JP2005184019A5 - - Google Patents

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Publication number
JP2005184019A5
JP2005184019A5 JP2005000826A JP2005000826A JP2005184019A5 JP 2005184019 A5 JP2005184019 A5 JP 2005184019A5 JP 2005000826 A JP2005000826 A JP 2005000826A JP 2005000826 A JP2005000826 A JP 2005000826A JP 2005184019 A5 JP2005184019 A5 JP 2005184019A5
Authority
JP
Japan
Prior art keywords
electrode
surface treatment
electrode body
dielectric
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005000826A
Other languages
English (en)
Japanese (ja)
Other versions
JP4361495B2 (ja
JP2005184019A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005000826A priority Critical patent/JP4361495B2/ja
Priority claimed from JP2005000826A external-priority patent/JP4361495B2/ja
Publication of JP2005184019A publication Critical patent/JP2005184019A/ja
Publication of JP2005184019A5 publication Critical patent/JP2005184019A5/ja
Application granted granted Critical
Publication of JP4361495B2 publication Critical patent/JP4361495B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005000826A 2005-01-05 2005-01-05 プラズマ表面処理装置の電極構造 Expired - Fee Related JP4361495B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005000826A JP4361495B2 (ja) 2005-01-05 2005-01-05 プラズマ表面処理装置の電極構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005000826A JP4361495B2 (ja) 2005-01-05 2005-01-05 プラズマ表面処理装置の電極構造

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002294125A Division JP3686647B2 (ja) 2002-10-07 2002-10-07 プラズマ表面処理装置の電極構造

Publications (3)

Publication Number Publication Date
JP2005184019A JP2005184019A (ja) 2005-07-07
JP2005184019A5 true JP2005184019A5 (cg-RX-API-DMAC7.html) 2005-11-10
JP4361495B2 JP4361495B2 (ja) 2009-11-11

Family

ID=34792698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005000826A Expired - Fee Related JP4361495B2 (ja) 2005-01-05 2005-01-05 プラズマ表面処理装置の電極構造

Country Status (1)

Country Link
JP (1) JP4361495B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112009000131T5 (de) * 2008-01-18 2010-12-09 Kyocera Corporation Plasma-Generator und Entladungsvorrichtung und Reaktor, der einen Plasma-Generator verwendet

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