JP2005216565A - Vacuum ultraviolet light generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum ultraviolet ray generator of which designing and specification change are made easily, and irradiation intensity and irradiation distribution are controlled to prescribed values. <P>SOLUTION: In the vacuum ultraviolet ray generator 100, a container 1 is filled with an excimer gas that forms the vacuum ultraviolet ray by barrier discharge. Inside the container 1, three or more of electrodes 3 are installed, and arranged via dielectrics 2. With the present device, power supply devices 4 composed of high frequency high voltage electric power source devices are connected phase-asynchronously to neighboring electrodes. In the container 1, an excimer gas supply port 1a and an exhaust port 1b are formed, and a gas flow method to supply the excimer gas at a constant flow rate is adopted. In the power supply device 4, an electric power control unit 6 is respectively installed, and each electric power control unit 6 is controlled by a computer 7. Furthermore, in the each electric power control unit 6, a vacuum ultraviolet ray intensity measurement device 8 is installed, and based on the measurement values, power output of the power supply device 4 is controlled by the computer 7 via the electric power control unit 6, and prescribed power output intensity and distribution are obtained in a real time. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a vacuum ultraviolet light generator, and more particularly to a flat-emitting vacuum ultraviolet light generator suitable for large area irradiation.

  As a conventional technology, in a vacuum ultraviolet light generator that irradiates a large area by arranging a large number of electrodes covered with a dielectric in a single vacuum ultraviolet lamp chamber, a large number of electrodes are grouped alternately to provide a single power supply device. In general, a method of supplying power by using a power supply is known (see Patent Document 1). On the other hand, a method of supplying power by providing a power supply device for each independent lamp is also known (see Patent Document 2).

Japanese Patent No. 2545489 Japanese Patent No. 3059348

  In the vacuum ultraviolet light generator of Patent Document 1, power is supplied to a plurality of electrodes from one power source. In this way, regardless of the number of electrodes used, the method using one power source requires a large high-voltage high-frequency device when the number of electrodes used is large, such as a large-area planar light-emitting vacuum ultraviolet light generator. There were a lot of problems in the incorporation into the product. Further, whenever the design of the number of electrodes is changed and the specifications of each electrode pair, for example, the thickness of the electrodes, the interval between the electrodes, the length, etc., are changed, the specification of the power source needs to be changed. Conversely, there is no degree of freedom in changing the number of electrodes and the specifications of each electrode according to the application, and it was actually difficult to manufacture a general-purpose vacuum ultraviolet light generator that can be applied to various applications.

  Furthermore, based on slight differences in electrode shape and electrode arrangement, the power supplied to the discharge between the adjacent electrodes becomes non-uniform, and as a result, the distribution of the obtained irradiation intensity may become non-uniform. As a method for solving this, a method in which a minute series resistance is connected to alternating electrodes, electric power is supplied through the series resistance, and the discharge is made uniform by adjusting the resistance value can be easily considered. However, in this method, the power consumption by the resistor reduces the luminous efficiency of the lamp, and the problem of heat generation from the resistor also occurs. Above all, it is extremely complicated and practically difficult to adjust the irradiation intensity by controlling the electric power supplied to each electrode with a resistance. In any case, since it is difficult to control the power supply for each electrode, a uniform illuminance distribution, a desired illuminance change, etc. cannot be freely obtained.

  On the other hand, in the vacuum ultraviolet light generator of Patent Document 2, a power source is arranged for each independent lamp. However, in this method, since there is no light emission between the lamps, it is difficult to obtain uniform irradiation intensity. In addition, there is a problem in that the irradiation distribution becomes non-uniform due to the variation in the characteristics of each lamp and the change over time, and the adjustment of the irradiation intensity distribution is forced each time.

  The present invention solves the problems as described above, and can be designed and changed in specifications, and can be designed to have a large area plane irradiation type vacuum ultraviolet ray having a plurality of electrodes capable of obtaining an intended irradiation intensity and illuminance distribution. An object is to provide a light generator.

  The vacuum ultraviolet light generator according to the first aspect of the present invention is a vacuum ultraviolet light generator using a vacuum ultraviolet lamp that performs dielectric barrier discharge, and an electrode disposed through a dielectric in one vacuum ultraviolet lamp chamber. There are three or more, and one feeding device is connected between each adjacent electrode in a phase asynchronous manner.

  A vacuum ultraviolet light generator according to a second invention of the present invention is a vacuum ultraviolet light generator using a vacuum ultraviolet lamp that performs dielectric barrier discharge, and is an electrode disposed through a dielectric in one vacuum ultraviolet lamp chamber. There are three or more, and these three or more electrodes are divided into two or more groups, and power feeding devices are connected in phase asynchronously between the electrodes in each group.

  A vacuum ultraviolet light generator according to a third invention of the present invention is a vacuum ultraviolet light generator using a vacuum ultraviolet lamp that performs dielectric barrier discharge, and is an electrode disposed through a dielectric in one vacuum ultraviolet lamp chamber. There are three or more, and these three or more electrodes are divided into two or more groups, and the power feeding devices are connected in phase asynchronously between the electrodes in each group and between each group.

  In these inventions, the plurality of electrodes are composed of a dielectric coated electrode covered with a dielectric and a dielectric uncoated electrode not covered with a dielectric, and the dielectric coated electrode and the dielectric uncoated electrode are provided. Alternatively, the power feeding device may be connected between the dielectric coated electrodes and the dielectric uncoated electrodes.

  In these inventions, a plurality of electrodes are embedded in one dielectric, and at least a part of the dielectric is exposed to an excimer gas filled in a vacuum ultraviolet lamp chamber so that only the exposed side emits flat light. You can also.

  In these inventions, a dielectric electrode in which an electrode and a dielectric are integrated can also be used.

  In these inventions, it is desirable that the power feeding device is connected to both ends of the electrode.

  In these inventions, it is desirable to provide each power supply device with a power supply control device that independently controls the power supplied to the dielectric discharge section.

  In these inventions, it is more preferable that each power supply control device is controlled by a computer.

  In these inventions, it is desirable that the computer receives a signal of a vacuum ultraviolet light intensity from a vacuum ultraviolet light intensity detector provided for each power supply control device, and controls the supply power for each power supply device.

  In these inventions, it is practical to use a high-voltage inverter power supply having a power supply capacity of 30 VA to 200 VA as the power supply device.

According to the vacuum ultraviolet light generator of the present invention, the following advantages can be obtained.
(1) It is possible to realize a large-area plane irradiation type vacuum ultraviolet light generator including a plurality of electrodes that can be freely changed in design and specifications and can obtain desired irradiation intensity and illuminance distribution.
(2) The number of electrode pairs of the vacuum ultraviolet light generator can be freely increased or decreased according to the purpose of use regardless of the power source capacity, and the intended irradiation area can be easily obtained. Conversely, the desired number of electrodes can be connected according to the rated capacity of the power source.
(3) By controlling the power supply for each adjacent electrode or power supply for each electrode group independently, the light emission intensity can be increased or decreased from zero to the maximum value. Etc. can be obtained freely. Using this characteristic, not only can a large area be uniformly irradiated with high accuracy, but also an object to be irradiated can be consciously irradiated with a nonuniform intensity distribution.
(4) It is easy to correct illuminance disturbance due to electrode diameter, electrode interval, excimer gas flow, and the like.
(5) A vacuum ultraviolet light intensity detector is disposed for each electrode pair in which the power supply device is disposed, and the intensity signal is fed back and controlled to the control device of the power supply device, thereby stabilizing and equalizing the emission intensity. be able to.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to FIGS. First, FIG.1 and FIG.2 shows the example which arrange | positioned the several electrode covered with the dielectric material in one container in the vacuum ultraviolet light generator. FIG. 1 is a plan view schematically showing the vacuum ultraviolet light generator 100, and FIG. 2 is a front sectional view of FIG. As shown in FIGS. 1 and 2, a plurality of electrodes 3 (3 a, 3 b, 3 c, 3 d, 3 e, 3 f) are arranged opposite to each other in a sealed container 1 used as a vacuum ultraviolet lamp chamber. Each electrode is covered with a dielectric 2. Between the adjacent electrodes 3a-3b (between the electrodes 3a and 3b), between the electrodes 3b-3c, between the electrodes 3c-3d, between the electrodes 3d-3e, and between the electrodes 3e-3f, the power feeding device 4 is provided. Connected asynchronously. When the container 1 is filled with an excimer gas such as argon and supplied with power, uniform surface emission is obtained, and unlike the case of a single power source, the capacity of the power source is not limited. Any number of electrodes can be used. Further, as shown in FIG. 2, the vacuum ultraviolet light generator 100 is provided with a vacuum ultraviolet light extraction window 5. Although not shown in FIGS. 1 and 2, an excimer gas supply port is provided at one end of the container 1 and an excimer gas discharge port is provided at the other end, as will be described later (see FIG. 3). The vacuum ultraviolet light generator 100 of the present invention is used in a gas flow method.

  In the present invention, the container 1 is made of metal, preferably stainless steel, for example. The dielectric 2 is made of glass, quartz, ceramics, preferably ceramics. The electrode 3 is made of metal, preferably aluminum. As the luminescent seed gas, a rare gas or nitrogen, preferably a rare gas argon is used. As the power feeding device 4, a high-frequency high-voltage power supply device such as a neon sign power supply or a small inverter high-voltage power supply device with an output AC of 10 kV and 24 kHz is used. For the vacuum ultraviolet light extraction window 5, MgF2, LiF, CaF2, quartz, sapphire, preferably MgF2 is used.

  According to the knowledge of the present inventors, in the surface-emitting type vacuum ultraviolet light generator, the capacitance of the dielectric 2 and the discharge output are in a proportional relationship. Therefore, as the diameter of the electrode 3 to be used is larger, the capacitance of the dielectric 2 per electrode 3 is increased, and a large discharge power can be obtained. Although it cannot be specified because it varies depending on the application, the electrode diameter is generally in the range of 1 to 30 mm, preferably 5 to 20 mm. On the other hand, the capacitance of the discharge space and the distance between the electrodes are inversely proportional. The narrower the electrode spacing, the greater the capacitance of the discharge space, and the more energy is consumed in the interelectrode discharge. As a result, energy is efficiently injected into the excimer gas existing between the electrodes, resulting in an increase in light emission output. The electrode spacing is generally 2 mm or less, preferably 1 mm or less. When the electrode interval is reduced, the barrier discharge between the adjacent electrodes 3a-3b, 3b-3c, 3c-3d, 3d-3e, 3e-3f is caused by a small discharge between the electrodes orthogonal to the irradiation direction. And the plane discharge generated on the opposite side of the irradiation direction and the irradiation direction increases. If only this irradiation direction side plane discharge is effectively used, the light emission output of the entire surface emission is further increased. Further, the supply power frequency and the light emission output are in a proportional relationship, and the light emission output is larger as the frequency is higher. Although it depends on the application, the power supply frequency is preferably at least 10 kHz or more, preferably 15 kHz or more.

  FIG. 3 is a schematic view showing an example in which the vacuum ultraviolet lamp chamber of the vacuum ultraviolet light generator described in FIGS. As shown in FIG. 3, in the vacuum ultraviolet light generator 100 of this embodiment, an excimer gas supply port 1a is provided at one end of the container 1, and an excimer gas discharge port 1b is provided at the other end. In a sealed container, for example, it is known that oxygen and ozone in the container are accumulated by decomposition of a quartz dielectric by argon excimer light, and vacuum ultraviolet light is absorbed, and light emission output is attenuated over time. According to the knowledge of the present inventors, in the gas flow type apparatus, for example, when argon gas is allowed to flow in an atmospheric container at an atmospheric pressure and a flow rate of about 5000 ml / min, a stable and constant light emission output after about 10 minutes. Is obtained. Moreover, in this vacuum ultraviolet light generator, as will be apparent from Examples described later, uniform surface emission intensity and high light conversion efficiency can be obtained.

  FIG. 4 is a schematic diagram illustrating an example in which the power supply control device 6 is provided in the power supply device 4. The container is not shown. As shown in FIG. 4, a power feeding device 4 is provided between adjacent electrodes 3 a-3 b, 3 b-3 c, 3 c-3 d, 3 d-3 e, 3 e-3 f, and each power feeding device 4 has a power control device. 6 is provided. Thereby, each electric power feeder 4 can be controlled independently. As the power supply control device 6, a device for controlling resistance change, inductance change, voltage change, current change, inverter frequency change, switching firing angle change, etc. is used alone or in combination. The power supply control device 6 may be manually operated or computer controlled.

  FIG. 5 is a schematic diagram showing an example in which the power supply control device 6 of FIG. 4 is controlled by a computer. The container is not shown. As shown in FIG. 5, each power supply control device 6 is connected to a computer 7. Further, if necessary, a vacuum ultraviolet light intensity detector 8 is provided for each power supply control device 6, and the output of the power supply device 4 is output via the computer 7 and the power supply control device 6 based on the measured value of the detector 8. It can also be controlled. The use of a computer is particularly suitable for controlling the frequency change of the inverter and the change of the ignition angle of switching. By selecting and operating the control means, in the present invention, the emission intensity of each electrode (3a, 3b, 3c, 3d, 3e, 3f, 3g) connected to each power supply device 4 is made variable from zero to the maximum value. The desired irradiation light intensity and irradiation light distribution can be easily obtained.

  In FIG. 6, considering the length of the electrode and the capacity of one power supply device, the electrodes are divided into several groups, one power supply device is provided for each group, and power is supplied between adjacent groups. It is a schematic diagram which shows the example which has arrange | positioned an apparatus. The container is not shown. As shown in FIG. 6, the electrode 3 includes an electrode 3a and an electrode 3c (group 3ac), an electrode 3b and an electrode 3d (group 3bd), an electrode 3e and an electrode 3g (group 3eg), an electrode 3f and an electrode 3h (group 3fh). And a power supply device 4a and a power supply device 4b are provided between the group 3ac and the group 3bd, and between the group 3eg and the group 3fh. A power feeding device 4c is also disposed therebetween. By this method, a silent discharge part is formed between each electrode group. In order to avoid the occurrence of spots in the surface light emission, it is desirable that adjacent power sources be connected so as to share one of the adjacent electrode pairs. In any case, in the present invention, the desired number of electrodes to be connected can be selected in accordance with the rated capacity of the power source to be used.

  In FIG. 7, electrodes covered with a dielectric material (dielectric-coated electrode) and electrodes not covered with a dielectric material (non-dielectric-coated electrode) are alternately arranged, and a power feeding device is provided between adjacent electrodes. 2 is a schematic diagram showing an example of a vacuum ultraviolet light generator 102. FIG. The container is not shown. As shown in FIG. 7, for example, of the adjacent electrodes 3 a and 3 b, the electrode 3 is covered with the dielectric 2, but the electrode 3 b is not covered. Similarly, the dielectric coated electrodes and the dielectric uncoated electrodes are alternately arranged, and between the dielectric coated electrodes (3a, 3c, 3e, 3g) and the dielectric uncoated electrodes (3b, 3d, 3f). The power feeding device 4 is connected. In this case, the dielectric 2 of the dielectric-coated electrode is interposed between the dielectric-coated electrode and the dielectric-uncoated electrode, and functions as a dielectric between them. In short, in the present invention, each electrode is a dielectric. As long as they are isolated from each other.

  FIG. 8 is a schematic diagram showing an example of a vacuum ultraviolet light generator 103 that uses only a flat discharge on the vacuum ultraviolet light irradiation side. As shown in FIG. 8, the plurality of electrodes 3 (3 a, 3 b, 3 c, 3 d, 3 e, 3 f, 3 g) are embedded in one dielectric 2 in parallel. The power feeding device 4 is provided between the electrodes. In this case, the dielectric 2 incorporating the plurality of electrodes 3 is arranged so that only one surface is exposed to the excimer gas in the container 1. The other surface is disposed outside the container. With this configuration, the plurality of electrodes 3 generate a flat discharge D only in the container 1 in which excimer gas exists. On the surface not exposed to the excimer gas, no discharge occurs between the electrodes. In other words, a uniform irradiation distribution can be obtained with high efficiency only on the irradiation side having the vacuum ultraviolet light extraction window 5. Although not shown in the drawing, the electrode portion that contacts the outside of the container 1 does not necessarily have to be covered with the dielectric 2. When the electrode is completely embedded in the dielectric as shown in FIG. 7, although not shown, an excimer gas chamber is also provided on the upper side to cause a planar discharge on the upper side of the dielectric electrode 2. And vacuum ultraviolet light can be obtained.

  FIG. 9 is a schematic diagram illustrating an example of the vacuum ultraviolet light generator 104 in which the power feeding device is connected to both ends of the electrode. Since the electrode of the vacuum ultraviolet lamp used in the present invention is a thick conductor, FIG. 9 and FIG. However, the power source of this vacuum ultraviolet light generator is a high voltage device with an output of about 10 kv. The copper wire connecting the power source and the lamp has a diameter of 1 mm or less, but is covered with a resin such as vinyl for insulation, and has an outer shape of about 10 mm. The copper wire thus formed is hard and difficult to bend. As shown in FIG. 1, it is very difficult to securely connect two copper wires to the same end of one electrode so that the connecting portion is not exposed. Moreover, the interval between adjacent electrodes is as narrow as about 10 mm. Therefore, in the present invention, as shown in FIG. 9, for example, one end of the electrode 3 b is connected to one end of the power feeding device 4 by a copper wire 9 b, and the other end of the electrode 3 b is connected to a terminal of another power feeding device 4. Connect with. The other terminal of the power feeding device 4 connected to the electrode 3b by the copper wire 9c is connected to one end of the electrode 3c arranged to face the electrode 3b by the copper wire 3c. That is, both ends of the electrode 3b are connected to separate power feeding devices by the copper wires 9b and 9c. In this way, the electrodes (3a, 3b, 3c, 3d, 3e, 3f) and the power feeding device 4 are connected by the copper wires (9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h, 9i, 9j). To do. As described above, the connection between the power supply device and the electrode is configured such that the copper wires connected to the terminals of different power supply devices are not connected to the same end of the electrode, but are connected to both ends of the electrode. Such a configuration not only facilitates the connection of high-voltage electric wires, but also prevents non-uniformity in the discharge intensity in the electrode axis direction when a long electrode is used.

  In any of the above cases, it is preferable to use an electrode (dielectric electrode) having a dielectric coating in which a metal electrode and a dielectric are integrated, because the degree of freedom of the electrode shape is increased. As such a dielectric electrode, an anodized aluminum electrode or a metal electrode in which a dielectric film is formed by means such as spraying or vapor deposition can be suitably used.

In the present embodiment, the container 1 having the form shown in FIG. 3 was used in the vacuum ultraviolet light generator 100 having the form shown in FIG. The container 1 is made of stainless steel and has a size of 200 × 200 × 100 mm. A gas supply port 1 a and a gas discharge port 1 b having a diameter of 10 mmφ were provided on both upper sides of the container 1. On the lower surface of the container 1, a vacuum ultraviolet light extraction window 5 made of MgF 2 and having a diameter of 100 mmφ was provided. In the container 1, an aluminum electrode 3 having a diameter of 10 mmΦ and a length of 265 mm was covered with a dielectric 2 made of a quartz tube having an inner diameter of 10 mm and an outer diameter of 15 mm, and five wires were arranged in parallel. The distance between the electrodes was 5 mm between the dielectric outer surfaces. A power feeding device 4 was connected between the electrodes. A small high-voltage inverter power supply device (trade name AN-10 manufactured by Nagano Aichi Electric Co., Ltd.) having an input voltage of 100 V, a power supply capacity of 100 VA, and an output AC of 10 kv was used as the power supply device 4. With this apparatus, vacuum ultraviolet light was generated under the following conditions. In addition, as a high voltage | pressure inverter power supply, the capacity | capacitance of a power supply should just be 30VA-200VA.
・ Applied voltage: 6 kV
・ Power supply frequency: 24 kHz
Excimer gas used: Argon Excimer gas supply: Atmospheric pressure, 5,000 ml / min
・ Measurement position: 40mm from the electrode
・ Measuring equipment: calibrated photodiode for vacuum ultraviolet ・ Measuring range: 82 × 180 mm Out of light emitting surface, diode movable range Φ80 mm

As a result of measurement under the above conditions, the uniformity of the surface emission intensity was about ± 1.2%. The discharge power was estimated by a discharge power measurement circuit (not shown), and a Lissajous figure with the applied voltage was drawn on an oscilloscope, and the result was estimated to be 109 W from the area of the parallelogram. The irradiation intensity at a position 110 mm away was 565 μW / cm ³ . Moreover, as a result of calculating the total radiation output of the luminous body from this irradiation intensity, 2.4 W was obtained, and when the light conversion efficiency was calculated from these values, the efficiency was about 2.2%. This corresponds to a high light conversion efficiency that is about twice as high as the conventional one. From this, it has been found that according to the power feeding method of the present invention, extremely strong and uniform surface-emitting vacuum ultraviolet light can be obtained.

  The vacuum ultraviolet light generator of the present invention is for irradiating an object to be irradiated over a large area, such as film surface modification, cleaning of a large area semiconductor wafer, IC chip, and removal of an oxide film on a wafer. It can be widely applied to various cleaning devices, sterilization devices, paints, and resin curing devices. Moreover, even if it is a coaxial type electrode other than an electrode parallel arrangement type, if it uses a some electrode pair, it is applicable also to the electrode power supply device of an ozone generator, for example.

It is a top view which shows typically the vacuum ultraviolet light generator of this invention. It is front sectional drawing of FIG. It is front sectional drawing which shows the example which used the excimer gas discharge system for the lamp chamber of FIG. It is the schematic diagram which has arrange | positioned the power supply control apparatus for every electric power feeder of FIG. FIG. 5 is a schematic diagram in which the power supply control device of FIG. 4 is controlled by a computer. It is a schematic diagram which shows different embodiment of the vacuum ultraviolet light generator of this invention. It is a schematic diagram which shows the different electrode structure of the vacuum ultraviolet light generator of this invention. In the vacuum ultraviolet light generator of this invention, it is a schematic diagram which shows the system which embedded the electrode in the dielectric material. In the vacuum ultraviolet light generator of this invention, it is a schematic diagram which shows the connection of an electric power feeder and an electrode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container 1a Gas supply port 1b Gas discharge port 2 Dielectric 3 Electrode 3a, 3b Electrode 3c, 3d Electrode 3e, 3f Electrode 3g, 3h Electrode 4 Feeding device 5 Vacuum ultraviolet light extraction window 6 Power supply control device 7 Computer 8 Vacuum ultraviolet light Intensity detector 9a, 9b Copper wire 9c, 9d Copper wire 9e, 9f Copper wire 9g, 9h Copper wire 9i, 9j Copper wire 100 Vacuum ultraviolet light generator 101 Vacuum ultraviolet light generator 102 Vacuum ultraviolet light generator 103 Vacuum ultraviolet light Generator 104 Vacuum ultraviolet light generator D Planar discharge

Claims (11)

  In a vacuum ultraviolet light generation apparatus using a vacuum ultraviolet lamp that performs dielectric barrier discharge, there are three or more electrodes arranged through a dielectric in one vacuum ultraviolet lamp chamber, and each electrode is arranged between adjacent electrodes. A vacuum ultraviolet light generator characterized in that one power feeding device is connected in a phase asynchronous manner.   In a vacuum ultraviolet light generation apparatus using a vacuum ultraviolet lamp for performing dielectric barrier discharge, there are three or more electrodes arranged through a dielectric in one vacuum ultraviolet lamp chamber, and these three or more electrodes are arranged. A vacuum ultraviolet light generator characterized in that it is divided into two or more groups, and a power feeding device is connected asynchronously between the electrodes in each group.   In a vacuum ultraviolet light generation apparatus using a vacuum ultraviolet lamp for performing dielectric barrier discharge, there are three or more electrodes arranged through a dielectric in one vacuum ultraviolet lamp chamber, and these three or more electrodes are arranged. A vacuum ultraviolet light generator characterized in that it is divided into two or more groups, and power feeding devices are connected in phase asynchronously between the electrodes in each group and between each group.   The plurality of electrodes are composed of a dielectric coated electrode covered with a dielectric and a dielectric uncoated electrode not covered with a dielectric, and the dielectric coated electrode and the dielectric uncoated electrode are alternately arranged to form a dielectric. The vacuum ultraviolet light generator according to any one of claims 1 to 3, wherein a power feeding device is connected between the body-coated electrode and the dielectric-uncoated electrode.   4. The plurality of electrodes are embedded in one dielectric, and at least a part of the dielectric is exposed to a gas filled in the vacuum ultraviolet lamp chamber. The vacuum ultraviolet light generator according to any one of the above.   The vacuum ultraviolet light generator according to any one of claims 1 to 3, wherein a dielectric electrode in which the electrode and the dielectric are integrated is used.   The vacuum ultraviolet light generator according to claim 1, wherein the power feeding device is connected to both ends of the electrode.   4. The vacuum ultraviolet light generator according to claim 1, wherein the power supply device includes a power supply control device that independently controls power supplied to the discharge portion of the dielectric. 5. .   9. The vacuum ultraviolet light generator according to claim 8, wherein the power supply control device is computer controlled.   10. The vacuum ultraviolet light according to claim 9, wherein a computer receives a signal of a vacuum ultraviolet light intensity from a vacuum ultraviolet light intensity detector provided for each of the power supply control devices, and controls supply power for each power supply device. Light generator.   11. The vacuum ultraviolet light generator according to claim 1, wherein the power supply device is a high-voltage inverter power supply having a power supply capacity of 30 VA to 200 VA.

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