JP2005239960A5 - - Google Patents
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- Publication number
- JP2005239960A5 JP2005239960A5 JP2004054016A JP2004054016A JP2005239960A5 JP 2005239960 A5 JP2005239960 A5 JP 2005239960A5 JP 2004054016 A JP2004054016 A JP 2004054016A JP 2004054016 A JP2004054016 A JP 2004054016A JP 2005239960 A5 JP2005239960 A5 JP 2005239960A5
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- main body
- processing chamber
- exhaust
- mass flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
本構成例に用いる電気炉１０は、蓋体１２ａを有する本体１２の周囲および底面に加熱用のヒーター１２ｃを配した処理室１２ｂを中心とし、これに、この処理室１２ｂ内に所望の雰囲気を形成するためのガス導入管１６と排気管１８を備えたものである。なお、上記ガス導入管１６にはガス流量調整用のマスフローコントローラ１６ａが、また、排気管１８には排気調整バルブ１８ａがそれぞれ設けられている。 The electric furnace 10 used in this configuration example is centered on a processing chamber 12b in which a heater 12c for heating is disposed around and on the bottom surface of a main body 12 having a lid 12a, and a desired atmosphere is provided in the processing chamber 12b. A gas introduction pipe 16 and an exhaust pipe 18 are provided for formation. The gas introduction pipe 16 is provided with a mass flow controller 16a for adjusting the gas flow rate, and the exhaust pipe 18 is provided with an exhaust adjustment valve 18a.
１ 製造装置
２ 超音波噴霧器
３ バーナー
３ａ、３ｂ、３ｃ、３ｄ 円筒
３ｅ 火炎
４ 静電捕集器
４ａ 本体
４ｂ 高電圧発生装置
４ｃ 冷却トラップ
４ｄ ポンプ
５ａ、５ｂ、８ 配管
６ａ、６ｂ マスフローコントローラ
７ａ、７ｂ 逆止弁
８ キャリアガス送入配管
９ 流量計
１０ 再加熱装置
１２ 本体
１２ａ 蓋体
１２ｂ 処理室
１２ｃ ヒーター
１４ 坩堝
１６ ガス導入管
１６ａ マスフローコントローラ
１８ 排気管
１８ａ 排気調整バルブ
DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus 2 Ultrasonic atomizer 3 Burner 3a, 3b, 3c, 3d Cylinder 3e Flame 4 Electrostatic collector 4a Main body 4b High voltage generator 4c Cooling trap 4d Pump 5a, 5b, 8 Piping 6a, 6b Mass flow controller 7a, 7b Check valve 8 Carrier gas feed pipe 9 Flow meter 10 Reheating device 12 Main body 12a Lid 12b Processing chamber 12c Heater 14 Crucible 16 Gas introduction pipe 16a Mass flow controller 18 Exhaust pipe 18a Exhaust adjustment valve
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004054016A JP2005239960A (en) | 2004-02-27 | 2004-02-27 | Method for producing phosphor fine particle |
| KR1020050016136A KR20060043191A (en) | 2004-02-27 | 2005-02-25 | Method for producing phosphor fine particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004054016A JP2005239960A (en) | 2004-02-27 | 2004-02-27 | Method for producing phosphor fine particle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005239960A JP2005239960A (en) | 2005-09-08 |
| JP2005239960A5 true JP2005239960A5 (en) | 2006-08-17 |
Family
ID=35022020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004054016A Pending JP2005239960A (en) | 2004-02-27 | 2004-02-27 | Method for producing phosphor fine particle |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2005239960A (en) |
| KR (1) | KR20060043191A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006027133A1 (en) * | 2006-06-12 | 2007-12-13 | Merck Patent Gmbh | Process for the preparation of garnet phosphors in a pulsation reactor |
| WO2008018582A1 (en) * | 2006-08-11 | 2008-02-14 | Ishihara Sangyo Kaisha, Ltd. | Europium-activated yttrium oxide and process for producing the same |
| JP5258248B2 (en) * | 2007-09-27 | 2013-08-07 | 大陽日酸株式会社 | Method and apparatus for producing phosphor fine particles |
-
2004
- 2004-02-27 JP JP2004054016A patent/JP2005239960A/en active Pending
-
2005
- 2005-02-25 KR KR1020050016136A patent/KR20060043191A/en not_active Application Discontinuation
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