JP2005242326A - Image blur correction device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To maintain the position detecting accuracy of a magnetic field change detecting element and to reduce resistance in driving a movable part in an image blur correction device. <P>SOLUTION: The image blur correction device is equipped with the movable part 30a having a permanent magnet for position detection 41a which detects a position by detecting a 1st detection position signal in a 1st direction orthogonal to the optical axis of the photographic lens of an imaging element and a 2nd detection position signal in a 2nd direction orthogonal to the optical axis and the 1st direction, and capable of moving in the 1st and the 2nd directions, and is equipped with a fixed part 30b for fixing a Hall element part 44b for the position detection in the 1st and the 2nd directions so as to be opposed to the magnet 41a, and a Hall element signal processing circuit for obtaining the 1st and the 2nd detection position signals by calculation where respective amplification factors are added to a potential difference between the output terminals of the Hall element part. Furthermore, the area of the fixed part 30b to which the Hall element part 44b is attached is composed of non-magnetic substance, whereby magnetic flux density between the magnet 41a and the Hall element part 44b is enhanced so as not to hinder the driving of the movable part 30a. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an image blur correction apparatus in an imaging apparatus, and more particularly to a position detection apparatus for a movable part such as an image sensor that has moved for image blur correction.

  Conventionally, image blurring on the image plane is suppressed by moving the image blur correction lens or image sensor on a plane perpendicular to the optical axis in accordance with the amount of camera shake that occurs during imaging in an imaging device such as a camera. An image blur correction device has been proposed.

Patent Document 1 discloses a device in which a movable part including an image blur correction lens is moved by a permanent magnet and a coil, and position detection before and after the movement is performed by a Hall element and a permanent magnet.
JP 2002-229090 A

  However, the apparatus of Patent Document 1 is configured such that a Hall element for position detection, a driving magnet, and a yoke are arranged in an extended portion. This yoke has the effect of increasing the magnetic flux density between the permanent magnet and the Hall element to improve the accuracy of position detection, but the weight of the device is increased by the amount of magnetic material such as metal used for the yoke. If the drive magnet and yoke are not used together, the weight is reduced but the yoke that increases the magnetic flux density for position detection must be placed on the side opposite to the surface facing the magnet of the Hall element. The force also became a resistance when driving the movable part. Also, the weight of the device has increased by the amount of magnetic material such as metal used for the yoke.

  Therefore, an object of the present invention is to maintain the position detection accuracy of a magnetic field change detection element such as a Hall element and drive a movable part without increasing the attractive force due to the magnetic field lines for position detection with a yoke in the image blur correction apparatus. It is to provide a device that reduces resistance.

  An image blur correction apparatus for an image pickup apparatus according to the present invention includes a first direction orthogonal to an optical axis of a photographing lens with respect to either one of an image pickup element or an image blur correction lens and one of the image pickup element and the image blur correction lens. A first detection position signal and a second detection position signal in a second direction perpendicular to the optical axis and the first direction, and a first permanent magnet for position detection used for position detection; Magnetic field change detection unit having a movable part movable in the second direction, a horizontal magnetic field change detection element used for position detection in the first direction, and a vertical magnetic field change detection element used for position detection in the second direction The first detection position signal is obtained by an operation including the amplification of the first amplification factor in the horizontal potential difference between the fixed portion having a position opposite to the position detection permanent magnet and the output terminal of the horizontal magnetic field change detection element, Directional magnetic field change A magnetic field change detection element signal processing circuit for obtaining a second detection position signal by calculation including amplification of the second amplification factor in the vertical potential difference between the output terminals of the detection elements, and the magnetic field change detection part of the fixed part is attached The region was composed of a non-magnetic material. As a result, the position can be detected while maintaining high accuracy without using a yoke made of a magnetic material having an effect of increasing the magnetic flux density between the position detecting permanent magnet and the magnetic field change detecting section.

  Preferably, the magnetic field change detecting unit includes first and second horizontal magnetic field change detecting elements as horizontal magnetic field change detecting elements, and first and second vertical magnetic field change detecting elements as vertical magnetic field change detecting elements. The magnetic field change detecting element signal processing circuit has a first amplification factor by amplifying the difference between the first and second horizontal potential differences between the output terminals of the first and second horizontal magnetic field change detecting elements. The difference between the first and second vertical potential differences between the output terminals of the horizontal subtraction amplification circuit for obtaining the first detection position signal of the movable part and the first and second vertical magnetic field change detection elements is And a vertical direction subtracting amplification circuit that obtains the second detection position signal of the movable part by performing amplification.

  More preferably, the magnetic field change detecting element signal processing circuit includes a first and second horizontal differential amplifier circuit for amplifying a signal difference between output terminals of the first and second horizontal magnetic field change detecting elements, The signal difference amplified by the first and second vertical differential amplifier circuits for amplifying the signal difference between the output terminals of the second vertical magnetic field change detecting elements and the first and second horizontal differential amplifier circuits The difference between the reference voltage and the signal difference amplified by the first and second horizontal subtraction circuits for obtaining the first and second horizontal potential differences from the difference between the reference voltage and the reference voltage And a first and second vertical direction subtraction circuit for obtaining a first and second vertical potential difference from the difference.

  More preferably, the first and second horizontal subtracting circuits have first and second horizontal operational amplifiers, respectively, the horizontal subtracting amplifier circuit has a third horizontal operational amplifier, and an output terminal of the first horizontal operational amplifier. Is connected to the inverting input terminal of the third horizontal operational amplifier via the first horizontal resistance, and the output terminal of the third horizontal operational amplifier is connected to the inverting input terminal of the third horizontal operational amplifier via the second horizontal resistance. The output terminal of the second horizontal operational amplifier is connected to the non-inverting input terminal of the third horizontal operational amplifier via the third horizontal resistance, and the non-inverting input terminal of the third horizontal operational amplifier has the fourth horizontal resistance. The first and third horizontal resistances have the same resistance value, and the second and fourth horizontal resistances have the same resistance value and are larger than the first and third horizontal resistances. The first and second vertical subtraction circuits have first and second vertical operational amplifiers, respectively, the vertical subtraction amplification circuit has a third vertical operational amplifier, The output terminal of the first vertical operational amplifier is connected to the inverting input terminal of the third vertical operational amplifier via the first vertical resistance, and the output terminal of the third vertical operational amplifier is connected to the third vertical direction via the second vertical resistance. The output terminal of the second vertical operational amplifier is connected to the non-inverting input terminal of the third vertical operational amplifier via the third vertical resistance, and the non-inverting input terminal of the third vertical operational amplifier is connected to the inverting input terminal of the operational amplifier. Is connected to a reference voltage via a fourth vertical resistance, the first and third vertical resistances have the same resistance value, the second and fourth vertical resistances have the same resistance value, and the first and third vertical directions Than resistance Increasing the value of the second gain by the kina value.

  More preferably, in the position detection permanent magnet, a surface facing the magnetic field change detection unit is a square formed by a line parallel to one of the first and second directions, and a third direction parallel to the optical axis. N poles and S poles are aligned and attached to the movable part. Accordingly, it is possible to perform position detection in the first direction using the horizontal direction magnetic field change detection element and position detection in the second direction using the vertical direction magnetic field change detection element with one permanent magnet.

  More preferably, the movable part is positioned at the center of the moving range in both the first and second directions when the vicinity of the center of either the image sensor or the image blur correction lens is in the positional relationship through the optical axis due to the movement of the movable part. To do. As a result, image blur correction can be performed using the imaging range of the image sensor or the effective range of the image blur correction lens to the maximum extent.

  More preferably, when the vicinity of the center of either the image sensor or the image blur correction lens is in a positional relationship passing through the optical axis due to the movement of the movable part, the first and second horizontal magnetic field change detection elements in the second direction The positions of the first and second vertical direction magnetic field change detecting elements are both opposed to the vicinity of the middle of the second direction of the square, and the positions of the first direction are opposed to the vicinity of both ends of the first direction of the square. Each position in the first direction faces the vicinity of the middle of the first direction of the square, and each position in the second direction faces the vicinity of both ends of the second direction of the square. As a result, position detection can be performed by making maximum use of the square size of the position detection permanent magnet.

  Preferably, the magnetic field change detection unit is a biaxial Hall element, and the first and second horizontal magnetic field change detection elements and the first and second vertical magnetic field change detection elements are all Hall elements. Accordingly, it is possible to perform highly accurate position detection using a linear change amount by obtaining a difference in potential difference between the output terminals of the two Hall elements.

  Preferably, the magnetic field change detection unit has one horizontal magnetic field change detection element and one vertical magnetic field change detection element, and the magnetic field change detection element signal processing circuit outputs the output of the horizontal magnetic field change detection element. A horizontal subtraction amplifier circuit that obtains the first detection position signal of the movable part by amplifying the horizontal potential difference between the terminals by a first amplification factor and a vertical potential difference between the output terminals of the vertical magnetic field change detection elements And a vertical direction subtracting amplifier circuit that obtains the second detection position signal of the movable part by performing amplification at two amplification factors.

  More preferably, the magnetic field change detecting element signal processing circuit includes a horizontal differential amplifier circuit that amplifies a signal difference between output terminals of the horizontal magnetic field change detecting element and a signal difference between output terminals of the vertical magnetic field change detecting element. A vertical differential amplifier circuit for amplifying the signal, a horizontal potential difference is obtained from the difference between the signal difference amplified by the horizontal differential amplifier circuit and the reference voltage, and the signal amplified by the vertical differential amplifier circuit The vertical potential difference is obtained from the difference between the difference and the reference voltage.

  More preferably, the horizontal differential amplifier circuit includes first and second horizontal operational amplifiers, the horizontal subtraction amplifier circuit includes a third horizontal operational amplifier, and the output terminal of the first horizontal operational amplifier is the first. The output terminal of the third horizontal operational amplifier is connected to the inverting input terminal of the third horizontal operational amplifier via the second horizontal resistor, and the third horizontal operational amplifier is connected to the inverting input terminal of the third horizontal operational amplifier. The output terminal of the two horizontal operational amplifiers is connected to the non-inverting input terminal of the third horizontal operational amplifier via the third horizontal resistance, and the non-inverting input terminal of the third horizontal operational amplifier is connected to the reference via the fourth horizontal resistance. The first and third horizontal resistances have the same resistance value, and the second and fourth horizontal resistances have the same resistance value and are larger than the first and third horizontal resistances. The amplification factor is increased, the vertical differential amplifier circuit has first and second vertical operational amplifiers, the vertical subtraction amplifier circuit has a third vertical operational amplifier, and an output terminal of the first vertical operational amplifier. Is connected to the inverting input terminal of the third vertical operational amplifier via the first vertical resistance, and the output terminal of the third vertical operational amplifier is connected to the inverting input terminal of the third vertical operational amplifier via the second vertical resistance. The output terminal of the second vertical operational amplifier is connected to the non-inverting input terminal of the third vertical operational amplifier via the third vertical resistance, and the non-inverting input terminal of the third vertical operational amplifier has the fourth vertical resistance. And the first and third vertical resistances have the same resistance value, and the second and fourth vertical resistances have the same resistance value and are larger than the first and third vertical resistances. So second Increase the value of the width ratio.

  More preferably, the position detecting permanent magnet includes a horizontal position detecting permanent magnet which is opposed to the horizontal magnetic field change detecting element and has N poles and S poles arranged in the first direction and attached to the movable part, and a vertical magnetic field. A permanent magnet for detecting the position in the vertical direction is attached to the movable part with the north and south poles arranged in the second direction so as to face the change detecting element. Accordingly, it is possible to perform position detection in the first direction using the horizontal direction magnetic field change detection element and position detection in the second direction using the vertical direction magnetic field change detection element with one permanent magnet.

  More preferably, in the position detecting permanent magnet, the surface facing the magnetic field change detection unit is a square formed by a line parallel to one of the first and second directions and is parallel to the optical axis. N poles and S poles are arranged in three directions and attached to the movable part. As a result, the detectable range is limited, but it is possible to detect the position with high accuracy by obtaining the potential difference between the output terminals of one magnetic field change detecting element that exhibits a substantially linear change amount.

  Preferably, the magnetic field change detection unit is a uniaxial Hall element, and both the horizontal magnetic field change detection element and the vertical magnetic field change detection element are Hall elements. This makes it possible to perform position detection with high accuracy using a single-axis Hall element that has a cost advantage compared to a two-axis Hall element.

  Preferably, the horizontal magnetic field change detection element and the vertical magnetic field change detection element are any one of a Hall element, an MI sensor, a magnetic resonance type magnetic field detection element, and an MR element.

  As described above, according to the present invention, the position detection accuracy of the magnetic field change detection element such as the Hall element is maintained and the movable part is driven without increasing the attractive force due to the magnetic field lines for position detection by the yoke in the image blur correction device. It is possible to provide a device that reduces the resistance during the operation.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. The imaging device 1 will be described as a digital camera. In order to describe the direction, in the imaging device 1, the horizontal direction orthogonal to the optical axis LX is the first direction x, the vertical direction orthogonal to the optical axis LX is the second direction y, and the horizontal direction parallel to the optical axis LX is The third direction z will be described. 5 is a configuration diagram in the section taken along line AA in FIG. 4, and FIG. 6 is a configuration diagram in the section taken along line BB in FIG.

  The parts related to the imaging of the imaging device 1 are the Pon button 11 for switching on / off the main power source, the release button 13, the LCD monitor 17, the CPU 21, the imaging block 22, the AE unit 23, the AF unit 24, and the imaging unit of the image blur correction device 30. 39a and a photographing lens 67. In response to pressing of the Pon button 11, the on / off state of the Pon switch 11 a is switched, and thereby the on / off state of the power supply of the imaging device 1 is switched. The subject image is captured as an optical image through the photographing lens 67 by the imaging block 22 that drives the imaging unit 39a, and the image captured by the LCD monitor 17 is displayed. The subject image can also be optically observed with an optical viewfinder (not shown).

  When the release button 13 is half-pressed, the photometry switch 12a is turned on to perform photometry, distance measurement, and focusing operation. When the release button 13 is fully pressed, the release switch 13a is turned on to take an image. Is stored in memory.

  The imaging block 22 drives the imaging unit 39a. The AE unit 23 performs a photometric operation of the subject to calculate an exposure value, and calculates an aperture value and an exposure time necessary for photographing based on the exposure value. The AF unit 24 performs distance measurement, and performs focus adjustment by displacing the photographing lens 67 in the optical axis direction based on the distance measurement result.

  The part relating to image blur correction of the image pickup apparatus 1 includes an image blur correction button 14, a CPU 21, an angular velocity detection unit 25, a driver circuit 29, an image blur correction device 30, and a photographing lens 67.

  When the image blur correction button 14 is pressed, the image blur correction switch 14a is turned on, and the angular velocity detection unit 25 and the image blur correction device 30 are driven at regular intervals independently of other operations such as photometry. Thus, image blur correction is performed. The parameter IS = 1 is set in the correction mode in which the image blur correction switch 14a is turned on, and the parameter IS = 0 is set in the correction mode in which the image blur correction switch 14a is not turned off. In the first embodiment, the fixed time will be described as 1 ms.

  Various outputs corresponding to the input signals of these switches are controlled by the CPU 21. On / off information of the photometry switch 12a, release switch 13a, and image blur correction switch 14a is input to the ports P12, P13, and P14 of the CPU 21 as 1-bit digital signals, respectively. The imaging block 22, the AE unit 23, and the AF unit 24 input and output signals at ports P3, P4, and P5, respectively.

  Next, details of the angular velocity detection unit 25, the driver circuit 29, the image blur correction device 30, and the input / output relationship with the CPU 21 will be described.

  The angular velocity detection unit 25 includes first and second angular velocity sensors 26 and 27 and an amplifier / high pass filter circuit 28. The first and second angular velocity sensors 26 and 27 detect angular velocities in the first direction x and the second direction y every fixed time (1 ms) of the imaging device 1. The first angular velocity sensor 26 detects the angular velocity in the first direction x, and the second angular velocity sensor 27 detects the angular velocity in the second direction y. The amplifier / high-pass filter circuit 28 amplifies the signal related to the angular velocity, cuts the null voltage and panning of the first and second angular velocity sensors 26 and 27, and outputs an analog signal as the first and second angular velocities vx and vy of the CPU 21. Input to A / D0 and A / D1.

  The CPU 21 performs A / D conversion on the first and second angular velocities vx and vy input to A / D0 and A / D1, and then performs image blurring that occurs in a certain time (1 ms) by a conversion coefficient that takes into account the focal length and the like. Calculate the quantity. Therefore, the angular velocity detection unit 25 and the CPU 21 have an image blur amount calculation function.

  The CPU 21 calculates the position S to be moved of the imaging unit 39a according to the image blur amount obtained by the calculation for each of the first direction x and the second direction y. The first direction x component of the position S is sx, and the second direction y component is sy. Movement of the movable part 30a including the imaging part 39a is performed by an electromagnetic force described later. In order to move the movable part 30a to this position S, the first direction x component of the driving force D that drives the driver circuit 29 is defined as a first PWM duty dx, and the second direction y component is defined as a second PWM duty dy.

  The image blur correction device 30 moves the imaging unit 39a to the position S to be moved calculated by the CPU 21, thereby eliminating the deviation of the optical axis LX on the imaging plane of the subject image caused by the blur and imaging with the subject image. This is a device that keeps the surface position constant and corrects image blur, and includes a movable portion 30a including an imaging portion 39a and a movable region, a fixed portion 30b, and a Hall element signal processing circuit 45. In addition, the image blur correction device 30 includes a driving part that moves the movable part 30a by an electromagnetic force generated by the direction of the current flowing through the coil and the direction of the magnetic field of the magnet, and a position detection part that detects the position of the movable part 30a. It can be divided into two categories.

  The movable portion 30a of the image blur correction device 30 is driven by a driver circuit 29 that receives the output of the first PWM duty dx from the PWM0 and the second PWM duty dy from the PWM1 of the CPU 21. The position P before or after the movement of the movable part 30a moved by driving the driver circuit 29 is detected by the hall element part 44b and the hall element signal processing circuit 45. Information on the detected position P is input to A / D2 and A / D3 of the CPU 21 as the first detection position signal px as the first direction x component and the second detection position signal py as the second direction y component. The first and second detection position signals px and py are A / D converted via A / D2 and A / D3. The first direction x component and the second direction y component of the position P after A / D conversion with respect to the first and second detection position signals px and py are set to pdx and pdy, respectively. PID control is performed based on the data of the detected position P (pdx, pdy) and the data of the position S (sx, xy) to be moved.

  The movable portion 30a includes first and second driving coils 31a and 32a, an imaging portion 39a, a position detecting permanent magnet 41a, a movable substrate 49a, a moving shaft 50a, and first to third horizontal moving bearing portions 51a to 53a. And a plate 64a.

  A member that requires electrical wiring in the movable part 30a needs to be supplied with electric power from the fixed part 30b and other parts by a flexible substrate or the like, but the position detection part in the movable part 30a does not require electric power. It comprises a permanent magnet 41a for detection. Therefore, since the movable part 30a does not require the electrical wiring to the position detection portion, simplification of the wiring and thus reduction of the external force to the movable part 30a is realized.

  The fixed portion 30b includes first and second driving permanent magnets 33b and 34b, first and second driving yokes 35b and 36b, a hall element portion 44b, first to fourth vertical movement bearing portions 54b to 57b, and a base. Plate 65b.

  The U-shaped moving shaft 50a viewed from the third direction z of the movable portion 30a is perpendicular to the first to fourth vertical moving bearing portions 54b to 57b attached to the base plate 65b of the fixed portion 30b. It is supported so as to be movable in the (second direction y). The first and second vertical movement bearing portions 54b and 55b have a long hole shape extending in the second direction y when viewed from the first direction x. Thereby, the movable part 30a can move in the vertical direction with respect to the fixed part 30b.

  The moving shaft 50a is supported so as to be movable in the horizontal direction (first direction x) with the first to third horizontal moving bearing portions 51a to 53a of the movable portion 30a. Thereby, the movable part 30a excluding the moving shaft 50a can move in the horizontal direction with respect to the moving shaft 50a and the fixed part 30b.

  In order to make maximum use of the imaging range of the image sensor 39a1, when the vicinity of the center of the image sensor 39a1 is in a positional relationship passing through the optical axis LX of the photographic lens 67, the movable portion 30a is in both the first direction x and the second direction y. The positional relationship between the movable part 30a and the fixed part 30b is set so as to be located at the center of the movement range (at the movement center position). The center of the image sensor 39a1 refers to the intersection of two diagonal lines of a rectangle that forms the imaging surface of the image sensor 39a1.

  The movable unit 30a is attached with an imaging unit 39a, a plate 64a, and a movable substrate 49a in the optical axis direction when viewed from the direction of the photographing lens 67. The imaging unit 39a includes an imaging element 39a1, a stage 39a2, a pressing unit 39a3, and an optical low-pass filter 39a4. The stage 39a2 and the plate 64a sandwich and urge the imaging element 39a1, the pressing unit 39a3, and the optical low-pass filter 39a4. The first to third horizontal movement bearing portions 51a to 53a are attached to the stage 39a2. The plate 64a is made of metal, and performs heat dissipation and positioning of the image sensor 39a1 by being in contact with the image sensor 39a1.

  The movable substrate 49a is attached with first and second driving coils 31a and 32a and a position detecting permanent magnet 41a on which a sheet-like spiral coil pattern is formed. The first driving coil 31a moves the movable portion 30a including the first driving coil 31a in the first direction by an electromagnetic force generated from the direction of the current of the first driving coil 31a and the direction of the magnetic field of the first driving permanent magnet 33b. In order to move to x, it has a coil pattern formed by a line parallel to either the first direction x or the second direction y. The second drive coil 32a moves the movable part 30a including the second drive coil 32a in the second direction by electromagnetic force generated from the direction of the current of the second drive coil 32a and the direction of the magnetic field of the second drive permanent magnet 34b. In order to move to y, it has a coil pattern formed by a line parallel to either the first direction x or the second direction y.

  In the first embodiment, when viewed in the third direction z and from the direction opposite to the photographic lens 67, the first driving coil 31a is arranged at the right end (one end in the first direction x) of the movable substrate 49a. The two driving coils 32a are at the upper end (one end in the second direction y) of the movable substrate 49a, and the position detecting permanent magnet 41a is at the left end (the other end in the first direction x) of the movable substrate 49a. It is attached. The image sensor 39a1 is attached between the first driving coil 31a and the position detecting permanent magnet 41a on the movable substrate 49a. The first and second drive coils 31a and 32a, the image sensor 39a1, and the position detection permanent magnet 41a are attached to the same side of the movable substrate 49a.

  The first and second driving coils 31a and 32a are connected to a driver circuit 29 for driving them via a flexible substrate (not shown). The driver circuit 29 receives the first and second PWM duties dx and dy from the PWM0 and PWM1 of the CPU 21, respectively. The driver circuit 29 supplies power to the first and second drive coils 31a and 32a in accordance with the input first and second PWM duties dx and dy, and drives the movable portion 30a.

  The position detecting permanent magnet 41a is attached with the north and south poles arranged in the third direction z. The surface of the position detecting permanent magnet 41a facing the fixed portion 30b is a square formed by a line parallel to either the first direction x or the second direction y. By making the shape of the surface facing the fixed part 30b of the permanent magnet 41a for position detection square, the position detection in the first direction x is not affected when the movable part 30a is moved in the second direction y. When moved in the first direction x, the position detection in the second direction y is not affected.

  Thus, with one permanent magnet, position detection in the first direction x using the first and second horizontal hall elements hh1 and hh2, and second direction using the first and second vertical hall elements hv1 and hv2 are performed. It becomes possible to detect the position of y. Therefore, a small permanent magnet can be used for both driving and position detection. Similarly, the drive yoke can be reduced in size. Therefore, the driving coil and the position detecting permanent magnet can be arranged in the empty space of the movable part, and the driving permanent magnet and the position detecting Hall element can be arranged in the empty space of the fixed part. Thus, the overall size of the image blur correction apparatus can be reduced.

  The first and second drive permanent magnets 33b and 34b are attached to the movable portion 30a side of the fixed portion 30b so as to face the first and second drive coils 31a and 32a, respectively. The hall element portion 44b is attached to the movable portion 30a side of the fixed portion 30b so as to face the position detecting permanent magnet 41a.

  The first driving permanent magnet 33b is on the base plate 65b of the fixed portion 30b in the third direction z and on the first driving yoke 35b attached to the movable portion 30a side, and N in the first direction x. The pole and the S pole are mounted side by side. The length of the first driving permanent magnet 33b in the second direction y is such that the magnetic field exerted on the first driving coil 31a does not change when the movable part 30a moves in the second direction y. Is set longer than the first effective length L1 in the second direction y.

  The second driving permanent magnet 34b is on the base plate 65b of the fixed portion 30b in the third direction z and on the second driving yoke 36b attached to the movable portion 30a, and is N in the second direction y. The pole and the S pole are mounted side by side. The length of the second driving permanent magnet 34b in the first direction x is such that the magnetic field exerted on the second driving coil 32a does not change when the movable part 30a moves in the first direction x. Is set to be longer than the second effective length L2 in the first direction x.

  The first drive yoke 35b is made of a polygonal soft magnetic material having a U-shape when viewed in the second direction y, and the first drive permanent magnet 33b and the first drive coil 31a are connected to the third. It is attached on the base plate 65b of the fixed portion 30b so as to be sandwiched in the direction z. The portion of the first driving yoke 35b on the side in contact with the first driving permanent magnet 33b serves to prevent the magnetic field of the first driving permanent magnet 33b from leaking to the surroundings. The first driving permanent magnet 33b, the first driving coil 31a, and the portion facing the movable substrate 49a in the first driving yoke 35b are between the first driving permanent magnet 33b and the first driving coil 31a. It serves to increase the magnetic flux density.

  The second drive yoke 36b is made of a polygonal soft magnetic material having a U-shape when viewed in the first direction x, and the second drive permanent magnet 34b and the second drive coil 32a are connected to the third direction. It is attached on the base plate 65b of the fixed portion 30b so as to be sandwiched in the direction z. The portion of the second drive yoke 36b on the side in contact with the second drive permanent magnet 34b serves to prevent the magnetic field of the second drive permanent magnet 34b from leaking out. The second drive permanent magnet 34b, the second drive coil 32a, and the portion of the second drive yoke 36b facing the movable substrate 49a are between the second drive permanent magnet 34b and the second drive coil 32a. It serves to increase the magnetic flux density.

  The Hall element portion 44b is a biaxial Hall element in which four Hall elements, which are magnetoelectric conversion elements (magnetic field change detection elements) using the Hall effect, are arranged. A first detection position signal px and a second detection position signal py for identifying the current position P are detected. Among the four hall elements, the first and second horizontal hall elements hh1 and hh2 are used for position detection in the first direction x, and the vertical hall elements hv1 and hv2 are used for position detection in the second direction y. And

  Since the first and second horizontal hall elements hh1 and hh2 detect the position of the movable portion 30a in the first direction x, their input terminals (not shown) are wired in series. The first and second horizontal hall elements hh1 and hh2 are mounted on the base plate 65b of the fixed portion 30b as viewed from the third direction z and at positions facing the position detecting permanent magnet 41a of the movable portion 30a. .

  In order to perform position detection by making the maximum use of the square size of the position detection permanent magnet 41a, the positions of the first and second horizontal hall elements hh1 and hh2 in the second direction y are imaged. When the vicinity of the center of the element 39a1 is in a positional relationship passing through the optical axis LX, all of the elements are located in the vicinity of the middle in the second direction y of the square of the surface facing the hall element portion 44b of the position detecting permanent magnet 41a. Is desirable. The positions of the first and second horizontal hall elements hh1 and hh2 in the first direction x are the hall element portions of the position detecting permanent magnet 41a when the vicinity of the center of the imaging element 39a1 is in a positional relationship passing through the optical axis LX. It is desirable to be in a location facing both ends in the first direction x of the square of the surface facing 44b (see FIG. 14).

  Since the first and second vertical hall elements hv1 and hv2 detect displacement of the movable portion 30a in the second direction y, respective input terminals (not shown) are wired in series. The first and second vertical hall elements hv1 and hv2 are mounted on the base plate 65b of the fixed portion 30b as viewed from the third direction z and at positions facing the position detecting permanent magnet 41a of the movable portion 30a. .

  In order to perform position detection by making the maximum use of the square size of the position detection permanent magnet 41a, the positions of the first and second vertical hall elements hv1 and hv2 in the first direction x are imaged. When the vicinity of the center of the element 39a1 is in a positional relationship passing through the optical axis LX, each of the elements is in a position facing the middle vicinity of the square in the first direction x of the surface facing the hall element portion 44b of the position detecting permanent magnet 41a. Is desirable. The positions of the first and second vertical hall elements hv1 and hv2 in the second direction y are the hall element portions of the position detecting permanent magnet 41a when the vicinity of the center of the image sensor 39a1 passes through the optical axis LX. It is desirable to be in a location facing both ends in the second direction y of the square of the surface facing 44b.

  The base plate 65b is a plate-like member that serves as a base to which the hall element portion 44b and the like are attached in the fixed portion 30b, and is arranged in parallel with the imaging surface of the imaging element 39a1. The base plate 65b is closer to the photographing lens 67 than the movable substrate 49a in the third direction z.

  The base plate 65b is made of a nonmagnetic material such as resin. There is a lens barrel (not shown) on the side of the base plate 65b close to the photographing lens 67 in the third direction z, and the lens barrel is made of a non-magnetic material such as a lens frame such as a resin or an optical lens. Is done. Therefore, the region where the hall element portion 44b of the fixed portion 30b is attached is made of a nonmagnetic material.

  The Hall element signal processing circuit 45 calculates the first and second horizontal potential differences between the output terminals of the first and second horizontal Hall elements hh1 and hh2 from the output signals of the first and second horizontal Hall elements hh1 and hh2. x1 and x2 are detected, and from these, a first detection position signal px for specifying the position in the first direction x is output to A / D2 of the CPU 21. In addition, the Hall element signal processing circuit 45 generates first and second vertical signals between the output terminals of the first and second vertical Hall elements hv1 and hv2 from the output signals of the first and second vertical Hall elements hv1 and hv2. The direction potential differences y1 and y2 are detected, and a second detection position signal py for specifying the position in the second direction y is output from these to the A / D3 of the CPU 21.

  A circuit configuration relating to input / output signals of the first and second horizontal hall elements hh1 and hh2 in the hall element signal processing circuit 45 will be described with reference to FIG. A circuit configuration relating to input / output signals of the first and second vertical hall elements hv1, hv2 in the hall element signal processing circuit 45 will be described with reference to FIG. For simplification of description, the circuit configuration relating to the first and second vertical hall elements hv1, hv2 is omitted in FIG. 7, and the circuit configuration relating to the first and second horizontal hall elements hh1, hh2 is omitted in FIG. Omitted.

  The outputs of the first and second horizontal hall elements hh1 and hh2 in the hall element signal processing circuit 45 are first and second horizontal differential amplifier circuits 451 and 452, and first and second horizontal subtraction circuits 453 and 454, respectively. , A horizontal direction subtracting amplifier circuit 455, and an input unit has a horizontal direction input circuit 456. The output portions of the first and second vertical hall elements hv1 and hv2 in the hall element signal processing circuit 45 are first and second vertical differential amplifier circuits 461 and 462, and first and second vertical subtraction circuits 463 and 464, respectively. , A vertical direction subtraction amplification circuit 465, and the input unit has a vertical direction input circuit 466.

  Each of the output terminals of the first horizontal hall element hh1 is connected to the first horizontal differential amplifier circuit 451, and the first horizontal differential amplifier circuit 451 is connected to the first horizontal subtraction circuit 453. Each of the output terminals of the second horizontal hall element hh2 is connected to a second horizontal differential amplifier circuit 452, and the second horizontal differential amplifier circuit 452 is connected to a second horizontal subtraction circuit 454. The first and second horizontal direction subtraction circuits 453 and 454 are connected to the horizontal direction subtraction amplification circuit 455. The first and second horizontal differential amplifier circuits 451 and 452 are differential amplifier circuits that amplify signal differences between the output terminals of the first and second horizontal hall elements hh1 and hh2, respectively. The first horizontal direction subtraction circuit 453 is a subtraction circuit that obtains a first horizontal direction potential difference x1 (hall output voltage) between output terminals of the first horizontal direction hall element hh1 from the difference between the amplified signal difference and the reference voltage Vref. The second horizontal subtraction circuit 454 is a subtraction circuit that obtains a second horizontal potential difference x2 (hall output voltage) between the output terminals of the second horizontal hall element hh2 from the difference between the amplified signal difference and the reference voltage Vref. The horizontal subtraction amplification circuit 455 is a subtraction amplification circuit that obtains a first detection position signal px by performing amplification with a constant first amplification factor on the difference between the first and second horizontal potential differences x1 and x2.

  The first horizontal differential amplifier circuit 451 includes first to third resistors R1 to R3, and first and second operational amplifiers A1 and A2. One of the output terminals of the first horizontal hall element hh1 is connected to the non-inverting input terminal of the first operational amplifier A1, and the other terminal is connected to the non-inverting input terminal of the second operational amplifier A2. The inverting input terminal of the first operational amplifier A1 is connected to the first and second resistors R1 and R2, and the inverting input terminal of the second operational amplifier A2 is connected to the first and third resistors R1 and R3. The output terminal of the first operational amplifier A1 is connected to the second resistor R2 and the seventh resistor R7 of the first horizontal direction subtracting circuit 453. The output terminal of the second operational amplifier A2 is connected to the third resistor R3 and the ninth resistor R9 of the first horizontal direction subtracting circuit 453.

  The second horizontal differential amplifier circuit 452 includes fourth to sixth resistors R4 to R6, and third and fourth operational amplifiers A3 and A4. One of the output terminals of the second horizontal hall element hh2 is connected to the non-inverting input terminal of the third operational amplifier A3, and the other terminal is connected to the non-inverting input terminal of the fourth operational amplifier A4. The inverting input terminal of the third operational amplifier A3 is connected to the fourth and fifth resistors R4 and R5, and the inverting input terminal of the fourth operational amplifier A4 is connected to the fourth and sixth resistors R4 and R6. The output terminal of the third operational amplifier A3 is connected to the fifth resistor R5 and the eleventh resistor R11 of the second horizontal subtracting circuit 454. The output terminal of the fourth operational amplifier A4 is connected to the sixth resistor R6 and the thirteenth resistor R13 of the second horizontal subtracting circuit 454.

  The first horizontal direction subtracting circuit 453 includes seventh to tenth resistors R7 to R10 and a first horizontal direction operational amplifier A5. The inverting input terminal of the first horizontal operational amplifier A5 is connected to the seventh resistor R7 and the eighth resistor R8, the non-inverting input terminal is connected to the ninth resistor R9 and the tenth resistor R10, and the output terminal is connected to the eighth resistor R8 and The first horizontal direction resistance R15 of the horizontal direction subtraction amplification circuit 455 is connected to output a first horizontal direction potential difference x1. One terminal of the tenth resistor R10 is connected to the power source of the reference voltage Vref.

  The second horizontal direction subtraction circuit 454 includes first to fourteenth resistors R11 to R14 and a second horizontal direction operational amplifier A6. The inverting input terminal of the second horizontal operational amplifier A6 is connected to the eleventh resistor R11 and the twelfth resistor R12, the non-inverting input terminal is connected to the thirteenth resistor R13 and the fourteenth resistor R14, and the output terminal is connected to the twelfth resistor R12 and The second horizontal potential difference x2 is output by being connected to the third horizontal resistance R17 of the horizontal subtraction amplification circuit 455. One terminal of the fourteenth resistor R14 is connected to the power source of the reference voltage Vref.

  The horizontal subtraction amplifier circuit 455 includes first to fourth horizontal resistances R15 to R18 and a third horizontal operational amplifier A7. The inverting input terminal of the third horizontal operational amplifier A7 is connected to the first horizontal resistor R15 and the second horizontal resistor R16, and the non-inverting input terminal is connected to the third horizontal resistor R17 and the fourth horizontal resistor R18. The output terminal is connected to the second horizontal resistance R16, and the first detection position signal px obtained by multiplying the difference between the first and second horizontal potential differences x1 and x2 by the first amplification factor is output. One terminal of the fourth horizontal resistance R18 is connected to the power source of the reference voltage Vref.

  The first and fourth resistors R1 and R4 have the same resistance value, the second, third, fifth, and sixth resistors R2, R3, R5, and R6 have the same resistance value, and the seventh to fourteenth resistors R7 to R14 have the same resistance value. The first and third horizontal resistances R15 and R17 are set to the same resistance value, and the second and fourth horizontal resistances R16 and R18 are set to the same resistance value. The second horizontal resistance R16 is set to a value larger than the first horizontal resistance R15. The fourth horizontal resistance R18 is set to a value larger than the third horizontal resistance R17. Thereby, the value of the first amplification factor is increased. The same operational amplifier is set for the first to fourth operational amplifiers A1 to A4, and the same operational amplifier is set for the first and second horizontal operational amplifiers A5 and A6.

  The horizontal direction input circuit 456 includes a nineteenth resistor R19 and an eighth operational amplifier A8. The inverting input terminal of the eighth operational amplifier A8 is connected to one of the nineteenth resistor R19 and the input terminal of the second horizontal hall element hh2. The potential of the non-inverting input terminal of the eighth operational amplifier A8 is set to a constant voltage Vfx corresponding to a constant current value in the first and second horizontal hall elements hh1 and hh2. The output terminal of the eighth operational amplifier A8 is connected to one input terminal of the first horizontal hall element hh1. The input terminals of the first and second horizontal hall elements hh1 and hh2 are connected in series. One terminal of the nineteenth resistor R19 is grounded.

  Each of the output terminals of the first vertical hall element hv1 is connected to the first vertical differential amplifier circuit 461, and the first vertical differential amplifier circuit 461 is connected to the first vertical subtraction circuit 463. Each of the output terminals of the second vertical hall element hv2 is connected to the second vertical differential amplifier circuit 462, and the second vertical differential amplifier circuit 462 is connected to the second vertical subtraction circuit 464. The first and second vertical direction subtraction circuits 463 and 464 are connected to the vertical direction subtraction amplification circuit 465. The first and second vertical differential amplifier circuits 461 and 462 are differential amplifier circuits that amplify signal differences between the output terminals of the first and second vertical Hall elements hv1 and hv2, respectively. The first vertical direction subtraction circuit 463 is a subtraction circuit that obtains a first vertical potential difference y1 (hall output voltage) between output terminals of the first vertical hall element hv1 from the difference between the amplified signal difference and the reference voltage Vref. The second vertical direction subtraction circuit 464 is a subtraction circuit for obtaining a second vertical potential difference y2 (hall output voltage) between output terminals of the second vertical hall element hv2 from the difference between the amplified signal difference and the reference voltage Vref. The vertical direction subtraction amplification circuit 465 is a subtraction amplification circuit that amplifies the difference between the first and second vertical potential differences y1 and y2 with a constant second amplification factor to obtain the second detection position signal py.

  The first vertical differential amplifier circuit 461 includes 21st to 23rd resistors R21 to R23, 21st and 22nd operational amplifiers A21 and A22. One output terminal of the first vertical hall element hv1 is connected to the non-inverting input terminal of the twenty-first operational amplifier A21, and the other terminal is connected to the non-inverting input terminal of the twenty-second operational amplifier A22. The inverting input terminal of the twenty-first operational amplifier A21 is connected to the twenty-first and twenty-second resistors R21 and R22, and the inverting input terminal of the twenty-second operational amplifier A22 is connected to the twenty-first and twenty-third resistors R21 and R23. The output terminal of the twenty-first operational amplifier A21 is connected to the twenty-second resistor R22 and the twenty-seventh resistor R27 of the first vertical direction subtracting circuit 463. The output terminal of the 22nd operational amplifier A22 is connected to the 23rd resistor R23 and the 29th resistor R29 of the first vertical direction subtracting circuit 463.

  The second vertical differential amplifier circuit 462 includes 24th to 26th resistors R24 to R26, 23rd, and 24th operational amplifiers A23 and A24. One of the output terminals of the second vertical hall element hv2 is connected to the non-inverting input terminal of the 23rd operational amplifier A23, and the other terminal is connected to the non-inverting input terminal of the 24th operational amplifier A24. The inverting input terminal of the 23rd operational amplifier A23 is connected to the 24th and 25th resistors R24 and R25, and the inverting input terminal of the 24th operational amplifier A24 is connected to the 24th and 26th resistors R24 and R26. The output terminal of the 23rd operational amplifier A23 is connected to the 25th resistor R25 and the 31st resistor R31 of the second vertical direction subtracting circuit 464. The output terminal of the 24th operational amplifier A24 is connected to the 26th resistor R26 and the 33rd resistor R33 of the second vertical direction subtracting circuit 464.

  The first vertical direction subtraction circuit 463 includes 27th to 30th resistors R27 to R30 and a first vertical direction operational amplifier A25. The inverting input terminal of the first vertical operational amplifier A25 is connected to the 27th resistor R27 and the 28th resistor R28, the non-inverting input terminal is connected to the 29th resistor R29 and the 30th resistor R30, and the output terminal is connected to the 28th resistor R28 and the 28th resistor R28. Connected to the first vertical resistance R35 of the vertical subtraction amplification circuit 465, the first vertical potential difference y1 is output. One terminal of the thirtieth resistor R30 is connected to the power source of the reference voltage Vref.

  The second vertical direction subtraction circuit 464 includes 31st to 34th resistors R31 to R34 and a second vertical direction operational amplifier A26. The inverting input terminal of the second vertical operational amplifier A26 is connected to the 31st resistor R31 and the 32nd resistor R32, the non-inverting input terminal is connected to the 33rd resistor R33 and the 34th resistor R34, and the output terminal is connected to the 32nd resistor R32 and Connected to the third vertical resistance R37 of the vertical subtraction amplification circuit 465, the second vertical potential difference y2 is output. One terminal of the 34th resistor R34 is connected to the power supply of the reference voltage Vref.

  The vertical subtraction amplifier circuit 465 includes first to fourth vertical resistances R35 to R38 and a third vertical operational amplifier A27. The inverting input terminal of the third vertical operational amplifier A27 is connected to the first vertical resistance R35 and the second vertical resistance R36, and the non-inverting input terminal is connected to the third vertical resistance R37 and the fourth vertical resistance R38. The output terminal is connected to the second vertical resistance R36, and a second detection position signal py obtained by multiplying the difference between the first and second vertical potential differences y1 and y2 by the second amplification factor is output. One terminal of the fourth vertical resistance R38 is connected to the power source of the reference voltage Vref.

  The twenty-first and twenty-fourth resistors R21 and R24 have the same resistance value, the twenty-second, twenty-third, twenty-fifth and twenty-sixth resistors R22, R23, R25 and R26 have the same resistance value, and the twenty-seventh to thirty-fourth resistors R27 to R34 have the same resistance value. The first and third vertical resistances R35 and R37 are set to the same resistance value, and the second and fourth vertical resistances R36 and R38 are set to the same resistance value. The second vertical resistance R36 is set to a value larger than the first vertical resistance R35. The fourth vertical resistance R38 is set to a value larger than the third vertical resistance R37. As a result, the value of the second amplification factor is increased. The 21st to 24th operational amplifiers A21 to A24 are set to the same operational amplifier, and the first and second vertical operational amplifiers A25 and A26 are set to the same operational amplifier.

  The vertical direction input circuit 466 includes a 39th resistor R39 and a 28th operational amplifier A28. The inverting input terminal of the 28th operational amplifier A28 is connected to one of the 39th resistor R39 and the input terminal of the second vertical hall element hv2. The potential of the non-inverting input terminal of the 28th operational amplifier A28 is set to a constant voltage Vfy corresponding to the constant current value in the first and second vertical Hall elements hv1 and hv2. The output terminal of the 28th operational amplifier A28 is connected to one of the input terminals of the first vertical hall element hv1. The input terminals of the first and second vertical hall elements hv1, hv2 are connected in series. One terminal of the 39th resistor R39 is grounded.

  In the prior art, as shown in FIG. 9, the effect of increasing the magnetic flux density between the position detecting permanent magnet 41a and the Hall element portion 44b on the surface opposite to the side on which the Hall element portion 44b of the fixed portion 30b is attached. A position detecting yoke made of a magnetic material having the above is attached. In this case, the magnetic lines of force between the position detecting permanent magnet 41a and the Hall element portion 44b are efficiently gathered and the magnetic flux density is high (the magnetic lines of force are shown by dotted lines). If the magnetic flux density is high, the values of the first and second horizontal potential differences x1 and x2 and the first and second vertical potential differences y1 and y2 increase. Therefore, the first and second detection position signals px and py are accurately determined. It is possible to detect well.

  However, an attractive force ((1) in FIG. 9) is generated by the action of the magnetic field lines efficiently gathered, and becomes a resistance when driving the movable portion 30a. For example, when the movable part 30a is driven in the second direction y as shown in (2) of FIG. 10, the movable part 30a is pushed in the opposite direction in the same second direction y as shown in (3) of FIG. The power to return is working. This resistance hinders, for example, an increase in driving load when moving the movable portion 30a.

  In the first embodiment, the region to which the hall element portion 44b of the fixed portion 30b is attached is made of a non-magnetic material and has an effect of increasing the magnetic flux density between the position detecting permanent magnet 41a and the hall element portion 44b. There is no magnetic material. For this reason, the magnetic lines of force between the position detecting permanent magnet 41a and the Hall element portion 44b are not efficiently gathered and the magnetic flux density is low (see FIG. 11 in which the magnetic lines of force are added by dotted lines in FIG. 5). When the magnetic flux density is low, the values of the first and second horizontal potential differences x1 and x2 and the first and second vertical potential differences y1 and y2 are small. However, the first and second horizontal differences in the horizontal subtraction amplifier circuit 455 are small. The difference between the direction potential differences x1 and x2 is amplified by the first amplification factor, and the difference between the first and second vertical potential differences y1 and y2 in the vertical direction subtraction amplification circuit 465 is amplified by the second amplification factor. 2 It becomes possible to detect the detection position signals px and py with high accuracy. In addition, since the magnetic flux density is low, the attractive force is smaller than when the yoke is present ((4) in FIG. 11). Therefore, the driving load that has been a hindrance when driving the movable portion 30a is not increased. Furthermore, the weight of the entire image blur correction device 30 can be reduced by not using a position detection yoke made of a magnetic material such as metal.

  In the first embodiment, the horizontal subtraction amplification circuit 455 amplifies the first amplification factor to the difference between the first and second horizontal potential differences x1 and x2, and the vertical subtraction amplification circuit 465 performs the first amplification. Although the amplification of the constant second amplification factor is performed on the difference between the second vertical potential differences y1 and y2, the amplification may be performed before the arithmetic processing in the horizontal subtraction amplification circuit 455 and the vertical subtraction amplification circuit 465. .

  Specifically, instead of the first embodiment in which the resistance values of the seventh to fourteenth resistors R7 to R14 are the same, the seventh, ninth, eleventh, and thirteenth resistors R7, R9, R11, and R13 are changed. The eighth, tenth, twelfth, and fourteenth resistors R8, R10, R12, and R14 are set to the same resistance value, and the eighth resistor R8 is set to a larger resistance value than the seventh resistor R7. Further, instead of the first embodiment in which the resistance values of the 27th to 34th resistors R27 to R34 are made the same, the 27th, 29th, 31st, 33rd resistors R27, R29, R31, R33 have the same resistance value. Furthermore, the 28th, 30th, 32nd, and 34th resistors R28, R30, R32, and R34 are set to the same resistance value, and the 28th resistor R28 is set to a resistance value that is larger than the 27th resistor R27.

  In this case, the resistance values of the first to fourth horizontal resistances R15 to R18 may be the same or may be the same conditions as in the first embodiment. Further, the resistance values of the first to fourth vertical resistances R35 to R38 may be the same, or may be the same conditions as in the first embodiment.

  Next, the procedure of image blur correction processing performed independently of other operations as interrupt processing at regular time intervals (1 ms) will be described with reference to the flowchart of FIG.

  When the image blur correction process interrupt operation starts in step S11, the first and second angular velocities vx and vy output from the angular velocity detection unit 25 in step S12 are converted to A via the A / D0 and A / D1 of the CPU 21, respectively. / D converted and input. In step S13, the first and second detected position signals px and py of the movable part 30a, which are detected by the Hall element part 44b and calculated by the Hall element signal processing circuit 45, are transmitted via the A / D2 and A / D3 of the CPU 21. A / D converted and input. Thus, the current position P (pdx, pdy) is obtained.

  In step S14, it is determined whether IS = 0. When IS = 0, that is, when the correction mode is not set, in step S15, the position S (sx, sy) to which the movable part 30a should move is made the same as the movement center position of the movable part 30a. In the case of IS = 1, that is, in the correction mode, in step S16, the position S (sx, sy) to which the movable part 30a should move is calculated from the first and second angular velocities vx, vy obtained in step S12.

  In step S17, the driving force D of the movable portion 30a, that is, the first and second driving coils 31a and 32a are driven from the position S (sx, sy) determined in step S15 or step S16 and the current position P (pdx, pdy). First and second PWM duties dx and dy necessary for the calculation are calculated. In step S18, the first and second drive coils 31a and 32a are driven by the first and second PWM duties dx and dy via the driver circuit 29, and the movable portion 30a is moved. The operations in steps S17 to S18 are automatic control calculations used in PID automatic control for performing general proportional, integral, and differential calculations.

  Next, as a second embodiment, position detection using a single-axis Hall element that uses a total of two Hall elements, one each in the first direction x and the second direction y, will be described. 1 to 6 and 9 to 12 are the same as those in the first embodiment, and the Hall element portion 440b corresponding to the Hall element portion 44b in the first embodiment and the Hall element signal in the first embodiment. The configuration of the Hall element signal processing circuit 450 corresponding to the processing circuit 45 is different. Hereinafter, a description will be given focusing on differences from the first embodiment.

  The hall element portion 440b is a uniaxial hall element in which two hall elements, which are magnetoelectric conversion elements utilizing the hall effect, are arranged, and specifies the current position P in the first direction x and the second direction y of the movable portion 30a. Therefore, the first detection position signal px and the second detection position signal py are detected. Of the two hall elements, a hall element for position detection in the first direction x is designated as a horizontal hall element hh10, and a hall element for position detection in the second direction y is designated as a vertical hall element hv10 (see FIG. 13).

  The hall element signal processing circuit 450 detects a horizontal potential difference x10 between the output terminals of the horizontal hall element hh10 from the output signal of the horizontal hall element hh10, and identifies a position in the first direction x from these. The signal px is output to A / D2 of the CPU 21. The hall element signal processing circuit 450 detects the vertical potential difference y10 between the output terminals of each of the vertical hall elements hv10 from the output signal of the vertical hall element hv10, and specifies the position in the second direction y from these. 2 The detection position signal py is output to A / D3 of the CPU 21.

  A circuit configuration relating to input / output signals of the horizontal hall element hh10 and the vertical hall element hv10 in the hall element signal processing circuit 450 will be described.

  In the Hall element signal processing circuit 450, the output section of the horizontal Hall element hh10 has a horizontal differential amplifier circuit 4510 and a horizontal subtracting amplifier circuit 4530, and the input section has a horizontal input circuit 4560. In the Hall element signal processing circuit 450, the output unit of the vertical Hall element hv10 includes a vertical differential amplifier circuit 4610 and a vertical subtraction amplifier circuit 4630, and the input unit includes a vertical input circuit 4660.

  An output terminal of the horizontal hall element hh10 is connected to a horizontal differential amplifier circuit 4510, and the horizontal differential amplifier circuit 4510 is connected to a horizontal subtraction amplifier circuit 4530. The horizontal differential amplifier circuit 4510 is a differential amplifier circuit that amplifies a signal difference between the output terminals of the horizontal hall element hh10. The horizontal subtraction amplifier circuit 4530 obtains a horizontal potential difference x10 (hall output voltage) between the output terminals of the horizontal hall element hh10 from the difference between the amplified signal difference and the reference voltage Vref, and a constant first amplification factor is obtained therefrom. It is a subtraction amplification circuit that performs amplification to obtain a first detection position signal px.

  The configuration of the horizontal direction differential amplifier circuit 4510 is the same as that of the first horizontal direction differential amplifier circuit 451 in the first embodiment. The 101st to 103rd resistors R101 to R103, the first and second horizontal direction operational amplifiers A101, A102. One of the output terminals of the horizontal hall element hh10 is connected to the non-inverting input terminal of the first horizontal operational amplifier A101, and the other terminal is connected to the non-inverting input terminal of the second horizontal operational amplifier A102. The inverting input terminal of the first horizontal operational amplifier A101 is connected to the 101st and 102nd resistors R101 and R102, and the inverting input terminal of the second horizontal operational amplifier A102 is connected to the 101st and 103rd resistors R101 and R103. The output terminal of the first horizontal operational amplifier A101 is connected to the 102nd resistor R102 and the first horizontal resistor R107 of the horizontal subtracting amplifier circuit 4530. The output terminal of the second horizontal operational amplifier A102 is connected to the 103rd resistor R103 and the third horizontal resistor R109 of the horizontal subtracting amplifier circuit 4530.

  The configuration of the horizontal direction subtraction amplification circuit 4530 is the same as that of the first horizontal direction subtraction circuit 453 in the first embodiment, and includes first to fourth horizontal direction resistors R107 to R110 and a third horizontal direction operational amplifier A105. The inverting input terminal of the third horizontal operational amplifier A105 is connected to the first horizontal resistor R107 and the second horizontal resistor R108, and the non-inverting input terminal is connected to the third horizontal resistor R109 and the fourth horizontal resistor R110. The output terminal is connected to the second horizontal resistance R108, and a first detection position signal px obtained by multiplying the horizontal potential difference x10 by the first amplification factor is output. One terminal of the fourth horizontal resistance R110 is connected to the power source of the reference voltage Vref.

  The 102nd and 103rd resistors R102 and R103 are set to the same resistance value, the first and third horizontal resistors R107 and R109 are set to the same resistance value, and the second and fourth horizontal resistors R108 and R110 are set to the same resistance value. The second horizontal resistance R108 is set to a value larger than the first horizontal resistance R107. The fourth horizontal resistance R110 is set to a value larger than the third horizontal resistance R109. As a result, the value of the first amplification factor is increased. The first and second horizontal operational amplifiers A101 and A102 are set to the same operational amplifier.

  The configuration of the horizontal input circuit 4560 is the same as that of the horizontal input circuit 456 in the first embodiment, and includes a 119 resistor R119 and a 108th operational amplifier A108. The inverting input terminal of the 108th operational amplifier A108 is connected to one of the 119 resistor R119 and the input terminal of the horizontal hall element hh10. The potential of the non-inverting input terminal of the 108th operational amplifier A108 is set to a constant voltage Vfx corresponding to a constant current value in the horizontal hall element hh10. The output terminal of the 108th operational amplifier A108 is connected to one input terminal of the horizontal hall element hh10. One terminal of the 119th resistor R119 is grounded.

  An output terminal of the vertical hall element hv10 is connected to the vertical differential amplifier circuit 4610, and the vertical differential amplifier circuit 4610 is connected to the vertical subtraction amplifier circuit 4630. The vertical differential amplifier circuit 4610 is a differential amplifier circuit that amplifies a signal difference between the output terminals of the vertical hall element hv10. The vertical subtraction amplification circuit 4630 obtains a vertical potential difference y10 (hall output voltage) between the output terminals of the vertical hall element hv10 from the difference between the amplified signal difference and the reference voltage Vref, and a constant second amplification factor is obtained therefrom. It is a subtraction amplification circuit that performs amplification to obtain a second detection position signal py.

  The configuration of the vertical differential amplifier circuit 4610 is the same as that of the first vertical differential amplifier circuit 461 in the first embodiment, and is the 121st to 123rd resistors R121 to R123, the first and second vertical operational amplifiers A121, A122. One output terminal of the vertical hall element hv10 is connected to the non-inverting input terminal of the first vertical operational amplifier A121, and the other terminal is connected to the non-inverting input terminal of the second vertical operational amplifier A122. The inverting input terminal of the first vertical operational amplifier A121 is connected to the 121st and 122nd resistors R121 and R122, and the inverting input terminal of the second vertical operational amplifier A122 is connected to the 121st and 123rd resistors R121 and R123. The output terminal of the first vertical operational amplifier A121 is connected to the 122th resistor R122 and the first vertical resistor R127 of the vertical subtracting amplifier circuit 4630. The output terminal of the second vertical operational amplifier A122 is connected to the 123rd resistor R123 and the third vertical resistor R129 of the vertical subtracting amplifier circuit 4630.

  The configuration of the vertical direction subtraction amplification circuit 4630 is the same as that of the first vertical direction subtraction circuit 463 in the first embodiment, and includes first to fourth vertical direction resistances R127 to R130 and a third vertical direction operational amplifier A125. The inverting input terminal of the third vertical operational amplifier A125 is connected to the first vertical resistance R127 and the second vertical resistance R128, and the non-inverting input terminal is connected to the third vertical resistance R129 and the fourth vertical resistance R130. The output terminal is connected to the second vertical resistance R128, and a second detection position signal py obtained by multiplying the vertical potential difference y10 by the second amplification factor is output. One terminal of the fourth vertical resistance R130 is connected to the power source of the reference voltage Vref.

  The 122th and 123rd resistors R122 and R123 are set to the same resistance value, the first and third vertical resistances R127 and R129 are set to the same resistance value, and the second and fourth vertical resistances R128 and R130 are set to the same resistance value. The second vertical resistance R128 is set to a value larger than the first vertical resistance R127. The fourth vertical resistance R130 is set to a value larger than the third vertical resistance R123. As a result, the value of the second amplification factor is increased. The same operational amplifier is set for the first and second vertical operational amplifiers A121 and A122.

  The configuration of the vertical direction input circuit 4660 is the same as that of the vertical direction input circuit 466 in the first embodiment, and includes a 139 resistor R139 and a 128th operational amplifier A128. The inverting input terminal of the 128th operational amplifier A128 is connected to one of the 139 resistor R139 and the input terminal of the vertical hall element hv10. The potential of the non-inverting input terminal of the 128th operational amplifier A128 is set to a constant voltage Vfy corresponding to a constant current value in the vertical hall element hv10. The output terminal of the 128th operational amplifier A128 is connected to one input terminal of the vertical hall element hv10. One terminal of the 139 resistor R139 is grounded.

  Other configurations are the same as those of the first embodiment. As in the case of using the biaxial Hall element of the first embodiment, the effects of maintaining the accuracy of position detection, reducing the driving load of the movable part, and reducing the weight of the image blur correction device can be obtained. Furthermore, since the number of Hall elements to be used can be reduced, there is a cost advantage over the case of the biaxial Hall element. However, unlike the case of the biaxial Hall element that detects the difference in potential difference between the respective output terminals of the two Hall elements, the potential difference between the output terminals of the single Hall element is different in the case of the uniaxial Hall element. Therefore, the amount of change in the potential difference according to the distance between the Hall element and the permanent magnet is not linear. For this reason, it is necessary to consider that the accuracy is lowered as compared with the case of using a biaxial Hall element.

  For example, with respect to the permanent magnet for position detection, instead of the configuration in which one permanent magnet and N poles and S poles are arranged in the third direction z and attached to the movable portion 30a as in the first embodiment, a horizontal hole A permanent magnet for horizontal position detection that is mounted on the movable portion 30a with the N and S poles arranged in the first direction x facing the element hh10, and the N and S poles facing the vertical hall element hv10 in the second direction. A configuration is adopted in which a pole is arranged and a vertical position detecting permanent magnet attached to the movable part 30a. This makes it possible to detect the change amount of the potential difference in each position detection within a certain range, although there is a limit to the movement distance of the permanent magnet, and to improve the position detection accuracy.

  In addition, the imaging unit 39a including the imaging element 39a1 has been described as being arranged and moved on the movable unit 30a. However, the imaging unit 39a is fixed, and the same applies to the configuration in which the image blur correction lens is arranged and moved on the movable unit 30a. The effect is obtained.

  Further, although the position detection using the Hall element has been described as the magnetic field change detection element, another detection element may be used as the magnetic field change detection element. Specifically, an MI sensor (high frequency carrier type magnetic field sensor), a magnetic resonance type magnetic field detection element, an MR element (magnetoresistance effect element) capable of obtaining position detection information of the movable part by detecting a change in the magnetic field. ). These can obtain the same effects as those of the first and second embodiments using Hall elements.

It is the perspective view seen from the back which shows the appearance of the imaging device of a 1st embodiment. It is a front view of an imaging device. It is a circuit block diagram of an imaging device. It is a block diagram of an image blur correction apparatus. It is a block diagram of the cross section in the AA of FIG. It is a block diagram of the cross section in the BB line of FIG. It is a circuit block diagram of the part which detects the 1st direction x component of a Hall element part and a Hall element signal processing circuit. It is a circuit block diagram of the part which detects the 2nd direction y component of a Hall element part and a Hall element signal processing circuit. It is a block diagram of the cross section in the AA line of FIG. 4, and is a case of a prior art. This is a case where the movable part is driven in the second direction y from the state of FIG. It is the block diagram of the cross section in the AA line of FIG. 4, and is a figure which showed the magnetic force line and the attraction force. It is a flowchart of an image blur correction process performed as an interrupt process at regular intervals. It is a circuit block diagram of the Hall element part in 2nd Embodiment, and a Hall element signal processing circuit. It is a perspective view which shows the positional relationship of a Hall element part and a permanent magnet for position detection.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Imaging device 11 Pon button 12a Metering switch 13 Release button 13a Release switch 14 Image blur correction button 14a Image blur correction switch 17 LCD monitor 21 CPU
22 Imaging block 23 AE unit 24 AF unit 25 Angular velocity detection unit 26, 27 First and second angular velocity sensors 28 Amplifier / high pass filter circuit 29 Driver circuit 30 Image blur correction device 30a Movable unit 30b Fixed unit 31a, 32a First, first 2 driving coils 33b, 34b first and second driving permanent magnets 35b, 36b first and second driving yokes 39a imaging unit 39a1 imaging element 39a2 stage 39a3 pressing unit 39a4 optical low-pass filter 41a position detection permanent magnet 44b hole Element section 45 Hall element signal processing circuit 451, 452 First and second horizontal direction differential amplifier circuit 453, 454 First and second horizontal direction subtraction circuit 455 Horizontal direction subtraction amplification circuit 456 Horizontal direction input circuit 461, 462 First , Second vertical differential amplifier circuit 463, 464 DESCRIPTION OF SYMBOLS 1, 2nd vertical direction subtraction circuit 465 Vertical direction subtraction amplification circuit 466 Vertical direction input circuit 49a Movable board 50a Movement shaft 51a-53a 1st-3rd horizontal movement bearing part 54b-57b For 1st-4th vertical movement Bearing part 64a Plate 65b Base plate 67 Shooting lens A1 to A4 First to fourth operational amplifiers A5 to A7 First to third horizontal operational amplifiers A21 to A24 21st to 24th operational amplifiers A25 to A27 First to third vertical operational amplifiers dx, dy First and second PWM duty hh1, hh2 First and second horizontal hall elements hv1, hv2 First and second vertical hall elements L1, L2 First and second effective lengths LX Optical axis of photographing lens px , Py first and second detection position signals R1 to R14, R19 first to fourteenth and nineteenth resistors R15 to R18 first 1st to 4th horizontal direction resistance R21 to R34, R39 21st to 34th, 39th resistance R35 to R38 1st to 4th vertical direction resistance vx, vy First, second angular velocity x1, x2 First, second horizontal Directional potential difference y1, y2 First and second vertical potential difference

Claims (15)

A first detection position signal in a first direction orthogonal to the optical axis of the imaging lens, the optical axis, and the optical axis and the image blur correction lens; A movable part having a permanent magnet for position detection used for detecting a second detection position signal in a second direction orthogonal to the first direction and performing position detection, and movable in the first and second directions When,
A magnetic field change detecting unit having a horizontal magnetic field change detecting element used for position detection in the first direction and a vertical magnetic field change detecting element used for position detection in the second direction is opposed to the position detecting permanent magnet. A fixing part at a position to be
The first detection position signal is obtained by a calculation including amplification of a first gain in the horizontal potential difference between the output terminals of the horizontal magnetic field change detection element, and the vertical potential difference between the output terminals of the vertical magnetic field change detection element. A magnetic field change detection element signal processing circuit for obtaining the second detection position signal by an operation including amplification of a second amplification factor.
An image blur correction apparatus characterized in that a region of the fixed portion to which the magnetic field change detection unit is attached is made of a non-magnetic material. The magnetic field change detection unit includes first and second horizontal magnetic field change detection elements as the horizontal magnetic field change detection elements, and first and second vertical magnetic field change detection elements as the vertical magnetic field change detection elements. Have
The magnetic field change detection element signal processing circuit amplifies the first amplification factor to a difference between first and second horizontal potential differences between output terminals of the first and second horizontal magnetic field change detection elements. The difference between the first and second vertical potential differences between the output terminals of the horizontal subtraction amplification circuit for obtaining the first detection position signal and the first and second vertical magnetic field change detection elements is The image blur correction apparatus according to claim 1, further comprising a vertical direction subtraction amplification circuit that obtains the second detection position signal by performing amplification.   The magnetic field change detection element signal processing circuit includes first and second horizontal differential amplifier circuits for amplifying a signal difference between output terminals of the first and second horizontal magnetic field change detection elements, The first and second vertical differential amplifier circuits that amplify the signal difference between the output terminals of each of the second vertical magnetic field change detection elements, and the signal difference amplified by the first and second horizontal differential amplifier circuits Difference between the first and second horizontal subtracting circuits for obtaining the first and second horizontal potential differences from the difference between the first and second vertical differential amplifier circuits and the reference voltage. 3. The image blur correction apparatus according to claim 2, further comprising: first and second vertical direction subtracting circuits that obtain the first and second vertical potential differences from the difference between the first and second vertical direction potential differences. The first and second horizontal subtracting circuits have first and second horizontal operational amplifiers, respectively, the horizontal subtracting amplifier circuit has a third horizontal operational amplifier, and the output terminal of the first horizontal operational amplifier is the first. An output terminal of the third horizontal operational amplifier is connected to an inverting input terminal of the third horizontal operational amplifier via a second horizontal resistor. And the output terminal of the second horizontal operational amplifier is connected to the non-inverting input terminal of the third horizontal operational amplifier via a third horizontal resistor, and the non-inverting input terminal of the third horizontal operational amplifier is the fourth. The first and third horizontal resistances have the same resistance value, the second and fourth horizontal resistances have the same resistance value, and the first and third water resistors are connected to the reference voltage via a horizontal resistance. Increasing the value of the first amplification factor by a value greater than the direction the resistance,
The first and second vertical subtracting circuits have first and second vertical operational amplifiers, respectively, the vertical subtracting amplifier circuit has a third vertical operational amplifier, and an output terminal of the first vertical operational amplifier is the first. The third vertical operational amplifier is connected to an inverting input terminal of the third vertical operational amplifier via a first vertical resistance, and an output terminal of the third vertical operational amplifier is connected to the inverting input terminal of the third vertical operational amplifier via a second vertical resistance. And an output terminal of the second vertical operational amplifier is connected to a non-inverting input terminal of the third vertical operational amplifier via a third vertical resistance, and a non-inverting input terminal of the third vertical operational amplifier is fourth. The first and third vertical resistances have the same resistance value, the second and fourth vertical resistances have the same resistance value, and the first and third lead are connected to the reference voltage via a vertical resistance. An image blur correction device according to claim 3, characterized in that to increase the value of the second gain by a larger value than in the direction resistance.   The permanent magnet for position detection is a third direction in which a surface facing the magnetic field change detection unit is a square formed by a line parallel to one of the first and second directions and parallel to the optical axis. The image blur correction apparatus according to claim 2, wherein an N pole and an S pole are arranged side by side and attached to the movable portion.   When the movable portion moves so that the vicinity of the center of either the image sensor or the image stabilization lens passes through the optical axis, the movable portion is at the center of the moving range in both the first and second directions. The image blur correction device according to claim 5, wherein the image blur correction device is located.   When in the positional relationship, the positions in the second direction of the first and second horizontal direction magnetic field change detecting elements are both opposed to the middle of the square in the second direction, and the positions in the first direction. Are opposed to the vicinity of both end portions of the square in the first direction, and the positions of the first and second vertical magnetic field change detecting elements in the first direction are both in the middle of the square in the first direction. The image blur correction apparatus according to claim 6, wherein the image blur correction apparatus faces the vicinity, and the positions in the second direction face the vicinity of both ends of the square in the second direction, respectively. The magnetic field change detection unit is a biaxial Hall element,
3. The image blur correction apparatus according to claim 2, wherein the first and second horizontal magnetic field change detection elements and the first and second vertical magnetic field change detection elements are Hall elements. The magnetic field change detection unit has the horizontal magnetic field change detection element and the vertical magnetic field change detection element one by one,
The magnetic field change detecting element signal processing circuit obtains the first detection position signal by amplifying the first amplification factor to a horizontal potential difference between output terminals of the horizontal magnetic field change detecting element. And a vertical direction subtraction amplification circuit that obtains the second detection position signal by amplifying the second amplification factor to the vertical potential difference between the output terminals of the vertical direction magnetic field change detection element. The image blur correction apparatus according to claim 1.   The magnetic field change detection element signal processing circuit calculates a signal difference between the output terminal of the horizontal direction magnetic field change detection element and a horizontal direction differential amplifier circuit that amplifies a signal difference between the output terminals of the horizontal direction magnetic field change detection element. A vertical differential amplifier circuit for amplifying, obtaining the horizontal potential difference from the difference between the signal difference amplified by the horizontal differential amplifier circuit and a reference voltage, and amplified by the vertical differential amplifier circuit. The image blur correction apparatus according to claim 9, wherein the vertical potential difference is obtained from a difference between the detected signal difference and a reference voltage. The horizontal differential amplifier circuit includes first and second horizontal operational amplifiers, the horizontal subtracting amplifier circuit includes a third horizontal operational amplifier, and an output terminal of the first horizontal operational amplifier is a first horizontal operational amplifier. The output terminal of the third horizontal operational amplifier is connected to the inverting input terminal of the third horizontal operational amplifier via the second horizontal resistance. The output terminal of the second horizontal operational amplifier is connected to the non-inverting input terminal of the third horizontal operational amplifier via a third horizontal resistor, and the non-inverting input terminal of the third horizontal operational amplifier is the fourth horizontal direction. The first and third horizontal resistances have the same resistance value, the second and fourth horizontal resistances have the same resistance value, and the first and third horizontal resistances. Increasing the value of the first amplification factor by a value greater than,
The vertical differential amplifier circuit includes first and second vertical operational amplifiers, the vertical subtracting amplifier circuit includes a third vertical operational amplifier, and an output terminal of the first vertical operational amplifier is a first vertical operational amplifier. The output terminal of the third vertical operational amplifier is connected to the inverting input terminal of the third vertical operational amplifier via the second vertical resistance. The output terminal of the second vertical operational amplifier is connected to the non-inverting input terminal of the third vertical operational amplifier via a third vertical resistance, and the non-inverting input terminal of the third vertical operational amplifier is the fourth vertical direction. The first and third vertical resistances have the same resistance value, the second and fourth vertical resistances have the same resistance value, and the first and third vertical resistances. An image blur correction device according to claim 10, characterized in that to increase the value of the second gain by a value greater than.   The position detection permanent magnet includes a horizontal position detection permanent magnet which is opposed to the horizontal magnetic field change detection element and has a north pole and a south pole arranged in the first direction and attached to the movable portion, and the vertical direction. 10. The image blur according to claim 9, further comprising a vertical position detection permanent magnet that is mounted on the movable portion and has a north pole and a south pole arranged in the second direction so as to face the magnetic field change detection element. Correction device.   The permanent magnet for position detection is a third direction in which a surface facing the magnetic field change detection unit is a square formed by a line parallel to one of the first and second directions and parallel to the optical axis. The image blur correction apparatus according to claim 9, wherein an N pole and an S pole are arranged side by side and attached to the movable portion. The magnetic field change detection unit is a uniaxial Hall element,
The image blur correction apparatus according to claim 9, wherein both the horizontal magnetic field change detection element and the vertical magnetic field change detection element are Hall elements. 2. The image blur according to claim 1, wherein the horizontal magnetic field change detection element and the vertical magnetic field change detection element are any one of a Hall element, an MI sensor, a magnetic resonance type magnetic field detection element, and an MR element. Correction device.

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