JP2005189072A - Pressure sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure sensor capable of implementing a sealing structure between a housing and a metal diaphragm regardless of the type of a material constituting the housing. <P>SOLUTION: A ring-like groove (O-ring groove) 44 is formed in one surface 30b of the housing 30, and an O-ring 45 is arranged in the groove 44. It is possible to secure sealability between the metal diaphragm 34 and the housing 30 by this structure. Since this sealing structure utilizes the O-ring 45, it is possible to secure sealability between the metal diaphragm 34 and the housing 30 even if the type of the material constituting the housing 30 is changed. It is therefore possible to achieve the pressure sensor capable of achieving the sealing structure between the metal diaphragm 34 and the housing 30 regardless of the type of the material constituting the housing 30. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a pressure sensor in which a first case and a second case are assembled together by caulking and a pressure detection sensing unit is provided therein.

  Conventionally, a pressure sensor has been proposed in which a first case and a second case are integrally assembled by caulking and a pressure sensing unit is provided therein (see, for example, Patent Document 1).

  A sectional view of this pressure sensor is shown in FIG. 10, and a partially enlarged view of FIG. 10 is shown in FIG. The pressure sensor shown in FIGS. 10 and 11 is a diaphragm seal type pressure sensor configured to include a connector case J1 as a first case and a housing J2 as a second case for introducing a measurement medium. It is. That is, after the connector case J1 is inserted into the housing recess J4 of the housing J2 with the metal diaphragm J3 interposed between the cases J1 and J2, the pressure sensor is crimped on the inlet side of the housing recess J4 of the housing J2. As a result, the pressure detection chamber J5 is partitioned and the sensor element J6 as a sensing portion is provided in the pressure detection chamber J5.

  The pressure detection chamber J5 is sealed by an O-ring J7 interposed between the connector case J1 and the housing J2, and a pressure transmission member J8 such as oil is sealed inside the pressure detection chamber J5. Yes. Further, a pressure by the measurement medium introduced into the housing J2 is applied to the surface of the metal diaphragm J3 opposite to the pressure detection chamber J5, and the measurement pressure is applied to the sensor element from the metal diaphragm J3 via the pressure transmission member J8. Applied to J6, detection is performed.

Here, in the pressure sensor having such a structure, in order to prevent the measurement medium from leaking from between the housing J2 and the metal diaphragm J3, a seal between them must be secured. For this reason, in the pressure sensor disclosed in Patent Document 1, a ring weld J9 made of the same type of metal as the housing J2 is connected to the outer peripheral portion of the metal diaphragm J3, and a contact portion J10 between the ring weld J9 and the housing J2 is connected. A part of is welded.
JP 7-243926 A

  The above-described housing J2 is made of, for example, stainless steel (SUS). According to these materials, battery corrosion due to contact with dissimilar metals is caused in the case of, for example, aluminum (Al) due to the difference in material from the assembly counterpart. It has been confirmed that this occurs. In this case, it is conceivable to prevent the corrosion by using, for example, aluminum (Al) of the same quality as the counterpart side as the material of the housing J2.

  However, when the seal structure between the housing J2 and the metal diaphragm J3 is realized by welding the ring weld J9 and the housing J2 as described above, if the material of the housing J2 is changed, the metal becomes different from the ring weld J9. There is a problem that it becomes impossible to realize a seal structure because welding in between is impossible.

  In view of the above points, an object of the present invention is to provide a pressure sensor that can realize a seal structure between a housing and a metal diaphragm regardless of the type of material constituting the housing.

  In order to achieve the above object, according to the first aspect of the present invention, there is provided a casing (100) in which the first case (10) and the second case (30) are assembled together, and the casing (100) In the pressure sensor in which a pressure sensing unit (20) is provided on the front end surface (10a) of the first case (10) to be assembled to the second case (30), a metal diaphragm ( 34) and a portion surrounded by the metal diaphragm (34) and the first case (10) as a pressure detection chamber (40), the sensing unit (20) is disposed in the pressure detection chamber (40). One surface (30b) of the second case (30) to which the first case (10) is assembled is provided with an annular groove (4) so as to surround the pressure detection chamber (40). ) And a sealing member (45) made of an elastic material accommodated in the groove (44). The sealing member (45) allows the metal diaphragm (34) and the second case to be formed. (30) and the sealing property is ensured.

  According to such a configuration, the sealing performance between the metal diaphragm (34) and the second case (30) is ensured by the sealing member (45) made of an elastic material. For this reason, even if the kind of material which comprises the 2nd case (30) changes, the sealing performance between a metal diaphragm (34) and a 2nd case (30) is securable. Therefore, it is possible to provide a pressure sensor that can realize a seal structure between the second case (30) and the metal diaphragm (34) regardless of the type of material constituting the second case (30).

  In the invention according to claim 2, the metal diaphragm (34) is arranged on the tip surface (10a) of the first case (10) on the side assembled to the second case (30), A portion surrounded by the metal diaphragm (34) and the first case (10) is used as a pressure detection chamber (40), and the sensing unit (20) is arranged in the pressure detection chamber (40). A packing (52) is provided between one surface (30b) on which the first case (10) of the two cases (30) is assembled and the metal diaphragm (34) so as to surround the pressure detection chamber (40). The seal (52) secures the sealing performance between the metal diaphragm (34) and the second case (30).

  Even with such a configuration, the same effect as in the first aspect can be obtained.

  In the invention according to claim 3, the metal diaphragm (34) is disposed on the tip surface (10a) of the first case (10) on the side assembled to the second case (30), A portion surrounded by the metal diaphragm (34) and the first case (10) is used as a pressure detection chamber (40), and a sensing unit (20) is arranged in the pressure detection chamber (40). A seal member (60) made of an elastic material is insert-molded on the outer periphery of the diaphragm (34), and the first case (10) of the second case (30) is assembled to the seal member (60). The seal between the metal diaphragm (34) and the second case (30) is disposed between the one surface (30b) and the first case (10) so as to surround the pressure detection chamber (40). There has been characterized in that it is secured.

  Even with such a configuration, the same effect as in the first aspect can be obtained.

  In the invention according to claim 4, a metal diaphragm (34) is disposed on the tip surface (10a) of the first case (10) on the side assembled to the second case (30), A portion surrounded by the metal diaphragm (34) and the first case (10) is used as a pressure detection chamber (40), and a sensing unit (20) is arranged in the pressure detection chamber (40). On the outer periphery of the diaphragm (34), a protrusion (34a) protruding toward the one surface (30b) on which the first case (10) of the second case (30) is assembled surrounds the pressure detection chamber (40). The projecting portion (34a) is in contact with one surface (30b), so that the sealing property between the metal diaphragm (34) and the second case (30) is secured. .

  Even with such a configuration, the same effect as in the first aspect can be obtained.

  According to the fifth aspect of the present invention, an O-ring (43) or an oil seal (70) is provided between the first case (10) and the metal diaphragm (34) at the outer peripheral position of the pressure detection chamber (40). ) Is provided. Thus, the pressure detection chamber (40) can be closed by, for example, the O-ring (43) or the oil seal (70).

  In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or equivalent parts are denoted by the same reference numerals in the drawings.

(First embodiment)
Hereinafter, a pressure sensor to which an embodiment of the present invention is applied will be described. FIG. 1 shows a cross-sectional view of the pressure sensor S1 in the present embodiment, and FIG. 2 shows a partially enlarged view of FIG. 1, which will be described based on these drawings. In addition, this pressure sensor S1 is applied to what detects the refrigerant | coolant pressure in the refrigerant | coolant piping of the motor vehicle air conditioner mounted, for example.

  As shown in FIG. 1, a connector case 10 as a first case is made by molding a resin such as PPS (polyphenylene sulfide) or PBT (polybutylene terephthalate). I am doing. A concave portion 11 is formed at one end (the lower end in FIG. 1) of the connector case 10 as the resin case.

  A sensor element 20 as a pressure detecting sensing part is disposed on the bottom surface of the recess 11.

  The sensor element 20 has a diaphragm as a pressure receiving surface on the surface thereof, and converts the pressure received by the diaphragm into an electrical signal by a gauge resistance formed on the surface of the diaphragm, and outputs the electrical signal as a sensor signal. It is a semiconductor diaphragm type.

  The sensor element 20 is integrated with a pedestal 21 made of glass or the like by anodic bonding or the like, and the sensor element 20 is mounted on the connector case 10 by bonding the pedestal 21 to the bottom surface of the recess 11. .

  In addition, a plurality of metal rod-shaped terminals 12 for electrically connecting the sensor element 20 and an external circuit or the like pass through the connector case 10.

  In the present embodiment, the terminal 12 is made of a material obtained by plating brass (brass) (for example, Ni plating), and is held in the connector case 10 by being integrally formed with the connector case 10 by insert molding. Yes.

  The end of each terminal 12 on one end side (the lower end side in FIG. 1) is disposed so as to protrude from the bottom surface of the recess 11 around the mounting area of the sensor element 20. On the other hand, the end of each terminal 12 on the other end side (the upper end side in FIG. 1) is exposed in the opening 15 on the other end side of the connector case 10.

  One end of each terminal 12 protruding into the recess 11 and the sensor element 20 are connected and electrically connected by a bonding wire 13 such as gold or aluminum.

  Further, a sealing agent 14 made of silicon resin or the like is provided in the recess 11, and the seal agent 14 seals a gap between the base portion of the terminal 12 protruding into the recess 11 and the connector case 10. Yes.

  On the other hand, in FIG. 1, the other end portion (the upper end portion in FIG. 1) side of the connector case 10 is an opening portion 15. It is a connector portion for electrically connecting to the external circuit (such as an ECU of the vehicle) via an external wiring member (not shown) such as a wire harness.

  That is, the other end side of each terminal 12 exposed in the opening 15 can be electrically connected to the outside by this connector portion. Thus, signal transmission between the sensor element 20 and the outside is performed via the bonding wire 13 and the terminal 12.

  As shown in FIG. 1, a housing 30 as a second case is assembled to one end of the connector case 10. Specifically, the housing 30 is provided with a housing recess 30a, and the housing 30 is assembled to the connector case 10 by inserting one end of the connector case 10 into the housing recess 30a. ing.

  Thus, a casing 100 is formed in which the connector case 10 as the first case and the housing 30 as the second case are assembled together, and the sensor element 20 is provided in the casing 100. It has become.

  The housing 30 is made of a metal material such as aluminum (Al), for example, and includes a pressure introduction hole 31 into which a measurement pressure from the measurement object is introduced, and a screw for fixing the pressure sensor S1 to the measurement object. Part 32. As described above, the measurement object is, for example, a refrigerant pipe of an automobile air conditioner, and the measurement pressure is a refrigerant pressure in the refrigerant pipe.

  Further, a metal diaphragm 34 made of a thin metal (for example, SUS) is sandwiched between the front end surface 10 a of the connector case 10 and the one surface 30 b facing the front end surface 10 a of the connector case 10 in the housing recess 30 a in the housing 30. ing.

  As shown in FIG. 1, the end portion on the housing recess 30 a side of the housing 30 is caulked to one end portion of the connector case 10 to form a caulking portion 36, thereby forming the housing 30 and the connector case 10. Are fixed and integrated.

  In the connector case 10 and the housing 30 thus combined, the pressure detection chamber 40 is configured between the concave portion 11 of the connector case 10 and the diaphragm 34 of the housing 30.

  The pressure detection chamber 40 is filled with and filled with oil (fluorine oil or the like) 41 which is a pressure transmission medium and is a sealing liquid. By sealing the oil 41, the recess 11 is filled with the oil 41 so as to cover the electrical connection portions such as the sensor element 20 and the wire 13, and the oil 41 is covered and sealed by the diaphragm 34. .

  By constructing such a pressure detection chamber 40, the pressure introduced from the pressure introduction hole 31 is transmitted through the metal diaphragm 34 and the oil 41 to the sensor element 20, the bonding wire 13, and the terminal 12 in the pressure detection chamber 40. Will be applied.

  In the pressure sensor of the present embodiment, as shown in FIG. 2, an annular groove (O-ring groove) 42 is formed on the distal end surface 10 a of the connector case 10 so as to surround the outer periphery of the pressure detection chamber 40. An O-ring 43 is formed in the groove 42 for hermetically sealing the pressure detection chamber 40. Further, an annular groove (O-ring groove) 44 is formed on the one surface 30 b of the housing 30 so as to face the annular groove 42, and a seal between the metal diaphragm 34 and the housing 30 is formed in the groove 44. An O-ring 45 is provided to ensure the performance.

  These O-rings 43 and 45 are made of, for example, an elastic material such as silicon rubber, and are pressed between the connector case 10 and the housing 30. Thus, the pressure detection chamber 40 is sealed and closed by the metal diaphragm 34 and the O-ring 43, and the back chamber into which the fluid to be measured is introduced through the pressure introduction hole 31 is closed by the metal diaphragm 34 and the O-ring 45. Is done.

  Next, a manufacturing method of the pressure sensor S1 will be described with reference to FIG.

  First, the connector case 10 in which the terminal 12 is insert-molded is prepared. The sensor element 20 is bonded and fixed to the concave portion 11 of the connector case 10 via the base 21 using an adhesive made of silicon resin or the like.

  Then, the sealing agent 14 is injected into the recess 11, and the sealing agent 14 is spread to the bottom surface of the recess 11. Here, the injection amount is adjusted so that the sealing agent 14 does not adhere to the surface of the sensor element 20.

  Subsequently, the injected sealing agent 14 is cured. And wire bonding is performed, the one end part of each terminal 12 and the sensor element 20 are connected with the bonding wire 13, and are electrically connected.

  Then, the connector case 10 is arranged with the sensor element 20 side up, and a certain amount of oil 41 made of fluorine oil or the like is injected into the recess 11 from above the connector case 10 by a dispenser or the like.

  Subsequently, after the metal diaphragm 34 is disposed on the distal end surface 10 a side of the connector case 10, the O-ring 45 is disposed on the metal diaphragm 34 at a position facing the O-ring 43. Then, the housing 30 is prepared, and the housing 30 is lowered from the top so as to be fitted to the connector case 10 while keeping the level. The thing of this state is put into a vacuum chamber, and vacuuming is performed, and the excess air in the pressure detection chamber 40 is removed.

  Thereafter, the pressure detection chamber 40 sealed by the metal diaphragm 34 and the O-ring 43 is formed by pressing until the front end surface of the connector case 10 and the one surface 30b of the housing 30 are sufficiently in contact with each other, and the metal diaphragm 34 and the O-ring. 45 constitutes a seal structure between the metal diaphragm 34 and the housing 30.

  Next, the caulking portion 36 is formed by caulking the end portion of the housing 30 to one end side of the connector case 10. Thus, by integrating the housing 30 and the connector case 10, the connector case 10 and the housing 30 are assembled and fixed by the caulking portion 36. Further, the caulking portion 36 applies a pressing force in a direction in which the connector case 10 is inserted into the housing recess 30 a of the housing 30, and a sealing structure between the blockage of the pressure detection chamber 40 and the metal diaphragm 34 and the housing 30. Is maintained. In this way, the pressure sensor S1 shown in FIG. 1 is completed.

  A basic pressure detection operation of the pressure sensor S1 will be described.

  For example, the pressure sensor S1 is attached to an appropriate position of the refrigerant piping system of the air conditioner in the vehicle via the screw portion 32 of the housing 30. Then, the pressure in the pipe is introduced into the pressure sensor S <b> 1 from the pressure introduction hole 31 of the housing 30.

  Then, the introduced pressure is applied from the metal diaphragm 34 to the surface of the sensor element 20, that is, the pressure receiving surface, through the oil 41 in the pressure detection chamber 40. And the electrical signal according to the applied pressure is output from the sensor element 20 as a sensor signal.

  This sensor signal is transmitted from the sensor element 20 to the external circuit via the wire 13 and the terminal 12, and the refrigerant pressure in the refrigerant pipe is detected. In this way, pressure detection in the pressure sensor S1 is performed.

  As described above, the pressure sensor of the present embodiment has a structure in which the annular groove (O-ring groove) 44 is formed in the one surface 30 b of the housing 30 and the O-ring 45 is disposed in the groove 44. With such a structure, it is possible to ensure a sealing property between the metal diaphragm 34 and the housing 30.

  And since it is the seal structure by O-ring 45, even if the kind of material which comprises the housing 30 changes, the sealing performance between the metal diaphragm 34 and the housing 30 is securable. Therefore, it is possible to provide a pressure sensor that can realize a seal structure between the housing 30 and the metal diaphragm 34 regardless of the type of material constituting the housing 30.

(Second Embodiment)
A second embodiment of the present invention will be described. The pressure sensor according to the present embodiment ensures a sealing property between the metal diaphragm 34 and the housing 30 by a seal structure different from that of the first embodiment. FIG. 3 is a partial enlarged cross-sectional view of the pressure sensor according to the present embodiment. The pressure sensor of this embodiment is the same as that of the first embodiment except that the structure in the vicinity of the metal diaphragm 34 is different from that of the first embodiment, and therefore only the different parts will be described.

  As shown in FIG. 3, packings 51 and 52 having a rectangular cross section made of rubber, for example, are provided on the front and back surfaces of the metal diaphragm 34 on the outer periphery of the metal diaphragm 34. FIG. 4 shows only the metal diaphragm 34 and the packings 51 and 52. The packings 51 and 52 are bonded to the metal diaphragm 34 in advance as shown in FIG.

  A stopper portion 10b for positioning the packing 51 is formed on the front end surface of the connector case 10, and a stopper portion 30c for positioning the packing 52 is also formed on one surface 30b of the housing 30. It has become.

  Even with such a configuration, the pressure detection chamber 40 can be closed by the packing 51, and a seal structure between the metal diaphragm 34 and the housing 30 can be realized by the packing 52. Thereby, the effect similar to 1st Embodiment can be acquired.

(Third embodiment)
A third embodiment of the present invention will be described. The pressure sensor according to the present embodiment ensures a sealing property between the metal diaphragm 34 and the housing 30 by a seal structure different from that of the first embodiment. FIG. 5 is a partial enlarged cross-sectional view of the pressure sensor according to the present embodiment. The pressure sensor of this embodiment is the same as that of the first embodiment except that the structure in the vicinity of the metal diaphragm 34 is different from that of the first embodiment, and therefore only the different parts will be described.

  As shown in FIG. 5, a seal member 60 having a circular cross section made of, for example, rubber is formed on the outer periphery of the metal diaphragm 34. The seal member 60 is formed over the front and back surfaces of the metal diaphragm 34. FIG. 6 shows only the metal diaphragm 34 and the seal member 60, and the seal member 60 is insert-molded in the metal diaphragm 34 in advance as shown in FIG.

  The front end surface of the connector case 10 and the one surface 30b of the housing 30 have a structure in which stopper portions 10b and 30c for positioning the seal member 60 are formed.

  Even with such a configuration, the pressure detection chamber 40 can be closed by the seal member 60, and a seal structure between the metal diaphragm 34 and the housing 30 can be realized. Thereby, the effect similar to 1st Embodiment can be acquired.

(Fourth embodiment)
A fourth embodiment of the present invention will be described. The pressure sensor of the present embodiment is obtained by closing the pressure detection chamber 40 with something other than the O-ring, as compared with the first embodiment. FIG. 7 is a partially enlarged sectional view of the pressure sensor according to the present embodiment. In addition, the pressure sensor of this embodiment is the same as that of 1st Embodiment about another part.

  As shown in this figure, an oil seal 70 is filled in the groove 42 instead of the O-ring 43 shown in FIG. Thus, even if the pressure detection chamber 40 is closed by the oil seal 70, the same effect as in the first embodiment can be obtained.

(Fifth embodiment)
A fifth embodiment of the present invention will be described. The pressure sensor according to the present embodiment ensures a sealing property between the metal diaphragm 34 and the housing 30 by a seal structure different from that of the first embodiment. FIG. 8 is a partially enlarged cross-sectional view of the pressure sensor according to the present embodiment. Note that the pressure sensor of this embodiment is the same as that of the fourth embodiment except that the structure in the vicinity of the metal diaphragm 34 is different from that of the fourth embodiment, and therefore only different parts will be described.

  As shown in FIG. 8, a protrusion 34 a that protrudes toward the one surface 30 b of the housing 30 is formed on the outer periphery of the metal diaphragm 34. FIG. 9 shows only the metal diaphragm 34. As shown in FIG. 9, the metal diaphragm 34 is formed in advance with a protrusion 34a.

According to such a configuration, when the metal diaphragm 34 is sandwiched between the connector case 10 and the housing 30, the projecting portion 34 a bites into the one surface 30 b of the housing 30, and the seal structure between the metal diaphragm 34 and the housing 30. Can be realized. Thereby, the effect similar to 4th Embodiment can be acquired.
(Other embodiments)
In each of the above embodiments, the pressure detection chamber 40 may not contain the oil 41. That is, it is only necessary to apply the measurement pressure to the sensor element 20 in the pressure detection chamber 40 via the metal diaphragm 34, and the pressure transmission medium in the pressure detection chamber 40 may be gas or the like.

  Further, the material of the first case 10 and the second case 30 is not limited to resin or metal, and can be appropriately changed.

  The sensor element 20 is not limited to a semiconductor diaphragm type that converts the pressure received by the diaphragm into an electrical signal and outputs the electrical signal as a sensor signal.

  In the fourth embodiment, the combination of the oil seal 70 and the O-ring 45 shown in the first embodiment has been described as an example, but the combination of the oil seal 70 and the packing 52 shown in the second embodiment It is also possible to do.

It is sectional drawing which shows the whole schematic of the pressure sensor which concerns on 1st Embodiment of this invention. It is the elements on larger scale of the pressure sensor which concerns on the said 1st Embodiment. It is sectional drawing of the pressure sensor which concerns on 2nd Embodiment of this invention. It is an enlarged view of the metal diaphragm and packing of the pressure sensor which concerns on the said 2nd Embodiment. It is sectional drawing of the pressure sensor which concerns on 3rd Embodiment of this invention. It is an enlarged view of a metal diaphragm and a seal member of the pressure sensor according to the third embodiment. It is sectional drawing of the pressure sensor which concerns on 4th Embodiment of this invention. It is sectional drawing of the pressure sensor which concerns on the said 5th Embodiment. It is an enlarged view of the metal diaphragm of the pressure sensor which concerns on 5th Embodiment of this invention. It is sectional drawing of the conventional pressure sensor. It is the elements on larger scale of the said conventional pressure sensor.

Explanation of symbols

10: Connector case as a first case,
20 ... sensor element as a sensing unit, 30 ... housing as a second case,
34 ... Metal diaphragm, 36 ... Caulking part, 42, 44 ... Groove, 43, 45 ... O-ring,
51, 52 ... packing, 60 ... seal member, 70 ... oil seal, 100 ... casing.

Claims (5)

A casing (100) formed by integrally assembling the first case (10) and the second case (30);
In the pressure sensor comprising a sensing part (20) for pressure detection in the casing (100),
A metal diaphragm (34) is disposed on the front end surface (10a) of the first case (10) that is assembled to the second case (30), and the metal diaphragm (34) and the first case (10). A portion surrounded by one case (10) is a pressure detection chamber (40), and the sensing unit (20) is arranged in the pressure detection chamber (40).
One surface (30b) of the second case (30) where the first case (10) is assembled is provided with an annular groove (44) so as to surround the pressure detection chamber (40). And a sealing member (45) made of an elastic material housed in the groove (44).
A pressure sensor characterized in that a sealing property between the metal diaphragm (34) and the second case (30) is secured by the sealing member (45). A casing (100) formed by integrally assembling the first case (10) and the second case (30);
In the pressure sensor comprising a sensing part (20) for pressure detection in the casing (100),
A metal diaphragm (34) is disposed on the front end surface (10a) of the first case (10) that is assembled to the second case (30), and the metal diaphragm (34) and the first case (10). A portion surrounded by one case (10) is a pressure detection chamber (40), and the sensing unit (20) is arranged in the pressure detection chamber (40).
Between the one surface (30b) on which the first case (10) is assembled in the second case (30) and the metal diaphragm (34), a packing ( 52),
A pressure sensor characterized in that a sealing property between the metal diaphragm (34) and the second case (30) is secured by the packing (52). A casing (100) formed by integrally assembling the first case (10) and the second case (30);
In the pressure sensor comprising a sensing part (20) for pressure detection in the casing (100),
A metal diaphragm (34) is disposed on the front end surface (10a) of the first case (10) that is assembled to the second case (30), and the metal diaphragm (34) and the first case (10). A portion surrounded by one case (10) is a pressure detection chamber (40), and the sensing unit (20) is arranged in the pressure detection chamber (40).
A seal member (60) made of an elastic material is insert-molded on the outer periphery of the metal diaphragm (34), and the seal member (60) is the first case (10) of the second case (30). Between the metal diaphragm (34) and the second case (30). The pressure detection chamber (40) is disposed between the first surface (30b) and the first case (10). A pressure sensor characterized by having a high sealing performance. A casing (100) formed by integrally assembling the first case (10) and the second case (30);
In the pressure sensor comprising a sensing part (20) for pressure detection in the casing (100),
A metal diaphragm (34) is disposed on the front end surface (10a) of the first case (10) that is assembled to the second case (30), and the metal diaphragm (34) and the first case (10). A portion surrounded by one case (10) is a pressure detection chamber (40), and the sensing unit (20) is arranged in the pressure detection chamber (40).
On the outer periphery of the metal diaphragm (34), there is a protrusion (34a) protruding toward the one surface (30b) side of the second case (30) where the first case (10) is assembled. (40) is provided so that the projecting portion (34a) is in contact with the one surface (30b), thereby ensuring a sealing property between the metal diaphragm (34) and the second case (30). A pressure sensor. An O-ring (43) or an oil seal (70) is provided at the outer peripheral position of the pressure detection chamber (40) between the first case (10) and the metal diaphragm (34). The pressure sensor according to any one of claims 1 to 4, wherein:

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