JP2005285776A5 - - Google Patents

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Publication number
JP2005285776A5
JP2005285776A5 JP2005107007A JP2005107007A JP2005285776A5 JP 2005285776 A5 JP2005285776 A5 JP 2005285776A5 JP 2005107007 A JP2005107007 A JP 2005107007A JP 2005107007 A JP2005107007 A JP 2005107007A JP 2005285776 A5 JP2005285776 A5 JP 2005285776A5
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JP
Japan
Prior art keywords
sample
micro
stage
fixed
sample stage
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Application number
JP2005107007A
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English (en)
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JP2005285776A (ja
JP3904019B2 (ja
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Priority to JP2005107007A priority Critical patent/JP3904019B2/ja
Priority claimed from JP2005107007A external-priority patent/JP3904019B2/ja
Publication of JP2005285776A publication Critical patent/JP2005285776A/ja
Publication of JP2005285776A5 publication Critical patent/JP2005285776A5/ja
Application granted granted Critical
Publication of JP3904019B2 publication Critical patent/JP3904019B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Claims (1)

  1. 試料室内における微小試料加工観察方法であって、
    試料台に載置された試料に、イオンビームを照射して微小試料を摘出し、
    第２試料台に微小試料を固定し、
    第２試料台に固定されている微小試料にイオンビームを照射し、微小試料を加工し、
    第２試料台に固定された微小試料が、電子ビームに対して所定の角度となるよう、第２試料台の角度を変更し、
    第２試料台に固定されている微小試料に電子ビームを照射し、微小試料を測定する方法。
JP2005107007A 2005-04-04 2005-04-04 微小試料加工観察方法及び装置 Expired - Lifetime JP3904019B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005107007A JP3904019B2 (ja) 2005-04-04 2005-04-04 微小試料加工観察方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005107007A JP3904019B2 (ja) 2005-04-04 2005-04-04 微小試料加工観察方法及び装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004317452A Division JP4259454B2 (ja) 2004-11-01 2004-11-01 微小試料加工観察装置

Publications (3)

Publication Number Publication Date
JP2005285776A JP2005285776A (ja) 2005-10-13
JP2005285776A5 true JP2005285776A5 (ja) 2006-03-09
JP3904019B2 JP3904019B2 (ja) 2007-04-11

Family

ID=35183882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005107007A Expired - Lifetime JP3904019B2 (ja) 2005-04-04 2005-04-04 微小試料加工観察方法及び装置

Country Status (1)

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JP (1) JP3904019B2 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007026847A1 (de) * 2007-06-06 2008-12-11 Carl Zeiss Nts Gmbh Teilchenstrahlgerät und Verfahren zur Anwendung bei einem Teilchenstrahlgerät
DE102020203580B4 (de) 2020-03-20 2021-10-07 Carl Zeiss Microscopy Gmbh Verfahren zum Ändern der Raum-Orientierung einer Mikroprobe in einem Mikroskop-System, sowie Computerprogrammprodukt

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