JP2005299773A5 - - Google Patents

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Publication number
JP2005299773A5
JP2005299773A5 JP2004115461A JP2004115461A JP2005299773A5 JP 2005299773 A5 JP2005299773 A5 JP 2005299773A5 JP 2004115461 A JP2004115461 A JP 2004115461A JP 2004115461 A JP2004115461 A JP 2004115461A JP 2005299773 A5 JP2005299773 A5 JP 2005299773A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004115461A
Other languages
Japanese (ja)
Other versions
JP2005299773A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2004115461A priority Critical patent/JP2005299773A/en
Priority claimed from JP2004115461A external-priority patent/JP2005299773A/en
Publication of JP2005299773A publication Critical patent/JP2005299773A/en
Publication of JP2005299773A5 publication Critical patent/JP2005299773A5/ja
Pending legal-status Critical Current

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JP2004115461A 2004-04-09 2004-04-09 Feed screw unit and stage device Pending JP2005299773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004115461A JP2005299773A (en) 2004-04-09 2004-04-09 Feed screw unit and stage device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004115461A JP2005299773A (en) 2004-04-09 2004-04-09 Feed screw unit and stage device

Publications (2)

Publication Number Publication Date
JP2005299773A JP2005299773A (en) 2005-10-27
JP2005299773A5 true JP2005299773A5 (en) 2007-05-24

Family

ID=35331552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004115461A Pending JP2005299773A (en) 2004-04-09 2004-04-09 Feed screw unit and stage device

Country Status (1)

Country Link
JP (1) JP2005299773A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5582002B2 (en) * 2010-12-03 2014-09-03 日本精工株式会社 Coarse / fine positioning device
CN102175450A (en) * 2010-12-30 2011-09-07 大连高金数控集团有限公司 Device for detecting comprehensive performance of high-speed precision ball screw pair
CN102840980A (en) * 2012-09-06 2012-12-26 南京理工大学 Comprehensive accuracy and performance testing device of rolling linear guide pair

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263765A (en) * 1984-06-13 1985-12-27 Hiroshi Teramachi Transfer device using ball screw
JPS62159853A (en) * 1986-01-09 1987-07-15 Hiroshi Teramachi Ball screw unit
JPS62258258A (en) * 1986-05-02 1987-11-10 Chugoku Kiko:Kk Differential linear motion generating mechamism
JPH0728444Y2 (en) * 1989-03-03 1995-06-28 日本精工株式会社 Feed unit device
JP5031957B2 (en) * 2001-08-30 2012-09-26 Thk株式会社 Linear actuator
JP2003214518A (en) * 2002-01-24 2003-07-30 Ryoei Engineering Kk Electric speed change cylinder
JP4159309B2 (en) * 2002-05-13 2008-10-01 シネティックソーティング株式会社 Sorting device having divertor and diverter drive control method

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