JP2005253187A5 - - Google Patents
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- Publication number
- JP2005253187A5 JP2005253187A5 JP2004059820A JP2004059820A JP2005253187A5 JP 2005253187 A5 JP2005253187 A5 JP 2005253187A5 JP 2004059820 A JP2004059820 A JP 2004059820A JP 2004059820 A JP2004059820 A JP 2004059820A JP 2005253187 A5 JP2005253187 A5 JP 2005253187A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004059820A JP2005253187A (ja) | 2004-03-03 | 2004-03-03 | 静電アクチュエータの駆動装置及び駆動方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004059820A JP2005253187A (ja) | 2004-03-03 | 2004-03-03 | 静電アクチュエータの駆動装置及び駆動方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005253187A JP2005253187A (ja) | 2005-09-15 |
JP2005253187A5 true JP2005253187A5 (nl) | 2007-03-08 |
Family
ID=35033142
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004059820A Pending JP2005253187A (ja) | 2004-03-03 | 2004-03-03 | 静電アクチュエータの駆動装置及び駆動方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005253187A (nl) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4537429B2 (ja) * | 2006-07-27 | 2010-09-01 | 日本電信電話株式会社 | ミラー制御装置 |
JP4723680B2 (ja) * | 2006-07-27 | 2011-07-13 | 日本電信電話株式会社 | ミラー制御装置 |
JP2009022108A (ja) * | 2007-07-12 | 2009-01-29 | Olympus Corp | 超音波モータ駆動回路及び超音波モータの駆動信号生成方法 |
JP5160935B2 (ja) * | 2008-03-31 | 2013-03-13 | 日本電信電話株式会社 | ミラー装置およびミラーアレイ |
JP6289091B2 (ja) * | 2013-12-26 | 2018-03-07 | オリンパス株式会社 | 硬度可変アクチュエータ |
JP6546576B2 (ja) * | 2016-10-11 | 2019-07-17 | 矢崎総業株式会社 | 電圧センサ |
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2004
- 2004-03-03 JP JP2004059820A patent/JP2005253187A/ja active Pending