JP2005208472A - Coherent light source - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coherent light source which easily selects and outputs coherent light with a desired wavelength. <P>SOLUTION: A BBO (β-BaB<SB>2</SB>O<SB>4</SB>) crystal is placed on a non-coaxial phase matching position with respect to exciting light, and simultaneously outputs a plurality of parametric generated light beams with mutually different wavelengths in a plurality of mutually different diverging directions. A wavelength selection/light guide optical system selects a parametric generated light beam with at least one wavelength out of the plurality of parametric generated light beams and guides it to an incident end part of an optical fiber. The optical fiber guides the selected parametric generated light beam to a desired position and emits it from an emission end part thereof. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a coherent light source, and more particularly to a coherent light source that outputs coherent light by optical parametric amplification.

  Conventionally, devices that output coherent light by optical parametric amplification are known.

  Here, OPA (Optical Parametric Amplification) means that when nonlinear optical crystals are excited with laser light, the excitation light and the parametric light generated thereby propagate and interact to amplify the energy. It means letting go. Parametric generated light is coherent light. Therefore, coherent light can be generated by optical parametric amplification.

  Parametrically generated light having a wavelength shorter than twice the wavelength of the excitation light is called signal light, and light having a wavelength longer than twice the wavelength of the excitation light is called idler light.

  Optical parametric amplification includes a coaxial phase matching type and a non-coaxial phase matching type. In the coaxial phase matching type, the signal light and idler light propagate in the same direction as the excitation light. In the non-coaxial phase matching type, the signal light and idler light propagate so as to diverge in different directions from the excitation light.

  Japanese Patent Laid-Open No. 10-268369 (Patent Document 1) describes a coherent light source that generates an ultrashort optical pulse using coaxial phase matching optical parametric amplification.

On the other hand, Japanese Patent Application Laid-Open No. 2001-66653 (Patent Document 2) describes a coherent light source that generates ultrashort light pulses using non-coaxial phase matching optical parametric amplification.
JP-A-10-268369 (pages 6-9, FIG. 1) Japanese Patent Laid-Open No. 2001-66653 (pages 2 and 3, FIG. 1)

  Here, it is desirable that the coherent light source can easily select and output coherent light having a desired wavelength.

  However, in the coherent light source adopting the coaxial phase matching type optical parametric amplification in Patent Document 1, in order to change the wavelength of the desired light, the angle between the optical axis of the crystal and the excitation light is changed by rotating the crystal. Or change the temperature of the crystal. For this reason, when trying to obtain an arbitrary wavelength, the relationship between the angle position of the crystal and the generated wavelength is investigated in advance, or the wavelength of the generated light is monitored with a spectroscope or the like, and the crystal is determined based on the result. It is necessary to perform feedback control of the angular position and temperature in real time. Therefore, it is not possible to easily output light having a desired wavelength.

  In the coherent light source of Patent Document 2, a broadband beam from 550 nm to 700 nm is generated by compensating for the chromatic dispersion of signal light, and a broadband near-infrared beam is generated by compensating for the chromatic dispersion of idler light. However, it is not possible to selectively output only light having a desired wavelength.

  Accordingly, an object of the present invention is to provide a coherent light source that can easily select coherent light having a desired wavelength.

  In order to achieve the above object, the invention according to claim 1 is arranged at a predetermined non-coaxial phase matching position with respect to the excitation light output means for outputting the excitation light and the excitation light output from the excitation light output means. Non-linear that propagates and outputs incident excitation light, and generates a plurality of parametric generation lights having different wavelengths according to the incidence of the excitation light, and outputs them in a plurality of different divergence directions around the output direction of the excitation light. There is provided a coherent light source comprising: an optical crystal; and wavelength selection means for selecting parametric generated light having at least one wavelength from among a plurality of parametric generated light output from the nonlinear optical crystal.

  In the coherent light source according to the first aspect, the excitation light output means outputs the excitation light. The nonlinear optical crystal is disposed at a non-coaxial phase matching position with respect to the excitation light output from the excitation light output means. That is, the angle formed by the optical axis of the nonlinear optical crystal and the optical axis of the excitation light in the nonlinear optical crystal is larger than a predetermined threshold value. Therefore, the nonlinear optical crystal transmits and outputs the excitation light according to the incidence of the excitation light, and simultaneously outputs a plurality of parametric generation lights having different wavelengths in a plurality of different divergence directions around the output direction of the excitation light. Output. A wavelength selection means selects the parametric generation light of at least 1 wavelength from several parametric generation light. Here, the parametric generation light output from the nonlinear optical crystal is coherent. Therefore, the coherent light source according to claim 1 can easily select and output coherent light having a desired wavelength.

  The invention according to claim 2 is the coherent light source according to claim 1, for guiding at least the parametric generation light selected by the wavelength selection means from the plurality of parametric generation light to a desired position. The optical fiber is further provided.

  In the coherent light source according to the second aspect, the optical fiber guides at least the parametric generation light selected by the wavelength selection means from the plurality of parametric generation lights to a desired position. Therefore, the coherent light source according to claim 2 can easily output coherent light having a desired wavelength to a desired position.

  For example, the optical fiber is preferably disposed after the wavelength selecting means. In this case, the optical fiber can guide the parametric generation light selected by the wavelength selection means to a desired position.

  Alternatively, the optical fiber may be arranged before the wavelength selection unit, that is, between the nonlinear optical crystal and the wavelength selection unit. In this case, the optical fiber guides the parametric generation light having a plurality of wavelengths output from the nonlinear optical crystal to a desired position. A wavelength selection means is arranged at a desired position, and selects at least one wavelength of parametric generated light from a plurality of wavelengths of parametric generated light guided to the desired position by the optical fiber.

  The invention according to claim 3 is the coherent light source according to claim 1, wherein the seed light having one wavelength is incident on the nonlinear optical crystal, and parametric generation having the same wavelength as the one wavelength is performed. Seed light incident means for amplifying the light and the parametric generation light having a wavelength corresponding to the one wavelength, and the wavelength selection means has at least one wavelength among the amplified parametric generation light. It is characterized by selecting.

  The coherent light source according to claim 3, wherein the seed light incident means makes one wavelength of seed light incident on the nonlinear optical crystal and has the same wavelength as this wavelength and a wavelength corresponding to this wavelength. Amplifies parametric generated light. For example, when the wavelength of the seed light is shorter than twice the wavelength of the excitation light, the seed light incident means causes the seed light to be incident on the nonlinear optical crystal, thereby causing the signal light having the same wavelength as this wavelength. And the idler light paired with the signal light is amplified. In addition, when the wavelength of the seed light is longer than twice the wavelength of the excitation light, the seed light incident means makes the seed light incident on the nonlinear optical crystal, thereby causing idler light having the same wavelength as this wavelength. And the signal light paired with the idler light is amplified. A wavelength selection means selects at least one of the amplified signal light and idler light. Therefore, collimated light with amplified intensity can be output.

  Here, the seed light incident means has a wavelength corresponding to the divergence angle of the parametric generation light and the wavelength of the seed light in which the divergence angle at which the seed light diverges in the nonlinear optical crystal has the same wavelength as the wavelength of the seed light. The parametric generation light is amplified by making the seed light incident on the nonlinear optical crystal so as to include the divergence angle of the parametric generation light. For example, when the wavelength of the seed light is shorter than twice the wavelength of the excitation light, the seed light incident means is configured such that the divergence angle of the signal light having the same divergence angle of the seed light as the wavelength of the seed light The seed light is incident on the nonlinear optical crystal so as to include the divergence angle of the idler light paired with the light. As a result, both signal light and idler light are amplified. In addition, when the wavelength of the seed light is longer than twice the wavelength of the excitation light, the seed light incident means has a divergence angle of the idler light having the same divergence angle of the seed light as that of the seed light, and the idler. The seed light is incident on the nonlinear optical crystal so as to include the divergence angle of the signal light paired with the light. As a result, both signal light and idler light are amplified.

  The invention according to claim 4 is the coherent light source according to claim 1, wherein the nonlinear optical crystal is arranged at a predetermined non-coaxial phase matching position with respect to the excitation light output by the excitation light output means. In addition, the incident excitation light is propagated and output, and a plurality of parametric generation lights having different wavelengths are generated according to the incidence of the excitation light, and are output in a plurality of different divergence directions around the output direction of the excitation light. A first nonlinear optical crystal, and a first stage of the first nonlinear optical crystal, disposed at a predetermined non-coaxial phase matching position with respect to the excitation light output from the first nonlinear optical crystal; The pumping light is propagated and output in response to the incidence of the excitation light and the plurality of parametric generation lights output from the nonlinear optical crystal, and a plurality of parametric generation lights having different wavelengths are generated to output the excitation light. A second nonlinear optical crystal that outputs in a plurality of different divergence directions around the direction, and the wavelength selection means includes a plurality of parametric generation lights output from the first and second nonlinear optical crystals. The parametric generation light having at least one wavelength is selected.

  In the coherent light source according to claim 4, when the parametric generation light of one wavelength among the parametric generation light generated in the first nonlinear optical crystal propagates in the second nonlinear optical crystal, the propagation direction thereof is When the parametric generated light generated in the second nonlinear optical crystal is parallel to the divergence direction of the light having the same wavelength or the corresponding wavelength, the parametric generated light of the wavelength and the parametric generated light corresponding to the wavelength are the second. Is amplified in the nonlinear optical crystal. For example, the direction of propagation of signal light generated in the first nonlinear optical crystal in the second nonlinear optical crystal is the same wavelength signal light generated in the second nonlinear optical crystal or the divergence direction of idler light paired therewith , Both the signal light and idler light are amplified in the second nonlinear optical crystal. Similarly, the idler light generated in the first nonlinear optical crystal propagates in the second nonlinear optical crystal with the same wavelength idler light generated in the second nonlinear optical crystal or the divergence of signal light paired therewith. If parallel to the direction, both the idler light and the signal light are amplified in the second nonlinear optical crystal. The wavelength selection means selects at least one of the lights whose intensity has been amplified in this way, so that high-intensity coherent light can be output.

  Here, the first nonlinear optical crystal has a first optical axis, and the second nonlinear optical crystal has a second optical axis. The first nonlinear optical crystal and the second nonlinear optical crystal are such that the first optical axis and the second optical axis are in one plane including the optical axis of the excitation light from the excitation light output means. It is preferable that they are arranged so as to be opposite to each other with respect to the optical axis. In this case, a lot of parametric generation light is amplified among the plurality of parametric generation light generated in the second nonlinear optical crystal. The wavelength selection means can select the parametric generation light having a desired wavelength from the many parametric generation lights. In addition, since the allowable range of the relative angle of the second optical axis with respect to the first optical axis is wide, the second nonlinear optical crystal can be easily arranged with respect to the first nonlinear optical crystal.

  It is preferable that the coherent light source according to claim 4 further includes a turntable. On the turntable, the first nonlinear optical crystal and the second nonlinear optical crystal are arranged in this order along a predetermined axis. The first optical axis, the second optical axis, the optical axis of the excitation light output from the excitation light output means, and the predetermined axis are in the same plane. The first optical axis and the second optical axis are directed to opposite sides with respect to the predetermined axis. The turntable has a rotating shaft. The rotation axis extends in a direction perpendicular to a plane including the optical axis of the excitation light, the first optical axis, the second optical axis, and the predetermined axis. The rotation axis intersects the predetermined axis and the optical axis of the excitation light perpendicularly at a position between the first nonlinear optical crystal and the second nonlinear optical crystal. If the turntable is rotated around the rotation axis, the intensity of light having a wavelength selected by the wavelength selection means can be maximized. Therefore, light with high intensity can be easily output.

  Further, when the excitation light output means outputs pulsed excitation light, it is preferable that the coherent light source according to claim 4 further includes a selective light guiding means. The selective light guiding means is disposed between the first nonlinear optical crystal and the second nonlinear optical crystal, and removes a plurality of signal lights from the plurality of parametric generation lights output from the first nonlinear optical crystal. A plurality of idler lights are guided to the second nonlinear optical crystal. In the second nonlinear optical crystal, parametrically generated light generated in the second nonlinear optical crystal is amplified by idler light output from the first nonlinear optical crystal. Here, the pulse width of the idler light is compressed when propagating through the first nonlinear optical crystal. Therefore, in the second nonlinear optical crystal, the parametric generated light is amplified to a narrow pulse width. Therefore, high-intensity coherent light having a narrow pulse width can be obtained.

  According to the coherent light source of the first aspect, it is possible to easily select and output coherent light having a desired wavelength.

  According to the coherent light source of the second aspect, it is possible to easily output coherent light having a desired wavelength to a desired position.

  According to the coherent light source of the third aspect, coherent light having a desired wavelength can be output in a state where the intensity is amplified.

  According to the coherent light source of the fourth aspect, it is possible to output coherent light having a desired wavelength in a state where the intensity is amplified.

A coherent light source according to an embodiment of the present invention will be described below with reference to the drawings.
<First Embodiment>

  A coherent light source 1 according to a first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the coherent light source 1 of the present embodiment includes an excitation light generation unit 2, a beam shaping unit 4, a reflection mirror 6 for excitation light, a parametric light generation / wavelength selection unit 8, and an optical fiber. 10 and a collimating lens 12.

  The excitation light generator 2 is for generating pulsed excitation light having a desired wavelength. The excitation light generation unit 2 includes a basic excitation laser 20, a harmonic generation element 22, a wavelength separator 24, an excitation light reflection mirror 26, and an optical stopper 28.

  The excitation light generation unit 2, the beam shaping unit 4, and the excitation light reflection mirror 6 are for guiding pulse laser light having a wavelength of 355 nm and linearly polarized light to the parametric light generation / wavelength selection unit 8 as excitation light. belongs to.

  The basic excitation laser 20 is for generating pulsed laser light. In the present embodiment, the basic excitation laser 20 is an Nd-YAG laser and generates pulsed laser light having a wavelength of 1064 nm. This pulsed laser beam is linearly polarized light.

  The harmonic generation element 22 is for generating harmonics based on the pulse laser beam generated by the basic excitation laser 20. In the present embodiment, the harmonic generation element 22 is based on a pulse laser beam having a wavelength of 1064 nm, a pulse laser beam having a wavelength of 532 nm (secondary harmonic) and a pulse laser beam having a wavelength of 355 nm (third order). Harmonics).

  The wavelength separator 24 includes a plurality of dielectric mirrors, and separates light having a desired wavelength from light having other wavelengths and guides light having a desired wavelength to the reflection mirror 26 for excitation light at the subsequent stage. . In the present embodiment, the wavelength separator 24 receives the pulse laser light with the wavelengths of 1064 nm, 532 nm, and 355 nm from the harmonic generation element 22, and receives the pulse laser light with the wavelength of 355 nm that is the third harmonic of the other wavelengths. Separated from the pulsed laser beam, the laser beam is guided to the excitation light reflecting mirror 26 at the subsequent stage.

  The excitation light reflection mirror 26 reflects light having a wavelength of 355 nm and transmits light having other wavelengths that could not be separated by the wavelength separator 24. The optical stopper 28 captures and stops the light transmitted through the excitation light reflection mirror 26.

  The beam shaping unit 4 narrows the beam diameter of the pulsed laser light output from the excitation light generating unit 2 and increases the power density of the pulsed laser light, thereby increasing the parametric light generation / wavelength selecting unit 8 at the subsequent stage. It is for improving. In this example, the beam shaping unit 4 is composed of a combination of a convex lens 40 and a concave lens 42 as shown in FIG. By adjusting the distance between the convex lens 40 and the concave lens 42, the degree of beam condensing can be adjusted.

  When the pulse laser beam output from the excitation light generator 2 is ultraviolet light, the pulse laser beam may be absorbed by these lenses when passing through the convex lens 40 and the concave lens 42. Further, when the pulse width of the pulse laser beam is on the order of picoseconds or femtoseconds, the pulse width of the pulse laser beam may be extended due to wavelength dispersion when passing through the convex lens 40 or the concave lens 42. . Therefore, in these cases, it is preferable that the beam shaping unit 4 is composed of a combination of a concave mirror 44 and a convex mirror 46 as shown in FIG. Each of the concave mirror 44 and the convex mirror 46 is formed with a reflective surface made of a dielectric multilayer film.

  As shown in FIG. 1, the excitation light reflecting mirror 6 receives the pulse laser beam output from the beam shaping unit 4 and reflects the pulse laser beam having a wavelength of 355 nm as excitation light. The excitation light reflecting mirror 6 transmits light having a wavelength other than 355 nm.

The parametric light generation / wavelength selection unit 8 includes a BBO (β-BaB ₂ O ₄ ) crystal 30, an excitation light reflection mirror 34, an optical stopper 35, and a wavelength selection / light guide optical system 50.

  The BBO crystal 30 is a non-linear optical crystal and functions as an optical parametric amplification element. As shown in FIG. 3, the BBO crystal 30 is arranged such that its optical axis (in this case, c-axis) 30a is in the same plane as the polarization component of the excitation light. In this example, since the polarization component of the excitation light is in a plane parallel to the paper surface of FIG. 3, the optical axis 30a is also in a plane parallel to the paper surface of FIG. Therefore, the excitation light propagates as an extraordinary ray in the BBO crystal 30. In this example, the BBO crystal 30 is cut out at an angle φ inclined by 21.7 ° from the optical axis 30a. That is, the entrance surface 30in and the exit surface 30out of the BBO crystal 30 are parallel to each other, and these normals 30n are inclined by φ = 21.7 ° from the optical axis 30a. The BBO crystal 30 is arranged with respect to the excitation light reflecting mirror 6 in an orientation in which the angle θ formed by the propagation direction of the excitation light propagating in the BBO crystal 30 and the optical axis 30a is 35 °.

  When the excitation light propagates in the BBO crystal 30 in such a direction, the BBO crystal 30 generates parametric generation light (non-coaxial phase matching). The parametric generated light is coherent white light including a visible to near-infrared wavelength region. The parametric generated light is linearly polarized light having a polarization component perpendicular to the paper surface of FIG. 3, and propagates in the BBO crystal 30 as an ordinary ray. The BBO crystal 30 transmits parametric generated light at the same time as transmitting and outputting excitation light. Parametrically generated light is output with chromatic dispersion in a conical shape with the output direction of the excitation light as an axis.

More specifically, the parametric generated light generated in the BBO crystal 30 is composed of a plurality of pairs of signal light and idler light. The angular frequencies ωs ^(j) and ωi ^{(j) of} the signal light and idler light constituting each pair (j = 1, 2,...) And the wave vectors ks ^(j) and ki ^(j) are shown in FIG. As shown, the following equations (1) and (2) are satisfied with respect to the angular frequency ωp and the wave vector kp of the excitation light.
ωp = ωs ^(j) + ωi ^(j) (1)
kp = ks ^(j) + ki ^(j) (2)

Here, ωs ^(j) is the angular frequency of the signal light, ωi ^(j) is the angular frequency of the idler light, ks ^(j) is the wavenumber vector of the signal light, and ki ^(j) is the wavenumber vector of the idler light. It is.

Note that the wavelengths of the excitation light, signal light, and idler light are respectively λp, λs ^(j) , λi ^(j) , and the angles of the signal light and idler light with respect to the propagation direction of the excitation light are respectively ξ _s ^(j) , Ξ _i ^(j) , equation (1) can be written as λp / n _{p, e} = λs ^(j) / ns _{, o} + λ _i ^(j) / ni _{, o,} and equation (2) is ^{| kp | = | ks (j} ) | cosξ s (j) + | ki (j) | cosξ i (j), ^{and, | ks (j) | sinξ} s (j) = | ki (j) | sinξ i ^(J) . Note that n _{p, e} , n _{s, o} , n _{i, o} are the refractive indices of the BBO crystal 30 with respect to the excitation light, signal light, and idler light, respectively.

  Further, as shown in FIG. 5, the signal light has a wavelength within a wavelength range of 450 to 700 nm, and has a conical shape in the BBO crystal 30 in a direction shifted by 4 ° from the axis with the propagation direction of the excitation light as an axis. Occurs. The signal light is not dispersed while propagating through the BBO crystal 30, but is dispersed when output from the output surface of the BBO crystal 30. On the other hand, idler light has a wavelength within a wavelength range of 719 to 1675 nm, and is generated in a conical shape while being dispersed from a direction shifted from 4 ° to a direction shifted by 15.4 ° with respect to the propagation direction of excitation light. To do. Note that the wavelength of idler light increases as the distance from the propagation direction of the excitation light increases.

  Although not shown, an AR coating (antireflection film) is formed on the incident surface 30 in of the BBO crystal 30. The AR coating is for improving the transmittance of excitation light. The AR coating is formed of, for example, a dielectric multilayer film. FIG. 6 shows the transmittance of the BBO crystal 30 on which the AR coating is formed in comparison with the transmittance of the BBO crystal 30 on which the AR coating is not formed. In FIG. 6, the solid line indicates the transmittance of the BBO crystal 30 on which the AR coating is formed, and the broken line indicates the transmittance of the BBO crystal 30 on which the AR coating is not formed. As is apparent from this graph, when the AR coating is formed, the transmittance at the wavelength of the excitation light (355 nm) is improved. An AR coating may be formed on the entire surface of the BBO crystal 30. When parametric generated light is output from the BBO crystal 30, it can be prevented from being reflected and lost at the exit surface 30out. Further, the entire surface of the BBO crystal 30 can be protected by the AR coating.

  FIG. 7 shows the experimental results obtained by measuring the spectrum of the parametric generated light output from the BBO crystal 30 with a multi-channel detector. In this experiment, the BBO crystal 30 was irradiated with excitation light having a wavelength of 355 nm. The propagation direction of the excitation light in the BBO crystal 30 was shifted by 35 ° from the optical axis 30a. It was confirmed that parametric generated light having a wide range of wavelengths extending from the ultraviolet region through the visible region to the near infrared region was output from the BBO crystal 30.

  As shown in FIG. 1, the excitation light reflecting mirror 34 is arranged at the rear stage of the BBO crystal 30. The excitation light reflecting mirror 34 is for removing the excitation light transmitted through the BBO crystal 30 and output from the BBO crystal 30.

  The excitation light reflecting mirror 34 is for reflecting light having a wavelength of 355 nm and transmitting other wavelengths. The excitation light reflecting mirror 34 is made of a synthetic quartz substrate and a dielectric multilayer film deposited on the surface thereof. FIG. 8 shows the transmittance of the excitation light reflecting mirror 34. As is apparent from the figure, the excitation light reflecting mirror 34 reflects about 97% of light having a wavelength of 355 nm.

  Hereinafter, the direction in which the excitation light reflecting mirror 34 is arranged will be described with reference to FIGS. In FIG. 9A, as in FIG. 3, the polarization direction of the excitation light is in a plane parallel to the paper surface of the drawing, and the optical axis 30a of the BBO crystal 30 is also in a plane parallel to the paper surface. . For this reason, the polarization direction of the parametric generated light extends perpendicular to the paper surface. On the other hand, in FIG. 9B, the polarization direction of the excitation light is perpendicular to the drawing sheet, and the optical axis 30a of the BBO crystal 30 is also in a plane perpendicular to the drawing sheet. Therefore, the polarization direction of the parametric generated light is in a plane parallel to the paper surface. In FIGS. 9A and 9B, a wavelength selection / light guiding optical system 50 described later is schematically illustrated.

  The excitation light reflecting mirror 34 is arranged in such a direction that the normal direction is a Brewster angle with respect to the propagation direction of the excitation light. The excitation light enters the excitation light reflecting mirror 34 as s-polarized light. For this reason, almost 100% of the excitation light is reflected by the excitation light reflecting mirror 34. On the other hand, the parametric generated light enters the excitation light reflecting mirror 34 as p-polarized light. For this reason, almost 100% of the parametric light is transmitted through the excitation light reflecting mirror 34. Therefore, the excitation light and the parametric light are reliably separated by the excitation light reflecting mirror 34.

Instead of the excitation light reflecting mirror 34, excitation light absorbing glass may be used. In this case, the excitation light absorbing glass is disposed at the subsequent stage of the BBO crystal 30. Excitation light absorbing glass is glass that absorbs the wavelength of excitation light (in this case, 355 nm) and transmits other wavelengths. According to the excitation light absorbing glass, the excitation light can be absorbed and the parametric light can be transmitted. The excitation light absorbing glass is preferably made of, for example, a colored glass filter made of lead glass containing Ti ⁴ and Ce ³⁺ (for example, Toshiba Glass L39 (trade name, manufactured by Toshiba Corporation)). This colored glass filter can substantially absorb light having a wavelength of 355 nm.

  Alternatively, both the excitation light reflecting mirror 34 and the excitation light absorbing glass may be disposed at the subsequent stage of the BBO crystal 30. That is, the excitation light reflecting mirror 34 and the excitation light absorbing glass are arranged in this order in the direction from the BBO crystal 30 toward the wavelength selection / light guiding optical system 50. The excitation light absorbing mirror 34 prevents the excitation light absorbing glass from being damaged by the excitation light.

  The optical stopper 35 is for capturing and stopping the excitation light reflected by the excitation light reflecting mirror 34.

  As shown in FIG. 1, the wavelength selection / light guiding optical system 50 is arranged at the subsequent stage of the excitation light reflecting mirror 34. The wavelength selection / light guiding optical system 50 receives the parametric generated light transmitted through the excitation light reflecting mirror 34, extracts light of a desired wavelength (signal light or idler light) from the parametric generated light, and supplies it to the optical fiber 10. It is for guiding.

  The wavelength selection / light guiding optical system 50 includes a collimating lens 52, an interference filter 60, and a condenser lens 54. The collimating lens 52 is provided at the subsequent stage of the excitation light reflecting mirror 42. The interference filter 60 is provided after the collimating lens 52. The condenser lens 54 is provided at the subsequent stage of the interference filter 60. The collimating lens 52 and the condensing lens 54 are arranged so that their optical axes coincide with the propagation direction of the excitation light output from the BBO crystal 30.

  The collimating lens 52 is for collimating the parametric generated light transmitted through the excitation light reflecting mirror 34 and converting it into parallel light.

  The interference filter 60 is for guiding light having a desired wavelength from the parametric generated light converted into parallel light by the collimating lens 52 to the condenser lens 54.

  The interference filter 60 has a shaft 60a and is configured to be rotatable around the shaft 60a. The axis 60 a is orthogonal to the optical axis of the collimating lens 52. In the case of FIG. 1, the optical axis of the collimating lens 52 is in a plane parallel to the paper surface, and the axis 60a is orthogonal to the paper surface. By rotating the interference filter 60 around the axis 60 a, the interference filter 60 can be inclined at an arbitrary angle with respect to the optical axis of the collimating lens 52. The interference filter 60 guides light having a wavelength corresponding to the tilt angle of the collimator lens 52 with respect to the optical axis to the condenser lens 54. If the inclination of the interference filter 60 is changed, the wavelength of the light guided to the condenser lens 54 can be arbitrarily changed.

  The condensing lens 54 is for condensing collimated light having a desired wavelength guided to the condensing lens 54 by the interference filter 60 on the incident end 10 in of the optical fiber 10.

  Instead of the interference filter 60, an etalon, a transmissive diffraction grating, or a reflective diffraction grating may be disposed between the collimating lens 52 and the condenser lens 54. The wavelength of the light guided to the condenser lens 54 can be arbitrarily changed by merely changing the tilt angle of the etalon, transmission diffraction grating, or reflection diffraction grating with respect to the optical axis of the collimator lens 52.

  The optical fiber 10 has an incident end 10in and an exit end 10out. The optical fiber 10 guides light having a desired wavelength incident from the condenser lens 54 to the incident end 10in to the output end 10out. If the emission end portion 10out is arranged at a desired position, coherent light having a desired wavelength can be output at the desired position.

  The collimating lens 12 is disposed at the subsequent stage of the emission end portion 10out of the optical fiber 10. The collimating lens 12 is for collimating the light emitted while diverging from the emission end 10out and converting it into parallel light. The user can use coherent light having a desired wavelength emitted from the emission end 10out as parallel light. Therefore, coherent light having a desired wavelength can be used for any application.

  As described above, according to the coherent light source 1 of the present embodiment, the BBO crystal 30 is arranged at a non-coaxial phase matching position with respect to the excitation light. Therefore, the BBO crystal 30 simultaneously outputs a plurality of parametric generation lights having different wavelengths in a plurality of different divergence directions around the output direction of the excitation light in accordance with the incidence of the excitation light. The wavelength selection / light guiding optical system 50 selects the parametric generation light having at least one desired wavelength from the plurality of parametric generation lights, and collects the parametric generation light at the incident end 10 in of the optical fiber 10. The optical fiber 10 guides the parametrically generated light to a desired position and emits it from the exit end 10out. Accordingly, coherent light having a desired wavelength can be easily output at a desired position. Even when the wavelength to be selected is changed, it is only necessary to change the inclination of the interference filter 60, and it is not necessary to change the direction and temperature of the BBO crystal 30.

  The BBO crystal 30 disposed at the non-coaxial phase matching position simultaneously generates signal light in a wide wavelength range (visible region) and idler light in a wide wavelength range (near infrared region). For this reason, the coherent light source 1 outputs light having a very wide spectral distribution at a time. The light thus obtained has a white spectrum and high coherency (coherence), and has an interference distance of several tens to 100 μm. In addition, since light of an arbitrary wavelength is selected from the light and the selected light can be guided by the optical fiber 10, light of a desired wavelength can be transmitted to an arbitrary far position.

  Note that the interference filter 60 may be removed from the wavelength selection / light guiding optical system 50 and the interference filter 60 may be provided in the subsequent stage of the collimating lens 12. In this case, the entire parametric generated light is guided to the incident end 10 in of the optical fiber 10 by the collimating lens 52 and the condenser lens 54. Light of a desired wavelength is selected by the interference filter 60 from the parametric generation light emitted from the emission end portion 10out of the optical fiber 10 and collimated by the collimating lens 12. Even in this case, an etalon, a transmission type diffraction grating, or a reflection type diffraction grating may be provided in the rear stage of the collimating lens 12 instead of the interference filter 60.

  Further, the collimating lens 12 may not be provided. Alternatively, another optical element may be provided at the subsequent stage of the emission end 10out instead of the collimating lens 12 in accordance with the application.

  Further, the optical fiber 10 may not be provided. Alternatively, another light guide member may be provided at the rear stage of the condenser lens 54 instead of the optical fiber 10 in accordance with the application.

  In the above description, the excitation light is incident on the BBO crystal 30 so that the angle θ formed by the propagation direction of the excitation light in the BBO crystal 30 and the optical axis (c-axis) of the BBO crystal 30 is 35 °, and is non-coaxial. Phase matching was developed. However, the angle θ need not be 35 °. The angle θ may be an angle larger than a predetermined threshold value for causing non-coaxial phase matching. Here, as shown in FIG. 10, when the wavelength of the excitation light is 355 nm, the predetermined threshold is 32.94 °. Therefore, when the excitation light is incident on the BBO crystal 30 so that the angle θ formed by the propagation direction of the excitation light in the BBO crystal 30 and the optical axis (c-axis) of the BBO crystal 30 is larger than 32.94 °. Non-coaxial phase matching is manifested. On the other hand, when the excitation light is made incident into the BBO crystal 30 so that the angle θ is 32.94 ° or less, coaxial phase matching appears.

  For example, when excitation light having a wavelength of 355 nm is incident on the BBO crystal 30 so that the angle θ is 30.06 °, signal light having a wavelength of 500 nm and idler light having a wavelength of 1220 nm are generated in the same direction as the excitation light. When the angle θ increases to 31.57 °, signal light with a wavelength of 550 nm and idler light with a wavelength of 999 nm are generated in the same direction as the excitation light. When the angle θ further increases and reaches the threshold value of 32.94 °, signal light having a wavelength of 710 nm and idler light having a wavelength of 710 nm are generated in the same direction as the excitation light. As described above, when the angle θ is equal to the threshold value, the wavelengths of the signal light and the idler light are equal. As the angle θ is further increased, the signal light and idler light are no longer phase matched on the same axis but phase matched on the same axis.

  In order to achieve non-coaxial phase matching, excitation light can be incident on the BBO crystal 30 so that the angle θ is larger than a predetermined threshold value (32.94 ° in this example). That's fine. However, the smaller the difference between the angle θ and the threshold value, the smaller the angular dispersion of the parametric generated light output from the BBO crystal 30, and the larger the difference between the angle θ and the threshold value, the larger the angular dispersion of the parametric generated light. . Here, the angular dispersion of the parametric generated light is small enough that the entire parametric generated light can be sufficiently collimated by the collimating lens 52, and large enough that the wavelength guided to the condenser lens 54 can be changed by changing the inclination of the interference filter 60. There is a need. Therefore, the angle θ is set to a value (35 ° in this example) such that the angular dispersion determined by the difference between the angle θ and the threshold value has a desired magnitude.

  Note that the threshold value for causing non-coaxial phase matching varies depending on the wavelength of the excitation light. For example, when the wavelength of the excitation light is 395 nm, the threshold value is 29.39 ° as shown in FIG.

  Further, in the above description, phase matching is expressed by the type-I phase matching method in which the polarization directions of the signal light and idler light are the same in parallel, but the polarization directions of other types (for example, the polarization direction of the signal light and idler light are different). Phase matching by the orthogonal type-II) phase matching method may be developed. In that case, the angle between the excitation light and the optical axis (c-axis) of the BBO crystal 30 is set to a threshold value corresponding to the type of the phase matching method, that is, the wavelengths of the signal light and idler light match. The angle may be set larger than the angle at which the signal light and idler light propagate in the same direction as the excitation light.

  The cutting angle φ of the BBO crystal 30 may not be 21.7 °.

  In the above description, the incident surface 30in and the output surface 30out of the BBO crystal 30 are parallel to each other. Accordingly, the angle formed between the optical axis 30a and the incident surface 30in and the angle formed between the optical axis 30a and the output surface 30out were equal to each other. However, the incident surface 30in and the output surface 30out do not have to be parallel.

  Next, a first modification of the parametric light generation / wavelength selection unit 8 will be described with reference to FIGS. 11 and 12.

  The parametric light generation / wavelength selection unit 108 of this modification includes a wavelength selection / light guide optical system 150 instead of the wavelength selection / light guide optical system 50, as shown in FIG. The wavelength selection / light guiding optical system 150 includes a movable slit element 62 and a light cut filter 64 instead of the interference filter 60. Therefore, the wavelength selection / light guiding optical system 150 of this modification example includes the collimating lens 52, the condensing lens 54, the movable slit element 62, and the light cut filter 64. The movable slit element 62 and the light cut filter 64 are disposed between the collimating lens 52 and the condenser lens 54. The movable slit element 62 and the light cut filter 64 are arranged in this order in the direction from the collimating lens 52 toward the condenser lens 54.

  As shown in FIG. 12, the movable slit element 62 has a disk shape, and its center 62 c is located on the optical axis of the collimating lens 52. A slit 62 a is formed in the movable slit element 62. The slit 62a extends in the circumferential direction around the center 62c. The movable slit element 62 is configured such that the radial position of the slit 62a, that is, the distance from the center 62c can be arbitrarily changed. By setting the position of the slit 62a in the radial direction to a position corresponding to the divergence angle of light having a desired wavelength among the parametric generated light, the light having the desired wavelength is allowed to pass through the slit 62a. Here, there is a possibility that the BBO crystal 30 outputs light of two wavelengths in the same divergence direction. Specifically, there is a possibility that signal light of a certain wavelength and idler light of another wavelength are output in the same direction. Therefore, there is a possibility that light having two different wavelengths passes through the slit 62a. The light cut filter 64 transmits light having a desired wavelength out of the two wavelengths having passed through the slit 62 a and guides it to the condenser lens 54.

  Next, a second modification of the parametric light generation / wavelength selection unit 8 will be described with reference to FIG.

  The parametric light generation / wavelength selection unit 208 of this modification is not provided with the excitation light reflecting mirror 34. Further, instead of the wavelength selection / light guide optical system 50, a wavelength selection / light guide optical system 250 is provided. The wavelength selection / light guiding optical system 250 is arranged at the subsequent stage of the BBO crystal 30.

Unlike the wavelength selection / light guiding optical system 50, the wavelength selection / light guiding optical system 250 includes a holed convex lens 252 instead of the collimating lens 52, and includes another holed convex lens 254 instead of the condenser lens 54, Further, an optical stopper 235 is provided. Therefore, the wavelength selection / light guiding optical system 250 includes the perforated convex lens 252, the optical stopper 235, the interference filter 60, and the perforated convex lens 254. The perforated convex lens 252, the optical stopper 235, the interference filter 60, and the perforated convex lens 254 are arranged in this order in the direction from the BBO crystal 30 to the optical fiber 10 between the BBO crystal 30 and the optical fiber 10. Each of the perforated convex lenses 252 and 254 has a through hole on its optical axis. The perforated convex lenses 252 and 254 are arranged so that their optical axes coincide with the propagation direction of the excitation light output from the BBO crystal 30. The optical stopper 235 is disposed on the optical axis of the perforated convex lenses 252 and 254. For this reason, the excitation light passes through the through hole of the perforated convex lens 252 and is blocked by the light stopper 235. On the other hand, since the parametric generated light diverges in a conical shape around the optical axis of the excitation light, it reaches around the through hole of the perforated convex lens 252 and is collimated by the perforated convex lens 252, and has a wavelength by the interference filter 60. After the selection, the light is condensed on the incident end 10 in of the optical fiber 10 by the perforated convex lens 254.
<Second Embodiment>

  A coherent light source 301 according to a second embodiment of the present invention will be described with reference to FIG.

  The coherent light source 1 of the first embodiment selects and outputs one desired wavelength from a wide band of parametric generated light. On the other hand, the coherent light source 301 according to the present embodiment simultaneously selects three wavelengths of red (R), green (G), and blue (B) from the wide band of the parametric generated light.

  Specifically, the coherent light source 301 is different from the coherent light source 1 of the first embodiment in the following points. That is, the coherent light source 301 includes a parametric light generation / wavelength selection unit 308 instead of the parametric light generation / wavelength selection unit 8. The coherent light source 301 includes three optical fibers 10r, 10g, and 10b for red (R), green (G), and blue (B) instead of the single optical fiber 10. The coherent light source 301 includes three collimating lenses 12r, 12g, and 12b for red (R), green (G), and blue (B) instead of the single collimating lens 12.

  Unlike the parametric light generation / wavelength selection unit 8 in the first embodiment, the parametric light generation / wavelength selection unit 308 includes a wavelength selection / light guide optical system 350 instead of the wavelength selection / light guide optical system 50. ing. Unlike the wavelength selection / light guide optical system 50, the wavelength selection / light guide optical system 350 includes a phase modulation type spatial light modulation device 68 and a reflection mirror 66 instead of the interference filter 60. That is, the wavelength selection / light guiding optical system 350 includes a collimating lens 52, a condensing lens 54, a phase modulation type spatial light modulation device 68, and a reflection mirror 66. The phase modulation type spatial light modulation device 68 and the reflection mirror 66 are arranged in this order in the direction from the collimating lens 52 to the condensing lens 54 between the collimating lens 52 and the condensing lens 54. The incident ends 10rin, 10gin, and 10bin of the optical fibers 10r, 10g, and 10b are arranged in parallel at different positions on the rear stage of the condenser lens 54. The collimating lenses 12r, 12g, and 12b are disposed at the subsequent stage of the emission end portions 10rout, 10gout, and 10bout of the optical fibers 10r, 10g, and 10b, respectively.

  The phase modulation spatial light modulator 68 includes a phase modulation module 70, a laser diode 78, and a lens 79. The laser diode 78, the lens 79, and the phase modulation module 70 are arranged in this order. The phase modulation module 70 includes a transmissive LCD 71, a lens 72, and a reflective PAL-SLM (Parallel Aligned Liquid crystal Spatial Light Modulator) 74. The transmissive LCD 71, the lens 72, and the reflective PAL-SLM 74 are arranged in this order. The reflective PAL-SLM 74 includes a reading surface 74a and a writing surface 74b. A computer 76 is connected to the LCD 71. The phase modulation module 70 is arranged so that the reading surface 74 a of the reflective PAL-SLM 74 faces the collimating lens 52 and the reflective mirror 66, and the transmissive LCD 71 faces the lens 79. As the phase modulation module 70, for example, SLMM X7550 (trade name, manufactured by Hamamatsu Photonics Co., Ltd.) is preferably used.

  The parametric generated light emitted from the BBO crystal 30 includes light of three wavelengths of red (R), green (G), and blue (B). These red (R), green (G), and blue (B) light is emitted from the BBO crystal 30 in a conical shape while diverging in three different angular directions around the propagation direction of the excitation light. Accordingly, red (R), green (G), and blue (B) light is incident on three different positions on the reading surface 74 a of the reflective PAL-SLM 74. The reflective PAL-SLM 74 functions as a refractive index grating for diffracting these red (R), green (G), and blue (B) light in different directions.

  More specifically, the computer 76 records an intensity pattern corresponding to the refractive index grating on the LCD 71. When light from the laser diode 78 passes through the lens 79 and the LCD 71 and enters the writing surface 74 b of the PAL-SLM 74, a refractive index grating is recorded on the PAL-SLM 74. When red (R), green (G), and blue (B) light is incident on the reading surface 74a, the PAL-SLM 74 diffracts them in different directions. Red (R), green (G), and blue (B) light propagates in different directions through the reflecting mirror 66 and the condenser lens 54. The incident end portions 10rin, 10gin, and 10bin of the optical fibers 10r, 10g, and 10b are respectively disposed in the corresponding directions. For this reason, red (R), green (G), and blue (B) light is incident on the corresponding optical fibers 10r, 10g, and 10b, respectively. The light of each color is guided by the corresponding optical fibers 10r, 10g, and 10b, and collimated by the corresponding collimating lenses 12r, 12g, and 12b. The RGB collimated light transmitted through the collimating lenses 12r, 12g, and 12b is used, for example, to generate a color image and a color hologram image.

  As described above, the collimated light source 301 of the present embodiment can generate three RGB lights simultaneously. This eliminates the need to prepare three lasers to generate RGB.

  If the intensity pattern recorded on the LCD 71 by the computer 76 is changed, light of any three wavelengths other than RGB can be selected and guided to the optical fibers 10r, 10g, and 10b. Therefore, a color image generating apparatus capable of changing the wavelengths of the three primary colors, for example, a color printer can be configured.

Furthermore, if an arbitrary number of optical fibers 10 are prepared in advance and the intensity pattern recorded on the LCD 71 by the computer 76 is adjusted, light having an arbitrary plurality of wavelengths can be selected and guided to the optical fiber 10. Parametrically generated light generated from the BBO crystal 30 under non-coaxial phase matching conditions includes not only signal light (visible) but also idler light (near infrared) and has a very wide spectral distribution. An arbitrary plurality of lights can be selected and output from them.
<Third Embodiment>

  A coherent light source 401 according to a third embodiment of the present invention will be described with reference to FIGS.

  The coherent light source 401 of this embodiment is for selectively amplifying and outputting parametric generated light having a desired wavelength. As shown in FIG. 15, the coherent light source 401 of the present embodiment has a seed light generation light source 80 and a seed light / excitation light coupling optical system 82 added to the coherent light source 1 of the first embodiment. This is the same as the coherent light source 1 except for the above. 15 and 16 schematically show the wavelength selection / light guide optical system 50. However, the wavelength selection / light guide optical system 50 and the collimating lens 52 are arranged in the same manner as in the first embodiment. The optical lens 54 and the interference filter 60 are included.

  The seed light generation light source 80 is a laser for generating seed light having a desired wavelength to be amplified. The desired wavelength is the wavelength of signal light or idler light among a plurality of pairs of signal light and idler light generated from the BBO crystal 30 by non-coaxial phase matching.

  The seed light generating light source 80 may be a continuous wave laser or a pulsed laser. When the seed light generation light source 80 is pulse oscillation, the pulse oscillation timing of the seed light generation light source 80 is adjusted, and the seed light is irradiated onto the BBO crystal 30 immediately before the pulse excitation light enters the BBO crystal 30. Just do it.

  The seed light / excitation light coupling optical system 82 is for making both the seed light and the excitation light enter the BBO crystal 30.

  As shown in FIG. 16, the seed light / excitation light coupling optical system 82 includes an optical fiber 84, a detachment jig 86, a collimator lens 88, a polarizing plate 90, a condensing lens 92, and excitation light transmission / seed light reflection. For mirror 94. In FIG. 16, the optical axis 30a of the BBO crystal 30 and the polarization component of the excitation light are both in a plane parallel to the paper surface of the figure, and the polarization component of the parametric light generated in the BBO crystal 30 is relative to the paper surface of the figure. Are orthogonal.

  The optical fiber 84 is for guiding the seed light output from the seed light generating light source 80. The detachment jig 86 is for fixing the optical fiber 84 so that the emission end of the optical fiber 84 faces the collimating lens 88. The collimating lens 88 collimates the seed light emitted from the optical fiber 84. The polarizing plate 90 adjusts the polarization direction of the seed light transmitted through the collimator lens 88 so as to be parallel to the polarization component of the parametric generation light. In this example, the polarizing plate 90 converts the seed light into linearly polarized light that is perpendicular to the direction of the paper surface. Instead of the polarizing plate 90, a wave plate may be used.

  The condensing lens 92 is for condensing the seed light transmitted through the polarizing plate 90 on the incident surface 30 in of the BBO crystal 30.

  As shown in FIG. 15, the excitation light transmitting / seed light reflecting mirror 94 transmits the excitation light from the excitation light reflecting mirror 6 and makes the excitation light incident on the BBO crystal 30, and from the condenser lens 92. By reflecting the seed light, the seed light is incident on the BBO crystal 30 along the optical axis of the excitation light.

  Here, the focal length of the condenser lens 92 will be described with reference to FIG.

The seed light is incident on the condensing lens 92 while being converged on the incident surface 30 in of the BBO crystal 30. The seed light intersects with the excitation light on the incident surface 30 in of the BBO crystal 30 and diverges in a conical shape around the propagation direction of the excitation light in the BBO crystal 30. The convergence angle of the seed light on the incident surface 30 in of the BBO crystal 30 and the divergence angle δθ _{SEED, in in} the BBO crystal 30 depend on the focal length of the condenser lens 92. In the present embodiment, the focal length of the condensing lens 92 is such that the divergence angle δθ _{SEED, in} of the seed light in the BBO crystal 30 is a divergence angle ξ _s of a pair of signal light and idler light including light having a desired wavelength. ^The value is set to be larger than ^(j) and ξ _i ^(j) . Also in FIG. 17, the polarization direction of the excitation light is in a plane parallel to the paper surface of the drawing, and the polarization directions of the seed light, the signal light, and the idler light are orthogonal to the paper surface.

With this configuration, the seed light generating light source 80 causes light having a desired wavelength to be amplified to be incident on the BBO crystal 30 as seed light before the excitation light generating unit 2 makes the excitation light incident on the BBO crystal 30. . In a state where the seed light is incident on the BBO crystal 30, the excitation light generation unit 2 causes the excitation light to enter the BBO crystal 30. In the BBO crystal 30, the seed light and the excitation light intersect. That is, the seed light diverges around the optical axis of the excitation light at a divergence angle δθ _{SEED, in} . In the BBO crystal 30, a plurality of pairs of signal light and idler light are generated and diverge around the propagation direction of the excitation light. Here, a pair of signal light and idler light including light having a desired wavelength to be amplified diverges inside the diverging seed light. For this reason, these signal light and idler light are amplified by a component propagating in parallel with the propagation direction of the signal light and idler light in the seed light. Therefore, the BBO crystal 30 outputs light having a desired wavelength and light having a corresponding wavelength in a state where the intensity is high.

For example, suppose that it is desired to select and amplify 650 nm signal light out of a pair of signal light output from the BBO crystal 30 and idler light having a wavelength of 650 nm and idler light having a wavelength of 781 nm. In this case, the seed light generating light source 80 is composed of a 650 nm semiconductor laser. The condensing lens 92 causes the 650 nm laser light to enter the BBO crystal 30 as seed light. The focal length of the condensing lens 92 is determined by the divergence angle δθ _{SEED, in} which the seed light diverges in the BBO crystal 30, and the divergence angle ξ _s of the signal light having a wavelength of 650 nm and the divergence angle ξ _i of the idler light having a wavelength of 781 nm. It is set to a value that increases. As a result, in the BBO crystal 30, both the signal light having a wavelength of 650 nm and the idler light having a wavelength of 781 nm are amplified by the seed light. If light of 650 nm is selected by the wavelength selection / light guiding optical system 50 and guided to the optical fiber 10, high-intensity 650 nm coherent light can be output.

  FIG. 18A shows the experimental results of measuring the spectrum output from the BBO crystal 30 with a multi-channel measuring instrument when 650 nm seed light is incident on the BBO crystal 30 under the above conditions. As a comparative example, FIG. 18B shows a spectrum output from the BBO crystal 30 when no seed light is incident on the BBO crystal 30. It can be seen that when 650 nm seed light is incident on the BBO crystal 30, light at 650 nm and 781 nm is amplified.

  As described above, according to the present embodiment, seed light having a desired wavelength is injected into the BBO crystal 30 in advance, so that the light having the wavelength and the light paired with the light having the wavelength are paired. Can be selectively amplified and output.

In the above description, the seed light generating light source 80 generates seed light having a desired wavelength to be amplified. In the above example, when it is desired to amplify the 650 nm signal light out of the 650 nm signal light and the 781 nm idler light, the 650 nm light is incident on the BBO crystal 30 as the seed light. However, the seed light generating light source 80 may generate seed light having a wavelength of light that is paired with light having a desired wavelength to be amplified. That is, the seed light generating light source 80 may be configured to generate seed light having a wavelength that is paired with a desired wavelength to be amplified. For example, when it is desired to amplify 650 nm signal light out of 650 nm signal light and 781 nm idler light, 781 nm light may be incident on the BBO crystal 30 as seed light. The divergence angle δθ _{SEED, in} which the seed light diverges in the BBO crystal 30 is larger than the divergence angle ξ _s of the signal light having the wavelength of 650 nm and the divergence angle ξ _i of the idler light having the wavelength of 781 nm. It suffices if it is set to such a value. Both the signal light having a wavelength of 650 nm and the idler light having a wavelength of 781 nm are amplified by the seed light.

In the above description, the focal length of the condensing lens 92 is set so that the divergence angle δθ _{SEED, in} of the seed light in the BBO crystal 30 corresponds to the divergence angle ξ _s of the signal light (or idler light) having a desired wavelength. The value is set to be larger than the divergence angle ξ _{i of} idler light (or signal light). However, the divergence angle δθ _{SEED, in} of the seed light is the divergence angle ξ _s of the signal light (or idler light) of the desired wavelength and the divergence angle ξ _i of the idler light (or signal light) paired with the divergence angle ξ _i It should be larger than at least one. Both signal light (or idler light) having a desired wavelength and idler light (or signal light) paired with the signal light can be amplified by the seed light.
<Fourth embodiment>

  A coherent light source 501 according to a fourth embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 19, the coherent light source 501 of the present embodiment is different from the coherent light source 1 of the first embodiment in that a parametric light generation / wavelength selection unit 508 is used instead of the parametric light generation / wavelength selection unit 8. It has. The parametric light generation / wavelength selection unit 508 is different from the parametric light generation / wavelength selection unit 8 in that two BBO crystals 30 (hereinafter referred to as “first BBO crystal 30-1” and “second BBO crystal 30”). -2 "). The first BBO crystal 30-1 and the second BBO crystal 30-2 are arranged in cascade in this order from the excitation light reflection mirror 6 toward the excitation light reflection mirror 34. The wavelength selection / light guiding optical system 50 is arranged at the subsequent stage of the second BBO crystal 30-2. The wavelength selection / light guiding optical system 50 selects light of a desired wavelength from the parametric generation light output from the first and second BBO crystals 30-1 and 30-2 and guides it to the optical fiber 10. . Except for the above points, the coherent light source 501 of the present embodiment is the same as the coherent light source 1 of the first embodiment. In FIG. 19, the wavelength selection / light guide optical system 50 is schematically illustrated as in FIG. 15 of the third embodiment, but the wavelength selection / light guide optical system 50 is the same as that of the first embodiment. Like the form, it is composed of a collimating lens 52, a condenser lens 54, and an interference filter 60.

  As shown in FIG. 20 (a), the first BBO crystal 30-1 and the second BBO crystal 30-2 have the same shape and the same dimensions as the BBO crystal 30 of the first embodiment. Have. The optical axis 30-1a of the BBO crystal 30-1 is in a plane parallel to the drawing sheet. The polarization component of the excitation light is in a plane parallel to the drawing sheet. For this reason, the polarization component of the parametric light generated in the BBO crystal 30-1 is orthogonal to the drawing sheet. The optical axis 30-2a of the BBO crystal 30-2 is also in a plane parallel to the drawing sheet. For this reason, the polarization component of the parametric light generated in the BBO crystal 30-2 is also orthogonal to the drawing sheet.

  More specifically, the entrance surface 30-1in and the exit surface 30-1out of the BBO crystal 30-1 are formed in parallel. Further, the incident surface 30-2in and the exit surface 30-2out of the BBO crystal 30-2 are formed in parallel. The incident surface 30-1in and the exit surface 30-1out of the BBO crystal 30-1 are cut out at a cutting angle φ1, and the incident surface 30-2in and the exit surface 30-2out of the BBO crystal 30-2 are cut out. Cut out at φ2. Cutout angle φ1 and cutout angle φ2 are equal to each other. In this example, φ1 = φ2 = 21.7 °.

  Further, the first BBO crystal 30-1 is similar to the BBO crystal 30 of the first embodiment in that the excitation light propagating in the first BBO crystal 30-1 and the optical axis (c-axis) 30-1a Is arranged so that the angle θ1 is 35 °. The second BBO crystal 30-2 is also arranged so that the angle θ2 formed between the excitation light propagating in the second BBO crystal 30-2 and the optical axis (c-axis) 30-2a is 35 °. . That is, θ1 = θ2 = 35 °.

  The direction in which the excitation light reflection mirror 6 reflects the excitation light received from the beam shaping unit 4 (hereinafter referred to as “excitation light reflection mirror optical axis 6a”), the optical axes 30-1a and 30-2a, and the BBO crystal 30-1 and the propagation direction of the excitation light in 30-2, the normal 30-1n of the incident surface 30-1in and the output surface 30-1out of the BBO crystal 30-1, and the incident surface of the BBO crystal 30-2 The normal line 30-2n of 30-2in and the output surface 30-2out are all in the same plane (a plane parallel to the paper surface of FIG. 20A). Moreover, the optical axis 30-1a and the optical axis 30-2a are inclined by the same angles θ1 and θ2 in opposite directions with respect to the propagation direction of the excitation light in the BBO crystals 30-1 and 30-2. Here, an angle γ1 formed between the propagation direction of the excitation light inside the BBO crystal 30-1 and the optical axis 6a, and an angle γ2 formed between the propagation direction of the excitation light inside the BBO crystal 30-2 and the optical axis 6a. Are equal to each other. That is, γ1 = γ2. The normal line 30-1n and the normal line 30-2n are inclined by the same angle (θ1-φ1 + γ1), (θ2-φ2 + γ2) in the opposite directions with respect to the optical axis 6a. The excitation light propagates in a direction parallel to the optical axis 6a until it is emitted from the BBO crystal 30-1 and then incident on the BBO crystal 30-2, and also on the optical axis 6a after being emitted from the BBO crystal 30-2. Propagate again.

  Thus, the directions of the optical axes 30-1a and 30-2a are opposite to each other with respect to the propagation direction of the excitation light in the optical axis 6a and the BBO crystals 30-1 and 30-2. Accordingly, as shown in FIG. 20B, when many of the multiple pairs of signal light and idler light generated in the BBO crystal 30-1 propagate in the BBO crystal 30-2, the propagation The direction is parallel to the divergence direction of signal light and idler light having the same wavelength generated in the BBO crystal 30-2. For this reason, many of the parametric generation light generated in the BBO crystal 30-1 functions as seed light in the BBO crystal 30-2.

  Here, it is assumed that the orientations of the optical axes 30-1a and 30-2a of the BBO crystals 30-1 and 30-2 are not opposite to the optical axis 6a and the excitation light propagation direction, but in the same direction. . In that case, when only one set of signal light / idler light among the parametric lights generated from the BBO crystal 30-1 propagates in the BBO crystal 30-2, the propagation direction thereof is the BBO crystal 30-2. Does not match the propagation direction of the corresponding set generated in Therefore, the BBO crystal 30-2 can amplify only a certain set of signal light and idler light wavelengths.

  However, in the present embodiment, the BBO crystals 30-1 and 30-2 are arranged so that the directions of their optical axes are opposite to each other with respect to the excitation light. For this reason, the propagation direction of many sets of signal light / idler light in the BBO crystal 30-2 out of the parametric generated light generated from the BBO crystal 30-1 is generated in the BBO crystal 30-2. It coincides with the propagation direction of signal light and idler light. Of the parametric light generated from the BBO crystal 30-1, many sets of signal light and idler light function as seed light in the BBO crystal 30-2. Amplification is performed in a wide wavelength range in the BBO crystal 30-2.

  The optical axes 30-1a and 30-2a are in the same plane as the propagation direction of the excitation light in the optical axis 6a and the BBO crystals 30-1 and 30-2, and the optical axis 6a and the excitation light What is necessary is just to face the mutually opposite side with respect to the propagation direction. Of the parametric light generated in the BBO crystal 30-1, the propagation direction in many BBO crystals 30-2 is parallel to the propagation direction of the parametric light having the same wavelength generated in the BBO crystal 30-2. is there. Therefore, the angle θ1 formed between the optical axis 30-1a and the propagation direction of the excitation light in the BBO crystal 30-1 is the angle θ2 formed between the optical axis 30-2a and the propagation direction of the excitation light in the BBO crystal 30-2. May be different. The angle (θ1 + γ1) formed by the optical axis 30-1a and the optical axis 6a may be different from the angle (θ2 + γ2) formed by the optical axis 30-2a and the optical axis 6a. Therefore, the allowable range of the relative angular position of the BBO crystal 30-2 with respect to the BBO crystal 30-1 is widened, and the BBO crystal 30-2 is easily arranged with respect to the BBO crystal 30-1.

  Cutting angles φ1 and φ2 of the BBO crystals 30-1 and 30-2 are not limited to 21.7 °. Depending on the values of the cutting angles φ1 and φ2, the BBO crystals 30-1 and 30-2 are arranged so that the normals 30-1n and 30-2n coincide with the optical axis 6a, and the angles γ1 and γ2 are set to 0 °. It can also be.

  In the above description, the cutting angles φ1 and φ2 of the BBO crystals 30-1 and 30-2 are the same, but may be different. For example, there may be a difference of 1 to 2 °.

  In the above description, the output surface 30-1out and the incident surface 30-1in of the BBO crystal 30-1 are parallel to each other, and the output surface 30-2out and the incident surface 30-2in of the BBO crystal 30-2 are parallel to each other. Met. However, the output surface 30-1out and the incident surface 30-1in may not be parallel, and the output surface 30-2out and the incident surface 30-2in may not be parallel. However, if the angle formed between the output surface 30-1out and the incident surface 30-1in and the angle formed between the output surface 30-2out and the incident surface 30-2in are too large, as shown in FIG. The propagation direction of the parametric generation light generated in the BBO crystal 30-1 and the propagation direction of the parametric generation light generated in the BBO crystal 30-2 are greatly shifted in the BBO crystal 30-2, and a sufficient amplification effect is obtained. I can't.

  The BBO crystal 30-1 and the BBO crystal 30-2 may be adjacent to each other. If the BBO crystals 30-1 and 30-2 are not adjacent to each other, the parametric generated light output from the BBO crystal 30-1 will spread too much in the circumferential shape, the intensity will be weak, and it will not be useful as seed light. End up.

  The BBO crystals 30-1 and 30-2 may be bonded to each other, but may not be bonded to each other.

  Although not shown, an AR coating is formed on the entire surface of the first BBO crystal 30-1 and the second BBO crystal 30-2 to protect the surfaces of the BBO crystals 30-1 and 30-2. ing. Therefore, the distance between the two crystals 30-1 and 30-2 can be shortened without damaging the surface.

  According to the coherent light source 501 of the present embodiment having such a configuration, the BBO crystal 30-1 generates parametric generation light composed of a plurality of sets of signal light and idler light by the incidence of excitation light. Parametrically generated light generated in the BBO crystal 30-1 is incident on the BBO crystal 30-2 together with excitation light as seed light having a plurality of wavelengths. As a result, the BBO crystal 30-2 generates high-intensity parametric light amplified over a plurality of wavelengths.

  FIG. 21 (a) shows the result of measuring the output spectrum obtained when the BBO crystals 30-1 and 30-2 are cascade-arranged as described above with a multichannel measuring instrument. As a comparative example, the result of measuring the output spectrum obtained from a single BBO crystal 30 is shown in FIG. It can be seen that if two BBO crystals 30 are arranged in cascade, an enhancement effect of 100 times or more when only one BBO crystal 30 is used can be obtained over a plurality of wavelengths.

  As described above, according to the present embodiment, it is possible to achieve extremely large energy enhancement over a wide wavelength range by exciting a plurality of BBO crystals 30 in a cascade arrangement.

  In the above description, the angle formed between the excitation light propagation direction in the crystal 30-1 and the optical axis 30-1a, and the angle formed between the excitation light propagation direction in the crystal 30-2 and the optical axis 30-2a. Both were set to 35 °, and non-coaxial phase matching was exhibited. However, the BBO crystal 30-1 is oriented so that the angle formed between the excitation light propagation direction in the crystal 30-1 and the optical axis 30-1a is larger than the threshold value 32.94 ° satisfying the non-coaxial matching condition. It only has to be arranged. The direction (angular position) of the BBO crystal 30-2 with respect to the BBO crystal 30-1 is such that the direction of the optical axis 30-2a with respect to the excitation light propagation direction in the crystal 30-2 is the crystal 30- with the optical axis 30-1a. 1 is a direction opposite to the direction of the excitation light propagation direction in 1 and the angle formed by the optical axis 30-2a and the direction of excitation light propagation in the crystal 30-2 satisfies a non-coaxial matching condition. The value should be larger than 32.94 °. Most of the parametric light generated in the BBO crystal 30-1 functions as seed light in the BBO crystal 30-2. For this reason, the tolerance | permissible_range of the relative angle position with respect to the BBO crystal 30-1 of the BBO crystal 30-2 is wide, and the freedom degree of direction with respect to the BBO crystal 30-1 of the BBO crystal 30-2 is high, and these crystals are easy to arrange | position.

  In the above description, two BBO crystals 30 are arranged in a cascade. However, a larger number of BBO crystals 30 may be arranged in a cascade to perform multistage amplification.

  Next, a modified example of the parametric light generation / wavelength selection unit 508 will be described with reference to FIG.

  Unlike the parametric light generation / wavelength selection unit 508, the parametric light generation / wavelength selection unit 608 of the present modification includes a filter 99 disposed between the BBO crystal 30-1 and the BBO crystal 30-2. The filter 99 is for blocking signal light. Parametrically generated light generated by the BBO crystal 30-1 is incident on the filter 99. The filter 99 transmits only the idler light of the incident parametric generation light and makes it enter the BBO crystal 30-2. Excitation light and idler light are incident on the BBO crystal 30-2, and the idler light functions as seed light.

  As described above, in the BBO crystal 30-1, signal light (visible light in this example) and idler light (near-infrared light in this example) are generated simultaneously in response to the incidence of excitation light. Here, when the signal light propagates in the BBO crystal 30-1, the pulse width becomes larger due to the wavelength dispersion of the refractive index. On the other hand, as the idler light propagates through the BBO crystal 30-1, its pulse width is compressed. More specifically, as described with reference to FIG. 5, the non-coaxial phase matching of the BBO crystal has a large idler dispersion angle. Moreover, the longer the wavelength, the farther from the optical axis of the excitation light. For this reason, as the wavelength of idler light increases, the path length passing through the BBO crystal 30-1 becomes longer, and the time of emission from the BBO crystal 30-1 is delayed. On the other hand, the light travels faster in the medium as the wavelength is longer. For this reason, when the parametric generation light is emitted from the BBO crystal 30-1 and incident on the BBO crystal 30-2, the pulse width of the signal light is expanded, while the pulse width of the idler light is compressed.

  Therefore, in this modification, signal light is blocked by the filter 99 among the parametric generation light generated in the BBO crystal 30-1, and only idler light is incident on the BBO crystal 30-2. Therefore, a narrow pulse of seed light can be incident on the second BBO crystal 30-2. In the BBO crystal 30-2, since the parametric generated light generated in the BBO crystal 30-2 is amplified by the narrow pulse seed light, high intensity parametric generated light of the narrow pulse is generated.

When the pulse width of the excitation light is a femtosecond level, particularly several tens of femtoseconds or less, the pulse width of the signal light generated in the BBO crystal 30-1 due to the wavelength dispersion of the refractive index of the BBO crystal 30-1 is The pulse width of the excitation light increases from several tens to several times. However, if only idler light is used as seed light among the parametric generation light generated in the BBO crystal 30-1, it can be obtained with the BBO crystal 30-2 as compared to using both signal light and idler light as seed light. The pulse width of the generated parametric light can be reduced.
<Fifth embodiment>

  Next, a coherent light source 501 according to a fourth embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 23, the coherent light source 701 of this embodiment is different from the coherent light source 501 of the fourth embodiment, and instead of the parametric light generation / wavelength selection unit 508, the parametric light generation / wavelength selection unit 708 is used. It has. The parametric light generation / wavelength selection unit 708 includes a mounting table 95 and a rotating table 96. The turntable 96 has a rotation shaft 96a and is rotatable around the rotation shaft 96a. The mounting table 95 is disposed on the turntable 96. In the present embodiment, the BBO crystal 30-1, the BBO crystal 30-2, the excitation light reflecting mirror 34, the optical stopper 35, the wavelength selection / light guiding optical system 50, and the incident end 10in of the optical fiber 10 are the mounting table. 95. The turntable 96 is provided with a handle 98, and the user can hold the handle 98 and rotate the turntable 96 around the rotation shaft 96a.

  Hereinafter, the parametric light generation / wavelength selection unit 708 will be described in detail with reference to FIGS. 24 and 25. FIG.

  As shown in FIG. 24, the turntable 96 is disposed with respect to the excitation light reflecting mirror 6 so that the rotation axis 96a intersects the optical axis 6a of the excitation light reflecting mirror 6 perpendicularly. In FIG. 24, the optical axis 6a of the excitation light reflecting mirror 6 is in a plane parallel to the drawing sheet. The rotation shaft 96a is orthogonal to the drawing sheet.

  On the mounting table 95, the BBO crystal 30-1, the BBO crystal 30-2, the excitation light reflecting mirror 34, the wavelength selection / light guiding optical system 50, and the incident end 10in of the optical fiber 10 are arranged on a predetermined reference axis 95a. It is arranged and fixed along this order. The reference shaft 95 a extends on the mounting table 95. In FIG. 24, the mounting table 95 and the reference shaft 95a extend in a plane parallel to the drawing sheet. The mounting table 95 is disposed on the rotating table 96 so that the rotating shaft 96a is orthogonal to the reference shaft 95a at the center position between the BBO crystal 30-1 and the BBO crystal 30-2.

  Here, the BBO crystal 30-1 and the BBO crystal 30-2 are arranged so as to satisfy the following conditions.

  That is, the optical axis 30-1a, the optical axis 30-2a, the normal 30-1n (the normal of the incident surface 30-1in and the exit surface 30-1out), and the normal 30-2n (the incident surface 30-2in and the exit surface). 30-2out normal) and the reference axis 95a are in the same plane (in a plane parallel to the paper surface of FIG. 24). The optical axis 30-1a and the optical axis 30-2a are inclined by the same angle in the opposite direction with respect to the reference axis 95a. The normal line 30-1n and the normal line 30-2n are inclined by the same angle in the opposite direction with respect to the reference axis 95a.

  When the user holds the handle 98 and rotates the turntable 96 around the rotation axis 96a, the reference axis 95a rotates around the rotation axis 96a, and the angle α formed between the reference axis 95a and the optical axis 6a changes. For example, as shown in FIG. 25, when the angle α between the reference axis 95a and the optical axis 6a becomes 0 °, the reference axis 95a and the optical axis 6a coincide. Thus, by rotating the turntable 96 around the rotation axis 96a, the incident angle of the excitation light propagating along the optical axis 6a to the BBO crystal 30-1 and the BBO crystal 30-2 is changed. be able to. As a result, the wavelength range amplified in the BBO crystals 30-1 and 30-2 changes, and the intensity of light having a desired wavelength selected by the wavelength selection / light guiding optical system 50 varies. Therefore, if the fluctuation of the output of the light output from the collimating lens 12 is monitored while rotating the rotary table 96 around the rotary shaft 96a, the angular position of the rotary table 96 at which the output of light of a desired wavelength becomes the strongest. (Value of α) can be determined.

  Further, each time the output wavelength is changed by changing the inclination of the interference filter 60 provided in the wavelength selection / light guiding optical system 50, the rotary table 96 is rotated around the rotation axis 96a to obtain the angular position at which the output becomes maximum. By searching, light of a desired wavelength can always be output with high intensity.

  Further, even if the angular position of the BBO crystal at which the output of the desired wavelength becomes strong changes due to changes in the environmental temperature or the like, the output of the desired wavelength can be made strong simply by rotating the turntable 96.

  In this way, the optical elements from the BBO crystal 30-1 to the incident end 10in of the optical fiber 10 are integrated and placed on the turntable 96, and the whole is rotated to generate powerful light of a desired wavelength. Can be made.

  The angle formed between the optical axis 30-1a and the reference axis 95a may be different from the angle formed between the optical axis 30-2a and the reference axis 95a. The angle formed between the normal line 30-1n and the reference axis 95a may be different from the angle formed between the normal line 30-2n and the reference axis 95a. It is only necessary that the optical axis 30-1a and the optical axis 30-2a are opposite to each other with respect to the reference axis 95a.

  Further, the interference filter 60 may be removed from the wavelength selection / light guiding optical system 50 and the interference filter 60 may be provided at the subsequent stage of the emission end portion 10out of the optical fiber 10.

  The coherent light source according to the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made within the scope described in the claims.

For example, the BBO crystal 30 is used in the coherent light source of the above-described embodiment. Therefore, it was possible to select and output an arbitrary wavelength from wavelengths extending from the ultraviolet region through the visible region to the near infrared region. However, instead of the BBO crystal 30, nonlinear optical crystals such as LBO (LiB ₃ O ₅ ), CLBO (CsLiB ₆ O ₁₀ ), KDP (KH ₂ PO ₄ ), and KD ^* P (KD ₂ PO ₄ ) are used. It may be arranged. As in the case of using the BBO crystal, an arbitrary wavelength can be selected and output from wavelengths extending from the ultraviolet region to the visible region to the near infrared region.

In the case where it is only necessary to select and output an arbitrary wavelength from only the near infrared region, LN (LiNbO ₃ ), KTP (KTiOPO ₄ ), and KN (KNbO ₃ ) are used instead of the BBO crystal 30. ) Etc. may be arranged.

Furthermore, if may output select any wavelength from the mid-infrared region only, instead of the BBO crystal _30, may be arranged nonlinear optical crystal such as AgGaS 2, AgGaSe _2.

Instead of the BBO crystal 30, a periodically polarized crystal such as LN, LT (LiTaO ₃ ), KTP or the like may be used.

  Even when a crystal other than the BBO crystal is used instead of the BBO crystal 30, the angle formed by the propagation direction of the excitation light in the crystal and the optical axis of the crystal is selected to be larger than a predetermined threshold value. Coaxial phase matching can be developed. The threshold value in this case is determined according to the wavelength dispersion characteristic of the refractive index inherent to the crystal and the wavelength of the excitation light. In the case of the fourth and fifth embodiments, two other crystals of the same material may be cascaded instead of the BBO crystals 30-1 and 30-2.

  The wavelength selection / light guiding optical system 50 may have a configuration other than that described above. It is only necessary that one or more light beams having a desired wavelength can be selected and guided to the optical fiber 10. The seed light / excitation light coupling optical system 82 may also have a configuration other than that described above. The seed light is guided to the BBO crystal 30 together with the excitation light, and the signal light (or idler light) having a desired wavelength in the divergence direction of the seed light in the BBO crystal 30 and the idler light (or signal light) paired with the signal light. What is necessary is just to include the divergence angle.

  The excitation light generation unit 2 and the beam shaping unit 4 are not limited to the above-described configuration.

  The beam shaping part 4 and the reflection mirror 6 for excitation light may not be provided.

  The excitation light generator 2 may generate continuous oscillation excitation light instead of generating pulsed excitation light.

  The coherent light source of the present invention can be widely used in printers, image display devices, laser processing machines, medical laser light sources, various detection laser light sources, and the like.

The schematic diagram which shows the coherent light source by the 1st Embodiment of this invention. It is a schematic diagram which shows the structure of the example of the beam shaping part provided in the coherent light source of FIG. 1, Comprising: (a) shows the example in which the beam shaping part is comprised from the lens, (b) is a beam shaping part. Shows an example of a mirror. In the coherent light source of FIG. 1, the explanatory view showing the relationship between the optical axis of the BBO crystal, the polarization direction and the propagation direction of the excitation light, and the polarization direction and the propagation direction of the optical parametric generated light output from the BBO crystal. Explanatory drawing which shows the relationship between excitation light in a non-coaxial phase matching, a pair of signal light, and idler light. The figure which shows the divergence direction of the signal light of several wavelengths and the idler light of several wavelengths in a BBO crystal | crystallization. The graph which shows the transmittance | permeability of the BBO crystal in which AR coating was formed compared with the transmittance | permeability of the BBO crystal in which AR coating was not formed. The graph which shows the spectrum of the parametric generation light output from a BBO crystal. The graph which shows the transmittance | permeability of an excitation light reflective mirror. It is explanatory drawing which shows direction of an excitation light reflective mirror, Comprising: In (a), the optical axis of a BBO crystal and the polarization direction of excitation light are in a plane parallel to a paper surface, In (b), the optical axis and excitation of a BBO crystal The polarization direction of light is in a plane perpendicular to the paper surface. The relationship between the phase matching angle at which coaxial phase matching occurs in the BBO crystal and the wavelength of the parametric generated light generated by the coaxial phase matching, and the threshold of the phase matching angle at which non-coaxial phase matching occurs in the BBO crystal A graph showing the values. The schematic diagram which shows the structure of the 1st modification of a parametric light generation and a wavelength selection part. The front view which looked at the movable slit element provided in the parametric light generation and wavelength selection part shown by FIG. 11 from the condensing lens side. The schematic diagram which shows the structure of the 2nd modification of a parametric light generation and a wavelength selection part. The schematic diagram which shows the principal part of the coherent light source by the 2nd Embodiment of this invention. The block diagram which shows the coherent light source by the 3rd Embodiment of this invention. Explanatory drawing which shows the principal part of the coherent light source of FIG. FIG. 17 is an explanatory diagram showing a relationship between a divergence angle of seed light in a BBO crystal and divergence angles of signal light and idler light in the coherent light source of FIG. 16. (A) is an output spectrum obtained when 650 nm LD light is incident on the BBO crystal as seed light, and (b) is an output spectrum obtained under the same conditions when no seed light is incident. The block diagram which shows the coherent light source by the 4th Embodiment of this invention. (A) is explanatory drawing which shows the relationship between the direction of two BBO crystal | crystallizations, the optical axis of the reflective mirror for excitation light, and the propagation direction of excitation light in the coherent light source of FIG. 19, (b) is arrangement | positioning of (a). It is a figure which shows the propagation direction of the parametric generation light which generate | occur | produces in a BBO crystal in a state, (c) is explanatory drawing which shows the state which the entrance plane and the output surface have shifted | deviated largely from parallel in each BBO crystal. (A) is an output spectrum obtained by two BBO crystals, and (b) is an output spectrum obtained by only one BBO crystal. The schematic diagram which shows the structure of the example of a change of the parametric light generation and wavelength selection part of the coherent light source of 4th Embodiment. The block diagram which shows the coherent light source in the 5th Embodiment of this invention. FIG. 24 is an explanatory diagram showing an inclination of the reference axis of the parametric light generation / wavelength selection unit provided in the coherent light source of FIG. 23 from the optical axis of the excitation light reflecting mirror. FIG. 24 is an explanatory diagram illustrating a state in which a reference axis of a parametric light generation / wavelength selection unit provided in the coherent light source of FIG. 23 is coincident with an optical axis of a reflection mirror for excitation light.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Coherent light source 2 Excitation light generation part 4 Beam shaping part 6 Excitation light reflection mirror 8 Parametric light generation / wavelength selection part 10 Optical fiber 10in Incidence end part 10out Output end part 12 Collimating lens 20 Basic excitation laser 22 Harmonic generation element 24 Wavelength separator 26 Reflection mirror for excitation light 28 Optical stopper 30 BBO (β-BaB ₂ O ₄ ) crystal 30a Optical axis 34 Excitation light reflection mirror 35 Optical stopper 50 Wavelength selection / light guiding optical system 52 Collimator lens 60 Interference filter 60a Axis 54 Condensing lens 108 Parametric light generation / wavelength selection unit 150 Wavelength selection / light guide optical system 62 Movable slit element 64 Optical cut filter 208 Parametric light generation / wavelength selection unit 250 Wavelength selection / light guide optical system 252 Perforated convex lens 254 Hole Aki convex lens 235 Light strike PA 301 Coherent light source 308 Parametric light generation / wavelength selector 10r Optical fiber 10g for red (R) Optical fiber 10b for green (G) Optical fiber 12r for blue (B) Collimating lens 12g for red (R) Green Collimating lens 12b for (G) Collimating lens 350 for blue (B) Wavelength selection / light guiding optical system 68 Phase modulation spatial light modulator 66 Reflecting mirror 401 Coherent light source 80 Light source for generating seed light 82 Seed light / excitation light Coupling optical system 84 Optical fiber 86 Desorption jig 88 Collimator lens 90 Polarizing plate 92 Condensing lens 94 Excitation light transmission / seed light reflection mirror 501 Coherent light source 508 Parametric light generation / wavelength selection unit 30-1 First BBO crystal 30-2 Second BBO crystal 608 Parametric light generation Table 95a the reference axis 96 the turntable 96a rotating shaft 98 handle mounting wavelength selecting unit 99 filters 701 coherent light source 708 optical parametric generation and the wavelength selection unit 95

Claims (4)

Excitation light output means for outputting excitation light;
A plurality of parametric generations that are arranged at a predetermined non-coaxial phase matching position with respect to the excitation light output from the excitation light output means, propagate the incident excitation light, and output different wavelengths according to the incidence of the excitation light. A nonlinear optical crystal that generates light and outputs it in a plurality of different diverging directions around the output direction of the excitation light;
A coherent light source comprising: wavelength selection means for selecting parametric generated light having at least one wavelength from a plurality of parametric generated lights output from the nonlinear optical crystal. 2. The coherent light source according to claim 1, further comprising an optical fiber for guiding at least a parametric generation light selected by the wavelength selection means from the plurality of parametric generation lights to a desired position. Seed light incident means for injecting seed light of one wavelength to the nonlinear optical crystal and amplifying parametric generated light having the same wavelength as the one wavelength and parametric generated light having a wavelength corresponding to the one wavelength Further comprising
2. The coherent light source according to claim 1, wherein the wavelength selecting unit selects parametric generated light having at least one wavelength from the amplified parametric generated light. The nonlinear optical crystal is
A plurality of parametric generations that are arranged at a predetermined non-coaxial phase matching position with respect to the pumping light output from the pumping light output means, propagate the incident pumping light, and have different wavelengths according to the incident pumping light. A first nonlinear optical crystal that generates light and outputs the light in a plurality of different diverging directions around the output direction of the excitation light;
The pump disposed at the subsequent stage of the first nonlinear optical crystal, disposed at a predetermined non-coaxial phase matching position with respect to the pumping light output from the first nonlinear optical crystal, and output from the first nonlinear optical crystal The pumping light is propagated and output according to the incidence of light and a plurality of parametric generation lights, and a plurality of parametric generation lights having different wavelengths are generated and output in a plurality of different diverging directions around the output direction of the excitation light. A second nonlinear optical crystal,
2. The parametric generation light having at least one wavelength is selected from the plurality of parametric generation lights output from the first and second nonlinear optical crystals. Coherent light source.

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