JP2005188955A - Shape measuring device - Google Patents

Shape measuring device Download PDF

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JP2005188955A
JP2005188955A JP2003427215A JP2003427215A JP2005188955A JP 2005188955 A JP2005188955 A JP 2005188955A JP 2003427215 A JP2003427215 A JP 2003427215A JP 2003427215 A JP2003427215 A JP 2003427215A JP 2005188955 A JP2005188955 A JP 2005188955A
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article
light
shape measuring
irradiation
imaging
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JP4251980B2 (en
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Shiro Inoue
志朗 井上
Yoshikazu Nakano
義和 中野
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Tsubakimoto Chain Co
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Tsubakimoto Chain Co
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive device which measures the outside dimension of an article with sufficient accuracy. <P>SOLUTION: The shape measuring device which measures the outside dimension of an article 10 is provided with: a lighting transparent plate 20 for laying the article; an irradiation means 30 for irradiating the article via the lighting transparent plate; an imaging means 40 which picturizes the projection image of the article which the irradiation light of the irradiation means forms; and an image pick-up polarizing plate 50 which intercepts lights other than the direct light from a lighting means, located between the article and the imaging means. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、機械部品等の形状計測を行う装置に関し、さらに詳しくは、透過照明による投影像を用いて、物品の形状計測を行う装置に関するものである。   The present invention relates to an apparatus for measuring a shape of a machine part or the like, and more particularly to an apparatus for measuring the shape of an article using a projection image by transmitted illumination.

従来、機械部品等の形状計測を行う装置としては、被計測物の背後から光を照射し、その投影像を高解像度の工業用カメラにより撮像し、その撮像画像を演算処理することにより所望の個所の寸法を算出する装置が知られていた(例えば、特許文献1参照)。   Conventionally, as a device for measuring the shape of a machine part or the like, light is irradiated from behind the object to be measured, the projected image is captured by a high-resolution industrial camera, and the captured image is processed and processed as desired. There has been known an apparatus for calculating a dimension of a location (see, for example, Patent Document 1).

特開2003−194529号公報JP 2003-194529 A

しかしながら、従来の投影像を用いた形状計測装置では、被計測物の背後から照射した光が、被計測物の角で屈折したり、被計測物に対して若干の角度を持って照射された光が、被計測物の表面で反射したりする。その結果、投影像が実際の被計測物よりも小さく映し出され、被計測物の正確な形状計測の妨げとなっていた。また、被計測物を照射する照射手段の光源として、平行光線を照射する平行光学系照明装置を用いることにより、投影像と実像との乖離を抑制することも考えられているが、照明装置が高額になり、費用対効果の面で実用化に支障をきたしていた。   However, in the shape measuring apparatus using the conventional projection image, the light irradiated from behind the object to be measured is refracted at the angle of the object to be measured or irradiated at a slight angle to the object to be measured. Light is reflected from the surface of the object to be measured. As a result, the projected image is projected smaller than the actual measurement object, which hinders accurate shape measurement of the measurement object. In addition, it is also considered that a divergence between a projected image and a real image is suppressed by using a parallel optical system illumination device that irradiates parallel light rays as a light source of an illuminating unit that irradiates the measurement object. The cost was high, and the practical application was hindered in terms of cost effectiveness.

そこで、本発明の目的は、物品の外形寸法を精度よく計測する安価な装置を提供することにある。   Therefore, an object of the present invention is to provide an inexpensive apparatus that accurately measures the external dimensions of an article.

請求項1に記載の形状計測装置は、物品の外形寸法を計測する形状計測装置において、物品を載置する照明透過板と、物品を照明透過板を介して照射する照射手段と、照射手段の照射光によって形成される物品の投影像を撮像する撮像手段と、物品と撮像手段との間に位置し、照明手段からの直接光以外の光を遮断する撮像偏光板とを有する構成にしたことによって、上記課題を解決するものである。   The shape measuring device according to claim 1 is a shape measuring device for measuring an outer dimension of an article, an illumination transmission plate on which the article is placed, an irradiation means for irradiating the article through the illumination transmission plate, An image pickup means for picking up a projected image of an article formed by irradiation light, and an image pickup polarizing plate that is positioned between the article and the image pickup means and blocks light other than direct light from the illumination means. This solves the above-mentioned problem.

請求項2に記載の形状計測装置は、請求項1に記載の形状計測装置の構成に加えて、撮像偏光板と同一の偏向特性を有する照射偏光板を、物品と照射手段の間に、さらに有する構成にしたことによって、上記課題をさらに解決するものである。   In addition to the configuration of the shape measuring device according to claim 1, the shape measuring device according to claim 2 further includes an irradiation polarizing plate having the same deflection characteristics as the imaging polarizing plate between the article and the irradiation means. By having the configuration, the above-described problems are further solved.

請求項3に記載の形状計測装置は、請求項1又は請求項2に記載の形状計測装置の構成に加えて、撮像手段と物品の間に、照射手段からの光を透過する光学フィルタを有する構成にしたことによって、上記課題のさらなる解決を図るものである。   In addition to the configuration of the shape measuring device according to claim 1 or 2, the shape measuring device according to claim 3 includes an optical filter that transmits light from the irradiation unit between the imaging unit and the article. By adopting a configuration, the above-described problems are further solved.

ここで、光学フィルタとは、照射手段の光の波長以上(周波数以下)の光を透過する低域透過フィルタや、照射手段の光の波長近傍(周波数近傍)のみ透過する帯域透過フィルタを意味している。   Here, the optical filter means a low-pass filter that transmits light having a wavelength equal to or greater than the wavelength of the light of the irradiating means, or a band-pass filter that transmits only near the wavelength of the light of the irradiating means (near the frequency). ing.

請求項4に記載の形状計測装置は、請求項1乃至請求項3のいずれかに記載の形状計測装置の構成に加えて、照明透過板が、物品の外形より若干大きな窓枠を有する光遮蔽マスクを有する構成にしたことによって、上記課題のさらなる解決を図るものである。   In addition to the configuration of the shape measuring device according to any one of claims 1 to 3, the shape measuring device according to claim 4 is a light shield in which the illumination transmission plate has a window frame slightly larger than the outer shape of the article. By adopting a configuration having a mask, the above-described problems are further solved.

請求項5に記載の形状計測装置は、請求項1乃至請求項4のいずれかに記載の形状計測装置の構成に加えて、撮像手段が、テレセントリックレンズを用いたカメラであることにしたことによって、上記課題のさらなる解決を図るものである。   According to a fifth aspect of the present invention, in addition to the configuration of the shape measuring device according to any one of the first to fourth aspects, the imaging unit is a camera using a telecentric lens. The present invention aims to further solve the above problems.

ここで、テレセントリックレンズとは、平行なビームパスを有する撮像レンズのことであり、被写体深度が深く、その範囲で一定の倍率が得られ、被計測物までの距離が変わっても撮像される像が変化しない特性を持っている。   Here, the telecentric lens is an imaging lens having a parallel beam path. The depth of the subject is deep, a constant magnification is obtained within the range, and an image captured even if the distance to the object to be measured changes. It has a characteristic that does not change.

請求項1に係る形状計測装置によれば、物品を載置する照明透過板と、物品を照明透過板を介して照射する照射手段と、照射手段の照射光によって形成される物品の投影像を撮像する撮像手段と、物品と撮像手段との間に位置し、照明手段からの直接光以外の光を遮断する撮像偏光板とを有する構成にしたことによって、物品の表面で反射した反射光が撮像偏光板で遮断されるため、正確な寸法計測が可能になる。   According to the shape measuring apparatus according to claim 1, an illumination transmission plate for placing the article, an irradiation unit for irradiating the article through the illumination transmission plate, and a projection image of the article formed by the irradiation light of the irradiation unit Reflecting light reflected on the surface of the article is configured by including an imaging means for imaging, and an imaging polarizing plate that is positioned between the article and the imaging means and blocks light other than direct light from the illumination means. Since it is blocked by the imaging polarizing plate, accurate dimension measurement is possible.

請求項2に係る形状計測装置によれば、請求項1に係る形状計測装置の構成に加えて、撮像偏光板と同一の偏向特性を有する照射偏光板を、物品と照射手段の間に、さらに有する構成にしたことによって、特定の偏光方向の光だけを用いて、投影像を形成することができるため、物品の表面で反射した反射光の影響や、物品の角で屈折した屈折光の影響をより確実に遮断でき、より正確な寸法計測が可能になる。   According to the shape measuring apparatus according to claim 2, in addition to the configuration of the shape measuring apparatus according to claim 1, an irradiation polarizing plate having the same deflection characteristics as the imaging polarizing plate is further provided between the article and the irradiation means. By having the configuration, it is possible to form a projected image using only light in a specific polarization direction, so the influence of reflected light reflected on the surface of the article or the influence of refracted light refracted at the corner of the article Can be cut off more reliably, and more accurate dimension measurement becomes possible.

請求項3に記載の形状計測装置によれば、請求項1又は請求項2に記載の形状計測装置の構成に加えて、撮像手段と物品の間に、照射手段からの光を透過する光学フィルタを有する構成にしたことによって、照射手段からの光以外の周囲光の影響を受けることなく、投影像を形成することができるため、より正確な寸法計測が可能になる。   According to the shape measuring apparatus of claim 3, in addition to the configuration of the shape measuring apparatus of claim 1 or 2, an optical filter that transmits light from the irradiation means between the imaging means and the article. Since the projection image can be formed without being affected by ambient light other than the light from the irradiation unit, more accurate dimension measurement can be performed.

請求項4に記載の形状計測装置によれば、請求項1乃至請求項3のいずれかに記載の形状計測装置の構成に加えて、照明透過板が、物品の外形より若干大きな窓枠を有する光遮蔽マスクを有する構成にしたことによって、照射手段からの光のうち、物品に対して大きな照射角度で照射される光の影響を遮断することができるため、より正確な寸法計測が可能になる。   According to the shape measuring apparatus according to claim 4, in addition to the configuration of the shape measuring apparatus according to any one of claims 1 to 3, the illumination transmission plate has a window frame slightly larger than the outer shape of the article. By adopting the configuration having the light shielding mask, it is possible to block the influence of the light emitted from the irradiation means that is irradiated on the article at a large irradiation angle, thereby enabling more accurate dimension measurement. .

請求項5に記載の形状計測装置によれば、請求項1乃至請求項4のいずれかに記載の形状計測装置の構成に加えて、撮像手段が、テレセントリックレンズを用いたカメラであることにしたことによって、物品の投影像を歪みなく撮像することが可能になるので、よりいっそう正確な寸法計測が可能になる。   According to the shape measuring apparatus according to claim 5, in addition to the configuration of the shape measuring apparatus according to any one of claims 1 to 4, the imaging means is a camera using a telecentric lens. As a result, the projected image of the article can be taken without distortion, so that more accurate dimension measurement can be performed.

本発明の形状計測装置の実施の形態について、図1及び図2に基づき説明する。本発明の形状計測装置は、図1に示したように、形状計測を行う物品10を載置する照明透過板20と、この照明透過板20を介して物品10に照射する照射手段30と、照射手段30の照射光によって形成される物品10の投影像を撮像する撮像手段40と、物品10と撮像手段40との間に位置し、照明手段30からの直接光以外の光を遮断する撮像偏光板50とを有している。さらに、照明透過板20の上に、物品の外形より若干大きな窓枠を有する光遮蔽マスク25を設置することによって、物品10の側壁等に照射される傾斜光を遮断することができる。   An embodiment of the shape measuring apparatus of the present invention will be described with reference to FIGS. As shown in FIG. 1, the shape measuring apparatus of the present invention includes an illumination transmission plate 20 on which an article 10 for shape measurement is placed, an irradiation unit 30 that irradiates the article 10 through the illumination transmission plate 20, and An imaging unit 40 that captures a projection image of the article 10 formed by the irradiation light of the irradiation unit 30, and an imaging that is positioned between the article 10 and the imaging unit 40 and blocks light other than direct light from the illumination unit 30. And a polarizing plate 50. Further, by installing a light shielding mask 25 having a window frame slightly larger than the outer shape of the article on the illumination transmission plate 20, it is possible to block the inclined light irradiated on the side wall or the like of the article 10.

照射手段30としては、物品10を均一に照射できる光源であれば、特に限定されるものではない。例えば、白熱電球、ハロゲン電球、蛍光灯、メタルハライドランプ、キセノンランプ、発光ダイオード等を光源とし、乳白色のアクリル板などの拡散板などを利用して対象物への光の照射方向をランダムにし、対象物の背後から照射し、対象物の影を観測する拡散透過照明方式の照明装置が好適に用いられる。   The irradiation means 30 is not particularly limited as long as it is a light source that can uniformly irradiate the article 10. For example, incandescent bulbs, halogen bulbs, fluorescent lamps, metal halide lamps, xenon lamps, light-emitting diodes, etc. are used as light sources, and a light diffusing plate such as a milky white acrylic plate is used to randomly illuminate the target object. A diffuse transmission illumination type illumination device that irradiates from behind the object and observes the shadow of the object is preferably used.

また、撮像手段40としては、高解像度で歪みなく撮像できるものであれば、特に限定されるものではないが、画像データの処理の簡便さやコスト等の観点から、CCDカメラなどの市販の工業用カメラが好適に使用される。きわめて高い測定精度が要求されるような場合には、平行なビームパスを有する撮像レンズ、すなわちテレセントリックレンズを光学系に使用したCCDカメラが使用される。このテレセントリックレンズは、被写体深度が深く、その範囲で一定の倍率が得られるため、被計測物までの距離が変わっても撮像される像が変化しない特性を持っている。   The imaging means 40 is not particularly limited as long as it can capture images with high resolution and no distortion. However, from the viewpoint of simplicity of image data processing, cost, and the like, a commercially available industrial camera such as a CCD camera is available. A camera is preferably used. When extremely high measurement accuracy is required, an imaging lens having a parallel beam path, that is, a CCD camera using a telecentric lens in an optical system is used. Since this telecentric lens has a deep subject depth and a constant magnification within that range, it has a characteristic that the image to be captured does not change even if the distance to the object to be measured changes.

さらに、この撮像手段40と物品10との間に撮像偏光板50が設置されている。一般に偏光板は、一つの振動方向(例えば、図2のT方向)の光のみを透過する性質を有している。また、光は、物体上で反射や屈折する際にその振動方向を変える性質がある。そのため、撮像手段40と物品10との間に撮像偏光板50を設置することによって、図2に示したように、被計測物の角部で屈折した光L1や、被計測物の角部近傍で反射した光L2が撮像手段40に到達することが阻止され、被計測物の影上の寸法と実際寸法との誤差を小さくすることができる。   Further, an imaging polarizing plate 50 is installed between the imaging means 40 and the article 10. In general, a polarizing plate has a property of transmitting only light in one vibration direction (for example, the T direction in FIG. 2). Light also has the property of changing its vibration direction when reflected or refracted on an object. Therefore, by installing the imaging polarizing plate 50 between the imaging means 40 and the article 10, as shown in FIG. 2, the light L1 refracted at the corner of the object to be measured or the vicinity of the corner of the object to be measured. It is possible to prevent the light L <b> 2 reflected in step S <b> 2 from reaching the imaging unit 40, and to reduce an error between the shadow size of the measurement object and the actual size.

さらに、撮像偏光板50と同一の偏光特性を有する照射偏光板60を、物品10と照射手段30の間に設置することにより、物品10に照射される光の振動方向を揃えることができ、投影像と実際寸法との誤差を、さらに小さくすることができる。   Furthermore, by placing the irradiation polarizing plate 60 having the same polarization characteristics as the imaging polarizing plate 50 between the article 10 and the irradiation means 30, the vibration direction of the light irradiated on the article 10 can be aligned, and the projection The error between the image and the actual size can be further reduced.

また、本実施例においては、撮像手段40と物品10の間に、照射手段30からの光を透過する光学フィルタ70を設置している。ここでは、照射手段の光の波長以上(周波数以下)の光を透過する低域透過フィルタを用いたが、照射手段の光の波長近傍(周波数近傍)のみ透過する帯域透過フィルタを用いることもできる。このような光学フィルタ70を設置することにより、照明手段30以外からの光の影響を避けることができ、より正確な計測が可能になる。   In this embodiment, an optical filter 70 that transmits light from the irradiation unit 30 is provided between the imaging unit 40 and the article 10. Here, a low-pass filter that transmits light having a wavelength equal to or greater than the wavelength of the light of the irradiation unit (frequency or less) is used, but a band-pass filter that transmits only near the wavelength of light of the irradiation unit (near the frequency) can also be used. . By installing such an optical filter 70, it is possible to avoid the influence of light from other than the illumination unit 30 and to perform more accurate measurement.

本発明は、安価な構成で物品の高精度計測が可能になり、また、物品の形状測定が必要とされるあらゆる産業分野において適用可能であり、その産業上の利用可能性は極めて大きい。   The present invention enables high-precision measurement of an article with an inexpensive configuration, and can be applied in any industrial field where shape measurement of the article is required, and its industrial applicability is extremely large.

本発明の形状計測装置の装置構成を説明する説明図である。It is explanatory drawing explaining the apparatus structure of the shape measuring apparatus of this invention. 本発明の形状計測装置の高精度計測の原理を説明する説明図である。It is explanatory drawing explaining the principle of the high precision measurement of the shape measuring apparatus of this invention.

符号の説明Explanation of symbols

10 ・・・ 物品
20 ・・・ 照明透過板
25 ・・・ 光遮蔽マスク
30 ・・・ 照射手段
40 ・・・ 撮像手段
50 ・・・ 撮像偏光板
60 ・・・ 照射偏光板
70 ・・・ 光学フィルタ
DESCRIPTION OF SYMBOLS 10 ... Article 20 ... Illumination transmission plate 25 ... Light shielding mask 30 ... Irradiation means 40 ... Imaging means 50 ... Imaging polarizing plate 60 ... Irradiation polarizing plate 70 ... Optical filter

Claims (5)

物品の外形寸法を計測する形状計測装置において、
前記物品を載置する照明透過板と、
前記物品を前記照明透過板を介して照射する照射手段と、
前記照射手段の照射光が形成する前記物品の投影像を撮像する撮像手段と、
前記物品と前記撮像手段との間に位置し、前記照明手段からの直接光以外の光を遮断する撮像偏光板とを有することを特徴とする形状計測装置。
In a shape measuring device that measures the external dimensions of an article,
An illumination transmission plate on which the article is placed;
Irradiating means for irradiating the article through the illumination transmission plate;
Imaging means for capturing a projected image of the article formed by the irradiation light of the irradiation means;
A shape measuring apparatus, comprising: an imaging polarizing plate that is positioned between the article and the imaging unit and blocks light other than direct light from the illumination unit.
前記撮像偏光板と同一の偏向特性を有する照射偏光板を、前記物品と前記照射手段の間に、さらに有することを特徴とする請求項1に記載の形状計測装置。   The shape measuring apparatus according to claim 1, further comprising an irradiation polarizing plate having the same deflection characteristics as the imaging polarizing plate between the article and the irradiation unit. 前記撮像手段と前記物品の間に、前記照射手段からの光を透過する光学フィルタを有することを特徴とする請求項1又は請求項2に記載の形状計測装置。   The shape measuring apparatus according to claim 1, further comprising an optical filter that transmits light from the irradiation unit between the imaging unit and the article. 前記照明透過板が、前記物品の外形より若干大きな窓枠を有する光遮蔽マスクを有していることを特徴とする請求項1乃至請求項3のいずれかに記載の形状計測装置。   The shape measuring apparatus according to claim 1, wherein the illumination transmitting plate has a light shielding mask having a window frame slightly larger than an outer shape of the article. 前記撮像手段が、テレセントリックレンズを用いたカメラであることを特徴とする請求項1乃至請求項4のいずれかに記載の形状計測装置。
The shape measuring apparatus according to claim 1, wherein the imaging unit is a camera using a telecentric lens.
JP2003427215A 2003-12-24 2003-12-24 Shape measuring device Expired - Fee Related JP4251980B2 (en)

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Cited By (3)

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WO2009072500A1 (en) * 2007-12-03 2009-06-11 Kobelco Research Institute, Inc. Shape measuring apparatus
JP2012505397A (en) * 2008-10-10 2012-03-01 レニショウ パブリック リミテッド カンパニー Backlight vision machine
KR20150054495A (en) * 2013-11-12 2015-05-20 삼성디스플레이 주식회사 Defect detecting device and method for detecting defect using the same

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DE102016203275B4 (en) 2016-02-29 2019-07-18 Carl Zeiss Industrielle Messtechnik Gmbh Method and apparatus for determining a defocus value and method and apparatus for image-based determination of a dimensional size
DE102018105794B4 (en) 2017-03-15 2022-08-04 Carl Zeiss Industrielle Messtechnik Gmbh Representation of an object using shadows

Cited By (8)

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Publication number Priority date Publication date Assignee Title
WO2009072500A1 (en) * 2007-12-03 2009-06-11 Kobelco Research Institute, Inc. Shape measuring apparatus
JP2009133799A (en) * 2007-12-03 2009-06-18 Kobelco Kaken:Kk Shape measuring device
US8228509B2 (en) 2007-12-03 2012-07-24 Kobelco Research Institute, Inc. Shape measuring device
TWI395921B (en) * 2007-12-03 2013-05-11 Kobelco Res Inst Inc Shape measuring device
JP2012505397A (en) * 2008-10-10 2012-03-01 レニショウ パブリック リミテッド カンパニー Backlight vision machine
US9188431B2 (en) 2008-10-10 2015-11-17 Renishaw Plc Backlit vision machine
KR20150054495A (en) * 2013-11-12 2015-05-20 삼성디스플레이 주식회사 Defect detecting device and method for detecting defect using the same
KR102191414B1 (en) * 2013-11-12 2020-12-16 삼성디스플레이 주식회사 Defect detecting device and method for detecting defect using the same

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