JP2005223204A5 - - Google Patents

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Publication number
JP2005223204A5
JP2005223204A5 JP2004030906A JP2004030906A JP2005223204A5 JP 2005223204 A5 JP2005223204 A5 JP 2005223204A5 JP 2004030906 A JP2004030906 A JP 2004030906A JP 2004030906 A JP2004030906 A JP 2004030906A JP 2005223204 A5 JP2005223204 A5 JP 2005223204A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004030906A
Other languages
Japanese (ja)
Other versions
JP4364001B2 (en
JP2005223204A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2004030906A priority Critical patent/JP4364001B2/en
Priority claimed from JP2004030906A external-priority patent/JP4364001B2/en
Publication of JP2005223204A publication Critical patent/JP2005223204A/en
Publication of JP2005223204A5 publication Critical patent/JP2005223204A5/ja
Application granted granted Critical
Publication of JP4364001B2 publication Critical patent/JP4364001B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004030906A 2004-02-06 2004-02-06 Transfer robot Expired - Lifetime JP4364001B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004030906A JP4364001B2 (en) 2004-02-06 2004-02-06 Transfer robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004030906A JP4364001B2 (en) 2004-02-06 2004-02-06 Transfer robot

Publications (3)

Publication Number Publication Date
JP2005223204A JP2005223204A (en) 2005-08-18
JP2005223204A5 true JP2005223204A5 (en) 2007-03-01
JP4364001B2 JP4364001B2 (en) 2009-11-11

Family

ID=34998582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004030906A Expired - Lifetime JP4364001B2 (en) 2004-02-06 2004-02-06 Transfer robot

Country Status (1)

Country Link
JP (1) JP4364001B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5059573B2 (en) * 2007-12-06 2012-10-24 東京エレクトロン株式会社 Substrate holder, substrate transfer device, and substrate processing system
KR101338858B1 (en) 2011-01-31 2013-12-16 주식회사 나온테크 Substrate transport apparutus having respectively driven hands and method for controlling the same
JP5727823B2 (en) * 2011-03-15 2015-06-03 株式会社アルバック Rotation drive
JP5663638B2 (en) 2012-10-11 2015-02-04 株式会社ティーイーエス Substrate transfer device
TWI725115B (en) * 2016-01-29 2021-04-21 日商達誼恆股份有限公司 Robot for substrate transfer
KR101837647B1 (en) * 2016-01-29 2018-03-13 (주)씨엔원 Semiconductor substrate carrying apparatus for loadlock chamber

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