JP2005208787A - Semiconductor device - Google Patents

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JP2005208787A
JP2005208787A JP2004012597A JP2004012597A JP2005208787A JP 2005208787 A JP2005208787 A JP 2005208787A JP 2004012597 A JP2004012597 A JP 2004012597A JP 2004012597 A JP2004012597 A JP 2004012597A JP 2005208787 A JP2005208787 A JP 2005208787A
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tag
wireless
semiconductor chip
antenna
covering tube
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Takashi Tase
隆 田勢
Akira Sato
朗 佐藤
Mitsuo Usami
光雄 宇佐美
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Hitachi Ltd
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Hitachi Ltd
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<P>PROBLEM TO BE SOLVED: To manufacture a wireless IC tag having excellent mechanical reliability at low cost. <P>SOLUTION: This wireless IC tag has a wire connected to an electrode provided on the surface of a semiconductor chip, and is inserted into a cylindrical and flexible covering tube, and is heated and sealed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は,半導体チップを搭載した無線ICタグに係り,特に低コストで信頼性を必要とする無線ICタグに関する。   The present invention relates to a wireless IC tag on which a semiconductor chip is mounted, and more particularly to a wireless IC tag requiring low cost and reliability.

従来の半導体チップ表面及び裏面に接続端子を持つ,ダイポールアンテナの接続方法に付いては,特開平2002-269520号の公開特許公報に記載されている。
図1は,接続方法の平面図を示す。半導体チップ100の表面及び裏面に接続端子を持つ半導体チップ100をガラス管110に入れ,ジュメット120とリード線130を介して挟み込み,ガラス管110を加熱して封止する。前記リード線は,アンテナとなり非接触ICタグが完成される。
A conventional method for connecting a dipole antenna having connection terminals on the front and back surfaces of a semiconductor chip is described in Japanese Patent Application Laid-Open No. 2002-269520.
FIG. 1 shows a plan view of the connection method. The semiconductor chip 100 having connection terminals on the front and back surfaces of the semiconductor chip 100 is placed in the glass tube 110, sandwiched between the dumet 120 and the lead wire 130, and the glass tube 110 is heated and sealed. The lead wire becomes an antenna to complete a non-contact IC tag.

特開平2002-269520号JP-A-2002-269520

前記従来方法での半導体チップ表面及び裏面に接続端子を持つICチップ構造は,次の様な課題がある。
(1)接続したワイヤを曲げると柔軟性がないため,ワイヤが変形し,通信特性が低下する。
(2)ガラス封止技術のため,半導体チップが入っている部分が厚く,薄い物への挿入や貼り付けに適さない。
(3)ダイポール型アンテナタグを用いると長距離通信可能なICタグを得ることが出来ない。
(4)金属板に貼り付けると通信動作を確認出来ない。これらの要因により,連続使用が厳しく機械的信頼性試験に耐えることが困難となる。
本発明は,上記の課題を解決し,前記ICタグにおいて,2本の微細ワイヤを接続後,ICタグ全体を柔軟性がある樹脂で被覆補強することで,外部より応力をかけても高信頼性のICタグが安価で簡単に得ることを提供することを目的とする。
The IC chip structure having connection terminals on the front and back surfaces of the semiconductor chip in the conventional method has the following problems.
(1) If the connected wire is bent, there is no flexibility, so the wire is deformed and communication characteristics are deteriorated.
(2) Because of the glass sealing technology, the portion containing the semiconductor chip is thick and is not suitable for insertion or pasting into a thin object.
(3) If a dipole antenna tag is used, an IC tag capable of long-distance communication cannot be obtained.
(4) The communication operation cannot be confirmed when pasted on a metal plate. These factors make continuous use severe and difficult to withstand mechanical reliability tests.
The present invention solves the above-mentioned problems, and after connecting two fine wires in the IC tag, the entire IC tag is coated and reinforced with a flexible resin, so that high reliability can be obtained even when stress is applied from the outside. The purpose is to provide an inexpensive and easy to obtain IC tag.

前記課題を解決するため,第1の手段として,半導体チップ表面に設けられた電極にワイヤを接続した無線ICタグにおいて,半導体チップに接続したワイヤは送受信用アンテナとして用いる。前記無線ICタグは,開口部を有する受難性のある被覆用部材に挿入し、被覆用部材を加熱することによって実装を行う。一例としては、両端に開口部をもつ円筒形状をした柔軟性のある樹脂やシリコンゴム(被覆用チューブ)の中に挿入し,被覆用チューブを加熱することによって,被覆用チューブ全体又は両端が加熱封止する構造とする。   In order to solve the above problems, as a first means, in a wireless IC tag in which a wire is connected to an electrode provided on the surface of a semiconductor chip, the wire connected to the semiconductor chip is used as a transmission / reception antenna. The wireless IC tag is mounted by being inserted into a cover member having an opening and having difficulty in receiving, and heating the cover member. As an example, the entire coating tube or both ends are heated by inserting into a flexible resin or silicone rubber (covering tube) with a cylindrical shape with openings at both ends and heating the coating tube. It is set as the structure sealed.

第2の手段としては,ICタグ全体を包むように,被覆用部材全体を収縮させ,両端を密封しない構造とする。第3の手段としては,半導体チップと接続されるアンテナは,シート状アンテナ基板でダイポールアンテナ,スリット付アンテナのいずれを用いても良い構造とする。第4の手段としては,ICタグ全体を包む材料は,誘電率(ε:イプシロン)が大きい材料を用いることにより,半導体チップに接続したワイヤを短くすることを可能とした無線ICタグ構造とする。前記構造にすることにより,外部の影響をなくする構造のため,捻れ,圧縮,引張り,曲げ応力強い構造を特徴とする低価格で信頼性が高い半導体装置を実現することが可能となる半導体装置とすることである。   As a second means, the entire covering member is contracted so as to wrap the entire IC tag, and the both ends are not sealed. As a third means, the antenna connected to the semiconductor chip has a structure in which either a dipole antenna or an antenna with a slit may be used on a sheet-like antenna substrate. As a fourth means, the material for enveloping the entire IC tag is a wireless IC tag structure that can shorten the wire connected to the semiconductor chip by using a material having a large dielectric constant (ε: epsilon). . By adopting the above structure, it is possible to realize a low-cost and highly reliable semiconductor device characterized by a structure with strong twisting, compression, tension, and bending stress because the structure eliminates external influences. It is to do.

さらに詳細に説明すれば、
(1)半導体チップに設けられた電極にワイヤによって接続した無線ICタグにおいて,半導体チップに接続したワイヤは送受信用アンテナとして用いられ、
無線ICタグは,両端に開口部をもつ円筒形状をした柔軟性のある樹脂やシリコンゴム(被覆用チューブ)の中に挿入し,全体と両端を加熱することによって,被覆用チューブ全体が収縮し,両端が加熱封止される。前記構造にすることにより,被覆用チューブ内部では,無線ICタグと非接触状態であるため,外部からの応力に強い構造となる。前記構造にすることにより,捻れ,圧縮,引張り,曲げ応力等に強い構造をとなる。
In more detail,
(1) In a wireless IC tag connected to an electrode provided on a semiconductor chip by a wire, the wire connected to the semiconductor chip is used as a transmission / reception antenna.
The wireless IC tag is inserted into a flexible resin or silicon rubber (covering tube) that has a cylindrical shape with openings at both ends, and the entire covering tube contracts by heating the whole and both ends. , Both ends are heat sealed. By adopting the above structure, the inside of the covering tube is in a non-contact state with the wireless IC tag, so that the structure is resistant to external stress. By adopting the above structure, the structure is strong against twisting, compression, tension, bending stress and the like.

(2)半導体チップ表面に設けられた電極にワイヤによって接続した無線ICタグにおいて,半導体チップに接続したワイヤは送受信用アンテナとして用いる。無線ICタグは,両端に開口部をもつ円筒形状をした柔軟性のある樹脂やシリコンゴム(被覆用チューブ)の中に挿入し,全体と両端を加熱することによって,被覆用チューブ全体が収縮し,両端が加熱封止される。前記構造にすることにより,被覆用チューブ内部が中空状態となるため,外部からの応力に強い構造となる。前記構造にすることにより,捻れ,圧縮,引張り,曲げ応力等に強い構造となる。   (2) In a wireless IC tag connected to an electrode provided on the surface of a semiconductor chip by a wire, the wire connected to the semiconductor chip is used as a transmission / reception antenna. The wireless IC tag is inserted into a flexible resin or silicon rubber (covering tube) that has a cylindrical shape with openings at both ends, and the entire covering tube contracts by heating the whole and both ends. , Both ends are heat sealed. By adopting the above-described structure, the inside of the coating tube is in a hollow state, so that the structure is strong against external stress. With this structure, the structure is strong against twisting, compression, tension, bending stress, and the like.

(3)半導体チップ表面に設けられた電極にワイヤによって接続した無線ICタグにおいて,半導体チップに接続したワイヤは送受信用アンテナとして用いる。前記無線ICタグは,両端に開口部をもつ円筒形状をした柔軟性のある樹脂やシリコンゴム(被覆用チューブ)の中に挿入し,前記被覆用チューブの全体を加熱することによって,無線ICタグ全体を包むように,被覆用チューブ全体を収縮密閉させることにより,外部の影響をなくする構造とする。前記構造にすることにより,捻れ,圧縮,引張り,曲げ応力等に強い構造となる。   (3) In a wireless IC tag connected to an electrode provided on the surface of a semiconductor chip by a wire, the wire connected to the semiconductor chip is used as a transmission / reception antenna. The wireless IC tag is inserted into a flexible resin or silicon rubber (covering tube) having a cylindrical shape with openings at both ends, and the entire covering tube is heated, so that the wireless IC tag is The entire tube for covering is shrunk and sealed so as to wrap the entire structure, thereby eliminating external influences. With this structure, the structure is strong against twisting, compression, tension, bending stress, and the like.

(4)半導体チップ表面に設けられた電極にワイヤによって接続した無線ICタグにおいて,半導体チップに接続したワイヤは送受信用アンテナとして用いる。前記無線ICタグは,柔軟性のある樹脂やシリコンゴムの中に挿入し,無線ICタグ全体を包むように,被覆用チューブ全体を収縮させ,両端を密封しないことを特徴とする構造とする。前記構造にすることにより,捻れ,圧縮,引張り,曲げ応力等に強い構造となる。   (4) In a wireless IC tag connected to an electrode provided on the surface of a semiconductor chip by a wire, the wire connected to the semiconductor chip is used as a transmission / reception antenna. The wireless IC tag is inserted into a flexible resin or silicon rubber, and the entire covering tube is shrunk so as to wrap the entire wireless IC tag, and both ends are not sealed. With this structure, the structure is strong against twisting, compression, tension, bending stress, and the like.

(5)(1)〜(3)の構成において、さらに、半導体チップ表面に設けられた電極にワイヤによって接続した無線ICタグにおいて,半導体チップに接続したワイヤは送受信用アンテナとして用いる。前記無線ICタグは,柔軟性のある樹脂やシリコンゴムの中に挿入し,加熱することによって封止する。半導体チップに接続される2本のワイヤの太さを,異なるものを用いる。   (5) In the configurations of (1) to (3), in the wireless IC tag connected to the electrode provided on the surface of the semiconductor chip by a wire, the wire connected to the semiconductor chip is used as a transmission / reception antenna. The wireless IC tag is inserted into a flexible resin or silicon rubber and sealed by heating. Different thicknesses are used for the two wires connected to the semiconductor chip.

半導体チップと接続されるアンテナは,シート状アンテナ基板でダイポールアンテナ,スリット付アンテナのいずれを用いても良い。アンテナは、送受信を兼ねるものであっても良い。また、半導体チップとワイヤの接続方法は,異方導電性フィルム,半田,銀ペースト,超音波ボンディング,合金接続することができる。半導体チップとワイヤの接続場所は,半導体チップの表面及び裏面に接続することができる。無線ICタグを包む材料は,誘電率(ε:イプシロン)が大きい材料を用いることにより,半導体チップに接続したワイヤを短くすることが可能となる。また、無線ICタグは,円筒形状をした柔軟性のある樹脂やシリコンゴム(被覆用チューブ)の中に封止することにより,金属板,果実,生体等に直接取り付けて読み取り可能となる。   As the antenna connected to the semiconductor chip, either a dipole antenna or an antenna with a slit may be used with a sheet-like antenna substrate. The antenna may be used for both transmission and reception. Also, the semiconductor chip and wire can be connected by anisotropic conductive film, solder, silver paste, ultrasonic bonding, or alloy connection. The connection location of the semiconductor chip and the wire can be connected to the front surface and the back surface of the semiconductor chip. By using a material having a large dielectric constant (ε: epsilon) as the material for wrapping the wireless IC tag, the wire connected to the semiconductor chip can be shortened. The wireless IC tag can be read by being attached directly to a metal plate, fruit, living body or the like by sealing it in a flexible resin or silicone rubber (covering tube) having a cylindrical shape.

以上に詳しく説明した様に,半導体チップの電極面と接続したワイヤに円筒形状をした柔軟性のある被覆チューブに挿入後,加熱封止することにより,機械的信頼性に優れた低コスト半導体装置とすることが出来る。   As explained in detail above, a low-cost semiconductor device with excellent mechanical reliability can be obtained by heat sealing after inserting into a flexible coated tube with a cylindrical shape on the wire connected to the electrode surface of the semiconductor chip. It can be.

図2は,本発明による被覆用チューブ付き半導体装置の平面図及び断面図である。前記,半導体装置の特徴は,半導体チップ160表面に設けた,表面電極140上に異方導電性フィルム170を形成し,その上部にワイヤ131を載せて仮圧着(120℃程度の温度で加熱圧着)する。その後,本圧着(200℃程度の温度で加熱圧着)を行って電気的接続を行うことにより,ダイポール型アンテナに実装した無線ICタグ180が得られる。また,接続方法としては,半田,銀ペースト,超音波ボンディング,合金接続のいずれかの方法を用いても構わない。その後,両端に開口部をもつ円筒形状をした柔軟性被覆用チューブ150やシリコンゴムの中に挿入し,被覆用チューブ150全体と両端を加熱することによって,被覆用チューブ150全体と両端が熱封止される。また,被覆用チューブ内部では,無線ICタグは被覆用チューブ内面に非接触状態である。前記構造にすることにより,被覆用チューブ150内部が中空状態となるため,外部からの応力に強い構造となる。   FIG. 2 is a plan view and a cross-sectional view of a semiconductor device with a covering tube according to the present invention. The feature of the semiconductor device is that an anisotropic conductive film 170 is formed on the surface electrode 140 provided on the surface of the semiconductor chip 160, and a wire 131 is placed on the upper surface of the semiconductor chip 160. ) Thereafter, the wireless IC tag 180 mounted on the dipole antenna is obtained by performing electrical bonding by performing main pressure bonding (heat pressure bonding at a temperature of about 200 ° C.). As a connection method, any one of solder, silver paste, ultrasonic bonding, and alloy connection may be used. After that, it is inserted into a flexible covering tube 150 or silicon rubber having a cylindrical shape with openings at both ends, and the entire covering tube 150 and both ends are heated, so that the entire covering tube 150 and both ends are heat sealed. Stopped. Also, inside the coating tube, the wireless IC tag is not in contact with the inner surface of the coating tube. With this structure, the inside of the covering tube 150 is in a hollow state, so that the structure is strong against external stress.

上記で得られた被覆用チューブ付き半導体装置構造にすることによって,追跡の機能(トレーサビリティー)等で検討されている農作物,食品などの流通に使用可能となる。
図3は,本発明による被覆用チューブ付き半導体装置の平面図及び断面図である。前記,半導体装置の特徴は,半導体チップ160表面に設けた,表面電極140上に異方導電性フィルム170を形成し,その上部にワイヤ131を載せて仮圧着(120℃程度の温度で加熱圧着)する。その後,本圧着(200℃程度の温度で加熱圧着)を行って電気的接続を行うことにより,ダイポール型アンテナに実装した無線ICタグ180が得られる。また,接続方法としては,半田,銀ペースト,超音波ボンディング,合金接続のいずれかの方法を用いても構わない。その後,両端に開口部をもつ円筒形状をした柔軟性被覆用チューブ150やシリコンゴムの中に挿入し,被覆用チューブ150全体と両端を加熱することによって,被覆用チューブ150全体と両端が熱封止される。前記構造にすることにより,被覆用チューブ150内部が中空状態となるため,外部からの応力に強い構造となる。
By using the semiconductor device structure with a coating tube obtained as described above, it can be used for the distribution of agricultural products, foods, etc., which are being studied with the tracking function (traceability).
FIG. 3 is a plan view and a cross-sectional view of a semiconductor device with a covering tube according to the present invention. The feature of the semiconductor device is that an anisotropic conductive film 170 is formed on the surface electrode 140 provided on the surface of the semiconductor chip 160, and a wire 131 is placed on the upper surface of the semiconductor chip 160. ) Thereafter, the wireless IC tag 180 mounted on the dipole antenna is obtained by performing the main pressure bonding (heat pressure bonding at a temperature of about 200 ° C.) and performing the electrical connection. As a connection method, any one of solder, silver paste, ultrasonic bonding, and alloy connection may be used. After that, it is inserted into a flexible covering tube 150 or silicon rubber having a cylindrical shape with openings at both ends, and the entire covering tube 150 and both ends are heated, so that the entire covering tube 150 and both ends are heat sealed. Stopped. With this structure, the inside of the covering tube 150 is in a hollow state, so that the structure is strong against external stress.

上記で得られた被覆用チューブ付き半導体装置構造にすることによって,洗濯機で洗浄される衣類等に挿入しても外部からの捻れ,圧縮,引張り,曲げ応力にも耐えられるため,使用履歴や製品管理に利用出来る。また,被覆封止することで補強及び保護を施すことが可能となるため,取り扱いが容易で信頼性の高い構造を特徴とする半導体装置が可能となる。   By using the semiconductor device structure with a coating tube obtained above, it can withstand external twisting, compression, tension, and bending stress even if it is inserted into clothes washed by a washing machine. Can be used for product management. In addition, since it can be reinforced and protected by covering and sealing, a semiconductor device characterized by a structure that is easy to handle and highly reliable is possible.

図4は,本発明による被覆用チューブ付き半導体装置の平面図及び断面図である。前記,被覆用チューブ付き半導体装置の特徴は,半導体チップ160表面に設けられた表面電極140上に異方導電性フィルム170を形成し,その上部にワイヤ131を載せて仮圧着(120℃程度の温度で加熱圧着)する。その後,本圧着(200℃程度の温度で加熱圧着)を行って電気的接続を行うことにより,ダイポール型アンテナに実装した無線ICタグ180が得られる。また,接続方法としては,半田,銀ペースト,合金のいずれかの方法を用いても構わない。その後,両端に開口部をもつ円筒形状をした柔軟性被覆用チューブ150やシリコンゴムの中に挿入し,加熱することによって,無線ICタグ180と被覆用チューブ150が一体となり,円筒形状の被覆用チューブ150全体が収縮密閉させることにより,外部の影響をなくする構造となる。前記構造にすることにより,外部からの捻れ,圧縮,引張り,曲げ,衝撃応力に強い構造となる。   FIG. 4 is a plan view and a cross-sectional view of a semiconductor device with a covering tube according to the present invention. The semiconductor device with a covering tube is characterized in that an anisotropic conductive film 170 is formed on a surface electrode 140 provided on the surface of a semiconductor chip 160, and a wire 131 is placed on the upper surface of the anisotropic conductive film 170 so as to be temporarily bonded (about 120 ° C.). Thermocompression bonding at a temperature). Thereafter, the wireless IC tag 180 mounted on the dipole antenna is obtained by performing electrical bonding by performing main pressure bonding (heat pressure bonding at a temperature of about 200 ° C.). As a connection method, any one of solder, silver paste, and alloy may be used. After that, the wireless IC tag 180 and the covering tube 150 are integrated into one by inserting into a cylindrical flexible covering tube 150 having openings at both ends or silicon rubber and heating. The entire tube 150 is contracted and hermetically sealed to eliminate external influences. By adopting the above structure, the structure is strong against external twisting, compression, tension, bending, and impact stress.

上記で得られた被覆用チューブ付き半導体装置構造にすることによって,業務用洗濯機で洗浄される厚手の硬質布地(ジュータン,足拭きマット)等に挿入しても外部からの捻れ,圧縮,引張り,曲げ応力にも耐えられるため,使用履歴や製品管理に利用出来る。また,被覆用チューブと一体となった構造のため,洗濯中にタグ内部に水分が進入する危険もなく,補強及び保護を施すことが出来,取り扱いが容易で信頼性が高く,安価に製造可能な構造を特徴とする半導体装置が可能となる。   By using the above-described semiconductor device structure with a tube for covering, it can be twisted, compressed, or pulled from the outside even if it is inserted into a thick hard cloth (deutan, foot-wiping mat) that is washed by a commercial washing machine. Because it can withstand bending stress, it can be used for usage history and product management. In addition, the structure integrated with the covering tube allows for reinforcement and protection without the risk of moisture entering the tag during washing, making it easy to handle, reliable, and inexpensive to manufacture. A semiconductor device characterized by a simple structure becomes possible.

図5は,本発明による被覆用チューブ付き半導体装置の平面図及び断面図である。前記被覆用チューブ付き半導体装置の特徴は,半導体チップ160表面に設けた表面電極140上に異方導電性フィルム170を形成し,その上部にワイヤ131を載せて仮圧着(120℃程度の温度で加熱圧着)する。その後,本圧着(200℃程度の温度で加熱圧着)を行って電気的接続を行うことにより,ダイポール型アンテナに実装した無線ICタグ180が得られる。また,接続方法としては,半田,銀ペースト,合金のいずれかの方法を用いても構わない。その後,両端に開口部をもつ円筒形状をした柔軟性被覆用チューブ150やシリコンゴムの中に挿入し,無線ICタグ180と被覆用チューブ150全体が収縮し,両端の開口部は封止されない。被覆用チューブ150内部では,半導体チップ160とワイヤ131が接続された部分のみが収縮固定され,ワイヤは固定されない構造である。   FIG. 5 is a plan view and a cross-sectional view of a semiconductor device with a covering tube according to the present invention. A characteristic of the semiconductor device with a covering tube is that an anisotropic conductive film 170 is formed on a surface electrode 140 provided on the surface of a semiconductor chip 160, and a wire 131 is placed on the upper surface of the anisotropic conductive film 170 (at a temperature of about 120 ° C.). Thermocompression bonding). Thereafter, the wireless IC tag 180 mounted on the dipole antenna is obtained by performing electrical bonding by performing main pressure bonding (heat pressure bonding at a temperature of about 200 ° C.). As a connection method, any one of solder, silver paste, and alloy may be used. Thereafter, it is inserted into a cylindrical flexible covering tube 150 having openings at both ends or silicon rubber, the wireless IC tag 180 and the covering tube 150 as a whole contract, and the openings at both ends are not sealed. Inside the covering tube 150, only the portion where the semiconductor chip 160 and the wire 131 are connected is contracted and fixed, and the wire is not fixed.

上記で得られた被覆用チューブ付き半導体装置にすることによって,半導体チップとワイヤの接続部は,一体で収縮固定されている。前記ワイヤはフレキシブル構造のため,強制的に外部より応力を与えても被覆用チューブがフレキシブルであるため,初期形状に戻る特性がある。よって,外部応力を与えても動作不良を起こさない構造であるため,製造歩留まりが向上し,低コストで信頼性の高い被覆用チューブ付き半導体装置が提供可能となる。   By using the semiconductor device with a covering tube obtained as described above, the connecting portion between the semiconductor chip and the wire is integrally contracted and fixed. Since the wire has a flexible structure, the covering tube is flexible even when a stress is forced from the outside, so that the wire returns to the initial shape. Therefore, since the structure does not cause malfunction even when external stress is applied, the manufacturing yield can be improved, and a low-cost and highly reliable semiconductor device with a covering tube can be provided.

図6は,本発明による被覆用チューブ付き半導体装置の平面図及び断面図である。前記,被覆用チューブ付き半導体装置の特徴は,半導体チップ160に設けられた表面電極140に異方導電性フィルムを介して,シート状アンテナ基板190を形成し,仮圧着(120℃程度の温度で加熱圧着)する。その後,本圧着(200℃程度の温度で加熱圧着)を行って電気的接続を行うことにより,シート状アンテナ基板190に実装したダイポール型の無線ICタグ180が得られる。前記半導体チップに接続されるシート状アンテナ基板190幅は,左右及び上下の幅が同一幅でも良く,または,異なる幅を用いても良い。また,接続方法としては,半田,銀ペースト,合金のいずれかの方法を用いても構わない。その後,両端に開口部をもつ板形状の柔軟性被覆用チューブ150やシリコンゴムの中に挿入し,加熱しながら圧力をかけることによって,無線ICタグ180と被覆用チューブ150が一体となり,被覆用チューブ150全体が収縮密閉させることにより,外部の影響をなくする構造である。   FIG. 6 is a plan view and a cross-sectional view of a semiconductor device with a covering tube according to the present invention. The feature of the semiconductor device with a covering tube is that a sheet-like antenna substrate 190 is formed on the surface electrode 140 provided on the semiconductor chip 160 via an anisotropic conductive film, and is temporarily bonded (at a temperature of about 120 ° C.). Thermocompression bonding). After that, by performing the main pressure bonding (heat pressure bonding at a temperature of about 200 ° C.) and performing the electrical connection, a dipole type wireless IC tag 180 mounted on the sheet-like antenna substrate 190 is obtained. As for the width of the sheet-like antenna substrate 190 connected to the semiconductor chip, the left and right and top and bottom widths may be the same width, or different widths may be used. As a connection method, any one of solder, silver paste, and alloy may be used. After that, the wireless IC tag 180 and the covering tube 150 are integrated by inserting them into a plate-shaped flexible covering tube 150 having openings at both ends or silicon rubber, and applying pressure while heating. The entire tube 150 is contracted and sealed to eliminate external influences.

上記で得られた被覆用チューブ付き半導体装置構造にすることによって,
半導体チップとシート状アンテナ基板の接続部は,一体で収縮固定されている。また,前記被覆用チューブ付き半導体装置は,薄くすることが可能なため,高級ブランド品の布地や物品等に入れ込むことで,偽造防止対策が可能となる被覆用チューブ付き半導体装置が提供可能となる。
By making the semiconductor device structure with a coating tube obtained above,
The connecting portion between the semiconductor chip and the sheet-like antenna substrate is integrally contracted and fixed. In addition, since the semiconductor device with a covering tube can be thinned, it is possible to provide a semiconductor device with a covering tube that can prevent counterfeiting by inserting it into a fabric or article of a luxury brand product. Become.

図7は,本発明による被覆用チューブ付き半導体装置の平面図及び断面図である。前記,被覆用チューブ付き半導体装置の特徴は,半導体チップ160は,スリット191を設けたスリット付シート状アンテナ基板195に異方導電性フィルム170を介して形成し,仮圧着(120℃程度の温度で加熱圧着)する。その後,本圧着(200℃程度の温度で加熱圧着)を行って電気的接続を行うことにより,放射型アンテナ基板に実装した無線ICタグ180が得られる。前記スリット付シート状アンテナ基板195の材質は,銅,アルミ等の金属,銀ペースト,カーボン等の導電性の材質を用いても良い。また,接続方法としては,半田,銀ペースト,合金のいずれかの方法を用いても構わない。その後,両端に開口部をもつ円筒形状をした柔軟性のある被覆チューブ150やシリコンゴムの中に挿入し,その後,被覆用チューブ150全体と両端を加熱することによって,被覆用チューブ150全体が収縮し,両端が加熱封止される。前記構造にすることにより,被覆用チューブ150内部が中空状態となるため,外部からの応力に強い構造となる。   FIG. 7 is a plan view and a cross-sectional view of a semiconductor device with a covering tube according to the present invention. The semiconductor device with the covering tube is characterized in that the semiconductor chip 160 is formed on the slit-like sheet-like antenna substrate 195 provided with the slit 191 via the anisotropic conductive film 170, and is temporarily bonded (at a temperature of about 120 ° C.). Heat-press with). Thereafter, the wireless IC tag 180 mounted on the radiating antenna substrate is obtained by performing the main pressure bonding (thermal pressure bonding at a temperature of about 200 ° C.) and performing the electrical connection. As the material of the slit-like antenna substrate 195, a conductive material such as a metal such as copper or aluminum, a silver paste, or carbon may be used. As a connection method, any one of solder, silver paste, and alloy may be used. After that, it is inserted into a flexible coated tube 150 or silicon rubber having a cylindrical shape with openings at both ends, and then the entire covering tube 150 and the both ends are heated to shrink the entire covering tube 150. Both ends are heat sealed. With this structure, the inside of the covering tube 150 is in a hollow state, so that the structure is strong against external stress.

図8は前記構造を用いて,被覆用チューブの有無とアンテナ長さによる最大通信距離の変化を示すグラフである。アンテナ長さ60〜58mmでは,最大通信距離に変化は少ないが,アンテナ長さを短くすることで前記,被覆用チューブ有無による差が表れていることが示される。これは,一部の材料によるものであるが誘電率の高い材料と最適なアンテナ長さを選択することによって,被覆用チューブ付き半導体装置の使用範囲が増えてくる。   FIG. 8 is a graph showing the change in the maximum communication distance depending on the presence / absence of the covering tube and the antenna length using the above structure. When the antenna length is 60 to 58 mm, there is little change in the maximum communication distance, but it is shown that the difference due to the presence or absence of the covering tube appears by shortening the antenna length. This is due to some materials, but by selecting a material with a high dielectric constant and an optimal antenna length, the range of use of the semiconductor device with a coating tube increases.

上記で得られた被覆用チューブ付き半導体装置構造にすることによって,
被覆された無線ICタグを包む被覆用チューブの誘電率(イプシロン)を変えることでシート状アンテナ基板長さを短くすることが出来るため,通信距離を向上させる長距離通信型無線ICタグを実現できる。また,無線ICタグが被覆用チューブされているため,金属板,果実,生体等に直接貼り付けた構造にならないため,通信確認ができる。前記無線ICタグを用いることで誘電率が異なった材料を選択し,アンテナ長さを調整することで低価格な高信頼性の通信特性の優れた無線ICタグが実現できる。
By making the semiconductor device structure with a coating tube obtained above,
By changing the dielectric constant (epsilon) of the covering tube that wraps the coated wireless IC tag, the length of the sheet-like antenna substrate can be shortened, thus realizing a long-range communication wireless IC tag that improves the communication distance. . In addition, since the wireless IC tag is covered with a tube, it does not have a structure directly attached to a metal plate, fruit, living body, etc., so that communication can be confirmed. By using the wireless IC tag, materials with different dielectric constants are selected, and the antenna length is adjusted to realize a low-cost and highly reliable wireless IC tag with excellent communication characteristics.

図9は半導体チップ表面に電極を持つ構造のワイヤの接続形状をかえた構成概念図を示す。(a)半導体チップ160表面に複数の表面電極140面に異方導電性フィルム170を介し,入出力端子171とアース端子172に接続したワイヤ131の太さは,左右同一太さを用いたダイポール型アンテナ構造である。(b)は,(a)と同様であるが,入出力端子171に細いワイヤ,アース端子172に太いワイヤを接続した構造である。(c)は,(b)とはワイヤ太さが反対に接続した構造である。図10は,半導体チップの上下に電極を持つ構造のシート状アンテナ基板の接続形状を変えた場合の平面図及び断面図で示す構成概念図を示す。(a)半導体チップ160の表裏の電極面に異方導電性フィルム170を介し,入出力端子171とアース端子172に シート状アンテナ基板190に接続した大きさは,左右同一大きさを用いたダイポール型アンテナ構造である。(b)は,(a)と同様であるが,入出力端子171に幅が狭いシート状アンテナ基板,アース端子172に幅が広いシート状アンテナ基板を接続した構造である。(c)は,(b)とはシート状アンテナ基板が反対に接続した構造である。   FIG. 9 shows a conceptual diagram of the structure in which the connection shape of the wire having a structure having an electrode on the surface of the semiconductor chip is changed. (A) The thickness of the wire 131 connected to the input / output terminal 171 and the ground terminal 172 through the anisotropic conductive film 170 on the surface of the semiconductor chip 160 on the surface 140 is a dipole using the same thickness on the left and right Type antenna structure. (B) is the same as (a) except that a thin wire is connected to the input / output terminal 171 and a thick wire is connected to the ground terminal 172. (C) is a structure in which (b) is connected in the opposite thickness. FIG. 10 shows a conceptual diagram of the configuration shown in a plan view and a cross-sectional view when the connection shape of the sheet-like antenna substrate having a structure having electrodes on the upper and lower sides of the semiconductor chip is changed. (A) The dipole using the same size on the left and right sides is connected to the sheet antenna substrate 190 to the input / output terminal 171 and the ground terminal 172 via the anisotropic conductive film 170 on the front and back electrode surfaces of the semiconductor chip 160. Type antenna structure. (B) is the same as (a), but has a structure in which a narrow sheet-like antenna substrate is connected to the input / output terminal 171 and a wide sheet-like antenna substrate is connected to the ground terminal 172. (C) is a structure in which (b) is a sheet antenna substrate connected in reverse.

上記の構造で半導体チップの表面及び裏面に,ワイヤの太さやシート状アンテナ基板の幅を変えて円筒形状の被覆用チューブに入れても通信可能なため,低コストで信頼性のある良好なダイポールアンテナが得られる。   With the above structure, it is possible to communicate with the front and back surfaces of the semiconductor chip by changing the thickness of the wire and the width of the sheet-like antenna substrate into a cylindrical covering tube. An antenna is obtained.

従来方法を示す平面図。The top view which shows the conventional method. 本発明の実施例を示す平面図及び断面図。The top view and sectional drawing which show the Example of this invention. 本発明の実施例を示す平面図及び断面図。The top view and sectional drawing which show the Example of this invention. 本発明の実施例を示す平面図及び断面図。The top view and sectional drawing which show the Example of this invention. 本発明の実施例を示す平面図及び断面図。The top view and sectional drawing which show the Example of this invention. 本発明の実施例を示す平面図及び断面図。The top view and sectional drawing which show the Example of this invention. 本発明の実施例を示す平面図及び断面図。The top view and sectional drawing which show the Example of this invention. 本発明の実施例を示すグラフ図。The graph which shows the Example of this invention. 本発明の実施例を示す構成概念図。BRIEF DESCRIPTION OF THE DRAWINGS The structure conceptual diagram which shows the Example of this invention. 本発明の実施例を示す平面図及び断面図。The top view and sectional drawing which show the Example of this invention.

符号の説明Explanation of symbols

100…半導体チップ,110…ガラス管,120…ジュメット,130…リード線,131…ワイヤ,140…表面電極,150…被覆用チューブ,160…半導体チップ,170…異方導電性フィルム,171…入出力端子,172…アース,180…無線ICタグ,190…シート状アンテナ基板,191…スリット,200…裏面電極。 100 ... Semiconductor chip, 110 ... Glass tube, 120 ... Dumet, 130 ... Lead wire, 131 ... Wire, 140 ... Surface electrode, 150 ... Sheath tube, 160 ... Semiconductor chip, 170 ... Anisotropic conductive film, 171 ... In Output terminal, 172 ... ground, 180 ... wireless IC tag, 190 ... sheet antenna substrate, 191 ... slit, 200 ... back electrode.

Claims (5)

半導体チップに設けられた電極にアンテナを接続した無線ICタグであって、
該無線ICタグは、開口部をもつ柔軟性のある被覆用部材の中に挿入されており、加熱することによって、上記開口部が封止されていることを特徴とする無線ICタグ。
A wireless IC tag in which an antenna is connected to an electrode provided on a semiconductor chip,
The wireless IC tag is inserted into a flexible covering member having an opening, and the opening is sealed by heating.
上記無線ICタグが上記部材の内面に非接触であることを特徴とする請求項1記載の無線ICタグ。 2. The wireless IC tag according to claim 1, wherein the wireless IC tag is not in contact with an inner surface of the member. 上記被覆用部材は、両端に開口部を有するチューブ状部材であることを特徴とする請求項1または2記載の無線ICタグ。 The wireless IC tag according to claim 1 or 2, wherein the covering member is a tubular member having openings at both ends. 半導体チップに設けられた電極にアンテナを接続した無線ICタグの実装方法であって、
該無線ICタグを、開口部をもつ円筒形状をした柔軟性のある被覆用部材の中に挿入し、加熱することによって、上記開口部を封止することを特徴とする無線ICタグの実装方法。
A method of mounting a wireless IC tag in which an antenna is connected to an electrode provided on a semiconductor chip,
A method of mounting a wireless IC tag, wherein the wireless IC tag is inserted into a cylindrical covering member having a cylindrical shape having an opening and heated to seal the opening. .
半導体チップに設けられた電極にアンテナを接続した無線ICタグの実装方法であって、
該無線ICタグを、開口部をもつ円筒形状をした柔軟性のある被覆用部材の中に挿入し、加熱することによって、上記被覆用部材を収縮させることを特徴とする無線ICタグの実装方法。
A method of mounting a wireless IC tag in which an antenna is connected to an electrode provided on a semiconductor chip,
A method of mounting a wireless IC tag, wherein the wireless IC tag is inserted into a cylindrical covering member having a cylindrical shape having an opening, and the covering member is contracted by heating. .
JP2004012597A 2004-01-21 2004-01-21 Semiconductor device Pending JP2005208787A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070038829A (en) * 2005-10-07 2007-04-11 문성태 Tube type tag for radio frequency identification
JP2007115412A (en) * 2005-10-18 2007-05-10 Totoku Electric Co Ltd Presentation method, presentation system, and portable light emitting device
WO2007141836A1 (en) * 2006-06-02 2007-12-13 Hitachi, Ltd. Method for manufacturing inlet for ic tag
JP2009093426A (en) * 2007-10-09 2009-04-30 Duskin Co Ltd Treatment surface type ic tag attachment mat

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070038829A (en) * 2005-10-07 2007-04-11 문성태 Tube type tag for radio frequency identification
JP2007115412A (en) * 2005-10-18 2007-05-10 Totoku Electric Co Ltd Presentation method, presentation system, and portable light emitting device
WO2007141836A1 (en) * 2006-06-02 2007-12-13 Hitachi, Ltd. Method for manufacturing inlet for ic tag
KR101004901B1 (en) 2006-06-02 2010-12-28 가부시키가이샤 히타치세이사쿠쇼 Method for manufacturing inlet for ic tag
JP4796628B2 (en) * 2006-06-02 2011-10-19 株式会社日立製作所 IC tag inlet manufacturing method
JP2009093426A (en) * 2007-10-09 2009-04-30 Duskin Co Ltd Treatment surface type ic tag attachment mat

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