JP2005199491A - Droplet discharging apparatus, method for processing capping device, and method for manufacturing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a droplet discharging apparatus capable of preventing a nozzle opening or the like of a droplet discharging head from clogging or the like and suppressing useless consumption of a liquid by controlling accumulation/growing of solid substances in a sealing part for sealing the droplet discharging head, and to provide a method for processing a capping device or the like. <P>SOLUTION: A discharging head 20 provided in the droplet discharging apparatus is equipped with heads 20a and 20b arranged along the first row along the Y-direction and the heads 20c and 20d arranged along the second row along the Y-direction different from the first row. The heads 20c and 20d are such heads that discharge a specified liquid as droplets, and the heads 20a and 20b are such heads that discharge a solvent containing at least one of a penetrant and a humectant to the droplets discharged from the heads 20c and 20d as the droplets. By moving the head 20 in the X-direction, at least one of the penetrant and the humectant is fed into a capping part where the heads 20a-20d are respectively capped. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a droplet discharge device including a droplet discharge head that discharges a predetermined liquid as droplets from a nozzle opening, and the nozzle opening of the droplet discharge head is sealed (capped) to dry the liquid or The present invention relates to a capping apparatus processing method for preventing clogging and a device manufacturing method.

  The droplet discharge head includes a pressure generation chamber that contains a predetermined liquid, a piezo element that pressurizes the pressure generation chamber, and a nozzle opening that communicates with the pressure generation chamber. By pressurizing with a piezo element, a small amount of liquid is ejected as droplets from the nozzle opening. In the droplet discharge head having such a configuration, when the liquid in the vicinity of the nozzle opening evaporates or bubbles remain in the droplet discharge head, a droplet discharge failure occurs. For this reason, this type of liquid droplet ejection head requires a capping device that seals (capping) the nozzle openings to prevent drying of the liquid or clogging of the nozzle openings.

The capping device includes a sealing portion that seals the nozzle opening and a suction pump that supplies negative pressure into the sealing portion. This capping device not only simply seals the nozzle opening of the droplet discharge head with the sealing portion, but also applies a negative pressure to the sealing portion by a suction pump to forcibly discharge the liquid from the nozzle opening. The liquid thickened in the vicinity of the nozzle opening or the bubbles stagnating in the pressure generating chamber are discharged. For details of the conventional capping device, refer to Patent Documents 1 and 2 below, for example.
JP 2001-261112 A JP-A-10-264402

  By the way, an absorber is provided in the sealing portion of the capping device, and the liquid discharged from the droplet discharge head is absorbed to a certain amount. Since the sealing portion of the capping device is not airtight unless the droplet discharge head is sealed, the liquid discharged from the droplet discharge head and absorbed by the absorbent material is dried. Then, the pigment dissolved in the liquid becomes a solid and deposits and grows on the absorbent material.

  When such deposition / growth occurs, there is a possibility that the suction port of the pump formed in the sealing portion is clogged in order to supply a negative pressure into the sealing portion. Due to the clogging of the suction port, the forced discharge of the liquid from the nozzle opening of the droplet discharge head cannot be performed normally, and there is a problem that the nozzle opening is easily clogged. When the nozzle opening is clogged due to the clogging of the suction port, a pressure generating chamber is formed by a cleaning method in which the nozzle forming surface (surface on which the nozzle opening is formed) of the droplet discharge head is wiped with a wiper, and a piezo element. It is necessary to eliminate the clogging of the nozzle openings by increasing the pressure applied to the nozzles and repeatedly performing a flushing method for forcibly discharging more droplets than the normal droplet discharge amount.

  For this reason, there is a problem that the liquid is wasted and the life of the wiper is shortened, and further, it takes time to recover to a normal state (a state where droplets can be discharged from all nozzle openings). . In recent years, droplet discharge devices have been used for manufacturing various devices having fine patterns such as color filters, microlens arrays, and the like used in liquid crystal display devices, and a plurality of droplet discharge heads are provided. Thus, the throughput (the number of devices that can be manufactured per unit time) is being improved as much as possible. Therefore, a reduction in throughput due to clogging of the nozzle openings must be avoided.

  In addition, since droplets are ejected from the droplet ejection head with considerable momentum, when the droplets land on a solid material that has accumulated and grown on the absorber, rebounding occurs, and the nozzle surface of the droplet ejection head (nozzle opening) There is a risk of contaminating the surface on which is formed. In some cases, the liquid droplets adhering to the nozzle surface may break the liquid surface (meniscus) of the liquid in the nozzle opening, which causes a problem that the liquid droplets cannot be normally discharged.

  The present invention has been made in view of the above circumstances, and clogging of nozzle openings and the like of a droplet discharge head by controlling the deposition and growth of solid matter in a sealing portion that seals the droplet discharge head. And a processing method of a droplet discharge device and a capping device that can prevent wasteful consumption of liquid and a device manufacturing method that can manufacture a device without causing a decrease in throughput. Objective.

In order to solve the above problems, a droplet discharge device according to the present invention is a droplet discharge device including a plurality of droplet discharge heads each having a nozzle opening for discharging a predetermined liquid as droplets. Are arranged along a plurality of rows, and the droplet discharge heads arranged along any one of the plurality of rows use a solvent containing at least one of a penetrant and a humectant for the liquid as droplets. It is a droplet discharge head for discharging.
According to the present invention, the penetrant and the humectant for a predetermined liquid are supplied from the droplet discharge heads arranged along any one of the plurality of droplet discharge heads arranged along the plurality of rows. Since the solvent containing at least one is discharged as droplets, solids in the sealing portion (for example, pigments contained in a predetermined liquid, etc.) are discharged by discharging the solvent into the sealing portion that seals the droplet discharge head. ) Deposition / growth can be controlled.
In addition, the droplet discharge device of the present invention includes a capping device provided corresponding to each of the droplet discharge heads and having a plurality of sealing portions that seal the nozzle openings of each of the droplet discharge heads. It is characterized by that.
According to the present invention, since each of the nozzle openings of the plurality of droplet discharge heads provided by the plurality of sealing portions provided in the capping device is sealed, clogging of the nozzle openings at each droplet discharge head is prevented. Is done.
The droplet discharge device of the present invention includes a holding member that holds the plurality of droplet discharge heads, and a drive mechanism that drives the holding member in a predetermined direction to move the plurality of droplet discharge heads as a unit. It is characterized by having.
According to the present invention, since the plurality of droplet discharge heads are attached to the carriage and integrally movable in a predetermined direction, the plurality of droplet discharge heads can be moved without using a complicated drive mechanism. Can be made.
In the droplet discharge device of the invention, the arrangement direction of the droplet discharge heads along the plurality of rows is a direction orthogonal to the moving direction of the droplet discharge head.
According to this invention, the arrangement direction of the droplet discharge head is a direction orthogonal to the moving direction of the droplet discharge head, and the discharge head that discharges the solvent by simply moving the droplet discharge head in the moving direction Since it can be moved to the position of each sealing portion provided corresponding to the droplet discharge head, the deposition / growth of solid matter in each sealing portion can be controlled. As a result, it is possible to prevent a liquid droplet ejection defect due to clogging of a nozzle opening or the like of the liquid droplet ejection head and droplet rebound. Moreover, since clogging of the nozzle opening is prevented, wasteful consumption of liquid for eliminating clogging can be suppressed.
Further, the droplet discharge device according to the present invention includes a timing unit that counts a time during which each of the droplet discharge heads is not sealed in the sealing portion of the capping device, and the timing unit according to the timing result of the timing unit. And a control means for controlling the discharge amount of the solvent.
According to the present invention, the time during which the nozzle opening of the droplet discharge head is not sealed is timed, and the amount of solvent discharged is changed in accordance with the timed result. Therefore, the predetermined liquid discharged into the sealing portion The amount of solvent discharged can be controlled in accordance with the degree of drying of the nozzle, and clogging of the nozzle openings can be effectively prevented while minimizing unnecessary solvent consumption.
In the droplet discharge device of the present invention, each of the droplet discharge heads that discharge the solvent has two nozzle rows in which the nozzle openings are arranged, and discharges the penetrant from one nozzle row. The moisturizing agent is discharged from the other nozzle row.
According to the present invention, since the penetrant is discharged from one nozzle row provided in the droplet discharge head for discharging the solvent and the moisturizing agent is discharged from the other nozzle row, solid matter is accumulated in the sealing portion. Even if it is made, it can be melted and the inside of the sealing part can be kept at high humidity. The penetrant is a solvent for wetting and spreading liquid that does not spread and dissolving solidified liquid.
Moreover, the droplet discharge device of the present invention is characterized in that the penetrant includes a surfactant. Here, the surfactant preferably includes at least one of, for example, 1,2-alkanediol, a modified polysiloxane compound, and TEGmBE (triethylene glycol monobutyl ether).
In the droplet discharge device of the present invention, the humectant contains a monovalent alcohol. Here, the monovalent alcohol is preferably, for example, methanol, ethanol, propyl alcohol, butanol, pentanol or the like.
In order to solve the above-described problem, the capping apparatus processing method of the present invention includes a nozzle opening for discharging a predetermined liquid as droplets, and corresponds to each of a plurality of droplet discharge heads arranged along a plurality of rows. Provided in a capping apparatus having a plurality of sealing portions that seal the nozzle openings of each of the droplet discharge heads, the liquid being arranged along any one of the plurality of rows, and the liquid A plurality of droplet discharge heads provided for discharging a solvent containing at least one of a penetrating agent and a humectant as droplets are moved in a direction perpendicular to the arrangement direction along the plurality of rows to thereby remove the solvent. The method includes a step of discharging to each of the sealing portions.
According to the present invention, the penetrant and the humectant for a predetermined liquid are supplied from the droplet discharge heads arranged along any one of the plurality of droplet discharge heads arranged along the plurality of rows. Since the solvent containing at least one is discharged into a sealing portion that seals each nozzle opening of the droplet discharge head, solid matter (for example, a pigment contained in a predetermined liquid) in each sealing portion is deposited.・ Growth can be controlled. As a result, it is possible to prevent a liquid droplet ejection defect due to clogging of a nozzle opening or the like of the liquid droplet ejection head and droplet rebound. Moreover, since clogging of the nozzle opening is prevented, wasteful consumption of liquid for eliminating clogging can be suppressed.
Further, the processing method of the capping device according to the present invention includes a time measuring step for measuring a time during which each of the droplet discharge heads is not sealed in the sealing portion of the capping device, and a time measurement result of the time measuring step. And a control step of controlling a discharge amount of the solvent into the sealing portion.
According to the present invention, the time during which the nozzle opening of the droplet discharge head is not sealed is timed, and the amount of solvent discharged is changed in accordance with the timed result. Therefore, the predetermined liquid discharged into the sealing portion The amount of solvent discharged can be controlled in accordance with the degree of drying of the nozzle, and clogging of the nozzle openings can be effectively prevented while minimizing unnecessary solvent consumption.
In the capping apparatus processing method of the present invention, the control step is such that the discharge amount increases as the time during which each of the droplet discharge heads is not sealed in the sealing portion of the capping apparatus is longer. It is characterized by controlling to.
According to the present invention, the longer the time during which each of the droplet discharge heads is not sealed in the sealing portion of the capping device, the greater the amount of solvent discharged, so that solid matter accumulates and grows in the sealing portion. Even in this case, the solid material can be almost certainly melted.
Further, the capping apparatus processing method of the present invention includes a sealing step of sealing the nozzle opening of each of the droplet discharge heads in each of the sealing portions after discharging the solvent into the sealing portion. It is characterized by including.
According to this invention, each of the droplet discharge heads is sealed by the sealing portion after the solvent is discharged to each sealing portion, so that the inside of the sealing portion can be maintained at high humidity, and the droplet discharge It is possible to effectively prevent clogging of the nozzle opening of the head.
Further, the device manufacturing method of the present invention is a method for manufacturing a device including a workpiece having a functional pattern formed at a predetermined location, and the droplet discharge device included in any of the above-described droplet discharge devices Forming the pattern by ejecting the predetermined liquid as droplets on the workpiece using a droplet or a droplet ejection head used in the processing method of a capping device according to any one of the above, and the liquid A step of discharging the solvent into each sealing portion that seals a nozzle opening of the droplet discharge head using a droplet discharge head that discharges the solvent among the droplet discharge heads; and each of the sealing portions And a step of sealing the nozzle opening of each of the droplet discharge heads.
According to the present invention, a droplet discharge head provided in any of the above-described droplet discharge apparatuses or a droplet discharge head used in a processing method of a capping apparatus according to any one of the above is used to place on a workpiece. A pattern is formed by discharging a predetermined liquid as droplets, a solvent is discharged into each sealing portion using a droplet discharging head that discharges the solvent, and a nozzle opening of each of the droplet discharging heads at each of the sealing portions Therefore, it is possible to suppress wasteful consumption of a predetermined liquid and to effectively prevent clogging of the nozzle opening. As a result, the device can be efficiently manufactured without causing a decrease in throughput, and the manufacturing cost of the device can be reduced.

  Hereinafter, a droplet discharge apparatus, a capping apparatus processing method, and a device manufacturing method according to an embodiment of the present invention will be described in detail with reference to the drawings.

[Droplet discharge device]
FIG. 1 is a perspective view showing a schematic configuration of a droplet discharge device according to an embodiment of the present invention. In the following description, if necessary, an XYZ orthogonal coordinate system is set in the drawing, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. In the XYZ orthogonal coordinate system, the XY plane is set to a plane parallel to the horizontal plane, and the Z axis is set to the vertically upward direction. In this embodiment, the movement direction (main scanning direction) of the ejection head 20 is set to the X direction, and the movement direction (sub-scanning direction) of the stage ST is set to the Y direction.

  As shown in FIG. 1, the droplet discharge device IJ of the present embodiment is supported on a base 10, a stage ST that supports a substrate P such as a glass substrate on the base 10, and above the stage ST (+ Z direction), An ejection head 20 that can eject predetermined droplets onto the substrate P is configured. Although details will be described later, the ejection head 20 includes a plurality of heads (droplet ejection heads). Between the base 10 and the stage ST, a first moving device 12 that supports the stage ST so as to be movable in the Y direction is provided. A second moving device 14 that supports the ejection head 20 so as to be movable in the X direction is provided above the stage ST.

  The ejection head 20 has a liquid (predetermined liquid) ejected from the ejection head 20 through the flow path 18 and a plurality of heads arranged along a plurality of rows of the ejection head 20 along one row. A tank 16 for storing penetrants and humectants discharged from the plurality of arranged heads is connected. A capping unit (capping device) 22 and a cleaning unit 24 are arranged on the base 10. The control device 26 controls each part (for example, the first moving device 12 and the second moving device 14) of the droplet discharge device IJ to control the entire operation of the droplet discharge device IJ.

  The first moving device 12 is installed on the base 10 and is positioned along the Y-axis direction. The first moving device 12 includes, for example, a linear motor, and includes guide rails 12a and 12a, and a slider 12b provided to be movable along the guide rail 12a. The slider 12b of the linear motor type first moving device 12 can be positioned by moving in the Y-axis direction along the guide rail 12a.

The slider 12b includes a motor 12c for rotating around the Z axis (θ _Z ). The motor 12c is, for example, a direct drive motor, and the rotor of the motor 12c is fixed to the stage ST. Thus, by energizing the motor 12c, the rotor and the stage ST can rotate along the _θZ direction to index (rotate index) the stage ST. That is, the first moving device 12 is capable of moving the stage ST in the Y-axis direction and theta _Z direction. The stage ST holds the substrate P and positions it at a predetermined position. The stage ST has a suction holding device (not shown), and the suction holding device operates to suck and hold the substrate P on the stage ST through a suction hole (not shown) provided in the stage ST. To do.

  The second moving device 14 is mounted upright with respect to the base 10 using the support columns 28a and 28a, and is mounted at the rear portion 10a of the base 10. The second moving device 14 is constituted by a linear motor and is supported by a column 28b fixed to the columns 28a and 28a. The second moving device 14 includes a guide rail 14a supported by the column 28b, and a slider 14b supported so as to be movable in the X-axis direction along the guide rail 14a. The slider 14b can be positioned by moving in the X-axis direction along the guide rail 14a. The ejection head 20 is attached to the slider 14b.

  The discharge head 20 has a motor 30 as a positioning device in the Z direction and motors 32, 34, and 36 as swing positioning devices. If the motor 30 is driven, the ejection head 20 can be moved up and down along the Z direction, and the ejection head 20 can be positioned at an arbitrary position in the Z direction. When the motor 32 is driven, the ejection head 20 can be swung along the β direction around the Y axis, and the angle of the ejection head 20 can be adjusted. By driving the motor 34, the ejection head 20 can be swung along the γ direction around the X axis, and the angle of the ejection head 20 can be adjusted. If the motor 36 is driven, the ejection head 20 can be swung along the α direction around the Z axis, and the angle of the ejection head 20 can be adjusted.

  As described above, the ejection head 20 shown in FIG. 1 can move linearly in the Z direction, and can slide along the α direction, β direction, and γ direction to adjust the angle of the slider 14b. It is supported by. The position and posture of the discharge head 20 are accurately controlled by the control device 26 so that the position or posture of the droplet discharge surface 21 with respect to the substrate P on the stage ST side becomes a predetermined position or a predetermined posture. A plurality of nozzle openings for discharging droplets are provided on the droplet discharge surface 21 of the discharge head 20.

  As the droplets ejected from the ejection head 20 described above, an ink containing a coloring material, a dispersion containing a material such as metal fine particles, a hole injection material such as PEDOT: PSS, and an organic EL substance such as a light emitting material are used. Liquid droplets containing various materials such as high-viscosity functional liquids such as liquid solutions and liquid materials, functional liquids containing microlens materials, and biopolymer solutions containing proteins and nucleic acids are used. The

  Here, the configuration of the ejection head 20 will be described. FIG. 2 is a diagram schematically showing the droplet discharge surface 21 of the discharge head 20. As shown in FIG. 2, the ejection head 20 includes four heads 20a to 20d attached to a carriage C as a holding member. These heads 20a to 20d are arranged in a plurality of rows along a direction orthogonal to the moving direction (X direction) of the ejection head 20. In addition, although the case where the ejection head 4 includes four heads 20a to 20d will be described as an example here, the number of the heads may be two or more.

  In the example shown in FIG. 2, the head 20a and the head 20b are arranged on a straight line (first straight line) along the Y direction, and the head 20c and the head 20d are different from the first straight line along the Y direction (second line). Are arranged on a straight line). The heads 20c and 20d are arranged so as to be shifted by a predetermined amount in the + Y direction with respect to the heads 20a and 20b. Among the heads 20a to 20d, the heads 20a and 20b arranged on the first straight line are heads that discharge the penetrant and the moisturizing agent, and the heads 20c and 20d arranged on the second straight line are colored as described above. It is a head that discharges ink or the like (predetermined liquid) containing a material.

  The heads 20a to 20d have the same configuration, and a first nozzle row R1 and a second nozzle row R2 in which a plurality of nozzle openings 111 are arranged are formed on the nozzle surface included in the droplet discharge surface 21 of each of the heads 20a to 20d. ing. The heads 20a and 20b are configured such that the penetrant is discharged from the first nozzle row R1 and the humectant is discharged from the second nozzle row R2. The heads 20c and 20d are configured to eject ink or the like (predetermined liquid) containing the coloring material from both the first nozzle row R1 and the second nozzle row R2.

  The penetrant discharged from the first nozzle row R1 of the heads 20a and 20b is a solvent containing a surfactant, for example, containing 2% by weight of 1,2-hexanediol as 1,2-alkanediol, Examples thereof include a solvent containing 0.3% by weight of BYK348 as siloxane, 5% by weight of glycerin, and remaining in pure water. Moreover, the following 1st-6th solvents are mentioned other than said solvent. That is, 5% by weight of 1,2-hexanediol as 1,2-alkanediol, the first solvent whose remaining amount is pure water, 0.5% by weight of BYK348 as the modified polysiloxane, and the remaining amount is The second solvent, which is pure water, contains 0.5% by weight of BYK348 and 10% by weight of glycerin, the third solvent whose remaining amount is pure water, 2% by weight of 1,2-hexanediol, and 0% of BYK348. A fourth solvent containing 3% by weight, the remaining amount of which is pure water, 5% by weight of 1,2-hexanediol and 5% by weight of glycerin, the fifth solvent having a remaining amount of pure water, and glycerin 15% by weight, 5% by weight of TEGmBE (triethylene glycol monobutyl ether), 1% by weight of Olfine E1010 (acetylene glycol surfactant: manufactured by Nissin Chemical Co., Ltd.) Hints 1 wt% Noruamin a sixth solvent or the like remaining is pure.

  The humectants discharged from the second nozzle row R2 of the heads 20a and 20b are methanol, ethanol, n-propyl alcohol, iso-propyl alcohol, n-butanol, sec-butanol, tert-butanol, iso-butanol, Examples of the alcohol include n-pentanol. Or, high-boiling organic solvents such as ethylene glycol, diethylene glycol, triethylene glycol, polyethylene glycol, polypropylene glycol, propylene glycol, butylene glycol, 1,2,6-hexanetriol, thioglycol, hexylene glycol, glycerin, trimethylol Examples thereof include polyhydric alcohols such as ethane and trimethylolpropane, urea, 2-pyrrolidone, N-methyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone, and the like, or one or a mixture of two or more thereof Can be used as Of these alcohols, monohydric alcohols are preferably used.

  FIG. 3 is a perspective view showing a part of the main parts of the heads 20a to 20d provided in the ejection head 20. As shown in FIG. As shown in FIG. 3, the heads 20 a to 20 d are configured to include a nozzle plate 110, a pressure chamber substrate 120, and a vibration plate 130. The pressure chamber substrate 120 includes a cavity 121 as a pressure generation chamber, a side wall 122, a reservoir 123, and a supply port 124. The cavity 121 is a pressure chamber and is formed by etching a substrate such as silicon. The side wall 122 is configured to partition the cavities 121, and the reservoir 123 is configured as a common flow path that can supply liquid when each cavity 121 is filled with a predetermined liquid. The supply port 124 is configured to be able to introduce liquid into each cavity 121. For the heads 20a and 20b, a penetrant and a humectant are introduced instead of a predetermined liquid.

  Further, the diaphragm 130 is configured to be bonded to one surface of the pressure chamber substrate 120. The diaphragm 130 is provided with a piezoelectric element 150 which is a part of the piezoelectric device described above. The piezoelectric element 150 is a ferroelectric crystal having a perovskite structure, and is formed on the diaphragm 130 in a predetermined shape. The piezoelectric element 150 is configured to be capable of causing a volume change in response to a drive signal supplied from the control device 26. The nozzle plate 110 is bonded to the pressure chamber substrate 120 so that the nozzle openings 111 are arranged at positions corresponding to the plurality of cavities (pressure chambers) 121 provided in the pressure chamber substrate 120. The pressure chamber substrate 120 to which the nozzle plate 110 is bonded is fitted in a housing (not shown). The ejection head 20 is configured as described above.

  In order to discharge a predetermined liquid as droplets from the heads 20c and 20d included in the discharge head 20, first, the control device 26 supplies a drive signal for discharging the droplets to the heads 20c and 20d. The liquid flows into the cavities 121 of the heads 20c and 20d, and when a drive signal is supplied to the heads 20c and 20d, the piezoelectric element 150 provided in each of the heads 20c and 20d responds to the drive signal. Causes a volume change. This volume change deforms the diaphragm 130 and changes the volume of the cavity 121. As a result, liquid is discharged as droplets from the nozzle opening 111 of the cavity 121. The liquid that has been reduced by the discharge is newly supplied from the tank 16 to the cavity 121 from which the droplet has been discharged. The same operation is performed when the penetrant and the humectant are discharged from the heads 20a and 20b included in the discharge head 20. The heads 20a and 20b can eject only the penetrant or the moisturizer, or can eject the penetrant and the moisturizer simultaneously.

  Note that the heads 20a to 20d included in the ejection head 20 described with reference to FIG. 3 have a configuration in which a volume change is generated in the piezoelectric element to eject droplets. A head configuration in which heat is applied to the agent and droplets are ejected by expansion thereof may be used. Further, an ejection head that ejects droplets by causing a volume change by deforming the diaphragm by static electricity may be used.

  Returning to FIG. 1, the second moving device 14 can selectively position the discharge head 20 above the cleaning unit 24 or the capping unit 22 by moving the discharge head 20 in the X-axis direction. That is, even during the device manufacturing operation, for example, if the ejection head 20 is moved onto the cleaning unit 24, the ejection head 20 can be cleaned. Further, if the ejection head 20 is moved onto the capping unit 22, capping is performed on the droplet ejection surface 21 of the ejection head 20, the droplet is filled into the cavity 121, or ejection due to clogging of the nozzle opening 111 or the like. It becomes possible to recover defects.

  That is, the cleaning unit 24 and the capping unit 22 are arranged on the rear portion 10a side on the base 10 and directly below the moving path of the ejection head 20 and separated from the stage ST. Since the loading and unloading operations of the substrate P with respect to the stage ST are performed on the front portion 10b side of the base 10, the cleaning unit 24 or the capping unit 22 does not hinder the operation.

  The cleaning unit 24 includes a wiper that wipes off the surface on which the nozzle openings 111 are formed. The cleaning of the nozzle openings 111 and the like of the ejection head 20 can be performed regularly or at any time during the device manufacturing process or during standby. The capping unit 22 is used for capping the droplet discharge surface 21 during standby when the device is not manufactured or filling the cavity 121 with a droplet so that the droplet discharge surface 21 of the discharge head 20 is not dried. Also, the ejection head 20 in which ejection failure has occurred is recovered.

[Capping unit]
Next, the capping unit 22 will be described in detail. 4A and 4B are diagrams illustrating the configuration of the capping unit 22, in which FIG. 4A is a plan view of the capping unit 22 viewed from the ejection head 20 side, and FIG. 4B is a diagram in FIG. It is a cross-sectional arrow view along AA. 4A and 4B, the capping unit 22 includes a main body 40, capping portions 42a to 42d (sealing portions), a communication pipe 47, and a pump (negative pressure supply device) 46. ing.

  The capping parts 42a to 42d are provided corresponding to the heads 20a to 20d of the ejection head 20, as shown in FIG. That is, the capping part 42a and the capping part 42b are arranged on the same straight line along the Y direction, the capping part 42c and the capping part 42d are arranged on the same straight line along the Y direction, and the capping parts 42c and 42d are The capping portions 42a and 42b are arranged so as to be shifted by a predetermined amount in the + Y direction. Each of the capping portions 42 a to 42 d includes a wetting member 44 as an absorbent material fitted into a recess 43 formed in the main body 40 and a protruding portion 45 protruding from the upper surface 40 a of the main body 40.

  In addition, a communication pipe 47 that penetrates the lower surface 40 of the main body 40 is connected to the bottom surface of the recess 43. Here, the wetting member 44 is excellent in absorbability with respect to the droplets ejected from the ejection head 20, and maintains a wet state when the droplets are absorbed, and is made of, for example, a material such as sponge. The pump 46 sucks and depressurizes the capping parts 42 a to 42 d through the communication pipe 47 (supplying negative pressure). The pump 46 is electrically connected to the control device 26, and its drive is controlled under the control of the control device 26.

  Next, the electrical functional configuration of the droplet discharge device IJ of this embodiment will be described. FIG. 5 is a block diagram showing an electrical functional configuration of the droplet discharge device according to the embodiment of the present invention. In FIG. 5, blocks corresponding to the members shown in FIGS. 1 to 4 are denoted by the same reference numerals. As shown in FIG. 5, the electrical configuration for controlling the droplet discharge device IJ includes a control computer 50, a control device 26, and a driving integrated circuit 60.

  The control computer 50 includes, for example, an internal storage device such as a CPU (Central Processing Unit), a RAM (Random Access Memory) and a ROM (Read Only Memory), an external storage device such as a hard disk and a CD-ROM, and a liquid crystal display device or CRT (CRT). It includes a display device such as a Cathod Ray Tube) and outputs a control signal for controlling the operation of the droplet discharge device IJ according to a program stored in a ROM or a hard disk. The control computer 50 is connected to the control device 26 provided in the droplet discharge device IJ shown in FIG. 1 using, for example, a cable.

  The control device 26 includes an arithmetic control unit 52, a drive signal generation unit 54, and a timer unit 56. The arithmetic control unit 52 drives the first moving device 12, the second moving device 14, and the motors 30 to 36 based on a control signal input from the control computer 50 and a control program stored therein in advance, The operation of the pump 46 provided in the capping unit 22 is controlled.

  The arithmetic control unit 52 generates various data (drive signal generation data) for generating various drive signals for driving the plurality of piezoelectric elements 150 provided in each of the plurality of heads 20a to 20d of the ejection head 20. This is output to the drive signal generator 54. Further, the arithmetic control unit 52 generates selection data based on the control program and outputs the selection data to the switching signal generation unit 62 provided in the driving integrated circuit 60. This selection data includes nozzle selection data for designating the piezoelectric element 150 to which the drive signal is applied and waveform selection data for designating the drive signal applied to the piezoelectric element 150.

  In addition, the arithmetic control unit 52 uses the timer unit 56 to count the time during which the heads 20a to 20d are not capped (sealed) in each of the capping units 42a to 42d of the capping unit 22 and Accordingly, the amount of penetrating agent or moisturizing agent discharged from the heads 20a and 20b to each of the capping portions 42a to 42d is controlled. Note that the penetrant or the humectant may be discharged not only into the capping portions 42a to 42d but also onto the substrate P. Therefore, when the penetrant or the humectant is discharged onto the substrate P, the arithmetic control unit 52 controls the first moving device 12 and the second moving device 14 to move the head 20a above the substrate P. A drive signal is supplied to the head 20a.

  The drive signal generation unit 54 is based on the drive signal generation data described above, and has various drive signals of a predetermined shape, for example, a normal drive signal for ejecting droplets, and a fine vibration signal for causing the meniscus to vibrate in the nozzle openings 111. Are generated and output to the switch circuit 64. The timer unit 56 receives, for example, a clock start signal and a clock time output from the arithmetic control unit 52, and outputs a clock completion signal when the clock time has elapsed since the clock was started.

  The driving integrated circuit 60 is provided in each of the heads 20a to 20d, and includes a switching signal generation unit 62 and a switch circuit 64. The switching signal generator 62 generates a switching signal that instructs conduction / non-conduction of the drive signal to each piezoelectric element 150 based on the selection data output from the arithmetic control unit 52, and outputs the switching signal to the switch circuit 64. The switch circuit 64 is provided for each piezoelectric element 150 and outputs a drive signal designated by the switching signal to the piezoelectric element 150.

  Here, an example of the drive signal generated by the drive signal generation unit 54 and the operation of the head will be briefly described. FIG. 6 is a diagram schematically showing the waveform of one cycle of the normal drive signal generated by the drive signal generator 54 and the operation of the head. As shown in FIG. 6A, the normal drive signal is basically constant up to the maximum potential VPS from time T1 to time T2 after the voltage value starts from the intermediate potential Vm (hold pulse L1). (Charge pulse L2), and the maximum potential VPS is maintained for a predetermined time from time T2 to time T3 (hold pulse L3). Next, after falling from the time T3 to the time T4 with a constant slope to the lowest potential VLS (discharge pulse L4), the minimum potential VLS is maintained for a predetermined time from the time T4 to the time T5 (hold pulse). L5). Then, from time T5 to time T6, the voltage value rises at a constant slope to the intermediate potential Vm (charging pulse L6).

  When the normal drive signal described above is applied to the piezoelectric element 150, the piezoelectric element 150 performs the operations shown in FIGS. 6B to 6D, whereby a predetermined liquid or penetrant or A moisturizing agent is discharged. First, when a charging pulse L2 in which the voltage value of the normal drive signal rises gently between time T1 and time T2 in FIG. 6A is applied to the piezoelectric element 150, FIG. 6B shows. As shown in the figure, the piezoelectric element 150 bends in the direction in which the volume of the cavity 121 is gradually expanded, and a negative pressure is generated in the cavity 121. As a result, a predetermined liquid or a penetrant or a humectant is supplied from the reservoir 123 to the cavity 121. Further, as shown in the drawing, the liquid viscous material located in the vicinity of the nozzle opening 111 is slightly drawn toward the inside of the cavity 121, whereby the meniscus is drawn into the nozzle opening 111.

  Next, after a hold pulse L3 that holds the voltage value of the normal drive signal at the maximum potential VPS is applied to the piezoelectric element 150 between time T2 and time T3, the discharge pulse L4 is generated between time T3 and time T4. When applied, the piezoelectric element 150 rapidly bends in the direction of contracting the volume of the cavity 121, and a positive pressure is generated in the cavity 121. As a result, as shown in FIG. 6C, a predetermined liquid, a penetrating agent or a humectant is ejected from the nozzle opening 111 as the droplet D1.

  When the droplet D1 is ejected, a hold pulse L5 that maintains the minimum potential VLS is applied to the piezoelectric element 150 from time T4 to time T5, and then the intermediate potential Vm from time T5 to time T6. A charging pulse L6 that rises at a constant slope is applied to the piezoelectric element 150. When the charging pulse L6 is applied to the piezoelectric element 150, the piezoelectric element 150 is deformed as shown in FIG. 6D, and a negative pressure is generated in the cavity 121. As a result, the predetermined liquid or penetrant or moisturizer is supplied from the reservoir 123 to the cavity 121, and the predetermined liquid or penetrant or moisturizer located in the vicinity of the opening of the nozzle opening 111 is also slightly inward of the cavity 121. As shown in FIG. 6D, the meniscus is maintained in a constant state. Thus, for example, as the maximum potential VPS is higher or the slope of the discharge pulse L4 is steeper, the weight of the liquid viscous material discharged from the nozzle opening 111 per dot is larger.

[Capping device processing method]
Next, a method of forming a microarray on the substrate P using the droplet discharge device IJ having the above configuration will be described, and a processing method of the capping device performed after forming the microarray will be described in detail. FIG. 7 is a flowchart showing an outline of a microarray forming process.

  The process shown in FIG. 7 is started when the power of the droplet discharge device IJ is turned on by the operator. When the process is started, it is first determined whether or not the arithmetic control unit 52 of the control device 26 has received a control signal for controlling the operation of the droplet discharge device IJ from the control computer 50 (step S11). When the control signal is not received (when the determination result is “NO”), the process of step S11 is repeated. On the other hand, when it is determined that the control signal from the control computer 50 has been received (when the determination result is “YES”), the arithmetic control unit 52 controls the second mobile device 14 based on the received control signal. The ejection head 20 is moved from the home position (step S12). Here, the home position is a retracted position of the ejection head 20 and is a position where the ejection head 20 is capped by the capping unit 22 when the droplet ejection operation is not performed.

  When the ejection head 20 is moved from the home position, the arithmetic control unit 52 starts counting the time when the ejection head 20 is not capped by the capping unit 22 using the timer unit 56 (step S13). The non-capped time is stored in the counter Tr of the arithmetic control unit 52. When the above processing is completed, the arithmetic control unit 52 performs control to cause normal droplet discharge onto the substrate P (step S14). That is, the arithmetic control unit 52 controls the first moving device 12 to move the object P to the movement start position, and controls the second moving device 14 and the like to move the discharge head 20 to the discharge start position. Then, the drive signal generation data and the selection data are output to the drive signal generation unit 54 and the switching signal generation unit 62, respectively, and the normal drive signal is applied to the piezoelectric element 150 to generate droplets on the substrate P. Start dispensing.

  When the discharge of the liquid droplets is started, the arithmetic control unit 52 moves the discharge head 20 and the substrate P relative to each other in the X-axis direction (scanning), while the discharge head 20 (heads 20c and 20d) moves on the substrate P. A droplet is discharged from a predetermined nozzle with a predetermined width, and a microarray is formed on the substrate P. In the present embodiment, the ejection head 20 performs the ejection operation while moving in the + X direction with respect to the substrate P. When the first relative movement (scanning) between the ejection head 20 and the substrate P is completed, the stage ST supporting the substrate P is moved by a predetermined amount in the Y-axis direction with respect to the ejection head 20. The arithmetic control unit 52 performs the discharge operation while moving the discharge head 20 relative to the substrate P in the second relative movement (scanning) in the −X direction, for example. By repeating this operation a plurality of times, the ejection head 20 ejects droplets under the control of the arithmetic control unit 52 to form a microarray on the substrate P.

  When the microarray is formed on the substrate P by performing the above operation, the arithmetic control unit 52 controls the first moving device 12 to move the substrate P on which the droplets are discharged to the unloading position. Then, the suction holding by the stage ST is released, and the substrate P is unloaded from the stage ST by a transfer device (not shown). Next, the calculation control unit 52 determines whether or not the droplet discharge operation has been completed, that is, whether or not there is a substrate P on which a droplet is to be discharged next (step S15). If there is a substrate P on which droplets are to be ejected (when the determination result is “NO”), the process returns to step S14, a new substrate P is carried onto the stage ST, and is adsorbed and held again. Perform droplet ejection. Note that flushing may be performed by moving the ejection head to a predetermined retracted position while the substrate P is being unloaded and loaded.

  On the other hand, when it is determined in step S15 that the droplet discharge operation has been completed (when the determination result is “YES”), the arithmetic control unit 52 controls the second moving device 14 to move the discharge head 20 to the home position. (Step S16). When the movement to the home position is completed, the arithmetic control unit 52 causes the timer unit 56 to stop counting the time during which the ejection head 20 is not capped by the capping unit 22. As a result, the time from the start of time measurement in step S13 to the stop of time measurement in step S17 is stored in the counter Tr. When the above process is completed, the arithmetic control unit 52 controls the ejection head 20 and the capping unit 22 to perform the capping process for the ejection head 20 (step S18). When the capping process is completed, a series of ejection operations are terminated, and thereafter, the power supply of the droplet ejection device IJ is shut off by the operation of the operator.

  Next, the details of the capping process (step S18) in FIG. 7 will be described. FIG. 8 is a flowchart showing details of the capping process. When the capping process is started, the arithmetic control unit 52 first determines whether or not the value of the counter Tr indicating the time during which the ejection head 20 is not capped by the capping unit 22 is a value indicating within 2 hours (step S21). ). When the value of the counter Tr is a value indicating within 2 hours (when the determination result is “YES”), the pre-cap flushing number FLk is set to “1000” segments (step S22).

  Here, the pre-cap flushing number refers to the number of penetrants and moisturizers discharged into the capping units 42a to 42d before the heads 20a to 20d are capped by the capping units 42a to 42d of the capping unit 22, respectively. Say. A segment refers to the number of droplets ejected to one point (one dot) on the substrate P. For example, when it is set to eject droplets three times for one point on the substrate P (when 1 segment = 3 droplets), the pre-cap flushing number FLk is set to “1000” segments. In this case, 3000 droplets are ejected from one nozzle opening 111.

  When the value of the pre-cap flushing number FLk is set, the calculation control unit 52 controls the second moving device 14 to move the ejection head 20 in the X direction, and uses the heads 20a and 20b to enter the capping units 42a to 42d. The penetrant and the humectant are sequentially discharged (step S23). Specifically, after the arithmetic control unit 52 controls the second moving device 14 to position the heads 20a and 20b above the capping units 42a and 42b, the drive signal generation data is sent to the drive signal generation unit 54. While outputting, selection data is output with respect to the switching signal production | generation part 62 provided in head 20a, 20b. Then, “1000” segments of the penetrant are ejected from each nozzle opening 111 of the first nozzle row R1 provided in the heads 20a and 20b, and the moisturizing agent is “1000” from each nozzle opening 111 of the second nozzle row R2. "Discharge for the segment. As a result, the penetrant and the humectant are discharged into the capping portions 42a and 42b.

  Next, after the arithmetic control unit 52 controls the second moving device 14 to position the heads 20a and 20b above the capping units 42c and 42d, similarly, the first nozzle row R1 provided in the heads 20a and 20b. The penetrant is discharged from each nozzle opening 111 for “1000” segments, and the humectant is discharged from the nozzle openings 111 in the second nozzle row R2 for “1000” segments. As a result, the penetrant and the humectant are discharged into the capping portions 42c and 42d.

  FIG. 9 is a perspective view showing a state in which a penetrating agent and a moisturizing agent are discharged to the capping portions 42c and 42d using the heads 20a and 20b. As shown in FIG. 9, since the heads 20a and 20b are arranged by being shifted by a predetermined amount in the + Y direction with respect to the heads 20c and 20d, they are placed on the capping portions 42c and 42d provided corresponding to the heads 20c and 20d. When the heads 20a and 20b are positioned, the heads 20a and 20b and the capping portions 42c and 42d are displaced. Therefore, when the penetrating agent and the moisturizing agent are discharged to the capping units 42c and 42d, the penetrating agent and the moisturizing agent are selected only from the opening nozzle 111 located above the concave portion 43 of the capping units 42c and 42d using the selection data. Is discharged. In addition, when discharging the penetrant and the humectant, it is not necessary to discharge the entire concave portion 43 of the capping portions 42 a to 42 d, and it is sufficient that the penetrating agent and the humectant are discharged to a part of the concave portion 43.

  When the above operations are completed, the arithmetic control unit 52 controls the second moving device 14 to place the heads 20a to 20d above the capping units 42a to 42d, respectively, and corresponds to each of the heads as shown in FIG. The head is capped by being placed in contact with the capping unit (step S24). FIG. 10 is a perspective view showing a state where the heads 20a to 20d are capped by the corresponding capping portions 42a to 42d. When the above processing is completed, the process returns to step S18 in FIG.

  On the other hand, when the calculation control unit 52 determines in step S21 that the value of the counter Tr is a value indicating a time longer than 2 hours (when the determination result is “NO”), the value of the counter Tr is 2. It is determined whether the time is longer than the time and the value indicates within 5 hours (step S25). If the value of the counter Tr is longer than 2 hours and is less than 5 hours (when the determination result is “YES”), the pre-cap flushing number FLk is set to “5000” segments (step) S26).

  When the value of the pre-cap flushing number FLk is set, the calculation control unit 52 controls the second moving device 14 to sequentially move the heads 20a and 20b above the capping units 42a and 42b and the capping units 42c and 42d. For each of 42a to 42d, "5000" segments of penetrant are discharged from each nozzle opening 111 of the first nozzle array R1 provided in the heads 20a and 20b, and each nozzle opening 111 of the second nozzle array R2 is discharged. The moisturizing agent is discharged from the “5000” segment (step S23). When the discharge of the penetrating agent and the moisturizing agent is finished, each of the heads 20a to 20d is placed in contact with the corresponding capping portion 42a to 42d and the head is capped as shown in FIG. 10 (step S24). When the above processing is completed, the process returns to step S18 in FIG.

  On the other hand, in step S25, when the arithmetic control unit 52 determines that the value of the counter Tr is a value indicating a time longer than 5 hours (when the determination result is “NO”), the value of the counter Tr is 5 It is determined whether the time is longer than the time and is a value indicating 12 hours or less (step S27). If the value of the counter Tr is longer than 5 hours and is less than 12 hours (when the determination result is “YES”), the pre-cap flushing number FLk is set to “20000” segment (step S28).

  When the value of the pre-cap flushing number FLk is set, the calculation control unit 52 controls the second moving device 14 to sequentially move the heads 20a and 20b above the capping units 42a and 42b and the capping units 42c and 42d. For each of 42a to 42d, "20000" segments of penetrant are ejected from each nozzle opening 111 of the first nozzle row R1 provided in the heads 20a and 20b, and each nozzle opening 111 of the second nozzle row R2 is discharged. The moisturizing agent is discharged for “20000” segments (step S23). When the discharge of the penetrating agent and the moisturizing agent is finished, each of the heads 20a to 20d is placed in contact with the corresponding capping portion 42a to 42d and the head is capped as shown in FIG. 10 (step S24). When the above processing is completed, the process returns to step S18 in FIG.

  On the other hand, when the calculation control unit 52 determines in step S27 that the value of the counter Tr is a value indicating a time longer than 12 hours (when the determination result is “NO”), the pre-cap flushing number FLk is set. The “40000” segment is set (step S29). When the setting of the pre-cap flushing number FLk is completed, the calculation control unit 52 controls the second moving device 14 to sequentially move the heads 20a and 20b above the capping units 42a and 42b and the capping units 42c and 42d, “40000” segments of penetrant are discharged from each nozzle opening 111 of the first nozzle row R1 provided in the heads 20a and 20b to each of the capping portions 42a to 42d, and each nozzle of the second nozzle row R2 is discharged. The moisturizing agent is discharged from the opening 111 for “40000” segments (step S23). When the discharge of the penetrating agent and the moisturizing agent is finished, each of the heads 20a to 20d is placed in contact with the corresponding capping portion 42a to 42d and the head is capped as shown in FIG. 10 (step S24). When the above processing is completed, the process returns to step S18 in FIG.

  Thus, in this embodiment, among the plurality of heads 20a to 20d arranged along the plurality of rows in the ejection head 20, the heads 20a and 20b arranged along one row are used as the penetrant and the humectant. The heads 20a to 20d are capped after the penetrating agent and the moisturizing agent are discharged into the capping portions 42a to 42d. For this reason, the moisture retention of the capping parts 42a to 42d is improved, and even if solids are deposited and grown on the wet member 44 in the capping parts 42a to 42d, the solids can be dissolved.

  As a result, clogging of the communication pipe 47 connected to the capping parts 42a to 42d can be effectively prevented. Further, clogging of the nozzle openings 111 of the heads 20a to 20d can be prevented, and when droplets are ejected onto the solid matter deposited and grown on the wet member 44, the rebound adheres to the nozzle surface. Thus, it is possible to prevent the ejection failure of the droplets. Further, since clogging of the nozzle openings of the heads 20a to 20d can be prevented, the number of cleanings can be reduced, and the life of the wiper provided in the cleaning unit 24 can be extended.

  Further, in the present embodiment, the longer the time when the ejection head 20 is not capped by the capping unit 22, the greater the pre-cap flushing number FLk and the greater the amount of penetrant and moisturizer ejected. For this reason, it is possible to control the discharge amount of the penetrating agent and the moisturizing agent according to the degree of drying of the predetermined droplets discharged into the capping units 42b to 42d, and to minimize wasteful consumption of the penetrating agent and the moisturizing agent. In addition, the clogging of the continuous pain tube 47 and the nozzle opening 111 can be effectively prevented.

  In the embodiment described above, the case where the penetrant and the humectant are ejected from the heads 20a and 20b has been described as an example. However, a predetermined liquid is ejected from the heads 20a and 20b and arranged in other rows. The penetrating agent and the humectant may be discharged from the heads 20c and 20d. Further, in steps S22, S26, S28, and S29 in FIG. 8, the pre-cap flushing number FLk of the penetrant and the moisturizer is set equal, but the penetrant and the moisturizer may be set separately. .

  In the above embodiment, the heads 20a to 20d are held by one carriage C and are driven as a unit. However, a configuration in which a plurality of carriages holding each head is provided and each head is driven individually. Is desirable. With this configuration, for example, if the heads 20c and 20d are retracted from above the capping unit 22 and only the heads 20a and 20b are driven without driving these heads 20c and 20d, pre-cap flushing can be performed. .

[Device Manufacturing Method and Electronic Equipment]
As described above, the processing method of the droplet discharge device and the capping device according to the embodiment of the present invention has been described. It can be used as a device manufacturing apparatus for manufacturing devices such as a lens array, a liquid crystal display device, an organic EL device, a plasma display device, and a field emission display (FED).

  After the droplets are ejected onto the substrate P as a work by using the above-described droplet ejection device, a pattern is formed, and then the penetrating agent and the moisturizing agent are ejected into the capping portions 42a to 42d, and then the heads 20a to 20d. Since capping is performed, wasteful consumption of a predetermined liquid can be suppressed, and clogging of the nozzle opening can be effectively prevented. As a result, the device can be efficiently manufactured without causing a decrease in throughput, and the manufacturing cost of the device can be reduced.

  Devices such as the above-described liquid crystal device, organic EL device, plasma display device, and FED are provided in electronic devices such as notebook computers and mobile phones. However, the electronic device is not limited to the above-described notebook computer and mobile phone, and can be applied to various electronic devices. For example, LCD projectors, multimedia-compatible personal computers (PCs) and engineering workstations (EWS), pagers, word processors, TVs, viewfinder type or monitor direct view type video tape recorders, electronic notebooks, electronic desk calculators, car navigation systems The present invention can be applied to electronic devices such as a device, a POS terminal, and a device provided with a touch panel.

1 is a perspective view showing a schematic configuration of a droplet discharge device according to an embodiment of the present invention. 3 is a diagram schematically showing a droplet discharge surface 21 of the discharge head 20. FIG. 2 is a perspective view illustrating a part of a main part of heads 20a to 20d provided in the ejection head 20. FIG. It is a figure which shows the structure of the capping unit. It is a block diagram which shows the electrical function structure of the droplet discharge apparatus by one Embodiment of this invention. It is a figure which shows typically the waveform for 1 period of the normal drive signal produced | generated by the drive signal production | generation part 54, and operation | movement of a head. It is a flowchart which shows the outline of the formation process of a microarray. It is a flowchart which shows the detail of a capping process. It is a perspective view which shows a mode that the penetrating agent and the moisturizing agent are discharged to the capping parts 42c and 42d using the heads 20a and 20b. It is a perspective view which shows the state by which the heads 20a-20d were capped by the corresponding capping parts 42a-42d.

Explanation of symbols

14 …… Second moving device (drive mechanism)
20 …… Discharge head 20a to 20d …… Head (droplet discharge head)
22 …… Capping unit (capping device)
42a-42d ...... Capping part (sealing part)
52 …… Calculation control unit (control means)
56 …… Timer section (time measuring means)
111 ... Nozzle opening C ... Carriage (holding member)
P …… Substrate (work)
R1, R2 ... Nozzle row

Claims (13)

In a droplet discharge device including a plurality of droplet discharge heads having nozzle openings for discharging a predetermined liquid as droplets,
The plurality of droplet discharge heads are arranged along a plurality of rows, and the droplet discharge heads arranged along any one of the plurality of rows are at least one of a penetrant and a humectant for the liquid. A droplet discharge apparatus, which is a droplet discharge head that discharges a solvent containing a droplet as a droplet.   2. The liquid according to claim 1, further comprising a capping device provided corresponding to each of the droplet discharge heads and having a plurality of sealing portions that seal the nozzle openings of the droplet discharge heads. Drop ejection device. A holding member for holding the plurality of droplet discharge heads;
The droplet discharge device according to claim 1, further comprising: a drive mechanism that drives the holding member in a predetermined direction to move the plurality of droplet discharge heads integrally.   The droplet discharge device according to claim 3, wherein an arrangement direction of the droplet discharge heads along the plurality of rows is a direction orthogonal to a moving direction of the droplet discharge head. Clocking means for timing the time during which each of the droplet discharge heads is not sealed in the sealing portion of the capping device;
5. The droplet discharge device according to claim 1, further comprising: a control unit that controls a discharge amount of the solvent according to a time measurement result of the time measurement unit.   Each of the droplet discharge heads for discharging the solvent has two nozzle rows in which the nozzle openings are arranged, discharges the penetrant from one nozzle row, and applies the moisturizer from the other nozzle row. The droplet discharge device according to claim 1, wherein the droplet discharge device discharges the droplet.   The liquid droplet ejection apparatus according to claim 1, wherein the penetrant includes a surfactant.   The liquid droplet ejection apparatus according to claim 1, wherein the humectant contains a monovalent alcohol. A nozzle opening for discharging a predetermined liquid as a droplet is provided, provided corresponding to each of a plurality of droplet discharge heads arranged along a plurality of rows, and sealing the nozzle opening of each of the droplet discharge heads In a processing method of a capping device having a plurality of sealing parts
A plurality of droplet discharge heads arranged to discharge a solvent containing at least one of a penetrating agent and a humectant for the liquid as droplets, arranged along any one of the plurality of rows, A capping apparatus treatment method comprising the step of discharging the solvent to each of the sealing portions by moving in a direction orthogonal to the arrangement direction along the row. A time measuring step of measuring a time during which each of the droplet discharge heads is not sealed in the sealing portion of the capping device;
The capping apparatus processing method according to claim 9, further comprising: a control step of controlling a discharge amount of the solvent into the sealing portion according to a timing result of the timing step.   11. The control step of controlling so that the ejection amount increases as the time during which each of the droplet ejection heads is not sealed in the sealing portion of the capping device is longer. Processing method of the capping device.   10. The method according to claim 9, further comprising: a sealing step of sealing the nozzle opening of each of the droplet discharge heads in each of the sealing portions after discharging the solvent into the sealing portion. The processing method of the capping apparatus according to any one of 11. A method for manufacturing a device including a workpiece having a pattern having functionality at a predetermined location,
It is used with the processing method of the droplet discharge head with which the droplet discharge apparatus as described in any one of Claims 1-8 is equipped, or the capping apparatus as described in any one of Claims 9-12. Forming the pattern by discharging the predetermined liquid as droplets onto the workpiece using a droplet discharge head;
A step of discharging the solvent into each sealing portion that seals a nozzle opening of the droplet discharge head using a droplet discharge head that discharges the solvent among the droplet discharge heads;
Sealing the nozzle opening of each of the liquid droplet ejection heads with each of the sealing portions.

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