JP2005263336A5 - - Google Patents

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Publication number
JP2005263336A5
JP2005263336A5 JP2004074212A JP2004074212A JP2005263336A5 JP 2005263336 A5 JP2005263336 A5 JP 2005263336A5 JP 2004074212 A JP2004074212 A JP 2004074212A JP 2004074212 A JP2004074212 A JP 2004074212A JP 2005263336 A5 JP2005263336 A5 JP 2005263336A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004074212A
Other languages
Japanese (ja)
Other versions
JP4226500B2 (ja
JP2005263336A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004074212A priority Critical patent/JP4226500B2/ja
Priority claimed from JP2004074212A external-priority patent/JP4226500B2/ja
Publication of JP2005263336A publication Critical patent/JP2005263336A/ja
Publication of JP2005263336A5 publication Critical patent/JP2005263336A5/ja
Application granted granted Critical
Publication of JP4226500B2 publication Critical patent/JP4226500B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004074212A 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置 Expired - Fee Related JP4226500B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004074212A JP4226500B2 (ja) 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004074212A JP4226500B2 (ja) 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置

Publications (3)

Publication Number Publication Date
JP2005263336A JP2005263336A (ja) 2005-09-29
JP2005263336A5 true JP2005263336A5 (cg-RX-API-DMAC10.html) 2006-02-02
JP4226500B2 JP4226500B2 (ja) 2009-02-18

Family

ID=35088287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004074212A Expired - Fee Related JP4226500B2 (ja) 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置

Country Status (1)

Country Link
JP (1) JP4226500B2 (cg-RX-API-DMAC10.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173365A (ja) * 2005-12-20 2007-07-05 Tokyo Electron Ltd 塗布乾燥処理システム及び塗布乾燥処理方法
JP2008212804A (ja) 2007-03-02 2008-09-18 Tokyo Ohka Kogyo Co Ltd 基板の搬送塗布装置
JP4743716B2 (ja) * 2007-03-06 2011-08-10 東京エレクトロン株式会社 基板処理装置
JP2009043829A (ja) * 2007-08-07 2009-02-26 Tokyo Ohka Kogyo Co Ltd 塗布装置及び塗布方法
JP5188759B2 (ja) * 2007-08-07 2013-04-24 東京応化工業株式会社 塗布装置及び塗布方法
JP5536516B2 (ja) * 2010-04-14 2014-07-02 オイレス工業株式会社 非接触搬送装置
KR101624597B1 (ko) * 2013-12-16 2016-05-27 한국기계연구원 가동 스테이지 구동 장치, 증착 장비 및 상압 화학기상증착 장비
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置
KR102729792B1 (ko) * 2023-09-18 2024-11-14 한화솔루션 주식회사 연속 인쇄 공정을 위한 코팅 방법

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