JP2005285421A - Device for moving fluid to be flowed in passage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the responsiveness of a device used for a switch and so on, which moves a fluid to be flowed in a passage. <P>SOLUTION: The device for moving a fluid to be flowed in a passage 10 comprises a first pump 11, a second pump 12 and a passage 13a. A fluid to be flowed F1 which is a conductive fluid and a non-compressive working fluid F2 which is an insulative working fluid are stored in the passage 13a. The working fluid F2 is stored in the first pump and the second pump. Firstly, the working fluid F2 is gently discharged into the passage by driving the first pump to slowly reduce the capacity of its pump chamber, and thus a pressure increase absorbing portion of the passage disappears. Then, the capacity of the first pump chamber is rapidly decreased to rapidly discharge the working fluid F2 into the passage, and the capacity of the second pump chamber 12a is rapidly increased to rapidly absorb the working fluid F2 from the passage. The working fluid F2 rapidly discharged and absorbed immediately moves the fluid to be flowed F2 in the passage. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  INDUSTRIAL APPLICABILITY The present invention is used for devices, electrical paths, optical paths, and the like that can be applied to micromachines such as micromotors, microsensors, and microrelays, and microelectromechanical systems called microelectromechanical systems (MEMS). The present invention relates to a switching device that can be used as well as a device that can be used as a drive source such as a cylinder, etc., and that moves a moving object in a flow path.

  In recent years, development of micro-motors, micro-sensors, micro-switches and the like of several millimeters to several tens of microns has been promoted using micro-fabrication technology of materials represented by semiconductor manufacturing technology. These element devices include, for example, inkjet printer heads, microvalves, flow sensors, pressure sensors, recording heads, tracking servo actuators, on-chip biochemical analysis, microreactors, high-frequency switching devices, micromagnetic devices, microrelays, acceleration sensors. , Gyros, driving devices, displays, optical scanners, and so on.

One of the switch devices known as an example of such an element device is an elongated channel (flow path) extending in a linear direction filled with a conductive fluid (movable body, fluid to be moved) and a gas (working fluid). ), A chamber that includes gas heating means and is filled with the gas, and a sub-channel (communication path) that is connected to the chamber and the channel and is filled with the gas, The conductive fluid is moved in the channel by expanding a gas, thereby opening and closing an electric path containing the conductive fluid (for example, Patent Document 1 (pages 1 to 6, pages 1 to 6, See FIGS. 2, 4, 5, and 6).
JP 2002-260499 A

  However, the above-described conventional apparatus is configured to heat and expand a compressible gas by a heating means, and to move the conductive fluid using a pressure that rises as the gas expands. There is a problem that it takes a long time from the start of heating of the gas by means until the conductive fluid moves, and the responsiveness is not good.

  In order to solve this problem, the present applicant injects the incompressible working fluid toward the moving fluid in the flow path by the operation of the pump, and cuts the moving fluid by the jetted working fluid. Therefore, a device for moving the fluid to be moved was proposed. According to this, since the time from the operation start time of the pump to the time when the fluid to be moved starts moving is short, a highly responsive device is provided.

  By the way, the container constituting the device for moving the object to be moved is manufactured by laminating and bonding a silicon substrate, a glass substrate, a plastic substrate such as polymethyl metalate or polycarbonate, or a ceramic substrate. be able to. For bonding, an ultraviolet curable resin or a thermosetting resin can be used. In addition, the substrates can be joined to each other by sandwiching a gasket of silicon resin between the substrates and fastening the substrates together with screws or the like. Furthermore, when bonding a silicon substrate and a glass substrate, an anodic oxidation bonding method can also be used. When a ceramic green sheet is used as the substrate material, the ceramic green sheets can be laminated and then fired for integration.

  However, even if the container is produced using any method, the container cannot be made completely rigid (ie, rigid) and absorbs the pressure increase inside the container (that is, absorbs pressure increase). Part, so-called “play (play)”), it takes time from the start of the pump operation until the working fluid starts to move, and as a result, the operation of the device that moves the moving object There is a problem that is delayed.

  That is, for example, when the rigidity of the substrate constituting the container is low, the pressure increase due to the pump operation is absorbed by the deformation of the substrate. Even when the rigidity of the substrate is high, when the bonding of the substrate is made of resin, the pressure increase due to the pump operation is absorbed by the deformation of the resin. When a container is produced by anodic oxidation bonding or firing integration, the rigidity of the container itself is high. However, in general, the fluid to be moved and the working fluid must be filled through the inlet provided in the flow path after the container is manufactured. After filling the working fluid, the inlet is sealed with an ultraviolet curable resin or the like. Since it must be stopped, the pressure increase due to the pump operation is absorbed by the deformation of the resin. Further, bubbles may be mixed in the flow path when the working fluid is filled and the inlet is sealed, and the pressure increase due to the pump operation may be absorbed by the bubbles.

  Accordingly, an object of the present invention is to provide a device that moves a moving object in a flow channel that has extremely good responsiveness and can be suitably used for, for example, a high-frequency switch.

  In order to achieve the above object, a device for moving a movable body in a flow channel according to the present invention is a device for moving a movable body in a flow channel comprising a container and an electric control device, wherein the housing The body includes a flow path forming part that forms a flow path that is a sealed space, and a substantially incompressible transferred body that is accommodated in the flow path so as to substantially separate the flow path into two. A first pump chamber communicated with a body, a substantially incompressible working fluid that is accommodated in the flow path and moves the body to be moved, and a first opening provided in the flow path A first pump that discharges the working fluid in the first pump chamber to the flow path through the first opening by reducing the volume of the first pump chamber in response to the drive signal, and the flow path And a second pump chamber communicated with a second opening provided in the second pump chamber in response to the drive signal. By reducing the chamber volume and includes a second pump for discharging the working fluid of the second pump chamber common origin path through the second opening, the.

  Further, the electric control device generates a drive signal for reducing the sum of the volume of the first pump chamber and the volume of the second pump chamber at a first speed when the device is in an initial state. The working fluid is slowly discharged into the passage through the first opening and / or the second opening, whereby the pressure in the device rises higher than the pressure outside the container through the device. When the device is in the standby state, a drive signal is generated to reduce the volume of the first pump chamber at a second speed larger than the first speed and the device is operated in the same flow path. The moving object is configured to move in the flow path by rapidly discharging the fluid through the first opening.

  In this case, the object to be moved may be a solid. Moreover, the said to-be-moved body may be an incompressible fluid (namely, to-be-moved fluid). When the moving body is an incompressible moving fluid, the working fluid is substantially insoluble in the moving fluid and the wettability with respect to the wall surface of the flow path is the same as that of the moving fluid. It is preferable that the wettability with respect to the wall surface of the flow path is better. According to this, the wettability with respect to the flow path of the fluid to be moved is not better than the wettability with respect to the flow path of the working fluid, so that the fluid to be moved is fluid in the closed flow path so as to minimize the surface area. It exists as a lump. The working fluid fills a portion of the flow path where no fluid to be moved exists.

  In the device having the above-described configuration for moving the object to be moved, when the device is in the initial state, the sum of the volume of the first pump chamber and the volume of the second pump chamber is decreased at the first speed. In this case, only the volume of the first pump chamber or only the volume of the second pump chamber may be reduced, and both the volume of the first pump chamber and the volume of the second pump chamber may be reduced. As a result, the working fluid is gently discharged into the flow path via the first opening and / or the second opening, and the device reads “the pressure in the flow path is higher than the pressure outside the container. It will also shift to the “standby state that has also risen”. Due to this pressure increase, the portion that absorbs the pressure increase in the flow path unavoidably present in the container (flow path) is substantially eliminated. At this time, the object to be moved does not substantially move.

  Next, when in the standby state, the volume of the first pump chamber is reduced at a second speed greater than the first speed. As a result, the working fluid is rapidly discharged from the first pump chamber into the flow path through the first opening. At this time, since the portion that absorbs the pressure increase in the flow path has substantially disappeared, the pressure in the flow path immediately increases. Therefore, the working fluid rapidly discharged into the flow path immediately moves the fluid to be moved. As a result, a moved fluid moving device having very good responsiveness is provided.

  One aspect of the device for moving the moving object according to the present invention is that the moving object is at least in the flow path between the first opening and the second opening when the device is in the standby state. A pump configured to be present and capable of sucking the working fluid in the flow path into the second pump chamber through the second opening by increasing the volume of the second pump chamber. And the electric control device generates the drive signal for reducing the volume of the first pump chamber at the second speed when the device is in the standby state, and controls the pressure in the flow path. Driving to increase the volume of the second pump chamber at a third speed so as to suck the working fluid from the flow path through the second opening while maintaining a pressure higher than the pressure outside the container. signal It is configured to generate.

  According to this, the working fluid is rapidly discharged from the first pump chamber into the flow path through the first opening, and the working fluid is sucked from the flow path into the second pump chamber through the second opening. The Accordingly, not only the working fluid suddenly discharged from the first pump acts on the moving body so as to move the moving body, but also the suction force of the working fluid by the second pump is transferred via the working fluid. Act on. At this time, since the pressure in the flow path is maintained higher than the pressure outside the container, the moving body and the working fluid in the flow path move as if they were rigid bodies. As a result, it is possible to provide a device that moves the moving object with further improved responsiveness.

  According to another aspect of the device for moving the object to be moved according to the present invention, the device includes a third pump chamber communicated with a third opening provided in the flow path, and the third pump chamber in response to a drive signal. A third pump for sucking the working fluid in the flow path into the third pump chamber through the third opening by increasing the volume of the movable body, and the movable body when the device is in the standby state Is present in the flow path between at least the first opening and the third opening.

  Further, the electrical control device of the device generates a drive signal for decreasing the volume of the second pump chamber at the first speed when the device is in the initial state, and the working fluid is generated in the flow path. Is slowly discharged through the second opening to shift the device to the standby state, and when the device is in the standby state, the volume of the first pump chamber is decreased at the second speed. While generating a drive signal to rapidly discharge the working fluid into the flow path through the first opening, while maintaining the pressure in the flow path higher than the pressure outside the container A drive signal for increasing the volume of the third pump chamber at a third speed is generated so as to suck the working fluid from the flow path through the third opening.

  According to this, first, the volume of the second pump chamber is reduced at the first speed, and the working fluid is gently discharged into the flow path, whereby the pressure in the flow path is increased outside the container. The pressure rises above the pressure, and the moved fluid moving device enters the standby state. In this standby state, the volume of the first pump chamber is reduced at a second speed larger than the first speed so that the working fluid suddenly flows into the flow path, and the volume of the third pump chamber is reduced to the first speed. The working fluid is sucked from the flow path by being increased at a third speed greater than that.

  Accordingly, not only the working fluid rapidly discharged from the first pump acts on the moving fluid so as to move the moving body, but also the suction force by the third pump acts on the moving body via the working fluid. . At this time, since the pressure in the flow path is maintained higher than the pressure outside the container, the moving body and the working fluid in the flow path move as if they were rigid bodies. As a result, it is possible to provide a device that moves the moving object with further improved responsiveness.

  As described above, when the moving body is a fluid (moving fluid), the moving fluid exists at a position facing the first opening when the device is in the standby state, and the working fluid is It is configured to exist at a position opposite to the second opening, and when the volume of the first pump chamber is reduced at the second speed, the flow from the first pump chamber through the first opening is reduced. It is preferable that the moving fluid is moved in the flow path when the moving fluid in the flow path is cut by the working fluid rapidly discharged into the path.

  According to this, the volume of the first pump chamber is reduced at a second speed larger than the first speed, and the working fluid is rapidly discharged (injected) from the first pump chamber into the flow path through the first opening. ) The discharged working fluid cuts the fluid to be moved in the flow path, whereby the fluid to be moved moves in the flow path. Therefore, since the discharge of the working fluid by the first pump operation immediately moves the moved fluid, a moved fluid moving device with high responsiveness is provided.

  Further, in the device for cutting the fluid to be moved, when the volume of the first pump chamber is reduced at a second speed larger than the first speed, the volume of the second pump chamber or the volume of the third pump chamber. Is configured to generate a drive signal that increases at the third speed, it is possible to further facilitate the cutting of the moved fluid and to provide a moved fluid moving device with better response.

  As described above, the moved fluid moving device according to each embodiment of the present invention reduces the volume of any pump at the first speed and gently discharges the moved fluid F1 into the flow path. Thereby, without moving the fluid F1, the pressure in the flow path is increased more than the pressure outside the container, and the pressure in the flow path inevitably existing in the container (flow path) is increased. The part which absorbs is substantially eliminated. Thereafter, the volume of one of the pumps is reduced at a second speed larger than the first speed, and the working fluid F2 is rapidly discharged into the flow path, thereby moving the moved fluid F1. At this time, since the portion that absorbs the pressure increase in the flow path has substantially disappeared, the working fluid F2 discharged into the flow path immediately moves the fluid F1 to be moved. As a result, a moved fluid moving device having very good responsiveness is provided.

  Further, these moved fluid moving devices are different from the devices that move the moved fluid by utilizing the volume expansion accompanied by heating and vaporizing the liquid. It is a device that moves the fluid F1 by discharging the working fluid F2. That is, since this moved fluid moving device does not need to vaporize the working fluid F2, a liquid having a high boiling point can be used as the working fluid F2. As a result, in the moved fluid moving device according to the present invention, an appropriate fluid can be selected as the working fluid F2 from among a wide variety of fluids.

Embodiments of a device for moving a moving object in a flow path according to the present invention will be described below with reference to the drawings. The moving object moved in the flow path may be an incompressible solid or a fluid (moving fluid) as described later. The solid as the object to be moved may be conductive or dielectric. When the moving body is a moving fluid, the device for moving the moving body in the flow path according to the present invention is also referred to as a “moving fluid moving device” or simply a “driving device”. The present invention is not limited to these embodiments, and various changes, modifications, and improvements can be added based on the knowledge of those skilled in the art without departing from the scope of the present invention.
(First embodiment)
FIG. 1 is a plan view of a moved fluid moving device 10 according to the first embodiment of the present invention. FIG. 2 is a sectional view of the moved fluid moving device 10 taken along a line 1-1 in FIG. FIG. The electric control device 20 is conceptually shown in FIG. 1 and omitted in FIG.

  The moving fluid moving device 10 includes a base body 10a made of ceramics having a substantially rectangular parallelepiped shape having sides extending in the X-axis, Y-axis, and Z-axis directions orthogonal to each other, a first pump 11, and a second pump 12. And an electric control device 20. The base body 10a, the first pump 11 and the second pump 12 constitute a container for the fluid F1 and the working fluid F2.

  As shown in FIG. 2, the substrate 10a is formed by laminating ceramic thin plate bodies (hereinafter referred to as “ceramic sheets”) 10a1 to 10a3 in the Z-axis direction and integrating them by firing or bonding. Has been. As shown in FIGS. 1 and 2, the base body 10 a includes a flow path forming portion 13, a first pump communication portion 14, and a second pump communication portion 15 therein.

  The first pump 11 includes a first pump chamber 11a and an actuator 11b. The first pump chamber 11a includes a ceramic sheet 11a1 fixed to the upper surface of the ceramic sheet 10a3, and a diaphragm (ceramic diaphragm) 11a2 made of a thin ceramic plate that can be easily deformed. A working fluid F2 is accommodated in the first pump chamber 11a.

  The ceramic sheet 11a1 is circular in a plan view and has a hollow cylindrical through hole. The ceramic diaphragm 11a2 has the same circular shape as the ceramic sheet 11a1 in plan view, and is fixed to the upper part of the ceramic sheet 11a1 so as to close the upper surface of the through hole of the ceramic sheet 11a1. The first pump chamber 11a is a space defined by the side wall surface that forms the through hole of the ceramic sheet 11a1 and the lower surface of the ceramic diaphragm 11a2.

  The actuator 11b is a thin plate (thickness is, for example, about 20 μm) having the same circular shape as the through hole of the ceramic sheet 11a1 in plan view, and is fixed to the upper surface of the ceramic diaphragm 11a2. The actuator 11b is a film-type piezoelectric element composed of a piezoelectric film and at least a pair of electrodes, and deforms the ceramic diaphragm 11a2 when a drive voltage is applied between the electrodes. Thereby, the actuator 11b increases / decreases the volume of the first pump chamber 11a and increases / decreases the fluid in the first pump chamber 11a.

  In other words, the first pump 11 is a pump capable of discharging fluid by reducing (changing smaller) the volume of the first pump chamber 11a than the initial volume when the drive voltage is not applied. It is also a pump capable of sucking fluid by increasing (largely changing) the volume of 11a from the initial volume. The actuator 11b may be a film-type piezoelectric element including an electrostrictive film or an antiferroelectric film and at least a pair of electrodes sandwiching the film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  The second pump 12 includes a second pump chamber 12a and an actuator 12b that is a film-type piezoelectric element similar to the actuator 11b. The second pump chamber 12a includes a ceramic sheet 12a1 fixed to the upper surface of the ceramic sheet 10a3, and a diaphragm (ceramic diaphragm) 12a2 made of a thin ceramic plate that can be easily deformed. A working fluid F2 is accommodated in the second pump chamber 12a. Since the 2nd pump 12 is provided with the same composition as the 1st pump 11, detailed explanation is omitted.

  The second pump 12 increases or decreases the volume of the second pump chamber 12a by increasing or decreasing the volume of the second pump chamber 12a by deforming the ceramic diaphragm 12a2 when a drive voltage is applied between the electrodes of the actuator 12b. It is like that.

  In other words, the second pump 12 is a pump capable of sucking fluid by increasing (largely changing) the volume of the second pump chamber 12a from the initial volume when the drive voltage is not applied. It is also a pump capable of discharging fluid by reducing (changing smaller) the volume of the chamber 12a than the initial volume. The actuator 12b may be a film-type piezoelectric element including an antiferroelectric film and at least a pair of electrodes sandwiching the antiferroelectric film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  The first pump 11 can also be used to suck the working fluid F2 in the flow path, but at this time, the moved fluid F1 may be sucked together. In other words, the fluid accommodated in the first pump 11 (and in the first pump communication portion 14) is not limited to the working fluid F2. Similarly, the second pump 12 aspirates the working fluid F2 in the flow path as will be described later. However, in some cases, the second fluid 12 may be sucked together with the fluid F1. In other words, the fluid accommodated in the second pump 12 (and the second pump communication portion 15) is not limited to the working fluid F2.

  Here, exemplifying specific dimensions of the first and second pumps 11 and 12, the radii of the bottom surfaces (upper surfaces) of the hollow cylindrical first and second pump chambers 11a and 12a are about 0.5 mm. Each height is about 150 μm. Each radius of the circular thin plate-like ceramic diaphragms 11a2 and 12a2 is about 0.5 mm, and each thickness (height) is about 10 μm.

  The flow path forming unit 13 is a part constituting the flow path 13a. The flow path 13a is a sealed space defined by the side wall of the slit provided in the ceramic sheet 10a2, the upper surface of the ceramic sheet 10a1, and the lower surface of the ceramic sheet 10a3. Since the ceramic sheet is an insulator, no current flows through the wall surface of the flow path 13a.

  The flow path 13a is a linear, elongated, sealed space, and has a streamline direction (longitudinal axis) in a direction along the X axis. The flow path 13a is a plane orthogonal to the streamline direction (YZ plane), and a cross section obtained by cutting the flow path 13a (hereinafter, this cross section may be referred to as a “longitudinal cross section of the flow path”). It has a square shape. The flow path 13a is also called a microchannel. The length of the flow path 13a in the streamline direction is about 1 mm, and one side (height and width of the flow path) of the square in the longitudinal section is about several tens of μm.

  A fluid F1 and a working fluid F2 are accommodated in the flow path 13a, and the flow path 13a is substantially filled with these fluids. The fluid F1 to be moved is an incompressible and conductive fluid, and is mercury in this example. The moved fluid F1 may be incompressible, and may be a magnetic material, a liquid metal such as a gallium alloy, and oil. The fluid F1 to be moved is agglomerated and exists in the flow path 13a. Thereby, the fluid F1 to be moved substantially separates the flow path 13a into two spaces, a space on the X axis positive direction side and a space on the X axis negative direction side.

  The working fluid F2 is a fluid that is insoluble in the fluid F1 to be moved, is substantially incompressible, and is insulating (non-conductive). In this example, the working fluid F2 is deionized water, but may be a highly permeable solvent fluorinate, paraffin-based electrical insulating oil, silicon oil, or the like. As the working fluid F2, a fluid is selected in which the wettability of the working fluid F2 with respect to the wall surface of the flow path 13a is better than the wettability of the transferred fluid F1 with respect to the wall surface of the flow path 13a.

  Four electrodes 21a, 21b, 22a, 22b that are electrically insulated from each other are disposed in the flow path 13a. The electrode 21a and the electrode 21b flow at a position on the X-axis positive side with respect to the central portion in the X-axis direction of the base body 10a and at a position on the X-axis negative side with respect to the first pump communication portion 14 (first opening described later). It is exposed to the flow path 13a so as to face each other across the path 13a. The electrode 22a and the electrode 22b are disposed at a position on the X axis negative side with respect to the central portion in the X axis direction of the base 10 and at a position on the X axis positive side with respect to the second pump communication portion 15 (second opening described later). It is exposed to the flow path 13a so as to face each other across the path 13a.

  The electrodes 21a, 21b, 22a, and 22b are connected to a circuit (not shown) outside the base body 10a via wirings (not shown). The electrode 21a and the electrode 21b are arranged so as to be in a non-conductive state when the fluid F1 to be moved is present at a substantially central portion in the X-axis direction of the base body 10a (that is, when the fluid movement device 10 is in the initial state). It is installed. Further, the electrode 21a and the electrode 21b are disposed so as to be in a conductive state via the moved fluid F1 when the moved fluid F1 is moved to the positive side of the X axis.

  Similarly, the electrode 22a and the electrode 22b are disposed so as to be in a non-conductive state when the fluid F1 to be moved is present at a substantially central portion in the X-axis direction of the base body 10a. Further, the electrode 22a and the electrode 22b are arranged so as to be in a conductive state via the moved fluid F1 when the moved fluid F1 is moved to the X axis negative side.

  The 1st pump communication part 14 is a part which forms the 1st flow-path connection part 14a and the 1st pump connection part 14b. The first pump communication portion 14 includes side walls of slits, upper surfaces of the ceramic sheet 10a1 and lower surfaces of the ceramic sheet 10a3 provided to form the first flow path connection portion 14a and the first pump connection portion 14b in the ceramic sheet 10a2. And a space defined by a cylindrical through hole provided in the ceramic sheet 10a3.

  One end of the first flow path connecting portion 14a is connected to the flow path 13a, and a first opening 14a1 is formed in the flow path 13a. The first pump connection portion 14b communicates the other end portion of the first flow path connection portion 14a with the first pump chamber 11a. The working fluid F2 is accommodated in the first flow path connection portion 14a and the first pump connection portion 14b.

  The first opening 14a1 is in a direction (in this case, the Z-axis direction) orthogonal to the streamline direction along the streamline direction (X-axis direction) of the flow path 13a in the front view (viewed from the Y-axis direction). It has a substantially square shape consisting of sides along. The length of the side along the Z-axis direction perpendicular to the streamline direction of the flow path 13a of the first opening 14a1 is substantially equal (substantially equal) to the distance between the opposing walls in the Z-axis direction of the flow path 13a. The length of the side along the streamline direction of the flow path 13a of the first opening 14a1 is substantially equal to the length of the side along the direction orthogonal to the streamline direction of the flow path 13a of the first opening 14a1.

  The first flow path connecting portion 14a is a direction orthogonal to the streamline direction (X-axis direction) of the flow path 13a from the first opening 14a1 (one end portion of the first flow path connecting portion 14a) in plan view. (In this case, it extends in the Y-axis direction). The first flow path connecting portion 14a has the other end portion between the first pump 11 and the flow path 13a in plan view. The first flow path connection portion 14a is a cross-section obtained by cutting the first flow path connection portion 14a along a plane (XZ plane) orthogonal to the streamline direction (Y-axis direction) of the first flow path connection portion 14a. Hereinafter, this cross section may be simply referred to as “the cross section of the first flow path connecting portion 14 a”), and has a substantially square shape that is the same as the first opening 14 a 1.

  The first pump connection portion 14b extends in the Y-axis direction from the position of the other end of the first flow path connection portion 14a to a position directly below the first pump chamber 11a in plan view. The first pump connection portion 14b is a cross-section (hereinafter referred to as this plane) obtained by cutting the first pump connection portion 14b along a plane (XZ plane) orthogonal to the streamline direction (Y-axis direction) of the first flow path connection portion 14a. The cross section is sometimes simply referred to as “the cross section of the first pump connection portion 14b”.) Has a rectangular shape composed of a side along the Z-axis direction and a side along the X-axis direction.

  The end of the first pump connecting portion 14b in the positive Y-axis direction is an arc shape (semi-circular) having a radius that is concentric with the first pump chamber 11a in plan view and slightly smaller than the radius of the first pump chamber 11a. It has become. The first pump connection portion 14b is connected to the first pump chamber 11a via a cylindrical through hole of the ceramic sheet 10a3 having a central axis extending in the Z-axis direction below the first pump chamber 11a.

  The 2nd pump communication part 15 is a part which forms the 2nd flow-path connection part 15a and the 2nd pump connection part 15b. The second pump communication portion 15 includes side walls of slits, upper surfaces of the ceramic sheets 10a1, and lower surfaces of the ceramic sheets 10a3 provided to form the second flow path connection portions 15a and the second pump connection portions 15b in the ceramic sheet 10a2. And a space defined by a cylindrical through hole provided in the ceramic sheet 10a3.

  One end of the second flow path connection portion 15a is connected to the flow path 13a, and a second opening 15a1 is formed in the flow path 13a. The second pump connection part 15b communicates the other end of the second flow path connection part 15a with the second pump chamber 12a. The working fluid F2 is accommodated in the second flow path connection portion 15a and the first pump connection portion 15b. The second flow path connection portion 15a has the same structure as the first flow path connection portion 14a.

  The 2nd pump connection part 15b has the same structure as the 1st pump connection part 14b. Further, the relationship between the second pump connection portion 15b and the second flow path connection portion 15a is the same as the relationship between the first pump connection portion 14b and the first flow path connection portion 14a. Furthermore, the relationship between the second pump connection portion 15b and the second pump chamber 12a is the same as the relationship between the first pump connection portion 14b and the first pump chamber 11a.

  The electric control device 20 is electrically connected between the electrodes of the actuator 11b of the first pump 11, applies a drive voltage (first pump drive voltage) V1 between the electrodes of the actuator 11b, and also supplies the second pump. The two actuators 12b are electrically connected to each other, and a drive voltage (second pump drive voltage) V2 is applied between the electrodes of the actuator 12b.

  Next, the operation of the moved fluid moving device 10 configured as described above will be described with reference to FIGS. 3 and 4. FIG. 3A and FIG. 3B are diagrams conceptually showing the state of the container of the moved fluid moving device 10. 3A shows the initial state, and FIG. 3B shows the operating state. 4 shows, in order from the top, the volume of the first pump chamber 11a, the drive voltage V1 applied between the electrodes of the actuator 11b of the first pump 11, the position of the fluid F1 to be moved in the flow path 13a, the second pump 12 It is a time chart which shows the volume of the drive voltage V2 given between the electrodes of the actuator 12b, and the 2nd pump chamber 12a.

  First, an outline of the operation of the moved fluid moving device 10 will be described. As shown in FIG. 3A, the drive voltage V1 is not applied between the electrodes of the actuator 11b of the first pump 11, and the drive voltage V2 is not applied between the electrodes of the actuator 12b of the second pump 12. In the initial state, the fluid F1 to be moved exists as one lump at a position approximately in the center of the flow path in the X-axis direction (hereinafter also referred to as “initial position”).

  That is, since the wettability of the fluid F1 to the flow path is not better than the wettability of the working fluid F2 to the flow path, the fluid F1 is moved in the sealed flow path 13a so as to minimize the surface area. It exists as a mass of fluid. At this time, the moved fluid F1 substantially contacts the wall surface of the flow path 13a and separates the flow path 13a into two spaces, a space on the X-axis positive direction side and a space on the X-axis negative direction side. The working fluid F2 fills a portion of the flow path where the moved fluid F1 does not exist. As can be understood from FIGS. 1, 2 and 3A, when the moved fluid moving device 10 is in the initial state, the moved fluid F1 is between the first opening 14a1 and the second opening 15a1. The working fluid F2 exists in a position opposite to the second opening 15a1 in the flow path 13a.

  On the other hand, as shown in FIG. 3B, a positive driving voltage V1 having a large absolute value that gives an electric field having the same polarity as the polarization direction of the piezoelectric film is applied between the electrodes of the actuator 11b of the first pump 11. Then, the actuator 11b immediately bends and displaces the ceramic diaphragm 11a2. As a result, the volume of the first pump chamber 11a is reduced, and the first pump 11 causes the working fluid F2, which is an incompressible fluid, to pass through the first pump communication portion 14 (first opening 14a1) in the flow path 13a. To discharge.

  At this time, if a negative drive voltage V2 having a large absolute value is applied between the electrodes of the actuator 12b of the second pump 12 to apply an electric field having a polarity opposite to the polarization direction of the piezoelectric film, the actuator 12b causes the ceramic diaphragm 12a2 to Bend and displace immediately upward. Accordingly, the volume of the second pump chamber 12a is increased, and the second pump 12 sucks the working fluid F2 from the flow path 13a via the second pump communication portion 15 (second opening 15a1). As a result, the fluid F1 to be moved moves in the negative direction of the X axis, and the electrode 22a and the electrode 22b are made conductive.

  To return from this state (the state shown in FIG. 3B) to the initial state, both the drive voltage V1 and the drive voltage V2 are set to 0 (V) (disappear). Thereby, since the volume of the 1st pump chamber 11a increases toward an initial state, the 1st pump 11 attracts | sucks the working fluid F2 from the flow path 13a. Moreover, since the volume of the 2nd pump chamber 12a reduces toward an initial state, the 2nd pump 12 discharges the working fluid F2 to the flow path 13a. As a result, the moved fluid F1 moves in the positive direction of the X-axis, and the electrode 22a and the electrode 22b are made non-conductive.

  Further, in order to move the moved fluid F1 in the positive direction of the X-axis and bring the electrodes 21a and 21b into conduction by the moved fluid F1, the polarization direction of the piezoelectric film between the electrodes of the actuator 11b of the first pump 11 A negative drive voltage V1 having a large absolute value for applying an electric field having a polarity opposite to that of the second pump 12 is applied, and an electric field having the same polarity as the polarization direction of the piezoelectric film is applied between the electrodes of the actuator 12b of the second pump 12. A positive drive voltage V2 is applied. The above is the outline of the operation of the moved fluid moving device 10.

  Next, the actual operation of the moved fluid moving device 10 will be described. The moved fluid moving device 10 moves the moved fluid F1 in a state where the pressure in the flow path 13a is always higher than the pressure outside the container.

  That is, as shown at times t0 to t1 in FIG. 4, when the moved fluid moving device 10 is in the initial state (“off” state), the electric controller 20 controls the first pump driving voltage V1 and the second pump driving voltage. All of the voltages V2 are maintained at 0 (V). At this time, the volume of the first pump chamber 11a and the volume of the second pump chamber 12a are each the initial volume C0.

  When a switch (not shown) of the electric control device 20 is turned on at time t1, the electric control device 20 sets the first pump drive voltage V1 to a positive voltage of the absolute value Vst. As a result, the volume of the first pump chamber 11a decreases from the initial volume C0 by the minute volume ΔC at times t1 to t2, and becomes the standby volume Cst at time t2. At this time, the rate of change in volume of the first pump chamber 11a (absolute value thereof) = ΔC / (t2−t1) is referred to as a first speed for convenience.

  As a result, the working fluid F2 corresponding to the minute volume ΔC is gently discharged from the first pump 11 into the flow path 13a through the first opening 14a1. In this case, since the first velocity of the working fluid F2 discharged into the flow path 13a is sufficiently small, a minute amount formed between the fluid F1 to be moved and the flow path 13a (the corner of the flow path 13a). It is used without excess or deficiency in order to pass through a large gap and eliminate the pressure rise absorption part (rattle) of the flow path 13a. Therefore, the moved fluid F1 maintains the state stopped at the initial position. Such a state is called a standby state.

  Next, when it becomes necessary to move the moved fluid F1 in the negative direction of the X-axis at time t3, the electric control device 20 sets the first pump drive voltage V1 to a positive voltage of the absolute value Vdr. As a result, the volume of the first pump chamber 11a further decreases by the volume Cdr at times t3 to t4, and becomes the volume Cmin at time t4. At this time, the rate of change in volume of the first pump chamber 11a (absolute value thereof) = Cdr / (t4−t3) is referred to as a second speed for convenience. The second speed is selected to be sufficiently greater than the first speed.

  In addition, the electric control device 20 sets the second pump drive voltage V2 to a negative voltage having an absolute value Vdr at time t3. As a result, the volume of the second pump chamber 12a increases from the initial volume C0 by the volume Cdr at times t3 to t4, and reaches the volume Cmax at time t4. At this time, the rate of change in volume of the second pump chamber 12a (absolute value thereof) = Cdr / (t4-t3) is referred to as a third speed for convenience. In this example, the third speed is substantially equal to the second speed, and the working fluid F2 is opened from the flow path 13a to the second opening while the pressure in the flow path 13a is maintained at a pressure higher than the pressure outside the container. It is selected to be sucked into the second pump chamber 12a through 15a1.

  As a result, the working fluid F2 corresponding to the volume Cdr is rapidly discharged from the first pump chamber 11a into the flow path 13a via the first opening 14a1, and the working fluid F2 corresponding to the volume Cdr is secondly discharged from the flow path 13a. The air is rapidly sucked into the second pump chamber 12a through the opening 15a1.

  In this case, since the second speed of the working fluid F2 discharged into the flow path 13a is sufficiently larger than the first speed, the gap between the fluid F1 to be moved and the flow path 13a (the corner portion of the flow path 13a). It hardly passes through the minute gap formed in the. As a result, the first pump 11 applies a force (pressing force) for moving the moved fluid F1 in the negative direction of the X axis to the moved fluid F1 via the working fluid F2 that is rapidly discharged.

  Further, since the working fluid F2 is sucked from the flow path 13a to the second pump 12, this suction force also directly acts on the moved fluid F1 as a force for moving the moved fluid F1 in the negative X-axis direction. Furthermore, from time t3 to t4 (actually at time t2), the pressure increase absorbing portion (rattle) in the flow path 13a disappears. Therefore, the moved fluid F1 starts to move immediately in the negative direction of the X axis immediately after time t3.

  Next, when it becomes necessary to move the moved fluid F1 toward the initial position in the X-axis positive direction at time t5, the electric control device 20 sets the first pump drive voltage V1 to a positive voltage of the absolute value Vst. Set. As a result, the volume of the first pump chamber 11a increases by the volume Cdr at times t5 to t6, and becomes the standby volume Cst at time t6. The change speed (absolute value) of the volume of the first pump chamber 11a at this time is the second speed.

  In addition, the electric control device 20 sets the second pump drive voltage V2 to “0” (V) at time t5. As a result, the volume of the second pump chamber 12a decreases from the volume Cmax by the volume Cdr at time t5 to t6, and becomes the initial volume C0 at time t6. At this time, the volume change speed (absolute value) of the second pump chamber 12a is the third speed (in this case, the second speed), and the pressure in the flow path 13a is greater than the pressure outside the container. The working fluid F2 is selected so as to be sucked and discharged while maintaining a high pressure.

  As a result, the working fluid F2 corresponding to the volume Cdr is rapidly sucked from the flow path 13a to the first pump chamber 11a, and the working fluid F2 corresponding to the volume Cdr is rapidly increased from the second pump chamber 12a to the flow path 13a. Discharged. In this case, similarly to the times t3 to t4, the second pump 12 applies a force (pressing force) for moving the moved fluid F1 in the positive direction of the X axis via the working fluid F2 that is rapidly discharged. To F1. Further, since the working fluid F2 is sucked from the flow path 13a to the first pump chamber 11a, this suction force also acts on the moved fluid F1 as a force for moving the moved fluid F1 in the positive direction of the X axis. Furthermore, the pressure increase absorption part of the flow path 13a has also disappeared at times t5 to t6. Accordingly, the moved fluid F1 starts to move immediately in the positive direction of the X axis immediately after time t5, and returns to the initial position at time t6.

  Thereafter, in the example illustrated in FIG. 4, the moved fluid moving device 10 performs the same operation at time t3 to t4 and time t5 to t6 at time t7 to t8 and time t9 to t10, respectively.

  When a switch (not shown) of the electric control device 20 is cut off at time t11, the electric control device 20 sets the first pump drive voltage V1 to 0 (V). As a result, the volume of the first pump chamber 11a increases from the standby volume Cst by a minute volume ΔC at times t11 to t12, and becomes the initial volume C0 at time t12. At this time, the changing speed of the volume of the first pump chamber 11a is the first speed. Therefore, in this case, the moved fluid F1 does not move. Thus, the moved fluid moving device returns to the initial state.

  As described above, according to the moved fluid moving device 10, the first pump 11 is gently driven (volume) before the first pump 11 and the second pump 12 for moving the moved fluid F1 are driven. By driving so that the changing speed becomes the first speed), the working fluid F2 is gently discharged into the flow path 13a, thereby increasing the pressure in the flow path 13a unavoidably present in the flow path 13a. The portion that absorbs the water is extinguished, and the state of the moved fluid moving device 10 is set to the standby state.

  Accordingly, when the volume of the first pump chamber 11a is decreased at a second speed larger than the first speed, the working fluid F2 is rapidly discharged into the flow path 13a, and the moved fluid F1 in the flow path 13a. The pressure of the working fluid F2 on the first opening 14a1 side immediately rises and immediately moves the fluid F1 to be moved. As a result, a moved fluid moving device having very good responsiveness is provided.

  Further, when the volume of the first pump chamber 11a is decreased at the second speed, the volume of the second pump chamber 12a is increased at a third speed equal to the second speed. Therefore, the suction force of the working fluid F2 by the second pump 12 immediately acts on the moved fluid F1 via the working fluid F2, and the moved fluid F1 moves immediately. In other words, since the differential pressure due to the first pump 11 and the second pump 12 immediately acts on the fluid F1, the fluid F1 moves immediately. As a result, a moved fluid moving device having very good responsiveness is provided.

  Here, the operation of the moved fluid moving device (hereinafter referred to as “comparative example”) that does not employ the present invention will be described with reference to FIG. The electric control device of the comparative example changes the first pump drive voltage V1 and the second pump drive voltage V2 from 0 (V) at the same time.

  For example, at time t0, the electric control device changes the first pump drive voltage V1 from 0 (V) to + Vdr (V), and the second pump drive voltage V2 from 0 (V) to -Vdr (V). Change. As a result, at the time t0 to t1, the volume of the first pump chamber 11a decreases by the volume Cdr from the initial volume C0 to C1, and the volume of the second pump chamber 12a increases by the volume Cdr from the initial volume C0 to C2. .

  However, immediately after time t0, the working fluid F2 discharged from the first pump chamber 11a to the flow path 13a is absorbed by the pressure increase absorption portion (rattle) of the flow path 13a, and thus moves the moved fluid F1. I can't let you. As a result, the moved fluid F1 stays at the initial position for a while from the time t0. That is, the responsiveness of the moved fluid moving device is not good.

  Furthermore, the position of the fluid F1 to be moved overshoots immediately after the time t1, and then it takes time to stabilize. In this sense, the response of the moved fluid moving device is not good. For example, the electric control device changes the first pump drive voltage V1 from + Vdr (V) to 0 (V) and changes the second pump drive voltage V2 to − It also occurs when Vdr (V) is changed to 0 (V).

Thus, compared with the comparative example which does not employ the present invention, the first embodiment (including other embodiments as described later) of the moved fluid moving device according to the present invention is extremely responsive. It is understood that the device can reliably control the position of the fluid F1 to be moved.
(Second Embodiment)
Next, a second embodiment of the moved fluid moving device 10 according to the present invention will be described. The second embodiment differs from the first embodiment only in that the first pump drive voltage V1 and the second pump drive voltage V2 generated by the electric control device 20 are different from those of the first embodiment. Therefore, the difference will be mainly described below with reference to the time chart of FIG.

  Similarly to the first embodiment, the moved fluid moving device 10 of the second embodiment also maintains a state in which the pressure in the flow path 13a is always higher than the pressure outside the container, and in that state the moved fluid Move. However, the second pump 12 is used instead of the first pump 11 so that the pressure in the flow path 13a is always higher than the pressure outside the container.

  More specifically, as shown at times t0 to t1 in FIG. 6, when the fluid movement device 10 is in the initial state (“off” state), the electric control device 20 includes the first pump drive voltage V1 and All of the second pump drive voltages V2 are maintained at 0 (V). As in the first embodiment, when the moved fluid moving device 10 of the second embodiment is in the initial state, the moved fluid F1 is in the flow path 13a between the first opening 14a1 and the second opening 15a1. The working fluid F2 exists at a position that exists and faces the second opening 15a1 in the flow path 13a. .

  When a switch (not shown) of the electric control device 20 is turned on at time t1, the electric control device 20 sets the second pump drive voltage V2 to a positive voltage of the absolute value Vst. As a result, the volume of the second pump chamber 12a decreases from the initial volume C0 by the minute volume ΔC from time t1 to time t2, and becomes the standby volume Cst at time t2. At this time, the rate of change in volume of the second pump chamber 12a (absolute value thereof) = ΔC / (t2−t1) is referred to as a first speed for convenience.

  As a result, the working fluid F2 corresponding to the minute volume ΔC is gently discharged from the second pump 12 into the flow path 13a. In this case, since the first velocity of the working fluid F2 discharged into the flow path 13a is sufficiently small, a minute amount formed between the fluid F1 to be moved and the flow path 13a (the corner of the flow path 13a). It is used without excess or deficiency in order to pass through a large gap and eliminate the pressure rise absorption part (rattle) of the flow path 13a. Therefore, the moved fluid F1 maintains the state stopped at the initial position. Such a state is called a standby state.

  Next, when it becomes necessary to move the moved fluid F1 in the negative direction of the X-axis at time t3, the electric control device 20 sets the first pump drive voltage V1 to the sum of the absolute value Vst and the absolute value Vdr (Vst + Vdr ) Positive voltage. As a result, the volume of the first pump chamber 11a decreases by the volume Cdq at times t3 to t4, and becomes the volume C3 at time t4. At this time, the rate of change in volume of the first pump chamber 11a (absolute value thereof) = Cdq / (t4-t3) is referred to as the second speed for convenience. The second speed is selected to be sufficiently greater than the first speed.

  In addition, the electric control device 20 decreases the second pump drive voltage V2 by the value Vst + Vdr at time t3 and sets the negative voltage of the absolute value Vdr. As a result, the volume of the second pump chamber 12a increases from the standby volume Cst by the volume Cdq at times t3 to t4, and becomes the volume C4 at time t4. At this time, the rate of change in volume of the second pump chamber 12a (absolute value thereof) = Cdq / (t4-t3) is referred to as a third speed for convenience. Also in this example, the third speed is substantially equal to the second speed, and the working fluid F2 is opened from the flow path 13a to the second opening while the pressure in the flow path 13a is maintained at a pressure higher than the pressure outside the container. It is selected to be sucked into the second pump chamber 12a through 15a1.

  As a result, the working fluid F2 corresponding to the volume Cdq is rapidly discharged from the first pump 11 into the flow path 13a, and the working fluid F2 corresponding to the volume Cdq is rapidly discharged from the flow path 13a to the second pump 12. Sucked.

  In this case, since the second speed of the working fluid F2 discharged into the flow path 13a is sufficiently larger than the first speed, the gap between the fluid F1 to be moved and the flow path 13a (the corner portion of the flow path 13a). It hardly passes through the minute gap formed in the. As a result, the first pump 11 applies a force (pressing force) for moving the moved fluid F1 in the negative direction of the X axis to the moved fluid F1 via the working fluid F2 that is rapidly discharged.

  Further, since the working fluid F2 is sucked from the flow path 13a to the second pump 12, this suction force also directly acts on the moved fluid F1 as a force for moving the moved fluid F1 in the negative X-axis direction. Furthermore, from time t3 to t4 (actually at time t2), the pressure increase absorbing portion (rattle) in the flow path 13a disappears. Therefore, the moved fluid F1 starts to move immediately in the negative direction of the X axis immediately after time t3.

  Next, when it becomes necessary to move the moved fluid F1 toward the initial position in the X-axis positive direction at time t5, the electric control device 20 sets the first pump drive voltage V1 to 0 (V). As a result, the volume of the first pump chamber 11a increases by the volume Cdq at times t5 to t6, and becomes the initial volume C0 at time t6. The change speed (absolute value) of the volume of the first pump chamber 11a at this time is the second speed.

  Moreover, the electric control apparatus 20 sets the 2nd pump drive voltage V2 to Vst (V) at the time t5. As a result, the volume of the second pump chamber 12a decreases from the volume C4 by the volume Cdq at times t5 to t6, and becomes the standby volume Cst at time t6. At this time, the volume change speed (absolute value) of the second pump chamber 12a is the third speed (in this case, the second speed), and the pressure in the flow path 13a is greater than the pressure outside the container. The working fluid F2 is selected so as to be sucked and discharged while maintaining a high pressure.

  As a result, the working fluid F2 corresponding to the volume Cdq is rapidly sucked from the flow path 13a to the first pump chamber 11a and is rapidly discharged from the second pump chamber 12a to the flow path 13a. In this case, similarly to the times t3 to t4, the second pump 12 applies a force (pressing force) for moving the moved fluid F1 in the positive direction of the X axis via the working fluid F2 that is rapidly discharged. To F1. Further, since the working fluid F2 is sucked from the flow path 13a to the first pump chamber 11a, this suction force also acts on the moved fluid F1 as a force for moving the moved fluid F1 in the positive direction of the X axis. Furthermore, the pressure increase absorption part of the flow path 13a has also disappeared at times t5 to t6. Accordingly, the moved fluid F1 starts to move immediately in the positive direction of the X axis immediately after time t5, and returns to the initial position at time t6.

  Thereafter, in the example illustrated in FIG. 6, the moved fluid moving device 10 performs the same operation at time t3 to t4 and time t5 to t6 at time t7 to t8 and time t9 to t10, respectively.

  When a switch (not shown) of the electric control device 20 is cut off at time t11, the electric control device 20 sets the second pump drive voltage V2 to 0 (V). As a result, the volume of the second pump chamber 12a increases from the standby volume Cst by the minute volume ΔC at times t11 to t12, and becomes the initial volume C0 at time t12. At this time, the changing speed of the volume of the second pump chamber 12a is the first speed. Therefore, in this case, the moved fluid F1 does not move.

  As described above, according to the moved fluid moving device 10 of the second embodiment, the second pump 12 is gently driven prior to driving the first pump 11 and the second pump 12 for moving the moved fluid F1. By doing so (by driving so that the volume change speed becomes the first speed), the working fluid F2 is gently discharged into the flow path 13a, whereby the flow path unavoidably present in the flow path 13a. The part which absorbs the pressure rise in 13a is extinguished, and the to-be-moved fluid moving device 10 is set to a standby state.

  Accordingly, when the volume of the first pump chamber 11a is decreased at a second speed larger than the first speed, the working fluid F2 is rapidly discharged into the flow path 13a, and the moved fluid F1 in the flow path 13a. The pressure of the working fluid F2 on the first opening 14a1 side immediately rises and immediately moves the fluid F1 to be moved. As a result, a moved fluid moving device having very good responsiveness is provided.

Further, when the volume of the first pump chamber 11a is decreased at the second speed, the volume of the second pump chamber 12a is increased at a third speed equal to the second speed. Therefore, the suction force of the working fluid F2 by the second pump 12 immediately acts on the moved fluid F1 via the working fluid F2, and the moved fluid F1 moves immediately. In other words, since the differential pressure due to the first pump 11 and the second pump 12 immediately acts on the fluid F1, the fluid F1 moves immediately. As a result, a moved fluid moving device having very good responsiveness is provided.
(Third embodiment)
Next, a third embodiment of the moved fluid moving device according to the present invention will be described. The moved fluid moving device 30 of the third embodiment includes a first pump 31, a second pump 32, and a third pump 33 as shown in FIG. The first to third pumps 31 to 33 contain the working fluid F2, respectively, and have the same shape as the flow path 13a of the first embodiment, and have a first opening in the flow path 13b accommodated in the base body 30a. -It is connected through the third opening.

  The flow path 13b accommodates the fluid F1 to be moved and the working fluid F2 in the same manner as the flow path 13a. In addition, two electrodes 34a and 34b that are electrically insulated from each other are disposed in the flow path 13b. The electrode 34a and the electrode 34b are exposed to the flow path 13b so as to face each other across the flow path 13b at a position closer to the X axis than the first opening.

  Actuators (not shown) of the first to third pumps 31 to 33 are electrically connected to an electric control device (not shown), respectively, and a first pump drive voltage V1, a second pump drive voltage V2, and a third pump drive voltage V3. Are given respectively.

  In the first pump 31, the volume of the pump chamber (first pump chamber) when the first pump drive voltage V1 is not applied (when the first pump drive voltage V1 is 0 (V)) is defined as the initial volume. In this case, the pressure can be increased / decreased so that the volume of the first pump chamber can be increased or decreased from the initial volume. Similarly to the first pump 31, the third pump 33 is a pump capable of pressure increase / decrease, in which the volume of the third pump chamber can be increased or decreased from the initial volume. On the other hand, the second pump 32 can be increased or decreased in the volume range in which the volume of the pump chamber is smaller than the initial volume, but has a structure (a pressurizing pump) that does not become larger than the initial volume. Note that the second pump 32 may also be a pump capable of pressure increase / decrease similar to the first pump 31 and the third pump 33.

  When the moved fluid moving device 10 is in the initial state, the moved fluid F1 exists in the flow path 13a between the first opening of the first pump 31 and the third opening of the third pump, and the flow path 13a. The working fluid F <b> 2 is configured to exist in a position that is opposed to the second opening of the second pump and the third opening of the third pump. Further, the moved fluid F1 is adjusted so as to be positioned on the X axis positive direction side with respect to the pair of electrodes 34a and 34b when the moved fluid moving device 10 is in the initial state.

  Next, the operation of the moved fluid moving device 30 will be described with reference to the time chart of FIG. Similarly to the first and second embodiments, the moved fluid moving device 30 also moves the moved fluid while maintaining the state in which the pressure in the flow path 13b is always higher than the pressure outside the container. To do. However, the second pump 32 is used as a dedicated pump for constantly increasing the pressure in the flow path 13b above the pressure outside the container.

  Specifically, as shown at times t0 to t1 in FIG. 8, when the moved fluid moving device 30 is in the initial state (“off” state), the electric control device performs the first to third pump drive voltages. All of V1 to V3 are maintained at 0 (V).

  When a switch (not shown) of the electric control device is turned on at time t1, the electric control device sets the second pump drive voltage V2 to a positive voltage of the absolute value Vst. As a result, the pump chamber volume of the second pump 32 decreases from the initial volume immediately after the time t1 at a gradual first speed by the minute volume ΔC, and becomes the standby volume Cst before the time t2.

  As a result, the working fluid F2 corresponding to the minute volume ΔC is gently discharged from the second pump 32 into the flow path 13b. In this case, since the first speed of the working fluid F2 discharged into the flow path 13b is sufficiently small, a minute amount formed between the fluid F1 to be moved and the flow path 13b (the corner of the flow path 13b). It is used without excess or deficiency in order to pass through a large gap and eliminate the pressure rise absorption part (rattle) of the flow path 13b. Therefore, the moved fluid F1 maintains the state stopped at the initial position. Such a state is called a standby state.

  Next, when it becomes necessary to move the moved fluid F1 in the negative direction of the X-axis at time t2, the electric control device sets the first pump drive voltage V1 to a positive voltage of the absolute value Vdr. As a result, the volume of the first pump 31 decreases by the volume Cdr at a second speed greater than the first speed immediately after time t2.

  In addition, the electric control device 20 sets the third pump drive voltage V3 to a negative voltage having an absolute value Vdr at time t2. As a result, the volume of the third pump 33 increases by the volume Cdr at a third speed (a speed equal to the second speed) greater than the first speed immediately after time t2.

  As a result, the working fluid F2 for the volume Cdr is suddenly discharged from the first pump 31 into the flow path 13b, and the working fluid F2 for the volume Cdr is rapidly sucked from the flow path 13b to the third pump 33. The In this case, since the second speed of the working fluid F2 discharged from the first pump 31 into the flow path 13b is sufficiently larger than the first speed, the fluid F1 to be moved and the flow path 13a (the angle of the flow path 13a). Part) is hardly passed through the minute gap formed between them. As a result, the first pump 31 applies a force (pressing force) for moving the moved fluid F1 in the negative direction of the X axis to the moved fluid F1 via the working fluid F2 that is rapidly discharged.

  Further, since the working fluid F2 is sucked from the flow path 13b to the third pump 33, this suction force also directly acts on the moved fluid F1 as a force for moving the moved fluid F1 in the negative X-axis direction. Furthermore, at time t2, the pressure increase absorption part (rattle) in the flow path 13b disappears. Therefore, the fluid F1 to be moved immediately starts moving in the negative direction of the X axis immediately after time t2, and thereafter the electrodes 34a and 34b are brought into conduction.

  Next, when it becomes necessary to move the moved fluid F1 toward the initial position in the X-axis positive direction at time t3, the electric control device sets both the first pump driving voltage V1 and the third pump driving voltage V3 to 0. Set to (V). However, the electric control device maintains the second pump drive voltage V2 at Vst (V). As a result, the volume of the first pump 31 increases by the volume Cdr at the second speed immediately after time t3, and the volume of the third pump 33 increases to the third speed (in this example, the second speed and the speed immediately after time t3). Is equal), the volume is reduced by Cdr.

  As a result, the working fluid F2 corresponding to the volume Cdr is rapidly sucked from the flow path 13b to the first pump 31, and the working fluid F2 for the volume Cdr is rapidly discharged from the third pump 33 to the flow path 13b. Is done.

  In this case, the working fluid F2 that is suddenly discharged from the third pump 33 into the flow path 13b has a third speed sufficiently higher than the first speed, so the fluid F1 and the flow path 13a (flow path 13a Most of the minute gaps formed between the two corners are not passed. As a result, the third pump 33 applies a force (pressing force) for moving the moved fluid F1 in the positive direction of the X-axis to the moved fluid F1 via the working fluid F2 that is rapidly discharged.

  Further, since the working fluid F2 is rapidly sucked from the flow path 13b to the first pump 31, this suction force also directly acts on the moved fluid F1 as a force for moving the moved fluid F1 in the positive direction of the X axis. Further, at time t3, the pressure increase absorbing portion (rattle) in the flow path 13b disappears due to the gradual discharge of the working fluid from the second pump 32 immediately after time t1. Therefore, the fluid F1 to be moved immediately starts moving in the positive direction of the X axis immediately after time t3, and thereafter the electrode 34a and the electrode 34b are brought into a non-conductive state.

  Thereafter, in the example illustrated in FIG. 8, the moved fluid moving device 30 performs the same operations at time t4 and time t5 as at time t2 and time t3, respectively. Then, when a switch (not shown) of the electric control device is cut off at time t6, the electric control device sets the second pump drive voltage V2 to 0 (V). As a result, immediately after time t6, the pump chamber volume of the second pump 32 increases from the standby volume Cst by the minute volume ΔC at the first speed to the initial volume C0. At this time, the change speed of the volume of the second pump 32 is the first speed. Therefore, in this case, the moved fluid F1 does not move.

  Thus, according to the moved fluid moving device 30 of the third embodiment, prior to driving the first pump 31 and the third pump 33 for moving the moved fluid F1, the second pump 32 is gently moved ( The second pump chamber is driven so that the volume of the second pump chamber decreases at the first speed, thereby eliminating the portion that absorbs the pressure increase in the flow path 13b that is unavoidably present in the flow path 13b. The mobile device 30 is set to a standby state.

  Therefore, if the volume of the first pump 31 is reduced at a second speed greater than the first speed and the volume of the third pump 33 is increased at a third speed greater than the first speed, The moving fluid F1 immediately starts moving in the X-axis negative direction. As a result, a moved fluid moving device having very good responsiveness is provided.

When the pump chamber volume of the first pump 31 is decreased at the second speed and the volume of the third pump 33 is increased at the third speed, the moved fluid F1 immediately moves in the positive direction of the X axis. Start. As a result, a moved fluid moving device having very good responsiveness is provided. As a result, a moved fluid moving device having very good responsiveness is provided.
(Fourth embodiment)
Next, a fluid movement device 40 according to a fourth embodiment of the present invention will be described. As shown in FIGS. 9A to 9C, which are schematic plan views, the fluid movement device 40 to be moved is the same as the flow path 13a of the first embodiment. The flow path 13c, the first pump 41, the second pump 42, the communication path 13d, the electrode 43a, the electrode 43b, and an electric control device (not shown) are provided.

  The first pump 41 is the same pump as the first pump 11, and is connected to a first opening formed at a substantially central portion in the X-axis direction of the flow path 13 c via the first pump communication portion 41 a. . The working fluid F2 is accommodated in the first pump 41 and the first pump communication portion 41a.

  The second pump 42 is the same pump as the first pump 11 and communicates with the substantially central portion in the X-axis direction of the communication passage 13d via the second pump communication portion 42a. A working fluid F2 is accommodated in the second pump 42 and the second pump communication portion 41a. The cross-sectional area obtained by cutting the second pump communication portion 42a along the plane (ZX plane) orthogonal to the streamline direction (Y-axis direction) of the second pump communication portion 42a (that is, the communication to which the second pump 42 is connected). The opening of the passage 13d is an area of a cross section obtained by cutting the first pump communication portion 41a along a plane (Z-X plane) orthogonal to the streamline direction (Y-axis direction) of the first pump communication portion 41a (that is, the first pump communication portion 41a). It is larger than the area of the opening.

  The communication path 13d is a fluid path that communicates between both ends of the flow path 13c via a pair of second openings provided at both ends in the X-axis direction of the flow path 13c. The channel cross-sectional area of the communication path 13d is slightly smaller than the channel cross-sectional area of the channel 13c. The fluid F1 is accommodated in the approximate center of the flow path 13c in the X-axis direction, and the working fluid F2 is accommodated in the portion of the flow path 13c that is not filled with the fluid F1 and the communication path 13d. In the flow path 13c, the electrode 43a is disposed between the first opening and the second opening on the X axis negative side, and the electrode 43b is disposed between the first opening and the second opening on the X axis positive side. Yes.

  Similar to the electric control device 20, the electric control device applies the first pump drive voltage V <b> 1 to the first pump 41 and applies the second pump drive voltage V <b> 2 to the second pump 42. When the moved fluid moving device 40 is in an initial state in which both the first pump driving voltage V1 and the second pump driving voltage V2 are 0 (V), the moved fluid F1 is in the first state in the flow path 13c. It exists in the position which opposes opening, and the working fluid F2 in the flow path 13c is comprised so that it may exist in the position which opposes a pair of said 2nd opening.

  Next, the operation of the moving fluid moving device 40 thus formed will be described. The moved fluid moving device 40 discharges (injects) the moved fluid F1 from the first pump 41 while maintaining the state in which the pressure in the flow path 13c is always higher than the pressure outside the container. The moved fluid F1 is moved by cutting (separating) the moved fluid F1 with the jetted working fluid F2.

  That is, when the moved fluid moving device 10 is in the initial state ("off" state), the electric control device sets both the first pump driving voltage V1 and the second pump driving voltage V2 applied to the first pump 41 to 0. (V) is maintained. In such an initial state, as shown in FIG. 9A, the fluid F1 to be moved is present as a single block at a position facing the first opening communicated with the first pump 41, and the working fluid F2 Exists at a position facing the second opening. The volume of the pump chamber of the first pump 41 and the volume of the pump chamber of the second pump 42 are respectively the initial volume C0.

  When a switch (not shown) of the electric control device is turned on at time t1, the electric control device sets the second pump drive voltage V2 to a positive voltage of the absolute value Vst. As a result, the pump chamber volume of the second pump 42 decreases from the initial volume C0 immediately after time t1 at a gentle first speed by a minute volume ΔC, and becomes the standby volume Cst at time t2.

  As a result, the working fluid F2 corresponding to the minute volume ΔC is gently discharged from the second pump 42 into the flow path 13c via the communication path 13d. In this case, since the first speed of the working fluid F2 discharged into the flow path 13c is sufficiently small, a minute amount formed between the fluid F1 to be moved and the flow path 13c (the corner of the flow path 13c). It is used without excess or deficiency in order to pass through a large gap and eliminate the pressure rise absorption part (rattle) of the flow path 13c. Therefore, the moved fluid F1 maintains the state stopped at the initial position. In this case, since the electrode 43a and the electrode 43b are covered with the transferred fluid F1 that is one liquid mass, the electrode 43a and the electrode 43b become conductive. Such a state is called a standby state.

  Next, when it becomes necessary to move (separate) the fluid F1 to be brought into a non-conductive state at time t2, the electric control device sets the first pump drive voltage V1 to the absolute value Vdr. Set to positive voltage. As a result, the volume of the first pump 41 decreases at a second speed greater than the first speed immediately after time t2.

  In addition, the electric control device sets the second pump drive voltage V2 to a negative voltage (Vdr−Vst) at time t2. As a result, the volume of the second pump 42 increases at a third speed (a speed substantially equal to the second speed) greater than the first speed immediately after time t2.

  As a result, as shown in FIG. 9B, the working fluid F2 is rapidly discharged (injected) from the first pump 41 (from the first opening) toward the moved fluid F1 in the flow path 13c. . At this time, the pressure increase absorption part (rattle) of the flow path 13c has disappeared. Therefore, the fluid F1 to be moved starts to be cut from the substantially central portion (portion facing the first opening) without delay. Further, the working fluid F2 having a volume equal to the volume ejected from the first pump 41 into the flow path 13c is sucked into the second pump 42 through the pair of second openings and the communication path 13d. Therefore, the cutting of the moved fluid F1 is further promoted. At this time, the pressure in the flow path 13c is maintained at a pressure higher than the pressure outside the container.

  If the injection and suction of the working fluid F2 are continued, as shown in FIG. 9C, the fluid F1 is cut (separated) into two liquid masses and moved from the initial position. . As a result, the electrode 43a and the electrode 43b are brought out of conduction.

  Thereafter, when it becomes necessary to make the electrodes 43a and 43b conductive, the electric control device returns the second pump drive voltage V2 to Vst and returns the first pump drive voltage V1 to 0 (V). Thereby, the working fluid F2 flows from the second pump 42 into the flow path 13c through the communication path 13d and the pair of second openings, and is also moved (separated) into two liquid masses. The working fluid F2 between the two is sucked into the first pump 41 through the first opening. As a result, the moved fluid F1 becomes one liquid mass, and the moved fluid moving device 40 returns to the initial state shown in FIG.

  As described above, in the moved fluid moving device 40, the incompressible working fluid F2 is jetted from the first opening toward the moved fluid F1 in the flow path 13c by the operation of the first pump 41, The fluid F1 to be moved is cut and moved by the jetted working fluid F2. The working fluid F2 is incompressible, the working fluid F2 is immediately injected by changing the pump chamber volume of the first pump 41, and the pressure rise absorbing portion in the flow path 13c has disappeared at the time of injection. Since the moved fluid moving device 40 is in the standby state, the moved fluid F1 and the working fluid F2 are prevented from moving. As a result, the moved fluid moving device 10 can cut and move the moved fluid F1 with extremely high responsiveness.

  Further, the actuator of the first pump 41 is a film type piezoelectric element, and the film type piezoelectric element exerts a large force from the initial stage of driving (immediately after the start of applying the driving voltage), so that the ceramic diaphragm is deformed in about microseconds, for example Can be made. As a result, the moved fluid moving device 10 can inject the working fluid F2 without time delay. Furthermore, according to the film type piezoelectric element, the discharge force and / or the suction force of the first pump 41 can be extremely increased. Therefore, the moved fluid moving device 40 having extremely high responsiveness can be provided.

  In the moved fluid moving device 40, the first pump 41 is configured to eject the moved fluid F1 in a predetermined ejection direction (Y-axis negative direction) through the first opening. The length of the first opening along the streamline direction (X-axis direction) of the flow path 13c of the injected working fluid F2 is within the plane (XZ plane) perpendicular to the injection direction. It is advantageous that the length is shorter than the length along the direction (Z-axis direction) substantially orthogonal to the streamline direction.

  According to this, since the working fluid F2 ejected from the first opening has a wedge shape (a dam shape or a sharp blade shape), the moved fluid F1 can be cut in a shorter time. The responsiveness of the fluid movement device 40 can be improved.

  In addition, this invention is not limited to the said embodiment, A various modification can be employ | adopted within the scope of the present invention. For example, the piezoelectric / electrostrictive material film for deforming the diaphragm is replaced with an antiferroelectric material film (antiferroelectric film) based on the basic configuration of each transferred fluid moving device disclosed in the present invention. Can do. Further, the number of pumps for one flow path may be any number.

  Further, in each of the above embodiments, when shifting from the initial state to the standby state in which the portion that absorbs the pressure increase in the flow passage unavoidably present in the container is substantially eliminated, Although the volume of the pump chamber of only one of the first pump and the second pump has been reduced at the first speed, the first pump chamber and the second pump are both driven, The volume of the sum of the two pump chambers may be reduced at the first speed.

Further, the above-mentioned container constituting the device for moving the object to be moved is manufactured by laminating and bonding a silicon substrate, a glass substrate, a plastic substrate such as polymethyl metalate or polycarbonate, or a ceramic substrate. can do. For bonding, an ultraviolet curable resin or a thermosetting resin can be used. In addition, the substrates can be joined to each other by sandwiching a gasket of silicon resin between the substrates and fastening the substrates together with screws or the like. Further, when the silicon substrate and the glass substrate are bonded, an anodic oxidation bonding method can also be used. When a ceramic green sheet is used as the substrate material, the ceramic green sheets can be laminated and then fired for integration.

03P13US partial start

Furthermore, the following second invention is provided in the present application. The second invention is a device that can be applied to a microelectromechanical component called a micromachine such as a micromotor, a microsensor, a microrelay, or a microelectromechanical system (MEMS), an electrical path, or an optical path. The present invention relates to a switching device that can be used for, for example, a device that can be used as a drive source such as a cylinder and the like, and a device that moves a moving object in a flow path.

  In recent years, development of micro-motors, micro-sensors, micro-switches and the like of several millimeters to several tens of microns has been promoted using micro-fabrication technology of materials represented by semiconductor manufacturing technology. These element devices include, for example, inkjet printer heads, microvalves, flow sensors, pressure sensors, recording heads, tracking servo actuators, on-chip biochemical analysis, microreactors, high-frequency switching devices, micromagnetic devices, microrelays, acceleration sensors. , Gyros, driving devices, displays, optical scanners, and so on.

  One of the switch devices known as an example of such an element device is an elongated channel (flow channel) filled with a conductive fluid (movable body, fluid to be moved) and gas (working fluid), gas heating. Means for connecting the chamber filled with the gas and a sub-channel (communication path) filled with the gas, and heating the gas with the heating means to expand the gas. Thus, the conductive fluid is moved in the channel, thereby opening and closing an electric path containing the conductive fluid (for example, Japanese Patent Application Laid-Open No. 2002-260499 (page 1-6, FIG. 11, FIG. 13, FIG. 14 and FIG. 15).

  However, the above-described conventional apparatus is configured to heat and expand a compressible gas by a heating means, and to move the conductive fluid using a pressure that rises as the gas expands. There is a problem that it takes a long time from the start of heating of the gas by means until the conductive fluid moves, and the responsiveness is not good.

  In order to solve this problem, it is conceivable to use, for example, a pump that changes the volume by a piezoelectric body and allows the working fluid to enter and exit the flow path instead of the heating means. According to this, since the time from the start of operation of the pump to the time when the moved fluid starts moving is short, a highly responsive device can be provided.

  By the way, the container constituting the device for moving the object to be moved is manufactured by laminating and bonding a silicon substrate, a glass substrate, a plastic substrate such as polymethyl metalate or polycarbonate, or a ceramic substrate. be able to. For bonding, an ultraviolet curable resin or a thermosetting resin can be used. In addition, the substrates can be joined to each other by sandwiching a gasket of silicon resin between the substrates and fastening the substrates together with screws or the like. Furthermore, when bonding a silicon substrate and a glass substrate, an anodic oxidation bonding method can also be used. When a ceramic green sheet is used as the substrate material, the ceramic green sheets can be laminated and then fired for integration.

  However, even if the container is produced using any method, the container cannot be made completely rigid (ie, rigid) and absorbs the pressure change inside the container (that is, absorbs pressure change). Part, so-called “play (play)”), it takes time from the start of the pump operation until the working fluid starts to move, and as a result, the operation of the device that moves the moving object There is a problem that is delayed.

  That is, for example, when the rigidity of the substrate constituting the container is low, the pressure change due to the pump operation is absorbed by the deformation of the substrate. Even when the rigidity of the substrate is high, when the substrate is bonded by a resin, the pressure change due to the pump operation is absorbed by the deformation of the resin. When a container is produced by anodic oxidation bonding or firing integration, the rigidity of the container itself is high. However, in general, the fluid to be moved and the working fluid must be filled through the inlet provided in the flow path after the container is manufactured. After filling the working fluid, the inlet is sealed with an ultraviolet curable resin or the like. Since it must be stopped, the pressure change due to the pump operation is absorbed by the deformation of the resin. Furthermore, bubbles may be mixed in the flow path when the working fluid is filled and the inlet is sealed, and pressure changes due to the pump operation may be absorbed by the bubbles.

  Accordingly, an object of the second aspect of the invention is to provide a device that moves a moving object in a flow path that has extremely good responsiveness and can be suitably used for, for example, a high-frequency switch.

  In order to achieve the above object, a device for moving a moving object in a flow channel according to the present invention comprises a container and an electric control device, and is a device for moving the moving object in a flow channel, wherein the container Includes a flow path forming portion that forms a flow path that is a sealed space, and a substantially incompressible movable body that is accommodated in the flow path so as to be substantially separated into two. And a substantially incompressible working fluid contained in the flow path, and a first pump chamber in communication with a first opening provided in the flow path. A first pump that sucks the working fluid in the flow path into the first pump chamber through the first opening by increasing the volume of the chamber, and a second opening provided in the flow path. Operation within the flow path by including the second pump chamber and increasing the volume of the second pump chamber in response to the drive signal The body contains a second pump which sucks in the second pump chamber through the second opening.

  Further, the electric control device generates a drive signal for increasing the sum of the volume of the first pump chamber and the volume of the second pump chamber at a first speed when the device is in an initial state. By gently sucking the working fluid from the passage through the first opening and / or the second opening, the pressure in the flow path of the device becomes lower than the pressure outside the container. A transition is made to the standby state, and when the device is in the standby state, a drive signal for increasing the volume of the second pump chamber at a second speed larger than the first speed is generated from the same flow path. The moving body is configured to move in the flow path by rapidly sucking the working fluid through the second opening.

  In this case, the object to be moved may be a solid. Moreover, the said to-be-moved body may be an incompressible fluid (namely, to-be-moved fluid). When the moving body is an incompressible moving fluid, the working fluid is substantially insoluble in the moving fluid and the wettability with respect to the wall surface of the flow path is the same as that of the moving fluid. It is preferable that the wettability with respect to the wall surface of the flow path is better. According to this, the wettability with respect to the flow path of the fluid to be moved is not better than the wettability with respect to the flow path of the working fluid, so that the fluid to be moved is fluid in the closed flow path so as to minimize the surface area. It exists as a lump. The working fluid fills a portion of the flow path where no fluid to be moved exists.

  In such a device having the above-described configuration for moving the object to be moved, when the device is in the initial state, the sum of the volume of the first pump chamber and the volume of the second pump chamber is increased at the first speed. In this case, only the volume of the first pump chamber or only the volume of the second pump chamber may be increased, and both the volume of the first pump chamber and the volume of the second pump chamber may be increased. As a result, the working fluid is gently sucked (exhausted) from the flow path through the first opening and / or the second opening, and the device indicates that “the pressure in the flow path is outside the container. Transition to “standby state where pressure is lower than pressure”. That is, the portion that absorbs the pressure drop in the flow path unavoidably present in the container (flow path) by the gentle suction of the working fluid substantially disappears. Since the suction of the working fluid at this time is gentle, the working fluid passes between the movable body and the wall surface of the flow path. Accordingly, the moving object does not substantially move.

  Next, when in the standby state, the volume of the second pump chamber is increased at a second speed greater than the first speed. As a result, the working fluid in the flow path is rapidly sucked into the second pump chamber through the second opening. At this time, since the portion that absorbs the pressure drop in the flow path has substantially disappeared, the pressure in the flow path immediately decreases. Therefore, the moving object immediately starts moving in the direction toward the second opening. As a result, a moved fluid moving device having very good responsiveness is provided.

  One aspect of the device for moving the moving object according to the present invention is that the moving object is present in at least the flow path between the first opening and the second opening when the device is in the standby state. The first pump can discharge the working fluid in the first pump chamber into the flow path through the first opening by reducing the volume of the first pump chamber. And the electric control device generates the drive signal for increasing the volume of the second pump chamber at the second speed when the device is in the standby state, and controls the pressure in the flow path. A third volume of the first pump chamber is set so that the working fluid in the first pump chamber is discharged into the flow path through the first opening while maintaining a pressure lower than the pressure outside the container. At the speed of It is configured to generate a drive signal for small.

  According to this, the working fluid is rapidly sucked from the flow path to the second pump chamber through the second opening, and the working fluid is discharged from the first pump chamber to the flow path through the first opening. The Accordingly, not only the suction force of the working fluid to the second pump acts on the moving body so as to move the moving body, but also the discharge force of the working fluid by the first pump is applied to the moving body via the working fluid. Works. At this time, since the pressure in the flow path is maintained lower than the pressure outside the container, the moving body and the working fluid in the flow path move as if they were rigid bodies. As a result, it is possible to provide a device that moves the moving object with further improved responsiveness.

  Another device for moving a moving object according to the present invention is a device that includes a container and an electric control device, and that moves the moving object in a flow path, wherein the container is a sealed space. A flow path forming portion that forms a path; a substantially incompressible movable body that is accommodated in the flow path so as to be substantially separated into two; and the flow path is accommodated in the flow path. It includes a substantially incompressible working fluid and a first pump chamber communicated with a first opening provided in the flow path to increase the volume of the first pump chamber in response to a drive signal. The drive signal includes a first pump that sucks the working fluid in the flow path into the first pump chamber through the first opening, and a second pump chamber communicated with the second opening provided in the flow path. In response, the volume of the second pump chamber is increased to allow the working fluid in the flow path to pass through the second opening. Including a second pump sucked into the second pump chamber and a third pump chamber communicating with a third opening provided in the flow path, and reducing the volume of the third pump chamber in response to a drive signal And a third pump for discharging the working fluid in the third pump chamber into the flow path through the third opening, and when the device is in an initial state, the movable body is at least the first pump. The electrical control device is configured to exist in the flow path between the first opening and the third opening and the working fluid exists at a position facing the second opening. And generating a drive signal for increasing the volume of the second pump chamber at a first speed to gently suck the working fluid from the flow path through the second opening. The pressure in the flow path Transition to a standby state where the pressure is lower than the pressure outside the body, and when the device is in the standby state, the volume of the first pump chamber is increased at a second speed larger than the first speed. While generating a drive signal and aspirating the working fluid from the flow path through the first opening, while maintaining the pressure in the flow path at a pressure lower than the pressure outside the container A drive signal for reducing the volume of the third pump chamber at a third speed is generated so that the working fluid is discharged into the flow path through the third opening.

  According to this, when the device is in the initial state, the object to be moved is present in at least the flow path between the first opening and the third opening. First, the volume of the second pump chamber is increased at the first speed, and the working fluid is gently sucked (discharged) from the flow path into the second pump chamber. As a result, the pressure in the flow path is lower than the pressure outside the container, and the device that moves the object to be moved is in the standby state. In addition, since the working fluid is sucked gently at this time, the working fluid passes between the moving body and the wall surface of the flow path, so that the moving body does not substantially move. Accordingly, the moving object still exists in the flow path between the first opening and the third opening.

  In such a standby state, the volume of the first pump chamber is increased at a second speed larger than the first speed, and the working fluid is aspirated (discharged) rapidly from the flow path, and the volume of the third pump chamber is increased. The working fluid is discharged to the flow path by being reduced at a third speed larger than the first speed.

  As a result, the pressure of the working fluid on the first opening side of the moving body decreases, and the pressure of the working fluid on the third opening side of the moving body increases. In addition, since the working fluid is rapidly sucked and discharged at this time, the working fluid cannot substantially pass between the movable body and the wall surface of the flow path. Accordingly, the moving object moves from the third opening toward the first opening. Further, at this time, the pressure in the flow path is maintained in a state lower than the pressure outside the container. Therefore, the movable body and the working fluid in the flow path move as if they were rigid bodies. As a result, it is possible to provide a device that moves the moving object with further improved responsiveness.

  Also in this case, the to-be-moved body may be a solid or an incompressible fluid (that is, a to-be-moved fluid). When the moving body is an incompressible moving fluid, the working fluid is substantially insoluble in the moving fluid and the wettability with respect to the wall surface of the flow path is the same as that of the moving fluid. It is preferable that the wettability with respect to the wall surface of the flow path is better.

Embodiments of a device for moving a moving object in a flow path according to the present invention will be described below with reference to the drawings. The moving object moved in the flow path may be an incompressible solid or a fluid (moving fluid) as described later. The solid as the object to be moved may have conductivity or may be a dielectric. When the moving body is a moving fluid, the device for moving the moving body in the flow path according to the present invention is also referred to as a “moving fluid moving device” or simply a “driving device”. The present invention is not limited to these embodiments, and various changes, modifications, and improvements can be added based on the knowledge of those skilled in the art without departing from the scope of the present invention.
(First embodiment)
10 is a plan view of the moved fluid moving device 10 according to the first embodiment of the present invention. FIG. 11 is a sectional view of the moved fluid moving device 10 taken along the line 1-1 in FIG. FIG. The electric control device 20 is conceptually shown in FIG. 10 and omitted in FIG.

  The moving fluid moving device 10 includes a base body 10a made of ceramics having a substantially rectangular parallelepiped shape having sides extending in the X-axis, Y-axis, and Z-axis directions orthogonal to each other, a first pump 11, and a second pump 12. And an electric control device 20. The base body 10a, the first pump 11 and the second pump 12 constitute a container for the fluid F1 and the working fluid F2.

  As shown in FIG. 11, the base body 10a is formed by laminating ceramic thin plate bodies (hereinafter referred to as "ceramic sheets") 10a1 to 10a3 in the Z-axis direction and integrating them by firing or bonding. Has been. As shown in FIGS. 10 and 11, the base body 10 a includes a flow path forming portion 13, a first pump communication portion 14, and a second pump communication portion 15 therein.

  The first pump 11 includes a first pump chamber 11a and an actuator 11b. The first pump chamber 11a includes a ceramic sheet 11a1 fixed to the upper surface of the ceramic sheet 10a3, and a diaphragm (ceramic diaphragm) 11a2 made of a thin ceramic plate that can be easily deformed. A working fluid F2 is accommodated in the first pump chamber 11a.

  The ceramic sheet 11a1 is circular in a plan view and has a hollow cylindrical through hole. The ceramic diaphragm 11a2 has the same circular shape as the ceramic sheet 11a1 in plan view, and is fixed to the upper part of the ceramic sheet 11a1 so as to close the upper surface of the through hole of the ceramic sheet 11a1. The first pump chamber 11a is a space defined by the side wall surface that forms the through hole of the ceramic sheet 11a1 and the lower surface of the ceramic diaphragm 11a2.

  The actuator 11b is a thin plate (thickness is, for example, about 20 μm) having the same circular shape as the through hole of the ceramic sheet 11a1 in plan view, and is fixed to the upper surface of the ceramic diaphragm 11a2. The actuator 11b is a film-type piezoelectric element composed of a piezoelectric film and at least a pair of electrodes, and deforms the ceramic diaphragm 11a2 when a drive voltage is applied between the electrodes. Thereby, the actuator 11b increases / decreases the volume of the first pump chamber 11a and increases / decreases the fluid in the first pump chamber 11a.

  In other words, the first pump 11 is a pump capable of discharging fluid by reducing the volume of the first pump chamber 11a from the initial volume when the drive voltage is not applied, and the volume of the first pump chamber 11a is reduced. It is also a pump capable of sucking fluid by increasing from its initial volume. The actuator 11b may be a film-type piezoelectric element including an electrostrictive film or an antiferroelectric film and at least a pair of electrodes sandwiching the film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  The second pump 12 includes a second pump chamber 12a and an actuator 12b that is a film-type piezoelectric element similar to the actuator 11b. The second pump chamber 12a includes a ceramic sheet 12a1 fixed to the upper surface of the ceramic sheet 10a3, and a diaphragm (ceramic diaphragm) 12a2 made of a thin ceramic plate that can be easily deformed. A working fluid F2 is accommodated in the second pump chamber 12a. Since the 2nd pump 12 is provided with the same composition as the 1st pump 11, detailed explanation is omitted.

  The second pump 12 increases or decreases the volume of the second pump chamber 12a by increasing or decreasing the volume of the second pump chamber 12a by deforming the ceramic diaphragm 12a2 when a drive voltage is applied between the electrodes of the actuator 12b. It is like that.

  In other words, the second pump 12 is a pump capable of sucking fluid by increasing the volume of the second pump chamber 12a from the initial volume when the drive voltage is not applied, and the volume of the second pump chamber 12a is reduced. It is also a pump capable of discharging fluid by reducing the initial volume. The actuator 12b may be a film-type piezoelectric element including an antiferroelectric film and at least a pair of electrodes sandwiching the antiferroelectric film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  In addition, when the 1st pump 11 attracts | sucks the working fluid F2 in a flow path, it may also aspirate the to-be-moved fluid F1 together. In other words, the fluid accommodated in the first pump 11 (and in the first pump communication portion 14) is not limited to the working fluid F2. Similarly, when the second pump 12 sucks the working fluid F2 in the flow path, the second pump 12 may suck the moving fluid F1 together. In other words, the fluid accommodated in the second pump 12 (and the second pump communication portion 15) is not limited to the working fluid F2.

  Here, exemplifying specific dimensions of the first and second pumps 11 and 12, the radii of the bottom surfaces (upper surfaces) of the hollow cylindrical first and second pump chambers 11a and 12a are about 0.5 mm. Each height is about 150 μm. Each radius of the circular thin plate-like ceramic diaphragms 11a2 and 12a2 is about 0.5 mm, and each thickness (height) is about 10 μm.

  The flow path forming unit 13 is a part constituting the flow path 13a. The flow path 13a is a sealed space defined by the side wall of the slit provided in the ceramic sheet 10a2, the upper surface of the ceramic sheet 10a1, and the lower surface of the ceramic sheet 10a3. Since the ceramic sheet is an insulator, no current flows through the wall surface of the flow path 13a.

  The flow path 13a is a linear, elongated, sealed space, and has a streamline direction (longitudinal axis) in a direction along the X axis. The flow path 13a is a plane orthogonal to the streamline direction (YZ plane), and a cross section obtained by cutting the flow path 13a (hereinafter, this cross section may be referred to as a “longitudinal cross section of the flow path”). It has a square shape. The flow path 13a is also called a microchannel. The length of the flow path 13a in the streamline direction is about 1 mm, and one side (height and width of the flow path) of the square in the longitudinal section is about several tens of μm.

  A fluid F1 and a working fluid F2 are accommodated in the flow path 13a, and the flow path 13a is substantially filled with these fluids. The fluid F1 to be moved is an incompressible and conductive fluid, and is mercury in this example. The moved fluid F1 may be incompressible, and may be a magnetic material, a liquid metal such as a gallium alloy, oil, or the like. The fluid F1 to be moved is agglomerated and exists in the flow path 13a. Thereby, the fluid F1 to be moved substantially separates the flow path 13a into two spaces, a space on the X axis positive direction side and a space on the X axis negative direction side.

  The working fluid F2 is a fluid that is insoluble in the fluid F1 to be moved, is substantially incompressible, and is insulating (non-conductive). In this example, the working fluid F2 is deionized water, but may be a highly permeable solvent fluorinate, paraffin-based electrical insulating oil, silicon oil, or the like. As the working fluid F2, a fluid is selected in which the wettability of the working fluid F2 with respect to the wall surface of the flow path 13a is better than the wettability of the transferred fluid F1 with respect to the wall surface of the flow path 13a.

  As shown in FIG. 10, four electrodes 21a, 21b, 22a, and 22b that are electrically insulated from each other are disposed in the flow path 13a. The electrode 21a and the electrode 21b flow at a position on the X-axis positive side with respect to the central portion in the X-axis direction of the base body 10a and at a position on the X-axis negative side with respect to the first pump communication portion 14 (first opening described later). It is exposed to the flow path 13a so as to face each other across the path 13a. The electrode 22a and the electrode 22b are disposed at a position on the X axis negative side with respect to the central portion in the X axis direction of the base 10 and at a position on the X axis positive side with respect to the second pump communication portion 15 (second opening described later). It is exposed to the flow path 13a so as to face each other across the path 13a.

  The electrodes 21a, 21b, 22a, and 22b are connected to a circuit (not shown) outside the base body 10a via wirings (not shown). The electrode 21a and the electrode 21b are arranged so as to be in a non-conductive state when the fluid F1 to be moved is present at a substantially central portion in the X-axis direction of the base body 10a (that is, when the fluid movement device 10 is in the initial state). It is installed. Further, the electrode 21a and the electrode 21b are disposed so as to be in a conductive state via the moved fluid F1 when the moved fluid F1 is moved to the positive side of the X axis.

  Similarly, the electrode 22a and the electrode 22b are disposed so as to be in a non-conductive state when the fluid F1 to be moved is present at a substantially central portion in the X-axis direction of the base body 10a. Further, the electrode 22a and the electrode 22b are arranged so as to be in a conductive state via the moved fluid F1 when the moved fluid F1 is moved to the X axis negative side.

  The 1st pump communication part 14 is a part which forms the 1st flow-path connection part 14a and the 1st pump connection part 14b. The first pump communication portion 14 is formed by a side wall of a slit provided in the ceramic sheet 10a2, a space defined by the upper surface of the ceramic sheet 10a1 and the lower surface of the ceramic sheet 10a3, and a columnar through hole provided in the ceramic sheet 10a3. A defined space.

  One end of the first flow path connecting portion 14a is connected to the flow path 13a in the vicinity of the end in the X-axis positive direction of the flow path 13a, and the first opening 14a1 is formed in the flow path 13a. . The first pump connection portion 14b communicates the other end portion of the first flow path connection portion 14a with the first pump chamber 11a. The working fluid F2 is accommodated in the first flow path connection portion 14a and the first pump connection portion 14b.

  The first opening 14a1 is in a direction (in this case, the Z-axis direction) orthogonal to the streamline direction along the streamline direction (X-axis direction) of the flow path 13a in the front view (viewed from the Y-axis direction). It has a substantially square shape consisting of sides along.

  The first flow path connecting portion 14a has a direction orthogonal to the streamline direction (X-axis direction) of the flow path 13a from the first opening 14a1 (one end portion of the first flow path connecting portion 14a) in plan view. In this case, it extends in the Y-axis direction). The first flow path connecting portion 14a has the other end portion between the first pump 11 and the flow path 13a in plan view. The first flow path connection portion 14a has a cross section obtained by cutting the first flow path connection portion 14a along a plane (XZ plane) orthogonal to the streamline direction (Y-axis direction) of the first flow path connection portion 14a. The first opening 14a1 has the same substantially square shape.

  The first pump connection portion 14b extends in the Y-axis direction from the position of the other end of the first flow path connection portion 14a to a position directly below the first pump chamber 11a in plan view. The first pump connection portion 14b has a cross section obtained by cutting the first pump connection portion 14b along a plane (XZ plane) orthogonal to the streamline direction (Y-axis direction) of the first flow path connection portion 14a. It has a rectangular shape consisting of a side along the direction and a side along the X-axis direction.

  The end of the first pump connecting portion 14b in the positive Y-axis direction is an arc shape (semi-circular) having a radius that is concentric with the first pump chamber 11a in plan view and slightly smaller than the radius of the first pump chamber 11a. It has become. The first pump connection portion 14b is connected to the first pump chamber 11a via a cylindrical through hole of the ceramic sheet 10a3 having a central axis extending in the Z-axis direction below the first pump chamber 11a.

  The 2nd pump communication part 15 is a part which forms the 2nd flow-path connection part 15a and the 2nd pump connection part 15b. The second pump communication portion 15 is formed by a slit side wall provided in the ceramic sheet 10a2, a space defined by the upper surface of the ceramic sheet 10a1 and the lower surface of the ceramic sheet 10a3, and a cylindrical through-hole provided in the ceramic sheet 10a3. A defined space.

  One end of the second flow path connecting portion 15a is connected to the flow path 13a in the vicinity of the end in the negative X-axis direction of the flow path 13a, and a second opening 15a1 is formed in the flow path 13a. The second pump connection part 15b communicates the other end of the second flow path connection part 15a with the second pump chamber 12a. The working fluid F2 is accommodated in the second flow path connection portion 15a and the first pump connection portion 15b. The second flow path connection portion 15a has the same structure as the first flow path connection portion 14a.

  The 2nd pump connection part 15b has the same structure as the 1st pump connection part 14b. Further, the relationship between the second pump connection portion 15b and the second flow path connection portion 15a is the same as the relationship between the first pump connection portion 14b and the first flow path connection portion 14a. Furthermore, the relationship between the second pump connection portion 15b and the second pump chamber 12a is the same as the relationship between the first pump connection portion 14b and the first pump chamber 11a.

  The electric control device 20 is electrically connected between the electrodes of the actuator 11b of the first pump 11, applies a drive voltage (first pump drive voltage) V1 between the electrodes of the actuator 11b, and also supplies the second pump. The two actuators 12b are electrically connected to each other, and a drive voltage (second pump drive voltage) V2 is applied between the electrodes of the actuator 12b.

  Next, the operation of the moved fluid moving device 10 configured as described above will be described with reference to FIGS. 12 and 13. 12A and 12B are diagrams conceptually showing the state of the container of the fluid-moving device 10 to be moved. 12A shows an initial state, and FIG. 12B shows an operating state. FIG. 13 shows, in order from the top, the volume of the first pump chamber 11a, the first pump drive voltage V1 applied between the electrodes of the actuator 11b of the first pump 11, the position of the fluid F1 to be moved in the flow path 13a, 2 is a time chart showing a second pump drive voltage V2 applied between electrodes of an actuator 12b of a two-pump 12 and a volume of a second pump chamber 12a.

  First, an outline of the operation of the moved fluid moving device 10 will be described. As shown in FIG. 12A, the first pump driving voltage V1 is not applied between the electrodes of the actuator 11b of the first pump 11, and the second pump driving is performed between the electrodes of the actuator 12b of the second pump 12. In the initial state where the voltage V2 is not applied, the fluid F1 to be moved exists as a single block at a position approximately in the center of the flow path in the X-axis direction (hereinafter also referred to as “initial position”).

  That is, since the wettability of the fluid F1 to the wall surface of the flow path 13a is not better than the wettability of the working fluid F2 to the wall surface of the flow path 13a, the fluid F1 to be moved is sealed to minimize the surface area. It exists as a mass of fluid in the flow path 13a. At this time, the moved fluid F1 substantially contacts the wall surface excluding the corners of the flow path 13a, and the flow path 13a is separated into two spaces, a space on the X axis positive direction side and a space on the X axis negative direction side. To do. The working fluid F2 fills a portion of the flow path where the moved fluid F1 does not exist.

  As can be understood from FIGS. 10, 11 and 12A, when the fluid movement device 10 is in the initial state, the fluid F1 is moved between the first opening 14a1 and the second opening 15a1. The working fluid F2 is configured to be present in the flow path 13a and at a position facing each of the first opening 14a1 and the second opening 15a1 in the flow path 13a.

  On the other hand, as shown in FIG. 12B, a negative second pump drive having a large absolute value that applies an electric field having a polarity opposite to the polarization direction of the piezoelectric film between the electrodes of the actuator 12b of the second pump 12. When the voltage V2 is applied, the actuator 12b immediately bends and displaces the ceramic diaphragm 12a2. Thereby, the volume of the 2nd pump chamber 12a increases, and the 2nd pump 12 attracts | sucks the working fluid F2 from the flow path 13a via the 2nd pump communication part 15 (2nd opening 15a1). When an electric field having a polarity opposite to the polarization direction of the piezoelectric film is applied, it is necessary to apply a voltage within a range where no polarization inversion occurs. That is, the maximum value of the voltage that can be applied (maximum voltage that can be applied) exists in the piezoelectric film depending on the material of the piezoelectric film. Therefore, the absolute value of the second pump drive voltage V2 is designed to be a voltage that does not exceed the maximum applicable voltage. The same applies hereinafter.

  At this time, if a positive first pump drive voltage V1 having a large absolute value is applied between the electrodes of the actuator 11b of the first pump 11 to apply an electric field having the same polarity as the polarization direction of the piezoelectric film, the actuator 11b is caused to be a ceramic diaphragm. 11a2 is immediately bent and displaced downward. As a result, the volume of the first pump chamber 11a decreases, and the first pump 11 discharges the working fluid F2, which is an incompressible fluid, into the flow path 13a through the first pump communication portion 14 (first opening 14a1). To do. As a result, the moved fluid F1 moves in the negative direction of the X-axis, contacts the electrode 22a and the electrode 22b, and conducts them.

  To return from this state (the state shown in FIG. 12B) to the initial state, both the first pump drive voltage V1 and the second pump drive voltage V2 are set to 0 (V) (disappear). Thereby, since the volume of the 1st pump chamber 11a increases toward an initial state, the 1st pump 11 attracts | sucks the working fluid F2 from the flow path 13a. Moreover, since the volume of the 2nd pump chamber 12a reduces toward an initial state, the 2nd pump 12 discharges the working fluid F2 to the flow path 13a. As a result, the fluid F1 to be moved moves in the positive direction of the X axis and is not in contact with the electrodes 22a and 22b, thereby making them non-conductive.

  Further, in order to move the moved fluid F1 in the positive direction of the X-axis and bring the electrodes 21a and 21b into conduction by the moved fluid F1, the polarization direction of the piezoelectric film between the electrodes of the actuator 11b of the first pump 11 The negative first pump drive voltage V1 having a large absolute value for applying an electric field having a polarity opposite to that of the second pump 12 is applied, and an electric field having the same polarity as the polarization direction of the piezoelectric film is applied between the electrodes of the actuator 12b of the second pump 12. A positive second pump drive voltage V2 having a large value is provided.

  Thereby, since the volume of the 1st pump chamber 11a increases, the 1st pump 11 attracts | sucks the working fluid F2 from the flow path 13a. Further, since the volume of the second pump chamber 12a decreases, the second pump 12 discharges the working fluid F2 to the flow path 13a. As a result, the fluid F1 to be moved moves in the positive direction of the X axis, contacts the electrodes 21a and 21b, and conducts them. In this state, if both the first pump drive voltage V1 and the second pump drive voltage V2 are set to 0 (V) (disappear), the fluid F1 moves in the X-axis negative direction to move the electrode 21a and the electrode 21b becomes non-contact, and these are made non-conductive. The above is the outline of the operation of the moved fluid moving device 10.

  Next, the actual operation of the moved fluid moving device 10 will be described. The moved fluid moving device 10 moves the moved fluid F1 in a state where the pressure in the flow path 13a is always lower than the pressure outside the container.

  That is, as shown at times t0 to t1 in FIG. 13, when the fluid-moving device 10 is in the initial state (“off” state), the electric controller 20 controls the first pump drive voltage V1 and the second pump drive. All of the voltages V2 are maintained at 0 (V). At this time, the volume of the first pump chamber 11a and the volume of the second pump chamber 12a are each the initial volume C0.

  When a switch (not shown) of the electric control device 20 is turned on at time t1, the electric control device 20 sets the second pump drive voltage V2 to a negative voltage of the absolute value Vst. As a result, the volume of the second pump chamber 12a increases from the initial volume C0 by the minute volume ΔC at times t1 to t2, and becomes the standby volume Cst at time t2. At this time, the rate of change in volume of the second pump chamber 12a (absolute value thereof) = ΔC / (t2−t1) is referred to as a first speed for convenience.

  As a result, the working fluid F2 corresponding to the minute volume ΔC is gently sucked from the flow path 13a to the second pump chamber 12a via the second opening 15a1 (the working fluid F2 is drawn from the flow path 13a by the second pump 12). Discharged.) In this case, the working fluid F2 located on the second opening 15a1 side with respect to the moved fluid F1 is naturally sucked into the second pump chamber 12a.

  In addition, the working fluid F2 on the first opening 14a1 side with respect to the moved fluid F1 has a sufficiently low first speed, so that the moved fluid F1 and the flow path 13a (the corners of the flow path 13a) are between them. It passes through the formed minute gap and is sucked into the second pump chamber 12a. As a result, the moved fluid F1 does not move (maintains the state stopped at the initial position), and the pressure drop absorption part (rattles, pressure change absorption part) of the flow path 13a with respect to further pressure reduction in the flow path 13a. ) Virtually disappears. Such a state is called a standby state.

  Next, when it becomes necessary to move the moved fluid F1 in the negative direction of the X-axis at time t3, the electric control device 20 sets the second pump drive voltage V2 to a negative voltage having an absolute value Vst + Vdr. As a result, the volume of the second pump chamber 12a further increases by the volume Cdr at times t3 to t4, and becomes the volume Cmax at time t4. At this time, the rate of change in volume of the second pump chamber 12a (absolute value thereof) = Cdr / (t4-t3) is referred to as the second speed for convenience. The second speed is selected to be sufficiently greater than the first speed.

  In addition, the electric control device 20 sets the first pump drive voltage V1 to a positive voltage having an absolute value Vdr at time t3. As a result, the volume of the first pump chamber 11a decreases from the initial volume C0 by the volume Cdr at time t3 to t4, and becomes the volume Cmin at time t4. At this time, the rate of change in volume of the first pump chamber 11a (absolute value thereof) = Cdr / (t4-t3) is referred to as a third speed for convenience. In this example, the third speed is substantially equal to the second speed, and the working fluid F2 is maintained in the first pump chamber 11a while the pressure in the flow path 13a is maintained at a pressure lower than the pressure outside the container. Is selected to be discharged from the flow path 13a to the flow path 13a through the first opening 14a1.

  As a result, the working fluid F2 for the volume Cdr is aspirated rapidly from the flow path 13a to the second pump chamber 12a via the second opening 15a1, and the working fluid F2 for the volume Cdr is drawn from the first pump chamber 11a. It is rapidly discharged into the flow path 13a through the first opening 14a1.

  In this case, since the second speed is sufficiently larger than the first speed, the working fluid F2 on the first opening 14a1 side of the fluid F1 to be moved is separated from the fluid F1 and the flow path 13a (the angle of the flow path 13a). Part) can hardly pass through the minute gap formed between them. As a result, the pressure of the working fluid F2 on the second opening 15a1 side of the moved fluid F1 becomes smaller than the pressure of the working fluid F2 on the first opening 14a1 side of the moved fluid F1, so that the moved fluid F1 has the second opening. It moves to the 15a side (namely, X-axis negative direction).

  In other words, the second pump 12 aspirates the working fluid F2 abruptly to apply a force to the moved fluid F1 to move the moved fluid F1 in the negative direction of the X axis, and the first pump 11 operates the working fluid F2. Is abruptly discharged to the flow path 13a, thereby applying a force to the moved fluid F1 to move the moved fluid F1 in the negative X-axis direction. Furthermore, from time t3 to t4 (actually at time t2), the pressure drop absorbing portion of the flow path 13a disappears. Therefore, the moved fluid F1 starts to move immediately in the negative direction of the X axis immediately after time t3.

  Next, when it becomes necessary to move the moved fluid F1 toward the initial position in the positive direction of the X-axis at time t5, the electric control device 20 sets the second pump drive voltage V2 to a negative voltage of the absolute value Vst. Set. As a result, the volume of the second pump chamber 12a decreases by the volume Cdr at times t5 to t6, and becomes the standby volume Cst at time t6. The second pump drive voltage V2 at this time is set so that the rate of change (absolute value) of the volume of the second pump chamber 12a becomes the second speed.

  In addition, the electric control device 20 sets the first pump drive voltage V1 to “0” (V) at time t5. As a result, the volume of the first pump chamber 11a increases from the volume Cmin by the volume Cdr at time t5 to t6, and becomes the initial volume C0 at time t6. At this time, the volume changing speed (absolute value) of the first pump chamber 11a is the third speed (in this case, the second speed), and the pressure in the flow path 13a is the pressure outside the container. Is selected to be maintained at a lower pressure.

  As a result, the working fluid F2 corresponding to the volume Cdr is rapidly sucked from the flow path 13a to the first pump chamber 11a, and the working fluid F2 corresponding to the volume Cdr is rapidly increased from the second pump chamber 12a to the flow path 13a. Discharged. In this case, the first pump 11 suddenly sucks the working fluid F2 to exert a force to move the moved fluid F1 in the positive direction of the X axis to the moved body F1, and the second pump 12 Is abruptly discharged, and a force for moving the moved fluid F1 in the positive direction of the X-axis is exerted on the moved fluid F1. Furthermore, the pressure drop absorption part of the flow path 13a has also disappeared at times t5 to t6. Accordingly, the moved fluid F1 starts to move immediately in the positive direction of the X axis immediately after time t5, and returns to the initial position at time t6.

  Thereafter, in the example illustrated in FIG. 13, the moved fluid moving device 10 performs the same operation at time t3 to t4 and time t5 to t6 at time t7 to t8 and time t9 to t10, respectively.

  When a switch (not shown) of the electric control device 20 is cut off at time t11, the electric control device 20 sets the second pump drive voltage V2 to 0 (V). As a result, the volume of the second pump chamber 12a decreases from the standby volume Cst by the minute volume ΔC at times t11 to t12, and becomes the initial volume C0 at time t12. At this time, the changing speed of the volume of the second pump chamber 12a is the first speed. Therefore, in this case, the moved fluid F1 does not move. Thus, the moved fluid moving device returns to the initial state.

  As described above, according to the moved fluid moving device 10, the second pump 12 is gently driven prior to driving the first pump 11 and the second pump 12 for moving the moved fluid F1 in the flow path 13a. By doing so (by driving so that the volume change speed becomes the first speed), the working fluid F2 in the flow path 13a is gently sucked (discharged from the flow path 13a). The portion that absorbs the pressure drop in the flow path 13a that is unavoidably present is extinguished, and the state of the moved fluid moving device 10 is set to the standby state.

  Therefore, when the working fluid F2 is aspirated rapidly by increasing the volume of the second pump chamber 12a at the second speed larger than the first speed, the second of the moved fluid F1 in the flow path 13a. The pressure of the working fluid F2 on the opening 15a1 side is immediately reduced, and the moved fluid F1 is immediately moved. As a result, a moved fluid moving device having very good responsiveness is provided.

  Further, when the volume of the second pump chamber 12a is increased at the second speed, the volume of the first pump chamber 11a is decreased at a third speed equal to the second speed. Therefore, the discharge force of the working fluid F2 by the first pump 11 immediately acts on the moved fluid F1 via the working fluid F2, and the moved fluid F1 moves immediately. In other words, since the differential pressure generated by the operation of the first pump 11 and the second pump 12 immediately acts on the moved fluid F1, the moved fluid F1 starts to move immediately. As a result, a moved fluid moving device having very good responsiveness is provided.

  Here, the operation of the moved fluid moving device (hereinafter referred to as “comparative example”) that does not employ the present invention will be described with reference to FIG. The electric control device of the comparative example changes the first pump drive voltage V1 and the second pump drive voltage V2 from 0 (V) at the same time.

  For example, at time t0, the electric control device changes the first pump drive voltage V1 from 0 (V) to + Vdr (V), and the second pump drive voltage V2 from 0 (V) to -Vdr (V). Change. As a result, at the time t0 to t1, the volume of the first pump chamber 11a decreases by the volume Cdr from the initial volume C0 to C1, and the volume of the second pump chamber 12a increases by the volume Cdr from the initial volume C0 to C2. .

  However, immediately after time t0, the pressure of the working fluid F2 present on the second opening 15a1 side in the flow path 13a does not immediately decrease due to the presence of the pressure drop absorbing portion of the flow path 13a, so that the fluid F1 moves Do not start. As a result, the moved fluid F1 stays at the initial position for a while from the time t0. That is, the responsiveness of the moved fluid moving device is not good.

  Furthermore, the position of the fluid F1 to be moved overshoots immediately after the time t1, and then it takes time to stabilize. In this sense, the response of the moved fluid moving device is not good. For example, the electric controller changes the first pump drive voltage V1 from + Vdr (V) to 0 (V) and sets the second pump drive voltage V2 to -Vdr, for example, at times t2 to t3. It also occurs when changing from (V) to 0 (V).

Thus, compared with the comparative example which does not employ | adopt this invention, the to-be-moved fluid moving device 10 which concerns on 1st Embodiment of this invention (As mentioned later, the to-be-moved fluid moving device of other embodiment is also included. ) Is extremely responsive and is a device that can reliably control the position of the fluid F1 to be moved.
(Second Embodiment)
Next, a second embodiment of the moved fluid moving device 10 according to the present invention will be described. The second embodiment differs from the first embodiment only in that the first pump drive voltage V1 and the second pump drive voltage V2 generated by the electric control device 20 are different from those of the first embodiment. Therefore, the difference will be mainly described below with reference to the time chart of FIG.

  Similarly to the first embodiment, the moved fluid moving device 10 of the second embodiment maintains a state in which the pressure in the flow path 13a is always lower than the pressure outside the container, and in that state the moved fluid Move. However, the first pump 11 is used instead of the second pump 12 to reduce the pressure in the flow path 13a below the pressure outside the container, and the device 10 is set in the standby state.

  Specifically, as shown at times t0 to t1 in FIG. 15, when the fluid-moving device 10 to be moved is in the initial state (“off” state), the electric controller 20 controls the first pump drive voltage V1 and All of the second pump drive voltages V2 are maintained at 0 (V). As in the first embodiment, when the moved fluid moving device 10 of the second embodiment is in the initial state, the moved fluid F1 exists in the flow path 13a between the first opening 14a1 and the second opening 15a1. At the same time, the working fluid F2 is present at positions facing the first opening 14a1 and the second opening 15a1 in the flow path 13a.

  When a switch (not shown) of the electric control device 20 is turned on at time t1, the electric control device 20 sets the first pump drive voltage V1 to a negative voltage of the absolute value Vst. As a result, the volume of the first pump chamber 11a increases from the initial volume C0 by the minute volume ΔC from time t1 to time t2, and becomes the standby volume Cst at time t2. At this time, the rate of change in volume of the first pump chamber 11a (absolute value thereof) = ΔC / (t2−t1) is referred to as a first speed for convenience.

  As a result, an amount of the working fluid F2 corresponding to the minute volume ΔC is gently sucked from the flow path 13a into the first pump chamber 11a. In this case, the working fluid F2 in the flow path 13a on the first opening 14a1 side with respect to the fluid F1 to be moved is sucked into the first pump chamber 11a. At the same time, since the first speed is sufficiently small, the working fluid F2 in the flow path 13a on the second opening 15a1 side of the moved fluid F1 is moved to the moved fluid F1 and the flow path 13a (corner portion of the flow path 13a). Is sucked into the first pump chamber 11a through a minute gap formed between the first pump chamber 11a and the first pump chamber 11a. As a result, the moved fluid F1 does not move (maintains the state stopped at the initial position), and the pressure change absorption part (rattle and pressure drop absorption part) of the flow path 13a with respect to further pressure reduction in the flow path 13a. ) Disappears substantially. Such a state is called a standby state.

  Next, when it becomes necessary to move the moved fluid F1 in the negative direction of the X-axis at time t3, the electric control device 20 changes the second pump first pump drive voltage V1 from “0” to the absolute value Vst + Vdr. Set to negative voltage. As a result, the volume of the second pump chamber 12a increases by the volume Cdq at times t3 to t4, and becomes the volume C3 at time t4. At this time, the rate of change in volume of the second pump chamber 12a (absolute value thereof) = Cdq / (t4-t3) is referred to as the second speed for convenience. The second speed is selected to be sufficiently greater than the first speed.

  In addition, the electric control device 20 increases the first pump drive voltage V1 by the value Vst + Vdr at time t3 and sets it to a positive voltage of the absolute value Vdr. As a result, the volume of the first pump chamber 11a decreases from the standby volume Cst by the volume Cdq from time t3 to time t4, and becomes volume C4 at time t4. At this time, the rate of change in volume of the first pump chamber 11a (absolute value thereof) = Cdq / (t4−t3) is referred to as a third speed for convenience. Also in this example, the third speed is substantially equal to the second speed, and the working fluid F2 is discharged from the first pump chamber 11a while the pressure in the flow path 13a is maintained at a pressure lower than the pressure outside the container. It is selected to be discharged to the flow path 13a through the first opening 14a1.

  As a result, the working fluid F2 corresponding to the volume Cdq is rapidly sucked from the flow path 13a into the second pump chamber 12a, and the working fluid F2 corresponding to the volume Cdq is moved from the first pump chamber 11a into the flow path 13a. It is discharged rapidly.

  In this case, since the second speed is sufficiently larger than the first speed, the working fluid F2 on the side of the first opening 14a1 of the moved fluid F1 is separated from the moved fluid F1 and the flow path 13a (the angle of the flow path 13a). Part) can hardly pass through the minute gap formed between them. Accordingly, the pressure of the working fluid F2 on the second opening 15a1 side of the moved fluid F1 is smaller than the pressure of the working fluid F2 on the first opening 14a1 side of the moved fluid F1, so that the moved fluid F1 has the second opening 15a. Move to the side (that is, the negative direction of the X-axis).

  In other words, the second pump 12 aspirates the working fluid F2 abruptly to apply a force to the moved fluid F1 to move the moved fluid F1 in the negative direction of the X axis, and the first pump 11 operates the working fluid F2. Is abruptly discharged to the flow path 13a, thereby applying a force to the moved fluid F1 to move the moved fluid F1 in the negative X-axis direction. Furthermore, from time t3 to t4 (actually at time t2), the pressure drop absorbing portion of the flow path 13a disappears. Therefore, the moved fluid F1 starts to move immediately in the negative direction of the X axis immediately after time t3.

  Next, when it becomes necessary to move the moved fluid F1 toward the initial position in the X-axis positive direction at time t5, the electric control device 20 changes the first pump drive voltage V1 to a negative voltage of the absolute value Vst. Set. As a result, the volume of the first pump chamber 11a increases by the volume Cdq at times t5 to t6, and becomes the standby volume Cst at time t6. The first pump drive voltage V1 at this time is set such that the rate of change (absolute value) of the volume of the first pump chamber 11a becomes the second speed.

  In addition, the electric control device 20 sets the second pump drive voltage V2 to “0” (V) at time t5. As a result, the volume of the second pump chamber 12a decreases from the volume C3 by the volume Cdq at times t5 to t6, and becomes the initial volume C0 at time t6. At this time, the volume changing speed (absolute value) of the second pump chamber 12a is the third speed (in this case, the second speed), and the pressure in the flow path 13a is the pressure outside the container. Is selected to be maintained at a lower pressure.

  As a result, the working fluid F2 corresponding to the volume Cdq is rapidly sucked from the flow path 13a to the first pump chamber 11a and is rapidly discharged from the second pump chamber 12a to the flow path 13a. In this case, similarly to the times t3 to t4, the first pump 11 suddenly sucks the working fluid F2 to apply the force to move the moved fluid F1 in the X axis positive direction to the moved fluid F1, The second pump 12 abruptly discharges the working fluid F2 to the flow path 13a, thereby applying a force for moving the moved fluid F1 in the positive direction of the X axis to the moved fluid F1. Furthermore, the pressure drop absorption part of the flow path 13a has also disappeared at times t5 to t6. Accordingly, the moved fluid F1 starts to move immediately in the positive direction of the X axis immediately after time t5, and returns to the initial position at time t6.

  Thereafter, in the example illustrated in FIG. 15, the moved fluid moving device 10 performs the same operation at time t3 to t4 and time t5 to t6 at time t7 to t8 and time t9 to t10, respectively.

  When a switch (not shown) of the electric control device 20 is cut off at time t11, the electric control device 20 sets the first pump drive voltage V1 to 0 (V). As a result, the volume of the first pump chamber 11a decreases from the standby volume Cst by the minute volume ΔC at times t11 to t12, and becomes the initial volume C0 at time t12. At this time, the changing speed of the volume of the first pump chamber 11a is the first speed. Therefore, in this case, the moved fluid F1 does not move.

  As described above, the moved fluid moving device 10 according to the second embodiment gently drives the first pump 11 prior to driving the first pump 11 and the second pump 12 for moving the moved fluid F1. (By driving so that the volume change speed becomes the first speed), the working fluid F2 in the flow path 13a is gently discharged. As a result, the moved fluid moving device 10 extinguishes the portion that absorbs the pressure drop in the flow path 13a unavoidably present in the flow path 13a, and enters the standby state.

  Therefore, when the working fluid F2 is aspirated rapidly by increasing the volume of the second pump chamber 12a at the second speed larger than the first speed, the second of the moved fluid F1 in the flow path 13a. The pressure of the working fluid F2 on the opening 15a1 side is immediately reduced, and the moved fluid F1 is immediately moved. As a result, a moved fluid moving device having very good responsiveness is provided.

Further, when the volume of the second pump chamber 12a is increased at the second speed, the volume of the first pump chamber 11a is decreased at a third speed equal to the second speed. Accordingly, the pressure of the working fluid F2 on the first opening 14a1 side of the fluid F1 to be moved in the flow path 13a immediately rises to immediately move the fluid F1. In other words, since the differential pressure generated by the operation of the first pump 11 and the second pump 12 immediately acts on the moved fluid F1, the moved fluid F1 starts to move immediately. As a result, a moved fluid moving device having very good responsiveness is provided.
(Third embodiment)
Next, a third embodiment of the moved fluid moving device according to the present invention will be described. The moved fluid moving device 30 of the third embodiment includes a first pump 31, a second pump 32, and a third pump 33 as shown in FIG. The 1st thru | or 3rd pumps 31-33 each accommodate the working fluid F2, and are each connected to the flow path 13b in the base | substrate 30a via the 1st opening-3rd opening. The channel 13b has the same shape as the channel 13a of the first embodiment. The first opening is provided in the vicinity of the end portion in the X-axis negative direction. The second opening is provided in the vicinity of the X-axis positive direction end. The third opening is provided at a substantially central portion in the X-axis direction.

  In the flow path 13b, the fluid F1 to be moved is accommodated so as to separate the flow path 13b into two. A portion of the flow path 13b where the moved fluid F1 does not exist is filled with the working fluid F2. In addition, two electrodes 34a and 34b that are electrically insulated from each other are disposed in the flow path 13b. The electrode 34a and the electrode 34b are exposed to the flow path 13b so as to face each other across the flow path 13b at a position between the first opening and the third opening.

  Actuators (not shown) of the first to third pumps 31 to 33 are electrically connected to an electric control device (not shown), respectively, and a first pump drive voltage V1, a second pump drive voltage V2, and a third pump drive voltage V3. Are given respectively.

  Now, when the drive voltage corresponding to each pump is not given to each pump (that is, when each drive voltage is 0 (V) and the moved fluid moving device 30 is in the initial state), The pump chamber maintains an initial volume. The first pump 31 is a pump capable of pressure increase / decrease in which the volume of the first pump chamber can be increased or decreased from the initial volume. Similarly to the first pump 31, the third pump 33 is a pump capable of pressure increase / decrease, in which the volume of the third pump chamber can be increased or decreased from the initial volume. On the other hand, the second pump 32 is a pump (depressurized pump) having a structure in which the volume of the pump chamber can be increased / decreased in a volume range larger than the initial volume but not smaller than the initial volume. Note that the second pump 32 may also be a pump capable of pressure increase / decrease similar to the first pump 31 and the third pump 33.

  When the moved fluid moving device 30 is in the initial state, the moved fluid F1 is present in the flow path 13b between the first opening of the first pump 31 and the third opening of the third pump. Further, the moved fluid F1 is adjusted so as to be positioned on the X axis positive direction side with respect to the pair of electrodes 34a and 34b when the moved fluid moving device 30 is in the initial state.

  Next, the operation of the moved fluid moving device 30 will be described with reference to the time chart of FIG. Similarly to the first and second embodiments, the moved fluid moving device 30 also moves the moved fluid F1 while maintaining the state in which the pressure in the flow path 13b is always lower than the pressure outside the container. Is supposed to do. However, the second pump 32 is used as a dedicated pump for constantly lowering the pressure in the flow path 13b than the pressure outside the container.

  Specifically, as shown at times t0 to t1 in FIG. 17, when the fluid-moving device 30 is in the initial state, the electric control device performs the first to third pump first pump drive voltages V1 to V3. Is maintained at 0 (V).

  When a switch (not shown) of the electric control device is turned on at time t1, the electric control device sets the second pump drive voltage V2 to a negative voltage of the absolute value Vst. As a result, the pump chamber volume of the second pump 32 increases from the initial volume immediately after the time t1 at a first speed that is moderate by the minute volume ΔC, and becomes the standby volume Cst before the time t2.

  As a result, the working fluid F2 corresponding to the minute volume ΔC is gently sucked from the flow path 13b to the second pump 32. In this case, the working fluid F2 located on the second opening side with respect to the moved fluid F1 is naturally sucked into the second pump 32.

  Further, since the first speed is sufficiently small, the working fluid F2 located on the first opening side with respect to the moved fluid F1 is formed between the moved fluid F1 and the flow path 13b (corner of the flow path 13b). It passes through the minute gap and is sucked into the second pump 32. As a result, the moved fluid F1 does not move (maintains the state stopped at the initial position), and the pressure drop absorbing portion of the flow path 13b with respect to further pressure reduction in the flow path 13b substantially disappears. That is, the device 30 enters a standby state.

  Next, when it becomes necessary to move the moved fluid F1 in the negative direction of the X-axis at time t2, the electric control device sets the first pump drive voltage V1 to a negative voltage having an absolute value Vdr. As a result, the volume of the first pump 31 increases by the volume Cdr at a second speed larger than the first speed immediately after time t2.

  In addition, the electric control device sets the third pump drive voltage V3 to a positive voltage having an absolute value Vdr at time t2. As a result, the volume of the third pump 33 decreases by the volume Cdr at a third speed (in this case, a speed equal to the second speed) that is greater than the first speed immediately after time t2.

  As a result, the working fluid F2 is sucked from the flow path 13b to the first pump 31. At time t2, since the pressure drop absorbing portion of the flow path 13b has disappeared, this suction force directly acts on the moved fluid F1 as a force for moving the moved fluid F1 in the negative X-axis direction.

  At the same time, the working fluid F2 for the volume Cdr is rapidly discharged from the third pump 33 into the flow path 13b. In this case, since the third speed (second speed) is sufficiently larger than the first speed, the working fluid F2 discharged into the flow path 13b is transferred to the fluid F1 and the flow path 13a (flow path 13a). Most of the gaps formed between them and the corners) are hardly passed. As a result, the third pump 33 applies a force (pressing force) for moving the moved fluid F1 in the negative direction of the X-axis to the moved fluid F1 via the working fluid F2 that is rapidly discharged. Therefore, the moved fluid F1 starts to move immediately in the negative direction of the X axis immediately after time t2, and then comes into contact with the electrodes 34a and 34b to bring them into conduction.

  Next, when it becomes necessary to move the moved fluid F1 toward the initial position in the X-axis positive direction at time t3, the electric control device sets both the first pump driving voltage V1 and the third pump driving voltage V3 to 0. Set to (V). However, the electric control device maintains the second pump drive voltage V2 at -Vst (V). As a result, the volume of the first pump 31 is reduced by the volume Cdr at the second speed immediately after time t3, and the volume of the third pump 33 is reduced to the third speed (in this example, the second speed and the speed immediately after time t3). Is equal) and increases by the volume Cdr.

  As a result, the working fluid F2 corresponding to the volume Cdr is rapidly sucked from the flow path 13b to the third pump 33, and the working fluid F2 for the volume Cdr is rapidly discharged from the first pump 31 to the flow path 13b. Is done.

  In this case, the force that rapidly sucks the working fluid F2 by the third pump 33 directly acts on the moved fluid F1 as a force that moves the moved fluid F1 in the positive direction of the X axis. Further, at time t3, the pressure drop absorbing portion of the flow path 13b disappears due to the gentle suction of the working fluid to the second pump 32 immediately after time t1.

  Further, since the third speed (second speed) is sufficiently larger than the first speed, the working fluid F2 closer to the first opening than the moved fluid F1 is separated from the moved fluid F1 and the flow path 13b (flow). It hardly passes through a minute gap formed with the corner portion of the path 13b. Accordingly, the force of suddenly discharging the working fluid F2 from the first pump 31 to the flow path 13b directly acts on the moved fluid F1 as a force for moving the moved fluid F1 in the positive direction of the X axis. As a result, the fluid F1 to be moved immediately starts to move in the positive direction of the X axis immediately after time t3, and thereafter the electrode 34a and the electrode 34b are made non-conductive.

  Thereafter, in the example illustrated in FIG. 17, the moved fluid moving device 30 performs the same operations at time t4 and time t5 as at time t2 and time t3, respectively. Then, when a switch (not shown) of the electric control device is cut off at time t6, the electric control device sets the second pump drive voltage V2 to 0 (V). As a result, immediately after time t6, the pump chamber volume of the second pump 32 decreases from the standby volume Cst by the minute volume ΔC at the first speed to the initial volume C0. At this time, the change speed of the volume of the second pump 32 is the first speed. Therefore, in this case, the moved fluid F1 does not move.

  Thus, according to the moved fluid moving device 30 of the third embodiment, prior to driving the first pump 31 and the third pump 33 for moving the moved fluid F1, the second pump 32 is gently moved ( The second pump chamber is driven so that the volume of the second pump chamber increases at the first speed, thereby eliminating the portion that absorbs the pressure drop in the flow path 13b that inevitably exists in the flow path 13b, and the fluid to be moved The mobile device 30 is set to a standby state.

  Accordingly, the pump chamber volume of the first pump 31 is increased at a second speed larger than the first speed, and the pump chamber volume of the third pump 33 is decreased at a third speed larger than the first speed. Then, the fluid F1 to be moved immediately starts moving in the negative direction of the X axis. As a result, a moved fluid moving device having very good responsiveness is provided.

  Further, when the pump chamber volume of the third pump 33 is increased at the second speed and the pump chamber volume of the first pump 31 is decreased at the third speed, the moved fluid F1 immediately becomes positive in the X-axis positive direction. Start moving to. As described above, the moved fluid moving device 30 is a device having extremely good responsiveness.

  As described above, the moved fluid moving device of each embodiment of the present invention increases the volume of any pump at the first speed, and gently discharges the working fluid F2 from the flow path. As a result, the pressure in the flow path is inevitably present in the container (flow path) by reducing the pressure in the flow path from the pressure outside the container without moving the fluid F1 to be moved. The part which absorbs is substantially eliminated. Thereafter, the volume of any pump is increased at a second speed larger than the first speed, and the working fluid F2 is suddenly discharged from the flow path, thereby moving the moved fluid F1. At this time, since the portion that absorbs the pressure drop in the flow path has substantially disappeared, the moved fluid F1 immediately starts moving. As a result, a moved fluid moving device having very good responsiveness is provided.

  Further, these moved fluid moving devices are different from the devices that move the moved fluid by utilizing the volume expansion accompanied by heating and vaporizing the liquid. It is a device that moves the fluid F1 to be moved by sucking and discharging the working fluid F2. That is, since this moved fluid moving device does not need to vaporize the working fluid F2, a liquid having a high boiling point can be used as the working fluid F2. As a result, in the moved fluid moving device according to the present invention, an appropriate fluid can be selected as the working fluid F2 from among a wide variety of fluids.

  In addition, this invention is not limited to the said embodiment, A various modification can be employ | adopted within the scope of the present invention. For example, the piezoelectric / electrostrictive material film for deforming the diaphragm is replaced with an antiferroelectric material film (antiferroelectric film) based on the basic configuration of each transferred fluid moving device disclosed in the present invention. Can do. Further, the number of pumps for one flow path may be any number.

  Further, in each of the above embodiments, when shifting from the initial state to the standby state in which the portion that absorbs the pressure drop in the flow passage unavoidably present in the container is substantially extinguished, Only the volume of one pump chamber has been increased at the first speed. For example, the first pump chamber and the second pump chamber are driven together, and the volume of the first pump chamber and the volume of the second pump chamber are The sum volume may be increased at the first speed.

  Further, the above-mentioned container constituting the device for moving the object to be moved is manufactured by laminating and bonding a silicon substrate, a glass substrate, a plastic substrate such as polymethyl metalate or polycarbonate, or a ceramic substrate. can do. For bonding, an ultraviolet curable resin or a thermosetting resin can be used. In addition, the substrates can be joined to each other by sandwiching a gasket of silicon resin between the substrates and fastening the substrates together with screws or the like. Further, when the silicon substrate and the glass substrate are bonded, an anodic oxidation bonding method can also be used. When a ceramic green sheet is used as the substrate material, the ceramic green sheets can be laminated and then fired for integration.

  The device for moving the object to be moved (moved fluid moving device) can be formed using an SOI (Silicon On Insulator) wafer. More specifically, as can be understood from FIG. 18 showing only the cross-sectional structure, the fluid transfer device 40 using the SOI wafer includes a support substrate 41 and an insulating layer stacked on the support substrate 41. A layer 42, an SOI layer 43 stacked on the insulating layer 42, and a lid 44 bonded on the SOI layer 43 are provided. Note that the device 40 includes a first pump and a second pump, as in the first embodiment. The first pump and the second pump are omitted in FIG.

  The support substrate 41 is much thicker than the insulating layer 42 and the SOI layer 43. The SOI layer 43 is a single crystal silicon layer with a small film thickness. The lid 44 is made of Pyrex (registered trademark) glass, and is bonded to the upper surface of the SOI layer 43 using an anodic bonding method. The flow path 43 a of the moved fluid moving device 40 is formed by a groove formed in the SOI layer 43 and the lower surface of the lid body 44.

  Conventionally, when a high-frequency switch circuit including a transistor or the like is formed on a bulk silicon substrate, stray capacitance is formed on a silicon substrate other than the portion where the transistor or the like is formed. Such stray capacitance has various effects on the high-frequency signal circuit. On the other hand, in the SOI wafer shown in FIG. 18, since the insulating layer 42 exists under the SOI layer 43 that forms the switch circuit, the SOI layer 43 is affected by the stray capacitance formed on the support substrate 41. There is no advantage.

  Furthermore, a groove forming the above-described flow path 43 a can be formed in the SOI layer 43 by forming a mask on the surface of the SOI layer 43 and performing etching using the mask. In this case, since the insulating layer 42 serves as an etch stop for etching, the flow path 43 a having a uniform depth equal to the film thickness of the SOI layer 43 can be formed. Conventionally, it has been difficult to form a fine flow path having a uniform depth, but a flow path having a uniform depth can be easily manufactured by etching the SOI wafer in this way.

  The lid 44 can also be made of silicon, quartz glass, or plastic. The lid 44 made of these materials is bonded to the upper surface of the SOI layer 43 by an adhesive, for example.

  In view of the fact that the above-described stray capacitance is not generated, it is also preferable that the substrate is made of a material having a low dielectric constant. In particular, a fluororesin is suitable as a base material because it has a small dielectric constant and is excellent in moldability and suitable for mass production. Examples thereof include Teflon (registered trademark) or full-on PFA (a copolymer of tetrafluoroethylene and perfluoroalkoxyethylene) manufactured by Asahi Glass Co., Ltd. Since P-66P in the full-on PFA has a dielectric constant of less than 2.1 for a signal having a frequency of 10 MHz, silicon having a dielectric constant of 12 for the signal, alumina having a 9.5, or 3.5 High frequency characteristics are better than quartz.

  Furthermore, the following third invention is provided in the present application. The third invention is applied to devices, electrical paths, optical paths, and the like that can be applied to micromachines such as micromotors, microsensors, and microrelays, and microelectromechanical systems called microelectromechanical systems (MEMS). The present invention relates to a switching device that can be used, and a device that can be used as a drive source such as a cylinder, etc., and that moves a moving object in a flow path.

  In recent years, micro-motors, micro-sensors, micro-switches, and the like having a size of several millimeters to several tens of microns have been developed using a microfabrication technique for materials such as semiconductor manufacturing techniques. These element devices include, for example, inkjet printer heads, microvalves, flow sensors, pressure sensors, recording heads, tracking servo actuators, on-chip biochemical analysis, microreactors, high-frequency switching devices, micromagnetic devices, microrelays, acceleration sensors. , Gyros, driving devices, displays, optical scanners, and so on.

  Among these devices, for example, the switching device disclosed in Japanese Patent Publication Showa 47-21645 (page 2, FIG. 2 and FIG. 3) uses mercury as a moving object in the flow path. It is made to move and the conduction | electrical_connection state of the several electrode provided in the flow-path wall by this mercury is switched.

  This disclosed device performs a switching operation by changing the state of mercury and electrodes from a contact state to a non-contact state, or conversely, changing from a non-contact state to a contact state. In this device, the smaller the electrical resistance between the mercury and the electrode in contact, the smaller the electrical loss in the switch. In order to reduce the electrical resistance value between mercury and the electrode, the electrode may be formed of a material that has good wettability with mercury.

  However, if the wettability between the electrode and mercury is good, it becomes difficult to shift the state between the two from the contact state to the non-contact state. As a result, the responsiveness of switching deteriorates, and it is necessary to increase the generated force of the actuator necessary for moving mercury. Such a problem inevitably exists in a device that does not have an electrode or a device in which mercury moves while always covering the electrode. That is, in general, a device that moves a moving object in a flow path has a problem that it is difficult to move the moving object at a high speed because the moving object receives a frictional force from the wall surface of the flow path.

  The third invention is made to cope with the above-described problem, and provides a device that can move a moving object in a flow path at a high speed. The device according to the third aspect of the invention can be particularly suitably used for a switch (switching device) that requires high-speed switching operation, for example.

  In order to achieve the above object, a device for moving a moving object in a flow path according to a third aspect of the present invention includes a flow path forming portion that forms a flow path and a substantially non-compressible and the same flow path. A movable body that is accommodated so as to substantially separate the flow path into at least two parts, and a substantially incompressible form that is accommodated in a portion of the flow path other than the portion where the movable body is present. A working fluid and an actuator that moves the moving object while vibrating in the flow path are provided.

  According to this, a to-be-moved body moves, vibrating in a flow path. When the moving body vibrates, the dynamic frictional resistance when the moving body moves decreases, and the moving speed of the moving body can be increased. Therefore, for example, if this device is used as a switch having an electrode that is opened and closed by a moving object, a switching device capable of high-speed switching is provided.

  In this case, the actuator may be a pump that discharges the working fluid into the flow path and sucks the working fluid from the flow path. The pump includes a pump chamber having a ceramic diaphragm as one wall and a membrane type piezoelectric element, and deforms the ceramic diaphragm by the membrane type piezoelectric element to change the volume of the pump chamber. It may be a pump that discharges and sucks the working fluid.

  According to the pump using such a film-type piezoelectric element and a ceramic diaphragm, the working fluid can be discharged and sucked without delay at a desired timing, so that the working fluid can be discharged or sucked at a desired timing. To move the object to be moved. In addition, since the working fluid can enter and exit the flow path at high speed, the movable body can be vibrated at a desired frequency, or the movable body can be placed between the wall of the flow path and the wall surface of the flow path. A suitable film can be easily formed to reduce the frictional force received from the film.

  Further, such a device includes an electric control device connected to the film type piezoelectric element, and the film type piezoelectric element changes the volume of the pump chamber in response to a drive voltage signal from the electric control device. The electric control device superimposes a voltage signal that repeatedly increases and decreases at a second speed larger than the absolute value of the first speed on the voltage signal that increases or decreases at the first speed. It is preferable that the generated voltage signal is generated as the drive voltage signal.

  In this case, the first speed and the second speed may be constant or may be a changing speed. In other words, the first rate is the average rate of change of the voltage signal in a single increase or decrease of the voltage signal. The second speed is an average rate of change of the voltage signal in a single increase or decrease of the voltage signal that is repeatedly increased or decreased.

  According to this, the working fluid is discharged into the flow path or sucked from the flow path at a flow rate corresponding to the first speed, and the movable body is moved by the discharge or suction of the working fluid. At the same time, the discharge of the working fluid into the flow path at a flow rate corresponding to the second speed larger than the absolute value of the first speed and the suction of the working fluid from the flow path following the discharge are repeated. That is, the working fluid repeatedly enters and exits the flow path at a high speed.

  Therefore, although it is estimated, the moving body vibrates due to the entry and exit of the working fluid into the flow path, and the working fluid enters and exits a slight gap between the moving body and the wall surface of the flow path. A film is formed between the walls of the road. This membrane makes the walls of the uneven channel substantially smooth. As a result, the moving body moves while sliding on a smooth film, and therefore, the frictional force that the moving body receives from the flow path wall surface decreases. Therefore, the moving object can move at high speed.

  On the other hand, the actuator includes an actuator for moving the moving body in the flow path, and discharging the working fluid to the flow path and sucking the working fluid from the flow path. And a vibration pump that repeats continuously.

  In this case, the moving body moving actuator may be a moving body moving pump that discharges the working fluid to the flow path or sucks the working fluid from the flow path. Further, the moving object moving pump includes a pump chamber provided with a ceramic diaphragm as a wall and a membrane type piezoelectric element, and the ceramic diaphragm is deformed by the membrane type piezoelectric element to increase the volume of the pump chamber. It may be a pump that discharges or sucks the working fluid by changing. According to such a pump using a film-type piezoelectric element and a ceramic diaphragm, the working fluid can be discharged or sucked without delay at a desired timing, so that the movable body can be moved at the desired timing. Can do.

  The vibration pump includes a pump chamber having a ceramic diaphragm as a wall and a membrane type piezoelectric element, and the volume of the pump chamber is changed by deforming the ceramic diaphragm by the membrane type piezoelectric element. Accordingly, it may be a pump that discharges and sucks the working fluid. According to such a pump using a film-type piezoelectric element and a ceramic diaphragm, the working fluid can enter and exit the flow path at a high speed, so that the moving object can be vibrated at a desired frequency or It is possible to easily form a film suitable for reducing the frictional force that the moving object receives from the wall surface of the flow channel between the wall surface of the flow channel.

  The moving object moving actuator includes a pump chamber provided with a ceramic diaphragm as one wall and a film type piezoelectric element that responds to a voltage signal for movement, and the film type piezoelectric element deforms the ceramic diaphragm. It is a pump (moving body moving pump) that discharges the working fluid into the flow path or sucks the working fluid from the flow path by changing the volume of the pump chamber. A pump chamber provided with a diaphragm as a wall and a membrane-type piezoelectric element that responds to a vibration voltage signal, and the ceramic diaphragm is deformed by the membrane-type piezoelectric element to change the volume of the pump chamber. A pump that discharges a working fluid into the flow path and sucks the working fluid from the flow path; and the device is a membrane of the moving object moving pump It may include an electrical control device connected to the piezoelectric element and the film-type piezoelectric element of the vibrating pump. In this case, the electric control device generates a voltage signal necessary for the movable body moving pump to discharge or suck the working fluid at the first flow rate for a predetermined time as the moving voltage signal. A voltage signal required to repeat discharge and suction of the working fluid at a second flow rate greater than the first flow rate a plurality of times within the same predetermined time may be generated as the vibration voltage signal. Is preferred.

  The first flow rate and the second flow rate described above may be constant or may change. In other words, the first flow rate is an average flow rate in one discharge or suction of the working fluid (that is, in the predetermined time). The second flow rate is an average flow rate in discharge or suction for one discharge or suction that is repeatedly increased or decreased.

  According to this, the working fluid is discharged into the flow path or sucked from the flow path at a first flow rate by the moving body moving pump for a predetermined time, and the moving body is discharged or sucked by the working fluid. Moving. At the same time, the working fluid enters and exits the flow path at a second flow rate a plurality of times within the predetermined time by the vibration pump. That is, the working fluid repeatedly enters and exits the flow path.

  Therefore, although it is estimated, the moving body vibrates due to the entry and exit of the working fluid into the flow path, and the working fluid enters and exits a slight gap between the moving body and the wall surface of the flow path. A film is formed between the walls of the road. This membrane makes the walls of the uneven channel substantially smooth. As a result, the moving body moves while sliding on a smooth film, and therefore, the frictional force that the moving body receives from the flow path wall surface decreases. Therefore, the moving object can move at high speed.

  On the other hand, when the movable body is insoluble in the working fluid and the wettability of the working fluid with respect to the wall surface is lower than the wettability of the working fluid with respect to the wall surface of the fluid passage, The moving body moving actuator is configured to move the moving body using a repulsive force based on wettability of the moving body with respect to the wall surface by changing a flow path cross-sectional area of a part of the flow path. Can also be done.

  The flow path inevitably has a backlash (pressure change absorbing portion) that absorbs the change in the internal pressure of the flow path. Accordingly, when moving the fluid to be moved by discharging the working fluid into the flow channel or by sucking the working fluid from the flow channel, from the start of the discharge or suction of the working fluid to the start of the movement of the moved fluid May take time. On the other hand, if the moving fluid is moved by changing the flow path cross-sectional area as in the above configuration, the movement of the moved fluid starts immediately after the start of the flow cross-sectional area. Therefore, a device capable of responding faster can be provided.

Hereinafter, embodiments of a device for moving a moving object in a flow path according to a third invention will be described with reference to the drawings. The moving object moved in the flow path may be an incompressible solid, or may be an incompressible fluid (moving fluid) as described later. The solid as the object to be moved may be conductive or dielectric. When the moving body is a moving fluid, the device that moves the moving body in the flow path according to the third invention is simply referred to as a “moving fluid moving device”. The third invention is not limited to the embodiment described below, and various changes, modifications, and improvements are made based on the knowledge of those skilled in the art without departing from the scope of the third invention. To get.
(First embodiment)
FIG. 19 is a plan view of the moved fluid moving device 10 according to the first embodiment of the third invention. 20 is a cross-sectional view of the fluid movement device 10 taken along a plane along line 1-1 in FIG. The electric control device 20 is conceptually shown in FIG. 19 and omitted in FIG.

  The moving fluid moving device 10 includes a base body 10a made of ceramics having a substantially rectangular parallelepiped shape having sides extending in the X-axis, Y-axis, and Z-axis directions orthogonal to each other, a first pump 11, and a second pump 12. And an electric control device 20. The base body 10a, the first pump 11 and the second pump 12 constitute a container for the fluid F1 and the working fluid F2.

  As shown in FIG. 20, the base body 10a is formed by laminating ceramic thin plate bodies (hereinafter referred to as “ceramic sheets”) 10a1 to 10a3 in the Z-axis direction and integrating them by firing or bonding. Has been. As shown in FIGS. 19 and 20, the base body 10 a includes a flow path forming portion 13, a first pump communication portion 14, and a second pump communication portion 15 therein.

  The 1st pump 11 which functions as an actuator is constituted including the 1st pump room 11a and drive part 11b. The first pump chamber 11a includes a ceramic sheet 11a1 integrally fixed to the upper surface of the ceramic sheet 10a3 by firing or the like, and an easily deformable ceramic thin plate integrally fixed to the upper surface of the ceramic sheet 11a1 by firing. And a diaphragm (ceramic diaphragm) 11a2. A working fluid F2 is accommodated in the first pump chamber 11a.

  The ceramic sheet 11a1 is circular in a plan view and has a hollow cylindrical through hole. The ceramic diaphragm 11a2 has the same circular shape as the ceramic sheet 11a1 in plan view, and is fixed to the upper part of the ceramic sheet 11a1 so as to close the upper surface of the through hole of the ceramic sheet 11a1. The first pump chamber 11a is a space defined by the side wall surface that forms the through hole of the ceramic sheet 11a1 and the lower surface of the ceramic diaphragm 11a2.

  The drive unit 11b is a thin plate (thickness is, for example, about 20 μm) having the same circular shape as the through hole of the ceramic sheet 11a1 in plan view. The drive unit 11b is integrally fixed to the upper surface of the ceramic diaphragm 11a2 by firing or the like. The driving unit 11b is a film-type piezoelectric element including a piezoelectric film and at least a pair of electrodes that sandwich the piezoelectric film. The drive unit 11b deforms the ceramic diaphragm 11a2 when a drive voltage is applied between the pair of electrodes. Thereby, the drive part 11b increases / decreases the volume of the 1st pump chamber 11a, and pressurizes and depressurizes the fluid inside the 1st pump chamber 11a.

  In other words, the first pump 11 is a pump capable of discharging fluid by reducing the volume of the first pump chamber 11a from the initial volume when the drive voltage is not applied, and the volume of the first pump chamber 11a is reduced. It is also a pump capable of sucking fluid by increasing from its initial volume. The drive unit 11b may be a film-type piezoelectric element including an electrostrictive film or an antiferroelectric film and at least a pair of electrodes sandwiching the film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  In the first pump 11 configured as described above, the film-type piezoelectric element of the driving unit 11b and the ceramic sheet 11a1 are integrally formed without using an adhesive or the like. Accordingly, since the first pump 11 can have high rigidity, the working fluid F2 can be discharged or sucked at a high speed.

  The second pump 12 that functions as an actuator includes a second pump chamber 12a and a drive unit 12b that is a film-type piezoelectric element similar to the drive unit 11b. The second pump chamber 12a is composed of a ceramic sheet 12a1 integrally fixed to the upper surface of the ceramic sheet 10a3 by firing, and an easily deformable ceramic thin plate integrally fixed to the upper surface of the ceramic sheet 12a1 by firing. And a diaphragm (ceramic diaphragm) 12a2. A working fluid F2 is accommodated in the second pump chamber 12a. Since the 2nd pump 12 is provided with the same composition as the 1st pump 11, detailed explanation is omitted.

  The second pump 12 increases or decreases the volume of the second pump chamber 12a by deforming the ceramic diaphragm 12a2 when a driving voltage is applied between the electrodes of the driving unit 12b, and pressurizes or depressurizes the fluid in the second pump chamber 12a. It is supposed to be.

  In other words, the second pump 12 is a pump capable of sucking fluid by increasing the volume of the second pump chamber 12a from the initial volume when the drive voltage is not applied, and the volume of the second pump chamber 12a is reduced. It is also a pump capable of discharging fluid by reducing the initial volume. The driving unit 12b may be a film-type piezoelectric element including an antiferroelectric film and at least a pair of electrodes sandwiching the antiferroelectric film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  In the second pump 12 configured as described above, the film type piezoelectric element of the driving unit 12b and the ceramic sheet 12a1 are integrally formed without using an adhesive or the like, similarly to the first pump 11. Yes. Accordingly, since the second pump 12 can have high rigidity, the working fluid F2 can be discharged or sucked at a high speed. In addition, the advantage by such an integral structure also has the pump of other embodiment described below.

  The first pump 11 can also be used to suck the working fluid F2 in the flow path, but at this time, the moved fluid F1 may be sucked together. In other words, the fluid accommodated in the first pump 11 (and in the first pump communication portion 14) is not limited to the working fluid F2. Similarly, the second pump 12 aspirates the working fluid F2 in the flow path as will be described later. However, in some cases, the second fluid 12 may be sucked together with the fluid F1. In other words, the fluid accommodated in the second pump 12 (and the second pump communication portion 15) is not limited to the working fluid F2.

  Here, exemplifying specific dimensions of the first and second pumps 11 and 12, the radii of the bottom surfaces (upper surfaces) of the hollow cylindrical first and second pump chambers 11a and 12a are about 0.5 mm. Each height is about 150 μm. Each radius of the circular thin plate-like ceramic diaphragms 11a2 and 12a2 is about 0.5 mm, and each thickness (height) is about 10 μm.

  The flow path forming unit 13 is a part constituting the flow path 13a. The flow path 13a is a sealed space defined by the side wall of the slit provided in the ceramic sheet 10a2, the upper surface of the ceramic sheet 10a1, and the lower surface of the ceramic sheet 10a3. Since the ceramic sheet is an insulator, no current flows through the wall surface of the flow path 13a.

  The flow path 13a is a straight and elongated space, and has a streamline direction (longitudinal axis) in a direction along the X axis. The flow path 13a is a plane orthogonal to the streamline direction (YZ plane), and a cross section obtained by cutting the flow path 13a (hereinafter, this cross section may be referred to as a “longitudinal cross section of the flow path”). It has a square shape. The flow path 13a is also called a microchannel. The length of the flow path 13a in the streamline direction is about 1 mm, and one side (height and width of the flow path) of the square in the longitudinal section is about several tens of μm.

  A fluid F1 and a working fluid F2 are accommodated in the flow path 13a, and the flow path 13a is substantially filled with these fluids. The fluid F1 to be moved is an incompressible and conductive fluid, and is mercury in this example. The moved fluid F1 may be incompressible, and may be a magnetic material, a liquid metal such as a gallium alloy, oil, or the like. The fluid F1 to be moved is agglomerated and exists in the flow path 13a. Thus, the fluid F1 to be moved substantially separates the flow path 13a into two spaces, a space on the X axis positive direction side and a space on the X axis negative direction side.

  The working fluid F2 is a fluid that is insoluble in the fluid F1 to be moved, is substantially incompressible, and is insulating (non-conductive). In this example, the working fluid F2 is deionized water, but may be a highly permeable solvent fluorinate, paraffin-based electrical insulating oil, silicon oil, or the like. As the working fluid F2, a fluid is selected in which the wettability of the working fluid F2 with respect to the wall surface of the flow path 13a is better than the wettability of the transferred fluid F1 with respect to the wall surface of the flow path 13a.

  A pair of electrodes 21a and 21b that are electrically insulated from each other are disposed in the flow path 13a. The electrode 21a and the electrode 21b flow at a position closer to the X-axis negative side than the central portion in the X-axis direction of the base body 10a and closer to the X-axis positive side than the second pump communication portion 15 (second opening described later). It is exposed to the flow path 13a so as to face each other across the path 13a.

  The electrodes 21a and 21b are respectively connected to a circuit (not shown) outside the base body 10a via a wiring (not shown). The electrode 21a and the electrode 21b are arranged so as to be in a non-conductive state when the fluid F1 to be moved is present at a substantially central portion in the X-axis direction of the base body 10a (that is, when the fluid movement device 10 is in the initial state). It is installed. In addition, the electrode 21a and the electrode 21b are in a conductive state via the moved fluid F1 when the moved fluid F1 is moved to the negative side of the X axis (that is, when the moved fluid moving device 10 is in an operating state). It arrange | positions so that it may become.

  The 1st pump communication part 14 is a part which forms the 1st flow-path connection part 14a and the 1st pump connection part 14b. The first pump communication portion 14 includes side walls of slits, upper surfaces of the ceramic sheet 10a1 and lower surfaces of the ceramic sheet 10a3 provided to form the first flow path connection portion 14a and the first pump connection portion 14b in the ceramic sheet 10a2. And a space defined by a cylindrical through hole provided in the ceramic sheet 10a3.

  One end of the first flow path connecting portion 14a is connected to the flow path 13a, and a first opening 14a1 is formed in the flow path 13a. The first pump connection portion 14b communicates the other end portion of the first flow path connection portion 14a with the first pump chamber 11a. The working fluid F2 is accommodated in the first flow path connection portion 14a and the first pump connection portion 14b.

  The first opening 14a1 is in a direction (in this case, the Z-axis direction) orthogonal to the streamline direction along the streamline direction (X-axis direction) of the flow path 13a in the front view (viewed from the Y-axis direction). It has a substantially square shape consisting of sides along. The length of the side (side along the Z-axis direction) orthogonal to the streamline direction of the flow path 13a of the first opening 14a1 is substantially equal to the distance between the opposing wall surfaces in the Z-axis direction of the flow path 13a. The length of the side along the streamline direction of the flow path 13a of the first opening 14a1 is substantially equal to the length of the side along the direction orthogonal to the streamline direction of the flow path 13a of the first opening 14a1.

  The 2nd pump communication part 15 is a part which forms the 2nd flow-path connection part 15a and the 2nd pump connection part 15b. The second pump communication portion 15 includes side walls of slits, upper surfaces of the ceramic sheets 10a1, and lower surfaces of the ceramic sheets 10a3 provided to form the second flow path connection portions 15a and the second pump connection portions 15b in the ceramic sheet 10a2. And a space defined by a cylindrical through hole provided in the ceramic sheet 10a3.

  One end of the second flow path connection portion 15a is connected to the flow path 13a, and a second opening 15a1 is formed in the flow path 13a. The shape of the second opening 15a1 is the same as the shape of the first opening 14a1. The second pump connection part 15b communicates the other end of the second flow path connection part 15a with the second pump chamber 12a. The working fluid F2 is accommodated in the second flow path connection portion 15a and the first pump connection portion 15b. The second flow path connection portion 15a has the same structure as the first flow path connection portion 14a.

  The electric control device 20 is electrically connected between the electrodes of the drive unit 11b of the first pump 11, applies the first drive voltage V1 between the electrodes of the drive unit 11b, and drives the second pump 12. The second drive voltage V2 is applied between the electrodes of the drive unit 12b.

  Next, the operation of the moved fluid moving device 10 configured as described above will be described with reference to FIGS. 21 and 22. FIG. 21A is a time chart of the first drive voltage V1 that does not employ the third invention, and FIG. 21B is a time chart of the second drive voltage V2 that does not employ the third invention. 22A is a time chart of the first drive voltage V1 adopting the third invention, and FIG. 22B is a time chart of the second drive voltage V2 adopting the third invention.

  First, an outline of the operation of the moved fluid moving device 10 using the drive voltages V1 and V2 that do not employ the third invention will be described. As shown in FIGS. 21A and 21B, the electric control device 20 sets the first drive voltage V1 and the second drive voltage V2 to “0” at time t0. Such a state is referred to as an initial state. At this time, the fluid F1 to be moved is present as one lump at a position (initial position) approximately in the center in the X-axis direction of the flow path.

  In other words, the wettability of the fluid F1 to the wall surface of the flow path 13a is not as good as the wettability of the working fluid F2 to the wall surface of the flow path 13a. It exists as a mass of fluid in 13a. At this time, the moved fluid F1 substantially contacts the wall surface of the flow path 13a and separates the flow path 13a into two spaces, a space on the X-axis positive direction side and a space on the X-axis negative direction side. The working fluid F2 fills a portion of the flow path where the moved fluid F1 does not exist. As can be understood from FIG. 19, when the fluid movement device 10 is in the initial state, the fluid F1 is present at a position where it does not contact either the electrode 21a or the electrode 21b. Therefore, the electrode 21a and the electrode 21b are maintained in a non-conductive state.

  The electric control device 20 increases the first drive voltage V1 at the first speed | Va / (T / 2) | and decreases the second drive voltage V2 at the first speed from time t0 to time t1. Let As a result, the driving portion 11b immediately bends and displaces the ceramic diaphragm 11a2 downward, so that the working fluid F2 flows from the first pump 11 through the first opening 14a1 into the flow path 13a according to the first flow rate (first flow rate). 1 flow rate). Further, since the drive unit 12b immediately bends and displaces the ceramic diaphragm 12a2 upward, the working fluid F2 in the flow path 13a is caused to flow through the second opening 12a through the second opening 15a1 (first flow rate). A). As a result, the moved fluid F1 starts to move in the negative direction of the X axis. And the to-be-moved fluid F1 moves to the position (operation position) which completely covers the electrode 21a and the electrode 21b at time t1. As a result, the electrode 21a and the electrode 21b are in a conductive state.

  The electric control device 20 decreases the first drive voltage V1 at the first speed | Va / (T / 2) | and increases the second drive voltage V2 at the first speed from time t1 to time t2. Let As a result, the drive unit 11b immediately bends and displaces the ceramic diaphragm 11a2 upward, so that the working fluid F2 flows into the first pump 11 from the flow path 13a through the first opening 14a1 according to the first flow rate (the first flow rate). 1). Further, since the drive unit 12b immediately bends and displaces the ceramic diaphragm 12a2 downward, the working fluid F2 flows from the second pump 12 into the flow path 13a through the second opening 15a1 according to the flow rate (first The flow rate is discharged. As a result, the moved fluid F1 starts to move in the positive direction of the X axis and returns to the initial position at time t2. Accordingly, the electrode 21a and the electrode 21b are brought into a non-conductive state again.

  Thereafter, the electric control device 20 repeatedly executes the operations at times t0 to t2. In other words, the electric control device 20 provides a triangular wave having the period T, the amplitude (Va / 2), and the amplitude center (Va / 2) as the first drive voltage V1. Hereinafter, the first drive voltage V1 is referred to as “moving first drive voltage V1m”. At the same time, the electric control device 20 provides a voltage having a waveform obtained by turning the first driving voltage V1m for movement around V = 0 as the second driving voltage V2. That is, the second drive voltage V2 is a triangular wave having a period T, an amplitude (Va / 2), and an amplitude center of (−Va / 2). Hereinafter, the second drive voltage V2 is referred to as “the second drive voltage V2m for movement”. The phase of the moving first driving voltage V1m and the phase of the moving second driving voltage V2m are different by 180 degrees.

  As a result, the moved fluid F1 reciprocates between the initial position and the operating position with the period T, and the electrodes 21a and 21b repeat “off (non-conduction)” and “on (conduction)” with the period T. The above is the operation of the moved fluid moving device when the driving voltages V1 and V2 that do not employ the third invention are used.

  Next, the operation of the moved fluid moving device 10 using the driving voltages V1, V2 adopting the third invention will be described. The electric control device 20 generates the first drive voltage V1 and the second drive voltage V2 shown in FIGS. 22A and 22B, respectively. The first drive voltage V1 shown in FIG. 22A is a voltage (= V1m + V1v) in which the first drive voltage V1v for vibration is superimposed on the first drive voltage V1m for movement. The first driving voltage for vibration V1v is a triangular wave centered on V = 0, and its frequency f1v (period T1v) is higher than the frequency (1 / T) of the first driving voltage for movement V1m, and its amplitude is It is smaller than the amplitude (Va / 2) of the first driving voltage V1m for movement (Vv / 2). That is, the first drive voltage V1v for vibration has a second voltage change rate (Vv / T1v / 2) in a single voltage increase or single voltage decrease, and a plurality of the first drive voltage V1v within the time T / 2. This voltage repeats increasing and decreasing times. Further, the second speed is higher than the first speed (the absolute value of the first speed).

  Similarly, the second drive voltage V2 shown in FIG. 22B is a voltage (= V2m + V2v) in which the second drive voltage V2v for vibration is superimposed on the second drive voltage V2m for movement. The second driving voltage V2v for vibration is a triangular wave with V = 0 as the vibration center, the frequency f2v is higher than the frequency (1 / T) of the second driving voltage V2m for movement, and the amplitude thereof is the second wave for movement. It is smaller than the amplitude (Va / 2) of the drive voltage V2m (Vv / 2). Further, the vibration second drive voltage V2v has the frequency f2v equal to the frequency f1v of the vibration first drive voltage V1v, the amplitude equal to the amplitude of the vibration first drive voltage V1v, and the phase thereof is the vibration first drive voltage V1v. It is different from the phase of the driving voltage V1v by 180 degrees.

  As a result, the working fluid F2 increases or decreases at a flow rate corresponding to the first speed (first flow rate) within a period of the predetermined time T / 2, while the flow rate corresponding to the second speed (second flow rate). The flow rate is repeated at a frequency f1v (= f2v) several times within the predetermined time T / 2. In other words, while the working fluid F2 repeatedly enters and exits the flow path 13a at the frequency f1v, the amount of the fluid F1 on the first pump 11 side (X-axis positive direction side) increases as a whole (average). The amount of the moved fluid F1 on the second pump 12 side (X-axis non-direction side) decreases.

  Accordingly, the moved fluid F1 moves while vibrating with a slight amplitude in the X-axis direction at the frequency f1v. In addition, the working fluid F2 repeatedly enters and exits at a frequency f1v between the fluid F1 to be moved and the wall surface of the flow path 13a, and apparently forms a film for smoothly moving the fluid F1. That is, a film that substantially smoothes the surface of the flow path 13a having fine irregularities is formed.

As a result, the frictional force received by the moved fluid F1 from the wall surface of the flow path 13a is reduced, so that the moved fluid moving device 10 according to the first embodiment of the third invention moves the moved fluid F1 at a higher speed. It becomes possible to make it. In other words, the moved fluid moving device 10 can perform a faster switching operation.
(Second Embodiment)
Next, a moved fluid moving device 30 according to a second embodiment of the third invention will be described with reference to FIGS. FIG. 23 is a conceptual cross-sectional view of the fluid movement device 30 to be moved. In FIG. 23, the electric control device 20 is omitted. FIG. 24 is a time chart of the drive voltage Vd used in the moved fluid moving device 30.

  This moved fluid moving device 30 is provided to the first pump 11 and the point where the second pump 12 and the second pump communication portion 15 of the moved fluid moving device 10 are replaced with the pressure fluctuation absorbing portion 31 and the connecting portion 32, respectively. This is different from the moved fluid moving device 10 only in that the first driving voltage V1 is changed to the driving voltage Vd. Hereinafter, this difference will be mainly described.

  The pressure fluctuation absorption unit 31 has substantially the same structure as that obtained by removing the drive unit 12b from the second pump 12. The pressure fluctuation absorbing part 31 is connected to the flow path 13a in the vicinity of the X-axis direction negative end of the flow path 13a by a connection part 32 having substantially the same structure as the second pump communication part 15.

  Next, the operation of the moved fluid moving device 30 configured as described above will be described. As shown in FIG. 24, the electric control device 20 sets the drive voltage Vd to approximately “0” at time t0. Such a state is referred to as an initial state. At this time, the fluid F1 to be moved is present as one lump at a position (initial position) approximately in the center in the X-axis direction of the flow path. Therefore, since the fluid F1 to be moved does not contact either the electrode 21a or the electrode 21b, the electrode 21a and the electrode 21b are maintained in a non-conductive state.

  Thereafter, the electric control device 20 applies the same voltage as the first drive voltage V1 shown in FIG. 22 to the drive unit 11b of the first pump 11 as the drive voltage Vd. That is, the drive voltage Vd (first drive voltage V1) is a voltage obtained by superimposing the first vibration drive voltage V1v on the first movement drive voltage V1m. Accordingly, the working fluid F2 is discharged into the flow path 13a for a predetermined time T / 2 with a flow rate (first flow rate) corresponding to the first speed, and at the same time, a flow rate (second flow rate) corresponding to the second speed. ) And repeatedly entering and exiting the flow path 13a at a frequency f1v (= f2v) a plurality of times within a predetermined time T / 2. Alternatively, the dynamic fluid F2 is sucked from the flow path 13a for a predetermined time T / 2 with a flow rate corresponding to the first speed (first flow rate), and at the same time a flow rate corresponding to the second speed (second flow rate). ) And repeatedly entering and exiting the flow path 13a at a frequency f1v (= f2v) a plurality of times within a predetermined time T / 2.

  As a result, the fluid F1 reciprocates between the initial position shown in FIG. 23 and the operating position covering the electrodes 21a and 21b (moving) while vibrating with a slight amplitude in the X-axis direction at the frequency f1v. To do). In addition, the pressure change of the flow path 13a by the working fluid F2 is absorbed by the volume change of the pressure fluctuation absorption unit 31.

At this time, the working fluid F2 repeatedly enters and exits at a frequency f1v between the moved fluid F1 and the wall surface of the flow path 13a, and apparently forms a film for moving the moved fluid F1 smoothly. Accordingly, similarly to the moved fluid moving device 10, the moved fluid moving device 30 according to the second embodiment of the third invention can move the moved fluid F1 at a higher speed. In other words, the moved fluid moving device 30 can perform a high-speed switching operation.
(Third embodiment)
Next, a fluid movement device 40 according to a third embodiment of the third invention will be described with reference to FIGS. 25 and 26. FIG. FIG. 25 is a conceptual cross-sectional view of the moved fluid moving device 40. FIG. 26 is a time chart of the first to third drive voltages V1 to V3 used in the moved fluid moving device 40.

  The moved fluid moving device 40 includes a first pump 41, a second pump 42, a third pump 43, a flow path forming unit 44, electrodes 45a and 45b, and an electric control device (not shown). Each of the first pump 41 to the third pump 43 has the same configuration as the first pump 11. The flow path forming part 44 has the same configuration as the flow path forming part 13 and forms a flow path 44a having a streamline direction in the X-axis direction similar to the flow path 13a.

  The 1st pump 41 is connected to the X-axis direction approximate center part of the flow path 44a. The second pump 42 is connected to the vicinity of the end portion in the positive direction of the X axis of the flow path 44a. The third pump 43 is connected to the vicinity of the end portion in the negative X-axis direction of the flow path 44a. The electrode 45a and the electrode 45b are provided at a position between a connection place between the first pump 41 and the flow path 44a and a connection place between the third pump 43 and the flow path 44a. The electrode 45a and the electrode 45b are opposed to each other with the flow path 44a interposed therebetween. Each of the electrode 45a and the electrode 45b is exposed to the flow path 44a.

  The electric control device is electrically connected to each drive unit (all not shown) of the first pump 41, the second pump 42, and the third pump 43, and the first drive voltage V1, the second drive voltage V2, and the third pump. A drive voltage V3 is supplied.

  Next, the operation of the moved fluid moving device 40 configured as described above will be described. As shown in FIG. 26, the electric control device sets the first drive voltage V1 and the third drive voltage V2 to “0” at time t0. Such a state is referred to as an initial state of the device 40. At this time, as shown in FIG. 25, the fluid F1 to be moved is a position (initial position) between the connection location of the first pump 41 and the flow path 44a and the position where the electrode 45a and the electrode 45b are disposed. ) And is not in contact with either the electrode 45a or the electrode 45b. Therefore, the electrode 45a and the electrode 45b are maintained in a non-conductive state.

  On the other hand, the electric control device continuously applies the second drive voltage V2 that changes in a sine wave shape at a predetermined frequency f2v to the drive unit of the second pump 42 from time t0. The amplitude of the second drive voltage V2 is Vv, and the amplitude center is “0”. Therefore, the discharge of the working fluid F2 into the flow path 44a and the suction of the working fluid F2 from the flow path 44a are repeated periodically (at the frequency f2v) by the second pump 42.

  As a result, the working fluid F2 repeatedly enters and exits at a frequency f2v between the moved fluid F1 and the wall surface of the flow path 44a, and apparently forms a film for moving the moved fluid F1 smoothly.

  At time t1, the electric control device changes the first drive voltage V1 from “0” to Va at a first speed (= | Va / (t2-t1) |) for a predetermined time (t2-t1). Increase. Va is a voltage larger than Vv. Thus, the working fluid F2 is discharged from the first pump 41 into the flow path 44a with a flow rate (first flow rate) corresponding to the first speed. The discharge flow rate of the working fluid F2 at this time is a flow rate (first flow rate) corresponding to the first speed.

  Similarly, from the time t1, the electric control device changes the third drive voltage V3 from “0” to −Va at a first speed (= | Va / (t2-t1) |) for a predetermined time (t2- Decrease by t1). Thereby, the working fluid F2 is sucked into the third pump 43 from the flow path 44a. The suction flow rate of the working fluid F2 at this time is a flow rate (first flow rate) corresponding to the first speed.

  On the other hand, at the time t1 to t2, the working fluid F2 is operated at a predetermined flow rate a plurality of times within a predetermined time (t2-t1) by the operation of the second pump 42 (this flow rate is referred to as “second flow rate” for convenience). .) Is repeated to enter and exit the flow path 44a. The second flow rate is a flow rate according to Vv / {(1 / f2v) / 4} and is larger than the first flow rate.

  A position where the fluid F1 starts moving in the negative direction of the X-axis by the discharge and suction of the working fluid F2 by the first pump 41 and the third pump 43, and completely covers the electrodes 45a and 45b at time t2. Move to. At this time, the moved fluid F1 contacts both the electrode 45a and the electrode 45b. Therefore, the electrode 45a and the electrode 45b are in a conductive state.

  The electric control device maintains the first drive voltage V1 and the third drive voltage V3 at Va and -Va, respectively, between times t2 and t3. Then, at time t3, the electric control device changes the first drive voltage V1 from Va to “0” at the first speed (= | Va / (t2-t1) | = | Va / (t4-t3). |) Is decreased by a predetermined time (t2-t1 = t4-t3). As a result, the working fluid F2 is sucked into the first pump 41 from the flow path 44a. The suction flow rate of the working fluid F2 at this time is a flow rate (first flow rate) corresponding to the first speed.

  Similarly, from the time t3, the electric control device changes the third drive voltage V3 from −Va to “0” at a first speed (= | Va / (t2-t1) |) for a predetermined time (t2- Increase by t1). As a result, the working fluid F2 is discharged from the third pump 43 into the flow path 44a. The discharge flow rate of the working fluid F2 at this time is a flow rate (first flow rate) corresponding to the first speed.

  On the other hand, at time t3 to t4, the operation of the second pump 42 causes the working fluid F2 to enter and exit the flow path 44a with the second flow rate a plurality of times within a predetermined time (t3-t4) = (t2-t1). repeat.

  Then, due to the discharge and suction of the working fluid F2 by the first pump 41 and the third pump 43, the moved fluid F1 starts to move in the positive direction of the X axis and returns to the initial position at time t4. Thereby, the electrode 45a and the electrode 45b are brought into a non-conductive state. Thereafter, the electric control device repeatedly executes the operations at times t1 to t4.

  As described above, the moved fluid moving device 40 according to the third embodiment has the moving object moving pump (the first pump 41 and / or the first pump 41) that discharges or sucks the working fluid F2 with respect to the flow path 44a. 3 pump 43) and a vibration pump (second pump 42) for discharging and sucking the working fluid F2 to and from the flow path 44a. That is, the first pump 41, the second pump 42, and the third pump 43 function as actuators that move the fluid F1 to be moved while vibrating in the flow path 44a. The first pump 41 and the third pump 43 are provided with a first drive voltage V1 and a third drive voltage V3 as movement drive voltages, and the second pump 42 is supplied with a second drive voltage as a vibration drive voltage. V2 is given.

Then, the second pump 42 is operated to vibrate the fluid F1 and the film of the working fluid F2 for smoothly moving the fluid F1 is between the fluid F1 and the wall surface of the flow path 34a. Formed. As a result, the moved fluid moving device 40 can move the moved fluid F1 at high speed. In other words, the moved fluid moving device 40 is a switching device capable of high-speed switching operation.
(Fourth embodiment)
Next, a moved fluid movement device 50 according to a fourth embodiment of the third invention will be described with reference to FIGS. 27 and 28. FIG. 27 is a conceptual cross-sectional view of the fluid movement device 50 to be moved. FIG. 28 is a time chart of the first to third drive voltages V1 to V3 used in the moved fluid moving device 50.

  The fluid transfer device 50 includes a base body 50a formed by laminating ceramic sheets 50a1 to 50a3 in the Z-axis direction and integrating them by firing or bonding. The base body 50 a includes a flow path forming portion 53 similar to the flow path forming portion 13, a first pump communication portion 14, and a second pump communication portion 15.

  The moved fluid moving device 50 also includes a first pump 11 and a second pump 12. The first pump 11 is connected to the flow path 53a via the first pump communication portion 14. The relationship between the first pump 11, the first pump communication portion 14 and the flow path 53a is the same as the relationship between the first pump 11, the first pump communication portion 14 and the flow path 13a. The second pump 12 is connected to the flow path 53 a via the second pump communication unit 15. The relationship between the second pump 12, the second pump communication portion 15, and the flow path 53a is the same as the relationship between the second pump 12, the second pump communication portion 15 and the flow path 13a. The first drive voltage V1 and the second drive voltage V2 are respectively applied to the drive unit 11b of the first pump 11 and the drive unit 12b of the second pump from an electric control device (not shown).

  The ceramic sheet 50 a 3 has a thin plate portion (diaphragm) 54. The thin plate portion 54 is provided at a substantially central portion in the X-axis direction of the flow path 53a. A film type piezoelectric element 55 is fixed to the upper surface of the thin plate portion 54 by firing or the like. When the third drive voltage V3 is applied from an electric control device (not shown), the film-type piezoelectric element 55 bends and deforms the thin plate portion 54 downward as shown in FIG. . When the thin plate portion 54 is bent and deformed downward, the cross-sectional area of the flow channel 53a at the approximate center in the X-axis direction becomes smaller than the cross-sectional area of the flow channel 53a near both ends in the X-axis direction.

  The flow path 53a contains the fluid F1 to be moved and the working fluid F2 in the same manner as the flow path 13a. In the initial state, the fluid F1 to be moved is located in the approximate center of the flow path 53a in the X-axis direction and is in contact with the thin plate portion 54. The 1st pump 11, the 1st pump communication part 14, the 2nd pump 12, and the 2nd pump communication part 15 are satisfy | filled with the working fluid F2.

  Next, the operation of the moved fluid moving device 50 will be described. As shown in FIG. 28, the electric control device continuously applies the first drive voltage V <b> 1 (vibration drive voltage) that changes sinusoidally at a predetermined frequency f <b> 1 v to the drive unit 11 b of the first pump 11. The first drive voltage V1 has an amplitude of Vv and a center of amplitude of “0”. Further, the electric control device continuously applies a second drive voltage V2 (vibration drive voltage) that changes in a sine wave shape at a predetermined frequency f2v equal to the frequency f1v to the drive unit 12b of the second pump 12. The amplitude of the second drive voltage V2 is Vv, and the amplitude center is “0”. However, the phase of the second drive voltage V2 differs from the phase of the first drive voltage V1 by 180 degrees.

  As a result, when the first pump 11 discharges the working fluid F2 into the flow path 53a, the second pump 12 sucks the working fluid F2 from the flow path 53a. When the second pump 12 discharges the working fluid F2 into the flow path 53a, the first pump 11 sucks the working fluid F2 from the flow path 53a. Therefore, the discharge of the working fluid F2 into the flow path 53a and the suction of the working fluid F2 from the flow path 53a are repeated periodically (at the frequency f1v = f2v) by the first pump 11 and the second pump 12. . As a result, the fluid F1 vibrates at the frequency f1v, and the working fluid F2 repeatedly enters and exits between the fluid F1 and the wall surface of the flow path 53a at the frequency f1v. A film for smooth movement is formed.

  On the other hand, the electric control device maintains the third drive voltage V3 as the movement drive voltage at “0” between times t0 and t1. Accordingly, since the moved fluid moving device 50 is in the initial state, the moved fluid F1 is located at a substantially central portion in the X-axis direction of the flow path 53a. Thereafter, at time t1, the electric control device increases the third drive voltage V3 from “0” to Va at the first speed (= | Va / (t2−t1) |). Va is a voltage larger than Vv. Thereby, since the thin plate portion 54 is bent and deformed downward, the moved fluid F1 receives a repulsive force based on the wettability between the moved fluid F1 and the channel 53a from the channel 53a, and is separated into two lumps. . One of the two masses moves in the positive direction of the X axis, and the other mass moves in the negative direction of the X axis. The movement of the fluid F1 is smoothly performed by the above-described vibration of the fluid F1 and the apparent film of the working fluid F2.

  The electric control device maintains the third drive voltage V3 at Va during times t2 to t3. At time t3, the electric control device shifts the first drive voltage V3 from Va to “0” and sets the first speed (= | Va / (t2-t1) | = | Va / (t4-t3). Decrease with ｜). As a result, the thin plate portion 54 is deformed upward, and the moved fluid moving device 50 returns to the initial state, so that the moved fluid F1 that has been separated into two lumps moves to the substantially central portion in the X-axis direction, respectively. To do. As a result, the fluid F1 to be moved again becomes one lump at the approximate center in the X-axis direction of the flow path 53a. The movement of the fluid F1 is also smoothly performed by the above-described vibration of the fluid F1 and the apparent film of the working fluid F2. Thereafter, the electric control device repeatedly executes the operations at times t1 to t4.

  As described above, the moved fluid moving device 50 according to the fourth embodiment includes the vibration pumps (the first pump 11 and the second pump 12) that discharge and suck the working fluid F2 with respect to the flow path 53a. I have. That is, the first pump 11 and the second pump 12 function as actuators that vibrate the fluid F1 to be moved in the flow path 53a. Further, the fluid movement device 50 includes a thin plate portion 54 and a film type piezoelectric element 55. The thin plate portion 54 and the film type piezoelectric element 55 function as an actuator that moves the fluid F1 to be moved in the flow path 53a.

Therefore, by the operation of the first pump 11 and the second pump 12, the moved fluid F1 can move smoothly in the flow path 53a. As a result, in the initial state, the pair of electrodes that are in contact with the fluid F1 is exposed to the flow channel 53a without being in contact with the fluid F1 and in the operating state in which the thin plate portion 54 is bent and deformed. If provided, a switching device capable of high-speed switching operation can be obtained.
(Regarding the manufacturing method of the fluid movement device to be moved)
Next, the manufacturing method of each above-mentioned to-be-moved fluid moving device is demonstrated. The above-described substrates (substrate 10a, substrate 50a, etc.) can be made of silicon, glass, alumina, acrylic, or polycarbonate in addition to zirconia as a ceramic. Therefore, the flow path (flow path 13a, flow paths 44a, 53a, etc.) can be formed by the following method.
(Flow path forming method)
(1) When the material of the substrate is ceramics, a flow path can be formed by punching a ceramic sheet to form a slit and laminating and integrating the ceramic sheets so as to sandwich the ceramic sheet. . For example, in the case of the moved fluid moving device 10 shown in FIG. 20, a slit that forms the side wall of the flow path 13a is formed by punching in the ceramic sheet 10a2. Next, the ceramic sheets 10a2 to 10a3 are laminated so that the ceramic sheet 10a2 is sandwiched between the ceramic sheets 10a1 and 10a3. Thereafter, the ceramic sheets 10a2 to 10a3 are integrated by firing (or adhesion) or the like. Thus, the flow path 13a is formed.

  (2) When the material of the substrate is glass or silicon, the flow path can be formed by isotropic etching or anisotropic etching.

  (3) The flow path can also be formed by laser processing.

  (4) You may form the groove | channel which comprises a part of flow path by machining (machining) using an end mill.

  (5) You may form the groove | channel which comprises some flow paths by sandblasting.

(6) Grooves constituting a part of the flow path may be formed by setting the mold having irregularities to a high temperature and pressing the high-temperature mold against the surface of the substrate (that is, a hot end boss).
(Crack suppression method)
When a groove is formed using the above-mentioned machining or sandblasting, a processing flaw called a microcrack occurs at the corner of the groove, and the crack develops starting from the microcrack, and the substrate (base material) is damaged by this crack. There is a case. It is desirable to adopt the following measures against this.

  (1) Healing treatment (heat treatment, annealing treatment) is performed on the substrate (base material) to close (eliminate) microcracks generated on the surface and release residual stress.

(2) A coating layer is formed on the surface of the groove, and the coating layer is closed so as to cover the crack. More specifically, a coating layer is formed on the surface of the groove using an ultraviolet curable acrylic resin having high fluidity, and the coating layer is cured by irradiating the coating layer with ultraviolet rays. As a result, the acrylic resin penetrates into the cracks, and a smooth groove surface is formed. Further, the surface of the groove may be coated using a material having a thermal expansion coefficient smaller than that of the base (base material). According to this, since the compressive stress is applied to the groove surface, the progress of cracks can be prevented.
(Ceramic pump and substrate bonding method)
The above-mentioned pumps made of ceramics (first pumps 11, 41, second pumps 12, 42, etc., hereinafter referred to as “ceramics pumps”) and bases (bases 10a, 50a, etc.) include several types described below. Can be joined by a method.
(1) An adhesive sheet is interposed between the substrate and the ceramic pump (for example, between the upper surface of the substrate 10a and the lower surface of the ceramic sheet 11a1 of the first pump 11), and the ceramic pump is bonded to the substrate by this adhesive sheet.
(2) A certain gap is formed between the substrate and the ceramic pump (for example, between the upper surface of the substrate 10a and the lower surface of the ceramic sheet 11a1 of the first pump 11), and then an acrylic is formed in the gap. Resin is poured from the side surface, and the ceramic pump is joined to the substrate using this acrylic resin. In this case, the gap for casting the acrylic resin can be formed by a screen printing method. When the bonding area is large, a through hole is preferably formed in the base material constituting the base. According to this, the air which remains in a junction part can be discharged | emitted outside a junction part. Further, it is desirable to adjust the viscosity of the acrylic resin according to the bonding area and the base material (base material). Furthermore, it is desirable that the ultraviolet curing power for curing the acrylic resin is set to an optimum magnitude. This is because if the ultraviolet curing power is too small, the curing time becomes too long, and if the power is too large, an abrupt curing reaction occurs and cracks may occur in the joint.
(3) An adhesive is formed on the bonding surface by screen printing, and the ceramic pump is bonded to the substrate with this adhesive. In this case, an ultraviolet curable acrylic resin can be poured after the bonding to strengthen the adhesive layer.

  As described above, the moved fluid moving device of each embodiment of the third invention vibrates the moved fluid F1, and forms a working fluid film between the moved fluid F1 and the wall surface of the flow path. The moving fluid F1 is moved while forming. Therefore, the frictional force that the moved fluid F1 receives from the flow path is small, and the movement of the moved fluid F1 becomes smooth, so that the moved fluid F1 can be moved at a higher speed. As a result, a moved fluid moving device having very good responsiveness is provided.

  The third invention is not limited to the above embodiment, and various modifications can be employed within the scope of the third invention. For example, the film-type piezoelectric element used in the drive unit described above can be replaced with an antiferroelectric film.

  In addition, the movement of the fluid F1 starts when the fluid F2 enters and exits the vibrational flow path for generating the vibration of the fluid F1 and forming the apparent film of the fluid F2 described above. It is good also as only the period before and after the movement start of the to-be-moved fluid F1 including the time to be performed. That is, for example, as shown in FIG. 29 instead of FIG. 24, the time t2 and the time t6 at which the movement of the moved fluid F1 is started with respect to the drive unit 11b of the moved fluid moving device 30 according to the second embodiment. Vibration drive for causing the working fluid F2 to enter and exit the flow path in a vibrational manner to the drive voltage for movement of the fluid F1 only during the period before and after (time t1 to t3, time t5 to t7) You may make it provide the drive voltage Vd which superimposed the voltage. Further, in FIG. 29, only at time t2 to t4 or time t6 to t8 (that is, only during a period in which the fluid F1 is moved), the driving voltage obtained by superimposing the vibration driving voltage on the moving driving voltage. You may make it provide Vd.

  In addition, the substrate of the moved fluid movement device according to each of the above embodiments is made of ceramics. On the other hand, the base body 60a can also be formed from the Kovar glass 60a as in the moved fluid moving device 60 shown in FIG.

  In the moved fluid moving device 60, a channel 61a similar to the channel 13a is formed in the base body 60a. Similar to the moved fluid moving device 10, the moved fluid F <b> 1 and the working fluid F <b> 2 are accommodated in the flow path 61 a. The fluid movement device 60 includes a first pump 11 and a second pump 12 that are not shown. The fluid transfer device 60 to be moved includes a pair of electrodes 62a and 62b. The electrodes 62a and 62b are made of Kovar metal. The electrodes 62a and 62b each have a cylindrical rod shape, and are respectively inserted into a pair of through holes formed in the upper wall of the flow path 61a. The electrodes 62a and 62b are fixed to the base body 60a on the outer surface of the base body 60a by melting the periphery of the through hole using a burner. The electrodes 62a and 62b are exposed to the flow path 61a so that their lower surfaces exist in a plane that coincides with the upper wall surface of the flow path 61a.

Such a moved fluid moving device 60 has the following advantages.
(1) Since the coefficient of thermal expansion of the Kovar metal constituting the electrodes 62a and 62b and the coefficient of thermal expansion of the Kovar glass constituting the substrate 60a are substantially equal, a stress is generated even when the cooling / heating cycle is applied to the moving fluid moving device 60. It is hard to do. Therefore, since the fluid transfer device 60 is not damaged by heat stress, the durability of the fluid transfer device 60 is high.
(2) Since the flow path and the electrode can be integrally formed without using a soft material such as an adhesive, the fluid transfer device 60 to be moved has high rigidity. Therefore, when the working fluid F2 is caused to flow into the flow path 61a in order to move the fluid F1 to be moved and the internal pressure in the flow path 61a is to be increased, the pressure increase is hardly absorbed. As a result, the moved fluid F1 can be moved at high speed.
(3) The Kovar metal constituting the electrodes 62a and 62b has good wettability with mercury. Therefore, if mercury is used as the fluid F1, the resistance between the fluid F1 and the electrodes 62a and 62b can be lowered, and the fluid F1 can be reliably held by the electrodes 62a and 62b. it can. Furthermore, since Kovar metal has high corrosion resistance, it is also possible to obtain electrodes 62a and 62b that are not easily deteriorated.

  The electrodes 62a and 62b made of Kovar metal can also be formed in a thin film shape. The electrodes 62a and 62b can also be formed in a wire shape or a tube shape. Furthermore, the electrodes 62a and 62b can be formed so as to fill part of the flow path by electroforming, or can be formed by photoetching or lift-off.

  Further, an actuator that can vibrate the wall surface of the flow path may be disposed in the vicinity of the flow path in order to vibrate the movable body in the flow path. Specifically, the movable body moving device and the flow path forming portion that forms the flow path are substantially incompressible and the flow path is substantially separated into at least two of the flow paths. A movable body housed in the fluid passage, a substantially incompressible working fluid housed in a portion of the flow path other than the portion where the movable body is present, and a wall surface of the flow path. You may provide the actuator for vibration, and the actuator for a movement which moves the said to-be-moved body to a streamline direction within the said flow path.

  Further, in such a device, the vibration actuator is a piezoelectric / electrostrictive element fixed to the flow path forming section, and vibrates the wall surface of the flow path by expansion / contraction of the piezoelectric / electrostrictive element. It may be configured. Further, the moving actuator may be a pump that discharges the working fluid into the flow path and sucks the working fluid from the flow path (for example, a pump such as the ceramic pump described above).

  Furthermore, the following fourth invention is provided in the present application. The fourth aspect of the present invention relates to a device that can be applied to a microelectromechanical component called a micromachine such as a micromotor, a microsensor, a microrelay, or a microelectromechanical system (MEMS), an electrical path, an optical path, and the like. The present invention relates to a switching device that can be used, and a device that can be used as a drive source such as a cylinder, etc., and that moves a moving object in a flow path.

  In recent years, micro-motors, micro-sensors, micro-switches, and the like having a size of several millimeters to several tens of microns have been developed using a microfabrication technique for materials such as semiconductor manufacturing techniques. These element devices include, for example, inkjet printer heads, microvalves, flow sensors, pressure sensors, recording heads, tracking servo actuators, on-chip biochemical analysis, microreactors, high-frequency switching devices, micromagnetic devices, microrelays, acceleration sensors. , Gyros, driving devices, displays, optical scanners, and so on.

  Among these devices, for example, the switching device disclosed in Japanese Patent Publication Showa 47-21645 (page 2, FIG. 2 and FIG. 3) uses mercury as a moving object in the flow path. It is made to move and the conduction | electrical_connection state of the several electrode provided in the flow-path wall by this mercury is switched.

  This disclosed device performs a switching operation by changing the state of mercury and electrodes from a contact state to a non-contact state, or conversely, changing from a non-contact state to a contact state. In this device, the smaller the electrical resistance between the mercury and the electrode in contact, the smaller the electrical loss in the switch. In order to reduce the electrical resistance value between mercury and the electrode, the electrode may be formed of a material that has good wettability with mercury.

  However, if the wettability between the electrode and mercury is good, it becomes difficult to shift the state between the two from the contact state to the non-contact state. As a result, the responsiveness of switching deteriorates, and it is necessary to increase the generated force of the actuator necessary for moving mercury. Such a problem inevitably exists in a device that does not have an electrode or a device in which mercury moves while always covering the electrode. That is, in general, a device that moves a moving object in a flow path has a problem that it is difficult to move the moving object at a high speed because the moving object receives a frictional force from the wall surface of the flow path.

  The fourth invention is made to cope with the above-described problem, and provides a device capable of moving a moving object in a flow path at high speed. The device according to the fourth aspect of the invention can be particularly suitably used for a switch (switching device) that requires high-speed switching operation, for example.

  In order to achieve the above object, a device for moving a moving object in a flow channel according to a fourth aspect of the present invention includes a substrate having a flow channel forming part that forms a flow channel, and a substantially non-compressible, A movable body that is accommodated so as to substantially separate the flow path into at least two in the path, and a substantially non-accommodated portion that is accommodated in a portion of the flow path other than the portion where the movable body exists A working fluid that is compressible, a vibration actuator that vibrates the wall surface of the flow path, and a movement actuator that moves the movable body in a streamline direction in the flow path.

  According to this, since the wall surface of the flow path is vibrated by the vibration actuator, the moving object vibrates in the flow path. With this vibration of the moving body, the working fluid enters a slight gap between the moving body and the wall surface of the flow path, and a film is formed between the moved body and the wall surface of the flow path. This membrane makes the walls of the uneven channel substantially smooth. As a result, the moving object that is moved in the flow path by the moving actuator moves while sliding on the smooth film, so that the frictional force that the moving object receives from the wall surface of the flow path decreases. For this reason, a to-be-moved body can move at high speed. Therefore, if such a device is used as a switch having an electrode that is opened and closed by a movable body, a switching device capable of high-speed switching is provided.

  In this case, the vibration actuator is a piezoelectric / electrostrictive element fixed to the flow path forming portion, and is configured to vibrate the wall surface of the flow path by expansion and contraction of the piezoelectric / electrostrictive element. Is preferred.

  In general, the expansion / contraction frequency of the piezoelectric / electrostrictive element can be extremely increased. Therefore, according to the said structure, since a flow path can be vibrated with a high frequency, the above-mentioned film | membrane suitable for a movement of a to-be-moved body can be formed easily.

  The moving actuator may be a pump that discharges the working fluid into the flow path and sucks the working fluid from the flow path. In this case, the pump includes a pump chamber having a ceramic diaphragm as a wall and a membrane type piezoelectric element, and the volume of the pump chamber is changed by deforming the ceramic diaphragm by the membrane type piezoelectric element. A pump that discharges and sucks the working fluid is preferable.

  According to the pump using such a film-type piezoelectric element and a ceramic diaphragm, the working fluid can be discharged and sucked without delay at a desired timing, so that the working fluid can be discharged or sucked at a desired timing. To move the object to be moved.

  On the other hand, the movable body is insoluble in the working fluid, and the wettability with respect to the wall surface of the flow path is less favorable than the wettability of the working fluid with respect to the wall surface of the flow path (that is, the moved fluid). The moving actuator moves the movable body using repulsive force based on the wettability of the movable body with respect to the wall surface by changing a flow passage sectional area of a part of the flow passage. It is also preferable to be configured as described above.

  The flow path inevitably has a shaky part that absorbs changes in the flow path internal pressure. Therefore, when the fluid to be moved is moved by discharging the working fluid into the flow path or by sucking the working fluid from the flow path, the pressure in the flow path changes from the start of discharge or suction of the working fluid. Thus, it may take time before the movement of the fluid to be moved starts. In contrast, if the fluid to be moved is moved using repulsive force based on the wettability generated by changing the channel cross-sectional area as in the above configuration, the movement of the fluid to be moved starts the channel cross-sectional area. Start immediately after. Therefore, according to the said structure, the device which can move a to-be-moved body at higher speed can be provided.

  Further, the moving actuator that changes the cross-sectional area of a part of the flow path is an actuator that changes the cross-sectional area of a part of the flow path by deforming a part of the wall of the flow path. Thus, it may be configured to be used as the vibration actuator. In this case, the vibration actuator may be provided separately from the moving actuator, or may be constituted only by the moving actuator.

  Further, the base is composed of a member constituting the wall surface of the flow path to be vibrated and a member surrounding the member, and the member constituting the wall face of the flow path to be vibrated is a member of the member surrounding the member. It is preferable to be formed from a material having higher rigidity than rigidity. Further, it is preferable that at least the member constituting the wall surface of the flow path to be vibrated is made of at least one of ceramics, glass and silicon.

  According to these, since the rigidity of the wall surface of the flow path to be vibrated is increased, the resonance frequency of the wall surface is increased. Therefore, the wall surface of the flow path can be vibrated at a frequency necessary for forming the above-described film suitable for smoothly moving the moving object.

By the way, the surface roughness of the wall surface of the flow path is expressed by “arithmetic average roughness Ra”. The arithmetic average roughness Ra is a value defined as follows.
(1) The flow path is cut along a certain plane, and a roughness curve f (x) indicating the unevenness of the wall surface of the flow path in the plane is obtained.
(2) An average value (average line) fave of the roughness curve f (x) with respect to a predetermined distance L along the wall surface is obtained.
(3) The absolute values of the deviations of the roughness curve f (x) and the average line fave at the distance L are summed, and the average value for the distance L is obtained from the sum. This average value is the arithmetic average roughness Ra. That is, the arithmetic average roughness Ra is a value obtained by the following equation (1).

  When the arithmetic average roughness Ra of the flow path wall surface thus obtained is smaller than 0.02 μm (that is, the unevenness of the flow path wall surface is excessively small and the flow path wall surface is smooth), It is difficult for the working fluid to enter between the flow path wall surface, and the amount of the working fluid existing between the movable body and the flow path wall surface becomes too small. As a result, a film for smoothly moving the moving object cannot be formed between the moving object and the wall surface of the flow path.

  On the other hand, when the arithmetic average roughness Ra of the flow path wall surface is larger than 5.0 μm (that is, the unevenness of the flow path wall surface is excessive), the working fluid is concentrated in the recesses of the flow path wall surface, and is moved. The amount of the working fluid existing between the body and the convex portion of the flow path wall surface that supports the body to be moved becomes too small. As a result, a film for smoothly moving the movable body cannot be formed between the movable body and the channel wall surface.

  Therefore, in such a device, it is preferable that the arithmetic average roughness Ra representing the surface roughness of the wall surface of the flow path to be vibrated is a value between 0.02 and 5.0 μm.

Hereinafter, embodiments of a device for moving a moving object in a flow path according to a fourth invention will be described with reference to the drawings. The moving object moved in the flow path may be an incompressible solid, or may be an incompressible fluid (moving fluid) as described later. The solid as the object to be moved may have conductivity or may be a dielectric. When the moving body is a moving fluid, the device that moves the moving body in the flow path according to the fourth invention is simply referred to as a “moving fluid moving device”. The fourth invention is not limited to the embodiment described below, and various changes, modifications, and improvements are made based on the knowledge of those skilled in the art without departing from the scope of the fourth invention. To get.
(First embodiment)
FIG. 31 is a plan view of the moved fluid moving device 10 according to the first embodiment of the fourth invention. 32 is a cross-sectional view of the fluid movement device 10 taken along the plane along line 1-1 in FIG. The electric control device 20 is conceptually shown in FIG. 31 and omitted in FIG.

  The moving fluid moving device 10 includes a base body 10a made of ceramics having a substantially rectangular parallelepiped shape having sides extending in the X-axis, Y-axis, and Z-axis directions orthogonal to each other, a first pump 11, and a second pump 12. And a plurality of (here, five) piezoelectric elements 16, a resin layer 17, and an electric control device 20. The base body 10a, the first pump 11 and the second pump 12 constitute a container for the fluid F1 and the working fluid F2.

  As shown in FIG. 32, the substrate 10a is formed by laminating ceramic thin plate bodies (hereinafter referred to as “ceramic sheets”) 10a1 to 10a3 in the Z-axis direction and firing and integrating them. . As shown in FIGS. 31 and 32, the base body 10 a includes therein a flow path forming part 13, a first pump communication part 14, and a second pump communication part 15 constituting the flow path 13 a. The base body 10a may be formed by integrating the ceramic sheets 10a1 to 10a3 by bonding.

  The first pump 11 functions as an actuator (moving actuator) that moves the fluid F1 in the flow line direction (X-axis direction) in the flow path 13a by discharging and sucking the working fluid F2. The 1st pump 11 is comprised including the 1st pump chamber 11a and the drive part 11b.

  The first pump chamber 11a is composed of a ceramic sheet 11a1 integrally fixed to the upper surface of the ceramic sheet 10a3 by firing, and an easily deformable ceramic thin plate integrally fixed to the upper surface of the ceramic sheet 11a1 by firing. And a diaphragm (ceramic diaphragm) 11a2. A working fluid F2 is accommodated in the first pump chamber 11a.

  The ceramic sheet 11a1 is circular in a plan view and has a hollow cylindrical through hole. The ceramic diaphragm 11a2 has the same circular shape as the ceramic sheet 11a1 in plan view, and is fixed to the upper part of the ceramic sheet 11a1 so as to close the upper surface of the through hole of the ceramic sheet 11a1. The first pump chamber 11a is a space defined by the side wall surface that forms the through hole of the ceramic sheet 11a1 and the lower surface of the ceramic diaphragm 11a2.

  The drive unit 11b is a thin plate (thickness is, for example, about 20 μm) having the same circular shape as the through hole of the ceramic sheet 11a1 in plan view. The drive unit 11b is integrally fixed to the upper surface of the ceramic diaphragm 11a2 by firing or the like. The driving unit 11b is a film-type piezoelectric element including a piezoelectric film and at least a pair of electrodes that sandwich the piezoelectric film. The drive unit 11b deforms the ceramic diaphragm 11a2 when a drive voltage is applied between the pair of electrodes. Thereby, the drive part 11b increases / decreases the volume of the 1st pump chamber 11a, and pressurizes and depressurizes the fluid inside the 1st pump chamber 11a.

  In other words, the first pump 11 is a pump capable of discharging fluid by reducing the volume of the first pump chamber 11a from the initial volume when the drive voltage is not applied, and the volume of the first pump chamber 11a is reduced. It is also a pump capable of sucking fluid by increasing from its initial volume. The drive unit 11b may be a film-type piezoelectric element including an electrostrictive film or an antiferroelectric film and at least a pair of electrodes sandwiching the film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  In the first pump 11 configured as described above, the film-type piezoelectric element, the ceramic diaphragm 11a2, and the ceramic sheet 11a1 of the driving unit 11b are integrally formed without using an adhesive or the like. Accordingly, since the first pump 11 can have high rigidity, the working fluid F2 can be discharged or sucked at a high speed.

  Similarly to the first pump 11, the second pump 12 is an actuator (moving actuator) that moves the fluid F1 in the flow line direction (X-axis direction) in the flow path 13a by discharging and sucking the working fluid F2. ). The second pump 12 includes a second pump chamber 12a and a drive unit 12b that is a film-type piezoelectric element similar to the drive unit 11b.

  The second pump chamber 12a is composed of a ceramic sheet 12a1 integrally fixed to the upper surface of the ceramic sheet 10a3 by firing, and an easily deformable ceramic thin plate integrally fixed to the upper surface of the ceramic sheet 12a1 by firing. And a diaphragm (ceramic diaphragm) 12a2. A working fluid F2 is accommodated in the second pump chamber 12a. Since the 2nd pump 12 is provided with the same composition as the 1st pump 11, detailed explanation is omitted.

  The second pump 12 increases or decreases the volume of the second pump chamber 12a by deforming the ceramic diaphragm 12a2 when a driving voltage is applied between the electrodes of the driving unit 12b, and pressurizes or depressurizes the fluid in the second pump chamber 12a. It is supposed to be.

  In other words, the second pump 12 is a pump capable of sucking fluid by increasing the volume of the second pump chamber 12a from the initial volume when the drive voltage is not applied, and the volume of the second pump chamber 12a is reduced. It is also a pump capable of discharging fluid by reducing the initial volume. The driving unit 12b may be a film-type piezoelectric element including an antiferroelectric film and at least a pair of electrodes sandwiching the antiferroelectric film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  Like the first pump 11, the second pump 12 configured in this way is configured such that the film-type piezoelectric element of the driving unit 12b, the ceramic diaphragm 12a2, and the ceramic sheet 21a1 are integrated without using an adhesive or the like. Is formed. Accordingly, since the second pump 12 can have high rigidity, the working fluid F2 can be discharged or sucked at a high speed. In addition, the advantage by such an integral structure also has the pump of other embodiment described below.

  Further, the first pump 11 sucks the working fluid F2 in the flow path, and at this time, the moved fluid F1 may be sucked together. In other words, the fluid accommodated in the first pump 11 (and in the first pump communication portion 14) is not limited to the working fluid F2. Similarly, the second pump 12 sucks the working fluid F2 in the flow path, but may sometimes suck the moving fluid F1 together. In other words, the fluid accommodated in the second pump 12 (and the second pump communication portion 15) is not limited to the working fluid F2.

  Here, exemplifying specific dimensions of the first and second pumps 11 and 12, the radii of the bottom surfaces (upper surfaces) of the hollow cylindrical first and second pump chambers 11a and 12a are about 0.5 mm. Each height is about 150 μm. Each radius of the circular thin plate-like ceramic diaphragms 11a2 and 12a2 is about 0.5 mm, and each thickness (height) is about 10 μm.

  The flow path forming unit 13 is a part constituting the flow path 13a. The flow path 13a is a sealed space defined by the side wall of the slit provided in the ceramic sheet 10a2, the upper surface of the ceramic sheet 10a1, and the lower surface of the ceramic sheet 10a3. Since the ceramic sheet is an insulator, no current flows through the wall surface of the flow path 13a.

  The flow path 13a is a straight and elongated space, and has a streamline direction (longitudinal axis) in a direction along the X axis. The flow path 13a is a plane orthogonal to the streamline direction (YZ plane), and a cross section obtained by cutting the flow path 13a (hereinafter, this cross section may be referred to as a “longitudinal cross section of the flow path”). It has a square shape. The flow path 13a is also called a microchannel. The length of the flow path 13a in the streamline direction is about 1 mm, and one side (height and width of the flow path) of the square in the longitudinal section is about several tens of μm.

  A fluid F1 and a working fluid F2 are accommodated in the flow path 13a, and the flow path 13a is substantially filled with these fluids. The fluid F1 to be moved is an incompressible and conductive fluid, and is mercury in this example. The moved fluid F1 may be incompressible, and may be a magnetic material, a liquid metal such as a gallium alloy, oil, or the like. The fluid F1 to be moved is agglomerated and exists in the flow path 13a. Thus, the fluid F1 to be moved substantially separates the flow path 13a into two spaces, a space on the X axis positive direction side and a space on the X axis negative direction side.

  The working fluid F2 is a fluid that is insoluble in the fluid F1 to be moved, is substantially incompressible, and is insulating (non-conductive). In this example, the working fluid F2 is deionized water, but may be a highly permeable solvent fluorinate, paraffin-based electrical insulating oil, silicon oil, or the like. As the working fluid F2, a fluid is selected in which the wettability of the working fluid F2 with respect to the wall surface of the flow path 13a is better than the wettability of the transferred fluid F1 with respect to the wall surface of the flow path 13a.

  A pair of electrodes 21a and 21b that are electrically insulated from each other are disposed in the flow path 13a. The electrode 21a and the electrode 21b flow at a position closer to the X-axis negative side than the central portion in the X-axis direction of the base body 10a and closer to the X-axis positive side than the second pump communication portion 15 (second opening described later). It is exposed to the flow path 13a so as to face each other across the path 13a.

  The electrodes 21a and 21b are respectively connected to a circuit (not shown) outside the base body 10a via a wiring (not shown). The electrode 21a and the electrode 21b are arranged so as to be in a non-conductive state when the fluid F1 to be moved is present at a substantially central portion in the X-axis direction of the base body 10a (that is, when the fluid movement device 10 is in the initial state). It is installed. Further, the electrode 21a and the electrode 21b are arranged so as to be in a conductive state via the moved fluid F1 when the moved fluid F1 is moved to the negative side of the X axis.

  The 1st pump communication part 14 is a part which forms the 1st flow-path connection part 14a and the 1st pump connection part 14b. The first pump communication portion 14 includes a side wall of a slit provided in the ceramic sheet 10a2, a space defined by the upper surface of the ceramic sheet 10a1 and the lower surface of the ceramic sheet 10a3, and a columnar through hole provided in the ceramic sheet 10a3. Is a space defined by

  One end of the first flow path connecting portion 14a is connected to the flow path 13a, and a first opening 14a1 is formed in the flow path 13a. The first pump connection portion 14b communicates the other end portion of the first flow path connection portion 14a with the first pump chamber 11a. The working fluid F2 is accommodated in the first flow path connection portion 14a and the first pump connection portion 14b.

  The first opening 14a1 is provided in the vicinity of the end portion in the positive direction of the X axis of the flow path 13a. The first opening 14a1 is in a direction (in this case, the Z-axis direction) orthogonal to the streamline direction along the streamline direction (X-axis direction) of the flow path 13a in the front view (viewed from the Y-axis direction). It has a substantially square shape consisting of sides along.

  The 2nd pump communication part 15 is a part which forms the 2nd flow-path connection part 15a and the 2nd pump connection part 15b. The second pump communication part 15 includes a side wall of a slit provided in the ceramic sheet 10a2, a space defined by the upper surface of the ceramic sheet 10a1 and the lower surface of the ceramic sheet 10a3, and a cylindrical through hole provided in the ceramic sheet 10a3. Is a space defined by

  One end of the second flow path connection portion 15a is connected to the flow path 13a, and a second opening 15a1 is formed in the flow path 13a. The 2nd opening 15a1 is provided in the X-axis negative direction edge part vicinity of the flow path 13a. The shape of the second opening 15a1 is the same as the shape of the first opening 14a1. The second pump connection part 15b communicates the other end of the second flow path connection part 15a with the second pump chamber 12a. The working fluid F2 is accommodated in the second flow path connection portion 15a and the second pump connection portion 15b. The second flow path connection portion 15a has the same structure as the first flow path connection portion 14a.

  The piezoelectric element 16 is a laminated piezoelectric element in which a plurality of sets each composed of one piezoelectric film and a pair of electrode films facing each other with the piezoelectric film interposed therebetween are stacked. The piezoelectric element 16 includes a pair of common electrodes. The electrode films are alternately connected to one of the pair of common electrodes. The piezoelectric element 16 is firmly fixed to the lower surface of the ceramic sheet 10a1 constituting the flow path 13a by firing (or adhesion). The piezoelectric element 16 expands and contracts when a predetermined drive voltage is applied to the pair of common electrodes. By repeating this expansion and contraction, the lower wall (wall surface) of the flow path 13a vibrates.

  The resin layer 17 is formed on the lower surface of the ceramic sheet 10 a 1 so as to cover the piezoelectric element 16. The resin layer 17 has a function of protecting the piezoelectric element 16 from moisture in the air.

  The electric control device 20 is electrically connected between the electrodes of the drive unit 11b of the first pump 11, applies the first drive voltage V1 between the electrodes of the drive unit 11b, and drives the second pump 12. The second drive voltage V2 is applied between the electrodes of the drive unit 12b. The first drive voltage V1 and the second drive voltage V2 are signals for moving the fluid F1 to be moved. Hereinafter, such a drive voltage is also referred to as “movement drive voltage Vm”. Furthermore, the electric control device 20 is connected to a plurality of piezoelectric elements 16 and applies a third drive voltage V3 to each piezoelectric element 16. The third drive voltage V3 is a signal for vibrating the flow path 13a (the wall of the flow path 13a, the wall surface of the flow path 13a). Hereinafter, such a drive voltage is also referred to as “vibration drive voltage Vv”.

  Next, the operation of the moved fluid moving device 10 configured as described above will be described with reference to FIGS. 33 and 34. FIG. 33 is a time chart of the first drive voltage V1, a time chart of the second drive voltage V2, and a time chart of the third drive voltage V3 in order from the top. The horizontal axis in these charts is the time of the same scale.

  First, the electric control device 20 sets the first drive voltage V1 and the second drive voltage V2 to “0” during a period from time t0 to time t1. Such a state is referred to as an initial state of the device 10. At this time, as shown in FIG. 32, the fluid F1 to be moved is present as one lump at a position (initial position) approximately in the center of the flow path 13a in the X-axis direction.

  In other words, the wettability of the fluid F1 to the wall surface of the flow path 13a is not as good as the wettability of the working fluid F2 to the wall surface of the flow path 13a. It exists as a mass of fluid in 13a. In such a state, the moved fluid F1 substantially contacts the wall surface of the flow path 13a, and the flow path 13a is separated into two spaces, a space on the X axis positive direction side and a space on the X axis negative direction side. To do. The working fluid F2 fills a portion of the flow path where the moved fluid F1 does not exist. As can be understood from FIG. 31, when the moved fluid moving device 10 is in the initial state, the moved fluid F1 exists at a position where it does not contact either the electrode 21a or the electrode 21b. Therefore, the electrode 21a and the electrode 21b are in a non-conductive state.

  On the other hand, the electric control device continuously applies the third drive voltage V3 that changes in a sine wave shape at a predetermined frequency fv to the piezoelectric element 16 from time t0. The amplitude of the third drive voltage V3 is Vb, and the center of the amplitude is “0”. As a result, since the piezoelectric element 16 repeats expansion and contraction at the frequency fv, the flow path 13a (its wall surface) vibrates at the same frequency fv. The fluid F1 to be moved vibrates in the flow path 13a in response to the vibration of the wall surface of the flow path 13a.

  Due to the vibration of the wall surface of the flow path 13a and the vibration of the moved fluid F1 accompanying this, the working fluid F2 enters and leaves a slight gap between the moved fluid F1 and the wall surface of the flow path 13a, A film is formed between the fluid F1 to be moved and the wall surface of the flow path 13a. This film substantially smoothes the wall surface of the uneven flow path 13a. As a result, the fluid F1 to be moved is placed in a state where it can move smoothly in the flow path 13a.

  At time t1, the electric control device 20 changes the first drive voltage V1 from “0” to Va at a first speed (= | Va / (t2-t1) |) for a predetermined time (t2-t1). Only increase. As a result, the drive unit 11b immediately begins to bend and displace the ceramic diaphragm 11a2 downward, so that the working fluid F2 flows into the flow path 13a from the first pump chamber 11a through the first opening 14a1 according to the first speed. It is discharged at (first flow rate).

  Further, at time t1, the electric control device 20 changes the second drive voltage V2 from “0” to −Va at a first speed (= | Va / (t2−t1) |) for a predetermined time (t2). Decrease by -t1). As a result, the drive unit 12b immediately begins to bend and displace the ceramic diaphragm 12a2 upward, so that the working fluid F2 in the flow path 13a flows into the second pump chamber 12a through the second opening 15a1 in accordance with the first speed. Suction is performed at (first flow rate).

  As a result, the moved fluid F1 starts to move in the negative direction of the X axis. On the other hand, the expansion / contraction operation of the piezoelectric element 16 is repeatedly performed from time t1 to time t2. Accordingly, since the frictional force that the fluid F1 receives from the wall surface of the flow path 13a is small, the fluid F1 moves smoothly in the negative direction of the X-axis in the flow path 13a. And the to-be-moved fluid F1 moves to the position (operation position) which completely covers the electrode 21a and the electrode 21b at time t2. As a result, the electrode 21a and the electrode 21b become conductive.

  The electric control device 20 maintains the first drive voltage V1 and the second drive voltage V2 at Va and -Va, respectively, between times t2 and t3. Then, at time t3, the electric control device 20 changes the first drive voltage V1 from Va to “0” to the first speed (= | Va / (t2-t1) | = | Va / (t4-t3 ) |) Is decreased by a predetermined time (t2-t1 = t4-t3). As a result, the driving unit 11b immediately begins to bend and displace the ceramic diaphragm 11a2 upward, so that the working fluid F2 in the flow path 13a flows into the first pump chamber 11a through the first opening 14a1 in accordance with the first speed. Suction is performed at (first flow rate).

  Further, at time t3, the electric control device 20 changes the second drive voltage V2 from −Va toward “0” to the first speed (= | Va / (t2-t1) | = | Va / (t4- At t3) |), it is increased by a predetermined time (t2-t1 = t4-t3). As a result, the drive unit 12b immediately begins to bend and displace the ceramic diaphragm 12a2 downward, so that the working fluid F2 flows into the flow path 13a from the second pump chamber 12a through the second opening 15a1 according to the first speed. It is discharged at (first flow rate).

  As a result, the moved fluid F1 starts to move in the positive direction of the X axis. On the other hand, the expansion / contraction operation of the piezoelectric element 16 is repeatedly performed from time t3 to t4. Accordingly, since the frictional force that the moved fluid F1 receives from the wall surface of the flow path 13a is small, the moved fluid F1 smoothly moves in the X-axis positive direction in the flow path 13a. Then, the moved fluid F1 returns to the initial position at time t4. Thereby, the electrode 21a and the electrode 21b are again in a non-conducting state. Thereafter, the electric control device repeatedly executes the operations at times t1 to t4.

As described above, the moved fluid moving device 10 operates between the moved fluid F1 and the wall surface of the flow path 13a by the vibration of the wall surface of the flow path 13a and the vibration of the moved fluid F1 associated therewith. Since the film made of the fluid F2 is formed, the frictional force that the fluid F1 receives from the wall surface of the flow path 13a becomes small. Therefore, the moved fluid moving device 10 can move the moved fluid F1 at a higher speed. In other words, the moved fluid moving device 10 can perform a faster switching operation.
(Second Embodiment)
Next, a moved fluid moving device 30 according to a second embodiment of the fourth invention will be described with reference to FIGS. 34 and 35. FIG. FIG. 34 is a conceptual cross-sectional view of the fluid movement device 30 to be moved. In FIG. 34, the electric control device 20 is omitted. FIG. 35 is a time chart of the movement drive voltage Vm and the vibration drive voltage Vv used in the moved fluid movement device 30.

  This moved fluid moving device 30 is a moved fluid moving device only in that the second pump 12 and the second pump communication portion 15 of the moved fluid moving device 10 are replaced with the pressure fluctuation absorbing portion 31 and the connecting portion 32, respectively. 10 and different. Hereinafter, this difference will be mainly described.

  The pressure fluctuation absorption unit 31 has substantially the same structure as that obtained by removing the drive unit 12b from the second pump 12. The pressure fluctuation absorbing portion 31 is connected to the flow path 13a in the vicinity of the end of the flow path 13a in the negative X-axis direction by a connecting portion 32 having substantially the same structure as the second pump communication portion 15.

  Next, the operation of the moved fluid moving device 30 configured as described above will be described. As shown in FIG. 35, the electric control device 20 applies the same movement drive voltage Vm as the first drive voltage V1 to the drive unit 11b of the first pump 11, and also applies the third drive to the piezoelectric element 16. The same vibration drive voltage Vv as the voltage V3 is applied.

  That is, the electric control device 20 sets the driving voltage Vm for movement to approximately “0” at time t0. Such a state is referred to as an initial state. At this time, the fluid F1 to be moved is present as one lump at a position (initial position) approximately in the center of the flow path 13a in the X-axis direction. Therefore, since the fluid F1 to be moved does not contact either the electrode 21a or the electrode 21b, the electrode 21a and the electrode 21b are maintained in a non-conductive state.

  Thereafter, the electric control device 20 applies the movement drive voltage Vm to the drive unit 11 b of the first pump 11. Therefore, the first pump 11 discharges the working fluid F2 into the flow path 13a through the first opening 14a1 during the period of time t1 to t2. The pressure fluctuation in the flow path 13a due to the discharge of the working fluid F2 is absorbed by the volume change of the pressure fluctuation absorber 31. Moreover, since the expansion / contraction operation of the piezoelectric element 16 is repeatedly performed from time t1 to time t2, a film made of the working fluid F2 is formed between the fluid F1 to be moved and the wall surface of the flow path 13a. Accordingly, since the frictional force that the fluid F1 receives from the wall surface of the flow path 13a is small, the fluid F1 moves smoothly in the negative direction of the X-axis in the flow path 13a. And the to-be-moved fluid F1 moves to the position (operation position) which completely covers the electrode 21a and the electrode 21b at time t2. As a result, the electrode 21a and the electrode 21b become conductive.

  Further, during the period from time t3 to t4, the first pump 11 sucks the working fluid F2 from the flow path 13a through the first opening 14a1. The pressure fluctuation in the flow path 13a due to the suction of the working fluid F2 is absorbed by the volume change of the pressure fluctuation absorber 31. In addition, since the expansion and contraction operation of the piezoelectric element 16 is repeatedly performed at times t3 to t4, a film made of the working fluid F2 is formed between the fluid F1 to be moved and the wall surface of the flow path 13a. Accordingly, since the frictional force that the moved fluid F1 receives from the wall surface of the flow path 13a is small, the moved fluid F1 smoothly moves in the positive direction of the X axis in the flow path 13a. And the to-be-moved fluid F1 returns to an initial position at the time t4. Thereby, the electrode 21a and the electrode 21b are again in a non-conducting state. Thereafter, the electric control device repeatedly executes the operations at times t1 to t4.

As described above, similarly to the moved fluid moving device 10, the moved fluid moving device 30 according to the second embodiment of the fourth invention is the vibration of the wall surface of the flow path 13a and the moved fluid associated therewith. The moving fluid F1 can be moved at high speed by the film of the working fluid F2 formed by the vibration of F1. In other words, the moved fluid moving device 30 can perform a high-speed switching operation.
(Third embodiment)
Next, a moved fluid movement device 50 according to a third embodiment of the fourth invention will be described with reference to FIGS. FIG. 36 is a conceptual cross-sectional view of the moved fluid moving device 50. 36A shows a case where the moved fluid moving device 50 is in the initial state, and FIG. 36B shows a case where the moved fluid moving device 50 is in the operating state. FIG. 37 is a time chart of the movement drive voltage Vm and the vibration drive voltage Vv used in the moved fluid movement device 50.

  The fluid movement device 50 to be moved includes a base body 50a, a plurality (seven in this case) of piezoelectric elements 51, a resin layer 52, and an electric control device (not shown). The base 50a is formed by stacking ceramic sheets 50a1 to 50a3 and integrating them by firing, and has the same rectangular parallelepiped shape as the base 10a. The base 50 a includes a flow path forming portion 53 similar to the flow path forming portion 13. The flow path forming unit 53 forms a flow path 53a similar to the flow path 13a.

  The ceramic sheet 50 a 3 has a thin plate portion (diaphragm) 54. The thin plate portion 54 is provided at a substantially central portion in the X-axis direction of the flow path 53a. A film type piezoelectric element 55 is fixed to the upper surface of the thin plate portion 54 by firing or the like. When the movement drive voltage Vm is applied from the electric control device, the film-type piezoelectric element 55 bends and deforms the thin plate portion 54 downward as shown in FIG. When the thin plate portion 54 is bent and deformed downward, the cross-sectional area of the flow channel 53a at the approximate center in the X-axis direction becomes smaller than the cross-sectional area of the flow channel 53a near both ends in the X-axis direction.

  The flow path 53a contains the fluid F1 to be moved and the working fluid F2 in the same manner as the flow path 13a. As shown in FIG. 36A, the fluid F1 to be moved is present as one lump in the approximate center of the flow path 53a in the X-axis direction and is in contact with the thin plate portion 54. The portion of the flow path 53a other than the fluid F1 to be moved is filled with the working fluid F2. A pressure fluctuation absorption unit (not shown) is connected to both ends of the flow path 53a in the X-axis direction. The pressure fluctuation absorbing portion absorbs pressure fluctuation in the flow path 53a by changing its volume.

  Next, the operation of the moved fluid moving device 50 will be described. As shown in FIG. 37, the electric control device continuously applies the vibration drive voltage Vv that changes in a sine wave shape at a predetermined frequency fv to the piezoelectric element 51. The vibration drive voltage Vv is the same voltage signal as the third drive voltage V3 shown in FIG. As a result, since the piezoelectric element 51 repeats expansion and contraction at the frequency fv, the flow path 53a (the wall surface thereof) vibrates at the same frequency fv. The fluid F1 to be moved receives the vibration of the wall surface of the flow path 53a and vibrates in the flow path 53a. Therefore, a film of the working fluid F2 is formed between the fluid F1 to be moved and the wall surface of the flow path 53a so as to substantially smooth the wall surface of the uneven flow path 53a. As a result, the fluid F1 to be moved is placed in a state where it can move smoothly in the flow path 53a.

  On the other hand, the electric control device maintains the movement drive voltage Vm at “0” during the time t0 to t1. Accordingly, since the fluid movement device 50 is in the initial state between the times t0 and t1, the fluid F1 is located substantially in the center of the flow path 53a in the X-axis direction. Thereafter, at time t1, the electric control device increases the movement drive voltage Vm from “0” to Va at a first speed (= | Va / (t2−t1) |).

  As a result, as shown in FIG. 36B, the thin plate portion 54 is bent and deformed downward, so that the fluid F1 is wetted between the fluid 53 and the wall surface of the channel 53a from the channel 53a. Receives repulsion based on sex and separates into two lumps. One of the two masses moves in the positive direction of the X axis, and the other mass moves in the negative direction of the X axis. The movement of the fluid F1 is smoothly performed by the film of the working fluid F2 described above.

  The electric control device maintains the driving voltage Vm for movement at Va for the time t2 to t3. Then, at time t3, the electric control device shifts the driving voltage Vm from Va to “0” for the first speed (= | Va / (t2-t1) | = | Va / (t4-t3). Decrease with ｜). As a result, the thin plate portion 54 is deformed upward, and the moved fluid moving device 50 returns to the initial state, so that the moved fluid F1 that has been separated into two lumps moves to the substantially central portion in the X-axis direction, respectively. To do. As a result, the fluid F1 to be moved again becomes one lump at the approximate center in the X-axis direction of the flow path 53a. The movement of the fluid F1 to be moved is also smoothly performed by the film of the working fluid F2 described above. Thereafter, the electric control device repeatedly executes the operations at times t1 to t4.

  As described above, the fluid movement device 50 includes the piezoelectric element 51 as an actuator (vibration actuator) that vibrates the wall surface of the flow path 53a. Further, the fluid movement device 50 includes a thin plate portion 54 and a film type piezoelectric element 55. The thin plate portion 54 and the film-type piezoelectric element 55 function as an actuator (movement actuator) that moves the fluid F1 to be moved in the flow path 53a.

  Then, the moved fluid moving device 50 moves in a state where the wall of the flow path 53a is vibrated by the vibration actuator to form a film of the working fluid F2 between the moved fluid F1 and the wall surface of the flow path 53a. The fluid F1 to be moved is moved in the streamline direction of the flow path 53a by the actuator. Therefore, the moved fluid moving device 50 can move the moved fluid F1 smoothly in the flow path 53a. As a result, in the initial state, the pair of electrodes that are in contact with the fluid F1 is exposed to the flow channel 53a without being in contact with the fluid F1 and in the operating state in which the thin plate portion 54 is bent and deformed. If provided, a switching device capable of high-speed switching operation can be obtained.

Note that the thin plate portion 54 and the film-type piezoelectric element 55 can be used as an actuator for vibrating the wall surface of the flow path 53 a in addition to the piezoelectric element 56 or in place of the piezoelectric element 56. In this case, as shown in FIG. 38, the voltage Vmv obtained by superimposing the high-frequency movement drive voltage Vvm on the movement drive voltage Vm shown in FIG.
(Regarding the manufacturing method of the fluid movement device to be moved)
Next, materials and manufacturing methods of each of the above-described fluid movement devices will be described.
(Substrate material etc.)
The above-described substrates (substrate 10a, substrate 50a, etc.) can be made of silicon, glass, alumina, acrylic, or polycarbonate in addition to zirconia as a ceramic.

  However, it is desirable that the substrate is made of a material having a relatively high rigidity so that the resonance frequency of the flow path becomes a high value. This is because, in order to form a film composed of the above-described working fluid F2 suitable for smoothly moving the fluid F1 to be moved, the wall surface of the channel is relatively This is because it is necessary to vibrate at a high frequency, and if the resonance frequency of the flow path is low, the wall surface of the flow path cannot be vibrated at a frequency suitable for the film formation. Examples of these materials having relatively high rigidity include ceramics, glass and silicon.

In addition, when the base is formed of a material having a relatively low rigidity such as plastic, the member including the wall surface of the flow path can also be formed from the above-described material having a relatively high rigidity. That is, the base is constituted by a member constituting the wall surface of the flow path to be vibrated and a member surrounding the member, and the member constituting the wall face of the flow path to be vibrated is determined by the rigidity of the member surrounding the member. It is also preferable that the material is made of a material having high rigidity.
(About the wall roughness of the flow path)
In addition, an arithmetic average roughness Ra representing the surface roughness of the wall surface of the flow path is 0.02 to 5 in that a working fluid film suitable for smoothly moving the fluid to be moved in the flow path is formed. A value between 0.0 μm is desirable. This arithmetic average roughness is a value defined by the above-described equation (1). This is due to the following reason.

  When the arithmetic average roughness Ra of the flow path wall surface is smaller than 0.02 μm (that is, the unevenness of the flow path wall surface is too small and the flow path wall surface is smooth), the gap between the fluid to be moved and the flow path wall surface Therefore, the working fluid is difficult to enter, and the amount of the working fluid existing between the fluid to be moved and the channel wall surface becomes too small. As a result, a film for smoothly moving the fluid to be moved cannot be formed between the fluid to be moved and the wall surface of the flow path.

On the other hand, when the arithmetic average roughness Ra of the flow path wall surface is larger than 5.0 μm (that is, the unevenness of the flow path wall surface is excessive), the working fluid is concentrated in the recesses of the flow path wall surface, and is moved. The amount of the working fluid existing between the fluid and the convex portion of the flow path wall surface that supports the fluid to be moved becomes too small. As a result, a film for smoothly moving the transferred object cannot be formed between the transferred fluid and the channel wall surface.
(Flow path forming method)
The flow paths (flow paths 13a, 44a, 53a, etc.) can be formed using the method described below.

  (1) When the material of the substrate is ceramics, a flow path can be formed by punching a ceramic sheet to form a slit and laminating and integrating the ceramic sheets so as to sandwich the ceramic sheet. . For example, in the case of the moved fluid moving device 10 shown in FIG. 32, a slit that forms the side wall of the flow path 13a is formed by punching in the ceramic sheet 10a2. Next, the ceramic sheets 10a2 to 10a3 are laminated so that the ceramic sheet 10a2 is sandwiched between the ceramic sheets 10a1 and 10a3. Thereafter, the ceramic sheets 10a2 to 10a3 are integrated by firing (or adhesion) or the like. Thus, the flow path 13a is formed.

  (2) When the material of the substrate is glass or silicon, the flow path can be formed by isotropic etching or anisotropic etching.

  (3) A groove constituting a part of the flow path can be formed by laser processing.

  (4) You may form the groove | channel which comprises a part of flow path by machining (machining) using an end mill.

  (5) You may form the groove | channel which comprises some flow paths by sandblasting.

(6) Grooves constituting a part of the flow path may be formed by setting the mold having irregularities to a high temperature and pressing the high-temperature mold against the surface of the substrate (that is, a hot end boss).
(Crack suppression method)
When a groove is formed using the above-mentioned machining or sandblasting, a processing flaw called a microcrack occurs at the corner of the groove, and the crack develops starting from the microcrack, and the substrate (base material) is damaged by this crack. There is a case. It is desirable to adopt the following measures against this.

  (1) Healing treatment (heat treatment, annealing treatment) is performed on the substrate (base material) to close (eliminate) microcracks generated on the surface and release residual stress.

(2) A coating layer is formed on the surface of the groove, and the coating layer is closed so as to cover the crack. More specifically, a coating layer is formed on the surface of the groove using an ultraviolet curable acrylic resin having high fluidity, and the coating layer is cured by irradiating the coating layer with ultraviolet rays. As a result, the acrylic resin penetrates into the cracks, and a smooth groove surface is formed. Further, the surface of the groove may be coated using a material having a thermal expansion coefficient smaller than that of the base (base material). According to this, since the compressive stress is applied to the groove surface, the progress of cracks can be prevented.
(Ceramic pump and substrate bonding method)
The above-mentioned pumps made of ceramics (first pumps 11, 41, second pumps 12, 42, etc., hereinafter referred to as “ceramics pumps”) and bases (bases 10a, 50a, etc.) include several types described below. Can be joined by a method.
(1) An adhesive sheet is interposed between the substrate and the ceramic pump (for example, between the upper surface of the substrate 10a and the lower surface of the ceramic sheet 11a1 of the first pump 11), and the ceramic pump is bonded to the substrate by this adhesive sheet.
(2) A certain gap is formed between the substrate and the ceramic pump (for example, between the upper surface of the substrate 10a and the lower surface of the ceramic sheet 11a1 of the first pump 11), and then an acrylic is formed in the gap. Resin is poured from the side surface, and the ceramic pump is joined to the substrate using this acrylic resin. In this case, the gap for casting the acrylic resin can be formed by a screen printing method. When the bonding area is large, it is preferable to provide a through hole in the base material constituting the base. According to this, the air which remains in a junction part can be discharged | emitted outside a junction part. Further, it is desirable to adjust the viscosity of the acrylic resin according to the bonding area and the base material (base material). Furthermore, it is desirable that the ultraviolet curing power for curing the acrylic resin is set to an optimum magnitude. This is because if the ultraviolet curing power is too small, the curing time becomes too long, and if the power is too large, an abrupt curing reaction occurs and cracks may occur in the joint.
(3) An adhesive is formed on the bonding surface by screen printing, and the ceramic pump is bonded to the substrate with this adhesive. In this case, an ultraviolet curable acrylic resin can be poured after the bonding to strengthen the adhesive layer.

  As described above, the moved fluid moving device according to each embodiment of the fourth invention vibrates the moved fluid F1 by vibrating the wall surface of the flow path, so that the moved fluid F1 and the wall surface of the flow path The fluid F1 is moved while a film of the working fluid F2 is formed therebetween. Accordingly, the frictional force that the fluid F1 receives from the wall surface of the flow path is small, and the movement of the fluid F1 is smooth, so that the fluid F1 can be moved at a higher speed. As a result, a moved fluid moving device having very good responsiveness is provided.

  The fourth invention is not limited to the above embodiment, and various modifications can be adopted within the scope of the fourth invention. For example, the film-type piezoelectric element used in the drive unit described above can be replaced with an antiferroelectric film.

  Moreover, in each said embodiment, the wall surface of the flow path was always vibrated. On the other hand, you may comprise so that the wall surface of a flow path may be vibrated only in the period before and behind the movement start of the to-be-moved fluid F1 including the time of the start of the movement of the to-be-moved fluid F1.

  That is, for example, as shown in FIG. 39 instead of FIG. 35, the time t2 and the time t6 at which the movement of the moved fluid F1 is started with respect to the drive unit 11b of the moved fluid moving device 30 according to the second embodiment. In the period before and after (time t1 to t3, time t5 to t7), the vibration drive voltage Vv may be vibrated to vibrate the wall surface of the flow path. Further, in FIG. 39, the vibration drive voltage Vv is vibrated to vibrate the wall surface of the flow path only at time t2 to t4 or time t6 to t8 (that is, only during the period in which the fluid F1 is moved). You may let them.

  In addition, the substrate of the moved fluid movement device according to each of the above embodiments is made of ceramics. On the other hand, the base body 60a can be formed from the Kovar glass 60a as in the case of the moved fluid moving device 60 shown in FIG.

  In the moved fluid moving device 60, a channel 61a similar to the channel 13a is formed in the base body 60a. Similar to the moved fluid moving device 10, the moved fluid F <b> 1 and the working fluid F <b> 2 are accommodated in the flow path 61 a. The fluid movement device 60 includes a first pump 11 and a second pump 12 that are not shown. The first pump 11 is connected to the vicinity of the end portion in the positive direction of the X axis of the flow path 61a through a first opening (not shown). The 2nd pump 12 is connected to the X-axis negative direction edge part vicinity of channel 61a via the 2nd opening which is not illustrated.

  Further, the fluid movement device 60 includes a pair of electrodes 62a and 62b made of Kovar metal. The electrodes 62a and 62b each have a cylindrical rod shape, and are respectively inserted into a pair of through holes formed in the upper wall of the flow path 61a. The electrodes 62a and 62b are fixed to the base body 60a on the outer surface of the base body 60a by melting the periphery of the through hole using a burner. The electrodes 62a and 62b are exposed to the flow path 61a so that their lower surfaces exist in a plane that coincides with the upper wall surface of the flow path 61a.

  When the moved fluid moving device 60 is in the initial state, the moved fluid F1 is present at a position that covers the electrode 62a but not the electrode 62b, as indicated by the phantom line in FIG. Therefore, in the initial state, the electrode 62a and the electrode 62b are in a non-conductive state. Further, when the moved fluid moving device 60 is in the operating state, the moved fluid F1 moves so that the moved fluid F1 covers both the electrode 62a and the electrode 62b as shown by the solid line in FIG. Accordingly, in the operating state, the electrode 62a and the electrode 62b are in a conductive state.

Such a moved fluid moving device 60 has the following advantages.
(1) Since the coefficient of thermal expansion of the Kovar metal constituting the electrodes 62a and 62b and the coefficient of thermal expansion of the Kovar glass constituting the substrate 60a are substantially equal, a stress is generated even when the cooling / heating cycle is applied to the moving fluid moving device 60. It is hard to do. Therefore, since the fluid transfer device 60 is not damaged by heat stress, the durability of the fluid transfer device 60 is high.
(2) Since the flow path and the electrode can be integrally formed without using a soft material such as an adhesive, the fluid transfer device 60 to be moved has high rigidity. Therefore, when the working fluid F2 is caused to flow into the flow path 61a in order to move the fluid F1 to be moved and the internal pressure in the flow path 61a is to be increased, the pressure increase is hardly absorbed. As a result, the moved fluid F1 can be moved at high speed.
(3) The Kovar metal constituting the electrodes 62a and 62b has good wettability with mercury. Therefore, if mercury is used as the fluid F1, the resistance between the fluid F1 and the electrodes 62a and 62b can be lowered, and the fluid F1 can be reliably held by the electrodes 62a and 62b. it can. Furthermore, since Kovar metal has high corrosion resistance, it is also possible to obtain electrodes 62a and 62b that are not easily deteriorated.

  The electrodes 62a and 62b made of Kovar metal can also be formed in a thin film shape. The electrodes 62a and 62b can also be formed in a wire shape or a tube shape. Furthermore, the electrodes 62a and 62b can be formed so as to fill part of the flow path by electroforming, or can be formed by photoetching or lift-off.

  Furthermore, in the present application, a fifth invention relating to a switching device that performs switching of a high-frequency signal (moving and switching of a high-frequency signal) by moving a movable body in a flow path is provided.

  2. Description of the Related Art Conventionally, there has been known a switching device that moves a moving body, for example, a conductive fluid in a flow path, thereby electrically connecting and disconnecting electrodes. Such a switching device is also called a micro relay element.

  For example, a switching device disclosed in Japanese Patent Publication No. Showa 47-21645 (page 2, FIG. 2 and FIG. 3) moves mercury, which is a conductive fluid, in the flow path. The connection state of a plurality of electrodes provided on the flow path wall is switched.

  This disclosed switching device performs a switching operation by changing the state of mercury and electrodes from a contact state to a non-contact state, or conversely from a non-contact state to a contact state. In this device, the smaller the electrical resistance between the mercury and the electrode in contact, the smaller the loss in the switch. In order to reduce the electrical resistance value between mercury and the electrode, the electrode may be formed of a material that has good wettability with mercury.

  However, if the wettability between the electrode and mercury is good, it becomes difficult to shift the state between the two from the contact state to the non-contact state. As a result, the responsiveness of switching deteriorates, and it is necessary to increase the generated force of the actuator necessary for moving mercury.

  The fifth invention is made to cope with the above-described problem, and provides a switching device capable of high-speed switching by using a change in capacitance (capacitance, capacitance) between electrodes.

  According to a fifth aspect of the present invention, there is provided a switching device comprising: a base body made of an insulating material having a flow path forming portion for forming a flow path; and the flow path substantially separated into two spaces in a streamline direction of the flow path A non-conductive operation accommodated in the flow path so as to fill a portion of the flow path other than the portion where the movable body is accommodated. A switching device comprising: a fluid; an actuator for moving the object to be moved between a first position and a second position in the flow path; and a pair of electrodes disposed in the base body. And at least one of the pair of electrodes is disposed at a position where it does not come into contact with the body to be moved, and is identical when the body to be moved is at the first position and at the second position. The pair of electrodes are formed so that the capacitance between the electrodes is different. It is configured to perform the switching between conduction and non-conduction between the pair of electrodes by the capacitance change.

  According to this, according to the position of the to-be-moved body moved between the first position and the second position, the capacitance between the pair of electrodes changes, and a switching operation is performed based on the change in the capacitance. . In addition, at least one of the pair of electrodes does not contact the object to be moved.

  Accordingly, since the switching operation is performed without changing the state of the moving object and the at least one electrode from the state of being in contact with each other to the state of non-contact or vice versa, it is faster than the conventional device. A switching device capable of performing switching can be provided.

  In this case, one electrode of the pair of electrodes is disposed so as to be exposed to a part of the flow path, and the other electrode of the pair of electrodes is not exposed to the flow path. It is preferable that the movable body is configured to be always in contact with the one electrode.

  According to this, the electrode disposed so as to be exposed to a part of the flow path is always in contact with the moving object. In other words, the movable body moves between the first position and the second position while maintaining a contact state with the electrode disposed so as to be exposed to a part of the flow path. On the other hand, the electrode disposed so as not to be exposed to the flow path does not contact the moving object. Accordingly, the state of the moving body and the electrode is not changed from the contact state to the non-contact state or vice versa, and thus the movement of the moving body is not hindered by the electrode. As a result, a faster switching operation can be achieved.

  Furthermore, the switching device is disposed at a position between the other electrode (that is, an electrode not exposed to the flow path) and the fluid to be moved at the second position, and the substrate and the operation It is preferred to provide a dielectric having a dielectric constant that is greater than any dielectric constant of the fluid. The dielectric is exposed to a part of the flow path, and is not in contact with the movable body when the movable body is in the first position, and the movable body is in the second position. It is sometimes suitable to be configured to come into contact with the moving object. Furthermore, it is preferable that the dielectric is configured to be in contact with the other electrode.

  According to these, when the movable body is in the second position, a dielectric is substantially present between the one electrode and the other electrode via the movable body, and the movable body When the is in the first position, there is no dielectric between one electrode and the other electrode. Therefore, the capacitance between the electrodes varies greatly depending on whether the moving object is in the first position or the second position. As a result, the switching device can be performed at a timing that reliably aims at the switching operation.

  On the other hand, the pair of electrodes may be arranged so as not to be exposed to the flow path.

  This also prevents the movement of the moving object from being disturbed by the electrode because the state of the moving object and the electrode is not changed from the contact state to the non-contact state or vice versa. As a result, a faster switching operation can be achieved. Further, since the electrode is not exposed to the flow path, mechanical wear of the electrode due to the movement of the moving object on the electrode does not occur, and the working fluid in the working fluid accompanying the exposure of the electrode to the working fluid does not occur. Oxidation of the electrode by trace amounts of oxygen does not occur. As a result, electrode deterioration can be avoided, and the life of the switching device can be extended.

  In this case (that is, when the pair of electrodes are arranged so as not to be exposed to the flow path), at a position between at least one of the pair of electrodes and the movable body at the second position. It is preferable to provide a dielectric that is disposed and that has a dielectric constant greater than any of the dielectric constants of the substrate and the working fluid. In this case, the dielectric is exposed to a part of the flow path, and is not in contact with the movable body when the movable body is in the first position, and the movable body is in the second position. In some cases, it is preferable to be configured so as to come into contact with the movable body. Furthermore, the dielectric (dielectric disposed at a position between at least one of the pair of electrodes and the moved fluid at the second position) is configured to contact the at least one electrode. Is preferable.

  According to these, when the movable body is in the second position, a dielectric is substantially present between the one electrode and the other electrode via the movable body, and the movable body When the is in the first position, there is no dielectric between one electrode and the other electrode. Therefore, the capacitance between the electrodes varies greatly depending on whether the moving object is in the first position or the second position. As a result, the switching device can be performed at a timing that reliably aims at the switching operation.

  The above-described object to be moved may be a solid or a fluid (a fluid to be moved). When the movable body is a fluid to be moved, the working fluid is substantially insoluble with respect to the fluid to be moved and the wettability with respect to the wall surface of the flow path is relative to the wall surface of the flow path The fluid must be better than wettability.

  Further, the fifth invention can be configured as a switching device having two independent flow paths.

  That is, another switching device of the fifth invention includes a substrate made of an insulating material including a first flow channel and a flow channel forming portion that forms a second flow channel independent of the first flow channel. The switching device includes a conductive first movable body accommodated in the first flow path so as to substantially separate the first flow path into two spaces in the streamline direction of the first flow path. A non-conductive first working fluid accommodated in the first flow path so as to fill a portion of the first flow path other than a portion where the first movable body is accommodated, and the first moved An actuator for moving the body between a first position and a second position in the first flow path.

  Similarly, the switching device includes a conductive second cover housed in the second flow path so as to substantially separate the second flow path into two spaces in the streamline direction of the second flow path. A moving body, a non-conductive second working fluid accommodated in the second flow path so as to fill a portion other than a portion of the second flow path where the second moved body is accommodated, and And 2 an actuator for moving the object to be moved between the third position and the fourth position in the second flow path.

  Further, the switching device is disposed between the first flow path and the second flow path and has a dielectric constant larger than each of the dielectric constants of the base body, the first working fluid, and the second working fluid. A first dielectric body, a first electrode disposed in the base body, and a second electrode disposed in the base body.

  In the switching device, the first electrode is arranged so as not to be exposed to the first flow path, or configured to always contact the first actuated fluid, and the second electrode is The second flow path is arranged so as not to be exposed, or is configured to always contact the second actuated fluid. Further, the capacitance between the first electrode and the second electrode when the first movable body is at the first position and the second movable body is at the third position, The first electrode is formed such that the capacitance between the first electrode and the second electrode when the moving body is in the second position and the second moving body is in the fourth position is different. And switching between conduction and non-conduction of the first electrode and the second electrode by the change in capacitance between the second electrode and the second electrode.

  According to this, the first electrode is arranged so as not to be exposed to the first flow path, or is configured to always contact the first working fluid, and the second electrode is configured to be in contact with the first fluid. It is arrange | positioned so that it may not expose to 2 flow paths, or it is comprised so that it may always contact the said 2nd to-be-operated fluid. Therefore, since the state of each movable body and each electrode is not changed from the contact state to the non-contact state or vice versa, the movement of each movable body is not hindered by each electrode. As a result, a faster switching operation can be achieved. Further, since the electrode is not exposed to the flow path, the mechanical wear of the electrode due to the movement of the moving object on the electrode does not occur, and the working fluid in the working fluid accompanying the exposure of the electrode to the working fluid does not occur. Oxidation of the electrode by trace amounts of oxygen does not occur. As a result, electrode deterioration can be avoided, and the life of the switching device can be extended.

  In this case, the distance between the first position and the third position is greater than the distance between the second position and the fourth position, and the distance between the second position and the fourth position is the first movable body. It is preferable that the distance is selected to be the shortest distance when the second moving object moves in the second flow path while moving in the first flow path.

  According to this, the difference between the capacitance between the electrodes when the electrodes are in a conductive state and the capacitance between the electrodes when the electrodes are in a non-conductive state can be increased. As a result, the switching device can be performed at a timing that reliably aims at the switching operation.

  In this case, the first electrode is disposed so as not to be exposed to the first flow path, and the base, the first working fluid, and the second operation are disposed between the first electrode and the first flow path. It is also preferable to further include a second dielectric having a dielectric constant greater than any dielectric constant of the fluid. Further, the second electrode is disposed so as not to be exposed to the second flow path, and the base, the first working fluid, and the second working fluid are disposed between the second electrode and the second flow path. It is also preferable to further include a third dielectric having a dielectric constant larger than any of the above.

  According to these, it is possible to increase the capacitance change between the electrodes due to the movement of the first and second moving bodies without exposing the electrodes to the flow path.

  One aspect of such a switching device is that when the first moving body is moved to the first position and the second moving body is moved to the third position, the capacity is minimized, The switching device is arranged and configured so that the same capacity is maximized when the first moving body is moved to the second position and the second moving body is moved to the fourth position.

  In another aspect of the switching device, the first flow path includes a first part and a second part that is connected to the first part and extends linearly, and the second flow path is a third part. And a fourth portion extending linearly connected to the third portion, wherein the second portion and the fourth portion are formed to be parallel and adjacent to each other, and the first portion and the third portion The portions are formed such that their distance is greater than the distance between the second portion and the fourth portion, the first dielectric is disposed only between the second portion and the fourth portion, The first movable body is configured to be positioned at the first portion when moved to the first position and at the second portion when moved to the second position, and the second movable body. Is located in the third part and moved forward when moved to the third position. It is configured switching devices so as to be located in the fourth part when moved to the fourth position.

  According to this, the first dielectric is moved to the second position in the portion (straight portion) in which the linear second portion and the linear fourth portion are arranged in parallel. It is sandwiched between the body and the second moving body moved to the fourth position. Further, the first dielectric is disposed only on a part of the straight line portion. Therefore, even when the first movable body does not accurately stop at the second position and / or when the second movable body does not accurately stop at the fourth position, the first dielectric is the first movable body and the first movable body. Since it can be reliably sandwiched between the two movable bodies (the area of the first dielectric sandwiched between the first movable body and the second movable body is constant), the first electrode and the second electrode in such a state The capacity between the two can be made stable and constant. As a result, a stable switching operation can be achieved.

  In another aspect of the switching device, the first flow path and the second flow path are formed to intersect each other when viewed from a predetermined direction, and the first dielectric is the first dielectric In the switching device, the flow path and the second flow path are disposed only at a portion where the flow path and the second flow path intersect when viewed from the predetermined direction.

  According to this, since the first dielectric is disposed only at the portion where the first flow path and the second flow path intersect, the first flow path and the second flow path intersect at the portion. The first moving body moved to the second position and the second moving body moved to the fourth position. Therefore, even when the first moving body does not stop at the second position with high accuracy and / or when the second moving body does not stop at the fourth position with high accuracy, the first moving body and the second moving body do not The area of the sandwiched dielectric is stabilized. As a result, since the capacitance between the first electrode and the second electrode in such a state can be stably made constant, a stable switching operation can be achieved.

  Thus, a moving body can be made into a to-be-moved fluid also in a switching device provided with two flow paths.

  Specifically, in such a switching device, the first moved body is a first moved fluid, and the first working fluid is substantially insoluble in the first moved fluid. And the wettability with respect to the wall surface of the said 1st flow path is a fluid whose wettability with respect to the wall surface of the said 1st flow path of the said 1st to-be-moved fluid is better, The second working fluid is substantially insoluble with respect to the second moving fluid, and the wettability with respect to the wall surface of the second moving channel is the wall surface of the second moving fluid of the second moving fluid. It is a switching device that is a fluid that is better than the wettability with respect to.

  Further, each electrode in the above switching device is preferably an electrode in which electrode films and dielectric films are alternately laminated.

  According to this, the electrode can be provided with a filtering function of a high-frequency signal to be switched.

  Further, in the switching device according to the fifth invention, the flow path includes a large-diameter portion and a small-diameter portion, the movable body is a fluid to be moved, and the working fluid substantially corresponds to the fluid to be moved Is insoluble and has better wettability with respect to the wall surface of the flow channel than the wettability of the fluid to be moved with respect to the wall surface of the flow channel, and the pair of electrodes are disposed in the small diameter portion, It is preferable that the actuator is configured to discharge the working fluid to the large diameter portion or to suck the working fluid from the large diameter portion.

  According to this, the fluid to be moved moves in the small diameter portion, whereby the capacitance between the electrodes changes, and the switching operation is performed. As a result, when the same amount of working fluid is discharged or sucked from the actuator, this switching device can increase the speed of the fluid to be moved relative to the electrode, compared with a device that does not have a small-diameter portion. Switching can be performed.

  Furthermore, in the switching device including the first flow path and the second flow path according to the fifth aspect of the invention, the second flow path is cylindrical and formed coaxially with the first flow path. Is preferred.

  According to this, the capacity | capacitance between a 1st electrode and a 2nd electrode changes because a 1st to-be-moved body and a 2nd to-be-moved fluid move, maintaining an axisymmetric shape. Therefore, this switching device has an advantage that noise is difficult to be superimposed on a high-frequency signal transmitted by the switching device.

  Embodiments of the switching device according to the fifth invention will be described below with reference to the drawings. This switching device changes a capacitance (capacitance, capacitance) between electrodes by moving a moving object in a flow path, and performs a switching operation using the change in capacitance.

The moving object in the flow path may be either a solid or a fluid (moving fluid). The object to be moved may be incompressible and conductive, or may be a dielectric. The fifth invention is not limited to these embodiments, and various changes, modifications, and improvements can be added based on the knowledge of those skilled in the art without departing from the scope of the fifth invention. Is.
(First embodiment)
FIG. 41 is a longitudinal sectional view of the device 10 when the switching device (micro relay element) 10 according to the first embodiment of the fifth invention is in the initial state (“off” state, non-conducting state). FIG. 42 is a longitudinal sectional view of the switching device 10 when the switching device 10 is in an operating state (“ON” state, conductive state). 41 and 42, the electric control device 20 and the electric circuit 21 are conceptually shown.

  The switching device 10 includes a base body 10a, a first pump 11, and a second pump 12. The base body 10a is made of ceramic as an insulator and has a substantially rectangular parallelepiped shape having sides extending along the X-axis, Y-axis, and Z-axis directions orthogonal to each other.

  The substrate 10a is formed by laminating a plurality of ceramic thin plate bodies (hereinafter referred to as “ceramic sheets”) in the Z-axis direction and integrating them by firing or bonding. The base body 10a includes a flow path forming portion 13, a first pump communication portion 14, and a second pump communication portion 15 therein. The flow path forming unit 13 constitutes a flow path 13a. The flow path 13a is filled with a moved fluid F1 and a working fluid F2, which are moved bodies. The first pump communication portion 14 and the second pump communication portion 15 are filled with the working fluid F2.

  The substrate 10a can be made of glass, alumina, acrylic, or polycarbonate in addition to zirconia as a ceramic. The dielectric constant of zirconia is about 12.5 for an electrical signal having a frequency of 1 kHz. The dielectric constant of glass is about 3-5 for electrical signals having a frequency of 1 kHz. The dielectric constant of alumina is about 10 for electrical signals having a frequency of 1 kHz. The dielectric constant of acrylic is about 4 for electrical signals having a frequency of 1 kHz. The dielectric constant of polycarbonate is about 3 for electrical signals having a frequency of 1 kHz.

  The first pump 11 includes a first pump chamber 11a and an actuator 11b. The first pump chamber 11a includes a ceramic sheet 11a1 fixed to the upper surface of the base body 10a (for example, integrally by firing), and a diaphragm (ceramic diaphragm) 11a2 made of a thin ceramic plate that can be easily deformed. Yes. A working fluid F2 is accommodated in the first pump chamber 11a. The first pump chamber 11a communicates with the flow path 13a via the first communication portion 14. A connecting portion between the flow path 13a and the first communication portion 14 forms a first opening. The first opening is formed at the end in the positive X-axis direction of the flow path 13a.

  The ceramic sheet 11a1 has a cylindrical shape whose upper and lower surfaces are open. The ceramic diaphragm 11a2 has the same shape as the upper surface of the ceramic sheet 11a1, and is fixed to the upper portion of the ceramic sheet 11a1 (for example, integrally by firing) so as to close the upper surface of the ceramic sheet 11a1.

  The actuator 11b is a circular thin plate (thickness is, for example, about 20 μm) having a diameter slightly smaller than that of the ceramic diaphragm 11a2. The actuator 11b is fixed to the upper surface of the ceramic diaphragm 11a2 (for example, integrally by firing). The actuator 11b is a film-type piezoelectric element composed of a piezoelectric film and at least a pair of electrodes, and the ceramic diaphragm 11a2 is deformed when a voltage is applied between the electrodes from the electric control device 20. ing.

  Due to the deformation of the ceramic diaphragm 11a2, the first pump increases or decreases the volume of the first pump chamber 11a, discharges the fluid inside the first pump chamber 11a, or sucks the fluid into the first pump chamber 11a. Yes.

  The second pump 12 includes a second pump chamber 12a and an actuator 12b. The second pump chamber 12a includes a ceramic sheet 12a1 fixed to the upper surface of the base body 10a (for example, integrally by firing), and a diaphragm (ceramic diaphragm) 12a2 made of a thin ceramic plate that can be easily deformed. Yes. A working fluid F2 is accommodated in the second pump chamber 12a. The second pump chamber 12a is in communication with the flow path 13a through the second communication portion 15. A connecting portion between the flow path 13a and the second communication portion 15 forms a second opening. The second opening is formed at the end of the flow path 13a in the negative X-axis direction. Since the 2nd pump 12 is provided with the same composition as the 1st pump 11, detailed explanation is omitted.

  The second pump 12 is configured to deform the ceramic diaphragm 12a2 when a voltage is applied from the electric control device 20 between electrodes of an actuator 12b that is a film type piezoelectric element similar to the actuator 11b. Due to the deformation of the ceramic diaphragm 12a2, the second pump 12 increases or decreases the volume of the second pump chamber 12a, and discharges the fluid inside the second pump chamber 12a or sucks the fluid into the second pump chamber 12a. ing.

  The actuator 11b and the actuator 12b may be a film-type piezoelectric element including an electrostrictive film or an antiferroelectric film and at least a pair of electrodes sandwiching the film. Alternatively, a laminated film-type piezoelectric element in which a plurality of sets each having one piezoelectric film sandwiched between a pair of electrodes are stacked may be used.

  The first pump 11 can also be used to suck the working fluid F2 in the flow path, but at this time, the moved fluid F1 may be sucked together. In other words, the fluid accommodated in the first pump 11 (and in the first pump communication portion 14) is not limited to the working fluid F2. Similarly, the second pump 12 aspirates the working fluid F2 in the flow path as will be described later. However, in some cases, the second fluid 12 may be sucked together with the fluid F1. In other words, the fluid accommodated in the second pump 12 (and the second pump communication portion 15) is not limited to the working fluid F2.

  Exemplifying specific dimensions of the first and second pumps 11 and 12, the radii of the bottom surfaces (upper surfaces) of the hollow cylindrical first and second pump chambers 11a and 12a are about 0.5 mm. The height is about 150 μm. Each radius of the circular thin plate-like ceramic diaphragms 11a2 and 12a2 is about 0.5 mm, and each thickness (height) is about 10 μm.

  As described above, the flow path forming part 13 is a part constituting the flow path 13a formed in the base body 10a. Since the base body 10a is made of a ceramic sheet which is an insulator, no current flows along the wall surface of the flow path 13a.

  The flow path 13a is a linear, elongated, sealed space, and has a streamline direction (longitudinal axis) in a direction along the X axis. The flow path 13a is a plane orthogonal to the streamline direction (YZ plane), and a cross section obtained by cutting the flow path 13a (hereinafter, this cross section may be referred to as a “longitudinal cross section of the flow path”). It has a square shape. The flow path 13a is also called a microchannel. The length of the flow path 13a in the streamline direction is about 1 mm, and one side (height and width of the flow path) of the square in the longitudinal section is about several tens of μm.

  As described above, the fluid 13 to be moved and the working fluid F2 are accommodated in the flow path 13a. The fluid F1 to be moved is accommodated in the flow path 13a so as to substantially separate the flow path 13a into two spaces in the flow line direction of the flow path 13a. The portion of the flow path 13a that is not filled with the fluid F1 is filled with the working fluid F2. The fluid F1 to be moved is an incompressible and conductive fluid, and is mercury in this example. The fluid F1 to be moved may be a liquid metal such as a gallium alloy. The fluid F1 to be moved is present as one lump in the flow path 13a.

  As shown in FIG. 41, the fluid F1 to be moved is when the first drive voltage is not applied to the first pump 11 and the second drive voltage is not applied to the second pump 12 (that is, the switching device). 10 is in the initial state (“off” state)), and is located at a position (hereinafter, referred to as “first position”) in the approximate center of the flow path 13a in the X-axis direction. On the other hand, as shown in FIG. 42, the fluid F1 to be moved is supplied when appropriate first drive voltage and second drive voltage are applied to the first pump 11 and the second pump 12, respectively (that is, the switching device 10 is When in the operating state ("on" state)), it exists at a position in the positive X-axis direction (hereinafter referred to as "second position") by a predetermined distance from the approximate center in the X-axis direction of the flow path 13a. It is like that. The fluid F1 to be moved can be moved only between the first position and the second position (including the first position and the second position).

  The working fluid F2 is a fluid that is insoluble in the fluid F1 to be moved, is substantially incompressible, and is insulating (non-conductive). In this example, the working fluid F2 is deionized water, but may be a highly permeable solvent fluorinate, silicon oil, or the like. The working fluid F2 is selected such that the wettability of the working fluid F2 with respect to the wall surface of the flow path 13a is better than the wettability of the transferred fluid F1 with respect to the wall surface of the flow path 13a.

  The dielectric constant of deionized water is about 78 for an electrical signal having a frequency of 1 kHz. The dielectric constant of florinate is about 1.8 for an electrical signal having a frequency of 1 kHz. The dielectric constant of silicon oil is about 2.7 for an electrical signal having a frequency of 1 kHz.

  A pair of electrodes (electrode films) 21a and 21b that are electrically insulated from each other are disposed in the base body 10a. The electrode 21a is a square-shaped thin film having sides having a length substantially equal to the width of the flow path 13a. The electrode 21b has substantially the same shape as the electrode 21a.

  The electrode 21a is disposed at a substantially central position in the X-axis direction of the flow path 13a and at a position closer to the X-axis positive side than the second pump communication portion 15 (second opening). The electrode 21a is provided below the flow path 13a (Z-axis negative side), and is formed so that its film surface is parallel to the lower wall surface of the flow path 13a. The upper side of the membrane surface of the electrode 21a exists in the same plane as the lower wall surface of the channel 13a, and is exposed to the channel 13a. The electrode 21a is connected to the electric circuit 21 outside the base body 10a by a conductive wire.

  The electrode 21a is not related to whether the moved fluid F1 exists at the first position or the second position (when the moved fluid F1 exists at an arbitrary position between the first position and the second position). ), And is always arranged so as to be in contact with the fluid F1 to be moved (covered by the fluid F1 to be moved).

  The electrode 21b is on the X axis positive side with respect to the central portion in the X axis direction of the flow path 13a (that is, the position where the electrode 21a is disposed) and on the X axis negative side with respect to the first pump communication portion 14 (first opening). It is arranged at the position. The electrode 21b is formed so that its film surface is parallel to the upper wall surface constituting the flow path 13a at a slight distance from the flow path 13a. The electrode 21b is provided above the flow path 13a (Z-axis positive side). The electrode 21b is connected to the electric circuit 21 outside the base body 10a by a conductive wire.

  A thin film dielectric 21c having substantially the same shape as the electrode 21b is disposed between the electrode 21b and the flow path 13a. The upper surface of the dielectric 21c is in contact with the lower surface of the electrode 21b. The lower surface of the dielectric 21c exists in the same plane as the upper wall surface of the flow path 13a, and the dielectric 21c is exposed to the flow path 13a. The dielectric 21c is selected from materials whose dielectric constant is larger than that of the base body 10a and larger than that of the working fluid F2.

  For example, the dielectric 21c is barium titanate, lead titanate, lead zirconate titanate, lead metaniobate, polyvinylidene fluoride, or the like, and has a dielectric constant of 1000 or more with respect to an electric signal having a frequency of 1 kHz. It is composed of a ferroelectric material. More preferably, the dielectric constant is 10,000 or more.

  The wettability of the fluid F1 to the dielectric 21c is substantially equal to the wettability of the fluid F1 to the base body 10a (the wall surface of the flow path 13a excluding the dielectric 21c), but the electrode 21a of the fluid F1 to be moved. The material of the base body 10a, the dielectric 21c, the electrode 21a, and the fluid F1 to be moved is selected so as not to be better than the wettability with respect to.

  As shown in FIG. 41, when the switching device 10 is in the initial state and the fluid F1 is in the first position, the dielectric 21c is covered with the working fluid F2 and covered with the fluid F1. It is arranged and configured so as not to come into contact with the fluid F1 to be moved. As shown in FIG. 42, when the switching device 10 is in the operating state and the moved fluid F1 is in the second position, the dielectric 21c is covered with the moved fluid F1 (in contact with the moved fluid F1). ) Is arranged and configured.

  In the switching device 10 having the above configuration, the capacitance (capacitance) between the electrode 21a and the electrode 21b is minimized when the moved fluid F1 is at the first position shown in FIG. 41, and the moved fluid F1. Is at the second position shown in FIG. 42, the capacitance between the electrode 21a and the electrode 21b is maximized. The switching device 10 performs switching using such a change in capacitance.

  Next, the operation of the switching device 10 configured as described above will be described. As described above, when the first drive voltage is not applied to the first pump 11 and the second drive voltage is not applied to the second pump 12 (when in the initial state shown in FIG. 41), The volume of the first pump chamber 11a and the volume of the second pump chamber 12a are respectively initial volumes.

  At this time, since the moved fluid F1 electrically connected to the electrode 21a exists at the first position, the substantial distance d between the moved fluid F1 and the electrode 21b is a relatively large distance dmax. Moreover, since the fluid F1 that is electrically connected to the electrode 21a exists at the first position, the working fluid F2 having a dielectric constant smaller than that of the dielectric 21c exists between the electrode 21a and the electrode 21b. become. For this reason, the capacity | capacitance (capacitance) between the electrode 21a (moved fluid F1) and the electrode 21b becomes the minimum value Cmin. Therefore, in this state, since the impedance 1 / jωC (= 1 / jωCmin) between the electrodes 21a and 21b is the maximum value, the high frequency signal cannot pass between the electrodes 21a and 21b. That is, the switching device 10 substantially opens the switch contact.

  Next, the electric control device 20 applies a negative first driving voltage to the first pump 11 and applies a positive second driving voltage to the second pump 12. Thereby, the volume of the 1st pump chamber 11a increases, and the 1st pump 11 attracts | sucks the working fluid F2 from the flow path 13a through the 1st opening (1st communicating path 14). Further, the volume of the second pump chamber 12a decreases, and the second pump 12 discharges the working fluid F2 to the flow path 13a through the second opening (second communication path 15).

  As a result, the moved fluid F1 moves to the second position in the X-axis positive direction via the working fluid F2, and the substantial distance d between the moved fluid F1 and the electrode 21b becomes dmin smaller than the distance dmax. Further, substantially only the dielectric 21c exists between the first electrode 21a and the second electrode 21b. Accordingly, the capacitance (capacitance) between the electrode 21a (the fluid F1 to be moved) and the electrode 21b is the maximum value Cmax, and the impedance 1 / jωC (= 1 / jωCmax) is the minimum value. It passes between 21b. That is, the switching device 10 substantially closes the switch contact.

  Thereafter, the electric control device 20 extinguishes both the first drive voltage and the second drive voltage (set to “0 (V)”). As a result, the volume of the first pump chamber 11a decreases and returns to the initial volume, so that the first pump discharges the working fluid F2 to the flow path 13a through the first opening. Further, since the volume of the second pump chamber 12a increases and returns to the initial volume, the second pump 12 sucks the working fluid F2 from the flow path 13a through the second opening. As a result, the moved fluid F1 moves from the second position in the negative direction of the X axis and returns to the first position, so that the capacity between the electrodes 21a and 21b is minimum (impedance is maximum), and the high-frequency signal is It becomes impossible to pass between 21b.

As described above, the switching device 10 according to the first embodiment switches between conduction and non-conduction between the same pair of electrodes (with respect to a high-frequency signal) by changing the capacitance between the pair of electrodes 21a and 21b. Further, in the switching device 10, the electrode 21a is always covered with the moved fluid F1 regardless of the position of the moved fluid F1 (in contact with the moved fluid F1). Further, the second electrode 21 is always in a non-contact state with the moved fluid F1 regardless of the position of the moved fluid F1. Therefore, the switching device 10 has the following advantages.
(1) The electrode 21a is unlikely to deteriorate. This is because the electrode 21a is always covered with the transferred fluid F1 and is not exposed to the working fluid F2, so that the oxidation of the electrode 21a by the trace amount of oxygen in the working fluid F2 accompanying the exposure of the electrode 21a to the working fluid F2 is caused. This is thought to be due to not occurring.
(2) The electrode 21b does not deteriorate. This is because the electrode 21b is not exposed to the flow path 13a, so that the mechanical wear of the electrode 21b due to the movement of the moved fluid F1 does not occur, and the electrode 21b is exposed to the working fluid F2. It is considered that this is because the electrode 21b is not oxidized by a trace amount of oxygen in the working fluid F2.
(3) Since the moved fluid F1 moves between the first position and the second position while being always in contact with the electrode 21a, a large force for separating the moved fluid F1 from the electrode 21a is not necessary. . Accordingly, the force generated by each of the first pump 11 and the second pump 12 can be reduced, and these pumps can be reduced in size.
(4) Since the moved fluid F1 moves between the first position and the second position while always in contact with the electrode 21a, the frictional resistance applied to the moved fluid F1 when the moved fluid F1 moves is increased. small. Therefore, the fluid F1 to be moved can be moved quickly, and the switching speed can be increased.
(Second Embodiment)
Next, a switching device 30 according to a second embodiment of the fifth invention will be described with reference to FIGS. FIG. 43 is a longitudinal sectional view of the switching device 30 when the switching device 30 is in an initial state (non-conduction state). FIG. 44 is a longitudinal sectional view of the device 30 when the switching device 30 is in an operating state (conductive state). 43 and 44, the electric control device 20 is conceptually shown, and the electric circuit 21 shown in FIGS. 41 and 42 is omitted.

  The switching device 30 includes a pair of flow paths, whereas the switching device 10 according to the first embodiment includes only one flow path 13a, and moves a pair of moving objects in each flow path. Thus, the switching device 10 is greatly different in that the capacitance between the electrodes is changed.

  More specifically, the switching device 30 includes a base body 30a similar to the base body 10a, a first pump 11, and a second pump 12. A pair of electrodes (electrode films) 41a and 41b that are electrically insulated from each other are disposed in the base body 30a.

  The substrate 30a is formed by laminating a plurality of ceramic sheets and a layered dielectric (dielectric film) 41c in the Z-axis direction and integrating them by firing and / or bonding. The base body 30a includes a first flow path forming portion 31, a second flow path forming portion 32, a first pump communication portion 33, and a second pump communication portion 34 therein.

  The 1st flow path formation part 31 is a part which comprises the 1st flow path 31a formed in the base | substrate 30a. The lower wall of the first flow path 31a is configured by the upper surface of a dielectric 41c embedded in the base body 30a. The walls other than the lower wall of the first flow path 31a are made of ceramics constituting the base body 30a. Therefore, no current flows along the wall surface of the first flow path 31a.

  The first flow path 31a is a space having a streamline direction in the direction along the X axis similar to the flow path 13a. The first flow path 31a communicates with the first pump chamber 11a via the first communication path 33 at the end portion in the positive X-axis direction. The X-axis negative direction end portion of the first flow path 31a communicates with the first pressure change absorption section (not shown) through the opening of the passage 31b and the passage 31b. The volume of the first pressure change absorption part changes so as to absorb the pressure fluctuation in the first flow path 31a.

  A first moving fluid Fd1 as a first moving body and a first working fluid Fo1 are accommodated in the first flow path 31a. The first moved fluid Fd1 is the same fluid as the moved fluid F1, and exists as one lump in the first flow path 31a. The first transferred fluid Fd1 is accommodated in the first flow path 31a so as to substantially separate the first flow path 31a into two spaces in the flow line direction of the first flow path 31a. The first working fluid Fo1 is the same fluid as the working fluid F2, and is a portion of the first flow path 31a where the first moved fluid Fd1 does not exist, the first communication passage 33, the first pump chamber 11a, the passage 31b, and The first pressure change absorbing portion is filled.

  As shown in FIG. 43, when the first drive voltage is not applied to the first pump 11, the first moved fluid Fd1 is X a predetermined distance from the substantially central portion in the X-axis direction of the first flow path 31a. It exists at a position on the axial positive side (hereinafter referred to as “first position”). On the other hand, as shown in FIG. 44, the first moved fluid Fd1 is positioned at the substantially central portion in the X-axis direction of the first flow path 31a (when an appropriate first drive voltage is applied to the first pump 11). Hereinafter, it is referred to as “second position”). The first moved fluid Fd1 can be moved only between the first position and the second position.

  The wettability of the first moved fluid Fd1 with respect to the first flow path 31a (ceramics constituting the base body 30a) is substantially the same as the wettability of the first moved fluid Fd1 with respect to the dielectric 41c, and the first moved fluid Fd1. This is not better than the wettability with respect to the electrode 41a.

  The electrode 41a is a square-shaped thin film having a length of one side substantially equal to the width of the flow path 13a (and hence the first flow path 31a), and is arranged at a position substantially at the center of the first flow path 31a in the X-axis direction. It is installed. The electrode 41a has a film surface parallel to the upper wall surface of the first flow path 31a, and a lower surface of the film surface exists in the same plane as the upper wall surface of the first flow path 31a. It is arrange | positioned so that it may be exposed to. The electrode 41a is connected to an electric circuit (not shown) outside the base body 30a by a conductive wire.

  The electrode 41a is independent of whether the first moved fluid Fd1 exists at the first position or the second position (that is, the moved fluid Fd1 has an arbitrary position between the first position and the second position). The first moving fluid Fd1 is always in contact (covered by the first moving fluid Fd1).

  The 2nd flow path formation part 32 is a part which comprises the 2nd flow path 32a formed in the base | substrate 30a. The upper wall of the second flow path 32a is constituted by the lower surface of a dielectric (dielectric film) 41c. The walls other than the upper wall of the second flow path 32a are made of ceramics constituting the base body 30a. Therefore, no current flows along the wall surface of the second flow path 32a.

  The second flow path 32a is a space having a streamline direction in the direction along the X axis similar to the flow path 13a, and is below the first flow path 31a (Z-axis negative direction) and parallel to the first flow path 31a. It extends to. The second flow path 32a is provided at a position away from the first flow path 31a by a slight distance in the negative X-axis direction.

  The second flow path 32a communicates with the second pump chamber 12a via the second communication path 34 at the end portion in the X-axis negative direction. The X-axis positive direction end portion of the second flow path 32a communicates with the second pressure change absorbing portion (not shown) through the opening of the passage 32b and the passage 32b. The volume of the second pressure change absorption part changes so as to absorb the pressure fluctuation in the second flow path 32a.

  A second moving fluid Fd2 as a second moving body and a second working fluid Fo2 are accommodated in the second flow path 32a. The second moved fluid Fd2 is the same fluid as the moved fluid F1, and exists as one lump in the second flow path 32a. The second transferred fluid Fd2 is accommodated in the second flow path 32a so as to substantially separate the second flow path 32a into two spaces in the flow line direction of the second flow path 32a. The second working fluid Fo2 is the same fluid as the working fluid F2, and is the portion of the second flow path 32a where the second moved fluid Fd2 does not exist, the second communication passage 34, the second pump chamber 12a, the passage 32b, and The second pressure change absorption part is filled.

  As shown in FIG. 43, when the second drive voltage is not applied to the second pump 12, the second moved fluid Fd2 has a predetermined distance X from the approximate center of the second flow path 32a in the X-axis direction. It is present at a position on the side of the negative axis direction (hereinafter referred to as “third position”). On the other hand, as shown in FIG. 44, when the second pumping fluid 12 is given a suitable second driving voltage, the second moved fluid Fd2 is positioned at the substantially central portion of the second flow path 32a in the X-axis direction ( Hereinafter, it is referred to as “fourth position”). The second moved fluid Fd2 can be moved only between the third position and the fourth position.

  The wettability of the second transferred fluid Fd2 with respect to the second flow path 32a (ceramics constituting the base body 30a) is substantially the same as the wettability of the second transferred fluid Fd2 with respect to the dielectric 41c, and the second transferred fluid Fd2 This is not better than the wettability with respect to the electrode 41b. Accordingly, the resistance (friction resistance) when the second moved fluid Fd2 moves in the second flow path 32a is relatively small.

  The electrode 41b is a square-shaped thin film having a side length substantially equal to the width of the flow path 13a (and hence the second flow path 32a), and is arranged at a position substantially at the center of the second flow path 32a in the X-axis direction. It is installed. The electrode 41b has a film surface parallel to the lower wall surface of the second channel 32a, and the upper surface of the film surface is in the same plane as the lower wall surface of the second channel 32a. It is arrange | positioned so that it may be exposed to. The electrode 41b is connected to an electric circuit (not shown) outside the base body 30a by a conductive wire.

  The electrode 41b is independent of whether the second moved fluid Fd2 is present at the third position or the fourth position (that is, the second moved fluid Fd2 is located between the third position and the fourth position). In such a position that it is always in contact with the second moved fluid Fd2 (covered by the second moved fluid Fd2).

  Next, the operation of the switching device 30 configured as described above will be described. First, as shown in FIG. 43, the electric control device 20 does not apply the first drive voltage to the first pump 11 and does not apply the second drive voltage to the second pump 12. At this time, the volume of the first pump chamber 11a and the volume of the second pump chamber 12a are respectively the initial volumes.

  In this state, the first moved fluid Fd1 electrically connected to the electrode 41a exists at the first position, and the second moved fluid Fd2 electrically connected to the electrode 41b exists at the third position. To do. Accordingly, the distance d between the first moved fluid Fd1 and the second moved fluid Fd2 is a relatively large distance dmax. For this reason, the capacitance between the electrode 41a and the electrode 41b becomes the minimum value Cmin. Accordingly, since the impedance 1 / jωC (= 1 / jωCmin) between the electrodes 41a and 41b becomes the maximum value, the switching device 30 blocks a high-frequency signal that is about to flow between the electrodes 41a and 41b. That is, the switching device 30 has substantially opened the switch contact.

  Next, as shown in FIG. 44, the electric control device 20 applies the first drive voltage to the first pump 11 and applies the second drive voltage to the second pump 12. As a result, the volume of the first pump chamber 11a decreases, and the first pump 11 discharges the first working fluid Fo1 to the first flow path 31a via the first opening (first communication path 33). As a result, the first moved fluid Fd1 moves from the first position to the second position in the negative X-axis direction. On the other hand, the volume of the second pump chamber 12a also decreases, and the second pump 12 discharges the second working fluid Fo2 to the second flow path 32a through the second opening (second communication path 34). As a result, the second moved fluid Fd2 moves from the third position to the fourth position in the X-axis positive direction.

  At this time, the distance d between the first moved fluid Fd1 and the second moved fluid Fd2 is the minimum distance dmin smaller than the distance dmax. For this reason, the capacitance between the electrode 41a and the electrode 41b becomes the maximum value Cmax. Accordingly, since the impedance 1 / jωC (= 1 / jωCmax) between the electrodes 41a and 41b becomes a minimum value, the switching device 40 allows a high-frequency signal to pass between the electrodes 41a and 41b. That is, the switching device 10 substantially closes the switch contact.

  Thereafter, the electric control device 20 extinguishes both the first drive voltage and the second drive voltage (set to “0 (V)”). As a result, the volumes of the first pump chamber 11a and the second pump chamber 12a increase and return to the initial volume, so that the first pump chamber 11 and the second pump chamber 12 are respectively operated from the first flow path 31a through the first operation. The second working fluid Fo2 is sucked from the fluid Fo1 and the second flow path 32a.

  As a result, the first moved fluid Fd1 moves from the second position in the X-axis positive direction and returns to the first position, and the second moved fluid Fd2 moves from the fourth position in the X-axis negative direction to move to the third position. Return to position. Therefore, the capacitance between the electrodes 41a and 41b is minimum (impedance is maximum), and the high frequency signal cannot pass between the electrodes 41a and 41b.

As described above, according to the switching device 30 according to the second embodiment, similarly to the switching device 10, based on the change in capacitance between the electrodes 41 a and 41 b (between the electrodes 41 a and 41 b). Switch between conduction and non-conduction. In the switching device 30, the electrode 41a is always covered with the first moved fluid Fd1 regardless of the position of the first moved fluid Fd1, and the electrode 41b is always the first moved regardless of the position of the second moved fluid Fd2. 2 Covered by the fluid Fd2 to be moved. Therefore, the switching device 30 has the following advantages.
(1) The electrode 41a and the electrode 41b are unlikely to deteriorate. This is because the electrodes 41a and 41b are caused by a trace amount of oxygen in the first working fluid Fo1 and the second working fluid Fo2 when the electrodes 41a and 41b are exposed to the first working fluid Fo1 and the second working fluid Fo2, respectively. This is thought to be due to the absence of oxidation.
(2) Since the first moved fluid Fd1 moves between the first position and the second position while always in contact with the electrode 41a, a large force for separating the first moved fluid Fd1 from the electrode 41a. Is unnecessary. Similarly, since the second moved fluid Fd2 moves between the third position and the fourth position while always in contact with the electrode 41b, a large force for separating the second moved fluid Fd2 from the electrode 41b. Is unnecessary. Accordingly, the force generated by each of the first pump 11 and the second pump 12 can be reduced, and these pumps can be reduced in size.
(3) Since the frictional resistance between the first moved fluid Fd1 and the wall surface of the flow path 31a when the first moved fluid Fd1 moves in the flow path 31a is small, the first moved fluid Fd1 moves quickly. Can be made. Similarly, since the frictional resistance between the second moved fluid Fd2 and the wall surface of the flow path 32a when the second moved fluid Fd2 moves in the flow path 32a is small, the second moved fluid Fd2 moves quickly. Can be made. As a result, high speed switching can be achieved.
(Third embodiment)
Next, a switching device 40 according to a third embodiment of the fifth invention will be described with reference to FIGS. 45 and 46. FIG. FIG. 45 is a longitudinal sectional view of the device 40 when the switching device 40 is in the initial state. FIG. 46 is a longitudinal sectional view of the device 40 when the switching device 40 is in an operating state. 45 and 46, the electric control device 20 is conceptually shown, and the electric circuit 21 shown in FIGS. 41 and 42 is omitted.

This switching device 40 is different from the switching device 30 only in that the dielectric 41c of the switching device 30 according to the second embodiment is replaced with a small thin film having substantially the same shape as the electrode 41a. Accordingly, this difference will be mainly described below.

  A ceramic sheet 41d is disposed between the first flow path 31a and the second flow path 32a. The ceramic sheet 41d is integrated with the ceramic sheet constituting the base body 30a by firing or bonding. A dielectric 41e is disposed between the first flow path 31a and the second flow path 32a at the substantially central portion in the X-axis direction of the ceramic sheet 41d. The dielectric 41e has substantially the same shape as the electrode 41a. The dielectric 41e is provided between the electrode 41a and the electrode 41b in the X-axis direction.

  The upper surface of the film surface of the dielectric 41e is on the same plane as the wall surface of the lower wall of the first flow path 31a. The dielectric 41e does not contact the first moved fluid Fd1 at the first position as shown in FIG. 45, and the first moved fluid at the second position as shown in FIG. It is exposed to the first flow path 31a so as to be in contact with Fd1 (covered by the first moving fluid Fd1).

  The lower surface of the film surface of the dielectric 41e exists on the same plane as the wall surface of the upper wall of the second flow path 32a. The dielectric 41e does not come into contact with the second moved fluid Fd2 at the third position as shown in FIG. 45, and the second moved fluid at the fourth position as shown in FIG. It is exposed to the second flow path 32a so as to be in contact with Fd2 (covered by the second moving fluid Fd2).

  The operation of the switching device 40 is almost the same as the operation of the switching device 30. That is, the first moved fluid Fd1 moves between the first position and the second position by the operation of the first pump 11, and the second moved fluid Fd2 is moved to the third position and the fourth position by the operation of the second pump 12. Move between.

  In addition, when the switching device 40 is in the initial state and the first moved fluid Fd1 is moved to the first position, the second moved fluid Fd2 is moved to the third position. In this case, since the capacitance between the electrode 41a and the electrode 41b becomes the minimum value Cmin and the impedance becomes the maximum value, the switching device 40 cuts off the high-frequency signal that flows between the electrode 41a and the electrode 41b.

  On the other hand, in the operating state, when the first moved fluid Fd1 is moved to the second position, the second moved fluid Fd2 is moved to the fourth position. In this case, since the capacitance between the electrode 41a and the electrode 41b is the maximum value Cmax and the impedance is the minimum value, the switching device 40 passes a high-frequency signal between the electrode 41a and the electrode 41b.

As described above, according to the switching device 40 according to the third embodiment, the electrode 41a is always covered with the first moved fluid Fd1 regardless of the position of the first moved fluid Fd1. The electrode 41b is always covered with the second moved fluid Fd2 regardless of the position of the second moved fluid Fd2. Therefore, the switching device 40 has the advantages of the switching device 30 described above.
(Fourth embodiment)
Next, a switching device 60 according to a fourth embodiment of the fifth invention is described with reference to FIG. FIG. 47 is a diagram conceptually showing a cross section of the switching device 60 when the switching device 60 is in an operating state. In FIG. 47, the electric control device 20 and the electric circuit 21 shown in FIGS. 41 and 42 are omitted.

  The switching device 60 includes a first pump 61, a first flow path 62, a first pressure change absorption unit 63, and a first electrode 64. The first pump 61 and the first pressure change absorber 63 are filled with the first working fluid Fo1. In the first flow path 62, the first moved fluid Fd1 is accommodated so as to substantially separate the first flow path 62 into two spaces in the streamline direction. A portion of the first flow path 62 where the first moved fluid Fd1 does not exist is filled with the first working fluid Fo1.

  The switching device 60 includes a second pump 71, a second flow path 72, a second pressure change absorption unit 73, a second electrode 74, and a dielectric 75. The second pump 71 and the second pressure change absorber 73 are filled with the second working fluid Fo2. In the second flow path 72, the second moved fluid Fd2 is accommodated so as to substantially separate the second flow path 72 into two spaces in the streamline direction. A portion of the second flow path 72 where the second moved fluid Fd2 does not exist is filled with the second working fluid Fo2.

  The first pump 61 is a pump having the same configuration as the first pump 11. A first drive voltage is applied between the electrodes (not shown) of the actuator of the first pump 61 from the electric control device 20 (not shown). The first pump 61 discharges the first working fluid Fo1 into the first flow path 62 and sucks the first working fluid Fo1 from the first flow path 62. The first pressure change absorption part 63 is in communication with the first flow path 62, and its volume changes so as to maintain the pressure in the first flow path 62 constant.

  The second pump 71 is a pump having the same configuration as the second pump 12. A second drive voltage is applied between the electrodes (not shown) of the actuator of the second pump 71 from the electric control device 20 (not shown). The second pump 71 discharges the second working fluid Fo 2 into the second flow path 72 and sucks the second working fluid Fo 2 from the second flow path 72. The second pressure change absorption part 73 is in communication with the second flow path 72, and its volume changes so as to maintain the pressure in the second flow path 72 constant.

  The first flow path 62 extends from the first pump 61 in the negative Y-axis direction and bends in the negative X-axis direction, and is connected to the first part and extends linearly along the X-axis. Two portions and an end portion that is connected to the second portion and bends in the positive direction of the Y-axis are provided, and the first pressure change absorbing portion 63 is connected to the end portion. Similarly, the second flow path 72 has a third portion that extends from the second pump 71 in the positive Y-axis direction and bends in the positive X-axis direction, and is connected to the third portion and linear along the X-axis. And an end portion that is connected to the fourth portion and bends in the negative Y-axis direction, and the second pressure change absorbing portion 73 is connected to the end portion.

  The first flow path 62 and the second flow path 72 are arranged adjacent to each other with a predetermined distance so that the second portion and the fourth portion (portions extending linearly) are parallel to each other. The first part and the third part are formed such that the distance between them is larger than the predetermined distance between the second part and the fourth part.

  The dielectric 75 is disposed only between the second part and the fourth part. The dielectric 75 constitutes a side wall on the Y axis direction negative side of the second portion of the first flow path 62 and constitutes a side wall on the Y axis direction positive side of the fourth portion of the second flow path 72.

  The first electrode 64 is a substantially square thin film and is disposed in the first portion of the first flow path 62. The first electrode 64 is exposed to the first flow path 62 and constitutes a part of the side wall of the first flow path 62. The second electrode 74 is a substantially square thin film and is disposed in the third portion of the second flow path 72. The second electrode 74 is exposed to the second flow path 72 and constitutes a part of the side wall of the second flow path 72. Thus, the switching device 60 is point-symmetric in the XY plane.

  47, when the first drive voltage is not applied to the first pump 61, the first moved fluid Fd1 is a predetermined position (hereinafter referred to as a first position) of the first flow path 62. , Referred to as “first position”). On the other hand, as shown by the solid line in FIG. 47, the first moved fluid Fd1 has a predetermined position (in the second portion of the first flow path 62) when an appropriate first drive voltage is applied to the first pump 61. Hereinafter, it is referred to as “second position”). The first moved fluid Fd1 can be moved only between the first position and the second position. As long as the first moved fluid Fd1 moves only between the first position and the second position, the first electrode 64 is always covered with the first moved fluid Fd1 and comes into contact with the first moved fluid Fd1. ing.

  47, when the second drive voltage is not applied to the second pump 71, the second moved fluid Fd2 is a predetermined position (hereinafter referred to as the third portion) of the second flow path 72. , Referred to as “third position”). On the other hand, as shown by the solid line in FIG. 47, when the first moved fluid Fd1 is moved to the second position, an appropriate second drive voltage is applied to the second pumped fluid Fd2. Thus, the second portion of the second flow path 72 is moved to a predetermined position (hereinafter referred to as “fourth position”). The second moved fluid Fd2 can be moved only between the third position and the fourth position. As long as the second moved fluid Fd2 moves only between the third position and the fourth position, the second electrode 74 is always covered with the second moved fluid Fd2 so as to be in contact with the second moved fluid Fd2. It has become.

  The switching device 60 moves the second working fluid Fd2 to the third position when the first working fluid Fd1 is moved to the first position. In this case, the capacitance between the first electrode 64 and the second electrode 74 is the minimum value Cmin, and the impedance is the maximum value. Accordingly, the switching device 60 blocks a high-frequency signal that is about to flow between the first electrode 64 and the second electrode 74.

  On the other hand, the switching device 60 moves the first working fluid Fd1 to the second position d and moves the second working fluid Fd2 to the fourth position. In this case, the capacitance between the first electrode 64 and the second electrode 74 is the maximum value Cmax, and the impedance is the minimum value. Therefore, the switching device 60 passes a high frequency signal between the first electrode 64 and the second electrode 74.

  As described above, according to the switching device 60 according to the fourth embodiment, the first electrode 64 is always covered with the first moved fluid Fd1 regardless of the position of the first moved fluid Fd1. Further, the second electrode 74 is always covered with the second moved fluid Fd2 regardless of the position of the second moved fluid Fd2. Therefore, the switching device 60 has the advantages that the switching device 30 described above has.

  Further, the switching device 60 is configured such that the dielectric 75 exists only between the second portion of the first flow path 62 and the fourth portion of the second flow path 72. Therefore, when the switching device 60 is in the activated state, even when the first moved fluid Fd1 is slightly shifted from the second position and when the second moved fluid Fd2 is slightly shifted from the fourth position. The tip of the first moving fluid Fd1 (the end opposite to the first pump 61) reaches at least the connecting portion between the second portion and the end on the first pressure change absorbing portion 63 side, The first pump 61 and the first pump 61 so that the tip of the moving fluid Fd2 (the end opposite to the second pump 71) reaches at least the connecting portion between the fourth portion and the end on the second pressure change absorber 73 side. When the two pumps 71 are driven, the dielectric 75 can always be completely sandwiched between the first moved fluid Fd1 and the second moved fluid Fd2.

In other words, in the operating state, the switching device 60 can stably make the area of the dielectric 75 sandwiched between the first moved fluid Fd1 and the second moved fluid Fd2 stable. Therefore, since the switching device 60 can make the maximum value of the capacitance between the first electrode 64 and the second electrode 74 constant, a stable switching operation can be achieved.
(Fifth embodiment)
Next, a switching device 80 according to a fifth embodiment of the fifth invention is described with reference to FIGS. FIG. 48 is a diagram conceptually showing a transverse section of the switching device 80 when the switching device 80 is in an operating state. 49 is a cross-sectional view of the switching device 80 cut along a plane along line 1-1 in FIG. 48 and 49, the electric control device 20 and the electric circuit 21 shown in FIGS. 41 and 42 are omitted.

  The switching device 80 includes a base body 80a in which ceramic sheets are integrated, a first pump 81, a first flow path 82 linearly extending in the Y-axis direction in the base body 80a, and a first pressure formed in the base body 80a. A change absorption part 83 and a first electrode 84 are provided. One end of the first flow path 82 is connected to the first pump 81, and the other end is connected to the first pressure change absorption unit 83.

  The first pump 81 and the first pressure change absorber 83 are filled with the first working fluid Fo1. The first flow path 82 contains the first moved fluid Fd1. The first moved fluid Fd1 substantially separates the first flow path 82 into two spaces in the Y-axis direction that is the streamline direction. The portion where the first moved fluid Fd1 does not exist is filled with the first working fluid Fo1.

  The switching device 80 includes a second pump 91, a second flow path 92 that extends linearly in the X-axis direction within the base body 80a, a second pressure change absorption portion 93, a second electrode 94, and a dielectric 95. . The second flow path 92 has one end connected to the second pump 91 and the other end connected to the second pressure change absorption unit 93.

  The second pump 91 and the second pressure change absorber 93 are filled with the second working fluid Fo2. In the second flow path 92, the second moved fluid Fd2 is accommodated so as to substantially separate the second flow path 92 into two spaces in the X-axis direction that is the streamline direction of the flow path 92. Yes. A portion of the second flow path 92 where the second moved fluid Fd2 does not exist is filled with the second working fluid Fo2.

  The first pump 81 is a pump having the same configuration as the first pump 11. A first drive voltage is applied between the electrodes (not shown) of the actuator of the first pump 81 from the electric control device 20 (not shown). The first pump 81 discharges the first working fluid Fo1 into the first flow path 82 and sucks the first working fluid Fo1 from the first flow path 82. The volume of the first pressure change absorbing portion 83 is changed so as to maintain the pressure in the first flow path 82 constant.

  The second pump 91, the second flow path 92, and the second pressure change absorber 93 (hereinafter referred to as “second set”) are the first pump 81, the first flow path 82, and the first pressure change absorber. 83 (hereinafter referred to as “first set”). In the second set, the first set is rotated by 90 ° in the XY plane, and is arranged below the first set (in the negative Z-axis direction). At this time, the first flow path 82 and the second flow path 92 are separated by a predetermined short distance and intersect each other in plan view (as viewed from the positive direction of the Z axis, which is a predetermined direction). Thus, the second flow path 92 is formed so as to intersect with the first flow path 82 below (or above) the first flow path 82.

  The first electrode 84 is located on the first pump 81 side by a predetermined distance from the first channel 82 and the second channel 92 (intersection), and is provided on the side wall of the first channel 82. Yes. The first electrode 84 is a thin film, and one of its film surfaces is located on the same plane as the side wall of the first flow channel 82 and is exposed to the first flow channel 82.

  The second electrode 94 is located on the second pump 91 side by a predetermined distance from the first channel 82 and the second channel 92 (intersection), and is provided on the side wall of the second channel 92. Yes. The second electrode 94 is the same thin film as the first electrode 84, and one of its film surfaces is located on the same plane as the side wall of the second channel 92 and is exposed to the second channel 92. .

  The dielectric 95 is a thin film having a substantially square shape, and is disposed so as to exist only between the first channel 82 and the second channel 92 (intersection).

  As indicated by the phantom line in FIG. 48, the first moved fluid Fd1 is positioned on the first pump 81 side from the first electrode 84 when the first drive voltage is not applied to the first pump 81 (hereinafter referred to as the first pump 81). , Referred to as “first position”). On the other hand, as shown by the solid line in FIG. 48, the first moved fluid Fd1 absorbs the first pressure from the first electrode 84 rather than the intersection when an appropriate first driving voltage is applied to the first pump 81. It is moved to a position close to the portion 83 (hereinafter referred to as “second position”). The first moved fluid Fd1 can be moved only between the first position and the second position. Since the first moved fluid Fd1 is moved only between the first position and the second position, the first electrode 84 is always covered with the first moved fluid Fd1 so as to be in contact with the first moved fluid Fd1. It has become.

  As indicated by the phantom line in FIG. 48, the second moved fluid Fd2 is positioned on the second pump 91 side from the second electrode 94 when the second drive voltage is not applied to the second pump 91 (hereinafter referred to as the second pump 91). , Referred to as “third position”). On the other hand, as shown by the solid line in FIG. 48, the second transferred fluid Fd2 absorbs the second pressure from the second electrode 94 more than the intersection when an appropriate second driving voltage is applied to the second pump 91. It is moved to a position close to the section 93 (hereinafter referred to as “fourth position”). The second moved fluid Fd2 can be moved only between the third position and the fourth position. Since the second moved fluid Fd2 is moved only between the third position and the fourth position, the second electrode 94 is always covered with the second moved fluid Fd2 so as to be in contact with the second moved fluid Fd2. It has become.

  The switching device 80 moves the second moved fluid Fd2 to the third position when the first moved fluid Fd1 is moved to the first position. In this case, the capacitance between the first electrode 84 and the second electrode 94 is the minimum value Cmin, and the impedance is the maximum value. Accordingly, the switching device 80 blocks a high-frequency signal that is about to flow between the first electrode 84 and the second electrode 94.

  On the other hand, the switching device 80 moves the first moved fluid Fd1 to the second position and moves the second moved fluid Fd2 to the fourth position. In this case, the first moved fluid Fd1 and the second moved fluid Fd2 are in a state of sandwiching the dielectric 95 in the Z-axis direction. Accordingly, the capacitance between the first electrode 84 and the second electrode 94 becomes the maximum value Cmax, and the impedance becomes the minimum value. As a result, the switching device 80 passes a high frequency signal between the first electrode 84 and the second electrode 94.

  As described above, according to the switching device 80 according to the fifth embodiment, the first electrode 84 is always covered with the first moved fluid Fd1 regardless of the position of the first moved fluid Fd1. The second electrode 94 is always covered with the second moved fluid Fd2 regardless of the position of the second moved fluid Fd2. Therefore, the switching device 80 has the advantages of the switching device 30 described above.

Further, in the switching device 80, when the first working fluid Fd1 is moved to the second position and the second working fluid Fd2 is moved to the fourth position, the dielectric 95 is always completely moved from the first moved fluid Fd1. It can be sandwiched between the second moved fluids Fd2. That is, the area of the dielectric 95 sandwiched between the first moved fluid Fd1 and the second moved fluid Fd2 is constant. Therefore, the maximum value of the capacitance between the first electrode 84 and the second electrode 94 can be made constant. As a result, the switching device 80 can achieve a stable switching operation.
(Sixth embodiment)
Next, a switching device 100 according to a sixth embodiment of the fifth invention will be described with reference to FIGS. FIG. 50 is a diagram conceptually showing a longitudinal section of the device 100 when the switching device 100 is in an operating state. 51 is a cross-sectional view of the switching device 100 cut along a plane along line 2-2 in FIG. 50 and 51, the electric control device 20 and the electric circuit 21 shown in FIGS. 41 and 42 are omitted.

  The switching device 100 includes a base body 100a in which ceramic sheets are integrated, a pump 101, a flow path 102 linearly extending in the X-axis direction, a pressure change absorption unit 103, a pair of electrodes 103a and 103b, and a dielectric 104. ing. The pump 101 has substantially the same structure as the first pump 11. The pump 101 is conceptually shown in FIG.

  The channel 102 is a sealed space having a streamline direction in the X-axis direction formed in the base body 100a. The end of the flow path 102 on the negative side in the X-axis direction is in communication with the pump 101. An end portion on the X axis positive direction side of the flow path 102 is connected to the pressure change absorbing portion 103. The pressure change absorption unit 103 has substantially the same configuration as the pressure change absorption unit 83 described above.

  A fluid F1 to be moved is accommodated in a substantially central portion of the flow path 102 in the X-axis direction. The fluid F1 to be moved is accommodated in the flow path 102 so as to substantially separate the flow path 102 into two spaces in the streamline direction (X-axis direction) of the flow path 102. A portion of the flow path 102 that is not filled with the fluid F1 to be moved, the pump 101, and the pressure change absorber 103 are filled with the working fluid F2. As shown in FIG. 51, the flow path 102 has a substantially circular cross section cut along a plane (ZY plane) orthogonal to the streamline direction.

  Each of the pair of electrodes 103a and 103b is a thin plate having a substantially square shape. The pair of electrodes 103a and 103b is formed along the wall surface of the channel 102 at a position separated from the channel 102a by a predetermined distance. The electrode 103a is opposed to the electrode 103b with the flow path 102 interposed therebetween.

  The dielectric 104 has an annular shape having an axis extending in the X-axis direction, and is formed between the wall surface (outer wall) of the channel 102 and the pair of electrodes 103a and 103b. The dielectric 104 is exposed to the flow path 102. In other words, the inner wall of the dielectric 104 coincides with the wall surface of the channel 102 and constitutes a part of the channel 102.

  In the switching device 100, when the pump 101 is in the non-operating state, the moved fluid F1 is in the negative direction of the X axis from the position where the dielectric 104 is formed, as indicated by the phantom line in FIG. It exists so that it may exist in the 1st position. At this time, the capacitance (capacitance) between the electrode 103a and the electrode 103b is minimized.

  When the pump 101 is in the operating state, the moved fluid F1 is moved to the X axis positive direction side by the working fluid F2 discharged from the pump 101. As a result, the moved fluid F1 reaches the second position, which is the position where the dielectric 104 is formed, as shown by the solid line in FIG. At this time, the capacitance (capacitance) between the electrode 103a and the electrode 103b is maximized. The switching device 100 performs switching using such a change in capacitance.

  According to the switching device 100, since the cross-sectional shape of the flow path 102 is substantially circular, the moved fluid F1 substantially contacts the dielectric 104 when the moved fluid F1 is moved to the second position. . In other words, since the corner portion does not exist in the flow path 102, when the fluid F1 is moved to the second position, the working fluid F2 does not enter between the fluid F1 and the electrodes 103a and 103b. As a result, according to the switching device 100, the capacitance between the electrodes 103a and 103b when the fluid F1 is present at the first position and the space between the electrodes 103a and 103b when the fluid F1 is present at the second position. The difference in capacity can be increased. Therefore, the switching device 100 can achieve a stable switching operation.

In addition, although the cross-sectional shape of the flow path 102 was substantially circular, even if it is a shape which does not have a corner | angular part like an ellipse and an ellipse, the effect similar to the switching device 100 can be acquired.
(Seventh embodiment)
Next, a switching device 110 according to a seventh embodiment of the fifth invention is described with reference to FIGS. FIG. 52 is a diagram conceptually showing a longitudinal section of the switching device 110 when the switching device 110 is in an operating state. 53 is a cross-sectional view of the switching device 110 cut along a plane along line 3-3 in FIG. FIG. 54 is a cross-sectional view of the switching device 110 cut along a plane along line 4-4 of FIG. In these drawings, the electric control device 20 and the electric circuit 21 shown in FIGS. 41 and 42 are omitted.

  The switching device 110 includes a base 110a in which ceramic sheets are integrated, a pump 111, a flow path 112 extending linearly in the X-axis direction, a pressure change absorption unit 113, a pair of electrodes 114a and 114b, and a pair of dielectrics 115a. 115b. The pump 111 has substantially the same structure as the first pump 11. The pump 111 is conceptually shown in FIG.

  The flow path 112 is a sealed space having a streamline direction in the X-axis direction formed in the base body 110a. An end portion on the X axis negative direction side of the flow path 112 is in communication with the pump 111. An end portion on the X axis positive direction side of the flow path 112 is connected to the pressure change absorbing portion 113. The pressure change absorption unit 113 has substantially the same configuration as the pressure change absorption unit 83 described above.

  A fluid F1 to be moved is accommodated in the approximate center of the flow path 112 in the X-axis direction. The fluid F1 to be moved is accommodated in the flow channel 112 so as to substantially separate the flow channel 112 into two spaces in the streamline direction (X-axis direction) of the flow channel 112. The portion of the flow path 112 that is not filled with the moved fluid F1, the pump 111, and the pressure change absorbing portion 113 are filled with the working fluid F2.

  As shown in FIG. 53, the cross-sectional shape of the flow path 112 cut along the plane (YZ plane) orthogonal to the streamline direction is substantially rectangular at the approximate center in the X-axis direction. This rectangle has a long side in the Y-axis direction and a short side in the Z-axis direction. The rectangular area (channel cross-sectional area) is S. As shown in FIG. 54, the cross section of the flow path 112 cut along a plane orthogonal to the streamline direction is a substantially square shape in a portion excluding the substantially central portion in the X-axis direction. The square area (channel cross-sectional area) is S. That is, the channel 112 has a substantially rectangular cross-sectional shape at a substantially central portion in the streamline direction, and has a substantially square cross-sectional shape at other portions (both ends in the streamline direction). Further, the channel cross-sectional area of the channel 112 is constant.

  The electrode 114a is formed in a thin plate shape having a rectangular shape. The shape of the electrode 114b is the same as the shape of the electrode 114a. The pair of electrodes 114a and 114b are arranged so that the flow path 112 is parallel to the wall surface including the long side of the flow path 112 at a substantially central portion of the flow path 112 (that is, a portion having a rectangular cross-sectional shape). It is arranged at a position away from the wall surface by a predetermined distance. The pair of electrodes 114a and 114b are formed so as to face each other with the flow path 112 interposed therebetween.

  The dielectric 115a is a thin plate having a rectangular shape, and is formed to have substantially the same shape as the electrode 114a. The dielectric 115a is disposed between the flow channel 112 and the electrode 114a at a substantially central portion of the flow channel 112 (that is, a portion having a rectangular cross-sectional shape). The dielectric 115a is in contact with the electrode 114a. The dielectric 115a is exposed to the flow path. In other words, the inner wall of the dielectric 115 a constitutes a part of the wall of the flow path 112.

  Similarly, the dielectric 115b is formed in a thin plate shape having the same rectangle as the dielectric 115a. The dielectric 115b is disposed between the flow channel 112 and the electrode 114b in the substantially central portion of the flow channel 112 (that is, the portion having a rectangular cross-sectional shape). The dielectric 115b is in contact with the electrode 114b. The dielectric 115b is opposed to the dielectric 115a with the flow path 112 interposed therebetween. The dielectric 115b is exposed to the flow path. In other words, the inner wall of the dielectric 115 b constitutes a part of the wall of the flow path 112.

  In the switching device 110, when the pump 111 is in the non-operating state, the fluid F1 is moved to the position where the dielectrics 115a and 115b are formed (that is, the flow of fluid F1 as shown by phantom lines in FIG. 52). The cross-sectional shape of the path 112 is configured to be present at the first position in the negative direction of the X axis with respect to the rectangular portion). At this time, the capacitance (capacitance) between the electrode 114a and the electrode 114b is minimized.

  When the pump 111 is in an operating state, the moved fluid F1 is moved to the X axis positive direction side by the working fluid F2 discharged from the pump 111. As a result, the moved fluid F1 reaches the second position including the portions where the dielectrics 115a and 115b are formed, as shown by the solid line in FIG. At this time, the capacitance (capacitance) between the electrode 114a and the electrode 114b is maximized. The switching device 110 performs switching using such a capacitance change.

  According to the switching device 110, the dielectrics 115a and 115b and the electrodes 114a and 114b are formed in a portion where the cross-sectional shape of the flow path 112 is rectangular. Therefore, even if the substrate 110a is small or the flow path cross-sectional area of the flow path 113 is small, the dielectrics 115a and 115b having a large area and the electrodes 114a and 114b having a large area can be provided. The contact area between the moved fluid F1 that has been moved and the dielectrics 115a and 115b increases. Furthermore, the mutual distance between the electrode 114a, the electrode 114b, and the fluid F1 to be moved becomes small.

As a result, the capacity when the moved fluid F1 moves to the second position can be increased. In other words, the difference between the capacitance between the electrodes 114a and 114b when the fluid F1 is moved to the first position and the capacitance between the electrodes 114a and 114b when the fluid F1 is moved to the second position can be increased. Therefore, the switching device 110 can achieve a stable switching operation.
(Eighth embodiment)
Next, a switching device 120 according to an eighth embodiment of the fifth invention is described with reference to FIG. FIG. 55 is a schematic view showing a longitudinal section of the switching device 120.

  The switching device 120 includes a base body 120a in which ceramic sheets are integrated, a pump 121, a flow path 122 linearly extending in the X-axis direction, a pressure change absorption unit 123, a pair of electrodes 124a and 124b, and a pair of dielectrics 125a. , 125b. The pump 121 has substantially the same structure as the first pump 11.

  The flow path 122 is a sealed space having a streamline direction in the X-axis direction formed in the base body 120a. The end of the flow path 122 on the X axis negative direction side is connected to the pump 121. An end portion on the X axis positive direction side of the flow path 122 is connected to the pressure change absorbing portion 123. The pressure change absorber 123 has substantially the same structure as the pressure change absorber 83 described above.

  A fluid F1 to be moved is accommodated in a substantially central portion of the flow path 122 in the X-axis direction. The fluid F1 to be moved is accommodated in the flow path 122 so as to substantially separate the flow path 122 into two spaces in the streamline direction (X-axis direction) of the flow path 122. The portion of the flow path 122 that is not filled with the moved fluid F1, the pump 121, and the pressure change absorbing portion 123 are filled with the working fluid F2.

  The shape of the cross section obtained by cutting the flow path 122 along a plane (YZ plane) orthogonal to the streamline direction is a substantially rectangular shape (or a substantially circular shape). The channel 122 has a large-diameter portion 122a having a large channel cross-sectional area between the substantially central portion in the X-axis direction and the connecting portion (X-axis direction negative side) with the pump 121. The channel 122 has a small-diameter portion 122b having a smaller channel cross-sectional area than the large-diameter portion 122a between the substantially central portion in the X-axis direction and the connecting portion (positive side in the X-axis direction) with the pressure change absorbing portion 123. doing.

  The electrode 124a is formed in a rectangular thin plate shape. The shape of the electrode 124b is the same as the shape of the electrode 124a. The pair of electrodes 124 a and 124 b are arranged at a position away from the wall surface of the flow path 122 by a predetermined distance in the small diameter portion 122 b of the flow path 122. The pair of electrodes 124 a and 124 b are formed so as to face each other with the flow path 122 interposed therebetween.

  The dielectric 125a is a rectangular thin plate and has substantially the same shape as the electrode 124a. The dielectric 125a is disposed between the channel 122 and the electrode 124a in the small diameter portion 122b of the channel 122. The dielectric 125a is in contact with the electrode 124a on one surface and is exposed to the flow path 122 on the other surface. In other words, the lower surface of the dielectric 125 a constitutes a part of the wall surface of the flow path 122.

  The dielectric 125b has the same shape as the dielectric 125a. The dielectric 125b is disposed between the channel 122 and the electrode 124b in the small diameter portion 122b of the channel 122. The dielectric 125b is opposed to the dielectric 125a with the flow path 122 interposed therebetween. The dielectric 125b is in contact with the electrode 124b on one side and exposed to the flow path 122 on the other side. In other words, the upper surface of the dielectric 125 b constitutes a part of the wall surface of the flow path 122.

  In the switching device 120, when the pump 121 is in the non-operating state (the device 120 is in the initial state), the fluid F1 to be moved is, as shown by the phantom line in FIG. It is configured to exist at one position. At this time, the capacitance (capacitance) between the electrode 124a and the electrode 124b is minimized.

  When the pump 121 is in the operating state (the device 120 is in the operating state), the moved fluid F1 is moved to the X axis positive direction side by the working fluid F2 discharged from the pump 121. As a result, as shown by the solid line in FIG. 55, the moved fluid F1 exists across both the large diameter portion 122a and the small diameter portion 122b and reaches the position where the dielectrics 125a and 125b are formed. The position where the moved fluid F1 exists is referred to as a second position. When the moved fluid F1 exists at the second position, the dielectrics 125a and 125b are covered with the moved fluid F1. At this time, the capacitance (capacitance) between the electrode 124a and the electrode 124b is maximized. The switching device 120 performs switching using such a change in capacitance.

  Thereafter, when the pump 121 is brought into a non-operating state, the pump 121 sucks the working fluid F2 from the large diameter portion 122a. Thereby, the fluid F1 to be moved moves from the second position to the first position.

  According to the switching device 120, when the fluid F1 to be moved is moved in the positive direction of the X axis, the switch state is changed from the “off” state to the “on” state. At this time, the moving side front end portion of the fluid F1 to be moved enters the small diameter portion 122b from the large diameter portion 122a. Therefore, the moving-side tip of the moved fluid F1 can move at a higher speed than when the moved fluid F1 moves only in the large diameter portion 122a.

  Further, when the fluid F1 to be moved is moved in the negative direction of the X axis, the switch state changes from the “on” state to the “off” state. In this case, the moving fluid F1 and the dielectrics 125a and 125b change from the contact state to the non-contact state while the moving-side rear end portion of the moved fluid F1 is moving in the small diameter portion 122b. Thereafter, the distance between the fluid F1 to be moved and the dielectrics 125a and 125b increases within a short time. As a result, the switching device 120 can perform a switching operation at a higher speed.

  Thus, in the switching device 120, the flow path 122 is provided with the large diameter part 122a and the small diameter part 122b. The moving body is the moving fluid F1, the working fluid F2 is substantially insoluble with respect to the moving fluid F1, and the wettability with respect to the wall surface of the flow path 122 is relative to the wall surface of the flow path 122 of the moving fluid F1. It is a fluid better than wettability. The pair of electrodes 124a and 124b are disposed in the small diameter portion 122b, and the actuator (pump 121) is configured to discharge the working fluid F2 to the large diameter portion 122a or suck the working fluid F2 from the large diameter portion 122a. Yes.

Then, one end of the fluid F1 to be moved moves in the small diameter portion 122b, whereby the capacitance between the electrodes 124a and 124b is changed to perform a switching operation. As a result, when the same amount of working fluid is discharged or sucked from the pump 121, the switching device 120 increases the speed of the fluid F1 with respect to the electrodes 124a and 124b as compared with a device that does not have the small diameter portion 122b. Can be switched at high speed.
(Ninth embodiment)
Next, a switching device 130 according to a ninth embodiment of the fifth invention is described with reference to FIGS. FIG. 56 is a vertical cross section in the vicinity of the flow path of the switching device 130. 57 to 59 are cross-sectional views of the vicinity of the flow path of the switching device 130 taken along the planes 5-5, 6-6, and 7-7 in FIG.

  The switching device 130 includes a ceramic base 130a, two pumps (not shown), a first channel 131a and a second channel 131b, two pressure change absorbers (not shown), a pair of electrodes 132a and 132b, A dielectric 133 is provided.

  The first flow path 131a is a sealed space that extends linearly in the X-axis direction and has a streamline direction in the X-axis direction. As shown in FIGS. 57 to 59, the first channel 131a has a substantially circular cross section. The X-axis negative direction end of the first flow path 131a is connected to one pump not shown. This pump has substantially the same structure as the first pump 11. The positive end of the first flow path 131a in the X-axis direction is connected to one pressure change absorption unit (not shown). This pressure change absorption part has substantially the same structure as the pressure change absorption part 83 described above.

  The first fluid 131 is accommodated in the first flow path 131a. The first moved fluid Fd1 is accommodated in the first flow path 131a so as to substantially separate the first flow path 131a into two spaces in the streamline direction (X-axis direction) of the first flow path 131a. . The portion of the first flow path 131a that is not filled with the first moved fluid Fd1, the pump connected to the first flow path 131a, and the pressure change absorber connected to the first flow path 131a are the first working fluid Fo1. Is filled with.

  The second flow path 131b is a cylindrical sealed space that extends linearly in the X-axis direction and has a streamline direction in the X-axis direction, as shown in FIGS. The second channel 131b is formed coaxially with the first channel 131a. A cylindrical partition wall 130b made of ceramics is provided between the second channel 131b and the first channel 131a.

  The positive end of the second flow path 131b in the X-axis direction is connected to one pump not shown. This pump has substantially the same structure as the first pump 11. The end of the second channel 131b in the negative X-axis direction is connected to one pressure change absorption unit (not shown). This pressure change absorption part has substantially the same structure as the pressure change absorption part 83 described above.

  The second flow path 131b contains the second moved fluid Fd2. The second transferred fluid Fd2 is accommodated in the second flow path 131b so as to substantially separate the second flow path 131b into two spaces in the streamline direction (X-axis direction) of the second flow path 131b. . The portion of the second flow path 131b that is not filled with the second transferred fluid Fd2, the pump connected to the second flow path 131b, and the pressure change absorber connected to the second flow path 131b are the second working fluid Fo2. Is filled with.

  The first electrode 132a is provided closer to the X-axis negative direction side than the approximately central portion in the X-axis direction of the first flow path 131a. The first electrode 132a has an annular shape, is embedded in a partition wall 130b between the first channel 131a and the second channel 131b, and is exposed to the first channel 131a.

  The dielectric 133 is provided on the X-axis positive direction side of the position where the first electrode 132a is provided, and is provided in the X-axis direction substantially central portion of the first flow path 131a. The dielectric 133 has an annular shape, is embedded in a partition wall 130b between the first channel 131a and the second channel 131b, and is exposed to the first channel 131a and the second channel 131b.

  The second electrode 132b is provided on the X-axis positive direction side from the position where the dielectric 133 is provided. The second electrode 132b has an annular shape, is embedded in the base body 130a forming the second flow path 131b, and is exposed to the second flow path 131b.

  In the switching device 130, as shown by the phantom line in FIG. 56, when both of the pair of pumps are deactivated (that is, when the switching device 130 is in the initial state), the first moved fluid Fd1 exists on the negative side in the X-axis direction, and the second moving fluid Fd2 exists on the positive side in the X-axis direction. At this time, the first moved fluid Fd1 covers the first electrode 132a and contacts the first electrode 132a, but does not contact the dielectric 133. The position of the first moved fluid Fd1 is referred to as a first position for convenience. Further, the second moving fluid Fd2 covers the second electrode 132b and comes into contact with the second electrode 132b, but does not come into contact with the dielectric 133. The position of the second moved fluid Fd2 is referred to as a third position for convenience. At this time, the capacitance between the first electrode 132a and the second electrode 132b is minimized.

  When the pair of pumps are both activated (that is, when the switching device 130 is activated), the first moved fluid Fd1 is moved to the X axis positive direction side by the first working fluid Fo1 discharged from the pump. Raru. As a result, as shown by the solid line in FIG. 56, the first moved fluid Fd1 covers the first electrode 132a and the dielectric 133, and moves to a position in contact with them. The position of the first moved fluid Fd1 is referred to as a second position for convenience. The second moved fluid Fd2 is moved in the negative X-axis direction by the second working fluid Fo2 discharged from the pump. As a result, the second moved fluid Fd2 covers the second electrode 132b and the dielectric 133, and moves to a position in contact with them. The position of the second moved fluid Fd2 is referred to as a fourth position for convenience. At this time, the capacity between the first electrode 132a and the second electrode 132b is maximized. The switching device 130 performs switching using such a change in capacitance.

  Thus, in the switching device 130, the 2nd flow path 131b is cylindrical and is formed coaxially with the 1st flow path 131a. Therefore, according to the switching device 130, unlike the switching device having two flow paths such as the switching device 30 of the second embodiment and the switching device 40 of the third embodiment, the first movable body Fd1 and the second target As the moving fluid Fd2 moves while maintaining an axisymmetric shape, the capacitance between the first electrode 132a and the second electrode 132b changes. Therefore, the switching device 130 has an advantage that noise is not easily superimposed on the high-frequency signal transmitted by the switching device 130.

  Note that the entire partition wall 130b (except the first electrode 132a) of the ninth embodiment may be formed of the dielectric 133. Moreover, as shown in FIGS. 60 to 62 corresponding to FIGS. 57 to 59, the cross-sectional shapes of the first channel and the second channel may be square (or polygonal). In this case, as shown in FIG. 60, the first electrodes 142a1 to 142a4 separated into four pieces instead of the first electrode 132a are replaced with only the central portion of each side of the first flow path 141a instead of the first flow path 131a. It is desirable to form. The first electrodes 142a1 to 142a4 are electrically connected inside or outside the base body 140a instead of the base body 130a.

  Similarly, as shown in FIG. 61, it is desirable to form the dielectrics 143a to 143d separated into four pieces in place of the dielectric 133 only in the central part of each side of the first flow path 141a. Furthermore, as shown in FIG. 62, the second electrodes 142b1 to 142b4 separated into four pieces in place of the second electrode 132b are provided only at the central portion of each side of the second flow path 141b instead of the second flow path 131b. It is desirable to form. The second electrodes 142b1 to 142b4 are electrically connected inside or outside the base body 140a.

  Also in the switching device 140 according to the modification shown in FIGS. 60 to 62, the first moving body Fd1 and the second moving fluid Fd2 move while maintaining a substantially axially symmetric shape, thereby The capacitance between the electrodes 142a1 to 142a4 and the second electrodes 142b1 to 142b4 changes. Therefore, the switching device 140 has an advantage that noise is not easily superimposed on the high-frequency signal transmitted by the switching device 140. Furthermore, since the cross-sectional shape of each flow path is substantially square, the switching device 140 can be manufactured easily.

  Moreover, the 1st to-be-moved fluid Fd1 cannot exist in the corner | angular part of the 1st flow path 141a because of wettability. On the other hand, since the first electrodes 142a1 to 142a4 are formed only at the center of each side of the first flow path 141a, they are always covered with the first moved fluid Fd1 and are not exposed to the first working fluid Fo1. . Similarly, the second moved fluid Fd2 cannot exist at the corner of the second flow path 141b due to wettability. On the other hand, since the second electrodes 142b1 to 142b4 are formed only at the center of each side of the second flow path 141b, they are always covered with the second moved fluid Fd2 and are not exposed to the second working fluid Fo2. . Therefore, deterioration due to oxidation of the first electrodes 142a1 to 142a4 and the second electrodes 142b1 to 142b4 can be avoided.

  As described above, according to the embodiments of the fifth invention, there is provided a switching device that can stably perform a high-speed switching operation and can suppress deterioration of an electrode.

  The fifth invention is not limited to the above embodiment, and various modifications can be employed within the scope of the fifth invention. For example, as shown in FIG. 63, in the switching device according to the fifth aspect of the present invention having one flow path, there are a large number of relative arrangement relationships among the electrodes, the dielectric and the flow paths.

  In addition, for example, the above-described flow path desirably has a circular cross-sectional shape orthogonal to the streamline direction. In this case, it is desirable to form a grounding region concentrically with the circular shape on the circular outer periphery. Thereby, the waveform at the time of switching operation can be stabilized.

  Furthermore, the drive source (actuator) of the pump of each embodiment is not limited to the piezoelectric film, and may use, for example, an electrostatic force or a deforming force of a shape memory alloy.

  In addition, in each of the above embodiments, the capacitance between the electrodes may be increased by reducing the thickness of the dielectric. For example, nickel can be used as an electrode material, and the surface thereof is oxidized to form a thin film of nickel oxide, which can be used as the above-described dielectric. Further, when platinum is used as the electrode material, a thin film of chromium oxide formed by performing chromium plating on the surface and further oxidizing it can also be used as the above-described dielectric.

  It is also preferable to use an electrode in which thin film dielectrics and thin film electrodes are alternately stacked as a substitute for the above-described electrode (and / or dielectric). According to this, the electrode can be provided with a filtering function of a high-frequency signal to be switched.

  Furthermore, in this application, the 6th invention regarding the switching device which switches by moving the electroconductive moved fluid in a flow path, and its manufacturing method is provided.

  One of the conventionally known switching devices includes an elongated channel (flow channel) filled with a conductive transferred fluid and a gas, a chamber containing gas heating means, and the chamber and the channel are connected to each other. And a sub-channel (communication path) filled with the gas, and the conductive fluid is moved in the channel by heating the gas and expanding the gas by the heating means, whereby the conductive An electric path containing a sexual fluid is opened and closed (see, for example, Japanese Patent Application Laid-Open No. 2002-260499 (page 1-6, FIGS. 65, 67, 68 and 69)).

  On the other hand, the present inventor has developed a switching device 100 having the structure shown in FIGS. FIG. 80 is a schematic cross-sectional view when the switching device 100 is in the first state. FIG. 81 is a schematic cross-sectional view when the switching device 100 is in the second state. The switching device 100 includes a channel 101 having a longitudinal direction as a streamline direction, a pair of electrodes 102a and 102b, a pair of through holes 103a and 103b, a pair of conductors 104a and 104b, a pair of surface wiring films 105a and 105b, and a channel. 101 includes a fluid F (FL, FR) to be moved and an actuator (not shown).

  The fluid F (FL, FR) to be moved is made of mercury, for example. As shown in FIG. 80, when the switching device is in the first state, the fluid F to be moved exists as one lump. As shown in FIG. 81, the fluid F to be moved is separated into fluids FL and FR that are made of two blocks when the actuator is operated and the switching device is in the second state.

  The electrodes 102a and 102b are made of platinum, for example. The electrodes 102 a and 102 b are formed so as to be exposed in the channel 101. The conductors 104a and 104b are accommodated in the through holes 103a and 103b, respectively. The electrode 102a is connected to the surface wiring film 105a through the conductor 104a. The electrode 102b is connected to the surface wiring film 105b through the conductor 104b. Therefore, in the first state, the electrode 102a and the electrode 102b are electrically connected. In the second state, the electrode 102a and the electrode 102b are non-conductive.

  In such a switching device 100, the electrodes 102a and 102b are exposed to the fluids F, FL, and FR in the flow path 101. The fluids F, FL, and FR to be moved vibrate in the flow path 101. Further, convection is generated inside the fluids F, FL, FR to be moved. Therefore, the surfaces of the electrodes 102a and 102b are worn by the fluids F, FL, and FR that are moved. Further, the electrodes 102a and 102b are eluted in the fluids F, FL and FR to be moved.

  As a result, the wettability of the moved fluids F, FL, FR with respect to the electrodes 102a, 102b decreases, and there is a problem that the contact resistance between the electrodes 102a, 102b and the moved fluids F, FL, FR increases. Further, the viscosity of the fluids F, FL, FR increases due to the metal constituting the electrodes 102a, 102b eluted in the fluids F, FL, FR and the metal oxide formed by oxidizing the metals. Therefore, there is a problem that the switching speed is lowered.

  On the other hand, a switching device 200 as shown in FIGS. 82 and 83 is also known (see FIGS. 69 and 70 of Japanese Patent Laid-Open No. 2000-195389). The switching device 200 has a linear first flow. A path 201, a linear second channel 202 orthogonal to the first channel 201, a first actuator 203, a second actuator 204, a first electrode 205, and a second electrode 206 are provided. The first electrode 205 and the second electrode 206 are disposed so as to be exposed in the first flow path 201 at both ends of the first flow path 201.

  When the switching device 200 is in the first state, as shown in FIG. 82, the fluid F1 to be moved is accommodated in the first flow path 201, and the second flow path 202, the first actuator 203, and the second actuator 204 are Contains a working fluid F2. Therefore, the first electrode 205 and the second electrode 206 are in a conductive state.

  The switching device 200 then operates the actuator 203 to send the working fluid F2 into the first flow path 201. As a result, as shown in FIG. 83, the fluid F1 to be moved that existed at the intersection of the first flow path 201 and the second flow path 202 is pushed out of the first flow path 201, and the second flow path 202. It moves to the retention part 202a provided in the. As a result, the moved fluid F1 in the first flow path 201 is separated into two lumps, so that the first electrode 205 and the second electrode 206 are in a non-conductive state. This state is the second state.

  The switching device 200 operates the second actuator 204 when changing from the second state to the first state. Thereby, the to-be-moved fluid F1 which existed in the retention part 202a returns to the cross | intersection part of the 1st flow path 201 and the 2nd flow path 202. FIG. As a result, the moved fluid F1 in the first flow path 201 returns to one lump again, so that the first electrode 205 and the second electrode 206 become conductive.

  Also by this, the 1st electrode 205 and the 2nd electrode 206 are exposed to the to-be-moved fluid F1 in the 1st flow path 201. FIG. Since the fluid F1 is repeatedly separated and integrated, it vibrates and convection occurs inside. The vibration and convection of the fluid F1 to be moved directly affects the first electrode 205 and the second electrode 206. Accordingly, the first electrode 205 and the second electrode 206 are worn by the moved fluid F1 and are eluted into the moved fluid F1. As a result, there is a problem that the deterioration of the electrode described above easily proceeds and the switching performance is lowered such as an increase in the resistance value.

  An object of the sixth invention is to provide a switching device that can avoid the above-mentioned problems. Another object of the sixth invention is to provide a manufacturing method capable of easily manufacturing such a switching device.

  A switching device according to a sixth aspect of the present invention is a flow path forming body that includes therein a flow path whose longitudinal direction is a streamline direction, a conductive transferred fluid accommodated in the flow path, and the transferred fluid. An actuator that moves in the flow path along the streamline direction and at least a pair of electrodes, and the pair of electrodes are in a conductive state via the fluid to be moved in the flow path and the fluid to be moved It is a switching device that can be switched to a non-conducting state by the movement of.

  Further, the flow path forming body includes a first communication path that communicates with the flow path and extends in a direction intersecting with the flow line direction of the flow path at a first predetermined angle, and the first communication path, The fluid to be moved is accommodated so as to maintain a continuous state with the fluid to be moved in the flow path. One of the pair of electrodes is disposed so as to be electrically connected to the fluid to be moved in the flow path via the fluid to be moved accommodated in the first communication path. .

  The first communication passage intersects the streamline direction of the flow path at a first predetermined angle. Therefore, even when the moved fluid in the flow path is moved, the moved fluid in the first communication path does not move, and further, the convection and vibration generated in the moved fluid in the first communication path are Relatively weak. Therefore, one of the pair of electrodes is not easily worn by the fluid to be moved and is not easily eluted into the fluid to be moved. As a result, a switching device in which the contact resistance is difficult to increase and the switching speed is difficult to decrease is provided.

  One aspect of the switching device according to the sixth aspect of the present invention is a flow path forming body including therein a flow path whose longitudinal direction is a streamline direction, a conductive transferred fluid accommodated in the flow path, and the transferred By moving the fluid along the streamline direction in the flow path, one mass of the fluid to be moved is separated into two or more masses of the fluid to be moved, and the two or more masses separated from each other are separated. And a pair of electrodes, the switching device switching a conduction state between the pair of electrodes by movement of the fluid to be moved.

  Further, the flow path forming body includes a first communication path that communicates with the flow path and extends in a direction intersecting with the flow line direction of the flow path at a first predetermined angle, and the first communication path, When the transferred fluid is the single block of the transferred fluid, it is continuous to the same block, and when the transferred fluid is separated into the two or more blocks, the two or more blocks of the transferred fluid The fluid to be moved is accommodated so as to be continuous with one of them. In addition, the flow path forming body includes a second communication path that communicates with the flow path and extends in a direction intersecting the streamline direction of the flow path at a second predetermined angle, and the second communication path, When the transferred fluid is the single block of the transferred fluid, it is continuous to the same block, and when the transferred fluid is separated into the two or more blocks, the two or more blocks of the transferred fluid The fluid to be moved is accommodated so as to be continuous with the other one of them.

  In addition, one of the pair of electrodes is disposed so as to be electrically connected to the moved fluid in the flow path via the moved fluid accommodated in the first communication path, The other electrode of the same pair is arranged so as to be electrically connected to the fluid to be moved in the flow path via the fluid to be moved accommodated in the second communication path. .

  In this case, the first predetermined angle and the second predetermined angle may be angles other than 0 °, and at least one of them may be 90 °.

  The first communication path intersects the streamline direction of the flow path at a first predetermined angle, and the second communication path intersects the streamline direction of the flow path at a second predetermined angle. Therefore, even if the moved fluid in the flow path is moved, the moved fluid in the first communication path and the second communication path does not move, and further, the convection generated in these moved fluids and Vibration is relatively weak. Therefore, the pair of electrodes are not easily worn by the moved fluid and are not easily eluted into the moved fluid. As a result, a switching device in which the contact resistance is difficult to increase and the switching speed is difficult to decrease is provided.

  In another aspect of the switching device according to the sixth invention, a flow path forming body including a flow path having a longitudinal direction as a streamline direction therein, a conductive transferred fluid accommodated in the flow path, and the covered By moving the moving fluid along the streamline direction in the flow path, the lump to be moved is separated into two or more lump to be moved, and two or more separated A switching device comprising an actuator that restores a mass of fluid to be moved to the same mass of fluid and a pair of electrodes, and that switches a conduction state between the pair of electrodes by movement of the fluid to be moved.

  Further, the flow path forming body includes a first communication path having one end communicating with the flow path and the other end extending to a first portion different from the wall constituting the flow path, When the transferred fluid is the single block of the transferred fluid, it is continuous to the same block, and when the transferred fluid is separated into the two or more blocks, the two or more blocks of the transferred fluid The fluid to be moved is accommodated so as to be continuous with one of them. Further, the flow path forming body includes a second communication path having one end communicating with the flow path and the other end extending to a second portion different from the wall constituting the flow path, and the second communication path, When the transferred fluid is the single block of the transferred fluid, it is continuous to the same block, and when the transferred fluid is separated into the two or more blocks, the two or more blocks of the transferred fluid The fluid to be moved is accommodated so as to be continuous with the other one of them.

  In addition, one of the pair of electrodes is formed in a planar shape in the first portion, and the fluid to be moved in the flow path through the fluid to be moved accommodated in the first communication path. The other electrode of the same pair is formed in a planar shape in the second portion and is moved in the second communication path. It is disposed so as to be electrically connected to the fluid to be moved in the flow path via the fluid.

  According to this, the first communication path has one end communicating with the flow path and the other end extending to a first portion different from the wall constituting the flow path. Similarly, the second communication path has one end communicating with the flow path and the other end extending to a second portion different from the wall constituting the flow path. Further, one of the pair of electrodes is formed in a planar shape at the first portion, and the other one of the same pair of electrodes is formed in a planar shape at the second portion.

  That is, the first part and the second part are present in parts other than the narrow channel, and electrodes are formed in the first part and the second part. Therefore, compared to the case where the electrodes are arranged in the channel, A large electrode area can be secured. Thereby, the contact resistance between a to-be-moved fluid and an electrode can be made small, and a high performance switching device can be provided.

  In this case, at least one of the first part and the second part may be located on the outer surface of the flow path forming body, or may be located inside the flow path forming body. In particular, when at least one of the first part and the second part is located on the outer surface of the flow path forming body, a thin film electrode connection line can be easily formed on the outer surface of the flow path forming body. .

  A method for manufacturing a switching device according to a sixth aspect of the present invention is a flow path forming body having a flow path having a longitudinal direction as a streamline direction and a communication path having one end communicating with the flow path and the other end exposed to the outside. And a conductive moved fluid accommodated in the flow path and the communication path, an actuator for moving the moved fluid in the flow path along the streamline direction, and an electrode. A method of manufacturing a switching device, wherein the flow path and the communication path are formed in the flow path forming body, and the electrode is formed on the outer surface of the flow path forming body and around the opening of the communication path. And a step of injecting the fluid to be moved from the opening of the communication path into the flow path and the communication path so that the fluid to be moved exists from the electrode into the flow path. .

  According to this, the process of providing an extra hole for injecting the fluid to be moved into the flow path can be omitted. In addition, the communication path is filled with the fluid to be moved, and the fluid to be moved is sufficiently wetted by the electrode formed in the opening of the communication path, so that the conventional technique shown in FIGS. 80 and 81 is used. In addition, a process for maintaining the airtightness between the through holes 103a and 103b and the conductors 104a and 104b becomes unnecessary.

Embodiments of a switching device according to the sixth invention will be described below with reference to the drawings.
(First embodiment)
FIG. 64 is a plan view of the switching device 10 according to the first embodiment of the sixth invention. 65 is a cross-sectional view of the switching device 10 cut along a plane along line 1-1 in FIG. 66 is a cross-sectional view of the switching device 10 taken along a plane along line 2-2 in FIG. The switching device 10 includes a flow path forming body (base) 10a, surface wiring films 20a and 20b, a first piezoelectric element 21, and a second piezoelectric element 22. In addition, although illustration was abbreviate | omitted, the upper surface of the flow-path formation body 10a is covered with sealing agents, such as resin.

  The flow path forming body 10a has a substantially rectangular parallelepiped shape having sides extending along the X-axis, Y-axis, and Z-axis directions orthogonal to each other. The flow path forming body 10a includes a first pump chamber 11, a second pump chamber 12, a main flow path 13, a first sub flow path 14, a second sub flow path 15, a first communication path 16, and a second communication path 17. Provided inside.

  As shown in FIGS. 65 and 66, the flow path forming body 10a is formed by laminating a plurality of ceramic green sheets to be thin ceramic bodies (hereinafter referred to as “ceramic sheets”) 10a1 to 10a5 in the Z-axis direction. These are formed by firing and integrating them. The ceramic sheet 10a5 is a diaphragm (ceramic diaphragm) made of a thin ceramic plate that can be easily deformed.

  The first pump chamber 11 is a space defined by a through hole formed in the ceramic sheet 10a4, a lower surface of the ceramic sheet 10a5, and an upper surface of the ceramic sheet 10a3. The first pump chamber 11 is located in a portion on the Y axis negative direction side at a substantially central portion in the X axis direction of the flow path forming body 10a. The first pump chamber 11 contains a working fluid F2.

  The first piezoelectric element 21 has an outer shape slightly smaller than that of the first pump chamber 11 in plan view. The first piezoelectric element 21 is located inside the first pump chamber 11 in plan view, and is fixed to the upper surface of the ceramic sheet 10a5. The first piezoelectric element 21 is a film-type piezoelectric element composed of a piezoelectric film and at least a pair of electrodes that sandwich the piezoelectric film, and forms a first pump chamber 11 when a drive voltage is applied between the electrodes. The portion of the ceramic sheet 10a5 is deformed. As a result, the first piezoelectric element 21 increases or decreases the volume of the first pump chamber 11 to increase or decrease the pressure inside the first pump chamber 11. The first pump chamber 11 and the first piezoelectric element 21 constitute a first pump that functions as an actuator for moving the moved fluid F1 in the main flow path 13.

  Similar to the first pump chamber 11, the second pump chamber 12 is a space defined by a through hole formed in the ceramic sheet 10a4, a lower surface of the ceramic sheet 10a5, and an upper surface of the ceramic sheet 10a3. The second pump chamber 12 is located at a portion on the Y axis positive direction side at a substantially central portion in the X axis direction of the flow path forming body 10a. The second pump chamber 12 contains a working fluid F2.

  The second piezoelectric element 22 has an outer shape slightly smaller than the second pump chamber 12 in plan view. The second piezoelectric element 22 is located inside the second pump chamber 12 in plan view, and is fixed to the upper surface of the ceramic sheet 10a5. The second piezoelectric element 22 is the same film type piezoelectric element as the first piezoelectric element 21 and deforms the portion of the ceramic sheet 10a5 that forms the second pump chamber 12 when a drive voltage is applied between the electrodes. Let As a result, the second piezoelectric element 22 increases or decreases the volume of the second pump chamber 12 to increase or decrease the pressure inside the second pump chamber 12. That is, the second pump chamber 12 and the second piezoelectric element 22 constitute a second pump that functions as an actuator for moving the fluid F1 in the main flow path 13.

  The main flow path 13 is a linear space defined by a through hole formed in the ceramic sheet 10a2, an upper surface of the ceramic sheet 10a1, and a lower surface of the ceramic sheet 10a3. The main flow path 13 is located at a substantially central part in the X-axis direction and a substantially central part in the Y-axis direction of the flow path forming body 10a. The main flow path 13 has a longitudinal direction along the X axis, and the X axis direction is a streamline direction. A cross section of the main channel 13 cut along a plane orthogonal to the streamline of the main channel 13 has a rectangular shape. In the vicinity of the central portion of the main flow path 13 in the X-axis direction, the moved fluid F1 is accommodated, and the remaining portion contains the working fluid F2. In addition, the cross-sectional shape of the main flow path 13 does not need to be a rectangle, and may be other shapes such as a circle, an ellipse, and a triangle.

  The first sub-channel 14 is formed by a through hole formed in the ceramic sheet 10a2, a space defined by the upper surface of the ceramic sheet 10a1 and the lower surface of the ceramic sheet 10a3, and a through hole formed in the ceramic sheet 10a3. It is space. The 1st subchannel 14 is located in the X-axis direction approximate center part of channel formation object 10a, and has the longitudinal direction which follows a Y-axis. An end portion of the first sub-channel 14 in the positive Y-axis direction is communicated with a central portion of the main channel 13 in the X-axis direction, and a working fluid ejection port 14 a is formed in the main channel 13. The working fluid ejection port 14a has a substantially rectangular shape. The end of the first sub-channel 14 in the negative Y-axis direction communicates with a through hole formed in the ceramic sheet 10a3, and communicates with the first pump chamber 11 through this through hole. The first sub flow path 14 contains a working fluid F2.

  The second sub-channel 15 includes a through hole formed in the ceramic sheet 10a2, a space defined by the upper surface of the ceramic sheet 10a1 and the lower surface of the ceramic sheet 10a3, and a through hole formed in the ceramic sheet 10a3. It is space. The second sub-channel 15 is connected to both ends of the main channel 13 in the X-axis direction and extends in the Y-axis positive direction, and in the X-axis direction that connects the ends of the portion extending in the Y-axis positive direction. It has a portion extending in the positive direction of the Y-axis from the central portion of the extending portion and the portion extending in the X-axis direction. The end of the portion extending in the positive direction of the Y-axis communicates with a through hole formed in the ceramic sheet 10a3, and communicates with the second pump chamber 12 through this through hole. A working fluid F2 is accommodated in the second sub-flow path 15.

  The first communication path 16 is a cylindrical space constituted by through holes formed in the ceramic sheets 10a2 to 10a5. The lower end of the first communication passage 16 is a position between the X-axis direction central portion (working fluid ejection port 14a) and the X-axis negative direction end portion (portion to which the second sub flow channel 15 is connected) of the main flow path 13. Is connected to the main flow path 13. The first communication path 16 extends along the Z axis. In other words, the first communication path 16 extends in a direction (Z-axis direction) intersecting the streamline direction (X-axis direction) of the main flow path 13 with a first predetermined angle (90 ° in this case) that is not 0 °. Yes. The first communication passage 16 contains the fluid F1 to be moved. As will be described later, the moved fluid F1 accommodated in the first communication path 16 is always continuous with the moved fluid F1 accommodated in the main flow path 13.

  The second communication path 17 is a cylindrical space constituted by through holes formed in the ceramic sheets 10a2 to 10a5. The lower end of the second communication passage 17 is a position between the central portion of the main flow path 13 in the X-axis direction (working fluid injection port 14a) and the positive end portion of the X-axis (the portion to which the second sub flow path 15 is connected). Is connected to the main flow path 13. The second communication path 17 extends along the Z axis. In other words, the second communication path 17 intersects the streamline direction (X-axis direction) of the main flow path 13 with a second predetermined angle that is not 0 ° (here, 90 °, which is the same as the first predetermined angle). It extends in the (Z-axis direction). The second communication passage 17 accommodates the fluid F1 to be moved. As will be described later, the moved fluid F1 accommodated in the second communication passage 17 is always continuous with the moved fluid F1 accommodated in the main flow path 13.

  The surface wiring film 20a is made of, for example, a metal material having conductivity such as platinum or gold and having good wettability with the moving fluid F1 such as mercury. The surface wiring film 20a functions as an electrode and a switch wiring. The surface wiring film 20a is formed on the upper surface of the flow path forming body 10a (that is, the upper surface of the ceramic sheet 10a5). The surface wiring film 20a has a rectangular shape in plan view. The surface wiring film 20a is formed in a region from the approximate center portion in the X-axis direction to the end portion in the X-axis negative direction of the flow path forming body 10a. The surface wiring film 20 a is formed so as to surround the opening that is the upper end portion of the first communication path 16.

  The surface wiring film 20b is a film similar to the surface wiring film 20a except for the position of the surface wiring film 20b. The flow path forming body 10a is formed in a region from a substantially central portion in the X-axis direction to an end portion in the X-axis positive direction. The surface wiring film 20 b is formed so as to surround the opening which is the upper end portion of the second communication path 17. The surface wiring film 20b is separated from the surface wiring film 20a by a predetermined distance. Therefore, the surface wiring film 20b and the surface wiring film 20a are not electrically connected on the upper surface of the ceramic sheet 10a5.

  79, which will be described later, has better wettability with the fluid F1 to be moved around the first communication path 16 on the upper surface of the surface wiring film 20a than the surface wiring film 20a. An electrode 23a made of a metal may be provided. Similarly, an electrode 23b made of a metal having better wettability with the transferred fluid F1 than the surface wiring film 20b may be provided on the upper surface of the surface wiring film 20b and around the second communication path 17. In this case, the surface wiring film 20a and the surface wiring film 20b do not need to have good wettability with the transferred fluid F1.

  The fluid F1 to be moved is an incompressible and conductive fluid. In this example, the fluid F1 to be moved is mercury, but may be a liquid metal such as a gallium alloy. In a normal state (first state, initial state), the fluid F1 to be moved is present as one lump in the substantially central portion of the main flow path 13 in the X-axis direction.

  The working fluid F2 is a fluid that is insoluble in the fluid F1 to be moved, is substantially incompressible, and is insulating (non-conductive). In this example, the working fluid F2 is deionized water, but may be a highly permeable solvent Fluorinert (manufactured by 3M), paraffin-based electrical insulating oil, silicon oil, or the like. In the working fluid F2, the wettability of the working fluid F2 with respect to the wall surface of the main flow path 13 (that is, the surface of the ceramic constituting the flow path forming body 10a) is better than the wettability with respect to the wall surface of the main flow path 13 of the transferred fluid F1. Is selected.

  Next, the operation of the switching device 10 configured as described above will be described with reference to FIGS. 67 and 68. FIG. 67 and 68 are sectional views of the switching device 10 cut at the interface between the ceramic sheet 10a2 and the ceramic sheet 10a3 for convenience. 67 shows a state when the switching device 10 is in the first state (“ON” state), and FIG. 68 shows a state when the switching device 10 is in the second state (“OFF” state).

  In the first state, the switching device 10 applies a voltage to the electrode of the second piezoelectric element 22 to drive the second piezoelectric element 22. Thereby, the working fluid F <b> 2 is discharged from the second pump chamber 12. Therefore, the working fluid F <b> 2 flows into the main flow path 13 from both ends of the main flow path 13 through the second sub flow path 15. As a result, the fluid F1 to be moved exists as one lump in the central portion in the main flow path 13. At this time, as shown in FIGS. 67 and 65, the surface wiring film 20a and the surface wiring film 20b are integrally moved in the first communication path 16, the main flow path 13, and the second communication path 17. The fluid F1 makes a conductive state. In the first state, the first piezoelectric element 21 is not driven.

  Next, the switching device 10 discharges the working fluid F <b> 2 from the first pump chamber 11 by driving the first piezoelectric element 21. Therefore, as shown in FIG. 68, the working fluid F2 flows (discharges and jets) into the main channel 13 from the working fluid ejection port 14a located at the center of the main channel 13.

  As a result, the fluid F1 to be moved is cut at the central portion in the main flow path 13 into two lumps. One lump moves in the main channel 13 in the negative X-axis direction. However, the moved fluid F1 moved in the negative X-axis direction and the moved fluid F1 accommodated in the first communication path 16 are continuous.

  The other lump moves in the positive direction of the X axis in the main flow path 13. However, the moved fluid F1 moved in the positive direction of the X axis and the moved fluid F1 accommodated in the second communication path 17 are continuous.

  Accordingly, the non-conductive working fluid F2 exists between the two separated masses of the moved fluid F1. As a result, the surface wiring film 20a and the surface wiring film 20b are in a non-conductive state. This state is the second state. In the second state, the second piezoelectric element 22 is not driven.

  As described above, the switching device 10 according to the first embodiment includes the flow path forming body 10a including the flow path (main flow path 13) having the longitudinal direction (X-axis direction) in the streamline direction, and the flow Conductive fluid F1 accommodated in a path (main flow path 13) and an actuator (first pump) that moves the fluid F1 to move in the flow path direction in the flow path (main flow path 13) And the second pump) and at least a pair of electrodes (surface wiring films 20a, 20b), and the pair of electrodes (surface wiring films 20a, 20b) are moved fluid F1 in the flow path (main flow path 13). And a switching device that is switched to a non-conductive state (“off” state) by moving (separating / disconnecting) the fluid F1 to be moved.

  Furthermore, the flow path forming body 10a communicates with the flow path (main flow path 13) and has a streamline direction (X-axis direction) of the flow path (main flow path 13) and a first predetermined angle (90 °). The first communication path 16 extending in the intersecting direction (Z-axis direction) is provided, and the first communication path 16 is always maintained in a continuous state with the fluid F1 in the flow path (main flow path 13). Contains the fluid F1 to be moved. One of the pair of electrodes (surface wiring film 20a) is moved fluid F1 in the flow path (main flow path 13) via the moved fluid F1 accommodated in the first communication path 16. Are arranged so as to be electrically connected to each other.

  As described above, the first communication path 16 intersects the streamline direction of the flow path (main flow path 13) at a first predetermined angle. Therefore, even if the moved fluid F1 in the flow path (main flow path 13) is moved, the moved fluid F1 in the first communication path 16 does not move, and further, in the first communication path 16 Convection and vibration generated in the moved fluid F1 are relatively weak. Accordingly, one of the pair of electrodes (surface wiring film 20a) is not easily worn by the moved fluid F1 and is not easily eluted into the moved fluid F1. The same applies to the second communication path 17 and the surface wiring film 20b. As a result, the switching device 10 in which the contact resistance is difficult to increase and the switching speed is difficult to decrease is provided.

  On the other hand, the switching device 10 is accommodated in a flow path forming body 10a having a flow path (main flow path 13) having a streamline direction in the longitudinal direction (X-axis direction) and the flow path (main flow path 13). By moving the transferred fluid F1 and the transferred fluid F1 in the flow path (main flow path 13) along the streamline direction, two or more transferred fluids F1 in one lump are transferred. An actuator (a first pump and a second pump) for separating the two or more lump transferred fluids F1 into the same lump transferred fluid F1. And a pair of electrodes (surface wiring films 20a, 20b), and a switching device that switches a conduction state between the pair of electrodes (surface wiring films 20a, 20b) by movement of the fluid F1 to be moved.

  Further, the flow path forming body 10a communicates with the flow path (main flow path 13) and intersects the streamline direction (X-axis direction) of the flow path (main flow path 13) with a first predetermined angle ( A first communication passage 16 extending in the Z-axis direction), and the first communication passage 16 is continuous with the same mass when the fluid F1 to be moved is the one fluid to be moved F1. When the moving fluid F1 is separated into the two or more lumps, the moved fluid F1 is accommodated so as to be continuous with one of the two or more lumped fluids F1.

  Further, the flow path forming body 10a communicates with the flow path (main flow path 13) and has a second predetermined angle (first predetermined flow path) and a streamline direction (X-axis direction) of the flow path (main flow path 13). The angle may be the same as or different from the angle, both of which are 90 ° in this case.) The second communication passage 17 extends in the intersecting direction (Z-axis direction). When the transferred fluid F1 is the single block of the transferred fluid F1, it is continuous to the same block and when the transferred fluid F1 is separated into the two or more blocks of the two or more blocks The moved fluid F1 is accommodated so as to be continuous with the other one of the moved fluids F1.

  In addition, one of the pair of electrodes (surface wiring film 20a) is moved fluid in the flow path (main flow path 13) via the moved fluid F1 accommodated in the first communication path 16. The other electrode (surface wiring film 20b) of the same pair of electrodes is disposed so as to be electrically connected to F1, and the transferred fluid F1 accommodated in the second communication path 17 is interposed between the other fluids. It is arranged so as to be electrically connected to the fluid F1 to be moved in the flow path (main flow path 13).

  As described above, the first communication path 16 intersects the streamline direction of the flow path (main flow path 13) at a first predetermined angle (an angle other than 0 °, for example, 90 °), and the second communication path 17. Intersects the streamline direction of the flow path (main flow path 13) at a second predetermined angle. Therefore, even if the moved fluid F1 in the flow path (main flow path 13) is moved, the moved fluid F1 in the first communication path 16 and the second communication path 17 does not move. Convection and vibration generated in the transferred fluid F1 are relatively weak. Therefore, the pair of electrodes (surface wiring films 20a and 20b) are not easily worn by the moved fluid F1, and are not easily eluted into the moved fluid F1. As a result, the switching device 10 in which the contact resistance is difficult to increase and the switching speed is difficult to decrease is provided.

  On the other hand, in the switching device 10, the flow path forming body 10 a has a first portion (one end communicating with the flow path (main flow path 13) and the other end different from a wall constituting the flow path (main flow path 13) ( The first communication passage 16 extends to the upper surface of the flow path forming body 10a up to a position closer to the X-axis negative direction than the substantially central portion in the X-axis direction, and the fluid F1 is moved to the first communication passage 16. One of the transferred fluids of the two or more lumps when it is continuous to the same lumps when it is a single lumped fluid F1 and the separated fluid F1 is separated into the two or more lumps. The fluid F1 to be moved is accommodated so as to be continuous.

  Further, the flow path forming body 10a has a second portion (flow path forming body 10a) having one end communicating with the flow path (main flow path 13) and the other end different from the wall constituting the flow path (main flow path 13). A second communication passage 17 extending to a position closer to the X-axis positive direction side than the substantially central portion in the X-axis direction), and the fluid F1 is placed in the second communication passage 17 in the one mass. When it is a moving fluid F1, it is continuous to the same lump, and when the transferred fluid F1 is separated into the two or more lumps, it is continuous to another one of the two or more lumps of the moving fluid F1. As described above, the fluid F1 to be moved is accommodated.

  In addition, one of the pair of electrodes (surface wiring film 20a) is formed in a planar shape in the first portion, and via the moved fluid F1 accommodated in the first communication path 16. It is arranged so as to be electrically connected to the fluid F1 to be moved in the flow path (main flow path 13). Further, the other one of the pair of electrodes (surface wiring film 20b) is formed in a planar shape in the second portion, and through the moved fluid F1 accommodated in the second communication passage 17. It is arranged so as to be electrically connected to the fluid F1 to be moved in the flow path (main flow path 13).

  According to this, the first communication path 16 has one end communicating with the flow path (main flow path 13) and the other end extending to a first portion different from the wall constituting the flow path (main flow path 13). Yes. Similarly, the second communication path 17 has one end communicating with the flow path (main flow path 13) and the other end extending to a second portion different from the wall constituting the flow path (main flow path 13). Furthermore, one of the pair of electrodes (surface wiring film 20a) is formed in a planar shape in the first portion, and the other one of the pair of electrodes (surface wiring film 20b) is the first electrode. Two portions are formed in a planar shape.

  That is, the first part and the second part exist in parts other than the narrow main channel 13, and the electrodes (surface wiring films 20a and 20b) are formed in the first part and the second part. Compared with the case where it arrange | positions in the path | route 13, a large electrode area can be ensured. Thereby, the contact resistance between the to-be-moved fluid F1 and an electrode can be made small, and the high performance switching device 10 can be provided. In addition, at least one of the first part and the second part may be located inside the flow path forming body 10a.

Next, a method for manufacturing the switching device 10 will be described.
(1) As shown in FIG. 69, a ceramic green sheet 10b1 is prepared. The ceramic green sheet 10b1 is a sheet that is fired later to become the ceramic sheet 10a1.
(2) As shown in FIG. 70, a ceramic green sheet 10b2 is prepared. The ceramic green sheet 10b2 is a sheet that is fired later to become the ceramic sheet 10a2. Next, through portions 13b, 14b, and 15b as illustrated are formed in the ceramic green sheet 10b2 by using a processing method such as punching or laser processing. The through hole 13b is a portion that becomes the main flow path 13 described above. The through hole 14b is a portion that will later become the first sub-channel 14. The through hole 15b is a portion that will later become the second sub-channel 15.
(3) As shown in FIG. 71, a ceramic green sheet 10b3 is prepared. The ceramic green sheet 10b3 is a sheet that is fired later to become the ceramic sheet 10a3. Next, through holes 14c, 15c, 16a, and 17a as illustrated are formed in the ceramic green sheet 10b3 by using a processing method such as punching or laser processing. The through hole 14c is a portion that becomes a through hole extending in the Z-axis direction of the first sub-channel 14 described above. The through hole 15c is a portion that becomes a through hole extending in the Z-axis direction of the second sub-flow channel 15 described above. The through-hole 16a and the through-hole 17a are parts constituting a part of the first communication path 16 and a part of the second communication path 17, respectively.
(4) As shown in FIG. 72, a ceramic green sheet 10b4 is prepared. The ceramic green sheet 10b4 is a sheet that is fired later to become the ceramic sheet 10a4. Next, through holes 11a and 12a and through holes 16b and 17b as illustrated are formed in the ceramic green sheet 10b4 by using a processing method such as punching or laser processing. The through hole 11a is a portion that becomes the first pump chamber 11 described above. The through hole 12a is a portion that becomes the second pump chamber 12 described above. The through hole 16b and the through hole 17b are parts constituting a part of the first communication path 16 and a part of the second communication path 17, respectively.
(5) As shown in FIG. 73, a ceramic green sheet 10b5 is prepared. The ceramic green sheet 10b5 is a sheet that is fired later to become the ceramic sheet 10a5. Next, through holes 16c and 17c as illustrated are formed in the ceramic green sheet 10b5 using a processing method such as punching or laser processing. The through-hole 16c and the through-hole 17c are portions that respectively constitute part of the first communication path 16 and part of the second communication path 17 described above.
(6) Next, the ceramic green sheets 10b1 to 10b5 are laminated in the order of the ceramic green sheets 10b1, 10b2, 10b3, 10b4, and 10b5 to form a compact, and the compact is fired. Further, as shown in FIG. 74, the surface wiring films 20a and 20b and the piezoelectric elements 21 and 22 are formed on the upper surface of the ceramic green sheet 10b5. Then, the fluid F1 and the working fluid F2 are filled and injected into the main flow path 13, the first sub flow path 14, and the second sub flow path 15 using the first communication path 16 and the second communication path 17. The working fluid F2 may be filled and injected into the first sub-channel 14 and the second sub-channel 15 from an injection hole provided separately. Specifically, the fluid F1 to be moved is injected from the first communication path 16 and the second communication path 17 by using the press-fit principle of a mercury porosimeter, and then the flow path from a hole for working fluid injection provided separately. The inside of (the main flow path 13, the first sub flow path 14, and the second sub flow path 15) is evacuated and then the working fluid F2 is injected. Finally, the upper part of the device is covered with a sealing agent such as a resin. As described above, the switching device 10 is completed.

  Thus, the manufacturing method forms the flow path (main flow path 13) and the communication path (the first communication path 16, the second communication path 17) in the flow path forming body 10a, and the flow path forming body 10a. Forming the electrodes (surface wiring films 20a, 20b) around the openings of the communication passages (first communication passage 16, second communication passage 17), and the fluid F1 to be moved is the electrode. The fluid F1 is moved from the opening of the communication path (the first communication path 16 and the second communication path 17) so as to exist from the (surface wiring films 20a, 20b) to the flow path (main flow path 13). Injecting into the flow path (main flow path 13) and the communication path (first communication path 16, second communication path 17).

Therefore, it is possible to omit the step of providing an extra hole for injecting the fluid F1 to be moved into the flow path (main flow path 13). Further, the communication path (the first communication path 16 and the second communication path 17) is filled with the moved fluid F1, and the electrode (in this case, the surface wiring film) in which the moved fluid F1 is provided at the opening of the communication path. 20a, 20b) is sufficiently wetted, so that a step of injecting resin or the like is not required in order to maintain the airtightness of the communication path (first communication path 16, second communication path 17). .
(Second Embodiment)
Next, a switching device 30 according to a second embodiment of the sixth invention will be described with reference to FIGS.

  FIG. 75 is a plan view of the switching device 30. 76 is a cross-sectional view of the switching device 30 taken along a plane along line 3-3 in FIG. 77 is a cross-sectional view of the switching device 30 cut along a plane along line 4-4 of FIG. The switching device 30 includes a flow path forming body (base) 30a, surface wiring films 40a and 40b, a first pump 51, and a second pump 52. In addition, although illustration was abbreviate | omitted, the upper surface of the flow-path formation body 30a is covered with sealing agents, such as resin.

  The flow path forming body 30a has a substantially rectangular parallelepiped shape having sides extending along the X-axis, Y-axis, and Z-axis directions orthogonal to each other. The flow path forming body 30a includes a main flow path 33, a first sub flow path 34, a second sub flow path 35, a first communication path 36, and a second communication path 37 therein.

  As shown in FIGS. 76 and 77, the flow path forming body 30a is formed by joining and integrating a flat bulk body 30a1 and a flat bulk body 30a2 in which grooves and through holes are formed. Yes. The bulk body 30a is formed from a ceramic sheet, a glass plate, a Si wafer, or a plastic such as acrylic. Alternatively, the flow path forming body 30a may be obtained by laminating two ceramic green sheets to be the ceramic sheets 30a1 and 30a2 in the Z-axis direction and firing and integrating them.

  The main flow path 33 is a linear space defined by a groove formed on the lower surface side of the ceramic sheet 30a2 and an upper surface of the ceramic sheet 30a1. As with the main flow path 13, the main flow path 33 is located at a substantially central portion in the X-axis direction and a substantially central portion in the Y-axis direction of the flow path forming body 30a. The main flow path 33 has a longitudinal direction along the X axis, and the X axis direction is a streamline direction. A cross section obtained by cutting the main flow path 33 along a plane orthogonal to the streamline of the main flow path 33 has a substantially rectangular shape (or may be a semicircle). The moved fluid F1 is accommodated in the vicinity of the central portion of the main flow path 33 in the X-axis direction, and the working fluid F2 is accommodated in the remaining portion.

  The first sub-channel 34 is formed by a space defined by a groove formed on the lower surface side of the ceramic sheet 30a2 and the upper surface of the ceramic sheet 30a1, and a through hole formed on the upper surface side of the ceramic sheet 30a2. It is space. Similar to the first sub-channel 14, the first sub-channel 34 is located at a substantially central portion in the X-axis direction of the channel-forming body 30a and has a longitudinal direction along the Y-axis. The end of the first sub-channel 34 in the positive Y-axis direction communicates with the central portion of the main channel 33 in the X-axis direction, and forms a working fluid ejection port 34-1 for the main channel 33. The working fluid ejection port 34-1 has a substantially rectangular shape. The end of the first sub-channel 34 in the negative Y-axis direction communicates with a through hole formed on the upper surface side of the ceramic sheet 30a2, and communicates with the first pump chamber 51c of the first pump 51 through this through hole. doing. A working fluid F <b> 2 is accommodated in the first sub-flow path 34.

  The second sub-channel 35 includes a space defined by a groove formed on the lower surface side of the ceramic sheet 30a2 and the upper surface of the ceramic sheet 30a1, and a through hole formed on the upper surface side of the ceramic sheet 30a2. It is space. The second sub-channel 35 is connected to both ends of the main channel 33 in the X-axis direction and extends in the Y-axis positive direction, and in the X-axis direction that connects the ends of the portions extending in the Y-axis positive direction. It has a portion extending in the positive direction of the Y-axis from the central portion of the extending portion and the portion extending in the X-axis direction. The end of the portion extending in the positive direction of the Y axis communicates with a through hole formed on the upper surface side of the ceramic sheet 30a2, and communicates with the second pump chamber 52c of the second pump 52 through this through hole. Yes. A working fluid F2 is accommodated in the second sub-channel 35.

  The first communication path 36 is a cylindrical space constituted by a through hole formed in the ceramic sheet 30a2. The lower end of the second communication passage 36 is between the central portion in the X-axis direction (working fluid ejection port 34-1) of the main flow path 13 and the end portion in the negative X-axis direction (portion to which the second sub flow path 35 is connected). It is connected to the main flow path 33 at the position. The first communication path 36 extends along the Z axis. In other words, the first communication path 36 extends in a direction (Z-axis direction) intersecting the streamline direction (X-axis direction) of the main flow path 33 with a first predetermined angle (90 ° here). In the first communication path 36, the fluid F1 to be moved is accommodated. As will be described later, the moved fluid F1 accommodated in the first communication path 36 is always continuous with the moved fluid F1 accommodated in the main flow path 33.

  The second communication passage 37 is a cylindrical space constituted by a through hole formed in the ceramic sheet 30a2. The lower end of the second communication passage 37 is between the central portion of the main flow path 33 in the X-axis direction (working fluid ejection port 34-1) and the positive end of the X-axis (the portion to which the second sub flow path 35 is connected). It is connected to the main flow path 33 at the position. The second communication path 37 extends along the Z axis. In other words, the second communication passage 37 intersects the streamline direction (X-axis direction) of the main flow path 33 with a second predetermined angle (here, the same 90 ° as the first predetermined angle) (Z-axis direction). It extends to. In the second communication path 37, the fluid F1 to be moved is accommodated. As will be described later, the moved fluid F1 accommodated in the second communication path 37 is always continuous with the moved fluid F1 accommodated in the main flow path 33.

  The surface wiring film 40a is formed of the same metal material as the surface wiring film 20a. The surface wiring film 40a functions as an electrode and a switch wiring. The surface wiring film 40a is formed on the upper surface of the flow path forming body 30a (that is, the upper surface of the ceramic sheet 30a2). The surface wiring film 40a has a rectangular shape in plan view. The surface wiring film 40a is formed in a region from the approximate center portion in the X-axis direction to the end portion in the X-axis negative direction of the flow path forming body 30a. The surface wiring film 40 a is formed so as to surround the opening which is the upper end portion of the first communication path 36.

  The surface wiring film 40b is a film similar to the surface wiring film 40a except for the position of the surface wiring film 40b. The surface wiring film 40b is formed in a region from the approximately center part in the X-axis direction to the end part in the X-axis positive direction of the flow path forming body 30a. The surface wiring film 40 b is formed so as to surround the opening which is the upper end portion of the second communication path 37. The surface wiring film 40b is separated from the surface wiring film 40a by a predetermined distance. Therefore, the surface wiring film 40b and the surface wiring film 40a are not electrically connected on the upper surface of the ceramic sheet 30a2.

  The first pump 51 includes a first pump chamber forming part 51a and a piezoelectric element 51b. The first pump 51 functions as an actuator that moves the fluid F <b> 1 in the main flow path 33. The first pump chamber forming portion 51a forms a first pump chamber 51c whose upper surface is closed and whose lower surface is opened. The upper wall of the first pump forming part 51a is a ceramic diaphragm. The 1st pump 51 is located in the Y-axis negative direction side part in the X-axis direction approximate center part of the flow-path formation body 30a. In the first pump 51, the lower surface of the first pump chamber forming portion 51a is fixed to the upper surface of the flow path forming body 30a (the upper surface of the ceramic sheet 30a2) with an adhesive. A working fluid F2 is accommodated in the first pump chamber 52c.

  The piezoelectric element 51b is fixed to the upper surface of the first pump forming portion 51a. The piezoelectric element 51 b has the same configuration as the piezoelectric element 21. Accordingly, the piezoelectric element 51b deforms the upper surface of the first pump chamber forming portion 51a when a driving voltage is applied between a pair of electrodes (not shown). Thereby, the volume of the 1st pump chamber 51c is increased / decreased, and the fluid inside the 1st pump chamber 51c is pressurized / decompressed.

  The second pump 52 includes a first pump chamber forming portion 52 a and a piezoelectric element 52 b and has the same configuration as the first pump 51. The second pump 52 also functions as an actuator that moves the moved fluid F1 in the main flow path 33. The second pump 52 is located in a portion on the Y axis positive direction side at a substantially central portion in the X axis direction of the flow path forming body 30a. In the second pump 52, the lower surface of the second pump chamber forming portion 52a is fixed to the upper surface of the flow path forming body 30a (the upper surface of the ceramic sheet 30a2) with an adhesive. A working fluid F2 is accommodated in the second pump chamber 52c. The piezoelectric element 52b deforms the upper surface of the second pump chamber forming portion 52a when a driving voltage is applied between a pair of electrodes (not shown). Thereby, the volume of the 2nd pump chamber 52c is increased / decreased, and the fluid inside the 2nd pump chamber 52c is pressurized / decompressed.

  The switching device 30 configured in this manner operates in the same manner as the switching device 10. That is, the switching device 30 drives the second pump 52 in the first state. Thereby, the working fluid F2 is discharged from the second pump chamber 52c. Therefore, the working fluid F <b> 2 flows into the main flow path 33 from both ends of the main flow path 33 via the second sub flow path 35. As a result, the fluid F1 to be moved exists as one lump in the central portion in the main flow path 33. At this time, the surface wiring film 40 a and the surface wiring film 40 b are brought into conduction by the moved fluid F <b> 1 that is integrally continuous in the first communication path 36, the main flow path 33, and the second communication path 37. In the first state, the first pump 51 is not driven.

  Next, the switching device 30 drives the first pump 51 to discharge the working fluid F2 from the first pump chamber 51c. Accordingly, the working fluid F <b> 2 flows (discharges and jets) into the main channel 33 from the working fluid injection port 34-1 positioned at the center of the main channel 33. As a result, the fluid F1 to be moved is cut at the central portion in the main flow path 33 into two lumps, and moves in the streamline direction in the main flow path 33.

  The two separated lumps become one lump in the vicinity of the X-axis negative direction end and the X-axis positive direction end in the main flow path 33. The moved fluid F1 moved in the negative X-axis direction and the moved fluid F1 accommodated in the first communication path 36 are continuous. Further, the moved fluid F1 moved in the positive direction of the X axis and the moved fluid F1 accommodated in the second communication path 37 are continuous. At this time, the working fluid F <b> 2 flows into the central portion of the main flow path 13.

  Accordingly, the non-conductive working fluid F2 exists between the two separated masses of the moved fluid F1. As a result, the surface wiring film 40a and the surface wiring film 40b become non-conductive. This state is the second state. Note that the second pump 52 is not driven in the second state.

  As described above, the switching device 30 has the same configuration as the switching device 10 and operates in the same manner as the switching device 10. Therefore, the switching device 30 has an advantage that the switching device 10 has.

Next, a method for manufacturing the switching device 30 will be described with reference to FIG.
(1) As shown in FIG. 78A, a ceramic green sheet is prepared and fired to obtain a ceramic sheet 30a1.
(2) A ceramic green sheet is prepared and fired to obtain a plate body that becomes the ceramic sheet 30a2. Then, as shown in FIGS. 78B and 78C, grooves and through holes as shown in the figure are formed using an appropriate processing method such as laser processing, blasting, and cutting. The groove 33a is a portion that becomes the main flow path 33 described above. The groove 34 a and the through holes 34 a and 34 b are portions that will later become the first sub-flow path 34. The groove 35a and the through holes 35a and 35b are portions that will later become the second sub-passage 35. 78 (B) and 78 (C) are views of the ceramic sheet 30a2 as viewed from the back surface and the front surface, respectively.
(3) Next, the ceramic sheet 30a1 and the ceramic sheet 30a2 are laminated and integrated by adhesion or the like to obtain a formed body SK.
(4) Next, as shown in FIG. 78 (D), the surface wiring films 40a and 40b are formed on the surface of the molded body SK, and the first pump 51 and the second pump manufactured separately. 52 is fixed with an adhesive.
(5) Next, the moving fluid F1 and the working fluid F2 are filled into the main flow path 33, the first sub flow path 34, and the second sub flow path 35 using the first communication path 36 and the second communication path 37. inject. Finally, the upper part of the device is covered with a sealing agent such as a resin. As described above, the switching device 30 is completed.

  This manufacturing method can also omit the step of providing an extra hole for injecting the fluid F1 to be moved into the flow path (main flow path 33), as in the manufacturing method of the switching device 10 of the first embodiment. Further, the communication path (the first communication path 36 and the second communication path 37) is filled with the moved fluid F1, and the electrode (in this case, the surface wiring film) in which the moved fluid F1 is provided at the opening of the communication path. 40a, 40b) is sufficiently wetted, so that a step of injecting resin or the like is not required in order to maintain the airtightness of the communication path (first communication path 36, second communication path 37). .

  As described above, each embodiment of the switching device according to the sixth invention is a switching device having high reliability and durability that does not cause an increase in contact resistance or a decrease in switching speed. . Further, each embodiment of the switching device according to the sixth invention can be manufactured by a simple method and can be manufactured at low cost.

  The sixth invention is not limited to the above-described embodiment, and various modifications can be employed within the scope of the sixth invention. For example, as shown in FIG. 79, on the upper surface of the surface wiring film 20a and around the first communication path 16, an electrode made of a metal having better wettability with the fluid F1 to be moved than the surface wiring film 20a. 23a may be provided. Similarly, an electrode 23b made of a metal having better wettability with the transferred fluid F1 than the surface wiring film 20b may be provided on the upper surface of the surface wiring film 20b and around the second communication path 17.

  Furthermore, as shown in FIG. 79, electrodes 24 a and 24 b may be provided on the wall surface of the main channel 13. In this case, it is desirable to select the material of the electrodes 24a and 24b so that the wettability of the transferred fluid F1 with respect to the electrodes 24a and 24b is better than the wettability of the transferred fluid F1 with respect to the wall surface of the main channel 13. .

  Furthermore, in this application, 7th invention regarding the switching device which switches by moving the electroconductive to-be-transferred fluid in a flow path is provided. .

  One conventionally known switching device includes an elongated channel (flow channel) filled with a conductive transferred fluid and a gas, a chamber containing gas heating means, and a chamber and a channel filled with the gas. A sub-channel (communication path) that is connected and filled with the gas, the gas is expanded by heating the gas by the heating means, and the fluid to be moved is moved in the channel, thereby An electric path including a fluid to be moved is opened and closed (see, for example, Japanese Patent Application Laid-Open No. 2002-260499 (page 1-6, FIGS. 85, 87, 88, and 89)).

  This switching device includes a heating means as an actuator. On the other hand, a switching device using a pump that uses a piezoelectric film with a small amount of heat generation as a drive source as an actuator is also conceivable. However, regardless of the amount of heat generated, each device has a heat source.

  On the other hand, in such a switching device, an electric signal flows through a conductive fluid (for example, mercury) that inevitably has resistance. Therefore, the temperature of the fluid to be moved rises due to Joule heat. Therefore, in such a switching device, an increase in device internal temperature during switching is inevitable.

  On the other hand, depending on the combination of the electrode material and the material of the fluid to be moved, the electrode and the fluid to be moved may react chemically. Furthermore, there is an electrode that is oxidized by a trace amount of oxygen present in the flow path. Such a chemical reaction is activated as the temperature inside the device increases. For this reason, as the internal temperature of the device increases, the electrode is likely to be deteriorated by a chemical reaction, and as a result, there is a problem that the resistance of the signal path increases.

In addition, when the device internal temperature rises, the electrode material dissolves (elutes) in the transferred fluid, or the transferred fluid itself easily reacts with a trace amount of oxygen in the flow path. Thereby, the viscosity of the fluid to be moved may increase. Such an increase in viscosity becomes a factor that makes it difficult to move the fluid to be moved at high speed in the flow path. Moreover, when the reaction of the fluid to be moved proceeds, the wettability of the fluid to be moved with respect to the channel wall surface may be improved. Such a change in the wettability of the fluid to be moved increases the adhesion force between the fluid to be moved and the wall surface of the flow path, which also makes it difficult to move the fluid to be moved at high speed in the flow path.
(Summary of Invention)
The seventh invention is made to cope with the above-mentioned problem, and one of its purposes is to avoid the above-mentioned problem by suppressing the temperature rise inside the switching device and to enable high-speed switching operation. It is another object of the present invention to provide a switching device with little performance deterioration.

  According to a seventh aspect of the present invention, there is provided a switching device comprising: a conductive moved fluid housed in a flow path; at least a pair of electrodes; and conduction between the pair of electrodes by moving the moved fluid in the flow path. And an actuator for switching a state.

  Furthermore, a switching device according to a seventh aspect of the present invention includes a base body having a space for forming the flow path therein. Further, at least one of the pair of electrodes is a cylindrical body made of a metal having at least one end face open, and a portion including the open end face is a space for forming a flow path of the base body. It is the cylindrical electrode arrange | positioned at one part. And the flow path of this switching device is comprised by the inside of the said cylindrical electrode, and the part in which the said cylindrical electrode is not arrange | positioned among the space for forming the flow path of the said base | substrate.

  According to this, a cylindrical electrode comprises a part of flow path. Therefore, since the electrically conductive fluid (generally, liquid metal) moves inside the cylindrical electrode, the heat exchange rate between the interface of the fluid to be transferred and the cylindrical electrode that is solid increases. That is, the heat inside the substrate is efficiently transmitted to the cylindrical electrode via the fluid to be moved. As a result, even if the fluid to be moved has a local high temperature portion, the heat of the high temperature portion is effectively transmitted and diffused to the low temperature cylindrical electrode as the fluid to be moved moves. Furthermore, convection occurs in the fluid to be moved, and this also effectively transfers heat to the cylindrical electrode. Accordingly, the part including the other end face of the cylindrical electrode extends to the outside of the base, or the part including the other end face of the cylindrical electrode is disposed in the base and includes the other end face. By providing a heat conductor (for example, a heat sink) connected to the base and extending to the outside of the base, heat generated inside the base (inside the device) can be easily taken out of the base. As a result, since the temperature rise inside the substrate is suppressed, it is difficult for the electrodes to deteriorate and the characteristics of the fluid to be moved to change, so that switching with low resistance and high-speed switching operation can be achieved stably over a long period of time. A device is provided.

  In this case, it is preferable that both of the pair of electrodes are the cylindrical electrodes. According to this, a larger amount of heat can be transmitted to the outside of the substrate.

  When both of the pair of electrodes are the cylindrical electrodes, the base body includes a linear through space as a space for forming the flow path, and the pair of electrodes has the open end faces. It is preferable that they are arranged in the through space so as to face each other. Since it is easy to form a linear through space with respect to the substrate, the above configuration provides a switching device with a simple structure and easy to manufacture. In this case, you may extend the part containing the other end surface of the said cylindrical electrode to the exterior of a base | substrate.

  In addition, when both of the pair of electrodes are the cylindrical electrodes, the base is a linear space as a space for forming the flow path, and is the same at a predetermined angle other than 180 °. Each of the electrodes has a space extending from the intersecting portion to the outer surface of the substrate, and the pair of electrodes are disposed on the substrate such that the open end surfaces thereof face the intersecting portion. It is preferable that they are arranged. In this case, it is desirable that the predetermined angle is approximately 90 °. Moreover, you may extend the part containing the other end surface of the said cylindrical electrode to the exterior of a base | substrate.

  According to this, for example, a T-shaped through path is formed on the base, a switching device in which a cylindrical electrode is inserted and arranged from three sides, and a V-shaped through path is formed on the base. It is possible to obtain a switching device in which cylindrical electrodes are inserted and arranged in those through paths.

  In any one of the above switching devices, the actuator discharges the working fluid to a portion of the space for forming the flow path of the base body where the cylindrical electrode is not disposed, and exists in the portion. It can be configured to cut the transferred fluid.

  In addition, when both of the pair of electrodes are cylindrical electrodes, the base body, as a space for forming the flow path, extends in parallel with the linear first space and communicates with the first space. At least a pair of second and third spaces, and the pair of electrodes are disposed in the second space and the third space, respectively, so that the opened end faces communicate with the first space. The actuator is preferably configured to move the fluid to be moved in a streamline direction of a linear space of the base body.

  According to this, for example, it is possible to use an actuator that discharges the working fluid toward the end of the moving fluid so that the moving fluid reciprocates in the linear flow path of the substrate.

  The actuator of any of the above switching devices is provided with a pump chamber in which the volume is changed by the operation of the piezoelectric / electrostrictive film and the piezoelectric / electrostrictive film and the working fluid is accommodated. It is preferable that the working fluid stored in the pump chamber is discharged toward the fluid to be moved in the flow path.

  Compared to actuators that move the fluid to be moved by using gas expansion by heating means or volume expansion accompanying liquid vaporization by heating means, a pump using a piezoelectric / electrostrictive film has a very fast response operation, so it is faster. Switching operation can be performed. In addition, since the piezoelectric / electrostrictive film generally generates a smaller amount of heat than the heating means, changes in the electrode and the fluid to be moved can be further suppressed.

  In addition, the actuator of any of the above switching devices includes a heating unit and a chamber that accommodates the liquid. The liquid in the chamber is heated and vaporized by the heating unit, and the volume expansion accompanying the vaporization is used. The fluid to be moved in the flow path may be moved.

  Further, the actuator includes a heating means and a chamber for containing the gas, and heats the gas in the chamber by the heating means, and utilizes the volume expansion of the gas accompanying the heating to cover the object in the flow path. It may be configured to move the moving fluid.

Embodiments of the switching device according to the seventh invention will be described below with reference to the drawings.
(First embodiment)
FIG. 84 is a plan view of the switching device 10 according to the first embodiment of the seventh invention. FIG. 85 is a cross-sectional view of the switching device 10 in the first state taken along a plane along line 1-1 in FIG. 86 is a cross-sectional view of the switching device 10 in the second state taken along the plane along line 1-1 in FIG.

  The switching device 10 includes a base 11, a pair of electrodes 12 a and 12 b, and a pump 13.

  The base body (substrate) 11 has a substantially rectangular parallelepiped shape having sides extending along the X-axis, Y-axis, and Z-axis directions orthogonal to each other. The base 11 is formed by thermally fusing a plurality of quartz substrates. The substrate 11 may be formed by laminating ceramic green sheets that are ceramic thin plates (hereinafter referred to as “ceramic sheets”) in the Z-axis direction, and firing and integrating them. The substrate 11 can also be formed of plastic. Furthermore, the substrate 11 can also be manufactured using a micromachine process.

  The base body 11 includes a through space 11a that extends linearly along the X-axis direction at a substantially central part in the Y-axis direction and a substantially central part in the Z-axis direction of the base body 11. The through space 11 a has a hollow cylindrical shape and penetrates the base body 11. Therefore, the cross section obtained by cutting the through space 11a along a plane orthogonal to the X-axis direction (the axial direction of the through space 11a) is circular. The through space 11a is a space for forming a flow path.

  The through space 11a having a circular cross section is formed by machining or etching a groove having a semicircular cross section on each surface of two plate bodies (members constituting the base body 11). Two plates can be bonded to each other so as to face each other. Moreover, although a process is not easy, a hole with a circular cross section can also be formed in the base | substrate 11 with a drill.

  On the other hand, the cross section of the through space 11a may be a substantially square shape or a substantially triangular shape. The through space 11a having these cross-sectional shapes can be manufactured by an appropriate method such as sandblasting, machining, laser processing, wet etching, and dry etching. In this case, the corners of the quadrangle or triangle have an arc shape. The shape and manufacturing method of the through space described above are similarly applied to other through spaces (spaces for forming a flow path) described below.

  Furthermore, the cross section of the through space 11a may be substantially elliptical or substantially oval. The through space 11a having a substantially oval or oval cross section can be formed by using the same method as the above-described method for producing the through space 11a having a circular cross section and the through space 11a having a substantially quadrangular cross section.

  Further, the base body 11 includes a communication passage (working fluid supply passage) 11b at a substantially central portion in the X-axis direction and a substantially central portion in the Y-axis direction of the base body 11. The communication path 11b has a hollow cylindrical shape and extends in the Z-axis direction. Therefore, the streamline direction of the communication path 11b is parallel to the Z axis, and the cross-sectional shape of the communication path 11b is circular. One end of the communication passage 11b communicates with the through space 11a and forms a discharge port 11c in the through space 11a. The other end of the communication path 11b reaches the upper surface of the base body 11 along the XY plane.

  In this way, the hole extending in the direction perpendicular to the XY plane of the base 11 has a circular hole (in the case where the base is a laminate of several plates, in a direction perpendicular to the plane of the plate. The hole having an axis can be easily formed by using a processing method such as machining, laser processing, and ultrasonic processing.

  The electrode 12a is a hollow cylindrical body having one end face (one end) opened and the other end face (other end) closed. Hereinafter, such an electrode is also referred to as a “tubular electrode”. The electrode 12a is made of a conductive metal. In this example, the electrode 12a is made of platinum. Copper, nickel, etc. can also be used as the material of the electrode 12a. The outer diameter (outer diameter, outer shape) of the electrode 12a matches the diameter (inner diameter, inner shape) of the through space 11a.

  The part including the opened one end of the electrode 12a is disposed so as to be inserted into the through space 11a. The opened one end of the electrode 12a is located on the X-axis negative direction side with respect to the connection portion (that is, the portion where the discharge port 11c is formed) of the through space 11a and the communication passage 11b. The other closed end of the electrode 12a is positioned outside the base 11 in the negative X-axis direction. The electrode 12a is electrically connected to an electric circuit (not shown) outside the base body 11.

  The electrode 12b has the same configuration as the electrode 12a. The electrode 12b is made of platinum. The part including the open end of the electrode 12b is arranged so as to be inserted into the through space 11a. The opened one end of the electrode 12b is located on the X-axis positive direction side with respect to a connection portion (that is, a portion where the discharge port 11c is formed) of the through space 11a and the communication passage 11b. The other closed end of the electrode 12b is located outside the base 11 in the positive X-axis direction. The electrode 12b is electrically connected to an electric circuit (not shown) outside the base body 11.

  That is, each of the electrodes 12a and 12b is a cylindrical body made of a metal having one open end face, and a portion including the open end face is a space (through space) for forming a flow path of the base body 11. A portion of the electrode 11a that includes the other end surface is a cylindrical electrode that extends to the outside of the substrate 11. Further, the open end face of the electrode 12a and the open end face of the electrode 12b are disposed in the through space 11a so as to face each other.

  When the cross section of the through space 11a is substantially square, substantially triangular, substantially elliptical, or substantially oval, the outer shape of the cross section of the cylindrical electrodes 12a and 12b is made to match the cross sectional shape of the through space 11a. In this case, when the cylindrical electrodes 12a and 12b are inserted and disposed in the through space 11a, a gap may be generated between the outside of the cylindrical electrodes 12a and 12b and the wall surface of the through space 11a. Therefore, it is desirable to fill this gap with resin or the like in order to reduce pressure loss. In addition, in order to efficiently conduct heat conduction between the cylindrical electrodes 12a and 12b and the substrate 11, a material that fills the above-described gap preferably has a high heat conductivity. Examples of this material include a resin mixed with a filler having a high thermal conductivity such as aluminum nitride.

  The switching device 10 configured as described above includes a linear flow path including a pair of electrodes 12a and 12b and a portion of the through space 11a where the same pair of electrodes 12a and 12b does not exist. . In this linear flow path, the fluid F1 is accommodated, and the gas G1 is accommodated in a portion where the fluid F1 is not accommodated. The gas G1 is an inert gas such as nitrogen or helium. Further, the communication path 11b is connected to the portion of the through space 11a where the pair of electrodes 12a and 12b do not exist via the discharge port 11c. The working fluid F2 is accommodated in the communication path 11b.

  The pump 13 is a piezoelectric pump including a pump chamber forming portion 13a and a piezoelectric element 13b. The pump 13 functions as an actuator that switches a conduction state between the pair of electrodes 12a and 12b. The pump 13 is fixed to the upper surface of the base 11 by baking or an adhesive.

  The pump chamber forming portion 13a forms a pump chamber 13c whose upper surface is closed and whose lower surface is opened. The upper wall of the pump chamber forming portion 13a is a ceramic diaphragm. The pump chamber 13c is a substantially square space in plan view. The working fluid F2 is accommodated in the pump chamber 13c. The pump chamber 13c is connected to the communication path 11b.

  The piezoelectric element 13b is fixed to the upper surface of the pump chamber forming portion 13a. The piezoelectric element 13b has an outer shape slightly smaller than the pump chamber 13c in plan view. The piezoelectric element 13b is located inside the pump chamber 13c in plan view. The piezoelectric element 13b is integrally fixed by firing on the upper wall of the pump chamber forming portion 13a. The piezoelectric element 13b is a film-type piezoelectric element including a piezoelectric film and at least a pair of electrodes that sandwich the piezoelectric film.

  When a driving voltage is applied between the electrodes of the piezoelectric element 13b, the piezoelectric element 13b deforms the upper wall of the pump chamber 13c and increases or decreases the volume of the pump chamber 13c. By this action, the pump 13 pressurizes and depressurizes (discharges and sucks) the working fluid F2 inside the pump chamber 13c.

  The fluid F1 to be moved is an incompressible and conductive fluid. In this example, the fluid F1 to be moved is mercury, but may be a liquid metal such as a gallium alloy.

  The working fluid F2 is a fluid that is insoluble in the fluid F1 to be moved, is substantially incompressible, and is insulating (non-conductive). In this example, the working fluid F2 is deionized water. As the working fluid F2, highly permeable solvent Fluorinert (manufactured by 3M), paraffin-based electrical insulating oil, silicon oil, or the like can also be used. In the working fluid F2, the wettability with respect to the wall surface of the flow path of the working fluid F2 (that is, the quartz surface constituting the base 11, the inner wall surfaces of the electrodes 12a and 12b) is wetted with respect to the wall surface of the flow path of the fluid F1 to be moved. A fluid that is better than the properties is selected. As a result, the moved fluid F1 is present in the flow path as a lump. However, it is desirable that the end face disposed in a part of the through space 11a of the electrodes 12a and 12b and the fluid F1 to be moved have good wettability.

  Next, the operation of the switching device 10 configured as described above will be described. The switching device 10 does not apply a voltage to the electrode of the piezoelectric element 13b and does not operate the pump 13 in the first state. At this time, as shown in FIG. 85, the gas G1 exists at both ends of the flow path, and the fluid F1 to be moved exists as one lump in the center of the flow path. Therefore, the electrode 12a and the electrode 12b are brought into a conductive state (“ON” state) via the moved fluid F1.

  Next, the switching device 10 applies a voltage to the electrode of the piezoelectric element 13b. Thereby, since the volume of the pump chamber 13c decreases, the pump 13 discharges the working fluid F2 from the pump chamber 13c to the communication path 11b. Therefore, the working fluid F2 is discharged (injected) into the flow path from the discharge port 11c. As a result, as shown in FIG. 86, the fluid F1 to be moved is cut in the flow path to form two lumps.

  One lump of the fluid F1 to be moved moves in the negative direction of the X axis in the flow path. Another mass of the fluid to be moved F1 moves in the positive direction of the X axis in the flow path. As a result, since the non-conductive working fluid F2 exists between the transferred fluid F1 separated into the two masses, the electrode 12a and the electrode 12b are in a non-conductive state ("off" state). Become. At this time, the gas G1 present at both ends of the flow path is compressed.

  Next, the switching device 10 stops applying voltage to the electrode of the piezoelectric element 13b. Thereby, the volume of the pump chamber 13c increases toward the initial volume. Accordingly, the pump 13 sucks the working fluid F2 from the flow path to the pump chamber 13c via the communication path 11b (discharge port 11c). At this time, the gas G1 existing at both ends of the flow path expands. As a result, each of the separated fluids F1 that have been separated moves toward the center of the flow path and returns to a single mass. Therefore, the electrode 12a and the electrode 12b become conductive again through the moved fluid F1. The switching device 10 switches the conduction state between the pair of electrodes 12a and 12b by repeatedly performing the above operation.

  As described above, the switching device 10 includes the cylindrical electrodes (electrode 12a and electrode 12b) that constitute a part of the flow path, and the conductive moving fluid F1 is inside the cylindrical electrode. Move (vibrate). Accordingly, the heat exchange rate between the interface of the fluid F1 to be moved and the solid cylindrical electrodes 12a and 12b is increased. That is, the heat inside the substrate 11 is efficiently transmitted to the cylindrical electrodes 12a and 12b via the fluid F1 to be moved. As a result, even if the moved fluid F1 has a locally high temperature portion, the heat of the high temperature portion is effectively transferred to the low temperature cylindrical electrodes 12a and 12b as the moved fluid F1 moves. Diffused. Furthermore, convection is generated in the fluid F1, and heat is effectively transmitted to the cylindrical electrodes 12a and 12b.

  Further, the portions including the other end faces of the cylindrical electrodes 12 a and 12 b extend to the outside of the base 11. Therefore, the heat generated inside the substrate 11 (inside the device 10) can be easily taken out of the substrate, and the temperature rise inside the substrate 11 is suppressed. As a result, the progress of electrode deterioration due to the chemical reaction between the electrodes 12a and 12b and the fluid F1 to be moved and the oxidation of the electrodes 12a and 12b due to the trace amount of oxygen present in the flow path is suppressed. Further, dissolution (elution) of the electrode material into the transferred fluid F1 and reaction between the trace amount of oxygen in the flow path and the transferred fluid F1 itself are suppressed. Therefore, the switching device 10 has a low resistance and can achieve a high-speed switching operation stably over a long period of time.

  In the switching device 10, the portion including the other end faces of the cylindrical electrodes 12 a and 12 b extends to the outside of the base 11, but the portion including the other end faces of the cylindrical electrodes 12 a and 12 b is used as the base. A heat conductor (for example, a heat sink) connected to a portion including the other end face and extending to the outside of the base 11 can be provided. Also by this, since the heat inside the base body 11 is easily transmitted to the outside of the base body 11 by the fluid F1, the cylindrical electrodes 12a and 12b, and the heat conductor, the temperature rise inside the base body 11 is suppressed. Such a modification can be similarly applied to other embodiments described below.

Further, in the switching device 10, both the pair of electrodes 12a and 12b are cylindrical electrodes, and the base body 11 includes a linear through space 11a as a space for forming a flow path, and the pair of electrodes 12a. , 12b are arranged in the through space 11a so that the opened end faces face each other. Thus, since it is relatively easy to form the linear through space 11a with respect to the base 11, the switching device 10 has a simple structure and is easy to manufacture.
(Second Embodiment)
Next, the switching device 20 which concerns on 2nd Embodiment of 7th invention is demonstrated with reference to FIG. 87 thru | or FIG. FIG. 87 is a plan view of the switching device 20. 88 is a cross-sectional view of the switching device 20 taken along a plane along line 2-2 in FIG. 89A and 89B are diagrams for explaining the operation of the switching device 20, wherein FIG. 89A is a sectional view of the switching device 20 in the first state, and FIG. 89B is a sectional view of the switching device 20 in the second state. It is.

  The switching device 20 includes a base 21, a first electrode 31, a second electrode 32, a third electrode 33, a first pump 41 and a second pump 42.

  The base body 21 has a substantially rectangular parallelepiped shape having sides extending along the X-axis, Y-axis, and Z-axis directions orthogonal to each other. The base 21 is formed by the same material and method as the base 11.

  The base 21 includes a first space 21a for forming the first flow path and a second space 21b for forming the second flow path. The first space 21 a is formed at the approximate center of the base 21 in the Y-axis direction and at the approximate center of the Z-axis direction. The first space 21a is a cylindrical space that extends linearly along the X-axis direction at the substantially central portion in the Y-axis and Z-axis directions of the base body 21. The first space 21 a penetrates the base body 21.

  The second space 21b is formed at a substantially central portion in the X-axis direction and a substantially central portion in the Y-axis direction of the base body 21. The second space 21b is a cylindrical space that extends linearly along the Z-axis direction. One end of the second space 21b is connected to the first space 21a at the center in the X-axis direction of the first space 21a. The other end of the second space 21b reaches the lower surface of the base 21.

  The base 21 has a first communication passage (first working fluid supply passage) 21c at a position between the substantially central portion in the Y-axis direction of the base 21 and between the substantially central portion in the X-axis direction and the end portion in the negative X-axis direction. I have. The first communication path 21c has a hollow cylindrical shape and extends in the Z-axis direction. Therefore, the streamline direction of the first communication path 21c is parallel to the Z axis. One end of the first communication path 21c communicates with the first space 21a. Thereby, the 1st discharge port 21c1 is formed in the position between the X-axis direction approximate center part and X-axis negative direction edge part of the 1st space 21a. The other end of the first communication path 21 c reaches the upper surface of the base body 21. The cross-sectional shape of the first communication path 21c is a circle. A working fluid F2 is accommodated in the first communication path 21c.

  The base 21 has a second communication passage (second working fluid supply passage) 21d at a position between the substantially central portion in the Y-axis direction of the base 21 and between the substantially central portion in the X-axis direction and the end portion in the positive X-axis direction. I have. The second communication path 21d has the same hollow cylindrical shape as the first communication path 21c and extends in the Z-axis direction. Accordingly, the streamline direction of the second communication path 21d is parallel to the Z axis. One end of the second communication path 21d communicates with the first space 21a. Thereby, the 2nd discharge outlet 21d1 is formed in the position between the X-axis direction approximate center part and the X-axis positive direction edge part of the 1st space 21a. The other end of the second communication path 21 d reaches the upper surface of the base body 21. The working fluid F2 is accommodated in the second communication path 21d.

  The first electrode 31 has the same configuration as the electrode 12a. The diameter (outer diameter) of the first electrode 31 coincides with the diameter (inner diameter) of the first space 21a. A portion including the opened one end of the first electrode 31 is disposed so as to be inserted into the first space 21a. One open end of the first electrode 31 is located closer to the X-axis negative direction side than the connection location of the first space 21a and the first communication passage 21c (that is, the location where the first discharge port 21c1 is formed). Yes. The other closed end of the first electrode 31 is located outside the base 21 in the X-axis negative direction. The first electrode 31 is electrically connected to an electric circuit (not shown) outside the base body 21.

  The second electrode 32 has the same configuration as the electrode 12a. Accordingly, the diameter of the second electrode 32 matches the diameter of the first space 21a. The portion including the opened one end of the second electrode 32 is disposed so as to be inserted into the first space 21a. The open end of the second electrode 32 is located on the X-axis positive direction side with respect to the connection location of the first space 21a and the second communication passage 21d (that is, the location where the second discharge port 21d1 is formed). Yes. The other closed end of the second electrode 32 is positioned outside the base 21 in the positive direction of the X axis. The second electrode 32 is electrically connected to an electric circuit (not shown) outside the base 21.

  The third electrode 33 also has the same configuration as the electrode 12a. The diameter of the third electrode 33 coincides with the diameter of the second space 21b. A portion including the opened one end of the third electrode 33 is disposed so as to be inserted into the second space 21b. One open end of the third electrode 33 is located at a connection point between the first space 21a and the second space 21b. The other closed end of the third electrode 33 is located outside the base 21 in the negative Z-axis direction. The third electrode 33 is electrically connected to an electric circuit (not shown) outside the base body 21.

  The flow path of the switching device 20 configured as described above includes the first electrode 31, the second electrode 32, and a portion of the first space 21a where the first electrode 31 and the second electrode 32 do not exist. And a second flow path constituted by the third electrode 33.

  The first pump 41 has the same configuration as the pump 13. That is, the first pump 41 is a piezoelectric pump including a first pump chamber forming portion 41a and a first piezoelectric element 41b. The first pump chamber forming portion 41a forms a first pump chamber 41c similar to the pump chamber 13c. The first pump 41 is fixed to the upper surface of the base 21 by baking or an adhesive. The first pump 41 is substantially in the center in the Y-axis direction, and is located closer to the X-axis negative direction side than the X-axis direction center. A working fluid F2 is accommodated in the first pump chamber 41c. The first pump chamber 41c is connected to the first communication path 21c.

  The second pump 42 has the same configuration as the pump 13. That is, the second pump 42 is a piezoelectric pump including a second pump chamber forming portion 42a and a second piezoelectric element 42b. The second pump chamber forming part 42a forms a second pump chamber 42c similar to the pump chamber 13c. The second pump 42 is fixed to the upper surface of the base 21 by baking or an adhesive. The working fluid F2 is accommodated in the second pump chamber 42c. The second pump chamber 42c is connected to the second communication path 21d.

  As will be described later, the first pump 41 and the second pump 42 are configured to switch between the first electrode 31 and the third electrode 33 being in a conductive state or the second electrode 32 and the third electrode 33 being in a conductive state. It is designed to function as an actuator.

  In the switching device 20 configured as described above, the gas G1 is accommodated on each closed end side of the first electrode 31 to the third electrode 33, and the fluid F1 is moved on each open end side. Contained.

  Next, the operation of the switching device 20 configured as described above will be described. In the first state, the switching device 20 applies a voltage to the electrode of the first piezoelectric element 41b and does not apply a voltage to the electrode of the second piezoelectric element 42b. That is, the switching device 20 operates the first pump 41 and does not operate the second pump 42. Accordingly, the working fluid F2 is discharged from the first pump chamber 41c to the first flow path via the first communication path 21c and the first discharge port 21c1. As a result, the fluid F1 to be moved is divided at a portion facing the first discharge port 21c1 and exists as two lumps.

  At this time, as shown in FIG. 89 (A), one lump of the fluid F1 to be moved is in the negative direction of the X axis more than the portion in the first flow path where the first discharge port 21c1 is formed. (That is, in the first electrode 31). The other one lump of the fluid F1 to be moved exists continuously as one lump in the second electrode 32, the third electrode 33, and the first flow path connecting them. As a result, the second electrode 32 and the third electrode 33 are in a conductive state (“ON” state). On the other hand, a non-conductive working fluid F2 exists between the two masses of the fluid F1 to be moved. Therefore, the first electrode 31 and the third electrode 33 are in a non-conduction state (“off” state).

  The gas G1 in each part is sealed at a pressure sufficiently higher than the atmospheric pressure in the operating environment (outside the switching device 20). As a result, even when there is a pressure fluctuation in the operating environment, the actuated fluid F1 is close to the other end side (cylinder) of the cylindrical electrodes (first electrode 31, second electrode 32, and third electrode 33). The back of the electrode). The gas G1 also functions to absorb changes in internal pressure in the first flow path and the second flow path due to the thermal expansion of the fluid F1 and / or the working fluid F2.

  Next, the switching device 20 stops applying voltage to the electrode of the first piezoelectric element 41b and starts applying voltage to the electrode of the second piezoelectric element 42b. That is, the switching device 20 operates the second pump 42 and does not operate the first pump 41. As a result, the volume of the first pump chamber 41c increases and the volume of the second pump chamber 42c decreases.

  Accordingly, the working fluid F2 is sucked from the first flow path toward the first pump chamber 41c via the first communication path 21c and the first discharge port 21c1, and from the second pump chamber 42c to the second communication path 21d and It discharges to the 1st channel via the 2nd discharge mouth 21d1. As a result, the moved fluid F1 is divided at a portion facing the second discharge port 21d1.

  At this time, the moving fluid F1 that has become one lump in the substantially central portion of the first flow path moves in the negative direction of the X axis and merges with the moving fluid F1 that was present in the first electrode 31. It becomes one lump. As a result, as shown in FIG. 89B, one lump of the fluid F1 to be moved is a portion in the first flow path and the second flow path where the second discharge port 21d1 is formed. It exists in the X-axis negative direction part. On the other hand, the other mass of the fluid F1 to be moved is a portion in the positive direction of the X-axis from the portion in the first flow path where the second discharge port 21d1 is formed (that is, in the second electrode 32). Exists. A working fluid F2 exists between the one mass of the fluid F1 to be moved and the other mass.

  Thus, the fluid F1 to be moved exists continuously as one lump in the first electrode 31 and the third electrode 33 and in the first flow path connecting them. As a result, the first electrode 31 and the third electrode 33 are in a conductive state (“ON” state), and the second electrode 32 and the third electrode 33 are in a non-conductive state (“OFF” state). This state is the second state.

  Next, the switching device 20 starts applying voltage to the electrode of the first piezoelectric element 41b and stops applying voltage to the electrode of the second piezoelectric element 42b. That is, the switching device 20 operates the first pump 41 and does not operate the second pump 42. As a result, the volume of the first pump chamber 41c decreases and the volume of the second pump chamber 42c increases.

  As a result, the switching device 20 returns to the first state shown in FIG. Therefore, the moved fluid F1 is continuously present as one lump in the second electrode 32, the third electrode 33, and the first flow path connecting these. As a result, the second electrode 32 and the third electrode 33 are again in a conductive state (“ON” state), and the first electrode 31 and the third electrode 33 are in a non-conductive state (“OFF” state). The switching device 20 switches the conduction state between the first to third electrodes 31 to 33 by repeatedly performing the above operation. In this case, the third electrode 33 functions as a common electrode.

  Similar to the switching device 10, the switching device 20 includes a conductive fluid F 1 accommodated in a flow path (first flow path, second flow path), and at least a pair of electrodes (first electrode 31 and first flow path). The three electrodes 33 or the second electrode 32 and the third electrode 33) and the actuator (the first pump 41 and the first pump 41) that switch the conduction state between the pair of electrodes by moving the fluid F1 to be moved in the flow path. 2 pump 42).

  Furthermore, the switching device 20 includes a base body 21 having therein spaces (first space 21a and second space 21b) for forming the flow path. Each electrode (first electrode 31, second electrode 32, third electrode 33) is a cylindrical body (tubular electrode) made of metal (platinum) having one open end face. The part to be included is arranged in a part of the space for forming the flow path of the base 21. Further, the portion including the other end face of each electrode extends to the outside of the base 21. And the flow path (1st flow path and 2nd flow path) of this switching device 20 has the same cylindrical electrode arrange | positioned among the space for forming the inside of the said cylindrical electrode, and the flow path of the said base | substrate. And a portion that is not.

  Accordingly, since the cylindrical electrode (for example, the first electrode 31) constitutes a part of the flow path (for example, the first flow path), the conductive movable fluid F1 moves inside the cylindrical electrode. To do. Therefore, for the same reason as that in the switching device 10, heat is efficiently transferred from the fluid F <b> 1 to the cylindrical electrode.

  Further, in this cylindrical electrode, a portion including the other end surface extends to the outside of the base 21. Therefore, the heat generated inside the base body 21 (the first flow path and the second flow path) can be easily taken out of the base body 21. As a result, the temperature rise inside the base body 21 (the first flow path and the second flow path) is suppressed, so that the deterioration of the electrode (for example, the first electrode 31) and the change in the characteristics of the fluid F1 are less likely to occur. Therefore, the switching device 20 is a switching device that has a low resistance and can stably achieve a high-speed switching operation over a long period of time.

  Here, in the switching device 20, attention is focused on the first electrode 31 and the third electrode 33. In this case, both the first electrode 31 and the third electrode 33 are cylindrical electrodes. On the other hand, the base 21 includes a first space 21a for forming the first flow path and a second space 21b for forming the second flow path.

  The first space 21a and the second space 21b are both linear spaces and intersect with each other in the base body 21 at a predetermined angle (substantially 90 ° here) other than 180 °. Further, the first space 21 a and the second space 21 b reach the outer surface of the base body 21 from a portion where they intersect each other. Further, the first electrode 31 and the third electrode 33 are disposed on the base 21 so that the respective open end faces face the intersecting portion.

  Further, in the switching device 20, the first pump 41 that functions as an actuator operates in a portion where the first electrode 31 and the third electrode 33 are not arranged in the space for forming the flow path of the base 21. The fluid F2 is discharged, and the moving fluid F1 existing in the same portion is cut. The above points are the same when focusing on the second electrode 32 and the third electrode 33.

In addition, the switching device 20 forms a T-shaped through passage (a through passage including the first space 21a and the second space 21b) with respect to the base body 21, and the cylindrical electrodes (first electrode 31 to first electrode) from three directions. It can also be said that the switching device 20 has the three electrodes 33) inserted and arranged.
(Third embodiment)
Next, a switching device 50 according to a third embodiment of the seventh invention will be described with reference to FIGS. FIG. 90 is a plan view of the switching device 50. FIG. 91 is a cross-sectional view of the switching device 50 cut along a plane along line 3-3 in FIG. 92A and 92B are diagrams for explaining the operation of the switching device 50, where FIG. 92A is a cross-sectional view of the switching device 50 in the first state, and FIG. 92B is a cross-sectional view of the switching device 50 in the second state. It is.

  The switching device 50 includes a base 51, a first electrode 61, a second electrode 62, a third electrode 63, a first pump 71 and a second pump 72.

  The base 51 has a substantially rectangular parallelepiped shape having sides extending along the X-axis, Y-axis, and Z-axis directions orthogonal to each other. The base 51 is formed by the same material and manufacturing method as the base 11.

  As shown in FIG. 91, the base 51 includes a first space 51a for forming the first flow path, a second space 51b for forming the second flow path, and a second space for forming the third flow path. 3 space 51c and 4th space 51d for forming a 4th flow path are provided.

  The first space 51a is formed at the approximate center of the base 51 in the Y-axis direction and at the approximate center of the Z-axis direction. The first space 51 a is a hollow cylindrical space having an axis extending linearly along the X-axis direction at the substantially central portion of the base 51 in the Z-axis direction. The first space 51 a penetrates the base body 51. In the first space 51a, the diameter in the vicinity of both ends in the X-axis direction is slightly smaller than the diameter in the center in the X-axis direction excluding both ends in the X-axis direction. That is, the first space 51a includes a large-diameter portion 51L at the center in the X-axis direction and small-diameter portions 51S1 and 51S2 at both ends in the X-axis direction.

  The second space 51b is formed on the X-axis negative direction side of the base 51 in the X-axis direction central portion and in the Y-axis direction substantially central portion. The second space 51b is a cylindrical space that extends linearly along the Z-axis direction. One end portion of the second space 51b is connected to the first space 51a at the X-axis negative direction end portion of the large-diameter portion 51L of the first space 51a. The other end of the second space 51 b reaches the lower surface of the base 51.

  The third space 51c is formed at the center in the X-axis direction of the base body 51 and at the substantially center in the Y-axis direction. The third space 51c extends linearly along the Z-axis direction. The third space 51c is a cylindrical space having the same shape as the second space 51b. One end of the third space 51c is connected to the first space 51a at the center in the X-axis direction of the large-diameter portion 51L of the first space 51a. The other end of the third space 51 c reaches the lower surface of the base 51.

  The fourth space 51d is formed on the X-axis positive direction side of the base 51 in the X-axis direction center and in the Y-axis direction substantially center. The fourth space 51d extends linearly along the Z-axis direction. The fourth space 51d is a cylindrical space having the same shape as the second space 51b. One end of the fourth space 51d is connected to the first space 51a at the X-axis positive direction end of the large-diameter portion 51L of the first space 51a. The other end of the fourth space 51 d reaches the lower surface of the base 51.

  The first pump 71 has the same configuration as the pump 13. That is, the first pump 71 is a piezoelectric pump including a first pump chamber forming portion 71a and a first piezoelectric element 71b. The first pump chamber forming portion 71a forms a first pump chamber 71c similar to the pump chamber 13c. The first pump 71 is fixed to the side surface (the surface along the YZ plane) of the base 51 on the X axis negative direction side by firing or an adhesive. The first pump 71 is located approximately in the center in the Y-axis direction and in the center in the Z-axis direction. A working fluid F2 is accommodated in the first pump chamber 71c. The first pump chamber 71c is connected to the small diameter part 51S1 on the X axis negative direction side.

  The second pump 72 has the same configuration as the pump 13. That is, the second pump 72 is a piezoelectric pump including a second pump chamber forming portion 72a and a second piezoelectric element 72b. The second pump chamber forming portion 72a forms a second pump chamber 72c similar to the pump chamber 13c. The second pump 72 is fixed to the side surface (the surface along the YZ plane) of the base 51 on the X axis positive direction side by firing or an adhesive. The second pump 72 is located at the substantially central part in the Y-axis direction and at the central part in the Z-axis direction. The working fluid F2 is accommodated in the second pump chamber 72c. The second pump chamber 72c is connected to the small diameter portion 51S2 on the X axis positive direction side.

  As will be described later, the first pump 71 and the second pump 72 switch whether the first electrode 61 and the second electrode 62 are in a conductive state or whether the second electrode 62 and the third electrode 63 are in a conductive state. It is designed to function as an actuator.

  The first electrode 61 has the same configuration as the electrode 12a. The diameter (outer diameter) of the first electrode 61 coincides with the diameter (inner diameter) of the second space 51b. The portion including the opened one end of the first electrode 61 is disposed so as to be inserted into the second space 51b. One open end of the first electrode 61 is located at a connection location between the first space 51a and the second space 51b. The other closed end of the first electrode 61 is located outside the base 51 in the negative Z-axis direction. The first electrode 61 is electrically connected to an electric circuit (not shown) outside the base 51.

  The second electrode 62 has the same configuration as the electrode 12a. The diameter (outer diameter) of the second electrode 62 coincides with the diameter (inner diameter) of the third space 51c. The portion including the opened one end of the second electrode 62 is disposed so as to be inserted into the third space 51c. One open end of the second electrode 62 is located at a connection point between the first space 51a and the third space 51c. The other closed end of the second electrode 62 is located outside the base 51 in the negative Z-axis direction. The second electrode 62 is electrically connected to an electric circuit (not shown) outside the base 51.

  The third electrode 63 has a configuration similar to that of the electrode 12a. The diameter (outer diameter) of the third electrode 63 coincides with the diameter (inner diameter) of the fourth space 51d. The portion including the opened one end of the third electrode 63 is disposed so as to be inserted into the fourth space 51d. One open end of the third electrode 63 is located at a connection point between the first space 51a and the fourth space 51d. The other closed end of the third electrode 63 is located outside the base 51 in the negative Z-axis direction. The third electrode 63 is electrically connected to an electric circuit (not shown) outside the base 51.

  The flow path of the switching device 50 configured as described above includes the large-diameter portion 51L of the first space 51a, the first electrode 61, the second electrode 62, and the third electrode 63. The large-diameter portion 51L accommodates the fluid F1 and the working fluid F2. In the small diameter portions 51S1 and 51S2, the moved fluid F1 does not substantially enter, and the working fluid F2 is accommodated. The gas G1 is accommodated on each closed end side of the first electrode 61 to the third electrode 63, and the fluid F1 is accommodated on each open end side.

  Next, the operation of the switching device 50 configured as described above will be described. In the first state, the switching device 50 applies a voltage to the electrode of the first piezoelectric element 71b and does not apply a voltage to the electrode of the second piezoelectric element 72b. That is, the switching device 20 operates the first pump 71 and does not operate the second pump 72. Accordingly, the working fluid F2 is discharged from the first pump chamber 71c to the large diameter part 51L via the small diameter part 51S1. Thereby, the to-be-moved fluid F1 moves to the X-axis positive direction end part of the large diameter part 51L.

  As a result, as shown in FIG. 92 (A), the moved fluid that has moved to the X axis positive direction end of the large diameter portion 51L, the moved fluid in the second electrode 62, and the third electrode 63 Are combined with each other to form one lump of the fluid F1 to be moved. On the other hand, the fluid F1 to be moved in the first electrode 61 is isolated and becomes one lump. Accordingly, the second electrode 62 and the third electrode 63 are in a conductive state (“ON” state), and the second electrode 62 and the first electrode 61 are in a non-conductive state (“OFF” state).

  Next, the switching device 50 stops applying voltage to the electrode of the first piezoelectric element 71b and starts applying voltage to the electrode of the second piezoelectric element 72b. That is, the switching device 50 operates the second pump 72 and does not operate the first pump 71. Accordingly, the second working fluid F2 is discharged from the second pump chamber 72c to the large diameter portion 51L via the small diameter portion 51S2. Thereby, the to-be-moved fluid F1 moves to the X-axis negative direction end part of the large diameter part 51L.

  As a result, as shown in FIG. 92 (B), the moved fluid that has moved to the X-axis negative direction end of the large-diameter portion 51L, the moved fluid in the second electrode 62, and the first electrode 61 Are combined with each other to form one lump of the fluid F1 to be moved. On the other hand, the transferred fluid F1 in the third electrode 63 is isolated and becomes one lump. Accordingly, the second electrode 62 and the first electrode 61 are in a conductive state (“ON” state), and the second electrode 62 and the third electrode 63 are in a non-conductive state (“OFF” state). This state is the second state.

  Next, the switching device 50 starts applying voltage to the electrode of the first piezoelectric element 71b and stops applying voltage to the electrode of the second piezoelectric element 72b. That is, the switching device 50 operates the first pump 71 and does not operate the second pump 72. As a result, the volume of the first pump chamber 71c decreases and the volume of the second pump chamber 72c increases.

  As a result, the switching device 20 returns to the first state shown in FIG. That is, the second electrode 62 and the third electrode 63 are in a conductive state, and the second electrode 62 and the first electrode 61 are in a non-conductive state. The switching device 50 switches the conduction state between the first to third electrodes 61 to 63 by repeatedly performing the above operation. In this case, the second electrode 62 functions as a common electrode.

  As described above, in the switching device 50, the fluid F1 to be moved is accommodated in the first to third electrodes 61 to 63. Further, the moved fluid F1 accommodated in the second electrode 62 is in any state (first and second states) with the moved fluid F1 moving in the large-diameter portion 51L of the first space 51a that is a flow path. ) Is also continuous. Furthermore, the moved fluid F1 accommodated in the first electrode 61 and the third electrode 63 is intermittently integrated with the moved fluid F1 moving in the large diameter portion 51L of the first space 51a. Accordingly, the heat inside the base 51 (flow path) can be efficiently taken out of the base 51 via the transferred fluid F1 and the first to third electrodes 61 to 63, and an increase in the temperature inside the base 51 is suppressed. can do.

  Thus, in the switching device 50, the base 51 includes a linear first space 51a as a space for forming a flow path, at least a pair of second spaces 51b extending in parallel with each other and communicating with the first space, A third space 51c and a fourth space 51d are provided. Further, at least a pair of cylindrical electrodes (for example, the second electrode 62 and the third electrode 63) are respectively provided in the third space 51c and the fourth space 51d so that each open end surface communicates with the first space 51a. It is arranged. Further, the first pump 71 and the second pump 72 functioning as actuators are configured to move the fluid F1 to move in the streamline direction (X-axis direction) of the first space 51a.

  In other words, the switching device 50 includes at least one end of the fluid F1 to be moved so that the fluid F1 reciprocates in the linear flow path of the base 51 (in the large diameter portion 51L of the first space 51a). The actuator (the 1st pump 71 or the 2nd pump 72) which discharges the working fluid F2 toward an edge part is provided.

  Next, a method for manufacturing the switching device according to each of the above embodiments will be briefly described. The substrate is formed by forming grooves on the quartz substrate by sandblasting and thermally fusing the quartz substrate corresponding to the lid. This groove serves as a communication path that connects the space for forming the flow path and each pump chamber and the flow path.

  The electrode is formed from platinum as described above. However, reverse sputtering treatment is performed to remove the oxide layer on the surface of the electrode, and then gold is coated on the surface by about 100 mm by sputtering.

  As described above, according to the embodiments of the switching device of the seventh invention, the temperature inside the base can be increased because the heat inside the base can be effectively taken out by using the cylindrical electrode. Can be suppressed. As a result, the switching device of each embodiment is less likely to cause electrode deterioration and change in characteristics of the fluid to be moved, so that high-speed switching operation can be stably achieved over a long period of time.

  The seventh invention is not limited to the above embodiment, and various modifications can be employed within the scope of the seventh invention. For example, in each of the above embodiments, the electrodes are all cylindrical electrodes, but one cylindrical electrode is provided for one substrate, and the other electrodes are formed so as to be exposed in the flow path. It may be an electrode. Moreover, each said electrode may be equipped with the pressure absorption part (volume change absorption part) which absorbs the pressure change in an electrode in the other end closed.

  In each of the above embodiments, the flow path is linear or T-shaped. However, the flow path is a flow path including two or more linear flow paths provided so as to intersect at an arbitrary position in the substrate. May be. For example, the flow path may be V-shaped.

Further, in each of the embodiments described above, the actuator is a piezoelectric pump (piezoelectric film type pump), but it may be an actuator provided with a heater as a heating means. This actuator may be of a type in which the volume of gas as a working fluid is expanded by a heater, and the fluid F1 is moved using this volume expansion. In the actuator using such a heater, the working fluid F2 is preferably helium gas. Further, this actuator may be of a type in which liquid is vaporized by a heater and the fluid F1 is moved using volume expansion accompanying this vaporization.

FIG. 1 is a plan view of a moved fluid moving device according to a first embodiment of the present invention. 2 is a cross-sectional view of the moved fluid moving device shown in FIG. 1 cut along a plane along line 1-1 in FIG. 3A is a conceptual diagram showing an initial state of the moved fluid moving device shown in FIG. 1, and FIG. 3B is a conceptual diagram showing an operating state of the moved fluid moving device. 4 is a time chart showing changes in the first pump chamber volume, the first pump drive voltage, the position of the moved fluid, the second pump drive voltage, and the second pump chamber volume of the moved fluid moving device shown in FIG. It is. FIG. 5 shows changes in the first pump chamber volume, the first pump drive voltage, the position of the moved fluid, the second pump drive voltage, and the second pump chamber volume in a comparative example of the moved fluid moving device to be compared with the present invention. It is a time chart which shows. FIG. 6 shows changes in the first pump chamber volume, the first pump drive voltage, the position of the moved fluid, the second pump drive voltage, and the second pump chamber volume of the moved fluid moving device according to the second embodiment of the present invention. It is a time chart which shows. FIG. 7 is a conceptual diagram of a moved fluid movement device according to a third embodiment of the present invention. FIG. 8 is a time chart showing changes in the first pump driving voltage, the second pump driving voltage, and the third pump driving voltage of the moved fluid moving device shown in FIG. FIG. 9A is a conceptual diagram showing the initial state of the moved fluid moving device of the fourth embodiment of the present invention, and FIG. 9B is the moved fluid moving device of the fourth embodiment of the present invention. FIG. 9C is a conceptual diagram showing the operating state of the mobile fluid moving device according to the fourth embodiment of the present invention. FIG. 10 is a plan view of the moved fluid moving device according to the first embodiment of the second invention. FIG. 11 is a cross-sectional view of the moved fluid moving device shown in FIG. 10 cut along a plane along line 1-1 in FIG. 12A is a conceptual diagram showing an initial state of the moved fluid moving device shown in FIG. 10, and FIG. 12B is a conceptual diagram showing an operating state of the moved fluid moving device. 13 is a time chart showing changes in the first pump chamber volume, the first pump drive voltage, the position of the moved fluid, the second pump drive voltage, and the second pump chamber volume of the moved fluid moving device shown in FIG. It is. FIG. 14 shows the first pump chamber volume, the first pump drive voltage, the position of the moved fluid, the second pump drive voltage, and the second pump chamber volume of a comparative example of the moved fluid moving device to be compared with the second invention. It is a time chart which shows the change of. FIG. 15 shows the first pump chamber volume, the first pump drive voltage, the position of the moved fluid, the second pump drive voltage, and the second pump chamber volume of the moved fluid moving device according to the second embodiment of the second invention. It is a time chart which shows the change of. FIG. 16 is a conceptual diagram of a moved fluid moving device according to a third embodiment of the second invention. FIG. 17 is a time chart showing changes in the first pump driving voltage, the second pump driving voltage, and the third pump driving voltage of the moved fluid moving device shown in FIG. FIG. 18 is a conceptual diagram showing a substrate structure of a moved fluid moving device according to the second invention. FIG. 19 is a plan view of a moved fluid moving device according to the first embodiment of the third invention. 20 is a cross-sectional view of the moved fluid moving device shown in FIG. 19 cut along a plane along line 1-1 in FIG. FIG. 21 is a time chart of a conventional drive voltage applied to the drive unit of the moved fluid moving device shown in FIG. FIG. 22 is a time chart of the drive voltage according to the third aspect of the invention applied to the drive unit of the moved fluid moving device shown in FIG. FIG. 23 is a conceptual cross-sectional view of a moved fluid moving device according to a second embodiment of the third invention. FIG. 24 is a time chart of drive voltages applied to the moved fluid movement device shown in FIG. FIG. 25 is a conceptual cross-sectional view of a moved fluid moving device according to a third embodiment of the third invention. FIG. 26 is a time chart of first to third drive voltages applied to the moved fluid movement device shown in FIG. FIG. 27 is a conceptual cross-sectional view of a moved fluid movement device according to a fourth embodiment of the third invention. FIG. 28 is a time chart of first to third drive voltages applied to the moved fluid movement device shown in FIG. FIG. 29 is a time chart of another drive voltage applied to the moved fluid movement device shown in FIG. FIG. 30 is a sectional view conceptually showing a modified example of the moved fluid moving device according to the third invention. FIG. 31 is a plan view of a moved fluid moving device according to the first embodiment of the fourth invention. 32 is a cross-sectional view of the moved fluid moving device shown in FIG. 31 cut along a plane along line 1-1 in FIG. FIG. 33 is a time chart of drive voltages applied to the moved fluid moving device shown in FIG. FIG. 34 is a conceptual cross-sectional view of a moved fluid movement device according to a second embodiment of the fourth invention. FIG. 35 is a time chart of drive voltages applied to the moved fluid movement device shown in FIG. FIG. 36 is a conceptual cross-sectional view of a moved fluid movement device according to a third embodiment of the fourth invention. FIG. 37 is a time chart of drive voltages applied to the moved fluid movement device shown in FIG. FIG. 38 is a time chart of another drive voltage applied to the moved fluid movement device shown in FIG. FIG. 39 is a time chart of another drive voltage applied to the moved fluid movement device shown in FIG. FIG. 40 is a sectional view conceptually showing a modification of the moved fluid moving device according to the fourth invention. FIG. 41 is a longitudinal sectional view when the switching device according to the first embodiment of the fifth invention is in the initial state. FIG. 42 is a longitudinal sectional view when the switching device shown in FIG. 41 is in an operating state. FIG. 43 is a longitudinal sectional view when the switching device according to the second embodiment of the fifth invention is in the initial state. FIG. 44 is a longitudinal sectional view when the switching device shown in FIG. 43 is in an operating state. FIG. 45 is a longitudinal sectional view when the switching device according to the third embodiment of the fifth invention is in the initial state. 46 is a longitudinal sectional view when the switching device shown in FIG. 45 is in an operating state. FIG. 47 is a cross-sectional view when the switching device according to the fourth embodiment of the fifth invention is in an operating state. FIG. 48 is a cross-sectional view when the switching device according to the fifth embodiment of the fifth invention is in an operating state. 49 is a cross-sectional view of the switching device shown in FIG. 48 taken along a plane along line 1-1. FIG. 50 is a longitudinal sectional view when the switching device according to the sixth embodiment of the fifth invention is in an operating state. 51 is a cross-sectional view of the switching device taken along a plane along line 2-2 in FIG. FIG. 52 is a longitudinal sectional view of a switching device according to a seventh embodiment of the fifth invention when the switching device is in an operating state. 53 is a cross-sectional view of the switching device taken along a plane along line 3-3 in FIG. 52. 54 is a cross-sectional view of the switching device taken along a plane along line 4-4 in FIG. FIG. 55 is a schematic view showing a longitudinal section of a switching device according to the eighth embodiment of the fifth invention. FIG. 56 is a sectional view of the vicinity of the flow path of the switching device according to the ninth embodiment of the fifth invention. FIG. 57 is a cross-sectional view of the vicinity of the flow path of the switching device taken along the plane 5-5 in FIG. 58 is a cross-sectional view of the vicinity of the flow path of the switching device taken along the plane 6-6 in FIG. FIG. 59 is a cross-sectional view of the vicinity of the flow path of the switching device taken along a plane along line 7-7 in FIG. FIG. 60 is a longitudinal sectional view in the vicinity of a flow path obtained by cutting a switching device according to a modification of the ninth embodiment of the fifth invention along a plane corresponding to line 5-5 in FIG. 61 is a longitudinal sectional view in the vicinity of a flow path of a switching device according to a modification of the ninth embodiment of the fifth invention, cut along a plane corresponding to line 6-6 in FIG. 62 is a longitudinal sectional view in the vicinity of a flow path of a switching device according to a modification of the ninth embodiment of the fifth invention, cut along a plane corresponding to line 7-7 in FIG. FIG. 63 is a conceptual diagram of a modification of the switching device according to the fifth invention. FIG. 64 is a plan view of the switching device according to the first embodiment of the sixth invention. FIG. 65 is a cross-sectional view of the switching device taken along a plane along line 1-1 in FIG. 66 is a cross-sectional view of the switching device taken along a plane along line 2-2 in FIG. FIG. 67 is a cross-sectional view of the switching device taken along the interface between the second ceramic sheet and the third ceramic sheet from the bottom layer when the switching device is in the first state. FIG. 68 is a cross-sectional view of the switching device taken along the interface between the second ceramic sheet and the third ceramic sheet from the bottom layer when the switching device is in the second state. FIG. 69 is a plan view of a ceramic green sheet for explaining a manufacturing process of the switching device shown in FIG. FIG. 70 is a plan view of a ceramic green sheet for explaining a manufacturing process of the switching device shown in FIG. FIG. 71 is a plan view of a ceramic green sheet for explaining a manufacturing process of the switching device shown in FIG. 72 is a plan view of a ceramic green sheet for explaining a manufacturing process of the switching device shown in FIG. FIG. 73 is a plan view of a ceramic green sheet for explaining a manufacturing process of the switching device shown in FIG. 74 is a plan view of a ceramic green sheet for explaining a manufacturing process of the switching device shown in FIG. FIG. 75 is a plan view of a switching device according to the second embodiment of the sixth invention. 76 is a cross-sectional view of the switching device taken along a plane along line 3-3 in FIG. 77 is a cross-sectional view of the switching device taken along a plane along line 4-4 of FIG. 78 is a plan view of a bulk body for explaining a manufacturing process of the switching device shown in FIG. FIG. 79 is a cross-sectional view of a modification of the switching device according to the sixth invention. It is sectional drawing of the switching device which should be improved by 6th invention. It is sectional drawing of the switching device which should be improved by 6th invention. It is sectional drawing of the switching device which should be improved by 6th invention. It is sectional drawing of the switching device which should be improved by 6th invention. FIG. 84 is a plan view of the switching device according to the first embodiment of the seventh invention. 85 is a cross-sectional view of the switching device in the first state (conducting state) taken along the plane along line 1-1 in FIG. 86 is a cross-sectional view of the switching device in the second state (non-conduction state) taken along the plane along line 1-1 in FIG. FIG. 87 is a plan view of a switching device according to the second embodiment of the seventh invention. 88 is a cross-sectional view of the switching device taken along a plane along line 2-2 in FIG. 89 is a diagram for explaining the operation of the switching device shown in FIG. 87, in which (A) is a cross-sectional view of the switching device in the first state, and (B) is the switching in the second state. It is sectional drawing of a device. FIG. 90 is a plan view of a switching device according to the third embodiment of the seventh invention. 91 is a cross-sectional view of the switching device taken along a plane along line 3-3 in FIG. 92 is a diagram for explaining the operation of the switching device shown in FIG. 90, in which (A) is a cross-sectional view of the switching device in the first state, and (B) is the switching in the second state. It is sectional drawing of a device.

Claims (12)

A device for moving a moving object in a flow path comprising a container and an electric control device,
The container is
A flow path forming part that forms a flow path that is a sealed space;
A substantially incompressible movable body accommodated in the flow path so as to substantially separate the flow path into two;
A working fluid that is contained in the flow path and is substantially incompressible for moving the movable body;
The working fluid in the first pump chamber is reduced by reducing the volume of the first pump chamber in response to a drive signal including a first pump chamber communicated with a first opening provided in the flow path. A first pump that discharges to the same flow path through the opening;
A second pump chamber communicated with a second opening provided in the flow path includes a second pump chamber that reduces the volume of the second pump chamber in response to a drive signal, thereby reducing the second working fluid in the second pump chamber. A second pump that discharges the same flow path through the opening;
Including
The electrical control device
When the device is in an initial state, a driving signal is generated to reduce the sum of the volume of the first pump chamber and the volume of the second pump chamber at a first speed, and the working fluid is placed in the flow path. By slowly discharging through the first opening and / or the second opening, the device is shifted to a standby state in which the pressure in the flow path is higher than the pressure outside the container, and the device is the same. When in the standby state, a drive signal is generated to reduce the volume of the first pump chamber at a second speed larger than the first speed, and the working fluid is passed through the first opening in the flow path. A device for moving the movable body configured to move the movable body in the same flow path by rapidly discharging. A device for moving a moving object in the flow path according to claim 1,
When the device is in the standby state, the movable body is configured to exist in the flow path between at least the first opening and the second opening,
The second pump is a pump capable of sucking the working fluid in the flow path into the second pump chamber through the second opening by increasing the volume of the second pump chamber,
The electrical control device
When the device is in the standby state, the drive signal is generated to reduce the volume of the first pump chamber at the second speed, and the pressure in the flow path is set to be higher than the pressure outside the container. A drive signal is generated to increase the volume of the second pump chamber at a third speed so as to suck the working fluid from the same flow path through the second opening while maintaining a high pressure. A device that moves a moving object in a flow path. A device for moving a moving object in the flow path according to claim 1,
A third pump chamber communicated with a third opening provided in the flow path includes a third pump chamber that increases the volume of the third pump chamber in response to a drive signal, thereby allowing the working fluid in the flow path to pass through the third opening. A third pump for sucking into the third pump chamber via
When the device is in the standby state, the movable body is configured to exist in the flow path between at least the first opening and the third opening,
The electrical control device
When the device is in the initial state, a drive signal is generated to reduce the volume of the second pump chamber at the first speed, and the working fluid is gently introduced into the flow path through the second opening. By discharging, the device is shifted to the standby state, and when the device is in the standby state, a drive signal for reducing the volume of the first pump chamber at the second speed is generated, The working fluid is rapidly discharged through the first opening, and the working fluid is removed from the flow path while maintaining the pressure in the flow path higher than the pressure outside the container. A device for moving a movable body in a flow path configured to generate a drive signal for increasing the volume of the third pump chamber at a third speed so as to be sucked through three openings. A device for moving a moving object in the flow path according to claim 1,
A device for moving a moving object in a flow path, wherein the moving object is a solid. A device for moving a moving object in the flow path according to claim 2,
A device for moving a moving object in a flow path, wherein the moving object is a solid. A device for moving a moving object in the flow path according to claim 3,
A device for moving a moving object in a flow path, wherein the moving object is a solid. A device for moving a moving object in the flow path according to claim 1,
The moving object is an incompressible moving fluid;
The working fluid is substantially insoluble with respect to the fluid to be moved, and the moving fluid has better wettability with respect to the wall surface of the flow path than the wettability of the fluid to be moved with respect to the wall surface of the flow path. A device that moves the body. A device for moving a moving object in a flow path according to claim 7,
When the device is in the standby state, the moving fluid is present at a position facing the first opening and the working fluid is present at a position facing the second opening;
When the volume of the first pump chamber is reduced at the second speed, the working fluid suddenly discharged from the first pump chamber through the first opening into the flow channel A device for moving a movable body in a flow path configured such that the moved fluid moves in the flow path when the moved fluid is cut. A device for moving a moving object in the flow path according to claim 2,
The moving object is an incompressible moving fluid;
The working fluid is substantially insoluble with respect to the fluid to be moved, and the moving fluid has better wettability with respect to the wall surface of the flow path than the wettability of the fluid to be moved with respect to the wall surface of the flow path. A device that moves the body. A device for moving a moving object in a flow path according to claim 9,
When the device is in the standby state, the moving fluid is present at a position facing the first opening and the working fluid is present at a position facing the second opening;
When the volume of the first pump chamber is reduced at the second speed, the working fluid suddenly discharged from the first pump chamber through the first opening into the flow channel A device for moving a movable body in a flow path configured such that the moved fluid moves in the flow path when the moved fluid is cut. A device for moving a moving object in the flow path according to claim 3,
The moving object is an incompressible moving fluid;
The working fluid is substantially insoluble with respect to the fluid to be moved, and the moving fluid has better wettability with respect to the wall surface of the flow path than the wettability of the fluid to be moved with respect to the wall surface of the flow path. A device that moves the body. A device for moving a moving object in a flow path according to claim 11,
When the device is in the standby state, the moving fluid is present at a position facing the first opening and the working fluid is present at a position facing the second opening;
When the volume of the first pump chamber is reduced at the second speed, the working fluid suddenly discharged from the first pump chamber through the first opening into the flow channel A device for moving a movable body in a flow path configured such that the moved fluid moves in the flow path when the moved fluid is cut.

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