JP2005276501A - Ion source, processing unit, and processing method using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ion source with high and stable output power ions. <P>SOLUTION: This ion source comprises a supply part supplying fine particles and/or a liquid containing the fine particles , a capillary flowing the supplied fine particles and/or the liquid, a drive part discharging the fine particles and/or the liquid from the capillary, and a charging means charging the discharged fine particles and/or the liquid. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention provides ions for lithography using ions, ion implantation, sputtering, milling, vapor deposition, film formation, mass spectrometry, or so-called nanofabrication in which fine particles are arranged at a desired position for fine processing such as semiconductor manufacturing. The present invention relates to a source, a processing apparatus using the same, and a processing method.

  A technique of vapor deposition and film formation using cluster ions, which is one of nano-processing, has been proposed (see Patent Document 1), which is shown in FIG.

  In FIG. 4, a mixed gas 102 in which ultrafine particles are mixed with a carrier gas made of hydrogen, oxygen, nitrogen, or the like flows inside the gas pipe 101 and flows out into the crucible 103 from the hole at the tip. A variable flow rate adjusting valve 104 is provided to control the flow rate.

  As an electrode for charging the mixed gas 102, the gas tube 101 is a cathode and the crucible 103 is an anode.

  A heater 105 is provided on the outer periphery of the crucible 103 to heat the mixed gas 102.

  In order to control the sectional area of the nozzle (drawer port) 106 from the crucible 103, a sectional area variable means 107 is provided.

The cluster ions extracted from the nozzle 104 are accelerated by the acceleration electrode (anode) 109 a and the acceleration electrode (cathode) 108 b toward the substrate 108 and are deposited on the substrate 108.
Japanese Patent Laid-Open No. 4-120271

  However, the above conventional example has the following problems.

  In the mixed gas in which the fine particles are mixed with the carrier gas, the concentration of the fine particles can be uneven, so that it is difficult to stably supply the fine particles. That is, the output of emitted ions is not stable. Further, since the output of ions extracted from the mixed gas is small, when used for processing, a sufficient processing speed cannot be obtained, and the productivity is lowered. The present invention has been invented in view of such problems of the prior art, and an exemplary object of the present invention is to provide an ion source in which emitted ions have a high output and a stable output. It is in.

  In order to achieve the above object, an ion source according to one aspect of the present invention includes a supply unit that supplies fine particles and / or a liquid containing the fine particles, and a capillary that flows the supplied fine particles and / or the liquid. And a driving unit that discharges the fine particles and / or the liquid from the capillary, and a charging unit that charges the discharged fine particles and / or the liquid.

  Further objects and other features of the present invention will be made clear by the preferred embodiments described below with reference to the accompanying drawings.

  An ion source with better performance than before can be provided.

  Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

  FIG. 1 shows the overall configuration of this embodiment. In FIG. 1, a liquid mixture 1 is obtained by dissolving and / or stirring fine particles to be extracted later as ions. The capillary 2 has a drive unit for discharging the mixed liquid 1. The mixed liquid 1 that has entered the capillary 2 flows to the tip of the capillary 2 and is discharged from the tip. A so-called ink jet system is preferable as the ejection driving method. For example, a system in which the liquid mixture 1 is ejected by bubble growth caused by heating exceeding film boiling by an electrothermal transducer, a system in which the liquid mixture 1 is ejected by driving a piezo, and the like. There is.

  Next, when the discharged mixed liquid 1 enters an electric field formed between the electrodes 3 including the anode 3a and the cathode 3b, the fine particles are ionized, and the fine particle ions 4 can be extracted from the cathode 3b. Since the atmosphere in the apparatus is a vacuum, the liquid in which the fine particles are dissolved and / or stirred is evaporated, and only the fine particle ions 4 can be extracted.

  In FIG. 2, the structure of the electrode 3 is different from that in FIG. 1, and the capillary 2 itself is used as the electrode 3 (cathode 3a). In FIG. 2, the cathode 3 b serving as an extraction electrode is disposed near the tip of the capillary 2. The first embodiment will be described below using FIG. 1 and FIG. 2 as a common explanatory diagram.

  1 and 2 show a set of capillaries 2, but the present invention is not limited to this, and it is preferable to have an array structure in which a plurality of capillaries 2 are arranged in order to further increase the output.

  For controlling the output of the fine particle ions 4, a method of controlling the discharge amount and the number of discharged droplets of the mixed liquid 1 from the capillary 2 or a method of controlling the electric field between the electrodes 3 is effective. Further, there is a measuring means for measuring the output intensity of ions for the control, and it is desirable to perform the control based on the measurement result of the measuring means, but it is not shown in FIGS.

  Further, in order to promote the dissolution of the mixed liquid 1, it is more preferable to provide a heater on the outer periphery of the capillary 2. Furthermore, in order to promote the stirring of the mixed liquid 1, it is also effective to have at least one of a vibration unit that vibrates the capillary 2 and an ultrasonic wave irradiation unit. Alternatively, it is also effective to provide a spiral groove inside the capillary 2 so that the mixed liquid 1 flows to the tip of the capillary 2 while stirring.

  Further, the charging method for ionization may be performed in a discharge environment with a strong electric field.

  Up to this point, the method of incorporating fine particles to be an ion source into the liquid mixture 1 has been described. However, the present invention is not limited to this. The fine particles are directly ejected to be ionized in an electric field, and fine particle ions 4 are extracted from the cathode 3b. The method of pulling out is also effective.

  The fine particles mainly mean atoms, molecules, and clusters, but are not limited thereto. It can also be applied to a so-called nano-particle-like pulverized one. However, it is preferably a solid before charging.

  After the fine particles are charged and ionized, the fine particle ions 4 are accelerated by an acceleration electrode (not shown), and the substrate is irradiated with the fine particle ions 4 through an electrostatic lens, a mass separator and a deflector to perform processing. The transport of the fine particle ions 4 may be adjusted according to the purpose of processing. Processing is not limited to lithography, ion implantation, sputtering, milling, vapor deposition, film formation, mass spectrometry, and the like, and it is also possible to apply fine particles at desired positions. For example, when processing using fine particles arranged at a desired position as a catalyst, it is effective to perform the processing after the process according to the present invention.

  In Example 1, the method of performing ionization of fine particles in an electric field was described. In this embodiment, a method of emitting fine particle ions by irradiating with high energy will be described.

  FIG. 3 shows the overall configuration of this embodiment. Similar to Example 1, the liquid mixture 1 is obtained by dissolving and / or stirring fine particles to be extracted later as ions. The capillary 2 has a drive unit for discharging the mixed liquid 1. The mixed liquid 1 that has entered the capillary 2 flows to the tip of the capillary 2 and is discharged from the tip. A so-called ink jet system is preferable as the ejection driving method. For example, a system in which the liquid mixture 1 is ejected by bubble growth caused by heating exceeding film boiling by an electrothermal transducer, a system in which the liquid mixture 1 is ejected by driving a piezo, and the like. There is.

  Next, high energy 6 is irradiated from the high energy generation source 5 toward the discharged mixed liquid 1. A high energy generation source 5 is provided in the vicinity of the discharge port and the tip of the capillary 2, and the generated high energy 6 is irradiated to the discharged mixed liquid 1. As described in the first embodiment, since the atmosphere in the apparatus is evacuated, the liquid evaporates and only the fine particles can be ionized. Furthermore, the evaporation of the liquid can be accelerated by high energy 6 irradiation. As the high energy 6, a method using ultraviolet rays, electromagnetic waves such as X-rays or microwaves, or electron beams or ion beams is effective.

  Although one set of capillaries 2 is shown in FIG. 3, the present invention is not limited to this, and it is preferable to have an array structure in which a plurality of capillaries 2 are arranged in order to further increase the output.

  For controlling the output of the fine particle ions 4, a method of controlling the discharge amount of the mixed liquid 1 from the capillary 2 or a method of controlling the output of the high energy 6 irradiated by the high energy generation source 5 is effective. Further, there is a measuring means for measuring the output intensity of ions for the control, and it is desirable to perform control based on the measurement result of the measuring means, but it is not shown in FIG.

  Further, in order to promote the dissolution of the mixed liquid 1, it is more preferable to provide a heater on the outer periphery of the capillary 2. Furthermore, in order to promote the stirring of the mixed liquid 1, it is also effective to have at least one of a vibration unit that vibrates the capillary 2 and an ultrasonic wave irradiation unit. Alternatively, it is also effective to provide a spiral groove inside the capillary 2 so that the mixed liquid 1 flows to the tip of the capillary 2 while stirring.

  Up to this point, the method in which the liquid mixture 1 contains fine particles serving as an ion source has been described. However, the present invention is not limited to this, and the fine particles are directly ejected to be ionized in an electric field. The method of pulling out is also effective.

  The fine particles mainly mean atoms, molecules, and clusters, but are not limited thereto. It can also be applied to a so-called nano-particle-like pulverized one. However, it is preferably a solid before charging.

  After the fine particles are charged and ionized, the fine particle ions 4 are accelerated by an acceleration electrode (not shown), and the substrate is irradiated with the fine particle ions 4 through an electrostatic lens, a mass separator and a deflector to perform processing. The transport of the fine particle ions 4 may be adjusted according to the purpose of processing. Processing is not limited to lithography, ion implantation, sputtering, milling, vapor deposition, film formation, mass spectrometry, and the like, and it is also possible to apply fine particles at desired positions. For example, when processing using fine particles arranged at a desired position as a catalyst, it is effective to perform the processing after the process according to the present invention.

  According to the above embodiments, the liquid in which the fine particles are dissolved and / or stirred, or the fine particles are used as they are, so that the concentration of the fine particles becomes uniform, and the liquid in which the fine particles are dissolved and / or stirred or the fine particles. Can be supplied stably between the electrodes and to a high energy generation source. Therefore, the output of the emitted ions is stabilized. In addition, since a liquid obtained by dissolving and / or stirring fine particles in a liquid or fine particles is used as it is, a large output of ions can be obtained. Therefore, when the ion source according to the present invention is used for processing, a stable and large output of ions can be obtained, so that the processing speed and processing accuracy can be improved, that is, a processing device with high productivity can be provided. Furthermore, an ion source can be obtained with a relatively simple configuration, and there are a wide variety of ion species obtained from the ion source, so that the development of a device according to the processing application can be reduced, so that an inexpensive processing device and processing method are provided. Can do.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the gist.

It is a figure explaining the apparatus structure of Example 1 of this invention. It is a figure explaining the apparatus structure of Example 1 of this invention, and is a figure from which the structure of an electrode differs from FIG. It is a figure explaining the apparatus structure of Example 2 of this invention. It is a figure explaining conventional technology.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Mixed liquid and fine particle 2 Capillary 3 Electrode 3a Anode 3b Cathode 4 Fine particle ion 5 High energy generation source 6 High energy

Claims (14)

  A supply unit for supplying fine particles and / or a liquid containing the fine particles; a capillary for flowing the supplied fine particles and / or the liquid; and a drive unit for discharging the fine particles and / or the liquid from the capillary; And an ion source for charging the fine particles and / or the liquid.   The driving unit includes a driving unit that discharges the fine particles and / or the liquid by bubble growth caused by heating exceeding film boiling by the electrothermal transducer, or a driving unit that discharges the fine particles and / or the liquid by driving a piezo. The ion source according to claim 1, further comprising at least one of driving means.   The ion source according to claim 1, wherein the charging unit includes an electrode that charges the fine particles in an electric field.   2. The charging means includes a high energy generation source that emits at least one kind of high energy among ultraviolet rays, electromagnetic waves such as X-rays and microwaves, or electron beams and ion beams. The ion source described in 1.   The ion source according to claim 1, wherein the driving unit includes a first control unit that controls a discharge amount of the fine particles and / or the liquid.   The ion source according to claim 1, wherein the charging unit includes a second control unit that controls the intensity of an electric field between the electrodes.   The ion source according to claim 1, wherein the charging unit includes a third control unit that controls a high energy amount emitted from the high energy generation source.   A measuring unit that measures the output intensity of the ions, and at least one of the first control unit, the second control unit, and the third control unit depends on a measurement result of the measuring unit; The ion source according to claim 1, further comprising a step of performing control.   The ion source according to claim 1, wherein the liquid has a step of dissolving and / or stirring the fine particles.   The ion source according to claim 1, wherein the capillary has a heater.   2. The ion source according to claim 1, wherein the capillary has a spiral groove in a flow path through which fine particles and / or a liquid containing the fine particles flow.   The ion source according to claim 1, wherein the capillary has a vibration unit that vibrates the capillary in at least one of the inside and the outside of the capillary.   The ion source according to claim 1, wherein the capillary has an ultrasonic irradiation unit at least either inside or outside the capillary. A processing apparatus comprising the ion source according to claim 1.

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