JP2005201785A - Entrained air bubble detecting method, detecting apparatus and duplicating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an entrained air bubble detecting method and an detecting apparatus for accurately detecting the existence of the air bubbles, even if the air bubbles entrained into a photo-curing resin layer are minute or their existing location overlap with unevenness of an original plate, and a duplicating method of a photocuring resin duplicate plate implemented after the existence of the air bubbles is previously confirmed and detected by the entrained air bubble detecting method. <P>SOLUTION: When the photocuring resin duplicate plate is duplicated by curing the photocuring resin layer by irradiating the photocuring resin layer with a photocuring beam from a transparent substrate, while an uneven face of the duplicated original plate provided with the minute unevenness on one surface closely contacts a surface of the photocuring resin layer on the transparent substrate, a detection beam is scanned and irradiated to a periphery of the photocuring resin layer before photocuring from the transparent substrate, a reflection light is reflected by an interface between the photocuring resin layer and the air bubbles existing in the photocuring resin layer, returns to the outside of the transparent substrate and is sequentially recorded, and the presence of the air bubbles is detected, based on the recorded information. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  In the present invention, an uncured photocurable resin layer is provided on the surface of a flat transparent substrate, and then a flat copy master having a fine uneven portion provided on one surface is provided with the fine uneven portion. With the surface in close contact with the surface of the photocurable resin layer, the photocurable resin layer is cured by sequentially irradiating the photocurable resin layer from the transparent substrate side while scanning the photocurable beam having a wavelength at which the photocurable resin layer is cured. Incorporated bubble detection method for detecting in advance the presence of bubbles in the uncured photocurable resin layer, which is performed when replicating a photocurable resin replication plate having a fine uneven shape on the surface, The present invention also relates to a detection device used for the detection, and a photocuring resin duplication copy method that is performed after the detection of bubble mixing by the mixed bubble detection method.

  Conventionally, when replicating a resin replication plate having a fine concavo-convex shape such as a diffraction grating pattern on the surface, for example, a copy formed by attaching a plurality of replica original plates having a fine concavo-convex shape related to the diffraction grating on the surface Many methods have been adopted in which an uneven shape is transferred and molded onto the surface of a resin plate using an original (stamper).

  On the other hand, as a method for producing a replication original plate of a display having a diffraction grating pattern by two-beam interference, for example, an interference fringe by two-beam interference is changed on a substrate made of a photosensitive material by changing the pitch, direction, light intensity, and the like. A method of exposing the surface one after another has been proposed (see, for example, Patent Document 1).

  However, since such a replica master manufacturing method requires a lot of time and steps, the efficiency is extremely poor when a replica master having a large area is manufactured.

  On the other hand, as a method for producing a large-area replica having a fine concavo-convex shape on its surface, the concavo-convex shape of the replica original plate is cured by irradiating light in a state where the photocurable resin is closely attached to the replica original plate. There is also a method of transferring / molding to the surface of the photocurable resin (for example, see Patent Document 2).

  However, in such a method, when the photocurable resin layer and the replication original plate are brought into close contact with each other, bubbles may be mixed into the interface between the photocurable resin layer and the replication original plate. There is a need to. For example, as a method for detecting mixed air bubbles, air bubbles mixed in by taking a picture of a camera while irradiating with illumination light having a wavelength that does not sensitize the photo-curing resin, capturing the captured image information into a computer, and performing image analysis There is a method to detect. However, in this method, when the bubble is very small, the portion does not become so bright when irradiated with illumination light, so that it is difficult to distinguish it from the uneven shape of the replication original, and its presence cannot be clearly detected.

In addition, with this detection method, even when the position of the bubble overlaps the concave and convex shape of the replication original plate, the brightness in the bubble part does not reach the brightness that can be clearly distinguished from other parts. In this case, it is difficult to separate the information obtained from the concave / convex shape of the replica original, and it is difficult to detect the presence of bubbles.
Japanese Patent Publication No.8-12285 Japanese Patent No. 2789597

The present invention solves the problems of the related art, and the problem is that after an uncured photocurable resin layer is provided on the surface of a flat transparent substrate, the fine uneven shape is one. The planar replica original provided on the surface is cured with respect to the photocurable resin layer from the transparent substrate side in a state where the surface provided with the fine irregularities is in close contact with the photocurable resin layer. By irradiating the photocurable resin layer by sequentially irradiating with a wavelength curing beam, the photocurable resin layer is hardened by duplicating the photocurable resin replication plate with fine irregularities on the surface. Bubble detection method and detector, and photo-curing resin layer, which can detect the presence of the bubbles with extremely high precision even if the bubbles are minute or the position of the bubbles overlaps the irregular shape of the original The presence or absence of bubbles in the To provide a method for replicating a photocurable resin duplication plate to be made from the check and detected by incoming air bubble detection method.

  In order to achieve the above object, the invention according to claim 1 is a planar shape in which a fine uneven portion is provided on one surface after an uncured photocurable resin layer is provided on the surface of a planar transparent substrate. A photo-curing beam having a wavelength for curing the photo-curing resin layer from the transparent substrate side in a state where the surface having the fine irregularities of the replica original is closely attached to the photo-curing resin layer surface. Before replicating an uncured photocurable resin layer when replicating a photocurable resin replication plate having fine irregularities on the surface by sequentially irradiating and curing the photocurable resin layer while scanning And scanning and irradiating a detection beam having a wavelength that does not cure the photocurable resin layer from the transparent substrate side to the periphery of the uncured photocurable resin layer, and bubbles existing in the photocurable resin layer Reflects at the interface with the photocurable resin and returns to the outside of the transparent substrate. The reflected light sequentially recorded, a mixed air bubble detection method characterized by detecting the presence of air bubbles on the basis of the recorded information.

  According to a second aspect of the present invention, in the mixed bubble detection method according to the first aspect, the reflected light returning to the outside of the transparent substrate is recorded by the recording means, and then image analysis is performed based on the recorded information. It is characterized by detecting air bubbles.

  Furthermore, in the invention described in claim 3, after providing an uncured photocurable resin layer on the surface of a planar transparent substrate, a planar duplication plate having fine irregularities on one surface is obtained. With the surface with fine irregularities provided in close contact with the photocurable resin layer surface, irradiate the photocurable resin layer from the transparent substrate side while scanning with a curing beam having a wavelength for curing the photocurable resin layer. An apparatus for detecting the inclusion of bubbles in an uncured photocurable resin layer when replicating a photocurable resin replication plate having fine irregularities on the surface by curing the photocurable resin layer Before the uncured photocurable resin layer is cured, the detection beam having a wavelength that does not cure the photocurable resin layer is scanned from the transparent substrate side to the periphery of the uncured photocurable resin layer. Detection beam irradiation means for irradiation while Recording means for sequentially recording reflected light returning from the transparent substrate after being reflected at the interface with the photo-curing resin of the bubbles present in the curable resin layer, and based on the recording information from the recording means, A mixed bubble detection device comprising at least mixed bubble detection means for identifying presence or absence.

  Furthermore, in the invention described in claim 4, after providing an uncured photocurable resin layer on the surface of a planar transparent substrate, a planar duplication original plate having fine irregularities on one surface is obtained. Detection of a wavelength that does not cure the photocurable resin layer from the transparent substrate side to the periphery of the uncured photocurable resin layer in a state where the surface with fine irregularities is in close contact with the photocurable resin layer surface If a bubble is present in the photocurable resin layer that is scanned and irradiated with the beam, and is in close contact with the replication master, it is reflected at the interface between the bubble and the photocurable resin and returns to the outside of the transparent substrate. When it is detected and confirmed that there is no reflected light and bubbles are not mixed in the uncured photo-curing resin, the photo-curing resin layer is scanned with a photo-curing beam that cures it from the transparent substrate side. By irradiating while curing the photo-curing resin layer sequentially, the surface becomes fine A replication method characterized by replicating the photocurable resin duplication plate having an uneven shape.

Furthermore, the invention according to claim 5 is the duplication method according to claim 4, wherein the photocurable resin layer is scanned with a light curing beam having a wavelength for curing the photocurable resin layer, and the wavelength at which the photocurable resin layer is not cured. The detection beam can be switched by the same beam scanning means.

  Since the present invention is configured as described above, it becomes possible to observe brightly so that the bubble portion mixed in the photocurable resin layer emits light, the bubble is minute, or the position of the bubble is uneven. Even if it overlaps with the shape, its presence can be detected with extremely high accuracy. In addition, the scanning of the photocuring beam having a wavelength for curing the photocurable resin layer and the scanning of the detecting beam having a wavelength that does not cure the photocurable resin layer for detecting / confirming the presence / absence of bubbles are the same. Since it can be switched by the beam scanning means, detection of mixed bubbles and replication of photocuring resin duplication plates can be performed quickly and efficiently.

  Hereinafter, the present invention will be described in detail with reference to the drawings.

  FIG. 4 shows a state in which a replica duplication plate made of resin having a fine uneven shape on the surface is duplicated using a flat copy master having a fine uneven shape on one surface related to a diffraction grating or the like. It is explanatory drawing which shows a part of apparatus used at that time.

  As shown in the figure, an elevating head 44 that moves in a vertical direction is disposed on a horizontally installed glass substrate (planar transparent substrate) 41. On the surface facing the glass substrate 41 of the elevating head 44, a planar replica original plate 43 with nickel plating having fine uneven portions provided on the surface is attached with the uneven portion forming side down. .

  On the other hand, the surface of the glass substrate 41 is subjected to non-glare treatment, and the surface is finely roughened by a chemical solution. Moreover, a silane coupling treatment layer is further provided on the silane coupling treatment layer. This silane coupling treatment layer is provided in order to improve the adhesion between the glass substrate 41 and the photocurable resin layer 42 provided thereon, and the silane coupling agent constituting it is an inorganic substance in the molecule. It has two or more different reactive groups, a reactive group that chemically bonds to the material and a reactive group that chemically bonds to the organic material. Therefore, the photocurable resin layer 42 is firmly fixed on the glass substrate 41 that has been surface-treated with the silane coupling agent.

  On the glass substrate 41 subjected to such a treatment, as shown in the drawing, first, a photocurable resin that is cured by an actinic ray such as ultraviolet rays is applied (dropped) to provide a photocurable resin layer 42. It is done. At this time, fine irregularities on the surface of the glass substrate 41 due to the non-glare treatment are filled with the photo-curing resin layer 42 applied to the surface, and an apparently transparent substrate is formed.

  Next, the raising / lowering head 44 to which the replication original plate 43 is bonded is gradually lowered toward the photocurable resin layer 42, and the surface of the replication original plate 43 on which the fine irregularities are provided becomes the photocurable resin layer 42. Close contact (see FIG. 5).

  In FIG. 4, the photocurable resin layer 42 provided on the surface of the glass substrate 41 and the replica original plate 43 made of nickel plating are shown as being separated from each other. However, photocuring of a wavelength for curing the photocurable resin layer 42 is illustrated. When the application beam is irradiated, as shown in FIG. 5, the photocurable resin layer 42 and the replication original plate 43 are arranged in close contact with each other.

After the photocurable resin layer 42 and the replication original plate 43 are set in such a state, the photocuring beam oscillation means 45 then applies a photocuring beam (for example, an ultraviolet laser (He-Cd laser) having a wavelength of 325 nm). ) 45 'is oscillated, and enters the mirror of the X scanner 48 through the mirror 46 and the shutter 47 in order.

  The incident light curing beam is guided to the Y scanner 49 while being scanned by the X scanner 48, where it is further scanned in a direction orthogonal to the scanning direction of the X scanner 48, and from the glass substrate 41 side, the light curable resin layer 42. To reach. In the photocurable resin layer 42, the irradiated portion is photocured, whereby the fine uneven shape of the replica original plate 43 is transferred and shaped, and a photocurable resin replica plate is manufactured.

  At this time, the distance between the replication original plate 43 and the glass substrate 41 arranged in close contact is the thickness of the photocuring resin replication plate to be cured and molded. The distance between the replication master 43 and the glass substrate 41 may be in the range of about 5 μm to 1000 μm, and about 200 μm is optimal.

  When a predetermined portion of the photocurable resin layer 42 is photocured as described above, the elevating head 44 is raised, and the replication original plate 43 that has been adhered is peeled from the photocurable resin layer 42. After that, the glass substrate 41 is moved on the XY stage, and the above-described steps are repeated to transfer and mold the concave / convex shape of the replication master 43 onto the surface of the photocurable resin layer 42. A light curing beam is irradiated on the uncured portion where the uneven shape is not formed at the periphery of the layer 42 to cure the whole.

  As mentioned above, although the outline of the replication method and the manufacturing apparatus of the replication plate made from the photocurable resin conventionally performed was demonstrated, the mixing bubble detection method and detection apparatus which concern on this invention performed in such a conventional replication method, A duplication method that is performed after the detection of bubble contamination will be described below with reference to FIGS.

  FIG. 1 shows a state in which a photo-curing resin duplication plate having a minute uneven shape related to a diffraction grating or the like is replicated on one surface, a method of detecting a mixed bubble performed at that time, and a detection device used in the method. It is explanatory drawing which shows an outline | summary. On the other hand, FIG. 2 and FIG. 3 are explanatory diagrams showing the state when the presence / absence of air bubbles in the photocurable resin layer on the glass substrate is confirmed / detected during duplication of the photocuring resin duplication plate. .

  As shown in FIG. 1, the duplication apparatus is provided with an elevating head 14 that moves in a vertical direction with respect to a glass substrate (planar transparent substrate) 11 that is installed horizontally. On the surface of the elevating head 14 facing the glass substrate 11, a planar duplication plate 13 having nickel plating with a fine uneven portion provided on the surface is attached with the uneven portion forming side facing down. is there.

  On the other hand, the surface of the glass substrate 11 is subjected to non-glare treatment, and the surface is finely roughened by a chemical solution. Moreover, a silane coupling treatment layer 10 is further provided thereon, and a silane coupling treatment layer 10 is provided. As described above, the silane coupling treatment layer 10 is provided to improve the adhesion between the glass substrate 11 and the photocurable resin layer 12 provided thereon, and the silane coupling agent constituting the same. Has two or more different reactive groups in the molecule, a reactive group that chemically bonds to the inorganic material and a reactive group that chemically bonds to the organic material. For this reason, the photocurable resin layer 12 comes to adhere firmly on the glass substrate 11 surface-treated with the silane coupling agent.

  On the glass substrate 11 that has been subjected to such treatment, as shown in the drawing, a photocurable resin that is cured by an actinic ray such as ultraviolet rays is applied (dropped) to provide a photocurable resin layer 12. . Then, the elevating head 14 with the replication original 13 attached to the photocurable resin layer 12 is gradually lowered, and the surface of the replication original 13 on which the fine irregularities are provided is in close contact with the photocurable resin layer 12. (See FIGS. 1 and 2).

  In FIG. 1, the photocurable resin layer 12 provided on the surface of the glass substrate 11 and the replica original plate 13 made of nickel plating are shown as being separated from each other, but photocuring with a wavelength that cures the photocurable resin layer 12. When the application beam is irradiated, as shown in FIG. 2, the photocurable resin layer 12 and the replication original 13 are arranged in close contact and integrated.

  Next, a detection beam (for example, a red laser (He-Ne laser) 15 ′ having a wavelength of 633 nm) that does not cure the photocurable resin layer 12 is oscillated from the detection beam oscillator 15. The light is reflected and incident on the mirror of the X scanner 18 via the shutter 17.

  The X scanner 18 scans the light detection beam 15 ′ incident on the mirror and emits it to the mirror of the Y scanner 19, where it further scans in the direction perpendicular to the scanning direction of the X scanner 18, while the glass substrate 11. The detection beam is irradiated to the photocurable resin layer 12 from the side.

  A detection beam irradiation means comprising a detection beam oscillator 15, a switching mirror 16, a shutter 17, an X scanner 18, a Y scanner 18, etc. is operated, and the detection beam is incident on the inside of the photocurable resin layer 12. Then, since the refractive index is different between the glass substrate 11 and the photocurable resin layer 12, the detection beam is reflected and guided in the photocurable resin layer 12 at the boundary. At that time, if bubbles 24 are present in the photocurable resin layer 12, the refractive index of the photocurable resin constituting the photocurable resin layer 12 is different from the inside of the bubbles 24. The reflected light diffusely reflected on the 12 side is emitted to the outside of the glass substrate 11 and can be recorded by the recording means 21 such as an observation camera. Based on the recorded information, the mixed bubble detection means 29 can perform image processing or the like to detect the mixing of bubbles (see FIG. 2).

  In detection of the mixed bubbles, as shown in FIG. 3, first, a scanning range 25 defined by a square consisting of four vertices A, B, C, and D is set in the inner region of the photocurable resin layer 12, Are sequentially scanned with a detection beam.

  At this time, the detection beam irradiated to the vertex A is guided through the inside of the photocurable resin layer 12 to reach the a portion of the bubble 24. Similarly, the detection beam irradiated to the vertex B is set to b, The detection beam applied to C reaches c, and further the detection beam applied to the apex D reaches d and diffusely reflects on the surface of the bubble.

  Further, when one side (line AB) of the scanning range 25 is scanned with the detection beam, the curve ab is reflected on the surface of the bubble 24 and is observed as the light emitting portion 26.

  Furthermore, when four sides are continuously scanned from the vertex A of the scanning range 25 via the vertex B, vertex C, and vertex D, the light is reflected by the circle passing through the abcd of the bubble 24, and the bubble The portion corresponding to the outer shape of 24 can be observed brightly so that light is emitted.

  The recording means 21, for example, an observation camera, captures and records this emitted portion, converts the recorded information into an image file by a computer, performs preprocessing such as contrast adjustment, binarization processing, noise removal, etc., and shape recognition Process.

  By performing the shape recognition processing as described above with the mixed bubble detection means 29, the circular shape of the bubbles present in the photocurable resin layer can be recognized by a computer, and the bubbles in the photocurable resin layer can be recognized. Contamination will be detected.

  By the way, in the case of an image photographed by a normal illumination method, the photographing information obtained corresponding to the concave / convex shape of the replica original is a shape approximate to the circular photographing information obtained corresponding to the mixed bubbles, as described above. Separation may be difficult in image processing.

  However, in the present invention, the bubble part can be observed brightly as if it was emitted, and the brightness is greatly different from the brightness at the fine irregularities of the reproduction original plate, so separation of the bubble and the image shape of the reproduction original plate is easy. It becomes.

  Furthermore, when it is necessary to more reliably determine the detection of bubble contamination, each vertex ABCD in the square scanning range 25 is not scanned continuously, but from vertex A to vertex C via vertex B. 2 sides are scanned, the shape of a semicircle including points a, b and c of the bubble is recognized. Similarly, the two sides of BCD, CDA and DAB are scanned in turn, and bcd, cda and dab are sequentially scanned. If each of the semicircles is divided and shape recognition is performed, it is possible to more reliably determine the mixing of bubbles based on these recognitions.

  When mixing of air bubbles is confirmed by the image processing, the replication original plate 13 is peeled off from the photocurable resin layer 12 side, and the elevating head 14 to which the replication original plate 13 is attached is lowered again to duplicate the photocurable resin layer 12 and the replica. It is made to adhere again so that bubbles do not exist at the interface with the original plate 13, and the presence or absence of bubbles is confirmed again.

  If the mixed bubbles are detected as described above and it is confirmed that no bubbles are mixed, the light curing beam 22 ′ is oscillated from the light curing beam oscillator 22 and the light curing beam 22 ′ is changed to the above-described light curing beam 22 ′. Similar to the detection beam, the light is sequentially guided from the mirror of the X scanner 18 to the mirror of the Y scanner 19 via the shutter 17, where it is scanned in a direction perpendicular to the scanning direction of the X scanner 18. The photocurable resin layer 12 in which no bubbles are mixed is sequentially irradiated from the substrate 11 side to cure the photocurable resin layer 12 to obtain a photocurable resin-made replica.

It is explanatory drawing which shows the outline | summary of the mixing bubble detection method and detection method which concern on this invention, and the replication method. It is sectional explanatory drawing which shows the state of the detection of the mixing bubble performed in this invention. It is plane explanatory drawing which shows the state of the detection of the mixing bubble performed in this invention. It is explanatory drawing which shows the general state of the manufacturing method and manufacturing apparatus of the photocuring resin replication plates currently performed. It is sectional explanatory drawing which shows the mode at the time of manufacture of photocuring resin replication plates.

Explanation of symbols

10, 40... Silane coupling treatment layers 11, 41... Glass substrate 12, 24... Photocurable resin layer 13, 43. Switching mirror 17 Shutter 18 X scanner 19 Y scanner 21 Recording means 22 'Light curing beam 23 Mirror 24 Bubble 25 Scanning range 26 Light emitting part 51 ...... Resin cured part 52 ...... Resin uncured part

Claims (5)

  After providing an uncured photo-curing resin layer on the surface of a flat transparent substrate, the surface with the fine irregularities is photocured on a flat copy master with fine irregularities on one surface. By curing the photocurable resin layer by sequentially irradiating the photocurable resin layer with a wavelength for curing the photocurable resin layer from the transparent substrate side while in close contact with the surface of the photocurable resin layer. When replicating a photo-curing resin duplication plate having fine irregularities on the surface, before curing the uncured photo-curing resin layer, from the transparent substrate side to the periphery of the uncured photo-curing resin layer Scanning and irradiating a detection beam with a wavelength that does not cure the photocurable resin layer, and reflecting off the interface between the bubbles present in the photocurable resin layer and the photocurable resin, returns to the outside of the transparent substrate. The reflected light is recorded sequentially, and the presence of bubbles is recorded based on this recorded information. Mixed bubble detection method characterized by detecting a.   2. The mixed bubble detection method according to claim 1, wherein the reflected light returning to the outside of the transparent substrate is recorded by a recording means, and thereafter, the bubble is detected by performing image analysis based on the recorded information.   After providing an uncured photo-curing resin layer on the surface of a flat transparent substrate, the surface with the fine irregularities is photocured on a flat copy master with fine irregularities on one surface. In the state of being in close contact with the surface of the curable resin layer, by irradiating the photocurable resin layer with a wavelength for curing the photocurable resin layer from the transparent substrate side while irradiating and curing the photocurable resin layer, An apparatus for detecting the mixing of bubbles in an uncured photo-curing resin layer when replicating a photo-curing resin duplication plate having fine irregularities on the surface, the uncured photo-curing resin Detection beam irradiation means for irradiating a detection beam having a wavelength that does not cure the photocurable resin layer from the transparent substrate side to the periphery of the uncured photocurable resin layer before the layer is cured And photocuring of bubbles present in the photocurable resin layer Recording means for sequentially recording reflected light reflected from the interface with the resin and returning to the outside of the transparent substrate, and at least mixed bubble detection means for identifying the presence or absence of bubbles based on the recording information from the recording means A mixed bubble detection device comprising:   After providing an uncured photo-curing resin layer on the surface of a flat transparent substrate, the surface with the fine irregularities is photocured on a flat copy master with fine irregularities on one surface. In the state of being in close contact with the surface of the curable resin layer, the detection substrate having a wavelength that does not cure the photocurable resin layer is scanned and irradiated from the transparent substrate side to the periphery of the uncured photocurable resin layer. If bubbles exist in the photocurable resin layer that is in close contact, there is no reflected light that reflects off the interface between the bubbles and the photocurable resin and returns to the outside of the transparent substrate, and is uncured photocurable resin When it is detected and confirmed that there are no air bubbles in the layer, the photo-curing resin layer is sequentially irradiated from the transparent substrate side while irradiating the photo-curing resin layer with a light curing beam with a wavelength for curing the photo-curing resin layer. A photo-curing resin replica with fine irregularities on the surface by curing Replication wherein the replicating.   The scanning of the photocuring beam having a wavelength for curing the photocurable resin layer and the scanning of the detecting beam having a wavelength that does not cure the photocurable resin layer can be switched by the same beam scanning means. The duplication method according to claim 5, characterized in that:

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