JP2005255497A - Electron beam irradiation apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electron beam irradiation apparatus capable of uniformly irradiating even a linear body having a small diameter with electron beam from the whole circumferential direction and having a take-out window to carry out the maintenance easily. <P>SOLUTION: The electron beam irradiation apparatus for irradiating an electric wire 2 with electron beam 1 is provided with a main body part 10 having a vacuum chamber 11 in which a cathode 12 and an extraction electrode 13 for emitting the electron beam 1 to the center part where the electric wire 2 is positioned from the whole range of the circumferential direction or the like are incorporated, a cylindrical take-out window holding body 22 freely removably attached to the vacuum chamber 11 to separate the inside part of the vacuum chamber 11 of the main body part 10 from the center part and having an opening part 22a in the circumferential direction, the thin film-like take-out window 24 provided on the take-out window holding body 22 to cover the opening part 22a of the take out holding body 22 and a press frame 25, bolt 26 and the like for freely removably attaching the take-out window 24 to the take-out window holding body 22. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an electron beam irradiation apparatus, and is particularly effective when used to uniformly irradiate an electron beam over the entire circumferential direction of a linear object.

  In electric wires and optical fibers coated with an organic material such as resin, various functions such as heat resistance are improved by crosslinking or curing the coating material. In performing such crosslinking and curing of the coating material, an electron beam irradiation apparatus that irradiates the coating material with an electron beam is generally applied.

  For example, as shown in FIG. 12, this electron beam irradiation apparatus generates and accelerates an electron beam 1 linearly from a linear cathode 112 housed in a vacuum chamber 111 of a main body 110, thereby forming titanium as a partition wall. The electron beam 1 is sent out to the outside of the atmospheric environment through a thin film-shaped extraction window 114, and the electron beam 1 is linearly applied to the covering material of the electric wire 2 that is moved and moved at a constant speed by an electric wire traveling and moving device (not shown). (Linear type).

  For example, as shown in FIG. 13, an electron beam 1 is generated and accelerated in a spot shape from a spot-like cathode 212 built in a vacuum chamber 211 of the main body 210, and the electron beam 1 is scanned by a scanning magnet 215. There is also an electron beam irradiation apparatus that can irradiate the electron beam 1 linearly by sweeping it into a pseudo linear shape and then sending it out of the atmospheric environment through the extraction window 114 (spot sweep). Type). In FIGS. 12 and 13, reference numeral 113 denotes an extraction electrode.

  In such a conventional electron beam irradiation apparatus, the extraction window 114 is attached by a mounting plate 117 through a sealing material 116 and mechanically by a bolt 118 or the like as shown in FIG. 211 is fixed.

  By the way, when the electron beam 1 is emitted into the atmosphere, the electron beam 1 interacts with the gas and causes a partial beam loss due to energy loss and scattering, thereby reducing the irradiation effect on the electric wire 2. Therefore, it is necessary to bring the extraction window 114 as close as possible to the electric wire 2 so as not to hinder the traveling movement of the electric wire 2.

  Moreover, in the conventional electron beam irradiation apparatus as described above, as shown in FIG. 15A, the relative relationship (distance d, relative angle θ) between the surface of the covering material 2a of the electric wire 2 and the extraction window 114 is as follows. Since it varies depending on the surface position of the covering material 2a, the entire covering material 2a cannot be uniformly irradiated by irradiating the electron beam 1 uniformly. It is conceivable to install a reflector 319 so as to sandwich the electric wire 2 between them (see FIG. 15B), or install another electron beam irradiation device (see FIG. 15C). Nevertheless, it is difficult to ensure uniform irradiation of the electron beam 1.

  For this reason, for example, in the following Patent Document 1 or the like, an electron beam is irradiated to the gas under the same conditions by irradiating the gas that is the object to be irradiated with a polygon from a plurality of surrounding directions. Propose to do.

JP 2003-294897 A JP 2003-121596 A JP 2003-075599 A

  However, in the electron beam irradiation apparatus described in Patent Document 1 and the like as described above, if an electron beam is irradiated to a small-diameter linear body such as an electric wire or an optical fiber, the polygon is limited. Therefore, for the same reason as described above with reference to FIG. 15, it is difficult to reliably apply a uniform dose by uniformly irradiating the electron beam 1.

  Furthermore, when irradiating an electron beam from the whole circumferential direction to a linear body having a small diameter (about 1 to 10 mm) such as an electric wire or an optical fiber, an attempt is made to make the extraction window as close as possible to the linear body. Then, the circumferential size of the extraction window becomes very small, and maintenance such as replacement operation of the extraction window due to oxidation deterioration due to use becomes very difficult.

  For this reason, the present invention has an extraction window that can uniformly irradiate an electron beam from the entire circumferential direction even on a small-diameter linear body such as an electric wire or an optical fiber and can easily perform maintenance. An object is to provide an electron beam irradiation apparatus.

  An electron beam irradiation apparatus according to a first invention for solving the above-described problem is an electron beam irradiation apparatus that irradiates an electron beam to a linear body, and is directed to a central portion where the linear body is positioned. The main body having a vacuum chamber containing electron beam emitting means for emitting an electron beam from the entire circumferential direction, and the inside of the vacuum chamber and the central portion of the main body can be attached to and detached from the vacuum chamber. A cylindrical window frame that is attached and has an opening over the circumferential direction, a thin film extraction window provided on the window frame so as to cover the opening of the window frame, and the extraction window An extraction window fixing means that is detachably attached to the window frame body is provided.

  An electron beam irradiation apparatus according to a second aspect of the present invention is the electron beam irradiation apparatus according to the first aspect, wherein the electron beam irradiation apparatus is attached to an end portion on one axial side of the window frame body and the end portion of the window frame body and the vacuum chamber A flange plate that detachably separates the gaps is provided.

  The electron beam irradiation apparatus according to a third aspect of the invention is the first or second aspect of the invention, wherein the outer peripheral surface on the other end side in the axial direction of the window frame body is detachably fitted to the vacuum chamber. It is characterized by doing.

  In any one of the first to third inventions, the electron beam irradiation apparatus according to the fourth aspect of the invention is an arbitrary position on the peripheral surface of the window frame body, which is obtained by the following formula (1). The shape of the opening of the window frame is set so that the value C on the line L along the axis is substantially the same value.

C = At / (At + Bt) (1)
However, At is the total length of the part of the line L that corresponds to the opening, and Bt is the total length of the part of the line L other than the opening (non-opening part).

  The electron beam irradiation apparatus according to a fifth aspect of the present invention is the electron beam irradiation apparatus according to any one of the first to fourth aspects, wherein the extraction window is provided so as to cover the window frame from the outer peripheral surface side, and the extraction window A fixing means fixes the said extraction window from the outer peripheral surface side of the said window frame so that attachment or detachment is possible.

  An electron beam irradiation apparatus according to a sixth invention is the electron beam irradiation apparatus according to any one of the first to fourth inventions, wherein the window frame body can be divided into a plurality of pieces along the axial direction, and the holding body A pedestal that is detachably attached to the opening of the rim from the outside in the radial direction and holds the detachment window in the diametrically inner side, and supports the extraction window to prevent damage to the extraction window due to a pressure difference. And the extraction window fixing means fixes the extraction window so as to be detachable from the inner peripheral surface side of the window frame.

  An electron beam irradiation apparatus according to a seventh invention is the electron beam irradiation apparatus according to the sixth invention, wherein the pedestal is detachably attached to the opening of the holding body from the outside in the radial direction, and the extraction window is attached to and detached from the inside in the radial direction. A frame portion that holds the frame portion; and a crosspiece that is provided in the inner portion of the frame portion so as to partition the inner portion of the frame portion at predetermined intervals in the axial direction and supports the extraction window. It is characterized by that.

  According to the electron beam irradiation apparatus according to the first aspect of the invention, since the extraction window is detachably provided in the cylindrical window frame body that is detachably attached to the vacuum chamber and has an opening in the circumferential direction. Even for a small-diameter linear body such as an optical fiber or the like, an electron beam can be uniformly irradiated from the entire circumferential direction, and maintenance such as replacement of the extraction window can be easily performed.

  According to the electron beam irradiation apparatus according to the second aspect of the invention, the flange plate can detachably separate the end of the window frame body from the vacuum chamber, so that the vacuum chamber can be maintained while maintaining the sealing performance. The detachability of the window frame can be improved.

  According to the electron beam irradiation apparatus according to the third aspect of the invention, since the outer peripheral surface on the other end side in the axial direction of the window frame is detachably fitted to the vacuum chamber, the positioning of the window frame relative to the vacuum chamber Can be easily performed, and the maintenance can be further facilitated.

  According to the electron beam irradiation apparatus according to the fourth aspect of the invention, since the shape of the opening of the window frame has the relationship described above, it is certain that the electron beam is uniformly irradiated in the circumferential direction on the linear body. Can be.

  According to the electron beam irradiation apparatus according to the fifth aspect of the present invention, an extraction window is provided so as to cover the window frame body from the outer peripheral surface side, and the extraction window can be attached and detached from the outer peripheral surface side of the window frame body by the extraction window fixing means. Since it is fixed, the extraction window can be easily attached to and detached from the window frame when the window frame is removed from the vacuum chamber, and the maintenance can be further facilitated.

  According to the electron beam irradiation apparatus according to the sixth aspect of the invention, since the extraction window can be easily attached and detached while supporting the extraction window with a pedestal so as to prevent damage to the extraction window due to a pressure difference, maintenance is performed. However, it is possible to use a very thin extraction window, and to reduce the loss energy of the electron beam due to the transmission of the extraction window as much as possible, thereby further improving the irradiation efficiency of the electron beam.

  According to the electron beam irradiation apparatus relating to the seventh aspect of the invention, the effects of the sixth aspect of the invention described above can be obtained easily and reliably.

  Embodiments of an electron beam irradiation apparatus according to the present invention will be described below with reference to the drawings. However, the following embodiments do not limit the present invention.

[First embodiment]
1st Embodiment of the electron beam irradiation apparatus which concerns on this invention is described based on FIGS. FIG. 1 is a schematic structural diagram of the main part of an electron beam irradiation apparatus, FIG. 2 is a partial extraction diagram of an extraction window holder, FIG. 3 is an enlarged view of an arrow III part in FIG. It is an extraction enlarged view of the arrow IV part of FIG.

  As shown in FIG. 1, a vacuum chamber 11 having an annular shape of a main body portion 10 is equipped with a cathode 12 as an electron beam emitting means, an extraction electrode 13 and the like. And an extraction voltage applied between the cathode 12 and the extraction electrode 13 by an unillustrated extraction power source on the axis of the vacuum chamber 11 (center portion where the linear body is located). On the other hand, the electron beam 1 can be irradiated from the entire circumferential direction.

  On the inner diameter side of one end surface (upper side in FIG. 1) of the vacuum chamber 11, an annular sealing material 14 is provided along the peripheral edge on the inner diameter side of the end surface of the vacuum chamber 11. An annular flange plate 21 is placed on one end face of the vacuum chamber 11. The flange plate 21 is integrated with the flange plate 21 so that the end on one side (upper side in FIG. 1) of the extraction window holding body 22, which is a cylindrical window frame, is coaxial with the flange plate 21. It is attached. That is, the flange plate 21 can be vacuum-sealed by detachably partitioning the vacuum chamber 11 and the extraction window holder 22.

  As shown in FIG. 2, the extraction window holding body 22 has a plurality of rhombus-shaped openings 22 a formed on the entire circumferential surface thereof. The shape of the opening 22a is such that the value C obtained by the following equation (1) on the line L along the axis of an arbitrary position on the peripheral surface of the extraction window holder 22 is substantially the same. Is set.

C = At / (At + Bt) (1)
Here, At is the total length of the length Ap of the portion corresponding to the opening 22a of the line L, and Bt is the total length of the length Bp of the portion other than the opening 22a of the line L (non-opening portion).

  As shown in FIGS. 1 and 3, a seal material 23 is provided along the peripheral edge of the outer peripheral surface of the extraction window holder 22. A titanium thin film extraction window 24 serving as a partition is wound around the outer peripheral surface of the extraction window holder 22 so as to cover all the openings 22 a of the extraction window holder 22. The peripheral edge of the extraction window 24 is pressed against the outer peripheral surface of the extraction window holder 22 by a pressing frame 25.

  The pressing frame 25 is fixed to the extraction window holding body 22 by a plurality of bolts 26 screwed from the pressing frame 25 side. The bolts 26 are provided with through holes for venting air so that even a slight gap between the bolts 26 and the non-through tap holes of the extraction window holder 22 into which the bolts 26 are screwed can be completely evacuated. . In the present embodiment, the extraction frame fixing means is constituted by the pressing frame 25, the bolt 26, and the like.

  As shown in FIGS. 1 and 4, the inner peripheral edge on the other end side (lower side in FIG. 1) of the vacuum chamber 11 is chamfered. An outer peripheral surface on the other end side in the axial direction of the extraction window holder 22 (lower side in FIG. 1) is detachably fitted to an inner peripheral surface on the other end surface side of the vacuum chamber 11. . Between the chamfered portion of the vacuum chamber 11 and the outer peripheral surface of the extraction window holder 22, an annular sealing material 15 and a pressing plate 16 are disposed.

  The sealing material 15 and the pressing plate 16 are connected to the chamfered portion of the vacuum chamber 11 and the outer peripheral surface of the extraction window holder 22 by an annular mounting flange 17 disposed on the other end surface of the vacuum chamber 11. It is hold | maintained so that a space may be vacuum-sealed. The mounting flange 17 is fixed by a bolt 18 screwed into the vacuum chamber 11.

  In such an electron beam irradiation apparatus according to the present embodiment, the inside of the vacuum chamber 11 is evacuated (not shown) or the like while the extraction window holder 22 and the extraction window 23 are cooled by a cooling device (not shown) or the like. Then, the electric wire 2 is moved and moved at a constant speed to the axial center part of the atmospheric environment of the vacuum chamber 11 (the axial center part of the extraction window holding body 22) by the electric wire traveling device (not shown). The electron beam 1 is generated and accelerated from the cathode 12 inside, and the electron beam 1 is extracted from all the openings 22a of the extraction window holder 22 through the extraction windows 24, and the axial center portion of the atmospheric environment of the extraction window holder 22 ( When it is sent out to the central portion of the main body 10 where the linear body is located, the electron beam 1 is entirely moved in the circumferential direction with respect to the electric wire 2 that is the linear body positioned in the portion. Uniform over Is irradiated, it is possible to perform evenly irradiated with the electron beam 1 to the whole coating material of the electric wire 2.

  That is, the thin-film extraction window 24 is held by the cylindrical extraction window holding body 22 in which the opening 22a having the shape satisfying the relational expression (1) described above is held, so that the thin-film extraction window 24 can be obtained even in a high vacuum environment. Thus, the irradiation amount of the electron beam 1 with respect to the axial direction can be made uniform over the entire circumferential direction without causing damage such as cracks.

  In this way, when the coating material of the electric wire 2 is irradiated with the electron beam 1 and the extraction window 24 deteriorates due to oxidation or the like (after use for about 1000 to 3000 hours), the bolt 18 is removed from the vacuum chamber 11 and the mounting flange is removed. 17 and the pressing plate 16 and the sealing material 15 are removed from between the chamfered portion of the vacuum chamber 11 and the outer peripheral surface of the extraction window holder 22, and then the flange plate 21 is pulled away from the vacuum chamber 11, the extraction window 24 is formed. It is taken out from the vacuum chamber 11 together with the extraction window holder 22 and the like.

  Subsequently, the bolt 26 is removed from the holding frame 25 and the extraction window holder 22, the holding frame 25 is removed from the extraction window holder 22, the extraction window 24 is removed from the extraction window holder 22, and a new extraction window 24 is removed. After winding around the extraction window holder 22, the extraction window 24 can be easily replaced by fixing the extraction window 24 to the extraction window holder 22 via the holding frame 25 and the bolt 26.

  Then, the extraction window holder 22 is inserted into the vacuum chamber 11 so that the other end side of the extraction window holder 22 is fitted to the other end side of the vacuum chamber 11, and the flange plate 21 is inserted into one of the vacuum chambers 11. After mounting on the end surface, the sealing material 15 and the pressing plate 16 are disposed between the chamfered portion of the vacuum chamber 11 and the outer peripheral surface of the extraction window holder 22, and the bolt 18 is vacuumed through the mounting flange 17. By screwing into the chamber 11, the replacement operation of the extraction window 24 is completed.

  That is, the extraction window 24 can be easily attached to and detached from the vacuum chamber 11 by unitizing the extraction window 24 together with the extraction window holder 22 and the like.

  Therefore, according to the electron beam irradiation apparatus according to the present embodiment, even with a small-diameter linear body such as the electric wire 2 or the optical fiber, the extraction window 24 is made as close as possible to the linear body. The electron beam 1 can be uniformly irradiated from the entire circumferential direction, and maintenance such as replacement of the extraction window 24 can be easily performed.

  Further, since the outer peripheral surface on the other end side of the extraction window holder 22 is fitted to the inner peripheral surface on the other end side of the vacuum chamber 11, the extraction window holder 22 can be easily positioned with respect to the vacuum chamber 11. Further, it is possible to further facilitate the attachment / detachment work during the maintenance.

  Further, since the extraction window 24 is wound around the outer peripheral surface of the extraction window holding body 22 and attached from the outer peripheral surface side of the extraction window holding body 22 via the holding frame 25 and the bolt 26, the removal operation of the extraction window 24 is taken out. This can be performed outside the window holder 22, and the replacement work of the extraction window 24 can be further facilitated.

  Further, as shown in FIG. 5, if a stepped portion that fits with the flange plate 21 is formed on one end surface portion of the vacuum chamber 11, the extraction window holder 22 can be more easily positioned with respect to the vacuum chamber 11. In addition, it is possible to further facilitate the attachment / detachment work during maintenance.

  Moreover, it is good to fix suitably the part which contact | connects the said non-opening part of the said extraction window holding body 22 other than the peripheral edge part of the said extraction window 23 via a sealing material as needed.

  In this embodiment, the bolt 26 and the counterbore tapped hole are applied so as not to produce a protrusion at a position where the high voltage application portion is visually observed (see FIG. 3). However, when corona ring is used in combination. May not have such a configuration.

  Further, the shape of the opening 22a of the extraction window holder 22 is not limited to a rhombus, but may be a shape of the opening formed under the condition satisfying the relationship of the above-described formula (1), for example, as shown in FIG. In addition, it is possible to form the extraction window holder 22 having a rectangular opening 22b formed in plural in the axial direction and in the circumferential direction and shifted in the axial direction so as to satisfy the formula (1).

[Second embodiment]
A second embodiment of the electron beam irradiation apparatus according to the present invention will be described with reference to FIGS. FIG. 7 is a schematic structural diagram of the extraction window holder, FIG. 8 is a schematic structural diagram of the extraction window base, FIG. 9 is a schematic structure diagram of the state where the extraction window base is attached to the extraction window holder, and FIG. FIG. 11 is a sectional view taken along line XX in FIG. 9, and FIG. 11 is a sectional view taken along line XI-XI in FIG. In addition, about the part similar to the case of 1st embodiment mentioned above, by using the code | symbol same as the code | symbol used in description of 1st embodiment mentioned above, 1st embodiment mentioned above. The description overlapping with the description in is omitted.

  As shown in FIGS. 7 to 11, the Z-shaped extraction window holding body 32 is curved in an arc shape so that the side portion on one side in the axial direction can be integrally attached along the inner peripheral edge of the flange plate 21. At the same time, a plurality (two in this embodiment) are arranged so as to form a cylindrical shape along the inner peripheral edge of the flange plate 21. That is, the extraction window holder 32 can be divided into a plurality along the axial direction.

  The shape of the opening 32a of the extraction window holding body 32 is such that the value C obtained by the above-described formula (1) in the line L along the axis of the arbitrary position on the peripheral surface of the extraction window holding body 32 is It is set to be substantially the same.

  Along with the opening 32a of the extraction window holder 32, a sealing material 23 is disposed and a plurality of bolt tap holes 32b are formed at predetermined intervals. An O-ring 37 is provided along the periphery of the tap hole 32b on the outer surface in the curved radial direction of the extraction window holder 32.

  A right triangle shape corresponding to the shape of the opening 32a is attached to the opening 32a of the extraction window holder 32 so as to be detachably attached to the opening 32a from the outside in the curved radial direction of the extraction window holder 32. And an extraction window base 40 that is curved in an arc shape.

  The extraction window pedestal 40 is detachably fitted into the opening 32a from the outside in the curved radial direction of the extraction window holder 32, and is a right triangle formed with a hole 41a for the bolt 26 corresponding to the tap hole 32b. A frame portion 41 having a shape, and a plurality of bars 42 provided inside the frame portion 41 so as to partition an inner portion of the frame portion 41 at predetermined intervals in the axial direction of the extraction window holder 32. ing.

  A seal material 33 is disposed along the inner edge of the inner surface of the frame portion 41 of the extraction window base 40 in the curved radial direction. The inner side surface in the curved radial direction of the extraction window base 40 is covered with a thin-film extraction window 34 made of titanium serving as a partition wall. The peripheral edge of the extraction window 34 is pressed against the frame portion 41 of the extraction window base 40 from the inside in the curved radial direction by the pressing frame 25. The holding frame 25 is fixed to the extraction window base 40 by a plurality of bolts 38 screwed from the holding frame 25 side.

  That is, the extraction window holding body 32 supports the extraction window 32 so that the frame portion 41 detachably holds the extraction window 34 inwardly in the curved radial direction and the crosspiece 42 prevents damage to the extraction window 32 due to a pressure difference. It is supposed to do. In such an embodiment, the window frame body is configured by the extraction window holding body 32, the sealing material 23, the bolt 26, the O-ring 37, the pedestal 40, and the like, and the extraction window fixing means is configured by the holding frame 25, the bolt 38, and the like. doing.

  In such an electron beam irradiation apparatus according to this embodiment, by operating in the same manner as in the first embodiment described above, the electron beam 1 is uniformly irradiated over the entire circumferential direction of the electric wire 2, Irradiation of the electron beam 1 can be performed uniformly with respect to the whole coating | covering material of the electric wire 2. FIG.

  At this time, since the crosspiece 42 of the extraction window base 40 supports the extraction window 34, even if the extraction window 34 is very thin (for example, about 10 μm), damage to the extraction window 34 due to a pressure difference can be prevented.

  If the extraction window 34 is deteriorated due to oxidation or the like (after use for about 1000 to 3000 hours), the flange plate 21 is separated from the vacuum chamber 11 in the same manner as in the first embodiment described above, and the extraction window 34 34 is taken out from the vacuum chamber 11 together with the extraction window holder 32 and the extraction window base 40.

  Subsequently, the bolt 26 is removed from the outside in the curved radial direction of the extraction window holding body 32 and the extraction window pedestal 40, and the extraction window base 40 is removed from the outside in the curved radial direction with respect to the extraction window holding body 32. 38 is removed from the inside of the curved radial direction of the holding frame 25 and the extraction window pedestal 40, the holding frame 25 is removed from the inside of the curved radial direction with respect to the extraction window pedestal 40, and the extraction window 34 is taken out of the inside of the curved window in the curved radial direction. Then, the inner side surface of the extraction window base 40 in the curved radial direction is covered with a new extraction window 34, and then the extraction window 34 is fixed to the extraction window base 40 from the inner side in the curved radial direction via the holding frame 25 and the bolt 38. Then, the extraction window 34 can be easily replaced by fitting the extraction window base 40 into the opening 32 a of the extraction window holder 32 from the outside in the curved radial direction and fixing it with the bolt 26.

  Then, as in the case of the first embodiment described above, the replacement operation of the extraction window 34 is completed by inserting the extraction window holder 32 and the like into the vacuum chamber 11.

  That is, in the present embodiment, the extraction window 24 is attached to and detached from the inside of the extraction window base 40 having the crosspiece 42 in the curved diameter direction, and the extraction window holder 32 is extracted from the outside in the curved diameter direction. The attachment / detachment work of the window pedestal 40 is performed.

  For this reason, even if the extraction window 34 is very thin (for example, about 10 μm), the removal operation of the extraction window 34 can be facilitated while preventing the damage of the extraction window 34 due to the pressure difference.

  Therefore, according to the electron beam irradiation apparatus according to the present embodiment, it is possible to obtain the same effect as in the case of the first embodiment described above, and in the case of the first embodiment described above. Since the extraction window 34 having a smaller thickness can be applied, the loss energy of the electron beam 1 due to the transmission through the extraction window 34 can be minimized, and the irradiation efficiency of the electron beam 1 can be further improved. Can do.

[Other Embodiments]
In each of the above-described embodiments, the case where the electron beam 1 is uniformly irradiated from the entire circumferential direction to the electric wire 2 has been described. However, the present invention is not limited to this, and the optical fiber is uniform from the entire circumferential direction. In addition to the case of irradiating an electron beam to each of the above embodiments, for example, even when sterilizing or sterilizing a linear food (such as noodles) or a medical instrument (such as a tube) It can be applied in the same manner as in the above.

  The electron beam irradiation apparatus according to the present invention can be applied to uniformly irradiating an electron beam over the entire circumferential direction of a linear object such as an electric wire or an optical fiber, and is extremely useful industrially.

It is a schematic structure figure of an important section of a first embodiment of an electron beam irradiation apparatus concerning the present invention. It is a partial extraction figure of the extraction window holding body of 1st embodiment of the electron beam irradiation apparatus which concerns on this invention. It is the extraction enlarged view of the arrow III part of FIG. It is an extraction enlarged view of the arrow IV part of FIG. It is a schematic structural drawing of the principal part of the other form of 1st embodiment of the electron beam irradiation apparatus which concerns on this invention. It is a partial extraction figure of the extraction window holding body of the other form of 1st embodiment of the electron beam irradiation apparatus which concerns on this invention. It is a schematic structure drawing of the extraction window holder of the second embodiment of the electron beam irradiation apparatus according to the present invention. It is a schematic structure figure of the extraction window base of 2nd embodiment of the electron beam irradiation apparatus which concerns on this invention. FIG. 9 is a schematic structural diagram of a state in which the extraction window base of FIG. 8 is attached to the extraction window holder of FIG. 7. FIG. 10 is a sectional view taken along line XX in FIG. 9. It is the XI-XI sectional view taken on the line of FIG. It is a schematic structure figure of the principal part of an example of the conventional electron beam irradiation apparatus. It is a schematic structural drawing of the principal part of the other example of the conventional electron beam irradiation apparatus. It is explanatory drawing of an example of the attachment structure of the extraction window of the conventional electron beam irradiation apparatus. It is explanatory drawing of the electron beam irradiation by the conventional electron beam irradiation apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electron beam 2 Electric wire 10 Main-body part 11 Vacuum chamber 12 Cathode 13 Extraction electrode 14,15 Seal material 16 Holding plate 17 Mounting flange 18 Bolt 21 Flange board 22,32 Extraction window holder 22a, 22b, 32a Opening part 23, 33 Seal Material 24 Extraction window 25 Holding frame 26, 38 Bolt 37 O-ring 40 Extraction window base 41 Frame part 42 Crosspiece

Claims (7)

An electron beam irradiation apparatus for irradiating a linear body with an electron beam,
A main body having a vacuum chamber in which electron beam emitting means for emitting an electron beam from the entire circumferential direction with respect to a central portion where the linear body is located;
A cylindrical window frame that is detachably attached to the vacuum chamber so as to partition the interior of the vacuum chamber and the central portion of the main body, and has an opening in the circumferential direction;
A thin film extraction window provided on the window frame so as to cover the opening of the window frame;
An electron beam irradiation apparatus comprising: extraction window fixing means for detachably attaching the extraction window to the window frame. In claim 1,
An electron beam irradiation comprising: a flange plate attached to an end portion on one side in the axial direction of the window frame body and detachably partitioning the end portion of the window frame body and the vacuum chamber. apparatus. In claim 1 or claim 2,
An electron beam irradiation apparatus, wherein an outer peripheral surface on the other end side in the axial direction of the window frame is detachably fitted to the vacuum chamber. In any one of Claims 1-3,
The value C in the line L along the axial center at an arbitrary position on the peripheral surface of the window frame body, which is obtained by the following formula (1), of the opening of the window frame body is substantially the same value. An electron beam irradiation apparatus characterized in that a shape is set.
C = At / (At + Bt) (1)
However, At is the total length of the part of the line L that corresponds to the opening, and Bt is the total length of the part of the line L other than the opening (non-opening part). In any one of Claims 1-4,
The extraction window is provided so as to cover the window frame from the outer peripheral surface side,
The said extraction window fixing means fixes the said extraction window from the outer peripheral surface side of the said window frame so that attachment or detachment is possible. The electron beam irradiation apparatus characterized by the above-mentioned. In any one of Claims 1-4,
The window frame is
A holder that can be divided into a plurality along the axial direction;
The extraction window is detachably attached to the opening of the holding body from the outside in the radial direction so as to detachably hold the extraction window on the inside in the radial direction, and supports the extraction window so as to prevent damage to the extraction window due to a pressure difference. With pedestal and
The said extraction window fixing means fixes the said extraction window from the inner peripheral surface side of the said window frame so that attachment or detachment is possible. The electron beam irradiation apparatus characterized by the above-mentioned. In claim 6,
The pedestal is
A frame portion that is detachably attached to the opening of the holding body from the outside in the radial direction, and holds the extraction window detachably on the inside in the radial direction;
An electron beam irradiation comprising: a plurality of bars provided in the inner portion of the frame portion to support the extraction window so as to partition the inner portion of the frame portion at predetermined intervals in the axial direction. apparatus.

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