JP2005232112A - New fluorene compound - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positive-type photosensitizing agent as a component of a radiation-sensitive resin composition capable of forming a resist film having excellent sensitivity, heat-resistance, chemical resistance and transparency in visible light range and useful as a resist material for producing an integrated semiconductor circuit or TFT circuit for LCD, or a permanent film-forming material such as interlayer insulation film and protection film and provide a composition compounded with the agent. <P>SOLUTION: The new fluorene compound is produced by esterifying a naphthoquinone diazide sulfonic acid. The photosensitizing agent contains the fluorene compound, and the radiation-sensitive resin composition contains the photosensitizing agent. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention provides a semiconductor integrated circuit, a thin film transistor (TFT) circuit for a liquid crystal display (LCD), a resist for forming a mask for manufacturing a circuit, or a permanent film such as an interlayer insulating film and a protective film for a color filter. The present invention relates to a photosensitive agent suitable as a material. Furthermore, this invention relates to the radiation sensitive resin composition containing this photosensitive agent.

  In the semiconductor industry field, a semiconductor is manufactured by forming a pattern using a radiation-sensitive resin composition. With the recent miniaturization of patterns, there is a need for a radiation-sensitive resin composition having high resolution and high sensitivity, and with the improvement of productivity, ion implantation and dry etching processing are performed at high speed. Therefore, there is a need for a radiation-sensitive resin composition having excellent chemical resistance in order to have high heat resistance and exposure to various etching chemicals.

  In order to manufacture a fine pattern for forming a semiconductor, a resist capable of obtaining a submicron high resolution may be required. However, in general, there is a strong demand for a high-sensitivity resist capable of obtaining a resolution of several μm to several tens of μm order and exhibiting a high yield even when the throughput is increased by using a large-diameter substrate.

  In order to produce such a micron-order pattern with high productivity, various methods capable of mass processing or high-speed processing are usually employed in each process. Accordingly, various performances are required for the resist to withstand such processing conditions. For example, high sensitivity is required to increase the processing speed during exposure, and high heat resistance so that the pattern shape and dimensions do not change even when exposed to high energy and high-temperature heating to increase the processing speed during ion implantation or dry etching. Sex is required. In addition, excellent chemical resistance is required for various chemical treatments.

  As such a resist, a positive radiation sensitive resin composition containing a novolak resin and a quinonediazide compound based on various phenol derivatives represented by a benzophenone skeleton has been known (Patent Document 1, Patent). Document 2 and Patent Document 3) are widely used in the manufacture of integrated circuits. However, this type of radiation-sensitive resin composition has not been satisfactory in terms of sensitivity, heat resistance, and chemical resistance.

  In the liquid crystal display (LCD) industry, which has been rapidly developing in recent years, an active matrix type liquid crystal display (AM-LCD) in which a thin film transistor (TFT) is incorporated in each pixel is particularly a CRT (CRT) because of its fast response speed. ) Is regarded as a favorite of the next generation display device, and it is desired to enlarge the display screen.

  By the way, the TFT circuit of the AM-LCD is generally formed using a radiation sensitive resin composition (resist) capable of obtaining a resolution of about several microns. As described above, in order to increase the screen area of a liquid crystal display, as in the case of mass production of semiconductors, the resist is required to have high resolution, excellent sensitivity, heat resistance, solvent resistance, and the like. .

  Further, when manufacturing a liquid crystal display, in addition to the AM-LCD circuit as described above, a permanent film such as an interlayer insulating film and a protective film for a color filter, which are conventionally formed using a thermosetting resin, is not sensitive. There have been many attempts to form a radiation resin composition.

  In order to form a permanent film such as an interlayer insulating film and a protective film of such a liquid crystal display, a radiation-sensitive resin composition having excellent transparency in addition to heat resistance and solvent resistance is required. However, even when a conventional positive-type radiation-sensitive resin composition containing a novolak resin and a quinonediazide compound as described above is used, the transparency is particularly insufficient as well as heat resistance and solvent resistance.

JP-A-62-35349 JP-A-1-142548 JP-A-1-179147

  The present invention has been made in order to solve the above-described conventional problems. The object of the present invention is to provide a photosensitive resin useful as a component of a radiation-sensitive resin composition, particularly a positive-type radiation-sensitive resin composition, and the photosensitive agent. It is providing the radiation sensitive resin composition to contain. Another object of the present invention is to form a film excellent in sensitivity, heat resistance, solvent resistance and transparency as compared with a positive radiation sensitive resin composition containing a conventional naphthoquinone photosensitizer based on a phenol derivative. Therefore, it is possible to manufacture micron-order semiconductor integrated circuits, large-sized AM-LCD screens and the like with high productivity, and it is also suitable as a permanent film forming material such as an interlayer insulating film and a protective film. The object is to provide a radiation-sensitive resin composition.

  As a result of intensive studies to solve such problems, the present inventors have found that a fluorene compound having a bisphenolfluorene skeleton, a photosensitizer containing the fluorene compound, and a radiation-sensitive resin composition containing the photosensitizer. Successful development has led to the completion of the present invention.

  That is, the fluorene compound of the present invention is a compound represented by the following general formulas (1) and (2):

（式中、Ｒ_１は互いに独立に、水素、キノンジアジドスルホニルを表し、すべて水素である場合は含まない。Ｒ_２は互いに独立に、水素または炭素数１〜６のアルキル基を示し、相互に同一であっても、異なっていてもよい。）で示されるフルオレン化合物。

(In the formula, R ₁ independently represents hydrogen and quinonediazidosulfonyl, and does not include a case where all are hydrogen. R ₂ independently represents hydrogen or an alkyl group having 1 to 6 carbon atoms, and is mutually identical. Or may be different.).

（式中、Ｒ_３は互いに独立に、水素、キノンジアジドスルホニルを表し、すべて水素である場合は含まない。Ｒ_４は互いに独立に、水素または炭素数１〜６のアルキル基を示し、相互に同一であっても、異なっていてもよい。）で示されるフルオレン化合物。

(In the formula, R ₃ independently represents hydrogen and quinonediazidesulfonyl, and does not include the case where all are hydrogen. R ₄ independently represents hydrogen or an alkyl group having 1 to 6 carbon atoms, and is mutually identical. Or may be different.).

  In a preferred embodiment, the fluorene compound according to any one of the above, wherein the quinonediazidosulfonyl is 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl.

  The photosensitizer of the present invention contains the fluorene compound of the above general formula (1) or (2).

  In a preferred embodiment, the photosensitive agent is for a positive resist.

  The radiation sensitive resin composition of the present invention contains any one of the above photosensitizers.

  In a preferred embodiment, the composition is a positive-type radiation-sensitive resin composition containing an alkali-soluble resin and any one of the above photosensitizers.

  The positive radiation sensitive resin composition of the present invention further contains a cross-linking agent, and the cross-linking agent is a compound having a functional group capable of forming a cross-link between alkali-soluble resins.

  According to the present invention, a positive photosensitive agent having a fluorene skeleton and a radiation-sensitive resin composition containing the photosensitive agent are thus provided. This resin composition can form a film (pattern) excellent in sensitivity, heat resistance, transparency, and chemical resistance. Furthermore, it is excellent in storage stability. Therefore, the resin composition of the present invention is useful as a permanent film forming material such as a resist material, an interlayer insulating film and a protective film for manufacturing a semiconductor integrated circuit or a TFT TFT circuit for LCD.

Hereinafter, the contents of the present invention will be described in detail.
The fluorene compound of the present invention is not particularly limited as long as it is a quinonediazide sulfonate ester of a fluorene compound having a structure represented by the general formula (1) or (2). Therefore, all the hydroxyl groups in one molecule of the ester may not be esterified, and may be a partially esterified product.

The fluorene compound serving as the base of the general formulas (1) and (2) of the present invention can be produced, for example, according to the following reaction process formula 1 or 2.
<Reaction process formula 1>

<Reaction process formula 2>

  Fluorenone (3) and catechol (4) or pyrogallol (6) are reacted in the presence of thioacetic acid or β-mercaptopropionic acid and an acid catalyst (hydrochloric acid or sulfuric acid) to give the desired fluorene compound (5) or ( 7) can be obtained. In the reaction, catechol (4) or pyrogallol (6) is used in an excess amount from 2 moles each to 1 mole of fluorenone (3), and an appropriate amount of thioacetic acid or β-mercaptopropionic acid and an acid catalyst are used at 70 to 120 ° C. The reaction proceeds advantageously by reacting for about 20 minutes to 20 hours.

  Specific examples of the fluorene compound (5) or (7) include 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene, 9,9-bis- (2 ′, 4′-dihydroxyphenyl). -Fluorene, 9,9-bis- (3 ', 5'-dihydroxyphenyl) -fluorene, 9,9-bis- (2', 3'-dihydroxyphenyl) -fluorene, 9,9-bis- (2 ' , 6'-dihydroxyphenyl) -fluorene, 9,9-bis- (2 ', 5'-dihydroxyphenyl) -fluorene, 9,9-bis- (3', 4 ', 5'-trihydroxyphenyl)- Fluorene, 9,9-bis- (2 ′, 3 ′, 4′-trihydroxyphenyl) -fluorene, 9,9-bis- (2 ′, 3 ′, 5′-trihydroxyphenyl) -fluorene, 9, 9-bis- 2 ', 3', 6'-trihydroxyphenyl) -fluorene, 9,9-bis- (2 ', 4', 5'-trihydroxyphenyl) -fluorene, 9,9-bis- (2 ', 4 ', 6'-trihydroxyphenyl) -fluorene and the like, but are not limited thereto.

  The fluorene compound of the present invention can be obtained by esterification of the fluorene compound (5) or (7) with quinonediazide sulfonate, and specific examples of the esterified product include 1, 2 of the fluorene compounds (5) and (7). -Benzoquinonediazide-4-sulfonic acid ester, 1,2-naphthoquinonediazide-4-sulfonic acid ester, 1,2-naphthoquinonediazide-5-sulfonic acid ester, 1,2-naphthoquinonediazide-6-sulfonic acid ester, 2 1, 1-naphthoquinonediazide-4-sulfonic acid ester, 2,1-naphthoquinonediazide-5-sulfonic acid ester, 2,1-naphthoquinonediazide-6-sulfonic acid ester, and the like.

  The fluorene compound (5) or (7) is converted into a quinonediazidesulfonic acid ester by converting the quinonediazidesulfonic acid compound into a quinonediazidesulfonic acid halide, and then using sodium carbonate, sodium hydrogencarbonate, hydroxylation in a solvent such as acetone, dioxane, or tetrahydrofuran. Inorganic bases such as sodium and potassium hydroxide, or trimethylamine, triethylamine, tripropylamine, diisopropylamine, tributylamine, pyrrolidine, piperidine, piperazine, morpholine, pyridine, dicyclohexylamine, 1,5-diazabicyclo [4.3.0 In the presence of an organic base such as non-5-ene and 1,8-diazabicyclo [5.4.0] undec-7-ene, quinonediazidesulfonic acid halide and the fluorene compound (5) or ( ) And according to conventional methods such as reacting, it is possible to obtain a fluorene compound having a structure represented by the general formula of the present invention (1) or (2).

  In the fluorene compound of the present invention, the esterification rate (average esterification rate) of the quinonediazide sulfonic acid compound relative to the fluorene compound represented by the general formulas (1) and (2) is not particularly limited. The lower limit is usually 20%, preferably 25%, and the upper limit is usually 100%, preferably 90%. If the ratio of the esterification rate is too low, the pattern shape and resolution may be deteriorated, and if the ratio of esterification is too high, the sensitivity may be lowered.

  The photosensitive agent of the present invention contains a fluorene compound having a structure represented by the general formula (1) or (2) as a main component. As other components, solvents such as acetone, dioxane, and gamma butyrolactone can be appropriately added as necessary. The thus obtained photosensitive agent of the present invention is used as a photosensitive component of a radiation-sensitive resin composition. In particular, a positive photosensitive agent is preferably used as a photosensitive component of a radiation-sensitive resin composition.

  The radiation-sensitive resin composition of the present invention contains a positive photosensitive agent (hereinafter sometimes referred to as a photosensitive agent (A)) obtained as described above. More specifically, the photosensitive agent (A) and the alkali-soluble resin (B) are contained.

  As used herein, “radiation” refers to at least one of visible light, ultraviolet light, far ultraviolet light, X-rays, electron beams, molecular beams, γ-rays, synchrotron radiation, and proton beam rays.

  Hereinafter, the radiation sensitive resin composition of the present invention will be described with reference to a radiation sensitive resin composition containing a positive photosensitive agent.

  The positive radiation sensitive resin composition of the present invention contains the photosensitizer (A) and alkali-soluble resin (B) obtained as described above. Alternatively, the composition further contains a crosslinking agent (hereinafter sometimes referred to as a crosslinking agent (C)), and the crosslinking agent (C) has a functional group capable of forming a bridge between the alkali-soluble resin (B). It is a compound that has. In any case, the composition further contains (i) a sensitizer, (ii) a surfactant, (iii) an adhesion assistant, (iv) an additive, (v) a solvent and the like as necessary. contains.

  The photosensitive agent (A) contained in the positive-type radiation-sensitive resin composition of the present invention has a property that the diazo moiety in the compound is changed to carboxylic acid by irradiation and becomes alkali-soluble. Therefore, when this compound is contained, the entire composition functions as a positive radiation sensitive resin composition.

  The photosensitizers may be used alone or in combination of two or more. In addition, a photosensitizer other than the quinonediazide sulfonate ester of the fluorene compound of the present invention can be used in combination as long as the object of the present invention is not impaired. Another type of photosensitive agent to be mixed includes 2,3,4-trihydroxybenzophenone-1,2-naphthoquinonediazide-5-sulfonic acid ester, 2,3,4,4′-tetrahydroxybenzophenone-1,2. -Naphthoquinonediazide-5-sulfonic acid ester (THBP-NQD), etc. are mentioned, but it is not particularly limited to these, and a known quinonediazidesulfonic acid ester or the like can be used.

  These other types of photosensitizers can be obtained by esterifying quinonediazidesulfonic acid to the hydroxy compounds shown below.

  As a hydroxy compound used as a raw material for another type of photosensitizer, a known compound having a phenol group is used. Specific examples thereof include 2,3,4-trihydroxybenzophenone, 2,4,4′-tri Polyhydroxybenzophenone such as hydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2,4,2 ′, 4′-tetrahydroxybenzophenone, 2,3,4,2 ′, 4′-pentahydroxybenzophenone Gallate esters such as methyl gallate, ethyl gallate and propyl gallate; poly such as 2,2-bis (4-hydroxyphenyl) propane and 2,2-bis (2,4-dihydroxyphenyl) propane Hydroxybisphenylalkanes; tris (4-hydroxyphenyl) methane, 1,1,1-tris 4-hydroxy-3-methylphenyl) ethane, 1,1,1-tris (4-hydroxy-3-methylphenyl) ethane, 1,1,1-tris (4-hydroxyphenyl) ethane, 1,1-bis Polyhydroxytrisphenylalkanes such as (4-hydroxy-3-methylphenyl) -1- (4-hydroxyphenyl) ethane and bis (4-hydroxy-3-methylphenyl) -2-hydroxy-4-methoxyphenylmethane 1,1,2,2-tetrakis (4-hydroxyphenyl) ethane, 1,1,2,2-tetrakis (3-methyl-4-hydroxyphenyl) ethane, 1,1,3,3-tetrakis (4 -Hydroxyphenyl) propane and other polyhydroxytetrakisphenylalkanes; α, α, α ′, α′-tetrakis (4-hydroxyphenyl) Enyl) -3-xylene, α, α, α ′, α′-tetrakis (4-hydroxyphenyl) -4-xylene, α, α, α ′, α′-tetrakis (3-methyl-4-hydroxyphenyl) Polyhydroxytetrakiphenyl xylenes such as -3-xylene; 2,6-bis (2,4-dihydroxybenzyl) -p-cresol, 2,6-bis (2,4-dihydroxy-3-methylbenzyl)- p-cresol, 4,6-bis (4-hydroxybenzyl) resorcin, 4,6-bis (4-hydroxy-3-methylbenzyl) resorcin, 4,6-bis (4-hydroxybenzyl) -2-methylresorcin Trimers of phenols such as 4,6-bis (4-hydroxy-3-methylbenzyl) -2-methylresorcin and formalin, and novolak resins Is mentioned.

  The blending ratio of the photosensitizer used in the present invention may be a commonly used ratio, and the lower limit is usually 1 part by weight or more, preferably 3 parts by weight or more, more preferably 5 parts by weight or more with respect to 100 parts by weight of the alkali-soluble resin. The upper limit is usually 100 parts by weight or less, preferably 80 parts by weight or less, more preferably 40 parts by weight or less. If the blending ratio is too small, a sufficient remaining film ratio cannot be obtained, resulting in degradation of resolution, and conversely, if the blending ratio is too large, sensitivity is lowered, which is not preferable.

  Although alkali-soluble resin (B) used for the composition of this invention is not specifically limited, For example, polyvinyl phenol or a novolak resin is mentioned. Examples of the novolak resin include phenol, o-cresol, m-cresol, p-cresol, 2,5-xylenol, 3,5-xylenol, 3,4-xylenol, 2,3,5-trimethylphenol, 4- t-butylphenol, 2-t-butylphenol, 3-t-butylphenol, 3-ethylphenol, 4-ethylphenol, 3-methyl-6-t-butylphenol, 4-methyl-2-t-butylphenol, 2-naphthol, Examples thereof include resins obtained by condensing phenols such as 1,3-dihydroxynaphthalene and 1,5-dihydroxynaphthalene alone or in combination of two or more with aldehydes by a conventional method.

    Examples of aldehydes include formaldehyde aqueous solution (formalin) and paraformaldehyde. In particular, 37% formalin is industrially mass-produced and is convenient.

  Also particularly preferred as the alkali-soluble resin is the fluorene derivative described in JP-A-2003-89716, and the substrate on which the blended composition is formed exhibits excellent properties in transparency.

  The crosslinking agent (C) that can be contained in the composition of the present invention forms a thin film on a substrate using the composition, and after exposure and development, the alkali-soluble resin (B) is crosslinked by heating. It is contained to strengthen the thin film after development. Examples of such a crosslinking agent (C) include melamines; glycolurils; and compounds having at least two epoxy groups in the molecule.

  Examples of the melamines include hexamethylol melamine, hexabutyrolol melamine, partially methylolated melamine and alkoxyalkylated melamine thereof, tetramethylol benzoguanamine, partially methylolated benzoguanamine and alkylated products thereof.

  Of these, alkoxyalkylated melamines, particularly alkoxymethylated melamines, are preferred. Representative examples thereof include N, N, N ′, N ′, N ″, N ″-(hexaalkoxymethyl) melamine represented by the following general formula (8):

(In the formula, six R _{5 s} are each independently an alkyl group, preferably an alkyl group having 1 to 4 carbon atoms).

  As the glycoluril, an alkoxymethylated glycoluril is suitable, and as such a compound, for example, N, N ′, N ″, N ″ ′-(tetraalkoxy represented by the following general formula (9): Methyl) glycoluril includes:

(Wherein, four R _{6 s} are each independently an alkyl group, preferably an alkyl group having 1 to 4 carbon atoms).

  These commercially available compounds as melamines and glycolurils include Nicarak MW30LM, MW100LM, MX-750, MX-290, MX-280, N-2702, etc., manufactured by Sanwa Chemical Co., Ltd., and Mitsui Cytec PL-1174, CYMEL300, etc. are mentioned. Of the melamines and glycolurils, alkoxyalkylated melamines are preferred, and alkoxymethylated melamines are particularly preferred.

  When the crosslinking agent (C) is a melamine or glycoluril, the crosslinking agent may be contained in a proportion of 1 to 100 parts by weight with respect to 100 parts by weight of the alkali-soluble resin (B). Preferably, 5 to 50 parts by weight are contained. When the crosslinking agent (C) is less than 1 part by weight with respect to 100 parts by weight of the alkali-soluble resin (B), a thin film using the composition is formed on the substrate, and after the exposure and development, heat treatment is performed. Even if it carries out, sufficient bridge | crosslinking cannot be obtained and the heat resistance of the thin film finally obtained may become inadequate. When content exceeds 100 weight part, the solubility with respect to the alkali of the whole composition will become high. For this reason, the remaining film ratio is lowered during development, which is not preferable.

  Examples of the compound having at least two epoxy groups in the molecule include aliphatic diglycidyl ether type epoxy resins, phenol novolac type epoxy resins, cresol novolac type epoxy resins, bisphenol A type epoxy resins, and bisphenol F type epoxy resins. Bisphenol S type epoxy resin, trisphenol type epoxy resin, biphenyl type epoxy resin, cycloaliphatic type epoxy resin and other epoxy resins; and relatively having at least two epoxy groups such as triglycidyl isocyanurate and diglycidyl isocyanurate A low molecular weight epoxy compound is mentioned.

  These compounds having at least two epoxy groups may be used alone or in combination of two or more. The compound which has this epoxy group can be contained in a composition in the quantity of 1-50 weight part with respect to 100 weight part of alkali-soluble resin (B). When the amount is less than 1 part by weight with respect to 100 parts by weight, even if a thin film using the composition is formed on a substrate and subjected to heat treatment after exposure and development, sufficient crosslinking cannot be obtained, The heat resistance of the finally obtained thin film may be insufficient. When content exceeds 50 weight part, the solubility with respect to the alkali of the whole composition will become low. Therefore, the sensitivity is lowered during development, which is not preferable.

  The above sensitizer (i) contained in the composition of the present invention is used to improve the sensitivity of the photosensitive agent (A) to radiation. Examples of such sensitizers include 2H-pyrido- (3,2-b) -1,4-oxazin-3 (4H) -ones, 10H-pyrido- (3,2-b) -1 , 4-benzothiazines, urazoles, hydantoins, barbituric acids, glycine anhydrides, 1-hydroxybenzotriazoles, alloxans, maleimides and the like. These may be used alone or in combination of two or more.

  Such a sensitizer is usually contained at a ratio of 100 parts by weight or less, preferably 4 to 60 parts by weight, with respect to 100 parts by weight of the photosensitive agent (A).

  The surfactant (ii) described above is, for example, for preventing striation (after application) and improving the coating property when the radiation-sensitive resin composition of the present invention containing a solvent is applied on a substrate. Alternatively, it is contained to improve the developability of the coating film.

  Examples of such surfactants include the following compounds or products: polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, and polyoxyethylene oleyl ether; polyoxyethylene octylphenyl ether Polyoxyethylene aryl ethers such as polyoxyethylene nonylphenyl ether; nonionic surfactants such as polyoxyethylene dialkyl esters such as polyoxyethylene dilaurate and polyoxyethylene distearate; Ftop EF301, Ftop 303 F-top 352 (manufactured by Shin-Akita Kasei Co., Ltd.); Megafuck F171, Megafuck F172, Megafuck F173 (Dainippon Ink Chemical Co., Ltd.); Flora De FC-430, Florard FC-431 (manufactured by Sumitomo 3M); Asahi Guard AG710, Surflon S-382, Surflon SC-101, Surflon SC-102, Surflon SC-103, Surflon SC-104, Surflon SC- 105, fluorosurfactant marketed under the name of Surflon SC-106 (Asahi Glass Co., Ltd.); organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.); (meth) acrylic acid copolymer Polyflow No. 57, 95 (manufactured by Kyoeisha Yushi Chemical Co., Ltd.). These may be used alone or in combination of two or more.

  Such a surfactant is contained in an amount of 2% by weight or less, preferably 1% by weight or less of the whole radiation-sensitive resin composition.

  The adhesion assistant (iii) is contained in order to improve the adhesion of the liquid composition containing the solvent to the substrate. Examples of such adhesion assistants include functional silane coupling agents.

  Examples of the additive (iv) include an antistatic agent, a storage stabilizer, an antifoaming agent, a pigment, and a dye.

  The solvent (v) is used to uniformly dissolve each component in the composition and facilitate, for example, coating on a substrate. Such a solvent is not particularly limited as long as it is an organic solvent that does not react with each component in the composition and can dissolve or disperse them. Examples of the solvent include the following compounds: alcohols such as methanol and ethanol; ethers such as tetrahydrofuran; glycol ethers such as ethylene glycol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol methyl ethyl ether, and ethylene glycol monoethyl ether. Ethylene glycol monoethyl ether acetate, methyl cellosolve acetate, ethylene glycol alkyl ether acetates such as ethyl cellosolve acetate; diethylene glycol monomethyl ether, diethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol monoethyl ether, diethylene glycol Diethylene glycols such as dimethyl monobutyl ether; propylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate and propylene glycol monoethyl ether acetate; aromatic hydrocarbons such as toluene and xylene; methyl ethyl ketone, methyl amyl ketone, cyclohexanone, 4-hydroxy Ketones such as -4-methyl-2-pentanone; and ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, ethyl ethoxyacetate, ethyl hydroxyacetate , Methyl 2-hydroxy-2-methylbutanoate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, 3-ethoxypropion Methyl, ethyl 3-ethoxypropionate, ethyl acetate, butyl acetate, esters such as methyl lactate, ethyl lactate.

  Among these, ethylene glycol alkyl ether acetates, diethylene glycols, propylene glycol alkyl ether acetates, ketones, and esters are preferable. In particular, ethylene glycol monoethyl ether acetate, diethylene glycol ethyl methyl ether, propylene glycol monomethyl ether acetate, methyl amyl ketone, ethyl 3-ethoxypropionate, and ethyl lactate are preferred. These solvents may be used alone or in combination of two or more.

  A thin film having a predetermined pattern is formed by forming a thin film on a substrate using the radiation-sensitive resin composition containing the positive photosensitive agent (A) of the present invention, irradiating with radiation, and developing. Can do.

  As a manufacturing method of the radiation sensitive resin composition of this invention, for example, alkali-soluble resin (B) is melt | dissolved in a solvent, a photosensitizer (A) is further used as a radiation-reactive compound in this solution, and further if needed By mixing various components such as a crosslinking agent (C), a sensitizer, and a surfactant at a predetermined ratio, a liquid material containing each component of the radiation-sensitive resin composition is obtained. For example, it is more preferable to filter this with a Millipore filter having a pore diameter of about 0.05 to 1.0 μm to obtain a uniform liquid. Each component of the radiation-sensitive resin composition is usually mixed immediately before use, but the solution after mixing is also excellent in long-term storage stability.

  A coating film can be formed by applying the liquid positive radiation sensitive resin composition thus obtained to the substrate surface and removing the solvent by means such as heating. The method for applying the radiation-sensitive resin composition solution to the substrate surface is not particularly limited, and various methods such as a spray method, a roll coating method, and a spin coating method can be employed.

  Next, this coating film is usually heated (prebaked). Although the heating conditions vary depending on the type of each component, the blending ratio, etc., it is usually 70-120 ° C., and for a predetermined time, for example, 1-10 minutes on a hot plate, and 10-30 minutes in an oven, the thin film Can be obtained.

  Next, the pre-baked coating film is irradiated with radiation, for example, ultraviolet rays through a mask having a predetermined pattern. This changes the radiation-reactive compound. In the case of a composition containing a quinonediazide compound, the diazo group portion of the compound is changed to carboxylic acid and becomes alkali-soluble. Therefore, the solubility with respect to the alkali of the whole composition becomes high by irradiation, compared with before irradiation. Therefore, for example, development is possible by using a developer containing an alkali at an appropriate concentration.

  Next, unnecessary portions are removed with an appropriate developer to form a film having a predetermined pattern. As the developer, an aqueous solution containing an alkali is usually used. Examples of the alkali include inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and aqueous ammonia; Primary amines such as n-propylamine; Secondary amines such as diethylamine and di-n-propylamine; Tertiary amines such as triethylamine and methyldiethylamine; Alcohols such as dimethylethanolamine and triethanolamine Amines; quaternary ammonium salts such as tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline; pyrrole, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene, 1,5-diazabicyclo [ 4.3 0] -5-nonane and the like cyclic amines, such as.

  In addition, an aqueous solution obtained by adding an appropriate amount of a water-soluble organic solvent such as methanol or ethanol, a surfactant, or the like to the alkaline aqueous solution can also be used as a developer. The development time is usually 30 to 180 seconds, and as a development method, a liquid piling method, a shower method, a dipping method, or the like can be used. After the development, washing with running water is performed for 30 to 90 seconds, unnecessary portions are removed, and the pattern is formed by air drying with compressed air or compressed nitrogen. Thereafter, the pattern is heated by a heating device such as a hot plate or oven at a predetermined temperature such as 150 to 250 ° C. for a predetermined time such as 2 to 30 minutes on the hot plate, or 30 to 90 minutes in the oven. A cured film can be obtained.

  Thus, the radiation sensitive resin composition which has the outstanding property is provided by combining the positive photosensitive agent of this invention with predetermined alkali-soluble resin. For example, the radiation-sensitive resin composition containing the positive photosensitive agent and the alkali-soluble resin is applied as a liquid composition containing a solvent on a substrate and exposed after evaporating and drying the solvent by a pre-bake treatment. By performing the development, high sensitivity and resolution can be obtained, the developability is good, and the remaining film property at the time of development is also excellent. The cured film obtained by curing the composition of the present invention is particularly excellent in heat resistance, transparency, and resistance to various chemicals such as acids, alkalis and solvents. Furthermore, since this cured film is an organic coating film, it has a low dielectric constant. Therefore, the composition of this invention can be utilized for many uses. For example, it is used as a positive resist for forming a semiconductor integrated circuit, a thin film transistor (TFT) circuit for a liquid crystal display (LCD), a mask for manufacturing a circuit, and the like. Further, a material for a protective film of an electronic component (for example, a material for forming a protective film used for a liquid crystal display element including a color filter, an integrated circuit element, a solid-state image sensor, etc.); a material for forming an interlayer insulating and / or planarizing film A solder resist used in the production of a printed wiring board; or an alkali-soluble photosensitive composition suitable for forming a columnar spacer as an alternative to a bead spacer in a liquid crystal display device. Furthermore, the composition of the present invention comprises materials for various optical parts (lenses, LEDs, plastic films, substrates, optical disks, etc.); a coating agent for forming a protective film for the optical parts; an adhesive for optical parts (adhesive for optical fibers) Etc.); a coating agent for producing a polarizing plate; a photosensitive resin composition for hologram recording, and the like.

  EXAMPLES Hereinafter, although this invention is demonstrated concretely based on a synthesis example, an Example, and a comparative example, this invention is not limited to this Example. In the following synthesis examples, examples and comparative examples, “parts” means “parts by weight”.

(Synthesis Example 1)
90 g (0.5 mol) of fluorenone (manufactured by Osaka Gas Chemical Co., Ltd.) having a purity of 99.5% by weight and 132 g (1. 2 mol) and 270 g of toluene were added, 0.4 ml of β-mercaptopropionic acid and 80 ml of 95% sulfuric acid were added, and the reaction solution was stirred at 85 ° C. for 1 hour to complete the reaction.

  After completion of the reaction, 180 g of methanol or isopropyl alcohol was added to the reaction solution and heated to 60 ° C., and stirring was continued for 1 hour. Next, 900 g of pure water was added to precipitate the reaction product, cooled to room temperature, and then filtered to separate. The resulting solid was filtered and dried. The yield of the resulting compound 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene was 153.8 g.

(Synthesis Example 2)
In Synthesis Example 1, 151 g (1.2 mol) of pyrogallol (manufactured by Dainippon Pharmaceutical Co., Ltd.) was used in the same manner instead of catechol. As a result, the yield of the obtained compound 9,9-bis- (3 ′, 4 ′, 5′-trihydroxyphenyl) -fluorene was 159.2 g.

(Synthesis Example 3)
50 g of the compound 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene obtained in Synthesis Example 1 and 141 g of 1,2-naphthoquinonediazide-5-sulfonic acid chloride as a quinonediazidesulfonic acid compound are dissolved in acetone. To give a 10% solution. While adjusting the temperature to 20 to 25 ° C, 1.2 equivalents of triethylamine of 1,2-naphthoquinonediazide-5-sulfonic acid chloride was added dropwise over 30 minutes, and the reaction temperature was maintained for 2 hours. The reaction was completed. The precipitated salt was separated by filtration and put into a 0.1% hydrochloric acid aqueous solution equivalent to 10 times the amount of the reaction solution. The precipitated solid content was filtered, washed with pure water, and dried under reduced pressure at 40 ° C. to obtain 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene quinonediazide sulfonate compound (4 mol ester). Obtained.

(Synthesis Example 4)
Using 50 g of the compound 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene obtained in Synthesis Example 1 and 105 g of 1,2-naphthoquinonediazide-5-sulfonic acid chloride as the quinonediazidesulfonic acid compound, Synthesis was performed in the same manner as in Synthesis Example 3 to obtain 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene quinonediazide sulfonate compound (3 mol ester).

(Synthesis Example 5)
50 g of the compound 9,9-bis- (3 ′, 4 ′, 5′-trihydroxyphenyl) -fluorene obtained in Synthesis Example 2 and 195 g of 1,2-naphthoquinonediazide-5-sulfonic acid chloride as the quinonediazidesulfonic acid compound Was used in the same manner as in Synthesis Example 3 to obtain 9,9-bis- (3 ′, 4 ′, 5′-trihydroxyphenyl) -fluorene quinonediazide sulfonate compound (6 mol ester).

(Synthesis Example 6)
Using 50 g of the compound 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene obtained in Synthesis Example 1 and 141 g of 1,2-naphthoquinonediazide-4-sulfonic acid chloride as the quinonediazidesulfonic acid compound, Synthesis was performed in the same manner as in Synthesis Example 3 to obtain 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene quinonediazide sulfonate compound (4 mol ester).

(Example 1)
20 parts by weight of a positive photosensitive agent (A) which is a quinonediazide sulfonic acid ester compound of 9,9-bis- (3 ′, 4′-dihydroxyphenyl) -fluorene obtained in Synthesis Example 3, m / p-cresol novolak 70 parts by weight of (B) and 10 parts by weight of a crosslinking agent (C) (TECHMORE VG3101: manufactured by Mitsui Chemicals, Inc.) were dissolved in propylene glycol monomethyl ether acetate so that the solid content concentration was 30% by weight. This was filtered through a Millipore filter having a pore size of 0.2 μm.

  Using the obtained solution, a pattern was formed on the substrate according to the pattern forming method shown in (1) below. About the formation process of a pattern and the obtained pattern, it tested about the item shown in following (2).

(1) Pattern formation method The obtained solution was applied to a silicon substrate (disk shape) having a diameter of 4 inches using a spinner, and then prebaked on a hot plate at 90 ° C. for 2 minutes to obtain a film thickness of 2.0 μm. The coating film is formed. The obtained coating film was exposed with a predetermined amount of energy through a mask having a predetermined pattern using a Canon PLA-501F contact exposure machine, and then a 0.4% by weight tetramethylammonium hydroxide (TMAH) aqueous solution was added. And develop at 23 ° C. for 60 seconds. Next, a pattern is formed on the silicon substrate by rinsing with water and drying.

(2) Evaluation method 2.1. Sensitivity In the above, a step tablet (negative mask with 12 steps of optical density) is placed on and closely adhered as a mask to perform exposure and development. The number of steps of the step tablet remaining on the substrate is examined, and the minimum exposure amount required to remove the coating film in the exposed portion is obtained.

2.2. Residual film ratio The film thickness after pre-baking (initial film thickness) and the film thickness after development are measured, and (film thickness after development / initial film thickness) × 100 is calculated and evaluated as follows:
◎: Remaining film ratio is 95% or more ○: Remaining film ratio is 90% or more to less than 95% △: Remaining film ratio is 85% or more to less than 90% ×: Remaining film ratio is less than 85% Is

2.3. Developability The surface roughness of the line part after development and the presence or absence of resin residue (scum) in the space part are observed with a scanning electron microscope (SEM) and evaluated as follows:
○: Scum is not observed at all △: Scum is observed in part ×: Scum is observed over the entire surface

2.4. Resolution The dimension of the space in the smallest dimension line and space pattern resolved at the optimum exposure dose is measured with a scanning electron microscope.

2.5. Transparency A pattern is formed in the same manner as in the pattern formation method (1) except that a glass substrate “Corning 7059 (manufactured by Corning)” is used instead of the silicon substrate. The glass substrate having this pattern is irradiated with ultraviolet light having a light intensity of 9.5 mW at 405 nm so as to be 500 mJ / cm ² . Subsequently, the transmittance in the obtained pattern part on the glass substrate was measured at a wavelength of 400 to 700 nm using a spectrophotometer “UV-2100PC (manufactured by Shimadzu Corporation)” and evaluated as follows:
A: Minimum transmittance is 97% or more. B: Minimum transmittance is 95% to less than 97%. Δ: Minimum transmittance is 90% to less than 95%. X: Minimum transmittance is less than 90%. Is

2.6. Heat resistance According to the pattern formation method (1), a contact hole pattern of about 10 μm square was formed on a silicon substrate. The silicon substrate having this pattern is irradiated with ultraviolet light having a light intensity of 9.5 mW at 405 nm so as to be 500 mJ / cm ² . This is heated in a clean oven at 240 ° C. for 60 minutes, and the thermal deformation of the hole pattern is observed. The cross-sectional shapes of the hole patterns before and after heating are compared and evaluated as follows:
◎: No change before and after heating ○: Slight change before and after heating △: Some change before and after heating ×: Significant change before and after heating

2.7. Chemical resistance A coating film is formed on a silicon substrate in the same manner as in the pattern forming method (1), and a heat treatment is performed at 200 ° C. for 30 minutes in a clean oven without exposure. The substrate having the thin film after the heat treatment is immersed in the following various chemical solutions under the following conditions:
(A) Acid solubility:
(a-1) Immerse in 5 wt% HCl aqueous solution at room temperature for 10 minutes
(a-2) Immersion in 5 wt% HNO ₃ aqueous solution at room temperature for 10 minutes (b) Alkaline solution:
(b-1) Immersion in 5 wt% NaOH aqueous solution at room temperature for 10 minutes
(b-2) Immersion in 1 wt% NaOH aqueous solution at 80 ° C for 5 minutes
(b-3) Immersion in 2.38 wt% TMAH aqueous solution at room temperature for 10 minutes (c) Solvent:
(c-1) Immersion in N-methylpyrrolidone (NMP) at 40 ° C. for 10 minutes
(c-2) Immersion in NMP at 80 ° C for 5 minutes
(c-3) Immersion in dimethyl sulfoxide (DMSO) at 80 ° C for 5 minutes

The film thickness before and after the immersion treatment is measured, the rate of film thickness change is calculated by the following formula, and the chemical resistance is evaluated as follows:
Film thickness change rate = [(film thickness before treatment−film thickness after treatment) / film thickness before treatment] × 100 (%)
A: The film thickness change rate is less than 2% in all treatments (a) to (c). ○: The film thickness change rate is 2% or more and less than 5% in all treatments. Certain Δ: The film thickness change rate is in the range of 5% or more and less than 10% in at least one chemical treatment.
X: The film thickness change rate is 10% or more in at least one kind of chemical treatment.

Table 1 shows the composition of the components in the solution used in this example, and Table 2 shows the evaluation results of each test. Examples 2 to 8 and Comparative Examples 1 and 2 described later are also shown in the tables.

(Example 2 to Example 8)
Evaluation was performed in the same manner as in Example 1 using the photosensitive agent (A), alkali-soluble resin (B), and crosslinking agent (C) in the types and amounts shown in Table 1.

(Comparative Examples 1 and 2)
Other than using the conventionally used 2,3,4,4′-tetrahydroxybenzophenone-1,2-naphthoquinonediazide-5-sulfonic acid ester (THBP-NQD) instead of the photosensitive agent (A) Were operated in the same manner as in Example 1 and evaluated.

  As is apparent from Table 2, it can be seen that the positive radiation sensitive resin composition of the present invention can form a film (pattern) excellent in sensitivity, heat resistance, transparency and chemical resistance. In particular, the film obtained using the positive-type radiation-sensitive resin composition of the present invention is significantly superior in sensitivity, heat resistance, transparency, and chemical resistance compared to the case where the resin composition of the comparative example is used. It is clear to form.

Example 9
Furthermore, the positive radiation sensitive resin composition solutions of Examples 1 to 8 were stored at 5 ° C. for 3 months. The positive radiation sensitive resin composition solution after storage and the pattern obtained by the pattern formation method of (1) above using this were evaluated for the evaluation items of 2.1 to 2.7. In either case, the results were the same as those of the positive-type radiation-sensitive resin composition immediately after preparation. Therefore, it was found that this positive radiation sensitive resin composition was excellent in storage stability.

  Therefore, the resin composition of the present invention is useful as a permanent film forming material such as a resist material, an interlayer insulating film and a protective film for manufacturing a semiconductor integrated circuit or a TFT TFT circuit for LCD.

Claims (9)

The following general formula (1):

(In the formula, R ₁ independently represents hydrogen and quinonediazidosulfonyl, and does not include a case where all are hydrogen. R ₂ independently represents hydrogen or an alkyl group having 1 to 6 carbon atoms, and is mutually identical. Or may be different.). The following general formula (2):

(In the formula, R ₃ independently represents hydrogen and quinonediazidesulfonyl, and does not include the case where all are hydrogen. R ₄ independently represents hydrogen or an alkyl group having 1 to 6 carbon atoms, and is mutually identical. Or may be different.). The fluorene compound according to claim 1 or 2, wherein the quinonediazidesulfonyl is 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl. A photosensitizer containing the fluorene compound according to claim 1. The photosensitive agent according to claim 4, which is used for a positive resist. A radiation-sensitive resin composition containing the photosensitive agent according to claim 4 or 5. A radiation-sensitive resin composition comprising an alkali-soluble resin and the photosensitive agent according to claim 4. A positive-type radiation-sensitive resin composition comprising an alkali-soluble resin and the photosensitive agent according to claim 5. Furthermore, the radiation sensitive resin composition of Claim 7 which is a compound which contains a crosslinking agent and this crosslinking agent has a functional group which can form bridge | crosslinking between alkali-soluble resin.