JP2005176211A - Dielectric resonator device, dielectric duplexer, communication device, and manufacturing method - Google Patents

Dielectric resonator device, dielectric duplexer, communication device, and manufacturing method Download PDF

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JP2005176211A
JP2005176211A JP2003416675A JP2003416675A JP2005176211A JP 2005176211 A JP2005176211 A JP 2005176211A JP 2003416675 A JP2003416675 A JP 2003416675A JP 2003416675 A JP2003416675 A JP 2003416675A JP 2005176211 A JP2005176211 A JP 2005176211A
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dielectric
input
outer conductor
resonator device
dielectric block
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Soichi Nakamura
聡一 中村
Hideki Tsukamoto
秀樹 塚本
Hirobumi Miyamoto
博文 宮本
Hideyuki Kato
英幸 加藤
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a dielectric filter, a dielectric duplexer, a communication device, and a manufacturing method of the dielectric resonator device, for shortening the time required for forming input and output electrodes, reducing costs required for manufacturing and adjusting, and capable of adjusting characteristics on a wide range. <P>SOLUTION: Through holes 2a to 2c having inner conductors 4a to 4c formed in inner surface thereof are provided in a dielectric block 1, and an outer conductor 5 is formed on outer surface of the dielectric block 1. The resonator is composed of the inner conductors 4a to 4c, the dielectric block 1, and the outer conductor 5. Input and output electrodes 6a, 6b for coupling to the resonator are formed on the outer conductor 5 by providing separating portions 7a, 7b. In the separating portions 7a, 7b, channels 8a, 8b for adjusting characteristics, having narrower width than its gap width, and having a predetermined depth are formed by laser beam machining. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

この発明は、誘電体ブロックに少なくとも1つの誘電体同軸共振器を構成してなる誘電体共振器装置、誘電体デュプレクサ、それらを備えた通信装置、および誘電体共振器装置の製造方法に関するものである。   The present invention relates to a dielectric resonator device in which at least one dielectric coaxial resonator is formed in a dielectric block, a dielectric duplexer, a communication device including them, and a method of manufacturing the dielectric resonator device. is there.

誘電体ブロックを用いた従来の誘電体フィルタの構成を図10に示す。(A)はその入出力電極を上面に描いた斜視図、(B)は(A)におけるA−A’部分の断面図、(C)は(B)におけるB部分の拡大断面図である。この図10に示すように、略直方体形状の誘電体ブロック1に3つの貫通孔2a〜2cが形成されていて、それらの内面に内導体が形成されている。誘電体ブロック1の外面には、貫通孔2a〜2cの一方の開口面を除く他の五つの面に外導体5を形成している。また誘電体ブロック1の外面には、離間部7a,7bを設けることによって外導体5から分離した入出力電極6a,6bを形成している。   The configuration of a conventional dielectric filter using a dielectric block is shown in FIG. (A) is a perspective view depicting the input / output electrodes on the top surface, (B) is a cross-sectional view of the A-A ′ portion in (A), and (C) is an enlarged cross-sectional view of the B portion in (B). As shown in FIG. 10, three through holes 2a to 2c are formed in a substantially rectangular parallelepiped dielectric block 1, and inner conductors are formed on the inner surfaces thereof. On the outer surface of the dielectric block 1, outer conductors 5 are formed on the other five surfaces excluding one opening surface of the through holes 2a to 2c. Input / output electrodes 6a and 6b separated from the outer conductor 5 are formed on the outer surface of the dielectric block 1 by providing spaced portions 7a and 7b.

このようにして、貫通孔2aの内面に形成した内導体の開放端付近と入出力電極6aとの間に、また貫通孔2cの内面に形成した内導体の開放端付近と入出力電極6bとの間にそれぞれ外部結合容量Ceが生じ、入出力電極6a、6bと外導体5との間にそれぞれストレー容量Csが生じる。   In this way, between the vicinity of the open end of the inner conductor formed on the inner surface of the through hole 2a and the input / output electrode 6a, the vicinity of the open end of the inner conductor formed on the inner surface of the through hole 2c, and the input / output electrode 6b Between the input / output electrodes 6a and 6b and the outer conductor 5, stray capacitances Cs are respectively generated.

このように誘電体ブロックの外面に形成した外導体に離間部7a,7bを設けることによって入出力電極を形成することは特許文献1に開示されている。また、溝によって離間部を設ける際に、その溝の深さと幅を変えることによって誘電体フィルタの特性を調整するようにしたものが特許文献2に開示されている。
特開平6−334414号公報 特開平7−15206号公報
Patent Document 1 discloses that the input / output electrodes are formed by providing the separation portions 7a and 7b on the outer conductor formed on the outer surface of the dielectric block in this manner. Japanese Patent Application Laid-Open No. H10-228473 discloses a technique in which the characteristics of the dielectric filter are adjusted by changing the depth and width of the groove when the separation portion is provided by the groove.
JP-A-6-334414 JP-A-7-15206

特許文献2に開示されている誘電体フィルタでは、外導体と入出力電極との間の離間部の深さまたは幅によって外部結合Q(Qe)を制御するようにしているが、離間部の溝深さを深くしようとすると、離間部の切削工程に要する時間がその溝深さに比例して長くなるという問題があった。   In the dielectric filter disclosed in Patent Document 2, the external coupling Q (Qe) is controlled by the depth or width of the separation portion between the outer conductor and the input / output electrode. When trying to increase the depth, there is a problem that the time required for the cutting process of the separation portion becomes longer in proportion to the groove depth.

また、上記離間部は特許文献1に開示されているように超音波振動による切削ツールによって誘電体ブロックの外面に溝を形成するものであるため、離間部の幅を制御するためには切削工具を変更する必要があり、コストがかかるという問題があった。さらに離間部の幅は、基板に対する誘電体フィルタの実装時に位置ずれが生じても、入出力電極が基板上の接地電極などと短絡しないように最低限の幅を確保しておく必要がある。そのため、離間部の幅を変更することによって特性を定める方法では、設計上または製造上の自由度が小さいという問題があった。   Moreover, since the said separation part forms a groove | channel in the outer surface of a dielectric block with the cutting tool by ultrasonic vibration as disclosed by patent document 1, in order to control the width | variety of a separation part, a cutting tool There is a problem that it is necessary to change the cost. Further, it is necessary to secure the minimum width of the separation portion so that the input / output electrode is not short-circuited with the ground electrode on the substrate even when the positional deviation occurs when the dielectric filter is mounted on the substrate. For this reason, the method of determining the characteristics by changing the width of the separation portion has a problem that the degree of freedom in design or manufacturing is small.

そこで、この発明の目的は上述の問題を解消して、入出力電極の形成に要する時間を短縮化し、製造および調整に要するコストを削減し、広範囲に亘って調整を行えるようにした誘電体共振器装置、誘電体デュプレクサ、通信装置、および誘電体共振器装置の製造方法を提供することにある。   Accordingly, an object of the present invention is to solve the above-mentioned problems, shorten the time required for forming the input / output electrodes, reduce the cost required for manufacturing and adjustment, and permit dielectric adjustment over a wide range. An object of the present invention is to provide a device, a dielectric duplexer, a communication device, and a method for manufacturing a dielectric resonator device.

この発明の共振器装置は、内面に内導体を形成した少なくとも1つの貫通孔を誘電体ブロックに設け、該誘電体ブロックの外面に外導体を形成し、前記貫通孔に形成された内導体と前記誘電体ブロックと前記外導体とで共振器を構成するとともに、前記外導体から離間して、前記共振器のいずれかに結合する入出力電極を形成し、その入出力電極と外導体膜との間を離間させる離間部にその離間部の間隙幅より狭い幅で所定深さの特性調整用溝を形成したことを特徴としている。   In the resonator device of the present invention, at least one through hole having an inner conductor formed on the inner surface is provided in the dielectric block, an outer conductor is formed on the outer surface of the dielectric block, and the inner conductor formed in the through hole The dielectric block and the outer conductor constitute a resonator, and an input / output electrode coupled to one of the resonators is formed apart from the outer conductor, the input / output electrode and the outer conductor film, A characteristic adjustment groove having a predetermined depth and a width narrower than the gap width of the separation portion is formed in the separation portion separating the gaps.

前記特性調整用溝は前記離間部の全周に亘って形成する。例えば入出力電極の外周に沿って形成する。   The characteristic adjusting groove is formed over the entire circumference of the spacing portion. For example, it is formed along the outer periphery of the input / output electrode.

この発明の誘電体デュプレクサは、送信フィルタ部と受信フィルタ部とを備え、両フィルタ部の少なくとも一方を前記構成の誘電体共振器装置で構成したことを特徴としている。   The dielectric duplexer according to the present invention includes a transmission filter unit and a reception filter unit, and at least one of the filter units is configured by the dielectric resonator device having the above-described configuration.

前記特性調整用溝は例えば入出力電極を囲む外導体の内周に沿ってその全周に亘って形成する。   The characteristic adjusting groove is formed, for example, along the inner circumference of the outer conductor surrounding the input / output electrode.

この発明の通信装置は、前記構成の誘電体共振器装置または誘電体デュプレクサを通信信号処理回路部に備えたことを特徴としている。   The communication device of the present invention is characterized in that the communication signal processing circuit unit includes the dielectric resonator device or the dielectric duplexer configured as described above.

さらにこの発明の誘電体共振器装置の製造方法は、誘電体ブロックに導電性膜を形成する工程と、その導電性膜をレーザ加工して前記離間部および特性調整用溝を形成する工程とを含むことを特徴としている。   Furthermore, the method for manufacturing a dielectric resonator device according to the present invention includes a step of forming a conductive film on the dielectric block, and a step of laser processing the conductive film to form the separation portion and the characteristic adjusting groove. It is characterized by including.

この発明によれば、入出力電極と外導体との間を離間させる離間部に、その離間部の間隙幅より狭い幅で所定深さの特性調整用溝を形成したことにより、離間部全体の溝深さを調整することによって特性を定める場合に比べて特性調整用溝の形成を短時間に行うことができる。また離間部の幅を変更することによって特性調整を行うのではないので(離間部の間隙幅を一定にできるので)、切削工具によって離間部を形成する場合にも製造コストを削減できる。また基板に対する実装時に入出力電極が短絡しないための最低限の幅を確保しても特性調整幅を広くできるので、広範囲に亘って所望の特性を得ることができる。さらに、溝幅の狭い特性調整用溝を設けるので、特性調整の微調整が容易となる。   According to the present invention, the characteristic adjusting groove having a predetermined depth and a width narrower than the gap width of the separation portion is formed in the separation portion separating the input / output electrode and the outer conductor. The characteristic adjusting groove can be formed in a shorter time than when the characteristic is determined by adjusting the groove depth. In addition, since the characteristic adjustment is not performed by changing the width of the spacing portion (since the gap width of the spacing portion can be made constant), the manufacturing cost can be reduced even when the spacing portion is formed by a cutting tool. Further, even if a minimum width is secured to prevent the input / output electrodes from being short-circuited when mounted on the substrate, the characteristic adjustment range can be widened, so that desired characteristics can be obtained over a wide range. Further, since the characteristic adjusting groove having a narrow groove width is provided, fine adjustment of the characteristic adjustment is facilitated.

また、この発明によれば、離間部の全周に亘って特性調整用溝を形成することによって、特性調整用溝の深さ当たりの外部結合Q(Qe)の変化を大きくすることができ、少ない加工量で所望の特性を得ることができる。   Further, according to the present invention, by forming the characteristic adjustment groove over the entire circumference of the separation portion, it is possible to increase the change in the external coupling Q (Qe) per depth of the characteristic adjustment groove, Desired characteristics can be obtained with a small amount of processing.

また、この発明によれば、特に入出力電極を囲む外導体の内周に沿った全周に亘って特性調整用溝を形成することによって、特性調整用溝の深さ変化に対する外部結合Q(Qe)の変化を大きくすることができ、少ない加工量で所望の特性を得ることができる。   Further, according to the present invention, the external coupling Q () against the change in the depth of the characteristic adjusting groove is formed by forming the characteristic adjusting groove over the entire circumference along the inner periphery of the outer conductor that surrounds the input / output electrodes. The change in Qe) can be increased, and desired characteristics can be obtained with a small amount of processing.

また、この発明によれば、上記構成の誘電体共振器装置を備えることによって低コストな誘電体デュプレクサが得られる。   Further, according to the present invention, a low-cost dielectric duplexer can be obtained by including the dielectric resonator device having the above configuration.

また、この発明によれば、誘電体ブロックに形成した導電性膜をレーザ加工により離間部および特性調整用溝を形成することによって製造コストが削減でき、低コストな誘電体共振器装置が得られる。   Further, according to the present invention, the manufacturing cost can be reduced by forming the separation portion and the characteristic adjusting groove by laser processing of the conductive film formed on the dielectric block, and a low cost dielectric resonator device can be obtained. .

第1の実施形態に係る誘電体共振器装置である誘電体フィルタの構成を図1を基に説明する。
図1の(A)は入出力電極を上面にして描いた斜視図、(B)は(A)におけるA−A’部分の断面図、(C)は(B)におけるB部分の拡大断面図である。(D)は3つの貫通孔2a〜2cの軸に平行な面での断面図である。
A configuration of a dielectric filter which is a dielectric resonator device according to the first embodiment will be described with reference to FIG.
1A is a perspective view drawn with the input / output electrodes on top, FIG. 1B is a cross-sectional view of the AA ′ portion in FIG. 1A, and FIG. 1C is an enlarged cross-sectional view of the B portion in FIG. It is. (D) is sectional drawing in the surface parallel to the axis | shaft of three through-holes 2a-2c.

この図1に示すように、略直方体形状の誘電体ブロック1に3つの貫通孔2a〜2cを形成していて、それらの内面に内導体4a〜4cを形成している。誘電体ブロック1の外面には、貫通孔2a〜2cの一方の開口面を除く他の五つの面に外導体5を形成している。また誘電体ブロック1の外面には、離間部7a,7bを設けることによって外導体5から分離した入出力電極6a,6bを形成している。   As shown in FIG. 1, three through holes 2a to 2c are formed in a substantially rectangular parallelepiped dielectric block 1, and inner conductors 4a to 4c are formed on the inner surfaces thereof. On the outer surface of the dielectric block 1, outer conductors 5 are formed on the other five surfaces excluding one opening surface of the through holes 2a to 2c. Input / output electrodes 6a and 6b separated from the outer conductor 5 are formed on the outer surface of the dielectric block 1 by providing spaced portions 7a and 7b.

このようにして、貫通孔2aの内面に形成した内導体4aの開放端付近と入出力電極6aとの間に、また貫通孔2cの内面に形成した内導体4cの開放端付近と入出力電極6bとの間にそれぞれ外部結合容量Ceが生じ、入出力電極6a、6bと外導体5との間にそれぞれストレー容量Csが生じる。   In this way, between the vicinity of the open end of the inner conductor 4a formed on the inner surface of the through hole 2a and the input / output electrode 6a, and the vicinity of the open end of the inner conductor 4c formed on the inner surface of the through hole 2c and the input / output electrode. The external coupling capacitance Ce is generated between the input / output electrodes 6a and 6b and the outer conductor 5, respectively.

この離間部7a,7bは後述するように外導体5に対するレーザ加工によって形成する。また入出力電極6a,6bを囲む外導体5の内周に沿って所定幅所定深さの特性調整用溝8a,8bを形成している。この特性調整用溝8a、8bの幅が一定である場合、その溝深さを深くするほど入出力電極6a,6bと外導体5との間のストレー容量が小さくなる。   The spacing portions 7a and 7b are formed by laser processing on the outer conductor 5 as will be described later. Further, characteristic adjusting grooves 8a and 8b having a predetermined width and a predetermined depth are formed along the inner periphery of the outer conductor 5 surrounding the input / output electrodes 6a and 6b. When the widths of the characteristic adjusting grooves 8a and 8b are constant, the stray capacitance between the input / output electrodes 6a and 6b and the outer conductor 5 decreases as the groove depth increases.

図2は図1に示した誘電体フィルタの等価回路図である。ここでR1,R2,R3は前記貫通孔2a〜2cの内面に形成した内導体、誘電体ブロック1、および外導体5によって構成される誘電体同軸共振器である。各貫通孔2a〜2cは開放端側の内径を短絡端側より大きくしたステップ孔としているので、これらの共振器は容量性結合する。上記特性調整用溝8a、8bの溝深さを深くするほどストレー容量Csが減少する。その結果、共振器の特性インピーダンスが大きくなるので外部結合Q(Qe)が小さくなり、外部回路との結合が強くなる。   FIG. 2 is an equivalent circuit diagram of the dielectric filter shown in FIG. Here, R1, R2, and R3 are dielectric coaxial resonators constituted by the inner conductor, the dielectric block 1, and the outer conductor 5 formed on the inner surfaces of the through holes 2a to 2c. Since each through-hole 2a-2c is a step hole whose inner diameter on the open end side is larger than that on the short-circuit end side, these resonators are capacitively coupled. The stray capacity Cs decreases as the groove depth of the characteristic adjusting grooves 8a and 8b increases. As a result, since the characteristic impedance of the resonator is increased, the external coupling Q (Qe) is decreased, and the coupling with the external circuit is increased.

図6は離間部の体積を変化させた時のQeの変化の例を示している。(1) がこの第1の実施形態に係る特性、(4) は離間部7a,7b全体の溝深さを変化させる従来の誘電体フィルタについての特性である。ここで、離間部7a,7bの間隙幅を0.4mm、離間部の溝深さを10μm、特性調整用溝8a,8bの溝幅を0. 05mmとし、その特性調整用溝7a,7bの溝深さを変化させている。離間部の体積が0. 05[mm3 ]のとき、Qeは約22であり、この離間部の体積を0. 1[mm3 ]にしたとき、Qeは約18. 7となる。これに対して(4) に示す従来例では、離間部の体積を0. 1[mm3 ]にしたとき、Qeは約20.5までしか変化しない。このようにして従来に比べて離間部の体積変化に対するQeのとり得る幅は大きく変化して、少ない調整量で所望のQe特性を得ることができる。 FIG. 6 shows an example of a change in Qe when the volume of the separation portion is changed. (1) is the characteristic according to the first embodiment, and (4) is the characteristic of a conventional dielectric filter that changes the groove depth of the entire spacing portions 7a and 7b. Here, the gap width of the separation portions 7a and 7b is 0.4 mm, the groove depth of the separation portion is 10 μm, the groove width of the characteristic adjustment grooves 8a and 8b is 0.05 mm, and the characteristic adjustment grooves 7a and 7b The groove depth is changed. When the volume of the separated portion is 0.05 [mm 3 ], Qe is about 22, and when the volume of the separated portion is 0.1 [mm 3 ], Qe is about 18.7. On the other hand, in the conventional example shown in (4), when the volume of the separation portion is set to 0.1 [mm 3 ], Qe changes only to about 20.5. In this way, the width that Qe can take with respect to the volume change of the separation portion is greatly changed as compared with the conventional case, and a desired Qe characteristic can be obtained with a small adjustment amount.

次に第2の実施形態に係る誘電体フィルタについて図3を基に説明する。
図3の(A)は入出力電極を上面にして描いた斜視図、(B)は(A)におけるA−A’部分の断面図、(C)は(B)におけるB部分の拡大断面図である。第1の実施形態では離間部の全周に亘って特性調整用溝8a,8bを形成したが、この図3に示す例では2つの入出力電極6a,6bの同一面をなす面にのみ特性調整用溝8a,8bを形成している。その他の構成は第1の実施形態の場合と同様である。
Next, a dielectric filter according to a second embodiment will be described with reference to FIG.
3A is a perspective view drawn with the input / output electrodes on top, FIG. 3B is a cross-sectional view of the AA ′ portion in FIG. 3A, and FIG. 3C is an enlarged cross-sectional view of the B portion in FIG. It is. In the first embodiment, the characteristic adjusting grooves 8a and 8b are formed over the entire circumference of the separation portion. However, in the example shown in FIG. 3, the characteristics are only given to the surfaces forming the same surface of the two input / output electrodes 6a and 6b. Adjustment grooves 8a and 8b are formed. Other configurations are the same as those in the first embodiment.

このように誘電体ブロック1の同一面にのみ特性調整用溝8a,8bを形成することにより、後に示すようにレーザ加工によってこの特性調整用溝8a,8bを形成する際に誘電体ブロック1を固定したまま、1回の工程によってその加工を行うことができるので、製造上の作業工数および作業時間を削減できる。   Thus, by forming the characteristic adjustment grooves 8a and 8b only on the same surface of the dielectric block 1, the dielectric block 1 is formed when the characteristic adjustment grooves 8a and 8b are formed by laser processing as will be described later. Since the process can be performed by one process while being fixed, it is possible to reduce the number of man-hours and time for manufacturing.

次に第3の実施形態に係る誘電体フィルタについて図4を基に説明する。
図4の(A)は入出力電極を上面にして描いた斜視図、(B)は(A)におけるA−A’部分の断面図、(C)は(B)におけるB部分の拡大断面図である。第1の実施形態では入出力電極6a,6bを囲む外導体5の内周に沿って特性調整用溝8a,8bを形成したが、この第3の実施形態では、入出力電極6a,6bの外周に沿って特性調整用溝8a,8bを形成している。その他の構成は第1の実施形態の場合と同様である。
Next, a dielectric filter according to a third embodiment will be described with reference to FIG.
4A is a perspective view drawn with the input / output electrodes on top, FIG. 4B is a cross-sectional view of the AA ′ portion in FIG. 4A, and FIG. 4C is an enlarged cross-sectional view of the B portion in FIG. It is. In the first embodiment, the characteristic adjusting grooves 8a and 8b are formed along the inner circumference of the outer conductor 5 surrounding the input / output electrodes 6a and 6b. In the third embodiment, the input / output electrodes 6a and 6b Characteristic adjusting grooves 8a and 8b are formed along the outer periphery. Other configurations are the same as those in the first embodiment.

この誘電体フィルタの離間部の体積変化に対するQeの変化は図6の(2) に示すとおりである。離間部の体積が0. 05[mm3 ]であるとき、Qeは約22であり、離間部の体積を0. 75[mm3 ]としたとき、Qeは約20となる。第1の実施形態で示したように、特性調整用溝を入出力電極6a,6bを囲む外導体5の内周に沿って形成した場合よりはQeの変化は小さいが、従来の場合に比べて充分に大きな変化を得ることができる。 The change in Qe with respect to the change in volume of the separation portion of the dielectric filter is as shown in (2) of FIG. When the volume of the separation portion is 0.05 [mm 3 ], Qe is about 22, and when the volume of the separation portion is 0.75 [mm 3 ], Qe is about 20. As shown in the first embodiment, the change in Qe is smaller than that in the case where the characteristic adjusting groove is formed along the inner periphery of the outer conductor 5 surrounding the input / output electrodes 6a and 6b, but compared with the conventional case. And a sufficiently large change can be obtained.

次に第4の実施形態に係る誘電体フィルタの構成を図5を基に説明する。
この誘電体フィルタは、入出力電極6a,6bの外周に特性調整用溝9a,9bを、入出力電極を囲む外導体5の内周のそれぞれに特性調整用溝8a,8bをそれぞれ形成している。その他の構成は第1・第3の実施形態の場合と同様である。
Next, the configuration of the dielectric filter according to the fourth embodiment will be described with reference to FIG.
In this dielectric filter, characteristic adjustment grooves 9a and 9b are formed on the outer periphery of the input / output electrodes 6a and 6b, and characteristic adjustment grooves 8a and 8b are formed on the inner periphery of the outer conductor 5 surrounding the input / output electrodes, respectively. Yes. Other configurations are the same as those in the first and third embodiments.

このように入出力電極の外周と外導体の内周の両方に特性調整用溝を設けることによって、特性調整用溝の溝深さ変化に対する全体の削除体積が増すので、より広範囲に亘ってQeの設定を行うことができる。   By providing the characteristic adjustment grooves on both the outer periphery of the input / output electrode and the inner periphery of the outer conductor in this manner, the total deleted volume with respect to the change in the groove depth of the characteristic adjustment groove is increased. Can be set.

図6の(3) はその場合の例を示している。特性調整用溝8aと9a(または8bと9b)を合わせると離間部の体積を0. 05[mm3 ]から0. 125[mm3 ]まで変化させたとき、Qeは約22から約18まで変化する。このように広範囲に亘ってQeの設定を行うことができる。 FIG. 6 (3) shows an example of such a case. When the characteristic adjusting grooves 8a and 9a (or 8b and 9b) are combined, the Qe is about 22 to about 18 when the volume of the separated portion is changed from 0.05 [mm 3 ] to 0.125 [mm 3 ]. Change. Thus, Qe can be set over a wide range.

次に第5の実施形態である誘電体デュプレクサの構成を図7を基に説明する。
図7は入出力電極を上面にして描いた斜視図である。略直方体形状の誘電体ブロック1に貫通孔2a〜2fを形成していて、それらの内面に内導体を形成している。誘電体ブロック1の外面には、貫通孔2a〜2fの一方の開口面を除く他の五つの面に外導体5を形成している。また誘電体ブロック1の外面には、離間部7a,7b,7cを設けることによって外導体5から分離した入出力電極6a,6b,6cを形成している。
Next, the configuration of a dielectric duplexer according to a fifth embodiment will be described with reference to FIG.
FIG. 7 is a perspective view drawn with the input / output electrodes on top. Through holes 2a to 2f are formed in a substantially rectangular parallelepiped dielectric block 1, and inner conductors are formed on the inner surfaces thereof. On the outer surface of the dielectric block 1, outer conductors 5 are formed on the other five surfaces excluding one opening surface of the through holes 2a to 2f. On the outer surface of the dielectric block 1, input / output electrodes 6a, 6b, 6c separated from the outer conductor 5 are formed by providing spaced portions 7a, 7b, 7c.

このようにして、貫通孔2aの内面に形成した内導体の開放端付近と入出力電極6aとの間に、また貫通孔2fの内面に形成した内導体の開放端付近と入出力電極6bとの間にそれぞれ外部結合容量Ceが生じ、入出力電極6a、6bと外導体5との間にそれぞれストレー容量Csが生じる。   In this way, between the vicinity of the open end of the inner conductor formed on the inner surface of the through hole 2a and the input / output electrode 6a, the vicinity of the open end of the inner conductor formed on the inner surface of the through hole 2f, and the input / output electrode 6b Between the input / output electrodes 6a and 6b and the outer conductor 5, stray capacitances Cs are respectively generated.

また誘電体ブロック1の内部には、その内面に内導体を形成した励振孔10を貫通孔2a〜2fに対して平行に配置している。外導体5を形成していない誘電体ブロック1の一方の開口面(以下「開放面」という。)側には励振孔10の端部で内導体と導通する外導体5を形成している。また誘電体ブロック1の短絡面側には外導体5から離間させた入出力電極6cを形成していて、励振孔10のもう一方の開口部でその内導体を入出力電極6cに導通させている。貫通孔2a〜2cのそれぞれの内面に形成した内導体、誘電体ブロック1、および外導体5によって3つの誘電体同軸共振器を構成している。これらの貫通孔2a〜2cの開放端側は短絡端よりその内径を大きくしているので、隣接する共振器間は容量性結合する。貫通孔2aによる共振器は入出力電極6aと容量性結合する。また貫通孔2cによる共振器は励振孔10とインターディジタル結合する。同様に、貫通孔2d〜2fのそれぞれの内面に形成した内導体、誘電体ブロック1、および外導体5によって3つの誘電体同軸共振器を構成している。これらの貫通孔2d〜2fの開放端側は短絡端よりその内径を大きくしているので、隣接する共振器間は容量性結合する。貫通孔2fによる共振器は入出力電極6bと容量性結合する。また貫通孔2dによる共振器は励振孔10とインターディジタル結合する。   Inside the dielectric block 1, an excitation hole 10 having an inner conductor formed on its inner surface is arranged in parallel to the through holes 2a to 2f. An outer conductor 5 that is electrically connected to the inner conductor at the end of the excitation hole 10 is formed on one opening surface (hereinafter referred to as “open surface”) side of the dielectric block 1 where the outer conductor 5 is not formed. An input / output electrode 6c spaced from the outer conductor 5 is formed on the short-circuit surface side of the dielectric block 1, and the inner conductor is conducted to the input / output electrode 6c at the other opening of the excitation hole 10. Yes. Three dielectric coaxial resonators are constituted by the inner conductor, the dielectric block 1, and the outer conductor 5 formed on the inner surfaces of the through holes 2a to 2c. Since the inner diameters of the open ends of these through holes 2a to 2c are larger than the short-circuit ends, the adjacent resonators are capacitively coupled. The resonator formed by the through hole 2a is capacitively coupled to the input / output electrode 6a. The resonator formed by the through hole 2c is interdigitally coupled to the excitation hole 10. Similarly, three dielectric coaxial resonators are constituted by the inner conductor, the dielectric block 1, and the outer conductor 5 formed on the inner surfaces of the through holes 2d to 2f. Since the inner diameters of the open ends of these through holes 2d to 2f are larger than those of the short-circuit ends, the adjacent resonators are capacitively coupled. The resonator formed by the through hole 2f is capacitively coupled to the input / output electrode 6b. The resonator formed by the through hole 2d is interdigitally coupled to the excitation hole 10.

上記貫通孔2a〜2cによる3段の共振器は送信フィルタとして作用し、貫通孔2d〜2fによる3段の共振器は受信フィルタとして作用する。したがって、この装置全体は、入出力電極6aを送信信号入力端子、入出力電極6bを受信信号出力端子、入出力電極6cをアンテナ端子とするアンテナ共用器として作用する。   The three-stage resonator formed by the through holes 2a to 2c functions as a transmission filter, and the three-stage resonator formed by the through holes 2d to 2f functions as a reception filter. Therefore, the entire apparatus functions as an antenna duplexer in which the input / output electrode 6a is a transmission signal input terminal, the input / output electrode 6b is a reception signal output terminal, and the input / output electrode 6c is an antenna terminal.

このような誘電体デュプレクサにおいて、入出力電極6a,6b部分に第1〜第4の実施形態で示した誘電体フィルタの場合と同様に特性調整用溝8a,8bを形成する。特性調整用溝8aを設けることによって、この誘電体デュプレクサの送信フィルタの入力部と送信回路の出力部との結合の強さを定める。また、特性調整用溝8bを設けることによって、この誘電体デュプレクサの受信フィルタの出力部と受信回路の入力部との結合の強さを定める。
なお、アンテナ端子としての入出力電極6cには特に特性調整用溝は設けない。この図7に示した例では、入出力電極6a,6bを外導体5から離間する離間部7a,7bの一部が誘電体ブロック1の開放面(図7の左手前の面)に繋がっているが、この部分は先のいくつかの実施形態で示したように、離間部の周囲を外導体5で囲むように離間部を設けてよい。
In such a dielectric duplexer, the characteristic adjusting grooves 8a and 8b are formed in the input / output electrodes 6a and 6b as in the case of the dielectric filter shown in the first to fourth embodiments. By providing the characteristic adjusting groove 8a, the strength of coupling between the input part of the transmission filter of the dielectric duplexer and the output part of the transmission circuit is determined. Also, by providing the characteristic adjusting groove 8b, the strength of coupling between the output part of the reception filter of the dielectric duplexer and the input part of the reception circuit is determined.
The input / output electrode 6c as an antenna terminal is not particularly provided with a characteristic adjusting groove. In the example shown in FIG. 7, a part of the separation portions 7 a and 7 b that separate the input / output electrodes 6 a and 6 b from the outer conductor 5 is connected to the open surface of the dielectric block 1 (surface on the left front side in FIG. 7). However, in this portion, as shown in some previous embodiments, the separation portion may be provided so as to surround the periphery of the separation portion with the outer conductor 5.

次に、第6の実施形態として誘電体共振器装置の製造方法について図8を参照して説明する。
図8の(A)は誘電体フィルタ100に対するレーザ加工の様子を示している。誘電体フィルタ100は。入出力電極が上面となるように所定治具のくぼみに載置して固定する。この誘電体フィルタ100を載置する部分の上部にはレーザユニット(レーザビームの照射部)90を配置している。図8の(B)はレーザ加工を行う入出力電極6a部分の平面図、(C)は(B)におけるA−A’部分の断面図である。(B′)はレーザビームスポットの走査経路を明瞭にするために、その走査経路の間隔を粗く描いた例である。
Next, a method for manufacturing a dielectric resonator device will be described as a sixth embodiment with reference to FIG.
FIG. 8A shows the state of laser processing on the dielectric filter 100. Dielectric filter 100. It is placed and fixed in a recess of a predetermined jig so that the input / output electrodes are on the upper surface. A laser unit (laser beam irradiating unit) 90 is disposed above the portion on which the dielectric filter 100 is placed. 8B is a plan view of the input / output electrode 6a portion that performs laser processing, and FIG. 8C is a cross-sectional view of the AA ′ portion in FIG. (B ′) is an example in which the scanning path interval is drawn roughly in order to clarify the scanning path of the laser beam spot.

離間部7aは、(B)において破線の矢印で示すように「コ」字型の経路を往復するようにレーザビームのスポットを走査させ、深さ10μ幅0.4mmの溝を形成する。   The spacing portion 7a scans the spot of the laser beam so as to reciprocate along the “U” -shaped path as indicated by the dashed arrow in (B), thereby forming a groove having a depth of 10 μm and a width of 0.4 mm.

また特性調整用溝8a部分には、レーザビームのスポットの走査を所定回数繰り返すことによって例えば溝幅0.05mm深さ30μmの特性調整用溝を形成する。離間部7aの間隙幅(0. 4mm)は、この誘電体フィルタを基板に実装する際に実装位置ずれの精度によって入出力電極6aが短絡しないように所定幅に定めておく。   In the characteristic adjustment groove 8a, a characteristic adjustment groove having, for example, a groove width of 0.05 mm and a depth of 30 μm is formed by repeating scanning of the laser beam spot a predetermined number of times. The gap width (0.4 mm) of the separation portion 7a is set to a predetermined width so that the input / output electrode 6a is not short-circuited due to the accuracy of mounting position deviation when the dielectric filter is mounted on the substrate.

この離間部7aの形成によって入出力電極6aを外導体5から離間させた状態で誘電体フィルタの特性を測定し、所望の誘電体フィルタ特性(Qeによって定まる特性)が得られるように、特性調整用溝8a部分を通るレーザビームスポットの走査回数を定める。この特性調整用溝8aの形成は一度に行ってもよいし、誘電体フィルタの電気的特性が所望の特性となるまで特性の測定と調整を複数回繰り返してもよい。   The characteristic adjustment is performed so that a desired dielectric filter characteristic (characteristic determined by Qe) is obtained by measuring the characteristic of the dielectric filter in a state where the input / output electrode 6a is separated from the outer conductor 5 by the formation of the separation part 7a. The number of scans of the laser beam spot passing through the groove 8a is determined. The formation of the characteristic adjusting groove 8a may be performed at once, or the measurement and adjustment of characteristics may be repeated a plurality of times until the electrical characteristics of the dielectric filter reach desired characteristics.

このように、離間部7aの間隙幅より溝幅の狭い特性調整用溝を設けるために、レーザビームスポットを面状ではなく線状に走査するだけでよいので、その特性調整の微調整が容易となる。   In this way, in order to provide the characteristic adjusting groove whose groove width is narrower than the gap width of the separating portion 7a, it is only necessary to scan the laser beam spot in a linear shape instead of a planar shape, so that fine adjustment of the characteristic adjustment is easy. It becomes.

なお、誘電体ブロック1の両側面(基板に対する実装面に垂直な2つの面)に特性調整用溝を設ける場合には、レーザビームを照射する面を図8に示したレーザユニット90に向けるように誘電体フィルタ100を立てる。   When providing the characteristic adjusting grooves on both side surfaces of the dielectric block 1 (two surfaces perpendicular to the mounting surface with respect to the substrate), the surface to be irradiated with the laser beam is directed to the laser unit 90 shown in FIG. The dielectric filter 100 is set up.

なお、図8の(B)(C)に示した例では、入出力電極を囲む外導体5の内周に沿って特性調整用溝を形成したが、入出力電極6aの外周に沿って特性調整用溝を設ける場合にも同様に適用できる。   In the example shown in FIGS. 8B and 8C, the characteristic adjusting groove is formed along the inner periphery of the outer conductor 5 surrounding the input / output electrode. However, the characteristic is adjusted along the outer periphery of the input / output electrode 6a. The same applies to the case where an adjustment groove is provided.

以上に示した各実施形態では誘電体ブロックの開放面に電極を設けていない形式の誘電体共振器装置を示したが、この開放面に、共振器間の結合用の電極を形成した形式の誘電体共振器装置にもこの発明は適用できる。また、直方体形状の誘電体ブロックの外面(六面)に外導体を形成し、貫通孔内部の端部付近または端部に内導体非形成部を設けて、その部分で開放させるとともにストレー容量を生じさせるようにした形式の誘電体共振器装置にも同様にこの発明は適用できる。   In each of the embodiments described above, a dielectric resonator device in which no electrode is provided on the open surface of the dielectric block is shown. However, an electrode for coupling between resonators is formed on the open surface. The present invention can also be applied to a dielectric resonator device. In addition, an outer conductor is formed on the outer surface (six surfaces) of a rectangular parallelepiped dielectric block, an inner conductor non-forming portion is provided near or at the end inside the through hole, and the stray capacitance is increased at that portion. The present invention is also applicable to a dielectric resonator device of the type that is generated.

次に、第7の実施形態に係る通信装置の構成例を図9を参照して説明する。
図9は通信装置の主要部の構成を示すブロック図である。この装置の送信系は電圧制御発振器(VCO)138、ミキサ134、バンドパスフィルタ133、増幅器132、アイソレータ131、デュプレクサ123の送信フィルタで構成している。ミキサ134はVCO138の発振信号と送信信号とをミキシングする。バンドパスフィルタ133はミキサ134によるミキシング信号のうち必要な送信帯域の信号を通過させる。増幅器132はその信号を増幅し、アイソレータ131を介し、更にデュプレクサ123の送信フィルタを介してアンテナ122から送信する。受信系はデュプレクサ123の受信フィルタ、増幅器135、バンドパスフィルタ136、ミキサ137、バンドパスフィルタ139で構成している。アンテナ122からの受信信号はデュプレクサ123の受信フィルタを通過し、増幅器135で増幅され、バンドパスフィルタ136で必要な受信信号帯域のみ選択される。ミキサ137はこの信号とバンドパスフィルタ139から出力されるローカル信号とをミキシングして受信回路へ出力する。
Next, a configuration example of a communication apparatus according to the seventh embodiment will be described with reference to FIG.
FIG. 9 is a block diagram showing a configuration of a main part of the communication apparatus. The transmission system of this apparatus includes a transmission filter of a voltage controlled oscillator (VCO) 138, a mixer 134, a band pass filter 133, an amplifier 132, an isolator 131, and a duplexer 123. The mixer 134 mixes the oscillation signal of the VCO 138 and the transmission signal. The band pass filter 133 passes a signal in a necessary transmission band among the mixing signals from the mixer 134. The amplifier 132 amplifies the signal and transmits it from the antenna 122 via the isolator 131 and further via the transmission filter of the duplexer 123. The reception system includes a reception filter of the duplexer 123, an amplifier 135, a band pass filter 136, a mixer 137, and a band pass filter 139. The reception signal from the antenna 122 passes through the reception filter of the duplexer 123, is amplified by the amplifier 135, and only the necessary reception signal band is selected by the band pass filter 136. The mixer 137 mixes this signal with the local signal output from the bandpass filter 139 and outputs the mixed signal to the receiving circuit.

前述の実施形態で示した構成の誘電体デュプレクサはデュプレクサ123に適用できる。また、前述した単体のフィルタをフィルタ133,136,139のいずれかに適用できる。   The dielectric duplexer having the configuration shown in the above embodiment can be applied to the duplexer 123. The single filter described above can be applied to any one of the filters 133, 136, and 139.

第1の実施形態に係る誘電体フィルタの構成を示す図The figure which shows the structure of the dielectric material filter which concerns on 1st Embodiment. 同誘電体フィルタの等価回路図Equivalent circuit diagram of the same dielectric filter 第2の実施形態に係る誘電体フィルタの構成を示す図The figure which shows the structure of the dielectric material filter concerning 2nd Embodiment. 第3の実施形態に係る誘電体フィルタの構成を示す図The figure which shows the structure of the dielectric material filter concerning 3rd Embodiment. 第4の実施形態に係る誘電体フィルタの構成を示す図The figure which shows the structure of the dielectric material filter concerning 4th Embodiment. 各実施形態の誘電体フィルタと従来技術による誘電体フィルタの離間部の体積に対するQeの関係を示す図The figure which shows the relationship of Qe with respect to the volume of the separation part of the dielectric filter of each embodiment, and the dielectric filter by a prior art 第5の実施形態に係る誘電体デュプレクサの構成を示す斜視図A perspective view showing composition of a dielectric duplexer concerning a 5th embodiment. 第6の実施形態に係る誘電体共振器装置の製造方法について示す図The figure shown about the manufacturing method of the dielectric resonator apparatus which concerns on 6th Embodiment 第7の実施形態に係る通信装置の構成を示す図The figure which shows the structure of the communication apparatus which concerns on 7th Embodiment. 従来の誘電体フィルタの構成を示す図The figure which shows the structure of the conventional dielectric filter

符号の説明Explanation of symbols

1−誘電体ブロック
2a〜2c−貫通孔
4a〜4c−内導体
5−外導体
6a,6b,6c−入出力電極
7a,7b−離間部
8a,8b−特性調整用溝
9a,9b−特性調整用溝
10−励振孔
90−レーザユニット
100−誘電体フィルタ
123−デュプレクサ
Ce−外部結合容量
Cs−ストレー容量
1-dielectric block 2a-2c-through hole 4a-4c-inner conductor 5-outer conductor 6a, 6b, 6c-input / output electrode 7a, 7b-separating portion 8a, 8b-characteristic adjusting groove 9a, 9b-characteristic adjustment Groove 10-excitation hole 90-laser unit 100-dielectric filter 123-duplexer Ce-external coupling capacitance Cs-stray capacitance

Claims (6)

内面に内導体を形成した少なくとも1つの貫通孔を誘電体ブロックに設け、該誘電体ブロックの外面に外導体を形成し、前記貫通孔に形成された内導体と前記誘電体ブロックと前記外導体とで共振器を構成するとともに、前記外導体から離間する離間部を設けて、前記共振器のいずれかに結合する入出力電極を形成した誘電体共振器装置において、
前記入出力電極と前記外導体との間を所定間隙幅で離間させる離間部に当該離間部の間隙幅より狭い幅で所定深さの特性調整用溝を形成したことを特徴とする誘電体共振器装置。
At least one through hole having an inner conductor formed on the inner surface is provided in the dielectric block, an outer conductor is formed on the outer surface of the dielectric block, the inner conductor formed in the through hole, the dielectric block, and the outer conductor. In the dielectric resonator device in which the resonator is configured with the separation portion separated from the outer conductor and the input / output electrode coupled to one of the resonators is formed,
A dielectric resonance characterized in that a characteristic adjusting groove having a width narrower than a gap width of the gap portion is formed in a gap portion separating the input / output electrode and the outer conductor with a gap width. Equipment.
前記特性調整用溝は前記離間部の全周に亘って形成した請求項1に記載の誘電体共振器装置。   The dielectric resonator device according to claim 1, wherein the characteristic adjusting groove is formed over the entire circumference of the separation portion. 前記特性調整用溝は前記入出力電極を囲む前記外導体の内周に沿って形成した請求項2に記載の誘電体共振器装置。   The dielectric resonator device according to claim 2, wherein the characteristic adjusting groove is formed along an inner periphery of the outer conductor surrounding the input / output electrode. 送信フィルタ部と受信フィルタ部とを備え、両フィルタ部のうち少なくとも一方を請求項1〜3のいずれかに記載の誘電体共振器装置で構成したことを特徴とする誘電体デュプレクサ。   A dielectric duplexer comprising a transmission filter unit and a reception filter unit, wherein at least one of the filter units is constituted by the dielectric resonator device according to claim 1. 請求項1〜3のいずれかに記載の誘電体共振器装置または請求項4に記載の誘電体デュプレクサを通信信号処理回路部に備えた通信装置。   A communication device comprising the dielectric resonator device according to claim 1 or the dielectric duplexer according to claim 4 in a communication signal processing circuit unit. 請求項1〜3のいずれかに記載の誘電体共振器装置の製造方法であって、
前記誘電体ブロックに導電性膜を形成する工程と、
該導電性膜をレーザ加工して前記離間部および特性調整用溝を形成する工程とを含む誘電体共振器装置の製造方法。
A method for manufacturing a dielectric resonator device according to any one of claims 1 to 3,
Forming a conductive film on the dielectric block;
A method of manufacturing a dielectric resonator device including a step of laser processing the conductive film to form the separation portion and the characteristic adjusting groove.
JP2003416675A 2003-12-15 2003-12-15 Dielectric resonator device, dielectric duplexer, communication device, and manufacturing method Pending JP2005176211A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020132973A1 (en) * 2018-12-26 2020-07-02 华为技术有限公司 Dielectric filter, duplexer, and communication device
CN113381717A (en) * 2021-04-29 2021-09-10 天津大学 Piezoelectric MEMS silicon resonator with beam structure, forming method thereof and electronic device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020132973A1 (en) * 2018-12-26 2020-07-02 华为技术有限公司 Dielectric filter, duplexer, and communication device
US11909086B2 (en) 2018-12-26 2024-02-20 Huawei Technologies Co., Ltd. Dielectric filter, duplexer, and communications device
CN113381717A (en) * 2021-04-29 2021-09-10 天津大学 Piezoelectric MEMS silicon resonator with beam structure, forming method thereof and electronic device

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