JP2005202268A - Camera setting method for imaging apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately adjust a camera position, regarding an imaging apparatus with an object being irradiated with light and imaging the light reflected by the object or the light transmitted through the object by a camera constituted of a plurality of photodetectors. <P>SOLUTION: Regarding a camera position adjusting method for the imaging apparatus with the object being irradiated with light and imaging the light reflected by the object or the light transmitted through the object by the camera constituted of the plurality of photodetectors, the height of a calibration surface from a prescribed datum level in a direction vertical to the prescribed datum level is different in at least two or more imaging positions corresponding to the photodetectors in the visual field width direction of the camera; in the case of imaging the calibrator surface by the camera, the calibrator picking up images having different luminance distribution in a direction in the datum level and in a direction vertical to the visual field width direction, is arranged; and the camera position of the camera is adjusted according to the luminance distribution of the image obtained by imaging the calibration surface by the camera. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a method for adjusting the camera position of an image pickup apparatus that irradiates light on an object and picks up reflected light or transmitted light from the object with a camera composed of a plurality of light receiving elements, and for camera position setting used therefor The present invention relates to a calibrator, an object inspection method and an imaging system using these, and an object manufacturing method.

  There is an inspection apparatus as shown in FIG. 4 as an apparatus using an imaging apparatus that irradiates light on an object and captures reflected light or transmitted light from the object with a camera including a plurality of light receiving elements. In an inspection in which a film or a steel plate is the object to be inspected 1, the light to be inspected 1 is irradiated with light from the transmitted illumination means 6 or the reflected illumination means 7, and the reflected light or transmitted light from the object 1 is inspected by the lens 3. There has been proposed an inspection apparatus that optically detects defects existing in an object to be inspected by condensing, capturing an image with the camera 2 and converting it into an electrical signal, and analyzing the electrical signal with a data processing device 4.

  In such an inspection apparatus, it is necessary to check whether the camera position is optimal when the apparatus is installed or when the camera is replaced. Here, the camera position refers to an angle 41 (hereinafter referred to as an imaging angle) between a direction perpendicular to the inspection surface (z-axis direction) and the imaging direction of the camera shown in FIG. A position 42 (hereinafter referred to as an imaging position) in a direction (y-axis direction) perpendicular to the inspection object width direction (x-axis direction), an angle 43 (hereinafter referred to as a camera rotation angle) formed by the inspection object width direction and the camera visual field width direction, A distance 44 between the object to be inspected and the camera in the z-axis direction (hereinafter referred to as a camera distance), and although not shown, indicates a position in the x-axis direction, a rotation angle around the y-axis, and the like.

  Many inspection apparatuses are provided with a camera position adjusting means 30 as shown in FIG. 4, and the camera position is adjusted by operating the adjusting mechanisms 30 a to 30 f of the camera position adjusting means 30. For example, in the example of FIG. 4, 30a is an imaging angle, 30b is a rotation angle around the y-axis, 30c is a camera rotation angle, 30d is an imaging position, 30e is an x-axis direction position, and 30f is a camera distance. it can.

  If the camera position is not optimum, problems such as a decrease in inspection accuracy and a non-uniform inspection accuracy for the entire field of view occur. Therefore, optimization of the camera position is very important in the inspection apparatus.

  As a conventional technique for adjusting the camera position, there is a technique disclosed in Patent Document 1.

  In this technique, as shown in FIG. 15, a reference plate having a pattern in which triangles are alternately drawn around a reference line having a length longer than the camera field of view is set at an imaging position, and the reference plate is imaged. This is a technique for adjusting the camera position based on the imaging waveform distribution obtained in this way. When the shading pattern 10c drawn on the reference plate 10b shown in FIG. 15 is imaged by the camera 2, the imaging signal intensity obtained by imaging the black part of the pattern is low, and the imaging signal intensity obtained by imaging the white part is high. Become. Here, when a pattern is imaged by a line sensor camera as shown in FIG. 16A, an imaging waveform as shown in FIG. 16B is obtained. This distribution varies depending on the visual field position of the camera that captures the pattern. The camera position is adjusted so that this distribution has a predetermined pattern.

  Conventionally, many inspection apparatuses of this type use fluorescent lamps for the transmission illumination means 6 and the reflection illumination means 7. The light emitted from the fluorescent lamp is diffused light, and it irradiates a certain wide area uniformly. Therefore, even if the camera position slightly deviates from the optimum position, the inspection performance is hardly affected.

  However, recently, the size of defects to be detected has become very small, and there are many cases that cannot be detected by a conventional inspection using a fluorescent lamp. For example, in order to detect a minute flaw present on a plastic film, it is necessary to use a technique such as irradiating a test object with light having high directivity and imaging light slightly scattered by the flaw with the camera 2. In this case, it is necessary to use light having high directivity, for example, a linear arrangement of optical fibers as the lighting device. Furthermore, in order to improve the inspection accuracy, it is necessary to capture only light scattered by a scratch without receiving light slightly scattered in the normal part. In this case, the position of the camera 2, the transmitted illumination means 5 and reflection It is necessary to set the relative positional relationship between the illumination means 6 and the camera 2 in detail. In particular, since light scattered by scratches has a property of traveling in a certain specific direction, in order to efficiently capture the scattered light, the camera imaging angle 41 and imaging position 42 in FIG. 13 greatly affect the detection performance.

However, the conventional camera position adjustment method described in Patent Document 1 cannot adjust the imaging angle 41 and the imaging position 42 with high accuracy. This is because, as shown in FIG. 17, there are innumerable combinations of the imaging angle 41 and the imaging position 42 at which the same imaging waveform can be obtained when the gray pattern 10c is imaged, that is, the camera positions for imaging the same position of the pattern. is there.
JP 2001-174414 A

An object of the present invention is to provide a method for accurately adjusting a camera position in an imaging apparatus that irradiates light on an object and captures reflected light or transmitted light from the object with a camera including a plurality of light receiving elements. There is.

  According to the present invention for achieving the above object, there is provided a method for adjusting a camera position of an imaging apparatus that irradiates an object with light and captures reflected light or transmitted light from the object with a camera including a plurality of light receiving elements. The camera position of the camera is roughly adjusted, and the height of the calibration surface from the reference plane in a direction perpendicular to a predetermined reference plane is set at a position where the camera can be imaged from the coarsely adjusted camera. The direction is different in at least two imaging positions corresponding to the light receiving elements, and is a direction in the reference plane and orthogonal to the viewing width direction when imaging the calibration surface with the camera In addition, a calibrator capable of capturing images with different luminance distributions is arranged, and the brightness of the image obtained by imaging the calibration surface with the camera is displayed. It is characterized in that to adjust the camera position of the camera based on the distribution.

  In addition, it is also preferable to use a calibrator that has a mirror surface on the calibration surface and further includes pattern projection means for projecting a light and shade pattern on the calibration surface.

  Further, as the calibrator, it is also preferable that the calibration surface has a curvature in a direction perpendicular to the visual field width direction in a reference plane, and at least a part of the calibration surface is a cylindrical convex surface. Alternatively, it is preferable to use a concave surface.

  Furthermore, as the calibrator, it is preferable to use a calibrator in which the luminance distribution of the image when the calibration surface is imaged continuously changes depending on the position in the direction orthogonal to the visual field width direction.

  Further, a camera position setting calibrator for achieving the above object has a calibration surface having a predetermined width and at least two different heights from the reference plane in the width direction. When a calibration surface is imaged, an image in which luminance, light reflectance, or light transmittance changes in a direction within the reference plane and perpendicular to the width direction is captured on the calibration surface. It is comprised so that it may be comprised.

  Moreover, it is also a preferable aspect that the calibration surface has a mirror surface and includes pattern projection means for projecting a light and shade pattern onto the calibration surface.

  Furthermore, it is also a preferred aspect that the calibration surface shape is in a reference plane and has a curvature in a direction perpendicular to the width direction, and at least a part of the calibration surface is a cylindrical convex surface or concave surface. Preferably there is.

  Furthermore, it is preferable that the shading pattern is continuously changed depending on a position in a direction orthogonal to the width direction.

  A feature of the present invention is also a method of imaging an object with a camera whose camera position is set by the camera setting method of the present invention and inspecting the object based on the captured result.

  Furthermore, it is a feature of the present invention that the quality of an object is managed by the defect inspection method for an object of the present invention.

  An object inspection system according to the present invention includes an illuminating unit that irradiates light on an object, a camera that captures the object certified by the illuminating unit, and any one of the camera position setting calibrators. An imaging system for an object.

According to the present invention, as described below, the camera position can be adjusted with high accuracy.

Hereinafter, an example in which the example of the best embodiment of the present invention is applied to a defect inspection apparatus will be described with reference to the drawings.
[Embodiment 1] The basic configuration of the defect inspection apparatus of this embodiment is as shown in FIG. Here, the inspection object 1 is a light transmissive plastic film.

  A plastic film is usually produced by stretching a molten polymer extruded in a sheet form from a die in a longitudinal direction and a transverse direction. In this manufacturing process, the plastic film travels on a large number of rolls. Therefore, if foreign matter or the like is present on the roll surface, the plastic film is scratched. Here, it is assumed that scratches generated on the surface of the plastic film are inspected.

  Only the transmissive illumination means 6 is used as the illumination means. The transmitted illumination means 6 may be a light guide in which fluorescent lamps or optical fibers are arranged in a line, rod illumination that irradiates light from the end face of the quartz rod, and irradiates light from the side face of the quartz rod. When inspecting a finer defect, it is preferable to use a light guide or rod illumination. Furthermore, it is also a preferable form to arrange a slit between the light irradiation part of the transmitted illumination means 6 and the device under test 1. In this case, since the directivity of the light irradiated to the to-be-inspected object 1 becomes still higher, a fine defect can be detected. In this embodiment, rod illumination is used. The camera 2 can be a line sensor camera in which two or more light receiving elements are arranged in a line or an area sensor camera in which the light receiving elements are two-dimensionally arranged. When inspecting a traveling product (inspected object) such as a film, it is preferable to use a line sensor camera from the viewpoint of data processing. Here, a line sensor camera is used, and the camera 2 is arranged so that the light receiving elements are arranged in the width direction of the device under test 1 (X direction in the figure). The camera 2 is connected to the data processing means 4, and the light received by the camera 2 through the lens 3 is converted into an electrical signal corresponding to the received light intensity and transmitted to the data processing means 4. The data processing means 4 analyzes the electrical signal and extracts defects existing in the device under test 1. The data processing means 4 can display on the monitor 5 the inspection result and the imaging waveform captured by the camera 2.

  The camera 2 is mounted on the camera position adjusting means 30, and the camera position can be adjusted by adjusting each adjusting means 30 a to 30 f of the camera position adjusting means 30. The degree of freedom of the camera position adjusting means can be determined according to the type of inspection and the required accuracy. Here, the camera position adjusting means 30 is provided with a mechanism capable of adjusting at least the imaging angle 41, the imaging position 42, and the camera rotation angle 43 shown in FIG.

  A method for adjusting the camera position in the inspection apparatus described above will be described in detail with reference to FIG.

  First, the calibrator 10 is installed at a predetermined position. Since the installation accuracy of the calibrator 10 affects the camera position adjustment accuracy, a base having an accurate position from the reference position of the inspection apparatus is provided, a groove or a hole is machined in the base, and the calibrator 10 can be installed there. It is preferable to use a method such as

  The calibrator 10 is composed of two flat plates 10b having different heights from the inspection surface (reference surface), and the length of the calibrator 10 in the x-axis direction is preferably equal to or larger than the camera viewing width.

  On the two flat plates 10b of the calibrator 10, a shading pattern 10c is processed. The shading pattern 10c may be processed by masking with a light-shielding material on a light-transmitting flat plate, or a pattern may be drawn with a black material on a white flat plate. In the former case, an illuminator is provided inside the calibrator 10 so that an imaging waveform having a high contrast can be obtained when the shading pattern is imaged by the camera 2. In the latter case, another illumination unit may be provided above the calibrator 10 to irradiate the calibrator 10 and the reflected light may be captured by the camera 2.

  As described above, after the calibrator 10 is accurately installed at the imaging position of the camera 2, the position of the camera 2 is roughly adjusted using the camera position adjusting means 30 so that the camera 2 images the surface of the calibrator 10. During the coarse adjustment, it is preferable to adjust the camera distance so that one light receiving element of the camera 2 captures the inspected object 1, that is, the spatial resolution of the camera 2 has a predetermined value.

  A method for finely adjusting the camera position after performing the rough adjustment so that the grayscale pattern 10c falls within the camera field of view will be described below.

  When the light and shade pattern 10c of the calibrator 10 having a triangular light and shade pattern 10c as shown in FIG. 6 processed on the surface is imaged by the camera 2 set at the camera position shown in FIG. When the position is lower, since the position 11a of the light and shade pattern 10c is imaged as shown in FIG. 6A, the black image portion of the light and dark pattern 10c is imaged as shown in FIG. 6A and FIG. Has a low imaging signal intensity, and an imaging waveform composed of a plurality of rectangles having a high imaging signal is obtained in a portion where a white portion is imaged. On the other hand, when the position from the inspection surface of the calibrator 10 is higher, the position 11b of the shading pattern 10c is imaged as shown in FIG. 6A, and as shown in FIG. An imaging waveform having a rectangular width smaller than that of 6 (a) (i) is obtained.

  Here, consider a case where the camera position is changed as shown in FIG. In this case, as shown in FIG. 6B, the positions 11a and 11b of the shading pattern 10c are imaged as shown in FIG. 6B for the lower side and the higher side from the inspection surface of the camera 2 calibrator 10. The imaging waveforms shown in (i) and (ii) of FIG. 6B are obtained. As shown in FIGS. 6A and 6B, since the same position is imaged when the position from the inspection surface of the calibrator 10 is higher, an imaging waveform is obtained as shown in FIGS. 6A and 6B. (Ii) has the same shape, but the lower one images a different position, so the imaging waveform (i) has a different shape.

  As described above, since the imaging waveforms (i) and (ii) are uniquely determined for a certain camera position, the camera imaging angle 41 and the imaging position 42 of the camera position shown in FIG. 13 can be adjusted with high accuracy. . Further, the camera rotation angle 43 can also be adjusted by operating the camera position adjusting means 30c or the like so that the rectangular width of the imaging waveform is the same for the entire visual field.

  Here, the triangular pattern shown in FIG. 9A is used as the shading pattern 10c. However, depending on the imaging position (vertical direction on the paper surface), the black pattern in the shading pattern width direction as shown in FIG. A pattern in which the number changes or a pattern in which the density of the shading pattern 10c changes as shown in FIG. 9C may be used. 9A to 9C, when 50a, 50b, and 50c are imaged by the camera 2, the obtained imaging waveforms are as shown by 51a, 51b, and 51c in FIGS. 10A to 10C, respectively. Depending on the camera position, the rectangular width of the imaging waveform changes in FIG. 10A, the number of imaging waveform rectangles changes in FIG. 10B, and the rectangular amplitude changes depending on the imaging waveform in FIG. 10C. When the camera position is finely adjusted, it is preferable that the imaging waveform changes continuously with respect to the change of the camera position, and therefore it is preferable to use (a) or (c) of FIG. In addition, as for FIG. 9A, it is sufficient that the rectangular width of the imaging waveform differs depending on the imaging location, such as a trapezoid or a rhombus in addition to the triangle.

  Here, although two flat plates are used as the calibrator 10, the surface height of the calibrator 10 only needs to be different at the imaging positions corresponding to at least two light receiving elements in the visual field width direction of the camera 2. As the surface shape of FIG. 10, a surface height profile in the width direction of the calibrator 10 as shown in FIG. 14A is composed of a plurality of arcs, or a shape composed of a plurality of triangles as shown in FIG. May be.

  In the above description, it has been described that the imaging waveform obtained by imaging the shading pattern 10c at a certain camera position is uniquely determined. Next, a method for determining whether the camera position is the optimum position based on the imaging waveform obtained at the time of camera position adjustment will be described.

  The data processing means 4 records an imaging waveform when the camera is set to an optimal position. As a recording method, it is preferable to store the signal intensity corresponding to each light receiving element of the camera 2 in the imaging waveform as digital data.

  The signal intensity data value corresponding to each light receiving element of the imaging waveform obtained when the camera 2 is at a certain position, and the signal intensity data corresponding to each light receiving element at the optimum camera position stored in the data processing means 4 With respect to the values, the camera position is adjusted using the camera position adjusting means 30 so that the square error of the data value at the same pixel position is not more than a predetermined value. As the data value used for error calculation, data of all pixels may be used, or data thinned out every several pixels may be used.

  Further, a plurality of edge positions existing in both imaging waveforms may be obtained, and the camera position may be adjusted so that the error of the edge position is minimized.

  In the above description, the method of adjusting the camera position by detecting the edge position has been described. However, since the surface height of the calibrator 10 is different, the distance from the camera 2 to the light and shade pattern 10c is not constant over the entire camera field of view. Therefore, when a lens with a shallow depth of field is used, it may be difficult to focus on the entire field of view. In this case, it becomes difficult to detect the edge position from the imaging waveform. In such a case, as shown in FIG. 11, a calibrator depicting a light and shade pattern in which the interval between black portions in the light and shade pattern width direction continuously changes depending on the imaging position (the vertical direction on the paper surface) can be used. FIG. 11 shows an example in which a plurality of two sides of a triangle are drawn with colored lines. In this case, as shown in FIG. 12, a plurality of peaks appear in the imaging waveform corresponding to the position where the black portion of the gray pattern is imaged. The edge position can be detected by obtaining the peak of the imaging waveform.

  Moreover, when adjusting each adjustment mechanism 30a-30f of the camera position adjustment means 30, you may adjust manually based on the said error calculated by the data processing means 4, or each adjustment mechanism 30a-30f is an automatic stage. In this way, it is possible to connect to the data processing means 4 and automatically adjust based on the error calculated by the data processing means 4.

  Although the above embodiment has been described with respect to a single camera, when the inspection apparatus includes a plurality of cameras 2, the position of each camera may be adjusted to an optimum position.

In this embodiment, the camera distance is set in advance by coarse adjustment. However, the z-axis direction moving means is set so that the rectangular width of the imaging waveform obtained by imaging the shading pattern 10c at the fine adjustment stage becomes a predetermined value. 30f may be operated.
[Embodiment 2]
Here, another embodiment in which the camera position is adjusted using the present invention will be described.

  As shown in FIG. 3, the calibrator 10 includes a reflecting plate 10a, a pattern plate 10b, and a shading pattern 10c. The pattern plate 10b may be a transparent plate or an opaque plate. In the case of a transparent plate, a method of irradiating light from the back side of the pattern plate 10b and projecting the shading pattern 10c on the reflection plate 10a can be used. In the case of an opaque plate, a method of irradiating light from the front surface of the pattern plate 10b can be used. In any case, it is preferable to adjust the position of the pattern plate 10b so that the shading pattern 10c projected on the reflecting plate 10a can be imaged by the camera 2.

  The surface 10a is a mirror surface, and the light and shade pattern 10c reflected by the mirror surface is imaged by the camera 2, and the camera position is adjusted by the same method as in the first embodiment based on the obtained imaging waveform.

In the present embodiment, there is an advantage that the shading pattern 10c can be easily exchanged according to the application.
[Embodiment 3]
Here, still another embodiment in which the camera position is adjusted using the present invention will be described.

  As shown in FIG. 1, as the surface shape of the reflector 10a of the calibrator 10, a surface having a curvature in the direction in the inspection plane and perpendicular to the visual field width direction is used. Here, a cylindrical convex mirror is used as a specific example.

  The effect of using a curvature in the direction perpendicular to the viewing width direction will be described with reference to FIGS.

  FIG. 7 shows a case where the reflecting plate 10a is a flat mirror surface, and FIG. 8 shows a case where a reflecting plate having a curvature in a direction perpendicular to the viewing width direction is used. In the case of FIG. 7, even if the camera position changes from (a) to (b), the change in the position where the gray pattern 10c is imaged is small. On the other hand, in the case of FIG. 8, when the camera position changes from (a) to (b), the reflection angle at the reflecting plate 10a changes greatly, so that the position where the gray pattern 10c is imaged changes greatly. Therefore, even when the position slightly changes from the optimal camera position, it is possible to accurately detect the deviation of the camera position.

  When a convex mirror is used, it is more preferable that the camera 2 captures the end of the convex mirror, that is, the portion closest to the lowest portion, because the reflection angle changes greatly with a slight change in the camera position.

  In this embodiment, a cylindrical convex mirror is used, but the same effect can be obtained with a concave mirror. In addition, since the object of the present invention can be achieved if the height of the calibration surface from the reference plane differs at the imaging positions corresponding to at least two light receiving elements in the viewing width direction of the camera, a spherical convex mirror, etc. The surface shape may have a curvature also in the viewing width direction. In addition, one cylindrical convex mirror or concave mirror may be arranged to be inclined in the x-axis direction or the z-axis direction.

  However, when there is a curvature in the viewing width direction, if the installation position of the calibrator 10 is slightly shifted in the viewing width direction, the imaging waveform changes and it may be difficult to accurately adjust the camera position. Cost. On the other hand, normally, when there is no curvature in the viewing width direction, the installation accuracy in the viewing width direction does not affect the camera position adjustment accuracy.

  In the above embodiment, a line sensor camera is used as the camera 2. However, the present invention can be used even when an area sensor camera in which light receiving elements are two-dimensionally arranged is used. In this case, it is preferable to adjust the camera position based on the two-dimensional imaging waveform.

The present invention can be applied not only to an imaging apparatus but also to an inspection apparatus or a recording apparatus in a manufacturing process of a wide variety of objects such as a web, but the application range is not limited thereto.

It is a figure for demonstrating the camera position adjustment method which concerns on 3rd Example of this invention. It is a figure for demonstrating the camera position adjustment method which concerns on 1st Example of this invention. It is a figure for demonstrating the camera position adjustment method which concerns on 2nd Example of this invention. It is a figure which shows the positional relationship of the light projection / reception part of an inspection apparatus. It is a figure for demonstrating the relationship between a camera position and a shading pattern imaging position. It is a figure for demonstrating the relationship between the position which images a grayscale pattern, and the imaging waveform obtained with a camera. It is a figure for demonstrating the relationship between a camera position and a shading pattern imaging position in a 2nd Example. It is a figure for demonstrating the relationship between a camera position and a shading pattern imaging position in a 3rd Example. It is a figure for demonstrating a shading pattern. It is a figure for demonstrating the imaging waveform obtained by imaging each light / dark pattern of FIG. It is a figure for demonstrating another shading pattern. It is a figure for demonstrating the imaging waveform obtained by imaging each light / dark pattern of FIG. It is a figure for demonstrating a camera position. It is a figure for demonstrating the surface shape of a calibrator. It is a figure which shows the shading pattern drawn on the reference | standard board used for the conventional camera position adjustment method. It is a figure for demonstrating the relationship between the position which images a grayscale pattern, and the imaging waveform obtained with a camera. It is a figure for demonstrating the relationship between a camera position and a shading pattern imaging position in the conventional camera position adjustment method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Test object 2 Camera 3 Lens 4 Transmission illumination means 5 Reflection illumination means 6 Data processing means 7 Monitor 10 Calibrator 10a Reflection board 10b Pattern board 10c Shading pattern 30 Camera position adjustment means 30a X axis rotation means 30b Y axis rotation means 30c Z-axis rotation means 30d x-axis direction movement means 30e y-axis direction movement means 30f z-axis direction movement means 41 Imaging angle 42 Imaging position 43 Camera rotation angle 44 Camera distance

Claims (13)

A method of adjusting a camera position of an imaging apparatus that irradiates light on an object and images reflected light or transmitted light from the object with a camera including a plurality of light receiving elements, and roughly adjusts the camera position of the camera, The height of the calibration surface from the reference plane in a direction perpendicular to a predetermined reference plane corresponds to at least two light receiving elements in the viewing width direction of the camera at a position that can be imaged from the coarsely adjusted camera. When imaging the calibration surface with the camera, it is possible to capture images with different luminance distributions in the direction within the reference plane and in the direction orthogonal to the viewing width direction. A camera position of the camera is arranged based on a luminance distribution of an image obtained by arranging a calibrator and imaging the calibration surface with the camera. Camera settings wherein the adjusting the emission. 2. The camera setting according to claim 1, wherein the calibrator is one in which the calibration surface has a mirror surface and further includes pattern projection means for projecting a grayscale pattern onto the calibration surface. 3. Method. 3. The camera setting method according to claim 1, wherein the calibrator uses a calibration surface having a curvature in a direction perpendicular to the visual field width direction in a reference plane. 4. The camera setting method according to claim 3, wherein at least a part of the calibration surface is a cylindrical convex surface or concave surface as the calibrator. The calibrator is one in which a luminance distribution of the image when the calibration surface is imaged continuously changes depending on a position in a direction orthogonal to a visual field width direction. The camera setting method according to any one of the above. A calibration surface having a predetermined width and a height different from the reference plane by at least two places in the width direction, and when the calibration surface is imaged from at least the predetermined direction, A camera position setting calibrator characterized in that an image in which luminance, light reflectance, or light transmittance changes in a direction within a reference plane and orthogonal to the width direction is captured. . The camera position setting calibrator according to claim 6, wherein the calibration surface has a mirror surface, and includes a pattern projecting unit that projects a shading pattern onto the calibration surface. The calibrator for camera position setting according to claim 6 or 7, wherein the calibration surface shape has a curvature in a direction that is in a reference plane and orthogonal to the width direction. 9. The camera position setting calibrator according to claim 6, wherein at least a part of the calibration surface is a cylindrical convex surface or concave surface. 10. The camera position setting calibrator according to claim 6, wherein the shading pattern continuously changes depending on a position in a direction orthogonal to the width direction. 11. An object inspection method in which an object is imaged by a camera whose camera position is set by the camera setting method according to claim 1, and the object is inspected based on the imaged result. 12. A method for manufacturing an object, comprising managing the quality of the object by the object inspection method according to claim 11. Imaging of an object comprising: illumination means for irradiating light on an object; a camera for imaging the object certified by the illumination means; and a camera position setting calibrator according to any one of claims 6 to 10. system.

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