JP2005227553A - Device and method of connecting optical waveguide and optical element, and optical module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To optically connect two or more light emitting elements and an optical waveguide with high precision to improve the connection efficiency, and also to reduce the dimensions of an optical connection mechanism by increasing the mounting density. <P>SOLUTION: The optical connector 1 has a light emitting element 14 (or a light receiving element 15) to receive the light transmitted through an optical fiber or an optical waveguide to supply the light to an optical fiber or an optical waveguide, a moving mirror 20 capable of changing the optical direction in a predetermined direction between an optical element and an optical fiber or an optical waveguide, and an angle setting/fixing mechanism to generate power to change the direction of the moving mirror. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an apparatus for connecting an optical element and an optical fiber or an optical waveguide that can be used for optical communication or measurement, a connection method thereof, and an optical module.

  Optical waveguides used for optical communication or measurement, for example, when optical fibers and light-emitting elements or optical fibers and light-receiving elements are connected, optical coupling efficiency is high (coupling loss is small), and the size of the connecting elements is It is required to be small and to reduce the time required for assembly and adjustment, that is, the assembly cost. Today, with the increase in the amount of information to be transmitted, it is desired that a plurality of channels can be connected and the size is small.

  For example, when connecting an optical waveguide and a light emitting element or a light receiving element, an example of increasing the density by changing the traveling direction of light at a right angle by a mirror surface has been proposed (see, for example, Patent Document 1).

  Moreover, when connecting a surface emitting element and an optical fiber, the example which changes the advancing direction of light at a right angle by a mirror surface, and raises coupling efficiency using a lens is proposed (for example, refer patent document 2).

  Furthermore, an example of using a self-alignment function of solder or a V-groove provided on a substrate (silicon) for positioning an optical element or an optical fiber has been proposed (see, for example, Patent Document 3).

An example of using a movable micromirror when connecting a single laser chip (light emitting element) and one optical fiber has been reported (Non-Patent Document 1).
Japanese Patent No. 3337629 Japanese Patent No. 31788781 JP 2002-169104 A IEICE Technical Report Vol. 102, no. 284, pp. 49-54, 2002 The Institute of Electronics, Information and Communication Engineers

  However, in the proposal disclosed in Patent Document 1, a high positional accuracy is required for the positional accuracy of the mirror surface provided between the optical waveguide and the light emitting element or between the optical waveguide and the light receiving element. There is a problem that costs increase.

  Further, the proposal described in Patent Document 2 has a problem that the cost is further increased because the positional accuracy of the lens is required in addition to the problems of Patent Document 1. In addition, although the positional accuracy of a lens is ensured by using an aligner, the time required for assembly is increased.

  Furthermore, in the proposal of Patent Document 3, the time (and cost) required for assembly can be reduced. However, the positional accuracy of the optical fiber and the optical element depends on the characteristics of the solder or the shape and accuracy of the groove. Assembly with higher accuracy than characteristic or shape accuracy is difficult.

  On the other hand, according to the report of Non-Patent Document 1, since the movable mechanism for moving the micromirror is complicated and large, it is necessary to mount two or more light emitting elements and two or more optical fibers at a high mounting density. There is a demand for downsizing the mounting method and the movable mechanism. Note that Non-Patent Document 1 does not show a method of fixing the movable mirror.

  The object of the present invention is to increase the optical coupling efficiency by connecting the light connections between a plurality of light emitting elements and corresponding optical waveguides with high accuracy, and to increase the mounting density and reduce the size of the optical connection mechanism. It is.

  The present invention is provided with a plurality of optical waveguides capable of propagating light, a plurality of light emitting elements capable of outputting light to be propagated through the optical waveguide, or a plurality of light receiving elements capable of receiving light propagating through the optical waveguide. An optical element including at least one of the light receiving elements, and provided at a predetermined position between the optical element and the optical waveguide, and corresponds to an arbitrary one of the optical elements and the arbitrary one optical element. Any one of the optical waveguides can be optically connected, and a predetermined number of the optical elements and a predetermined number of the optical waveguides corresponding to the respective optical elements, An optical module having an optical connection mechanism capable of optically connecting in a lump is provided.

  In other words, according to the above-described optical module, the optical waveguide and the light emitting element or the light receiving element are connected by adjusting the light intensity, thereby being defined by the arbitrary light emitting element and the optical waveguide or the arbitrary optical waveguide and the light receiving element. Variation in light intensity between channels can be reduced.

  In addition, the present invention bends the optical path at a predetermined angle between the optical element and the optical waveguide for each channel defined by an arbitrary optical element and the optical waveguide corresponding to the optical element. By making it possible to set any two biaxial directions orthogonal to each other, the light intensity of light input from the optical element to the optical waveguide or the light intensity of light output from the optical waveguide to the optical element can be set for each channel. Alternatively, the optical connection method is characterized in that a plurality of channels can be adjusted collectively.

  That is, according to the optical connection method described above, by connecting an arbitrary optical element and an optical waveguide or an optical fiber while adjusting the light intensity, light for each channel defined by the arbitrary optical element and the optical waveguide is obtained. The strength can be set almost constant.

  Further, the present invention is provided in the optical path from the light emitting element to the optical waveguide or from the optical waveguide to the light receiving element, and simultaneously bends the optical path at a predetermined angle, and at the same time, the light emitting element and the optical waveguide or the optical waveguide and the light receiving element. Provided is an optical module comprising a plurality of optical connection devices that can adjust light intensity between light guided between them and can be fixed in a predetermined state where desired light intensity can be obtained. is there.

  That is, according to the above-described optical module, the optical module is provided in the optical path from the light emitting element to the optical waveguide, or from the optical waveguide to the light receiving element, and at the same time the optical path is bent at a predetermined angle, The light intensity between the light guided between the light receiving element and the light receiving element can be adjusted, and the intensity of the light connected between the light emitting element and the light waveguide or between the light waveguide and the light receiving element can be adjusted. Can be set independently. Thereby, the light intensity for each channel can be set substantially uniformly.

  Further, the present invention bends the optical path of light guided from the light emitting element to the optical waveguide or from the optical waveguide to the light receiving element at a predetermined angle and can be displaced to an arbitrary angle. Or it is the optical connection method which makes it possible to install the light intensity between the light guided between the optical waveguide and the light receiving element at a desired light intensity.

  That is, according to the optical connection method described above, the optical path of light guided from the light emitting element to the optical waveguide or from the optical waveguide to the light receiving element is bent at a predetermined angle and can be displaced to an arbitrary angle. Therefore, the light intensity for each channel can be set almost uniformly.

  The present invention also provides a transmission path through which light is transmitted, an optical element that receives light transmitted through the transmission path, or supplies light to the transmission path, and between the optical element and the transmission path. And a reflector driving mechanism that generates a driving force for changing the direction of the reflector, and is provided with a reflector that can change the direction of the light in a predetermined direction. To do.

  That is, according to the above-described optical connection device, the reflector that is provided between the optical element and the transmission path and can change the direction of the light in a predetermined direction, and the reflection that generates the driving force to change the direction of the reflector. The intensity of the light connected to each other can be set independently by the body drive mechanism. Thereby, the light intensity for each channel can be set substantially uniformly.

  Further, the present invention provides a substrate, a plurality of optical transmission media arranged on the substrate at a predetermined interval and capable of transmitting light, and the plurality of optical transmission media in a direction orthogonal to a direction in which the plurality of optical transmission media extend. The light transmission medium is disposed in the same number as the light transmission medium, and the light transmission member outputs light to be transmitted by the light transmission medium, and is disposed in the optical path between the light transmission medium and the light emission member. An optical coupling element that reflects the light of the light and inputs the light into the optical transmission medium, and the direction of the optical coupling element, the amount of light (light intensity) input from the light emitting member to the optical transmission medium is a predetermined amount The present invention provides an optical connecting device characterized by having a drive mechanism that is set in an arbitrary direction so as to achieve (light intensity).

  That is, according to the above-described optical connection device, the same number of optical transmission media are arranged in the direction orthogonal to the direction in which the plurality of optical transmission media are arranged at predetermined intervals and the plurality of optical transmission media extend, and the optical transmission media are transmitted. A light emitting member that outputs light to be transmitted, an optical coupling element that is disposed in each optical path between the light transmission medium and the light emitting member, reflects light from each light emitting member and inputs the light to the optical transmission medium, and light With a drive mechanism that sets the direction of the coupling element in an arbitrary direction so that the light intensity from which light from the light emitting member is input to the optical transmission medium becomes a predetermined light intensity, the multi-channel optical transmission medium and the light emission When the members are coupled by the optical coupling element, the light intensity for each channel can be set substantially uniformly.

  Further, the present invention provides a substrate, a plurality of optical transmission media arranged on the substrate at a predetermined interval and capable of transmitting light, and the plurality of optical transmission media in a direction orthogonal to a direction in which the plurality of optical transmission media extend. The light receiving medium is disposed in the same number as the optical transmission medium, and is disposed in the optical path between the optical transmission medium and the light receiving member, and the light receiving member to which light transmitted by the optical transmission medium is input. The optical coupling element that inputs light from the optical transmission medium, the direction of the optical coupling element, and the amount of light (light intensity) input from the optical transmission medium to the light receiving element is a predetermined amount (light And an optical connection device characterized by having a drive mechanism that is set in an arbitrary direction so that the strength becomes (strength).

  That is, according to the above-described optical connection device, the same number of optical transmission media arranged in a predetermined interval and the same number as the optical transmission media are arranged in a direction orthogonal to the direction in which the plurality of optical transmission media extend, and transmitted by the optical transmission media. Light that is input to the light receiving element, and light that is arranged in each optical path between the light transmission medium and the light receiving element, and reflects and guides the light from each optical transmission medium toward the corresponding light receiving element Multi-channel optical transmission by a coupling element and a drive mechanism that sets the direction of the optical coupling element in an arbitrary direction so that a predetermined light intensity is obtained when light from the optical transmission medium is input to the light receiving element. When the medium and the light receiving element are coupled by the optical coupling element, the light intensity for each channel can be set substantially uniformly.

  Further, the present invention provides the same number of optical transmission media as the optical transmission media from the direction orthogonal to the direction in which the optical transmission media extend to the (multiple) optical transmission media capable of transmitting a plurality of lights arranged on the substrate at predetermined intervals. A plurality of light emitting members that output light to be transmitted are arranged, and an optical coupling element that reflects light from the light emitting members and inputs the light to the optical transmission medium is provided in an optical path between the light transmission medium and the light emitting member The optical coupling element is driven by a drive mechanism that sets the direction of the optical coupling element in a predetermined direction so that the amount (light intensity) of light from the light emitting member input to the optical transmission medium becomes a predetermined amount (light intensity). This is an optical connection method capable of increasing the coupling efficiency, characterized by setting the direction of.

  That is, according to the optical connection method described above, the same number of optical transmission media are arranged in a direction orthogonal to the direction in which a plurality of optical transmission media are arranged at predetermined intervals and the plurality of optical transmission media extend, and the optical transmission media are transmitted. A light emitting member that outputs light to be transmitted, an optical coupling element that is disposed in each optical path between the light transmission medium and the light emitting member, reflects light from each light emitting member and inputs the light to the optical transmission medium, and light With a drive mechanism that sets the direction of the coupling element in an arbitrary direction so that the light intensity from which light from the light emitting member is input to the optical transmission medium becomes a predetermined light intensity, the multi-channel optical transmission medium and the light emission When the members are coupled by the optical coupling element, the light intensity for each channel can be set substantially uniformly. The light intensity for each channel can be set almost uniformly.

  The present invention also provides an optical transmission medium from a direction orthogonal to the direction in which the optical transmission medium extends so that light from the (multiple) optical transmission media capable of transmitting a plurality of lights arranged on the substrate at predetermined intervals can be input. A plurality of light receiving members that receive the light transmitted by the same number of optical transmission media as the number of the optical transmission media, and reflect the light from the optical transmission media to the optical path between the optical transmission media and the light receiving member and input it to the light receiving members Driving to set the direction of the optical coupling element in a predetermined direction so that the amount (light intensity) of light from the optical transmission medium input to the light receiving member becomes a predetermined amount (light intensity) This is an optical connection method capable of increasing the coupling efficiency, characterized in that the orientation of the optical coupling element is set by a mechanism.

  That is, according to the optical connection method described above, the same number of optical transmission media arranged in a predetermined interval and the same number as the optical transmission media are arranged in a direction orthogonal to the direction in which the plurality of optical transmission media extend, and transmitted by the optical transmission media. Light that is input to the light receiving element, and light that is arranged in each optical path between the light transmission medium and the light receiving element, and reflects and guides the light from each optical transmission medium toward the corresponding light receiving element Multi-channel optical transmission by a coupling element and a drive mechanism that sets the direction of the optical coupling element in an arbitrary direction so that a predetermined light intensity is obtained when light from the optical transmission medium is input to the light receiving element. When the medium and the light receiving element are coupled by the optical coupling element, the light intensity for each channel can be set substantially uniformly. The light intensity for each channel can be set almost uniformly.

  According to the present invention, in a multi-channel optical module, after arranging an optical waveguide or an optical fiber and a light emitting element or a light receiving element, it is possible to adjust (align) each channel so that the connection loss is minimized. Yes, the adjustment (assembly) cost can be greatly reduced.

  In addition, according to the present invention, in a multi-channel optical module, the degree of coupling between the optical element and the optical waveguide can be set for each individual channel, which often occurs when an arrayed unit is used. It is possible to prevent a large connection loss from occurring only in a specific channel.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  1 and 2 are schematic views for explaining an example of an optical module to which the embodiment of the present invention is applied. 3 shows an optical element (VCSEL element) when the optical module shown in FIGS. 1 and 2 is used to connect a light emitting element and an optical fiber, and FIG. 4 shows an optical module in which the optical module is a light receiving element and an optical fiber. Optical elements (PD units) when used for connection with a fiber are shown.

  As shown in FIGS. 1 and 2, an optical module 1 that connects a light emitting element or a light receiving element and an optical waveguide, for example, an optical fiber, includes a first substrate 11 and a substrate 11 made of, for example, silicon (Si) or glass. A second substrate 12 is further stacked thereon. Note that the substrates 11 and 12 may be integrally formed.

  At a predetermined position of the second substrate 12, for example, a groove portion 12 a formed so that a plurality of waveguide members, which are optical fibers, can be arranged, and a concave portion 12 b formed in a direction orthogonal to the groove portion 12 a are formed. The groove 12a is formed, for example, in a “V” -shaped cross section so that the width decreases as the distance from the first substrate 11 side, that is, the surface in the thickness direction increases. The groove 12a is formed by, for example, anisotropic wet etching, dry etching, or dicing (machining).

  In the concave portion 12b of the second substrate 12, a plurality of movable mirrors 20 described below, which are formed so that the angle of the reflecting surface can be changed independently, are provided in the individual groove portions 12a, that is, the optical fibers attached to the groove portions 12a. Correspondingly, it is provided.

  A light emitting element (VCSEL element) that outputs light toward the movable mirror 20 at a predetermined position on the second substrate 12 and is defined by the groove 12a, the concave portion 12b, and the movable mirror 20. Alternatively, a plurality of stat bumps 13 used for setting a light receiving element (PD unit) that receives light from the movable mirror 20 is provided. The optical connecting portion 12-1 is a position where light can be incident on the movable mirror 20 positioned in the concave portion 12b or the light from the mirror 20 can be received. The stat bump 13 is formed of, for example, solder, gold (Au), or the like by a method such as wire bonding, coating, or melt reflow.

  For example, a VCSEL element 14 in which a plurality of (arbitrary number) of light emitting elements are integrally formed as shown in FIG. 3, or a plurality of (arbitrary number) of light receiving elements as shown in FIG. The PD unit 15 in which the elements are integrally formed is fixed. In each element, a portion in contact with the stat bump 13 is formed in the same process as the electrode or the electrode, for example, and the pad 14-1 or the electrode (pad) 15 insulated in the peripheral and depth directions. -1.

  Further, the VCSEL element (light emitting element) 14 or the PD unit (light receiving element) 15 is mounted on the stat bump 13 by, for example, flip chip (may be accompanied by expression of bonding or mounting).

  The movable mirror 20 will be described later on the support 12-2 provided in the recess 12b of the second substrate 12, for example, with an angle adjustment / fixing mechanism as described later with reference to FIGS. A number corresponding to the number of grooves 12a, that is, the number of channels, is arranged via the mirror support mechanism.

  FIG. 5 explains the influence of the angle when the light from each light emitting part of the VCSEL element 14 described with reference to FIG. 3 is reflected by each movable mirror 20. Note that the case where light transmitted through an optical waveguide such as an optical fiber is supplied to the PD unit 15 described with reference to FIG.

For example, when the VCSEL 14 has four channels and the directions of light output from the light emitting units 14a to 14d are α, β, γ, and δ, the corresponding movable mirror (for convenience, it is attached to each mirror 20). The angles of the letters α, β, γ, and δ) are slightly changed in any direction so that the respective lights are aligned on the corresponding optical axes O _{1 to} O ₄ .

  Needless to say, the angles of the individual mirrors 20α, 20β, 20γ, and 20δ are independently changed in the biaxial direction.

  FIG. 6 illustrates an example of an angle adjustment / fixation mechanism that can adjust / fix the angle of each movable mirror 20.

  As shown in FIG. 6, the angle adjustment / fixing mechanism 30 is connected to the four corners of the mirror plate 31 and the mirror plate 31 that are formed in a substantially rectangular shape to which the mirror 20 is fixed, and each side of the mirror plate 31. First to fourth deforming arms (flexures) 31a to 31d extending substantially in parallel to each other, and first to second parallel to the surface direction of the mirror plate 31 and arranged at a predetermined interval with respect to the mirror plate 31. 4 drive electrodes 32a to 32d.

  The mirror 20 may be a mirror formed separately on the mirror plate 31, for example, but a predetermined region on the surface of the mirror plate 31 is coated with a metal having a reflectivity larger than a predetermined size. Thus, the mirror plate 31 may be formed integrally. Further, when the material of the mirror plate 31 is a material capable of reflecting light, the mirror 20 may only have improved reflectivity (of the mirror plate 31), for example, by electrolytic polishing or the like.

  Each of the drive electrodes 32a to 32d provides an electrostatic force between the drive electrode 32a to 32d and the mirror plate 31 according to the magnitude of the energization amount (applied voltage or supplied current). Therefore, for example, in an optical module that inputs light toward an optical fiber, a light amount monitor device (not shown) is provided on the output end side of the optical fiber, and the voltage supplied to any electrode so that the monitored light amount is maximized. Alternatively, the angle of the mirror 20 on the mirror plate 31 (or formed integrally with the mirror plate 31) is changed by setting the magnitude of the current. In addition, it cannot be overemphasized that the space | interval D of the mirror plate 31 and each electrode 32a-32d is changed by the deformation | transformation (deflection) of the flexures 31a-31d.

  In the following, although not shown, a photo-curing adhesive or the like is arranged in each mirror plate 31 or flexures 31a to 31d and electrodes 32a to 32d or the recess 12b of the second substrate 12, and a predetermined suitable for curing the adhesive. By irradiating light of a wavelength, the deformation amount of the flexure is maintained. That is, the angle of each mirror 20 is fixed to the adjusted angle.

  FIG. 7 illustrates another example of an angle adjusting / fixing mechanism that can adjust / fix the angle of the movable mirror 20.

  As shown in FIG. 7, the angle adjustment / fixing mechanism 40 is connected to the mirror plate 31 formed in a substantially rectangular shape to which the mirror 20 is fixed, and four sides of the mirror plate 31, and the (connected) mirror. First to fourth deformable arms (flexures) 41 a to 41 d extending in a direction substantially orthogonal to each side of the plate 31, parallel to the surface direction of the mirror plate 31, and to the mirror plate 31 First to fourth drive electrodes 42a to 42d arranged at a predetermined interval are included.

  The mirror 20 may be integrated with the mirror plate 31 or may be the mirror plate 31 itself as described above with reference to FIG.

  Each of the drive electrodes 42a to 42d provides an electrostatic force between the drive electrode 42a to 42d and the mirror plate 31 according to the magnitude of the energization amount (applied voltage or supplied current). Accordingly, as described with reference to FIG. 6, the amount of voltage or current supplied to an arbitrary electrode is set so that the amount of light is monitored at the end of the optical fiber and the amount of light is maximized. The angle of 31 (ie mirror 20) is changed.

  Each of the flexures 41a to 41d is integrally formed with fixing portions 41-1 to 41-n formed of bimetal that is melted by supplying a predetermined amount of electric power. Further, current-carrying electrodes 43a to 43d are formed on the same surface as the drive electrodes 42a to 42d, for example, facing the individual bimetals 41-1 to 41-n.

  With this structure (that is, the energizing electrode and the bimetal), when the angle of each mirror plate 31 (that is, the mirror 20) is adjusted, predetermined power is supplied to the energizing electrodes 43a to 43d, thereby making contact with the energizing electrode. The bimetals (fixed portions) 41-1 to 41-n that are being used are melted. Therefore, the mirror plate 31 is fixed in a state where the deformation amount of each of the flexures 41a to 41d is maintained. That is, the angle of each mirror 20 is fixed to the adjusted angle.

  FIG. 8 illustrates another example of an angle adjusting / fixing mechanism capable of adjusting / fixing the angle of the movable mirror 20.

  As shown in FIG. 8, the angle adjustment / fixing mechanism 50 is connected to the mirror plate 31 formed in a substantially rectangular shape to which the mirror 20 is fixed, and four corners of the mirror plate 31, and each side of the mirror plate 31. And first to fourth actuators 51a to 51d extending substantially in parallel with each other.

  The mirror 20 may be integrated with the mirror plate 31 or may be the mirror plate 31 itself as described above with reference to FIG.

  Each of the actuators 51a to 51d includes a hot arm 51-1 that extends (thermally deforms) according to the amount of energization (applied voltage or supplied current), and hot arms on both sides of the hot arm 51-1. This is a microactuator provided with a fixed portion (cold arm) 51-2 connected to at least one point with 51-1. In other words, the mirror plate 31 is tilted in an arbitrary direction by extending the hot arm of the actuator to which power is supplied. Accordingly, as described with reference to FIG. 6, the amount of voltage or current supplied to an arbitrary actuator is set so that the amount of light is monitored at the end of the optical fiber and the amount of light is maximized. The angle of 31 (ie mirror 20) is changed.

  Further, according to the angle adjusting / fixing mechanism 50 shown in FIG. 8, for example, as shown in FIG. 8 (b), a pattern electrode in which a pattern (not shown) is given to the substrate 12 or an insulating layer (52) equivalent thereto. Is formed, and power can be supplied to the hot arms 51-1 of the individual actuators 51 a to 51 d through through holes or the like (not shown). Thereby, the mounting density can be increased when the number of channels is increased.

  In the following, although not shown, a photocurable adhesive or the like is disposed in each mirror plate 31 or actuator 51a to 51d and the recess 12b of the second substrate 12, and light of a predetermined wavelength suitable for curing the adhesive is irradiated. By doing so, the deformation amount of the flexure is maintained. That is, the angle of each mirror 20 is fixed to the adjusted angle.

  Note that the microactuator may be other than the well-known heating method using the hot arm 51-1 and the cold arm 51-2. Although not shown, the microactuator uses an electrostatic force acting between the comb-shaped electrodes and the electrodes. It may be an electrostatic type.

  FIG. 9 illustrates an example of the configuration of a mirror holding mechanism that holds the movable mirror 20 at a predetermined angle together with the mirror plate described with reference to FIGS. 6 to 8 and the operation thereof.

  As shown in FIG. 9A, the mirror holding mechanism 60 has a connection angle by heating the mirror support plate 61, the mirror support plate 61, and the substrate 12 formed in a substantially rectangular shape to which the mirror 20 is fixed. Can be slidable with respect to the back surface of the mirror support plate 61 and the solder balls 62 provided on the side in contact with the substrate 12 among the four sides of the mirror support plate 61 so that the mirror support plate 61 can be changed. An angle regulating member 63 whose contact position is changed by changing the angle between the plate 61 and the substrate 12 is included. A stopper 61a is provided at a predetermined position on the back surface of the mirror support plate 61 to limit the amount of change when the angle between the mirror support plate 61 and the substrate 12 is changed.

  The mirror 20 is fixed to the mirror support plate 61 via the angle adjusting / fixing mechanism 30, 40, or 50 described above with reference to FIGS. Therefore, the reflecting surface of the mirror 20 is directed toward the substrate 12 in FIG.

  The solder ball 62 has a well-known solder self-alignment function. Therefore, as schematically shown in FIG. 9B, the angle of the mirror support plate 61 is changed to the position of the stopper 61a by utilizing the change in the contact angle (wetting property) that occurs when the solder ball 62 is melted by heating. And the length of the angle regulating member 63 can be arbitrarily set. The angle between the mirror support plate 61 and the substrate 12 is set to 45 ° or 135 °, for example. As a material of the solder (solder ball 62), for example, Sn63Pb37, a lead tin eutectic solder having a melting point of 183 ° C. can be used.

  According to the method shown in FIG. 9, the angle of the mirror support plate 61 is set to a predetermined angle when the heat supplied to the solder balls 62 is stopped, so the second described with reference to FIG. The mechanism for holding the mirror 20 positioned in the recess 12b of the substrate 12 at a predetermined angle can be simplified. Further, the stopper and the angle regulating member can be omitted by controlling the size of the solder pads provided on the substrate 12 and the mirror support plate 61 and the amount of solder supplied (volume of the solder balls).

  FIG. 10 shows an example of the mirror controller used for setting the angle of the mirror plate shown in FIGS. 6 to 8, ie, the mirror used for optical coupling, and used for the operation of the mirror holding mechanism shown in FIG.

  The mirror control unit 70 is a photodetector 71 that detects light, that is, a laser beam, from the optical element 14 that is incident through the mirror 20 fixed to the mirror plate 31 (see FIGS. 6 to 8), and the photodetector 71. Control circuit 72 for setting the magnitude of the current or voltage to be supplied to the corresponding drive electrode in order to deform the flexure or hot arm (hereinafter abbreviated as drive system) of the mirror plate based on the output of The driving circuit 73 supplies a current or voltage having a magnitude set by 72 to the driving system. The driving circuit 73 is also connected with a heating device 80 for setting the angle of the mirror support portion 61 of the mirror holding mechanism 60 shown in FIG.

  In the mirror control unit 70, for example, the intensity of light guided to the photodetector 71 via an optical fiber is output by the photodetector 71. The photodetector 71 is integrated with, for example, an I / V converter (A / D converter) and the output thereof can be directly input to the control circuit 72.

  The output of the photodetector 71 input to the control circuit 72 is a mirror corresponding to the current or voltage supplied to the drive system being sequentially changed, for example, in accordance with a sequence held in advance as a farm of the control circuit 72. Associated with 20 angles. Hereinafter, based on the determination in the control circuit 72 or an external input (setting instruction) (not shown), for example, a predetermined current or voltage is supplied to the drive system so that the output of the photodetector 71 is maximized. For example, when there is a difference in the output of each channel, the current output from the drive circuit 73 so that the angle of the mirror of each channel can be changed so that the output of each channel is within a predetermined range. The control amount is instructed from the control circuit 72 so that the value or the voltage value becomes a predetermined magnitude.

  When the optical module 1 is assembled, the control circuit allows the mirror support plate 61 of the mirror holding mechanism to be optically connected from the drive circuit 73 to the optical path, that is, the optical element and the optical fiber (or optical waveguide). A predetermined thermal energy for heating the solder ball 62 used for fixing the angle regulating member 63 is output from the heating device 80 under the control of 72.

  In the mirror control unit 70 illustrated in FIG. 10, the case where the optical element is the light emitting element (VCSEL element) 14 has been described as an example. However, when the optical element is the light receiving element (PD unit) 15, Instead of the output from the photodetector 71, an output signal output from any element of the PD unit 15 may be input to the control circuit 72, and light may be input from the optical waveguide or the optical fiber.

  FIG. 11 is a schematic diagram illustrating another example of the optical module according to the embodiment of the present invention described above with reference to FIGS. 1 and 2. As in the optical module shown in FIGS. 1 and 2, the optical element connected to the optical fiber may be either a light emitting element (VCSEL element) or a light receiving element (PD unit). Needless to say.

  As shown in FIG. 11, an optical module 101 that connects a light emitting element or a light receiving element and an optical waveguide, for example, an optical fiber, includes a first substrate 111 and a first substrate 111 made of, for example, silicon (Si) or glass. The second substrate 112 is opposed to the first substrate 112. For convenience, an example of four channels is shown, and a configuration provided independently for each channel is identified by adding “α”, “β”, “γ”, and “δ”.

  In a predetermined position of the first substrate 111 (that is, between the first substrate 111 and the second substrate 112), for example, a waveguide member 113 (α, β, γ, δ) that is an optical fiber, a light emitting element ( An optical element 114 which is a VCSEL element) or a light receiving element (PD unit), a microlens array 115 provided at a predetermined position in an optical path between the waveguide member 113 (α, β, γ, δ) and the optical element 114, and A mirror 120 (α, β, γ, δ) for optically coupling the waveguide member 113 (α, β, γ, δ) and the optical element 114 is provided. Note that a state where the mirror 120α is hidden behind the second substrate 112 is shown. The microlens array 115 is an array lens in which microlenses (not described in detail) provided corresponding to individual channels are integrally formed.

  For example, in the example shown in FIG. 11, light (laser beam) from the light emitting element (VCSEL element) 114 is reflected by the mirror 120 (α, β, γ, δ), respectively, and by the individual lenses of the microlens array 115, The light enters the corresponding optical fiber 113 (α, β, γ, δ).

  Thus, when optical elements and optical waveguides (optical fibers) provided for an arbitrary number of channels are optically connected, movable mirrors are provided corresponding to the respective channels and the angle can be changed. By using, the intensity of light input to the optical fiber (optical waveguide) of each channel can be set for each channel. Even if the position accuracy of the lens combined with the optical fiber (optical waveguide) of each channel varies, the variation between channels can be kept within a predetermined range by adjusting the mirror angle for each channel. Can do.

  As described above, according to the present invention, high-accuracy connection with low connection loss can be achieved by using for optical connection between an optical waveguide or an optical fiber and a light emitting element or a light receiving element.

  Further, according to the present invention, in the multi-channel optical module, after the optical waveguide or the optical fiber and the light emitting element or the light receiving element are arranged, the adjustment is performed so that the connection loss is minimized for each channel (alignment). The adjustment (assembly) cost can be greatly reduced.

  Furthermore, according to the present invention, in a multi-channel optical module, the degree of coupling between the optical element and the optical waveguide can be set for each individual channel, which often occurs when an arrayed unit is used. It is possible to prevent a large connection loss from occurring only in a specific channel.

  The present invention is not limited to the above-described embodiments, and various modifications or changes can be made without departing from the scope of the invention when it is implemented. Moreover, each embodiment may be implemented in combination as appropriate as possible, and in that case, the effect of the combination can be obtained.

  The optical connecting device of the present invention can be used for various well-known optical modules such as 128 channels, 64 channels, or 32 channels. Especially, in an optical module using an arrayed waveguide, its size and cost are reduced. It can be reduced.

Schematic explaining an example of an optical module to which an embodiment of the present invention is applied. Schematic explaining a plurality of channels of the optical module shown in FIG. Schematic explaining an example of the plane of the light emitting element integrated in the optical module shown in FIG. Schematic explaining an example of the plane of the light receiving element incorporated in the optical module shown in FIG. FIG. 2 is a schematic diagram illustrating factors that cause the degree of optical coupling to vary when the optical module illustrated in FIG. 1 has a plurality of channels. Schematic explaining an example of a mechanism for adjusting the angle of the mirror described with reference to FIG. Schematic explaining an example of a mechanism for adjusting the angle of the mirror described with reference to FIG. Schematic explaining an example of a mechanism for adjusting the angle of the mirror described with reference to FIG. Schematic explaining an example of a holding mechanism that holds the mechanism for adjusting the angle of the mirror shown in FIGS. 6 to 8 at a predetermined angle. FIG. 10 is a schematic diagram illustrating an example of a mirror control unit that operates the mirror angle setting illustrated in FIGS. 6 to 8 and the mirror holding mechanism illustrated in FIG. 9. FIG. 3 is a schematic diagram illustrating another example of the optical module according to the embodiment of the present invention described above with reference to FIGS. 1 and 2;

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Optical module, 11 ... 1st board | substrate, 12 ... 2nd board | substrate, 12a ... Groove part, 12b ... Recessed part, 12-1 ... Optical connection part, 13 ... Stat bump, 14 ... Light emitting element (optical element), 15 DESCRIPTION OF SYMBOLS ... Light receiving element (optical element), 20 ... Movable mirror, 30 ... Angle adjustment / fixing mechanism, 31 ... Mirror plate, 31a-31d ... Deformation arm (flexure), 32a-32d ... Drive electrode, 40 ... Angle adjustment / fixing mechanism 41a to 41d ... Deformation arm (flexure), 41-1 to 41-n ... Bimetal, 42a to 42d ... Drive electrode, 43a-43d ... Current supply electrode, 50 ... Angle adjustment / fixing mechanism, 51a-51d ... Microactuator, 51-1 ... Hot arm, 51-2 ... Cold arm, 60 ... Mirror holding mechanism, 61 ... Mirror support plate, 61a ... Stopper, 62 ... Solder ball, 63 ... Angle regulation 70 ... Mirror control unit, 71 ... Photo detector, 72 ... Control circuit, 73 ... Drive circuit, 80 ... Heating device, 101 ... Optical module, 111 ... First substrate, 112 ... Second substrate, 113 ... Waveguide member (optical fiber), 114... Optical element (light receiving element or light emitting element), 115... Microlens array, 120.

Claims (20)

A plurality of optical waveguides each capable of propagating light; and
An optical element including at least one of a plurality of light emitting elements capable of outputting light to be propagated by the optical waveguide, or a plurality of light receiving elements capable of receiving light propagated through the optical waveguide;
Arbitrary one of the optical elements and any one of the optical waveguides corresponding to the arbitrary one optical element provided at a predetermined position between the optical element and the optical waveguide An optical connection that can optically connect a predetermined number of the optical elements and a predetermined number of the optical waveguides corresponding to the optical elements in a lump. Mechanism,
An optical module comprising:   The optical module according to claim 1, wherein the optical connection mechanism provided for each channel is integrated for each predetermined channel.   Biaxial directions in which the optical path is bent at a predetermined angle between the optical element and the optical waveguide for each channel defined by an arbitrary optical element and the optical waveguide corresponding to the optical element, and the angles are orthogonal to each other The light intensity of light input from the optical element to the optical waveguide or the light intensity of light output from the optical waveguide to the optical element can be set for each channel or multiple channels at once. An optical connection method characterized by being adjustable.   Light that is provided in the optical path from the light emitting element to the optical waveguide or from the optical waveguide to the light receiving element, and is guided between the light emitting element and the optical waveguide or between the optical waveguide and the light receiving element at the same time as the optical path is bent at a predetermined angle. An optical module comprising a plurality of optical connection devices that can be adjusted in a predetermined state in which a desired light intensity can be obtained.   The optical module according to claim 4, wherein the optical connecting device is capable of bending the light in each of two axial directions substantially orthogonal to the direction in which the light is guided.   The light path of the light guided mutually from the light emitting element to the optical waveguide or from the optical waveguide to the light receiving element is bent at a predetermined angle and can be displaced to any angle, and the light emitting element and the optical waveguide or the optical waveguide and the light receiving element The optical connection method which makes it possible to install the light intensity between the light guided between the two at a desired light intensity.   The optical connection method according to claim 6, wherein the optical connection method is capable of bending the light in each of two axial directions substantially orthogonal to the direction in which the light is guided. A transmission path through which light is transmitted;
An optical element that receives light transmitted through the transmission path or supplies light to the transmission path;
A reflector that is provided between the optical element and the transmission path and capable of changing the direction of the light in a predetermined direction;
A reflector driving mechanism for generating a driving force for changing the direction of the reflector;
An optical connection device comprising:   9. The optical connecting device according to claim 8, wherein the reflector driving mechanism is capable of changing the orientation of the reflector in two axial directions perpendicular to each other.   9. The optical connecting device according to claim 8, wherein the reflector driving mechanism can fix the reflector in any direction in two axial directions orthogonal to each other. A substrate,
A plurality of optical transmission media arranged on the substrate at predetermined intervals and capable of transmitting light;
A light emitting member that is arranged in the same number as the plurality of optical transmission media in a direction orthogonal to a direction in which the plurality of optical transmission media extends, and that outputs light to be transmitted by the optical transmission media;
An optical coupling element that is disposed in an optical path between the light transmission medium and the light emitting member, reflects light from the light emitting member and inputs the light to the light transmission medium;
A drive mechanism for setting the direction of the optical coupling element in an arbitrary direction so that the amount of light input from the light emitting member to the optical transmission medium is a predetermined amount;
An optical connection device comprising:   The optical connection device according to claim 11, wherein the plurality of light emitting members are a single unit. A substrate,
A plurality of optical transmission media arranged on the substrate at predetermined intervals and capable of transmitting light;
A light receiving element that is arranged in the same direction as the plurality of optical transmission media in a direction orthogonal to a direction in which the plurality of optical transmission media extends, and that receives light transmitted by the optical transmission medium;
An optical coupling element that is disposed in an optical path between the light transmission medium and the light receiving member, and that inputs light from the light transmission medium to the light receiving member;
A driving mechanism for setting the direction of the optical coupling element in an arbitrary direction so that the amount of light input from the optical transmission medium to the light receiving element is a predetermined amount;
An optical connection device comprising:   The optical connection device according to claim 13, wherein the plurality of light receiving members are a single unit.   The optical connection device according to claim 11, wherein a lens is provided between the optical coupling element and the optical transmission medium. A light emitting member that outputs light to be transmitted by the same number of optical transmission media as the optical transmission media from a direction orthogonal to the direction in which the optical transmission media extend to an optical transmission medium capable of transmitting a plurality of lights arranged on the substrate at predetermined intervals And place
An optical coupling element that reflects light from the light emitting member and inputs it to the optical transmission medium is provided in the optical path between the optical transmission medium and the light emitting member,
The direction of the optical coupling element is set by a drive mechanism that sets the direction of the optical coupling element in a predetermined direction so that the amount of light input from the light emitting member to the optical transmission medium becomes a predetermined amount. An optical connection method capable of increasing the coupling efficiency.   The optical connection method according to claim 16, wherein the plurality of light emitting members are a single unit. Light from an optical transmission medium capable of transmitting a plurality of lights arranged on the substrate at a predetermined interval can be input, and is transmitted by the same number of optical transmission media as the optical transmission medium from a direction orthogonal to the direction in which the optical transmission medium extends. A light receiving member that receives light;
An optical coupling element that reflects light from the optical transmission medium and inputs it to the light receiving member is provided in the optical path between the optical transmission medium and the light receiving member;
The direction of the optical coupling element is set by a drive mechanism that sets the direction of the optical coupling element in a predetermined direction so that the amount of light input from the optical transmission medium to the light receiving member becomes a predetermined amount. An optical connection method capable of increasing the coupling efficiency.   The optical connection method according to claim 18, wherein the plurality of light receiving members are a single unit.   The optical connection method according to claim 16, wherein a lens is provided between the optical coupling element and the optical transmission medium.

Images