JP2005280865A - Traverse device and wire saw device equipped with it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a traverse device and wire saw device equipped with it capable of preventing a touch roller and/or a guide roller from wearing and also rotating in idling. <P>SOLUTION: The traverse device to put a wire 2 in traverse motions with respect to a reel 1 is equipped with a guide roller 6 to hold the wire 2, a pair of touch rollers 3 set between the guide roller 6 and the reel 1 in such a way as borne rotatably apart at a certain spacing on both sides about the traversing direction while it pinches the running path of the wire 2, a bearing 5 mounted on the rotary shaft of each touch roller 3, a pair of sensors 4 to sense the rotation of the touch roller 3 due to touching the wires 2 and emit a rotation sensing signal, and a control means to make control so that no rotation sensing signal is emitted by changing the traversing speed of a wire guide mechanism when the rotation sensing signal is emitted from the sensors 4, wherein the friction coefficient of the bearing lies between 2.5×10<SP>-3</SP>and 5.0×10<SP>-3</SP>, including the limits. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to, for example, a traverse device for traversing a wire in the axial direction of a reel when a wire for cutting is sent out from a reel or wound in a wire saw device, and a wire saw device including the traverse device. Is.

  Conventionally, when a semiconductor substrate is formed of polycrystalline silicon or the like, a polycrystalline silicon ingot is formed by, for example, a casting method, and the ingot is cut into a predetermined size to form a semiconductor ingot. It was cut into a plurality of sheets with an apparatus.

  FIG. 2 is a perspective view for explaining a general wire saw device for cutting the semiconductor ingot as described above.

  The cutting wire 2 is composed of a piano wire or the like having a diameter of about 100 to 300 μm, and is fed from the supply reel 1a to the two main rollers 9 arranged in parallel to each other. On the surface of these main rollers 9, a large number of grooves in which the wires 2 can be arranged at regular intervals are provided. The wire 2 is wound around the groove a plurality of times while being arranged between the two main rollers 9 while being arranged in the groove. A space between these main rollers 9 is a cutting area for slicing the semiconductor ingot 11 as an object. The wire 2 which has finished cutting the object is wound up on a reel 1b for winding.

  For example, a plurality of semiconductor ingots 11 are arranged in the cutting region, and abrasive slurry (a cutting fluid in which abrasive grains such as SiC are mixed in oil or water) is supplied from the slurry nozzle 10, and the two main rollers 9. The semiconductor ingot 11 is gradually lowered toward the wire 2 and pressed while the wires 2 stretched between them are running at high speed. Thereby, the semiconductor ingot 11 can be cut and a semiconductor substrate can be manufactured.

  Such a wire saw device usually has a wire guide mechanism for determining the position of the wire 2 with respect to the reel 1a for supply and the reel 1b for take-up, and the wire is arranged in the axial direction of these reels. It is configured to perform a so-called traverse operation in which 2 is supplied while being moved in parallel or is wound up.

  1A and 1B are diagrams illustrating a wire guide mechanism that performs the traverse operation described above. FIG. 1A is a schematic view seen from the side, and FIG. 1B is a schematic view seen from the top.

  The wire 2 is wound around a freely rotatable reel 1, passes between a pair of touch rollers 3, and is guided to a cutting position via a plurality of grooved guide rollers 6. Then, the moving plate 7 traverses in the axial direction of both reels 1, and the wire 2 is sent out while being traversed from one reel 1 a, and the wire 2 is wound around the other reel 1 b while being traversed. At this time, the traverse speed of the moving plate 7 is set in advance by the control means 8.

Each pair of touch rollers 3 is rotatably supported by the moving plate 7 so as to be adjacently arranged at a predetermined interval in the vertical direction, and a wire passes through a gap between the touch rollers 3. A bearing 5 is provided on the rotation shaft of the touch roller 3, and a sensor 4 for detecting the rotation of the touch roller 3 is connected, and a rotation detection signal is output when the touch roller 3 is rotated by contact with the wire 2. To do. That is, when the traverse speed of the moving plate 7 is low during the traverse operation, one touch roller 3a positioned on the front side in the moving direction of the moving plate 7 rotates, and a rotation detection signal is output from the corresponding one sensor 4a. When the traverse speed of the moving plate 7 is high, the other touch roller 3b located on the rear side in the moving direction of the moving plate 7 rotates, and a rotation detection signal is output from the corresponding other sensor 4b. Is output. Then, a rotation detection signal is sent to the control means 8 to adjust the traverse speed of the moving plate 7 so that the wire 2 passes through the gap between the touch rollers 3. (For example, see Patent Document 1)
JP-A-8-47851

  Usually, the touch roller 3 needs to rotate following the traveling speed of the wire 2. For example, the portion that contacts the wire 2 is made of urethane resin or the like. And the bearing provided in the rotating shaft of the touch roller 3 was able to respond to high-speed rotation, and the ball bearing with small rotation resistance was used. However, as the traverse operation is performed, the wire 2 frequently repeats contact / separation with respect to the touch roller 3, so that the touch roller 3 continues to rotate due to inertia. When the wire 2 that travels at a high speed in such a state contacts the touch roller 3, there is a problem that the surface of the touch roller 3 is scraped by the wire 2 due to the difference in relative speed, and wear is significant. And the groove | channel was formed in the touch roller 3 with the wire 2, and there existed a problem that the wire 2 fits in the groove | channel, and it disconnected. In particular, since the abrasive slurry is supplied onto the wire in the cutting mechanism in the wire saw device, the touch roller 3 is extremely worn. For this reason, it is necessary to frequently replace the touch roller, resulting in a decrease in productivity.

  In addition, since the touch roller 3 is structured to easily slip when the wire 2 comes into contact with the touch roller 3, the slipping phenomenon of the touch roller occurs, and the rotation detection signal is sent to the control means 8 for movement. Since the plate 7 moves more than necessary, there is a problem that the wire 2 is loaded and disconnected.

  Similarly to the touch roller 3, the guide roller 6 also needs to follow the traveling speed of the wire 2, so that, for example, a portion that contacts the wire 2 is made of urethane resin or the like, and a bearing is provided on the rotating shaft. Although the guide roller 6 is provided, the surface of the guide roller 6 is also shaved by the wire 2, and there is a problem that the wear is severe.

  The present invention has been made in view of such problems of the prior art, and provides a traverse device capable of preventing wear and idling of a touch roller and a guide roller and a wire saw device using the same. Objective.

  The inventors focused on the point that the contact between the wire and the touch roller or between the wire and the guide roller is composed of many point contacts. If the wire runs at high speed here, microscopic collisions between the wire and the roller will be repeated, resulting in new point contact points. This constant microscopic collision will cause the roller surface to gradually move. I guessed it was scraped off. And various ideas were made to reduce this microscopic collision, and the present invention was achieved.

In view of the above, the traverse device according to claim 1 of the present invention guides the wire while guiding the wire by a wire guide mechanism that traverses the wire along the axial direction of the reel when the wire is sent out from the reel. The wire guide mechanism sandwiches a travel path of the wire between the guide roller and the reel, one or more guide rollers that hold the wire movably. And a pair of touch rollers rotatably supported at predetermined intervals on both sides in the traverse direction, a bearing disposed on the rotation shaft of the pair of touch rollers, and the pair of touch rollers, respectively. And detects the rotation of the touch roller due to contact with the wire and outputs a rotation detection signal. A pair of sensors, and a control means for changing and controlling the traverse speed of the wire guide mechanism so that the rotation detection signal is not output when a rotation detection signal is output from either of the pair of sensors. The bearing has a friction coefficient of 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less.

The traverse device according to claim 2 of the present invention winds the wire while guiding the wire by a wire guide mechanism for traversing the wire along the axial direction of the reel when winding the wire on the reel. The wire guide mechanism includes: one or more guide rollers that hold the wire so that the wire can run freely; and a traverse path of the wire between the guide roller and the reel. A pair of touch rollers rotatably supported at a predetermined interval on both sides in the direction, a bearing disposed on a rotation shaft of the pair of touch rollers, and a pair of touch rollers, respectively. A pair of sensors that detect rotation of the touch roller due to contact with the wire and output a rotation detection signal And a control means for changing and controlling the traverse speed of the wire guide mechanism so that the rotation detection signal is not output when a rotation detection signal is output from either of the pair of sensors, and the bearing The friction coefficient was 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less.

A traverse device according to a third aspect of the present invention is the traverse device according to the first or second aspect, wherein the guide roller has a friction coefficient of 2.5 × 10 ⁻³ or more and 5.0 × 10 ^{− on the} rotation shaft thereof. ^The bearing which is ³ or less was arranged.

  A traverse device according to a fourth aspect of the present invention is the traverse device according to any one of the first to third aspects, wherein the bearing is an angular bearing.

  A traverse device according to a fifth aspect of the present invention is the traverse device according to any one of the first to third aspects, wherein the bearing is a needle bearing.

  A wire saw device according to a sixth aspect of the present invention includes a cutting wire, a first reel that feeds the cutting wire, a second reel that winds the cutting wire, the first reel, and the second reel. A plurality of rollers parallel to each other that are provided between the plurality of rollers, and a cutting region for slicing the object with the cutting wires provided between the plurality of rollers. The traverse device according to any one of claims 1 to 5, disposed between the first reel and the plurality of rollers and / or between the second reel and the plurality of rollers, It has.

As described above, the traverse device of the present invention uses a bearing having a friction coefficient of 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less, and therefore has an appropriate rotational load. If this rotational load is too light, the touch roller or guide roller in a stationary state and the wire running at high speed will come in contact with each other lightly, and the surface of the roller will be spun off. Microscopic collisions with the surface cannot be reduced and the roller surface is worn. In contrast, if the rotational load is too strong, a large moment of rotation is required to rotate the touch roller or guide roller in a stationary state, and the wire slips against the surface of the roller. Microscopic collisions with the roller surface increase and cause wear on the roller surface. On the other hand, by making the friction coefficient of the bearing within the above-mentioned range, the familiarity of the touch roller and the guide roller is improved with respect to the wire that runs at high speed, and when these come in contact with each other, Microscopic collision between the wire and the roller surface can be reduced, and wear on the roller surface can be suppressed.

As described above, the traverse device according to the present invention has a friction coefficient of 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less as a bearing used for a touch roller or a guide roller, and thus travels at a high speed. The familiarity of the touch roller and guide roller with the wire improves, and when they come into contact with each other, the microscopic collision between the wire and the roller surface can be reduced. Problems such as wear can be suppressed. Further, in the case of the touch roller, even when the wire frequently contacts and separates from the touch roller with the traverse operation, it is possible to suppress the problem that the idling phenomenon occurs due to the touch roller continuously rotating due to inertia. Therefore, the rotation detection signal is sent to the control means due to the idling phenomenon of the touch roller, and the moving plate moves more than necessary, and the problem that the wire is loaded and disconnected can be reduced.

  In addition, since the wire saw device of the present invention includes the traverse device of the present invention, wear of the touch roller and the guide roller can be kept low, so that the number of times of replacement of these rollers can be reduced. It is highly effective from the viewpoint of cost reduction and high productivity.

  Note that Patent Document 1 describes a configuration in which fins are provided on the touch roller and a braking function is provided by air resistance accompanying rotation. In the case of fins, braking is performed by air resistance when the rotation speed increases. Since the structure can obtain the effect of the function, it takes some time until the effect of the braking function is obtained after the wire comes into contact with the roller and the roller starts to rotate. Therefore, it is not a configuration for solving the problem when starting to rotate from a stationary state as in the present invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, an embodiment in which the present invention is embodied in a wire saw device will be described with reference to the accompanying drawings.

  FIG. 2 is a diagram showing a wire device. The wire saw device of the present invention includes a wire 2 as a cutting wire, a reel 1a that is a first reel that feeds the wire 2, a reel 1b that is a second reel that winds the wire 2, a reel 1a, and a reel 1b. A main roller 9 which is a plurality of parallel rollers that are provided between the plurality of parallel rollers, and the wire 2 is provided between the plurality of main rollers 9 to slice the object. And the area.

  A traverse device X of the present invention described later is disposed between the reel 1a and the main roller 9 and / or between the reel 1b and the main roller 9.

  Specifically, each part is configured as follows. First, the cutting wire 2 is composed of a piano wire or the like having a diameter of about 100 to 300 μm, and is fed from the supply reel 1a to the two main rollers 9 arranged in parallel to each other. On the surface of these main rollers 9, a large number of grooves in which the wires 2 can be arranged at regular intervals are provided. The wire 2 is wound around the groove a plurality of times while being arranged between the two main rollers 9 while being arranged in the groove. A space between these main rollers 9 is a cutting area for slicing the semiconductor ingot 11 as an object. The wire 2 which has finished cutting the object is wound up on a reel 1b for winding.

  For example, a plurality of semiconductor ingots 11 are arranged in the cutting region, and abrasive slurry (a cutting fluid in which abrasive grains such as SiC are mixed in oil or water) is supplied from the slurry nozzle 10, and the two main rollers 9. The semiconductor ingot 11 is gradually lowered toward the wire 2 and pressed while the wires 2 stretched between them are running at high speed. Thereby, the semiconductor ingot 11 can be cut and a semiconductor substrate can be manufactured.

  The slurry nozzle 10 is provided so that the abrasive slurry can be evenly supplied to the wires 2 stretched in a uniform manner, and the abrasive slurry is composed of, for example, abrasive grains, mineral oil, a surfactant, and a dispersant. Constructed by mixing wrapping oil.

  The semiconductor ingot 11 is configured by, for example, a polycrystalline silicon ingot formed by a casting method or the like cut into a rectangular parallelepiped having a predetermined size, for example, 150 × 150 × 300 mm. An adhesive such as an epoxy resin is applied to one surface of the semiconductor ingot 11 and adhered to a slice base made of a carbon material or a glass material. Therefore, the semiconductor ingot does not fall apart even if it is cut, and is put into the next cleaning process in that state.

  The main roller 9 is made of urethane rubber having a diameter of 200 to 350 mm and a length of 400 to 500 mm, for example, and a plurality of grooves (not shown) in which the wire 2 is fitted at predetermined intervals of about 400 to 600 μm are formed on the surface. . The thickness of the semiconductor substrate as the final product is determined by the relationship between the groove interval and the diameter of the wire 2.

  The wire 2 is fed out from one reel 1a and wound around a groove having a predetermined interval provided on the main roller 9. The wire 2 is, for example, a piano wire mainly composed of iron or an iron alloy having a diameter of about 140 to 180 μm. In a new state, the wire 2 is mainly composed of copper and zinc described in JIS G 3502 SWRS82A. A brass plating layer (not shown) is formed on the surface, and the surface is extremely smooth. The wire 2 can be run by rotating the main roller 9 at a predetermined rotational speed, and is usually run at a high speed so as to be about 400 to 700 m / min, and is wound around the other reel 1b.

  Here, the traverse device X of the present invention according to the wire saw device of the present invention is provided between the supply reel 1 a and the main roller 9 and / or between the take-up reel 1 b and the main roller 9. Yes. The traverse apparatus X has a wire guide mechanism that determines the position of the wire 2 with respect to the supply reel 1a and / or the take-up reel 1b. With this wire guide mechanism, a traverse operation can be performed in which the wire 2 is supplied or wound while being moved in parallel with respect to the axial direction of these reels.

  1A and 1B are diagrams for explaining a wire guide mechanism according to the traverse device of the present invention. FIG. 1A is a schematic view seen from the side, and FIG. 1B is a schematic view seen from the top. In the figure, 1 is a reel, 2 is a wire, 3 is a touch roller, 4 is a sensor, 5 is a bearing, 6 is a guide roller, 7 is a moving plate, and 8 is a control means.

In the wire guide mechanism according to the traverse device of the present invention, as shown in FIG. 1, the wire 2 is wound around a reel 1 that is rotatably supported, passes between a pair of touch rollers 3, and passes through the wire 2. It is guided to the cutting position through one or more grooved guide rollers 6 that are held freely. Then, the moving plate 7 traverses in the axial direction of both reels 1, and the wire 2 is sent out while being traversed from one reel 1 a, and the wire 2 is wound around the other reel 1 b while being traversed. At this time, the traverse speed of the moving plate 7 is set in advance by the control means 8. Further, both reels 1a and 1b have both winding and feeding functions. Each pair of touch rollers 3 is provided between the guide roller 6 and each reel 1, and is provided at predetermined intervals on both sides in the traverse direction. The movable plate 7 is rotatably supported by the movable plate 7 so as to be disposed adjacent to each other. And it arrange | positions so that a wire may pass in the clearance gap between this touch roller 3. FIG. A bearing 5 is provided on the rotation shaft of the pair of touch rollers 3. And the circumference | surroundings of the touch roller 3 are covered with urethane resin etc., for example, and when the wire 2 is contacted, it can follow the movement of this wire 2 and can rotate now. Further, a sensor 4 for detecting the rotation of the touch roller 3 is connected, and a rotation detection signal is output when the touch roller 3 is rotated by contact with the wire 2. That is, when the traverse speed of the moving plate 7 is low during the traverse operation, one touch roller 3a positioned on the front side in the moving direction of the moving plate 7 rotates, and a rotation detection signal is output from the corresponding one sensor 4a. When the traverse speed of the moving plate 7 is high, the other touch roller 3b located on the rear side in the moving direction of the moving plate 7 rotates, and a rotation detection signal is output from the corresponding other sensor 4b. Is output. When the rotation detection signal is output from one of the pair of sensors 4 with the configuration as described above, the control means 8 is configured to traverse the moving plate 7 that holds the wire guide mechanism so that the rotation detection signal is not output. To change. That is, the wire 2 is adjusted so as to pass through the gap between the touch rollers 3. As such a sensor 4, a known encoder can be suitably used.

In the traverse device of the present invention, the friction coefficient of the bearing 5 provided on the touch roller 3 is set to 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less. By providing such a bearing 5 on the rotating shaft of the touch roller 3, an appropriate rotational load is obtained. At this time, the familiarity of the touch roller 3 is improved with respect to the wire 2 that travels at a high speed, and when these come into contact with each other, the touch roller 3 can follow and rotate quickly. The microscopic collision can be reduced, and wear on the surface of the touch roller 3 can be suppressed. Therefore, the groove | channel is formed in the touch roller 3 with the wire 2, and the problem that the wire 2 fits into the groove | channel and is disconnected can be prevented. Moreover, the replacement frequency of the touch roller 3 can be suppressed, and a reduction in productivity can be prevented.

  Furthermore, even when the wire 2 frequently repeats contact / separation with the touch roller 3 along with the traverse operation, the problem that the touch roller 3 continues to rotate due to inertia and the idling phenomenon occurs can be suppressed. Therefore, the rotation detection signal is sent from the sensor 4 to the control means 8 due to the idling phenomenon of the touch roller 3, and the moving plate 7 moves more than necessary, and the problem that the wire 2 is loaded and disconnected is reduced. .

In addition, when the friction coefficient of the bearing 5 is smaller than 2.5 × 10 ⁻³ , the rotational load of the touch roller 3 is too light. The surface of the touch roller 3 rotates in a state where it is flipped off, and the surface of the touch roller 3 is worn away to form a groove, and the wire 2 is fitted into the groove, causing a problem of disconnection. . Furthermore, the idling phenomenon of the touch roller 3 occurs due to inertia, the rotation detection signal is sent to the control means 8, and the moving plate 7 moves more than necessary, so that the wire 2 is loaded and disconnected. There's a problem.

On the contrary, when the friction coefficient of the bearing 5 is larger than 5.0 × 10 ⁻³ , the rotational load of the touch roller 3 is too strong so that a large rotational moment is required to rotate the touch roller 3 in a stationary state. As a result, the wire 2 slips with respect to the surface of the touch roller 3, thereby causing wear on the surface of the touch roller 3. Furthermore, even if the wire 2 comes into contact with the touch roller 3, the touch roller 3 may not rotate. Therefore, the rotation detection signal is not sent to the control means 8, and the moving plate 7 does not move to an appropriate position. There is a problem that the wire 2 is loaded and disconnected.

  As the bearing 5 as described above, it is desirable to use an angular bearing or a needle bearing. A structural diagram of the angular bearing is shown in FIG. 3, and a structural diagram of the needle bearing is shown in FIG.

  As shown in FIG. 3, the angular bearing has a pair of angular bearings arranged in a back-to-back orientation. The ball-shaped rolling element 12 is pressed against the outer ring 13 and the inner ring 14, and the outer ring 13, the inner ring 14, The gap between the rolling elements 12 is eliminated, and the rotation of the rotating shaft 16 can be ensured. In this way, the pair of angular bearings arranged in the back-to-back orientation can be applied with preload by the preload applying means 15. For this reason, it is possible to apply a preload by the pressurizing means of the touch roller 3 at the time of attachment, and thereby it is possible to adjust the rotational load of the touch roller 3 to be within the above-described friction coefficient range.

  The angular bearing as shown in FIG. 3 is a form of a ball bearing. Since the rolling element 12 has a ball shape, a portion in contact with the outer ring 13 or the inner ring 14 is a point. On the other hand, as shown in FIG. 4, in the needle bearing, since the rolling element 12 is in a roller shape, the portion in contact with the outer ring 13 or the inner ring 14 becomes a line, so that the friction coefficient can be increased compared to the ball bearing, It is suitable to be provided as a bearing having a coefficient of friction according to the present invention. Furthermore, by using a tapered roller bearing that is one of the needle bearings, it is possible to apply pressure by the pressure applying means, similarly to the angular bearing described above, and to adjust the rotational load of the touch roller 3, It becomes possible to make it the range of the above-mentioned friction coefficient.

  As described above, the traverse apparatus X of the present invention can be realized. It should be noted that the embodiment of the present invention is not limited to the above-described example, and it is needless to say that various modifications can be made without departing from the gist of the present invention.

  For example, in the above description, an example in which a bearing having a friction coefficient range according to the present invention is provided for the touch roller 3 is described. However, similarly to the touch roller 3 described above, for the guide roller 6, Even if the bearing 5 having the friction coefficient range according to the present invention is disposed, the effects of the present invention are satisfactorily achieved. Similarly to the touch roller 3, the guide roller 6 is configured such that a urethane resin or the like is provided on the surface thereof and is in contact with the wire 2. Compared with the touch roller 3, only the number of points and time in point contact with the wire 2 are large, and there is essentially no change.

  In the above description, the control unit 8 has been described using an example using a programmable controller (sequencer). Such a programmable controller is very well known in the field of machine control, and can be used as a unit by combining modules having a single function, or using a single module specializing in functions. Configured. The control means 8 according to the present invention, as an input unit, picks up a signal from the sensor 4, for example, when an encoder is used as the sensor 4, the rotation detection signal from the encoder is detected using a counter module or the like. can do. As the output unit, for example, when the moving plate 7 is controlled using a linear motor driven by pulses, a pulse generator module or the like may be used in appropriate combination. Furthermore, instead of using a programmable controller, a general-purpose personal computer may be provided with an interface mechanism for control, and the same result can be obtained.

  Furthermore, since the wire saw device of the present invention including the traverse device X of the present invention described above can reduce the wear of the touch roller 3 and the guide roller 6, the replacement frequency of these rollers can be reduced. It is highly effective from the viewpoint of cost reduction and high productivity. In the wire saw device of the present invention, the traverse device X of the present invention may be provided between the supply reel 1a and the main roller 9 or between the take-up reel 1b and the main roller. It may be arranged on both sides of the reel 1a on the supply side and the reel 1b on the take-up side. In the description of the present invention, the first reel 1a is used as the supply side and the second reel 1b is used as the take-up side reel. However, the wire 2 supplied from the first reel 1a passes through the cutting region and the second reel. After all of the reels 1a and 1b have been wound, the rotation directions of both reels 1a and 1b are switched, and the functions are reversed so that the first reel 1a becomes the reel on the take-up side and the second reel 1b becomes the reel on the supply side. It may be a structure.

2 is applied to the wire saw device shown in FIG. 2 to which the traverse device shown in FIG. 1 is applied, as a semiconductor ingot 11 of 150 mm square × L = 280 mm, and a diameter of 180 μm is supplied while supplying SiC abrasive slurry. A cutting test was carried out by running the wire 2 of the piano wire having 500 m / min. At this time, the angular bearing shown in FIG. 3 is used as the bearing 5 of the touch roller 3, and the preload is applied by the preload applying means 15, and the friction coefficients are 1.5 × 10 ⁻³ and 2.0 × 10 ^−3. , 2.5 × 10 ⁻³ , 3.5 × 10 ⁻³ , 5.0 × 10 ⁻³ , 5.5 × 10 ⁻³ , and the bearing 5 was prepared under the internal and external conditions of the present invention.

Each bearing was continuously cut 50 times, and this was set as a single cutting test, and this cutting test was performed 10 times. And the frequency | count of disconnection of the wire 2 in 10 times of cutting tests was confirmed.

As shown in Table 1, when the friction coefficients were 1.5 × 10 ⁻³ and 2.0 × 10 ⁻³ , disconnection of the wire 2 was confirmed 4 times out of 10 times in the cutting test. When the touch roller 3 at this time is confirmed, a groove is formed in a contact portion between the wire 2 and the touch roller 3, and the wire 2 is fitted in the groove, and the wire 2 is disconnected. In addition, when the friction coefficient was 5.5 × 10 ⁻³ , disconnection of the wire was confirmed twice in 10 cutting tests. This is because the reactivity of the touch roller 3 when the wire comes into contact with the touch roller 3 is poor, so that the rotation detection signal is not sent to the control means 8, and the moving plate 7 does not move to an appropriate position. A load is applied to the cable and it is disconnected.

When the friction coefficient was 2.5 × 10 ⁻³ , 3.5 × 10 ⁻³ , and 5.0 × 10 ⁻³ , disconnection of the wire 2 was not confirmed. This is because the touch roller has good reactivity when the wire 2 comes into contact with the touch roller 3, and the touch roller 3 rotates following the traveling speed of the wire 2, so that wear of the touch roller 3 is suppressed, The results of the present invention could be confirmed.

It is a schematic diagram which shows the wire guide mechanism of a traverse apparatus, (a) is a side view, (b) is a top view. It is a schematic diagram which shows the structure of a wire saw apparatus. It is a schematic structure figure showing an angular bearing. It is a schematic structure figure showing a needle bearing.

Explanation of symbols

1: Reel 1a: First reel (reel on the supply side)
1b: Second reel (reel on the winding side)
2: Wires 3, 3 a, 3 b that are cutting wires: Touch rollers 4, 4 a, 4 b: Sensor 5: Bearing 6: Guide roller 7: Moving plate 8: Control means 9: A plurality of main rollers 10 that are a plurality of rollers : Slurry nozzle 11: Semiconductor ingot 12: Rolling element 13: Outer ring 14: Inner ring 15: Preload applying means 16: Rotating shaft X: Traverse device

Claims (6)

A traverse device that feeds out a wire while guiding the wire by a wire guide mechanism that traverses the wire along the axial direction of the reel when feeding the wire from a reel,
The wire guide mechanism has one or more guide rollers that hold the wire so that the wire can run freely, and a gap between the guide roller and the reel on both sides in the traverse direction with a travel path of the wire therebetween at a predetermined interval. A pair of touch rollers that are pivotally supported to be spaced apart from each other, a bearing disposed on a rotation shaft of the pair of touch rollers, and a pair of touch rollers that are disposed in correspondence with the pair of touch rollers, respectively, by contact with the wire A pair of sensors that detect rotation of the touch roller and output a rotation detection signal; and the wire guide mechanism that prevents the rotation detection signal from being output when a rotation detection signal is output from either of the pair of sensors. Control means for changing and controlling the traverse speed of
The bearing has a friction coefficient of 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less. A traverse device that winds the wire while guiding the wire by a wire guide mechanism that traverses the wire along the axial direction of the reel when winding the wire on a reel,
The wire guide mechanism has one or more guide rollers that hold the wire so that the wire can run freely, and a gap between the guide roller and the reel on both sides in the traverse direction with a travel path of the wire therebetween at a predetermined interval. A pair of touch rollers that are pivotally supported to be spaced apart from each other, a bearing disposed on a rotation shaft of the pair of touch rollers, and a pair of touch rollers that are disposed in correspondence with the pair of touch rollers, respectively, by contact with the wire A pair of sensors that detect rotation of the touch roller and output a rotation detection signal; and the wire guide mechanism that prevents the rotation detection signal from being output when a rotation detection signal is output from either of the pair of sensors. Control means for changing and controlling the traverse speed of
The bearing has a friction coefficient of 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less. The traverse device according to claim 1, wherein a bearing having a friction coefficient of 2.5 × 10 ⁻³ or more and 5.0 × 10 ⁻³ or less is disposed on a rotation shaft of the guide roller. The traverse device according to any one of claims 1 to 3, wherein the bearing is an angular bearing. The traverse device according to any one of claims 1 to 3, wherein the bearing is a needle bearing. Cutting wire,
A first reel for feeding out the cutting wire;
A second reel for winding the cutting wire;
A plurality of rollers provided between the first reel and the second reel, the rollers being parallel to each other and extending the cutting wire a plurality of times substantially in parallel;
A cutting region provided between the plurality of rollers, and a sliced region for slicing an object with the cutting wire;
The traverse device according to any one of claims 1 to 5, wherein the traverse device is disposed between the first reel and the plurality of rollers and / or between the second reel and the plurality of rollers.
Wire saw device with

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