JP2005251891A - Thin metal package and its manufacturing method - Google Patents

Thin metal package and its manufacturing method Download PDF

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JP2005251891A
JP2005251891A JP2004058484A JP2004058484A JP2005251891A JP 2005251891 A JP2005251891 A JP 2005251891A JP 2004058484 A JP2004058484 A JP 2004058484A JP 2004058484 A JP2004058484 A JP 2004058484A JP 2005251891 A JP2005251891 A JP 2005251891A
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metal
package
molded member
lead
convex portions
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JP4349622B2 (en
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Daisuke Fukushima
大輔 福島
Hiroshi Kato
比呂志 加藤
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NEC Schott Components Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin metal package which improves the arrangement accuracy of a lead terminal and which makes facilitation of a mass production treatment. <P>SOLUTION: The thin metal package 10 is hermetically sealed at a predetermined position by the insulating material 15 at a plurality of lead terminals 20 inserted into a plurality of through holes 11 of a metal base 12. The lead terminal 20 is molded integrally with a molding member having a coupling part for coupling between four metal protruding parts and a metal protruding part by working, such as pressing, electroforming, welding, etc. of a metal plate, and the metal base 12 and the molding member are sealed through the insulator 15. The sealing step integrates the metal base 12 having the four through holes 11 and the coupling part for coupling between the four metal protruding parts and the metal protruding part by using an assembling jig, heat treats the vicinity of the melting temperature of the insulating material, and hermetically welds. A surface finishing step removes the coupling part by polishing the rear surface side of the molding member, individually separates the metal protruding parts, and thereby becoming four lead terminals 20 by it. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、金属ベースとリード端子を絶縁材にて気密溶着した薄型金属パッケージとその製造方法に関し、特に、表面実装用電子部品として好適し量産化処理を容易にする薄型金属パッケージおよびその製造方法に関する。   The present invention relates to a thin metal package in which a metal base and lead terminals are hermetically welded with an insulating material and a manufacturing method thereof, and more particularly to a thin metal package which is suitable as a surface mounting electronic component and facilitates mass production processing and a manufacturing method thereof. About.

水晶振動子・フィルタ・発振器などの表面実装型電子部品デバイスは、表面実装型パッケージに水晶片・圧電デバイス片を収容して構成されるが、表面実装型パッケージとしてはベースとキャップの4種類が知られている。例えば、特許文献1および2に示されるように、金属ベースにリード端子がほうけい酸高融点ガラスで封着する金属パッケージに水晶振動子などの機能部品を収容して妨害電磁波の侵入を防ぐ構造のもの、電磁波の侵入を危惧しない場合での絶縁セラミックベースを用いたパッケージからなるもの、セラミックべースとその開口部を塞ぐ天板に透光性のガラスキャップを組合わせて低融点ガラスで封着してレーザートリミングによる発振周波数調整を容易にしたもの、セラミックベースと金属キャップの組み合わせでベース側壁のスペーサの開口側上面にAgロー材の金属薄膜を形成し、金属キャップとシーム溶接あるいは電子ビーム溶接したものがある。
特開2003−124382号 特開2003−086723号
Surface-mount electronic component devices such as crystal resonators, filters, and oscillators are configured by accommodating crystal pieces and piezoelectric device pieces in a surface-mount package. There are four types of surface-mount packages: base and cap. Are known. For example, as shown in Patent Documents 1 and 2, a structure in which a functional component such as a crystal resonator is housed in a metal package in which lead terminals are sealed with borosilicate high melting point glass on a metal base to prevent intrusion of disturbing electromagnetic waves Low-melting glass by combining a ceramic base and a top plate that closes the opening with a translucent glass cap when there is no concern about the invasion of electromagnetic waves. Easy to adjust the oscillation frequency by laser trimming by sealing, and by using a combination of ceramic base and metal cap, a silver thin film of Ag low material is formed on the upper surface of the spacer on the side wall of the base, and the metal cap and seam welding or electronic Some are beam welded.
JP 2003-124382 A JP 2003-086723 A

すなわち、特許文献1は金属ベ−スの貫通孔に絶縁材を用いて金属リ−ドを挿通し、蓋体となるキャップを被せて合体ベ−スを形成し、気密雰囲気のベース内部に金属リ−ドのベ−ス内部に電子部品素子を架設・接着して収納する金属パッケ−ジを開示する。さらに、金属ベ−ス下面を基板取付け面とし、金属リ−ドと基板取付け面との間の絶縁距離を十分な距離、0.05〜0.3mmに設定して、基板に金属パッケ−ジ実装後の半田フィレットの確認を容易にするほか、金属パッケ−ジの製造では、多数の金属リ−ドをリードフレーム状板体を用いて、各々の金属ベ−スへ挿入させて絶縁材により溶着後、切断して個々の薄型金属パッケージとすることも開示する。このように、水晶振動子等の電子部品素子を搭載するパッケージはシールド効果が有利な金属ベースに金属リードを絶縁材の介在で封着する金属パッケージが主流であり、電子機器の小型化要請から実装方式でも表面実装が増加しつつある。特に、水晶振動子などの多数の電子デバイスを収納する場合には複数個の金属リードを有する金属パッケージが用いられている。   That is, in Patent Document 1, a metal lead is inserted into a through hole of a metal base using an insulating material, a cap serving as a lid is formed to form a combined base, and a metal base is formed inside the base of an airtight atmosphere. Disclosed is a metal package in which electronic component elements are installed and bonded inside a lead base. Furthermore, the lower surface of the metal base is used as the board mounting surface, and the insulation distance between the metal lead and the board mounting surface is set to a sufficient distance, 0.05 to 0.3 mm, so that the metal package is mounted on the board. In addition to facilitating the confirmation of solder fillets after mounting, in the manufacture of metal packages, a number of metal leads are inserted into each metal base using a lead frame plate, and an insulating material is used. It is also disclosed to cut individual thin metal packages after welding. As described above, packages for mounting electronic component elements such as crystal resonators are mainly metal packages in which metal leads are sealed on a metal base with an advantageous shielding effect by interposing an insulating material. Surface mounting is also increasing in the mounting method. In particular, when a large number of electronic devices such as crystal resonators are accommodated, a metal package having a plurality of metal leads is used.

ところが、従来の表面実装方式で用いられる金属パッケージではリードの周囲に介在する絶縁材を用いて絶縁性を確保する必要から絶縁距離を大きくするために外径が大となり、パッケージの小型・薄型化が困難であった。特に、複数個のリード端子を有する金属パッケージでは金属ベースに絶縁材を介して封着されたリード端子の整列精度で問題が生じ易く、例えば、リード長にばらつきが生じて端子の接続面が不揃いになったり、リード相互の直立平行度で一部に傾きが生じて修正を余儀なくされたりしていた。また、リード端子を絶縁材で気密溶着する加熱作業では高度な熟練と多大の工数を必要として結果的にパッケージ加工コストと共に選択材料の原価コストが高くなり、表面実装に適するローコスト金属パッケージ製品の提供が難しい。更には、多数のリード端子を有する薄型金属パッケージ製品では、電子機器への組立で表面実装での多くの課題が残されている。   However, in the conventional metal package used in the surface mounting method, the outer diameter is increased in order to increase the insulation distance because it is necessary to ensure insulation by using an insulating material interposed around the lead, and the package becomes smaller and thinner. It was difficult. In particular, in a metal package having a plurality of lead terminals, it is easy to cause a problem in the alignment accuracy of the lead terminals sealed with an insulating material on the metal base, for example, the lead length varies and the terminal connection surfaces are not uniform. In some cases, the vertical parallelism between the leads caused some inclination to be corrected. In addition, the heating work in which the lead terminals are hermetically welded with an insulating material requires a high degree of skill and a great number of man-hours. Is difficult. Furthermore, in a thin metal package product having a large number of lead terminals, many problems remain in surface mounting in assembling into electronic equipment.

したがって、本発明は上記の欠陥に鑑みて提案されたものであり、リード端子の独創的な構造と製作方法の工夫により加工費を安価にする表面実装に好適な薄型金属パッケージとその製造方法の提供を目的とする。特に、多数のリード端子を所定位置に正確に配置整列することが必要な薄型金属パッケージにおいて、量産化に好適で作業工数の大幅削減を可能にすると共にリード端子の配列精度を向上する低コストの新規かつ改良された薄型金属パッケージの提供を目的とするものである。   Accordingly, the present invention has been proposed in view of the above-described defects, and a thin metal package suitable for surface mounting and a manufacturing method thereof suitable for surface mounting that reduces the processing cost by an original structure of the lead terminal and a device method. For the purpose of provision. Especially for thin metal packages that require precise alignment and alignment of a large number of lead terminals at predetermined positions, it is suitable for mass production and enables a significant reduction in work man-hours and at the same time improves the lead terminal arrangement accuracy. The object is to provide a new and improved thin metal package.

本発明の別の目的は、多数のリード端子を備える気密端子形金属ベースからなる表面実装用薄型金属パッケージにおいて、金属ベースの実装側である裏面側に露呈するリード端子の接続部が面一に揃えられるように仕上加工して表面実装作業を容易にし、必要に応じて、予めはんだ材を具備させた新規かつ改良された薄型金属パッケージとその製造方法を提供することにある。   Another object of the present invention is a thin metal package for surface mounting comprising a hermetic terminal type metal base having a large number of lead terminals, wherein the lead terminal connecting portions exposed on the back side, which is the mounting side of the metal base, are flush with each other. It is an object of the present invention to provide a new and improved thin metal package preliminarily provided with a solder material and a manufacturing method thereof in order to facilitate surface mounting work by finishing so as to be aligned.

本発明によれば、貫通孔を形成した金属ベースと、この貫通孔に高融点または低融点のガラスあるいはポリイミド系樹脂等のプラスチック材から選択される絶縁材を介在して封着したリード端子とを具備する気密端子形金属パッケージであって、リード端子は金属凸状部を有する成形部材からなり、この成形部材の頂面部分および底面部分を端子接続部とすることを特徴とする薄型金属パッケージが提供される。この場合、貫通孔およびリード端子は複数個からなり、前記成形部材は複数個の金属凸状部と連結部を有しこれを個別に分離分割して複数個のリード端子を形成して所定位置に整列配置させたことを特徴とする。また、金属板は複数個の金属凸状部と連結部を有する成形部材とフレーム枠からなるリードフレーム体であり、このリードフレーム体の連結部を切り離したことを特徴とする薄型金属パッケージも開示される。加えて、成形部材の底面部分は一体成形による凹状部が形成された、この凹状部にはんだ材を装填した端子接続部を設けて表面実装の接続を容易にすることも開示される。   According to the present invention, a metal base in which a through hole is formed, and a lead terminal sealed with an insulating material selected from a plastic material such as high melting or low melting glass or polyimide resin in the through hole, and An airtight terminal type metal package comprising: a thin metal package characterized in that the lead terminal is formed of a molded member having a metal convex portion, and the top surface portion and the bottom surface portion of the molded member are terminal connection portions. Is provided. In this case, there are a plurality of through holes and lead terminals, and the molded member has a plurality of metal convex portions and connecting portions, which are separated and divided individually to form a plurality of lead terminals. It is characterized by being arranged in line. Further, the metal plate is a lead frame body composed of a molding member having a plurality of metal convex portions and a connecting portion and a frame frame, and a thin metal package characterized by disconnecting the connecting portion of the lead frame body is also disclosed. Is done. In addition, it is also disclosed that the bottom surface portion of the molded member has a concave portion formed by integral molding, and a terminal connection portion loaded with a solder material is provided in the concave portion to facilitate surface mounting.

また、リード端子は金属板を絞り出すプレス加工や、金属板の裏面側エッチングあるいは金属板のエッチングやプレス加工してその上にメッキによる電鋳で金属凸状部を形成した成型部材、更には金属板にロッドを抵抗溶接して金属凸状部を形成した成形部材から製作される。すなわち、成形部材はプレス加工金属板、エッチング加工金属板、メッキ電鋳加工金属板またはロッド溶接加工金属板から選択される一つの金属成形部材であり、薄板状金属板をプレスやエッチング手法で凸状部としたり、メッキの電気鋳造(電鋳)またはロッドの溶接加工により成形され、製作工程の容易化を図ることを提案する。本発明によれば金属板をプレス、エッチング、メッキおよび溶接加工の少なくともいずれかにより金属凸状部と連結部を有する成形部材を製作する加工工程と、前記成形部材と貫通孔を有する金属ベースとを所定空隙を保ちつつ前記金属凸状部を前記貫通孔に挿入し所定位置に配置して前記所定空隙に介在の絶縁材により気密溶着する封着工程と、前記金属ベースに封着した前記成形部材に端子接続部を形成する表面仕上工程とからなり、前記金属凸状部をリード端子としたことを特徴とする薄型金属パッケージの製造方法が提案される。ここで成形部材を用意する加工工程は金属板に複数個の金属凸状部と連結部を有する成形部材を一体成形し、封着工程は成形部材を複数個の貫通孔のある金属ベースに成形部材の金属凸状部を貫通孔に挿入配置して気密封着し、最終の表面仕上工程は封着された成形部材から金属凸状部を個別に分離するよう連結部を除去する研磨工程を含めることを開示する。また、加工工程はプレス、電鋳、溶接などが適用されるほか、金属板に複数個の金属凸状部がそれぞれ連結部によりフレーム枠と結合するリードフレーム体とすることも提案される。   In addition, the lead terminal is formed by pressing a metal plate, pressing the back side of the metal plate, etching or pressing the metal plate, and forming a metal convex portion thereon by electroforming by plating. It is manufactured from a molded member in which a metal convex portion is formed by resistance welding of a rod to a plate. That is, the formed member is one metal formed member selected from a pressed metal plate, an etched metal plate, a plated electroformed metal plate, or a rod welded metal plate, and the thin metal plate is protruded by pressing or an etching method. It is proposed to make it easier to make the manufacturing process by forming the shape part, electroplating of plating (electroforming) or welding of the rod. According to the present invention, a processing step of manufacturing a molded member having a metal convex portion and a connecting portion by pressing, etching, plating and welding the metal plate, and the metal base having the molded member and the through hole, The metal convex portion is inserted into the through-hole while maintaining a predetermined gap, and is placed at a predetermined position and hermetically welded with an insulating material interposed in the predetermined gap, and the molding sealed to the metal base A method of manufacturing a thin metal package is proposed, which includes a surface finishing step of forming a terminal connection portion on a member, wherein the metal convex portion is a lead terminal. Here, the process of preparing the molded member is to integrally form a molded member having a plurality of metal convex portions and connecting portions on a metal plate, and the sealing step is to mold the molded member into a metal base having a plurality of through holes. The metal convex portion of the member is inserted and arranged in the through-hole and hermetically sealed, and the final surface finishing step is a polishing step for removing the connecting portion so as to separate the metal convex portion from the sealed molded member. Disclose inclusion. In addition to pressing, electroforming, welding, and the like being applied to the processing step, it is also proposed that a lead frame body in which a plurality of metal convex portions are coupled to the frame frame by connecting portions on a metal plate is proposed.

本発明の薄型金属パッケージは金属ベースに封着されたリード端子が金属板へのプレス、エッチング、電鋳、溶接等の加工により一体成形部材を製作するので実装基板上への配置が安定化してはんだ接続を確実かつ容易にすると共に作業工数の削減により低コスト化が図られる。特に、複数個のリード端子を金属ベースの貫通孔に挿入して絶縁材で気密溶着する際、各リード端子が金属板での加工で一体成形するので組立工数の削減と同時に各成形部材の寸法や配置間隔が正確に維持され、封着後のリード端子の長さや取付け位置の精度向上が図れる金属パッケージ製品となり、表面実装が容易になるなどの実用的効果が大きい。例えば、4個のリード端子を設ける場合、リード間の寸法のばらつきを従来約0.05mmであったのを本発明方法では0.02mmにでき、パッケージキャビティ内でのリード端子の高さのばらつきでは単一ピン4本使用による従来方法では0.06mmであったのが本発明方法では0.03mmと略半減することができた。   In the thin metal package of the present invention, the lead terminal sealed on the metal base is manufactured as an integrally formed member by pressing, etching, electroforming, welding, etc. to the metal plate, so that the arrangement on the mounting substrate is stabilized. Solder connection is ensured and easy, and the cost is reduced by reducing the number of work steps. In particular, when multiple lead terminals are inserted into a metal-based through hole and hermetically welded with an insulating material, each lead terminal is integrally formed by processing with a metal plate, so the assembly man-hours can be reduced and the dimensions of each molded part can be reduced. In addition, the metal package product can maintain the accuracy of the arrangement interval and maintain the lead terminal length and the mounting position after sealing, and has a great practical effect such as easy surface mounting. For example, when four lead terminals are provided, the dimensional variation between the leads can be reduced to 0.02 mm in the method of the present invention, which was about 0.05 mm, and the height of the lead terminals in the package cavity is varied. In the conventional method using four single pins, it was 0.06 mm, but in the method of the present invention, it could be substantially halved to 0.03 mm.

また、組立冶具を用いて多数のリード端子を金属ベースの多数の貫通孔に挿入し絶縁材で気密溶着する際の組立が容易となり歩留の向上と冶具の長寿命化が図られると共に封着後のリード端子の頂面は平坦で平行度が保たれる。さらには絶縁材の選択によっては金属ベースとリード端子の気密溶着時の溶着温度を低くできるなどからリード端子の不揃いがなく寸法精度の高い薄型金属パッケージが提供できる。したがって、パッケージ内部に収容する水晶振動子などの電子部品素子の搭載およびパッケージ製品の基板上での表面実装を容易にするなどの実用的効果を奏する。   In addition, assembly is facilitated when a large number of lead terminals are inserted into a large number of through holes in a metal base using an assembly jig and airtight welding is performed with an insulating material, yield is improved, and the life of the jig is extended and sealed. The top surface of the subsequent lead terminal is flat and maintains parallelism. Furthermore, depending on the selection of the insulating material, the welding temperature at the time of airtight welding between the metal base and the lead terminal can be lowered, and therefore, a thin metal package with high dimensional accuracy can be provided without lead terminal irregularities. Therefore, there are practical effects such as easy mounting of electronic component elements such as a crystal resonator housed in the package and surface mounting of the packaged product on the substrate.

本発明の実施形態は、複数個の貫通孔を形成した金属ベースと、この貫通孔に高融点または低融点のガラスあるいはプラスチック材、好ましくはポリイミド系樹脂から選択される絶縁材を介在して封着した複数個のリード端子とを具備する気密端子形薄型金属パッケージであって、リード端子は用意された金属板をプレス、エッチング、電鋳、溶接などの加工により製作される複数個の金属凸状部と連結部を有する成形部材からなり、成形部材は金属板を分離分割して形成され、複数個のリード端子を所定位置に整列配置させ、この成形部材の頂面部分および底面部分に端子接続部を形成した薄型金属パッケージである。この薄型金属パッケージの製造方法は金属板をプレス加工やエッチング金属板へのメッキの電気鋳造または溶接加工で複数個の金属凸状部を有する成形部材の加工工程と、複数個の貫通孔を有する金属ベースと所定の空隙を維持しつつ金属凸状部を貫通孔に挿入して前記成形部材を所定位置に配置して所定の空隙に絶縁材を介在させ気密溶着する封着工程と、金属ベースに気密溶着した成形部材の露呈面を処理して端子接続部を形成する表面仕上工程とからなり、加工工程での成形部材は一体成形され、封着工程では成形部材が一体化状態で金属ベースの貫通孔に金属凸状部を挿入配置され、表面仕上工程では封着された複数個の金属凸状部を個別に分離する連結部の研磨または切断による除去工程が付加される。   Embodiments of the present invention include a metal base having a plurality of through holes, and an encapsulant interposed between the through holes and a high or low melting glass or plastic material, preferably a polyimide resin. An airtight terminal type thin metal package having a plurality of attached lead terminals, wherein the lead terminals are a plurality of metal protrusions produced by pressing, etching, electroforming, welding or the like on a prepared metal plate. The molding member is formed by separating and dividing a metal plate, and a plurality of lead terminals are arranged and arranged at predetermined positions, and terminals are formed on the top surface portion and the bottom surface portion of the molding member. It is a thin metal package in which a connection part is formed. This method of manufacturing a thin metal package has a processing step of a molded member having a plurality of metal convex portions by press forming of a metal plate or electrocasting or welding of a plated metal plate, and a plurality of through holes. A sealing step in which a metal convex portion is inserted into the through-hole while maintaining a predetermined gap with the metal base, the molding member is disposed at a predetermined position, and an insulating material is interposed in the predetermined gap to perform airtight welding; A surface finishing process in which the exposed surface of the molded member hermetically welded is processed to form a terminal connection portion. The molded member in the processing process is integrally formed, and in the sealing process, the molded member is integrated into a metal base. In the surface finishing step, a removal step is performed by polishing or cutting a connecting portion that individually separates the plurality of sealed metal convex portions.

また、別の実施態様は、金属板の加工により複数個の金属凸状部と連結部を有する結合体のリードフレーム体であり、このリードフレーム体の連結部を切り離して個別のリード端子としたことを特徴とする薄型金属パッケージを開示する。この場合に成形部材の加工工程では金属板に複数個の金属凸状部がそれぞれ連結部を介してフレーム枠に結合するリードフレーム体を一体成形し、封着工程でこのリードフレーム体が貫通孔を有する金属ベースに絶縁材で気密溶着した後、表面仕上工程で封着されたリードフレーム体から複数個の金属凸状部を分離するために連結部が切断されてフレーム枠が除去される。   Another embodiment is a combined lead frame body having a plurality of metal convex portions and connecting portions by processing a metal plate, and the connecting portions of the lead frame bodies are separated into individual lead terminals. A thin metal package is disclosed. In this case, in the forming member processing step, a lead frame body in which a plurality of metal convex portions are respectively coupled to the frame frame via connecting portions is integrally formed on the metal plate, and in the sealing step, the lead frame body is formed as a through hole. After the gas base is hermetically welded to the metal base having a metal layer, the connecting portion is cut and the frame frame is removed to separate the plurality of metal convex portions from the lead frame body sealed in the surface finishing process.

さらに別の実施態様は、薄型金属パッケージの製造方法における表面仕上工程でプレス加工等の成形の際に成形部材の底面部分に形成された凹状部にはんだ材を装填して端子接続部として表面実装による接続を容易にした薄型金属パッケージである。この場合、はんだ材は薄型金属パッケージの基板上への実装においてはんだ材を溶融して基板上の配線ランドとの接続に利用される。それゆえに表面実装に適した、より薄型化を図ることのできる金属パッケージとなる。また、はんだ材を不要とする場合の凹状部のへこみ部分には高融点はんだ材を用いて、へこみ部分を埋めてリード端子の外部電極部分を平坦面とすることも可能である。   Still another embodiment is a method for surface mounting as a terminal connection portion by loading a solder material into a concave portion formed on the bottom surface portion of a molded member during molding such as press working in the surface finishing step in the manufacturing method of a thin metal package It is a thin metal package that facilitates the connection by. In this case, the solder material is used for connection to the wiring land on the substrate by melting the solder material in mounting the thin metal package on the substrate. Therefore, the metal package suitable for surface mounting and capable of being made thinner can be obtained. Moreover, it is also possible to use a high melting point solder material for the recessed portion of the concave portion when the solder material is unnecessary, and fill the recessed portion to make the external electrode portion of the lead terminal flat.

以下、図面を参照して本発明に係る実施例について詳述する。本発明の薄型金属パッケージ10は、図1にその断面図を示すように、貫通孔11を有する金属ベース12と絶縁材15で気密封着されたリード端子20により構成され、金属ベース12の複数個の貫通孔11に挿入された複数個のリード端子20が所定位置に封着される。ここで、リード端子20は図2および図3の工程を経て製作される。先ず、図1に示すように金属板31のプレス加工により4個の金属凸状部32と金属凸状部間を結合する連結部33を有する成形部材30が成形加工され、次いで、図3に示すように、複数個の貫通孔11を形成した金属ベース12と成形部材30が絶縁部15を介在して封着される。すなわち、組立冶具を用いて4個の貫通孔11を有する金属ベース12と4個の金属凸状部32と金属凸状部間を結合する連結部33を有する成形部材342に示すように金属板31のプレス加工により4個の金属凸状部32と金属凸状部間を結合する連結部33を有する成形部材30が成形加工され、次いで、図3に示すように、複数個の貫通孔11を形成した金属ベース12と成形部材30が絶縁部15を介在して封着される。すなわち、組立冶具を用いて4個の貫通孔11を有する金属ベース12と4個の金属凸状部32と金属凸状部間を結合する連結部33を有する成形部材30とが合体され、絶縁材の溶融温度近くに加熱処理して両者を気密溶着する。絶縁材15は高融点または低融点のガラスおよびポリイミド系樹脂等のプラスチックから選択される。次に、成形部材30は金属板の裏面側から研磨され金属板の連結部33が除去されて金属凸状部が互いに独立分離される。分離分割した金属凸状部はリード端子20となり、その頂面部分22に図示しないが水晶振動子等の電子デバイスが搭載され、また底面部分24が図示しないが基板上に表面実装されてそれぞれ端子接続部として電気的接続に利用される。本発明の複数個のリード端子20は金属板のプレス加工で一体成形した成形部材で構成されるから所定位置に不揃いなく整列配置でき、リード端子20の端子接続部の寸法精度向上に有利となる。   Embodiments according to the present invention will be described in detail below with reference to the drawings. A thin metal package 10 of the present invention includes a metal base 12 having a through hole 11 and a lead terminal 20 hermetically sealed with an insulating material 15 as shown in a sectional view in FIG. A plurality of lead terminals 20 inserted into the through holes 11 are sealed in place. Here, the lead terminal 20 is manufactured through the steps of FIGS. First, as shown in FIG. 1, a molding member 30 having four metal convex portions 32 and a connecting portion 33 for joining the metal convex portions is molded by pressing a metal plate 31. Next, FIG. As shown, the metal base 12 having a plurality of through-holes 11 and the molded member 30 are sealed with an insulating portion 15 interposed. That is, a metal plate as shown in a forming member 342 having a metal base 12 having four through-holes 11, four metal convex portions 32, and a connecting portion 33 for joining the metal convex portions using an assembly jig. The molding member 30 having the four metal convex portions 32 and the connecting portions 33 for joining the metal convex portions is molded by the press processing of 31, and then, as shown in FIG. The metal base 12 and the molding member 30 that are formed are sealed with the insulating portion 15 interposed therebetween. That is, the metal base 12 having the four through-holes 11, the four metal convex portions 32, and the molding member 30 having the connecting portion 33 that connects the metal convex portions are combined with each other using an assembly jig, and insulated. Heat treatment is performed near the melting temperature of the material, and both are hermetically welded. The insulating material 15 is selected from high melting or low melting glass and plastic such as polyimide resin. Next, the shaping | molding member 30 is grind | polished from the back surface side of a metal plate, the connection part 33 of a metal plate is removed, and a metal convex-shaped part is mutually isolate | separated independently. The separated metal convex portions become lead terminals 20, and electronic devices such as a crystal resonator are mounted on the top surface portion 22 (not shown), and the bottom surface portion 24 is surface-mounted on a substrate (not shown). It is used for electrical connection as a connection part. Since the plurality of lead terminals 20 of the present invention are formed of a molded member integrally formed by pressing a metal plate, the lead terminals 20 can be aligned and arranged at predetermined positions without any irregularities, which is advantageous for improving the dimensional accuracy of the terminal connection portion of the lead terminals 20. .

次に本発明の薄型金属パッケージの製造方法について簡単に説明する。この薄型金属パッケージの製造方法は金属板31をプレス加工して複数個、例えば4個の金属凸状部32と連結部33を有する成形部材30の加工工程と、複数個、例えば4個の貫通孔11を有する金属ベース12と所定の空隙を維持しつつ金属凸状部33を貫通孔11に挿入して成形部材30を所定位置に配置して所定の空隙に絶縁材15を介在させ気密溶着する封着工程と、金属ベース12に気密溶着した成形部材30の露呈面を表面処理して端子接続部を形成してリード端子20にする表面仕上工程とからなり、加工工程では複数個の成形部材30を一体成形し、封着工程は成形部材30が一体化状態で金属ベース12に金属凸状部32を貫通孔11に挿入して配置され、表面仕上工程では封着された成形部材30から金属凸状部32を独立分離するよう連結部33を研磨により取り除きリード端子20とする。なお、リード端子20の端子接続部となる露呈面はメッキされて完成されるが、こうした製造方法により単一のリード端子を4個用いて組立てる場合に比べて封着工程では組立工数を略1/4に低減する。また、プレス成形で得られる金属ベース12と一体化した成形部材30は酸洗・酸化など前処理され、カーボン冶具に金属ベース、粉末をプレス成形したタブレット状絶縁材および成形部材の順に挿入する。
また、加工工程ではプレス加工のほかにエッチング処理した金属板にメッキの電鋳や溶接加工で成形部材を一体成形することもできる。
Next, the manufacturing method of the thin metal package of this invention is demonstrated easily. This method of manufacturing a thin metal package includes a step of pressing a metal plate 31 to form a plurality of, for example, four metal protrusions 32 and a connecting member 33, and a plurality of, for example, four through-holes. While maintaining a predetermined gap with the metal base 12 having the holes 11, the metal convex portion 33 is inserted into the through hole 11, the molding member 30 is disposed at a predetermined position, and the insulating material 15 is interposed in the predetermined gap to perform airtight welding. And a surface finishing process in which the exposed surface of the molded member 30 hermetically welded to the metal base 12 is subjected to surface treatment to form a terminal connection portion to form the lead terminal 20. In the processing process, a plurality of molding processes are performed. The member 30 is integrally formed, and in the sealing process, the molded member 30 is arranged in the state where the molded member 30 is integrated and the metal base 12 is inserted with the metal convex portion 32 inserted into the through hole 11 and is sealed in the surface finishing process. From metal convex part 32 The connecting portion 33 so as to independently separate the lead terminals 20 removed by polishing. In addition, although the exposed surface used as the terminal connection part of the lead terminal 20 is plated and completed, compared with the case where it assembles using four single lead terminals by such a manufacturing method, an assembly process time is about 1 in the sealing process. Reduce to / 4. Further, the molded member 30 integrated with the metal base 12 obtained by press molding is pretreated such as pickling and oxidation, and the metal base, the tablet-like insulating material press-molded with powder, and the molded member are inserted into a carbon jig in this order.
Further, in the processing step, the formed member can be integrally formed by electroforming plating or welding on an etched metal plate in addition to pressing.

次に図4に示す別の実施例の薄型金属パッケージについて詳述する。この実施例では金属板41のプレス加工の成形部材40は複数個の金属凸状部42と連結部43からなるリードフレーム体であり、連結部43を切断してフレーム枠を切り離して独立する複数個のリード端子25とした薄型金属パッケージである。この場合に加工工程では金属板に複数個の金属凸状部42がそれぞれ連結部43でフレーム枠に結合した成形部材40が一体成形リードフレーム体としてプレス成形され、封着工程では成形部材40のリードフレーム体が貫通孔11を有する金属ベース12に挿入配置されて絶縁材15で気密溶着され、表面仕上工程では封着された成形部材40から個別的に金属凸状部42を分離するよう不用となったフレーム枠が連結部43で切断されて除去される。なお、複数個の成形部材40を打ち抜き可能に形成されたリードフレーム体としての使用は、組立において挿入配置作業の効率化に役立つ。挿入配置の手順はリードフレーム体、ガラスタブレットの絶縁材および金属ベースという順に組立補助具を用いてカーボン治具内の個々のポジションへ挿入する。組立挿入後、カーボン治具上に重し・位置決めを行うためのカーボン治具を載せて高温炉へ投入し加熱処理する。加熱処理はリードフレーム体に金属ベースがガラス絶縁材で一体的に気密溶着される。この状態でメッキ処理が行なわれる。メッキ工程は吊り下げメッキ方式でリードフレーム体をベルトに吊り下げてメッキ槽へ浸漬してリードフレーム体のメッキをする。なお、薄型化のため、絶縁材には金属ベースの裏面側でも成形部材の一体成形品と溶着される。したがって、金属ベースの裏面とリード端子下面部分の端子接続部との間の空隙に絶縁材を流れ込ませることにより、絶縁材の高さ寸法が、0.2〜0.6mmの範囲に設定され、絶縁される距離間隔を0.05〜0.3mmとするのが好ましい。そして、リード端子の底面部分の端子接続部は実装する基板上の導電ランドと接続され表面実装を容易にする利点がある。   Next, a thin metal package of another embodiment shown in FIG. 4 will be described in detail. In this embodiment, the forming member 40 for press working of the metal plate 41 is a lead frame body composed of a plurality of metal convex portions 42 and a connecting portion 43, and a plurality of independent members by cutting the connecting portion 43 and separating the frame frame. This is a thin metal package having individual lead terminals 25. In this case, in the processing step, a molding member 40 in which a plurality of metal convex portions 42 are coupled to the frame frame on the metal plate by the connecting portions 43 is press-molded as an integrally formed lead frame body, and in the sealing step, the molding member 40 is formed. The lead frame body is inserted and arranged in the metal base 12 having the through-holes 11 and hermetically welded with the insulating material 15. In the surface finishing process, it is unnecessary to separate the metal convex portions 42 from the molded member 40 sealed. The resulting frame is cut at the connecting portion 43 and removed. In addition, the use as a lead frame body formed so that the plurality of molded members 40 can be punched out is useful for improving the efficiency of the insertion and placement work in assembly. The insertion arrangement procedure is to insert the lead frame body, the insulating material of the glass tablet, and the metal base into individual positions in the carbon jig using the assembly aid. After assembly and insertion, a carbon jig for positioning and positioning is placed on the carbon jig and placed in a high temperature furnace for heat treatment. In the heat treatment, the metal base is integrally hermetically welded to the lead frame body with a glass insulating material. In this state, the plating process is performed. In the plating process, the lead frame body is suspended by a belt by a hanging plating method and immersed in a plating tank to plate the lead frame body. In order to reduce the thickness, the insulating material is welded to the integrally formed product of the molded member on the back side of the metal base. Therefore, by allowing the insulating material to flow into the gap between the back surface of the metal base and the terminal connecting portion of the lower surface portion of the lead terminal, the height dimension of the insulating material is set in a range of 0.2 to 0.6 mm, The distance between the insulated distances is preferably 0.05 to 0.3 mm. And the terminal connection part of the bottom face part of a lead terminal is connected with the conductive land on the board | substrate to mount, and there exists an advantage which makes surface mounting easy.

図5は別の実施例として表面実装に適したリード端子構造の薄型金属パッケージを示す。この場合、図1と同様な構造であり、同一部分には同じ符号を付して説明を省略する。すなわち、リード端子20の底面部分24に形成された凹状部26にははんだ材28が装填され、表面実装する基板上へのはんだ接続を容易にする。はんだ材28の装填は表面仕上工程で行なわれ、プレス、電鋳、溶接加工等で一体成形された成形部材の底面側凹状部にはんだ材を脱落しないように装填するものであり、表面実装の際に端子接続部と取付け基板導電パターンとの接続を容易に薄型化を図るにも好都合となる。   FIG. 5 shows a thin metal package having a lead terminal structure suitable for surface mounting as another embodiment. In this case, the structure is the same as that in FIG. 1, and the same parts are denoted by the same reference numerals and the description thereof is omitted. That is, the concave portion 26 formed in the bottom surface portion 24 of the lead terminal 20 is loaded with the solder material 28 to facilitate solder connection on the surface-mounted substrate. The solder material 28 is loaded in a surface finishing process, and is loaded so that the solder material is not dropped into the concave portion on the bottom side of the molded member integrally formed by pressing, electroforming, welding, or the like. At this time, it is convenient to easily reduce the thickness of the connection between the terminal connection portion and the mounting substrate conductive pattern.

本発明は表面実装方式に好適する気密端子形薄型金属パッケージであり、水晶振動子を搭載するパッケージ製品に利用されるほか、特に薄型化に適した多数のリード端子を必要とする電子デバイス用の金属パッケージの利用分野に適する。   The present invention is a hermetic terminal type thin metal package suitable for a surface mounting method, and is used for a package product in which a crystal unit is mounted, and particularly for an electronic device requiring a large number of lead terminals suitable for thinning. Suitable for use field of metal package.

本発明に係る実施例の薄型金属パッケージの主要部断面図である。It is principal part sectional drawing of the thin metal package of the Example which concerns on this invention. 同じく図1の薄型金属パッケージの製造で使用するリード端子の成形部材の斜視図である。FIG. 2 is a perspective view of a lead terminal molding member used in the manufacture of the thin metal package of FIG. 1. 同じく図1の薄型金属パッケージの封着工程における主要部断面図である。FIG. 3 is a cross-sectional view of the main part in the sealing process of the thin metal package of FIG. 同じく別の実施例の金属パッケージにおける主要部の斜視および断面図である。It is the perspective view and sectional drawing of the principal part in the metal package of another Example similarly. 同じく別の実施例の金属パッケージにおける主要部の断面図である。It is sectional drawing of the principal part in the metal package of another Example similarly.

符号の説明Explanation of symbols

10: 薄型金属パッケージ
11: 貫通孔
12: 金属ベース
15: 絶縁材
20、25: リード端子
22: 頂面部分(端子接続部)
24: 底面部分(端子接続部)
26: 凹状部
28: はんだ材
30、40:成形部材
31、41:金属板
32、42: 金属凸状部
33、43: 連結部
10: Thin metal package 11: Through hole 12: Metal base 15: Insulating material 20, 25: Lead terminal 22: Top surface portion (terminal connection portion)
24: Bottom part (terminal connection part)
26: Concave portion 28: Solder material 30, 40: Molded member 31, 41: Metal plate 32, 42: Metal convex portion 33, 43: Connection portion

Claims (8)

貫通孔を形成した金属ベースと、この貫通孔に挿入して前記金属ベースと絶縁材により封着したリード端子とを具備する気密端子形金属パッケージにおいて、前記リード端子は金属凸状部を有する成形部材からなり、この成形部材の頂面部分および底面部分を端子接続部とすることを特徴とする薄型金属パッケージ。   An airtight terminal type metal package comprising a metal base having a through hole formed therein and a lead terminal inserted into the through hole and sealed with the metal base and an insulating material, wherein the lead terminal has a metal convex portion A thin metal package comprising a member and having a top surface portion and a bottom surface portion of the molded member as terminal connection portions. 前記成形部材はプレス加工金属板、エッチング加工金属板、メッキ電鋳加工金属板またはロッド溶接加工金属板から選択される一つの金属成形部材であり、前記絶縁材は高融点ガラス、低融点ガラスまたは樹脂材から選択される一種の絶縁物質からなることを特徴とする請求項1に記載の薄型金属パッケージ。   The molded member is one metal molded member selected from a pressed metal plate, an etched metal plate, a plated electroformed metal plate, or a rod welded metal plate, and the insulating material is a high melting glass, a low melting glass or 2. The thin metal package according to claim 1, comprising a kind of insulating material selected from resin materials. 前記貫通孔および前記リード端子は複数個からなり、前記成形部材は連結部と複数個の金属凸状部を有し、これらの金属凸状部を分離・分割して複数個のリード端子として所定位置に整列配置させることを特徴とする請求項1または2に記載の薄型金属パッケージ。   The through-hole and the lead terminal are composed of a plurality, and the molded member has a connecting portion and a plurality of metal convex portions, and these metal convex portions are separated and divided to be predetermined as a plurality of lead terminals. The thin metal package according to claim 1 or 2, wherein the thin metal package is aligned at a position. 前記成形部材は複数個の金属凸状部と連結部をフレーム枠に結合したリードフレーム体からなり、前記金属ベースと封着した後、前記フレーム枠を連結部から切り離して複数個のリード端子とすることを特徴とする請求項3に記載の薄型金属パッケージ。   The molding member includes a lead frame body in which a plurality of metal convex portions and a connection portion are coupled to a frame frame, and after sealing with the metal base, the frame frame is separated from the connection portion and a plurality of lead terminals. The thin metal package according to claim 3, wherein: 前記成形部材の底面部分は成形加工により形成した凹状部を備え、この凹状部にはんだ材を装填して表面実装側端子接続部とすることを特徴とする請求項1ないし4に記載の薄型金属パッケージ。   The thin metal according to any one of claims 1 to 4, wherein a bottom surface portion of the molding member includes a concave portion formed by molding, and a solder material is loaded into the concave portion to form a surface mounting side terminal connection portion. package. 金属板をプレス、エッチング、メッキおよび溶接加工の少なくともいずれかにより金属凸状部と連結部を有する成形部材を製作する加工工程と、前記成形部材と貫通孔を有する金属ベースとを所定空隙を保ちつつ前記金属凸状部を前記貫通孔に挿入し所定位置に配置して前記所定空隙に介在の絶縁材により気密溶着する封着工程と、前記金属ベースに封着した前記成形部材に端子接続部を形成する表面仕上工程とからなり、前記金属凸状部をリード端子としたことを特徴とする薄型金属パッケージの製造方法。   The metal plate is pressed, etched, plated, and welded to form a molded member having a metal convex portion and a connecting portion, and the molded member and the metal base having a through-hole are maintained at a predetermined gap. While the metal convex portion is inserted into the through-hole and disposed at a predetermined position and hermetically welded with an insulating material interposed in the predetermined gap, and the terminal connecting portion on the molded member sealed on the metal base A method of manufacturing a thin metal package, comprising a surface finishing step for forming a metal substrate, wherein the metal convex portion is a lead terminal. 前記加工工程は前記金属板から複数個の金属凸状部と連結部を有する成形部材を一体化形成し、前記封着工程は前記成形部材の複数個の金属凸状部を前記金属ベースが有する複数個の貫通孔に挿入配置して気密溶着し、前記表面仕上工程は封着した成形部材から前記金属凸状部を個別に分離するよう前記連結部を除去する研磨工程を含むことを特徴とする請求項6に記載の薄型金属パッケージの製造方法。   In the processing step, a molded member having a plurality of metal convex portions and connecting portions is integrally formed from the metal plate, and in the sealing step, the metal base has a plurality of metal convex portions of the molded member. Inserting and arranging in a plurality of through-holes and hermetic welding, and the surface finishing step includes a polishing step of removing the connecting portion so as to separate the metal convex portions from the sealed molded member. A method for manufacturing a thin metal package according to claim 6. 前記加工工程は複数個の金属凸状部がそれぞれ連結部を介してフレーム枠に結合するリードフレーム体の成形部材として一体化形成し、前記封着工程は前記成形部材の複数個の金属凸状部を前記金属ベースが有する複数個の貫通孔に挿入配置して気密溶着し、前記表面仕上工程は封着された成形部材から金属凸状部を個別に分離するよう前記連結部を切り離す切断工程を含むことを特徴とする請求項6に記載の薄型金属パッケージの製造方法。

The processing step is integrally formed as a molding member of a lead frame body in which a plurality of metal convex portions are respectively coupled to the frame frame via connecting portions, and the sealing step is a plurality of metal convex portions of the molding member. A cutting step of separating the connecting portion so as to separate the metal convex portion from the sealed molded member in an airtight manner by inserting and arranging the portion into a plurality of through holes of the metal base. The manufacturing method of the thin metal package of Claim 6 characterized by the above-mentioned.

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056232A (en) * 2008-08-27 2010-03-11 Seiko Instruments Inc Electronic component package and method for manufacturing the same
JP2010165904A (en) * 2009-01-16 2010-07-29 Seiko Instruments Inc Electronic component package, and manufacturing method therefor
JP2012253244A (en) * 2011-06-03 2012-12-20 Kyocera Chemical Corp Shield case assembly and method for producing electronic component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056232A (en) * 2008-08-27 2010-03-11 Seiko Instruments Inc Electronic component package and method for manufacturing the same
JP2010165904A (en) * 2009-01-16 2010-07-29 Seiko Instruments Inc Electronic component package, and manufacturing method therefor
JP2012253244A (en) * 2011-06-03 2012-12-20 Kyocera Chemical Corp Shield case assembly and method for producing electronic component

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