JP2005227637A - Actuator device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator device which can be miniaturized and has a variable optical attenuation function and an optical switch function. <P>SOLUTION: The actuator device is provided with a body of rotation having a revolving shaft, a mount fixed to the revolving shaft, a shield plate having a reflection surface fixed to the mount, a revolving shaft holding section for rotationally supporting the revolving shaft, a revolution regulation plate for regulating the rotating position of the body of rotation, an attitude holding means for causing the self-holding of the body of rotation, a drive means for moving the body of rotation, and a thermal deformation means of the shield plate and is given an optical switch function. The thermal deformation means has a heat transfer means for raising or lowering the temperature of the shield plate and a temperature control means for controlling the heat transfer means and is given the variable optical attenuation function by constituting the means in such a manner that the angle formed by the optical axis of the reflection surface of the shield plate and the optical axis of an optical fiber is varied by adjusting the temperature of the shield plate. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an actuator device having a variable light attenuation function capable of varying the amount of light attenuation.

  In optical communications, a variable optical attenuator that adjusts the intensity of signal light to an appropriate value is indispensable in order to ensure transmission quality. Particularly in WDM optical communication, since it is necessary to make the light intensity of a plurality of channel signals the same, a variable optical attenuator capable of fine adjustment of attenuation and obtaining a wide range of attenuation is desired. Yes.

  As a conventional technique in the technical field, a variable optical attenuator having a reflecting mirror is disclosed (for example, see Patent Document 1). Hereinafter, a variable optical attenuator having a conventional reflecting mirror will be described with reference to FIG.

  A conventional variable attenuator having a reflection mirror includes an optical fiber 155, an optical fiber 157, a lens 153, and a micromachine 147 having a mirror 145 and a drive unit. The convergent light beam 151 emitted from the optical fiber 157 is converted into a parallel light beam 149 by the lens 153. The parallel light beam 149 is then totally reflected by the reflection surface of the mirror 145, returns to the lens 153 again, is converted into a convergent light beam 151 after image conversion, and is coupled to the optical fiber 155.

  When the mirror 145 is moved by the micromachine 147 and the reflection surface is inclined with respect to the optical axis, the parallel light beam 149 is shifted and the convergent light beam 151 is also shifted. Accordingly, the coupling loss between the optical fiber 155 and the optical fiber 157 changes due to the shift of the convergent light beam 151, the coupling loss increases in proportion to the shift amount of the convergent light beam 151, and the shift amount of the convergent light beam 151 is Since it is proportional to the shift amount, the coupling loss between the optical fiber 155 and the optical fiber 157 can be controlled by controlling the shift amount of the mirror 145, and thus functions as a variable optical attenuator.

  On the other hand, as another example of the prior art, a variable optical attenuator having a light ON / OFF function and functioning also as a 1 × 1 optical switch is disclosed. (For example, refer to Patent Document 2). Hereinafter, this prior art will be described with reference to FIG.

  The prior art variable optical attenuator 110 includes a pair of optical fibers 121, a ferrule 112 provided at the tip of each optical fiber 121, and a tip of one ferrule 112 that is irradiated from the tip of one ferrule 112. A pair of optical systems 113 for converging the parallel beams 114 to the other ferrule 112, and a variable attenuator 120 for continuously attenuating the parallel beams 114 formed between the pair of optical systems; Have

  The pair of optical systems 113 includes, for example, an aspheric lens, a selfoc lens, and the like. In the prior art, light emitted from the optical fiber 121 on the left side in the drawing is received by the optical fiber 121 on the right side in the drawing through the pair of optical systems 113.

  The parallel beam 114 formed in this manner has a diameter of 0.6 to 1.0 mm. Here, the intensity distribution of the parallel beam 114 can be schematically represented by a Gaussian distribution. The conventional variable optical attenuator 120 that shields the parallel beam 114 includes a shielding member 130 that shields the parallel beam 114 formed between the optical systems 113, and a driving unit 140 that rotates the shielding member 130. Have

  The shielding member 130 has a substantially cylindrical shape and is rotated by the driving means 140 to change the attenuation amount of the parallel beam 114 when the position of the outer peripheral surface is displaced in a direction orthogonal to the parallel beam 114. In the prior art, the cam is a deformed cam whose radius gradually increases with the rotation angle. Further, the shielding member 130 is provided with a notch 132, and this notch prevents the parallel beam 114 from being attenuated facing the parallel beam 114 at a predetermined rotational position of the shielding member 130. .

  Further, when the position with the maximum radius is the parallel beam position depending on the rotation angle, the parallel beam is completely blocked. Thus, the conventional variable optical attenuator can turn on and off the light, and has a function as a 1 × 1 optical switch. In the conventional technology, an ultrasonic motor is used as the drive motor 141, and the encoder 142 and the shielding member 130 are held on the rotation shaft 141 a of the drive motor 141.

  The encoder 142 measures the rotation angle of the drive motor 141, that is, the rotation angle of the shielding member. Specifically, the encoder 142 is held by the rotating shaft 141a of the drive motor 141 at the same time as the shielding member 130, and a slit (not shown) provided in the encoder 142 is detected by an interrupter 143 fixed to the variable optical attenuator 110. A minute rotation angle is measured by counting the number of slits. The rotation angle of the shielding member 130 is grasped by measuring the rotation angle of the encoder 142, and the amount by which the shielding member 130 blocks the parallel beam 114 is controlled by controlling the rotation angle of the drive motor 141.

  Further, the driving means 140 of the prior art is configured by the driving motor 141, the encoder 142, and the interrupter 143. However, the driving means 140 is not limited to this as long as the shielding member 130 can be rotated and the rotation angle can be grasped. A pulse motor may be used as the motor so that the rotation angle can be grasped by the drive motor itself.

JP 2000-131626 (page 3, Fig. 1) JP 2002-174781 (page 4-6, Fig. 1)

  However, the conventional variable optical attenuator has the following problems.

  The optical attenuator having a reflection mirror has an angle change of 1 degree when the applied voltage to the drive unit is 20 v. At this time, the coupling loss between the optical fiber 155 and the optical fiber 157 is 20 dB, so that optical attenuation is possible. However, since the angle change is small, it is difficult to completely block the light from the optical fiber 155 to the optical fiber 157, and it cannot be used as a 1 × 1 optical switch having a light ON / OFF function. .

  A conventional variable optical attenuator that can be used as a 1 × 1 optical switch attenuates light by rotating a shielding member that blocks light emitted from an optical fiber. For this reason, a certain amount of distance for inserting the shielding member is required so that the outer periphery of the shielding member does not contact the optical system in the parallel beam region between the optical fibers. In the prior art, there is a distance of about 9 mm. However, when the distance between the optical systems is long, in order to assemble this attenuator so as to satisfy the desired insertion loss, very strict angle adjustment accuracy is required during alignment, and the time required for alignment Increased and productivity is not good.

  In addition, since the shielding member of the irregular cam whose radius is gradually increased according to the rotation angle is shielded by the outer peripheral portion of the shielding member, a certain distance is generated between the rotation axis center of the driving means and the parallel beam region between the fibers, When the external temperature changes, the distance from the rotation center axis to the inter-fiber parallel beam region changes, so the amount of light that can be shielded by the shielding member varies with temperature even if the rotation angle is constant. There was a problem that dependency was large.

  Further, in the prior art, the parallel beam diameter is φ0.6 to 1.0 mm, and the outer diameter of the deformed cam is approximately φ5 mm. However, considering the downsizing of the apparatus, it is necessary to reduce the diameter of the deformed cam. The machining accuracy of the irregular cam will be severe. Therefore, downsizing is difficult.

  Accordingly, an object of the present invention is to achieve downsizing by shortening the distance between the optical systems, to easily perform alignment in a short time with high accuracy, to reduce loss, and to reduce the external temperature. It is an object of the present invention to provide an actuator device that can maintain a constant light attenuation amount regardless of changes, can be miniaturized, has a variable light attenuation function, and also has an optical switch function.

  In order to achieve the above object, the present invention basically employs a technical configuration as described below.

  In order to solve the above problems, the present invention provides a rotating body having a rotating shaft, a mounting portion fixed to the rotating shaft, a shielding plate fixed to the mounting portion and having a reflecting surface, and a rotating shaft rotatably supported. A rotating shaft holding portion, a rotation restricting plate that restricts the rotational position of the rotating body, and a first posture in which one end of the rotating body is in contact with one end of the rotation restricting plate, or the other end of the rotating body is the rotation restricting plate. Each of the second postures in contact with the other end of the rotating member includes posture holding means for self-holding, driving means for moving the rotating body, and thermal deformation means for the shielding plate, and an optical axis in one direction of the rotating body. In the actuator device, an optical switch function is given by inserting / removing the shielding plate into / from a gap between a pair of optical fibers arranged opposite to each other, and the thermal deformation means increases or decreases the temperature of the shielding plate. Control heat transfer means and heat transfer means And a variable light attenuation function by adjusting the temperature of the shielding plate to change the angle formed by the optical axis of the reflection surface of the shielding plate and the optical axis of the optical fiber. It is characterized by being.

  The thermal deformation means has temperature detection means for detecting the temperature of the shielding plate, and the temperature control means is configured to control the heat transfer means based on the detection result of the temperature detection means. .

  The thermal deformation means has light quantity detection means for detecting the amount of light reflected by the reflection surface of the shielding plate, and the temperature control means is configured to control the heat transfer means based on the detection result of the light quantity detection means. Features.

  Further, by providing the rotation restricting plate on the side opposite to the rotation holding member with respect to the rotating shaft of the rotating body, the driving means is operated so that one end or the other end of the rotating body is brought into contact with one end or the other end of the rotation restricting plate. When the contact is made, a force in a direction of pressing the rotation shaft toward the rotation holding portion acts on the rotation shaft, and the heat transfer means is arranged on the rotation restricting plate.

  Further, the heat transfer means is disposed in the mounting portion.

  Further, the center of gravity position of the rotating shaft and the center of gravity position of the rotating body are substantially matched.

The posture holding means includes a rotor magnet that constitutes a part of the rotating body, and first and second yokes that extend from near one end of the rotor magnet to near the other end of the rotor magnet. When in the first position or the second position, the rotor is held in the first position or the second position by forming a closed magnetic path between the rotor magnet and the first or second yoke. It is characterized by doing.

  Since the actuator device of the present invention has a structure in which a shielding plate having a reflecting surface can be inserted into and removed from a gap between a pair of optical fibers, the actuator device has a function as a 1 × 1 optical switch, and further 1 × 2 It can function as a 2 × 2 optical switch, can be miniaturized, can shorten the distance between optical systems, can be easily aligned, and has little loss. In addition, since the shield plate is provided with thermal deformation means, the temperature of the shield plate can be maintained within a predetermined range, and the angle formed by the optical axis of the reflecting surface of the shield plate and the optical axis of the optical fiber is kept constant. Therefore, a desired amount of light attenuation can be obtained without being affected by the external temperature, and high reliability can be achieved.

  In addition, a thermal deformation means for the shielding plate is provided. The thermal deformation means is based on the temperature detection means for detecting the temperature of the shielding plate, the heat transfer means for raising or lowering the temperature of the shielding plate, and the detection result of the temperature detection means. In order to obtain a desired attenuation, the inclination of the reflecting surface is changed by changing the temperature of the shielding plate using the heat transfer means, in order to obtain a desired attenuation amount. Since there is a temperature control means that detects the temperature at that time by the temperature detection means and corrects the temperature change until it reaches a temperature at which a desired amount of attenuation can be obtained, the angle of the shielding plate must be accurately maintained within a predetermined range. Thus, since the angle formed by the optical axis of the reflecting surface of the shielding plate and the optical axis of the optical fiber can be kept constant, the change in light attenuation is extremely small, and high reliability can be achieved.

  Further, since the heat transfer means is disposed on the rotation restricting plate provided on the opposite side of the rotation holding member with respect to the rotating shaft of the rotating body, the wiring of the heat transfer means is easy and the wiring portion is movable. Therefore, it is possible to achieve high reliability that there is no failure due to disconnection, and there is no load for driving, so the current consumption value is stable.

  Further, since the heat transfer means is disposed in the mounting portion, heat transfer to the shielding plate is good, so that the temperature of the shielding plate can be efficiently maintained.

  In addition, since the center of gravity of the rotating shaft and the center of gravity of the rotating body are substantially the same, the angle between the optical axis of the reflecting surface of the shielding plate and the optical axis of the optical fiber is constant with respect to external impact. Therefore, the change in light attenuation is very small, and high reliability can be achieved.

  In addition, a thermal deformation means for the shielding plate is provided. Temperature control means that controls the heat transfer means based on this, when the change in the amount of reflected light is detected and it is determined that an error has occurred in the tilt of the reflective surface, the temperature change is corrected using the heat transfer means Thus, temperature control is performed using the temperature control means, and the temperature of the shielding plate can be accurately maintained within a predetermined range. As a result, high reliability can be achieved by keeping the angle formed by the optical axis of the reflection surface of the shielding plate and the optical axis of the optical fiber constant, and extremely reducing the change in the amount of reflected light.

  Further, when the rotating body is in the first position or the second position, a closed magnetic path is formed between the rotor magnet and the first or second yoke, so that the rotating body is in the first position or the second position. The angle between the optical axis of the reflecting surface of the shielding plate and the optical axis of the optical fiber can be kept constant, the change in the desired optical attenuation is extremely small, and high reliability is achieved. Can be achieved.

  Hereinafter, the configuration of an actuator device according to the best mode for carrying out the present invention will be described with reference to the drawings.

  FIG. 1 is a plan view of an actuator device for an optical switch having an optical attenuation function in Embodiment 1 of the present invention. The actuator device includes an optical fiber unit 3 and an actuator unit 5. The optical fiber unit 3 includes a first collimator lens assembly 105 in which a pair of optical fibers 101 and 103 are arranged symmetrically with the optical axis of the lens, and a pair of optical fibers. A second collimator lens assembly 111 having 107 and 109 is disposed, and the first and second collimator lens assemblies 105 and 111 are opposed to each other, and the first and second collimator lens assemblies 105 and 111 are optical fibers. 101 and the optical fiber 109, and the optical fiber 103 and the optical fiber 107 are arranged and supported so as to cross each other and optically connect, and of course have a function as a 2 × 2 optical switch as well as a 1 × 1 optical switch. .

  The actuator unit 5 is disposed in a housing 1 having an arbitrary size, and includes a rotating body 7, a first magnetic circuit 9, and a second magnetic circuit 11. The first magnetic circuit unit 9 is an electromagnetic soft iron or the like. The first yoke 23 and the first exciting coil 25 wound around the first yoke 23, and the second magnetic circuit unit 11 is made of a magnetic material such as electromagnetic soft iron. A certain second yoke 27 and a second exciting coil 29 wound around the second yoke 27 are configured. The first yoke 23 and the second yoke 27 are magnetically coupled by combining a plurality of components.

  Further, the rotating body 7 has a rotating shaft 15, and a rotor magnet 17 and a mounting portion 45 are inserted and fixed to the rotating shaft 15. Further, a shielding plate 19 having a reflecting surface (not shown) and a Peltier element 61 as heat transfer means are attached to the attachment portion 45. Further, a platinum resistance thermometer 69 as temperature detecting means is fixed to the shielding plate 19 by adhesion or the like. The rotary shaft 15 is supported by the rotary shaft holding portion 43 so as to be rotatable by being sandwiched between the rotary shaft holding portion 43 provided on the bottom surface 41 and the shaft pressing spring 13. Further, one end of the rotary shaft 15 contacts the block 47 and the other end is supported in the thrust direction by applying a constant pressure by a thrust spring 49.

  Next, the rotation restricting structure for taking the state where the reflecting surface of the shielding plate 19 is inserted in the optical path will be described with reference to the rotating body perspective view of FIG. 2 and the magnetic circuit development schematic diagram of FIG. It is assumed that the rotor magnet 17 is magnetized with two poles in the direction shown in FIG. Reference numeral 21 denotes a reflecting surface provided on the rotating body, and reference numeral 35 denotes an optical path.

  One end 31 of the first yoke 23 is located near the north pole of the rotor magnet 17, and the other end 33 is located near the south pole of the rotor magnet 17. A concave portion such as a V-groove opened upward is formed on the upper end surface of the rotary shaft holding portion 43, and the rotary shaft 15 is mounted on the concave portion, so that the rotary shaft 15 is rotatably supported on the rotary holding portion 43. The Further, the rotating shaft 15 is pressed from above by the shaft pressing spring 13 and is prevented from coming out upward from the concave portion of the rotation holding portion 43.

  Further, one end 57 of the rotation restricting plate is disposed at a position where it can come into contact with one end 53 of the rotating body of the mounting portion 45 constituting the rotating body 7. One end 53 of the rotating body of the mounting portion 45 constituting the rotating body 7 comes into contact with one end 57 of the rotation restricting plate 51 and assumes the first posture.

Then, the magnetic flux generated from the N pole of the rotor magnet 17 flows into the one end 31 of the magnetic first yoke 23 that passes through the air gap, passes through the first yoke 23, and passes through the first yoke 23 to the other end of the first yoke 23. 33 and flows from the other end 33 of the first yoke 23 through the air gap to the south pole of the rotor magnet 17 so that a closed magnetic path is formed, and the magnetic force is generated between the rotor magnet 17 and the first yoke 23. Due to the suction force, the rotating body 7 is self-held in the first posture. In a state where the rotating body 7 is held in the first posture, it is possible to hold a state where the light of the optical path 35 passing through the optical fiber is reflected by the reflecting surface 21.

  Next, a state in which the rotating body 7 including the rotor magnet 17 is self-held in the second posture will be described with reference to a magnetic circuit development schematic diagram of FIG. It is assumed that the rotor magnet 17 is magnetized with two poles in the direction shown in the figure.

  One end 37 of the second yoke 27 is located near the north pole of the rotor magnet 17, and the other end 39 is located near the south pole of the rotor magnet 17. A concave portion such as a V-groove opened upward is formed on the upper end surface of the rotary shaft holding portion 43, and the rotary shaft 15 is mounted on the concave portion, so that the rotary shaft 15 is rotatably supported on the rotary holding portion 43. . Further, the rotating shaft 15 is pressed from above by the shaft pressing spring 13 and is prevented from coming out upward from the concave portion of the rotation holding portion 43.

  Furthermore, the other end 59 of the rotation restricting plate is disposed at a position where it can come into contact with the other end 55 of the rotating body of the mounting portion 45 constituting the rotating body 7. The other end 55 of the rotating body of the mounting portion 45 constituting the rotating body 7 comes into contact with the other end 59 of the rotation restricting plate 51 and assumes the second posture.

  The magnetic flux generated from the N pole of the rotor magnet 17 flows to the one end 37 of the second magnetic yoke 27 that is closest to the magnetic material through the gap, passes through the second yoke 27, and the other part of the second yoke 27. A closed magnetic path is formed by flowing toward the end 39 and from the other end 39 of the second yoke 27 through the air gap to the south pole of the rotor magnet 17, and between the rotor magnet 17 and the second yoke 27. When the magnetic attractive force is generated, the rotating body 7 is self-held in the second posture. In a state where the rotating body 7 is held in the second posture, it can be held in a state where the light of the optical path 35 passing through the optical fiber is transmitted. Thus, the optical switch function is provided by inserting / removing the shielding plate 19 into / from the gap between the pair of optical fibers arranged opposite to each other with the optical axis aligned in one direction of the rotating body 7. Further, the platinum resistance thermometer 69 and the Peltier element 61 constituting the thermal deformation means of the shielding plate 19 detect the temperature of the shielding plate 19 and adjust the temperature of the shielding plate 19, and the reflecting surface 21 of the shielding plate 19. By changing the angle formed by the optical axis of the optical fiber and the optical axis of the optical fiber, a variable optical attenuation function is provided.

  The thermal deformation means for providing this variable light attenuation function will be described with reference to the block diagram shown in FIG. The shielding plate 19 including the reflecting surface 21 is held by the attachment portion 45. A platinum resistance temperature detector 69 is attached to the attachment portion 45, and the posture of the rotating body is confirmed using a position detector (photo interrupter, photo reflector). A current is passed through the temperature resistor 69 to detect the resistance value R of the platinum resistance thermometer 69 and measure the temperature of the mounting portion 45. The temperature is compared with a reference temperature by a calculation unit 71 which is a temperature control means. When the reflected light is attenuated, a current is passed through the Peltier element 61 by the circuit 73 to change the temperature of the attachment portion 45. Then, the temperature of the mounting portion 45 is measured again, and the control is repeatedly performed up to a temperature at which a desired attenuation is obtained. Correlation data is prepared in advance for the relationship between attenuation and temperature.

  Next, a method for changing the angle between the optical axis of the reflecting surface 21 of the shielding plate 19 and the optical axis of the optical fiber to provide a variable light attenuation function will be described. First, a method for changing the angle of the reflecting surface 21 of the shielding plate 19 with respect to the rotating shaft 15 will be described with reference to the rotating body plan views of FIGS. 6A and 6B.

First, a state where no voltage is applied to the Peltier element 61 will be described with reference to FIG.
The shield plate 19, the mounting plate 45, and the Peltier element 61 are fixed to the rotary shaft 15. The shield plate 19 is fixed to the mounting surface 45b of the mounting portion 45 by bonding or the like, and the Peltier element 61 is bonded to the mounting surface 45a. It is fixed with etc. In this state, the reflecting surface 21 of the shielding plate 19 is fixed so as to be substantially perpendicular to the rotating shaft 15.

  A case where a voltage is applied to the Peltier element 61 and a current flows is described with reference to FIG. When an electric current is passed, the temperature of the bonding surface of the Peltier element 61 changes, and heat moves to the attachment portion 45 to change the temperature of the attachment portion 45. Then, the attaching part 45 raise | generates a thermal expansion change. Since the adhesion area of the Peltier element 61 is about 1 mm × 1 mm, the adhesion area adhered to the attachment surface 45a is small, while the adhesion area where the shielding plate 19 is adhered to the attachment surface 45b is large. is there. For this reason, the attachment surface 45b of the attachment portion 45 is restrained from expansion by adhesion fixing with a large area, and the attachment surface 45a is less constrained by expansion due to adhesion fixation of a small area, and therefore the attachment surface 45a and the attachment surface 45b As a result, a difference occurs in the amount of expansion, and the mounting surface 45a expands more than the mounting surface 45b. Therefore, the mounting portion 45 is deformed to be inclined toward the mounting surface 45b. Therefore, the shielding plate has an inclination θ with respect to the rotation shaft 15.

  Next, it will be described with reference to FIGS. 7A and 7B that light attenuation occurs due to the inclination of the reflecting surface. The first optical fiber 101 and the second optical fiber 103 are arranged in the same direction of the reflecting surface 21. The first collimator lens assembly 105 is provided at the tips of the first optical fiber 101 and the second optical fiber 103, and the parallel light emitted from the first optical fiber 101 is coupled to the second optical fiber 103. .

  In the state where the shielding plate 19 is inserted in the optical path of FIG. 7A, the parallel light emitted from the first optical fiber 101 is reflected by the reflecting surface 21 and is coupled to the second optical fiber. When the coupling state at this time is shown in FIG. 7B, since all the reflected light 85 is included in the incident light region 83 and the coupled light 87 is the reflected light 85, there is almost no loss. Thus, with the structure using the reflection system, the shielding plate 19 moves in a plane perpendicular to the optical axis, and the deformation amount of the inclination θ by the Peltier element is very small, so that the first collimator lens assembly 105 is reflected. Since it can be brought close to the surface 21, the distance can be 1 mm or less. As described above, since the space region in which the parallel light moves can be narrowed, the loss can be reduced, and the loss at this time can be reduced to 0.1 dB or less.

  Next, the state when a current is passed through the Peltier element will be described with reference to FIGS. 8A and 8B. The temperature of the mounting portion 45 changes, and the mounting portion 45 is deformed by thermal expansion. The shield plate 19 and the reflection surface 21 attached to the lens are deformed so as to be inclined at an angle θ with respect to the optical axis. In this state, the reflected light 85 reflected by the reflecting surface 21 is coupled at a position shifted from the incident light region 83 of the second optical fiber 103, and the coupled light 87 is a part of the reflected light 85. The amount of light incident on the optical fiber 103 is small, the loss value increases, and the light is attenuated. In this way, by controlling the tilt amount of the reflecting surface, the amount of coupled light 87 coupled to the optical fiber can be adjusted, and the amount of light attenuation can be controlled.

For example, when the material of the mounting portion 45 is duralumin, the coefficient of linear expansion is 23.6 × 10 ⁻⁶ / ° C., and the mounting portion shape is a convex shape as shown in FIG. When the reference temperature is 25 ° C. to 75 ° C., the deformation angle of the reflecting surface becomes 0.16 °, and the loss can be attenuated to about 3.5 dB. The temperature is controlled to the reference temperature ± 1 °, thereby the reflecting surface. The deformation angle accuracy can be 0.02 degrees or less. The amount of attenuation can be set by changing the material and shape of the mounting portion.

Here, the platinum resistance temperature detector, which is a temperature detection means for detecting the temperature, will be described. The platinum resistance temperature detector is a resistance temperature detector utilizing the property that the electrical resistance of the metal changes with temperature change. This is a sensor that uses platinum (pt) with good temperature characteristics and little change over time as a temperature measuring element. Therefore, the relationship between the resistance value and temperature is almost linear, and the resistance value increases as the temperature increases. However, the resistance value decreases as the temperature decreases. And it has the feature which is excellent in reproducibility.

  The measured resistance value R1 of the platinum resistance thermometer is a resistance value at a temperature when no current is supplied to the Peltier element, and a weak current is passed through the platinum resistance thermometer so that the resistance value of the platinum resistance thermometer is The resistance value of the platinum resistance thermometer can be known by measuring the potential difference in accordance with. Then, the resistance R with respect to the temperature at which a desired attenuation can be obtained is compared with the measured resistance value R1, and if the values are almost equal, the Peltier element is not energized. Here, when the resistance value R with respect to the temperature for obtaining the desired attenuation value and the measured resistance value R1 are different, it is necessary to change the temperature of the actuator device. Let By controlling the temperature in this way, the temperature can be in the range of ± 1 degree, and the light attenuation can be controlled with an accuracy within ± 0.2 dB.

  The principle of the Peltier element 61 will be described with reference to FIG. 9. A phenomenon in which heat absorption and heat generation other than Joule heat is generated at the joint portion by electrically connecting two dissimilar metals or semiconductors in series and flowing a direct current. This is called the Peltier effect. When the P-type thermoelectric semiconductor 77 and the N-type thermoelectric semiconductor 79 are joined by the upper electrode 81 and a direct current is passed from the N-type thermoelectric semiconductor 79, heat is transferred from the upper joint surface 81a to the lower joint surface 82a. At this time, if sufficient heat radiation is performed from the lower electrode 82, an endothermic action can be continuously obtained in the upper electrode 81. Conversely, when a direct current is passed from the P-type thermoelectric semiconductor 77, heat is transferred from the lower joint surface 82a to the upper joint surface 81a, and an endothermic action can be continuously obtained at the lower electrode 82.

  In addition, the amount of heat absorption can be changed by changing the magnitude of the flowing current. Peltier elements are characterized by switching the heat absorption surface (low temperature side) and the heat dissipation surface (high temperature side) by reversing the direction of the current, and controlling the magnitude of the current (voltage). Temperature control is possible. In addition, it has the characteristics of good temperature response, small size, light weight, no vibration, and no noise.

  Next, the force that acts on the rotating body 7 when the rotating body 7 moves from the first position to the second position will be described with reference to FIG.

  When the rotator 7 is held in the first position as shown in FIG. 3, a current is passed through the first exciting coil 25 wound around the first yoke 23 to generate the magnetic flux φ. One end 31 of the first yoke 23 is excited to the N pole and the other end 33 is excited to the S pole. Then, a repulsive force FN is generated between the N pole at one end 31 of the first yoke 23 and the N pole of the rotor magnet 17. At the same time, a repulsive force FS is generated between the S pole of the other end 33 of the first yoke 23 and the S pole of the rotor magnet 17. These repulsive forces FS and FN can rotate the rotating body 7 including the rotor magnet 17 around the rotating shaft 15 in the clockwise direction to move the rotating body 7 from the first position to the second position. .

  The rotation of the rotating body 7 in the clockwise direction is restricted by the other end 55 of the rotating body of the mounting portion 45 constituting the rotating body 7 coming into contact with the other end 59 of the rotation restricting plate 51. In order for the rotating body 7 to move stably from the first posture to the second posture, it is necessary to continue the energized state for a sufficient time. For example, when the time to move from the first posture to the second posture is about 5 msec, the rotating body 7 can be stably moved from the first posture to the second posture by setting the energization time to 20 msec. It becomes possible.

Next, the force that acts on the rotating body 7 when the rotating body 7 is moved from the second position to the first position will be described with reference to FIG. When the rotating body 7 is held in the second posture as shown in FIG. 9, a current is passed through the second exciting coil 29 wound around the second yoke 27 to generate the magnetic flux φ. One end 37 of the second yoke 27 is excited to the N pole and the other end 39 is excited to the S pole. Then, a repulsive force FN is generated between the N pole at one end 37 of the second yoke 27 and the N pole of the rotor magnet 17. At the same time, a repulsive force FS is generated between the S pole of the other end 39 of the second yoke 27 and the S pole of the rotor magnet 17. These repulsive forces FS and FN rotate the rotating body 7 including the rotor magnet 17 in the counterclockwise direction around the rotating shaft 15 so that the rotating body 7 changes from the second position to the first position as shown in FIG. Can be moved toward.

  The rotation of the rotating body 7 in the counterclockwise direction is restricted when one end 53 of the rotating body of the mounting portion 45 constituting the rotating body 7 comes into contact with one end 57 of the rotation restricting plate 51. In order to stably move the rotating body 7 from the second posture to the first posture, it is necessary to energize the second exciting coil 29 for a sufficient time. For example, when the time for moving from the second posture to the first posture is about 5 msec, the rotating body 7 can be stably moved from the second posture to the first posture by setting the energization time to 20 msec. It becomes possible.

  In addition, the actuator device of the present invention can switch various functions by rotating the rotating body 7. Specifically, the shielding plate 19 is disposed on the rotating body 7 itself or a driven body that rotates together with the rotating body 7, thereby rotating the rotating body 7 between the first position and the second position to switch the rotating body 7. Can function as.

  The material of the rotor magnet 17 can be a rare earth magnet of SmCo or NdFeB, and is magnetized in two poles in a direction perpendicular to the axial direction of the rotating shaft 15 (magnetization direction in FIG. 8). Further, the rotor magnet 17 can be made close to the first yoke 23 and the second yoke 27 so that a closed magnetic path between the first yoke 23 and the second yoke 27 can be formed. Any shape can be used.

  Further, the shielding plate 19 is manufactured by processing the outer shape of a plate material having a smooth surface such as glass or ceramic, and a material having high uniform reflectance is vapor deposited or plated on the front and back surfaces or a dielectric multilayer film is formed. Then, the reflecting surface 21 having a function as a reflecting film can be formed.

  Furthermore, since the rotating body 7 of the actuator device of the present invention can have a rotationally symmetric shape, it is easy to make the center of gravity of the rotating body 7 and the center of gravity of the rotating shaft 15 substantially coincide. In this way, by making the position of the center of gravity of the rotating body 7 substantially coincide, it is possible to minimize the influence on the actuator device against an external impact. Here, “substantially coincidence” means that when the actuator portion receives an impact, the influence on the switch operation is within an allowable range due to a moment or the like caused by a deviation between the center of gravity of the rotating body 7 and the center of gravity of the rotating shaft 15 Means degree.

  Further, a coating process and a plating process for reducing wear may be performed on the thrust shaft both ends in the thrust direction, the portion in contact with the rotation shaft holding portion 43, and the portion in contact with the shaft pressing spring 13. In this case, since there is no need to use lubricating oil, it is possible to eliminate a reliability lowering factor such as a decrease in reflectance caused by an oil film adhering to the reflecting surface 21 or the like.

  Further, the surface of the mating member that contacts the rotating shaft 15 may be subjected to a coating process or a plating process for reducing wear.

Further, the rotary shaft 15 is held in the radial direction and the thrust direction by the rotary shaft holding portion 43, the shaft pressing spring 13, and the thrust spring 49. This holding can take a bearing structure with little frictional force. Therefore, in the actuator device of the present invention, the rotation angle associated with the switch operation is limited to the minimum necessary, and the sliding part can be only a contact in a minute range of two places in the radial direction and two places in the thrust direction. It is possible to reduce a load caused by friction generated when the actuator device of the present invention is driven. Moreover, the frictional load during rotation is generated as a load torque obtained by multiplying the radial frictional force by the radius of the rotation shaft. However, since the rotation radius can be made sufficiently small, the rotating body 7 can be rotated with a small torque. it can.

  Next, Example 2 will be described with reference to the flowchart of FIG. The difference from the first embodiment is that a reflected light amount detection mechanism is provided.

  When the rotating body is in reflection mode, the reflected light is monitored by using a method such as partially splitting the reflected light with a beam splitter filter and detecting the branched light with a monitor diode. If the difference between the measured light amount P1 and the target light amount P0 when the desired light amount P1 is not 0.2 dB, it is determined that the inclination of the reflecting surface is not appropriate, the thermal expansion of the mounting portion is controlled, and the reflection is reflected. The temperature is controlled so that the inclination of the surface is appropriate.

  At this time, first, the temperature of the mounting portion is changed to the high temperature side by the Peltier element. Then, the measured light quantity P2 at this time is compared with the target light quantity P0, and if the measured light quantity P1 is closer to the desired light quantity, it is determined that there is no problem with the sign of the current flowing through the Peltier element. Repeat until the difference is within 0.1 dB. Further, when the measured light amount P2 is larger than the measured light amount P1, a difference in the light amount is determined to determine that the direction of the current flowing through the Peltier element is reverse, and a reverse current is passed. In this way, the control is repeated until the target light amount P0 and the measured light amount P1 are within 0.2 dB.

  Next, Example 3 will be described with reference to FIG. The difference from the first embodiment is that the Peltier element is arranged on the rotation restricting plate.

  FIG. 13 is a cross-sectional view of the vicinity of the rotor magnet in the first posture when the actuator device of the present invention is used as an optical switch, and illustrates the rotating shaft holding portion 43 and the shaft pressing spring 13 in an overlapping manner. It is assumed that the rotor magnet 17 is magnetized in two poles in the directions indicated by the N pole and S pole in FIG.

  The first yoke one end 31 is located near the north pole of the rotor magnet 17, and the first yoke other end 33 is located near the south pole of the rotor magnet 17. The rotating shaft 15 is supported and held rotatably by being sandwiched between the rotating shaft holding portion 43 and the shaft pressing spring 13. The one end 53 of the rotating body of the attachment portion 45 is in contact with the one end 57 of the rotation restricting plate of the rotation restricting plate 51 to obtain the first posture.

  The Peltier element 61 is located in the vicinity of one end 57 of the rotation restricting plate, and thus, the temperature change of the Peltier element 61 can be transmitted to the one end 53 of the rotating body of the mounting portion 45 that contacts the one end 57 of the rotation restricting plate. Therefore, the mounting portion 45 can be thermally expanded and contracted, and the inclination of the reflecting surface 21 can be optimized so that the light attenuation amount becomes a desired attenuation amount. In addition, there is a feature that wiring is easy, disconnection does not occur because the wiring portion is not movable, and further, there is no load fluctuation due to deflection of the wiring, so that the current consumption value is stable.

Next, Example 4 will be described with reference to FIG. FIG. 14 is a plan view of the rotating body of the actuator device of the present invention. The difference from the first embodiment is that two attachment portions are arranged so as to sandwich the heat radiation surface 65 and the heat absorption surface 67 of the Peltier element 61, and the shielding plate is held by being sandwiched between the attachment portions.

  When the shielding plate 19, the attachment portion 45 c, the attachment portion 45 d and the rotor magnet 17 are inserted and fixed to the rotating shaft 15, and the Peltier element 61 has a heat dissipation surface 65 and a heat absorption surface 67 in the axial direction, the heat dissipation surface 65 One attachment portion 45c is in contact with the heat absorption surface 67, the other attachment portion 45d is in contact with the heat absorbing surface 67, and the shielding plate 19 is configured by being sandwiched between the one attachment portion 45c and the other attachment portion 45d. ing. Due to this, the heat of the heat radiating surface 65 of the Peltier element 61 raises the temperature of one mounting portion 45c and the one mounting portion 45c expands. At this time, the temperature of the other mounting portion 45d is absorbed by the heat absorption of the heat absorbing surface 67. Decreases and the other mounting portion 45d contracts. Therefore, since one side of the shielding plate 19 expands and the other side shrinks, a larger material deformation can be obtained, the inclination angle of the shielding plate 19 can be increased, and a wider attenuation can be achieved. It is.

It is a structure top view for demonstrating the structural example which applied the actuator apparatus in Example 1 of this invention to the optical switch. It is a perspective view for demonstrating the structural example which applied the actuator apparatus in Example 1 of this invention to the optical switch. It is a magnetic circuit expansion | deployment schematic diagram of the actuator part for demonstrating the 1st attitude | position of the actuator apparatus in Example 1 of this invention. It is a magnetic circuit expansion | deployment schematic diagram of the actuator part for demonstrating the 2nd attitude | position of the actuator apparatus in Example 1 of this invention. It is a flowchart explaining the temperature control of the actuator apparatus in Example 1 of this invention. It is a figure for demonstrating the relationship between the rotating shaft of the actuator apparatus in Example 1 of this invention, and a reflective surface. It is a figure for demonstrating the shape deformation | transformation of the attaching part at the time of the thermal deformation of the actuator apparatus in Example 1 of this invention. It is a figure for demonstrating the shape deformation | transformation of the attaching part at the normal time of the actuator apparatus in Example 1 of this invention. It is a figure which shows the positional relationship of the coupling area at the normal time of the actuator apparatus in Example 1 of this invention, and reflected light. It is a figure for demonstrating the shape deformation | transformation of the attaching part at the time of optical attenuation | damping of the actuator apparatus in Example 1 of this invention. It is a figure which shows the positional relationship of the coupling area at the time of optical attenuation | damping of the actuator apparatus in Example 1 of this invention, and reflected light. It is a figure explaining a Peltier device. It is a schematic diagram for demonstrating the force which acts when it moves to the 2nd attitude | position from the 1st attitude | position of the actuator apparatus in Example 1 of this invention. It is a schematic diagram for demonstrating the force which acts when it moves to the 1st attitude | position from the 2nd attitude | position of the actuator apparatus in Example 1 of this invention. It is a flowchart explaining the temperature control of the actuator apparatus in Example 2 of this invention. It is structural sectional drawing which shows the actuator apparatus in Example 3 of this invention. It is a rotary body top view which shows the actuator apparatus in Example 4 of this invention. It is a structure top view for demonstrating the conventional variable optical attenuator. It is a figure for demonstrating the conventional variable optical attenuator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Housing | casing 3 Optical fiber part 5 Actuator part 7 Rotating body 9 1st magnetic circuit part 11 2nd magnetic circuit part 13 Axial pressing spring 15 Rotating shaft 17 Rotor magnet 19 Shielding plate 21 Reflecting surface 23 1st yoke 25 1st Excitation coil 27 second yoke 29 second excitation coil 31 first yoke one end 33 first yoke other end 35 optical path 37 second yoke one end 39 second yoke other end 41 bottom surface 43 rotating shaft Holding portion 45 Mounting portion 47 Block 49 Thrust spring 51 Rotation restricting plate 53 One end of rotating member 55 Other end of rotating member 57 One end of rotation restricting plate 59 Other end of rotation restricting plate 61 Peltier element 63 Mounting surface 65 Heat radiation surface 67 Heat absorption surface 69 Platinum resistance thermometer 71 Calculation unit 73 Circuit 75 Position detector 77 P-type thermoelectric semiconductor 79 N-type thermoelectric semiconductor 81 Upper electrode 8 1a Upper joint surface 82 Lower electrode 82a Lower joint surface 83 Incident light region 85 Reflected light 87 Coupled light

Claims (7)

A rotating body having a rotating shaft, a mounting portion fixed to the rotating shaft, a shielding plate fixed to the mounting portion and having a reflecting surface, a rotating shaft holding portion that rotatably supports the rotating shaft, and the rotation A rotation restricting plate for restricting the rotational position of the body, and a first posture in which one end of the rotating member is in contact with one end of the rotation restricting plate, or the other end of the rotating member is the other end of the rotation restricting plate. Each of the contacted second postures includes a posture holding means for self-holding, a driving means for moving the rotating body, and a thermal deformation means for the shielding plate, and aligns the optical axis in one direction of the rotating body. An actuator device that is provided with an optical switch function by inserting and removing the shielding plate into a gap between a pair of optical fibers disposed opposite to each other,
The thermal deformation means has a heat transfer means for raising or lowering the temperature of the shielding plate, and a temperature control means for controlling the heat transfer means, and adjusting the temperature of the shielding plate, thereby adjusting the shielding plate. An actuator device characterized in that a variable light attenuation function is provided by changing the angle formed by the optical axis of the reflecting surface of the optical fiber and the optical axis of the optical fiber.   The thermal deformation means includes temperature detection means for detecting the temperature of the shielding plate, and the temperature control means is configured to control the heat transfer means based on a detection result of the temperature detection means. The actuator device according to claim 1.   The thermal deformation unit includes a light amount detection unit that detects a light amount reflected by a reflection surface of the shielding plate, and the temperature control unit is configured to control the heat transfer unit based on a detection result of the light amount detection unit. The actuator device according to claim 1, wherein the actuator device is provided.   By providing the rotation restricting plate on a side opposite to the rotation holding member with respect to the rotation axis of the rotating body, the driving means is operated to connect one end or the other end of the rotating body to one end of the rotation restricting plate or When contacting the other end, a force is applied to the rotating shaft in a direction in which the rotating shaft is pressed toward the rotation holding portion, and the heat transfer means is disposed on the rotation restricting plate. The actuator device according to claim 1.   The actuator device according to claim 1, wherein the heat transfer means is disposed in the mounting portion.   2. The actuator device according to claim 1, wherein the center of gravity of the rotating shaft substantially coincides with the center of gravity of the rotating body. The posture holding means includes a rotor magnet constituting a part of the rotating body, and first and second yokes extending from near one end of the rotor magnet to near the other end of the rotor magnet, When in the first posture or the second posture, a closed magnetic path is formed between the rotor magnet and the first or second yoke, so that the rotating body is moved to the first posture or the second posture. The actuator device according to claim 1, wherein the actuator device is held in two postures.

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