JP2005280349A - Liquid ejection head and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid ejection head which can fulfill properties particularly required by a three-dimensional structure such as corrosion resistance, affinity in a deposition method, liquid-philicity, rigidity, etc. by forming all or part of the three-dimensional structure having space such as a pressure chamber filled with liquid by the deposition method. <P>SOLUTION: The liquid ejection head has the three-dimensional structure including a pressure chamber partition wall 94 between a diaphragm 90 formed of stainless steel (SUS430) and a nozzle plate 92 formed of nickel (Ni), and a piezoelectric element 96 for changing the volume of the pressure chamber by driving the diaphragm 90. In the liquid ejection head, the pressure chamber partition wall 94 is formed by an aerosol deposition method for depositing two or more kinds of powder raw materials on the diaphragm 90. Particularly, the compositions of the powder raw materials to be deposited are gradually changed from SUS430 to Ni, thereby improving the affinity between the pressure chamber partition wall 94 and the diaphragm 90 and improving the affinity between the pressure chamber partition wall 94 and the nozzle plate 92. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a liquid discharge head and a manufacturing method thereof, and more particularly to a technique that uses a deposition method for manufacturing a liquid discharge head.

  In recent years, in the field of micro electrical mechanical systems (MEMS), it has been studied to further integrate sensors and actuators using piezoelectric ceramics, and to produce these elements by film formation for practical use. ing. As one of them, an aerosol deposition method (hereinafter referred to as “AD method”), which is known as a film forming technique for ceramics and metals, has attracted attention.

  The AD method is a method of forming a film by generating an aerosol from raw material powder, injecting the aerosol onto a substrate, and depositing the powder by collision energy at that time.

  In the case of manufacturing a liquid discharge head such as an ink jet head, the object to be formed by the AD method is mainly a piezoelectric body for driving a diaphragm, but conventionally, a metal material is formed on a substrate made of a corrosion-resistant metal material. A method of manufacturing a liquid discharge head in which a diaphragm made of an oxide is formed by an AD method has been proposed (Patent Document 1).

In addition, after the diaphragm is formed by the AD method, a portion of the substrate that becomes an ink liquid chamber (pressure chamber) is removed by etching to form a pressure chamber partition.
JP 2003-136714 A

  In general, the vibration plate of the ink jet head and the pressure chamber partition are bonded together by an adhesive. However, in the device described in Patent Document 1, the vibration plate is formed on the substrate to be the pressure chamber partition by the AD method. Therefore, there is an advantage that an adhesion process for adhering the diaphragm and the pressure chamber partition is not required.

  However, in the manufacturing method described in Patent Document 1, since the pressure chamber is formed by etching the substrate after the vibration plate is formed by the AD method, the pressure chamber partition wall is made of a single composition material (corrosion resistant metal). Material). In addition, there is a restriction that the substrate made of a corrosion-resistant metal material must be an etchable material, and the diaphragm formed by the AD method must be a material that is not etched. There is no prior art in which the pressure chamber partition is formed by the AD method.

  Further, if the material composition of the pressure chamber partition and the diaphragm are greatly different, there is a problem that the adhesion between them is reduced by the AD method. Furthermore, it is preferable that the pressure chamber partition wall and the like have lyophilic properties because air bubbles easily collect in the corners of the pressure chamber. In addition, since the ink jet head changes the volume of the pressure chamber by curving the diaphragm and causes the ink in the pressure chamber to be ejected from the nozzle or to fill the pressure chamber with ink, the pressure chamber partition wall High rigidity is preferable so that the torque is increased.

  Thus, the pressure chamber partition wall is required to have corrosion resistance, adhesion by the AD method, lyophilicity, high rigidity, etc., and has a problem that the degree of freedom in material design is low and the required requirements cannot be met.

  The present invention has been made in view of such circumstances, and makes the adhesive free by forming all or part of a three-dimensional structure having a space such as a pressure chamber filled with a liquid by a deposition method. It is an object of the present invention to provide a liquid discharge head that can satisfy the characteristics required for a three-dimensional structure, such as corrosion resistance, adhesion in a deposition method, lyophilicity, and rigidity, and a method for manufacturing the same. .

  In order to achieve the object, the invention according to claim 1 is a three-dimensional structure in which a pressure chamber filled with a liquid and a space including a flow path for supplying the liquid to the pressure chamber are formed, In a liquid discharge head having a drive element for discharging a liquid in a pressure chamber from a nozzle, all or part of the three-dimensional structure is formed by depositing a layer made of two or more different composition materials on a substrate. It is characterized by being deposited.

  Since all or part of the three-dimensional structure having a space including the pressure chamber and the flow path of the liquid discharge head is formed on the substrate by a deposition method, it can be made adhesive-free, particularly two or more types. Therefore, it is possible to obtain a layer structure with a composition material optimum for the deposition position.

  According to a second aspect of the present invention, in the liquid ejection head according to the first aspect, the deposition method is an aerosol deposition method. The aerosol deposition method is advantageous in that it can be made thicker than other deposition methods such as sputtering and can maintain the crystal structure of the raw material powder.

  According to a third aspect of the present invention, in the liquid ejection head according to the first or second aspect, the substrate is a vibration plate, and the drive element is a piezoelectric element that drives the vibration plate.

  4. The liquid ejection head according to claim 1, wherein the composition material is composed of the composition material in a graded manner continuously or stepwise in the deposition direction of the layer. It is characterized by having. According to this, the adhesion between the layers formed by the deposition method is improved.

  The liquid ejection head according to any one of claims 1 to 4, wherein a nozzle plate having a composition different from that of the substrate is formed in the three-dimensional structure, and the three-dimensional structure includes: A composition material close to the composition material of the substrate is used on the substrate side, and a composition material close to the composition material of the nozzle plate is used on the nozzle plate side.

  That is, since the composition material deposited on the substrate is similar to the composition material of the substrate (preferably the same), the adhesion with the substrate is good, and similarly, the composition of the substrate and the composition is the same. Since the composition material of the layer that is in close contact with the different nozzle plate is similar to the composition material of the nozzle plate (preferably the same), the adhesion with the nozzle plate is improved. The nozzle plate may be a separately prepared one or may be formed by a deposition method.

  6. The liquid discharge head according to claim 1, wherein the three-dimensional structure is a lyophilic liquid with the liquid as a composition material of a layer constituting a corner of the pressure chamber. It is characterized by the use of highly specific ones. That is, bubbles are likely to accumulate at the corners of the pressure chamber when the liquid is filled, but bubbles can be prevented from accumulating by using a highly lyophilic composition material for this layer.

  The liquid ejection head according to any one of claims 1 to 4, wherein the three-dimensional structure uses a highly rigid composition material on the substrate side and a low rigidity on the nozzle side. It is characterized in that a composition material is used. By using a highly rigid composition material on the substrate side, deformation of the layer made of a low rigidity composition material is ensured when filling the liquid into the pressure chamber (refilling) while ensuring the discharge performance during liquid discharge with a high slew rate. Thus, a damper effect that suppresses the oscillation of the liquid filled in the pressure chamber is obtained.

  The liquid ejection head according to any one of claims 1 to 4, wherein the three-dimensional structure includes a composition material having high corrosion resistance to a liquid and a composition having high adhesion to a substrate by a deposition method. The characteristics of the respective composition materials are averaged by stacking at least two of the material, the highly lyophilic composition material, and the highly rigid composition material. Thereby, the material design freedom of the composition material constituting the three-dimensional structure is greatly improved.

  In the invention according to claim 9, the aerosol containing the raw material powder is sprayed onto the substrate by the aerosol deposition method, and the powder is deposited on the substrate to supply the pressure chamber and the liquid to the pressure chamber. A method for manufacturing a liquid discharge head that forms all or part of a three-dimensional structure having a space including a flow path for the purpose, wherein an aerosol containing powder made of a first composition material is sprayed onto the substrate. A step of patterning the first layer made of the first composition material on the substrate, and an aerosol containing a powder made of a second composition material different from the first composition material. Spraying onto the first layer, and patterning the second layer made of the second composition material on the first layer.

  According to the present invention, all or part of a three-dimensional structure having a space such as a pressure chamber filled with a liquid is formed on a substrate by a deposition method using a layer made of two or more different composition materials. Therefore, it can be made adhesive-free, and by appropriately changing the composition material of each layer, the corrosion resistance required for the three-dimensional structure, adhesion in the deposition method, lyophilicity, rigidity, etc. The characteristics can be satisfied.

  Hereinafter, preferred embodiments of a liquid discharge head and a manufacturing method thereof according to the present invention will be described in detail with reference to the accompanying drawings.

[Outline of inkjet recording apparatus]
First, an outline of an ink jet recording apparatus to which a liquid discharge head according to the present invention is applied will be described.

  FIG. 1 is an overall configuration diagram of an ink jet recording apparatus. As shown in the figure, the inkjet recording apparatus 10 includes a printing unit 12 having a plurality of liquid ejection heads (hereinafter simply referred to as “heads”) 12K, 12C, 12M, and 12Y provided for each color of ink. An ink storage / loading unit 14 that stores ink to be supplied to each of the heads 12K, 12C, 12M, and 12Y, a paper feeding unit 18 that supplies the recording paper 16, and a decurling unit 20 that removes curl from the recording paper 16. A suction belt conveyance unit 22 that is disposed opposite to the nozzle surface (ink ejection surface) of the printing unit 12 and conveys the recording paper 16 while maintaining the flatness of the recording paper 16, and a printing result by the printing unit 12 And a paper discharge unit 26 that discharges printed recording paper (printed matter) to the outside.

  The recording paper 16 delivered from the paper supply unit 18 retains curl due to having been loaded in the magazine. In order to remove this curl, heat is applied to the recording paper 16 by the heating drum 30 in the direction opposite to the curl direction of the magazine in the decurling unit 20.

  In the case of an apparatus configuration that uses roll paper, a cutter (first cutter) 28 is provided as shown in FIG. 1, and the roll paper is cut into a desired size by the cutter 28. The cutter 28 includes a fixed blade 28A having a length equal to or greater than the conveyance path width of the recording paper 16, and a round blade 28B that moves along the fixed blade 28A. The fixed blade 28A is provided on the back side of the print. The round blade 28B is disposed on the printing surface side with the conveyance path interposed therebetween. Note that the cutter 28 is not necessary when cut paper is used.

  After the decurling process, the cut recording paper 16 is sent to the suction belt conveyance unit 22. The suction belt conveyance unit 22 has a structure in which an endless belt 33 is wound between rollers 31 and 32, and at least portions facing the nozzle surface of the printing unit 12 and the sensor surface of the printing detection unit 24 are horizontal ( Flat surface).

  The belt 33 has a width that is greater than the width of the recording paper 16, and a plurality of suction holes (not shown) are formed on the belt surface. As shown in FIG. 1, a suction chamber 34 is provided at a position facing the nozzle surface of the print unit 12 and the sensor surface of the print detection unit 24 inside the belt 33 spanned between the rollers 31 and 32. Then, the suction chamber 34 is sucked by the fan 35 to be a negative pressure, whereby the recording paper 16 on the belt 33 is sucked and held.

  The power of a motor (not shown) is transmitted to at least one of the rollers 31 and 32 around which the belt 33 is wound, so that the belt 33 is driven in the clockwise direction in FIG. The recording paper 16 is conveyed from left to right in FIG.

  Since ink adheres to the belt 33 when a borderless print or the like is printed, the belt cleaning unit 36 is provided at a predetermined position outside the belt 33 (an appropriate position other than the print area).

  A heating fan 40 is provided on the upstream side of the printing unit 12 on the paper conveyance path formed by the suction belt conveyance unit 22. The heating fan 40 heats the recording paper 16 by blowing heated air onto the recording paper 16 before printing. Heating the recording paper 16 immediately before printing makes it easier for the ink to dry after landing.

  The printing unit 12 is a so-called full line type head in which line type heads having a length corresponding to the maximum paper width are arranged in a direction (main scanning direction) orthogonal to the paper feed direction (see FIG. 2). As shown in FIG. 2, each of the print heads 12K, 12C, 12M, and 12Y has an ink discharge port (nozzle) over a length that exceeds at least one side of the maximum size recording paper 16 targeted by the inkjet recording apparatus 10. It is composed of a plurality of line type heads.

  Heads 12K, 12C, 12M, and 12Y corresponding to the respective color inks are arranged in the order of black (K), cyan (C), magenta (M), and yellow (Y) from the upstream side along the feeding direction of the recording paper 16. Yes. A color image can be formed on the recording paper 16 by ejecting the color inks from the heads 12K, 12C, 12M, and 12Y while conveying the recording paper 16, respectively.

  The print detection unit 24 includes a line sensor for imaging the droplet ejection result of the print unit 12, and functions as means for checking nozzle clogging and other ejection defects from the droplet ejection image read by the line sensor.

  A post-drying unit 42 is provided following the print detection unit 24. The post-drying unit 42 is means for drying the printed image surface, and for example, a heating fan is used. Since it is preferable to avoid contact with the printing surface until the ink after printing is dried, a method of blowing hot air is preferred.

  A heating / pressurizing unit 44 is provided following the post-drying unit 42. The heating / pressurizing unit 44 is a means for controlling the glossiness of the image surface, and pressurizes with a pressure roller 45 having a predetermined surface uneven shape while heating the image surface to transfer the uneven shape to the image surface. To do.

  The printed matter generated in this manner is cut into a predetermined size by the cutter 28 and then discharged from the paper discharge unit 26. It is preferable that the original image to be printed (printed target image) and the test print are discharged separately. The ink jet recording apparatus 10 is provided with a sorting means (not shown) that switches the paper discharge path so as to select the print product of the main image and the print product of the test print and send them to the discharge units 26A and 26B. Yes. Note that when the main image and the test print are simultaneously formed in parallel on a large sheet, the test print portion is separated by a cutter (second cutter) 48.

[Film formation method by aerosol deposition method (hereinafter referred to as “AD method”)]
Next, a film forming method by the AD method used for manufacturing the liquid discharge head according to the present invention will be described.

  FIG. 3 is a schematic view showing a film forming apparatus using the AD method. This film forming apparatus has an aerosol generation container 52 for storing a raw material powder 51. Here, the aerosol refers to solid or liquid fine particles suspended in a gas.

The aerosol generation container 52 is provided with a carrier gas introduction part 53, an aerosol lead-out part 54, and a vibration part 55. By introducing a gas such as nitrogen gas (N ₂ ) from the carrier gas introduction part 53, the raw material powder stored in the aerosol generation container 52 is spouted to generate an aerosol. At that time, vibration is applied to the aerosol generation container 52 by the vibration unit 55, whereby the raw material powder is stirred and the aerosol is efficiently generated. The generated aerosol is guided to the deposition chamber 56 through the aerosol deriving unit 54.

  The film forming chamber 56 is provided with an exhaust pipe 57, a nozzle 58, and a movable stage 59. The exhaust pipe 57 is connected to a vacuum pump and exhausts the film forming chamber 56. The aerosol generated in the aerosol generation container 52 and guided to the film forming chamber 56 through the aerosol deriving unit 54 is ejected from the nozzle 58 toward the substrate 50. Thereby, the raw material powder collides and accumulates on the substrate 50. The substrate 50 is placed on a movable stage 59 that is movable in three dimensions, and the relative position between the substrate 50 and the nozzle 58 is adjusted by controlling the movable stage 59.

[Liquid discharge head manufacturing method]
Next, a method for manufacturing a liquid discharge head according to the present invention will be described.

  FIG. 4 shows the case where the pressure chamber partition wall 64 ′ is formed on the diaphragm 60 by the AD method.

As shown in FIG. 4A, first, a resist 62 having a planar shape of a pressure chamber is formed on a diaphragm 60 made of stainless steel (SUS430) (resist patterning). The thickness of the resist 62 is 10 μm or more. The diaphragm 60 is not limited to SUS430, and may be an oxide ceramic system such as glass, SiO ₂ , Al ₂ O ₃ , for example.

Next, as shown in FIG. 4B, an Al ₂ O ₃ film 64 made of a pressure chamber partition material (eg, Al ₂ O ₃ ) is formed by the AD method. That is, the Al ₂ O ₃ single crystal powder having an average particle size of 0.3 μm is used to drive the film forming apparatus shown in FIG. 3 to form the Al ₂ O ₃ film 64 having a thickness of 10 μm.

Subsequently, as shown in FIG. 4C, the resist 62 is dissolved using acetone, and the Al ₂ O ₃ film 64 on the resist 62 is lifted off. By this lift-off, a pressure chamber partition wall 64 ′ made of an Al ₂ O ₃ film 64 is formed on the diaphragm 60 in a pattern. A pressure chamber 65 is formed by the pressure chamber partition wall 64 ′.

  Next, heat treatment (annealing) for removing internal stress is performed. Annealing is performed, for example, by holding 600 ° C. for 1 hour. Further, etching is performed so that the diaphragm 60 has a desired thickness as necessary.

  FIG. 5 shows a case where a piezoelectric element is formed on the back surface of the diaphragm 60.

That is, the common electrode 66 is formed on the back surface of the diaphragm 60. In the common electrode 66, a titanium oxide layer (TiO ₂ ) serving as an adhesion layer is formed by sputtering or the like, and a platinum layer (Pt) serving as a conductive layer is formed thereon by sputtering or the like, and has a total thickness of about 0.5 μm. have.

  After the common electrode 66 is formed on the diaphragm 60 as described above, a lead zirconate titanate (PZT) film 67 for driving the diaphragm 60 is formed at a position corresponding to the pressure chamber 65 of the common electrode 66. Further, individual electrodes 68 are formed on the PZT film 67. In this case, similar to the method shown in FIGS. 4A and 4B, resist patterning, formation of the PZT film 67 by the AD method, and formation of the electrode, the PZT is moved to a position corresponding to the pressure chamber 65 by lift-off. A film 67 and individual electrodes 68 are formed.

Thereafter, annealing treatment and poling are performed. When a voltage is applied between the common electrode 66 and the individual electrode 68, the PZT film 67 after poling is displaced in a d ₃₁ mode that expands and contracts in the long side direction, and as a result, as the piezoelectric element 69 that drives the diaphragm 60. Function.

  In addition, when the pressure chamber partition wall 64 ′ and the piezoelectric element 69 were formed on both surfaces of the vibration plate 60 by the AD method as in this configuration, the following effects could be confirmed.

  Since the AD method is a method of depositing a highly dense film by spraying powder at high speed, stress tends to remain in the film during film formation. As a result, it has been confirmed that the vibration plate is pulled by the film and tends to bend. Although the bending of the diaphragm is improved by releasing the stress by annealing the film, the stress distortion is offset by forming the film on both sides of the diaphragm by the AD method as in this method, and the necessity of annealing treatment It was confirmed that there was no. Therefore, film formation on both sides of the diaphragm by the AD method as in this configuration is effective from the viewpoint of distortion cancellation, and heat treatment can be reduced, thereby increasing design flexibility and reducing costs associated with man-hour reduction. It was confirmed that the effect was expected.

  In the embodiment shown in FIG. 5, the piezoelectric element 69 is formed by the AD method. However, the present invention is not limited to this, and the piezoelectric element may be attached to the diaphragm 60 with an adhesive.

  Next, the monolithic structure of the three-dimensional structure including the pressure chamber partition wall 64 'from the diaphragm to the nozzle will be described with reference to FIG.

  FIG. 6A shows the case where the pressure chamber partition wall 64 ′ is formed on the diaphragm 60 with a pattern. Note that the pressure chamber partition (first layer) 64 'is formed by patterning by the AD method as shown in FIG.

  After the pressure chamber partition wall 64 ′ is formed into a pattern, the dissolving material 70 is formed into a pattern by the AD method between the patterns of the pressure chamber partition wall 64 ′ as shown in FIG. Fill. Note that the dissolved material 70 is a material that can be formed on the dissolved material 70 by the AD method, and can be removed by wet etching (a method of dipping in a liquid chemical).

  Next, as shown in FIG. 6C, the second layer 72 is pattern-formed by the AD method on the pressure chamber partition (first layer) 64 '. The film formation of the second layer 72 is performed in the same manner as the film formation of the pressure chamber partition wall (first layer) 64 ′, and the dissolved material is formed between the patterns of the second layer 72 as shown in FIG. 70 is filled.

  As shown in FIG. 6E, the third layer 73 to the sixth layer (nozzle plate) 76 are sequentially formed in the same manner as described above.

  Thereafter, as shown in FIG. 6F, the dissolved material 70 is removed by wet etching. Thus, the three-dimensional structure 80 having spaces such as the pressure chamber 65, a common channel 78 for supplying ink to each pressure chamber 65, and a nozzle channel 79 for supplying ink from the pressure chamber 65 to the nozzle 77. Is formed.

  Each layer constituting the three-dimensional structure 80 from the pressure chamber partition wall (first layer) 64 ′ to the nozzle plate (sixth layer) 76 is formed by pattern formation with a resist pattern having a different shape. By appropriately setting the shape of the resist pattern and the thickness of each layer, a three-dimensional monolithic structure having a space of an arbitrary shape including a pressure chamber can be formed.

  In this embodiment, the nozzle plate (sixth layer) 76 having the nozzles 77 is also formed by the AD method. However, the present invention is not limited to this, and a separately prepared nozzle plate may be attached by an adhesive. . When the nozzle plate is attached, the nozzle pitch and the nozzle diameter can be made highly accurate compared to the case where the nozzle plate is formed by the AD method.

  In addition, each layer constituting the three-dimensional structure 80 is formed using a powder of the same composition material, but the present invention is not limited to this, and the film is formed using a powder of a different composition material for each layer. Alternatively, the film may be formed using powders of different composition materials in one layer.

  Next, a case where a pressure chamber partition wall is formed on the vibration plate by the AD method using powders of two or more different composition materials will be described with reference to FIG.

  FIG. 7A shows a case where the pressure chamber partition walls 86 are formed by alternately laminating layers 82 and layers 84 made of different kinds of composition materials.

  Here, the layer 82 is formed from a highly rigid composition material, and the layer 84 is formed from a composition material having high ink resistance. Thereby, the pressure chamber partition wall 86 having a multilayer structure of the layer 82 and the layer 84 is obtained by averaging the characteristics (high rigidity and high corrosion resistance) of the composition material of the respective layers 82 and 84. In addition, combinations of adhesion and lyophilicity, adhesion and corrosion resistance, high rigidity and lyophilicity can be considered.

  Further, when the pressure chamber partition 86 is formed by the AD method, the first aerosol generating container for storing the first powder made of a highly rigid composition material and the first material made of a composition material having high ink resistance. A second aerosol generation container containing the two powders, and the first and second aerosols generated by the first and second aerosol generation containers are alternately ejected from the ejection nozzle. Switch the aerosol flow path.

  Further, instead of switching the aerosol flow path, the spray nozzle may be switched as shown below.

  FIG. 8A is a schematic diagram of a main part of a film forming apparatus using the AD method. The aerosol generation container 150 of this film forming apparatus is provided with a first nozzle 152 and a second nozzle 154 that can respectively inject a first aerosol containing powders of different composition materials and a second aerosol. Yes.

  When forming a pressure chamber partition wall having a multilayer structure with different compositions on the substrate 160 by the AD method, first, a first aerosol is injected from the first nozzle 152 onto the substrate 160 to form the first layer 162 (FIG. 8 (B)). Subsequently, the nozzle to be ejected is switched, and the second aerosol is ejected from the second nozzle to form the second layer 164 on the first layer 162 (FIG. 8C).

  The composition material of each layer constituting the pressure chamber partition is not limited to the above-described embodiment, and the composition material such as a composition material having high adhesion in the AD method and a composition material having high lyophilicity with the ink liquid May be selected. Further, the pressure chamber partition wall may be configured by sequentially stacking layers made of three or more kinds of composition materials. Furthermore, not only the pressure chamber partition (first layer) but also the other layers (the second layer 72 to the sixth layer 76 shown in FIG. 6) may be configured in the same manner as the first layer.

  FIGS. 7B and 7C each show an embodiment of a pressure chamber partition wall having a gradient composition.

  That is, the pressure chamber partition walls 88 and 89 shown in FIGS. 7B and 7C continuously change the mixing ratio of the first aerosol and the second aerosol made of two kinds of composition materials, and the mixing is performed. The pressure chamber partition wall 88 is continuously inclined from one end to the other end of the pressure chamber partition wall 89 by depositing powder from the spray nozzle and depositing powder on the vibration plate 60. The pressure chamber partition wall 89 is composed of a gradient composition continuously from both ends of the pressure chamber partition wall 88 toward the center. The mixing ratio of the two types of aerosols is not limited to being continuously changed in the film thickness direction, but may be changed in stages.

  Next, an example in which a three-dimensional structure including a pressure chamber is constituted by two or more kinds of composition materials will be described.

[First Embodiment of Head for Improving Adhesion at Material Bonding]
FIG. 9 is a cross-sectional view of a head including a pressure chamber partition wall in which a composition material is graded. It is assumed that the diaphragm 90 of the head of the first embodiment shown in the figure is made of stainless steel (SUS430), and the nozzle plate 92 is made of nickel (Ni). In this case, the pressure chamber partition wall 94 of the three-dimensional structure from the vibration plate 90 to the nozzle plate 92 has a gradient composition so as to continuously change from SUS430 to nickel (Ni).

  That is, when depositing the powder on the diaphragm 90 by the AD method, first, the first aerosol containing the powder of SUS430 is sprayed on the diaphragm 90 to deposit the powder of SUS430. The mixing ratio between the aerosol and the second aerosol containing nickel (Ni) powder is continuously changed (the proportion of the first aerosol is gradually decreased and the proportion of the second aerosol is gradually increased). In the position where the nozzle plate 92 is formed, only the second aerosol is sprayed to deposit nickel (Ni) powder.

  By forming the pressure chamber partition wall 94 in a gradient composition as described above, the composition of the pressure chamber partition wall 94 at the bonding portion between the vibration plate 90 and the nozzle plate 92 can be made the same, thereby the vibration plate 90 and the partition wall 94. The adhesion between the nozzle plate 92 and the partition wall 94 can be improved.

  Furthermore, by making the composition of the diaphragm 90 and the nozzle plate 92 the same as or substantially the same in the bonded portion of the pressure chamber partition wall 94, the linear expansion coefficient can be changed at the bonded portion during heat bonding or head temperature control. Since it becomes the same or substantially the same, there exists an effect which can suppress adhesion peeling.

  In addition, when the vibration plate 90 and the nozzle plate 92 have the same or substantially the same composition, and the compositions of the respective adhesive portions are the same or substantially the same, the upper and lower surfaces of the head have substantially the same composition material and have a thickness. Since it is formed, the effect of suppressing the occurrence of warping is born.

  In FIG. 9, reference numeral 96 denotes a piezoelectric element for driving the diaphragm 90.

[Second embodiment of head for preventing bubble generation when ink is filled]
FIG. 10 is a diagram for explaining the cause of bubbles generated when ink is filled. FIG. 10A shows the pressure chamber 100, the supply passage 102 for supplying ink to the pressure chamber 100, the nozzle passage 104, and the like. Is shown.

  FIGS. 10B and 10C are enlarged cross-sectional views of the main part of FIG. 10A, respectively, showing the connection between the pressure chamber 100 and the supply path 102.

  When ink is supplied from the supply path 102 into the pressure chamber 100, as shown in FIG. 10B, if the tip of the ink 106 becomes spherical, the ink 106 and the corner 100 </ b> A of the pressure chamber 100 are interposed. Space (bubbles) remains. On the other hand, as shown in FIG. 10C, when the tip of the ink 106 spreads without becoming spherical, no bubbles remain between the ink 106 and the corner 100A of the pressure chamber 100.

  The shape of the tip of the ink 106 changes depending on the viscosity of the ink 106 and the lyophilicity with the ink 106 on the wall surface of the pressure chamber 100, and when the viscosity of the ink 106 is constant, The higher the liquidity, the more bubbles can be prevented.

  FIG. 11 is a cross-sectional view of a head including a pressure chamber partition wall that prevents the generation of bubbles during ink filling, and FIG. 12 is a perspective view of the pressure chamber of the head shown in FIG. In FIG. 11, the same reference numerals are given to portions common to FIG. 9, and detailed description thereof is omitted. In FIG. 12, 116 is an opening in the pressure chamber communicating with the ink supply path, and 118 is an opening in the pressure chamber communicating with the nozzle flow path.

In FIG. 11, the pressure chamber partition 120 from the diaphragm 90 to the nozzle plate 92 is made of a first layer 110 made of a lyophilic material such as TiO ₂ or ZnO, and a material such as Cr, another metal, or ceramic. The second layer 112 and the third layer 114 made of a lyophilic material are stacked. In addition, each layer of the pressure chamber partition 120 is sequentially formed by the AD method.

  As described with reference to FIG. 10, since air bubbles are likely to accumulate in the corners of the pressure chamber, the head of the second embodiment is configured to make the difficulty of attaching bubbles between the wall surfaces of the corners of the pressure chamber and other wall surfaces equal. The composition material of the layers (the first layer 110 and the third layer 114) constituting the corner is a lyophilic material.

  Note that the pressure chamber partition 120 of the head of the second embodiment may be continuously graded in the same manner as the pressure chamber partition 94 of the head of the first embodiment shown in FIG.

[Third embodiment of head capable of stably supplying ink]
FIG. 13 is a cross-sectional view of a head including a pressure chamber partition wall that can stably supply ink. In FIG. 13, parts common to those in FIG. 9 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In FIG. 13, the pressure chamber partition 140 from the diaphragm 90 to the nozzle plate 92 includes a first layer 130 made of a highly rigid material such as Cr and Ni, a second layer 132, and a low rigidity such as Mg and resin. A third layer 134 made of a material is laminated. The second layer 132 is made of a material having intermediate rigidity between the rigidity of the first layer 130 and the third layer 134, and the rigidity of the pressure chamber partition wall 140 is rigid from the vibration plate 90 toward the nozzle plate 92. It has a sloped rigid structure that decreases. In addition, each layer of the pressure chamber partition 140 is configured by sequentially forming a film by the AD method. In the case of forming a resin layer, the AD method is used for deposition without using a mechanochemical reaction.

  FIG. 14 is a graph showing the pressure change in the pressure chamber when the head having the above-described structure is driven.

  As shown in the figure, first, before the ink is ejected, the diaphragm 90 is driven in a direction to widen the pressure chamber by lowering the voltage applied to the piezoelectric element 96, and PULL control is performed to retract the meniscus. Next, PUSH control for applying a positive voltage and ejecting ink rapidly is performed to eject ink droplets at a sufficient speed. After ink ejection, refill control is performed to lower the applied voltage and fill the pressure chamber with ink. At the time of refilling, it is required to quickly converge the meniscus vibration and shorten the time until the next ink ejection.

  By the way, as shown in FIG. 13, the pressure chamber partition 140 of the pressure chamber is provided with a rigid inclination, so that the following operational effects can be obtained. That is, since the slew rate is high during PUSH control, the low-rigidity third layer 134 acts hard, whereas during refill control, deformation of the low-rigidity third layer 134 (deflection in the direction of the arrow in FIG. 13) causes A damper effect that suppresses meniscus vibration of ink filled in the ink is obtained.

  Incidentally, the pressure chamber partition 140 of the head of the third embodiment may be continuously graded in the same manner as the pressure chamber partition 94 of the head of the first embodiment shown in FIG.

  In this embodiment, pattern formation is performed by resist patterning and lift-off at the time of film formation by the AD method. However, the present invention is not limited to this, and pressure is applied by mask patterning by the AD method using a mask of metal or ceramics. A three-dimensional pressure chamber structure including a chamber partition wall or the like may be formed into a pattern.

  Furthermore, in this embodiment, the liquid ejection head according to the present invention has been described as being used as a line-type inkjet head that ejects ink onto recording paper. It can also be applied to a shuttle type head that reciprocates in a direction perpendicular to the head. Furthermore, the liquid discharge head according to the present invention is a liquid for forming an image recording medium as an image forming head by ejecting a treatment liquid or water onto a recording medium, and by ejecting a coating liquid onto a substrate. It may be used as a discharge head.

FIG. 1 is an overall configuration diagram of an ink jet recording apparatus to which a liquid discharge head according to the present invention is applied. FIG. 2 is a plan view of the main part around the printing unit of the ink jet recording apparatus shown in FIG. FIG. 3 is a schematic view showing a film forming apparatus using the AD method. FIG. 4 is a diagram showing a procedure when a pressure chamber partition is formed on the diaphragm by the AD method. FIG. 5 is a view showing a state in which pressure chamber partitions and a PZT film for driving the diaphragm are formed on both surfaces of the diaphragm. FIG. 6 is a diagram illustrating a monolithic structure procedure for a three-dimensional structure from the diaphragm to the nozzle. FIG. 7 is a diagram used for explaining an embodiment in which a pressure chamber partition wall is formed on a diaphragm by an AD method using powders of two or more different composition materials. FIG. 8A is a schematic diagram of a main part of a film forming apparatus using the AD method, and FIGS. 8B and 8C are views showing a state in which an AD layer is formed on a substrate. FIG. 9 is a cross-sectional view of a head including a pressure chamber partition wall in which a composition material is graded. FIG. 10 is a diagram used to explain the cause of bubbles generated when ink is filled. FIG. 11 is a cross-sectional view of a head including a pressure chamber partition wall that prevents generation of bubbles during ink filling. FIG. 12 is a perspective view of a pressure chamber having a pressure chamber partition wall that prevents generation of bubbles during ink filling. FIG. 13 is a cross-sectional view of a head including a pressure chamber partition wall that can stably supply ink. FIG. 14 is a graph showing a pressure change in the pressure chamber when the head shown in FIG. 13 is driven.

Explanation of symbols

10 ... inkjet recording apparatus, 12 ... printing section, 12K, 12C, 12M, 12Y , 90,50 ... head, 16 ... recording paper, 60, 90 ... diaphragm, 62 ... resist, 64 ... Al ₂ O ₃ film, 64 '... pressure chamber partition (first layer), 65 ... pressure chamber, 66 ... common electrode, 67 ... PZT film, 68 ... individual electrode, 69, 96 ... piezoelectric element, 70 ... dissolved material, 72 ... second layer, 73 ... 3rd layer, 74 ... 4th layer, 75 ... 5th layer, 76 ... 6th layer, 77 ... Nozzle, 78 ... Common channel, 79 ... Nozzle channel, 80 ... Three-dimensional structure, 86, 88, 89, 94, 120, 140 ... pressure chamber partition, 90 ... diaphragm, 92 ... nozzle plate, 110, 130, 162 ... first layer, 112, 132, 164 ... second layer, 114, 134 ... third layer, 160 ... Board

Claims (9)

A pressure chamber filled with a liquid, a three-dimensional structure formed with a space including a flow path for supplying the liquid to the pressure chamber, and a drive element for discharging the liquid in the pressure chamber from a nozzle. In a liquid discharge head having
All or part of the three-dimensional structure is formed by depositing a layer made of two or more different composition materials on a substrate by a deposition method.   The liquid ejection head according to claim 1, wherein the deposition method is an aerosol deposition method.   The liquid ejection head according to claim 1, wherein the substrate is a vibration plate, and the drive element is a piezoelectric element that drives the vibration plate.   4. The liquid discharge head according to claim 1, wherein the three-dimensional structure is configured such that the composition material is graded continuously or stepwise in the deposition direction of the layers. 5.   A nozzle plate having a composition different from that of the substrate is formed in the three-dimensional structure, and the three-dimensional structure uses a composition material close to the composition material of the substrate on the substrate side, and the nozzle plate side has the composition material. The liquid discharge head according to claim 1, wherein a composition material close to the composition material of the nozzle plate is used.   5. The three-dimensional structure according to any one of claims 1 to 4, wherein a material having high lyophilicity with the liquid is used as a composition material of a layer constituting a corner portion of the pressure chamber. The liquid discharge head described.   5. The three-dimensional structure according to claim 1, wherein a high-rigidity composition material is used on the substrate side and a low-rigidity composition material is used on the nozzle side. Liquid discharge head.   The three-dimensional structure includes at least two of a composition material having high corrosion resistance to a liquid, a composition material having high adhesion to a substrate in a deposition method, a composition material having high lyophilicity, and a composition material having high rigidity. The liquid discharge head according to claim 1, wherein the characteristics of the respective composition materials are averaged by stacking the composition materials. There is a space including a pressure chamber and a flow path for supplying liquid to the pressure chamber by spraying aerosol containing the raw material powder onto the substrate by the aerosol deposition method and depositing the powder on the substrate. A method of manufacturing a liquid ejection head that forms all or part of a three-dimensional structure,
Spraying an aerosol containing a powder composed of a first composition material onto the substrate, and patterning the first layer composed of the first composition material on the substrate;
An aerosol containing a powder composed of a second composition material different from the first composition material is sprayed onto the first layer, and a second layer composed of the second composition material is applied onto the first layer. Forming a pattern into a film,
A method for manufacturing a liquid discharge head, comprising:

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