JP2005262901A - Conveyance device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To surely stop a conveyance carriage. <P>SOLUTION: This conveyance device is provided with the conveyance carriage 2, a travelling roller 37 enabling the conveyance carriage 2 to travel along a rail mechanism 3 in a state of being in contact with the travelling section 12g of the rail mechanism 3, a brake shoe 52 generating a frictional force by pressure, and an abnormal condition stopping mechanism 50 pressing the brake shoe 52 on both of the travelling roller 37 and the travelling section 12g at the occurrence of abnormality. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a transport apparatus that safely stops a traveling transport cart when an abnormality occurs.

  As a transport means in semiconductor manufacturing, liquid crystal manufacturing, FA, and the like, an unmanned transport system using a cart that travels on a traveling path such as OHT (Over Head Hoist Transport) or OHS (Over Head Shuttle) has become mainstream. Since OHT and OHS travel on the traveling road, they can travel at a higher speed than an automatic guided vehicle that travels on the floor without a track. Since there are a plurality of transport carts traveling on such a travel path, the transport carts may collide with each other if the transport carts cannot be controlled and stopped when there is an abnormality. There have been proposed brake mechanisms for safely stopping the conveyance carriage in the event of an abnormality (Patent Documents 1 and 2).

  For example, in Patent Document 1, a suction plate is attached to the lower surface of the traveling carriage main body via a spring, a brake pad is provided on the lower surface side of the suction plate, and a friction engagement portion is provided at a position facing the brake pad. A brake mechanism is disclosed. Such a brake mechanism normally (when energized) adsorbs the suction plate with an electromagnet against the biasing force of the spring, and keeps the brake pad of the suction plate separated from the friction engagement portion, so that it is in an abnormal state such as a power failure (non- When the power is on, the magnetic force of the electromagnet is lost, the suction plate that is lowered by the spring's urging force and its own weight is attracted to the fixed magnet, and the brake pad of the suction plate is frictionally engaged with the frictional engagement part to activate the brake. Done.

  Further, Patent Document 2 discloses a brake mechanism that uses a restoring force of a compressed spring to press a wedge (brake shoe) against a traveling path and stop the conveyance carriage by frictional resistance. Such a brake mechanism normally supports the brake shoe to be pressed against the travel path by a spring, and compresses the spring with a force larger than the restoring force of the spring by the action of the energized electromagnet, thereby Separated from. Then, since no current is supplied to the electromagnet when there is an abnormality, the force for compressing the spring is lost, the brake shoe is pressed against the travel path by the restoring force of the spring, and the brake operation by the frictional resistance is performed.

JP-A-10-112971 (FIG. 3) Japanese Patent Laid-Open No. 10-19066 (FIG. 1)

  However, in the brake mechanism of Patent Document 1, when a large load is applied and a large inertial force is applied to the traveling portion, the brake mechanism may be deformed by the inertial force and not function effectively unless the structure is strong. Thereby, there is a possibility that the conveyance carriage cannot be stopped reliably. Also, in the brake mechanism of Patent Document 2, when the inertial force increases, it is necessary to enlarge the brake shoe or to increase the size of a spring or an electromagnet in order to press the brake shoe with a large force. There is a risk that the size will increase.

  Then, the objective of this invention is providing the conveying apparatus which can stop a conveyance trolley reliably.

Means and effects for solving the problems

  The present invention relates to a transport carriage, a roller that causes the transport carriage to travel along the travel path in contact with the travel path, a friction member that generates a frictional force by pressing, and a friction member that travels with the roller in an abnormal state. And a brake mechanism that presses both the road and the road.

  According to this configuration, the conveyance carriage can be safely stopped by frictionally engaging the friction member with the roller and the traveling path in the event of an abnormality, for example, in the case of a power supply system or control system trouble due to lightning, fire, etc. . If traveling becomes uncontrollable at the time of abnormality, the traveling carriage that is traveling becomes in a free-run state (runs without control) due to inertia. Thereby, for example, when there are a plurality of transport carts on the travel path, collision between the transport carts can be avoided. Moreover, when stopping, since a friction member is pressed to both a roller and a running path, a conveyance trolley | bogie can be stopped reliably. For example, when the friction member is pressed only on the rotating roller, if the inertia force of the conveyance carriage is large, the roller that has stopped rotating may slide on the traveling path, and the braking distance until the conveyance carriage stops is long. Become. On the other hand, if the friction member is pressed against both the roller and the travel path, the rotation of the roller can be stopped and the roller can be prevented from sliding on the travel path, even if the inertial force is large. And it can stop reliably, without enlarging a friction member.

  In the present invention, the brake mechanism is preferably a non-excitation operation type. According to this configuration, a signal (electric power) cannot be sent to the brake mechanism in the event of an abnormality, and the brake mechanism is non-excited, so the structure can be simplified by adopting a non-excited operation type brake mechanism. it can.

  In the present invention, the roller may be separated from the traveling path, and a friction member may be inserted between the roller and the traveling path so as to scoop up the roller to separate the roller and the traveling path. According to this, since a roller leaves | separates from a traveling path, the conveyance cart of a free run state can be stopped more reliably. Furthermore, by separating the rollers, the conveyance carriage is stopped only by the frictional force between the friction member and the travel path, so that the braking distance of the conveyance carriage can be set by changing the setting of the frictional force of the friction member. it can.

  It is preferable that the brake mechanism of the present invention includes a biasing unit that biases the friction member. According to this, the conveyance carriage can be stopped earlier.

  It is preferable that the friction member of the present invention can advance and retreat in the traveling direction of the transport carriage. According to this configuration, the size of the transport carriage in the width direction can be reduced.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. The transfer apparatus according to the present embodiment is suitably applied to a transfer system that uses a transfer cart as a final product while transferring an object to be processed within a process or between processes, as in a semiconductor product manufacturing facility. In the following description, a transport system for transporting an object to be processed such as a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, and an optical disk substrate will be described, but the present invention is not limited to this. It can be applied to transport systems for all industries that transport packages such as electronic parts, machine parts, chemicals, food, and documents.

  The transport system described above employs an OHS (Over Head Shuttle) system as shown in FIG. More specifically, the transport system includes a transport device 1 that transports the storage container 5, and a main controller 80 (see FIG. 4) that manages the transport status of the storage container 5, the travel of the transport carriage 2, and the like. . The conveyance device 1 is provided in a process or between processes, and includes a rail mechanism 3 (travel path) including linear motor permanent magnets 15 and 17, and a transport carriage 2 that travels in one direction along the rail mechanism 3. I have. The permanent magnet 15 has a standard magnetizing force, and the permanent magnet 17 has a larger magnetizing force than the standard magnetizing force.

  As shown in FIGS. 2 to 4, the transport carriage 2 includes a mounting table 35 on which the storage container 5 is mounted, a control mechanism 31 connected to the lower surface of the mounting table 35, a controller 21, and a power source 22. doing. The controller 21 can communicate with the main controller 80 wirelessly or by wire, is supplied with power from the power supply 22, and controls each mechanism of the transport carriage 2 described later based on a signal from the main controller 80.

  The mounting table 35 transmits signals such as the presence / absence of mounting of the storage container 5 and the type of the mounting storage container 5 to the controller 21. The storage container 5 is an OC (open cassette) type partly released to the outside atmosphere or a FOUP (front opening unified pod) type carrier in which the inside of the container is sealed, so that the wafer is stored inside. It is configured. The control mechanism 31 drives / stops the transport carriage 2 based on a signal from the controller 21. Hereinafter, the control mechanism 31 will be described in detail.

  The control mechanism 31 includes a mounting table support member 36 that supports the center of the lower surface of the mounting table 35, and a primary coil 34 provided at the lower end of the mounting table support member 36. The primary side coil 34 is disposed so as to face permanent magnets 15 and 17 of the rail mechanism 3 described later, and the permanent magnets 15 and 17 constitute a linear motor. The primary coil 34 includes a primary iron core and a three-phase coil, and generates a traveling magnetic field that moves linearly when a three-phase alternating current is applied. The primary coil 34 generates a propulsive force that causes the transport carriage 2 to travel and a holding force that maintains the stopped state by the magnetic action between the permanent magnets 15 and 17 of the rail mechanism 3.

  In addition, a traveling roller 37 and a width direction regulating roller 38 are rotatably provided at the lower end of the mounting table support member 36. The traveling roller 37 and the width direction regulating roller 38 are provided in a pair of left and right on the front side and the rear side in the traveling direction of the transport carriage 2. The traveling roller 37 is provided so as to come into contact with the traveling portion 12 g (traveling path) of the rail mechanism 3. On the other hand, the width direction regulating roller 38 is provided so as to abut on each side wall of the rail mechanism 3. As a result, the width-direction regulating roller 38 is configured so that the primary coil 34 is always opposed to the permanent magnets 15 and 17 by positioning the transport carriage 2 at the center of the rail mechanism 3 in the width direction. In addition, an abnormality stop mechanism 50 is provided to stop the transport carriage 2 in the event of an abnormality so as to face the pair of left and right traveling rollers 37.

  As shown in FIG. 1, the abnormality stop mechanism 50 includes a plunger 51, a brake shoe 52 (friction member), and a link 53. The plunger 51 has a cylinder 51b and a rod piston 51a with one end protruding to the outside of the cylinder 51b. The rod piston 51a can move in a horizontal direction along the cylinder 51b. Further, the plunger 51 has a solenoid (not shown) inside, and a rod piston 51a is moved by being supplied with current from a power supply mechanism 39 described later and excited. The current supplied to the solenoid may be supplied from the power source 22.

  Specifically, during normal times, the rod piston 51a protrudes from the cylinder 51b, and when the solenoid is in an excited state, the rod piston 51a is pulled into the cylinder 51b (hereinafter referred to as the A direction). To move to. The magnitude of the force that pulls the rod piston 51a in the A direction by the excitation action of the solenoid is set to be larger than the restoring force of the compressed spring 54 described later. When the solenoid is in the non-excited state, the restoring force of the spring 54 moves the rod piston 51a in the direction opposite to the A direction and returns to the original position. Further, the A direction is also a direction close to the traveling roller 37.

  A link 53 is disposed at one end of the rod piston 51a on the protruding side. The link 53 includes a rotation arm 53a, a horizontal arm 53b, a guide arm 53c, and a support arm 53d. The horizontal arm 53b is disposed in parallel with the rod piston 51a, and a guide arm 53c is disposed at one end on the A direction side so as to be linear. The guide arm 53c has a diameter larger than that of the horizontal arm 53b, and is capable of stone movement in the horizontal direction along the inner wall of the cylinder 2a provided so as to face the traveling roller 37. As a result, the horizontal arm 53b is also capable of piston movement in the A direction.

  A coil spring 54 (biasing means) (hereinafter simply referred to as a spring 54) is disposed between the guide arm 53c and the side wall of the cylinder 2a so as to surround the horizontal arm 53b. The spring 54 is configured so that the guide arm 53c is positioned on the A direction side in the cylinder 2a during normal times, and is compressed when the horizontal arm 53b and the guide arm 53c move in the direction opposite to the A direction. It has become. Therefore, as the horizontal arm 53b and the guide arm 53c are allowed to perform piston movement, the spring 54 is expanded and contracted.

  The rotating arm 53a is rotatably provided at one end on the protruding side of the rod piston 51a and the other end of the horizontal arm 53b, and the approximate center of the rotating arm 53a serves as a fulcrum for rotating the rotating arm 53a. Yes. The length of the rotary arm 53a is adjusted at one end of the rotary arm 53a on the rod piston 51a side so that the rod piston 51a and the horizontal arm 53b can move in parallel when the rotary arm 53a rotates. Guide rails are provided. By providing the rotating arm 53a, the horizontal arm 53b also moves with the movement of the rod piston 51a. Specifically, when the solenoid of the plunger 51 is energized, the rod piston 51a moves in the A direction, and the rotating arm 53a rotates in the direction opposite to the A direction. The horizontal arm 53b moves in the direction opposite to the A direction while the spring 54 is compressed. Further, when the solenoid of the plunger 51 is in a non-excited state, there is no force to pull the rod piston 51a in the A direction, so the horizontal arm 53b moves in the A direction due to the restoring force of the compressed spring 54. The piston 51a moves in the direction opposite to the A direction and returns to the original position. Thus, the rod piston 51a, the horizontal arm 53b, and the guide arm 53c always move in the opposite directions.

  One end of a support arm 53d is pivotally supported at the other end of the guide arm 53c, and a brake shoe 52 is pivotally supported at the other end of the support arm 53d. When the guide arm 53c is positioned on the A direction side in the cylinder 2a, the support arm 53d forms a square shape with the guide arm 53c, and when the guide arm 53c moves in the direction opposite to the A direction, It is designed to be straight.

  The brake shoe 52 has a wedge shape and is disposed so that the pointed end is on the traveling roller 37 side. The brake shoe 52 presses against the traveling roller 37 and the traveling portion 12g to generate a frictional force and travel. The conveyance carriage 2 to be stopped is stopped by frictional resistance. When the guide arm 53c is positioned on the A direction side in the cylinder 2a, the pointed end of the brake shoe 52 is inserted between the traveling portion 12g of the rail frame 12 and the traveling roller 37 and comes into close contact with both. ing. When the guide arm 53c moves in the direction opposite to the A direction, the brake shoe 52 is separated from the traveling portion 12g and the traveling roller 37. When the brake shoe 52 is separated from the traveling portion 12g and the traveling roller 37, the frictional resistance is eliminated, and the transport carriage 2 is in a state where it can travel. In addition, it can prevent that the conveyance trolley 2 becomes large in the width direction by setting it as the structure where the brake shoe 52 advances / retreats in the running direction of the conveyance trolley 2.

  As described above, when the plunger 51, the brake shoe 52, and the link 53 of the abnormality stop mechanism 50 operate in series and the solenoid is in an excited state, the brake shoe 52 is separated from the traveling roller 37 and the traveling portion 12g. As a result, when the transport carriage 2 is in a travelable state and is in a non-excited state, the brake shoe 52 is frictionally engaged with the travel unit 12g and the travel roller 37, so that the transport cart 2 is in an untravelable state. ing. The abnormality stop mechanism 50 is preferably disposed on the traveling direction side of the traveling roller 37 so that the brake shoe 52 can be pressed from the traveling direction of the transport carriage 2.

  Further, as shown in FIG. 5, a travel distance measuring device 42 is also provided at the lower end of the mounting table support member 36. The travel distance measuring device 42 is provided with a touch roller 43 provided to rotate while being in contact with the permanent magnets 15 and 17 of the rail mechanism 3 serving as a track surface of the transport track, and is rotated by being driven by the touch roller 43 (not shown). And an encoder. The encoder detects the rotation number and rotation angle of the touch roller 43. Thereby, the travel distance measuring device 42 can measure the travel distance of the transport carriage 2 based on the circumferential length of the touch roller 43 and the rotation speed and rotation angle of the encoder.

  In addition, a power feeding mechanism 39 and a guide mechanism 40 are provided in this order from the mounting table 35 side in an intermediate portion of the mounting table support member 36. The power supply mechanism 39 has a secondary side iron core and a winding, receives high frequency power supplied from a primary power supply line 14 described later, and generates a high frequency current. The power feeding mechanism 39 is connected to a current conversion unit (not shown). The current conversion unit temporarily converts the high-frequency current into direct current in the rectifier circuit and converts it into three-phase alternating current in the PWM conversion circuit, and then supplies the current to the primary coil 34 and the malfunction stop mechanism 50. Yes.

  The guide mechanism 40 includes a slide mechanism 41 that is slidable in the width direction of the rail mechanism 3, and guide rollers 32 and 32 that are rotatably provided at both ends of the slide mechanism 41. The guide mechanism 40 makes it possible to change the traveling direction by engaging one of the guide rollers 32 and 32 with a guide portion 12e described later.

  The transport carriage 2 configured as described above is provided in the rail mechanism 3 as shown in FIG. The rail mechanism 3 includes, for example, a straight track in which the transport track exists in a horizontal plane, a curved track that causes the transport cart 2 to turn right or left, a branch track that allows the transport cart 2 to be switched in two directions, and a horizontal from a rising slope area. It consists of a combination of convex trajectories that switch to areas. The rail mechanism 3 combines these various tracks to form a transfer track that passes above and to the side of the processing device while changing vertically and horizontally. The track of the rail mechanism 3 is not limited to the track described above.

  As shown in FIG. 2, each track of the rail mechanism 3 has a rail frame body 12 formed by extrusion molding or the like. The rail frame 12 has a left side wall 12a and a right side wall 12b that are arranged in the vertical direction, and a bottom wall 12c that connects the lower ends of both side walls 12a and 12b. The left side wall 12a and the right side wall 12b are formed symmetrically. Each of the side walls 12a and 12b has an upper surface portion 12d at the upper end position. The upper surface portion 12d is disposed in parallel to the bottom wall 12c and is formed inward. The length of the upper surface portion 12d is set such that a minimum gap through which the control mechanism 31 of the transport carriage 2 passes when the upper surface portions 12d of the side wall portions 12a and 12b face each other. As a result, the upper surface portion 12d makes it difficult for dust floating in the air to enter the rail frame 12.

  Moreover, each side wall part 12a * 12b has the guide part 12e in the intermediate position. The guide part 12e is disposed in parallel to the bottom wall 12c, and the tip part is bent downward. The guide portion 12e is disposed so as to be engageable with the guide roller 32 of the transport carriage 2. And the guide part 12e is made to advance the conveyance trolley | bogie 2 in any branch direction by engagement of the guide roller 32, when the conveyance path is branched in two directions.

  A support beam 13 made of an insulating material is provided between the guide portion 12e and the upper surface portion 12d. The support beam 13 has a C-shaped longitudinal section so as to have two tip portions. The support beam 13 is attached so that the tip end portions are positioned up and down, and is attached so that the above-described power feeding mechanism 39 is positioned between these tip end portions. A primary power supply line 14 is provided at each tip of the support beam 13. Further, the support beams 13 are arranged at predetermined intervals in the transport track direction so as to hold the primary feeder 14 at a constant height position over the entire length of the transport track. The primary power supply line 14 is connected to a power supply device (not shown), and supplies high-frequency power from the power supply device to the power supply mechanism 39 of the transport carriage 2.

  Further, the bottom wall 12c of the rail frame 12 has a groove portion 12f disposed at the center position and a traveling portion 12g disposed symmetrically about the groove portion 12f. The traveling roller 37 of the transport carriage 2 is in contact with the traveling unit 12g. Moreover, the groove part 12f is set to the groove depth according to the kind of track | orbit. For example, the groove portion 12f in the straight track, the curved track, and the branch track is set to a standard groove depth. On the other hand, the groove portion 12f in the convex track is set to a groove depth deeper than the groove depth of the linear track.

  Next, the operation of the above transport system will be described. First, in the main controller 80, the storage state and the transfer destination of all the storage containers 5 are managed and monitored, and the transfer states of all the transfer carriages 2 existing on the transfer track are managed and monitored. When the storage container 5 is transported to the processing device, the storage container 5 to be transported, the transport carriage 2 used for transport, and the processing device that is the transport destination are specified, and then these identifications are made. A conveyance command signal including the above-described content is transmitted to the conveyance carriage 2.

  When the conveyance carriage 2 receives the conveyance command signal, it confirms that it is a command for its own conveyance carriage 2 based on the carriage number data contained in the signal contents, and then reads the type of the instruction contained in the signal contents. For example, if it is a conveyance command, the conveyance process which conveys the storage container 5 to a processing apparatus etc. will be performed.

  Specifically, the designated place of the processing device or the like that is the conveyance destination is recognized based on the signal content of the conveyance command signal, and the traveling route for reaching the designated place is determined. The travel route may be included in the transport command signal from the main controller. Thereafter, as shown in FIG. 3, the high frequency current supplied from the primary power supply line 14 is received, converted into direct current based on the induced current generated in the power supply mechanism 39, and then converted into three phases at a predetermined frequency by the PWM conversion circuit. Create an alternating current. Then, a three-phase alternating current is passed through the primary coil 34 and the abnormal stop mechanism 50.

  When a current is supplied to the solenoid of the abnormal stop mechanism 50, an excited state is established, and the brake shoe 52 that is in close contact with the traveling unit 12g and the traveling roller 37 is separated as described above. As a result, the travel roller 37 is in a rotatable state, that is, the transport carriage 2 is in a travelable state (FIG. 1B). Further, when a current is supplied to the primary side coil 34, a traveling magnetic field that moves linearly is generated, and the transport cart 2 is caused by the propulsive force generated by the magnetic action between the permanent magnets 15 and 17 on the transport track. Start running.

  During traveling, lightning, lightning, fire, and other problems with the power supply 22 and the power supply mechanism 39 prevent current from being supplied to the primary coil 34, making it impossible to control the magnetism between the permanent magnets 15 and 17. It becomes impossible to control (drive / stop) traveling. For this reason, traveling cannot be stopped, and the transport carriage 2 enters a free-run state in which it continues to travel due to inertia. In addition, when an abnormality occurs, no current is supplied to the abnormal stop mechanism 50, and the solenoid of the abnormal stop mechanism 50 is in a non-excited state.

  When the solenoid of the abnormal stop mechanism 50 is in a non-excited state, the rod piston 51a loses its pulling force in the A direction, and the rod piston 51a moves in the direction opposite to the A direction by the restoring force of the compressed spring 54. Accordingly, the horizontal arm 53b, the guide arm 53c, the support arm 53d, and the brake shoe 52 move in the A direction, that is, in the direction approaching the traveling roller 37. The brake shoe 52 is inserted between the traveling roller 37 and the traveling portion 12g of the traveling portion 12g (FIG. 1 (a)). As a result, the rotation of the traveling roller 37 is stopped, and at the same time, the transport carriage 2 is stopped by the frictional force between the brake shoe 52 and the traveling unit 12g.

  If the weight or loading amount of the transport carriage 2 is large, the inertial force of the transport carriage 2 increases. For this reason, if only the rotation of the travel roller 37 is stopped, the travel roller 37 whose rotation has stopped may slide on the travel unit 12g, and the braking distance until the transport carriage 2 stops increases. On the other hand, in the present invention, since the brake shoe 52 is pressed against both the traveling roller 37 and the traveling portion 12g, the rotation of the traveling roller 37 is stopped and the frictional resistance between the brake shoe 52 and the traveling portion 12g is reduced. It is possible to prevent the travel roller 37 from sliding on the travel unit 12g. Therefore, even when the inertial force is large, the braking distance can be reliably stopped without increasing the braking distance. Moreover, since the frictional resistance is increased by pressing the brake shoe 52 against both the traveling roller 37 and the traveling unit 12g, it is not necessary to form the brake shoe 52 large, and an increase in size of the transport carriage 2 can be prevented. it can.

  As described above, in the present embodiment, the frictional force is generated by pressing the traveling roller 37 that travels along the traveling unit 12g while being in contact with the conveying cart 2 and the traveling unit 12g. A brake shoe 52 to be generated and an abnormal time stop mechanism 50 that frictionally engages the brake shoe 52 with both the traveling roller 37 and the traveling portion 12g in the event of an abnormality are provided.

  According to this configuration, in the event of an abnormality, for example, when the power source 22 or the controller 21 is in trouble due to lightning, fire, etc., the brake shoe 52 is frictionally engaged with the traveling roller 37 and the traveling unit 12g, so Can be stopped. If traveling cannot be controlled at the time of abnormality, the traveling carriage 2 traveling is in a free-run state due to inertia. Thereby, for example, when there are a plurality of transport carriages 2 on the travel path, collision between the transport carriages 2 can be avoided. Further, when stopping, the brake shoe 52 is pressed against both the traveling roller 37 and the traveling portion 12g, so that the conveyance carriage can be reliably stopped. For example, when the brake shoe 52 is pressed only to the rotating traveling roller 37, if the inertia force of the transport carriage 2 is large, the traveling roller 37 that has stopped rotating may slide on the traveling portion 12g. The braking distance until stopping is longer. On the other hand, when the brake shoe 52 is pressed against both the traveling roller 37 and the traveling portion 12g, the rotation of the traveling roller 37 can be stopped and the traveling roller 37 can be prevented from sliding on the traveling portion 12g. Even when the inertial force is large, it can be stopped reliably without enlarging the friction member or the like.

  In addition, when an abnormality occurs, current cannot be sent to the abnormal stop mechanism 50, and the abnormal stop mechanism 50 is non-excited. Therefore, the structure can be simplified by making the abnormal stop mechanism 50 a non-excitation operation type. can do. Furthermore, since the spring 54 for urging the brake shoe 52 is provided, the conveyance carriage 2 can be stopped earlier when an abnormality occurs. Further, since the brake shoe 52 can be moved back and forth in the traveling direction of the transport carriage 2, the width of the transport carriage 2 can be reduced and the structure can be simplified.

  As a modification, the traveling roller 37 may be placed on the brake shoe 52 as shown in FIG. In this case, the traveling roller 37 is configured to be separated from the traveling unit 12g. The brake shoe 52 has a shape on which the traveling roller 37 can be easily placed. When an abnormality occurs, the brake shoe 52 is inserted between the traveling roller 37 and the traveling portion 12g. At this time, the traveling roller 37 is separated from the traveling portion 12 g so as to be scooped up by the brake shoe 52 and is placed on the brake shoe 52. By separating the traveling roller 37 from the traveling unit 12g, the conveying cart 2 is stopped only by the frictional force between the brake shoe 52 and the traveling unit 12g. Therefore, by changing the frictional force of the brake shoe 52, the conveying cart is changed. The braking distance can be set, and the transport carriage 2 can be reliably stopped. In addition, the brake shoe 52 in the modified example is preferably a wedge-like shape having a pointed tip that can be easily inserted between the brake shoe 52 and the traveling portion 12g.

  As another modification, a structure in which the transport carriage 2 can travel in both directions of the rail mechanism 3 may be used. As shown in FIG. 7, the transport carriage 2 travels with the guide roller 32a and the travel roller 37 coming into contact with the rail mechanism 3a so as to be sandwiched between the rail mechanisms 3a disposed above and below. ing. In addition, an abnormality stop mechanism 50 is provided so as to face the traveling rollers 37 arranged before and after the transport carriage 2. In other words, in the present modification, the abnormality stop mechanism 50 is provided for each of the four traveling rollers 37. Thereby, even if the conveyance trolley 2 travels in either direction, the conveyance trolley 2 can be stopped by operating the front-rear abnormality stop mechanism 50. In this case, it is preferable that the abnormality stop mechanism 50 disposed on the traveling direction side in which the transport carriage 2 travels operates. Thereby, in contrast with the case where it presses from a running direction and a reverse side, the force to press can be made small.

  Moreover, although this invention was demonstrated based on suitable embodiment, this invention can be changed in the range which does not exceed the meaning. That is, the transport carriage 2 is stopped when the abnormal stop mechanism 50 is in the non-excited state, but may be stopped when in the excited state. For example, when a current is supplied to the abnormal stop mechanism 50 in a normal state, a current is not supplied to the solenoid of the plunger 51, that is, a circuit is configured to be in a non-excited state. When the supply is stopped, a current may flow through the solenoid of the plunger 51 by using a non-excitation switch, a precharged capacitor, or the like, and thereby the brake shoe 52 may be operated.

  In addition, the brake shoe 52 is moved forward and backward in the traveling direction of the transport carriage 2 and pressed between the traveling roller 37 and the traveling unit 12g. However, the brake shoe 52 is moved in the width direction and the side surface of the traveling roller 37 is moved. You may make it press from a direction, and you may make it press on the side surface of the traveling roller 37, and the traveling part 12g. In addition, the transport carriage 2 is stopped in the event of a lightning strike, fire, trouble with the power source 22, the controller 21, etc., but may be stopped when another controller (such as the primary side coil 34) is abnormal.

  Further, although the brake shoe 52 is pressed against the traveling roller 37, it may be pressed against other rollers (such as the width direction regulating roller 38). Furthermore, although the brake shoe 52 has a wedge shape, the shape is not limited to this as long as it can be pressed against both the traveling roller 37 and the traveling portion 12g. Furthermore, in the above-described embodiment, the transport carriage 2 is caused to travel using a permanent magnet, but the present invention is not limited to this.

  Although the present invention has been described in the preferred embodiments above, the present invention is not so limited. It will be understood that various other embodiments may be made without departing from the spirit and scope of the invention. Furthermore, in this embodiment, although the effect | action and effect by the structure of this invention are described, these effect | actions and effects are examples and do not limit this invention.

The elements on larger scale of the stop mechanism at the time of abnormality of the conveying apparatus which concerns on suitable embodiment of this invention. Side surface perspective drawing of the conveying apparatus which concerns on suitable embodiment of this invention. FIG. 3 is a perspective sectional view taken along line III-III in FIG. 2. The functional block diagram of the conveying apparatus which concerns on suitable embodiment of this invention. The schematic block diagram of the conveying apparatus which concerns on suitable embodiment of this invention. The modified example figure of the conveying apparatus which concerns on suitable embodiment of this invention. The another modification figure of the conveying apparatus which concerns on suitable embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Conveying device 2 Conveying cart 2a Cylinder 3 Rail mechanism 12 Rail frame 12g Traveling part 37 Traveling roller 50 Abnormal stop mechanism 51 Plunger 51a Rod piston 52 Brake shoe 53 Link 53a Rotating arm 5
53b Horizontal arm 53c Guide arm 53d Support arm 54 Spring

Claims (5)

A traveling carriage that travels;
A roller that causes the transport carriage to travel along the travel path in contact with the travel path;
A friction member that generates a frictional force by pressing;
A conveyance device comprising: a brake mechanism that presses the friction member against both the roller and the travel path when an abnormality occurs.   The transport device according to claim 1, wherein the brake mechanism is a non-excitation operation type. The roller is separable from the travel path;
The friction member is
The conveying device according to claim 1 or 2, wherein the roller is inserted between the roller and the travel path so as to scoop up, and the roller and the travel path are separated from each other. The brake mechanism is
The conveying apparatus according to claim 1, further comprising an urging unit that urges the friction member. The conveying device according to any one of claims 1 to 4, wherein the friction member is movable back and forth in the traveling direction of the conveying cart.

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