JP2005187804A5 - - Google Patents
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- JP2005187804A5 JP2005187804A5 JP2004340020A JP2004340020A JP2005187804A5 JP 2005187804 A5 JP2005187804 A5 JP 2005187804A5 JP 2004340020 A JP2004340020 A JP 2004340020A JP 2004340020 A JP2004340020 A JP 2004340020A JP 2005187804 A5 JP2005187804 A5 JP 2005187804A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004340020A JP4387928B2 (en) | 2003-12-01 | 2004-11-25 | Hydrogenated product of ring-opening metathesis copolymer and process for producing the same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003401920 | 2003-12-01 | ||
| JP2004340020A JP4387928B2 (en) | 2003-12-01 | 2004-11-25 | Hydrogenated product of ring-opening metathesis copolymer and process for producing the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005187804A JP2005187804A (en) | 2005-07-14 |
| JP2005187804A5 true JP2005187804A5 (en) | 2005-09-29 |
| JP4387928B2 JP4387928B2 (en) | 2009-12-24 |
Family
ID=34797469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004340020A Active JP4387928B2 (en) | 2003-12-01 | 2004-11-25 | Hydrogenated product of ring-opening metathesis copolymer and process for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4387928B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5309526B2 (en) * | 2007-10-19 | 2013-10-09 | 信越化学工業株式会社 | Ring-opening metathesis polymer hydrogenated product, resist material containing the same, and pattern forming method |
| JP5498654B2 (en) * | 2007-10-19 | 2014-05-21 | 三井化学株式会社 | Method for producing hydrogenated ring-opening metathesis polymer |
| JP5515232B2 (en) * | 2008-03-26 | 2014-06-11 | 信越化学工業株式会社 | POLYMER COMPOUND, PROCESS FOR PRODUCING THE SAME, RESIST MATERIAL AND PATTERN FORMING METHOD |
| WO2011105399A1 (en) * | 2010-02-24 | 2011-09-01 | セントラル硝子株式会社 | Fluorine-containing lactone monomeric compound, fluorine -containing lactone polymeric compound, resist fluid and topcoating composition that contain same, and method for pattern formation using same |
| JP5682363B2 (en) * | 2010-02-24 | 2015-03-11 | セントラル硝子株式会社 | Topcoat composition and pattern forming method using the same |
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2004
- 2004-11-25 JP JP2004340020A patent/JP4387928B2/en active Active