JP2005213543A - Device for hanging down article to be surface-treated - Google Patents

Device for hanging down article to be surface-treated Download PDF

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JP2005213543A
JP2005213543A JP2004019338A JP2004019338A JP2005213543A JP 2005213543 A JP2005213543 A JP 2005213543A JP 2004019338 A JP2004019338 A JP 2004019338A JP 2004019338 A JP2004019338 A JP 2004019338A JP 2005213543 A JP2005213543 A JP 2005213543A
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article
hanging
treatment
treatment tank
anxiety
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Katsumi Fujita
克己 藤田
Hiroshi Murakami
浩 村上
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FUJITA SEISAKUSHO KK
Shin Nikkei Co Ltd
Fujita Manufacturing Co Ltd
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FUJITA SEISAKUSHO KK
Shin Nikkei Co Ltd
Fujita Manufacturing Co Ltd
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Priority to JP2004019338A priority Critical patent/JP2005213543A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a hanging device for hanging down particularly a wide and thin article to be surface-treated, from a transportation frame. <P>SOLUTION: The hanging device for hanging down the article to be surface-treated is directed at vertically hanging down the article in the transportation frame through a hanging tool and sequentially transporting the articles to each treatment tank; and hangs down the article W from the supporting holder 11, so as to make the width side parallel to a transporting direction of the transportation frame by sandwiching a supporting holder 11 with the hanging tool 1. Thereby the hanging device eliminates an anxiety for the contact between the articles W, even when the distance between the hanging tools 1 fixed in the transportation frame is short, and an anxiety for vibration of the article due to air resistance during transportation; and accordingly eliminates an anxiety for the deformation of the article W due to the collision of the article W with an inner wall of the treatment tank, even when the wide and thin article W is immersed in the treatment tank, eliminates the consequent anxiety for the occurrence of bad treatment, allows the article W to be immediately lowered in each treatment tank, and remarkably improves treatment efficiency. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、アルミニウム型材などの被表面処理材料を搬送枠に吊り下げて行なう表面処理工程において、上記搬送枠に材料を吊り下げるために使用される吊下装置に関するものである。   The present invention relates to a suspending device used for suspending a material on a conveyance frame in a surface treatment process performed by suspending a surface treatment material such as an aluminum mold on the conveyance frame.

通常、アルミニウム型材をアルマイト処理する場合には、アルミニウム型材を処理ラインに移送して、此処で、各型材を種々の処理槽へ軌条を介して搬送する搬送枠に縦吊り状態をもって吊り下げて、例えば、脱脂処理槽・水洗槽・エッチング槽・水洗槽・中和槽・アルマイト槽(電解槽)・水洗槽・カラー処理槽などへと搬送して、アルミニウム型材に対して所定のアルマイト処理を行なう訳であるが、斯かるアルミニウム型材を搬送枠に吊り下げる吊下具としては、多少の構造上の相違はあるが、基本的には、いずれも、通電バーを兼用する挾持体と、該挾持体の先端挾持部と対向する挾持爪と、該挾持爪を開閉する操作レバーと、挾持爪に挾持力を付与するばね部材とを備える構成となっている(例えば、特許文献1参照)。   Usually, when anodizing aluminum mold material, the aluminum mold material is transferred to the treatment line, where each mold material is suspended in a vertically suspended state on a conveyance frame that conveys each mold material to various treatment tanks, For example, it is transported to a degreasing tank, water washing tank, etching tank, water washing tank, neutralization tank, anodized tank (electrolysis tank), water washing tank, color treatment tank, etc., and a predetermined anodizing treatment is performed on the aluminum mold. However, although there are some structural differences as a hanging tool for suspending such an aluminum mold material on the conveyance frame, basically, both of them are a holding body that also serves as an energizing bar, and the holding member. A gripping claw that faces the tip gripping part of the body, an operation lever that opens and closes the gripping claw, and a spring member that imparts a gripping force to the gripping claw (see, for example, Patent Document 1).

従って、この吊下具は、搬送枠に一定の間隔をおいて多数固定されて、その挾持体の先端挾持部と挾持爪間で、アルミニウム型材を個々に挾持しながら各処理槽へと搬送するものであるが、アルミニウム型材を吊り下げる場合には、当該型材をその巾面が搬送枠の搬送方向に対して直交する状態に吊り下げる方法が一般的に採用されている。
特開平10−219498号公報
Accordingly, a number of the hanging tools are fixed to the conveyance frame at a predetermined interval, and are conveyed to the respective treatment tanks while individually holding the aluminum mold material between the tip holding portion and the holding claws of the holding body. However, when an aluminum mold material is suspended, a method is generally employed in which the mold material is suspended in a state where the width surface thereof is orthogonal to the conveyance direction of the conveyance frame.
Japanese Patent Laid-Open No. 10-219498

この為、従来にあって、特に、巾広で薄物の型材を吊り下げようとする場合に、搬送枠に固定される各吊下具の間隔が狭いと、搬送中に、型材同士が接触する恐れが十分に考えられるので、吊下具自体を一つ置き或いは二つ置きに使用したり、吊下具同士の間隔ピッチを変更することが余儀なくされて、生産性や作業性の見地からは、決して好ましいと言えなかった。   For this reason, in the past, especially when trying to suspend a wide and thin mold material, the mold materials come into contact with each other during conveyance if the interval between the suspension tools fixed to the conveyance frame is narrow. Because there is enough fear, it is necessary to use one or two hanging tools themselves, or to change the interval pitch between the hanging tools, from the viewpoint of productivity and workability I could never say that it was preferable.

又、搬送枠で巾広・薄物の型材を各処理槽へ搬送する場合には、吊下具が当該型材をその巾面が搬送方向に対して直交する状態に吊り下げているので、搬送中に空気抵抗を受けて振動し易くなる結果、搬送枠の降下を得て、アルミニウム型材を処理槽内に浸漬する時には、その振動が原因となって、巾広で薄物の型材が処理槽の内壁に衝突して、型材自体が変形したり、これに伴い、不良表面処理が発生する恐れがあった。そこで、実際の処理ライン上では、各処理槽毎で、その都度、振動する搬送型材を一旦時間をおいて静止させてから、ゆっくりと降下させなければならないので、処理効率が著しく低下する嫌いも十分にあった。   In addition, when transporting wide and thin mold materials to each processing tank using the transport frame, the hanging tool suspends the mold material so that the width surface is orthogonal to the transport direction. As a result of the air resistance, it is easy to vibrate, so that when the aluminum mold is immersed in the processing tank, the aluminum mold is immersed in the processing tank. There is a risk that the mold material itself may be deformed due to collision with the surface, or that a defective surface treatment may occur. Therefore, on the actual processing line, for each processing tank, the vibrating conveying mold material must be stopped after a while and then slowly lowered, so that the processing efficiency is significantly reduced. There was enough.

本発明は、斯かる従来の吊下装置が抱える課題を有効に解決するために開発されたもので、請求項1記載の発明は、被表面処理材料を搬送枠に吊下具を介して縦吊り状態に吊り下げて、各処理槽へと順に搬送する被表面処理材料の吊下装置であって、上記吊下具で補助治具を挾持して、該補助治具で被表面処理材料をその巾面が搬送枠の搬送方向に対して平行となる状態に吊り下げることを特徴とする。   The present invention was developed in order to effectively solve the problems of such a conventional suspension device, and the invention according to claim 1 is characterized in that a surface-treated material is vertically attached to a conveyance frame via a suspension tool. A device for suspending a surface-treated material that is suspended in a suspended state and sequentially transported to each treatment tank, holding an auxiliary jig with the above-described suspension tool, and using the auxiliary jig to suspend the surface-treated material. The width surface is suspended in a state parallel to the conveyance direction of the conveyance frame.

請求項2記載の発明は、請求項1を前提として、1個の吊下具に挾持される補助治具が、2枚の被表面処理材料の吊下機能を備えていることを特徴とする。   The invention described in claim 2 is characterized in that, on the premise of claim 1, the auxiliary jig held by one hanging tool has a function of hanging two surface-treated materials. .

依って、請求項1記載の発明にあっては、吊下具に挾持される補助治具を介して、被表面処理材料がその巾面を搬送枠の搬送方法に対して平行となる状態に吊り下げられることとなるので、例え、搬送枠に固定される吊下具の間隔が狭い場合でも、被表面処理材料同士が不用意に接触する恐れがなくなり、従来のように、吊下具を一つ置き或いは二つ置きに使用したり、吊下具同士の間隔ピッチを変更することが必要なくなって、生産性や作業性の向上が大いに期待できることとなる。   Therefore, in the first aspect of the invention, the surface-treated material is brought into a state in which the width surface is parallel to the conveying method of the conveying frame through the auxiliary jig held by the hanging tool. Because it will be suspended, there is no risk of inadvertent contact between the surface-treated materials even when the interval between the hanging tools fixed to the conveyance frame is narrow. It is not necessary to use every other or every two or to change the interval pitch between the hanging tools, so that improvement in productivity and workability can be greatly expected.

これに加えて、被表面処理材料がその巾面を搬送枠の搬送方向に対して平行となる状態に吊り下げられることは、搬送中に空気抵抗を受けて振動する恐れが殆どなくなるので、被表面処理材料を処理槽内に浸漬する時には、例え、被表面処理材料が巾広且つ薄物であっても、その振動が原因となって、処理槽の内壁に衝突して、被表面処理材料自体が変形したり、これに伴い、不良表面処理が発生する心配がなくなって、各処理槽毎で、搬送中の被表面処理材料を即座に降下させることができる結果、処理効率が著しく向上する。   In addition, the fact that the surface treatment material is suspended in a state where the width surface thereof is parallel to the conveyance direction of the conveyance frame almost eliminates the possibility of vibration due to air resistance during conveyance. When the surface treatment material is immersed in the treatment tank, even if the surface treatment material is wide and thin, the surface treatment material itself collides with the inner wall of the treatment tank due to its vibration. As a result, the surface treatment material being conveyed can be immediately lowered for each treatment tank, and the treatment efficiency is significantly improved.

請求項2記載の発明にあっては、補助治具が2枚の被表面処理材料の吊下機能を備えているので、1個の吊下具に対して2枚の被表面処理材料を吊り下げられる結果、処理効率が一段と向上する。   In the invention according to claim 2, since the auxiliary jig has a function of suspending two surface treatment materials, two surface treatment materials are suspended from one suspension tool. As a result, the processing efficiency is further improved.

本発明は、搬送枠に固定される吊下具で補助治具を挾持して、当該補助治具で被表面処理材料をその巾面が搬送枠の搬送方向に対して平行となる状態に吊り下げることにより、特に、巾広で薄物の被表面処理材料に対しては、最適な吊下装置を提供せんとするものである。   In the present invention, an auxiliary jig is held by a hanging tool fixed to a conveyance frame, and the surface treatment material is suspended by the auxiliary jig in a state where the width surface thereof is parallel to the conveyance direction of the conveyance frame. By lowering, it is intended to provide an optimum suspension device especially for a wide and thin surface-treated material.

以下、本発明を図示する好適な実施例に基づいて詳述すれば、該実施例に係る吊下装置は、従来と異なり、搬送枠に一定の間隔をおいて固定される多数の吊下具で被表面処理材料たるアルミニウム型材を直に吊り下げるものではなく、吊下具で一旦別に独立する補助治具を挾持して、当該補助治具でアルミニウム型材をその巾面が搬送枠の搬送方向に対して平行となる状態に吊り下げることを特徴とするものである。   Hereinafter, the present invention will be described in detail with reference to a preferred embodiment. A suspension device according to the embodiment is different from a conventional suspension device in that a plurality of suspension tools are fixed to a conveyance frame at a predetermined interval. The aluminum mold that is the surface treatment material is not suspended directly, but a separate auxiliary jig is once held by the hanging tool, and the width of the aluminum mold with the auxiliary jig is the conveyance direction of the conveyance frame. It is characterized by suspending in a state parallel to.

そこで、まず、吊下具1と補助治具11から説明すると、前者の吊下具1は、図1・図2に示す如く、先端挾持部2aを有する通電バー兼用の挾持体2と、該挾持体2の先端挾持部2aと共働して後述する補助治具11の張出片18を挾持する回動挾持爪3と、該回動挾持爪3を開閉する操作レバー4と、回動挾持爪3に挾持力を付与する圧縮コイルばね5とを備え、回動挾持爪3と操作レバー4との連結構造は、図示する如く、回動挾持爪3と操作レバー4の対向面に設けられた各ギア部3a・4aの咬合で連結されている。但し、本発明においては、吊下具1自体はそれ程重要なものではないので、アルミニウム型材を直に吊り下げるその他既存の吊下具を用いることも十分に可能である。しかし、いずれにしても、吊下具1自体は、搬送枠の搬送方向に対して、補助治具11又はアルミニウム型材を直交する状態に吊り下げる設定となっている。   First, the suspension tool 1 and the auxiliary jig 11 will be described. As shown in FIGS. 1 and 2, the former suspension tool 1 includes a holding body 2 serving as a current-carrying bar having a tip holding portion 2a, A rotating gripping claw 3 that cooperates with the tip gripping portion 2a of the gripping body 2 to grip a protruding piece 18 of an auxiliary jig 11 described later, an operation lever 4 that opens and closes the rotating gripping claw 3, and a rotation A compression coil spring 5 for applying a holding force to the holding claw 3 is provided, and the connecting structure of the rotating holding claw 3 and the operation lever 4 is provided on the opposing surface of the rotating holding claw 3 and the operation lever 4 as shown in the figure. The gear portions 3a and 4a are connected by occlusion. However, in the present invention, since the hanging tool 1 itself is not so important, it is possible to use other existing hanging tools that directly suspend the aluminum mold material. However, in any case, the hanging tool 1 itself is set to suspend the auxiliary jig 11 or the aluminum mold material in a state orthogonal to the conveying direction of the conveying frame.

又、後者の補助治具11は、図1・図3に示す如く、上記吊下具1とは大きさが異なる以外は、基本的には同様で、先端挾持部12aを有する挾持体12と、該挾持体12の先端挾持部12aと共働してアルミニウム型材を挾持する回動挾持爪13と、該回動挾持爪13を開閉する操作レバー14と、回動挾持爪13に挾持力を付与する捻りコイルばね15とを備え、回動挾持爪13と操作レバー14との連結構造は、図示する如く、回動挾持爪13側に設けられた長孔16と操作レバー14側に設けられたピン17の遊嵌で連結されているが、この補助治具11は、更に加えて、上記挾持体12の側縁から張出片18を一体に延設して、該張出片18を挾持体12に対して直角に折曲する構成を併せて採用している。   1 and 3, the latter auxiliary jig 11 is basically the same except that the size of the hanging tool 1 is different from that of the hanging tool 1, and a holding body 12 having a tip holding portion 12a. Rotating gripping claws 13 that grip the aluminum mold in cooperation with the tip gripping portion 12 a of the gripping body 12, an operation lever 14 that opens and closes the rotating gripping claws 13, and a gripping force on the rotating gripping claws 13. As shown in the figure, the connecting structure between the rotating holding claw 13 and the operating lever 14 is provided on the operating lever 14 side and the long hole 16 provided on the rotating holding claw 13 side. In addition, the auxiliary jig 11 further includes a protruding piece 18 that is integrally extended from the side edge of the holding body 12 so that the protruding piece 18 is A configuration in which the holder 12 is bent at a right angle is also employed.

従って、補助治具11の張出片18が吊下具1の挾持体2と回動挾持爪3間で挾持された状態では、図4に示す如く、各自の操作レバー4・14は勿論のこと、挾持体2・12と回動挾持爪3・13の関係も、いずれも、直角にずれた位置に置かれることとなるので、補助治具11側の挾持体12と回動挾持爪13間で挾持されるアルミニウム型材は、従来と異なり、その巾面が搬送枠の搬送方向に対して平行となるように縦吊り状態をもって吊り下げられる訳である。   Therefore, in the state where the overhanging piece 18 of the auxiliary jig 11 is held between the holding body 2 of the hanging tool 1 and the rotary holding claw 3, as shown in FIG. In addition, since the relationship between the holding bodies 2 and 12 and the rotating holding claws 3 and 13 is set at a position shifted at a right angle, the holding body 12 and the rotating holding claws 13 on the auxiliary jig 11 side. Unlike the conventional case, the aluminum mold material held between the two is suspended in a vertically suspended state so that the width surface thereof is parallel to the transport direction of the transport frame.

依って、斯かる構成の吊下装置の下でも、今仮に、アルミニウム型材をアルマイト処理する場合には、アルミニウム型材を処理ラインに移送して、此処で、各型材を種々の処理槽(図示せず)へ軌条(図示せず)を介して搬送する搬送枠(図示せず)に縦吊り状態をもって吊り下げることとなるが、この時には、図5に示す如く、アルミニウム型材Wの上端部を補助治具11の挾持体12の先端挾持部12aと回動挾持爪13間で挾持する状態を得て、当該各補助治具11をその張出片18を介して対応する吊下具1に個々に挾持させれば、多数のアルミニウム型材Wは、その巾面が搬送枠の搬送方向(矢印方向)に対して平行となる状態に吊り下げられることとなる。   Therefore, even if the aluminum mold material is to be anodized even under the suspension device having such a configuration, the aluminum mold material is transferred to the treatment line, where each mold material is treated with various treatment tanks (not shown). In this case, as shown in FIG. 5, the upper end portion of the aluminum mold W is assisted as a result of being suspended in a vertically suspended state on a conveyance frame (not shown) that is conveyed via a rail (not shown). A state in which the tip gripping portion 12a of the gripping body 12 of the jig 11 is clamped between the rotary gripping claws 13 is obtained, and each auxiliary jig 11 is individually attached to the corresponding hanging tool 1 via the projecting piece 18. As a result, a large number of aluminum molds W are suspended in a state where their width surfaces are parallel to the transport direction (arrow direction) of the transport frame.

従って、例え、吊り下げられるアルミニウム型材Wが巾広且つ薄物であっても、吊下具1の搬送枠に対する固定間隔の制限を受けることがなくなるので、従来のように、搬送枠に固定される吊下具1の間隔が狭いとしても、型材W同士が接触して、吊下具1を一つ置き或いは二つ置きに使用したり、吊下具1同士の間隔ピッチを変更する必要が全くなくなるので、生産性や作業性の向上が大いに期待できることとなる。   Therefore, even if the aluminum mold W to be suspended is wide and thin, it is not limited by the fixed interval with respect to the conveyance frame of the hanging tool 1 and is thus fixed to the conveyance frame as in the past. Even if the interval between the hanging tools 1 is narrow, the mold members W are in contact with each other, and it is absolutely necessary to use one or two hanging tools 1 or change the interval pitch between the hanging tools 1. Therefore, productivity and workability can be greatly improved.

又、搬送枠で巾広且つ薄物のアルミニウム型材Wを各処理槽に搬送する場合にも、アルミニウム型材Wはその巾面を搬送方向に対して平行となる状態に吊り下げられているので、搬送中に空気抵抗を受けて振動することが殆どなくなる結果、各処理槽内に浸漬する時には、巾広で薄物の型材Wが処理槽の内壁に衝突して、型材W自体が変形したり、これに伴い、不良表面処理が発生する心配がなくなって、各処理槽毎で、搬送中のアルミニウム型材Wを即座に降下させることができる結果、従来と比較すると、処理効率が著しく向上する。   Also, when a wide and thin aluminum mold W is transported to each treatment tank by the transport frame, the aluminum mold W is suspended in a state where the width surface is parallel to the transport direction. As a result of almost no vibration due to air resistance inside, when immersed in each treatment tank, the wide and thin mold material W collides with the inner wall of the treatment tank, and the mold material W itself is deformed. As a result, there is no concern about the occurrence of defective surface treatment, and the aluminum mold W being conveyed can be immediately lowered in each treatment tank. As a result, the treatment efficiency is significantly improved as compared with the conventional case.

尚、上記した実施例では、1個の吊下具1に挾持される補助治具11が1枚のアルミニウム型材Wの吊下機能しか備えないものであるが、例えば、図6に示す如く、その張出片18の自由端縁側に同様な機構を付与して、2枚のアルミニウム型材Wを吊り下げられるようにすれば、1個の吊下具1に対して2枚のアルミニウム型材Wを吊り下げられるので、処理効率が一段と向上することとなる。   In the above-described embodiment, the auxiliary jig 11 held by one hanging tool 1 has only a function of hanging one aluminum mold W. For example, as shown in FIG. If a similar mechanism is provided on the free end edge side of the overhanging piece 18 so that two aluminum mold members W can be suspended, two aluminum mold members W can be attached to one hanging tool 1. Since it is suspended, the processing efficiency is further improved.

本発明に係る吊下装置は、特に、巾広で薄物のアルミニウム型材をアルマイト処理する場合などにおいて、搬送枠に多数のアルミニウム型材を吊り下げる吊下装置としては、頗る最適なものとなる。   The suspension apparatus according to the present invention is particularly suitable as a suspension apparatus for suspending a large number of aluminum molds on a conveyance frame, particularly when a wide and thin aluminum mold is anodized.

本発明の実施例に係る吊下装置を分解して示す斜視図である。It is a perspective view which decomposes | disassembles and shows the hanging apparatus which concerns on the Example of this invention. 吊下具を示す側断面図である。It is a sectional side view which shows a hanging tool. 補助治具を示す側断面図である。It is a sectional side view which shows an auxiliary jig. 補助治具を吊下具で挾持した状態を示す斜視図である。It is a perspective view which shows the state which clamped the auxiliary jig with the hanging tool. 吊下具に挾持された補助治具でアルミニウム型材を吊り下げた状態を示す要部斜視図である。It is a principal part perspective view which shows the state which suspended the aluminum type | mold material with the auxiliary jig clamped by the hanging tool. 補助治具の他例を示す斜視図である。It is a perspective view which shows the other example of an auxiliary jig.

符号の説明Explanation of symbols

1 吊下具
2 挾持体
2a 先端挾持部
3 回動挾持爪
3a ギア部
4 操作レバー
4a ギア部
5 圧縮コイルばね
11 補助治具
12 挾持体
12a 先端挾持部
13 回動挾持爪
14 操作レバー
15 捻りコイルばね
16 長孔
17 ピン
18 張出片
W アルミニウム型材(被表面処理材料)
DESCRIPTION OF SYMBOLS 1 Suspension tool 2 Gripping body 2a Tip clamping part 3 Rotating clamping claw 3a Gear part 4 Operation lever 4a Gear part 5 Compression coil spring 11 Auxiliary jig 12 Gripping body 12a Tip clamping part 13 Rotating clamping claw 14 Operation lever 15 Twist Coil spring 16 Long hole 17 Pin 18 Overhang piece W Aluminum mold material (surface treatment material)

Claims (2)

被表面処理材料を搬送枠に吊下具を介して縦吊り状態に吊り下げて、各処理槽へと順に搬送する被表面処理材料の吊下装置であって、上記吊下具で補助治具を挾持して、該補助治具で被表面処理材料をその巾面が搬送枠の搬送方向に対して平行となる状態に吊り下げることを特徴とする被表面処理材料の吊下装置。 A surface treatment material suspending device for suspending a surface treatment material in a vertically suspended state on a conveyance frame via a suspending tool and sequentially conveying the material to each treatment tank. And suspending the surface treatment material with the auxiliary jig so that the width surface thereof is parallel to the conveyance direction of the conveyance frame. 1個の吊下具に挾持される補助治具が、2枚の被表面処理材料の吊下機能を備えていることを特徴とする請求項1記載の被表面処理材料の吊下装置。
2. The apparatus for suspending a surface treatment material according to claim 1, wherein the auxiliary jig held by one suspending tool has a function of suspending the two surface treatment materials.
JP2004019338A 2004-01-28 2004-01-28 Device for hanging down article to be surface-treated Pending JP2005213543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004019338A JP2005213543A (en) 2004-01-28 2004-01-28 Device for hanging down article to be surface-treated

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004019338A JP2005213543A (en) 2004-01-28 2004-01-28 Device for hanging down article to be surface-treated

Publications (1)

Publication Number Publication Date
JP2005213543A true JP2005213543A (en) 2005-08-11

Family

ID=34903582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004019338A Pending JP2005213543A (en) 2004-01-28 2004-01-28 Device for hanging down article to be surface-treated

Country Status (1)

Country Link
JP (1) JP2005213543A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008254914A (en) * 2007-04-09 2008-10-23 Marunaka Kogyo Kk Surface treatment method by double row substrate vertical carriage, double row chuck hanger used for this surface treatment method, and double row chuck opening and closing device of this double row chuck hanger

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008254914A (en) * 2007-04-09 2008-10-23 Marunaka Kogyo Kk Surface treatment method by double row substrate vertical carriage, double row chuck hanger used for this surface treatment method, and double row chuck opening and closing device of this double row chuck hanger

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