JP2005296737A - Beat plate - Google Patents

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JP2005296737A
JP2005296737A JP2004113623A JP2004113623A JP2005296737A JP 2005296737 A JP2005296737 A JP 2005296737A JP 2004113623 A JP2004113623 A JP 2004113623A JP 2004113623 A JP2004113623 A JP 2004113623A JP 2005296737 A JP2005296737 A JP 2005296737A
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plate
beat
porous
vibrator
surface
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Shinichiro Osumi
Akira Shinpo
真一郎 大住
明 新保
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Mikuni Corp
株式会社ミクニ
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Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive beat plate usable in spraying of corrosive liquid.
SOLUTION: This beat plate consists of a vibrator and a porous plate connected with the vibrator, and the porous plate is composed of a porous nickel plate and an amorphous coating film formed so as to cover the surface of the nickel plate and partially containing a diamond structure. The vibrator is preferably a piezo-vibrator. The beat plate is useful as a spraying means for electrolytic water, cosmetics and chemicals.
COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、ビートプレートに関する。 The present invention relates to a beat plate. 更に詳細には、本発明はスキンケアに有効な電解水、化粧水、その他の化粧品、薬剤等の噴霧手段に有用なビートプレートに関するものである。 More particularly, the present invention is effective electrolytic water skin care, lotion, other cosmetic relates useful beat plates spraying means of the drug or the like.

スキンケア等に有効な電解質水溶液を電解し、陽極側で電解生成されるpHの低い陽極電解水(酸性水)を殺菌や消毒に利用する技術は良く知られている(特許文献1)。 Electrolytically effective electrolyte solution to skin care and the like, techniques utilizing low anodic electrolytic water with pH being electrolyzed at the anode side (acidic water) for sterilization and disinfection are well known (Patent Document 1). また、陰極電解水(アルカリ水)を飲用等に利用する技術も知られている(特許文献2)。 The cathode electrolytic water (alkaline water) is also known art to use for drinking and the like (Patent Document 2).

陽極側で生成する陽極電解水には次亜塩素酸が含まれている。 The anode electrolyzed water produced in the anode side contains hypochlorous acid. 次亜塩素酸には強力な酸化作用と塩素化作用があるので、陽極電解水は殺菌や消毒に利用できる。 Since the hypochlorite has strong oxidizing action and chlorinated effect, anode electrolyzed water can be used for sterilization or disinfection. この様な利用方法は医療機関等で普及している。 Such usage is popular in medical institutions. また陽極電解水中に微量に含まれるオゾンや溶存酸素は肉芽生成促進作用を有することから、外科治療の補助としての利用も研究されている。 The ozone and dissolved oxygen contained in a trace amount in the anodic electrolysis water since it has a granulation product promoting action, use has also been studied as an adjunct for surgical treatment.

電解水を治療等に使用する場合、通常、電解水を噴霧装置により患部に噴霧する手法が採られる。 When using the electrolytic water treatment or the like, usually a technique of spraying the affected area electrolytic water by spray device is employed. 液体の噴霧装置には、例えば圧電振動子に振動板を固着した超音波発生素子を用いたものが提案されている(特許文献3)。 A spray device for liquids, for example, those using an ultrasonic generating element fixed to the vibrating plate in the piezoelectric vibrator has been proposed (Patent Document 3). しかしながら、この提案の噴霧装置は、振動板がニッケル金属で構成されているため、陽極電解水のような腐蝕性液体により振動板が腐食を受ける。 However, the spray device of this proposal, the vibration plate is composed of nickel metal, the diaphragm is subjected to corrosion by corrosive liquid such as the anode electrolyzed water. 従って、この提案の噴霧装置を陽極電解水等の腐食性液体の噴霧用に用いると、振動板が腐食される。 Therefore, the use of spray device of this proposal for spraying corrosive liquid such as anodic electrolysis of water, the vibration plate is corroded. その結果、噴霧装置の噴霧性能がすぐに低下してしまう。 As a result, the spray performance of the spray apparatus becomes immediately reduced. また、治療に用いる陽極電解水中にニッケル金属が混入すると、金属アレルギー症が発症することが危惧される。 Further, the nickel metal is mixed into the anode electrolyzed water to be used in the treatment, it is feared that the metal allergy develops. このため、この提案の噴霧装置は陽極電解水の噴霧には使用できない。 Thus, spraying apparatus of this proposal can not be used for spraying the anode electrolyzed water.

上記の問題を解決するため陽極電解水の噴霧装置の振動板には、陽極電解水のような酸性水でも腐蝕しない白金製の多孔板が使用される。 The diaphragm of the spray apparatus of the anode electrolyzed water to solve the above problems, platinum porous plate, not corrosion is used in acidic water, such as anode electrolyzed water. しかしながら、白金は極めて高価な金属であるため、白金製の振動板を用いた噴霧装置は製造コストが高くなる問題がある。 However, platinum is because it is a very expensive metal, spray devices using a platinum diaphragm there is a problem that manufacturing cost becomes high.
特開平11−90442号公報(特許請求の範囲) JP-11-90442 discloses (claims) 特開2001−347269号公報(段落番号0004) JP 2001-347269 JP (paragraph number 0004) 特開平4−371273号公報(特許請求の範囲) JP-4-371273 discloses (claims)

本発明は上記事情に鑑みなされたもので、その目的とするところは、電解水のような腐食性の液体、化粧品、薬剤のような多少粘性の高い液体やエマルジョン等の噴霧に用いることができ、且つ、安価な噴霧装置に好適なビートプレートを提供することにある。 The present invention has been made in view of the above circumstances, it is an object of corrosive liquids such as electrolytic water, cosmetics, it can be used for some spraying high such as a liquid or emulsion viscosity, such as a drug and to provide a suitable beat plates inexpensive spraying device.

上記目的を達成する本発明は、以下に記載するものである。 The present invention to achieve the above object, is as described below.

〔1〕 振動子と前記振動子に連結された多孔板とからなるビートプレートであって、前記多孔板が多孔ニッケル板と前記多孔ニッケル板の表面を被覆して形成されたダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜とからなることを特徴とするビートプレート。 [1] a beat plate of said a perforated plate which is connected to the vibrator and the vibrator, wherein the perforated plate perforated nickel plate and the porous nickel surface part of the diamond structure formed by covering the plate beat plate characterized by comprising the amorphous film consisting inclusive carbon and hydrogen.

〔2〕 振動子がピエゾ振動子である〔1〕に記載のビートプレート。 [2] beat plate according to vibrator is piezoelectric vibrator (1).

〔3〕 多孔板が孔径5〜50μmの細孔を有する〔1〕又は〔2〕に記載のビートプレート。 [3] beat plate according to the perforated plate has pores having a pore size of 5~50μm [1] or [2].

〔4〕 アモルファス被膜が膜厚0.5〜5.0μmである〔1〕乃至〔3〕の何れか1に記載のビートプレート。 [4] beats plate according to any one of the amorphous film is the film thickness 0.5~5.0μm [1] to [3].

〔5〕 〔1〕に記載のビートプレートを噴霧手段に用いた噴霧器。 [5] sprayer used for spraying means beat plate according to [1].

本発明のビートプレートは、多孔ニッケル板とその表面を被覆して形成されたダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜とからなる。 Beat plate of the present invention consists of an amorphous coating of a porous nickel plate with diamond structure formed by coating the surface of a part inclusive carbon and hydrogen. アモルファス被膜は耐腐食性が高く、そのため、酸性水等の腐蝕性の液体の噴霧装置に用いることができる。 Amorphous film has a high corrosion resistance, therefore, can be used for the spraying apparatus of a corrosive liquid acidic water or the like.

また、多孔板に高価な白金を用いていないので、本発明のビートプレートを用いた腐蝕性液体用の噴霧装置は経済性に優れる。 Further, since no use of expensive platinum porous plate, the spraying device for corrosive liquids using the beat plate of the present invention is excellent in economical efficiency. 更に、本発明のビートプレートの多孔ニッケル板はニッケル板を基材として用いて製造しているので、振動特性が良く腐蝕性液体や高粘度液体、エマルジョン等を効率良く噴霧できる。 Furthermore, the porous nickel plate beat plate of the present invention since the produced using nickel plate as the substrate, good corrosion liquids and high viscosity liquids vibration characteristics, emulsion and the like can be efficiently sprayed. また、基材のニッケル板は細孔を施す加工が容易である。 Further, the nickel plate of the base material is easily processed to perform the pores.

以下、図面を参照しながら本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings.

図1は本発明のビートプレートの一例を示す平面図、図2は図1のa−a線に沿う断面図である。 Figure 1 is a plan view showing an example of the beat plate of the present invention, FIG. 2 is a sectional view taken along the line a-a of FIG.

図2中、100はビートプレートで、2は平板状の振動子である。 In Figure 2, 100 is a beat plate, 2 is a plate-shaped vibrator. この振動子2は両表面に電圧を印加することにより振動する素子で、水晶板等のピエゾ素子からなる。 The vibrator 2 is an element that vibrates by applying a voltage to both surfaces, and a piezo element of the quartz plate.

前記振動子2の両面にはそれぞれ電極4、6が形成されている。 Wherein each electrode 4, 6 on both sides of the vibrator 2 are formed. 電極4、6の一端側にはそれぞれ端子8、10が接続されている。 Each of the one end side terminal 8, 10 of electrodes 4, 6 are connected. 前記電極4の他端側には、多孔板12の一端側が固着部14で接合されている。 The other end of the electrode 4, one end side of the porous plate 12 are joined by the fixing portion 14. 多孔板12には多数の細孔16が形成されている。 Large number of pores 16 are formed in the porous plate 12. 細孔の孔径は、5〜50μmが好ましく、細孔の密度は1cm 2あたり6000〜15000個であることが好ましい。 The pore size of pores, 5 to 50 [mu] m is preferred, it is preferable density of the pores is from 6,000 to 15,000 pieces per 1 cm 2.

図3は多孔板12の細孔16近傍の拡大断面図である。 Figure 3 is an enlarged sectional view of the vicinity pores 16 of the porous plate 12. 図3中、18は多孔ニッケル板で、ニッケル製の平板に多数の細孔16が形成してある。 In Figure 3, 18 is a porous nickel plate, a large number of pores 16 in a nickel flat plate is formed. 前記多孔ニッケル板18の表面はアモルファス被膜20で被覆されている。 The surface of the porous nickel plate 18 is covered with the amorphous film 20.

図3に示すように、多孔板12の一面13には所定深さ(Tc)の円板状第一孔16aが穿設されている。 As shown in FIG. 3, on a surface 13 of the porous plate 12 disc-shaped first hole 16a of a predetermined depth (Tc) is bored.

前記第一孔16aの底面には第一孔の径(Da)よりも小径(Dc)で、他面に向うに従って徐々に大径に至る第二孔16bが穿設されている。 In the on the bottom surface of the first hole 16a smaller in diameter than the diameter of the first hole (Da) (Dc), gradually second hole 16b reaching the large diameter are bored in accordance toward the other surface. この第二孔16bは、その側面の断面形状が内側に凸となる緩やかな曲線で形成され、この曲線は他面15に漸近している。 The second hole 16b is formed in a gentle curve cross-sectional shape of the side surface is convex to the inside, this curve is asymptotic to the other surface 15.

前記細孔16は、第一孔底部19と他面15とで細孔径Dc、Dbが異なっており、本図においては、最小径Dcは他面径Dbの1/10に形成されている。 The pores 16, the pore diameter Dc with the first hole bottom portion 19 and the other surface 15 are different Db is, in this view, the minimum diameter Dc is formed on one tenth of the other surface diameter Db. この最小径Dcと他面径Dbの比は1/2〜1/10であることが好ましい。 It is preferred that the ratio of the minimum diameter Dc and the other surface diameter Db is 1 / 2-1 / 10. また、細孔16は、一面13と他面15とで一面径Da、他面径Dbが略同一に形成されている。 Further, the pores 16, one surface diameter Da at the one surface 13 and another surface 15, the other surface diameter Db are formed in substantially the same. 尚、前記第一孔16aの深さ(Tc)は、多孔板の厚みTの約1/10である。 The depth of the first hole 16a (Tc) is about 1/10 of the thickness T of the porous plate.

本発明における多孔板12は、例えば、多孔ニッケル板18の表面を当業者が公知の方法で、ダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜20で被覆することにより作製することができる。 Porous plate 12 in the present invention can, for example, the surface of the porous nickel plate 18 those skilled in the known manner, to produce by coating an amorphous film 20 consisting inclusive carbon and hydrogen partial diamond structure . この被覆方法としては、高真空下に炭化水素を充満させた雰囲気に多孔ニッケル板18を入れ、プラズマ処理する方法を例示することができる。 This as a coating method, placed a porous nickel plate 18 to atmosphere is filled with hydrocarbons under high vacuum, it can be exemplified a method of plasma treatment. アモルファス被膜20の被膜厚み(Tb)は、0.5〜5.0μmであることが好ましい。 Coating thickness of the amorphous film 20 (Tb) is preferably 0.5 to 5.0 .mu.m. また、多孔ニッケル板の厚み(Ta)は0.02〜1.0mmであることが好ましい。 The porous nickel plate thickness (Ta) is preferably 0.02 to 1.0 mm. アモルファス被膜20の被膜厚み(Tb)が上記の範囲であると、多孔ニッケル板18を電解水による腐食から長期に亘り保護できる。 When the film thickness of the amorphous film 20 (Tb) is in the above range, it can be protected for a long period of perforated nickel plate 18 from corrosion by the electrolytic water. また、経済性にも優れる。 In addition, also excellent in economy. 尚、ダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜20は、通称DLC(Diamond like Carbon)で表わされている。 Incidentally, an amorphous film 20 consisting inclusive carbon and hydrogen partial diamond structure is represented by the called DLC (Diamond like Carbon).

また、アモルファス被膜20の蒸着に用いる多孔ニッケル板18には、ニッケル板に当業者が公知の方法で細孔を多数穿孔したものを用いることができる。 Further, the porous nickel plate 18 for use in the deposition of the amorphous film 20 may be used by one of ordinary skill in the nickel plate was drilled a number of pores in a known manner. この穿孔方法としては、例えば、以下に述べる電鋳法を挙げることができる。 As the drilling process, for example, can be cited electroforming method described below.

即ち、ステンレス板の片面にレジストを塗布し、フォトレジスト法にて円柱状の硬化レジストが多数存在するステンレス板を得る。 That is, a resist is coated on one surface of the stainless steel plate to obtain a stainless steel plate cylindrical cured resist are present many by photoresist method. 次いでこのステンレス板上にニッケルメッキを施し、更に、ニッケルメッキ部分をステンレス金属面及び硬化レジスト面から剥離して、多数の貫通孔が形成されたニッケル板を得る。 Then subjected to nickel plating to the stainless steel plate, further, by peeling off the nickel plated portion from the stainless metal surface and cured resist surface to obtain a nickel plate having a number of through holes are formed.

図4は電解槽38及び、電解槽38に結合した噴霧手段200を示す拡大図である。 Figure 4 is an enlarged view showing the electrolytic cell 38 and, spraying means 200 coupled to the electrolytic cell 38. 電解槽38は、扁平な電解槽筐体42内に、平行に配設された陽極44、及び陰極46を有する。 Electrolyzer 38 has a flat electrolytic cell housing 42, anode 44 disposed parallel to, and a cathode 46. なお、48は陽極44に接続された陽極端子、50は陰極46に接続された陰極端子である。 Incidentally, 48 denotes an anode terminal connected to the anode 44, 50 is a cathode terminal connected to the cathode 46.

ポンプ(図示していない)から供給される電解原料水は、電解槽38の下部に形成された流入孔52から電解槽38内に供給され、層流状態を保ちながら槽内を上方に移動すると共に陽極44、陰極46間に印加されている電圧により電気分解され、陽極44近傍には酸性水が生成し、陰極46近傍にはアルカリ性水が生成する。 Pump (not shown) electrolytic raw water supplied from the supplied from the inflow hole 52 formed in the lower portion of the electrolytic cell 38 into the electrolytic cell 38, moves the inside of the tank upward while maintaining the laminar flow state with the anode 44, it is electrolyzed by voltage applied between the cathode 46, in the vicinity of the anode 44 is an acidic water generated in the vicinity cathode 46 produces alkaline water.

電解槽38内の電解原料水は層流状態で流れているので、生成した酸性水は陽極44の表面に沿って矢印Aで示される様に上方に流れ、酸性水のみが電解槽38の上部側に形成された取出し孔54を通って噴霧手段200の噴霧室56に供給される。 Since electrolytic material water in the electrolytic bath 38 is flowing in a laminar flow state, the resulting acid water flows upward as shown by arrow A along the surface of the anode 44, only acidic water is the upper portion of the electrolytic cell 38 is supplied to the spray chamber 56 of the spraying means 200 through the take-out hole 54 formed in the side.

58は多孔板で、これにより噴霧手段200の噴霧室56と外界とが分離されている。 58 is a perforated plate, thereby the spraying chamber 56 of the spray unit 200 and the outside world are separated. 前記多孔板58は、孔径18〜24μmの細孔が多数形成されていると共に、この多孔板58はピエゾ振動子60に固定されている。 The perforated plate 58, with pores having a pore diameter of 18~24μm is a large number, the porous plate 58 is fixed to the piezoelectric vibrator 60. 従って、このピエゾ振動子60に交流やパルス電圧が印加される事により振動子60が振動し、これに伴い振動子60に連結された多孔板58が振動する。 Therefore, the vibrator 60 is vibrated by the alternating or pulsed voltage to the piezoelectric vibrator 60 is applied, a perforated plate 58 which is connected to the oscillator 60 due to this vibrates. これにより、噴霧室56内に充満された酸性水が多孔板58に形成された細孔を通して外部に微細液滴62として噴霧される。 Thus, acidic water that is filled into the spray chamber 56 is sprayed to the outside through the pores formed in the porous plate 58 as fine droplets 62.

一方、電解槽38内で生成したアルカリ性水は、矢印Bにより示されるように、陰極46に沿って上方に移動し、廃液口64を通ってアルカリ性水貯槽(図示していない)に蓄えられる。 On the other hand, the alkaline water produced in the electrolytic cell 38, as indicated by arrow B, to move upward along the cathode 46 is stored in the alkaline water storage tank through the waste liquid port 64 (not shown).

本発明を実施例により更に説明する。 Further describes the invention based on examples.

図1及び図2に示すビートプレート100を下記の通り作製した。 A beat plate 100 shown in FIGS. 1 and 2 was fabricated as follows.

電鋳法により、厚みが1.0mm、幅が20mm、長さが17mmの多数の細孔を有する矩形多孔ニッケル板18を作製した。 By electroforming, the thickness is 1.0 mm, the width was produced rectangular perforated nickel plate 18 20 mm, in length having a number of pores of 17 mm. 穿孔した細孔の平均直径は、一面での直径が約100μm、他面での直径が約100μm、最小径部での直径が約10μm、第一孔の深さが約0.1mmであり、細孔の設置密度は1cm 2当たり6500個とした。 The average diameter of the perforated pore has a diameter of about 100μm in one surface, a diameter of about 100μm in the other surface, the diameter at the minimum diameter portion of about 10 [mu] m, the depth is about 0.1mm in the first hole, installation density of the pores was 6500 per 1cm 2.

次いで、この多孔ニッケル板18をプラズマ処理器内に入れ、器内を1×10 -3 Paの高真空とした後、器内にメタンガスを導入し、プラズマ処理により多孔ニッケル板の全表面にダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜20を形成さて多孔板12を得た。 Then placed the porous nickel plate 18 in the plasma processing vessel, after the inside of the vessel and a high vacuum of 1 × 10 -3 Pa, introducing methane into the vessel, the diamond on the entire surface of the porous nickel plate by plasma treatment the amorphous film 20 consisting of the structure of a part inclusive of carbon and hydrogen to obtain a formed Well porous plate 12. アモルファス被膜20の被膜厚み(Tb)は、0.5μmとした。 Coating thickness of the amorphous film 20 (Tb) was the 0.5 [mu] m.

次に、得られた多孔板12の一端を長さ(Lb)が19mmの振動子3の一端と固着部6の長さ(Lc)が3mmとなるように固着させビートプレート100を得た。 Next, one end the length of the resulting porous plate 12 (Lb) is the length of the fixing portion 6 and one end of the oscillator 3 of 19 mm (Lc) to obtain a beat plate 100 is fixed so as to be 3 mm.

得られたビートプレート100は、多孔板12の幅(W)が20mm、多孔板2の長さ(La)が17mm、多孔板2の厚み(T)が1.0mm、振動子3の長さ(Lb)が22mmである。 The resulting beat plate 100, the width of the porous plate 12 (W) is 20 mm, the length of the porous plate 2 (La) is 17 mm, the porous plate 2 of the thickness (T) is 1.0 mm, the length of the transducer 3 (Lb) is 22mm. 多孔板2、振動子3と固着部6の寸法は、ビートプレート100を噴霧器の部品として用いるための実用上適度な寸法にしてある。 Porous plate 2, the dimensions of the vibrator 3 and the fixing unit 6, are then practically reasonable dimensions for using the beat plate 100 as a part of the sprayer.

多孔板12に施された細孔16は、多孔板の一面13での直径(Da)が平均100μm、多孔板の他面15での直径(Db)が平均100μm、第一孔底部での直径(Dc)が平均20μm、第一孔の深さ(Tc)が平均0.1mmである。 Pores 16 which has been subjected to the porous plate 12, the diameter (Da) average 100μm at one side 13 of the porous plate, perforated plate with a diameter (Db) is an average 100μm at the other surface 15, the diameter of the first hole bottom portion (Dc) is an average 20 [mu] m, the depth of the first hole (Tc) is the average 0.1 mm. また、細孔16の設置密度は、多孔板1cm 2当たり6500個である。 Further, the application density of the pores 16 is 6500 per perforated plate 1 cm 2. 上記細孔16の寸法(Da、Db、Dc、Tc)、設置密度は、ビートプレート100を電解水用噴霧器の部品として用いた際に、治療上適度な量及びサイズの霧状電解水を噴霧器から発生できるように設定してある。 The dimensions of the pores 16 (Da, Db, Dc, Tc), the application density is sprayer when using beet plate 100 as parts of the electrolytic water sprayer, a therapeutically appropriate quantity and size of the atomized electrolytic water It is set so that it can be generated from.

このようにして得られた多孔板12の表面を被覆しているアモルファス被膜20(DLC)の酸性溶液に対する耐性評価を行った。 Thus by coating the surface of the obtained porous plate 12 to have amorphous coating 20 resistant evaluation of acidic solution (DLC) was carried out. 多孔板12の部分を秤量後、pH2.0の希塩酸(15ml)中に室温(20〜25℃)にて300時間浸漬させた。 After weighing the portion of the porous plate 12 it was immersed for 300 hours at room temperature (20-25 ° C.) in dilute hydrochloric acid of pH 2.0 (15 ml). 次いで、多孔板12を取り出し、水洗、乾燥後、質量測定と表面観察を行った。 Then, the porous plate 12 was taken out, washed with water, dried and subjected to mass measurement and surface observation. その結果、多孔板12の質量変化は全く無く、また多孔板表面のDLC外観に変化は認められなかった。 As a result, change in mass of the porous plate 12 at all without also changing the DLC appearance of the porous plate surface was observed.

本発明のビートプレートの一例を示す概略平面図である。 It is a schematic plan view showing an example of the beat plate of the present invention. 図1のa−a断面図である。 It is a-a sectional view of FIG. 本発明のビートプレート細孔の一例を示す拡大断面図である。 Is an enlarged sectional view showing an example of the beat plate pores of the present invention. 本発明のビートプレートを用いた噴霧手段を示す拡大図である。 It is an enlarged view showing the spray means using a beat plate of the present invention.

符号の説明 DESCRIPTION OF SYMBOLS

100 ビートプレート 2 振動子 4、6 電極 8、10 端子 12 多孔板 13 多孔板の一面 14 固着部 15 多孔板の他面 16 細孔 16a 細孔の第一孔 16b 細孔の第二孔 18 多孔ニッケル板 19 細孔第一孔の底部 20 アモルファス被膜 200 噴霧手段 38 電解槽 42 電解槽筐体 44 陽極 46 陰極 48 陽極端子 50 陰極端子 52 流入孔 54 取出孔 56 噴霧室 58 多孔板 60 ピエゾ振動子 62 液滴 T 多孔板の厚み Ta 多孔ニッケル板の厚み Tb アモルファス被膜の厚み Tc 細孔の第一孔の深さ Da 細孔の一端の直径 Db 細孔の他端の直径 Dc 細孔の最小径部の直径 W 多孔板の幅 La 多孔板の長さ Lb 振動子の長さ Lc 固着部の長さ 100 beats plate 2 second hole 18 perforated in the first hole 16b pores of the other surface 16 pores 16a pores of one surface 14 fixing portion 15 perforated plate of the vibrator 4, 6 8 and 10 terminal 12 porous plate 13 perforated plate nickel plate 19 pores first hole bottom portion 20 amorphous film 200 spraying means 38 electrolytic bath 42 electrolyzer housing 44 anode 46 cathode 48 anode terminal 50 cathode terminal 52 inlet 54 removal hole 56 spray chamber 58 a perforated plate 60 piezoelectric vibrators 62 droplets T perforated plate thickness Ta perforated nickel plate thickness Tb amorphous coating minimum diameter of the first hole of the thickness Tc pores of one end of the diameter Db pore depth Da pores of the other end of the diameter Dc pores of width La porous length length length Lc fixing portion of Lb resonator plate parts with a diameter W perforated plate

Claims (5)

  1. 振動子と前記振動子に連結された多孔板とからなるビートプレートであって、前記多孔板が多孔ニッケル板と前記多孔ニッケル板の表面を被覆して形成されたダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜とからなることを特徴とするビートプレート。 A beat plate comprising a porous plate which is connected to the transducer and the transducer, wherein the perforated plate containing partially perforated nickel plate and the perforated nickel plate diamond structure was formed by coating the surface of the carbon beat plate characterized by comprising the amorphous film consisting of hydrogen and.
  2. 振動子がピエゾ振動子である請求項1に記載のビートプレート。 Beat plate according to claim 1 vibrator is piezoelectric vibrator.
  3. 多孔板が孔径5〜50μmの細孔を有する請求項1又は2に記載のビートプレート。 Beat plate according to claim 1 or 2 perforated plate having pores with a pore diameter of 5 to 50 [mu] m.
  4. アモルファス被膜が膜厚0.5〜5.0μmである請求項1乃至3の何れか1項に記載のビートプレート。 Beat plate according to any one of claims 1 to 3 amorphous film is a thickness 0.5 to 5.0 .mu.m.
  5. 請求項1に記載のビートプレートを噴霧手段に用いた噴霧器。 Sprayer used for spraying means beat plate of claim 1.
JP2004113623A 2004-04-07 2004-04-07 Beat plate Pending JP2005296737A (en)

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