JP2005190989A5 - - Google Patents

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Publication number
JP2005190989A5
JP2005190989A5 JP2004312857A JP2004312857A JP2005190989A5 JP 2005190989 A5 JP2005190989 A5 JP 2005190989A5 JP 2004312857 A JP2004312857 A JP 2004312857A JP 2004312857 A JP2004312857 A JP 2004312857A JP 2005190989 A5 JP2005190989 A5 JP 2005190989A5
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JP
Japan
Prior art keywords
heating
temperature
support member
flat plate
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004312857A
Other languages
English (en)
Japanese (ja)
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JP2005190989A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004312857A priority Critical patent/JP2005190989A/ja
Priority claimed from JP2004312857A external-priority patent/JP2005190989A/ja
Publication of JP2005190989A publication Critical patent/JP2005190989A/ja
Publication of JP2005190989A5 publication Critical patent/JP2005190989A5/ja
Withdrawn legal-status Critical Current

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JP2004312857A 1998-04-24 2004-10-27 加熱装置及び加熱方法 Withdrawn JP2005190989A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004312857A JP2005190989A (ja) 1998-04-24 2004-10-27 加熱装置及び加熱方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11506998 1998-04-24
JP14577098 1998-05-27
JP26182998 1998-09-16
JP2004312857A JP2005190989A (ja) 1998-04-24 2004-10-27 加熱装置及び加熱方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11080387A Division JP2000156277A (ja) 1998-04-24 1999-03-24 加熱装置及び加熱方法

Publications (2)

Publication Number Publication Date
JP2005190989A JP2005190989A (ja) 2005-07-14
JP2005190989A5 true JP2005190989A5 (cg-RX-API-DMAC7.html) 2006-05-18

Family

ID=34799670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004312857A Withdrawn JP2005190989A (ja) 1998-04-24 2004-10-27 加熱装置及び加熱方法

Country Status (1)

Country Link
JP (1) JP2005190989A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5737724B2 (ja) * 2012-01-17 2015-06-17 コバレントマテリアル株式会社 ヒータ
CN118563271B (zh) * 2024-04-17 2025-04-01 江苏派莱特光电科技有限公司 用于真空镀膜机的烘烤加热装置

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