JP2005212946A - Tension control method and device for carrier sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To control strictly the tension of a carrier sheet coated with ceramic slurry and being transported by the use of rollers for transportation of the carrier sheet without measuring the tension of the carrier sheet being transported. <P>SOLUTION: The control is performed using the first roller 2a installed downstream of the carrier sheet 1 in transportation and the second roller 2b installed upstream, and the torques of two torque servo motors 3a and 3b to rotate the rollers 2a and 2b are controlled. The pattern formation accuracy of element is maintained well, and the performance of the products such as multi-layer wiring board, laminate ceramic electronic component, etc. is enhanced. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a carrier sheet tension control method and a carrier sheet tension control apparatus for controlling a tension generated in a carrier sheet to a desired constant value when the carrier sheet is conveyed.

  When manufacturing a multilayer wiring board or a multilayer ceramic electronic component, a carrier sheet may be used from the viewpoint of productivity. This carrier sheet is a thin and long resin film, on which ceramic slurry is applied to a certain thickness to form a ceramic film. A fine conductor pattern is formed on the ceramic slurry while repeatedly carrying and stopping the carrier sheet. A plurality of sheets on which a conductor pattern is formed are laminated, heat-treated, and then cut to produce an element constituent part of a multilayer wiring board or a multilayer ceramic electronic component.

When the carrier sheet is conveyed, if the carrier sheet is deformed, the pattern forming accuracy of the element is lowered. Therefore, it is necessary to apply a certain tension to the carrier sheet so that the carrier sheet is not deformed or stretched.
FIG. 6 is a schematic diagram showing a conveying device that conveys such a carrier sheet while applying a constant tension (see, for example, Patent Document 1). The transport device feeds the carrier sheet 1 from the second suction roll 102 that has wound the carrier sheet 1 and rewinds it to the first suction roll 101. During the feeding, the ceramic slurry applied to the carrier sheet 1 is processed by a processing device (not shown). The first suction roll 101 is rotationally driven by a servo motor 106, and the servo motor 106 is controlled by a driver 107. The second suction roll 102 is rotationally driven by a servo motor 108, and the servo motor 108 is controlled by a driver 109.

This transport device is provided with a tension roller 103 in order to keep the tension of the carrier sheet 1 constant. The tension sensor 104 is connected to the tension roller 103, and the position of the tension roller 103 or the spring constant is adjusted so that the detection value of the tension sensor 104 is constant. That is, when the tension detected by the tension sensor 104 becomes weak, the tension roller 103 is pulled, and when the tension detected by the tension sensor 104 becomes strong, the tension roller 103 is loosened. Reference numeral 105 denotes an amplifier for taking out a detection output by the tension sensor 104.
JP 2001-213557 A

  However, in recent years, multilayer wiring boards and multilayer ceramic electronic components are required to have higher precision due to the downsizing and higher functionality of devices (cell phones, PDAs, computers, etc.) on which they are mounted. For this reason, the resin film used as the carrier sheet is also thinned, and the thickness of the ceramic film is thinned to 1 μm or less, and the ceramic film is easily deformed by bending or stretching.

For example, when one end of a PET film having a thickness of 38 μm, a width of 200 mm, and a length of 800 mm is fixed and the other end is pulled with 33 N (3.38 kg), the PET film for manufacturing a capacitor element is stretched by 0.119 mm (0.015%). If the thickness of the film is reduced and the width is reduced, the elongation is further increased.
If there is bending or slight deformation, cracks will occur in the ceramic film, resulting in structural defects or poor electrical performance of the finished multilayer wiring board or multilayer ceramic electronic component.

Therefore, it is necessary to keep the tension during conveyance of the carrier sheet strictly constant.
However, in the conventional conveying apparatus as shown in FIG. 6, when the carrier sheet accelerates or decelerates, the load acceleration such as the inertia constant and rotational viscosity of the tension roller acts on the carrier sheet. There is a problem that the tension cannot be detected accurately.
Furthermore, since the direction of the carrier sheet is changed by the tension roller, the carrier sheet is bent unnecessarily, and this bending adversely affects the carrier sheet.

  Accordingly, the present invention eliminates the roller for measuring the tension in the conveyance of the carrier sheet, and strictly controls the tension during the conveyance of the carrier sheet by the roller for conveying the carrier sheet, so that the multilayer wiring board and the multilayer ceramic electronic component are controlled. It is an object of the present invention to provide a carrier sheet tension control method and control device capable of improving the performance of a product such as the above.

  The carrier sheet tension control method according to the present invention includes a first roller disposed on the downstream side of the carrier sheet conveyance, a second roller disposed on the upstream side, and two torque servos that rotationally drive the respective rollers. In a method of conveying a carrier sheet using a motor and a torque generator that controls the torque of a torque servo motor, the radius of the first roller is Ra, the rotation angle is θa, the radius of the second roller is Rb, The rotation angle is θb, the torque generated by the torque servo motor that drives the first roller is Ta, the torque generated by the torque servo motor that drives the second roller is Tb, the inertia constant of the first roller is Ja, and the viscosity When the constant is Da, the inertia constant of the second roller is Jb, the viscosity constant is Db, and the spring constant of the carrier sheet is K, based on either or both of the following formulas (1) and (2): By controlling the torque of the torque servo motor, wherein the tension of the carrier sheet is a controlled to be constant.

(Ta−Jaθa ″ −Daθa ′) / Ra = K (Raθa−Rbθb) (1)
(Tb−Jbθb ″ −Dbθb ′) / Rb = K (Rbθb−Raθa) (2)
(Where “′” represents time derivative d / dt and “″” represents time second derivative d ² / dt ² )
According to this method, the speed of the carrier sheet can be controlled by controlling the torque of the torque servo motor in accordance with the equation (1) or (2) without providing a sensor for detecting the tension of the carrier sheet. Thus, control can be performed so that the tension of the carrier sheet becomes constant.

As the carrier sheet, for example, a sheet coated with ceramic slurry is used.
The material of the carrier sheet is, for example, one kind selected from nylon film, fluorine film, polyester film, polyolefin film, and polyimide film, or a mixture of plural kinds.
The thickness of the carrier sheet is typically 1 μm or more and 100 μm or less.

  The carrier sheet tension control apparatus of the present invention is an apparatus for carrying out the carrier sheet tension control method, and is substantially the same apparatus as the carrier sheet tension control method.

  As described above, according to the present invention, even when there is no roller for measuring the tension, the tension during the conveyance of the carrier sheet can be strictly controlled. Therefore, precise processing of the film applied on the carrier sheet is possible, and performance improvement of products such as multilayer wiring boards and multilayer ceramic electronic components can be realized. In particular, with the miniaturization of multilayer wiring boards and multilayer ceramic electronic components, there is a demand for a thinner carrier sheet. In this case, however, the carrier sheet is more easily stretched and the ceramic film is more likely to crack. The application of the tension control method of the present invention is more effective.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic view showing an example of a carrier sheet conveying apparatus of the present invention. This transport device includes two transport rollers 2a and 2b provided for transporting the carrier sheet 1, and two torque servo motors 3a and 3b that rotationally drive the respective transport rollers 2a and 2b. . The downstream conveying roller 2a that conveys the carrier sheet 1 may be referred to as a “first roller 2a”, and the upstream conveying roller 2b may be referred to as a “second roller 2b”. A roller for measuring the tension of the carrier sheet 1 is not disposed between the two rollers 2a and 2b.

  For the carrier sheet 1, a nylon film, a fluorine film, a polyester film (for example, polyethylene terephthalate; PET, polyethylene naphthalate; PEN), a polyolefin film, a polyimide film, or the like is used. Of these, PET films are often used as carrier sheets for capacitor elements. PEN film is also good in heat resistance and is used.

According to the transport apparatus of the present invention, the carrier sheet 1 wound around the second roller 2b is taken out from the second roller 2b, transported horizontally, and wound around the first roller 2a. During this conveyance, processing of the ceramic slurry applied to the carrier sheet is performed by a processing device (not shown).
In the present invention, the tension of the carrier sheet 1 is controlled to be constant by controlling the torque of the torque servo motors 3a and / or 3b without using a roller for measuring the tension.

In FIG. 1, a driver for controlling the torque servo motor 3a is indicated by 5a, a torque generator in the driver 5a is indicated by 4a, a driver for controlling the torque servo motor 3b is indicated by 5b, and a torque generator in the driver 5b is indicated. This is indicated by 4b.
The rotation angle of the torque servo motor 3a is θa, the rotation angle of the torque servo motor 3b is θb, the torque generated by the torque servo motor 3a is Ta, and the torque generated by the torque servo motor 3b is Tb. The inertia constant of the first roller 2a is Ja, the viscosity constant is Da, the inertia constant of the second roller 2b is Jb, and the viscosity constant is Db. The spring constant of the carrier sheet 1 is K. Further, the variation applied to the first roller 2a side is TLa, and the variation applied to the second roller 2b side is TLb.

The inertia constants Ja and Jb of the first and second rollers 2a and 2b are determined by the inertia constant of the roller itself and the inertia constant of the motor shaft, and the viscosity constants Da and of the first and second rollers 2a and 2b, respectively. Db is mainly determined by the grease viscosity of the motor shaft.
The equation of motion is expressed as the following equations (3) and (4). In the formula, one dot “·” has the same meaning as “′” and represents a time derivative d / dt. The two dots “··” have the same meaning as “″” and represent the time second-order derivative d ² / dt ² .

  In the expressions (3) and (4), the fluctuations TLa and TLb are the fluctuations ΔJa and ΔJb of the inertia constant, the fluctuations ΔDa and ΔDb of the viscosity constant, the fluctuation ΔK of the spring constant, and the disturbances Tea and Teb. Is expressed by the following equations (5) and (6).

The first and second rollers 2a and 2b are made of a material that is unlikely to be deformed even when continuously used, and are assembled so as not to cause looseness. Therefore, variations of inertia constants ΔJa and ΔJb The fluctuations ΔVa and ΔDb of the viscosity constant can be set to zero.
Therefore, the above formulas (3) and (5) can be summarized as the following formula (7). The subscript n represents a value ignoring the variation, that is, a nominal value (referred to as a nominal value).

In Equation (7), assuming that no disturbance Tea is generated during the conveyance, Tea = 0. Right side of equation (7) (Kn + ΔK) (Ra ² θa−RaRbθb)
Represents the difference between the rotation angles of the first and second rollers 2a and 2b multiplied by a spring constant, that is, the tension. Further, Ja and Da on the left side of the equation (7) are nominal values, and the angular velocity θa ′ and the angular acceleration θa ″ are values that can be grasped in real time. Therefore, in order to keep the tension constant, the equation (7) The torque Ta on the left side can be controlled.

  Further, the following equations (8) can be obtained by arranging the equations (4) and (6). Again, nominal values are used.

In this equation (8), assuming that no disturbance Tea is generated, Tea = 0. Right side of equation (8) (Kn + ΔK) (Rb ² θb−RaRbθa)
Represents tension. You may make it control the torque Tb of the left side of (8) Formula so that this tension | tensile_strength may become fixed.

Furthermore, the torques Ta and Tb may be simultaneously controlled so that the tension becomes constant by using both the expressions (7) and (8).
FIG. 2 is a block diagram for explaining the tension control method of the present invention. In FIG. 2, Ra is the radius of the first roller 2a, and Rb is the radius of the second roller 2b.
The distance traveled by the carrier sheet 1 per unit time (for example, 200 ms) is determined, and this is divided by the time to determine the angle command value θ ^* . Also, a tension command value F ^* is set.

The control of the first roller 2a is described as follows. In the adder 20, the angle command value θ ^* is added, and the angle θa of the first roller 2a is subtracted. This difference is passed through the PI controller 21 to obtain an angular velocity command value θ ^* ′, and an adder 22 obtains the difference between this and the angular velocity θa ′ of the first roller 2a. This difference is passed through the PI controller 23 to obtain a torque command value Ta ^* , and this value is input to the torque generator 24 for driving the torque servomotor 3a.

  In the adder 25 on the output side of the torque generator 24, the torque Ta generated by the torque generator 24 is output. 1 / (Ja · s) acts on the output of the adder 25 to determine the angular velocity θa ′. A value obtained by applying the viscosity constant Da to the angular velocity θa ′ becomes a load in the adder 25, and the angular velocity θa ′ is subtracted in the adder 22 on the input side of the PI controller 22 as described above. Further, the angle θa is determined from the angular velocity θa ′, and is subtracted from the adder 20 on the input side of the PI controller 21.

On the second roller 2b side, the adder 30 determines the difference between the angular velocity command value θ ^* ′ and the angular velocity θb ′ of the second roller 2b. This difference is passed through the PI controller 31 and the output is added by the adder 32. A torque command value Tb ^* is obtained from the output of the adder 32 and input to the torque generator 33 for driving the torque servomotor 3b.
The torque Tb generated by the torque generator 33 is output from the adder 27, and 1 / (Jb · s) acts on the output of the adder 27 to determine the angular velocity θb '. This angular velocity θb ′ having a viscosity constant Db acts as a load on the adder 27 on the output side of the torque generator 33. Further, this angular velocity θb ′ is subtracted to the adder 30 as described above.

  On the other hand, in the adder 26, the angle θa obtained from the torque generator 24 side becomes the linear distance dimension using the radius Ra of the first roller 2a, and the angle θb obtained from the torque generator 33 side. The spring constant K is applied to the difference from the linear distance dimension using the radius Rb of the second roller 2b. The one using the radius Ra becomes the load of the adder 25, and the one using the radius Rb becomes the load of the adder 27.

In addition, the adder 28 adds the torque command value Tb ^* and multiplies the angular velocity θb 'by the nominal value (nominal value) Dbn of the viscosity constant and the derivative of the angular velocity θb' as the acceleration. Subtract the constant multiplied by the nominal value Jbn. The adder 29 adds the value obtained by multiplying the tension command value F ^* by the radius Rb of the second roller 2b, that is, the torque command value T ^* , and subtracts the value after the addition in the adder 28. This operation
F ^* · Rb− (Tb ^* −θb′Dn−θb ″ Jn) (9)
It corresponds to. The torque difference obtained by the adder 29 is input to the torque generator 33 through the PI controller 34.

The angular velocity θb ′ and the angular acceleration θb ″ are values that can be grasped in real time. By using the inertial constant Jbn and the viscosity constant Dbn, which are nominal values, the torque Tb is controlled so that the tension becomes a constant target value. It becomes possible to control.
As described above, the tension during the conveyance of the carrier sheet can be controlled to be constant.
FIG. 3 is a block diagram for explaining another tension control method of the present invention. The difference from FIG. 2 is that the output of the adder 29 is provided before the adder 30 through the PI controller 34. It is being added to the adder 35. Other configurations are the same as in FIG. 2, and the effects are not different.

FIG. 4 is a block diagram for explaining still another tension control method of the present invention. The difference from FIG. 2 is that in FIG. 2, the value obtained by multiplying the angular velocity θb ′ by the viscosity constant Dbn of the second roller 2b and the value obtained by multiplying the inertia constant Jbn of the second roller 2b are subtracted. The torque command value Tb ^* is added, but in FIG. 4, the value obtained by multiplying the angular velocity θa ′ by the viscosity constant Dan of the first roller 2a and the value obtained by multiplying by the inertia constant Jan are subtracted. The torque command value Ta ^* is added differently. Therefore, the difference between the torque detected by the first roller 2a and the torque command value is fed back to the input of the torque generator 33 of the second roller 2b. Therefore, tension control is performed by controlling the torque of the second roller 2b based on the torque detected by the first roller 2a.

FIG. 5 is a block diagram for explaining still another tension control method of the present invention. The difference from FIG. 4 is that the output of the adder 29 is provided before the adder 30 through the PI controller 34. It is being added to the adder 35. Other configurations are the same as in FIG. 2, and the effects are not different.
By using the tension control method of the present invention described above and the apparatus that realizes the method, the carrier sheet can be conveyed while always keeping the tension of the carrier sheet constant, and the carrier sheet is prevented from being bent, stretched or deformed. can do. Therefore, when processing the ceramic slurry applied on the carrier sheet, the dimensional accuracy can be maintained, and the performance of products such as multilayer wiring boards and multilayer ceramic electronic components can be improved.

  Although the embodiments of the present invention have been described above, the embodiments of the present invention are not limited to the above-described embodiments, and various modifications can be made within the scope of the present invention.

It is a schematic diagram which shows an example of the conveying apparatus of the carrier sheet of this invention. It is a block diagram for demonstrating the tension control method of this invention. It is a block diagram for demonstrating the other tension control method of this invention. It is a block diagram for demonstrating the further another tension control method of this invention. It is a block diagram for demonstrating the further another tension control method of this invention. It is a schematic diagram which shows the conventional carrier sheet conveying apparatus.

Explanation of symbols

1 Carrier sheet 2a, 2b Conveying roller 3a, 3b Torque servo motor 4a, 4b Torque generator 5a, 5b Driver 20, 22, 25, 26, 27, 28, 29, 30, 32, 35 Adders 21, 23 31, 34 PI controller 24, 33 Torque generator

Claims (5)

The first roller disposed on the downstream side of the carrier sheet conveyance, the second roller disposed on the upstream side, two torque servo motors that rotate and drive the respective rollers, and the torque of the torque servo motor is controlled. In a method for conveying a carrier sheet using a torque generator,
The radius of the first roller is Ra, the rotation angle is θa, the radius of the second roller is Rb, the rotation angle is θb, the torque generated by the torque servo motor that drives the first roller is Ta, and the second roller is The torque generated by the driving torque servomotor is Tb, the inertia constant of the first roller is Ja, the viscosity constant is Da, the inertia constant of the second roller is Jb, the viscosity constant is Db, and the spring constant of the carrier sheet is K In this case, the control is performed so that the tension of the carrier sheet becomes constant by controlling the torque of the torque servo motor based on either or both of the following formulas (1) and (2). A carrier sheet tension control method.
(Ta−Jaθa ″ −Daθa ′) / Ra = K (Raθa−Rbθb) (1)
(Tb−Jbθb ″ −Dbθb ′) / Rb = K (Rbθb−Raθa) (2)
(Where “′” represents time derivative d / dt and “″” represents time second derivative d ² / dt ² )   The carrier sheet tension control method according to claim 1, wherein the carrier sheet is a sheet coated with ceramic slurry.   3. The carrier sheet according to claim 1, wherein the material of the carrier sheet is one kind selected from nylon film, fluorine film, polyester film, polyolefin film, and polyimide film, or a mixture of plural kinds. Tension control method.   The method for controlling the tension of the carrier sheet according to any one of claims 1 to 3, wherein the thickness of the carrier sheet is 1 µm or more and 100 µm or less. A first roller disposed on the downstream side of the carrier sheet conveyance, a second roller disposed on the upstream side, two torque servo motors for rotating the respective rollers, and controlling torque of the torque servo motor Used in a carrier sheet conveying device comprising a torque generator,
The radius of the first roller is Ra, the rotation angle is θa, the radius of the second roller is Rb, the rotation angle is θb, the torque generated by the torque servomotor that drives the first roller is Ta, and the second roller is The torque generated by the driving torque servomotor is Tb, the inertia constant of the first roller is Ja, the viscosity constant is Da, the inertia constant of the second roller is Jb, the viscosity constant is Db, and the spring constant of the carrier sheet is K In this case, a control means for controlling the tension of the carrier sheet to be constant by controlling the torque of the torque servo motor based on one or both of the following formulas (1) and (2): A carrier sheet tension control device comprising: a carrier sheet tension control device;
(Ta−Jaθa ″ −Daθa ′) / Ra = K (Raθa−Rbθb) (1)
(Tb−Jbθb ″ −Dbθb ′) / Rb = K (Rbθb−Raθa) (2)
(Where “′” represents time derivative d / dt and “″” represents time second derivative d ² / dt ² )

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