the whole structure of the multi-directional observation apparatus which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the operation | movement procedure of the multi-directional observation apparatus of FIG.

Explanation of symbols

S IC chip (observation object)
L ₁ first optical path (one optical path)
L _{2 to} L _{5 second to fifth} optical paths (other optical paths)
1, 11, 20 Multi-directional observation device 4 First imaging optical system (imaging optical system)
5 Imaging means 6 Second imaging optical system (imaging optical system)
7 Prism (focal position correction member, deflection member)
10 Prism (focal position correction member)
12 Optical system moving mechanism (first focus position adjusting means)
13 Object moving mechanism (second focal position adjusting means)

Claims (6)

An apparatus for simultaneously observing the same observation object from a plurality of directions with different optical path lengths,
An imaging optical system that forms an image of a focal position on one optical path and an image of a focal position on another optical path on the same imaging means;
A multidirectional observation apparatus comprising: a focal position correction member that matches the air-converted lengths of the one optical path and the other optical path.   The multi-directional observation apparatus according to claim 1, wherein the focal position correction member is a deflection member that deflects another optical path with respect to one optical path in a direction different from the one optical path.   The multidirectional observation apparatus according to claim 1, wherein the focal position correction member is a prism.   The multi-directional observation apparatus according to claim 3, wherein the focal position correction member is divided into a plurality of parts, and at least one of the focal position correction members is detachable. First focus position adjusting means for displacing the observation object, the imaging optical system or the imaging means in a direction along the one optical path;
The second focal position adjusting means for displacing the focal position correcting member or the observation object in a direction perpendicular to the one optical path and along a plane including the other optical path. 5. The multidirectional observation apparatus according to any one of 4 above. An apparatus for observing the same observation object from a plurality of directions with different optical path lengths,
An imaging optical system that forms an image of a focal position on one optical path and an image of a focal position on another optical path on the same imaging means;
From the state in which the image of the focal position on the one optical path is formed on the imaging means, a predetermined distance determined on the basis of the optical path length difference between the one optical path and the other optical path is on the one optical path. A multi-directional observation apparatus comprising: a focus position adjusting unit that shifts an imaging state of the image of the image to form an image of a focal position on another optical path on an imaging unit.

Images