JP2005277151A - Cleaning apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning apparatus, constituted so that materials to be cleaned which are fitted to a support means are cleaned and dried, by moving in a reciprocating manner and rotating in cleaning/draining chambers or the like. <P>SOLUTION: The cleaning device 1 includes an installation chamber 3 to install a cassette 20; a cleaning/draining chamber 8 to clean; a drying chamber 7 to dry and a machine house 5 which adjoins these, and is constituted by a housing 2, having a holder moving opening 11 formed at a wall between the installation room 3 or the like and the machine house 5; and a cassette transfer mechanism 50, which comprises a shaft portion 54 protruding into the installation room 3 from the machine house through a communicative hole; a first drive portion 52 arranged in the machine house 5 and moves the shaft portion 54 along the holder moving opening 11; a second drive portion 53 which rotates the shaft portion 54; and a holder 51 which is mounted to an end of the shaft portion 54 and which holds the cassette 20. The cassette is moved in a reciprocating manner vertically and is rotated inside the cleaning/draining chamber 8 or the drying chamber 7 by the cassette transfer mechanism 50, and the cassette 20 is cleaned and dried. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cleaning apparatus for cleaning an object to be cleaned, and particularly, a cleaning suitable for cleaning an object to be cleaned such as a cassette for housing and holding a semiconductor wafer, a glass substrate, etc. Relates to the device.

  In the manufacturing process of semiconductor parts such as LSI and VLSI, even if extremely fine dust (foreign matter) adheres, it leads to the generation of defective products and a decrease in yield, so manufacturing is performed in an extremely cleaned clean room. Done. Of course, the equipment and parts used in this production also require a high degree of cleanliness. For example, a cassette for storing wafers, glass substrates and the like to be manufactured is required to have high cleanliness, and accordingly, sufficient cleaning is performed before use.

  FIG. 10 shows an example of a wafer cassette 20 that stores and holds a plurality of wafers W. The cassette 20 is made by resin molding and aligns and holds the wafer W in the holding groove 21. Since this cassette 20 is used in a semiconductor manufacturing process or the like, the cassette 20 itself is also required to have a high degree of cleanliness, and various cleaning apparatuses for cleaning such a cassette 20 have been put to practical use in the past (for example, Patent Documents). 1).

JP-A-10-249289

  However, in the conventional cleaning device, the transport device that transports the cassette 20 is reciprocated linearly along the transport direction, and the spray nozzle for cleaning liquid or the like is reciprocated linearly in a direction perpendicular to the transport direction. In this case, the cleaning liquid or the like is sprayed on the cassette 20 to perform cleaning. However, in order to effectively clean the foreign matter adhering to the cassette 20, the angle at which the cleaning liquid or the like is sprayed on the cassette 20 must be changed. There was a problem. As described above, since the holding groove 21 and the like are formed in the cassette 20, by changing the spraying angle of the cleaning liquid with respect to the cassette 20, the cleaning liquid or the like can be sprayed at right angles to each part, and the foreign matter is effectively cleaned. Because it can be done. This problem also applies to the case where pure water is sprayed on the cassette 2 to wash away the cleaning liquid or the like, or air (hot air or the like) is sprayed and dried.

  The present invention has been made in view of such a problem, and a cleaning apparatus configured to clean and dry an object to be cleaned attached to support means by reciprocating and rotating in a cleaning / draining chamber or the like. The purpose is to provide.

In order to solve the above-described problems, a cleaning apparatus according to the present invention includes an installation chamber in which an installation space in which an object to be cleaned (for example, the cassette 20 in the embodiment) is installed, and a cleaning / drainage that cleans and drains the object to be cleaned. A cleaning / draining chamber in which a draining space is formed, a drying chamber for drying an object to be cleaned, and an installation chamber, a cleaning / draining chamber, and a machine room adjacent to the drying chamber. A housing formed with a communication hole (for example, holder moving opening 11 in the embodiment) that integrally connects the installation room, the cleaning / draining room, and the drying room and the machine room on the wall portion between the drying room and the machine room And a shaft portion that protrudes from the machine room through the communication hole into the installation space, the washing / draining space or the drying space, and a first driving means that is disposed in the machine chamber and moves the shaft portion along the communication hole (for example, 1st drive part in embodiment 2) Second driving means (for example, the second driving unit 53 in the embodiment) installed in the machine room for rotating the shaft part around the axial direction of the shaft part; an installation space attached to the tip of the shaft part; A support unit (for example, the cassette transport mechanism 50 in the embodiment) including a holding unit (for example, the holder 51 in the embodiment) that is located in the draining space or the drying space and holds an object to be cleaned, and provided in the cleaning / draining chamber. The cleaning liquid spraying means for spraying the cleaning liquid onto the object to be cleaned (for example, the cleaning liquid spray nozzle 15 in the embodiment) and the cleaning / draining chamber are provided, and the rinsed liquid (pure water) is sprayed to be cleaned. The rinse liquid spraying means (for example, the pure water spray nozzle 16 in the embodiment) for washing away the cleaning liquid adhering to the liquid and the cleaning / draining chamber is sprayed and adhered to the cleaning object. Draining means for blowing the Nsu liquid (e.g., an air knife 17 in the embodiment) and,
It is provided with drying means (for example, hot air knife 14 in the embodiment) that is provided in the drying chamber and blows hot air to the object to be cleaned in the drying space to dry the object to be cleaned.

  Then, after the object to be cleaned is reciprocated by the first drive means and rotated by the second drive means in the cleaning / draining chamber, the object to be cleaned is cleaned by the cleaning liquid ejecting means and the rinse liquid ejecting means, and then the water draining means. Water is drained, and the object to be cleaned is rotated by the second driving means in the drying chamber to dry the object to be cleaned by the drying means.

  In the cleaning apparatus according to the present invention, the cleaning / draining chamber and the drying chamber are formed adjacent to each other, and the object to be cleaned is formed on the wall separating the adjacent cleaning / draining space and the drying space and supported by the support means. A transfer opening (for example, the second transfer opening 12 in the embodiment) that opens and closes the transfer opening and is opened only when the object to be cleaned moves (for example, in the embodiment). And a second opening / closing device 13), which is preferably configured to separate the cleaning / draining space and the drying space.

  Furthermore, in the cleaning apparatus according to the present invention, the support means can eject the rinse liquid from the tip of the shaft portion with the holding portion being detachable from the shaft portion and the holding portion being detached from the shaft portion. The cleaning nozzle is attached to the tip of the shaft portion, and the shaft portion is reciprocated by the first driving means and rotated by the second driving means to inject the rinsing liquid, thereby forming a cleaning / draining space. It is preferable that the cleaning / draining chamber or the drying chamber forming the drying space be cleaned.

  By configuring the cleaning device according to the present invention as described above, in cleaning / draining and drying of an object to be cleaned, a large amount of the object to be cleaned with respect to the sprayed cleaning liquid, rinse liquid and air for draining / drying. These surfaces can be arranged at right angles, and cleaning and drying can be performed reliably. Further, by disposing the first drive means and the second drive means of the support means in a machine room separated from the installation chamber or the like, it is difficult for foreign matter generated due to friction of these drive means to enter the installation chamber or the like. Secondary contamination of the object to be cleaned by these foreign matters can be prevented.

  In addition, by performing draining after cleaning in the cleaning / draining chamber, it is possible to reliably dry the object to be cleaned while suppressing an increase in humidity in the drying chamber. In addition, the transfer opening connecting the cleaning / draining chamber and the drying chamber is closed and separated by an opening / closing device to prevent moisture in the cleaning / draining space from entering the drying space and to prevent an increase in humidity in the drying space. The washed product can be dried. Further, by rinsing liquid from the tip of the shaft portion of the support means, the cleaning and draining chamber is cleaned by reciprocating and rotating the shaft portion in the same manner as cleaning of the object to be cleaned. The cleaning effect of the cleaning object in the cleaning apparatus according to the present invention can be improved.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. First, the configuration of the cleaning apparatus according to the present invention will be described with reference to FIGS. 1 and 2. The cleaning apparatus 1 is provided with an installation chamber 3 for attaching and detaching a cassette 20 to be cleaned to a holder 51 that holds the cassette 20 in the cleaning apparatus 1, and disposed below the installation chamber 3. Cleaning mechanism 4 that drains and dries, and a mechanism that is formed alongside the installation chamber 3 and the side of the cleaning operation unit 4 and that houses a drive unit that moves the holder 51 from the installation chamber 3 to the cleaning operation unit 4 The housing 2 has a chamber 5.

  The front side of the installation chamber 3 is open, and two loading doors 6 and 6 are installed in the opening. The cassette 20 that is cleaned by the cleaning apparatus 1 is attached to the holder 51 located in the installation space 3a in the installation chamber 3 through this opening, and is removed after the cleaning. In the following description, the opening direction of the carry-in doors 6 and 6 will be described as the front.

  Inside the cleaning work section 4, a drying chamber 7 that forms a drying space 7a inside and a cleaning / draining chamber 8 that forms a cleaning / draining space 8a inside are arranged in this order adjacent to each other in the vertical direction. The upper end of the drying chamber 7 is connected to the lower end of the installation chamber 3. A first transfer opening 9 that connects the installation space 3 a and the drying space 7 a is formed on the lower surface of the installation chamber 3 and the upper end surface of the drying chamber 7. In order to open and close the first transfer opening 9, a first opening and closing device 10 that opens upward is disposed as shown in FIG.

  The installation chamber 3, the drying chamber 7, the cleaning / draining chamber 8 and the machine chamber 5 extend vertically up and down substantially in the center in the front-rear direction, and the installation space 3 a, the drying space 7 a, and the cleaning / draining space 8 a A holder moving opening 11 communicating with the inside of the machine room 4 is formed.

  The machine room 5 is provided with a drive unit of a cassette transport mechanism 50 that moves the holder 51 located in the installation space 3a up and down along the above-described holder moving opening 11, and includes a first drive unit 52, A shaft portion that extends from the first drive portion 52 through the holder moving opening 11 in a direction orthogonal to the drive direction of the first drive portion 52 (left and right direction in the cleaning device 1), and the holder 51 is attached to the tip in the installation space 3a. 54, and a second drive unit 53 that rotates the shaft 54 around its axis. Therefore, the holder 51 and the cassette 20 attached to the holder 51 can be moved in the arrangement space 3a, the drying space 7a, and the cleaning / draining space 8a by the first drive unit 52, and the first drive unit. The cassette 20 can be rotated by the second drive unit 53 at the position moved at 52.

  Here, the holder 51 will be described with reference to FIG. The holder 51 has a substantially rectangular frame 51a formed with an opening 51f penetrating vertically in a plan view, and a support member 51b attached to a side of the frame 51a to connect the frame 51a and the shaft portion 54. And holding members 51c and 51d that are disposed so as to face the upper surface side portion of the frame 51a and sandwich and hold the cassette 20 placed on the frame 51a. One holding member 51d is provided with an elastic member 51e facing the other holding member 51c. One end of the wafer insertion port of the cassette 20 is pressed against the elastic member 51e, and the other end is held on the holding member 51c. When combined, the other end of the wafer insertion slot is urged by the elastic member 51e to the holding member 51c to hold the cassette 20.

  The frame 51a may be composed of an outer holder connected to the support member 51b and an inner folder that is detachably attached to the outer folder and has an opening 51f, and the holding members 51c and 51d described above may be provided in the inner folder. it can. According to such a configuration, an inner folder having a mounting interval between the holding members 51c and 51d corresponding to the cassettes 20 having different sizes is prepared, and an appropriate inner folder is selected according to the size of the cassette 20 to be cleaned. By attaching to the cassette 20, it is possible to clean the cassettes 20 of different sizes with the cleaning device 1 according to the present embodiment.

  In addition, as shown in FIG. 4, the holder 51 includes a base end portion 54a that is fixed to the first drive portion 52 and protrudes into the installation space 3a through the holder moving opening 11, and the base end portion 54a. It is comprised from the front-end | tip part 54b by which the support member 51b is attached to the front-end | tip, rotated by the 2nd drive part 53, and it is comprised with respect to the outer peripheral surface of the base end part 54a, and the holder movement opening 11 is put up and down It is also possible to provide two shielding plates 55 and 56 that extend in the direction of. As will be described later, since cleaning liquid and pure water are sprayed onto the cassette 20 in the cleaning operation of the cassette 20, the cleaning liquid and pure water enter the machine chamber 4 through the holder moving opening 11 by the shielding plates 55 and 56. Can be prevented.

  Next, the drying chamber 7 and the cleaning / draining chamber 8 disposed in the cleaning operation unit 4 will be described in detail with reference to FIGS. 5 and 6. The drying chamber 7 and the cleaning / draining chamber 8 are adjacent to each other in the vertical direction, and a second transfer opening 12 is formed in the adjacent wall portion so as to penetrate the drying space 7a and the cleaning / draining space 8a. . And in order to open and close this 2nd conveyance opening 12, as shown in FIG. 6, the 2nd opening-and-closing apparatus 13 and 13 which opens and closes by a double door is arrange | positioned below.

  Hot air knives 14 for blowing warm air to the cassette 20 held by the holder 51 and moved to the drying space 7 a by the first driving unit 52 are disposed on both front and rear sides in the drying chamber 7. As shown in FIG. 7, a large number of small holes 14 a are formed side by side on the side surface of the hot air knife 14, and the internal heater 14 b disposed in the hot air knife 14 has an internal heater 14 b. The temperature of the air sent to the inside is increased, and hot air is blown to the cassette 20 from the small hole 14a.

  A cleaning liquid jet nozzle 15 and a pure water jet nozzle 16 extending in the front-rear direction are arranged side by side on the front side in the cleaning / draining chamber 8. As shown in FIG. 8, a plurality of spray nozzles 15 a (16 a) are attached to the cleaning liquid spray nozzle 15 and the pure water spray nozzle 16 along the side surface extending in the left-right direction. By feeding water and spraying from the spray nozzle 15a (16a), the first drive unit 52 is configured to spray the cassette 20 moved to the cleaning / draining space 8a. The injection nozzle 15a (16a) is formed such that the cleaning liquid or pure water is sprayed in a fan shape up and down in order to effectively perform cleaning with the cleaning liquid and flushing of the cleaning liquid with pure water.

  On the other hand, an air knife 17 for draining extending in the front-rear direction is disposed on the rear side of the cleaning / draining chamber 8. A plurality of small holes 17a are formed on the side surfaces of the air knife 17 extending left and right as shown in FIG. Therefore, the water remaining in the cassette 20 can be blown off by sending air into the air knife 17 and spraying it from the small hole 17a. The air sprayed from the air knife 17 is set to have a high pressure (high speed) in order to blow off moisture and drain it. Also,

  In the drying chamber 7 and the cleaning / draining chamber 8, as shown in FIGS. 5 and 6, etc., exhaust pipes 19a and 19b connected to the exhaust ports formed on the front and rear sides are formed. Alternatively, the air jetted from the air knife 17 is discharged to the outside through the exhaust pipes 19a and 19b.

  The bottom surface 8b of the cleaning / draining chamber 8 is formed so as to be inclined downward from the front to the rear, and the cleaning liquid or pure water used for cleaning drops on the rear lower end surface of the cleaning / draining chamber 8. A discharge port 18 is formed to discharge the waste liquid accumulated on the bottom surface 8b to the outside. At this time, as shown in FIG. 6, by arranging the air knife 17 on the side surface where the discharge port 18 is formed, the air jetted from the air knife 17 hits the opposite side surface and partly flows downward to the bottom surface 8b. Therefore, the water falling on the bottom surface 8b is pushed by the air flow and is easily discharged from the discharge port 18.

  In the cleaning device 1, the above-described holder 51 of the cassette transport mechanism 50 is configured to be removable from the shaft portion 54. For example, as shown in FIG. 9, the distal end portion 54b can be removed from the proximal end portion 54a. A flow path 57 is formed inside the shaft portion 54 (base end portion 54a), and pure water can be injected from the tip end portion of the shaft portion 54 (base end portion 54a). Therefore, a cleaning nozzle 58 is attached instead of the holder 51, and pure water is ejected from the cleaning nozzle 58, and the cleaning nozzle 58 is reciprocated up and down by the first driving unit 52 and the second driving means 53 and rotated. Then, pure water can be sprayed on the inner walls of the drying chamber 7 and the cleaning / draining chamber 8 to clean foreign matters, cleaning liquid, and the like attached thereto. The cleaning nozzle 58 can be configured such that pure water is ejected in a fan shape in the same manner as the pure water ejection nozzle 16 described above.

  Now, a method for cleaning the cassette 20 using the cleaning apparatus 1 configured as described above will be described. As described above, the loading doors 6 and 6 of the installation chamber 3 are opened, and the cassette 20 is attached to the holder 51 located in the installation space 3a. In addition, as shown in FIG. 2, when the holder 51 is located in the installation space 3a, the 1st opening / closing device 10 is the state opened upwards. Then, after closing the carry-in doors 6 and 6, when the cleaning start button (not shown) of the cleaning device 1 is operated to start cleaning the cassette 20, the holder 51 is moved downward by the first drive unit 52, and the first The first opening / closing device 10 is closed by entering the drying space 7a through the transport opening 9. Further, when the holder 51 is moved downward by the first driving unit 52, the second opening / closing devices 13 and 13 are opened, the holder 51 enters the cleaning / draining space 8 a through the second conveying opening 12, and the second opening / closing device 13. , 13 are closed.

  When the cassette 20 enters the cleaning / draining space 8 a, the cleaning liquid is sprayed from the cleaning liquid spray nozzle 15, and the cleaning liquid is sprayed onto the cassette 20 held by the holder 51. At this time, according to a predetermined procedure, the holder 51 is reciprocated up and down in the cleaning / draining space 8 a by the first driving unit 52, and the holder 51 is rotated by the second driving unit 53. Therefore, the cleaning liquid is sprayed on the outer peripheral surface 23, the inner peripheral surface 22 and the holding groove 21 formed on the inner peripheral surface 22 of the cassette 20, and the adhered foreign matter is washed away. Since the opening 51f is formed in the frame 51a of the holder 51 as described above, the cleaning liquid can be sprayed to the inner peripheral surface 22 and the like of the cassette 20 through the opening 51f.

  As described above, when the cleaning liquid is sprayed from the cleaning liquid spray nozzle 15 for a predetermined time to clean the cassette 20, the spray of the cleaning liquid is stopped, and then pure water is sprayed from the pure water spray nozzle 16. It is sprayed on the cassette 20. Also at this time, according to a predetermined procedure, the holder 51 is reciprocated up and down in the cleaning / draining space 8 a by the first driving unit 52, and the holder 51 is rotated by the second driving unit 53. Therefore, the cleaning liquid adhering to the cassette 20 can be efficiently washed away with pure water.

  When pure water is jetted from the pure water jet nozzle 16 for a predetermined time to wash away the cleaning liquid adhering to the cassette 20, high pressure air is jetted from the air knife 17 and moisture adhering to the cassette 20. Draining to blow off is performed. At this time, similarly to the above, the holder 51 is reciprocated up and down in the cleaning / draining space 8 a by the first driving unit 52 according to a predetermined procedure, and the holder 51 is rotated by the second driving unit 53. Then, the moisture adhering to each part of the cassette 20 is efficiently blown away.

  As described above, when the cleaning and draining of the cassette 20 is completed in the cleaning / draining space 8a, the second opening / closing devices 13 and 13 are opened, and the holder 51 is moved upward by the first driving unit 52, and the second transport opening 12 is opened. The second opening and closing devices 13 and 13 are closed by moving to the drying space 7a. Then, the holder 51 is rotated by the second driving unit 53 at a substantially central portion of the drying space 7 a, and moisture attached to the cassette 20 is evaporated by the hot air blown from the hot air knife 14 and dried. When the drying is completed by blowing hot air for a predetermined time, the first opening / closing device 10 is opened upward, the first transport opening 9 is taken, the holder 51 is moved upward by the first driving unit 52, and the installation space is opened. Stop at a predetermined position 3a. Then, the carry-in doors 6 and 6 are opened, the cassette 20 that has been cleaned is removed from the holder 51, and a series of cleaning operations are completed.

  After cleaning the cassette 20 according to the above-described procedure, the holder 51 is removed from the shaft portion 54 (base end portion 54a), and a cleaning nozzle 58 is attached instead. The self-clean button of the cleaning device 1 according to this embodiment is provided. Can be used to clean the drying chamber 7 and the cleaning / draining chamber 8 with pure water. As a result, it is possible to prevent contamination of the cassette 20 to be subsequently cleaned with foreign matter or cleaning liquid adhering thereto.

  In the cleaning apparatus 1 according to the present embodiment, the cassette 20 is measured by measuring the number of foreign substances (contamination) contained in the cleaning liquid used for cleaning discharged from the discharge port 18 and the waste water of pure water. The cleaning effect, that is, the cleanliness of the cassette 20 is measured.

  By configuring the cleaning apparatus 1 according to the present embodiment as described above, the holder 51 (cassette 20) is reciprocated up and down by the first drive unit 52 and the second drive unit 53 in the cleaning / draining space 8a. By rotating together, cleaning liquid and pure water can be sprayed on each part of the cassette 20, and since cleaning liquid and pure water can be sprayed at right angles to many parts, foreign matter adhering to the cassette 20 and cleaning The cleaning solution used for the cleaning can be surely removed. Similarly, the cassette 20 can be efficiently dried by rotating the holder 51 (cassette 20) in the drying space 7a. At this time, by draining the cassette 20 with the air knife 17 in the cleaning / draining space 8a, an increase in humidity in the drying space 7a can be suppressed and the cassette 20 can be efficiently dried. Further, by separating the drying space 7a and the cleaning / draining space 8a by the second opening / closing device 13, it is possible to prevent moisture in the cleaning / draining space 8a after cleaning of the cassette 20 from entering the drying space 7a. Further, it is possible to prevent the humidity of the drying space 7a from rising and to efficiently dry the cassette 20.

  Further, in the cassette transport mechanism 50, the first drive unit 52 and the second drive unit 53 are disposed in the machine room 4 separated from the installation room 3, the drying room 7, and the cleaning / draining room 8, thereby Since there is no possibility that foreign matter generated by friction adheres to the cassette 20 when the first and second drive units 52 and 53 are driven, secondary contamination of the cassette 20 by these drive units 52 and 53 can be prevented. it can. At this time, an exhaust pipe (not shown) for discharging the internal air is connected to the machine room 4, and is connected to the exhaust pipes 19 a and 19 b connected to the drying chamber 7 and the cleaning / draining chamber 8. Therefore, when the hot air knife 14 or the air knife 17 is used in the drying chamber 7 or the cleaning / draining chamber 8, the machine chamber 4 is caused by the flow of air in the exhaust pipes 19a, 19b discharged from the drying space 7a or the cleaning / draining space 8b. The inside becomes negative pressure, and the foreign matter in the machine room 4 is discharged to the outside. Further, because the air jetted from the hot air knife 14 or the air knife 17 causes the pressure in the drying chamber 7 or the cleaning / draining chamber 8 to be higher than the pressure in the machine chamber 4, the machine passes through the holder moving opening 11. Air flows into the chamber 4 and foreign matter in the machine chamber 4 does not flow into the drying chamber 7 or the cleaning / draining chamber 8.

  In the above embodiment, the case where the installation chamber 3, the drying chamber 7, and the cleaning / draining chamber 8 are configured in the vertical direction has been described. However, the present invention is not limited to this configuration and is aligned in the horizontal direction. It is also possible to configure.

It is a front view which shows the whole washing | cleaning apparatus which concerns on this invention. It is a side view which shows the whole washing | cleaning apparatus based on this invention. It is a figure which shows the holder holding a cassette, (A) is a top view, (B) is a side view. It is a figure which shows the principal part of a cassette conveyance mechanism, (A) is a front view, (B) is a side view. It is a front view which shows a drying chamber and a washing | cleaning / draining chamber. It is a side view which shows a drying chamber and a washing | cleaning / draining chamber. It is a front view of a hot air knife. It is VIII-VIII sectional drawing of FIG. It is a side view at the time of attaching a washing nozzle to a cassette conveyance mechanism. It is a perspective view which shows a wafer and a wafer cassette.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Housing | casing 3 Installation room 3a Installation space 5 Machine room 7 Drying room 7a Drying space 8 Cleaning / draining room 8a Cleaning / draining space 11 Holder movement opening 12 Second conveyance opening (conveyance opening)
13 Second switchgear (switchgear)
14 Hot air knife (drying means)
15 Nozzle for cleaning liquid injection (cleaning liquid injection means)
16 Nozzle for pure water injection (rinse liquid injection means)
17 Air knife (draining means)
20 Wafer cassette (object to be cleaned)
50 cassette transport mechanism (support means)
51 Holder (holding part)
52 1st drive part (1st drive means)
53 2nd drive part (2nd drive means)
54 Shaft 58 Cleaning nozzle

Claims (3)

An installation room in which an installation space for installing the object to be cleaned is formed, a cleaning / draining room in which a cleaning / draining space for cleaning and draining the object to be cleaned is formed, and a drying space for drying the object to be cleaned is formed. A drying chamber, and a machine room adjacent to the installation chamber, the cleaning / draining chamber, and the drying chamber, and a wall portion between the installation chamber, the cleaning / draining chamber, and the drying chamber and the machine chamber A housing formed with a communication hole integrally connecting the installation chamber, the cleaning / draining chamber, and the drying chamber and the machine chamber;
A shaft portion protruding from the machine room through the communication hole into the installation chamber, the cleaning / draining chamber or the drying chamber, and a first shaft disposed in the machine chamber and moving the shaft portion along the communication hole. A driving means, a second driving means disposed in the machine chamber for rotating the shaft portion around the axial direction, and a mounting device, a washing / draining chamber or a drying chamber attached to a tip of the shaft portion; A support means comprising a holding part positioned and holding the object to be cleaned;
A cleaning liquid spraying means provided in the cleaning / draining chamber and spraying cleaning liquid onto the object to be cleaned;
Rinsing liquid ejecting means provided in the cleaning / draining chamber, spraying a rinsing liquid onto the object to be cleaned to wash away the cleaning liquid adhering to the object to be cleaned,
A draining means provided in the cleaning / draining chamber, for spraying air to the object to be cleaned and blowing off the rinse liquid adhering to the object to be cleaned;
A drying means provided in the drying chamber, for drying the object to be cleaned by blowing warm air on the object to be cleaned;
In the cleaning / draining chamber, the object to be cleaned is reciprocated by the first driving means and rotated by the second driving means to clean the object to be cleaned by the cleaning liquid ejecting means and the rinse liquid ejecting means. Later, drain with the draining means,
A cleaning apparatus, wherein the object to be cleaned is dried by the drying means by rotating the object to be cleaned by the second driving means in the drying chamber. The washing / draining chamber and the drying chamber are formed adjacent to each other,
A transport opening that is formed in a wall partitioning the adjacent cleaning / draining space and the drying space and moves the object to be cleaned supported by the support means between the adjacent spaces;
An opening / closing device that closes the transfer opening and is opened only when the object to be cleaned moves;
The cleaning apparatus according to claim 1, wherein the cleaning apparatus is configured to separate the cleaning / draining space and the drying space. The support means is configured to be capable of ejecting a rinsing liquid from the tip of the shaft portion in a state where the holding portion is detachable with respect to the shaft portion and the holding portion is detached from the shaft portion,
A cleaning nozzle is attached to the tip of the shaft portion, the shaft portion is reciprocated by the first driving means, and rotated by the second driving means to inject the rinse liquid, whereby the cleaning / draining space is formed. The cleaning apparatus according to claim 1 or 2, wherein the cleaning / draining chamber to be formed or the drying chamber to form the drying space is cleaned.

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