JP2005202933A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005202933A5 JP2005202933A5 JP2004344135A JP2004344135A JP2005202933A5 JP 2005202933 A5 JP2005202933 A5 JP 2005202933A5 JP 2004344135 A JP2004344135 A JP 2004344135A JP 2004344135 A JP2004344135 A JP 2004344135A JP 2005202933 A5 JP2005202933 A5 JP 2005202933A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52571003P | 2003-11-29 | 2003-11-29 | |
| US60/525,710 | 2003-11-29 | ||
| US10/888,526 | 2004-07-10 | ||
| US10/888,526 US7282889B2 (en) | 2001-04-19 | 2004-07-10 | Maintenance unit for a sensor apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005202933A JP2005202933A (en) | 2005-07-28 |
| JP2005202933A5 true JP2005202933A5 (en) | 2011-08-11 |
| JP4874540B2 JP4874540B2 (en) | 2012-02-15 |
Family
ID=34830427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004344135A Expired - Fee Related JP4874540B2 (en) | 2003-11-29 | 2004-11-29 | Method and apparatus for controlling a sensor device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4874540B2 (en) |
| TW (1) | TWI268429B (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7839124B2 (en) * | 2006-09-29 | 2010-11-23 | Semiconductor Energy Laboratory Co., Ltd. | Wireless power storage device comprising battery, semiconductor device including battery, and method for operating the wireless power storage device |
| US8853995B2 (en) | 2009-06-12 | 2014-10-07 | Qualcomm Incorporated | Devices for conveying wireless power and methods of operation thereof |
| US8547057B2 (en) * | 2009-11-17 | 2013-10-01 | Qualcomm Incorporated | Systems and methods for selective wireless power transfer |
| KR101356623B1 (en) * | 2011-11-10 | 2014-02-03 | 주식회사 스파콘 | Power transmission coil and wireless power transmission apparatus |
| JP6083652B2 (en) * | 2012-05-28 | 2017-02-22 | パナソニックＩｐマネジメント株式会社 | Contactless connector system |
| US9356822B2 (en) * | 2012-10-30 | 2016-05-31 | Kla-Tencor Corporation | Automated interface apparatus and method for use in semiconductor wafer handling systems |
| JP5954788B2 (en) * | 2012-12-28 | 2016-07-20 | セイコーインスツル株式会社 | Electronic component, power receiving device, and power feeding system |
| JP2014029860A (en) * | 2013-08-27 | 2014-02-13 | Advantest Corp | Power supply device and measuring device |
| JP6855774B2 (en) | 2016-12-13 | 2021-04-07 | Tdk株式会社 | Wafer transfer container atmosphere measuring device, wafer transfer container, wafer transfer container internal cleaning device, and wafer transfer container internal cleaning method |
| JP7467152B2 (en) | 2020-02-13 | 2024-04-15 | 東京エレクトロン株式会社 | Storage container and method for charging substrate-like sensor |
| KR102584512B1 (en) | 2020-12-31 | 2023-10-05 | 세메스 주식회사 | Buffer unit and method for storaging substrate type senseor for measuring of horizontal of a substrate support member provided on the atmosphere in which temperature changes are accompanied by |
| KR102594075B1 (en) * | 2021-05-31 | 2023-10-24 | 세메스 주식회사 | Container and system for processing substreate |
| KR102650610B1 (en) | 2021-05-31 | 2024-03-26 | 세메스 주식회사 | Apparatus and system for processing substreate |
| TW202314938A (en) | 2021-08-04 | 2023-04-01 | 日商東京威力科創股份有限公司 | Accommodation container and charging method for substrate-shaped sensor |
| WO2023089795A1 (en) * | 2021-11-22 | 2023-05-25 | 三菱電機株式会社 | Power transmission device, wireless power transmission system, and voltage control device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5466614A (en) * | 1993-09-20 | 1995-11-14 | At&T Global Information Solutions Company | Structure and method for remotely measuring process data |
| JPH10142068A (en) * | 1996-11-14 | 1998-05-29 | Sony Corp | Temperature-measuring apparatus and method for measuring temperature using the apparatus |
| US6691068B1 (en) * | 2000-08-22 | 2004-02-10 | Onwafer Technologies, Inc. | Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control |
| US7289230B2 (en) * | 2002-02-06 | 2007-10-30 | Cyberoptics Semiconductors, Inc. | Wireless substrate-like sensor |
-
2004
- 2004-11-25 TW TW093136293A patent/TWI268429B/en active
- 2004-11-29 JP JP2004344135A patent/JP4874540B2/en not_active Expired - Fee Related