JP2005212138A - Liquid droplet discharging apparatus, method, and device manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid droplet discharging apparatus which can prevent clogging at nozzle openings of a liquid droplet discharging head, and to provide a method and the like. <P>SOLUTION: A capping unit 22 with a capping part 40 for capping a discharging head 20, a part of a tank 16 for storing a liquid, and a passage 18 for feeding the liquid of the tank 16 to the discharging head 20 are set in a chamber 38. The discharging head 20 which discharges the liquid fed from the tank 16 via the passage 18 as liquid droplets is configured to be movable both inside and outside of the chamber 38. An air conditioner 44 sets the chamber 38 interior and the capping part 40 interior to be a low-temperature high-humidity environment. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a droplet discharge apparatus and a droplet discharge method including a droplet discharge head that discharges a predetermined liquid as a droplet from a nozzle opening, and a device manufacturing method using the apparatus or method.

  The droplet discharge head includes a pressure generation chamber that stores a predetermined liquid supplied from a tank, a piezo element that pressurizes the pressure generation chamber, and a nozzle opening that communicates with the pressure generation chamber. By pressurizing the liquid in the generation chamber with a piezo element, a minute amount of liquid is discharged as droplets from the nozzle opening. In the liquid droplet ejection head having such a configuration, since the liquid contacts the air at the nozzle opening, the liquid in the vicinity of the nozzle opening evaporates and the viscosity of the liquid increases when the liquid droplets are not ejected from the nozzle opening for a long time. (Thickening), and clogging of the nozzle opening is caused.

For this reason, the droplet ejection head must have a capping device that seals (capping) the nozzle openings and prevents evaporation of the liquid from the nozzle openings. The capping device includes a sealing portion that seals the nozzle opening and a suction pump that supplies negative pressure into the sealing portion. This capping device not only simply seals the nozzle opening of the droplet discharge head with the sealing portion, but also applies a negative pressure to the sealing portion by a suction pump to forcibly discharge the liquid from the nozzle opening. Then, the thickened liquid is discharged in the vicinity of the nozzle opening. For details of the conventional capping device, refer to Patent Documents 1 and 2 below, for example.
JP 2001-261112 A JP-A-10-264402

  By the way, the amount of liquid evaporation increases as the temperature increases, and increases as the humidity decreases. For this reason, in a high-temperature and low-humidity environment, the amount of liquid evaporation from the nozzle opening of the droplet discharge head increases, and the nozzle opening is likely to be clogged. Also, in a high-temperature and low-humidity environment, even if the nozzle opening of the droplet discharge head is sealed with the sealing part of the capping device, the moisture retention in the sealing part decreases when the sealing time is extended for a long time, There is a problem that the nozzle opening is clogged.

  In addition, the flow path between the tank and the pressure generating chamber of the droplet discharge head is designed so that liquid does not leak, but there is a minute gap in the flow path that does not cause liquid leakage. There is. If such a gap exists, the liquid does not evaporate as much as evaporation from the nozzle opening, but the liquid evaporates from the gap and the liquid thickens. For this reason, for example, if the droplet discharge head is left in a resting state for a long period of time, the liquid thickens in the flow channel, and when the droplet discharge head is operated, the liquid thickened in the flow channel When reaching the opening, there is a problem that the nozzle opening is likely to be clogged.

  When the nozzle opening is clogged, after a liquid suction operation is performed from the nozzle opening of the droplet discharge head, cleaning is performed by wiping the nozzle plate surface with a wiper. For this reason, there is a secondary problem that the liquid discharge amount is increased and the liquid is wasted, the life of the wiper that wipes the nozzle plate surface is shortened, and further the water repellency of the nozzle plate surface is lowered. Arise.

  Further, in recent years, the droplet discharge device has been used for the manufacture of various devices having fine patterns such as color filters, microlens arrays, and the like used in liquid crystal display devices, and a plurality of droplet discharge heads. By providing this, the throughput (the number of devices that can be manufactured per unit time) is to be improved as much as possible. Therefore, a reduction in throughput due to clogging of the nozzle openings must be avoided as much as possible.

  The present invention has been made in view of the above circumstances, and a droplet discharge apparatus and method capable of preventing clogging at a nozzle opening of a droplet discharge head, and a device without causing a decrease in throughput. It is an object of the present invention to provide a device manufacturing method that can be used.

In order to solve the above-described problems, a droplet discharge device of the present invention includes a liquid storage unit that stores a predetermined liquid, and a droplet discharge that discharges the liquid supplied from the liquid storage unit as a droplet from a nozzle opening. A droplet discharge apparatus including a head includes an environment setting device that sets at least the nozzle opening of the droplet discharge head and an environment in the vicinity thereof to low temperature and high humidity.
According to the present invention, since the environment around the nozzle opening and the surrounding environment are set to low temperature and high humidity, the evaporation of the liquid from the nozzle opening is suppressed, and the liquid in the droplet discharge head is thickened. Can be suppressed. As a result, clogging at the nozzle opening can be prevented. In addition, since clogging of the nozzle opening is prevented, wasteful consumption of liquid can be suppressed by reducing the liquid suction operation from the nozzle opening, and shortening of the wiper life can be prevented by reducing the number of cleanings. Furthermore, it is possible to prevent a decrease in water repellency of the surface on which the nozzle openings are formed.
The droplet discharge device of the present invention is characterized in that the environment setting device sets the entire droplet discharge head to a low temperature and a high humidity.
According to the present invention, since the entire droplet discharge head is set to a low temperature and a high humidity, the amount of liquid evaporated from the nozzle opening can be suppressed. Further, even if a minute gap that does not cause liquid leakage occurs in the droplet discharge head, evaporation of the liquid from the gap can be suppressed. As a result, thickening of the liquid in the droplet discharge head can be suppressed, and clogging of the nozzle opening can be prevented.
In the droplet discharge device of the present invention, the environment setting device sets at least a part of the flow path of the liquid from the liquid storage unit to the droplet discharge head at low temperature and high humidity. Yes.
According to the present invention, since at least a part of the flow path of the liquid from the liquid storage unit to the droplet discharge head is set at a low temperature and a high humidity, a minute gap that does not cause liquid leakage is formed in the liquid flow. Even if it occurs in the channel, the evaporation of the liquid from the gap can be suppressed, and the thickening of the liquid in the channel can be suppressed. As a result, clogging of the nozzle openings of the droplet discharge head can be prevented.
In addition, the droplet discharge device of the present invention includes a capping device having a sealing portion that seals the nozzle opening of the droplet discharge head, and the environment setting device has a low temperature and high humidity inside the sealing portion. By setting, the nozzle opening of the droplet discharge head sealed in the sealing portion and the environment in the vicinity thereof are set to low temperature and high humidity.
According to this invention, the inside of the sealing portion that seals the nozzle opening of the droplet discharge head is set to low temperature and high humidity, and the environment of the nozzle opening of the droplet discharge head and the vicinity thereof is set to low temperature and high humidity. Therefore, the evaporation of the liquid from the nozzle opening can be suppressed and the thickening of the liquid in the droplet discharge head can be suppressed. As a result, clogging of the nozzle opening can be prevented even under a situation where the nozzle opening of the droplet discharge head is sealed by the sealing portion.
In addition, the droplet discharge device of the present invention includes a chamber that houses at least a part of the liquid storage unit and the droplet discharge head, and the environment setting device sets the inside of the chamber to low temperature and high humidity. By doing so, at least the nozzle opening of the droplet discharge head and the environment in the vicinity thereof are set to low temperature and high humidity.
According to the present invention, at least a part of the liquid storage unit and the droplet discharge head are accommodated in the chamber, and the chamber is set to low temperature and high humidity so that at least the nozzle opening of the droplet discharge head and the environment in the vicinity thereof Is set at low temperature and high humidity, at least the evaporation of the liquid from the nozzle opening is suppressed, and there is a minute gap that does not cause liquid leakage in the droplet discharge head. Even if there is a minute gap in the liquid flow path to the droplet discharge head that does not cause liquid leakage, evaporation of the liquid from these gaps can be suppressed. As a result, clogging of the nozzle openings of the droplet discharge head can be prevented more effectively.
Further, the droplet discharge device of the present invention is provided in the droplet discharge head and drives a pressure generating element that generates a pressure for discharging the droplet, so that the predetermined liquid is discharged from the nozzle opening. The nozzle opening and its vicinity are cooled by creating a flow toward the outside of the droplet discharge head.
According to the present invention, the pressure generating element provided in the droplet discharge head is driven to create a liquid flow from the nozzle opening toward the outside of the droplet discharge head, and the liquid whose temperature has risen is discharged from the droplet discharge head. The Thereby, since the nozzle opening and its vicinity are cooled, the environment of the nozzle opening and its vicinity can be set to low temperature.
In the droplet discharge device of the present invention, the predetermined liquid creates a flow from the nozzle opening toward the outside of the droplet discharge head in a state where the droplet discharge head is sealed in the sealing portion. It is characterized by comprising a negative pressure supply device for supplying a negative pressure to the inside of the sealing portion.
According to the present invention, when the droplet discharge head is sealed in the sealing portion, a negative pressure is supplied into the sealing portion to create a liquid flow from the nozzle opening toward the outside of the droplet discharge head. Thus, the liquid whose temperature has risen is discharged from the droplet discharge head. Thereby, since the nozzle opening and its vicinity are cooled, the environment of the nozzle opening and its vicinity can be set to low temperature.
Further, the droplet discharge device of the present invention is configured to measure the time during which the droplet discharge head is sealed in the sealing portion of the capping device, and the sealing according to the timing result of the timing unit. And a control means for controlling supply of negative pressure to the section.
According to this invention, the supply of negative pressure to the sealing portion is controlled according to the time during which the droplet discharge head is sealed in the sealing portion of the capping device, and the droplet is discharged from the droplet discharge head. Therefore, it is possible to suppress the thickening of the liquid in the droplet discharge head. As a result, clogging of the nozzle opening can be prevented even if the nozzle opening of the droplet discharge head is sealed for a long time.
In the droplet discharge device of the present invention, the environment setting device sets the humidity of at least the nozzle opening of the droplet discharge head and the vicinity thereof to a humidity in the range of 60 to 80%.
According to this invention, at least the nozzle opening of the droplet discharge head and the humidity in the vicinity thereof are set to a high humidity of 60 to 80%, so that the evaporation of the liquid from the nozzle opening can be suppressed, and as a result It is possible to prevent clogging of the nozzle opening. Here, it is not preferable to maintain the humidity at 60% or less because the evaporation of the liquid is promoted, and when the humidity is maintained at 80% or more, the member (for example, adhesive) constituting the droplet discharge head causes a chemical change to cause a droplet. This is not preferable because the discharge head may be deteriorated.
In order to solve the above problems, a droplet discharge method of the present invention is a droplet using a droplet discharge head that discharges the liquid supplied from a liquid storage unit that stores a predetermined liquid as a droplet from a nozzle opening. An ejection method is characterized in that it includes an environment setting step for setting at least the nozzle opening of the droplet ejection head and the environment in the vicinity thereof to low temperature and high humidity.
According to the present invention, since the environment of the nozzle opening and the vicinity thereof is set to low temperature and high humidity, the evaporation of the liquid from the nozzle opening is suppressed, and the thickening of the liquid in the droplet discharge head can be suppressed. it can. As a result, clogging at the nozzle opening can be prevented. In addition, since clogging of the nozzle opening is prevented, wasteful consumption of liquid can be suppressed by reducing the liquid suction operation from the nozzle opening, and shortening of the wiper life can be prevented by reducing the number of cleanings. Furthermore, it is possible to prevent a decrease in water repellency of the surface on which the nozzle openings are formed.
The droplet discharge method of the present invention is characterized in that the environment setting step is a step of setting the entire droplet discharge head to a low temperature and a high humidity.
According to the present invention, since the entire droplet discharge head is set to a low temperature and a high humidity, the amount of liquid evaporated from the nozzle opening can be suppressed. Further, even if a minute gap that does not cause liquid leakage occurs in the droplet discharge head, evaporation of the liquid from the gap can be suppressed. As a result, thickening of the liquid in the droplet discharge head can be suppressed, and clogging of the nozzle opening can be prevented.
In the droplet discharge method of the present invention, the environment setting step is a step of setting at least a part of the flow path of the liquid from the liquid storage unit to the droplet discharge head to a low temperature and a high humidity. It is characterized by.
According to the present invention, since at least a part of the flow path of the liquid from the liquid storage unit to the droplet discharge head is set at a low temperature and a high humidity, a minute gap that does not cause liquid leakage is formed in the liquid flow. Even if it occurs in the channel, the evaporation of the liquid from the gap can be suppressed, and the thickening of the liquid in the channel can be suppressed. As a result, clogging of the nozzle openings of the droplet discharge head can be prevented.
The droplet discharge method of the present invention includes a sealing step of sealing the nozzle opening in a state where at least the nozzle opening of the droplet discharge head and the environment in the vicinity thereof are set to low temperature and high humidity. It is characterized by that.
According to this invention, since the nozzle opening is sealed in a state where the nozzle opening of the droplet discharge head and the surrounding environment are set to low temperature and high humidity, evaporation of the liquid from the nozzle opening is suppressed. It is possible to suppress the thickening of the liquid in the droplet discharge head. As a result, clogging of the nozzle opening can be prevented even under a situation where the nozzle opening of the droplet discharge head is sealed by the sealing portion.
Further, in the droplet discharge method of the present invention, the sealing step supplies a negative pressure into the sealing portion to create a flow of the predetermined liquid from the nozzle opening toward the outside of the droplet discharge head. The method includes the step of setting the environment of the nozzle opening and the vicinity thereof to a low temperature.
According to the present invention, when the droplet discharge head is sealed in the sealing portion, a negative pressure is supplied into the sealing portion to create a liquid flow from the nozzle opening toward the outside of the droplet discharge head. Thus, the liquid whose temperature has risen is discharged from the droplet discharge head. Thereby, since the nozzle opening and its vicinity are cooled, the environment of the nozzle opening and its vicinity can be set to low temperature.
In addition, the droplet discharge method of the present invention includes a time measuring step for measuring a time during which the droplet discharge head is sealed in the sealing portion, and applying to the sealing portion according to a time measurement result in the time measuring step. And a control step for controlling supply of the negative pressure.
According to this invention, since the supply of the negative pressure to the sealing portion is controlled according to the time during which the droplet discharge head is sealed in the sealing portion, the droplet is discharged from the droplet discharge head. This also can suppress the thickening of the liquid in the droplet discharge head. As a result, clogging of the nozzle opening can be prevented even if the nozzle opening of the droplet discharge head is sealed for a long time.
Further, the device manufacturing method of the present invention is a method for manufacturing a device including a workpiece having a functional pattern formed at a predetermined location, and the droplet discharge device included in any of the above-described droplet discharge devices A step of forming the pattern by discharging the predetermined liquid as droplets onto the workpiece using a droplet discharge head used in the droplet discharge method according to any one of the above. Yes.
According to this invention, a predetermined liquid is applied onto a workpiece using the droplet discharge head provided in any of the droplet discharge devices described above or the droplet head used in any of the droplet discharge methods described above. Since the pattern is formed by ejecting the droplets as droplets, the time required to eliminate clogging of the nozzle openings is greatly reduced. As a result, the device can be efficiently manufactured without causing a decrease in throughput. The manufacturing cost of the device can be reduced.

  Hereinafter, a droplet discharge apparatus and method and a device manufacturing method according to an embodiment of the present invention will be described in detail with reference to the drawings.

[Droplet discharge device]
FIG. 1 is a perspective view showing a schematic configuration of a droplet discharge device according to an embodiment of the present invention. In the following description, if necessary, an XYZ orthogonal coordinate system is set in the drawing, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. In the XYZ orthogonal coordinate system, the XY plane is set to a plane parallel to the horizontal plane, and the Z axis is set to the vertically upward direction. In this embodiment, the movement direction of the discharge head (droplet discharge head) 20 is set to the X direction, and the movement direction of the stage ST is set to the Y direction.

  As shown in FIG. 1, the droplet discharge device IJ of the present embodiment is supported on a base 10, a stage ST that supports a substrate P such as a glass substrate on the base 10, and above the stage ST (+ Z direction), An ejection head 20 that can eject predetermined droplets onto the substrate P is configured. Between the base 10 and the stage ST, a first moving device 12 that supports the stage ST so as to be movable in the Y direction is provided. A second moving device 14 that supports the ejection head 20 so as to be movable in the X direction is provided above the stage ST.

  A tank 16 that stores a solvent (predetermined liquid) of liquid droplets discharged from the discharge head 20 via the flow path 18 is connected to the discharge head 20. In the present embodiment, description will be made assuming that the flow path 18 expands and contracts with the movement of the ejection head 20. A capping unit 22 and a cleaning unit 24 are arranged on the base 10. The control device 26 controls each part (for example, the first moving device 12 and the second moving device 14) of the droplet discharge device IJ to control the entire operation of the droplet discharge device IJ.

  The first moving device 12 is installed on the base 10 and is positioned along the Y-axis direction. The first moving device 12 includes, for example, a linear motor, and includes guide rails 12a and 12a, and a slider 12b provided to be movable along the guide rail 12a. The slider 12b of the linear motor type first moving device 12 can be positioned by moving in the Y-axis direction along the guide rail 12a.

The slider 12b includes a motor 12c for rotating around the Z axis (θ _Z ). The motor 12c is, for example, a direct drive motor, and the rotor of the motor 12c is fixed to the stage ST. Thus, by energizing the motor 12c, the rotor and the stage ST can rotate along the _θZ direction to index (rotate index) the stage ST. That is, the first moving device 12 is capable of moving the stage ST in the Y-axis direction and theta _Z direction. The stage ST holds the substrate P and positions it at a predetermined position. The stage ST has a suction holding device (not shown), and the suction holding device operates to suck and hold the substrate P on the stage ST through a suction hole (not shown) provided in the stage ST. To do.

  The second moving device 14 is mounted upright with respect to the base 10 using the support columns 28a and 28a, and is mounted at the rear portion 10a of the base 10. The second moving device 14 is constituted by a linear motor and is supported by a column 28b fixed to the columns 28a and 28a. The second moving device 14 includes a guide rail 14a supported by the column 28b, and a slider 14b supported so as to be movable in the X-axis direction along the guide rail 14a. The slider 14b can be positioned by moving in the X-axis direction along the guide rail 14a. The ejection head 20 is attached to the slider 14b.

  The discharge head 20 has motors 30, 32, 34, and 36 as swing positioning devices. If the motor 30 is driven, the ejection head 20 can be moved up and down along the Z direction, and the ejection head 20 can be positioned at an arbitrary position in the Z direction. When the motor 32 is driven, the ejection head 20 can be swung along the β direction around the Y axis, and the angle of the ejection head 20 can be adjusted. By driving the motor 34, the ejection head 20 can be swung along the γ direction around the X axis, and the angle of the ejection head 20 can be adjusted. If the motor 36 is driven, the ejection head 20 can be swung along the α direction around the Z axis, and the angle of the ejection head 20 can be adjusted.

  As described above, the ejection head 20 shown in FIG. 1 is linearly movable in the Z direction, and the slider 14b can be adjusted by swinging along the α direction, the β direction, and the γ direction. It is supported by. The position and posture of the discharge head 20 are accurately controlled by the control device 26 so that the position or posture of the droplet discharge surface 20a with respect to the substrate P on the stage ST side becomes a predetermined position or a predetermined posture. Note that a plurality of nozzle openings for discharging droplets are provided on the droplet discharge surface 20a of the discharge head 20.

  As the droplets ejected from the ejection head 20 described above, an ink containing a coloring material, a dispersion containing a material such as metal fine particles, a hole injection material such as PEDOT: PSS, and an organic EL substance such as a light emitting material are used. Liquid droplets containing various materials such as high-viscosity functional liquids such as liquid solutions and liquid materials, functional liquids containing microlens materials, and biopolymer solutions containing proteins and nucleic acids are used. The

  Here, the configuration of the ejection head 20 will be described. FIG. 2 is an exploded perspective view of the ejection head 20, and FIG. 3 is a perspective view showing a part of the main part of the ejection head 20. The discharge head 20 shown in FIG. 2 includes a nozzle plate 110, a pressure chamber substrate 120, a vibration plate 130, and a housing 140. As shown in FIG. 2, the pressure chamber substrate 120 includes a cavity 121, a side wall 122, a reservoir 123, and a supply port 124. The cavity 121 is a pressure chamber and is formed by etching a substrate such as silicon. The side wall 122 is configured to partition between the cavities 121, and the reservoir 123 is configured as a common flow path that can supply a predetermined liquid when the cavities 121 are filled with the predetermined liquid. The supply port 124 is configured to be able to introduce a predetermined liquid into each cavity 121.

  Further, as shown in FIG. 3, the diaphragm 130 is configured to be bonded to one surface of the pressure chamber substrate 120. The diaphragm 130 is provided with a piezoelectric element 150 which is a part of the piezoelectric device described above. The piezoelectric element 150 is a ferroelectric crystal having a perovskite structure, and is formed on the diaphragm 130 in a predetermined shape. The piezoelectric element 150 is configured to be capable of causing a volume change in response to a drive signal supplied from the control device 26. The nozzle plate 110 is bonded to the pressure chamber substrate 120 so that the nozzle openings 111 are arranged at positions corresponding to the plurality of cavities (pressure chambers) 121 provided in the pressure chamber substrate 120. The pressure chamber substrate 120 to which the nozzle plate 110 is bonded is further fitted in a housing 140 to form the droplet discharge head 20 as shown in FIG.

  In order to eject droplets from the ejection head 20, first, the control device 26 supplies a drive signal for ejecting the droplets to the ejection head 20. The predetermined liquid flows into the cavity 121 of the ejection head 20, and when a driving signal is supplied to the ejection head 20, the piezoelectric element 150 provided in the ejection head 20 changes in volume according to the driving signal. This volume change deforms the diaphragm 130 and changes the volume of the cavity 121. As a result, a droplet is ejected from the nozzle opening 111 of the cavity 121. In the cavity 121 from which the liquid droplets have been discharged, the liquid droplets reduced by the discharge are newly supplied from the tank 16.

  The discharge head 20 described with reference to FIGS. 2 and 3 has a configuration in which a volume change is generated in the piezoelectric element 150 to discharge droplets. However, heat is applied to a predetermined liquid by a heating element. A head configuration in which droplets are ejected by expansion may be used. Further, an ejection head that ejects droplets by causing a volume change by deforming the diaphragm by static electricity may be used.

  Returning to FIG. 1, the second moving device 14 can selectively position the discharge head 20 above the cleaning unit 24 or the capping unit 22 by moving the discharge head 20 in the X-axis direction. That is, even during the device manufacturing operation, if the ejection head 20 is moved onto the cleaning unit 24, the ejection head 20 can be cleaned. Further, if the ejection head 20 is moved onto the capping unit 22, capping is performed on the droplet ejection surface 20 a of the ejection head 20, the droplet is filled into the cavity 121, or ejection due to clogging of the nozzle opening 111 or the like. It becomes possible to recover defects. That is, the cleaning unit 24 and the capping unit 22 are arranged on the rear portion 10a side on the base 10 and directly below the moving path of the ejection head 20 and separated from the stage ST.

  The capping unit 22 and the cleaning unit 24 are disposed in the chamber 38. In FIG. 1, the chamber 38 is illustrated in a simplified manner in order to avoid complication of the drawing. In addition to the capping unit 22 and the cleaning unit 24, a part of the tank 16 and the flow path 18 are disposed in the chamber 38 (see FIG. 4). Here, the reason that only a part of the tank 16 is disposed in the chamber 38 is to facilitate replacement of the tank 16.

  An opening / closing mechanism (not shown) is provided on one of the side walls orthogonal to the X axis of the chamber 38 (side wall disposed on the + X direction side). By opening the opening / closing mechanism, the X direction of the ejection head 20 is provided. The ejection head 20 can be disposed in the chamber 38 or the ejection head 20 can be disposed outside the chamber 38 without hindering movement to the chamber 38. Moreover, the airtightness in the chamber 38 can be maintained by closing the open / close mechanism.

  When the opening / closing mechanism is closed with the discharge head 20 disposed in the chamber 38, the entire flow path 18 is accommodated in the chamber 38, but the opening / closing mechanism is disposed with the discharge head 20 disposed outside the chamber 38. In a closed state, a part of the flow path 18 is accommodated in the chamber 38 and the rest is disposed outside the chamber 38. Even when the discharge head 20 is disposed outside the chamber 38 and the opening / closing mechanism is closed, the flow path 18 is configured to be able to expand and contract in accordance with the movement of the discharge head 20. Since the loading and unloading operations of the substrate P with respect to the stage ST are performed on the front portion 10b side of the base 10, these chambers 38 do not interfere with these operations.

  Here, a case where the tank 16 and the discharge head 20 are separately attached and connected by an elastic flow path 18 will be described as an example. However, the tank 16 and the discharge head 20 are attached to the carriage. The attached structure may be sufficient. In such a configuration, the discharge head 20 and the tank 16 are connected by a flow path having a fixed length, and the tank 16 moves together with the discharge head 20.

  The cleaning unit 24 provided in the chamber 38 includes a wiper that wipes off the surface on which the nozzle openings 111 are formed, and cleaning the nozzle openings 111 and the like of the ejection head 20 is performed regularly or as needed during the device manufacturing process or during standby. Can be done. The capping unit 22 provided in the chamber 38 performs capping on the droplet discharge surface 20a during standby when the device is not manufactured so that the droplet discharge surface 20a of the discharge head 20 is not dried. It is used when filling, or recovers the ejection head 20 in which ejection failure has occurred.

  Next, the configuration for setting the environment (temperature and humidity) in the chamber 38 and the configuration of the capping unit 22 will be described. FIG. 4 is a diagram showing a configuration in the chamber 38 and a schematic configuration of an air conditioner provided accompanying the chamber 38. In FIG. 4, the same members as those shown in FIG. 1 are denoted by the same reference numerals, and the cleaning unit 24 is not shown.

  As shown in FIG. 4, the capping unit 22 includes a capping unit 40, a communication pipe 41, and a pump 42. The capping unit 40 is disposed in the chamber 38 and has a concave shape and a protrusion 40 a that abuts against the ejection head 20. In the capping portion 40, a wet member (not shown) made of a material such as sponge that has excellent absorbability for the liquid droplets discharged from the discharge head 20 and maintains a wet state when the liquid droplets are absorbed is fitted. Has been.

  A communication tube 41 communicating with the outside of the chamber 38 is connected to the bottom surface of the capping unit 40. The pump 42 is provided outside the chamber 38, and sucks and depressurizes the capping unit 40 through the communication pipe 41 (supplies a negative pressure). The pump 42 is electrically connected to the control device 26, and its drive is controlled under the control of the control device 26. A waste liquid tank 43 that stores liquid discharged through the communication pipe 41 is provided near the end of the communication pipe 41 disposed outside the chamber 38.

  An air conditioner 44 that sets the environment (temperature and humidity) in the chamber 38 and the capping unit 40 is provided outside the chamber 38. The air conditioner 44 sets the temperature in the chamber 38 and the capping unit 40 to a temperature lower than room temperature (for example, about 15 to 20 ° C.), and sets the humidity to about 60 to 80%. The air conditioner 44 sets temperature and humidity, supplies air, and exhausts based on the control signal output from the control device 26.

  Here, the temperature in the chamber 38 and the capping unit 40 is set to a temperature lower than about room temperature so that the evaporation of the liquid from the nozzle opening 111 and the leakage of the liquid in the discharge head 20 and the flow path 18 do not occur. This is to prevent the liquid from evaporating from a very small gap. Moreover, setting the humidity to a high humidity of about 60 to 80% is not preferable because the evaporation of the liquid is promoted if the humidity is set to a humidity lower than 60%, and discharging is performed if the humidity is set to a humidity higher than 80%. This is because a member (for example, an adhesive) constituting the head 20 may cause a chemical change to cause deterioration of the droplet discharge head 20.

  An air supply pipe 45 and a recovery pipe 46 are connected to the air conditioner 44. The air supply pipe 45 guides the air set at low temperature and high humidity by the air conditioner 44 to the chamber 38 and the capping unit 40. The air supply pipe 45 is branched into two, one branched air supply pipe 45 a is connected to the chamber 38, and the other branched air supply pipe 45 b is connected to the capping unit 40. The recovery pipe 46 is for recovering low-temperature and high-humidity air supplied from the air supply pipe 45, and a recovery pipe 46 a connected to the chamber 38 and a recovery pipe 46 b connected to the capping unit 40 are included in the recovery pipe 46. It is connected to the.

  In a state where the air conditioner 44 is in operation, the air set at a low temperature and high humidity by the air conditioner 44 is supplied into the chamber 38 via the supply pipes 45 and 45a, and the air conditioner via the recovery pipes 46a and 46. Collected at 44. Similarly, the air set to low temperature and high humidity by the air conditioner 44 is supplied into the capping unit 40 through the supply pipes 45 and 45 b and is recovered by the air conditioner 44 through the recovery pipes 46 b and 46.

  Next, the electrical functional configuration of the droplet discharge device IJ of this embodiment will be described. FIG. 5 is a block diagram showing an electrical functional configuration of the droplet discharge device according to the embodiment of the present invention. In FIG. 5, blocks corresponding to the members shown in FIGS. 1 to 4 are denoted by the same reference numerals. As shown in FIG. 5, the electrical configuration for controlling the droplet discharge device IJ includes a control computer 50, a control device 26, and a driving integrated circuit 60.

  The control computer 50 includes, for example, an internal storage device such as a CPU (Central Processing Unit), a RAM (Random Access Memory) and a ROM (Read Only Memory), an external storage device such as a hard disk and a CD-ROM, and a liquid crystal display device or CRT (CRT). A control signal for controlling the operation of the droplet discharge device IJ is output in accordance with a program stored in a ROM or a hard disk. The control computer 50 is connected to the control device 26 provided in the droplet discharge device IJ shown in FIG. 1 using, for example, a cable.

  The control device 26 includes an arithmetic control unit 52, a drive signal generation unit 54, and a timer unit 56. The arithmetic control unit 52 drives the first moving device 12, the second moving device 14, and the motors 30 to 36 based on a control signal input from the control computer 50 and a control program stored therein in advance, The operation of the pump 42 provided in the capping unit 22 is controlled, and the control signal for controlling the temperature and humidity setting, supply and exhaust of the air conditioner 44 provided in association with the chamber 38 is output to the air conditioner 44. To do.

  The arithmetic control unit 52 also outputs various data (drive signal generation data) for generating various drive signals for driving the plurality of piezoelectric elements 150 provided in the ejection head 20 to the drive signal generation unit 54. Further, the arithmetic control unit 52 generates selection data based on the control program and outputs the selection data to the switching signal generation unit 62 provided in the driving integrated circuit 60. This selection data includes nozzle selection data for designating the piezoelectric element 150 to which the drive signal is applied and waveform selection data for designating the drive signal applied to the piezoelectric element 150.

  In addition, the arithmetic control unit 52 counts the time during which the ejection head 20 is capped (sealed) using the capping unit 22 using the timer unit 56 and the time during which the ejection head 20 is not capped, and the pump The time for driving 42 is controlled.

  The drive signal generator 54 generates various drive signals having a predetermined shape based on the drive signal generation data and outputs the generated drive signals to the switch circuit 64. Examples of the drive signal generated by the drive signal generation unit 54 include a normal drive signal, a cooling drive signal, and a minute drive signal. The normal drive signal is a drive signal for discharging a predetermined amount of droplets from the nozzle opening 111. The cooling drive signal is a drive signal for forcibly discharging the liquid in the cavity 121 whose temperature has been increased by driving the piezoelectric element 150. When the cooling drive signal is applied to the piezoelectric element 150, the liquid in the cavity 121 whose temperature has risen is forcibly discharged, and the liquid whose temperature has not risen flows into the cavity 121. (Nozzle opening 111 and its vicinity) is cooled.

  The minute driving signal is a driving signal that vibrates the meniscus in the nozzle opening 111 by causing the piezoelectric element 150 to vibrate to such an extent that no liquid droplets are ejected from the nozzle opening 111, thereby preventing the liquid from being thickened in the vicinity of the nozzle opening 111. is there. The timer unit 56 receives, for example, a clock start signal and a clock time output from the arithmetic control unit 52, and outputs a clock completion signal when the clock time has elapsed since the clock was started.

  The driving integrated circuit 60 is provided in the ejection head 20 and includes a switching signal generator 62 and a switch circuit 64. The switching signal generator 62 generates a switching signal that instructs conduction / non-conduction of the drive signal to each piezoelectric element 150 based on the selection data output from the arithmetic control unit 52, and outputs the switching signal to the switch circuit 64. The switch circuit 64 is provided for each piezoelectric element 150 and outputs a drive signal designated by the switching signal to the piezoelectric element 150.

  Here, an example of the drive signal generated by the drive signal generation unit 54 and the operation of the ejection head will be briefly described. FIG. 6 is a diagram schematically illustrating the waveform of one cycle of the normal drive signal generated by the drive signal generation unit 54 and the operation of the ejection head. As shown in FIG. 6A, the normal drive signal is basically constant up to the maximum potential VPS from time T1 to time T2 after the voltage value starts from the intermediate potential Vm (hold pulse L1). (Charge pulse L2), and the maximum potential VPS is maintained for a predetermined time from time T2 to time T3 (hold pulse L3). Next, after falling from the time T3 to the time T4 with a constant slope to the lowest potential VLS (discharge pulse L4), the minimum potential VLS is maintained for a predetermined time from the time T4 to the time T5 (hold pulse). L5). Then, from time T5 to time T6, the voltage value rises at a constant slope to the intermediate potential Vm (charging pulse L6).

  When the normal drive signal described above is applied to the piezoelectric element 150, the piezoelectric element 150 performs the operation shown in FIGS. 6B to 6D, whereby a predetermined liquid is discharged from the nozzle opening 111 as a droplet. Discharged. First, when a charging pulse L2 in which the voltage value of the normal drive signal rises gently between time T1 and time T2 in FIG. 6A is applied to the piezoelectric element 150, FIG. 6B shows. As shown in the figure, the piezoelectric element 150 bends in the direction in which the volume of the cavity 121 is gradually expanded, and a negative pressure is generated in the cavity 121. As a result, a predetermined liquid is supplied from the reservoir 123 to the cavity 121. Further, as shown in the drawing, the liquid viscous material located in the vicinity of the nozzle opening 111 is slightly drawn toward the inside of the cavity 121, whereby the meniscus is drawn into the nozzle opening 111.

  Next, after a hold pulse L3 that holds the voltage value of the normal drive signal at the maximum potential VPS is applied to the piezoelectric element 150 between time T2 and time T3, the discharge pulse L4 is generated between time T3 and time T4. When applied, the piezoelectric element 150 rapidly bends in the direction of contracting the volume of the cavity 121, and a positive pressure is generated in the cavity 121. As a result, as shown in FIG. 6C, a predetermined liquid is ejected from the nozzle opening 111 as the droplet D1.

  When the droplet D1 is ejected, a hold pulse L5 that maintains the minimum potential VLS is applied to the piezoelectric element 150 from time T4 to time T5, and then the intermediate potential Vm from time T5 to time T6. A charging pulse L6 that rises at a constant slope is applied to the piezoelectric element 150. When the charging pulse L6 is applied to the piezoelectric element 150, the piezoelectric element 150 is deformed as shown in FIG. 6D, and a negative pressure is generated in the cavity 121. As a result, the predetermined liquid is supplied from the reservoir 123 to the cavity 121, and the predetermined liquid located in the vicinity of the opening of the nozzle opening 111 is slightly drawn toward the inside of the cavity 121, as shown in FIG. The meniscus is kept constant. Thus, for example, as the maximum potential VPS is higher or the slope of the discharge pulse L4 is steeper, the weight of the liquid viscous material discharged from the nozzle opening 111 per dot is larger.

  Next, the normal drive signal and the cooling drive signal are compared. FIG. 7 is a diagram schematically showing waveforms of one cycle of the normal drive signal and the cooling drive signal generated by the drive signal generation unit 54, and (a) is a diagram showing the waveform of the normal drive signal DN. FIG. 6B is a diagram illustrating a waveform of the cooling drive signal DC. As shown in FIG. 7A, the repetition frequency f of the normal drive signal DN is set to 20 kHz, whereas as shown in FIG. 7B, the repetition frequency f of the heating drive signal DH is 10 Hz. Is set to The repetition frequency f in the vicinity of 10 Hz can sufficiently drive the piezoelectric element 150, and at the same time, a frequency that minimizes heat (operation heat) generated by the operation of the piezoelectric element 150 (that is, operating temperature). , A frequency that does not heat the liquid in the cavity 121).

  Further, the inclination (time change rate) of the charge pulse L2 of the normal drive signal DN and the cooling drive signal DC, the time of the hold pulse L3, and the inclination of the discharge pulse L3 are the sizes of the droplets ejected from the nozzle opening 111. That is, it is one factor that defines the weight. The slopes of the charge pulse L2 and the discharge pulse L3 of the cooling drive signal DC are set gently with respect to the slopes of the charge pulse L2 and the discharge pulse L3 of the cooling drive signal DC, and a hold pulse of the cooling drive signal DC. The time L3 is set longer than the time of the hold pulse L3 of the normal drive signal DN.

[Droplet ejection method]
Next, a method for forming a microarray on the substrate P using the droplet discharge device IJ having the above configuration will be described. FIG. 8 is a flowchart showing an outline of a droplet discharge method according to an embodiment of the present invention. It is assumed that the ejection head 20 is capped in the capping unit 40 in the chamber 38 before the processing shown in FIG.

  When a discharge start instruction is output from the control computer 50 shown in FIG. 5 to the control device 26, the processing of the flowchart shown in FIG. 8 is started. When the processing is started, the arithmetic control unit 52 drives the motor 30 to move the discharge head 20 in the + Z direction, and separates the discharge head 20 from the protrusion 40 a of the capping unit 40. Further, the second moving device 14 is driven to move the discharge head 20 in the + X direction, thereby moving the discharge head 20 out of the chamber 38 and positioning it at the discharge start position (step S11). The opening / closing mechanism provided in the chamber 38 is opened before the ejection head 20 is moved based on a control signal from the arithmetic control unit 52, and is closed when the ejection head 20 is moved out of the chamber 38. .

  When the positioning of the ejection head 20 is completed, droplets are ejected onto the substrate P while scanning the substrate P and the ejection head 20 (step S12). Specifically, the arithmetic control unit 52 drives the first moving device 12 to scan the ejection head 20 in the + X direction, and simultaneously outputs drive signal generation data to the drive signal generation unit 54 to output the normal drive signal. DN is generated and selection data is output to the switching signal generator 62. A switching signal that instructs conduction / non-conduction of the drive signal to each piezoelectric element 150 based on the selection data from the arithmetic control unit 52 is generated by the switching signal generation unit 62 and designated by the switching signal by the switch circuit 64. A normal drive signal DN is applied to the piezoelectric element 150. Thereby, droplets are sequentially ejected from the plurality of nozzle openings of the ejection head 20 while the ejection head 20 is moving.

  When the first relative movement (scanning) between the ejection head 20 and the substrate P is completed, the arithmetic control unit 52 drives the first moving device 12 to place the stage ST supporting the substrate P on the Y axis with respect to the ejection head 20. A step is moved in the direction by a predetermined amount. After completing the step movement of the stage ST, the arithmetic control unit 52 moves the ejection head 20 with respect to the substrate P in the −X direction and starts the second scan. By repeating this operation a plurality of times and discharging droplets onto the substrate P, a microarray is formed on the substrate P.

  When the microarray is formed on the substrate P by performing the above operation, the arithmetic control unit 52 controls the first moving device 12 to move the substrate P on which the droplets are discharged to the unloading position. Then, the suction holding by the stage ST is released, and the substrate P is unloaded from the stage ST by a transfer device (not shown). While the substrate P is being unloaded from the stage ST, the arithmetic control unit 52 controls the second moving device 14 to move the ejection head 20 in the X-axis direction and position it above the capping unit 22 in the chamber 38. (Step S13). The opening / closing mechanism provided in the chamber 38 is opened before the ejection head 20 is moved based on a control signal from the arithmetic control unit 52, and is closed when the ejection head 20 is disposed in the chamber 38. become.

  When the positioning of the ejection head 20 in the X direction is completed, the arithmetic control unit 52 drives the motor 30 to move the ejection head 20 in the −Z direction, so that the droplet ejection surface 20a of the ejection head 20 becomes the capping unit 40. The ejection head 20 is capped at a low temperature and high humidity by contacting the formed protrusion 40a (step S14). That is, when the motor 30 is driven until the droplet discharge surface 20 a of the discharge head 20 discharges to the protrusion 40 a formed on the capping unit 40, the arithmetic control unit 52 causes the chamber 38 and the capping unit 40 to move to the air conditioner 44. A control signal for instructing the temperature and humidity in the inside and a control signal for starting supply of low-temperature and high-humidity air are output.

  The air conditioner 44 starts air supply with the temperature and humidity set based on the control signal from the arithmetic control unit 52. When the air supply is started, the air set to low temperature and high humidity by the air conditioner 44 is supplied into the capping unit 40 through the air supply pipes 45 and 45b, and is supplied by the air conditioner 44 through the recovery pipes 46b and 46. Collected. As a result, the ejection head 20 is capped in a state where the nozzle opening 111 and the surrounding environment are set to low temperature and high humidity.

  In addition, the air set to low temperature and high humidity by the air conditioner 44 is supplied into the chamber 38 through the supply pipes 45 and 45 a and is recovered by the air conditioner 44 through the recovery pipes 46 a and 46. As a result, the entire discharge head 20 disposed in the chamber 38 is set to low temperature and high humidity, and the flow path 18 from the tank 16 to the discharge head 20 is set to low temperature and high humidity. With the above operation, the operation of discharging droplets onto one substrate P is completed.

  While the ejection head 20 is capped by the capping unit 40, the process shown in FIG. 9 is performed. FIG. 9 is a diagram illustrating an example of processing performed during capping of the droplet discharge head 20. When capping of the discharge head 20 is started, the arithmetic control unit 52 first determines whether or not there is a discharge start instruction from the control computer 50 (step S21). When it is determined that there is an ejection start instruction from the computer 50 (when the determination result is “YES”), the capping process ends and the process shown in FIG. 8 is started.

  On the other hand, when it is determined that there is no discharge start instruction from the computer 50 (when the determination result is “NO”), the arithmetic control unit 52 uses the timer unit 56 to start measuring the capping time of the discharge head 20. (Step S22). Next, the calculation control unit 52 determines whether or not a predetermined time (for example, several days) has elapsed since the start of counting the capping time, and if not (when the determination result is “NO”), Returning to step S21, it is determined whether or not there is a discharge instruction.

  In step S22, when it is determined that the predetermined time has elapsed (when the determination result is “YES”), the arithmetic control unit 52 drives the pump 42 to supply negative pressure into the capping unit 40. . As a result, the liquid in the cavity 121 is sucked and a flow of the liquid toward the outside of the ejection head 20 is created, and the thickened liquid is discharged from the nozzle opening 111 to the outside of the ejection head 20.

  In addition, the arithmetic control unit 52 outputs drive signal generation data to the drive signal generation unit 54 to generate the cooling drive signal DC, and outputs selection data to the switching signal generation unit 62. Thereby, the cooling drive signal DC is applied to the piezoelectric element 150 of the ejection head 20, and the thickened liquid droplets from each of the nozzle openings 111 are sequentially flushed into the capping unit 40 (step S23). Here, the reason why the cooling drive signal DC is used for discharging the droplet is to prevent the temperature of the droplet in the cavity 121 from rising. In addition, the process of step S23 may be only suction, or may be only flushing within the cap. When the liquid suction or flushing is completed, the process returns to step S21.

  As described above, in this embodiment, at least the nozzle opening 111 of the discharge head 20 or the environment in the vicinity thereof is set to a low-temperature and high-humidity environment. The thickening of the liquid can be suppressed. As a result, clogging at the nozzle opening 111 can be prevented. In addition, since clogging of the nozzle opening 111 is prevented, wasteful consumption of liquid for eliminating clogging of the nozzle opening 111 can be suppressed, and shortening of the wiper life can be prevented by reducing the number of cleanings. In addition, it is possible to prevent a decrease in water repellency of the surface on which the nozzle openings are formed.

  In addition, since the cavity 38 is placed in a low-temperature and high-humidity environment with the discharge head 20 and the flow path 18 housed in the cavity 38, a minute gap that does not cause liquid leakage is formed in the discharge head 20 or the liquid. Even if it occurs in the flow path 18, the evaporation of the liquid from the gap can be suppressed. Thereby, it is possible to suppress the thickening of the liquid in the ejection head 20 (for example, the liquid in the reservoir 123) and the liquid in the flow path 18, and as a result, clogging of the nozzle opening 111 can be prevented. .

  Furthermore, even if the liquid in the cavity 121 is thickened in a state where the ejection head 20 is capped, the liquid that has been thickened periodically by the process shown in FIG. Clogging can be prevented more effectively. Furthermore, since the present embodiment is configured to supply low-temperature and high-humidity air only to the capping unit 40 and the chamber 38, a large-scale air conditioning facility is not required, and the cost of the entire droplet discharge device IJ is greatly increased. It will not rise.

  In the above-described embodiment, the case has been described in which the liquid whose viscosity has been periodically increased is discharged while the ejection head 20 is capped by the capping unit 40. However, suction and in-cap flushing by the pump 42 are performed in the cavity 121. It is preferable to carry out also when the temperature of the liquid inside is high. This is because the liquid that is high in temperature and easily evaporates can be discharged out of the ejection head 20. For example, it is desirable to perform this immediately after the ejection head 40 that has finished ejecting droplets onto the substrate P is capped by the capping unit 40.

[Device Manufacturing Method and Electronic Equipment]
The liquid droplet ejection apparatus and method according to the embodiments of the present invention have been described above. The liquid droplet ejection apparatus and the direction thereof are a film forming apparatus that forms a film, a wiring apparatus that forms wiring such as metal wiring, or a microlens array. It can be used as a device manufacturing apparatus for manufacturing devices such as a liquid crystal display device, an organic EL device, a plasma display device, and a field emission display (FED).

  Since the nozzle opening 111 of the discharge head that has finished discharging the droplet and the environment of the discharge head are kept in a low-temperature and high-humidity environment to prevent the nozzle opening from being clogged, the number of nozzle clogging is reduced, and clogging is recovered. It is possible to reduce the total time required for. In addition, it is possible to suppress wasteful consumption of liquid for eliminating nozzle clogging. As a result, the manufacturing cost of the device can be reduced and the throughput can be improved.

  Devices such as the above-described liquid crystal device, organic EL device, plasma display device, and FED are provided in electronic devices such as notebook computers and mobile phones. However, the electronic device is not limited to the above-described notebook computer and mobile phone, and can be applied to various electronic devices. For example, LCD projectors, multimedia-compatible personal computers (PCs) and engineering workstations (EWS), pagers, word processors, TVs, viewfinder type or monitor direct view type video tape recorders, electronic notebooks, electronic desk calculators, car navigation systems The present invention can be applied to electronic devices such as a device, a POS terminal, and a device provided with a touch panel.

1 is a perspective view showing a schematic configuration of a droplet discharge device according to an embodiment of the present invention. 3 is an exploded perspective view of the ejection head 20. FIG. 3 is a perspective view showing a part of the main part of the ejection head 20. FIG. FIG. 2 is a diagram illustrating a configuration in a chamber and a schematic configuration of an air conditioner provided accompanying the chamber. It is a block diagram which shows the electrical function structure of the droplet discharge apparatus by one Embodiment of this invention. It is a figure which shows typically the waveform for 1 period of the normal drive signal produced | generated by the drive signal production | generation part 54, and operation | movement of an ejection head. It is a figure which shows typically the waveform for 1 period of the normal drive signal and cooling drive signal which are produced | generated by the drive signal production | generation part 54. FIG. It is a flowchart which shows the outline of the droplet discharge method by one Embodiment of this invention. 6 is a diagram illustrating an example of processing performed during capping of the droplet discharge head 20. FIG.

Explanation of symbols

16 …… Tank (liquid storage part)
20 …… Discharge head (droplet discharge head)
22 …… Capping unit (capping device)
38 …… Chamber 40 …… Capping part (sealing part)
42 …… Pump (negative pressure supply device)
44 …… Air conditioner (environment setting device)
52 …… Calculation control unit (control means)
56 …… Timer section (time measuring means)
111 …… Nozzle opening 150 …… Piezoelectric element (pressure generating element)
IJ: Droplet ejection device

Claims (16)

In a droplet discharge device comprising a liquid storage unit for storing a predetermined liquid and a droplet discharge head for discharging the liquid supplied from the liquid storage unit as a droplet from a nozzle opening,
A droplet discharge apparatus comprising: an environment setting device that sets at least low temperature and high humidity in an environment in the vicinity of the nozzle opening of the droplet discharge head and in the vicinity thereof.   2. The droplet discharge device according to claim 1, wherein the environment setting device sets the entire droplet discharge head to a low temperature and a high humidity.   3. The liquid according to claim 1, wherein the environment setting device sets at least a part of a flow path of the liquid from the liquid storage unit to the droplet discharge head at a low temperature and a high humidity. Drop ejection device. A capping device having a sealing portion for sealing the nozzle opening of the droplet discharge head;
The environment setting device sets the inside of the sealing portion to a low temperature and a high humidity, thereby setting the environment of the nozzle opening of the droplet discharge head sealed in the sealing portion and the vicinity thereof to a low temperature and a high humidity. The droplet discharge device according to claim 1, wherein the droplet discharge device is set. A chamber containing at least a part of the liquid storage unit and the droplet discharge head;
The environment setting apparatus sets at least the nozzle opening of the droplet discharge head and the vicinity thereof to low temperature and high humidity by setting the inside of the chamber to low temperature and high humidity. The droplet discharge device according to any one of claims 1 to 3.   A pressure generating element that is provided in the droplet discharge head and generates a pressure for discharging the droplet is driven to create a flow of the predetermined liquid from the nozzle opening toward the outside of the droplet discharge head. 4. The droplet discharge device according to claim 1, wherein the nozzle opening and the vicinity thereof are cooled.   In a state where the droplet discharge head is sealed in the sealing portion, a negative pressure for generating a flow of the predetermined liquid from the nozzle opening toward the outside of the droplet discharge head is supplied into the sealing portion. The droplet discharge device according to claim 4, further comprising a negative pressure supply device that performs the operation. Clocking means for timing the time during which the droplet discharge head is sealed in the sealing portion of the capping device;
The liquid droplet ejection apparatus according to claim 7, further comprising: a control unit that controls supply of a negative pressure to the sealing portion according to a time measurement result of the time measuring unit.   9. The environment setting device according to claim 1, wherein at least the nozzle opening of the droplet discharge head and the humidity in the vicinity thereof are set to a humidity in a range of 60 to 80%. The droplet discharge device according to 1. A droplet discharge method using a droplet discharge head that discharges the liquid supplied from a liquid storage unit that stores a predetermined liquid as a droplet from a nozzle opening,
A droplet discharge method comprising: an environment setting step for setting at least low temperature and high humidity in an environment in the vicinity of the nozzle opening of the droplet discharge head and in the vicinity thereof.   11. The droplet discharge method according to claim 10, wherein the environment setting step is a step of setting the entire droplet discharge head to a low temperature and a high humidity.   12. The environment setting step is a step of setting at least a part of a flow path of the liquid from the liquid storage unit to the droplet discharge head at low temperature and high humidity. The droplet discharge method described.   11. The sealing step for sealing the nozzle opening in a state where at least the nozzle opening of the droplet discharge head and the environment in the vicinity thereof are set to low temperature and high humidity. 13. The droplet discharge method according to any one of items 12.   In the sealing step, a negative pressure is supplied into the sealing portion, and a flow of the predetermined liquid from the nozzle opening toward the outside of the droplet discharge head is generated, so that the environment of the nozzle opening and the vicinity thereof is lowered. The droplet discharging method according to claim 13, further comprising a setting step. A time measuring step of measuring a time during which the droplet discharge head is sealed in the sealing portion;
The droplet discharging method according to claim 14, further comprising: a control step of controlling supply of a negative pressure to the sealing portion according to a timing result of the timing step. A method for manufacturing a device including a workpiece having a pattern having functionality at a predetermined location,
The droplet discharge head with which the droplet discharge apparatus as described in any one of Claims 1-9 is equipped, or the droplet used with the droplet discharge method as described in any one of Claims 10-15. A device manufacturing method comprising a step of forming the pattern by discharging the predetermined liquid as droplets onto the work using an ejection head.

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